dependencies/pdks/volare/sky130/versions/0059588eebfc704681dc2368bd1d33d96281d10f/sky130A/libs.tech/openlane/rules.openrcx.sky130A.nom.calibre

Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.0684492
0 0.29 0 0.0684492
0 0.46 0 0.0684492
0 0.665 0 0.0684492
0 0.75 0 0.0684492
0 0.92 0 0.0684492
0 1.125 0 0.0684492
0 1.21 0 0.0684492
0 1.38 0 0.0684492
0 1.84 0 0.0684492
0.29 0.29 0 0.0684492
0.29 0.46 0 0.0684492
0.29 0.665 0 0.0684492
0.29 0.75 0 0.0684492
0.29 0.92 0 0.0684492
0.29 1.125 0 0.0684492
0.29 1.21 0 0.0684492
0.29 1.38 0 0.0684492
0.29 1.84 0 0.0684492
0.46 0.46 0 0.0684492
0.46 0.665 0 0.0684492
0.46 0.75 0 0.0684492
0.46 0.92 0 0.0684492
0.46 1.125 0 0.0684492
0.46 1.21 0 0.0684492
0.46 1.38 0 0.0684492
0.46 1.84 0 0.0684492
0.665 0.665 0 0.0684492
0.665 0.75 0 0.0684492
0.665 0.92 0 0.0684492
0.665 1.125 0 0.0684492
0.665 1.21 0 0.0684492
0.665 1.38 0 0.0684492
0.665 1.84 0 0.0684492
0.75 0.75 0 0.0684492
0.75 0.92 0 0.0684492
0.75 1.125 0 0.0684492
0.75 1.21 0 0.0684492
0.75 1.38 0 0.0684492
0.75 1.84 0 0.0684492
0.92 0.92 0 0.0684492
0.92 1.125 0 0.0684492
0.92 1.21 0 0.0684492
0.92 1.38 0 0.0684492
0.92 1.84 0 0.0684492
1.125 1.125 0 0.0684492
1.125 1.21 0 0.0684492
1.125 1.38 0 0.0684492
1.125 1.84 0 0.0684492
1.21 1.21 0 0.0684492
1.21 1.38 0 0.0684492
1.21 1.84 0 0.0684492
1.38 1.38 0 0.0684492
1.38 1.84 0 0.0684492
1.84 0 1.84 0.0684492
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 7.95044e-05 1.24225e-05 0.0342246
0.34 4.94413e-05 1.4973e-05 0.0342246
0.425 4.30439e-05 1.61635e-05 0.0342246
0.51 3.80924e-05 1.73007e-05 0.0342246
0.595 3.39877e-05 1.8387e-05 0.0342246
0.68 3.05504e-05 1.94245e-05 0.0342246
0.765 2.76742e-05 2.04152e-05 0.0342246
0.85 2.52543e-05 2.13613e-05 0.0342246
1.02 2.14414e-05 2.3127e-05 0.0342246
1.36 1.64505e-05 2.62013e-05 0.0342246
1.7 1.3421e-05 2.87487e-05 0.0342246
2.04 0 4.2232e-05 0.0342246
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 7.49958e-05 2.74249e-05 0.0342246
0.34 4.25069e-05 3.39068e-05 0.0342246
0.425 3.52213e-05 3.65111e-05 0.0342246
0.51 2.98153e-05 3.8774e-05 0.0342246
0.595 2.55569e-05 4.07458e-05 0.0342246
0.68 2.21426e-05 4.24692e-05 0.0342246
0.765 1.93856e-05 4.39801e-05 0.0342246
0.85 1.71395e-05 4.53093e-05 0.0342246
1.02 1.37592e-05 4.75218e-05 0.0342246
1.36 9.71052e-06 5.06721e-05 0.0342246
1.7 7.52534e-06 5.27542e-05 0.0342246
2.04 0 6.04024e-05 0.0342246
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 7.8161e-05 1.84714e-05 0.0342246
0.34 4.63794e-05 2.28087e-05 0.0342246
0.425 3.93875e-05 2.47171e-05 0.0342246
0.51 3.40959e-05 2.64722e-05 0.0342246
0.595 2.97969e-05 2.80871e-05 0.0342246
0.68 2.62377e-05 2.95739e-05 0.0342246
0.765 2.32718e-05 3.09438e-05 0.0342246
0.85 2.07773e-05 3.22065e-05 0.0342246
1.02 1.68459e-05 3.44464e-05 0.0342246
1.36 1.17537e-05 3.79903e-05 0.0342246
1.7 8.79687e-06 4.0593e-05 0.0342246
2.04 0 4.94785e-05 0.0342246
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 7.8755e-05 1.48974e-05 0.0342246
0.34 4.7364e-05 1.84157e-05 0.0342246
0.425 4.06147e-05 2.00108e-05 0.0342246
0.51 3.55322e-05 2.15059e-05 0.0342246
0.595 3.13951e-05 2.29074e-05 0.0342246
0.68 2.79539e-05 2.42214e-05 0.0342246
0.765 2.50678e-05 2.54535e-05 0.0342246
0.85 2.26197e-05 2.66091e-05 0.0342246
1.02 1.86967e-05 2.87094e-05 0.0342246
1.36 1.34139e-05 3.2185e-05 0.0342246
1.7 1.01678e-05 3.48805e-05 0.0342246
2.04 0 4.50102e-05 0.0342246
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 7.89071e-05 1.42946e-05 0.0342246
0.34 4.78104e-05 1.73763e-05 0.0342246
0.425 4.10868e-05 1.87929e-05 0.0342246
0.51 3.61324e-05 2.01326e-05 0.0342246
0.595 3.21136e-05 2.13996e-05 0.0342246
0.68 2.87766e-05 2.25977e-05 0.0342246
0.765 2.59792e-05 2.37308e-05 0.0342246
0.85 2.36039e-05 2.48023e-05 0.0342246
1.02 1.97794e-05 2.67738e-05 0.0342246
1.36 1.45452e-05 3.01121e-05 0.0342246
1.7 1.12318e-05 3.27783e-05 0.0342246
2.04 0 4.38844e-05 0.0342246
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 7.89202e-05 1.2984e-05 0.0342246
0.34 4.78681e-05 1.58925e-05 0.0342246
0.425 4.11257e-05 1.72358e-05 0.0342246
0.51 3.62093e-05 1.85102e-05 0.0342246
0.595 3.22464e-05 1.97192e-05 0.0342246
0.68 2.89657e-05 2.0866e-05 0.0342246
0.765 2.62201e-05 2.19537e-05 0.0342246
0.85 2.38899e-05 2.29853e-05 0.0342246
1.02 2.01333e-05 2.48917e-05 0.0342246
1.36 1.49579e-05 2.81467e-05 0.0342246
1.7 1.16402e-05 3.07746e-05 0.0342246
2.04 0 4.22429e-05 0.0342246
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 3.07588e-05 0.0342246
0.17 0 2.41581e-05 0.0342246
0.34 0 2.04739e-05 0.0342246
0.425 0 1.88875e-05 0.0342246
0.51 0 1.74491e-05 0.0342246
0.595 0 1.61442e-05 0.0342246
0.68 0 1.49595e-05 0.0342246
0.765 0 1.38831e-05 0.0342246
0.85 0 1.29044e-05 0.0342246
1.02 0 1.12026e-05 0.0342246
1.36 0 8.60814e-06 0.0342246
1.7 0 6.78627e-06 0.0342246
2.04 0 5.48134e-06 0.0342246
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 1.49199e-05 0.0342246
0.17 0 1.32024e-05 0.0342246
0.34 0 1.21466e-05 0.0342246
0.425 0 1.16516e-05 0.0342246
0.51 0 1.11773e-05 0.0342246
0.595 0 1.07228e-05 0.0342246
0.68 0 1.02872e-05 0.0342246
0.765 0 9.86982e-06 0.0342246
0.85 0 9.46985e-06 0.0342246
1.02 0 8.71919e-06 0.0342246
1.36 0 7.39646e-06 0.0342246
1.7 0 6.2803e-06 0.0342246
2.04 0 5.74614e-06 0.0342246
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 9.762e-06 0.0342246
