Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.0623886
0 0.29 0 0.0623886
0 0.46 0 0.0623886
0 0.665 0 0.0623886
0 0.75 0 0.0623886
0 0.92 0 0.0623886
0 1.125 0 0.0623886
0 1.21 0 0.0623886
0 1.38 0 0.0623886
0 1.84 0 0.0623886
0.29 0.29 0 0.0623886
0.29 0.46 0 0.0623886
0.29 0.665 0 0.0623886
0.29 0.75 0 0.0623886
0.29 0.92 0 0.0623886
0.29 1.125 0 0.0623886
0.29 1.21 0 0.0623886
0.29 1.38 0 0.0623886
0.29 1.84 0 0.0623886
0.46 0.46 0 0.0623886
0.46 0.665 0 0.0623886
0.46 0.75 0 0.0623886
0.46 0.92 0 0.0623886
0.46 1.125 0 0.0623886
0.46 1.21 0 0.0623886
0.46 1.38 0 0.0623886
0.46 1.84 0 0.0623886
0.665 0.665 0 0.0623886
0.665 0.75 0 0.0623886
0.665 0.92 0 0.0623886
0.665 1.125 0 0.0623886
0.665 1.21 0 0.0623886
0.665 1.38 0 0.0623886
0.665 1.84 0 0.0623886
0.75 0.75 0 0.0623886
0.75 0.92 0 0.0623886
0.75 1.125 0 0.0623886
0.75 1.21 0 0.0623886
0.75 1.38 0 0.0623886
0.75 1.84 0 0.0623886
0.92 0.92 0 0.0623886
0.92 1.125 0 0.0623886
0.92 1.21 0 0.0623886
0.92 1.38 0 0.0623886
0.92 1.84 0 0.0623886
1.125 1.125 0 0.0623886
1.125 1.21 0 0.0623886
1.125 1.38 0 0.0623886
1.125 1.84 0 0.0623886
1.21 1.21 0 0.0623886
1.21 1.38 0 0.0623886
1.21 1.84 0 0.0623886
1.38 1.38 0 0.0623886
1.38 1.84 0 0.0623886
1.84 0 1.84 0.0623886
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 0.000825434 5.70214e-06 0.0311943
0.34 0.000463147 6.8989e-06 0.0311943
0.425 0.000384876 7.49569e-06 0.0311943
0.51 0.000330599 8.09118e-06 0.0311943
0.595 0.000290467 8.68523e-06 0.0311943
0.68 0.000259442 9.27766e-06 0.0311943
0.765 0.00023466 9.8683e-06 0.0311943
0.85 0.000214361 1.0457e-05 0.0311943
1.02 0.000183004 1.16279e-05 0.0311943
1.36 0.000141971 1.39391e-05 0.0311943
1.7 0.000116163 1.62011e-05 0.0311943
2.04 0 0.000116775 0.0311943
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 0.000825434 7.978e-05 0.0311943
0.34 0.000463147 8.31062e-05 0.0311943
0.425 0.000384876 8.47665e-05 0.0311943
0.51 0.000330599 8.64225e-05 0.0311943
0.595 0.000290467 8.80738e-05 0.0311943
0.68 0.000259442 8.972e-05 0.0311943
0.765 0.00023466 9.13633e-05 0.0311943
0.85 0.000214361 9.2999e-05 0.0311943
1.02 0.000183004 9.62547e-05 0.0311943
1.36 0.000141971 0.000102682 0.0311943
1.7 0.000116163 0.00010897 0.0311943
2.04 0 0.000213465 0.0311943
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 0.000825434 5.87559e-05 0.0311943
0.34 0.000463147 6.13058e-05 0.0311943
0.425 0.000384876 6.25773e-05 0.0311943
0.51 0.000330599 6.3847e-05 0.0311943
0.595 0.000290467 6.51124e-05 0.0311943
0.68 0.000259442 6.63755e-05 0.0311943
0.765 0.00023466 6.76338e-05 0.0311943
0.85 0.000214361 6.88895e-05 0.0311943
1.02 0.000183004 7.13843e-05 0.0311943
1.36 0.000141971 7.63105e-05 0.0311943
1.7 0.000116163 8.11305e-05 0.0311943
2.04 0 0.000184196 0.0311943
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 0.000825434 3.30105e-05 0.0311943
0.34 0.000463147 3.51606e-05 0.0311943
0.425 0.000384876 3.62331e-05 0.0311943
0.51 0.000330599 3.73028e-05 0.0311943
0.595 0.000290467 3.83695e-05 0.0311943
0.68 0.000259442 3.94343e-05 0.0311943
0.765 0.00023466 4.04946e-05 0.0311943
0.85 0.000214361 4.15524e-05 0.0311943
1.02 0.000183004 4.36563e-05 0.0311943
1.36 0.000141971 4.78077e-05 0.0311943
1.7 0.000116163 5.1872e-05 0.0311943
2.04 0 0.0001542 0.0311943
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 0.000825434 2.79529e-05 0.0311943
0.34 0.000463147 2.979e-05 0.0311943
0.425 0.000384876 3.07067e-05 0.0311943
0.51 0.000330599 3.16207e-05 0.0311943
0.595 0.000290467 3.2533e-05 0.0311943
0.68 0.000259442 3.34424e-05 0.0311943
0.765 0.00023466 3.43495e-05 0.0311943
0.85 0.000214361 3.52533e-05 0.0311943
1.02 0.000183004 3.7051e-05 0.0311943
1.36 0.000141971 4.06002e-05 0.0311943
1.7 0.000116163 4.40725e-05 0.0311943
2.04 0 0.000145826 0.0311943
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 0.000825434 1.19769e-05 0.0311943
0.34 0.000463147 1.36902e-05 0.0311943
0.425 0.000384876 1.45445e-05 0.0311943
0.51 0.000330599 1.53971e-05 0.0311943
0.595 0.000290467 1.62476e-05 0.0311943
0.68 0.000259442 1.70958e-05 0.0311943
0.765 0.00023466 1.79413e-05 0.0311943
0.85 0.000214361 1.87842e-05 0.0311943
1.02 0.000183004 2.04605e-05 0.0311943
1.36 0.000141971 2.37694e-05 0.0311943
1.7 0.000116163 2.70077e-05 0.0311943
2.04 0 0.000128532 0.0311943
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 0.00012621 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 9.21295e-05 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 3.24185e-05 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 2.13979e-05 0.0311943
0.17 0 0 0.0311943
0.34 0 0 0.0311943
0.425 0 0 0.0311943
0.51 0 0 0.0311943
0.595 0 0 0.0311943
0.68 0 0 0.0311943
0.765 0 0 0.0311943
0.85 0 0 0.0311943
1.02 0 0 0.0311943
1.36 0 0 0.0311943
1.7 0 0 0.0311943
2.04 0 0 0.0311943
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000757576
0 0.2 0 0.000757576
0 0.34 0 0.000757576
0 0.47 0 0.000757576
0 0.54 0 0.000757576
