| "Dielectric |
| |
| Layer","Thickness (um) |
| |
| for Typical |
| |
| Capacitance","Thickness (um) |
| |
| for the Best |
| |
| Capacitance","Thickness (um) for |
| |
| the Worst |
| |
| Capacitance","Dielectric |
| |
| Constant" |
| Nit_pasvn,0.3,0.27,0.33,7 |
| Oxd_pasvn (6KA),1.4025,1.5425,1.2625,4 |
| Oxd_pasvn (9KA),2.0025,1.8028,2.2022,4 |
| Oxd_pasvn (11KA),2.3,2,2.6,4 |
| Oxd_pasvn (30kA),3.3,3,3.6,4 |
| IMD5 (with MIM),1.45,1.537,1.363,4 |
| IMD5,1.15,1.219,1.081,4 |
| IMD4 (with MIM),1.45,1.537,1.363,4 |
| IMD4,1.15,1.219,1.081,4 |
| IMD3 (with MIM),1.45,1.537,1.363,4 |
| IMD3,1.15,1.219,1.081,4 |
| IMD2 (with MIM),1.45,1.537,1.363,4 |
| MIM_SIN (1.5fF),0.042,0.05,0.03,7 |
| MIM_SIN(1.0fF),0.062,0.07,0.05,7 |
| IMD2,1.15,1.219,1.081,4 |
| IMD1,1.15,1.219,1.081,4 |
| ILD,0.86,0.95,0.77,4 |
| Nitr liner,0.05,0.0525,0.0475,7 |
| STI,0.32,0.368,0.272,4 |
