OPAMP_Layout_Files/sky130A.tech

#------------------------------------------------------------------------
# Copyright (c) 2020 R. Timothy Edwards
# Revisions:  See below
#
# This file is an Open Source foundry process describing
# the SkyWater sky130 hybrid 0.18um / 0.13um fabrication
# process.  The file may be distributed under the terms
# of the Apache 2.0 license agreement.
#
#------------------------------------------------------------------------
# This file is designed to be used with magic versions
# 8.3.24 or newer.
#------------------------------------------------------------------------
tech
  format 35
  sky130A
end

version
 version 1.0.85-0-g32cdb20
 description "SkyWater SKY130: PRE ALPHA Vendor Open Source rules and DRC"
end

#------------------------------------------------------------------------
# Status 7/10/20: Rev 1 (alpha):
# First public release
# Status 8/14/20: Rev 2 (alpha):
# Started updating with new device/model naming convention
#------------------------------------------------------------------------

#------------------------------------------------------------------------
# Supported device types
#------------------------------------------------------------------------
# device name			magic ID layer	description
#------------------------------------------------------------------------
# sky130_fd_pr__nfet_01v8	nfet		standard nFET
# sky130_fd_pr__nfet_01v8	scnfet		standard nFET in standard cell**
# sky130_fd_pr__special_nfet_latch npd		special nFET in SRAM cell
# sky130_fd_pr__special_nfet_pass  npass	special nFET in SRAM cell
# sky130_fd_pr__nfet_01v8_lvt	nfetlvt		low Vt nFET
# sky130_fd_bs_flash__special_sonosfet_star nsonos SONOS nFET
# sky130_fd_pr__pfet_01v8	pfet		standard pFET
# sky130_fd_pr__pfet_01v8	scpfet		standard pFET in standard cell**
# sky130_fd_pr__special_pfet_pass ppu		special pFET in SRAM cell
# sky130_fd_pr__pfet_01v8_lvt	pfetlvt		low Vt pFET
# sky130_fd_pr__pfet_01v8_mvt	pfetmvt		med Vt pFET
# sky130_fd_pr__pfet_01v8_hvt	pfethvt		high Vt pFET
# sky130_fd_pr__nfet_03v3_nvt	---		native nFET
# sky130_fd_pr__pfet_g5v0d10v5	mvpfet		thickox pFET
# sky130_fd_pr__nfet_g5v0d10v5	mvnfet		thickox nFET
# sky130_fd_pr__nfet_01v8_nvt	mvnnfet		thickox native nFET
# sky130_fd_pr__diode_pw2nd_05v5 ndiode		n+ diff diode
# sky130_fd_pr__diode_pw2nd_05v5_lvt ndiodelvt	low Vt n+ diff diode
# sky130_fd_pr__diode_pw2nd_05v5_nvt nndiode	diode with nndiff
# sky130_fd_pr__diode_pw2nd_11v0 mvndiode	thickox n+ diff diode
# sky130_fd_pr__diode_pd2nw_05v5 pdiode		p+ diff diode
# sky130_fd_pr__diode_pd2nw_05v5_lvt pdiodelvt	low Vt p+ diff diode
# sky130_fd_pr__diode_pd2nw_05v5_hvt pdiodehvt	high Vt p+ diff diode
# sky130_fd_pr__diode_pd2nw_11v0 mvpdiode	thickox p+ diff diode
# sky130_fd_pr__npn_05v0	pbase		NPN in deep nwell
# sky130_fd_pr__npn_11v0	pbase		thick oxide gated NPN
# sky130_fd_pr__pnp_05v0	nbase		PNP
# sky130_fd_pr__cap_mim_m3_1	mimcap		MiM cap 1st plate
# sky130_fd_pr__cap_mim_m3_2	mimcap2		MiM cap 2nd plate
# sky130_fd_pr__res_generic_nd	rdn		n+ diff resistor
# sky130_fd_pr__res_generic_nd__hv mvrdn	thickox n+ diff resistor
# sky130_fd_pr__res_generic_pd	rdp		p+ diff resistor
# sky130_fd_pr__res_generic_pd__nv mvrdp	thickox p+ diff resistor
# sky130_fd_pr__res_generic_l1	rli		local interconnect resistor
# sky130_fd_pr__res_generic_po	npres		n+ poly resistor
# sky130_fd_pr__res_high_po_*	ppres (*)	p+ poly resistor (300 Ohms/sq)
# sky130_fd_pr__res_xhigh_po_*	xres (*)	p+ poly resistor (2k Ohms/sq)
# sky130_fd_pr__cap_var_lvt	varactor	low Vt varactor
# sky130_fd_pr__cap_var_hvt	varactorhvt	high Vt varactor
# sky130_fd_pr__cap_var		mvvaractor	thickox varactor
# sky130_fd_pr__res_iso_pw	rpw		pwell resistor (in deep nwell)
#
# (*) Note that ppres may extract into some generic type called
# "sky130_fd_pr__res_xhigh_po", but only specific sizes of xhrpoly are
# allowed, and these are created from fixed layouts like the types below.
#
# (**) nFET and pFET in standard cells are the same as devices
# outside of the standard cell except for the DRC rule for
# FET to diffusion contact spacing (which is 0.05um, not 0.055um)
#
#-------------------------------------------------------------
# The following devices are not extracted but are represented
# only by script-generated subcells in the PDK.
#-------------------------------------------------------------
# sky130_fd_pr__esd_nfet_01v8		ESD nFET
# sky130_fd_pr__esd_nfet_g5v0d10v5	ESD thickox nFET
# sky130_fd_pr__esd_nfet_05v0_nvt	ESD native nFET
# sky130_fd_pr__esd_pfet_g5v0d10v5	ESD thickox pFET
# sky130_fd_pr__special_nfet_pass_flash	flash nFET device
# sky130_fd_pr__esd_rf_diode_pw2nd_11v0	ESD n+ diode
# sky130_fd_pr__esd_rf_diode_pd2nw_11v0	ESD p+ diode
# sky130_fd_pr__cap_vpp_*		Vpp cap
# sky130_fd_pr__ind_*			inductor
# sky130_fd_pr__fuse_m4			metal fuse device
#--------------------------------------------------------------

#-----------------------------------------------------
# Tile planes
#-----------------------------------------------------

planes
  dwell,dw
  well,w
  active,a
  locali,li1,li
  metal1,m1
  metal2,m2
  metal3,m3
  cap1,c1
  metal4,m4
  cap2,c2
  metal5,m5
  metali,mi
  block,b
  comment,c
end

#-----------------------------------------------------
# Tile types
#-----------------------------------------------------

types
# Deep nwell
  dwell dnwell,dnw

# Wells
  well nwell,nw
  well pwell,pw
  well rpw,rpwell
 -well obswell
  well pbase,npn
  well nbase,pnp

# Transistors
  active nmos,ntransistor,nfet
 -active scnmos,scntransistor,scnfet
 -active npd,npdfet,sramnfet
 -active npass,npassfet,srampassfet
  active pmos,ptransistor,pfet
 -active scpmos,scptransistor,scpfet
 -active scpmoshvt,scpfethvt
 -active ppu,ppufet,srampfet
  active nnmos,nntransistor
  active mvnmos,mvntransistor,mvnfet
  active mvpmos,mvptransistor,mvpfet
  active mvnnmos,mvnntransistor,mvnnfet,nnfet
  active varactor,varact,var
  active mvvaractor,mvvaract,mvvar

  active pmoslvt,pfetlvt
  active pmosmvt,pfetmvt
  active pmoshvt,pfethvt
  active nmoslvt,nfetlvt
  active varactorhvt,varacthvt,varhvt
 -active nsonos,sonos
  active sramnvar,corenvar,corenvaractor
  active srampvar,corepvar,corepvaractor

# Diffusions
  active ndiff,ndiffusion,ndif
  active pdiff,pdiffusion,pdif
  active mvndiff,mvndiffusion,mvndif
  active mvpdiff,mvpdiffusion,mvpdif
  active ndiffc,ndcontact,ndc
  active pdiffc,pdcontact,pdc
  active mvndiffc,mvndcontact,mvndc
  active mvpdiffc,mvpdcontact,mvpdc
  active psubdiff,psubstratepdiff,ppdiff,ppd,psd
  active nsubdiff,nsubstratendiff,nndiff,nnd,nsd
  active mvpsubdiff,mvpsubstratepdiff,mvppdiff,mvppd,mvpsd
  active mvnsubdiff,mvnsubstratendiff,mvnndiff,mvnnd,mvnsd
  active psubdiffcont,psubstratepcontact,psc
  active nsubdiffcont,nsubstratencontact,nsc
  active mvpsubdiffcont,mvpsubstratepcontact,mvpsc
  active mvnsubdiffcont,mvnsubstratencontact,mvnsc
 -active obsactive
 -active mvobsactive

# Poly
  active poly,p,polysilicon
  active polycont,pc,pcontact,polycut,polyc
  active xpolycontact,xpolyc,xpc

# Resistors
  active npolyres,npres,mrp1
  active ppolyres,ppres,xhrpoly
  active xpolyres,xpres,xres,uhrpoly
  active ndiffres,rnd,rdn,rndiff
  active pdiffres,rpd,rdp,rpdiff
  active mvndiffres,mvrnd,mvrdn,mvrndiff
  active mvpdiffres,mvrpd,mvrdp,mvrpdiff
  active rmp

# Diodes
active pdiode,pdi
  active ndiode,ndi
  active nndiode,nndi
  active pdiodec,pdic
  active ndiodec,ndic
  active nndiodec,nndic
  active mvpdiode,mvpdi
  active mvndiode,mvndi
  active mvpdiodec,mvpdic
  active mvndiodec,mvndic
  active pdiodelvt,pdilvt
  active pdiodehvt,pdihvt
  active ndiodelvt,ndilvt
  active pdiodelvtc,pdilvtc
  active pdiodehvtc,pdihvtc
  active ndiodelvtc,ndilvtc

# Local Interconnect 
  locali locali,li1,li
 -locali corelocali,coreli1,coreli
  locali rlocali,rli1,rli
  locali viali,vial,mcon,lic,licon,m1c,v0
 -locali obsli1,obsli
 -locali obsli1c,obslic,obslicon

# Metal 1
  metal1 metal1,m1,met1
  metal1 rmetal1,rm1,rmet1
  metal1 via1,m2contact,m2cut,m2c,via,v,v1
 -metal1 obsm1
  metal1 padl
 -metal1 m1fill

# Metal 2
  metal2 metal2,m2,met2
  metal2 rmetal2,rm2,rmet2
  metal2 via2,m3contact,m3cut,m3c,v2
 -metal2 obsm2
 -metal2 m2fill

# Metal 3
  metal3 metal3,m3,met3
  metal3 rmetal3,rm3,rmet3
 -metal3 obsm3
  metal3 via3,v3
 -metal3 m3fill

  cap1 mimcap,mim,capm
  cap1 mimcapcontact,mimcapc,mimcc,capmc

# Metal 4
  metal4 metal4,m4,met4
  metal4 rmetal4,rm4,rmet4
 -metal4 obsm4
  metal4 via4,v4
 -metal4 m4fill

  cap2 mimcap2,mim2,capm2
  cap2 mimcap2contact,mimcap2c,mim2cc,capm2c

# Metal 5
  metal5 metal5,m5,met5
  metal5 rm5,rmetal5,rmet5
 -metal5 obsm5
 -metal5 m5fill

  metal5 mrdlcontact,mrdlc
  metali metalrdl,mrdl,metrdl
 -metali obsmrdl

# Miscellaneous
 -block  glass
 -block  fillblock
  comment comment
 -comment obscomment
# fixed resistor width identifiers
 -comment res0p35
 -comment res0p69
 -comment res1p41
 -comment res2p85
 -comment res5p73

end

#-----------------------------------------------------
# Magic contact types
#-----------------------------------------------------

contact
  pc       poly       locali
  ndc      ndiff      locali
  pdc      pdiff      locali
  nsc      nsd        locali
  psc      psd        locali
  ndic     ndiode     locali
  ndilvtc  ndiodelvt  locali
  nndic    nndiode    locali
  pdic     pdiode     locali
  pdilvtc  pdiodelvt  locali
  pdihvtc  pdiodehvt  locali
  xpc      xpc        locali

  mvndc   mvndiff   locali
  mvpdc   mvpdiff   locali
  mvnsc   mvnsd     locali
  mvpsc   mvpsd     locali
  mvndic  mvndiode  locali
  mvpdic  mvpdiode  locali

  lic locali metal1
  obslic obsli metal1

  via1   metal1 metal2
  via2   metal2 metal3
  via3   metal3 metal4
  via4   metal4 metal5
  stackable