0 0.68 0 0.000757576
0 0.81 0 0.000757576
0 0.88 0 0.000757576
0 1.02 0 0.000757576
0 1.36 0 0.000757576
0.2 0.2 0 0.000757576
0.2 0.34 0 0.000757576
0.2 0.47 0 0.000757576
0.2 0.54 0 0.000757576
0.2 0.68 0 0.000757576
0.2 0.81 0 0.000757576
0.2 0.88 0 0.000757576
0.2 1.02 0 0.000757576
0.2 1.36 0 0.000757576
0.34 0.34 0 0.000757576
0.34 0.47 0 0.000757576
0.34 0.54 0 0.000757576
0.34 0.68 0 0.000757576
0.34 0.81 0 0.000757576
0.34 0.88 0 0.000757576
0.34 1.02 0 0.000757576
0.34 1.36 0 0.000757576
0.47 0.47 0 0.000757576
0.47 0.54 0 0.000757576
0.47 0.68 0 0.000757576
0.47 0.81 0 0.000757576
0.47 0.88 0 0.000757576
0.47 1.02 0 0.000757576
0.47 1.36 0 0.000757576
0.54 0.54 0 0.000757576
0.54 0.68 0 0.000757576
0.54 0.81 0 0.000757576
0.54 0.88 0 0.000757576
0.54 1.02 0 0.000757576
0.54 1.36 0 0.000757576
0.68 0.68 0 0.000757576
0.68 0.81 0 0.000757576
0.68 0.88 0 0.000757576
0.68 1.02 0 0.000757576
0.68 1.36 0 0.000757576
0.81 0.81 0 0.000757576
0.81 0.88 0 0.000757576
0.81 1.02 0 0.000757576
0.81 1.36 0 0.000757576
0.88 0.88 0 0.000757576
0.88 1.02 0 0.000757576
0.88 1.36 0 0.000757576
1.02 1.02 0 0.000757576
1.02 1.36 0 0.000757576
1.36 0 1.36 0.000757576
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0.00135131 3.88929e-06 0.000378788
0.28 0.000759322 4.84163e-06 0.000378788
0.35 0.000630737 5.31699e-06 0.000378788
0.42 0.000541443 5.79167e-06 0.000378788
0.49 0.000475371 6.26558e-06 0.000378788
0.56 0.000424283 6.73867e-06 0.000378788
0.63 0.000383478 7.21082e-06 0.000378788
0.7 0.000350067 7.68193e-06 0.000378788
0.84 0.000298485 8.62071e-06 0.000378788
1.12 0.00023109 1.04821e-05 0.000378788
1.4 0.000188793 1.23171e-05 0.000378788
1.68 0 0.000173809 0.000378788
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0.00135131 4.01959e-05 0.000378788
0.28 0.000759322 4.36983e-05 0.000378788
0.35 0.000630737 4.54475e-05 0.000378788
0.42 0.000541443 4.71935e-05 0.000378788
0.49 0.000475371 4.89363e-05 0.000378788
0.56 0.000424283 5.06757e-05 0.000378788
0.63 0.000383478 5.24118e-05 0.000378788
0.7 0.000350067 5.41445e-05 0.000378788
0.84 0.000298485 5.75978e-05 0.000378788
1.12 0.00023109 6.4444e-05 0.000378788
1.4 0.000188793 7.11934e-05 0.000378788
1.68 0 0.000237514 0.000378788
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0.00135131 7.1698e-05 0.000378788
0.28 0.000759322 7.50558e-05 0.000378788
0.35 0.000630737 7.67302e-05 0.000378788
0.42 0.000541443 7.84049e-05 0.000378788
0.49 0.000475371 8.00741e-05 0.000378788
0.56 0.000424283 8.17434e-05 0.000378788
0.63 0.000383478 8.3407e-05 0.000378788
0.7 0.000350067 8.50679e-05 0.000378788
0.84 0.000298485 8.83773e-05 0.000378788
1.12 0.00023109 9.49387e-05 0.000378788
1.4 0.000188793 0.000101407 0.000378788
1.68 0 0.000267453 0.000378788
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.00135131 2.97276e-05 0.000378788
0.28 0.000759322 3.20558e-05 0.000378788
0.35 0.000630737 3.3218e-05 0.000378788
0.42 0.000541443 3.43785e-05 0.000378788
0.49 0.000475371 3.55373e-05 0.000378788
0.56 0.000424283 3.66941e-05 0.000378788
0.63 0.000383478 3.78483e-05 0.000378788
0.7 0.000350067 3.9e-05 0.000378788
0.84 0.000298485 4.12949e-05 0.000378788
1.12 0.00023109 4.58461e-05 0.000378788
1.4 0.000188793 5.03325e-05 0.000378788
1.68 0 0.00021443 0.000378788
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.00135131 2.27225e-05 0.000378788
0.28 0.000759322 2.4526e-05 0.000378788
0.35 0.000630737 2.54262e-05 0.000378788
0.42 0.000541443 2.63253e-05 0.000378788
0.49 0.000475371 2.72224e-05 0.000378788
0.56 0.000424283 2.81177e-05 0.000378788
0.63 0.000383478 2.90123e-05 0.000378788
0.7 0.000350067 2.99039e-05 0.000378788
0.84 0.000298485 3.16819e-05 0.000378788
1.12 0.00023109 3.52061e-05 0.000378788
1.4 0.000188793 3.86807e-05 0.000378788
1.68 0 0.000201784 0.000378788
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.00135131 9.92197e-06 0.000378788
0.28 0.000759322 1.15642e-05 0.000378788
0.35 0.000630737 1.23839e-05 0.000378788
0.42 0.000541443 1.32025e-05 0.000378788
0.49 0.000475371 1.40197e-05 0.000378788
0.56 0.000424283 1.48356e-05 0.000378788
0.63 0.000383478 1.56497e-05 0.000378788
0.7 0.000350067 1.64622e-05 0.000378788
0.84 0.000298485 1.8081e-05 0.000378788
1.12 0.00023109 2.12908e-05 0.000378788
1.4 0.000188793 2.44552e-05 0.000378788
1.68 0 0.000187253 0.000378788
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 2.90727e-05 0.000378788
0.14 0 2.00931e-05 0.000378788
0.28 0 1.98063e-05 0.000378788
0.35 0 1.96206e-05 0.000378788
0.42 0 1.94383e-05 0.000378788
0.49 0 1.92594e-05 0.000378788
0.56 0 1.90837e-05 0.000378788
0.63 0 1.89113e-05 0.000378788
0.7 0 1.86595e-05 0.000378788
0.84 0 9.24654e-06 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 6.53396e-05 0.000378788
0.14 0 1.92479e-05 0.000378788
0.28 0 1.89848e-05 0.000378788
0.35 0 1.88141e-05 0.000378788
0.42 0 1.86464e-05 0.000378788
0.49 0 1.84817e-05 0.000378788