0.17 0 9.85223e-06 0.0342246
0.34 0 9.382e-06 0.0342246
0.425 0 9.15553e-06 0.0342246
0.51 0 8.93461e-06 0.0342246
0.595 0 8.71913e-06 0.0342246
0.68 0 8.50894e-06 0.0342246
0.765 0 8.30389e-06 0.0342246
0.85 0 8.10392e-06 0.0342246
1.02 0 7.71854e-06 0.0342246
1.36 0 7.00291e-06 0.0342246
1.7 0 6.35499e-06 0.0342246
2.04 0 5.924e-06 0.0342246
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 5.9301e-06 0.0342246
0.17 0 6.13045e-06 0.0342246
0.34 0 5.93099e-06 0.0342246
0.425 0 5.83372e-06 0.0342246
0.51 0 5.73809e-06 0.0342246
0.595 0 5.64406e-06 0.0342246
0.68 0 5.55157e-06 0.0342246
0.765 0 5.46064e-06 0.0342246
0.85 0 5.37121e-06 0.0342246
1.02 0 5.19679e-06 0.0342246
1.36 0 4.86503e-06 0.0342246
1.7 0 4.55478e-06 0.0342246
2.04 0 4.33518e-06 0.0342246
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00123763
0 0.2 0 0.00123763
0 0.34 0 0.00123763
0 0.47 0 0.00123763
0 0.54 0 0.00123763
0 0.68 0 0.00123763
0 0.81 0 0.00123763
0 0.88 0 0.00123763
0 1.02 0 0.00123763
0 1.36 0 0.00123763
0.2 0.2 0 0.00123763
0.2 0.34 0 0.00123763
0.2 0.47 0 0.00123763
0.2 0.54 0 0.00123763
0.2 0.68 0 0.00123763
0.2 0.81 0 0.00123763
0.2 0.88 0 0.00123763
0.2 1.02 0 0.00123763
0.2 1.36 0 0.00123763
0.34 0.34 0 0.00123763
0.34 0.47 0 0.00123763
0.34 0.54 0 0.00123763
0.34 0.68 0 0.00123763
0.34 0.81 0 0.00123763
0.34 0.88 0 0.00123763
0.34 1.02 0 0.00123763
0.34 1.36 0 0.00123763
0.47 0.47 0 0.00123763
0.47 0.54 0 0.00123763
0.47 0.68 0 0.00123763
0.47 0.81 0 0.00123763
0.47 0.88 0 0.00123763
0.47 1.02 0 0.00123763
0.47 1.36 0 0.00123763
0.54 0.54 0 0.00123763
0.54 0.68 0 0.00123763
0.54 0.81 0 0.00123763
0.54 0.88 0 0.00123763
0.54 1.02 0 0.00123763
0.54 1.36 0 0.00123763
0.68 0.68 0 0.00123763
0.68 0.81 0 0.00123763
0.68 0.88 0 0.00123763
0.68 1.02 0 0.00123763
0.68 1.36 0 0.00123763
0.81 0.81 0 0.00123763
0.81 0.88 0 0.00123763
0.81 1.02 0 0.00123763
0.81 1.36 0 0.00123763
0.88 0.88 0 0.00123763
0.88 1.02 0 0.00123763
0.88 1.36 0 0.00123763
1.02 1.02 0 0.00123763
1.02 1.36 0 0.00123763
1.36 0 1.36 0.00123763
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0.000105491 9.52417e-06 0.000618813
0.28 8.15844e-05 1.17812e-05 0.000618813
0.35 6.91015e-05 1.27853e-05 0.000618813
0.42 6.33053e-05 1.36215e-05 0.000618813
0.49 5.74726e-05 1.44576e-05 0.000618813
0.56 5.16035e-05 1.52937e-05 0.000618813
0.63 4.61667e-05 1.61043e-05 0.000618813
0.7 4.38475e-05 1.67435e-05 0.000618813
0.84 3.91906e-05 1.80221e-05 0.000618813
1.12 3.01751e-05 2.05277e-05 0.000618813
1.4 2.63688e-05 2.23064e-05 0.000618813
1.68 0 4.66363e-05 0.000618813
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0.000101639 1.95764e-05 0.000618813
0.28 7.49221e-05 2.3912e-05 0.000618813
0.35 6.37407e-05 2.58302e-05 0.000618813
0.42 5.67181e-05 2.75512e-05 0.000618813
0.49 5.03869e-05 2.9167e-05 0.000618813
0.56 4.46012e-05 3.0686e-05 0.000618813
0.63 3.94836e-05 3.21027e-05 0.000618813
0.7 3.62637e-05 3.33522e-05 0.000618813
0.84 3.0718e-05 3.56304e-05 0.000618813
1.12 2.22067e-05 3.94314e-05 0.000618813
1.4 1.8125e-05 4.21334e-05 0.000618813
1.68 0 5.93213e-05 0.000618813
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0.00010035 2.56842e-05 0.000618813
0.28 7.34796e-05 3.1683e-05 0.000618813
0.35 6.17938e-05 3.42158e-05 0.000618813
0.42 5.43549e-05 3.64512e-05 0.000618813
0.49 4.76987e-05 3.84952e-05 0.000618813
0.56 4.16775e-05 4.03684e-05 0.000618813
0.63 3.64041e-05 4.20758e-05 0.000618813
0.7 3.31057e-05 4.35607e-05 0.000618813
0.84 2.75407e-05 4.61763e-05 0.000618813
1.12 1.92791e-05 5.02805e-05 0.000618813
1.4 1.55663e-05 5.30002e-05 0.000618813
1.68 0 6.78454e-05 0.000618813
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000104872 1.28461e-05 0.000618813
0.28 7.83225e-05 1.60707e-05 0.000618813
0.35 6.71745e-05 1.75336e-05 0.000618813
0.42 6.0278e-05 1.8858e-05 0.000618813
0.49 5.39577e-05 2.01321e-05 0.000618813
0.56 4.80915e-05 2.13587e-05 0.000618813
0.63 4.28293e-05 2.25275e-05 0.000618813
0.7 3.94561e-05 2.35671e-05 0.000618813
0.84 3.35131e-05 2.55285e-05 0.000618813
1.12 2.40959e-05 2.90125e-05 0.000618813
1.4 1.92691e-05 3.16726e-05 0.000618813
1.68 0 4.95532e-05 0.000618813
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000105693 1.12747e-05 0.000618813
0.28 7.91695e-05 1.37895e-05 0.000618813
0.35 6.82875e-05 1.49421e-05 0.000618813
0.42 6.16389e-05 1.59834e-05 0.000618813
0.49 5.55945e-05 1.69995e-05 0.000618813
0.56 5.00074e-05 1.79914e-05 0.000618813
0.63 4.49645e-05 1.89471e-05 0.000618813
0.7 4.17514e-05 1.97938e-05 0.000618813
0.84 3.5992e-05 2.14241e-05 0.000618813
1.12 2.65727e-05 2.44291e-05 0.000618813
1.4 2.14892e-05 2.67989e-05 0.000618813
1.68 0 4.64264e-05 0.000618813
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000106027 9.98636e-06 0.000618813
0.28 7.91192e-05 1.22769e-05 0.000618813
0.35 6.85367e-05 1.33318e-05 0.000618813
0.42 6.19114e-05 1.42886e-05 0.000618813
0.49 5.5906e-05 1.5225e-05 0.000618813
0.56 5.04434e-05 1.61415e-05 0.000618813
0.63 4.55504e-05 1.70273e-05 0.000618813
0.7 4.23191e-05 1.78163e-05 0.000618813
0.84 3.65586e-05 1.93419e-05 0.000618813
1.12 2.72076e-05 2.21759e-05 0.000618813
1.4 2.19658e-05 2.44487e-05 0.000618813
1.68 0 4.43986e-05 0.000618813
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 3.87724e-05 0.000618813
0.14 0 3.5288e-05 0.000618813
0.28 0 3.2529e-05 0.000618813
0.35 0 3.07802e-05 0.000618813
0.42 0 2.91723e-05 0.000618813