  # MiM cap contacts are not stackable!
  mimcc  mimcap metal4
  mim2cc mimcap2 metal5

  padl m1 m2 m3 m4 m5 glass

  mrdlc metal5 mrdl
end

#-----------------------------------------------------
# Layer aliases
#-----------------------------------------------------

aliases

  allwellplane     nwell
  allnwell	   nwell,obswell,pnp

  allnfets	   nfet,npass,npd,scnfet,mvnfet,mvnnfet,nfetlvt,nsonos
  allpfets	   pfet,ppu,scpfet,scpfethvt,mvpfet,pfethvt,pfetlvt,pfetmvt
  allfets	   allnfets,allpfets,varactor,mvvaractor,varhvt,corenvar,corepvar
  allfetsstd	   nfet,mvnfet,mvnnfet,nfetlvt,pfet,mvpfet,pfethvt,pfetlvt,pfetmvt
  allfetsspecial   scnfet,scpfet,scpfethvt
  allfetscore	   npass,npd,nsonos,ppu,corenvar,corepvar
  allfetsnolvt	   nfet,npass,npd,scnfet,mvnfet,mvnnfet,nsonos,pfet,ppu,scpfet,scpfethvt,mvpfet,pfethvt,pfetmvt,varactor,mvvaractor,varhvt,corenvar

  allnactivenonfet *ndiff,*nsd,*ndiode,*nndiode,*mvndiff,*mvnsd,*mvndiode,*ndiodelvt
  allnactive	   allnactivenonfet,allnfets
  allnactivenontap *ndiff,*ndiode,*nndiode,*mvndiff,*mvndiode,*ndiodelvt,allnfets
  allnactivetap	   *nsd,*mvnsd,var,varhvt,mvvar,corenvar

  allpactivenonfet *pdiff,*psd,*pdiode,*mvpdiff,*mvpsd,*mvpdiode,*pdiodelvt,*pdiodehvt
  allpactive	   allpactivenonfet,allpfets
  allpactivenontap *pdiff,*pdiode,*mvpdiff,*mvpdiode,*pdiodelvt,*pdiodehvt,allpfets
  allpactivetap    *psd,*mvpsd,corepvar

  allactivenonfet  allnactivenonfet,allpactivenonfet
  allactive	   allactivenonfet,allfets

  allactiveres	   ndiffres,pdiffres,mvndiffres,mvpdiffres

  allndifflv       *ndif,*nsd,*ndiode,ndiffres,nfet,npass,npd,scnfet,nfetlvt,nsonos
  allpdifflv       *pdif,*psd,*pdiode,pdiffres,pfet,ppu,scpfet,scpfethvt,pfetlvt,pfetmvt,pfethvt
  alldifflv        allndifflv,allpdifflv
  allndifflvnonfet *ndif,*nsd,*ndiode,*nndiode,ndiffres,*ndiodelvt
  allpdifflvnonfet *pdif,*psd,*pdiode,pdiffres,*pdiodelvt,*pdiodehvt
  alldifflvnonfet  allndifflvnonfet,allpdifflvnonfet

  allndiffmv       *mvndif,*mvnsd,*mvndiode,*nndiode,mvndiffres,mvnfet,mvnnfet
  allpdiffmv       *mvpdif,*mvpsd,*mvpdiode,mvpdiffres,mvpfet
  alldiffmv        allndiffmv,allpdiffmv
  allndiffmvnontap *mvndif,*mvndiode,*nndiode,mvndiffres,mvnfet,mvnnfet
  allpdiffmvnontap *mvpdif,*mvpdiode,mvpdiffres,mvpfet
  alldiffmvnontap  allndiffmvnontap,allpdiffmvnontap
  allndiffmvnonfet *mvndif,*mvnsd,*mvndiode,*nndiode,mvndiffres
  allpdiffmvnonfet *mvpdif,*mvpsd,*mvpdiode,mvpdiffres
  alldiffmvnonfet  allndiffmvnonfet,allpdiffmvnonfet

  alldiffnonfet	   alldifflvnonfet,alldiffmvnonfet
  alldiff	   alldifflv,alldiffmv

  allpolyres	   mrp1,xhrpoly,uhrpoly,rmp
  allpolynonfet	   *poly,allpolyres,xpc
  allpolynonres	   *poly,allfets,xpc

  allpoly	   allpolynonfet,allfets
  allpolynoncap	   *poly,xpc,allfets,allpolyres

  allndiffcontlv   ndc,nsc,ndic,nndic,ndilvtc
  allpdiffcontlv   pdc,psc,pdic,pdilvtc,pdihvtc
  allndiffcontmv   mvndc,mvnsc,mvndic
  allpdiffcontmv   mvpdc,mvpsc,mvpdic
  allndiffcont	   allndiffcontlv,allndiffcontmv
  allpdiffcont	   allpdiffcontlv,allpdiffcontmv
  alldiffcontlv	   allndiffcontlv,allpdiffcontlv
  alldiffcontmv	   allndiffcontmv,allpdiffcontmv
  alldiffcont	   alldiffcontlv,alldiffcontmv

  allcont	alldiffcont,pc

  allres	allpolyres,allactiveres

  allli		*locali,coreli,rli
  allm1		*m1,rm1
  allm2		*m2,rm2
  allm3		*m3,rm3
  allm4	   	*m4,rm4
  allm5	   	*m5,rm5

  allpad	padl

  psub		pwell
  
end

#-----------------------------------------------------
# Layer drawing styles
#-----------------------------------------------------

styles
 styletype mos
  dnwell    cwell
  nwell     nwell
  pwell	    pwell
  rpwell    pwell 	ptransistor_stripes
  ndiff     ndiffusion
  pdiff     pdiffusion
  nsd       ndiff_in_nwell
  psd       pdiff_in_pwell
  nfet      ntransistor    ntransistor_stripes
  scnfet    ntransistor    ntransistor_stripes
  npass	    ntransistor	   ntransistor_stripes
  npd	    ntransistor	   ntransistor_stripes
  pfet      ptransistor    ptransistor_stripes
  scpfet    ptransistor    ptransistor_stripes
  scpfethvt ptransistor    ptransistor_stripes implant2
  ppu	    ptransistor	   ptransistor_stripes
  var       polysilicon    ndiff_in_nwell
  ndc       ndiffusion     metal1  contact_X'es
  pdc       pdiffusion     metal1  contact_X'es
  nsc       ndiff_in_nwell metal1  contact_X'es
  psc       pdiff_in_pwell metal1  contact_X'es
  corenvar  polysilicon    ndiff_in_nwell
  corepvar  polysilicon    pdiff_in_pwell

  pnp	    nwell ntransistor_stripes
  npn	    pwell ptransistor_stripes

  pfetlvt   ptransistor	ptransistor_stripes implant1
  pfetmvt   ptransistor	ptransistor_stripes implant3
  pfethvt   ptransistor ptransistor_stripes implant2
  nfetlvt   ntransistor ntransistor_stripes implant1
  nsonos    ntransistor implant3
  varhvt    polysilicon ndiff_in_nwell implant2

  mvndiff   ndiffusion     hvndiff_mask
  mvpdiff   pdiffusion     hvpdiff_mask
  mvnsd     ndiff_in_nwell hvndiff_mask
  mvpsd     pdiff_in_pwell hvpdiff_mask
  mvnfet    ntransistor    ntransistor_stripes hvndiff_mask
  mvnnfet   ntransistor    ndiff_in_nwell hvndiff_mask
  mvpfet    ptransistor    ptransistor_stripes
  mvvar     polysilicon    ndiff_in_nwell hvndiff_mask
  mvndc     ndiffusion     metal1  contact_X'es hvndiff_mask
  mvpdc     pdiffusion     metal1  contact_X'es hvpdiff_mask
  mvnsc     ndiff_in_nwell metal1  contact_X'es hvndiff_mask
  mvpsc     pdiff_in_pwell metal1  contact_X'es hvpdiff_mask

  poly      polysilicon 
  pc        polysilicon    metal1  contact_X'es
  npolyres  polysilicon    silicide_block nselect2
  ppolyres  polysilicon    silicide_block pselect2
  xpc	    polysilicon	   pselect2  metal1  contact_X'es
  rmp	    polysilicon	   poly_resist_stripes

  res0p35   implant1
  res0p69   implant1
  res1p41   implant1
  res2p85   implant1
  res5p73   implant1

  pdiode    pdiffusion     pselect2
  ndiode    ndiffusion     nselect2
  pdiodec   pdiffusion     pselect2 metal1 contact_X'es
  ndiodec   ndiffusion     nselect2 metal1 contact_X'es

  nndiode   ndiffusion  nselect2 implant3
  ndiodelvt ndiffusion	nselect2 implant1
  pdiodelvt pdiffusion  pselect2 implant1
  pdiodehvt pdiffusion  pselect2 implant2
  pdilvtc   pdiffusion  pselect2 implant1 metal1 contact_X'es
  pdihvtc   pdiffusion  pselect2 implant2 metal1 contact_X'es
  ndilvtc   ndiffusion  nselect2 implant1 metal1 contact_X'es

  mvpdiode    pdiffusion     pselect2 hvpdiff_mask
  mvndiode    ndiffusion     nselect2 hvndiff_mask
  mvpdiodec   pdiffusion     pselect2 metal1 contact_X'es hvpdiff_mask
  mvndiodec   ndiffusion     nselect2 metal1 contact_X'es hvndiff_mask
  nndiodec    ndiff_in_nwell nselect2 metal1 contact_X'es hvndiff_mask

  locali    metal1
  coreli    metal1
  rli       metal1         poly_resist_stripes
  lic	    metal1	   metal2 via1arrow
  obsli     metal1
  obslic    metal1	   metal2 via1arrow

  metal1    metal2
  m1fill    metal2
  rm1       metal2         poly_resist_stripes
  obsm1     metal2
  m2c       metal2         metal3  via2arrow
  metal2    metal3
  m2fill    metal3
  rm2       metal3         poly_resist_stripes
  obsm2     metal3
  m3c       metal3         metal4  via3alt
  metal3    metal4
  m3fill    metal4
  rm3       metal4         poly_resist_stripes
  obsm3     metal4
  mimcap    metal3         mems
  mimcc     metal3         contact_X'es mems
  mimcap2   metal4         mems
  mim2cc    metal4         contact_X'es mems
  via3      metal4         metal5  via4
  metal4    metal5
  m4fill    metal5
  rm4       metal5         poly_resist_stripes
  obsm4     metal5
  via4      metal5         metal6  via5
  metal5    metal6
  m5fill    metal6
  rm5       metal6         poly_resist_stripes
  obsm5     metal6
  mrdlc	    metal6  metal7  via6
  metalrdl  metal7
  obsmrdl   metal7

  glass	    overglass
  mrp1      poly_resist    poly_resist_stripes
  xhrpoly   poly_resist    silicide_block
  uhrpoly   poly_resist
  ndiffres  ndiffusion	   ndop_stripes
  pdiffres  pdiffusion	   pdop_stripes
  mvndiffres  ndiffusion hvndiff_mask   ndop_stripes
  mvpdiffres  pdiffusion hvpdiff_mask   pdop_stripes
  comment   comment
  error_p   error_waffle
  error_s   error_waffle
  error_ps  error_waffle
  fillblock cwell

  obswell   cwell
  obsactive implant4

  padl      metal6 via6 overglass

  magnet    substrate_field_implant
  rotate    via3alt
  fence     via5
end

#-----------------------------------------------------
# Special paint/erase rules
#-----------------------------------------------------

compose
  compose  nfet  poly  ndiff
  compose  pfet  poly  pdiff
  compose  var   poly  nsd

  compose  mvnfet  poly  mvndiff
  compose  mvpfet  poly  mvpdiff
  compose  mvvar   poly  mvnsd

