| RULE NO.,DESCRIPTION,LAYOUT RULE |
| Layer,Vn --- Vian (where n = 1 to 5), |
| Vn.1,Min/max Vian size (1 <= n <= 5),0.26 |
| Vn.2a,Space (1 <= n <= 5),0.26 |
| Vn.2b,Vian Space in 4x4 or larger Vian array,0.36 |
| Vn.3,"Metaln (where n=1 to 5) overlap of Vian |
| |
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| i. Metaln (< 0.34μm) end-of-line overlap (1) |
| |
| ii. If Metaln overlap Vian by < 0.04μm on one side, adjacent Metaln edges overlap |
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| iii. Minimum Metaln overlap of Vian on all sides for minimum Vian resistance |
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| variation (guideline)*","0.00 (n = 1) |
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| 0.01 (2 <= n <= 5) |
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| 0.06 |
| |
| 0.06 |
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| 0.12" |
| Vn.4,"Metal [n+1] overlap of Vian |
| |
| i. Metal [n+1] (< 0.34μm) end-of-line overlap1 |
| |
| ii. If Metal [n+1] overlap Vian by < 0.04μm on one side, adjacent Metal [n+1] edges overlap |
| |
| iii. Minimum Metal[n+1] overlap of Vian on all sides for minimum Vian resistance |
| |
| variation (guideline)*","0.01 |
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| 0.06 |
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| 0.06 |
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| 0.12" |
| Vn.5*,Vian stack (2) over contact is permitted, |