0.49 0 2.76937e-05 0.000618813
0.56 0 2.63336e-05 0.000618813
0.63 0 2.50825e-05 0.000618813
0.7 0 2.39269e-05 0.000618813
0.84 0 2.18797e-05 0.000618813
1.12 0 1.8688e-05 0.000618813
1.4 0 1.34673e-05 0.000618813
1.68 0 9.24798e-06 0.000618813
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 2.04874e-05 0.000618813
0.14 0 2.17715e-05 0.000618813
0.28 0 2.21394e-05 0.000618813
0.35 0 2.17243e-05 0.000618813
0.42 0 2.13154e-05 0.000618813
0.49 0 2.09128e-05 0.000618813
0.56 0 2.05168e-05 0.000618813
0.63 0 2.01275e-05 0.000618813
0.7 0 1.97336e-05 0.000618813
0.84 0 1.89688e-05 0.000618813
1.12 0 1.57487e-05 0.000618813
1.4 0 1.24872e-05 0.000618813
1.68 0 1.01329e-05 0.000618813
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 1.27953e-05 0.000618813
0.14 0 1.52133e-05 0.000618813
0.28 0 1.60288e-05 0.000618813
0.35 0 1.58591e-05 0.000618813
0.42 0 1.56896e-05 0.000618813
0.49 0 1.55206e-05 0.000618813
0.56 0 1.5352e-05 0.000618813
0.63 0 1.51843e-05 0.000618813
0.7 0 1.50045e-05 0.000618813
0.84 0 1.4651e-05 0.000618813
1.12 0 1.21509e-05 0.000618813
1.4 0 9.42359e-06 0.000618813
1.68 0 7.32937e-06 0.000618813
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.02463e-05 0.000618813
0.14 0 9.62649e-06 0.000618813
0.28 0 9.47347e-06 0.000618813
0.35 0 9.39834e-06 0.000618813
0.42 0 9.32411e-06 0.000618813
0.49 0 9.25081e-06 0.000618813
0.56 0 9.17837e-06 0.000618813
0.63 0 9.10682e-06 0.000618813
0.7 0 9.03615e-06 0.000618813
0.84 0 8.89733e-06 0.000618813
1.12 0 8.62968e-06 0.000618813
1.4 0 8.37465e-06 0.000618813
1.68 0 6.44347e-06 0.000618813
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 9.6769e-05 3.47977e-05 0.000618813
0.28 6.80486e-05 4.32744e-05 0.000618813
0.35 5.64442e-05 4.67482e-05 0.000618813
0.42 4.81231e-05 4.97774e-05 0.000618813
0.49 4.1136e-05 5.2458e-05 0.000618813
0.56 3.52e-05 5.48364e-05 0.000618813
0.63 3.0211e-05 5.69445e-05 0.000618813
0.7 2.66463e-05 5.87779e-05 0.000618813
0.84 2.10525e-05 6.18763e-05 0.000618813
1.12 1.37915e-05 6.63706e-05 0.000618813
1.4 1.0454e-05 6.92185e-05 0.000618813
1.68 0 7.9507e-05 0.000618813
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000101147 2.21242e-05 0.000618813
0.28 7.29377e-05 2.77156e-05 0.000618813
0.35 6.21108e-05 3.01407e-05 0.000618813
0.42 5.42742e-05 3.23344e-05 0.000618813
0.49 4.74882e-05 3.43453e-05 0.000618813
0.56 4.15446e-05 3.61883e-05 0.000618813
0.63 3.64012e-05 3.78952e-05 0.000618813
0.7 3.25864e-05 3.94815e-05 0.000618813
0.84 2.63444e-05 4.22501e-05 0.000618813
1.12 1.77073e-05 4.66977e-05 0.000618813
1.4 1.32797e-05 4.98784e-05 0.000618813
1.68 0 6.26557e-05 0.000618813
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000101663 2.06008e-05 0.000618813
0.28 7.36569e-05 2.54669e-05 0.000618813
0.35 6.31645e-05 2.75724e-05 0.000618813
0.42 5.56154e-05 2.94937e-05 0.000618813
0.49 4.90883e-05 3.12846e-05 0.000618813
0.56 4.33665e-05 3.29553e-05 0.000618813
0.63 3.83826e-05 3.45088e-05 0.000618813
0.7 3.467e-05 3.5917e-05 0.000618813
0.84 2.85113e-05 3.84597e-05 0.000618813
1.12 1.9754e-05 4.26236e-05 0.000618813
1.4 1.50513e-05 4.56778e-05 0.000618813
1.68 0 5.99398e-05 0.000618813
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000101842 1.96553e-05 0.000618813
0.28 7.36578e-05 2.42094e-05 0.000618813
0.35 6.3361e-05 2.62056e-05 0.000618813
0.42 5.58743e-05 2.80505e-05 0.000618813
0.49 4.94069e-05 2.97728e-05 0.000618813
0.56 4.37764e-05 3.13818e-05 0.000618813
0.63 3.8888e-05 3.28807e-05 0.000618813
0.7 3.51848e-05 3.42446e-05 0.000618813
0.84 2.90442e-05 3.67126e-05 0.000618813
1.12 2.03156e-05 4.07722e-05 0.000618813
1.4 1.55133e-05 4.37812e-05 0.000618813
1.68 0 5.84154e-05 0.000618813
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.00123763
0 0.32 0 0.00123763
0 0.46 0 0.00123763
0 0.71 0 0.00123763
0 0.78 0 0.00123763
0 0.92 0 0.00123763
0 1.17 0 0.00123763
0 1.24 0 0.00123763
0 1.38 0 0.00123763
0 1.84 0 0.00123763
0.32 0.32 0 0.00123763
0.32 0.46 0 0.00123763
0.32 0.71 0 0.00123763
0.32 0.78 0 0.00123763
0.32 0.92 0 0.00123763
0.32 1.17 0 0.00123763
0.32 1.24 0 0.00123763
0.32 1.38 0 0.00123763
0.32 1.84 0 0.00123763
0.46 0.46 0 0.00123763
0.46 0.71 0 0.00123763
0.46 0.78 0 0.00123763
0.46 0.92 0 0.00123763
0.46 1.17 0 0.00123763
0.46 1.24 0 0.00123763
0.46 1.38 0 0.00123763
0.46 1.84 0 0.00123763
0.71 0.71 0 0.00123763
0.71 0.78 0 0.00123763
0.71 0.92 0 0.00123763
0.71 1.17 0 0.00123763
0.71 1.24 0 0.00123763
0.71 1.38 0 0.00123763
0.71 1.84 0 0.00123763
0.78 0.78 0 0.00123763
0.78 0.92 0 0.00123763
0.78 1.17 0 0.00123763
0.78 1.24 0 0.00123763
0.78 1.38 0 0.00123763
0.78 1.84 0 0.00123763
0.92 0.92 0 0.00123763
0.92 1.17 0 0.00123763
0.92 1.24 0 0.00123763
0.92 1.38 0 0.00123763
0.92 1.84 0 0.00123763
1.17 1.17 0 0.00123763
1.17 1.24 0 0.00123763
1.17 1.38 0 0.00123763
1.17 1.84 0 0.00123763
1.24 1.24 0 0.00123763
1.24 1.38 0 0.00123763
1.24 1.84 0 0.00123763
1.38 1.38 0 0.00123763
1.38 1.84 0 0.00123763
1.84 0 1.84 0.00123763
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0.000104487 8.43597e-06 0.000618813
0.28 8.01056e-05 1.02685e-05 0.000618813
0.35 6.80507e-05 1.10703e-05 0.000618813
0.42 6.25239e-05 1.1722e-05 0.000618813
0.49 5.69603e-05 1.23738e-05 0.000618813
0.56 5.13602e-05 1.30255e-05 0.000618813
0.63 4.61745e-05 1.36564e-05 0.000618813
0.7 4.39885e-05 1.41472e-05 0.000618813
0.84 3.95969e-05 1.51289e-05 0.000618813
