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+#----------------------------------------------------------
+# Copyright (c) 2020 R. Timothy Edwards
+# Revisions: See below
+#
+# This file is an Open Source foundry process describing
+# the SkyWater S8 hybrid 0.18um / 0.13um fabrication
+# process. The file may be distributed under the terms
+# of the Apache 2.0 license agreement.
+#
+#----------------------------------------------------------
+# This file is designed to be used with magic versions
+# 8.3.24 or newer.
+#----------------------------------------------------------
+tech
+ format 35
+ sky130A
+end
+
+version
+ version 20200508
+ description "SkyWater SKY130: PRE ALPHA Vendor Open Source rules and DRC"
+end
+
+#----------------------------------------------------------
+# Status 7/10/20: Rev 1 (alpha):
+# First public release
+#--------------------------------------------------------------
+
+#--------------------------------------------------------------
+# Supported device types
+#--------------------------------------------------------------
+# device name magic ID layer description
+#-------------------------------------------------------------
+# nshort nfet standard nFET
+# nshort scnfet standard nFET in standard cell**
+# nlowvt nfetlvt low Vt nFET
+# sonos_p/e nsonos SONOS nFET
+# pshort pfet standard pFET
+# pshort scpfet standard pFET in standard cell**
+# plowvt pfetlvt low Vt pFET
+# phighvt pfethvt high Vt pFET
+# ntvnative --- native nFET
+# phv mvpfet thickox pFET
+# nhv mvnfet thickox nFET
+# nhvnative mvnnfet thickox native nFET
+# ndiode ndiode n+ diff diode
+# ndiode_h mvndiode thickox n+ diff diode
+# pdiode pdiode p+ diff diode
+# pdiode_h mvpdiode thickox p+ diff diode
+# ndiode_native nndiode diode with nndiff
+# ndiode_lvt ndiodelvt low Vt n+ diff diode
+# pdiode_lvt pdiodelvt low Vt p+ diff diode
+# pdiode_hvt pdiodehvt high Vt p+ diff diode
+# nwdiode --- nwell diode
+# dnwdiode_psub --- deep nwell diode to substrate
+# dnwdiode_pw --- deep nwell diode to pwell
+# xcmimc1 mimcap MiM cap 1st plate
+# xcmimc2 mimcap2 MiM cap 2nd plate
+# mrdn rdn n+ diff resistor
+# mrdn_hv mvrdn thickox n+ diff resistor
+# mrdp rdp p+ diff resistor
+# mrdp_hv mvrdp thickox p+ diff resistor
+# mrl1 rli local interconnect resistor
+# mrp1 npres n+ poly resistor
+# xhrpoly_* ppres (*) p+ poly resistor (300 Ohms/sq)
+# uhrpoly_* xres (*) p+ poly resistor (2k Ohms/sq)
+# xcnwvc varactor varactor (low Vt?)
+# xcnwvc2 varactorhvt high Vt varactor
+# xchvnwc mvvaractor thickox varactor
+# xpwres rpw pwell resistor (in deep nwell)
+#
+# (*) Note that ppres may extract into some generic type
+# called "xhrpoly", but only specific sizes of xhrpoly are
+# allowed, and these are created from fixed layouts like the
+# types below.
+#
+# (**) nFET and pFET in standard cells are the same as devices
+# outside of the standard cell except for the DRC rule for
+# FET to diffusion contact spacing (which is 0.05um, not 0.055um)
+#
+# To avoid creating a large number of types, a few ID layers are
+# used in conjunction with standard devices types: "lvt" for
+# low threshold voltage, and "hvt" for high threshold voltage.
+# "dnwell" is used as an identifier layer where appropriate.
+# Layer HVI (thick oxide) is treated differently, and types
+# "mv*" are defined where thick oxide is required.
+#
+#-------------------------------------------------------------
+# The following devices are not extracted but are represented
+# only by script-generated subcells in the PDK.
+#-------------------------------------------------------------
+# nshortesd ESD nFET
+# nhvesd ESD thickox nFET
+# nhvnativeesd ESD native nFET
+# phvesd ESD thickox pFET
+# fnpass flash nFET device
+# npnpar1x* parasitic NPN
+# npn_1x1_2p0_hv thickox gated parasitic NPN
+# pnppar parasitic PNP
+# pnppar5x parasitic PNP
+# xesd_ndiode_h_*** ESD n+ diode
+# xesd_pdiode_h_*** ESD p+ diode
+# reslocsub local substrate island indicator
+# xcmvpp Vpp cap
+# xcmvpp_2 Vpp cap
+# xcmvpp_* Vpp cap
+# xcmvpp* Vpp cap
+# balun balun inductor
+# ind4 inductor
+# fuse metal fuse device
+#--------------------------------------------------------------
+
+#-----------------------------------------------------
+# Tile planes
+#-----------------------------------------------------
+
+planes
+ dwell,dw
+ well,w
+ active,a
+ locali,li1,li
+ metal1,m1
+ metal2,m2
+ metal3,m3
+ cap1,c1
+ metal4,m4
+ cap2,c2
+ metal5,m5
+ block,b
+ comment,c
+end
+
+#-----------------------------------------------------
+# Tile types
+#-----------------------------------------------------
+
+types
+# Deep nwell
+ dwell dnwell,dnw
+
+# Wells
+ well nwell,nw
+ -well pwell,pw
+ -well rpw,rpwell
+ -well obswell
+
+# Transistors
+ active nmos,ntransistor,nfet
+ -active scnmos,scntransistor,scnfet
+ active pmos,ptransistor,pfet
+ -active scpmos,scptransistor,scpfet
+ -active nnmos,nntransistor
+ active mvnmos,mvntransistor,mvnfet
+ active mvpmos,mvptransistor,mvpfet
+ -active mvnnmos,mvnntransistor,mvnnfet,nnfet
+ -active varactor,varact,var
+ -active mvvaractor,mvvaract,mvvar
+
+ -active pmoslvt,pfetlvt
+ -active pmoshvt,pfethvt
+ -active nmoslvt,nfetlvt
+ -active varactorhvt,varacthvt,varhvt
+ -active nsonos,sonos
+
+# Diffusions
+ active ndiff,ndiffusion,ndif
+ active pdiff,pdiffusion,pdif
+ -active mvndiff,mvndiffusion,mvndif
+ -active mvpdiff,mvpdiffusion,mvpdif
+ active ndiffc,ndcontact,ndc
+ active pdiffc,pdcontact,pdc
+ -active mvndiffc,mvndcontact,mvndc
+ -active mvpdiffc,mvpdcontact,mvpdc
+ active psubdiff,psubstratepdiff,ppdiff,ppd,psd
+ active nsubdiff,nsubstratendiff,nndiff,nnd,nsd
+ -active mvpsubdiff,mvpsubstratepdiff,mvppdiff,mvppd,mvpsd
+ -active mvnsubdiff,mvnsubstratendiff,mvnndiff,mvnnd,mvnsd
+ active psubdiffcont,psubstratepcontact,psc
+ active nsubdiffcont,nsubstratencontact,nsc
+ -active mvpsubdiffcont,mvpsubstratepcontact,mvpsc
+ -active mvnsubdiffcont,mvnsubstratencontact,mvnsc
+ -active obsactive
+ -active mvobsactive
+
+# Poly
+ active poly,p,polysilicon
+ active polycont,pc,pcontact,polycut,polyc
+ active xpolycontact,xpolyc,xpc
+
+# Resistors
+ -active npolyres,npres,mrp1
+ -active ppolyres,ppres,xhrpoly
+ -active xpolyres,xpres,xres,uhrpoly
+ -active ndiffres,rnd,rdn,rndiff
+ -active pdiffres,rpd,rdp,rpdiff
+ -active mvndiffres,mvrnd,mvrdn,mvrndiff
+ -active mvpdiffres,mvrpd,mvrdp,mvrpdiff
+ -active rmp
+
+# Diodes
+ -active pdiode,pdi
+ -active ndiode,ndi
+ -active nndiode,nndi
+ -active pdiodec,pdic
+ -active ndiodec,ndic
+ -active nndiodec,nndic
+ -active mvpdiode,mvpdi
+ -active mvndiode,mvndi
+ -active mvpdiodec,mvpdic
+ -active mvndiodec,mvndic
+ -active pdiodelvt,pdilvt
+ -active pdiodehvt,pdihvt
+ -active ndiodelvt,ndilvt
+ -active pdiodelvtc,pdilvtc
+ -active pdiodehvtc,pdihvtc
+ -active ndiodelvtc,ndilvtc
+
+# Local Interconnect
+ locali locali,li1,li
+ -locali corelocali,coreli1,coreli
+ -locali rlocali,rli1,rli
+ locali viali,vial,lic,licon,m1c,v0
+ -locali obsli1,obsli
+ -locali obsli1c,obslic,obslicon
+
+# Metal 1
+ metal1 metal1,m1,met1
+ -metal1 rmetal1,rm1,rmet1
+ metal1 via1,m2contact,m2cut,m2c,via,v,v1
+ -metal1 obsm1
+ -metal1 padl
+
+# Metal 2
+ metal2 metal2,m2,met2
+ -metal2 rmetal2,rm2,rmet2
+ metal2 via2,m3contact,m3cut,m3c,v2
+ -metal2 obsm2
+
+# Metal 3
+ metal3 metal3,m3,met3
+ -metal3 rmetal3,rm3,rmet3
+ -metal3 obsm3
+ metal3 via3,v3
+
+ -cap1 mimcap,mim,capm
+ -cap1 mimcapcontact,mimcapc,mimcc,capmc
+
+# Metal 4
+ metal4 metal4,m4,met4
+ -metal4 rmetal4,rm4,rmet4
+ -metal4 obsm4
+ metal4 via4,v4
+
+ -cap2 mimcap2,mim2,capm2
+ -cap2 mimcap2contact,mimcap2c,mim2cc,capm2c
+
+# Metal 5
+ metal5 metal5,m5,met5
+ -metal5 rm5,rmetal5,rmet5
+ -metal5 obsm5
+
+
+# Miscellaneous
+ -block glass
+ -block fillblock
+ -comment comment
+ -comment obscomment
+
+end
+
+#-----------------------------------------------------
+# Magic contact types
+#-----------------------------------------------------
+
+contact
+ pc poly locali
+ ndc ndiff locali
+ pdc pdiff locali
+ nsc nsd locali
+ psc psd locali
+ ndic ndiode locali
+ ndilvtc ndiodelvt locali
+ nndic nndiode locali
+ pdic pdiode locali
+ pdilvtc pdiodelvt locali
+ pdihvtc pdiodehvt locali
+ xpc xpc locali
+
+ mvndc mvndiff locali
+ mvpdc mvpdiff locali
+ mvnsc mvnsd locali
+ mvpsc mvpsd locali
+ mvndic mvndiode locali
+ mvpdic mvpdiode locali
+
+ lic locali metal1
+ obslic obsli obsm1
+
+ via1 metal1 metal2
+ via2 metal2 metal3
+ via3 metal3 metal4
+ via4 metal4 metal5
+ stackable
+
+ # MiM cap contacts are not stackable!
