| Ring,"Starting | |
| Coordinate","Ending | |
| Coordinate",Size (μm) | |
| PCOMP,0,16,16 | |
| "GUARD_R | |
| ING_MK",0,16,16 | |
| AD,0,16,16 | |
| Contact,3.7,3.92,0.22 | |
| Contact,5.3,5.52,0.22 | |
| Contact,6.9,7.12,0.22 | |
| Contact,8.5,8.72,0.22 | |
| Contact,10.1,10.32,0.22 | |
| Contact,11.7,11.92,0.22 | |
| Metal1,1,13,12 | |
| Via1,4.44,4.7,0.26 | |
| Via1,6.24,6.5,0.26 | |
| Via1,8.04,8.3,0.26 | |
| Via1,9.84,10.1,0.26 | |
| Via1,11.64,11.9,0.26 | |
| Metal2,0,13,13 | |
| Via2,3,3.26,0.26 | |
| Via2,4.8,5.06,0.26 | |
| Via2,6.6,6.86,0.26 | |
| Via2,8.4,8.66,0.26 | |
| Via2,10.2,10.46,0.26 | |
| Via2,12,12.26,0.26 | |
| Metal3,1,13,12 | |
| Via3,4.08,4.34,0.26 | |
| Via3,5.88,6.14,0.26 | |
| Via3,7.68,7.94,0.26 | |
| Via3,9.48,9.74,0.26 | |
| Via3,11.28,11.54,0.26 | |
| Metal4,0,13,13 | |
| Via4,3.36,3.62,0.26 | |
| Via4,5.16,5.42,0.26 | |
| Via4,6.96,7.22,0.26 | |
| Via4,8.76,9.02,0.26 | |
| Via4,10.56,10.82,0.26 | |
| Via4,12.36,12.62,0.26 | |
| Metal5,1,13,12 | |
| Via5,3.72,3.98,0.26 | |
| Via5,5.52,5.78,0.26 | |
| Via5,7.32,7.58,0.26 | |
| Via5,9.12,9.38,0.26 | |
| Via5,10.92,11.18,0.26 | |
| MetalTop,0,13,13 |