Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 5
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.23

Metal 1 RESOVER 0
DIST count 55 width 0.23
0 0 0 0.000628392
0 0.33 0 0.000628392
0 0.56 0 0.000628392
0 0.775 0 0.000628392
0 0.89 0 0.000628392
0 1.12 0 0.000628392
0 1.335 0 0.000628392
0 1.45 0 0.000628392
0 1.68 0 0.000628392
0 2.24 0 0.000628392
0.33 0.33 0 0.000628392
0.33 0.56 0 0.000628392
0.33 0.775 0 0.000628392
0.33 0.89 0 0.000628392
0.33 1.12 0 0.000628392
0.33 1.335 0 0.000628392
0.33 1.45 0 0.000628392
0.33 1.68 0 0.000628392
0.33 2.24 0 0.000628392
0.56 0.56 0 0.000628392
0.56 0.775 0 0.000628392
0.56 0.89 0 0.000628392
0.56 1.12 0 0.000628392
0.56 1.335 0 0.000628392
0.56 1.45 0 0.000628392
0.56 1.68 0 0.000628392
0.56 2.24 0 0.000628392
0.775 0.775 0 0.000628392
0.775 0.89 0 0.000628392
0.775 1.12 0 0.000628392
0.775 1.335 0 0.000628392
0.775 1.45 0 0.000628392
0.775 1.68 0 0.000628392
0.775 2.24 0 0.000628392
0.89 0.89 0 0.000628392
0.89 1.12 0 0.000628392
0.89 1.335 0 0.000628392
0.89 1.45 0 0.000628392
0.89 1.68 0 0.000628392
0.89 2.24 0 0.000628392
1.12 1.12 0 0.000628392
1.12 1.335 0 0.000628392
1.12 1.45 0 0.000628392
1.12 1.68 0 0.000628392
1.12 2.24 0 0.000628392
1.335 1.335 0 0.000628392
1.335 1.45 0 0.000628392
1.335 1.68 0 0.000628392
1.335 2.24 0 0.000628392
1.45 1.45 0 0.000628392
1.45 1.68 0 0.000628392
1.45 2.24 0 0.000628392
1.68 1.68 0 0.000628392
1.68 2.24 0 0.000628392
2.24 0 2.24 0.000628392
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.23

Metal 1 OVER 0
DIST count 12 width 0.23
0.23 0.000163057 2.15395e-06 0.000314196
0.46 8.80769e-05 8.7157e-06 0.000314196
0.575 7.24463e-05 1.15154e-05 0.000314196
0.69 6.22125e-05 1.37277e-05 0.000314196
0.805 5.37373e-05 1.61206e-05 0.000314196
0.92 4.79741e-05 1.8015e-05 0.000314196
1.035 4.28301e-05 2.01201e-05 0.000314196
1.15 3.84616e-05 2.20927e-05 0.000314196
1.38 2.99817e-05 2.72569e-05 0.000314196
1.84 2.26854e-05 3.18475e-05 0.000314196
2.3 1.74027e-05 3.5277e-05 0.000314196
2.76 0 5.1279e-05 0.000314196
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.23