1.12 3.10845e-05 1.70565e-05 0.000618813
1.4 2.7439e-05 1.84817e-05 0.000618813
1.68 0 4.36865e-05 0.000618813
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.000104202 1.20609e-05 0.000618813
0.28 7.69933e-05 1.42981e-05 0.000618813
0.35 6.63459e-05 1.53335e-05 0.000618813
0.42 5.9826e-05 1.62708e-05 0.000618813
0.49 5.39914e-05 1.71837e-05 0.000618813
0.56 4.86292e-05 1.80721e-05 0.000618813
0.63 4.38264e-05 1.89258e-05 0.000618813
0.7 4.07645e-05 1.96862e-05 0.000618813
0.84 3.53485e-05 2.1139e-05 0.000618813
1.12 2.66578e-05 2.37776e-05 0.000618813
1.4 2.20259e-05 2.58771e-05 0.000618813
1.68 0 4.61419e-05 0.000618813
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 9.94973e-05 2.29245e-05 0.000618813
0.28 7.23842e-05 2.7581e-05 0.000618813
0.35 6.13386e-05 2.95978e-05 0.000618813
0.42 5.44837e-05 3.13909e-05 0.000618813
0.49 4.83449e-05 3.30493e-05 0.000618813
0.56 4.27668e-05 3.45853e-05 0.000618813
0.63 3.78606e-05 3.59997e-05 0.000618813
0.7 3.48295e-05 3.72429e-05 0.000618813
0.84 2.96511e-05 3.94626e-05 0.000618813
1.12 2.1776e-05 4.30267e-05 0.000618813
1.4 1.80753e-05 4.55048e-05 0.000618813
1.68 0 6.26399e-05 0.000618813
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.000101701 1.73094e-05 0.000618813
0.28 7.45448e-05 2.14319e-05 0.000618813
0.35 6.34411e-05 2.3251e-05 0.000618813
0.42 5.64558e-05 2.48844e-05 0.000618813
0.49 5.01518e-05 2.6416e-05 0.000618813
0.56 4.43885e-05 2.78539e-05 0.000618813
0.63 3.92872e-05 2.91949e-05 0.000618813
0.7 3.60532e-05 3.03857e-05 0.000618813
0.84 3.04913e-05 3.25525e-05 0.000618813
1.12 2.19975e-05 3.61547e-05 0.000618813
1.4 1.7884e-05 3.87755e-05 0.000618813
1.68 0 5.56581e-05 0.000618813
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.000104804 1.08967e-05 0.000618813
0.28 7.77115e-05 1.31364e-05 0.000618813
0.35 6.71313e-05 1.41597e-05 0.000618813
0.42 6.06892e-05 1.50829e-05 0.000618813
0.49 5.48386e-05 1.59824e-05 0.000618813
0.56 4.94817e-05 1.68592e-05 0.000618813
0.63 4.46545e-05 1.77037e-05 0.000618813
0.7 4.1567e-05 1.84568e-05 0.000618813
0.84 3.60424e-05 1.99033e-05 0.000618813
1.12 2.70166e-05 2.25613e-05 0.000618813
1.4 2.20545e-05 2.47133e-05 0.000618813
1.68 0 4.47918e-05 0.000618813
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.000105343 9.34845e-06 0.000618813
0.28 7.79329e-05 1.12376e-05 0.000618813
0.35 6.76593e-05 1.21049e-05 0.000618813
0.42 6.13448e-05 1.28874e-05 0.000618813
0.49 5.56411e-05 1.36547e-05 0.000618813
0.56 5.03752e-05 1.44073e-05 0.000618813
0.63 4.57441e-05 1.51361e-05 0.000618813
0.7 4.27226e-05 1.57865e-05 0.000618813
0.84 3.73102e-05 1.70477e-05 0.000618813
1.12 2.84192e-05 1.94067e-05 0.000618813
1.4 2.33209e-05 2.13573e-05 0.000618813
1.68 0 4.24181e-05 0.000618813
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 3.49719e-05 0.000618813
0.14 0 3.22677e-05 0.000618813
0.28 0 3.11288e-05 0.000618813
0.35 0 3.00381e-05 0.000618813
0.42 0 2.89895e-05 0.000618813
0.49 0 2.7981e-05 0.000618813
0.56 0 2.70109e-05 0.000618813
0.63 0 2.60776e-05 0.000618813
0.7 0 2.51738e-05 0.000618813
0.84 0 2.34661e-05 0.000618813
1.12 0 2.04491e-05 0.000618813
1.4 0 1.78774e-05 0.000618813
1.68 0 1.32353e-05 0.000618813
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 1.6144e-05 0.000618813
0.14 0 1.80344e-05 0.000618813
0.28 0 1.87523e-05 0.000618813
0.35 0 1.85377e-05 0.000618813
0.42 0 1.83248e-05 0.000618813
0.49 0 1.81135e-05 0.000618813
0.56 0 1.79036e-05 0.000618813
0.63 0 1.76953e-05 0.000618813
0.7 0 1.74797e-05 0.000618813
0.84 0 1.70548e-05 0.000618813
1.12 0 1.62603e-05 0.000618813
1.4 0 1.54981e-05 0.000618813
1.68 0 1.11676e-05 0.000618813
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.14489e-05 0.000618813
0.14 0 1.17652e-05 0.000618813
0.28 0 1.148e-05 0.000618813
0.35 0 1.13781e-05 0.000618813
0.42 0 1.12775e-05 0.000618813
0.49 0 1.1178e-05 0.000618813
0.56 0 1.10798e-05 0.000618813
0.63 0 1.09828e-05 0.000618813
0.7 0 1.08869e-05 0.000618813
0.84 0 1.06986e-05 0.000618813
1.12 0 1.03354e-05 0.000618813
1.4 0 9.98896e-06 0.000618813
1.68 0 8.22215e-06 0.000618813
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000101276 2.0083e-05 0.000618813
0.28 7.25518e-05 2.48804e-05 0.000618813
0.35 6.19174e-05 2.69952e-05 0.000618813
0.42 5.42507e-05 2.89203e-05 0.000618813
0.49 4.76748e-05 3.07056e-05 0.000618813
0.56 4.19388e-05 3.23622e-05 0.000618813
0.63 3.69755e-05 3.38954e-05 0.000618813
0.7 3.3286e-05 3.52847e-05 0.000618813
0.84 2.7238e-05 3.77728e-05 0.000618813
1.12 1.88237e-05 4.17848e-05 0.000618813
1.4 1.44157e-05 4.47067e-05 0.000618813
1.68 0 5.84427e-05 0.000618813
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.0001041 1.3827e-05 0.000618813
0.28 7.55274e-05 1.66419e-05 0.000618813
0.35 6.55073e-05 1.79454e-05 0.000618813
0.42 5.84442e-05 1.91606e-05 0.000618813
0.49 5.2335e-05 2.03271e-05 0.000618813
0.56 4.69564e-05 2.14464e-05 0.000618813
0.63 4.22118e-05 2.25154e-05 0.000618813
0.7 3.86116e-05 2.35058e-05 0.000618813
0.84 3.24954e-05 2.5365e-05 0.000618813
1.12 2.34102e-05 2.8637e-05 0.000618813
1.4 1.81172e-05 3.12855e-05 0.000618813
1.68 0 4.79394e-05 0.000618813
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000104524 1.21811e-05 0.000618813
0.28 7.57587e-05 1.46426e-05 0.000618813
0.35 6.59609e-05 1.5792e-05 0.000618813
0.42 5.90296e-05 1.6869e-05 0.000618813
0.49 5.3081e-05 1.7908e-05 0.000618813
