| RULE NO.,DESCRIPTION ,"LAYOUT |
| RULE" |
| MSLOT.1,Maximum metal width without slotting,30 |
| MSLOT.2,Minimum slot width (slot mark layers),2 |
| MSLOT.3,Slot length (slot mark layers), |
| ,a. Minimum,10 |
| ,b. Maximum,250 |
| MSLOT.4,Slot space (slot mark layers), |
| ,a. Minimum,10 |
| ,b. Maximum,30 |
| MSLOT.5,Minimum slot (slot mark layers) to metal edge spacing,10 |
| MSLOT.6,"For multiple slots that spans the metal width, slots should be staggered.", |
| MSLOT.7,Minimum space from via-n to metal-n slot,0.2 |
| MSLOT.8,Minimum space from via-(n-1) / contact to metal-n slot,0.2 |
| ,(a) MetalTop area directly under the Pad, |
| ,(b) MIM bottom plate directly under FuseTop, |
| ,(c) MetalTop directly under FuseWindow_D, |
| ,(d) Metal3 area (for MIM top plate connection) directly enclosed by FuseTop, |
| ,(e) MetalTop area directly under UBM layers, |
| ,Minimum distance to these layers,5 |
| MSLOT.10,"Slot mark layer on the metal hole (same metal level, |
| |
| e.g. Metal1_Slot on the Metal1 hole) are not allowed", |