Metal 1 UNDER 2
DIST count 12 width 0.23
0.23 0.000144459 2.14696e-05 0.000314196
0.46 6.75627e-05 3.7707e-05 0.000314196
0.575 5.08849e-05 4.38108e-05 0.000314196
0.69 4.08569e-05 4.80842e-05 0.000314196
0.805 3.25e-05 5.29257e-05 0.000314196
0.92 2.70184e-05 5.68757e-05 0.000314196
1.035 2.22637e-05 6.05838e-05 0.000314196
1.15 1.83982e-05 6.37722e-05 0.000314196
1.38 1.30485e-05 6.81848e-05 0.000314196
1.84 8.22117e-06 7.31169e-05 0.000314196
2.3 4.86978e-06 7.66241e-05 0.000314196
2.76 0 8.16115e-05 0.000314196
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.23
0.23 0.000156199 8.90472e-06 0.000314196
0.46 8.04996e-05 1.77468e-05 0.000314196
0.575 6.45163e-05 2.17494e-05 0.000314196
0.69 5.40298e-05 2.4797e-05 0.000314196
0.805 4.36082e-05 2.98796e-05 0.000314196
0.92 3.78495e-05 3.23084e-05 0.000314196
1.035 3.13022e-05 3.65202e-05 0.000314196
1.15 2.70961e-05 3.89581e-05 0.000314196
1.38 2.12752e-05 4.23316e-05 0.000314196
1.84 1.44165e-05 4.8074e-05 0.000314196
2.3 9.51445e-06 5.22968e-05 0.000314196
2.76 0 6.12979e-05 0.000314196
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.23
0.23 0.000159351 5.9497e-06 0.000314196
0.46 8.39158e-05 1.37398e-05 0.000314196
0.575 6.80646e-05 1.72296e-05 0.000314196
0.69 5.81269e-05 2.06691e-05 0.000314196
0.805 4.95072e-05 2.3381e-05 0.000314196
0.92 4.35787e-05 2.6053e-05 0.000314196
1.035 3.62028e-05 2.97244e-05 0.000314196
1.15 3.19528e-05 3.22191e-05 0.000314196
1.38 2.55959e-05 3.56458e-05 0.000314196
1.84 1.69241e-05 4.20087e-05 0.000314196
2.3 1.18038e-05 4.59755e-05 0.000314196
2.76 0 5.69076e-05 0.000314196
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.23
0.23 0.000160797 4.59395e-06 0.000314196
0.46 8.55254e-05 1.18334e-05 0.000314196
0.575 6.97552e-05 1.51776e-05 0.000314196
0.69 6.02176e-05 1.86512e-05 0.000314196
0.805 5.16962e-05 2.12185e-05 0.000314196
0.92 4.61333e-05 2.4165e-05 0.000314196
1.035 4.05487e-05 2.58996e-05 0.000314196
1.15 3.57085e-05 2.75151e-05 0.000314196
1.38 2.73548e-05 3.27477e-05 0.000314196
1.84 1.97279e-05 3.7689e-05 0.000314196
2.3 1.4328e-05 4.16786e-05 0.000314196
2.76 0 5.49404e-05 0.000314196
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.23

Metal 1 DIAGUNDER 2
DIST count 13 width 0.23
0 0 3.05887e-05 0.000314196
0.23 0 2.38713e-05 0.000314196
0.46 0 2.10179e-05 0.000314196
0.575 0 1.96028e-05 0.000314196
0.69 0 1.84144e-05 0.000314196
0.805 0 1.73956e-05 0.000314196
0.92 0 1.62536e-05 0.000314196
1.035 0 1.51498e-05 0.000314196
1.15 0 1.41253e-05 0.000314196
1.38 0 1.24479e-05 0.000314196
1.84 0 9.90444e-06 0.000314196
2.3 0 7.93588e-06 0.000314196
2.76 0 6.54218e-06 0.000314196
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.23
0 0 1.35067e-05 0.000314196
0.23 0 1.10702e-05 0.000314196
0.46 0 1.08688e-05 0.000314196
0.575 0 1.06726e-05 0.000314196
0.69 0 1.04983e-05 0.000314196
0.805 0 1.03396e-05 0.000314196
0.92 0 1.00569e-05 0.000314196
1.035 0 9.71869e-06 0.000314196
1.15 0 9.37205e-06 0.000314196
1.38 0 8.80406e-06 0.000314196
1.84 0 7.80801e-06 0.000314196
2.3 0 6.74581e-06 0.000314196
2.76 0 5.93619e-06 0.000314196
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.23
0 0 8.92462e-06 0.000314196
0.23 0 7.05448e-06 0.000314196
0.46 0 7.11798e-06 0.000314196
0.575 0 7.08017e-06 0.000314196
0.69 0 7.04082e-06 0.000314196
0.805 0 7.00305e-06 0.000314196
0.92 0 6.91583e-06 0.000314196
1.035 0 6.79723e-06 0.000314196
1.15 0 6.66985e-06 0.000314196
1.38 0 6.46102e-06 0.000314196
1.84 0 6.0489e-06 0.000314196
2.3 0 5.50417e-06 0.000314196
2.76 0 5.07036e-06 0.000314196
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.23
0 0 7.06809e-06 0.000314196
0.23 0 5.63195e-06 0.000314196
0.46 0 5.70182e-06 0.000314196
0.575 0 5.70272e-06 0.000314196
0.69 0 5.69866e-06 0.000314196
0.805 0 5.6969e-06 0.000314196
0.92 0 5.65365e-06 0.000314196
1.035 0 5.61605e-06 0.000314196
1.15 0 5.58305e-06 0.000314196
1.38 0 5.5278e-06 0.000314196
1.84 0 5.29618e-06 0.000314196
2.3 0 5.01921e-06 0.000314196
2.76 0 4.82051e-06 0.000314196
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.28