0.56 4.78264e-05 1.891e-05 0.000618813
0.63 4.3245e-05 1.98716e-05 0.000618813
0.7 3.97121e-05 2.07671e-05 0.000618813
0.84 3.36942e-05 2.246e-05 0.000618813
1.12 2.46871e-05 2.54811e-05 0.000618813
1.4 1.9259e-05 2.79762e-05 0.000618813
1.68 0 4.55366e-05 0.000618813
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 9.75318e-05 3.06032e-05 0.000618813
0.28 6.79252e-05 3.80803e-05 0.000618813
0.35 5.68424e-05 4.11833e-05 0.000618813
0.42 4.89151e-05 4.39112e-05 0.000618813
0.49 4.2195e-05 4.63447e-05 0.000618813
0.56 3.64291e-05 4.85201e-05 0.000618813
0.63 3.1539e-05 5.04639e-05 0.000618813
0.7 2.8024e-05 5.22227e-05 0.000618813
0.84 2.24371e-05 5.5138e-05 0.000618813
1.12 1.50422e-05 5.93939e-05 0.000618813
1.4 1.15283e-05 6.22142e-05 0.000618813
1.68 0 7.35001e-05 0.000618813
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 9.95989e-05 2.45039e-05 0.000618813
0.28 7.10633e-05 2.97924e-05 0.000618813
0.35 6.05835e-05 3.2085e-05 0.000618813
0.42 5.31217e-05 3.41515e-05 0.000618813
0.49 4.67144e-05 3.60483e-05 0.000618813
0.56 4.11583e-05 3.77913e-05 0.000618813
0.63 3.63557e-05 3.93898e-05 0.000618813
0.7 3.28232e-05 4.08928e-05 0.000618813
0.84 2.70229e-05 4.34345e-05 0.000618813
1.12 1.88881e-05 4.7379e-05 0.000618813
1.4 1.45911e-05 5.02945e-05 0.000618813
1.68 0 6.41205e-05 0.000618813
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 9.98994e-05 2.30196e-05 0.000618813
0.28 7.12488e-05 2.79285e-05 0.000618813
0.35 6.10437e-05 3.00678e-05 0.000618813
0.42 5.37259e-05 3.20036e-05 0.000618813
0.49 4.74585e-05 3.3786e-05 0.000618813
0.56 4.20004e-05 3.54289e-05 0.000618813
0.63 3.73337e-05 3.69403e-05 0.000618813
0.7 3.38439e-05 3.83045e-05 0.000618813
0.84 2.80973e-05 4.0728e-05 0.000618813
1.12 1.99836e-05 4.45839e-05 0.000618813
1.4 1.55406e-05 4.73593e-05 0.000618813
1.68 0 6.19714e-05 0.000618813
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000170909
0 0.38 0 0.000170909
0 0.68 0 0.000170909
0 0.91 0 0.000170909
0 1.06 0 0.000170909
0 1.36 0 0.000170909
0 1.59 0 0.000170909
0 1.74 0 0.000170909
0 2.04 0 0.000170909
0 2.72 0 0.000170909
0.38 0.38 0 0.000170909
0.38 0.68 0 0.000170909
0.38 0.91 0 0.000170909
0.38 1.06 0 0.000170909
0.38 1.36 0 0.000170909
0.38 1.59 0 0.000170909
0.38 1.74 0 0.000170909
0.38 2.04 0 0.000170909
0.38 2.72 0 0.000170909
0.68 0.68 0 0.000170909
0.68 0.91 0 0.000170909
0.68 1.06 0 0.000170909
0.68 1.36 0 0.000170909
0.68 1.59 0 0.000170909
0.68 1.74 0 0.000170909
0.68 2.04 0 0.000170909
0.68 2.72 0 0.000170909
0.91 0.91 0 0.000170909
0.91 1.06 0 0.000170909
0.91 1.36 0 0.000170909
0.91 1.59 0 0.000170909
0.91 1.74 0 0.000170909
0.91 2.04 0 0.000170909
0.91 2.72 0 0.000170909
1.06 1.06 0 0.000170909
1.06 1.36 0 0.000170909
1.06 1.59 0 0.000170909
1.06 1.74 0 0.000170909
1.06 2.04 0 0.000170909
1.06 2.72 0 0.000170909
1.36 1.36 0 0.000170909
1.36 1.59 0 0.000170909
1.36 1.74 0 0.000170909
1.36 2.04 0 0.000170909
1.36 2.72 0 0.000170909
1.59 1.59 0 0.000170909
1.59 1.74 0 0.000170909
1.59 2.04 0 0.000170909
1.59 2.72 0 0.000170909
1.74 1.74 0 0.000170909
1.74 2.04 0 0.000170909
1.74 2.72 0 0.000170909
2.04 2.04 0 0.000170909
2.04 2.72 0 0.000170909
2.72 0 2.72 0.000170909
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.000110251 9.54098e-06 8.54545e-05
0.6 7.9152e-05 1.19046e-05 8.54545e-05
0.75 7.27116e-05 1.28113e-05 8.54545e-05
0.9 6.62294e-05 1.37181e-05 8.54545e-05
1.05 5.97053e-05 1.46248e-05 8.54545e-05
1.2 5.3139e-05 1.55315e-05 8.54545e-05
1.35 4.6531e-05 1.64382e-05 8.54545e-05
1.5 4.28692e-05 1.71785e-05 8.54545e-05
1.8 3.85082e-05 1.84924e-05 8.54545e-05
2.4 2.97283e-05 2.11204e-05 8.54545e-05
3 2.53403e-05 2.30286e-05 8.54545e-05
3.6 0 4.66581e-05 8.54545e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.000108628 1.33248e-05 8.54545e-05
0.6 7.64477e-05 1.59601e-05 8.54545e-05
0.75 6.84988e-05 1.71243e-05 8.54545e-05
0.9 6.15912e-05 1.82633e-05 8.54545e-05
1.05 5.53779e-05 1.93738e-05 8.54545e-05
1.2 4.96093e-05 2.04547e-05 8.54545e-05
1.35 4.4175e-05 2.15059e-05 8.54545e-05
1.5 4.04498e-05 2.24447e-05 8.54545e-05
1.8 3.511e-05 2.41551e-05 8.54545e-05
2.4 2.62826e-05 2.72698e-05 8.54545e-05
3 2.11906e-05 2.91301e-05 8.54545e-05
3.6 0 4.81774e-05 8.54545e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.000107158 1.67749e-05 8.54545e-05
0.6 7.48954e-05 2.02032e-05 8.54545e-05
0.75 6.68667e-05 2.1698e-05 8.54545e-05
0.9 5.98206e-05 2.3133e-05 8.54545e-05
1.05 5.34346e-05 2.45089e-05 8.54545e-05
1.2 4.75288e-05 2.58278e-05 8.54545e-05
1.35 4.19909e-05 2.70922e-05 8.54545e-05
1.5 3.82151e-05 2.82218e-05 8.54545e-05
1.8 3.28668e-05 3.02549e-05 8.54545e-05
2.4 2.41968e-05 3.38246e-05 8.54545e-05
3 1.93903e-05 3.6501e-05 8.54545e-05
3.6 0 5.47148e-05 8.54545e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.000102905 2.85769e-05 8.54545e-05
0.6 7.0922e-05 3.38559e-05 8.54545e-05
0.75 6.28034e-05 3.60706e-05 8.54545e-05
0.9 5.57162e-05 3.81171e-05 8.54545e-05
1.05 4.93404e-05 4.00109e-05 8.54545e-05
1.2 4.34901e-05 4.17666e-05 8.54545e-05
1.35 3.80438e-05 4.33974e-05 8.54545e-05
1.5 3.43964e-05 4.48316e-05 8.54545e-05
1.8 2.93635e-05 4.73196e-05 8.54545e-05
2.4 2.13791e-05 5.13499e-05 8.54545e-05
3 1.7194e-05 5.41137e-05 8.54545e-05
3.6 0 7.05113e-05 8.54545e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.000102728 3.0693e-05 8.54545e-05
0.6 7.01553e-05 3.74569e-05 8.54545e-05
