3.20 1P5M (TM 9KA with MIM Option B) Structure | |
============================================== | |
MIM was placed in between Metal4 and Metal5 (TOP Metal); SIN=0.042um for 1.5fF, SIN=0.062um for 1.0fF | |
.. image:: images/2_cross_section_20.png | |
:width: 600 | |
:align: center | |
:alt: 1P5M (TM 9KA with MIM Option B) Structure | |