| #,PARAMETERS,SLM_ID,DIMENSIONS / COMMENTS,MIN,TYP,MAX,UNITS | |
| 1,Rsheet (Sheet Resistance),SAB RES2,W = 10um (to monitor film Rs),800,1000,1200,□/sq | |
| 2,Temp. Coeff. TCR1,\*Test Chip,"W > 3um,",-1200,-1000,-800,ppm/K | |
| 3,"Voltage Coeff, VCR1",\*Test Chip,"W > 3um,",\*,-200,\*,ppm/V |