+ mimcc mimcap metal4
+ mim2cc mimcap2 metal5
+
+ padl m1 m2 m3 m4 m5 glass
+
+end
+
+#-----------------------------------------------------
+# Layer aliases
+#-----------------------------------------------------
+
+aliases
+
+ allwellplane nwell
+ allnwell nwell,obswell
+
+ allnfets nfet,scnfet,mvnfet,mvnnfet,nfetlvt,nsonos
+ allpfets pfet,scpfet,mvpfet,pfethvt,pfetlvt
+ allfets allnfets,allpfets,varactor,mvvaractor,varhvt
+
+ allnactivenonfet *ndiff,*nsd,*ndiode,*nndiode,*mvndiff,*mvnsd,*mvndiode,*ndiodelvt
+ allnactive allnactivenonfet,allnfets
+ allnactivenontap *ndiff,*ndiode,*nndiode,*mvndiff,*mvndiode,*ndiodelvt,allnfets
+ allnactivetap *nsd,*mvnsd,var,varhvt,mvvar
+
+ allpactivenonfet *pdiff,*psd,*pdiode,*mvpdiff,*mvpsd,*mvpdiode,*pdiodelvt,*pdiodehvt
+ allpactive allpactivenonfet,allpfets
+ allpactivenontap *pdiff,*pdiode,*mvpdiff,*mvpdiode,*pdiodelvt,*pdiodehvt,allpfets
+ allpactivetap *psd,*mvpsd
+
+ allactivenonfet allnactivenonfet,allpactivenonfet
+ allactive allactivenonfet,allfets
+
+ allactiveres ndiffres,pdiffres,mvndiffres,mvpdiffres
+
+ allndifflv *ndif,*nsd,*ndiode,ndiffres,nfet,scnfet,nfetlvt,nsonos
+ allpdifflv *pdif,*psd,*pdiode,pdiffres,pfet,scpfet,pfetlvt,pfethvt
+ alldifflv allndifflv,allpdifflv
+ allndifflvnonfet *ndif,*nsd,*ndiode,*nndiode,ndiffres,*ndiodelvt
+ allpdifflvnonfet *pdif,*psd,*pdiode,pdiffres,*pdiodelvt,*pdiodehvt
+ alldifflvnonfet allndifflvnonfet,allpdifflvnonfet
+
+ allndiffmv *mvndif,*mvnsd,*mvndiode,*nndiode,mvndiffres,mvnfet,mvnnfet
+ allpdiffmv *mvpdif,*mvpsd,*mvpdiode,mvpdiffres,mvpfet
+ alldiffmv allndiffmv,allpdiffmv
+ allndiffmvnontap *mvndif,*mvndiode,*nndiode,mvndiffres,mvnfet,mvnnfet
+ allpdiffmvnontap *mvpdif,*mvpdiode,mvpdiffres,mvpfet
+ alldiffmvnontap allndiffmvnontap,allpdiffmvnontap
+ allndiffmvnonfet *mvndif,*mvnsd,*mvndiode,*nndiode,mvndiffres
+ allpdiffmvnonfet *mvpdif,*mvpsd,*mvpdiode,mvpdiffres
+ alldiffmvnonfet allndiffmvnonfet,allpdiffmvnonfet
+
+ alldiffnonfet alldifflvnonfet,alldiffmvnonfet
+ alldiff alldifflv,alldiffmv
+
+ allpolyres mrp1,xhrpoly,uhrpoly,rmp
+ allpolynonfet *poly,allpolyres,xpc
+ allpolynonres *poly,allfets,xpc
+
+ allpoly allpolynonfet,allfets
+ allpolynoncap *poly,xpc,allfets,allpolyres
+
+ allndiffcontlv ndc,nsc,ndic,nndic,ndilvtc
+ allpdiffcontlv pdc,psc,pdic,pdilvtc,pdihvtc
+ allndiffcontmv mvndc,mvnsc,mvndic
+ allpdiffcontmv mvpdc,mvpsc,mvpdic
+ allndiffcont allndiffcontlv,allndiffcontmv
+ allpdiffcont allpdiffcontlv,allpdiffcontmv
+ alldiffcontlv allndiffcontlv,allpdiffcontlv
+ alldiffcontmv allndiffcontmv,allpdiffcontmv
+ alldiffcont alldiffcontlv,alldiffcontmv
+
+ allcont alldiffcont,pc
+
+ allres allpolyres,allactiveres
+
+ allli *locali,coreli,rli
+ allm1 *m1,rm1
+ allm2 *m2,rm2
+ allm3 *m3,rm3
+ allm4 *m4,rm4
+ allm5 *m5,rm5
+
+ allpad padl
+
+ psub pwell
+
+end
+
+#-----------------------------------------------------
+# Layer drawing styles
+#-----------------------------------------------------
+
+styles
+ styletype mos
+ dnwell cwell
+ nwell nwell
+ pwell pwell
+ rpwell pwell ptransistor_stripes
+ ndiff ndiffusion
+ pdiff pdiffusion
+ nsd ndiff_in_nwell
+ psd pdiff_in_pwell
+ nfet ntransistor ntransistor_stripes
+ scnfet ntransistor ntransistor_stripes
+ pfet ptransistor ptransistor_stripes
+ scpfet ptransistor ptransistor_stripes
+ var polysilicon ndiff_in_nwell
+ ndc ndiffusion metal1 contact_X'es
+ pdc pdiffusion metal1 contact_X'es
+ nsc ndiff_in_nwell metal1 contact_X'es
+ psc pdiff_in_pwell metal1 contact_X'es
+
+ pfetlvt ptransistor ptransistor_stripes implant1
+ pfethvt ptransistor ptransistor_stripes implant2
+ nfetlvt ntransistor ntransistor_stripes implant1
+ nsonos ntransistor implant3
+ varhvt polysilicon ndiff_in_nwell implant2
+
+ mvndiff ndiffusion hvndiff_mask
+ mvpdiff pdiffusion hvpdiff_mask
+ mvnsd ndiff_in_nwell hvndiff_mask
+ mvpsd pdiff_in_pwell hvpdiff_mask
+ mvnfet ntransistor ntransistor_stripes hvndiff_mask
+ mvnnfet ntransistor ndiff_in_nwell hvndiff_mask
+ mvpfet ptransistor ptransistor_stripes
+ mvvar polysilicon ndiff_in_nwell hvndiff_mask
+ mvndc ndiffusion metal1 contact_X'es hvndiff_mask
+ mvpdc pdiffusion metal1 contact_X'es hvpdiff_mask
+ mvnsc ndiff_in_nwell metal1 contact_X'es hvndiff_mask
+ mvpsc pdiff_in_pwell metal1 contact_X'es hvpdiff_mask
+
+ poly polysilicon
+ pc polysilicon metal1 contact_X'es
+ npolyres polysilicon silicide_block nselect2
+ ppolyres polysilicon silicide_block pselect2
+ xpc polysilicon pselect2 metal1 contact_X'es
+ rmp polysilicon poly_resist_stripes
+
+ pdiode pdiffusion pselect2
+ ndiode ndiffusion nselect2
+ pdiodec pdiffusion pselect2 metal1 contact_X'es
+ ndiodec ndiffusion nselect2 metal1 contact_X'es
+
+ nndiode ndiffusion nselect2 implant3
+ ndiodelvt ndiffusion nselect2 implant1
+ pdiodelvt pdiffusion pselect2 implant1
+ pdiodehvt pdiffusion pselect2 implant2
+ pdilvtc pdiffusion pselect2 implant1 metal1 contact_X'es
+ pdihvtc pdiffusion pselect2 implant2 metal1 contact_X'es
+ ndilvtc ndiffusion nselect2 implant1 metal1 contact_X'es
+
+ mvpdiode pdiffusion pselect2 hvpdiff_mask
+ mvndiode ndiffusion nselect2 hvndiff_mask
+ mvpdiodec pdiffusion pselect2 metal1 contact_X'es hvpdiff_mask
+ mvndiodec ndiffusion nselect2 metal1 contact_X'es hvndiff_mask
+ nndiodec ndiff_in_nwell nselect2 metal1 contact_X'es hvndiff_mask
+
+ locali metal1
+ coreli metal1
+ rli metal1 poly_resist_stripes
+ lic metal1 metal2 via1arrow
+ obsli metal1
+ obslic metal1 metal2 via1arrow
+
+ metal1 metal2
+ rm1 metal2 poly_resist_stripes
+ obsm1 metal2
+ m2c metal2 metal3 via2arrow
+ metal2 metal3
+ rm2 metal3 poly_resist_stripes
+ obsm2 metal3
+ m3c metal3 metal4 via3alt
+ metal3 metal4
+ rm3 metal4 poly_resist_stripes
+ obsm3 metal4
+ mimcap metal3 mems
+ mimcc metal3 contact_X'es mems
+ mimcap2 metal4 mems
+ mim2cc metal4 contact_X'es mems
+ via3 metal4 metal5 via4
+ metal4 metal5
+ rm4 metal5 poly_resist_stripes
+ obsm4 metal5
+ via4 metal5 metal6 via5
+ metal5 metal6
+ rm5 metal6 poly_resist_stripes
+ obsm5 metal6
+
+ glass overglass
+ mrp1 poly_resist poly_resist_stripes
+ xhrpoly poly_resist silicide_block
+ uhrpoly poly_resist
+ ndiffres ndiffusion ndop_stripes
+ pdiffres pdiffusion pdop_stripes
+ mvndiffres ndiffusion hvndiff_mask ndop_stripes
+ mvpdiffres pdiffusion hvpdiff_mask pdop_stripes
+ comment comment
+ error_p error_waffle
+ error_s error_waffle
+ error_ps error_waffle
+ fillblock cwell
+
+ obswell cwell
+ obsactive implant4
+
+ padl metal6 via6 overglass
+
+ magnet substrate_field_implant
+ rotate via3alt
+ fence via5
+end
+
+#-----------------------------------------------------
+# Special paint/erase rules
+#-----------------------------------------------------
+
+compose
+ compose nfet poly ndiff
+ compose pfet poly pdiff
+ compose var poly nsd
+
+ compose mvnfet poly mvndiff
+ compose mvpfet poly mvpdiff
+ compose mvvar poly mvnsd
+
+ paint ndc nwell pdc
+ paint nfet nwell pfet
+ paint scnfet nwell scpfet
+ paint ndiff nwell pdiff
+ paint psd nwell nsd
+ paint psc nwell nsc
+
+ paint pdc pwell ndc
+ paint pfet pwell nfet
+ paint scpfet pwell scnfet
+ paint pdiff pwell ndiff
+ paint nsd pwell psd
+ paint nsc pwell psc
+
+ paint pdc coreli pdc
+ paint ndc coreli ndc
+ paint pc coreli pc
+ paint nsc coreli pc
+ paint psc coreli pc
+ paint viali coreli viali
+
+ paint coreli pdc pdc
+ paint coreli ndc ndc
+ paint coreli pc pc
+ paint coreli nsc nsc
+ paint coreli psc psc
+ paint coreli viali viali
+
+ paint m4 obsm4 m4
+ paint m5 obsm5 m5
+end
+
+#-----------------------------------------------------
+# Electrical connectivity
+#-----------------------------------------------------
+
+connect
+ *nwell,*nsd,*mvnsd,dnwell *nwell,*nsd,*mvnsd,dnwell
+ pwell,*psd,*mvpsd pwell,*psd,*mvpsd
+ *li,coreli *li,coreli
+ *m1 *m1
+ *m2 *m2
+ *m3 *m3
+ *m4 *m4
+ *m5 *m5
+ *mimcap *mimcap
+ *mimcap2 *mimcap2
+ allnactivenonfet allnactivenonfet
+ allpactivenonfet allpactivenonfet
+ *poly,xpc,allfets *poly,xpc,allfets
+end
+
+#-----------------------------------------------------
+# CIF/GDS output layer definitions
+#-----------------------------------------------------
+# NOTE: All values in this section MUST be multiples of 25
+# or else magic will scale below the allowed layout grid size
+
+cifoutput
+
+#----------------------------------------------------------------
+style gdsii
+# NOTE: This section is used for actual GDS output
+#----------------------------------------------------------------
+ scalefactor 10 nanometers
+ options calma-permissive-labels
+ gridlimit 5
+
+#----------------------------------------------------------------
+# Create a temp layer from the cell bounding box for use in
+# generating ID layers. Note that "boundary", unlike "bbox",
+# requires the FIXED_BBOX property (abutment box) in the cell.
+#----------------------------------------------------------------
+ templayer CELLBOUND
+ boundary
+
+#----------------------------------------------------------------
+# BOUND
+#----------------------------------------------------------------
+ layer BOUND CELLBOUND
+ calma 235 4
+
+# Create a boundary outside of an abutment box, so that layers
+# can be made to stretch to the abutment box edges. First strink
+# so that any box that would be so small as to interact with
+# itself will be removed.
+
+ templayer CELLRING CELLBOUND
+ shrink 345
+ grow 545
+ and-not CELLBOUND
+
+#----------------------------------------------------------------
+# DNWELL
+#----------------------------------------------------------------
+
+ layer DNWELL dnwell
+ calma 64 18
+
+ layer PWRES rpw
+ and dnwell
+ calma 64 13
+
+#----------------------------------------------------------------
+# NWELL
+#----------------------------------------------------------------
+
+ layer NWELL allnwell
+ bloat-all rpw dnwell
+ and-not rpw,pwell
+ calma 64 20
+
+ layer WELLTXT
+ labels allnwell noport
+ calma 64 16
+
+ layer WELLPIN
+ labels allnwell port
+ calma 64 5
+
+#----------------------------------------------------------------
+# SUB (text/port only)
+#----------------------------------------------------------------
+
+ layer SUBTXT
+ labels pwell noport
+ calma 122 16
+
+ layer SUBPIN
+ labels pwell port
+ calma 64 59
+
+#----------------------------------------------------------------
+# DIFF
+#----------------------------------------------------------------
+
+ layer DIFF allnactivenontap,allpactivenontap,allactiveres
+ labels allnactivenontap,allpactivenontap
+ calma 65 20
+
+#----------------------------------------------------------------
+# TAP
+#----------------------------------------------------------------
+
+ layer TAP allnactivetap,allpactivetap
+ labels allnactivetap,allpactivetap
+ calma 65 44
+
+#----------------------------------------------------------------
+# PPLUS, NPLUS (PSDM, NSDM)
+#----------------------------------------------------------------
+
+ templayer basePPLUS pdiffres,mvpdiffres
+ grow 15
+ or xhrpoly,uhrpoly,xpc
+ grow 110
+ bloat-or allpactivetap * 125 allnactivenontap 0
+ bloat-or allpactivenontap * 125 allnactivetap 0
+ bridge 380 380
+
+ templayer extendPPLUS basePPLUS,CELLRING
+ grow 185
+ shrink 185
+ and-not CELLRING
+
+ layer PPLUS basePPLUS,extendPPLUS
+ close 265000
+ calma 94 20
+
+ templayer baseNPLUS ndiffres,mvndiffres
+ grow 125
+ bloat-or allnactivetap * 125 allpactivenontap 0
+ bloat-or allnactivenontap * 125 allpactivetap 0
+ bridge 380 380
+
+ templayer extendNPLUS baseNPLUS,CELLRING
+ grow 185
+ shrink 185
+ and-not CELLRING
+
+ layer NPLUS baseNPLUS,extendNPLUS
+ close 265000
+ calma 93 44
+
+#----------------------------------------------------------------
+# LVTN
+#----------------------------------------------------------------
+
+ layer LVTN pfetlvt,nfetlvt,mvvar,mvnnfet,nsonos,*pdiodelvt,*ndiodelvt,*nndiode
+ grow 180
+ bridge 380 380
+ grow 185
+ shrink 185
+ close 265000
+ calma 125 44
+
+#----------------------------------------------------------------
+# HVTP
+#----------------------------------------------------------------
+
+ layer HVTP pfethvt,varhvt,*pdiodehvt
+ grow 180
+ bridge 380 380
+ grow 185
+ shrink 185
+ close 265000
+ calma 78 44
+
+#----------------------------------------------------------------
+# SONOS
+#----------------------------------------------------------------
+
+ layer SONOS nsonos
+ grow 100
+ grow-min 410
+ bridge 500 410
+ grow 250
+ shrink 250
+ calma 80 20
+
+#----------------------------------------------------------------
+# SONOS requires COREID around area (areaid.ce). Also, the
+# coreli layer indicates a cell needing COREID.
+#----------------------------------------------------------------
+
+ layer COREID
+ bloat-all nsonos,coreli CELLBOUND
+ calma 81 2
+
+#----------------------------------------------------------------
+# STDCELL applies to all cells containing scnfet or scpfet.
