Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 5
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.23

Metal 1 RESOVER 0
DIST count 55 width 0.23
0 0 0 0.000274687
0 0.33 0 0.000274687
0 0.56 0 0.000274687
0 0.775 0 0.000274687
0 0.89 0 0.000274687
0 1.12 0 0.000274687
0 1.335 0 0.000274687
0 1.45 0 0.000274687
0 1.68 0 0.000274687
0 2.24 0 0.000274687
0.33 0.33 0 0.000274687
0.33 0.56 0 0.000274687
0.33 0.775 0 0.000274687
0.33 0.89 0 0.000274687
0.33 1.12 0 0.000274687
0.33 1.335 0 0.000274687
0.33 1.45 0 0.000274687
0.33 1.68 0 0.000274687
0.33 2.24 0 0.000274687
0.56 0.56 0 0.000274687
0.56 0.775 0 0.000274687
0.56 0.89 0 0.000274687
0.56 1.12 0 0.000274687
0.56 1.335 0 0.000274687
0.56 1.45 0 0.000274687
0.56 1.68 0 0.000274687
0.56 2.24 0 0.000274687
0.775 0.775 0 0.000274687
0.775 0.89 0 0.000274687
0.775 1.12 0 0.000274687
0.775 1.335 0 0.000274687
0.775 1.45 0 0.000274687
0.775 1.68 0 0.000274687
0.775 2.24 0 0.000274687
0.89 0.89 0 0.000274687
0.89 1.12 0 0.000274687
0.89 1.335 0 0.000274687
0.89 1.45 0 0.000274687
0.89 1.68 0 0.000274687
0.89 2.24 0 0.000274687
1.12 1.12 0 0.000274687
1.12 1.335 0 0.000274687
1.12 1.45 0 0.000274687
1.12 1.68 0 0.000274687
1.12 2.24 0 0.000274687
1.335 1.335 0 0.000274687
1.335 1.45 0 0.000274687
1.335 1.68 0 0.000274687
1.335 2.24 0 0.000274687
1.45 1.45 0 0.000274687
1.45 1.68 0 0.000274687
1.45 2.24 0 0.000274687
1.68 1.68 0 0.000274687
1.68 2.24 0 0.000274687
2.24 0 2.24 0.000274687
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.23

Metal 1 OVER 0
DIST count 12 width 0.23
0.23 0.000116884 2.17507e-07 0.000137344
0.46 7.25225e-05 5.9879e-06 0.000137344
0.575 6.13588e-05 8.34851e-06 0.000137344
0.69 5.34407e-05 1.04295e-05 0.000137344
0.805 4.71511e-05 1.24172e-05 0.000137344
0.92 4.25706e-05 1.41512e-05 0.000137344
1.035 3.82417e-05 1.60318e-05 0.000137344
1.15 3.48071e-05 1.7611e-05 0.000137344
1.38 2.73226e-05 2.25699e-05 0.000137344
1.84 2.09698e-05 2.65993e-05 0.000137344
2.3 1.63149e-05 2.95659e-05 0.000137344
2.76 0 4.45986e-05 0.000137344
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.23

Metal 1 UNDER 2
DIST count 12 width 0.23
0.23 0.000103043 1.3466e-05 0.000137344
0.46 5.77901e-05 2.43159e-05 0.000137344
0.575 4.4833e-05 2.94277e-05 0.000137344
0.69 3.69404e-05 3.29168e-05 0.000137344
0.805 3.05999e-05 3.65125e-05 0.000137344
0.92 2.61561e-05 3.97906e-05 0.000137344
1.035 2.19492e-05 4.29799e-05 0.000137344
1.15 1.87183e-05 4.54395e-05 0.000137344
1.38 1.4246e-05 4.89386e-05 0.000137344
1.84 9.33054e-06 5.38594e-05 0.000137344
2.3 5.76923e-06 5.74233e-05 0.000137344
2.76 0 6.31957e-05 0.000137344
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.23
0.23 0.00011159 5.58188e-06 0.000137344
0.46 6.66426e-05 1.2643e-05 0.000137344
0.575 5.52124e-05 1.5986e-05 0.000137344
0.69 4.70843e-05 1.87095e-05 0.000137344
0.805 3.84115e-05 2.35651e-05 0.000137344
0.92 3.38852e-05 2.5642e-05 0.000137344
1.035 2.95082e-05 2.80862e-05 0.000137344
1.15 2.61164e-05 3.00137e-05 0.000137344
1.38 2.13181e-05 3.28769e-05 0.000137344
1.84 1.49515e-05 3.8148e-05 0.000137344
2.3 1.03197e-05 4.19817e-05 0.000137344
2.76 0 5.16963e-05 0.000137344
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.23
0.23 0.000113902 3.3959e-06 0.000137344
0.46 6.91758e-05 9.86125e-06 0.000137344
0.575 5.78477e-05 1.28332e-05 0.000137344
0.69 5.02065e-05 1.61711e-05 0.000137344
0.805 4.37274e-05 1.83046e-05 0.000137344
0.92 3.89463e-05 2.06804e-05 0.000137344
1.035 3.22903e-05 2.48869e-05 0.000137344
1.15 2.89109e-05 2.68394e-05 0.000137344
1.38 2.38266e-05 2.92574e-05 0.000137344
1.84 1.72745e-05 3.35581e-05 0.000137344
2.3 1.25069e-05 3.71675e-05 0.000137344
2.76 0 4.8795e-05 0.000137344
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.23
0.23 0.000114994 2.38659e-06 0.000137344
0.46 7.03876e-05 8.56546e-06 0.000137344
0.575 5.91108e-05 1.14043e-05 0.000137344
0.69 5.18372e-05 1.4827e-05 0.000137344
0.805 4.54042e-05 1.68801e-05 0.000137344
0.92 4.08832e-05 1.95664e-05 0.000137344
1.035 3.62799e-05 2.09566e-05 0.000137344
1.15 3.25083e-05 2.2483e-05 0.000137344
1.38 2.51648e-05 2.72941e-05 0.000137344
1.84 1.85566e-05 3.1305e-05 0.000137344
2.3 1.37924e-05 3.47251e-05 0.000137344
2.76 0 4.74946e-05 0.000137344
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.23

