blob: 329923505b6d68291556b0611ef5b4be90923ede [file] [log] [blame]
3.30 1P5M (TM 30KA with MIM Option B) Structure
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MIM was placed in between Metal4 and Metal5 (TOP Metal); SIN=0.042um for 1.5fF, SIN=0.062um for 1.0fF
.. image:: images/2_cross_section_30.png
:width: 600
:align: center
:alt: 1P5M (TM 30KA with MIM Option B) Structure