+#----------------------------------------------------------------
+
+ layer STDCELL scnfet
+ bloat-all scpfet,scnfet CELLBOUND
+ calma 81 4
+
+#----------------------------------------------------------------
+# RPM
+#----------------------------------------------------------------
+
+ layer RPM
+ bloat-all xhrpoly xpc
+ grow 200
+ grow-min 1270
+ grow 420
+ shrink 420
+ calma 86 20
+
+#----------------------------------------------------------------
+# URPM (2kOhms/sq. poly implant)
+#----------------------------------------------------------------
+
+ layer URPM
+ bloat-all uhrpoly xpc
+ grow 200
+ grow-min 1270
+ grow 420
+ shrink 420
+ calma 79 20
+
+#----------------------------------------------------------------
+# LDNTM (Tip implant for SONOS FETs)
+#----------------------------------------------------------------
+
+ layer LDNTM
+ bloat-all nsonos *ndiff
+ grow 185
+ grow 345
+ shrink 345
+ calma 11 44
+
+#----------------------------------------------------------------
+# HVNTM (Tip implant for MV ndiff devices)
+#----------------------------------------------------------------
+
+ templayer hvntm_block *mvpsd
+ grow 185
+
+ layer HVNTM
+ bloat-all mvnfet,mvnnfet,*mvndiode,mvrdn,*nndiode *mvndiff
+ bloat-all mvvaractor *mvnsd
+ and-not hvntm_block
+ grow 185
+ grow 345
+ shrink 345
+ calma 125 20
+
+#----------------------------------------------------------------
+# POLY
+#----------------------------------------------------------------
+
+ layer POLY allpoly
+ calma 66 20
+
+ layer POLYTXT
+ labels allpoly noport
+ calma 66 16
+
+ layer POLYPIN
+ labels allpoly port
+ calma 66 5
+
+#----------------------------------------------------------------
+# THKOX (HVI) (includes rules NWELL 8-11 and DIFFTAP 14-26)
+#----------------------------------------------------------------
+
+ templayer baseTHKOX *mvpsd
+ grow-min 470
+ or alldiffmv,mvvar
+ grow 185
+ bloat-all alldiffmv nwell
+ grow-min 600
+ bridge 700 600
+
+ templayer extendTHKOX baseTHKOX,CELLRING
+ grow 345
+ shrink 345
+ and-not CELLRING
+
+ layer THKOX baseTHKOX,extendTHKOX
+ calma 75 20
+
+#----------------------------------------------------------------
+# CONT (LICON)
+#----------------------------------------------------------------
+
+ layer CONT allcont
+ squares-grid 0 170 170
+ calma 66 44
+
+ # Contact for pres is different than other LICON contacts
+ # See rules LICON 1b, 1c (width/length) and 2b (spacing)
+ templayer xpc_horiz xpc
+ shrink 1007
+ grow 1007
+
+ layer CONT xpc
+ and-not xpc_horiz
+ # Force long edge vertical for contacts narrower than 2um
+ # Minimum space is 350 but 520 satisfies no. of contacts rule
+ slots 80 190 520 80 2000 350
+ calma 66 44
+
+ layer CONT xpc
+ and xpc_horiz
+ # Force long edge vertical for contacts wider than 2um
+ # Minimum space is 350 but 520 satisfies no. of contacts rule
+ slots 80 2000 350 80 190 520
+ calma 66 44
+
+#----------------------------------------------------------------
+# NPC (Nitride poly cut)
+# surrounds CONT (LICON) on poly only (i.e., pc)
+#----------------------------------------------------------------
+
+ layer NPC pc
+ squares-grid 0 170 170
+ grow 100
+ bridge 270 270
+ grow 130
+ shrink 130
+ calma 95 20
+
+ # NPC is also generated on xhrpoly and uhrpoly resistors
+
+ layer NPC xpc,xhrpoly,uhrpoly
+ # xpc surrounds precision_resistor by 0.095um
+ grow 95
+ grow 130
+ shrink 130
+ calma 95 20
+
+#----------------------------------------------------------------
+# Device markers
+#----------------------------------------------------------------
+
+ layer DIFFRES rdn,mvrdn,rdp,mvrdp
+ calma 65 13
+
+ layer POLYRES mrp1
+ calma 66 13
+
+ # POLYSHORT is a poly layer resistor like rli, rm1, etc., for metal layers
+ layer POLYSHORT rmp
+ calma 66 15
+
+ # POLYRES extends to edge of contact cut
+ layer POLYRES xhrpoly,uhrpoly
+ grow 60
+ and xpc
+ or xhrpoly,uhrpoly
+ calma 66 13
+
+ layer DIODE *pdi,*ndi,*nndi,*mvpdi,*mvndi,*pdilvt,*pdihvt,*ndilvt
+ # To be done: Expand to include anode, cathode, and guard ring
+ calma 81 23
+
+#----------------------------------------------------------------
+# LI
+#----------------------------------------------------------------
+ layer LI allli
+ calma 67 20
+
+ layer LITXT
+ labels *locali,coreli noport
+ calma 67 16
+
+ layer LIPIN
+ labels *locali,coreli port
+ calma 67 5
+
+ layer LIRES rli
+ labels rli
+ calma 67 13
+
+#----------------------------------------------------------------
+# MCON
+#----------------------------------------------------------------
+ layer MCON lic
+ squares-grid 0 170 190
+ calma 67 44
+
+#----------------------------------------------------------------
+# MET1
+#----------------------------------------------------------------
+ layer MET1 allm1
+ calma 68 20
+
+ layer MET1TXT
+ labels allm1 noport
+ calma 68 16
+
+ layer MET1PIN
+ labels allm1 port
+ calma 68 5
+
+ layer MET1RES rm1
+ labels rm1
+ calma 68 13
+
+#----------------------------------------------------------------
+# VIA1
+#----------------------------------------------------------------
+ layer VIA1 via1
+ squares-grid 55 150 170
+ calma 68 44
+
+#----------------------------------------------------------------
+# MET2
+#----------------------------------------------------------------
+ layer MET2 allm2
+ calma 69 20
+
+ layer MET2TXT
+ labels allm2 noport
+ calma 69 16
+
+ layer MET2PIN
+ labels allm2 port
+ calma 69 5
+
+ layer MET2RES rm2
+ labels rm2
+ calma 69 13
+
+#----------------------------------------------------------------
+# VIA2
+#----------------------------------------------------------------
+ layer VIA2 via2
+ squares-grid 40 200 200
+ calma 69 44
+
+#----------------------------------------------------------------
+# MET3
+#----------------------------------------------------------------
+ layer MET3 allm3
+ calma 70 20
+
+ layer MET3TXT
+ labels allm3 noport
+ calma 70 16
+
+ layer MET3PIN
+ labels allm3 port
+ calma 70 5
+
+ layer MET3RES rm3
+ labels rm3
+ calma 70 13
+
+#----------------------------------------------------------------
+# VIA3
+#----------------------------------------------------------------
+ layer VIA3 via3
+ or mimcc
+ squares-grid 60 200 200
+ calma 70 44
+
+#----------------------------------------------------------------
+# MET4
+#----------------------------------------------------------------
+ layer MET4 allm4
+ calma 71 20
+
+ layer MET4TXT
+ labels allm4 noport
+ calma 71 16
+
+ layer MET4PIN
+ labels allm4 port
+ calma 71 5
+
+ layer MET4RES rm4
+ labels rm4
+ calma 71 13
+
+#----------------------------------------------------------------
+# VIA4
+#----------------------------------------------------------------
+ layer VIA4 via4
+ or mim2cc
+ squares-grid 190 800 800
+ calma 71 44
+
+#----------------------------------------------------------------
+# MET5
+#----------------------------------------------------------------
+ layer MET5 allm5
+ calma 72 20
+
+ layer MET5TXT
+ labels allm5 noport
+ calma 72 16
+
+ layer MET5PIN
+ labels allm5 port
+ calma 72 5
+
+ layer MET5RES rm5
+ labels rm5
+ calma 72 13
+
+
+
+#----------------------------------------------------------------
+# GLASS
+#----------------------------------------------------------------
+ layer GLASS glass
+ calma 76 20
+
+#----------------------------------------------------------------
+# CAPM
+#----------------------------------------------------------------
+ layer CAPM *mimcap
+ labels mimcap
+ calma 89 44
+
+ layer CAPM2 *mimcap2
+ labels mimcap2
+ calma 97 44
+
+#----------------------------------------------------------------
+# Chip top level marker for DRC latchup rules to check 15um
+# distance to taps (otherwise 6um is used)
+#----------------------------------------------------------------
+
+ layer LOWTAPDENSITY
+ bbox top
+ # Clear 200um for pads + 50um for required high tap density
+ # in critical area.
+ shrink 250000
+ calma 81 14
+
+#----------------------------------------------------------------
+# FILLBLOCK
+#----------------------------------------------------------------
+ layer FILLOBSM1 fillblock
+ calma 62 24
+
+ layer FILLOBSM2 fillblock
+ calma 105 52
+
+ layer FILLOBSM3 fillblock
+ calma 107 24
+
+ layer FILLOBSM4 fillblock
+ calma 112 4
+
+ render DNWELL cwell -0.1 0.1
+ render NWELL nwell 0.0 0.2062
+ render DIFF ndiffusion 0.2062 0.12
+ render TAP pdiffusion 0.2062 0.12
+ render POLY polysilicon 0.3262 0.18
+ render CONT via 0.5062 0.43
+ render LI metal1 0.9361 0.10
+ render MCON via 1.0361 0.34
+ render MET1 metal2 1.3761 0.36
+ render VIA1 via 1.7361 0.27
+ render MET2 metal3 2.0061 0.36
+ render VIA2 via 2.3661 0.42
+ render MET3 metal4 2.7861 0.845
+ render VIA3 via 3.6311 0.39
+ render MET4 metal5 4.0211 0.845
+ render VIA4 via 4.8661 0.505
+ render MET5 metal6 5.3711 1.26
+ render CAPM metal8 2.4661 0.2
+ render CAPM2 metal9 3.7311 0.2
+
+#----------------------------------------------------------------
+style drc
+#----------------------------------------------------------------
+# NOTE: This style is used for DRC only, not for GDS output
+#----------------------------------------------------------------
+ scalefactor 10 nanometers
+ options calma-permissive-labels
+
+ # Ensure nwell overlaps dnwell at least 0.4um outside and 1.03um inside
+ templayer dnwell_shrink dnwell
+ shrink 1030
+
+ templayer nwell_missing dnwell
+ grow 400
+ and-not dnwell_shrink
+ and-not nwell
+
+ # SONOS nFET devices must be in deep nwell
+ templayer dnwell_missing nsonos
+ and-not dnwell
+
+ # Define MiM cap bottom plate for spacing rule
+ templayer mim_bottom
+ bloat-all *mimcap *metal3
+
+ # Define MiM2 cap bottom plate for spacing rule
+ templayer mim2_bottom
+ bloat-all *mimcap2 *metal4
+
+ # Note that metal fill is performed by the foundry and so is not
+ # an option for a cifoutput style.
+
+ # Check latchup rule (15um minimum from tap LICON center to any
+ # non-tap diffusion. Note that to count as a tap, the diffusion
+ # must be contacted to LI
+
+ templayer ptap_reach psc,mvpsc
+ and-not dnwell
+ # grow total is 15um. grow in 0.84um increments to ensure that
+ # no nwell ring is crossed
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 840
+ and-not nwell,dnwell
+ grow 635
+ and-not nwell,dnwell
+
+ templayer ptap_missing *ndiff,*mvndiff
+ and-not dnwell
+ and-not ptap_reach
+
+ templayer ntap_reach nsc,mvnsc
+ # grow total is 15um. grow in 1.27um increments to ensure that
+ # no nwell ring is crossed. There is no difference between
+ # ntaps in and out of deep nwell.
+ grow 1270
+ and nwell
+ grow 1270
+ and nwell
+ grow 1270
+ and nwell
+ grow 1270
+ and nwell
+ grow 1270
+ and nwell
+ grow 1270
+ and nwell
+ grow 1270
+ and nwell
+ grow 1270
+ and nwell
+ grow 1270
+ and nwell
+ grow 1270
+ and nwell
+ grow 1270
+ and nwell
+ grow 945
+ and nwell
+
+ templayer ntap_missing *pdiff,*mvpdiff
+ and-not dnwell
+ and-not ntap_reach
+
+ templayer dptap_reach psc,mvpsc
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 840
+ and-not nwell
+ and dnwell
+ grow 635
+ and-not nwell
+ and dnwell
+
+ templayer dptap_missing *ndiff,*mvndiff
+ and dnwell
+ and-not dptap_reach
+
+ templayer m1_small_hole *m1
+ close 140000
+
+ templayer m1_hole_empty m1_small_hole
+ and-not *m1
+
+ templayer m2_small_hole *m2
+ close 140000
+
+ templayer m2_hole_empty m2_small_hole
+ and-not *m2
+
+
+end
+
+#-----------------------------------------------------------------------
+cifinput
+#-----------------------------------------------------------------------
+# NOTE: All values in this section MUST be multiples of 25
+# or else magic will scale below the allowed layout grid size
+#-----------------------------------------------------------------------
+
+style vendorimport
+ scalefactor 10 nanometers
+ gridlimit 5
+
+ options ignore-unknown-layer-labels no-reconnect-labels
+
+ ignore NPC
+ ignore SEALID
+ ignore NPNID
+ ignore PNPID
+ ignore CAPID
+ ignore LDNTM
+ ignore HVNTM
+ ignore POLYMOD
+ ignore LOWTAPDENSITY
+
+ layer nwell NWELL,WELLTXT,WELLPIN
+ labels NWELL
+ labels WELLTXT text
+ labels WELLPIN port
+
+ layer pwell SUBTXT,SUBPIN
+ labels SUBTXT text
+ labels SUBPIN port
+
+ layer dnwell DNWELL
+ labels DNWELL
+
+ layer rpw PWRES
+ and DNWELL
+ labels PWRES
+
+ templayer ndiffarea DIFF,DIFFTXT,DIFFPIN
+ and-not POLY
+ and-not NWELL
+ and-not PPLUS
+ and-not DIODE
+ and-not DIFFRES
+ and-not THKOX
+ and NPLUS
+ copyup ndifcheck
+ labels DIFF
+ labels DIFFTXT text
+ labels DIFFPIN port
+ labels TAPPIN port
+
+ layer ndiff ndiffarea
+
+ # Copy ndiff areas up for contact checks
+ templayer xndifcheck ndifcheck
+ copyup ndifcheck
+
+ templayer mvndiffarea DIFF,DIFFTXT,DIFFPIN
+ and-not POLY
+ and-not NWELL
+ and-not PPLUS
+ and-not DIODE
+ and-not DIFFRES
+ and THKOX
+ and NPLUS
+ copyup ndifcheck
+ labels DIFF
+ labels DIFFTXT text
+ labels DIFFPIN port
+
+ layer mvndiff mvndiffarea
+
+ # Copy ndiff areas up for contact checks
+ templayer mvxndifcheck mvndifcheck
+ copyup mvndifcheck
+
+ layer ndiode DIFF
+ and NPLUS
+ and DIODE
+ and-not NWELL
+ and-not POLY
+ and-not PPLUS
+ and-not THKOX
+ and-not LVTN
+ labels DIFF
+
+ layer ndiodelvt DIFF
+ and NPLUS
+ and DIODE
+ and-not NWELL
+ and-not POLY
+ and-not PPLUS
+ and-not THKOX
+ and LVTN
+ labels DIFF
+
+ templayer ndiodearea DIODE
+ and NPLUS
+ and-not THKOX
+ and-not NWELL
+ copyup DIODE,NPLUS
+
+ layer ndiffres DIFFRES
+ and NPLUS
+ and-not THKOX
+ labels DIFF
+
+ templayer pdiffarea DIFF,DIFFTXT,DIFFPIN
+ and-not POLY
+ and NWELL
+ and-not NPLUS
+ and-not DIODE
+ and-not THKOX
+ and PPLUS
+ copyup pdifcheck
+ labels DIFF
+ labels DIFFTXT text
+ labels DIFFPIN port
+
+ layer pdiff pdiffarea
+
+ layer mvndiode DIFF
+ and NPLUS
+ and DIODE
+ and THKOX
+ and-not POLY
+ and-not PPLUS
+ and-not LVTN
+ labels DIFF
+
+ layer nndiode DIFF
+ and NPLUS
+ and DIODE
+ and THKOX
+ and-not POLY
+ and-not PPLUS
+ and LVTN
+ labels DIFF
+
+ templayer mvndiodearea DIODE
+ and NPLUS
+ and THKOX
+ and-not NWELL
+ copyup DIODE,NPLUS
+
+ layer mvndiffres DIFFRES
+ and NPLUS
+ and THKOX
+ labels DIFF
+
+ templayer mvpdiffarea DIFF,DIFFTXT,DIFFPIN
+ and-not POLY
+ and NWELL
+ and-not NPLUS
+ and THKOX
+ and-not DIODE
+ and-not DIFFRES
+ and PPLUS
+ copyup mvpdifcheck
+ labels DIFF
+ labels DIFFTXT text
+ labels DIFFPIN port
+
+ layer mvpdiff mvpdiffarea
+
+ # Copy pdiff areas up for contact checks
+ templayer xpdifcheck pdifcheck
+ copyup pdifcheck
+
+ layer pdiode DIFF
+ and PPLUS
+ and-not POLY
+ and-not NPLUS
+ and-not THKOX
+ and-not LVTN
+ and-not HVTP
+ and DIODE
+ labels DIFF
+
+ layer pdiodelvt DIFF
+ and PPLUS
+ and-not POLY
+ and-not NPLUS
+ and-not THKOX
+ and LVTN
+ and-not HVTP
+ and DIODE
+ labels DIFF
+
+ layer pdiodehvt DIFF
+ and PPLUS
+ and-not POLY
+ and-not NPLUS
+ and-not THKOX
+ and-not LVTN
+ and HVTP
+ and DIODE
+ labels DIFF
+
+ templayer pdiodearea DIODE
+ and PPLUS
+ and-not THKOX
+ copyup DIODE,PPLUS
+
+ # Define pfet areas as known pdiff, regardless of the presence of a well.
+
+ templayer pfetarea DIFF
+ and-not NPLUS
+ and-not THKOX
+ and POLY
+
+ layer pfet pfetarea
+ and-not LVTN
+ and-not HVTP
+ and-not STDCELL
+ labels DIFF
+
+ layer scpfet pfetarea
+ and-not LVTN
+ and-not HVTP
+ and STDCELL
+ labels DIFF
+
+ layer pfetlvt pfetarea
+ and LVTN
+ labels DIFF
+
+ layer pfethvt pfetarea
+ and HVTP
+ labels DIFF
+
+ # Always force nwell under pfet (nwell encloses pdiff by 0.18)
+ layer nwell pfetarea
+ grow 180
+
+ # Copy mvpdiff areas up for contact checks
+ templayer mvxpdifcheck mvpdifcheck
+ copyup mvpdifcheck
+
+ layer mvpdiode DIFF
+ and PPLUS
+ and-not POLY
+ and-not NPLUS
+ and THKOX
+ and DIODE
+ labels DIFF
+
+ templayer mvpdiodearea DIODE
+ and PPLUS
+ and THKOX
+ copyup DIODE,PPLUS
+
+ # Define pfet areas as known pdiff,
+ # regardless of the presence of a
+ # well.