Metal 2 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000516178
0 0.28 0 0.000516178
0 0.56 0 0.000516178
0 0.7 0 0.000516178
0 0.84 0 0.000516178
0 1.12 0 0.000516178
0 1.26 0 0.000516178
0 1.4 0 0.000516178
0 1.68 0 0.000516178
0 2.24 0 0.000516178
0.28 0.28 0 0.000516178
0.28 0.56 0 0.000516178
0.28 0.7 0 0.000516178
0.28 0.84 0 0.000516178
0.28 1.12 0 0.000516178
0.28 1.26 0 0.000516178
0.28 1.4 0 0.000516178
0.28 1.68 0 0.000516178
0.28 2.24 0 0.000516178
0.56 0.56 0 0.000516178
0.56 0.7 0 0.000516178
0.56 0.84 0 0.000516178
0.56 1.12 0 0.000516178
0.56 1.26 0 0.000516178
0.56 1.4 0 0.000516178
0.56 1.68 0 0.000516178
0.56 2.24 0 0.000516178
0.7 0.7 0 0.000516178
0.7 0.84 0 0.000516178
0.7 1.12 0 0.000516178
0.7 1.26 0 0.000516178
0.7 1.4 0 0.000516178
0.7 1.68 0 0.000516178
0.7 2.24 0 0.000516178
0.84 0.84 0 0.000516178
0.84 1.12 0 0.000516178
0.84 1.26 0 0.000516178
0.84 1.4 0 0.000516178
0.84 1.68 0 0.000516178
0.84 2.24 0 0.000516178
1.12 1.12 0 0.000516178
1.12 1.26 0 0.000516178
1.12 1.4 0 0.000516178
1.12 1.68 0 0.000516178
1.12 2.24 0 0.000516178
1.26 1.26 0 0.000516178
1.26 1.4 0 0.000516178
1.26 1.68 0 0.000516178
1.26 2.24 0 0.000516178
1.4 1.4 0 0.000516178
1.4 1.68 0 0.000516178
1.4 2.24 0 0.000516178
1.68 1.68 0 0.000516178
1.68 2.24 0 0.000516178
2.24 0 2.24 0.000516178
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.28
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.28

Metal 2 OVER 0
DIST count 12 width 0.28
0.28 0.000145528 5.41125e-08 0.000258089
0.56 8.34884e-05 2.17035e-06 0.000258089
0.7 6.98235e-05 4.67518e-06 0.000258089
0.84 6.11877e-05 6.34393e-06 0.000258089
0.98 5.358e-05 8.45058e-06 0.000258089
1.12 4.8685e-05 9.85857e-06 0.000258089
1.26 4.39029e-05 1.17166e-05 0.000258089
1.4 4.01167e-05 1.31899e-05 0.000258089
1.68 3.16214e-05 1.84773e-05 0.000258089
2.24 2.46211e-05 2.24319e-05 0.000258089
2.8 1.95511e-05 2.53605e-05 0.000258089
3.36 0 4.32928e-05 0.000258089
END DIST