Metal 1 DIAGUNDER 2
DIST count 13 width 0.23
0 0 2.18272e-05 0.000137344
0.23 0 1.73811e-05 0.000137344
0.46 0 1.58729e-05 0.000137344
0.575 0 1.51828e-05 0.000137344
0.69 0 1.45908e-05 0.000137344
0.805 0 1.39159e-05 0.000137344
0.92 0 1.31987e-05 0.000137344
1.035 0 1.23996e-05 0.000137344
1.15 0 1.17065e-05 0.000137344
1.38 0 1.05639e-05 0.000137344
1.84 0 8.69425e-06 0.000137344
2.3 0 7.12874e-06 0.000137344
2.76 0 6.0139e-06 0.000137344
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.23
0 0 1.08962e-05 0.000137344
0.23 0 8.48891e-06 0.000137344
0.46 0 8.44706e-06 0.000137344
0.575 0 8.37099e-06 0.000137344
0.69 0 8.29787e-06 0.000137344
0.805 0 8.17275e-06 0.000137344
0.92 0 8.01052e-06 0.000137344
1.035 0 7.78158e-06 0.000137344
1.15 0 7.58289e-06 0.000137344
1.38 0 7.25509e-06 0.000137344
1.84 0 6.5939e-06 0.000137344
2.3 0 5.82613e-06 0.000137344
2.76 0 5.24563e-06 0.000137344
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.23
0 0 7.40299e-06 0.000137344
0.23 0 5.54385e-06 0.000137344
0.46 0 5.6271e-06 0.000137344
0.575 0 5.61941e-06 0.000137344
0.69 0 5.60652e-06 0.000137344
0.805 0 5.57497e-06 0.000137344
0.92 0 5.52852e-06 0.000137344
1.035 0 5.4516e-06 0.000137344
1.15 0 5.38478e-06 0.000137344
1.38 0 5.27448e-06 0.000137344
1.84 0 5.01704e-06 0.000137344
2.3 0 4.65042e-06 0.000137344
2.76 0 4.36131e-06 0.000137344
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.23
0 0 5.84816e-06 0.000137344
0.23 0 4.44043e-06 0.000137344
0.46 0 4.49499e-06 0.000137344
0.575 0 4.49886e-06 0.000137344
0.69 0 4.50419e-06 0.000137344
0.805 0 4.50332e-06 0.000137344
0.92 0 4.48371e-06 0.000137344
1.035 0 4.46649e-06 0.000137344
1.15 0 4.45125e-06 0.000137344
1.38 0 4.42545e-06 0.000137344
1.84 0 4.25905e-06 0.000137344
2.3 0 4.09135e-06 0.000137344
2.76 0 3.96023e-06 0.000137344
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.28

Metal 2 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000225636
0 0.28 0 0.000225636
0 0.56 0 0.000225636
0 0.7 0 0.000225636
0 0.84 0 0.000225636
0 1.12 0 0.000225636
0 1.26 0 0.000225636
0 1.4 0 0.000225636
0 1.68 0 0.000225636
0 2.24 0 0.000225636
0.28 0.28 0 0.000225636
0.28 0.56 0 0.000225636
0.28 0.7 0 0.000225636
0.28 0.84 0 0.000225636
0.28 1.12 0 0.000225636
0.28 1.26 0 0.000225636
0.28 1.4 0 0.000225636
0.28 1.68 0 0.000225636
0.28 2.24 0 0.000225636
0.56 0.56 0 0.000225636
0.56 0.7 0 0.000225636
0.56 0.84 0 0.000225636
0.56 1.12 0 0.000225636
0.56 1.26 0 0.000225636
0.56 1.4 0 0.000225636
0.56 1.68 0 0.000225636
0.56 2.24 0 0.000225636
0.7 0.7 0 0.000225636
0.7 0.84 0 0.000225636
0.7 1.12 0 0.000225636
0.7 1.26 0 0.000225636
0.7 1.4 0 0.000225636
0.7 1.68 0 0.000225636
0.7 2.24 0 0.000225636
0.84 0.84 0 0.000225636
0.84 1.12 0 0.000225636
0.84 1.26 0 0.000225636
0.84 1.4 0 0.000225636
0.84 1.68 0 0.000225636
0.84 2.24 0 0.000225636
1.12 1.12 0 0.000225636
1.12 1.26 0 0.000225636
1.12 1.4 0 0.000225636
1.12 1.68 0 0.000225636
1.12 2.24 0 0.000225636
1.26 1.26 0 0.000225636
1.26 1.4 0 0.000225636
1.26 1.68 0 0.000225636
1.26 2.24 0 0.000225636
1.4 1.4 0 0.000225636
1.4 1.68 0 0.000225636
1.4 2.24 0 0.000225636
1.68 1.68 0 0.000225636
1.68 2.24 0 0.000225636
2.24 0 2.24 0.000225636
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.28
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.28

Metal 2 OVER 0
DIST count 12 width 0.28
0.28 0.000110332 3.6075e-08 0.000112818
0.56 7.07226e-05 8.66575e-07 0.000112818
0.7 6.0479e-05 3.11953e-06 0.000112818
0.84 5.36369e-05 4.7113e-06 0.000112818
0.98 4.77442e-05 6.57031e-06 0.000112818
1.12 4.378e-05 7.882e-06 0.000112818
1.26 3.96768e-05 9.59798e-06 0.000112818
1.4 3.66482e-05 1.08206e-05 0.000112818
1.68 2.89292e-05 1.60451e-05 0.000112818
2.24 2.28193e-05 1.95484e-05 0.000112818
2.8 1.83716e-05 2.21033e-05 0.000112818
3.36 0 3.9038e-05 0.000112818
END DIST

