| #,PARAMETERS,SLM_ID,DIMENSIONS / COMMENTS,MIN,TYP,MAX,UNITS |
| 1,Capacitance,MIM2\*,"Zero bias capacitance from 350X50 |
| |
| sq. um capacitor.",1.8,2,2.2,fF/um2 |
| 2,Leakage current,MIM2\*,@ V=6V,--,--,1,pA/um2 |
| 3,BVox,MIM2\*,(@10uA),10,24,,V |
| 4,"Voltage Coefficient, Vc1",\*Test Chip,@ V € (-6 – +6V),--,-28.8,--,ppm/V |
| 5,Temp Coefficient (TC1),\*Test Chip,,--,18.8,--,ppm/K |
| 6,Sheet res. bottom plate,\*Test Chip,,68,80,92,m./sq |
| 7,Sheet res. top plate,\*Test Chip,,--,--,--,m./sq |
| 8,Matching (adjacent capacitors),\*Test Chip,"C = 1pF (Laid out as per |
| |
| characterization report guideline)",--,--,1,% |
| 9,"Max Operating voltage across |
| |
| MIM Cap",,,--,--,6.6,V |