0.75 6.15954e-05 4.0216e-05 8.54545e-05
0.9 5.41246e-05 4.27023e-05 8.54545e-05
1.05 4.7441e-05 4.49483e-05 8.54545e-05
1.2 4.13587e-05 4.69824e-05 8.54545e-05
1.35 3.57485e-05 4.88299e-05 8.54545e-05
1.5 3.19857e-05 5.04297e-05 8.54545e-05
1.8 2.68452e-05 5.31282e-05 8.54545e-05
2.4 1.89572e-05 5.72683e-05 8.54545e-05
3 1.50152e-05 5.99368e-05 8.54545e-05
3.6 0 7.42475e-05 8.54545e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000108084 1.2891e-05 8.54545e-05
0.6 7.57548e-05 1.66458e-05 8.54545e-05
0.75 6.7538e-05 1.8263e-05 8.54545e-05
0.9 6.02838e-05 1.98036e-05 8.54545e-05
1.05 5.36896e-05 2.12727e-05 8.54545e-05
1.2 4.75872e-05 2.26749e-05 8.54545e-05
1.35 4.18704e-05 2.40146e-05 8.54545e-05
1.5 3.79008e-05 2.52144e-05 8.54545e-05
1.8 3.21985e-05 2.73721e-05 8.54545e-05
2.4 2.30645e-05 3.1138e-05 8.54545e-05
3 1.79919e-05 3.39649e-05 8.54545e-05
3.6 0 5.07749e-05 8.54545e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 5.61948e-05 8.54545e-05
0.3 0 4.3482e-05 8.54545e-05
0.6 0 4.00891e-05 8.54545e-05
0.75 0 3.79593e-05 8.54545e-05
0.9 0 3.60997e-05 8.54545e-05
1.05 0 3.44743e-05 8.54545e-05
1.2 0 3.30529e-05 8.54545e-05
1.35 0 3.18088e-05 8.54545e-05
1.5 0 3.07278e-05 8.54545e-05
1.8 0 2.89464e-05 8.54545e-05
2.4 0 2.6491e-05 8.54545e-05
3 0 2.50045e-05 8.54545e-05
3.6 0 1.03389e-05 8.54545e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 2.52139e-05 8.54545e-05
0.3 0 2.58486e-05 8.54545e-05
0.6 0 2.63237e-05 8.54545e-05
0.75 0 2.57668e-05 8.54545e-05
0.9 0 2.52235e-05 8.54545e-05
1.05 0 2.46931e-05 8.54545e-05
1.2 0 2.41745e-05 8.54545e-05
1.35 0 2.07924e-05 8.54545e-05
1.5 0 1.69667e-05 8.54545e-05
1.8 0 1.61228e-05 8.54545e-05
2.4 0 1.45516e-05 8.54545e-05
3 0 1.3131e-05 8.54545e-05
3.6 0 1.08365e-05 8.54545e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.000101834 3.33456e-05 8.54545e-05
0.6 6.83988e-05 4.08916e-05 8.54545e-05
0.75 5.89419e-05 4.39387e-05 8.54545e-05
0.9 5.1148e-05 4.66459e-05 8.54545e-05
1.05 4.45437e-05 4.90666e-05 8.54545e-05
1.2 3.8813e-05 5.12359e-05 8.54545e-05
1.35 3.37654e-05 5.31841e-05 8.54545e-05
1.5 2.99814e-05 5.48963e-05 8.54545e-05
1.8 2.44204e-05 5.77864e-05 8.54545e-05
2.4 1.66761e-05 6.20888e-05 8.54545e-05
3 1.25421e-05 6.46284e-05 8.54545e-05
3.6 0 7.62684e-05 8.54545e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.00010697 1.5913e-05 8.54545e-05
0.6 7.40394e-05 2.0283e-05 8.54545e-05
0.75 6.49367e-05 2.2169e-05 8.54545e-05
0.9 5.73494e-05 2.38587e-05 8.54545e-05
1.05 5.08089e-05 2.55271e-05 8.54545e-05
1.2 4.50244e-05 2.71001e-05 8.54545e-05
1.35 3.98325e-05 2.85835e-05 8.54545e-05
1.5 3.5804e-05 2.99425e-05 8.54545e-05
1.8 2.96135e-05 3.23897e-05 8.54545e-05
2.4 2.05434e-05 3.64975e-05 8.54545e-05
3 1.52668e-05 3.93275e-05 8.54545e-05
3.6 0 5.33191e-05 8.54545e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0.000100761 3.67694e-05 8.54545e-05
0.6 6.69011e-05 4.53273e-05 8.54545e-05
0.75 5.72426e-05 4.87189e-05 8.54545e-05
0.9 4.92861e-05 5.1699e-05 8.54545e-05
1.05 4.256e-05 5.43356e-05 8.54545e-05
1.2 3.67675e-05 5.66743e-05 8.54545e-05
1.35 3.17047e-05 5.87546e-05 8.54545e-05
1.5 2.79491e-05 6.05684e-05 8.54545e-05
1.8 2.25156e-05 6.35941e-05 8.54545e-05
2.4 1.51115e-05 6.80031e-05 8.54545e-05
3 1.13059e-05 7.0817e-05 8.54545e-05
3.6 0 8.17102e-05 8.54545e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000105775 1.92663e-05 8.54545e-05
0.6 7.2583e-05 2.44391e-05 8.54545e-05
0.75 6.32933e-05 2.66644e-05 8.54545e-05
0.9 5.55336e-05 2.86203e-05 8.54545e-05
1.05 4.88409e-05 3.05473e-05 8.54545e-05
1.2 4.2953e-05 3.2343e-05 8.54545e-05
1.35 3.76995e-05 3.40175e-05 8.54545e-05
1.5 3.36569e-05 3.55395e-05 8.54545e-05
1.8 2.75245e-05 3.82417e-05 8.54545e-05
2.4 1.87269e-05 4.26464e-05 8.54545e-05
3 1.37885e-05 4.5857e-05 8.54545e-05
3.6 0 5.89392e-05 8.54545e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 9.69227e-05 4.84207e-05 8.54545e-05
0.6 6.2839e-05 5.89997e-05 8.54545e-05
0.75 5.30796e-05 6.30715e-05 8.54545e-05
0.9 4.51572e-05 6.65578e-05 8.54545e-05
1.05 3.85606e-05 6.95595e-05 8.54545e-05
1.2 3.29614e-05 7.21555e-05 8.54545e-05
1.35 2.8128e-05 7.44108e-05 8.54545e-05
1.5 2.46244e-05 7.63373e-05 8.54545e-05
1.8 1.96956e-05 7.94588e-05 8.54545e-05
2.4 1.31335e-05 8.37873e-05 8.54545e-05
3 9.91046e-06 8.63942e-05 8.54545e-05
3.6 0 9.60504e-05 8.54545e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000101807 3.09221e-05 8.54545e-05
0.6 6.85683e-05 3.80672e-05 8.54545e-05
0.75 5.91919e-05 4.10287e-05 8.54545e-05
0.9 5.14158e-05 4.36694e-05 8.54545e-05
1.05 4.47759e-05 4.6081e-05 8.54545e-05
1.2 3.89955e-05 4.82661e-05 8.54545e-05
1.35 3.38904e-05 5.0245e-05 8.54545e-05
1.5 3.00318e-05 5.20035e-05 8.54545e-05
1.8 2.43134e-05 5.50141e-05 8.54545e-05
2.4 1.63264e-05 5.95982e-05 8.54545e-05
3 1.20453e-05 6.26801e-05 8.54545e-05
3.6 0 7.42458e-05 8.54545e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000170909
0 0.62 0 0.000170909
0 0.92 0 0.000170909
0 1.39 0 0.000170909
0 1.54 0 0.000170909
0 1.84 0 0.000170909
0 2.31 0 0.000170909
0 2.46 0 0.000170909
0 2.76 0 0.000170909
0 3.68 0 0.000170909
0.62 0.62 0 0.000170909
0.62 0.92 0 0.000170909
0.62 1.39 0 0.000170909
0.62 1.54 0 0.000170909
0.62 1.84 0 0.000170909
0.62 2.31 0 0.000170909
0.62 2.46 0 0.000170909
0.62 2.76 0 0.000170909
0.62 3.68 0 0.000170909
0.92 0.92 0 0.000170909
0.92 1.39 0 0.000170909
0.92 1.54 0 0.000170909