Metal 2 OVER 1
DIST count 12 width 0.28
0.28 9.67967e-05 9.70042e-06 0.000112818
0.56 5.68136e-05 1.94679e-05 0.000112818
0.7 4.65615e-05 2.38207e-05 0.000112818
0.84 3.97148e-05 2.76104e-05 0.000112818
0.98 3.159e-05 3.35814e-05 0.000112818
1.12 2.78517e-05 3.57668e-05 0.000112818
1.26 2.4201e-05 3.94358e-05 0.000112818
1.4 2.1464e-05 4.16767e-05 0.000112818
1.68 1.75624e-05 4.298e-05 0.000112818
2.24 1.29102e-05 4.86585e-05 0.000112818
2.8 9.53375e-06 5.2101e-05 0.000112818
3.36 0 6.16835e-05 0.000112818
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.28

Metal 2 UNDER 3
DIST count 12 width 0.28
0.28 9.33071e-05 1.28606e-05 0.000112818
0.56 5.2819e-05 2.31731e-05 0.000112818
0.7 4.23284e-05 2.78049e-05 0.000112818
0.84 3.5312e-05 3.18063e-05 0.000112818
0.98 2.78977e-05 3.71067e-05 0.000112818
1.12 2.40493e-05 3.95517e-05 0.000112818
1.26 2.02887e-05 4.33933e-05 0.000112818
1.4 1.7469e-05 4.57674e-05 0.000112818
1.68 1.34792e-05 4.70161e-05 0.000112818
2.24 9.01078e-06 5.27724e-05 0.000112818
2.8 5.80794e-06 5.60694e-05 0.000112818
3.36 0 6.19488e-05 0.000112818
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.28
0.28 0.000103138 3.25798e-06 0.000112818
0.56 6.28114e-05 1.0215e-05 0.000112818
0.7 5.22404e-05 1.34794e-05 0.000112818
0.84 4.51528e-05 1.56705e-05 0.000112818
0.98 3.89919e-05 1.84263e-05 0.000112818
1.12 3.48343e-05 2.06254e-05 0.000112818
1.26 2.8447e-05 2.50541e-05 0.000112818
1.4 2.53965e-05 2.67742e-05 0.000112818
1.68 2.09702e-05 2.97208e-05 0.000112818
2.24 1.4884e-05 3.4845e-05 0.000112818
2.8 1.05065e-05 3.85475e-05 0.000112818
3.36 0 4.85239e-05 0.000112818
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000106474 1.10888e-07 0.000112818
0.56 6.64286e-05 6.17904e-06 0.000112818
0.7 5.5977e-05 8.9978e-06 0.000112818
0.84 4.93198e-05 1.1684e-05 0.000112818
0.98 4.35543e-05 1.43841e-05 0.000112818
1.12 3.90925e-05 1.59103e-05 0.000112818
1.26 3.48895e-05 1.76462e-05 0.000112818
1.4 3.15295e-05 1.90733e-05 0.000112818
1.68 2.44218e-05 2.37413e-05 0.000112818
2.24 1.80681e-05 2.84402e-05 0.000112818
2.8 1.34718e-05 3.18262e-05 0.000112818
3.36 0 4.43676e-05 0.000112818
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.28

Metal 2 DIAGUNDER 3
DIST count 13 width 0.28
0 0 2.43957e-05 0.000112818
0.28 0 1.87637e-05 0.000112818
0.56 0 1.6783e-05 0.000112818
0.7 0 1.59875e-05 0.000112818
0.84 0 1.53339e-05 0.000112818
0.98 0 1.44936e-05 0.000112818
1.12 0 1.35627e-05 0.000112818
1.26 0 1.27692e-05 0.000112818
1.4 0 1.20848e-05 0.000112818
1.68 0 1.09642e-05 0.000112818
2.24 0 8.99242e-06 0.000112818
2.8 0 7.48791e-06 0.000112818
3.36 0 6.46829e-06 0.000112818
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.28
0 0 1.29549e-05 0.000112818
0.28 0 9.85772e-06 0.000112818
0.56 0 9.70119e-06 0.000112818
0.7 0 9.59547e-06 0.000112818
0.84 0 9.50862e-06 0.000112818
0.98 0 9.29057e-06 0.000112818
1.12 0 8.99654e-06 0.000112818
1.26 0 8.74592e-06 0.000112818
1.4 0 8.52976e-06 0.000112818
1.68 0 8.17583e-06 0.000112818
2.24 0 7.27148e-06 0.000112818
2.8 0 6.43665e-06 0.000112818
3.36 0 5.86079e-06 0.000112818
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.28
0 0 9.65702e-06 0.000112818
0.28 0 7.12514e-06 0.000112818
0.56 0 7.19221e-06 0.000112818
0.7 0 7.17137e-06 0.000112818
0.84 0 7.15126e-06 0.000112818
0.98 0 7.09275e-06 0.000112818
1.12 0 7.02435e-06 0.000112818
1.26 0 6.96526e-06 0.000112818
1.4 0 6.91364e-06 0.000112818
1.68 0 6.74722e-06 0.000112818
2.24 0 6.30411e-06 0.000112818
2.8 0 5.92623e-06 0.000112818
3.36 0 5.58351e-06 0.000112818
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.28