+
+ templayer mvpfetarea DIFF
+ and-not NPLUS
+ and THKOX
+ and POLY
+
+ layer mvpfet mvpfetarea
+ labels DIFF
+
+ layer pdiff DIFF,DIFFTXT,DIFFPIN
+ and-not NPLUS
+ and-not POLY
+ and-not THKOX
+ and-not DIODE
+ and-not DIFFRES
+ labels DIFF
+ labels DIFFTXT text
+ labels DIFFPIN port
+
+ layer pdiffres DIFFRES
+ and PPLUS
+ and NWELL
+ and-not THKOX
+ labels DIFF
+
+ layer nfet DIFF
+ and POLY
+ and-not PPLUS
+ and NPLUS
+ and-not THKOX
+ and-not LVTN
+ and-not SONOS
+ and-not STDCELL
+ labels DIFF
+
+ layer scnfet DIFF
+ and POLY
+ and-not PPLUS
+ and NPLUS
+ and-not THKOX
+ and-not LVTN
+ and-not SONOS
+ and STDCELL
+ labels DIFF
+
+ layer nfetlvt DIFF
+ and POLY
+ and-not PPLUS
+ and NPLUS
+ and-not THKOX
+ and LVTN
+ and-not SONOS
+ labels DIFF
+
+ layer nsonos DIFF
+ and POLY
+ and-not PPLUS
+ and NPLUS
+ and-not THKOX
+ and LVTN
+ and SONOS
+ labels DIFF
+
+ templayer nsdarea DIFF
+ and NPLUS
+ and NWELL
+ and-not POLY
+ and-not PPLUS
+ and-not THKOX
+ copyup nsubcheck
+
+ layer nsd nsdarea
+ labels DIFF
+
+ layer nsd TAP,TAPPIN
+ and NPLUS
+ labels TAP
+ labels TAPPIN port
+
+ templayer nsdexpand nsdarea
+ grow 500
+
+ # Copy nsub areas up for contact checks
+ templayer xnsubcheck nsubcheck
+ copyup nsubcheck
+
+ templayer psdarea DIFF
+ and PPLUS
+ and-not NWELL
+ and-not POLY
+ and-not NPLUS
+ and-not THKOX
+ and-not pfetexpand
+ copyup psubcheck
+
+ layer psd psdarea
+ labels DIFF
+
+ layer psd TAP,TAPPIN
+ and PPLUS
+ and-not THKOX
+ labels TAP
+ labels TAPPIN port
+
+ templayer psdexpand psdarea
+ grow 500
+
+ layer mvpdiff DIFF,DIFFTXT,DIFFPIN
+ and-not NPLUS
+ and-not POLY
+ and THKOX
+ and mvpfetexpand
+ labels DIFF
+ labels DIFFTXT text
+ labels DIFFPIN port
+
+ layer mvpdiffres DIFFRES
+ and PPLUS
+ and NWELL
+ and THKOX
+ and-not mvrdpioedge
+ labels DIFF
+
+ layer mvnfet DIFF
+ and POLY
+ and-not PPLUS
+ and NPLUS
+ and-not LVTN
+ and THKOX
+ labels DIFF
+
+ layer mvnnfet DIFF
+ and POLY
+ and-not PPLUS
+ and NPLUS
+ and LVTN
+ and THKOX
+ labels DIFF
+
+ templayer mvnsdarea DIFF
+ and NPLUS
+ and NWELL
+ and-not POLY
+ and-not PPLUS
+ and THKOX
+ copyup mvnsubcheck
+
+ layer mvnsd mvnsdarea
+ labels DIFF
+
+ layer mvnsd TAP,TAPPIN
+ and NPLUS
+ and THKOX
+ labels TAP
+ labels TAPPIN port
+
+ templayer mvnsdexpand mvnsdarea
+ grow 500
+
+ # Copy nsub areas up for contact checks
+ templayer mvxnsubcheck mvnsubcheck
+ copyup mvnsubcheck
+
+ templayer mvpsdarea DIFF
+ and PPLUS
+ and-not NWELL
+ and-not POLY
+ and-not NPLUS
+ and THKOX
+ and-not mvpfetexpand
+ copyup mvpsubcheck
+
+ layer mvpsd mvpsdarea
+ labels DIFF
+
+ layer mvpsd TAP,TAPPIN
+ and PPLUS
+ and THKOX
+ labels TAP
+ labels TAPPIN port
+
+ templayer mvpsdexpand mvpsdarea
+ grow 500
+
+ # Copy psub areas up for contact checks
+ templayer xpsubcheck psubcheck
+ copyup psubcheck
+
+ templayer mvxpsubcheck mvpsubcheck
+ copyup mvpsubcheck
+
+ layer psd DIFF
+ and-not PPLUS
+ and-not NPLUS
+ and-not POLY
+ and-not THKOX
+ and-not pfetexpand
+ and psdexpand
+
+ layer nsd DIFF
+ and-not PPLUS
+ and-not NPLUS
+ and-not POLY
+ and-not THKOX
+ and nsdexpand
+
+ layer mvpsd DIFF
+ and-not PPLUS
+ and-not NPLUS
+ and-not POLY
+ and THKOX
+ and-not mvpfetexpand
+ and mvpsdexpand
+
+ layer mvnsd DIFF
+ and-not PPLUS
+ and-not NPLUS
+ and-not POLY
+ and THKOX
+ and mvnsdexpand
+
+ templayer hresarea POLY
+ and RPM
+ grow 3000
+
+ templayer uresarea POLY
+ and URPM
+ grow 3000
+
+ templayer diffresarea DIFFRES
+ and-not THKOX
+ grow 3000
+
+ templayer mvdiffresarea DIFFRES
+ and THKOX
+ grow 3000
+
+ templayer resarea diffresarea,mvdiffresarea,hresarea,uresarea
+
+ layer pfet POLY
+ and DIFF
+ and diffresarea
+ and-not NPLUS
+ and-not STDCELL
+
+ layer scpfet POLY
+ and DIFF
+ and diffresarea
+ and-not NPLUS
+ and STDCELL
+
+ templayer xpolyterm RPM,URPM
+ and POLY
+ and-not POLYRES
+ # add back the 0.06um contact surround in the direction of the resistor
+ grow 60
+ and POLY
+
+ layer xpc xpolyterm
+
+ templayer polyarea POLY
+ and-not POLYRES
+ and-not POLYSHORT
+ and-not DIFF
+ and-not RPM
+ and-not URPM
+ copyup polycheck
+
+ layer poly polyarea,POLYTXT,POLYPIN
+ labels POLY
+ labels POLYTXT text
+ labels POLYPIN port
+
+ # Copy (non-resistor) poly areas up for contact checks
+ templayer xpolycheck polycheck
+ copyup polycheck
+
+ layer mrp1 POLY
+ and POLYRES
+ and-not RPM
+ and-not URPM
+ labels POLY
+
+ layer rmp POLY
+ and POLYSHORT
+ labels POLY
+
+ layer xhrpoly POLY
+ and POLYRES
+ and RPM
+ and-not URPM
+ and PPLUS
+ and NPC
+ and-not xpolyterm
+ labels POLY
+
+ layer uhrpoly POLY
+ and POLYRES
+ and URPM
+ and-not RPM
+ and NPC
+ and-not xpolyterm
+ labels POLY
+
+ templayer ndcbase CONT
+ and DIFF
+ and NPLUS
+ and-not NWELL
+ and LI
+ and-not THKOX
+
+ layer ndc ndcbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or ndcbase
+ labels CONT
+
+ templayer nscbase CONT
+ and DIFF,TAP
+ and NPLUS
+ and NWELL
+ and LI
+ and-not THKOX
+
+ layer nsc nscbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or nscbase
+ labels CONT
+
+ templayer pdcbase CONT
+ and DIFF
+ and PPLUS
+ and NWELL
+ and LI
+ and-not THKOX
+
+ layer pdc pdcbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or pdcbase
+ labels CONT
+
+ templayer pdcnowell CONT
+ and DIFF
+ and PPLUS
+ and pfetexpand
+ and LI
+ and-not THKOX
+
+ layer pdc pdcnowell
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or pdcnowell
+ labels CONT
+
+ templayer pscbase CONT
+ and DIFF,TAP
+ and PPLUS
+ and-not NWELL
+ and-not pfetexpand
+ and LI
+ and-not THKOX
+
+ layer psc pscbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or pscbase
+ labels CONT
+
+ templayer pcbase CONT
+ and POLY
+ and-not DIFF
+ and-not RPM,URPM
+ and LI
+
+ layer pc pcbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or pcbase
+ labels CONT
+
+ templayer ndicbase CONT
+ and DIFF
+ and NPLUS
+ and DIODE
+ and-not POLY
+ and-not PPLUS
+ and-not THKOX
+ and-not LVTN
+
+ layer ndic ndicbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or ndicbase
+ labels CONT
+
+ templayer ndilvtcbase CONT
+ and DIFF
+ and NPLUS
+ and DIODE
+ and-not POLY
+ and-not PPLUS
+ and-not THKOX
+ and LVTN
+
+ layer ndilvtc ndilvtcbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or ndilvtcbase
+ labels CONT
+
+ templayer pdicbase CONT
+ and DIFF
+ and PPLUS
+ and DIODE
+ and-not POLY
+ and-not NPLUS
+ and-not THKOX
+ and-not LVTN
+ and-not HVTP
+
+ layer pdic pdicbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or pdicbase
+ labels CONT
+
+ templayer pdilvtcbase CONT
+ and DIFF
+ and PPLUS
+ and DIODE
+ and-not POLY
+ and-not NPLUS
+ and-not THKOX
+ and LVTN
+ and-not HVTP
+
+ layer pdilvtc pdilvtcbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or pdilvtcbase
+ labels CONT
+
+ templayer pdihvtcbase CONT
+ and DIFF
+ and PPLUS
+ and DIODE
+ and-not POLY
+ and-not NPLUS
+ and-not THKOX
+ and-not LVTN
+ and HVTP
+
+ layer pdihvtc pdihvtcbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or pdihvtcbase
+ labels CONT
+
+ templayer mvndcbase CONT
+ and DIFF
+ and NPLUS
+ and-not NWELL
+ and LI
+ and THKOX
+
+ layer mvndc mvndcbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvndcbase
+ labels CONT
+
+ templayer mvnscbase CONT
+ and DIFF,TAP
+ and NPLUS
+ and NWELL
+ and LI
+ and THKOX
+
+ layer mvnsc mvnscbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvnscbase
+ labels CONT
+
+ templayer mvpdcbase CONT
+ and DIFF
+ and PPLUS
+ and NWELL
+ and LI
+ and THKOX
+
+ layer mvpdc mvpdcbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvpdcbase
+ labels CONT
+
+ templayer mvpdcnowell CONT
+ and DIFF
+ and PPLUS
+ and mvpfetexpand
+ and MET1
+ and THKOX
+
+ layer mvpdc mvpdcnowell
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvpdcnowell
+ labels CONT
+
+ templayer mvpscbase CONT
+ and DIFF,TAP
+ and PPLUS
+ and-not NWELL
+ and-not mvpfetexpand
+ and LI
+ and THKOX
+
+ layer mvpsc mvpscbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvpscbase
+ labels CONT
+
+ templayer mvndicbase CONT
+ and DIFF
+ and NPLUS
+ and DIODE
+ and-not POLY
+ and-not PPLUS
+ and-not LVTN
+ and THKOX
+
+ layer mvndic mvndicbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvndicbase
+ labels CONT
+
+ templayer nndicbase CONT
+ and DIFF
+ and NPLUS
+ and DIODE
+ and-not POLY
+ and-not PPLUS
+ and LVTN
+ and THKOX
+
+ layer nndic nndicbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or nndicbase
+ labels CONT
+
+ templayer mvpdicbase CONT
+ and DIFF
+ and PPLUS
+ and DIODE
+ and-not POLY
+ and-not NPLUS
+ and THKOX
+
+ layer mvpdic mvpdicbase
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvpdicbase
+ labels CONT
+
+ layer locali LI,LITXT,LIPIN
+ and-not LIRES,LISHORT
+ and-not COREID
+ labels LI
+ labels LITXT text
+ labels LIPIN port
+
+ layer coreli LI,LITXT,LIPIN
+ and-not LIRES,LISHORT
+ and COREID
+ labels LI
+ labels LITXT text
+ labels LIPIN port
+
+ layer rli LI
+ and LIRES,LISHORT
+ labels LIRES,LISHORT
+
+ layer lic MCON
+ grow 95
+ shrink 95
+ shrink 85
+ grow 85
+ or MCON
+ labels MCON
+
+ layer m1 MET1,MET1TXT,MET1PIN
+ and-not MET1RES,MET1SHORT
+ labels MET1
+ labels MET1TXT text
+ labels MET1PIN port
+
+ layer rm1 MET1
+ and MET1RES,MET1SHORT
+ labels MET1RES,MET1SHORT
+
+ layer mimcap MET3
+ and CAPM
+ labels CAPM
+
+ layer mimcc VIA3
+ and CAPM
+ grow 60
+ grow 40
+ shrink 40
+ labels CAPM
+
+ layer mimcap2 MET4
+ and CAPM2
+ labels CAPM2
+
+ layer mim2cc VIA4
+ and CAPM2
+ grow 190
+ grow 210
+ shrink 210
+ labels CAPM2
+
+
+ templayer m2cbase VIA1
+ grow 55
+
+ layer m2c m2cbase
+ grow 30
+ shrink 30
+ shrink 130
+ grow 130
+ or m2cbase
+
+ layer m2 MET2,MET2TXT,MET2PIN
+ and-not MET2RES,MET2SHORT
+ labels MET2
+ labels MET2TXT text
+ labels MET2PIN port
+
+ layer rm2 MET2
+ and MET2RES,MET2SHORT
+ labels MET2RES,MET2SHORT
+
+ templayer m3cbase VIA2
+ grow 40
+
+ layer m3c m3cbase
+ grow 60
+ shrink 60
+ shrink 140
+ grow 140
+ or m3cbase
+
+ layer m3 MET3,MET3TXT,MET3PIN
+ and-not MET3RES,MET3SHORT
+ and-not CAPM
+ labels MET3
+ labels MET3TXT text
+ labels MET3PIN port
+
+ layer rm3 MET3
+ and MET3RES,MET3SHORT
+ labels MET3RES,MET3SHORT
+
+
+ templayer via3base VIA3
+ and-not CAPM
+ grow 60
+
+ layer via3 via3base
+ grow 40
+ shrink 40
+ shrink 160
+ grow 160
+ or via3base
+
+ layer m4 MET4,MET4TXT,MET4PIN
+ and-not MET4RES,MET4SHORT
+ and-not CAPM2
+ labels MET4
+ labels MET4TXT text
+ labels MET4PIN port
+
+ layer rm4 MET4
+ and MET4RES,MET4SHORT
+ labels MET4RES,MET4SHORT
+
+ layer m5 MET5,MET5TXT,MET5PIN
+ and-not MET5RES,MET5SHORT
+ labels MET5
+ labels MET5TXT text
+ labels MET5PIN port
+
+ layer rm5 MET5
+ and MET5RES,MET5SHORT
+ labels MET5RES,MET5SHORT
+
+ templayer via4base VIA4
+ and-not CAPM2
+ grow 190
+
+ layer via4 via4base
+ grow 210
+ shrink 210
+ shrink 590
+ grow 590
+ or via4base
+
+
+ # Find diffusion not covered in
+ # NPLUS or PPLUS and pull it into
+ # the next layer up
+
+ templayer gentrans DIFF
+ and-not PPLUS
+ and-not NPLUS
+ and POLY
+ copyup DIFF,POLY
+
+ templayer gendiff DIFF,TAP
+ and-not PPLUS
+ and-not NPLUS
+ and-not POLY
+ copyup DIFF
+
+ # Handle contacts found by copyup
+
+ templayer ndiccopy CONT
+ and LI
+ and DIODE
+ and NPLUS
+ and-not THKOX
+
+ layer ndic ndiccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or ndiccopy
+ labels CONT
+
+ templayer mvndiccopy CONT
+ and LI
+ and DIODE
+ and NPLUS
+ and THKOX
+
+ layer mvndic mvndiccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvndiccopy
+ labels CONT
+
+ templayer pdiccopy CONT
+ and LI
+ and DIODE
+ and PPLUS
+ and-not THKOX
+
+ layer pdic pdiccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or pdiccopy
+ labels CONT
+
+ templayer mvpdiccopy CONT
+ and LI
+ and DIODE
+ and PPLUS
+ and THKOX
+
+ layer mvpdic mvpdiccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvpdiccopy
+ labels CONT
+
+ templayer ndccopy CONT
+ and ndifcheck
+
+ layer ndc ndccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or ndccopy
+ labels CONT
+
+ templayer mvndccopy CONT
+ and mvndifcheck
+
+ layer mvndc mvndccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvndccopy
+ labels CONT
+
+ templayer pdccopy CONT
+ and pdifcheck
+
+ layer pdc pdccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or pdccopy