0.92 1.84 0 0.000170909
0.92 2.31 0 0.000170909
0.92 2.46 0 0.000170909
0.92 2.76 0 0.000170909
0.92 3.68 0 0.000170909
1.39 1.39 0 0.000170909
1.39 1.54 0 0.000170909
1.39 1.84 0 0.000170909
1.39 2.31 0 0.000170909
1.39 2.46 0 0.000170909
1.39 2.76 0 0.000170909
1.39 3.68 0 0.000170909
1.54 1.54 0 0.000170909
1.54 1.84 0 0.000170909
1.54 2.31 0 0.000170909
1.54 2.46 0 0.000170909
1.54 2.76 0 0.000170909
1.54 3.68 0 0.000170909
1.84 1.84 0 0.000170909
1.84 2.31 0 0.000170909
1.84 2.46 0 0.000170909
1.84 2.76 0 0.000170909
1.84 3.68 0 0.000170909
2.31 2.31 0 0.000170909
2.31 2.46 0 0.000170909
2.31 2.76 0 0.000170909
2.31 3.68 0 0.000170909
2.46 2.46 0 0.000170909
2.46 2.76 0 0.000170909
2.46 3.68 0 0.000170909
2.76 2.76 0 0.000170909
2.76 3.68 0 0.000170909
3.68 0 3.68 0.000170909
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.000108308 8.19535e-06 8.54545e-05
0.6 7.82879e-05 1.00186e-05 8.54545e-05
0.75 7.22206e-05 1.06763e-05 8.54545e-05
0.9 6.61091e-05 1.13339e-05 8.54545e-05
1.05 5.99537e-05 1.19916e-05 8.54545e-05
1.2 5.37545e-05 1.26493e-05 8.54545e-05
1.35 4.75112e-05 1.3307e-05 8.54545e-05
1.5 4.40468e-05 1.3846e-05 8.54545e-05
1.8 3.99106e-05 1.48055e-05 8.54545e-05
2.4 3.15724e-05 1.67245e-05 8.54545e-05
3 2.72575e-05 1.82421e-05 8.54545e-05
3.6 0 4.34592e-05 8.54545e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.000107755 1.10317e-05 8.54545e-05
0.6 7.66184e-05 1.27642e-05 8.54545e-05
0.75 6.92116e-05 1.3516e-05 8.54545e-05
0.9 6.2753e-05 1.42631e-05 8.54545e-05
1.05 5.68926e-05 1.50017e-05 8.54545e-05
1.2 5.14438e-05 1.57297e-05 8.54545e-05
1.35 4.63752e-05 1.6446e-05 8.54545e-05
1.5 4.2931e-05 1.70906e-05 8.54545e-05
1.8 3.79743e-05 1.8283e-05 8.54545e-05
2.4 2.95557e-05 1.98564e-05 8.54545e-05
3 2.44352e-05 2.0953e-05 8.54545e-05
3.6 0 4.3229e-05 8.54545e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.000107354 1.23885e-05 8.54545e-05
0.6 7.61526e-05 1.43157e-05 8.54545e-05
0.75 6.86317e-05 1.51614e-05 8.54545e-05
0.9 6.20746e-05 1.59984e-05 8.54545e-05
1.05 5.61337e-05 1.68229e-05 8.54545e-05
1.2 5.06944e-05 1.76325e-05 8.54545e-05
1.35 4.55891e-05 1.84263e-05 8.54545e-05
1.5 4.20767e-05 1.91444e-05 8.54545e-05
1.8 3.70014e-05 2.04723e-05 8.54545e-05
2.4 2.84859e-05 2.29381e-05 8.54545e-05
3 2.33549e-05 2.4974e-05 8.54545e-05
3.6 0 4.63218e-05 8.54545e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.000106682 1.39333e-05 8.54545e-05
0.6 7.53957e-05 1.62583e-05 8.54545e-05
0.75 6.7762e-05 1.72729e-05 8.54545e-05
0.9 6.10941e-05 1.82637e-05 8.54545e-05
1.05 5.51445e-05 1.92285e-05 8.54545e-05
1.2 4.96324e-05 2.01666e-05 8.54545e-05
1.35 4.44379e-05 2.10782e-05 8.54545e-05
1.5 4.08575e-05 2.19043e-05 8.54545e-05
1.8 3.5695e-05 2.34218e-05 8.54545e-05
2.4 2.7143e-05 2.61795e-05 8.54545e-05
3 2.20913e-05 2.84161e-05 8.54545e-05
3.6 0 4.87581e-05 8.54545e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0.000100641 2.74481e-05 8.54545e-05
0.6 6.96273e-05 3.23788e-05 8.54545e-05
0.75 6.19288e-05 3.44448e-05 8.54545e-05
0.9 5.52123e-05 3.63495e-05 8.54545e-05
1.05 4.91639e-05 3.81071e-05 8.54545e-05
1.2 4.36042e-05 3.97311e-05 8.54545e-05
1.35 3.84191e-05 4.12337e-05 8.54545e-05
1.5 3.49294e-05 4.25669e-05 8.54545e-05
1.8 3.00814e-05 4.48833e-05 8.54545e-05
2.4 2.23472e-05 4.85858e-05 8.54545e-05
3 1.81728e-05 5.11885e-05 8.54545e-05
3.6 0 6.83974e-05 8.54545e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.00010219 2.14417e-05 8.54545e-05
0.6 7.05056e-05 2.68142e-05 8.54545e-05
0.75 6.23572e-05 2.9043e-05 8.54545e-05
0.9 5.52446e-05 3.10806e-05 8.54545e-05
1.05 4.88631e-05 3.29461e-05 8.54545e-05
1.2 4.30325e-05 3.46572e-05 8.54545e-05
1.35 3.76323e-05 3.6229e-05 8.54545e-05
1.5 3.39664e-05 3.7617e-05 8.54545e-05
1.8 2.88741e-05 4.00079e-05 8.54545e-05
2.4 2.09642e-05 4.37656e-05 8.54545e-05
3 1.68109e-05 4.6358e-05 8.54545e-05
3.6 0 6.22631e-05 8.54545e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 5.26569e-05 8.54545e-05
0.3 0 4.30002e-05 8.54545e-05
0.6 0 3.99665e-05 8.54545e-05
0.75 0 3.79437e-05 8.54545e-05
0.9 0 3.60923e-05 8.54545e-05
1.05 0 3.43952e-05 8.54545e-05
1.2 0 3.28372e-05 8.54545e-05
1.35 0 3.14046e-05 8.54545e-05
1.5 0 3.00849e-05 8.54545e-05
1.8 0 2.77397e-05 8.54545e-05
2.4 0 2.12873e-05 8.54545e-05
3 0 1.62857e-05 8.54545e-05
3.6 0 1.30961e-05 8.54545e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000102099 2.34741e-05 8.54545e-05
0.6 6.95523e-05 2.8989e-05 8.54545e-05
0.75 6.06728e-05 3.13293e-05 8.54545e-05
0.9 5.33341e-05 3.34623e-05 8.54545e-05
1.05 4.70587e-05 3.54074e-05 8.54545e-05
1.2 4.15723e-05 3.7183e-05 8.54545e-05
1.35 3.67382e-05 3.88056e-05 8.54545e-05
1.5 3.30722e-05 4.02609e-05 8.54545e-05
1.8 2.75692e-05 4.2782e-05 8.54545e-05
2.4 1.96532e-05 4.63569e-05 8.54545e-05
3 1.51475e-05 4.87055e-05 8.54545e-05
3.6 0 6.28924e-05 8.54545e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000101698 2.46959e-05 8.54545e-05
0.6 6.91714e-05 3.04969e-05 8.54545e-05
0.75 6.01574e-05 3.29527e-05 8.54545e-05
0.9 5.27085e-05 3.5184e-05 8.54545e-05
1.05 4.63495e-05 3.72129e-05 8.54545e-05
1.2 4.08397e-05 3.90597e-05 8.54545e-05
1.35 3.59717e-05 4.07427e-05 8.54545e-05
1.5 3.22674e-05 4.22494e-05 8.54545e-05
1.8 2.67175e-05 4.48511e-05 8.54545e-05
2.4 1.88151e-05 4.88572e-05 8.54545e-05
3 1.43724e-05 5.16378e-05 8.54545e-05
3.6 0 6.51407e-05 8.54545e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000101281 2.61992e-05 8.54545e-05