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.28
0.28 8.11393e-05 2.37952e-05 0.000112818
0.56 4.10292e-05 3.74827e-05 0.000112818
0.7 3.08708e-05 4.35373e-05 0.000112818
0.84 2.40946e-05 4.91844e-05 0.000112818
0.98 1.8629e-05 5.39985e-05 0.000112818
1.12 1.50422e-05 5.68703e-05 0.000112818
1.26 1.18359e-05 6.18569e-05 0.000112818
1.4 9.41025e-06 6.46149e-05 0.000112818
1.68 6.13312e-06 6.421e-05 0.000112818
2.24 3.76631e-06 6.91487e-05 0.000112818
2.8 2.04758e-06 7.12429e-05 0.000112818
3.36 0 7.35756e-05 0.000112818
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.28
0.28 9.17746e-05 1.346e-05 0.000112818
0.56 4.93742e-05 2.64554e-05 0.000112818
0.7 3.90813e-05 3.13788e-05 0.000112818
0.84 3.21753e-05 3.54329e-05 0.000112818
0.98 2.63921e-05 3.94724e-05 0.000112818
1.12 2.2524e-05 4.23123e-05 0.000112818
1.26 1.87697e-05 4.6257e-05 0.000112818
1.4 1.59529e-05 4.88274e-05 0.000112818
1.68 1.2e-05 5.08452e-05 0.000112818
2.24 7.82335e-06 5.65038e-05 0.000112818
2.8 4.84044e-06 5.98719e-05 0.000112818
3.36 0 6.50048e-05 0.000112818
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 9.44341e-05 1.12202e-05 0.000112818
0.56 5.41023e-05 2.16518e-05 0.000112818
0.7 4.36648e-05 2.6422e-05 0.000112818
0.84 3.76157e-05 3.13943e-05 0.000112818
0.98 3.07465e-05 3.74617e-05 0.000112818
1.12 2.63958e-05 3.98159e-05 0.000112818
1.26 2.26203e-05 4.31098e-05 0.000112818
1.4 1.92229e-05 4.52794e-05 0.000112818
1.68 1.46743e-05 4.65605e-05 0.000112818
2.24 1.00532e-05 5.24771e-05 0.000112818
2.8 6.72908e-06 5.60773e-05 0.000112818
3.36 0 6.29908e-05 0.000112818
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.28

Metal 3 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000225636
0 0.28 0 0.000225636
0 0.56 0 0.000225636
0 0.7 0 0.000225636
0 0.84 0 0.000225636
0 1.12 0 0.000225636
0 1.26 0 0.000225636
0 1.4 0 0.000225636
0 1.68 0 0.000225636
0 2.24 0 0.000225636
0.28 0.28 0 0.000225636
0.28 0.56 0 0.000225636
0.28 0.7 0 0.000225636
0.28 0.84 0 0.000225636
0.28 1.12 0 0.000225636
0.28 1.26 0 0.000225636
0.28 1.4 0 0.000225636
0.28 1.68 0 0.000225636
0.28 2.24 0 0.000225636
0.56 0.56 0 0.000225636
0.56 0.7 0 0.000225636
0.56 0.84 0 0.000225636
0.56 1.12 0 0.000225636
0.56 1.26 0 0.000225636
0.56 1.4 0 0.000225636
0.56 1.68 0 0.000225636
0.56 2.24 0 0.000225636
0.7 0.7 0 0.000225636
0.7 0.84 0 0.000225636
0.7 1.12 0 0.000225636
0.7 1.26 0 0.000225636
0.7 1.4 0 0.000225636
0.7 1.68 0 0.000225636
0.7 2.24 0 0.000225636
0.84 0.84 0 0.000225636
0.84 1.12 0 0.000225636
0.84 1.26 0 0.000225636
0.84 1.4 0 0.000225636
0.84 1.68 0 0.000225636
0.84 2.24 0 0.000225636
1.12 1.12 0 0.000225636
1.12 1.26 0 0.000225636
1.12 1.4 0 0.000225636
1.12 1.68 0 0.000225636
1.12 2.24 0 0.000225636
1.26 1.26 0 0.000225636
1.26 1.4 0 0.000225636
1.26 1.68 0 0.000225636
1.26 2.24 0 0.000225636
1.4 1.4 0 0.000225636
1.4 1.68 0 0.000225636
1.4 2.24 0 0.000225636
1.68 1.68 0 0.000225636
1.68 2.24 0 0.000225636
2.24 0 2.24 0.000225636
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.28
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.28
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.28

Metal 3 OVER 0
DIST count 12 width 0.28
0.28 0.000113457 3.6075e-08 0.000112818
0.56 7.39907e-05 3.6075e-08 0.000112818
0.7 6.38145e-05 3.6075e-08 0.000112818
0.84 5.70271e-05 6.17091e-07 0.000112818
0.98 5.11833e-05 2.31037e-06 0.000112818
1.12 4.72589e-05 3.48956e-06 0.000112818
1.26 4.31953e-05 5.03523e-06 0.000112818
1.4 4.02014e-05 6.12416e-06 0.000112818
1.68 3.18403e-05 1.18377e-05 0.000112818
2.24 2.57234e-05 1.49448e-05 0.000112818
2.8 2.12555e-05 1.7227e-05 0.000112818
3.36 0 3.68234e-05 0.000112818
END DIST

Metal 3 OVER 1
DIST count 12 width 0.28
0.28 0.000108348 3.6075e-08 0.000112818
0.56 6.85213e-05 4.3702e-06 0.000112818
0.7 5.8188e-05 7.36725e-06 0.000112818
0.84 5.12815e-05 9.4157e-06 0.000112818
0.98 4.53265e-05 1.18906e-05 0.000112818
1.12 4.132e-05 1.37861e-05 0.000112818
1.26 3.3824e-05 1.93136e-05 0.000112818
1.4 3.09093e-05 2.08223e-05 0.000112818
1.68 2.66611e-05 2.33465e-05 0.000112818
2.24 2.0648e-05 2.80617e-05 0.000112818
2.8 1.62762e-05 3.14915e-05 0.000112818
3.36 0 4.70526e-05 0.000112818
END DIST