0.56 0 9.20007e-06 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 4.32151e-05 0.000378788
0.14 0 1.92479e-05 0.000378788
0.28 0 1.89848e-05 0.000378788
0.35 0 1.88141e-05 0.000378788
0.42 0 1.86464e-05 0.000378788
0.49 0 1.84817e-05 0.000378788
0.56 0 9.20007e-06 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 2.45325e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 0.00135142 0.000110004 0.000378788
0.28 0.00075933 0.000115983 0.000378788
0.35 0.000630737 0.000118954 0.000378788
0.42 0.000541443 0.000121917 0.000378788
0.49 0.000475394 0.000124859 0.000378788
0.56 0.000424352 0.000127785 0.000378788
0.63 0.000383578 0.000130709 0.000378788
0.7 0.00035012 0.000133666 0.000378788
0.84 0.000298546 0.000139492 0.000378788
1.12 0.000231129 0.000151049 0.000378788
1.4 0.000188793 0.00016245 0.000378788
1.68 0 0.000333324 0.000378788
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.00135153 6.80529e-05 0.000378788
0.28 0.000759437 7.29357e-05 0.000378788
0.35 0.000630845 7.5372e-05 0.000378788
0.42 0.000541551 7.78035e-05 0.000378788
0.49 0.000475502 8.02302e-05 0.000378788
0.56 0.00042446 8.26516e-05 0.000378788
0.63 0.000383685 8.50682e-05 0.000378788
0.7 0.000350228 8.74835e-05 0.000378788
0.84 0.000298654 9.22929e-05 0.000378788
1.12 0.000231236 0.00010183 0.000378788
1.4 0.0001889 0.000111232 0.000378788
1.68 0 0.000280266 0.000378788
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.00135153 6.10478e-05 0.000378788
0.28 0.00075943 6.55145e-05 0.000378788
0.35 -1.14383e-05 2.64304e-06 0.000378788
0.42 0.000541551 6.77223e-05 0.000378788
0.49 0.000475479 6.98883e-05 0.000378788
0.56 0.000424391 7.205e-05 0.000378788
0.63 0.000383585 7.42086e-05 0.000378788
0.7 0.000350174 7.63617e-05 0.000378788
0.84 0.000298592 8.06541e-05 0.000378788
1.12 0.000231198 8.91632e-05 0.000378788
1.4 0.0001889 9.75522e-05 0.000378788
1.68 0 -2.51275 0.000378788
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.00135142 4.62173e-05 0.000378788
0.28 0.000759322 5.04209e-05 0.000378788
0.35 0.000630737 5.25144e-05 0.000378788
0.42 0.000541443 5.46043e-05 0.000378788
0.49 0.000475371 5.66904e-05 0.000378788
0.56 0.000424283 5.87726e-05 0.000378788
0.63 0.000383478 6.08507e-05 0.000378788
0.7 0.000350067 6.29247e-05 0.000378788
0.84 0.000298485 6.70581e-05 0.000378788
1.12 0.00023109 7.52527e-05 0.000378788
1.4 0.000188793 8.33315e-05 0.000378788
1.68 0 0.000250959 0.000378788
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000757576
0 0.32 0 0.000757576
0 0.46 0 0.000757576
0 0.71 0 0.000757576
0 0.78 0 0.000757576
0 0.92 0 0.000757576
0 1.17 0 0.000757576
0 1.24 0 0.000757576
0 1.38 0 0.000757576
0 1.84 0 0.000757576
0.32 0.32 0 0.000757576
0.32 0.46 0 0.000757576
0.32 0.71 0 0.000757576
0.32 0.78 0 0.000757576
0.32 0.92 0 0.000757576
0.32 1.17 0 0.000757576
0.32 1.24 0 0.000757576
0.32 1.38 0 0.000757576
0.32 1.84 0 0.000757576
0.46 0.46 0 0.000757576
0.46 0.71 0 0.000757576
0.46 0.78 0 0.000757576
0.46 0.92 0 0.000757576
0.46 1.17 0 0.000757576
0.46 1.24 0 0.000757576
0.46 1.38 0 0.000757576
0.46 1.84 0 0.000757576
0.71 0.71 0 0.000757576
0.71 0.78 0 0.000757576
0.71 0.92 0 0.000757576
0.71 1.17 0 0.000757576
0.71 1.24 0 0.000757576
0.71 1.38 0 0.000757576
0.71 1.84 0 0.000757576
0.78 0.78 0 0.000757576
0.78 0.92 0 0.000757576
0.78 1.17 0 0.000757576
0.78 1.24 0 0.000757576
0.78 1.38 0 0.000757576
0.78 1.84 0 0.000757576
0.92 0.92 0 0.000757576
0.92 1.17 0 0.000757576
0.92 1.24 0 0.000757576
0.92 1.38 0 0.000757576
0.92 1.84 0 0.000757576
1.17 1.17 0 0.000757576
1.17 1.24 0 0.000757576
1.17 1.38 0 0.000757576
1.17 1.84 0 0.000757576
1.24 1.24 0 0.000757576
1.24 1.38 0 0.000757576
1.24 1.84 0 0.000757576
1.38 1.38 0 0.000757576
1.38 1.84 0 0.000757576
1.84 0 1.84 0.000757576
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0.00136503 3.70725e-06 0.000378788
0.28 0.000762782 4.60822e-06 0.000378788
0.35 0.000634009 5.05783e-06 0.000378788
0.42 0.000545007 5.50675e-06 0.000378788
0.49 0.000479329 5.95483e-06 0.000378788
0.56 0.000428608 6.40206e-06 0.000378788
0.63 0.000388106 6.84834e-06 0.000378788
0.7 0.000354934 7.29354e-06 0.000378788
0.84 0.000303655 8.18052e-06 0.000378788
1.12 0.000236417 9.93824e-06 0.000378788
1.4 0.000193984 1.16699e-05 0.000378788
1.68 0 0.000178009 0.000378788
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.00136503 2.58946e-05 0.000378788
0.28 0.000762782 2.87255e-05 0.000378788
0.35 0.000634009 3.01384e-05 0.000378788
0.42 0.000545007 3.15498e-05 0.000378788
0.49 0.000479329 3.29573e-05 0.000378788
0.56 0.000428608 3.43626e-05 0.000378788
0.63 0.000388106 3.57652e-05 0.000378788
0.7 0.000354934 3.71643e-05 0.000378788
0.84 0.000303655 3.99513e-05 0.000378788
1.12 0.000236417 4.54755e-05 0.000378788
1.4 0.000193984 5.09176e-05 0.000378788
1.68 0 0.000220899 0.000378788
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 0.00136503 5.71732e-05 0.000378788
0.28 0.000762782 6.09662e-05 0.000378788