  paint	 obslic	 locali	 via1
  paint	 obslic	 obsm1	 obsli,obsm1
  
  paint  ndc     nwell  pdc
  paint  nfet    nwell  pfet
  paint  scnfet  nwell  scpfet
  paint  ndiff   nwell  pdiff
  paint  psd     nwell  nsd
  paint  psc     nwell  nsc
  paint  npd     nwell  ppu

  paint  pdc     pwell  ndc
  paint  pfet    pwell  nfet
  paint  scpfet  pwell  scnfet
  paint  pdiff   pwell  ndiff
  paint  nsd     pwell  psd
  paint  nsc     pwell  psc
  paint  ppu     pwell  npd

  paint  pdc	 coreli pdc
  paint  ndc	 coreli ndc
  paint  pc	 coreli pc
  paint  nsc 	 coreli nsc
  paint  psc 	 coreli psc
  paint  viali 	 coreli viali

  paint  coreli  pdc    pdc
  paint  coreli  ndc    ndc
  paint  coreli  pc     pc
  paint  coreli  nsc    nsc
  paint  coreli  psc    psc
  paint  coreli  viali  viali

  paint  m4      obsm4  m4
  paint  m5      obsm5  m5
end

#-----------------------------------------------------
# Electrical connectivity
#-----------------------------------------------------

connect
  *nwell,*nsd,*mvnsd,dnwell,pnp *nwell,*nsd,*mvnsd,dnwell,pnp
  pwell,*psd,*mvpsd,npn  pwell,*psd,*mvpsd,npn
  *li,coreli	*li,coreli
  *m1,m1fill,obslic	*m1,m1fill,obslic
  *m2,m2fill	*m2,m2fill
  *m3,m3fill	*m3,m3fill
  *m4,m4fill	*m4,m4fill
  *m5,m5fill	*m5,m5fill
  *mimcap     *mimcap
  *mimcap2    *mimcap2
   allnactivenonfet	allnactivenonfet
   allpactivenonfet	allpactivenonfet
  *poly,xpc,allfets	*poly,xpc,allfets
  # RDL connects to m5 (i.e., padl) through glass cut
  *mrdl			*mrdl
  glass			metrdl
end

#-----------------------------------------------------
# CIF/GDS output layer definitions
#-----------------------------------------------------
# NOTE:  All values in this section MUST be multiples of 25 
# or else magic will scale below the allowed layout grid size

cifoutput

#----------------------------------------------------------------
style gdsii
# NOTE: This section is used for actual GDS output
#----------------------------------------------------------------
 scalefactor 10  nanometers
 options calma-permissive-labels
 gridlimit 5

#----------------------------------------------------------------
# Create a temp layer from the cell bounding box for use in
# generating ID layers.  Note that "boundary", unlike "bbox",
# requires the FIXED_BBOX property (abutment box) in the cell.
#----------------------------------------------------------------
 templayer CELLBOUND
	boundary

#----------------------------------------------------------------
# BOUND
#----------------------------------------------------------------
 layer 	BOUND CELLBOUND
	calma 235 4

# Create a boundary outside of an abutment box, so that layers
# can be made to stretch to the abutment box edges.  First strink
# so that any box that would be so small as to interact with
# itself will be removed.

 templayer CELLRING CELLBOUND
	shrink 345
	grow 545
	and-not CELLBOUND

#----------------------------------------------------------------
# DNWELL
#----------------------------------------------------------------

 layer DNWELL	dnwell,pnp
	calma	64 18

 layer PWRES    rpw
	and	dnwell
	calma	64 13

#----------------------------------------------------------------
# NWELL
#----------------------------------------------------------------

 layer NWELL 	allnwell
	bloat-all rpw dnwell
	and-not rpw,pwell
 	calma 	64 20

 layer WELLTXT
 	labels allnwell noport
	calma 64 16

 layer WELLPIN
 	labels allnwell port
	calma 64 5

#----------------------------------------------------------------
# SUB (text/port only)
#----------------------------------------------------------------

 layer SUBTXT
 	labels pwell noport
	calma 122 16

 layer SUBPIN
 	labels pwell port
	calma 64 59

#----------------------------------------------------------------
# DIFF
#----------------------------------------------------------------

 layer DIFF 	allnactivenontap,allpactivenontap,allactiveres
 	labels 	allnactivenontap,allpactivenontap
 	calma 	65 20

#----------------------------------------------------------------
# TAP
#----------------------------------------------------------------

 layer TAP 	allnactivetap,allpactivetap
 	labels 	allnactivetap,allpactivetap
 	calma 	65 44

#----------------------------------------------------------------
# PPLUS, NPLUS (PSDM, NSDM)
#----------------------------------------------------------------

 templayer basePPLUS pdiffres,mvpdiffres
	grow	15
	or	xhrpoly,uhrpoly,xpc
	grow	110
	bloat-or allpactivetap * 125 allnactivenontap 0
	bloat-or allpactivenontap * 125 allnactivetap 0

 templayer baseNPLUS ndiffres,mvndiffres
 	grow	125
	bloat-or allnactivetap * 125 allpactivenontap 0
	bloat-or allnactivenontap * 125 allpactivetap 0

 templayer extendPPLUS  basePPLUS,CELLRING
	bridge	380 380
	and-not baseNPLUS
	and-not	CELLRING

 layer PPLUS basePPLUS,extendPPLUS 
	grow	185
	shrink	185
	close   265000
	calma	94 20

 templayer extendNPLUS  baseNPLUS,CELLRING
	bridge	380 380
	and-not basePPLUS
	and-not	CELLRING

 layer NPLUS baseNPLUS,extendNPLUS
	grow	185
	shrink	185
 	close   265000
 	calma	93 44

#----------------------------------------------------------------
# LVTN
#----------------------------------------------------------------

 layer LVTN  pfetlvt,nfetlvt,mvvar,mvnnfet,nsonos,*pdiodelvt,*ndiodelvt,*nndiode
        grow 180
	bridge	380 380
	grow	185
	shrink	185
	close  265000
	calma 125 44

#----------------------------------------------------------------
# HVTR
#----------------------------------------------------------------

 layer HVTR  pfetmvt
        grow 180
	bridge	380 380
	grow	185
	shrink	185
	close  265000
	calma 18 20

#----------------------------------------------------------------
# HVTP
#----------------------------------------------------------------

 layer HVTP scpfethvt,ppu,pfethvt,varhvt,*pdiodehvt
        grow 180
	bridge	380 380
	grow	185
	shrink	185
	close 265000
	calma 78 44

#----------------------------------------------------------------
# SONOS
#----------------------------------------------------------------

 layer SONOS nsonos
	grow 100
	grow-min 410
	bridge 500 410
	grow 250
	shrink 250
	calma 80 20

#----------------------------------------------------------------
# SONOS requires COREID around area (areaid.ce).  Also, the
# coreli layer indicates a cell needing COREID.  Also, devices
# npd, npass, and ppu indicate a COREID cell.
#----------------------------------------------------------------

 layer COREID
	bloat-all nsonos,coreli,ppu,npd,npass,corepvar,corenvar CELLBOUND
	calma 81 2

#----------------------------------------------------------------
# STDCELL applies to all cells containing scnfet or scpfet.
#----------------------------------------------------------------

 layer STDCELL scnfet
	bloat-all scpfet,scpfethvt,scnfet CELLBOUND
	calma 81 4

#----------------------------------------------------------------
# NPNID and PNPID apply to bipolar transistors
#----------------------------------------------------------------

 layer NPNID
	bloat-all npn dnwell
	calma	82 20

 templayer pnparea pnp
	grow 400

 layer PNPID
	bloat-all pnparea *psd
	or pnparea
	calma	82 44

#----------------------------------------------------------------
# RPM
#----------------------------------------------------------------

 layer RPM
	bloat-all xhrpoly xpc
	grow 200
	grow-min 1270
	grow 420
	shrink 420
	calma 86 20

#----------------------------------------------------------------
# URPM (2kOhms/sq. poly implant)
#----------------------------------------------------------------

 layer URPM
	bloat-all uhrpoly xpc
	grow 200
	grow-min 1270
	grow 420
	shrink 420
	calma 79 20

#----------------------------------------------------------------
# LDNTM (Tip implant for SONOS FETs)
#----------------------------------------------------------------

 layer LDNTM
	bloat-all nsonos *ndiff
	grow 185
 	grow 	345
 	shrink 	345
	calma 11 44

#----------------------------------------------------------------
# HVNTM (Tip implant for MV ndiff devices)
#----------------------------------------------------------------

 templayer hvntm_block *mvpsd
	grow 185

 layer HVNTM
	bloat-all mvnfet,mvnnfet,*mvndiode,mvrdn,*nndiode *mvndiff
	bloat-all mvvaractor *mvnsd
	and-not hvntm_block
        grow 185
 	grow 	345
 	shrink 	345
	and-not hvntm_block
	calma 125 20

#----------------------------------------------------------------
# POLY
#----------------------------------------------------------------

 layer POLY 	allpoly
 	calma 	66 20

 layer POLYTXT
	labels  allpoly noport
	calma	66 16

 layer POLYPIN
	labels  allpoly port
	calma	66 5

#----------------------------------------------------------------
# THKOX (HVI) (includes rules NWELL 8-11 and DIFFTAP 14-26)
#----------------------------------------------------------------

 templayer thkox_area 	alldiffmv,mvvar
 	grow	185
	bloat-all alldiffmv nwell
	grow 345
	shrink 345

 templayer large_ptap_mv thkox_area
	shrink	420
	grow	420

 templayer small_ptap_mv thkox_area
	and-not large_ptap_mv
	# (HVI min width rule is 0.6 but CNTM min width rule is 0.84um)
	grow-min 840

 templayer baseTHKOX 	thkox_area,small_ptap_mv
	bridge	700 600
 	grow 	345
 	shrink 	345

 templayer extendTHKOX	baseTHKOX,CELLRING
 	grow 	345
 	shrink 	345
	and-not	CELLRING

 layer THKOX	baseTHKOX,extendTHKOX
 	calma 	75 20

#----------------------------------------------------------------
# CONT (LICON)
#----------------------------------------------------------------

 layer CONT allcont
 	squares-grid 0 170 170
 	calma	66 44

 # Contact for pres is different than other LICON contacts
 # See rules LICON 1b, 1c (width/length) and 2b (spacing)
 templayer xpc_horiz xpc
	shrink 1007
	grow 1007

 layer CONT xpc
	and-not xpc_horiz
	# Force long edge vertical for contacts narrower than 2um
	# Minimum space is 350 but 520 satisfies no. of contacts rule
 	slots 80 190 520 80 2000 350
 	calma	66 44

 layer CONT xpc
	and xpc_horiz
	# Force long edge vertical for contacts wider than 2um
	# Minimum space is 350 but 520 satisfies no. of contacts rule
 	slots 80 2000 350 80 190 520
 	calma	66 44

#----------------------------------------------------------------
# NPC (Nitride poly cut)
# surrounds CONT (LICON) on poly only (i.e., pc)
#----------------------------------------------------------------

 layer NPC pc
 	squares-grid 0 170 170
	grow 100
	bridge 270 270
	grow 130
	shrink 130
	calma  95 20

 # NPC is also generated on xhrpoly and uhrpoly resistors

 layer NPC xpc,xhrpoly,uhrpoly
        # xpc surrounds precision_resistor by 0.095um
	grow 95
	grow 130
	shrink 130
	calma  95 20

#----------------------------------------------------------------
# Device markers
#----------------------------------------------------------------

 layer DIFFRES rdn,mvrdn,rdp,mvrdp
	calma 65 13

 layer POLYRES mrp1
	calma 66 13

 # POLYSHORT is a poly layer resistor like rli, rm1, etc., for metal layers
 layer POLYSHORT rmp
	calma 66 15

 # POLYRES extends to edge of contact cut
 layer POLYRES xhrpoly,uhrpoly
	grow 60
	and xpc
	or xhrpoly,uhrpoly
	calma 66 13

 layer DIODE *pdi,*ndi,*nndi,*mvpdi,*mvndi,*pdilvt,*pdihvt,*ndilvt
        # To be done:  Expand to include anode, cathode, and guard ring
	calma 81 23

#----------------------------------------------------------------
# LI
#----------------------------------------------------------------
 layer LI allli
	calma 67 20

 layer LITXT
 	labels *locali,coreli noport
	calma 67 16

 layer LIPIN
 	labels *locali,coreli port
	calma 67 5

 layer LIRES rli
	labels rli
	calma 67 13

#----------------------------------------------------------------
# MCON
#----------------------------------------------------------------
 layer MCON lic
 	squares-grid 0 170 190
 	calma 	67 44