Metal 3 OVER 2
DIST count 12 width 0.28
0.28 9.71219e-05 9.47028e-06 0.000112818
0.56 5.71071e-05 1.92742e-05 0.000112818
0.7 4.68415e-05 2.36507e-05 0.000112818
0.84 3.99871e-05 2.75052e-05 0.000112818
0.98 3.17423e-05 3.35909e-05 0.000112818
1.12 2.80024e-05 3.57324e-05 0.000112818
1.26 2.43489e-05 3.94504e-05 0.000112818
1.4 2.16107e-05 4.16933e-05 0.000112818
1.68 1.77031e-05 4.28983e-05 0.000112818
2.24 1.30288e-05 4.85991e-05 0.000112818
2.8 9.63376e-06 5.20442e-05 0.000112818
3.36 0 6.17149e-05 0.000112818
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.28

Metal 3 UNDER 4
DIST count 12 width 0.28
0.28 9.49519e-05 1.13852e-05 0.000112818
0.56 5.45967e-05 2.13824e-05 0.000112818
0.7 4.41634e-05 2.58695e-05 0.000112818
0.84 3.719e-05 2.97916e-05 0.000112818
0.98 2.94124e-05 3.53957e-05 0.000112818
1.12 2.55908e-05 3.77198e-05 0.000112818
1.26 2.18426e-05 4.15148e-05 0.000112818
1.4 1.90343e-05 4.38281e-05 0.000112818
1.68 1.50377e-05 4.49777e-05 0.000112818
2.24 1.03742e-05 5.08464e-05 0.000112818
2.8 7.01675e-06 5.42542e-05 0.000112818
3.36 0 6.13102e-05 0.000112818
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.28
0.28 0.000106375 1.91161e-07 0.000112818
0.56 6.6239e-05 6.56215e-06 0.000112818
0.7 5.57477e-05 9.536e-06 0.000112818
0.84 4.93687e-05 1.25512e-05 0.000112818
0.98 4.38301e-05 1.57772e-05 0.000112818
1.12 3.92387e-05 1.75625e-05 0.000112818
1.26 3.48275e-05 1.89896e-05 0.000112818
1.4 3.12292e-05 2.01142e-05 0.000112818
1.68 2.40402e-05 2.50833e-05 0.000112818
2.24 1.77306e-05 3.00057e-05 0.000112818
2.8 1.31688e-05 3.35614e-05 0.000112818
3.36 0 4.59658e-05 0.000112818
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.28

Metal 3 DIAGUNDER 4
DIST count 13 width 0.28
0 0 2.59475e-05 0.000112818
0.28 0 1.97453e-05 0.000112818
0.56 0 1.78813e-05 0.000112818
0.7 0 1.70872e-05 0.000112818
0.84 0 1.64347e-05 0.000112818
0.98 0 1.55968e-05 0.000112818
1.12 0 1.4669e-05 0.000112818
1.26 0 1.38782e-05 0.000112818
1.4 0 1.31961e-05 0.000112818
1.68 0 1.20793e-05 0.000112818
2.24 0 1.01001e-05 0.000112818
2.8 0 8.58279e-06 0.000112818
3.36 0 7.55579e-06 0.000112818
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.28
0 0 1.48053e-05 0.000112818
0.28 0 1.12057e-05 0.000112818
0.56 0 1.10965e-05 0.000112818
0.7 0 1.10083e-05 0.000112818
0.84 0 1.09278e-05 0.000112818
0.98 0 1.07573e-05 0.000112818
1.12 0 1.05659e-05 0.000112818
1.26 0 1.04006e-05 0.000112818
1.4 0 1.02563e-05 0.000112818
1.68 0 9.87267e-06 0.000112818
2.24 0 8.96304e-06 0.000112818
2.8 0 8.21342e-06 0.000112818
3.36 0 7.59196e-06 0.000112818
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.28

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.28
0.28 9.1979e-05 1.32753e-05 0.000112818
0.56 4.94492e-05 2.64048e-05 0.000112818
0.7 3.91398e-05 3.13335e-05 0.000112818
0.84 3.2226e-05 3.55112e-05 0.000112818
0.98 2.64396e-05 3.95757e-05 0.000112818
1.12 2.25692e-05 4.23968e-05 0.000112818
1.26 1.88093e-05 4.64619e-05 0.000112818
1.4 1.59891e-05 4.90659e-05 0.000112818
1.68 1.20263e-05 5.07394e-05 0.000112818
2.24 7.8393e-06 5.65708e-05 0.000112818
2.8 4.84899e-06 5.99309e-05 0.000112818
3.36 0 6.50613e-05 0.000112818
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000102685 3.02223e-06 0.000112818
0.56 6.2228e-05 1.08636e-05 0.000112818
0.7 5.28641e-05 1.56058e-05 0.000112818
0.84 4.66578e-05 1.94166e-05 0.000112818
0.98 3.78639e-05 2.47499e-05 0.000112818
1.12 3.33322e-05 2.68012e-05 0.000112818
1.26 2.92031e-05 2.87472e-05 0.000112818
1.4 2.53416e-05 3.02222e-05 0.000112818
1.68 2.02212e-05 3.28808e-05 0.000112818
2.24 1.4208e-05 3.86199e-05 0.000112818
2.8 9.89091e-06 4.27374e-05 0.000112818
3.36 0 5.24771e-05 0.000112818
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.28
0.28 8.11548e-05 2.38516e-05 0.000112818
0.56 4.104e-05 3.75914e-05 0.000112818
0.7 3.0882e-05 4.36608e-05 0.000112818
0.84 2.41055e-05 4.94008e-05 0.000112818
0.98 1.86382e-05 5.41986e-05 0.000112818
1.12 1.50502e-05 5.69951e-05 0.000112818
1.26 1.18422e-05 6.20773e-05 0.000112818
1.4 9.41522e-06 6.48479e-05 0.000112818
1.68 6.13633e-06 6.43214e-05 0.000112818
2.24 3.76807e-06 6.92971e-05 0.000112818
2.8 2.0483e-06 7.13886e-05 0.000112818
3.36 0 7.372e-05 0.000112818
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.28
0.28 9.28517e-05 1.26585e-05 0.000112818
0.56 5.2254e-05 2.37319e-05 0.000112818
0.7 4.00046e-05 3.05797e-05 0.000112818
0.84 3.39544e-05 3.55788e-05 0.000112818
0.98 2.88303e-05 3.97996e-05 0.000112818
1.12 2.44169e-05 4.2326e-05 0.000112818
1.26 2.06292e-05 4.57831e-05 0.000112818
1.4 1.73158e-05 4.81751e-05 0.000112818
1.68 1.28483e-05 4.96608e-05 0.000112818
2.24 8.49352e-06 5.54659e-05 0.000112818
2.8 5.37902e-06 5.89359e-05 0.000112818
3.36 0 6.45854e-05 0.000112818
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.28

