| #,PARAMETERS,SLM_ID,DIMENSIONS / COMMENTS,MIN,TYP,MAX,UNITS |
| 1,Capacitance,MIM1,"Zero bias capacitance from 350X50 |
| |
| sq. um capacitor.",0.9,1,1.1,fF/um2 |
| 2,Leakage current,MIM1,@ V=16V,--,--,1,pA/um2 |
| 3,BVox,MIM1,(@10uA),20,40,--,V |
| 4,"Voltage Coefficient, Vc1",\*Test Chip,@ V € (-6 – +6V),4.5,6,7.5,ppm/V |
| 5,Temp Coefficient (TC1),\*Test Chip,,,10,20,ppm/K |
| 6,Sheet res. bottom plate,\*Test Chip,,68,80,92,m./sq |
| 7,Sheet res. top plate,\*Test Chip,,400,500,600,m./sq |
| 8,Matching (adjacent capacitors),\*Test Chip,"C = 1pF (Laid out as per |
| |
| characterization report guideline)",--,--,1,% |
| 9,"Max Operating voltage across |
| |
| MIM Cap",,,--,--,20,V |
