040000 tree 1d7ddaa798130352bf8c27b2c71a17cb0b55b603	gds
040000 tree 7d6e7dd7bcd5e33c7357234da0810befa54544f3	mpw_precheck
040000 tree 4c529c72ae4371b94d9e65ccdd49820b73962730	signoff
040000 tree 62cbbdaf7c7b782d3e975ab8103ef07a99b241bf	tapeout