0.35 0.000634009 6.28579e-05 0.000378788
0.42 0.000545007 6.47466e-05 0.000378788
0.49 0.000479329 6.66329e-05 0.000378788
0.56 0.000428608 6.85156e-05 0.000378788
0.63 0.000388106 7.0394e-05 0.000378788
0.7 0.000354934 7.22666e-05 0.000378788
0.84 0.000303655 7.59999e-05 0.000378788
1.12 0.000236417 8.33973e-05 0.000378788
1.4 0.000193984 9.06848e-05 0.000378788
1.68 0 0.00026248 0.000378788
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.00136503 4.37613e-05 0.000378788
0.28 0.000762782 4.69524e-05 0.000378788
0.35 0.000634009 4.85451e-05 0.000378788
0.42 0.000545007 5.01353e-05 0.000378788
0.49 0.000479329 5.17229e-05 0.000378788
0.56 0.000428608 5.33068e-05 0.000378788
0.63 0.000388106 5.48872e-05 0.000378788
0.7 0.000354934 5.64648e-05 0.000378788
0.84 0.000303655 5.96066e-05 0.000378788
1.12 0.000236417 6.58322e-05 0.000378788
1.4 0.000193984 7.19662e-05 0.000378788
1.68 0 0.000242627 0.000378788
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.00136503 2.69519e-05 0.000378788
0.28 0.000762782 2.90232e-05 0.000378788
0.35 0.000634009 3.00567e-05 0.000378788
0.42 0.000545007 3.10893e-05 0.000378788
0.49 0.000479329 3.2119e-05 0.000378788
0.56 0.000428608 3.31479e-05 0.000378788
0.63 0.000388106 3.41734e-05 0.000378788
0.7 0.000354934 3.51967e-05 0.000378788
0.84 0.000303655 3.72364e-05 0.000378788
1.12 0.000236417 4.12773e-05 0.000378788
1.4 0.000193984 4.52587e-05 0.000378788
1.68 0 0.000213805 0.000378788
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.00136503 1.16333e-05 0.000378788
0.28 0.000762782 1.34291e-05 0.000378788
0.35 0.000634009 1.43254e-05 0.000378788
0.42 0.000545007 1.52202e-05 0.000378788
0.49 0.000479329 1.61133e-05 0.000378788
0.56 0.000428608 1.70046e-05 0.000378788
0.63 0.000388106 1.78942e-05 0.000378788
0.7 0.000354934 1.87815e-05 0.000378788
0.84 0.000303655 2.05494e-05 0.000378788
1.12 0.000236417 2.4053e-05 0.000378788
1.4 0.000193984 2.75047e-05 0.000378788
1.68 0 0.000195532 0.000378788
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 9.63802e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 4.58952e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 3.19672e-05 0.000378788
0.14 0 0 0.000378788
0.28 0 0 0.000378788
0.35 0 0 0.000378788
0.42 0 0 0.000378788
0.49 0 0 0.000378788
0.56 0 0 0.000378788
0.63 0 0 0.000378788
0.7 0 0 0.000378788
0.84 0 0 0.000378788
1.12 0 0 0.000378788
1.4 0 0 0.000378788
1.68 0 0 0.000378788
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.00136503 6.59487e-05 0.000378788
0.28 0.000762782 7.10697e-05 0.000378788
0.35 0.000634009 7.36257e-05 0.000378788
0.42 0.000545007 7.61784e-05 0.000378788
0.49 0.000479329 7.87254e-05 0.000378788
0.56 0.000428608 8.12673e-05 0.000378788
0.63 0.000388106 8.3804e-05 0.000378788
0.7 0.000354934 8.63355e-05 0.000378788
0.84 0.000303655 9.13774e-05 0.000378788
1.12 0.000236417 0.000101369 0.000378788
1.4 0.000193984 0.000111214 0.000378788
1.68 0 0.000285518 0.000378788
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.00136503 4.91393e-05 0.000378788
0.28 0.000762782 5.31405e-05 0.000378788
0.35 0.000634009 5.51373e-05 0.000378788
0.42 0.000545007 5.71323e-05 0.000378788
0.49 0.000479329 5.91215e-05 0.000378788
0.56 0.000428608 6.11084e-05 0.000378788
0.63 0.000388106 6.30903e-05 0.000378788
0.7 0.000354934 6.50674e-05 0.000378788
0.84 0.000303655 6.90072e-05 0.000378788
1.12 0.000236417 7.68145e-05 0.000378788
1.4 0.000193984 8.45063e-05 0.000378788
1.68 0 0.000256696 0.000378788
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.00136503 3.38207e-05 0.000378788
0.28 0.000762782 3.75464e-05 0.000378788
0.35 0.000634009 3.94059e-05 0.000378788
0.42 0.000545007 4.12632e-05 0.000378788
0.49 0.000479329 4.31158e-05 0.000378788
0.56 0.000428608 4.49651e-05 0.000378788
0.63 0.000388106 4.6811e-05 0.000378788
0.7 0.000354934 4.86522e-05 0.000378788
0.84 0.000303655 5.23202e-05 0.000378788
1.12 0.000236417 5.95903e-05 0.000378788
1.4 0.000193984 6.67524e-05 0.000378788
1.68 0 0.000238423 0.000378788
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 0.00136503 9.72272e-05 0.000378788
0.28 0.000762782 0.00010331 0.000378788
0.35 0.000634009 0.000106345 0.000378788
0.42 0.000545007 0.000109375 0.000378788
0.49 0.000479329 0.000112401 0.000378788
0.56 0.000428608 0.00011542 0.000378788
0.63 0.000388106 0.000118433 0.000378788
0.7 0.000354934 0.000121438 0.000378788
0.84 0.000303655 0.000127426 0.000378788
1.12 0.000236417 0.000139291 0.000378788
1.4 0.000193984 0.000150981 0.000378788
1.68 0 0.000327098 0.000378788
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0.00136503 8.04179e-05 0.000378788
0.28 0.000762782 8.53812e-05 0.000378788
0.35 0.000634009 8.78569e-05 0.000378788
0.42 0.000545007 9.03291e-05 0.000378788
0.49 0.000479329 9.27971e-05 0.000378788
0.56 0.000428608 9.52614e-05 0.000378788
0.63 0.000388106 9.77191e-05 0.000378788
0.7 0.000354934 0.00010017 0.000378788
0.84 0.000303655 0.000105056 0.000378788
