3.14 1P6M (TM 6KA with MIM) Structure | |
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MIM was placed in between Metal2 and Metal3; SIN=0.042um for 1.5fF, SIN=0.062um for 1.0fF | |
.. image:: images/2_cross_section_14.png | |
:width: 600 | |
:align: center | |
:alt: 1P6M (TM 6KA with MIM) Structure | |