Metal 4 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000225636
0 0.28 0 0.000225636
0 0.56 0 0.000225636
0 0.7 0 0.000225636
0 0.84 0 0.000225636
0 1.12 0 0.000225636
0 1.26 0 0.000225636
0 1.4 0 0.000225636
0 1.68 0 0.000225636
0 2.24 0 0.000225636
0.28 0.28 0 0.000225636
0.28 0.56 0 0.000225636
0.28 0.7 0 0.000225636
0.28 0.84 0 0.000225636
0.28 1.12 0 0.000225636
0.28 1.26 0 0.000225636
0.28 1.4 0 0.000225636
0.28 1.68 0 0.000225636
0.28 2.24 0 0.000225636
0.56 0.56 0 0.000225636
0.56 0.7 0 0.000225636
0.56 0.84 0 0.000225636
0.56 1.12 0 0.000225636
0.56 1.26 0 0.000225636
0.56 1.4 0 0.000225636
0.56 1.68 0 0.000225636
0.56 2.24 0 0.000225636
0.7 0.7 0 0.000225636
0.7 0.84 0 0.000225636
0.7 1.12 0 0.000225636
0.7 1.26 0 0.000225636
0.7 1.4 0 0.000225636
0.7 1.68 0 0.000225636
0.7 2.24 0 0.000225636
0.84 0.84 0 0.000225636
0.84 1.12 0 0.000225636
0.84 1.26 0 0.000225636
0.84 1.4 0 0.000225636
0.84 1.68 0 0.000225636
0.84 2.24 0 0.000225636
1.12 1.12 0 0.000225636
1.12 1.26 0 0.000225636
1.12 1.4 0 0.000225636
1.12 1.68 0 0.000225636
1.12 2.24 0 0.000225636
1.26 1.26 0 0.000225636
1.26 1.4 0 0.000225636
1.26 1.68 0 0.000225636
1.26 2.24 0 0.000225636
1.4 1.4 0 0.000225636
1.4 1.68 0 0.000225636
1.4 2.24 0 0.000225636
1.68 1.68 0 0.000225636
1.68 2.24 0 0.000225636
2.24 0 2.24 0.000225636
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.28
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.28
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.28
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.28

Metal 4 OVER 0
DIST count 12 width 0.28
0.28 0.000114524 3.6075e-08 0.000112818
0.56 7.52402e-05 3.6075e-08 0.000112818
0.7 6.51499e-05 3.6075e-08 0.000112818
0.84 5.8424e-05 3.6075e-08 0.000112818
0.98 5.26527e-05 3.7215e-07 0.000112818
1.12 4.87805e-05 1.44998e-06 0.000112818
1.26 4.47848e-05 2.85658e-06 0.000112818
1.4 4.18397e-05 3.84271e-06 0.000112818
1.68 3.33843e-05 9.56657e-06 0.000112818
2.24 2.73264e-05 1.23833e-05 0.000112818
2.8 2.28947e-05 1.44617e-05 0.000112818
3.36 0 3.55703e-05 0.000112818
END DIST

Metal 4 OVER 1
DIST count 12 width 0.28
0.28 0.000111846 3.6075e-08 0.000112818
0.56 7.23534e-05 3.6075e-08 0.000112818
0.7 6.2654e-05 3.08658e-06 0.000112818
0.84 5.61877e-05 5.11674e-06 0.000112818
0.98 5.03093e-05 6.46664e-06 0.000112818
1.12 4.60263e-05 7.55853e-06 0.000112818
1.26 4.20334e-05 8.77518e-06 0.000112818
1.4 3.87579e-05 1.04046e-05 0.000112818
1.68 3.05343e-05 1.66851e-05 0.000112818
2.24 2.43807e-05 2.07585e-05 0.000112818
2.8 1.98902e-05 2.37385e-05 0.000112818
3.36 0 4.24821e-05 0.000112818
END DIST

Metal 4 OVER 2
DIST count 12 width 0.28
0.28 0.000108058 3.6075e-08 0.000112818
0.56 6.82986e-05 4.56378e-06 0.000112818
0.7 5.79976e-05 7.51034e-06 0.000112818
0.84 5.11117e-05 9.55429e-06 0.000112818
0.98 4.51826e-05 1.19864e-05 0.000112818
1.12 4.11928e-05 1.38144e-05 0.000112818
1.26 3.3835e-05 1.92188e-05 0.000112818
1.4 3.09309e-05 2.07038e-05 0.000112818
1.68 2.66975e-05 2.31434e-05 0.000112818
2.24 2.06646e-05 2.78352e-05 0.000112818
2.8 1.62759e-05 3.12498e-05 0.000112818
3.36 0 4.67866e-05 0.000112818
END DIST