1.12 0.000236417 0.000114736 0.000378788
1.4 0.000193984 0.000124274 0.000378788
1.68 0 0.000298276 0.000378788
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0.00136503 6.50992e-05 0.000378788
0.28 0.000762782 6.97871e-05 0.000378788
0.35 0.000634009 7.21255e-05 0.000378788
0.42 0.000545007 7.446e-05 0.000378788
0.49 0.000479329 7.67914e-05 0.000378788
0.56 0.000428608 7.91181e-05 0.000378788
0.63 0.000388106 8.14399e-05 0.000378788
0.7 0.000354934 8.37546e-05 0.000378788
0.84 0.000303655 8.83688e-05 0.000378788
1.12 0.000236417 9.75121e-05 0.000378788
1.4 0.000193984 0.00010652 0.000378788
1.68 0 0.000280003 0.000378788
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000127946
0 0.38 0 0.000127946
0 0.68 0 0.000127946
0 0.91 0 0.000127946
0 1.06 0 0.000127946
0 1.36 0 0.000127946
0 1.59 0 0.000127946
0 1.74 0 0.000127946
0 2.04 0 0.000127946
0 2.72 0 0.000127946
0.38 0.38 0 0.000127946
0.38 0.68 0 0.000127946
0.38 0.91 0 0.000127946
0.38 1.06 0 0.000127946
0.38 1.36 0 0.000127946
0.38 1.59 0 0.000127946
0.38 1.74 0 0.000127946
0.38 2.04 0 0.000127946
0.38 2.72 0 0.000127946
0.68 0.68 0 0.000127946
0.68 0.91 0 0.000127946
0.68 1.06 0 0.000127946
0.68 1.36 0 0.000127946
0.68 1.59 0 0.000127946
0.68 1.74 0 0.000127946
0.68 2.04 0 0.000127946
0.68 2.72 0 0.000127946
0.91 0.91 0 0.000127946
0.91 1.06 0 0.000127946
0.91 1.36 0 0.000127946
0.91 1.59 0 0.000127946
0.91 1.74 0 0.000127946
0.91 2.04 0 0.000127946
0.91 2.72 0 0.000127946
1.06 1.06 0 0.000127946
1.06 1.36 0 0.000127946
1.06 1.59 0 0.000127946
1.06 1.74 0 0.000127946
1.06 2.04 0 0.000127946
1.06 2.72 0 0.000127946
1.36 1.36 0 0.000127946
1.36 1.59 0 0.000127946
1.36 1.74 0 0.000127946
1.36 2.04 0 0.000127946
1.36 2.72 0 0.000127946
1.59 1.59 0 0.000127946
1.59 1.74 0 0.000127946
1.59 2.04 0 0.000127946
1.59 2.72 0 0.000127946
1.74 1.74 0 0.000127946
1.74 2.04 0 0.000127946
1.74 2.72 0 0.000127946
2.04 2.04 0 0.000127946
2.04 2.72 0 0.000127946
2.72 0 2.72 0.000127946
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.000951666 6.46392e-06 6.39731e-05
0.6 0.00053508 8.57837e-06 6.39731e-05
0.75 0.000444305 9.62737e-06 6.39731e-05
0.9 0.000381219 1.06697e-05 6.39731e-05
1.05 0.000334527 1.17044e-05 6.39731e-05
1.2 0.000298424 1.27306e-05 6.39731e-05
1.35 0.000269593 1.37474e-05 6.39731e-05
1.5 0.000245993 1.4754e-05 6.39731e-05
1.8 0.000209576 1.67328e-05 6.39731e-05
2.4 0.000162047 2.05295e-05 6.39731e-05
3 0.00013226 2.40678e-05 6.39731e-05
3.6 0 0.000139089 6.39731e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.000951666 4.27882e-05 6.39731e-05
0.6 0.00053508 4.90439e-05 6.39731e-05
0.75 0.000444305 5.21493e-05 6.39731e-05
0.9 0.000381219 5.52337e-05 6.39731e-05
1.05 0.000334527 5.8294e-05 6.39731e-05
1.2 0.000298424 6.13316e-05 6.39731e-05
1.35 0.000269593 6.43407e-05 6.39731e-05
1.5 0.000245993 6.73183e-05 6.39731e-05
1.8 0.000209576 7.31749e-05 6.39731e-05
2.4 0.000162047 8.44074e-05 6.39731e-05
3 0.00013226 9.48787e-05 6.39731e-05
3.6 0 0.00021623 6.39731e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.000951666 7.48039e-05 6.39731e-05
0.6 0.00053508 8.1937e-05 6.39731e-05
0.75 0.000444305 8.54773e-05 6.39731e-05
0.9 0.000381219 8.89959e-05 6.39731e-05
1.05 0.000334527 9.24863e-05 6.39731e-05
1.2 0.000298424 9.595e-05 6.39731e-05
1.35 0.000269593 9.93835e-05 6.39731e-05
1.5 0.000245993 0.00010278 6.39731e-05
1.8 0.000209576 0.000109456 6.39731e-05
2.4 0.000162047 0.00012227 6.39731e-05
3 0.00013226 0.000134209 6.39731e-05
3.6 0 0.000256903 6.39731e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.000951666 0.000120425 6.39731e-05
0.6 0.00053508 0.000129167 6.39731e-05
0.75 0.000444305 0.000133504 6.39731e-05
0.9 0.000381219 0.000137813 6.39731e-05
1.05 0.000334527 0.000142093 6.39731e-05
1.2 0.000298424 0.000146336 6.39731e-05
1.35 0.000269593 0.000150539 6.39731e-05
1.5 0.000245993 0.000154701 6.39731e-05
1.8 0.000209576 0.000162883 6.39731e-05
2.4 0.000162047 0.00017858 6.39731e-05
3 0.00013226 0.00019321 6.39731e-05
3.6 0 0.000318361 6.39731e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.000951666 9.48431e-05 6.39731e-05
0.6 0.00053508 0.000101566 6.39731e-05
0.75 0.000444305 0.000104901 6.39731e-05
0.9 0.000381219 0.000108215 6.39731e-05
1.05 0.000334527 0.000111505 6.39731e-05
1.2 0.000298424 0.000114768 6.39731e-05
1.35 0.000269593 0.000118001 6.39731e-05
1.5 0.000245993 0.000121201 6.39731e-05
1.8 0.000209576 0.000127493 6.39731e-05
2.4 0.000162047 0.000139564 6.39731e-05
3 0.00013226 0.000150814 6.39731e-05
3.6 0 0.000272877 6.39731e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000951666 2.78409e-05 6.39731e-05
0.6 0.00053508 3.31244e-05 6.39731e-05
0.75 0.000444305 3.57454e-05 6.39731e-05
0.9 0.000381219 3.835e-05 6.39731e-05
1.05 0.000334527 4.09354e-05 6.39731e-05
1.2 0.000298424 4.34997e-05 6.39731e-05
1.35 0.000269593 4.60405e-05 6.39731e-05
1.5 0.000245993 4.85555e-05 6.39731e-05
1.8 0.000209576 5.35e-05 6.39731e-05
