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12.2 Six Metal Scribe Line Guard Ring Structure
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The contact and via rings should consist of the minimum size contacts/vias placed in staggered formation with separation of 0.7ยตm within each of the rings defined by the coordinates in the table below. X=0 defines the inner (die-side) edge of the guard ring structure.
The guardring structure has been divided into two groups based the packaging process difference. The guard ring in the product uses solders bumping flip-chip need to be protected from chemical attack during solder bumping process.
.. image:: images/SCRIBE_LINE1.png
:width: 900
:align: center
:alt: Scribe Lines
This diagram is a schematic describing scribe line guard ring layer for COMP, CONT, Via1 & Metal only. For detailed scribe line guard ring layout, please refer to following table.
.. csv-table::
:file: tables_clear/49_scribeline_guardring1_131.csv
:widths: 200, 150, 150 , 150
:align: center
.. image:: images/SCRIBE_LINE2.png
:width: 900
:align: center
:alt: Scribe Lines other cases
This diagram is a schematic describing scribe line guard ring layer for COMP, CONT, Via1 & Metal only. For detailed scribe line guard ring layout, please refer to following table.
.. csv-table::
:file: tables_clear/49_scribeline_guardring2_133.csv
:widths: 200, 150, 150 , 150
:align: center