+ labels CONT
+
+ templayer mvpdccopy CONT
+ and mvpdifcheck
+
+ layer mvpdc mvpdccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvpdccopy
+ labels CONT
+
+ templayer pccopy CONT
+ and polycheck
+
+ layer pc pccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or pccopy
+ labels CONT
+
+ templayer nsccopy CONT
+ and nsubcheck
+
+ layer nsc nsccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or nsccopy
+ labels CONT
+
+ templayer mvnsccopy CONT
+ and mvnsubcheck
+
+ layer mvnsc mvnsccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvnsccopy
+ labels CONT
+
+ templayer psccopy CONT
+ and psubcheck
+
+ layer psc psccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or psccopy
+ labels CONT
+
+ templayer mvpsccopy CONT
+ and mvpsubcheck
+
+ layer mvpsc mvpsccopy
+ grow 85
+ shrink 85
+ shrink 85
+ grow 85
+ or mvpsccopy
+ labels CONT
+
+ # Find contacts not covered in
+ # metal and pull them into the
+ # next layer up
+
+ templayer gencont CONT
+ and LI
+ and-not DIFF,TAP
+ and-not POLY
+ and-not DIODE
+ and-not nsubcheck
+ and-not psubcheck
+ and-not mvnsubcheck
+ and-not mvpsubcheck
+ copyup CONT,LI
+
+ templayer barecont CONT
+ and-not LI
+ and-not nsubcheck
+ and-not psubcheck
+ and-not mvnsubcheck
+ and-not mvpsubcheck
+ copyup CONT
+
+ layer glass GLASS,PADTXT,PADPIN
+ labels GLASS
+ labels PADTXT text
+ labels PADPIN port
+
+ templayer boundary BOUND,STDCELL,PADCELL
+ boundary
+
+ layer comment LVSTEXT
+ labels LVSTEXT text
+
+ layer comment TTEXT
+ labels TTEXT text
+
+ layer fillblock FILLOBSM1,FILLOBSM2,FILLOBSM3,FILLOBSM4
+ labels FILLOBSM1,FILLOBSM2,FILLOBSM3,FILLOBSM4
+
+# MOS Varactor
+
+ layer var POLY
+ and DIFF
+ and NPLUS
+ and NWELL
+ and-not THKOX
+ and-not HVTP
+ grow 25
+ labels POLY
+
+ layer varhvt POLY
+ and DIFF
+ and NPLUS
+ and NWELL
+ and-not THKOX
+ and HVTP
+ grow 25
+ labels POLY
+
+ layer mvvar POLY
+ and DIFF
+ and NPLUS
+ and NWELL
+ and THKOX
+ grow 25
+ labels POLY
+
+ calma NWELL 64 20
+ calma DIFF 65 20
+ calma DNWELL 64 18
+ calma PWRES 64 13
+ calma TAP 65 44
+ # LVTN
+ calma LVTN 125 44
+ # HVTP
+ calma HVTP 78 44
+ # SONOS (TUNM)
+ calma SONOS 80 20
+ # NPLUS = NSDM
+ calma NPLUS 93 44
+ # PPLUS = PSDM
+ calma PPLUS 94 20
+ # HVI
+ calma THKOX 75 20
+ # NPC
+ calma NPC 95 20
+ # P+ POLY MASK
+ calma RPM 86 20
+ calma URPM 79 20
+ calma LDNTM 11 44
+ calma HVNTM 125 20
+ # Poly resistor ID mark
+ calma POLYRES 66 13
+ # Diffusion resistor ID mark
+ calma DIFFRES 65 13
+ calma POLY 66 20
+ calma POLYMOD 66 83
+ # Diode ID mark
+ calma DIODE 81 23
+ # Bipolar NPN mark
+ calma NPNID 82 20
+ # Bipolar PNP mark
+ calma PNPID 82 20
+ # Capacitor ID
+ calma CAPID 82 64
+ # Core area ID mark
+ calma COREID 81 2
+ # Standard cell ID mark
+ calma STDCELL 81 4
+ # Padframe cell ID mark
+ calma PADCELL 81 3
+ # Seal ring ID mark
+ calma SEALID 81 1
+ # Low tap density ID mark
+ calma LOWTAPDENSITY 81 14
+
+ # LICON
+ calma CONT 66 44
+ calma LI 67 20
+ calma MCON 67 44
+
+ calma MET1 68 20
+ calma VIA1 68 44
+ calma MET2 69 20
+ calma VIA2 69 44
+ calma MET3 70 20
+ calma VIA3 70 44
+ calma MET4 71 20
+ calma VIA4 71 44
+ calma MET5 72 20
+ calma GLASS 76 20
+
+ calma SUBPIN 64 59
+ calma PADPIN 76 5
+ calma DIFFPIN 65 6
+ calma TAPPIN 65 5
+ calma WELLPIN 64 5
+ calma LIPIN 67 5
+ calma POLYPIN 66 5
+ calma MET1PIN 68 5
+ calma MET2PIN 69 5
+ calma MET3PIN 70 5
+ calma MET4PIN 71 5
+ calma MET5PIN 72 5
+
+ calma LIRES 67 13
+ calma MET1RES 68 13
+ calma MET2RES 69 13
+ calma MET3RES 70 13
+ calma MET4RES 71 13
+ calma MET5RES 72 13
+
+ calma POLYSHORT 66 15
+ calma LISHORT 67 15
+ calma MET1SHORT 68 15
+ calma MET2SHORT 69 15
+ calma MET3SHORT 70 15
+ calma MET4SHORT 71 15
+ calma MET5SHORT 72 15
+
+ calma SUBTXT 122 16
+ calma PADTXT 76 16
+ calma DIFFTXT 65 16
+ calma POLYTXT 66 16
+ calma WELLTXT 64 16
+ calma LITXT 67 16
+ calma MET1TXT 68 16
+ calma MET2TXT 69 16
+ calma MET3TXT 70 16
+ calma MET4TXT 71 16
+ calma MET5TXT 72 16
+
+ calma BOUND 235 4
+
+ calma LVSTEXT 83 44
+
+ calma CAPM 89 44
+ calma CAPM2 97 44
+
+ calma FILLOBSM1 62 24
+ calma FILLOBSM2 105 52
+ calma FILLOBSM3 107 24
+ calma FILLOBSM4 112 4
+
+end
+
+#-----------------------------------------------------
+# Digital flow maze router cost parameters
+#-----------------------------------------------------
+
+mzrouter
+end
+
+#-----------------------------------------------------
+# Vendor DRC rules
+#-----------------------------------------------------
+
+drc
+
+ style drc variants (fast),(full),(routing)
+
+ scalefactor 10
+
+ cifstyle drc
+
+ variants (fast),(full)
+
+#-----------------------------
+# DNWELL
+#-----------------------------
+
+ width dnwell 3000 "Deep N-well width < %d (Dnwell 2)"
+ spacing dnwell dnwell 6300 touching_ok "Deep N-well spacing < %d (Dnwell 3)"
+ spacing dnwell allnwell 4500 surround_ok \
+ "Deep N-well spacing to N-well < %d (Nwell 7)"
+ cifmaxwidth nwell_missing 0 bend_illegal \
+ "N-well overlap of Deep N-well < 0.4um outside, 1.03um inside (Nwell 5a, 7)"
+ cifmaxwidth dnwell_missing 0 bend_illegal \
+ "SONOS nFET must be in Deep N-well (Tunm 6a)"
+
+#-----------------------------
+# NWELL
+#-----------------------------
+
+ width allnwell 840 "N-well width < %d (Nwell 1)"
+ spacing allnwell allnwell 1270 touching_ok "N-well spacing < %d (Nwell 2a)"
+
+#-----------------------------
+# DIFF
+#-----------------------------
+
+ width *ndiff,nfet,scnfet,*nsd,*ndiode,ndiffres,*pdiff,pfet,scpfet,*psd,*pdiode,pdiffres \
+ 150 "Diffusion width < %d (Diff/tap 1)"
+ width *mvndiff,mvnfet,mvnnfet,*mvndiode,*nndiode,mvndiffres,*mvpdiff,mvpfet,*mvpdiode 290 \
+ "MV Diffusion width < %d (Diff/tap 14)"
+ width *mvnsd,*mvpsd 150 "MV Tap width < %d (Diff/tap 1)"
+ extend *mvpsd *mvndiff 700 "MV Butting tap length < %d (Diff/tap 16)"
+ extend *mvnsd *mvpdiff 700 "MV Butting tap length < %d (Diff/tap 16)"
+ extend *psd *ndiff 290 "Butting tap length < %d (Diff/tap 4)"
+ extend *nsd *pdiff 290 "Butting tap length < %d (Diff/tap 4)"
+ width mvpdiffres 150 "MV P-Diffusion resistor width < %d (Diff/tap 14a)"
+ spacing alldifflv,var,varhvt alldifflv,var,varhvt 270 touching_ok \
+ "Diffusion spacing < %d (Diff/tap 3)"
+ spacing alldiffmvnontap,mvvar alldiffmvnontap,mvvar 300 touching_ok \
+ "MV Diffusion spacing < %d (Diff/tap 15a)"
+ spacing alldiffmv *mvnsd,*mvpsd 270 touching_ok \
+ "MV Diffusion to MV tap spacing < %d (Diff/tap 3)"
+ spacing *mvndiff,mvnfet,mvnnfet,*mvndiode,*nndiode,mvndiffres,mvvar *mvpsd 370 \
+ touching_ok "MV P-Diffusion to MV N-tap spacing < %d (Diff/tap 15b)"
+ spacing *mvnsd,*mvpdiff,mvpfet,mvvar,*mvpdiode *mvpsd,*psd 760 touching_illegal \
+ "MV Diffusion in N-well to P-tap spacing < %d (Diff/tap 20 + Diff/tap 17,19)"
+ spacing *ndiff,*ndiode,nfet allnwell 340 touching_illegal \
+ "N-Diffusion spacing to N-well < %d (Diff/tap 9)"
+ spacing *mvndiff,*mvndiode,mvnfet,mvnnfet allnwell 340 touching_illegal \
+ "N-Diffusion spacing to N-well < %d (Diff/tap 9)"
+ spacing *psd allnwell 130 touching_illegal \
+ "P-tap spacing to N-well < %d (Diff/tap 11)"
+ spacing *mvpsd allnwell 130 touching_illegal \
+ "P-tap spacing to N-well < %d (Diff/tap 11)"
+ surround *nsd allnwell 180 absence_illegal \
+ "N-well overlap of N-tap < %d (Diff/tap 10)"
+ surround *mvnsd allnwell 330 absence_illegal \
+ "N-well overlap of MV N-tap < %d (Diff/tap 19)"
+ surround *pdiff,*pdiode,pfet,scpfet allnwell 180 absence_illegal \
+ "N-well overlap of P-Diffusion < %d (Diff/tap 8)"
+ surround *mvpdiff,*mvpdiode,mvpfet allnwell 330 absence_illegal \
+ "N-well overlap of P-Diffusion < %d (Diff/tap 17)"
+ surround mvvar allnwell 560 absence_illegal \
+ "N-well overlap of MV varactor < %d (LVTN 10 + LVTN 4b)"
+ spacing *mvndiode *mvndiode 1070 touching_ok \
+ "MV N-diode spacing < %d (HVNTM.2 + 2 * HVNTM.3)"
+
+ # Butting junction rules
+ edge4way (*psd)/a ~(*ndiff,*psd)/a 125 ~(*ndiff)/a (*ndiff)/a 125 \
+ "N-Diffusion to P-tap spacing < %d across butted junction"
+ edge4way (*ndiff)/a ~(*ndiff,*psd)/a 125 ~(*psd)/a (*psd)/a 125 \
+ "N-Diffusion to P-tap spacing < %d across butted junction"
+ edge4way (*nsd)/a ~(*pdiff,*nsd)/a 125 ~(*pdiff)/a (*pdiff)/a 125 \
+ "P-Diffusion to N-tap spacing < %d across butted junction"
+ edge4way (*pdiff)/a ~(*pdiff,*nsd)/a 125 ~(*nsd)/a (*nsd)/a 125 \
+ "P-Diffusion to N-tap spacing < %d across butted junction"
+
+ edge4way (*mvpsd)/a ~(*mvndiff,*mvpsd)/a 125 ~(*mvndiff)/a (*mvndiff)/a 125 \
+ "MV N-Diffusion to MV P-tap spacing < %d across butted junction"
+ edge4way (*mvndiff)/a ~(*mvndiff,*mvpsd)/a 125 ~(*mvpsd)/a (*mvpsd)/a 125 \
+ "MV N-Diffusion to MV P-tap spacing < %d across butted junction"
+ edge4way (*mvnsd)/a ~(*mvpdiff,*mvnsd)/a 125 ~(*mvpdiff)/a (*mvpdiff)/a 125 \
+ "MV P-Diffusion to MV N-tap spacing < %d across butted junction"
+ edge4way (*mvpdiff)/a ~(*mvpdiff,*mvnsd)/a 125 ~(*mvnsd)/a (*mvnsd)/a 125 \
+ "MV P-Diffusion to MV N-tap spacing < %d across butted junction"
+
+ variants (full)
+
+ # Latchup rules
+ cifmaxwidth ptap_missing 0 bend_illegal \
+ "N-diff distance to P-tap must be < 15.0um (LU 2)"
+ cifmaxwidth dptap_missing 0 bend_illegal \
+ "N-diff distance to P-tap in deep Nwell must be < 15.0um (LU 2.1)"
+ cifmaxwidth ntap_missing 0 bend_illegal \
+ "P-diff distance to N-tap must be < 15.0um (LU 3)"
+
+ variants *
+
+#-----------------------------
+# POLY
+#-----------------------------
+
+ width allpoly 150 "Poly width < %d (Poly 1a)"
+ spacing allpoly allpoly 210 touching_ok "Poly spacing < %d (Poly 2)"
+ spacing allpolynonfet alldifflvnonfet 75 corner_ok allfets \
+ "Poly spacing to Diffusion < %d (Poly 4a)"
+ spacing npres *nsd 480 touching_illegal \
+ "Poly resistor spacing to N-tap < %d (Poly 9)"
+ overhang *ndiff,rndiff nfet,scnfet 250 "N-Diffusion overhang of nmos < %d (Poly 7)"
+ overhang *mvndiff,mvrndiff mvnfet,mvnnfet 250 \
+ "N-Diffusion overhang of nmos < %d (Poly 7)"
+ overhang *pdiff,rpdiff pfet,scpfet 250 "P-Diffusion overhang of pmos < %d (Poly 7)"
+ overhang *mvpdiff,mvrpdiff mvpfet 250 "P-Diffusion overhang of pmos < %d (Poly 7)"
+ overhang *poly allfets 130 "Poly overhang of transistor < %d (Poly 8)"
+ rect_only allfets "No bends in transistors (Poly 11)"
+ rect_only xhrpoly,uhrpoly "No bends in poly resistors (Poly 11)"
+ extend xpc/a xhrpoly,uhrpoly 2160 \
+ "Poly contact extends poly resistor by < %d (LIcon 1c + LI 5)"
+ spacing xhrpoly,uhrpoly xhrpoly,uhrpoly 1240 touching_illegal \
+ "Distance between precision resistors < %d (RPM 2 + 2 * RPM 3)"
+
+#--------------------------------------------------------------------
+# NPC (Nitride Poly Cut)
+#--------------------------------------------------------------------
+
+# Layer NPC is defined automatically around poly contacts (grow 0.1um)
+
+#--------------------------------------------------------------------
+# CONT (LICON, contact between poly/diff and LI)
+#--------------------------------------------------------------------
+
+ width ndc/li 170 "N-diffusion contact width < %d (LIcon 1)"
+ width nsc/li 170 "N-tap contact width < %d (LIcon 1)"
+ width pdc/li 170 "P-diffusion contact width < %d (LIcon 1)"
+ width psc/li 170 "P-tap contact width < %d (LIcon 1)"
+ width ndic/li 170 "N-diode contact width < %d (LIcon 1)"
+ width pdic/li 170 "P-diode contact width < %d (LIcon 1)"
+ width pc/li 170 "Poly contact width < %d (LIcon 1)"
+
+ width xpc/li 350 "Poly resistor contact width < %d (LIcon 1b + 2 * LI 5)"
+
+ width mvndc/li 170 "N-diffusion contact width < %d (LIcon 1)"
+ width mvnsc/li 170 "N-tap contact width < %d (LIcon 1)"
+ width mvpdc/li 170 "P-diffusion contact width < %d (LIcon 1)"
+ width mvpsc/li 170 "P-tap contact width < %d (LIcon 1)"
+ width mvndic/li 170 "N-diode contact width < %d (LIcon 1)"
+ width mvpdic/li 170 "P-diode contact width < %d (LIcon 1)"
+
+ spacing allpdiffcont allndiffcont 170 touching_illegal \
+ "Diffusion contact spacing < %d (LIcon 2)"
+ spacing allndiffcont allndiffcont 170 touching_ok \
+ "Diffusion contact spacing < %d (LIcon 2)"
+ spacing allpdiffcont allpdiffcont 170 touching_ok \
+ "Diffusion contact spacing < %d (LIcon 2)"
+ spacing pc pc 170 touching_ok "Poly1 contact spacing < %d (LIcon 2)"
+
+ spacing pc alldiff 190 touching_illegal \
