3.16 1P6M (TM 9KA with MIM) Structure | |
===================================== | |
MIM was placed in between Metal2 and Metal3; SIN=0.042um for 1.5fF, SIN=0.062um for 1.0fF | |
.. image:: images/2_cross_section_16.png | |
:width: 600 | |
:align: center | |
:alt: 1P6M (TM 9KA with MIM) Structure | |