Metal 4 OVER 3
DIST count 12 width 0.28
0.28 9.69886e-05 9.52993e-06 0.000112818
0.56 5.70316e-05 1.92195e-05 0.000112818
0.7 4.67918e-05 2.35489e-05 0.000112818
0.84 3.99541e-05 2.73851e-05 0.000112818
0.98 3.17973e-05 3.33637e-05 0.000112818
1.12 2.80662e-05 3.5507e-05 0.000112818
1.26 2.4422e-05 3.92118e-05 0.000112818
1.4 2.16904e-05 4.14392e-05 0.000112818
1.68 1.77944e-05 4.25274e-05 0.000112818
2.24 1.30866e-05 4.83216e-05 0.000112818
2.8 9.66496e-06 5.17823e-05 0.000112818
3.36 0 6.14768e-05 0.000112818
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.28

Metal 4 UNDER 5
DIST count 12 width 0.28
0.28 9.96219e-05 6.94433e-06 0.000112818
0.56 5.93331e-05 1.51928e-05 0.000112818
0.7 4.88745e-05 1.90554e-05 0.000112818
0.84 4.1868e-05 2.16255e-05 0.000112818
0.98 3.58524e-05 2.47821e-05 0.000112818
1.12 3.18118e-05 2.73793e-05 0.000112818
1.26 2.57842e-05 3.18669e-05 0.000112818
1.4 2.28601e-05 3.38253e-05 0.000112818
1.68 1.86642e-05 3.71634e-05 0.000112818
2.24 1.33109e-05 4.22099e-05 0.000112818
2.8 9.44184e-06 4.58565e-05 0.000112818
3.36 0 5.51294e-05 0.000112818
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.28

Metal 4 DIAGUNDER 5
DIST count 13 width 0.28
0 0 2.40577e-05 0.000112818
0.28 0 1.84762e-05 0.000112818
0.56 0 1.75432e-05 0.000112818
0.7 0 1.69795e-05 0.000112818
0.84 0 1.64958e-05 0.000112818
0.98 0 1.58959e-05 0.000112818
1.12 0 1.52801e-05 0.000112818
1.26 0 1.4747e-05 0.000112818
1.4 0 1.42807e-05 0.000112818
1.68 0 1.3323e-05 0.000112818
2.24 0 1.14955e-05 0.000112818
2.8 0 1.00974e-05 0.000112818
3.36 0 9.03716e-06 0.000112818
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.28

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 9.82873e-05 7.44676e-06 0.000112818
0.56 5.78408e-05 1.64459e-05 0.000112818
0.7 4.83963e-05 2.16702e-05 0.000112818
0.84 4.2133e-05 2.57756e-05 0.000112818
0.98 3.39627e-05 3.09748e-05 0.000112818
1.12 2.95107e-05 3.35355e-05 0.000112818
1.26 2.55464e-05 3.56069e-05 0.000112818
1.4 2.19368e-05 3.72653e-05 0.000112818
1.68 1.71136e-05 4.03493e-05 0.000112818
2.24 1.18375e-05 4.57673e-05 0.000112818
2.8 8.04279e-06 4.96653e-05 0.000112818
3.36 0 5.77756e-05 0.000112818
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.28
0.28 9.57792e-05 9.6715e-06 0.000112818
0.56 5.50991e-05 1.94152e-05 0.000112818
0.7 4.2586e-05 2.59669e-05 0.000112818
0.84 3.562e-05 2.88826e-05 0.000112818
0.98 2.97151e-05 3.24752e-05 0.000112818
1.12 2.57343e-05 3.54689e-05 0.000112818
1.26 2.17657e-05 3.82885e-05 0.000112818
1.4 1.87915e-05 4.06652e-05 0.000112818
1.68 1.45778e-05 4.46313e-05 0.000112818
2.24 9.67911e-06 4.99154e-05 0.000112818
2.8 6.17442e-06 5.37129e-05 0.000112818
3.36 0 6.00871e-05 0.000112818
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.28
0.28 8.68154e-05 1.83482e-05 0.000112818
0.56 4.49356e-05 3.2368e-05 0.000112818
0.7 3.45599e-05 3.81104e-05 0.000112818
0.84 2.76162e-05 4.27507e-05 0.000112818
0.98 2.18899e-05 4.73079e-05 0.000112818
1.12 1.80974e-05 5.04871e-05 0.000112818
1.26 1.45626e-05 5.45576e-05 0.000112818
1.4 1.19025e-05 5.72869e-05 0.000112818
1.68 8.25212e-06 5.92815e-05 0.000112818
2.24 5.14076e-06 6.4005e-05 0.000112818
2.8 2.91248e-06 6.66687e-05 0.000112818
3.36 0 6.99319e-05 0.000112818
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.44