+ "Poly contact spacing to diffusion < %d (LIcon 14)"
+ spacing pc allpfets 235 touching_illegal \
+ "Poly contact spacing to pFET < %d (LIcon 9 + PSDM 5a)"
+
+ spacing ndc,pdc nfet,pfet 55 touching_illegal \
+ "Diffusion contact to gate < %d (LIcon 11)"
+ spacing ndc,pdc scnfet,scpfet 50 touching_illegal \
+ "Diffusion contact to standard cell gate < %d (LIcon 11)"
+ spacing mvndc,mvpdc mvnfet,mvnnfet,mvpfet 55 touching_illegal \
+ "Diffusion contact to gate < %d (LIcon 11)"
+ spacing ndc,mvndc rnd,mvrnd 60 touching_illegal "Diffusion contact to rndiff < %d ()"
+ spacing pdc,mvpdc rdp,mvrdp 60 touching_illegal "Diffusion contact to rndiff < %d ()"
+ spacing nsc varactor,varhvt 250 touching_illegal \
+ "Diffusion contact to varactor gate < %d (LIcon 10)"
+ spacing mvnsc mvvar 250 touching_illegal \
+ "Diffusion contact to varactor gate < %d (LIcon 10)"
+
+ surround ndc/a *ndiff,nfet,scnfet,nfetlvt 40 absence_illegal \
+ "N-diffusion overlap of N-diffusion contact < %d (LIcon 5a)"
+ surround pdc/a *pdiff,pfet,scpfet,pfethvt,pfetlvt 40 absence_illegal \
+ "P-diffusion overlap of P-diffusion contact < %d (LIcon 5a)"
+ surround ndic/a *ndi 40 absence_illegal \
+ "N-diode overlap of N-diode contact < %d (LIcon 5a)"
+ surround pdic/a *pdi 40 absence_illegal \
+ "P-diode overlap of N-diode contact < %d (LIcon 5a)"
+
+ surround ndc/a *ndiff,nfet,scnfet,nfetlvt 60 directional \
+ "N-diffusion overlap of N-diffusion contact < %d in one direction (LIcon 5c)"
+ surround pdc/a *pdiff,pfet,scpfet,pfethvt,pfetlvt 60 directional \
+ "P-diffusion overlap of P-diffusion contact < %d in one direction (LIcon 5c)"
+ surround ndic/a *ndi 60 directional \
+ "N-diode overlap of N-diode contact < %d in one direction (LIcon 5c)"
+ surround pdic/a *pdi 60 directional \
+ "P-diode overlap of N-diode contact < %d in one direction (LIcon 5c)"
+
+ surround nsc/a *nsd 120 directional \
+ "N-tap overlap of N-tap contact < %d in one direction (LIcon 7)"
+ surround psc/a *psd 120 directional \
+ "P-tap overlap of P-tap contact < %d in one direction (LIcon 7)"
+
+ surround mvndc/a *mvndiff,mvnfet 40 absence_illegal \
+ "N-diffusion overlap of N-diffusion contact < %d (LIcon 5a)"
+ surround mvpdc/a *mvpdiff,mvpfet 40 absence_illegal \
+ "P-diffusion overlap of P-diffusion contact < %d (LIcon 5a)"
+ surround mvndic/a *mvndi 40 absence_illegal \
+ "N-diode overlap of N-diode contact < %d (LIcon 5a)"
+ surround mvpdic/a *mvpdi 40 absence_illegal \
+ "P-diode overlap of N-diode contact < %d (LIcon 5a)"
+
+ surround mvndc/a *mvndiff,mvnfet 60 directional \
+ "N-diffusion overlap of N-diffusion contact < %d in one direction (LIcon 5c)"
+ surround mvpdc/a *mvpdiff,mvpfet 60 directional \
+ "P-diffusion overlap of P-diffusion contact < %d in one direction (LIcon 5c)"
+ surround mvndic/a *mvndi 60 directional \
+ "N-diode overlap of N-diode contact < %d in one direction (LIcon 5c)"
+ surround mvpdic/a *mvpdi 60 directional \
+ "P-diode overlap of N-diode contact < %d in one direction (LIcon 5c)"
+
+ surround mvnsc/a *mvnsd 120 directional \
+ "N-tap overlap of N-tap contact < %d in one direction (LIcon 7)"
+ surround mvpsc/a *mvpsd 120 directional \
+ "P-tap overlap of P-tap contact < %d in one direction (LIcon 7)"
+
+ surround pc/a *poly,mrp1,xhrpoly,uhrpoly 50 absence_illegal \
+ "Poly overlap of poly contact < %d (LIcon 8)"
+ surround pc/a *poly,mrp1,xhrpoly,uhrpoly 80 directional \
+ "Poly overlap of poly contact < %d in one direction (LIcon 8a)"
+
+ exact_overlap ndc/a,pdc/a,psc/a,nsc/a,pc/a,ndic/a,pdic/a
+ exact_overlap mvndc/a,mvpdc/a,mvpsc/a,mvnsc/a,mvndic/a,mvpdic/a
+
+#-------------------------------------------------------------
+# LI - Local interconnect layer
+#-------------------------------------------------------------
+
+ width *li,rli 170 "Local interconnect width < %d (LI 1)"
+ width coreli 140 "Core local interconnect width < %d (LI c1)"
+ spacing allli allli,*obsli 170 touching_ok "Local interconnect spacing < %d (LI 3)"
+ spacing coreli allli,*obsli 140 touching_ok "Core local interconnect spacing < %d (LI c2)"
+
+ surround pc/li *li 80 directional \
+ "Local interconnect overlap of poly contact < %d in one direction (LI 5)"
+
+ surround ndc/li,nsc/li,pdc/li,psc/li,ndic/li,pdic/li,mvndc/li,mvnsc/li,mvpdc/li,mvpsc/li,mvndic/li,mvpdic/li \
+ *li,rli 80 directional \
+ "Local interconnect overlap of diffusion contact < %d in one direction (LI 5)"
+
+ area allli,*obsli 56100 170 "Local interconnect minimum area < %a (LI 6)"
+
+#-------------------------------------------------------------
+# MCON - Contact between local interconnect and metal1
+#-------------------------------------------------------------
+
+ width lic/m1 170 "Mcon width < %d (Mcon 1)"
+ spacing lic/m1 lic/m1,obslic/m1 170 touching_ok "Mcon spacing < %d (Mcon 2)"
+
+ exact_overlap lic/m1
+
+#-------------------------------------------------------------
+# METAL1 -
+#-------------------------------------------------------------
+
+ width *m1,rm1 140 "Metal1 width < %d (Met1 1)"
+ spacing allm1 allm1,*obsm1 140 touching_ok "Metal1 spacing < %d (Met1 2)"
+ area allm1,*obsm1 83000 140 "Metal1 minimum area < %a (Met1 6)"
+
+ surround lic/m1 *met1 30 absence_illegal \
+ "Metal1 overlap of local interconnect contact < %d (Met1 4)"
+ surround lic/m1 *met1 60 directional \
+ "Metal1 overlap of local interconnect contact < %d in one direction (Met1 5)"
+
+variants (fast),(full)
+ widespacing allm1 3000 allm1,*obsm1 280 touching_ok \
+ "Metal1 > 3um spacing to unrelated m1 < %d (Met1 3a)"
+ widespacing *obsm1 3000 allm1 280 touching_ok \
+ "Metal1 > 3um spacing to unrelated m1 < %d (Met1 3a)"
+
+variants (full)
+ cifmaxwidth m1_hole_empty 0 bend_illegal \
+ "Min area of metal1 holes > 0.14um^2 (Met1 7)"
+variants *
+
+#--------------------------------------------------
+# VIA1
+#--------------------------------------------------
+
+ width v1/m1 260 "Via1 width < %d (Via 1a + 2 * Via 4a)"
+ spacing v1 v1 60 touching_ok "Via1 spacing < %d (Via 2 - 2 * Via 4a)"
+ surround v1/m1 *m1 30 directional \
+ "Metal1 overlap of Via1 < %d in one direction (Via 5a - Via 4a)"
+ surround v1/m2 *m2 30 directional \
+ "Metal2 overlap of Via1 < %d in one direction (Met2 5 - Met2 4)"
+
+ exact_overlap v1/m2
+
+#--------------------------------------------------
+# METAL2 -
+#--------------------------------------------------
+
+ width allm2 140 "Metal2 width < %d (Met2 1)"
+ spacing allm2 allm2,obsm2 140 touching_ok "Metal2 spacing < %d (Met2 2)"
+ area allm2,obsm2 67600 140 "Metal2 minimum area < %a (Met2 6)"
+
+variants (fast),(full)
+ widespacing allm2 3000 allm2,obsm2 280 touching_ok \
+ "Metal2 > 3um spacing to unrelated m2 < %d (Met2 3)"
+ widespacing obsm2 3000 allm2 280 touching_ok \
+ "Metal2 > 3um spacing to unrelated m2 < %d (Met2 3)"
+
+variants (full)
+ cifmaxwidth m2_hole_empty 0 bend_illegal \
+ "Min area of metal2 holes > 0.14um^2 (Met2 7)"
+variants *
+
+#--------------------------------------------------
+# VIA2
+#--------------------------------------------------
+
+ width v2/m2 280 "Via2 width < %d (Via2 1a + 2 * Via2 4)"
+
+ spacing v2 v2 120 touching_ok "Via2 spacing < 0.24um (Via2 2 - 2 * Via2 4)"
+
+ surround v2/m2 *m2 45 directional \
+ "Metal2 overlap of Via2 < %d in one direction (Via2 4a - Via2 4)"
+ surround v2/m3 *m3 25 absence_illegal "Metal3 overlap of Via2 < %d (Met3 4)"
+
+ exact_overlap v2/m2
+
+#--------------------------------------------------
+# METAL3 -
+#--------------------------------------------------
+
+ width allm3 300 "Metal3 width < %d (Met3 1)"
+ spacing allm3 allm3,obsm3 300 touching_ok "Metal3 spacing < %d (Met3 2)"
+ area allm3,obsm3 240000 300 "Metal3 minimum area < %a (Met3 6)"
+
+variants (fast),(full)
+ widespacing allm3 3000 allm3,obsm3 400 touching_ok \
+ "Metal3 > 3um spacing to unrelated m3 < %d (Met3 3d)"
+ widespacing obsm3 3000 allm3 400 touching_ok \
+ "Metal3 > 3um spacing to unrelated m3 < %d (Met3 3d)"
+variants *
+
+
+#--------------------------------------------------
+# VIA3 - Requires 1 Module
+#--------------------------------------------------
+
+ width v3/m3 320 "Via3 width < %d (Via3 1 + 2 * Via3 4)"
+ spacing v3 v3 80 touching_ok "Via3 spacing < %d (Via3 2 - 2 * Via3 4)"
+ surround v3/m3 *m3 30 directional \
+ "Metal3 overlap of Via3 in one direction < %d (Via3 5 - Via3 4)"
+ surround v3/m4 *m4 5 absence_illegal \
+ "Metal4 overlap of Via3 < %d (Met4 3 - Via3 4)"
+
+ exact_overlap v3/m3
+
+#-----------------------------
+# METAL4 - METAL4 Module
+#-----------------------------
+
+variants *
+
+ width allm4 300 "Metal4 width < %d (Met4 1)"
+ spacing allm4 allm4,obsm4 300 touching_ok "Metal4 spacing < %d (Met4 2)"
+ area allm4,obsm4 240000 300 "Metal4 minimum area < %a (Met4 4a)"
+
+variants (fast),(full)
+ widespacing allm4 3000 allm4,obsm4 400 touching_ok \
+ "Metal4 > 3um spacing to unrelated m4 < %d (S2M4)"
+ widespacing obsm4 3000 allm4 400 touching_ok \
+ "Metal4 > 3um spacing to unrelated m4 < %d (S2M4)"
+variants *
+
+#--------------------------------------------------
+# VIA4 - Requires 1 Module
+#--------------------------------------------------
+
+ width v4/m4 1180 "Via4 width < %d (Via4 1 + 2 * Via4 4)"
+ spacing v4 v4 420 touching_ok "Via4 spacing < %d (Via4 2 - 2 * Via4 4)"
+ surround v4/m5 *m5 120 absence_illegal \
+ "Metal5 overlap of Via4 < %d (Met5 3 - Via4 4)"
+
+ exact_overlap v4/m4
+
+#-----------------------------
+# 1 - 1 Module
+#-----------------------------
+
+ width allm5 1600 "Metal5 width < %d (Met5 1)"
+ spacing allm5 allm5,obsm5 1600 touching_ok "Metal5 spacing < %d (Met5 2)"
+ area allm5,obsm5 4000000 1600 "Metal5 minimum area < %a (Met5 4)"
+
+
+
+#--------------------------------------------------
+# NMOS, PMOS
+#--------------------------------------------------
+
+ extend allfets *poly 420 "Transistor width < %d (Diff/tap 2)"
+ # Except: Note that standard cells allow transistor width minimum 0.36um
+ width pfetlvt 350 "LVT PMOS gate length < %d (Poly 1b)"
+
+ spacing *nsd,*mvnsd allpolynonfet 55 touching_illegal \
+ "N-tap spacing to field poly < %d (Poly 5)"
+ spacing *psd,*mvpsd allpolynonfet 55 touching_illegal \
+ "P-tap spacing to field poly < %d (Poly 5)"
+
+ # Full edge rule required to describe FET to butted tap distance
+ edge4way *psd *ndiff 300 *ndiff *psd 300 \
+ "Butting P-tap spacing to NMOS gate < %d (Poly 6)"
+ edge4way *nsd *pdiff 300 *pdiff *nsd 300 \
+ "Butting N-tap spacing to PMOS gate < %d (Poly 6)"
+ edge4way *mvpsd *mvndiff 300 *mvndiff *mvpsd 300 \
+ "Butting MV P-tap spacing to MV NMOS gate < %d (Poly 6)"
+ edge4way *mvnsd *mvpdiff 300 *mvpdiff *mvnsd 300 \
+ "Butting MV N-tap spacing to MV PMOS gate < %d (Poly 6)"
+
+ # No LV FETs in HV diff
+ spacing pfet,scpfet,pfetlvt,pfethvt,*pdiff *mvpdiff 360 touching_illegal \
+ "LV P-diffusion to MV P-diffusion < %d (Diff/tap 23 + Diff/tap 22)"
+
+ spacing nfet,scnfet,nfetlvt,varactor,varhvt,*ndiff *mvndiff 360 touching_illegal \
+ "LV N-diffusion to MV N-diffusion < %d (Diff/tap 23 + Diff/tap 22)"
+
+ # No HV FETs in LV diff
+ spacing mvpfet,*mvpdiff *pdiff 360 touching_illegal \
+ "MV P-diffusion to LV P-diffusion < %d (Diff/tap 23 + Diff/tap 22)"
+
+ spacing mvnfet,mvvaractor,*mvndiff *ndiff 360 touching_illegal \
+ "MV N-diffusion to LV N-diffusion < %d (Diff/tap 23 + Diff/tap 22)"
+
+ # Minimum length of MV FETs. Note that this is larger than the minimum
+ # width (0.29um), so an edge rule is required
+
+ edge4way mvndiff mvnfet 500 mvnfet 0 0 \
+ "MV NMOS minimum length < %d (Poly 13)"
+
+ edge4way mvnsd mvvaractor 500 mvvaractor 0 0 \
+ "MV Varactor minimum length < %d (Poly 13)"
+
+ edge4way mvpdiff mvpfet 500 mvpfet 0 0 \
+ "MV PMOS minimum length < %d (Poly 13)"
+
+#--------------------------------------------------
+# mrp1 (N+ poly resistor)
+#--------------------------------------------------
+
+ width mrp1 330 "mrp1 resistor width < %d (Poly 3)"
+
+#--------------------------------------------------
+# xhrpoly (P+ poly resistor)
+#--------------------------------------------------
+
+ width xhrpoly 350 "xhrpoly resistor width < %d (P+ Poly 1a)"
+ # NOTE: xhrpoly resistor requires choice of discrete widths 0.35, 0.69, ... up to 1.27.