#----------------------------------------------------------------
# MET1
#----------------------------------------------------------------
 layer MET1 	allm1,m1fill
 	calma 	68 20

 layer MET1TXT
	labels	allm1 noport
	calma 	68 16

 layer MET1PIN
	labels	allm1 port
	calma 	68 5

 layer MET1RES rm1
	labels rm1
	calma 68 13

#----------------------------------------------------------------
# VIA1
#----------------------------------------------------------------
 layer VIA1 	via1
 	squares-grid 55 150 170
 	calma 	68 44

#----------------------------------------------------------------
# MET2
#----------------------------------------------------------------
 layer MET2 	allm2,m2fill
 	calma 	69 20

 layer MET2TXT
	labels	allm2 noport
	calma	69 16

 layer MET2PIN
	labels	allm2 port
	calma	69 5

 layer MET2RES rm2
	labels rm2
	calma 69 13

#----------------------------------------------------------------
# VIA2
#----------------------------------------------------------------
 layer VIA2 	via2
 	squares-grid 40 200 200
 	calma 	69 44

#----------------------------------------------------------------
# MET3
#----------------------------------------------------------------
 layer MET3 	allm3,m3fill
 	calma 	70 20

 layer MET3TXT
 	labels 	allm3 noport
	calma	70 16 

 layer MET3PIN
	labels	allm3 port
	calma	70 5

 layer MET3RES rm3
	labels rm3
	calma 70 13

#----------------------------------------------------------------
# VIA3
#----------------------------------------------------------------
 layer VIA3	via3
	or mimcc
 	squares-grid 60 200 200
 	calma 	70 44

#----------------------------------------------------------------
# MET4
#----------------------------------------------------------------
 layer MET4 	allm4,m4fill
 	calma 	71 20

 layer MET4TXT
	labels	allm4 noport
	calma	71 16

 layer MET4PIN
	labels	allm4 port
	calma	71 5

 layer MET4RES rm4
	labels rm4
	calma 71 13

#----------------------------------------------------------------
# VIA4
#----------------------------------------------------------------
 layer VIA4	via4
	or mim2cc
 	squares-grid 190 800 800
 	calma 	71 44

#----------------------------------------------------------------
# MET5
#----------------------------------------------------------------
 layer MET5 	allm5,m5fill
 	calma 	72 20

 layer MET5TXT
	labels	allm5 noport
	calma	72 16

 layer MET5PIN
	labels	allm5 port
	calma	72 5

 layer MET5RES rm5
	labels rm5
	calma 72 13


#----------------------------------------------------------------
# RDL
#----------------------------------------------------------------
  layer RDL	*metrdl
	calma   74 20

  layer RDLTXT
	labels	*metrdl noport
	calma	74 16

  layer RDLPIN
	labels  *metrdl port
	calma	74 5

  layer PI1	*metrdl
	and	padl,glass
	# Test only---needs GDS layer number

  layer	UBM	*metrdl
	shrink	50000
	grow	40000
	# Test only---needs GDS layer number
	
  layer	PI2	*metrdl
	shrink	50000
	grow	25000
	# Test only---needs GDS layer number


#----------------------------------------------------------------
# GLASS
#----------------------------------------------------------------
 layer GLASS 	glass
 	calma 	76 20

#----------------------------------------------------------------
# CAPM
#----------------------------------------------------------------
 layer CAPM 	*mimcap
 	labels 	mimcap
 	calma 	89 44

 layer CAPM2 	*mimcap2
 	labels 	mimcap2
 	calma 	97 44

#----------------------------------------------------------------
# Chip top level marker for DRC latchup rules to check 15um
# distance to taps (otherwise 6um is used)
#----------------------------------------------------------------

 layer LOWTAPDENSITY
	bbox top
	# Clear 200um for pads + 50um for required high tap density
	# in critical area.
	shrink 250000
	calma	81 14

#----------------------------------------------------------------
# FILLBLOCK
#----------------------------------------------------------------
 layer FILLOBSM1 fillblock
 	calma 	62 24

 layer FILLOBSM2 fillblock
 	calma 	105 52

 layer FILLOBSM3 fillblock
 	calma 	107 24

 layer FILLOBSM4 fillblock
 	calma 	112 4

 render	DNWELL 	cwell       -0.1    0.1
 render	NWELL	nwell        0.0    0.2062
 render DIFF	ndiffusion   0.2062 0.12
 render TAP	pdiffusion   0.2062 0.12
 render POLY	polysilicon  0.3262 0.18
 render CONT	via          0.5062 0.43
 render LI	metal1       0.9361 0.10
 render MCON	via          1.0361 0.34
 render MET1	metal2       1.3761 0.36
 render VIA1	via          1.7361 0.27
 render MET2	metal3       2.0061 0.36
 render VIA2	via          2.3661 0.42
 render MET3	metal4       2.7861 0.845
 render VIA3	via          3.6311 0.39
 render MET4	metal5       4.0211 0.845
 render VIA4	via          4.8661 0.505
 render MET5	metal6       5.3711 1.26
 render CAPM	metal8       2.4661 0.2
 render CAPM2	metal9       3.7311 0.2
 render RDL	metal7      11.8834 4.0

#----------------------------------------------------------------
style drc
#----------------------------------------------------------------
# NOTE:  This style is used for DRC only, not for GDS output
#----------------------------------------------------------------
 scalefactor 10  nanometers
 options calma-permissive-labels

 # Ensure nwell overlaps dnwell at least 0.4um outside and 1.03um inside
 templayer dnwell_shrink dnwell
 shrink 1030

 templayer nwell_missing dnwell
 grow 400
 and-not dnwell_shrink
 and-not nwell

 templayer pwell_in_dnwell dnwell
 and-not nwell

 # SONOS nFET devices must be in deep nwell
 templayer dnwell_missing nsonos
 and-not dnwell

 # SONOS nFET devices must be in cell with abutment box
 templayer abutment_box
	boundary

 templayer bbox_missing nsonos
	and-not abutment_box

 # Make sure nwell covers varactor poly
 templayer var_poly_no_nwell
	bloat-all varactor,mvvaractor *poly
	grow 150
	and-not nwell

 # Define MiM cap bottom plate for spacing rule
 templayer mim_bottom
 bloat-all *mimcap *metal3

 # Define MiM2 cap bottom plate for spacing rule
 templayer mim2_bottom
 bloat-all *mimcap2 *metal4

 # Note that metal fill is performed by the foundry and so is not
 # an option for a cifoutput style.

 # Check latchup rule (15um minimum from tap LICON center to any
 # non-tap diffusion.  Note that to count as a tap, the diffusion
 # must be contacted to LI

 templayer ptap_reach psc,mvpsc
 and-not dnwell
 # grow total is 15um.  grow in 0.84um increments to ensure that
 # no nwell ring is crossed
 grow 840
 and-not nwell,dnwell
 grow 840
 and-not nwell,dnwell
 grow 840
 and-not nwell,dnwell
 grow 840
 and-not nwell,dnwell
 grow 840
 and-not nwell,dnwell
 grow 840
 and-not nwell,dnwell
 grow 840
 and-not nwell,dnwell
 grow 840
 and-not nwell,dnwell
 grow 840
 and-not nwell,dnwell
 grow 840
 and-not nwell,dnwell
 grow 840
 and-not nwell,dnwell
 grow 840
 and-not nwell,dnwell
 grow 840
 and-not nwell,dnwell
 grow 840
 and-not nwell,dnwell
 grow 840
 and-not nwell,dnwell
 grow 840
 and-not nwell,dnwell
 grow 840
 and-not nwell,dnwell
 grow 635
 and-not nwell,dnwell

 templayer ptap_missing *ndiff,*mvndiff
 and-not dnwell
 and-not ptap_reach

 templayer ntap_reach nsc,mvnsc
 # grow total is 15um.  grow in 1.27um increments to ensure that
 # no nwell ring is crossed.  There is no difference between
 # ntaps in and out of deep nwell.
 grow 1270
 and nwell,pnp
 grow 1270
 and nwell,pnp
 grow 1270
 and nwell,pnp
 grow 1270
 and nwell,pnp
 grow 1270
 and nwell,pnp
 grow 1270
 and nwell,pnp
 grow 1270
 and nwell,pnp
 grow 1270
 and nwell,pnp
 grow 1270
 and nwell,pnp
 grow 1270
 and nwell,pnp
 grow 1270
 and nwell,pnp
 grow 945
 and nwell,pnp
 
 templayer ntap_missing *pdiff,*mvpdiff
 and-not pwell_in_dnwell
 and-not ntap_reach

 templayer dptap_reach psc,mvpsc
 and dnwell
 grow 840
 and-not nwell
 and dnwell
 grow 840
 and-not nwell
 and dnwell
 grow 840
 and-not nwell
 and dnwell
 grow 840
 and-not nwell
 and dnwell
 grow 840
 and-not nwell
 and dnwell
 grow 840
 and-not nwell
 and dnwell
 grow 840
 and-not nwell
 and dnwell
 grow 840
 and-not nwell
 and dnwell
 grow 840
 and-not nwell
 and dnwell
 grow 840
 and-not nwell
 and dnwell
 grow 840
 and-not nwell
 and dnwell
 grow 840
 and-not nwell
 and dnwell
 grow 840
 and-not nwell
 and dnwell
 grow 840
 and-not nwell
 and dnwell
 grow 840
 and-not nwell
 and dnwell
 grow 840
 and-not nwell
 and dnwell
 grow 840
 and-not nwell
 and dnwell
 grow 635
 and-not nwell
 and dnwell

 templayer dptap_missing *ndiff,*mvndiff
 and dnwell
 and-not dptap_reach

 templayer pdiff_crosses_dnwell dnwell
 grow 20
 and-not dnwell
 and allpdifflv,allpdiffmv

 # MV nwell must be 2um from any other nwell
 templayer mvnwell
 bloat-all alldiffmv nwell
 grow-min 840
 bridge	700 600

 # Simple spacing checks to lvnwell must use CIF-DRC rule
 templayer allmvdiffnowell *mvndiff,*mvpsd

 templayer lvnwell nwell
 and-not mvnwell

 templayer nwell_with_tap
 bloat-all nsc,mvnsc nwell,pnp

 templayer nwell_missing_tap nwell,pnp
 and-not nwell_with_tap

 templayer tap_with_licon
 bloat-all psc,mvpsc psd,mvpsd
 bloat-all nsc,mvnsc nsd,mvnsd

 templayer tap_missing_licon psd,nsd,mvpsd,mvnsd
 and-not tap_with_licon

 # Make sure varactor nwell contains no P diffusion
 templayer pdiff_in_varactor_well
 bloat-all varactor,mvvaractor nwell
 and allpactive

 # HVNTM spacing requires recreating HVNTM
 templayer hvntm_block *mvpsd
 grow 185

 templayer hvntm_generate
 bloat-all mvnfet,mvnnfet,*mvndiode,mvrdn,*nndiode *mvndiff
 bloat-all mvvaractor *mvnsd
 and-not hvntm_block
 grow 185
 grow    345
 shrink  345
 and-not hvntm_block

 templayer m1_small_hole allm1,obsm1,obslic
 close   140000

 templayer m1_hole_empty m1_small_hole
 and-not allm1,obsm1,obslic

 templayer m2_small_hole allm2,obsm2
 close   140000

 templayer m2_hole_empty m2_small_hole
 and-not allm2,obsm2

 templayer m1_huge allm1
 shrink 1500
 grow 1500

 templayer m1_large_halo m1_huge
 grow 280
 and-not m1_huge
 and allm1

 templayer m2_huge allm2
 shrink 1500
 grow 1500

 templayer m2_large_halo m2_huge
 grow 280
 and-not m2_huge
 and allm2

 templayer m3_huge allm3
 shrink 1500
 grow 1500

 templayer m3_large_halo m3_huge
 grow 400
 and-not m3_huge
 and allm3

 templayer m4_huge allm4
 shrink 1500
 grow 1500

 templayer m4_large_halo m4_huge
 grow 400
 and-not m4_huge
 and allm4


#----------------------------------------------------------------
style wafflefill
#----------------------------------------------------------------
# Style used by scripts for automatically generating fill layers
# NOTE: Be sure to generate output on flattened layout.
#----------------------------------------------------------------
 scalefactor 10  nanometers
 options calma-permissive-labels
 gridlimit 5