2.4 0.000162047 6.29866e-05 6.39731e-05
3 0.00013226 7.18282e-05 6.39731e-05
3.6 0 0.000191692 6.39731e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 2.54636e-05 6.39731e-05
0.3 0 0 6.39731e-05
0.6 0 0 6.39731e-05
0.75 0 0 6.39731e-05
0.9 0 0 6.39731e-05
1.05 0 0 6.39731e-05
1.2 0 0 6.39731e-05
1.35 0 0 6.39731e-05
1.5 0 0 6.39731e-05
1.8 0 0 6.39731e-05
2.4 0 0 6.39731e-05
3 0 0 6.39731e-05
3.6 0 0 6.39731e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 5.93828e-05 6.39731e-05
0.3 0 0 6.39731e-05
0.6 0 0 6.39731e-05
0.75 0 0 6.39731e-05
0.9 0 0 6.39731e-05
1.05 0 0 6.39731e-05
1.2 0 0 6.39731e-05
1.35 0 0 6.39731e-05
1.5 0 0 6.39731e-05
1.8 0 0 6.39731e-05
2.4 0 0 6.39731e-05
3 0 0 6.39731e-05
3.6 0 0 6.39731e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.000951666 0.000131167 6.39731e-05
0.6 0.00053508 0.000142031 6.39731e-05
0.75 0.000444305 0.000147423 6.39731e-05
0.9 0.000381219 0.000152779 6.39731e-05
1.05 0.000334527 0.000158094 6.39731e-05
1.2 0.000298424 0.000163369 6.39731e-05
1.35 0.000269593 0.000168594 6.39731e-05
1.5 0.000245993 0.000173765 6.39731e-05
1.8 0.000209576 0.000183935 6.39731e-05
2.4 0.000162047 0.000203442 6.39731e-05
3 0.00013226 0.000221625 6.39731e-05
3.6 0 0.000350018 6.39731e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000951666 6.41652e-05 6.39731e-05
0.6 0.00053508 7.35899e-05 6.39731e-05
0.75 0.000444305 7.82673e-05 6.39731e-05
0.9 0.000381219 8.29139e-05 6.39731e-05
1.05 0.000334527 8.7525e-05 6.39731e-05
1.2 0.000298424 9.21007e-05 6.39731e-05
1.35 0.000269593 9.66337e-05 6.39731e-05
1.5 0.000245993 0.00010112 6.39731e-05
1.8 0.000209576 0.000109942 6.39731e-05
2.4 0.000162047 0.000126864 6.39731e-05
3 0.00013226 0.000142639 6.39731e-05
3.6 0 0.000268833 6.39731e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0.000951666 0.000163183 6.39731e-05
0.6 0.00053508 0.000174924 6.39731e-05
0.75 0.000444305 0.000180751 6.39731e-05
0.9 0.000381219 0.000186542 6.39731e-05
1.05 0.000334527 0.000192287 6.39731e-05
1.2 0.000298424 0.000197987 6.39731e-05
1.35 0.000269593 0.000203637 6.39731e-05
1.5 0.000245993 0.000209227 6.39731e-05
1.8 0.000209576 0.000220215 6.39731e-05
2.4 0.000162047 0.000241304 6.39731e-05
3 0.00013226 0.000260955 6.39731e-05
3.6 0 0.000390692 6.39731e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000951666 9.61809e-05 6.39731e-05
0.6 0.00053508 0.000106483 6.39731e-05
0.75 0.000444305 0.000111595 6.39731e-05
0.9 0.000381219 0.000116676 6.39731e-05
1.05 0.000334527 0.000121717 6.39731e-05
1.2 0.000298424 0.000126719 6.39731e-05
1.35 0.000269593 0.000131677 6.39731e-05
1.5 0.000245993 0.000136582 6.39731e-05
1.8 0.000209576 0.000146223 6.39731e-05
2.4 0.000162047 0.000164727 6.39731e-05
3 0.00013226 0.000181969 6.39731e-05
3.6 0 0.000309506 6.39731e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 0.000951666 0.000208804 6.39731e-05
0.6 0.00053508 0.000222154 6.39731e-05
0.75 0.000444305 0.000228778 6.39731e-05
0.9 0.000381219 0.000235359 6.39731e-05
1.05 0.000334527 0.000241893 6.39731e-05
1.2 0.000298424 0.000248374 6.39731e-05
1.35 0.000269593 0.000254792 6.39731e-05
1.5 0.000245993 0.000261147 6.39731e-05
1.8 0.000209576 0.000273643 6.39731e-05
2.4 0.000162047 0.000297615 6.39731e-05
3 0.00013226 0.000319957 6.39731e-05
3.6 0 0.00045215 6.39731e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000951666 0.000141802 6.39731e-05
0.6 0.00053508 0.000153713 6.39731e-05
0.75 0.000444305 0.000159622 6.39731e-05
0.9 0.000381219 0.000165494 6.39731e-05
1.05 0.000334527 0.000171324 6.39731e-05
1.2 0.000298424 0.000177105 6.39731e-05
1.35 0.000269593 0.000182832 6.39731e-05
1.5 0.000245993 0.000188502 6.39731e-05
1.8 0.000209576 0.00019965 6.39731e-05
2.4 0.000162047 0.000221037 6.39731e-05
3 0.00013226 0.000240971 6.39731e-05
3.6 0 0.000370964 6.39731e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000127946
0 0.62 0 0.000127946
0 0.92 0 0.000127946
0 1.39 0 0.000127946
0 1.54 0 0.000127946
0 1.84 0 0.000127946
0 2.31 0 0.000127946
0 2.46 0 0.000127946
0 2.76 0 0.000127946
0 3.68 0 0.000127946
0.62 0.62 0 0.000127946
0.62 0.92 0 0.000127946
0.62 1.39 0 0.000127946
0.62 1.54 0 0.000127946
0.62 1.84 0 0.000127946
0.62 2.31 0 0.000127946
0.62 2.46 0 0.000127946
0.62 2.76 0 0.000127946
0.62 3.68 0 0.000127946
0.92 0.92 0 0.000127946
0.92 1.39 0 0.000127946
0.92 1.54 0 0.000127946
0.92 1.84 0 0.000127946
0.92 2.31 0 0.000127946
0.92 2.46 0 0.000127946
0.92 2.76 0 0.000127946
0.92 3.68 0 0.000127946
1.39 1.39 0 0.000127946
1.39 1.54 0 0.000127946
1.39 1.84 0 0.000127946
1.39 2.31 0 0.000127946
1.39 2.46 0 0.000127946
1.39 2.76 0 0.000127946
1.39 3.68 0 0.000127946
1.54 1.54 0 0.000127946
1.54 1.84 0 0.000127946
1.54 2.31 0 0.000127946
1.54 2.46 0 0.000127946
1.54 2.76 0 0.000127946
1.54 3.68 0 0.000127946
1.84 1.84 0 0.000127946
1.84 2.31 0 0.000127946
1.84 2.46 0 0.000127946
1.84 2.76 0 0.000127946
1.84 3.68 0 0.000127946
