| 12.2 Six Metal Scribe Line Guard Ring Structure |
| =============================================== |
| |
| The contact and via rings should consist of the minimum size contacts/vias placed in staggered formation with separation of 0.7ยตm within each of the rings defined by the coordinates in the table below. X=0 defines the inner (die-side) edge of the guard ring structure. |
| The guardring structure has been divided into two groups based the packaging process difference. The guard ring in the product uses solders bumping flip-chip need to be protected from chemical attack during solder bumping process. |
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| .. image:: images/SCRIBE_LINE1.png |
| :width: 900 |
| :align: center |
| :alt: Scribe Lines |
| |
| This diagram is a schematic describing scribe line guard ring layer for COMP, CONT, Via1 & Metal only. For detailed scribe line guard ring layout, please refer to following table. |
| |
| .. csv-table:: |
| :file: tables_clear/49_scribeline_guardring1_131.csv |
| :widths: 200, 150, 150 , 150 |
| :align: center |
| |
| .. image:: images/SCRIBE_LINE2.png |
| :width: 900 |
| :align: center |
| :alt: Scribe Lines other cases |
| |
| This diagram is a schematic describing scribe line guard ring layer for COMP, CONT, Via1 & Metal only. For detailed scribe line guard ring layout, please refer to following table. |
| |
| .. csv-table:: |
| :file: tables_clear/49_scribeline_guardring2_133.csv |
| :widths: 200, 150, 150 , 150 |
| :align: center |
| |