#----------------------------------------------------------------
# Generate and retain a layer representing the bounding box
#----------------------------------------------------------------
 templayer	topbox
	bbox	top

#----------------------------------------------------------------
# Generate guard-band around nwells to keep FOM from crossing
# Spacing from LV nwell = Diff/Tap 9 = 0.34um
# Spacing from HV nwell = Diff/Tap 18 = 0.43um (= 0.18 + 0.25)
# Enclosure by nwell = Diff/Tap 8 = 0.18um
#----------------------------------------------------------------

 templayer mvnwell
 	bloat-all alldiffmv nwell

 templayer lvnwell nwell
	and-not mvnwell

 templayer	well_shrink mvnwell
	shrink 	250
	or lvnwell
	shrink	180
 templayer	well_guardband nwell
	grow	340
	and-not	well_shrink

#---------------------------------------------------
# Diffusion and poly keep-out areas
#---------------------------------------------------
 templayer      obstruct_fom alldiff,allpoly,rpw
        grow    500
	or	well_guardband

 templayer      obstruct_poly alldiff,allpoly,rpw
	grow	1000

#---------------------------------------------------
# FOM and POLY fill
#---------------------------------------------------
 templayer	fomfill_pass1 topbox
        slots   0 4080 1320 0 4080 1320 1360 0
        and-not obstruct_fom
	and	topbox
        shrink  2035
        grow    2035

#---------------------------------------------------

 templayer      obstruct_poly_pass1 fomfill_pass1
        grow    300
	or	obstruct_poly
 templayer	polyfill_pass1 topbox
        slots   0 720 360 0 720 360 240 0
        and-not obstruct_poly_pass1
	and	topbox
        shrink  355
        grow    355

#---------------------------------------------------

 templayer      obstruct_fom_pass2 fomfill_pass1
        grow    1290
	or	polyfill_pass1
        grow    300
	or	obstruct_fom
 templayer	fomfill_pass2 topbox
        slots   0 2500 1320 0 2500 1320 1360 0
        and-not obstruct_fom_pass2
	and	topbox
        shrink  1245
        grow    1245

#---------------------------------------------------

 templayer      obstruct_poly_coarse polyfill_pass1
	grow	60
	or	fomfill_pass1,fomfill_pass2
	grow	300
	or	obstruct_poly
 templayer	polyfill_coarse topbox
        slots   0 720 360 0 720 360 240 120
        and-not obstruct_poly_coarse
	and	topbox
        shrink  355
        grow    355

#---------------------------------------------------
 templayer      obstruct_poly_medium polyfill_pass1,polyfill_coarse
	grow	60
	or	fomfill_pass1,fomfill_pass2
        grow    300
	or	obstruct_poly
 templayer	polyfill_medium topbox
        slots   0 540 360 0 540 360 240 100
        and-not obstruct_poly_medium
	and	topbox
        shrink  265
        grow    265

#---------------------------------------------------
 templayer      obstruct_poly_fine polyfill_pass1,polyfill_coarse,polyfill_medium
	grow	60
	or	fomfill_pass1,fomfill_pass2
	grow	300
	or	obstruct_poly
 templayer	polyfill_fine topbox
        slots   0 480 360 0 480 360 240 200
        and-not obstruct_poly_fine
	and	topbox
        shrink  235
        grow    235

#---------------------------------------------------

 templayer      obstruct_fom_coarse fomfill_pass1,fomfill_pass2
        grow    1290
	or	polyfill_pass1,polyfill_coarse,polyfill_medium,polyfill_fine
	grow	300
	or	obstruct_fom
 templayer	fomfill_coarse topbox
        slots   0 1500 1320 0 1500 1320 1360 0
        and-not obstruct_fom_coarse
	and	topbox
        shrink  745
        grow    745

#---------------------------------------------------

 templayer      obstruct_fom_fine fomfill_pass1,fomfill_pass2,fomfill_coarse
        grow    1290
	or	polyfill_pass1,polyfill_coarse,polyfill_medium,polyfill_fine
	grow	300
	or	obstruct_fom
 templayer	fomfill_fine topbox
        slots   0 500 400 0 500 400 160 0
        and-not obstruct_fom_fine
	and	topbox
        shrink  245
        grow    245

#---------------------------------------------------
 templayer	fomfill
	or	fomfill_pass1 
	or	fomfill_pass2
	or	fomfill_coarse
	or	fomfill_fine

 templayer	polyfill
	or	polyfill_pass1 
	or	polyfill_coarse
	or	polyfill_medium
	or	polyfill_fine

 layer	FOMMASK    fomfill
 	calma 	23 0
 layer	POLYMASK    polyfill
 	calma 	28 0

#---------------------------------------------------
# MET1 fill
#---------------------------------------------------

 templayer      obstruct_m1_coarse allm1,allpad,obsm1,m1fill,fillblock
        grow    3000
 templayer	met1fill_coarse topbox
        slots   0 2000 200 0 2000 200 700 0
        and-not obstruct_m1_coarse
	and	topbox
        shrink  995
        grow    995

 templayer      obstruct_m1_medium allm1,allpad,obsm1,m1fill,fillblock
        grow    2800
	or	met1fill_coarse
        grow    200
 templayer	met1fill_medium topbox
        slots   0 1000 200 0 1000 200 700 0
        and-not obstruct_m1_medium
	and	topbox
        shrink  495
        grow    495

 templayer      obstruct_m1_fine allm1,allpad,obsm1,m1fill,fillblock
        grow    300
	or	met1fill_coarse,met1fill_medium
        grow    200
 templayer	met1fill_fine topbox
        slots   0 580 200 0 580 200 700 0
        and-not obstruct_m1_fine
	and	topbox
        shrink  285
        grow    285

 templayer      obstruct_m1_veryfine allm1,allpad,obsm1,m1fill,fillblock
        grow    100
	or	met1fill_coarse,met1fill_medium,met1fill_fine
        grow    200
 templayer	met1fill_veryfine topbox
        slots   0 300 200 0 300 200 100 50
        and-not obstruct_m1_veryfine
	and	topbox
        shrink  145
        grow    145

 layer	MET1MASK met1fill_coarse
	or	met1fill_medium
	or	met1fill_fine
	or	met1fill_veryfine
 	calma 	36 0

#---------------------------------------------------
# MET2 fill
#---------------------------------------------------
 templayer      obstruct_m2 allm2,allpad,obsm2,m2fill,fillblock
        grow    3000
 templayer	met2fill_coarse topbox
        slots   0 2000 200 0 2000 200 700 350
        and-not obstruct_m2
	and	topbox
        shrink  995
        grow    995

 templayer      obstruct_m2_medium allm2,allpad,obsm2,m2fill,fillblock
        grow    2800
	or	met2fill_coarse
        grow    200
 templayer	met2fill_medium topbox
        slots   0 1000 200 0 1000 200 700 350
        and-not obstruct_m2_medium
	and	topbox
        shrink  495
        grow    495

 templayer      obstruct_m2_fine allm2,allpad,obsm2,m2fill,fillblock
        grow    300
	or	met2fill_coarse,met2fill_medium
        grow    200
 templayer	met2fill_fine topbox
        slots   0 580 200 0 580 200 700 350
        and-not obstruct_m2_fine
	and	topbox
        shrink  285
        grow    285

 templayer      obstruct_m2_veryfine allm2,allpad,obsm2,m2fill,fillblock
        grow    100
	or	met2fill_coarse,met2fill_medium,met2fill_fine
        grow    200
 templayer	met2fill_veryfine topbox
        slots   0 300 200 0 300 200 100 100
        and-not obstruct_m2_veryfine
	and	topbox
        shrink  145
        grow    145

 layer	MET2MASK met2fill_coarse
	or met2fill_medium
	or met2fill_fine
	or met2fill_veryfine
 	calma 	41 0

#---------------------------------------------------
# MET3 fill
#---------------------------------------------------
 templayer      obstruct_m3 allm3,allpad,obsm3,m3fill,fillblock
        grow    3000
 templayer	met3fill_coarse topbox
        slots   0 2000 300 0 2000 300 700 700
        and-not obstruct_m3
	and	topbox
        shrink  995
        grow    995

 templayer      obstruct_m3_medium allm3,allpad,obsm3,m3fill,fillblock
        grow    2700
	or	met3fill_coarse
        grow    300
 templayer	met3fill_medium topbox
        slots   0 1000 300 0 1000 300 700 700
        and-not obstruct_m3_medium
	and	topbox
        shrink  495
        grow    495

 templayer      obstruct_m3_fine allm3,allpad,obsm3,m3fill,fillblock
        grow    200
	or	met3fill_coarse,met3fill_medium
        grow    300
 templayer	met3fill_fine topbox
        slots   0 580 300 0 580 300 700 700
        and-not obstruct_m3_fine
	and	topbox
        shrink  285
        grow    285

 templayer      obstruct_m3_veryfine allm3,allpad,obsm3,m3fill,fillblock
	# Note: Adding 0.1 to waffle rule to clear wide spacing rule
        grow    100
	or	met3fill_coarse,met3fill_medium,met3fill_fine
        grow    300
 templayer	met3fill_veryfine topbox
        slots   0 400 300 0 400 300 150 200
        and-not obstruct_m3_veryfine
	and	topbox
        shrink  195
        grow    195

 layer	MET3MASK met3fill_coarse
	or	met3fill_medium
	or	met3fill_fine
	or	met3fill_veryfine
 	calma 	34 0

#---------------------------------------------------
# MET4 fill
#---------------------------------------------------
 templayer      obstruct_m4 allm4,allpad,obsm4,m4fill,fillblock
        grow    3000
 templayer	met4fill_coarse topbox
        slots   0 2000 300 0 2000 300 700 1050
        and-not obstruct_m4
	and	topbox
        shrink  995
        grow    995

 templayer      obstruct_m4_medium allm4,allpad,obsm4,m4fill,fillblock
        grow    2700
	or	met4fill_coarse
        grow    300
 templayer	met4fill_medium topbox
        slots   0 1000 300 0 1000 300 700 1050
        and-not obstruct_m4_medium
        shrink  495
        grow    495

 templayer      obstruct_m4_fine allm4,allpad,obsm4,m4fill,fillblock
        grow    200
	or	met4fill_coarse,met4fill_medium
        grow    300
 templayer	met4fill_fine topbox
        slots   0 580 300 0 580 300 700 1050
        and-not obstruct_m4_fine
	and	topbox
        shrink  285
        grow    285

 templayer      obstruct_m4_veryfine allm4,allpad,obsm4,m4fill,fillblock
	# Note: Adding 0.1 to waffle rule to clear wide spacing rule
        grow    100
	or	met4fill_coarse,met4fill_medium,met4fill_fine
        grow    300
 templayer	met4fill_veryfine topbox
        slots   0 400 300 0 400 300 150 300
        and-not obstruct_m4_veryfine
	and	topbox
        shrink  195
        grow    195

 layer	MET4MASK met4fill_coarse
	or	met4fill_medium
	or	met4fill_fine
	or	met4fill_veryfine
 	calma 	51 0

