| #,PARAMETERS,SLM_ID,DIMENSIONS / COMMENTS,MIN,TYP,MAX,UNITS |
| 1,Capacitance,MIM2\*,"Zero bias capacitance from |
| |
| 350X50 sq. um capacitor.",1.27,1.5,1.73,fF/um2 |
| 2,Leakage current,MIM2\*,@ V=6V,--,--,1,pA/um2 |
| 3,BVox,MIM2\*,(@10uA),10,30,--,V |
| 4,"Voltage Coefficient, Vc1",\*Test Chip,@ V € (-6 – +6V),5.7,7.6,9.5,ppm/V |
| 5,Temp Coefficient (TC1),\*Test Chip,(@10uA),9.9,13.3,16.6,ppm/K |
| 6,Sheet res. bottom plate,\*Test Chip,,68,80,92,m./sq |
| 7,Sheet res. top plate,\*Test Chip,,400,500,600,m./sq |
| 8,Matching (adjacent capacitors),\*Test Chip,"C = 1pF (Laid out as per |
| |
| characterization report guideline)",--,--,1,% |
| 9,"Max Operating voltage across |
| |
| MIM Cap",\*Test Chip,,--,--,10V,V |