Metal 5 RESOVER 0
DIST count 55 width 0.44
0 0 0 5.85537e-05
0 0.46 0 5.85537e-05
0 0.9 0 5.85537e-05
0 1.14 0 5.85537e-05
0 1.36 0 5.85537e-05
0 1.8 0 5.85537e-05
0 2.04 0 5.85537e-05
0 2.26 0 5.85537e-05
0 2.7 0 5.85537e-05
0 3.6 0 5.85537e-05
0.46 0.46 0 5.85537e-05
0.46 0.9 0 5.85537e-05
0.46 1.14 0 5.85537e-05
0.46 1.36 0 5.85537e-05
0.46 1.8 0 5.85537e-05
0.46 2.04 0 5.85537e-05
0.46 2.26 0 5.85537e-05
0.46 2.7 0 5.85537e-05
0.46 3.6 0 5.85537e-05
0.9 0.9 0 5.85537e-05
0.9 1.14 0 5.85537e-05
0.9 1.36 0 5.85537e-05
0.9 1.8 0 5.85537e-05
0.9 2.04 0 5.85537e-05
0.9 2.26 0 5.85537e-05
0.9 2.7 0 5.85537e-05
0.9 3.6 0 5.85537e-05
1.14 1.14 0 5.85537e-05
1.14 1.36 0 5.85537e-05
1.14 1.8 0 5.85537e-05
1.14 2.04 0 5.85537e-05
1.14 2.26 0 5.85537e-05
1.14 2.7 0 5.85537e-05
1.14 3.6 0 5.85537e-05
1.36 1.36 0 5.85537e-05
1.36 1.8 0 5.85537e-05
1.36 2.04 0 5.85537e-05
1.36 2.26 0 5.85537e-05
1.36 2.7 0 5.85537e-05
1.36 3.6 0 5.85537e-05
1.8 1.8 0 5.85537e-05
1.8 2.04 0 5.85537e-05
1.8 2.26 0 5.85537e-05
1.8 2.7 0 5.85537e-05
1.8 3.6 0 5.85537e-05
2.04 2.04 0 5.85537e-05
2.04 2.26 0 5.85537e-05
2.04 2.7 0 5.85537e-05
2.04 3.6 0 5.85537e-05
2.26 2.26 0 5.85537e-05
2.26 2.7 0 5.85537e-05
2.26 3.6 0 5.85537e-05
2.7 2.7 0 5.85537e-05
2.7 3.6 0 5.85537e-05
3.6 0 3.6 5.85537e-05
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.44
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.44
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.44
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.44
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.44

Metal 5 OVER 0
DIST count 12 width 0.44
0.46 0.000121758 3.44353e-08 2.92769e-05
0.92 7.81846e-05 3.44353e-08 2.92769e-05
1.15 6.69842e-05 3.44353e-08 2.92769e-05
1.38 5.96557e-05 3.44353e-08 2.92769e-05
1.61 5.32e-05 6.3657e-07 2.92769e-05
1.84 4.89507e-05 1.74344e-06 2.92769e-05
2.07 4.44608e-05 3.25282e-06 2.92769e-05
2.3 4.11626e-05 4.29963e-06 2.92769e-05
2.76 3.28232e-05 9.49617e-06 2.92769e-05
3.68 2.32342e-05 1.5368e-05 2.92769e-05
4.6 0 3.06791e-05 2.92769e-05
5.52 0 3.06791e-05 2.92769e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.44
0.46 0.000119706 3.44353e-08 2.92769e-05
0.92 7.59623e-05 3.44353e-08 2.92769e-05
1.15 6.4727e-05 1.01447e-06 2.92769e-05
1.38 5.71723e-05 2.91446e-06 2.92769e-05
1.61 5.0775e-05 4.89992e-06 2.92769e-05
1.84 4.64034e-05 6.58699e-06 2.92769e-05
2.07 4.20145e-05 8.25025e-06 2.92769e-05
2.3 3.86505e-05 9.67825e-06 2.92769e-05
2.76 3.06394e-05 1.50229e-05 2.92769e-05
3.68 2.1411e-05 2.17545e-05 2.92769e-05
4.6 0 4.141e-05 2.92769e-05
5.52 0 4.14103e-05 2.92769e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.44
0.46 0.000117431 3.44353e-08 2.92769e-05
0.92 7.35401e-05 1.37161e-06 2.92769e-05
1.15 6.22221e-05 4.12146e-06 2.92769e-05
1.38 5.48044e-05 6.02257e-06 2.92769e-05
1.61 4.82481e-05 8.35166e-06 2.92769e-05
1.84 4.39247e-05 1.02059e-05 2.92769e-05
2.07 3.93491e-05 1.21745e-05 2.92769e-05
2.3 3.59823e-05 1.37535e-05 2.92769e-05
2.76 2.83776e-05 1.89142e-05 2.92769e-05
3.68 1.95143e-05 2.58196e-05 2.92769e-05
4.6 0 4.48662e-05 2.92769e-05
5.52 0 4.48653e-05 2.92769e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.44
0.46 0.000113328 3.44353e-08 2.92769e-05
0.92 6.92733e-05 6.23253e-06 2.92769e-05
1.15 5.79028e-05 9.48059e-06 2.92769e-05
1.38 5.04418e-05 1.17567e-05 2.92769e-05
1.61 4.38616e-05 1.4512e-05 2.92769e-05
1.84 3.95229e-05 1.67412e-05 2.92769e-05
2.07 3.49667e-05 1.90184e-05 2.92769e-05
2.3 3.16059e-05 2.0888e-05 2.92769e-05
2.76 2.45858e-05 2.59004e-05 2.92769e-05
3.68 1.64897e-05 3.29707e-05 2.92769e-05
4.6 0 5.04393e-05 2.92769e-05
5.52 0 5.04412e-05 2.92769e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.44
0.46 0.000104153 9.89959e-06 2.92769e-05
0.92 6.01859e-05 1.9041e-05 2.92769e-05
1.15 4.89905e-05 2.36337e-05 2.92769e-05
1.38 4.16614e-05 2.68714e-05 2.92769e-05
1.61 3.53323e-05 3.05994e-05 2.92769e-05
1.84 3.1182e-05 3.36534e-05 2.92769e-05
2.07 2.50992e-05 3.81321e-05 2.92769e-05
2.3 2.20915e-05 4.03082e-05 2.92769e-05
2.76 1.77783e-05 4.35334e-05 2.92769e-05
3.68 1.13859e-05 5.0142e-05 2.92769e-05
4.6 0 6.42181e-05 2.92769e-05
5.52 0 6.42138e-05 2.92769e-05
END DIST

Metal 5 UNDER
WIDTH Table 0 entries: 

Metal 5 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0