#---------------------------------------------------
# MET5 fill
#---------------------------------------------------
 templayer      obstruct_m5 allm5,allpad,obsm5,m5fill,fillblock
        grow    3000
 templayer	met5fill_gen topbox
        slots   0 3000 1600 0 3000 1600 1000 100
        and-not obstruct_m5
	and	topbox
        shrink  1495
        grow    1495

 layer	MET5MASK met5fill_gen
 	calma 	59 0

end

#-----------------------------------------------------------------------
cifinput
#-----------------------------------------------------------------------
# NOTE:  All values in this section MUST be multiples of 25 
# or else magic will scale below the allowed layout grid size
#-----------------------------------------------------------------------

style  sky130
 scalefactor 10 nanometers
 gridlimit 5

 options ignore-unknown-layer-labels no-reconnect-labels

 ignore NPC
 ignore SEALID
 ignore CAPID
 ignore LDNTM
 ignore HVNTM
 ignore POLYMOD
 ignore LOWTAPDENSITY

 layer pnp NWELL,WELLTXT,WELLPIN
 and PNPID
 labels NWELL
 labels WELLTXT text
 labels WELLPIN port

 layer nwell NWELL,WELLTXT,WELLPIN
 and-not PNPID
 labels NWELL
 labels WELLTXT text
 labels WELLPIN port

 layer pwell SUBTXT,SUBPIN
 labels SUBTXT text
 labels SUBPIN port

 # Always draw pwell under p-tap
 layer pwell TAP
 and-not NWELL

 layer dnwell DNWELL
 labels DNWELL

 layer npn DNWELL
 and-not NWELL
 and NPNID

 layer rpw PWRES
 and DNWELL
 labels PWRES

 templayer ndiffarea DIFF,DIFFTXT,DIFFPIN
 and-not POLY
 and-not NWELL
 and-not PPLUS
 and-not DIODE
 and-not DIFFRES
 and-not THKOX
 and NPLUS
 copyup ndifcheck
 labels DIFF
 labels DIFFTXT text
 labels DIFFPIN port
 labels TAPPIN port

 layer ndiff ndiffarea

 # Copy ndiff areas up for contact checks
 templayer xndifcheck ndifcheck
 copyup ndifcheck

 templayer mvndiffarea DIFF,DIFFTXT,DIFFPIN
 and-not POLY
 and-not NWELL
 and-not PPLUS
 and-not DIODE
 and-not DIFFRES
 and THKOX
 and NPLUS
 copyup ndifcheck
 labels DIFF
 labels DIFFTXT text
 labels DIFFPIN port

 layer mvndiff mvndiffarea

 # Copy ndiff areas up for contact checks
 templayer mvxndifcheck mvndifcheck
 copyup mvndifcheck

 layer ndiode DIFF
 and NPLUS
 and DIODE
 and-not NWELL
 and-not POLY
 and-not PPLUS
 and-not THKOX
 and-not LVTN
 labels DIFF

 layer ndiodelvt DIFF
 and NPLUS
 and DIODE
 and-not NWELL
 and-not POLY
 and-not PPLUS
 and-not THKOX
 and LVTN
 labels DIFF

 templayer ndiodearea DIODE
 and NPLUS
 and-not THKOX
 and-not NWELL
 copyup DIODE,NPLUS

 layer ndiffres DIFFRES
 and NPLUS
 and-not THKOX
 labels DIFF

 templayer pdiffarea DIFF,DIFFTXT,DIFFPIN
 and-not POLY
 and NWELL
 and-not NPLUS
 and-not DIODE
 and-not THKOX
 and PPLUS
 copyup pdifcheck
 labels DIFF 
 labels DIFFTXT text
 labels DIFFPIN port

 layer pdiff pdiffarea

 layer mvndiode DIFF
 and NPLUS
 and DIODE
 and THKOX
 and-not POLY
 and-not PPLUS
 and-not LVTN
 labels DIFF

 layer nndiode DIFF
 and NPLUS
 and DIODE
 and THKOX
 and-not POLY
 and-not PPLUS
 and LVTN
 labels DIFF

 templayer mvndiodearea DIODE
 and NPLUS
 and THKOX
 and-not NWELL
 copyup DIODE,NPLUS

 layer mvndiffres DIFFRES
 and NPLUS
 and THKOX
 labels DIFF

 templayer mvpdiffarea DIFF,DIFFTXT,DIFFPIN
 and-not POLY
 and NWELL
 and-not NPLUS
 and THKOX
 and-not DIODE
 and-not DIFFRES
 and PPLUS
 copyup mvpdifcheck
 labels DIFF
 labels DIFFTXT text
 labels DIFFPIN port

 layer mvpdiff mvpdiffarea

 # Copy pdiff areas up for contact checks
 templayer xpdifcheck pdifcheck
 copyup pdifcheck

 layer pdiode DIFF
 and PPLUS
 and-not POLY
 and-not NPLUS
 and-not THKOX
 and-not LVTN
 and-not HVTP
 and DIODE
 labels DIFF

 layer pdiodelvt DIFF
 and PPLUS
 and-not POLY
 and-not NPLUS
 and-not THKOX
 and LVTN
 and-not HVTP
 and DIODE
 labels DIFF

 layer pdiodehvt DIFF
 and PPLUS
 and-not POLY
 and-not NPLUS
 and-not THKOX
 and-not LVTN
 and HVTP
 and DIODE
 labels DIFF

 templayer pdiodearea DIODE
 and PPLUS
 and-not THKOX
 copyup DIODE,PPLUS

 # Define pfet areas as known pdiff, regardless of the presence of a well.

 templayer pfetarea DIFF
 and-not NPLUS
 and-not THKOX
 and POLY

 layer pfet pfetarea
 and-not LVTN
 and-not HVTP
 and-not STDCELL
 and-not COREID
 labels DIFF

 layer scpfet pfetarea
 and-not LVTN
 and-not HVTP
 and STDCELL
 labels DIFF

 layer scpfethvt pfetarea
 and-not LVTN
 and HVTP
 and STDCELL
 labels DIFF

 layer ppu pfetarea
 and-not LVTN
 and HVTP
 and COREID
 labels DIFF

 layer pfetlvt pfetarea
 and LVTN
 labels DIFF

 layer pfetmvt pfetarea
 and HVTR
 labels DIFF

 layer pfethvt pfetarea
 and HVTP
 and-not STDCELL
 and-not COREID
 labels DIFF

 # Always force nwell under pfet (nwell encloses pdiff by 0.18)
 layer nwell pfetarea
 grow 180

 # Copy mvpdiff areas up for contact checks
 templayer mvxpdifcheck mvpdifcheck
 copyup mvpdifcheck

 layer mvpdiode DIFF
 and PPLUS
 and-not POLY
 and-not NPLUS
 and THKOX
 and DIODE
 labels DIFF

 templayer mvpdiodearea DIODE
 and PPLUS
 and THKOX
 copyup DIODE,PPLUS

 # Define pfet areas as known pdiff,
 # regardless of the presence of a
 # well.

 templayer mvpfetarea DIFF
 and-not NPLUS
 and THKOX
 and POLY

 layer mvpfet mvpfetarea
 labels DIFF

 layer pdiff DIFF,DIFFTXT,DIFFPIN
 and-not NPLUS
 and-not POLY
 and-not THKOX
 and-not DIODE
 and-not DIFFRES
 labels DIFF
 labels DIFFTXT text
 labels DIFFPIN port

 layer pdiffres DIFFRES
 and PPLUS
 and NWELL
 and-not THKOX
 labels DIFF

 layer nfet DIFF
 and POLY
 and-not PPLUS
 and NPLUS
 and-not THKOX
 and-not LVTN
 and-not SONOS
 and-not STDCELL
 labels DIFF

 layer scnfet DIFF
 and POLY
 and-not PPLUS
 and NPLUS
 and-not NWELL
 and-not THKOX
 and-not LVTN
 and-not SONOS
 and STDCELL
 labels DIFF

 layer npass DIFF
 and POLY
 and-not PPLUS
 and NPLUS
 and-not NWELL
 and COREID
 labels DIFF

 layer npd DIFF
 and POLY
 and-not PPLUS
 and NPLUS
 and-not NWELL
 and COREID
 # Shrink-grow operation eliminates the smaller npass device
 shrink 70
 grow 70
 labels DIFF

 layer nfetlvt DIFF
 and POLY
 and-not PPLUS
 and NPLUS
 and-not THKOX
 and LVTN
 and-not SONOS
 labels DIFF

 layer nsonos DIFF
 and POLY
 and-not PPLUS
 and NPLUS
 and-not THKOX
 and LVTN
 and SONOS
 labels DIFF

 templayer nsdarea TAP
 and NPLUS
 and NWELL
 and-not POLY
 and-not PPLUS
 and-not THKOX
 copyup nsubcheck

 layer nsd nsdarea
 labels TAP

 layer nsd TAP,TAPPIN
 and NPLUS
 and-not POLY
 and-not THKOX
 labels TAP
 labels TAPPIN port

 layer corenvar TAP
 and NPLUS
 and POLY
 and COREID
 labels TAP

 templayer nsdexpand nsdarea
 grow 500

 # Copy nsub areas up for contact checks
 templayer xnsubcheck nsubcheck
 copyup nsubcheck

 templayer psdarea TAP
 and PPLUS
 and-not NWELL
 and-not POLY
 and-not NPLUS
 and-not THKOX
 and-not pfetexpand
 copyup psubcheck

 layer psd psdarea
 labels TAP

 layer psd TAP,TAPPIN
 and PPLUS
 and-not POLY
 and-not THKOX
 labels TAP
 labels TAPPIN port

 layer corepvar TAP
 and PPLUS
 and POLY
 and COREID
 labels TAP

 templayer psdexpand psdarea
 grow 500

 layer mvpdiff DIFF,DIFFTXT,DIFFPIN
 and-not NPLUS
 and-not POLY
 and THKOX
 and mvpfetexpand
 labels DIFF
 labels DIFFTXT text
 labels DIFFPIN port

 layer mvpdiffres DIFFRES
 and PPLUS
 and NWELL
 and THKOX
 and-not mvrdpioedge
 labels DIFF

 templayer mvnfetarea DIFF
 and POLY
 and-not PPLUS
 and NPLUS
 and-not LVTN
 and THKOX
 grow 1000

 templayer mvnnfetarea DIFF,TAP
 and POLY
 and-not PPLUS
 and NPLUS
 and LVTN
 and THKOX
 and-not mvnfetarea

 layer mvnfet DIFF
 and POLY
 and-not PPLUS
 and NPLUS
 and THKOX
 and-not mvnnfetarea
 labels DIFF

 layer mvnnfet mvnnfetarea
 labels DIFF

 templayer mvnsdarea TAP
 and NPLUS
 and NWELL
 and-not POLY
 and-not PPLUS
 and THKOX
 copyup mvnsubcheck

 layer mvnsd mvnsdarea
 labels TAP

 layer mvnsd TAP,TAPPIN
 and NPLUS
 and THKOX
 labels TAP
 labels TAPPIN port

 templayer mvnsdexpand mvnsdarea
 grow 500

 # Copy nsub areas up for contact checks
 templayer mvxnsubcheck mvnsubcheck
 copyup mvnsubcheck

 templayer mvpsdarea DIFF
 and PPLUS
 and-not NWELL
 and-not POLY
 and-not NPLUS
 and THKOX
 and-not mvpfetexpand
 copyup mvpsubcheck

 layer mvpsd mvpsdarea
 labels DIFF

 layer mvpsd TAP,TAPPIN
 and PPLUS
 and THKOX
 labels TAP
 labels TAPPIN port

 templayer mvpsdexpand mvpsdarea
 grow 500

 # Copy psub areas up for contact checks
 templayer xpsubcheck psubcheck
 copyup psubcheck

 templayer mvxpsubcheck mvpsubcheck
 copyup mvpsubcheck

 layer psd TAP
 and-not PPLUS
 and-not NPLUS
 and-not POLY
 and-not THKOX
 and-not pfetexpand
 and psdexpand

 layer nsd TAP
 and-not PPLUS
 and-not NPLUS
 and-not POLY
 and-not THKOX
 and nsdexpand

 layer mvpsd TAP
 and-not PPLUS
 and-not NPLUS
 and-not POLY
 and THKOX
 and-not mvpfetexpand
 and mvpsdexpand

 layer mvnsd TAP
 and-not PPLUS
 and-not NPLUS
 and-not POLY
 and THKOX
 and mvnsdexpand

 templayer hresarea POLY
 and RPM
 grow 3000

 templayer uresarea POLY
 and URPM
 grow 3000

 templayer diffresarea DIFFRES
 and-not THKOX
 grow 3000

 templayer mvdiffresarea DIFFRES
 and THKOX
 grow 3000

 templayer resarea diffresarea,mvdiffresarea,hresarea,uresarea

 layer pfet POLY
 and DIFF
 and diffresarea
 and-not NPLUS
 and-not STDCELL

 layer scpfet POLY
 and DIFF
 and diffresarea
 and-not HVTP
 and-not NPLUS
 and STDCELL

 layer scpfethvt POLY
 and DIFF
 and diffresarea
 and HVTP
 and-not NPLUS
 and STDCELL

 templayer xpolyterm RPM,URPM
 and POLY
 and-not POLYRES
 # add back the 0.06um contact surround in the direction of the resistor
 grow 60
 and POLY

 layer xpc xpolyterm

 templayer polyarea POLY
 and-not POLYRES
 and-not POLYSHORT
 and-not DIFF
 and-not TAP
 and-not RPM
 and-not URPM
 copyup polycheck

 layer poly polyarea,POLYTXT,POLYPIN
 labels POLY
 labels POLYTXT text
 labels POLYPIN port