+
+#--------------------------------------------------
+# uhrpoly (P+ poly resistor, 2kOhm/sq)
+#--------------------------------------------------
+
+ width uhrpoly 350 "uhrpoly resistor width < %d"
+ spacing xhrpoly,uhrpoly,xpc alldiff 480 touching_illegal \
+ "xhrpoly/uhrpoly resistor spacing to diffusion < %d (Poly 9)"
+
+#------------------------------------
+# MOS Varactor device rules
+#------------------------------------
+
+ overhang *nsd var,varhvt 250 \
+ "N-Tap overhang of Varactor < %d (Var 4)"
+
+ overhang *mvnsd mvvar 250 \
+ "N-Tap overhang of Varactor < %d (Var 4)"
+
+ width var,varhvt,mvvar 180 "Varactor length < %d (Var 1)"
+ extend var,varhvt,mvvar *poly 1000 "Varactor width < %d (Var 2)"
+
+#-----------------------------------------------------------
+# MiM CAP (CAPM) -
+#-----------------------------------------------------------
+
+ width *mimcap 2000 "MiM cap width < %d (Capm 1)"
+ spacing *mimcap *mimcap 840 touching_ok "MiM cap spacing < %d (Capm 2a)"
+ spacing *mimcap via2/m3 1270 touching_illegal \
+ "MiM cap spacing to via2 < %d (Capm 5)"
+ surround *mimcc *mimcap 200 absence_illegal \
+ "MiM cap must surround MiM cap contact by %d (Capm 4)"
+ rect_only *mimcap "MiM cap must be rectangular (Capm 7)
+
+ surround *mimcap *metal3/m3 140 absence_illegal \
+ "Metal3 must surround MiM cap by %d (Capm 3)"
+ spacing via2 *mimcap 50 touching_illegal "MiM cap cannot overlap via2 (Capm 8)"
+ spacing via3 *mimcap 50 touching_illegal "MiM cap cannot overlap via3 (Capm 8)"
+ # (resolve scaling issue!)
+ # cifspacing mim_bottom mim_bottom 1200 touching_ok \
+ # "MiM cap bottom plate spacing < %d (Capm 2b)"
+
+ # MiM cap contact rules (VIA3)
+
+ width mimcc/m3 320 "MiM cap contact width < %d (Via3 1 + 2 * Via3 4)"
+ spacing mimcc mimcc 80 touching_ok "MiM cap contact spacing < %d (Via3 2 - 2 * Via3 4)"
+ surround mimcc/m4 *m4 5 directional \
+ "Metal4 overlap of MiM cap contact in one direction < %d (Met4 3 - Via3 4)"
+ exact_overlap mimcc/m3
+
+ width *mimcap2 2000 "MiM cap width < %d (Cap2m 1)"
+ spacing *mimcap2 *mimcap2 840 touching_ok "MiM cap spacing < %d (Cap2m 2a)"
+ spacing *mimcap2 via3/m4 1270 touching_illegal \
+ "MiM cap spacing to via3 < %d (Cap2m 5)"
+ surround *mim2cc *mimcap2 200 absence_illegal \
+ "MiM cap must surround MiM cap contact by %d (Cap2m 4)"
+ rect_only *mimcap2 "MiM cap must be rectangular (Cap2m 7)
+
+ surround *mimcap2 *metal4/m4 140 absence_illegal \
+ "Metal4 must surround MiM cap by %d (Cap2m 3)"
+ spacing via3 *mimcap2 50 touching_illegal "MiM cap cannot overlap via3 (Cap2m 8)"
+ spacing via4 *mimcap2 50 touching_illegal "MiM cap cannot overlap via4 (Cap2m 8)"
+ # (resolve scaling issue!)
+ # cifspacing mim2_bottom mim2_bottom 1200 touching_ok \
+ # "MiM2 cap bottom plate spacing < %d (Cap2m 2b)"
+
+ # MiM cap contact rules (VIA4)
+
+ width mim2cc/m4 1180 "MiM2 cap contact width < %d (Via4 1 + 2 * Via4 4)"
+ spacing mim2cc mim2cc 420 touching_ok \
+ "MiM2 cap contact spacing < %d (Via4 2 - 2 * Via4 4)"
+ surround mim2cc/m5 *m5 120 absence_illegal \
+ "Metal5 overlap of MiM2 cap contact < %d (Met5 3 - Via4 4)"
+ exact_overlap mim2cc/m4
+
+
+#----------------------------
+# End DRC style
+#----------------------------
+
+end
+
+#----------------------------
+# LEF format definitions
+#----------------------------
+
+lef
+
+ masterslice pwell pwell PWELL substrate
+ masterslice nwell nwell NWELL
+
+ routing li li1 LI1 LI li
+
+ routing m1 met1 MET1 m1
+ routing m2 met2 MET2 m2
+ routing m3 met3 MET3 m3
+ routing m4 met4 MET4 m4
+ routing m5 met5 MET5 m5
+
+ cut lic mcon MCON Mcon
+ cut m2c via via1 VIA VIA1 cont2 via12
+ cut m3c via2 VIA2 cont3 via23
+ cut via3 via3 VIA3 cont4 via34
+ cut via4 via4 VIA4 cont5 via45
+
+ obs obsli li1
+ obs obsm1 met1
+ obs obsm2 met2
+ obs obsm3 met3
+
+ obs obsm4 met4
+ obs obsm5 met5
+
+ obs obslic mcon
+
+end
+
+#-----------------------------------------------------
+# Device and Parasitic extraction
+#-----------------------------------------------------
+
+
+extract
+ style ngspice variants (lvs),(sim),(si)
+ cscale 1
+ # NOTE: SkyWater SPICE libraries use .option scale 1E6 so all
+ # dimensions must be in units of microns in the extract file.
+ # Use extract style "ngspice(si)" to override this and produce
+ # a file with SI units for length/area.
+
+ variants (lvs),(sim)
+ lambda 1E6
+ variants (si)
+ lambda 1.0
+ variants *
+
+ units microns
+ step 7
+ sidehalo 2
+
+ # NOTE: MiM cap layers have been purposely put out of order,
+ # may want to reconsider.
+
+ planeorder dwell 0
+ planeorder well 1
+ planeorder active 2
+ planeorder locali 3
+ planeorder metal1 4
+ planeorder metal2 5
+ planeorder metal3 6
+ planeorder metal4 7
+ planeorder metal5 8
+ planeorder block 9
+ planeorder comment 10
+ planeorder cap1 11
+ planeorder cap2 12
+
+ height dnwell -0.1 0.1
+ height nwell,pwell 0.0 0.2062
+ height alldiff 0.2062 0.12
+ height allpoly 0.3262 0.18
+ height alldiffcont 0.3262 0.61
+ height pc 0.5062 0.43
+ height allli 0.9361 0.10
+ height lic 1.0361 0.34
+ height allm1 1.3761 0.36
+ height v1 1.7361 0.27
+ height allm2 2.0061 0.36
+ height v2 2.3661 0.42
+ height allm3 2.7861 0.845
+ height v3 3.6311 0.39
+ height allm4 4.0211 0.845
+ height v4 4.8661 0.505
+ height allm5 5.3711 1.26
+ height mimcap 2.4661 0.2
+ height mimcap2 3.7311 0.2
+ height mimcc 2.6661 0.12
+ height mim2cc 3.9311 0.09
+
+ # Antenna check parameters
+ # Note that checks w/diode diffusion are not modeled
+ model partial
+ antenna poly sidewall 50 none
+ antenna allcont surface 3 none
+ antenna li sidewall 75 0 450
+ antenna lic surface 3 0 18
+ antenna m1,m2,m3 sidewall 400 2600 400
+ antenna v1 surface 3 0 18
+ antenna v2 surface 6 0 36
+ antenna m4,m5 sidewall 400 2600 400
+ antenna v3,v4 surface 6 0 36
+
+ tiedown alldiffnonfet
+
+ substrate *ppdiff,*mvppdiff,space/w,pwell well $SUB -dnwell
+
+# Layer resistance: Use document xp018-PDS-v4_2_1.pdf
+
+# Resistances are in milliohms per square
+# Optional 3rd argument is the corner adjustment fraction
+# Device values come from trtc.cor (typical corner)
+ resist (dnwell)/dwell 2200000
+ resist (pwell)/well 3050000
+ resist (nwell)/well 1700000
+ resist (rpw)/well 3050000 0.5
+ resist (*ndiff,nsd)/active 120000
+ resist (*pdiff,*psd)/active 197000
+ resist (*mvndiff,mvnsd)/active 114000
+ resist (*mvpdiff,*mvpsd)/active 191000
+
+ resist ndiffres/active 120000 0.5
+ resist pdiffres/active 197000 0.5
+ resist mvndiffres/active 114000 0.5
+ resist mvpdiffres/active 191000 0.5
+ resist mrp1/active 48200 0.5
+ resist xhrpoly/active 319800 0.5
+ resist uhrpoly/active 2000000 0.5
+
+ resist (allpolynonres)/active 48200
+ resist rmp/active 48200
+
+ resist (allli)/locali 12200
+ resist (allm1)/metal1 125
+ resist (allm2)/metal2 125
+ resist (allm3)/metal3 47
+ resist (allm4)/metal4 47
+ resist (allm5)/metal5 29
+
+ contact ndc,nsc 15000
+ contact pdc,psc 15000
+ contact mvndc,mvnsc 15000
+ contact mvpdc,mvpsc 15000
+ contact pc 15000
+ contact lic 152000
+ contact m2c 4500
+ contact m3c 3410
+ contact mimcc 4500
+ contact mim2cc 3410
+ contact via3 3410
+ contact via4 380
+
+#-------------------------------------------------------------------------
+# Parasitic capacitance values: Use document (...)
+#-------------------------------------------------------------------------
+# This uses the new "default" definitions that determine the intervening
+# planes from the planeorder stack, take care of the reflexive sideoverlap
+# definitions, and generally clean up the section and make it more readable.
+#
+# Also uses "units microns" statement. All values are taken from the
+# document PEX/xRC/cap_models. Fringe capacitance values are approximated.
+# Units are aF/um^2 for area caps and aF/um for perimeter and sidewall caps.
+#-------------------------------------------------------------------------
+# Remember that device capacitances to substrate are taken care of by the
+# models. Thus, active and poly definitions ignore all "fet" types.
+# fet types are excluded when computing parasitic capacitance to
+# active from layers above them because poly is a shield; fet types are
+# included for parasitics from layers above to poly. Resistor types
+# should be removed from all parasitic capacitance calculations, or else
+# they just create floating caps. Technically, the capacitance probably
+# should be split between the two terminals. Unsure of the correct model.
