| #,PARAMETERS,XTORS,DIMENSIONS / COMMENTS,MIN,TYP,MAX,UNITS | |
| 2,Contact Resistance,,,,,, | |
| ,M1-Poly (salicided),,0.22 x0.22,--,5.9,15,Ω/cont | |
| ,M1-N+ (salicided),,0.22 x0.22,--,6.3,15,Ω/cont | |
| ,M1-P+ (salicided),,0.22 x0.22,--,5.2,15,Ω/cont | |
| ,Via 1,,0.26 x 0.26,--,4.5,15,Ω/via | |
| ,Via 2,,0.26 x 0.26,--,4.5,15,Ω/via | |
| ,Via 3,,0.26 x 0.26,--,4.5,15,Ω/via | |
| ,Via 4,,0.26 x 0.26,--,4.5,15,Ω/via | |
| ,Via 5 (Top Via),,0.26 x 0.26,--,4.5,15,Ω/via |