 # Copy (non-resistor) poly areas up for contact checks
 templayer xpolycheck polycheck
 copyup polycheck

 layer mrp1 POLY
 and POLYRES
 and-not RPM
 and-not URPM
 labels POLY

 layer rmp POLY
 and POLYSHORT
 labels POLY

 layer xhrpoly POLY
 and POLYRES
 and RPM
 and-not URPM
 and PPLUS
 and NPC
 and-not xpolyterm
 labels POLY

 layer uhrpoly POLY
 and POLYRES
 and URPM
 and-not RPM
 and NPC
 and-not xpolyterm
 labels POLY

 templayer ndcbase CONT
 and DIFF
 and NPLUS
 and-not NWELL
 and LI
 and-not THKOX

 layer ndc ndcbase
 grow 85
 shrink 85
 shrink 85
 grow 85
 or ndcbase
 labels CONT

 templayer nscbase CONT
 and DIFF,TAP
 and NPLUS
 and NWELL
 and LI
 and-not THKOX

 layer nsc nscbase
 grow 85
 shrink 85
 shrink 85
 grow 85
 or nscbase
 labels CONT

 templayer pdcbase CONT
 and DIFF
 and PPLUS
 and NWELL
 and LI
 and-not THKOX

 layer pdc pdcbase
 grow 85
 shrink 85
 shrink 85
 grow 85
 or pdcbase
 labels CONT

 templayer pdcnowell CONT
 and DIFF
 and PPLUS
 and pfetexpand
 and LI
 and-not THKOX

 layer pdc pdcnowell
 grow 85
 shrink 85
 shrink 85
 grow 85
 or pdcnowell
 labels CONT

 templayer pscbase CONT
 and DIFF,TAP
 and PPLUS
 and-not NWELL
 and-not pfetexpand
 and LI
 and-not THKOX

 layer psc pscbase
 grow 85
 shrink 85
 shrink 85
 grow 85
 or pscbase
 labels CONT

 templayer pcbase CONT
 and POLY
 and-not DIFF
 and-not RPM,URPM
 and LI

 layer pc pcbase
 grow 85
 shrink 85
 shrink 85
 grow 85
 or pcbase
 labels CONT

 templayer ndicbase CONT
 and DIFF
 and NPLUS
 and DIODE
 and-not POLY
 and-not PPLUS
 and-not THKOX
 and-not LVTN

 layer ndic ndicbase
 grow 85
 shrink 85
 shrink 85
 grow 85
 or ndicbase
 labels CONT

 templayer ndilvtcbase CONT
 and DIFF
 and NPLUS
 and DIODE
 and-not POLY
 and-not PPLUS
 and-not THKOX
 and LVTN

 layer ndilvtc ndilvtcbase
 grow 85
 shrink 85
 shrink 85
 grow 85
 or ndilvtcbase
 labels CONT

 templayer pdicbase CONT
 and DIFF
 and PPLUS
 and DIODE
 and-not POLY
 and-not NPLUS
 and-not THKOX
 and-not LVTN
 and-not HVTP

 layer pdic pdicbase
 grow 85
 shrink 85
 shrink 85
 grow 85
 or pdicbase
 labels CONT

 templayer pdilvtcbase CONT
 and DIFF
 and PPLUS
 and DIODE
 and-not POLY
 and-not NPLUS
 and-not THKOX
 and LVTN
 and-not HVTP

 layer pdilvtc pdilvtcbase
 grow 85
 shrink 85
 shrink 85
 grow 85
 or pdilvtcbase
 labels CONT

 templayer pdihvtcbase CONT
 and DIFF
 and PPLUS
 and DIODE
 and-not POLY
 and-not NPLUS
 and-not THKOX
 and-not LVTN
 and HVTP

 layer pdihvtc pdihvtcbase
 grow 85
 shrink 85
 shrink 85
 grow 85
 or pdihvtcbase
 labels CONT

 templayer mvndcbase CONT
 and DIFF
 and NPLUS
 and-not NWELL
 and LI
 and THKOX

 layer mvndc mvndcbase
 grow 85
 shrink 85
 shrink 85
 grow 85
 or mvndcbase
 labels CONT

 templayer mvnscbase CONT
 and DIFF,TAP
 and NPLUS
 and NWELL
 and LI
 and THKOX

 layer mvnsc mvnscbase
 grow 85
 shrink 85
 shrink 85
 grow 85
 or mvnscbase
 labels CONT

 templayer mvpdcbase CONT
 and DIFF
 and PPLUS
 and NWELL
 and LI
 and THKOX

 layer mvpdc mvpdcbase
 grow 85
 shrink 85
 shrink 85
 grow 85
 or mvpdcbase
 labels CONT

 templayer mvpdcnowell CONT
 and DIFF
 and PPLUS
 and mvpfetexpand
 and MET1
 and THKOX

 layer mvpdc mvpdcnowell
 grow 85
 shrink 85
 shrink 85
 grow 85
 or mvpdcnowell
 labels CONT

 templayer mvpscbase CONT
 and DIFF,TAP
 and PPLUS
 and-not NWELL
 and-not mvpfetexpand
 and LI
 and THKOX

 layer mvpsc mvpscbase
 grow 85
 shrink 85
 shrink 85
 grow 85
 or mvpscbase
 labels CONT

 templayer mvndicbase CONT
 and DIFF
 and NPLUS
 and DIODE
 and-not POLY
 and-not PPLUS
 and-not LVTN
 and THKOX

 layer mvndic mvndicbase
 grow 85
 shrink 85
 shrink 85
 grow 85
 or mvndicbase
 labels CONT

 templayer nndicbase CONT
 and DIFF
 and NPLUS
 and DIODE
 and-not POLY
 and-not PPLUS
 and LVTN
 and THKOX

 layer nndic nndicbase
 grow 85
 shrink 85
 shrink 85
 grow 85
 or nndicbase
 labels CONT

 templayer mvpdicbase CONT
 and DIFF
 and PPLUS
 and DIODE
 and-not POLY
 and-not NPLUS
 and THKOX

 layer mvpdic mvpdicbase
 grow 85
 shrink 85
 shrink 85
 grow 85
 or mvpdicbase
 labels CONT

 layer coreli LI,LITXT,LIPIN
 and-not LIRES,LISHORT
 and COREID
 labels LI
 labels LITXT text
 labels LIPIN port

 layer locali LI,LITXT,LIPIN
 and-not LIRES,LISHORT
 and-not COREID
 labels LI
 labels LITXT text
 labels LIPIN port

 layer rli LI
 and LIRES,LISHORT
 labels LIRES,LISHORT

 layer lic MCON
 grow 95
 shrink 95
 shrink 85
 grow 85
 or MCON
 labels MCON

 layer m1 MET1,MET1TXT,MET1PIN
 and-not MET1RES,MET1SHORT
 labels MET1
 labels MET1TXT text
 labels MET1PIN port

 layer rm1 MET1
 and MET1RES,MET1SHORT
 labels MET1RES,MET1SHORT

 layer m1fill MET1FILL
 labels MET1FILL

 layer mimcap MET3
 and CAPM
 labels CAPM

 layer mimcc VIA3
 and CAPM
 grow 60
 grow 40
 shrink 40
 labels CAPM

 layer mimcap2 MET4
 and CAPM2
 labels CAPM2

 layer mim2cc VIA4
 and CAPM2
 grow 190
 grow 210
 shrink 210
 labels CAPM2


 templayer m2cbase VIA1
 grow 55

 layer m2c m2cbase
 grow 30
 shrink 30
 shrink 130
 grow 130
 or m2cbase

 layer m2 MET2,MET2TXT,MET2PIN
 and-not MET2RES,MET2SHORT
 labels MET2
 labels MET2TXT text
 labels MET2PIN port

 layer rm2 MET2
 and MET2RES,MET2SHORT
 labels MET2RES,MET2SHORT

 layer m2fill MET2FILL
 labels MET2FILL

 templayer m3cbase VIA2
 grow 40

 layer m3c m3cbase
 grow 60
 shrink 60
 shrink 140 
 grow 140
 or m3cbase

 layer m3 MET3,MET3TXT,MET3PIN
 and-not MET3RES,MET3SHORT
 and-not CAPM
 labels MET3
 labels MET3TXT text
 labels MET3PIN port

 layer rm3 MET3
 and MET3RES,MET3SHORT
 labels MET3RES,MET3SHORT

 layer m3fill MET3FILL
 labels MET3FILL


 templayer via3base VIA3
 and-not CAPM
 grow 60

 layer via3 via3base
 grow 40
 shrink 40
 shrink 160
 grow 160
 or via3base

 layer m4 MET4,MET4TXT,MET4PIN
 and-not MET4RES,MET4SHORT
 and-not CAPM2
 labels MET4
 labels MET4TXT text
 labels MET4PIN port

 layer rm4 MET4
 and MET4RES,MET4SHORT
 labels MET4RES,MET4SHORT

 layer m4fill MET4FILL
 labels MET4FILL

 layer m5 MET5,MET5TXT,MET5PIN
 and-not MET5RES,MET5SHORT
 labels MET5
 labels MET5TXT text
 labels MET5PIN port

 layer rm5 MET5
 and MET5RES,MET5SHORT
 labels MET5RES,MET5SHORT

 layer m5fill MET5FILL
 labels MET5FILL

 templayer via4base VIA4
 and-not CAPM2
 grow 190

 layer via4 via4base
 grow 210
 shrink 210
 shrink 590
 grow 590
 or via4base

 layer metrdl RDL,RDLTXT,RDLPIN
 labels RDL
 labels RDLTXT text
 labels RDLPIN port

 # Find diffusion not covered in
 # NPLUS or PPLUS and pull it into
 # the next layer up

 templayer gentrans DIFF
 and-not PPLUS
 and-not NPLUS
 and POLY
 copyup DIFF,POLY

 templayer gendiff DIFF,TAP
 and-not PPLUS
 and-not NPLUS
 and-not POLY
 copyup DIFF

 # Handle contacts found by copyup

 templayer ndiccopy CONT
 and LI
 and DIODE
 and NPLUS
 and-not THKOX

 layer ndic ndiccopy
 grow 85
 shrink 85
 shrink 85
 grow 85
 or ndiccopy
 labels CONT

 templayer mvndiccopy CONT
 and LI
 and DIODE
 and NPLUS
 and THKOX

 layer mvndic mvndiccopy
 grow 85
 shrink 85
 shrink 85
 grow 85
 or mvndiccopy
 labels CONT

 templayer pdiccopy CONT
 and LI
 and DIODE
 and PPLUS
 and-not THKOX

 layer pdic pdiccopy
 grow 85
 shrink 85
 shrink 85
 grow 85
 or pdiccopy
 labels CONT

 templayer mvpdiccopy CONT
 and LI
 and DIODE
 and PPLUS
 and THKOX

 layer mvpdic mvpdiccopy
 grow 85
 shrink 85
 shrink 85
 grow 85
 or mvpdiccopy
 labels CONT

 templayer ndccopy CONT
 and ndifcheck

 layer ndc ndccopy
 grow 85
 shrink 85
 shrink 85
 grow 85
 or ndccopy
 labels CONT

 templayer mvndccopy CONT
 and mvndifcheck

 layer mvndc mvndccopy
 grow 85
 shrink 85
 shrink 85
 grow 85
 or mvndccopy
 labels CONT

 templayer pdccopy CONT
 and pdifcheck

 layer pdc pdccopy
 grow 85
 shrink 85
 shrink 85
 grow 85
 or pdccopy
 labels CONT

 templayer mvpdccopy CONT
 and mvpdifcheck

 layer mvpdc mvpdccopy
 grow 85
 shrink 85
 shrink 85
 grow 85
 or mvpdccopy
 labels CONT

 templayer pccopy CONT
 and polycheck

 layer pc pccopy
 grow 85
 shrink 85
 shrink 85
 grow 85
 or pccopy
 labels CONT

 templayer nsccopy CONT
 and nsubcheck

 layer nsc nsccopy
 grow 85
 shrink 85
 shrink 85
 grow 85
 or nsccopy
 labels CONT

 templayer mvnsccopy CONT
 and mvnsubcheck

 layer mvnsc mvnsccopy
 grow 85
 shrink 85
 shrink 85
 grow 85
 or mvnsccopy
 labels CONT

 templayer psccopy CONT
 and psubcheck

 layer psc psccopy
 grow 85
 shrink 85
 shrink 85
 grow 85
 or psccopy
 labels CONT

 templayer mvpsccopy CONT
 and mvpsubcheck

 layer mvpsc mvpsccopy
 grow 85
 shrink 85
 shrink 85
 grow 85
 or mvpsccopy
 labels CONT