2.31 2.31 0 0.000127946
2.31 2.46 0 0.000127946
2.31 2.76 0 0.000127946
2.31 3.68 0 0.000127946
2.46 2.46 0 0.000127946
2.46 2.76 0 0.000127946
2.46 3.68 0 0.000127946
2.76 2.76 0 0.000127946
2.76 3.68 0 0.000127946
3.68 0 3.68 0.000127946
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.000945543 6.27513e-06 6.39731e-05
0.6 0.000529248 8.16389e-06 6.39731e-05
0.75 0.000439902 9.0999e-06 6.39731e-05
0.9 0.000378071 1.00293e-05 6.39731e-05
1.05 0.000332407 1.09512e-05 6.39731e-05
1.2 0.000297125 1.18648e-05 6.39731e-05
1.35 0.000268947 1.27694e-05 6.39731e-05
1.5 0.000245866 1.36642e-05 6.39731e-05
1.8 0.000210191 1.54211e-05 6.39731e-05
2.4 0.000163442 1.87833e-05 6.39731e-05
3 0.000133973 2.19049e-05 6.39731e-05
3.6 0 0.000138357 6.39731e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.000945543 3.26326e-05 6.39731e-05
0.6 0.000529248 3.79529e-05 6.39731e-05
0.75 0.000439902 4.05884e-05 6.39731e-05
0.9 0.000378071 4.32057e-05 6.39731e-05
1.05 0.000332407 4.58038e-05 6.39731e-05
1.2 0.000297125 4.83774e-05 6.39731e-05
1.35 0.000268947 5.09257e-05 6.39731e-05
1.5 0.000245866 5.34454e-05 6.39731e-05
1.8 0.000210191 5.83944e-05 6.39731e-05
2.4 0.000163442 6.78664e-05 6.39731e-05
3 0.000133973 7.66583e-05 6.39731e-05
3.6 0 0.000198267 6.39731e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.000945543 5.12285e-05 6.39731e-05
0.6 0.000529248 5.68928e-05 6.39731e-05
0.75 0.000439902 5.9698e-05 6.39731e-05
0.9 0.000378071 6.24848e-05 6.39731e-05
1.05 0.000332407 6.52497e-05 6.39731e-05
1.2 0.000297125 6.7989e-05 6.39731e-05
1.35 0.000268947 7.0702e-05 6.39731e-05
1.5 0.000245866 7.33849e-05 6.39731e-05
1.8 0.000210191 7.86544e-05 6.39731e-05
2.4 0.000163442 8.87386e-05 6.39731e-05
3 0.000133973 9.80999e-05 6.39731e-05
3.6 0 0.000220223 6.39731e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.000945543 6.51076e-05 6.39731e-05
0.6 0.000529248 7.12162e-05 6.39731e-05
0.75 0.000439902 7.42417e-05 6.39731e-05
0.9 0.000378071 7.72485e-05 6.39731e-05
1.05 0.000332407 8.02301e-05 6.39731e-05
1.2 0.000297125 8.31858e-05 6.39731e-05
1.35 0.000268947 8.6109e-05 6.39731e-05
1.5 0.000245866 8.90044e-05 6.39731e-05
1.8 0.000210191 9.46862e-05 6.39731e-05
2.4 0.000163442 0.000105559 6.39731e-05
3 0.000133973 0.000115656 6.39731e-05
3.6 0 0.000238447 6.39731e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0.000945543 7.42493e-05 6.39731e-05
0.6 0.000529248 8.27711e-05 6.39731e-05
0.75 0.000439902 8.69935e-05 6.39731e-05
0.9 0.000378071 9.1187e-05 6.39731e-05
1.05 0.000332407 9.53466e-05 6.39731e-05
1.2 0.000297125 9.94684e-05 6.39731e-05
1.35 0.000268947 0.000103549 6.39731e-05
1.5 0.000245866 0.000107587 6.39731e-05
1.8 0.000210191 0.000115513 6.39731e-05
2.4 0.000163442 0.000130682 6.39731e-05
3 0.000133973 0.000144766 6.39731e-05
3.6 0 0.000271184 6.39731e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.000945543 4.6953e-05 6.39731e-05
0.6 0.000529248 5.39328e-05 6.39731e-05
0.75 0.000439902 5.73917e-05 6.39731e-05
0.9 0.000378071 6.08258e-05 6.39731e-05
1.05 0.000332407 6.42328e-05 6.39731e-05
1.2 0.000297125 6.7609e-05 6.39731e-05
1.35 0.000268947 7.09518e-05 6.39731e-05
1.5 0.000245866 7.42583e-05 6.39731e-05
1.8 0.000210191 8.07506e-05 6.39731e-05
2.4 0.000163442 9.31754e-05 6.39731e-05
3 0.000133973 0.000104711 6.39731e-05
3.6 0 0.000228812 6.39731e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 0.000108423 6.39731e-05
0.3 0 0 6.39731e-05
0.6 0 0 6.39731e-05
0.75 0 0 6.39731e-05
0.9 0 0 6.39731e-05
1.05 0 0 6.39731e-05
1.2 0 0 6.39731e-05
1.35 0 0 6.39731e-05
1.5 0 0 6.39731e-05
1.8 0 0 6.39731e-05
2.4 0 0 6.39731e-05
3 0 0 6.39731e-05
3.6 0 0 6.39731e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000945543 7.33105e-05 6.39731e-05
0.6 0.000529248 8.37218e-05 6.39731e-05
0.75 0.000439902 8.88802e-05 6.39731e-05
0.9 0.000378071 9.40022e-05 6.39731e-05
1.05 0.000332407 9.90854e-05 6.39731e-05
1.2 0.000297125 0.000104122 6.39731e-05
1.35 0.000268947 0.000109108 6.39731e-05
1.5 0.000245866 0.00011404 6.39731e-05
1.8 0.000210191 0.000123724 6.39731e-05
2.4 0.000163442 0.000142258 6.39731e-05
3 0.000133973 0.000159464 6.39731e-05
3.6 0 0.000288722 6.39731e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000945543 9.19063e-05 6.39731e-05
0.6 0.000529248 0.000102662 6.39731e-05
0.75 0.000439902 0.00010799 6.39731e-05
0.9 0.000378071 0.000113281 6.39731e-05
1.05 0.000332407 0.000118531 6.39731e-05
1.2 0.000297125 0.000123733 6.39731e-05
1.35 0.000268947 0.000128884 6.39731e-05
1.5 0.000245866 0.000133979 6.39731e-05
1.8 0.000210191 0.000143984 6.39731e-05
2.4 0.000163442 0.000163131 6.39731e-05
3 0.000133973 0.000180906 6.39731e-05
3.6 0 0.000310677 6.39731e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000945543 0.000105785 6.39731e-05
0.6 0.000529248 0.000116985 6.39731e-05
0.75 0.000439902 0.000122533 6.39731e-05
0.9 0.000378071 0.000128045 6.39731e-05
1.05 0.000332407 0.000133512 6.39731e-05