0.6 6.85051e-05 3.24833e-05 8.54545e-05
0.75 5.93315e-05 3.512e-05 8.54545e-05
0.9 5.17529e-05 3.75011e-05 8.54545e-05
1.05 4.53424e-05 3.96539e-05 8.54545e-05
1.2 3.97724e-05 4.1603e-05 8.54545e-05
1.35 3.48539e-05 4.33705e-05 8.54545e-05
1.5 3.11237e-05 4.49465e-05 8.54545e-05
1.8 2.55722e-05 4.76514e-05 8.54545e-05
2.4 1.7768e-05 5.17687e-05 8.54545e-05
3 1.34703e-05 5.45902e-05 8.54545e-05
3.6 0 6.73372e-05 8.54545e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 9.60093e-05 3.91424e-05 8.54545e-05
0.6 6.27428e-05 4.85475e-05 8.54545e-05
0.75 5.33556e-05 5.22386e-05 8.54545e-05
0.9 4.57257e-05 5.54293e-05 8.54545e-05
1.05 3.9355e-05 5.81978e-05 8.54545e-05
1.2 3.39284e-05 6.06095e-05 8.54545e-05
1.35 2.92272e-05 6.27185e-05 8.54545e-05
1.5 2.5775e-05 6.45409e-05 8.54545e-05
1.8 2.08447e-05 6.753e-05 8.54545e-05
2.4 1.42041e-05 7.17319e-05 8.54545e-05
3 1.08128e-05 7.436e-05 8.54545e-05
3.6 0 8.48209e-05 8.54545e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 1.88742e-05
0 1.8 0 1.88742e-05
0 3.4 0 1.88742e-05
0 4.4 0 1.88742e-05
0 5.2 0 1.88742e-05
0 6.8 0 1.88742e-05
0 7.8 0 1.88742e-05
0 8.6 0 1.88742e-05
0 10.2 0 1.88742e-05
0 13.6 0 1.88742e-05
1.8 1.8 0 1.88742e-05
1.8 3.4 0 1.88742e-05
1.8 4.4 0 1.88742e-05
1.8 5.2 0 1.88742e-05
1.8 6.8 0 1.88742e-05
1.8 7.8 0 1.88742e-05
1.8 8.6 0 1.88742e-05
1.8 10.2 0 1.88742e-05
1.8 13.6 0 1.88742e-05
3.4 3.4 0 1.88742e-05
3.4 4.4 0 1.88742e-05
3.4 5.2 0 1.88742e-05
3.4 6.8 0 1.88742e-05
3.4 7.8 0 1.88742e-05
3.4 8.6 0 1.88742e-05
3.4 10.2 0 1.88742e-05
3.4 13.6 0 1.88742e-05
4.4 4.4 0 1.88742e-05
4.4 5.2 0 1.88742e-05
4.4 6.8 0 1.88742e-05
4.4 7.8 0 1.88742e-05
4.4 8.6 0 1.88742e-05
4.4 10.2 0 1.88742e-05
4.4 13.6 0 1.88742e-05
5.2 5.2 0 1.88742e-05
5.2 6.8 0 1.88742e-05
5.2 7.8 0 1.88742e-05
5.2 8.6 0 1.88742e-05
5.2 10.2 0 1.88742e-05
5.2 13.6 0 1.88742e-05
6.8 6.8 0 1.88742e-05
6.8 7.8 0 1.88742e-05
6.8 8.6 0 1.88742e-05
6.8 10.2 0 1.88742e-05
6.8 13.6 0 1.88742e-05
7.8 7.8 0 1.88742e-05
7.8 8.6 0 1.88742e-05
7.8 10.2 0 1.88742e-05
7.8 13.6 0 1.88742e-05
8.6 8.6 0 1.88742e-05
8.6 10.2 0 1.88742e-05
8.6 13.6 0 1.88742e-05
10.2 10.2 0 1.88742e-05
10.2 13.6 0 1.88742e-05
13.6 0 13.6 1.88742e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 7.40852e-05 1.53269e-05 9.43708e-06
3.2 3.91315e-05 1.99228e-05 9.43708e-06
4 3.19371e-05 2.19115e-05 9.43708e-06
4.8 2.70964e-05 2.37191e-05 9.43708e-06
5.6 2.357e-05 2.53621e-05 9.43708e-06
6.4 2.09156e-05 2.68556e-05 9.43708e-06
7.2 1.88445e-05 2.82131e-05 9.43708e-06
8 1.71775e-05 2.94471e-05 9.43708e-06
9.6 1.46382e-05 3.15888e-05 9.43708e-06
12.8 1.14443e-05 3.4823e-05 9.43708e-06
16 9.51897e-06 3.70354e-05 9.43708e-06
19.2 0 4.67659e-05 9.43708e-06
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 6.97966e-05 1.67389e-05 9.43708e-06
3.2 3.64877e-05 1.99427e-05 9.43708e-06
4 2.99166e-05 2.12044e-05 9.43708e-06
4.8 2.466e-05 2.2326e-05 9.43708e-06
5.6 2.13161e-05 2.33231e-05 9.43708e-06
6.4 1.84169e-05 3.40396e-05 9.43708e-06
7.2 1.61341e-05 3.54638e-05 9.43708e-06
8 1.54206e-05 3.67429e-05 9.43708e-06
9.6 1.20143e-05 3.89238e-05 9.43708e-06
12.8 8.69945e-06 4.21081e-05 9.43708e-06
16 6.39204e-06 4.41918e-05 9.43708e-06
19.2 0 5.06553e-05 9.43708e-06
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 6.84409e-05 2.68397e-05 9.43708e-06
3.2 3.54871e-05 3.29164e-05 9.43708e-06
4 2.85e-05 3.54391e-05 9.43708e-06
4.8 2.361e-05 3.76634e-05 9.43708e-06
5.6 1.9916e-05 3.96249e-05 9.43708e-06
6.4 1.73838e-05 3.96498e-05 9.43708e-06
7.2 1.61689e-05 4.11129e-05 9.43708e-06
8 1.47732e-05 4.24168e-05 9.43708e-06
9.6 1.05302e-05 4.46152e-05 9.43708e-06
12.8 8.72921e-06 4.77605e-05 9.43708e-06
16 5.62171e-06 4.97672e-05 9.43708e-06
19.2 0 5.50675e-05 9.43708e-06
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 6.7645e-05 3.2193e-05 9.43708e-06
3.2 3.38391e-05 3.9367e-05 9.43708e-06
4 2.67021e-05 4.19966e-05 9.43708e-06
4.8 2.29769e-05 4.18177e-05 9.43708e-06
5.6 1.82353e-05 4.65442e-05 9.43708e-06
6.4 1.62227e-05 4.54365e-05 9.43708e-06
7.2 1.48039e-05 4.84524e-05 9.43708e-06
8 1.32738e-05 4.82507e-05 9.43708e-06
9.6 1.07123e-05 5.04464e-05 9.43708e-06
12.8 8.05801e-06 5.35152e-05 9.43708e-06
16 4.84253e-06 5.54212e-05 9.43708e-06
19.2 0 6.11626e-05 9.43708e-06
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 6.22864e-05 3.56698e-05 9.43708e-06
3.2 2.88977e-05 4.44753e-05 9.43708e-06
4 2.21355e-05 4.78329e-05 9.43708e-06
4.8 2.02689e-05 4.66506e-05 9.43708e-06
5.6 1.42772e-05 5.29604e-05 9.43708e-06
6.4 1.43508e-05 5.04747e-05 9.43708e-06
7.2 1.36855e-05 5.19708e-05 9.43708e-06
8 9.97895e-06 5.32154e-05 9.43708e-06
9.6 8.98714e-06 5.52233e-05 9.43708e-06
12.8 6.3669e-06 5.79283e-05 9.43708e-06
16 3.93686e-06 5.95142e-05 9.43708e-06
19.2 0 6.45661e-05 9.43708e-06
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 5.37839e-05 8.90159e-05 9.43708e-06
3.2 2.88056e-05 9.62448e-05 9.43708e-06
4 2.26176e-05 9.9472e-05 9.43708e-06
4.8 1.85813e-05 0.000101954 9.43708e-06
5.6 1.57289e-05 0.000103891 9.43708e-06
6.4 1.36365e-05 0.000105426 9.43708e-06
7.2 1.20437e-05 0.000106662 9.43708e-06
8 1.07924e-05 0.000107674 9.43708e-06
9.6 8.94989e-06 0.000109223 9.43708e-06
12.8 6.74626e-06 0.000111206 9.43708e-06
16 5.48249e-06 0.000112414 9.43708e-06
19.2 0 0.000117864 9.43708e-06
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0