+#-------------------------------------------------------------------------
+
+#n-well
+# NOTE: This value not found in PEX files
+defaultareacap nwell well 120
+
+#n-active
+# Rely on device models to capture *ndiff area cap
+# Do not extract parasitics from resistors
+# defaultareacap allnactivenonfet active 790
+# defaultperimeter allnactivenonfet active 280
+
+#p-active
+# Rely on device models to capture *pdiff area cap
+# Do not extract parasitics from resistors
+# defaultareacap allpactivenonfet active 810
+# defaultperimeter allpactivenonfet active 300
+
+#poly
+# Do not extract parasitics from resistors
+# defaultsidewall allpolynonfet active 22
+# defaultareacap allpolynonfet active 106
+# defaultperimeter allpolynonfet active 57
+
+ defaultsidewall *poly active 23
+ defaultareacap *poly active nwell,obswell,pwell well 106
+ defaultperimeter *poly active nwell,obswell,pwell well 55
+
+#locali
+ defaultsidewall allli locali 33
+ defaultareacap allli locali nwell,obswell,pwell well 37
+ defaultperimeter allli locali nwell,obswell,pwell well 55
+ defaultoverlap allli locali nwell well 37
+
+#locali->diff
+ defaultoverlap allli locali allactivenonfet active 37
+ defaultsideoverlap allli locali allactivenonfet active 55
+
+#locali->poly
+ defaultoverlap allli locali allpolynonres active 94
+ defaultsideoverlap allli locali allpolynonres active 52
+ defaultsideoverlap *poly active allli locali 25
+
+#metal1
+ defaultsidewall allm1 metal1 45
+ defaultareacap allm1 metal1 nwell,obswell,pwell well 26
+ defaultperimeter allm1 metal1 nwell,obswell,pwell well 41
+ defaultoverlap allm1 metal1 nwell well 26
+
+#metal1->diff
+ defaultoverlap allm1 metal1 allactivenonfet active 26
+ defaultsideoverlap allm1 metal1 allactivenonfet active 41
+
+#metal1->poly
+ defaultoverlap allm1 metal1 allpolynonres active 45
+ defaultsideoverlap allm1 metal1 allpolynonres active 47
+ defaultsideoverlap *poly active allm1 metal1 17
+
+#metal1->locali
+ defaultoverlap allm1 metal1 allli locali 114
+ defaultsideoverlap allm1 metal1 allli locali 59
+ defaultsideoverlap allli locali allm1 metal1 35
+
+#metal2
+ defaultsidewall allm2 metal2 50
+ defaultareacap allm2 metal2 nwell,obswell,pwell well 17
+ defaultperimeter allm2 metal2 nwell,obswell,pwell well 41
+ defaultoverlap allm2 metal2 nwell well 38
+
+#metal2->diff
+ defaultoverlap allm2 metal2 allactivenonfet active 17
+ defaultsideoverlap allm2 metal2 allactivenonfet active 41
+
+#metal2->poly
+ defaultoverlap allm2 metal2 allpolynonres active 24
+ defaultsideoverlap allm2 metal2 allpolynonres active 41
+ defaultsideoverlap *poly active allm2 metal2 11
+
+#metal2->locali
+ defaultoverlap allm2 metal2 allli locali 38
+ defaultsideoverlap allm2 metal2 allli locali 46
+ defaultsideoverlap allli locali allm2 metal2 22
+
+#metal2->metal1
+ defaultoverlap allm2 metal2 allm1 metal1 134
+ defaultsideoverlap allm2 metal2 allm1 metal1 67
+ defaultsideoverlap allm1 metal1 allm2 metal2 48
+
+#metal3
+ defaultsidewall allm3 metal3 63
+ defaultoverlap allm3 metal3 nwell well 12
+ defaultareacap allm3 metal3 nwell,obswell,pwell well 12
+ defaultperimeter allm3 metal3 nwell,obswell,pwell well 41
+
+#metal3->diff
+ defaultoverlap allm3 metal3 allactive active 12
+ defaultsideoverlap allm3 metal3 allactive active 41
+
+#metal3->poly
+ defaultoverlap allm3 metal3 allpolynonres active 16
+ defaultsideoverlap allm3 metal3 allpolynonres active 44
+ defaultsideoverlap *poly active allm3 metal3 9
+
+#metal3->locali
+ defaultoverlap allm3 metal3 allli locali 21
+ defaultsideoverlap allm3 metal3 allli locali 47
+ defaultsideoverlap allli locali allm3 metal3 15
+
+#metal3->metal1
+ defaultoverlap allm3 metal3 allm1 metal1 35
+ defaultsideoverlap allm3 metal3 allm1 metal1 55
+ defaultsideoverlap allm1 metal1 allm3 metal3 27
+
+#metal3->metal2
+ defaultoverlap allm3 metal3 allm2 metal2 86
+ defaultsideoverlap allm3 metal3 allm2 metal2 70
+ defaultsideoverlap allm2 metal2 allm3 metal3 44
+
+#metal4
+ defaultsidewall allm4 metal4 67
+# defaultareacap alltopm metal4 well 6
+ areacap allm4/m4 8
+ defaultoverlap allm4 metal4 nwell well 8
+ defaultperimeter allm4 metal4 well 37
+
+#metal4->diff
+ defaultoverlap allm4 metal4 allactivenonfet active 8
+ defaultsideoverlap allm4 metal4 allactivenonfet active 37
+
+#metal4->poly
+ defaultoverlap allm4 metal4 allpolynonres active 10
+ defaultsideoverlap allm4 metal4 allpolynonres active 38
+ defaultsideoverlap *poly active allm4 metal4 6
+
+#metal4->locali
+ defaultoverlap allm4 metal4 allli locali 12
+ defaultsideoverlap allm4 metal4 allli locali 40
+ defaultsideoverlap allli locali allm4 metal4 10
+
+#metal4->metal1
+ defaultoverlap allm4 metal4 allm1 metal1 15
+ defaultsideoverlap allm4 metal4 allm1 metal1 43
+ defaultsideoverlap allm1 metal1 allm4 metal4 16
+
+#metal4->metal2
+ defaultoverlap allm4 metal4 allm2 metal2 20
+ defaultsideoverlap allm4 metal4 allm2 metal2 46
+ defaultsideoverlap allm2 metal2 allm4 metal4 22
+
+#metal4->metal3
+ defaultoverlap allm4 metal4 allm3 metal3 84
+ defaultsideoverlap allm4 metal4 allm3 metal3 71
+ defaultsideoverlap allm3 metal3 allm4 metal4 43
+
+#metal5
+ defaultsidewall allm5 metal5 127
+# defaultareacap allm5 metal5 well 6
+ areacap allm5/m5 6
+ defaultoverlap allm5 metal5 nwell well 6
+ defaultperimeter allm5 metal5 well 39
+
+#metal5->diff
+ defaultoverlap allm5 metal5 allactivenonfet active 6
+ defaultsideoverlap allm5 metal5 allactivenonfet active 39
+
+#metal5->poly
+ defaultoverlap allm5 metal5 allpolynonres active 7
+ defaultsideoverlap allm5 metal5 allpolynonres active 40
+ defaultsideoverlap *poly active allm5 metal5 6
+
+#metal5->locali
+ defaultoverlap allm5 metal5 allli locali 8
+ defaultsideoverlap allm5 metal5 allli locali 41
+ defaultsideoverlap allli locali allm5 metal5 8
+
+#metal5->metal1
+ defaultoverlap allm5 metal5 allm1 metal1 9
+ defaultsideoverlap allm5 metal5 allm1 metal1 43
+ defaultsideoverlap allm1 metal1 allm5 metal5 12
+
+#metal5->metal2
+ defaultoverlap allm5 metal5 allm2 metal2 11
+ defaultsideoverlap allm5 metal5 allm2 metal2 46
+ defaultsideoverlap allm2 metal2 allm5 metal5 16
+
+#metal5->metal3
+ defaultoverlap allm5 metal5 allm3 metal3 20
+ defaultsideoverlap allm5 metal5 allm3 metal3 54
+ defaultsideoverlap allm3 metal3 allm5 metal5 28
+
+#metal5->metal4
+ defaultoverlap allm5 metal5 allm4 metal4 68
+ defaultsideoverlap allm5 metal5 allm4 metal4 83
+ defaultsideoverlap allm4 metal4 allm5 metal5 47
+
+# Devices: Use document (...)
+
+variants (sim)
+
+ device msubcircuit pshort pfet,scpfet *pdiff,pdiffres *pdiff,pdiffres nwell error l=l w=w
+ device msubcircuit plowvt pfetlvt *pdiff,pdiffres *pdiff,pdiffres nwell error l=l w=w
+ device msubcircuit phighvt pfethvt *pdiff,pdiffres *pdiff,pdiffres nwell error l=l w=w
+
+ device msubcircuit nshort nfet,scnfet *ndiff,ndiffres *ndiff,ndiffres pwell,space/w error l=l w=w
+ device msubcircuit nlowvt nfetlvt *ndiff,ndiffres *ndiff,ndiffres pwell,space/w error l=l w=w
+ device msubcircuit sonos_e nsonos *ndiff,ndiffres *ndiff,ndiffres pwell,space/w error l=l w=w
+ device subcircuit xcnwvc varactor *nndiff nwell error l=l w=w
+ device subcircuit xcnwvc2 varhvt *nndiff nwell error l=l w=w
+ device subcircuit xchvnwc mvvaractor *mvnndiff nwell error l=l w=w
+
+ device msubcircuit phv mvpfet *mvpdiff,mvpdiffres *mvpdiff,mvpdiffres nwell error l=l w=w
+ device msubcircuit nhv mvnfet *mvndiff,mvndiffres *mvndiff,mvndiffres pwell,space/w error l=l w=w
+ device msubcircuit nhvnative mvnnfet *mvndiff,mvndiffres *mvndiff,mvndiffres pwell,space/w error l=l w=w
+
+ device rsubcircuit short rmp *poly space/w,pwell,nwell error l=l w=w
+ device rsubcircuit short rli1 *li,coreli space/w,pwell,nwell error l=l w=w
+ device rsubcircuit short rmetal1 *metal1 space/w,pwell,nwell error l=l w=w
+ device rsubcircuit short rmetal2 *metal2 space/w,pwell,nwell error l=l w=w
+ device rsubcircuit short rmetal3 *metal3 space/w,pwell,nwell error l=l w=w
+ device rsubcircuit short rm4 *m4 space/w,pwell,nwell error l=l w=w
+ device rsubcircuit short rm5 *m5 space/w,pwell,nwell error l=l w=w
+
+ device rsubcircuit xhrpoly xhrpoly xpc pwell,space/w error l=l w=w
+ device rsubcircuit uhrpoly uhrpoly xpc pwell,space/w error l=l w=w
+ device rsubcircuit mrp1 mrp1 *poly pwell,space/w error l=l w=w
+
+ device rsubcircuit mrdn ndiffres *ndiff pwell,space/w error l=l w=w
+ device rsubcircuit mrdp pdiffres *pdiff nwell error l=l w=w
+ device rsubcircuit xpwres rpw pwell dnwell error l=l w=w
+
+ device rsubcircuit mrdn_hv mvndiffres *mvndiff pwell,space/w error l=l w=w
+ device rsubcircuit mrdp_hv mvpdiffres *mvpdiff nwell error l=l w=w
+
+ device subcircuit pdiode *pdiode nwell a=a p=p
+ device msubcircuit ndiode *ndiode pwell,space/w a=a p=p
+ device subcircuit pdiode_h *mvpdiode nwell a=a p=p
+ device msubcircuit ndiode_h *mvndiode pwell,space/w a=a p=p
+
+ # These are parasitic devices
+ device msubcircuit ndiode_lvt *ndiodelvt pwell,space/w a=a p=p
+ device subcircuit pdiode_lvt *pdiodelvt nwell a=a p=p
+ device subcircuit pdiode_hvt *pdiodehvt nwell a=a p=p
+ device msubcircuit ndiode_native *nndiode pwell,space/w a=a p=p
+
+ device subcircuit xcmimc1 *mimcap m3 nwell,pwell,space/w error a=a p=p s=subs
+ device subcircuit xcmimc2 *mimcap2 m4,mimcc/m4 nwell,pwell,space/w error a=a p=p s=subs
+
+ variants (lvs),(si)
+
+ device mosfet pshort scpfet,pfet pdiff,pdiffres,pdc nwell
+ device mosfet plowvt pfetlvt pdiff,pdiffres,pdc nwell
+ device mosfet phighvt pfethvt pdiff,pdiffres,pdc nwell
+ device mosfet nshort scnfet,nfet ndiff,ndiffres,ndc pwell,space/w
+ device mosfet nlowvt nfetlvt ndiff,ndiffres,ndc pwell,space/w
+ device mosfet sonos_e nsonos ndiff,ndiffres,ndc pwell,space/w
+ device mosfet phv mvpfet mvpdiff,mvpdiffres,mvpdc nwell
+ device mosfet nhv mvnfet mvndiff,mvndiffres,mvndc pwell,space/w
+ device mosfet nhvnative mvnnfet *mvndiff,mvndiffres pwell,space/w
+
+ # These devices always extract as subcircuits
+ device subcircuit xcnwvc varactor *nndiff nwell error l=l w=w
+ device subcircuit xcnwvc2 varhvt *nndiff nwell error l=l w=w
+ device subcircuit xchvnwc mvvaractor *mvnndiff nwell error l=l w=w
+
+ device resistor short rmp *poly
+ device resistor short rli1 *li,coreli
+ device resistor short rmetal1 *metal1
+ device resistor short rmetal2 *metal2
+ device resistor short rmetal3 *metal3
+ device resistor short rm4 *m4
+ device resistor short rm5 *m5
+
+ device resistor xhrpoly xhrpoly xpc
+ device resistor uhrpoly uhrpoly xpc
+ device resistor mrp1 mrp1 *poly
+ device resistor mrdn ndiffres *ndiff
+ device resistor mrdp pdiffres *pdiff
+ device resistor mrdn_hv mvndiffres *mvndiff
+ device resistor mrdp_hv mvpdiffres *mvpdiff
+ device resistor xpwres rpw pwell
+
+ device pdiode pdiode *pdiode nwell a=a p=p
+ device ndiode ndiode *ndiode pwell,space/w a=a p=p
+ device pdiode pdiode_h *mvpdiode nwell a=a p=p
+ device ndiode ndiode_h *mvndiode pwell,space/w a=a p=p
+
+ # These are parasitic devices
+ device ndiode ndiode_lvt *ndiodelvt pwell,space/w a=a p=p
+ device pdiode pdiode_lvt *pdiodelvt nwell a=a p=p
+ device pdiode pdiode_hvt *pdiodehvt nwell a=a p=p
+ device ndiode ndiode_native *nndiode pwell,space/w a=a p=p
+
+ device subcircuit pdiode_h *mvpdiode nwell a=a p=p
+ device msubcircuit ndiode_h *mvndiode pwell,space/w a=a p=p
+
+
+ device capacitor xcmimc1 *mimcap *m3 1
+ device capacitor xcmimc2 *mimcap2 *m4 1
+
+end
+
+#-----------------------------------------------------
+# Wiring tool definitions
+#-----------------------------------------------------
+
+wiring
+ # All wiring values are in nanometers
+ scalefactor 10
+
+ contact lic 170 li 0 0 m1 30 60
+ contact v1 260 m1 0 30 m2 0 30
+ contact v2 280 m2 0 45 m3 25 0
+ contact v3 320 m3 0 30 m4 5 5
+ contact v4 1180 m4 0 m5 120
+
+ contact pc 170 poly 50 80 li 0 80
+ contact pdc 170 pdiff 40 60 li 0 80
+ contact ndc 170 ndiff 40 60 li 0 80
+ contact psc 170 psd 40 60 li 0 80
+ contact nsc 170 nsd 40 60 li 0 80
+
+end
+
+#-----------------------------------------------------
+# Plain old router. . .
+#-----------------------------------------------------
+
+router
+end
+
+#------------------------------------------------------------
+# Plowing (restored in magic 8.2, need to fill this section)
+#------------------------------------------------------------
+
+plowing
+end
+
+#-----------------------------------------------------------------
+# No special plot layers defined (use default PNM color choices)
+#-----------------------------------------------------------------
+
+plot
+ style pnm
+ default
+ draw fillblock no_color_at_all
+ draw nwell cwell
+end
+