1.2 0.000297125 0.00013893 6.39731e-05
1.35 0.000268947 0.000144291 6.39731e-05
1.5 0.000245866 0.000149598 6.39731e-05
1.8 0.000210191 0.000160016 6.39731e-05
2.4 0.000163442 0.000179951 6.39731e-05
3 0.000133973 0.000198462 6.39731e-05
3.6 0 0.000328902 6.39731e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000945543 0.000114927 6.39731e-05
0.6 0.000529248 0.00012854 6.39731e-05
0.75 0.000439902 0.000135285 6.39731e-05
0.9 0.000378071 0.000141984 6.39731e-05
1.05 0.000332407 0.000148628 6.39731e-05
1.2 0.000297125 0.000155213 6.39731e-05
1.35 0.000268947 0.000161731 6.39731e-05
1.5 0.000245866 0.000168181 6.39731e-05
1.8 0.000210191 0.000180842 6.39731e-05
2.4 0.000163442 0.000205074 6.39731e-05
3 0.000133973 0.000227572 6.39731e-05
3.6 0 0.000361638 6.39731e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 1.32576e-05
0 1.8 0 1.32576e-05
0 3.4 0 1.32576e-05
0 4.4 0 1.32576e-05
0 5.2 0 1.32576e-05
0 6.8 0 1.32576e-05
0 7.8 0 1.32576e-05
0 8.6 0 1.32576e-05
0 10.2 0 1.32576e-05
0 13.6 0 1.32576e-05
1.8 1.8 0 1.32576e-05
1.8 3.4 0 1.32576e-05
1.8 4.4 0 1.32576e-05
1.8 5.2 0 1.32576e-05
1.8 6.8 0 1.32576e-05
1.8 7.8 0 1.32576e-05
1.8 8.6 0 1.32576e-05
1.8 10.2 0 1.32576e-05
1.8 13.6 0 1.32576e-05
3.4 3.4 0 1.32576e-05
3.4 4.4 0 1.32576e-05
3.4 5.2 0 1.32576e-05
3.4 6.8 0 1.32576e-05
3.4 7.8 0 1.32576e-05
3.4 8.6 0 1.32576e-05
3.4 10.2 0 1.32576e-05
3.4 13.6 0 1.32576e-05
4.4 4.4 0 1.32576e-05
4.4 5.2 0 1.32576e-05
4.4 6.8 0 1.32576e-05
4.4 7.8 0 1.32576e-05
4.4 8.6 0 1.32576e-05
4.4 10.2 0 1.32576e-05
4.4 13.6 0 1.32576e-05
5.2 5.2 0 1.32576e-05
5.2 6.8 0 1.32576e-05
5.2 7.8 0 1.32576e-05
5.2 8.6 0 1.32576e-05
5.2 10.2 0 1.32576e-05
5.2 13.6 0 1.32576e-05
6.8 6.8 0 1.32576e-05
6.8 7.8 0 1.32576e-05
6.8 8.6 0 1.32576e-05
6.8 10.2 0 1.32576e-05
6.8 13.6 0 1.32576e-05
7.8 7.8 0 1.32576e-05
7.8 8.6 0 1.32576e-05
7.8 10.2 0 1.32576e-05
7.8 13.6 0 1.32576e-05
8.6 8.6 0 1.32576e-05
8.6 10.2 0 1.32576e-05
8.6 13.6 0 1.32576e-05
10.2 10.2 0 1.32576e-05
10.2 13.6 0 1.32576e-05
13.6 0 13.6 1.32576e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 0.000294333 2.48033e-05 6.62879e-06
3.2 0.000165546 3.19741e-05 6.62879e-06
4 0.000137404 3.45975e-05 6.62879e-06
4.8 7.43266e-05 3.3161e-05 6.62879e-06
5.6 6.37085e-05 3.60303e-05 6.62879e-06
6.4 5.57449e-05 3.81316e-05 6.62879e-06
7.2 4.9551e-05 3.94129e-05 6.62879e-06
8 0 3.98428e-05 6.62879e-06
9.6 0 3.98428e-05 6.62879e-06
12.8 0 3.98428e-05 6.62879e-06
16 0 3.98428e-05 6.62879e-06
19.2 0 3.98428e-05 6.62879e-06
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 0.000294333 0.000135466 6.62879e-06
3.2 0.000165546 0.000155287 6.62879e-06
4 0.000137404 0.000162538 6.62879e-06
4.8 7.43266e-05 0.000158568 6.62879e-06
5.6 6.37085e-05 0.000166498 6.62879e-06
6.4 5.57449e-05 0.000172305 6.62879e-06
7.2 4.9551e-05 0.000175845 6.62879e-06
8 0 0.000177035 6.62879e-06
9.6 0 0.000177035 6.62879e-06
12.8 0 0.000177035 6.62879e-06
16 0 0.000177035 6.62879e-06
19.2 0 0.000177035 6.62879e-06
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 0.000294333 0.000204128 6.62879e-06
3.2 0.000165546 0.00022479 6.62879e-06
4 0.000137404 0.000232353 6.62879e-06
4.8 7.43266e-05 0.000228213 6.62879e-06
5.6 6.37085e-05 0.00023648 6.62879e-06
6.4 5.57449e-05 0.000242536 6.62879e-06
7.2 4.9551e-05 0.00024623 6.62879e-06
8 0 0.000247466 6.62879e-06
9.6 0 0.000247466 6.62879e-06
12.8 0 0.000247466 6.62879e-06
16 0 0.000247466 6.62879e-06
19.2 0 0.000247466 6.62879e-06
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 0.000294333 0.000250439 6.62879e-06
3.2 0.000165546 0.000272105 6.62879e-06
4 0.000137404 0.000280032 6.62879e-06
4.8 7.43266e-05 0.00027569 6.62879e-06
5.6 6.37085e-05 0.000284361 6.62879e-06
6.4 5.57449e-05 0.00029071 6.62879e-06
7.2 4.9551e-05 0.000294584 6.62879e-06
8 0 0.000295882 6.62879e-06
9.6 0 0.000295882 6.62879e-06
12.8 0 0.000295882 6.62879e-06
16 0 0.000295882 6.62879e-06
19.2 0 0.000295882 6.62879e-06
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 0.000294333 0.000237984 6.62879e-06
3.2 0.000165546 0.000262864 6.62879e-06
4 0.000137404 0.000271967 6.62879e-06
4.8 7.43266e-05 0.000266983 6.62879e-06
5.6 6.37085e-05 0.00027694 6.62879e-06
6.4 5.57449e-05 0.000284229 6.62879e-06
7.2 4.9551e-05 0.000288676 6.62879e-06
8 0 0.000290167 6.62879e-06
9.6 0 0.000290167 6.62879e-06
12.8 0 0.000290167 6.62879e-06
16 0 0.000290167 6.62879e-06
19.2 0 0.000290167 6.62879e-06
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 0.000294333 0.000402607 6.62879e-06
3.2 0.000165546 0.000437872 6.62879e-06
4 0.000137404 0.000450775 6.62879e-06
4.8 7.43266e-05 0.00044371 6.62879e-06
5.6 6.37085e-05 0.000457821 6.62879e-06
6.4 5.57449e-05 0.000468155 6.62879e-06
7.2 4.9551e-05 0.000474457 6.62879e-06
8 0 0.000476571 6.62879e-06
9.6 0 0.000476571 6.62879e-06
12.8 0 0.000476571 6.62879e-06
16 0 0.000476571 6.62879e-06
19.2 0 0.000476571 6.62879e-06
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0