 # Find contacts not covered in
 # metal and pull them into the
 # next layer up
 
 templayer gencont CONT
 and LI
 and-not DIFF,TAP
 and-not POLY
 and-not DIODE
 and-not nsubcheck
 and-not psubcheck
 and-not mvnsubcheck
 and-not mvpsubcheck
 copyup CONT,LI

 templayer barecont CONT
 and-not LI
 and-not nsubcheck
 and-not psubcheck
 and-not mvnsubcheck
 and-not mvpsubcheck
 copyup CONT

 layer glass GLASS,PADTXT,PADPIN
 labels GLASS
 labels PADTXT text
 labels PADPIN port

 templayer boundary BOUND,STDCELL,PADCELL
 boundary

 layer comment LVSTEXT
 labels LVSTEXT text

 layer comment TTEXT
 labels TTEXT text

 layer fillblock  FILLOBSM1,FILLOBSM2,FILLOBSM3,FILLOBSM4
 labels FILLOBSM1,FILLOBSM2,FILLOBSM3,FILLOBSM4

# MOS Varactor

 layer var POLY
 and TAP
 and NPLUS
 and NWELL
 and-not THKOX
 and-not HVTP
 # NOTE:  Else forms a varactor that is not in the vendor netlist.
 and-not COREID
 labels POLY

 layer varhvt POLY
 and TAP
 and NPLUS
 and NWELL
 and-not THKOX
 and HVTP
 labels POLY

 layer mvvar POLY
 and TAP
 and NPLUS
 and NWELL
 and THKOX
 labels POLY

 calma NWELL 64 20
 calma DIFF 65 20
 calma DNWELL 64 18
 calma PWRES 64 13
 calma TAP  65 44
 # LVTN
 calma LVTN 125 44
 # HVTR
 calma HVTR 18 20
 # HVTP
 calma HVTP 78 44
 # SONOS (TUNM)
 calma SONOS 80 20
 # NPLUS = NSDM
 calma NPLUS 93 44
 # PPLUS = PSDM
 calma PPLUS 94 20
 # HVI
 calma THKOX 75 20
 # NPC
 calma NPC 95 20
 # P+ POLY MASK
 calma RPM 86 20
 calma URPM 79 20
 calma LDNTM 11 44
 calma HVNTM 125 20
 # Poly resistor ID mark
 calma POLYRES 66 13
 # Diffusion resistor ID mark
 calma DIFFRES 65 13
 calma POLY 66 20
 calma POLYMOD 66 83
 # Diode ID mark
 calma DIODE 81 23
 # Bipolar NPN mark
 calma NPNID 82 20
 # Bipolar PNP mark
 calma PNPID 82 44
 # Capacitor ID
 calma CAPID 82 64
 # Core area ID mark
 calma COREID 81 2
 # Standard cell ID mark
 calma STDCELL 81 4
 # Padframe cell ID mark
 calma PADCELL 81 3
 # Seal ring ID mark
 calma SEALID 81 1
 # Low tap density ID mark
 calma LOWTAPDENSITY 81 14
 
 # LICON
 calma CONT 66 44
 calma LI   67 20
 calma MCON 67 44

 calma MET1 68 20
 calma VIA1 68 44
 calma MET2 69 20
 calma VIA2 69 44
 calma MET3 70 20
 calma VIA3 70 44
 calma MET4 71 20
 calma VIA4 71 44
 calma MET5 72 20
 calma RDL 74 20
 calma GLASS 76 20

 calma SUBPIN  64 59
 calma PADPIN  76 5
 calma DIFFPIN 65 6
 calma TAPPIN  65 5
 calma WELLPIN  64 5
 calma LIPIN 67 5
 calma POLYPIN 66 5
 calma MET1PIN 68 5
 calma MET2PIN 69 5
 calma MET3PIN 70 5
 calma MET4PIN 71 5
 calma MET5PIN 72 5
 calma RDLPIN 74 5

 calma LIRES 67 13
 calma MET1RES 68 13
 calma MET2RES 69 13
 calma MET3RES 70 13
 calma MET4RES 71 13
 calma MET5RES 72 13

 calma MET1FILL 68 28
 calma MET2FILL 69 28
 calma MET3FILL 70 28
 calma MET4FILL 71 28
 calma MET5FILL 72 28

 calma POLYSHORT 66 15
 calma LISHORT 67 15
 calma MET1SHORT 68 15
 calma MET2SHORT 69 15
 calma MET3SHORT 70 15
 calma MET4SHORT 71 15
 calma MET5SHORT 72 15

 calma SUBTXT 122 16
 calma PADTXT 76 16
 calma DIFFTXT 65 16
 calma POLYTXT 66 16
 calma WELLTXT 64 16
 calma LITXT 67 16
 calma MET1TXT 68 16
 calma MET2TXT 69 16
 calma MET3TXT 70 16
 calma MET4TXT 71 16
 calma MET5TXT 72 16
 calma RDLPIN 74 16

 calma BOUND 235 4

 calma LVSTEXT 83 44

 calma CAPM 89 44
 calma CAPM2 97 44

 calma FILLOBSM1  62  24
 calma FILLOBSM2  105 52
 calma FILLOBSM3  107 24
 calma FILLOBSM4  112 4

#-----------------------------------------------------------------------

style  vendorimport
 scalefactor 10 nanometers
 gridlimit 5

 options ignore-unknown-layer-labels no-reconnect-labels

 ignore NPC
 ignore SEALID
 ignore CAPID
 ignore LDNTM
 ignore HVNTM
 ignore POLYMOD
 ignore LOWTAPDENSITY

 layer pnp NWELL,WELLTXT,WELLPIN
 and PNPID
 labels NWELL
 labels WELLTXT port
 labels WELLPIN port

 layer nwell NWELL,WELLTXT,WELLPIN
 and-not PNPID
 labels NWELL
 labels WELLTXT port
 labels WELLPIN port

 layer pwell SUBTXT,SUBPIN
 labels SUBTXT port
 labels SUBPIN port

 # Always draw pwell under p-tap
 layer pwell TAP
 and-not NWELL

 layer dnwell DNWELL
 labels DNWELL

 layer npn DNWELL
 and-not NWELL
 and NPNID

 layer rpw PWRES
 and DNWELL
 labels PWRES

 templayer ndiffarea DIFF,DIFFTXT,DIFFPIN
 and-not POLY
 and-not NWELL
 and-not PPLUS
 and-not DIODE
 and-not DIFFRES
 and-not THKOX
 and NPLUS
 copyup ndifcheck
 labels DIFF
 labels DIFFTXT port
 labels DIFFPIN port
 labels TAPPIN port

 layer ndiff ndiffarea

 # Copy ndiff areas up for contact checks
 templayer xndifcheck ndifcheck
 copyup ndifcheck

 templayer mvndiffarea DIFF,DIFFTXT,DIFFPIN
 and-not POLY
 and-not NWELL
 and-not PPLUS
 and-not DIODE
 and-not DIFFRES
 and THKOX
 and NPLUS
 copyup ndifcheck
 labels DIFF
 labels DIFFTXT port
 labels DIFFPIN port

 layer mvndiff mvndiffarea

 # Copy ndiff areas up for contact checks
 templayer mvxndifcheck mvndifcheck
 copyup mvndifcheck

 layer ndiode DIFF
 and NPLUS
 and DIODE
 and-not NWELL
 and-not POLY
 and-not PPLUS
 and-not THKOX
 and-not LVTN
 labels DIFF

 layer ndiodelvt DIFF
 and NPLUS
 and DIODE
 and-not NWELL
 and-not POLY
 and-not PPLUS
 and-not THKOX
 and LVTN
 labels DIFF

 templayer ndiodearea DIODE
 and NPLUS
 and-not THKOX
 and-not NWELL
 copyup DIODE,NPLUS

 layer ndiffres DIFFRES
 and NPLUS
 and-not THKOX
 labels DIFF

 templayer pdiffarea DIFF,DIFFTXT,DIFFPIN
 and-not POLY
 and NWELL
 and-not NPLUS
 and-not DIODE
 and-not THKOX
 and PPLUS
 copyup pdifcheck
 labels DIFF 
 labels DIFFTXT port
 labels DIFFPIN port

 layer pdiff pdiffarea

 layer mvndiode DIFF
 and NPLUS
 and DIODE
 and THKOX
 and-not POLY
 and-not PPLUS
 and-not LVTN
 labels DIFF

 layer nndiode DIFF
 and NPLUS
 and DIODE
 and THKOX
 and-not POLY
 and-not PPLUS
 and LVTN
 labels DIFF

 templayer mvndiodearea DIODE
 and NPLUS
 and THKOX
 and-not NWELL
 copyup DIODE,NPLUS

 layer mvndiffres DIFFRES
 and NPLUS
 and THKOX
 labels DIFF

 templayer mvpdiffarea DIFF,DIFFTXT,DIFFPIN
 and-not POLY
 and NWELL
 and-not NPLUS
 and THKOX
 and-not DIODE
 and-not DIFFRES
 and PPLUS
 copyup mvpdifcheck
 labels DIFF
 labels DIFFTXT port
 labels DIFFPIN port

 layer mvpdiff mvpdiffarea

 # Copy pdiff areas up for contact checks
 templayer xpdifcheck pdifcheck
 copyup pdifcheck

 layer pdiode DIFF
 and PPLUS
 and-not POLY
 and-not NPLUS
 and-not THKOX
 and-not LVTN
 and-not HVTP
 and DIODE
 labels DIFF

 layer pdiodelvt DIFF
 and PPLUS
 and-not POLY
 and-not NPLUS
 and-not THKOX
 and LVTN
 and-not HVTP
 and DIODE
 labels DIFF

 layer pdiodehvt DIFF
 and PPLUS
 and-not POLY
 and-not NPLUS
 and-not THKOX
 and-not LVTN
 and HVTP
 and DIODE
 labels DIFF

 templayer pdiodearea DIODE
 and PPLUS
 and-not THKOX
 copyup DIODE,PPLUS

 # Define pfet areas as known pdiff, regardless of the presence of a well.

 templayer pfetarea DIFF
 and-not NPLUS
 and-not THKOX
 and POLY

 layer pfet pfetarea
 and-not LVTN
 and-not HVTP
 and-not STDCELL
 and-not COREID
 labels DIFF

 layer scpfet pfetarea
 and-not LVTN
 and-not HVTP
 and STDCELL
 labels DIFF

 layer scpfethvt pfetarea
 and-not LVTN
 and HVTP
 and STDCELL
 labels DIFF

 layer ppu pfetarea
 and-not LVTN
 and HVTP
 and COREID
 labels DIFF
 
 layer pfetlvt pfetarea
 and LVTN
 labels DIFF

 layer pfetmvt pfetarea
 and HVTR
 labels DIFF

 layer pfethvt pfetarea
 and HVTP
 and-not STDCELL
 and-not COREID
 labels DIFF

 # Always force nwell under pfet (nwell encloses pdiff by 0.18)
 layer nwell pfetarea
 grow 180

 # Copy mvpdiff areas up for contact checks
 templayer mvxpdifcheck mvpdifcheck
 copyup mvpdifcheck

 layer mvpdiode DIFF
 and PPLUS
 and-not POLY
 and-not NPLUS
 and THKOX
 and DIODE
 labels DIFF

 templayer mvpdiodearea DIODE
 and PPLUS
 and THKOX
 copyup DIODE,PPLUS

 # Define pfet areas as known pdiff,
 # regardless of the presence of a
 # well.

 templayer mvpfetarea DIFF
 and-not NPLUS