Metal 2 OVER 1
DIST count 12 width 0.28
0.28 0.000127901 1.74964e-05 0.000258089
0.56 6.57882e-05 3.12019e-05 0.000258089
0.7 5.23701e-05 3.71457e-05 0.000258089
0.84 4.38947e-05 4.20804e-05 0.000258089
0.98 3.44583e-05 4.88573e-05 0.000258089
1.12 2.99193e-05 5.13593e-05 0.000258089
1.26 2.58323e-05 5.5666e-05 0.000258089
1.4 2.25855e-05 5.8487e-05 0.000258089
1.68 1.79981e-05 6.01819e-05 0.000258089
2.24 1.17089e-05 6.75808e-05 0.000258089
2.8 8.43506e-06 7.10329e-05 0.000258089
3.36 0 7.96029e-05 0.000258089
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.28

Metal 2 UNDER 3
DIST count 12 width 0.28
0.28 0.000123557 2.08348e-05 0.000258089
0.56 6.07542e-05 3.53194e-05 0.000258089
0.7 4.70284e-05 4.16713e-05 0.000258089
0.84 3.83462e-05 4.68631e-05 0.000258089
0.98 2.8577e-05 5.41117e-05 0.000258089
1.12 2.39997e-05 5.69108e-05 0.000258089
1.26 1.99499e-05 6.12879e-05 0.000258089
1.4 1.67061e-05 6.42081e-05 0.000258089
1.68 1.22074e-05 6.56788e-05 0.000258089
2.24 7.9013e-06 7.14415e-05 0.000258089
2.8 4.87136e-06 7.46794e-05 0.000258089
3.36 0 7.97079e-05 0.000258089
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.28
0.28 0.000136511 5.81757e-06 0.000258089
0.56 7.36057e-05 1.42589e-05 0.000258089
0.7 5.95455e-05 1.81869e-05 0.000258089
0.84 5.06362e-05 2.07829e-05 0.000258089
0.98 4.27141e-05 2.41455e-05 0.000258089
1.12 3.76002e-05 2.65062e-05 0.000258089
1.26 3.09573e-05 3.10463e-05 0.000258089
1.4 2.71282e-05 3.33331e-05 0.000258089
1.68 2.17146e-05 3.67142e-05 0.000258089
2.24 1.41006e-05 4.33815e-05 0.000258089
2.8 9.52324e-06 4.73658e-05 0.000258089
3.36 0 5.64406e-05 0.000258089
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000140881 1.58082e-06 0.000258089
0.56 7.83088e-05 8.56144e-06 0.000258089
0.7 6.43751e-05 1.18038e-05 0.000258089
0.84 5.59296e-05 1.46154e-05 0.000258089
0.98 4.85851e-05 1.76041e-05 0.000258089
1.12 4.30742e-05 1.93824e-05 0.000258089
1.26 3.8021e-05 2.10809e-05 0.000258089
1.4 3.39078e-05 2.31773e-05 0.000258089
1.68 2.60918e-05 2.81054e-05 0.000258089
2.24 1.88683e-05 3.34902e-05 0.000258089
2.8 1.36771e-05 3.74365e-05 0.000258089
3.36 0 5.01726e-05 0.000258089
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.28

Metal 2 DIAGUNDER 3
DIST count 13 width 0.28
0 0 3.40105e-05 0.000258089
0.28 0 2.57254e-05 0.000258089
0.56 0 2.19659e-05 0.000258089
0.7 0 2.04123e-05 0.000258089
0.84 0 1.91467e-05 0.000258089
0.98 0 1.8032e-05 0.000258089
1.12 0 1.66627e-05 0.000258089
1.26 0 1.55021e-05 0.000258089
1.4 0 1.45059e-05 0.000258089
1.68 0 1.28844e-05 0.000258089
2.24 0 1.03164e-05 0.000258089
2.8 0 8.40022e-06 0.000258089
3.36 0 7.10253e-06 0.000258089
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.28
0 0 1.59879e-05 0.000258089
0.28 0 1.28771e-05 0.000258089
0.56 0 1.24304e-05 0.000258089
0.7 0 1.21836e-05 0.000258089
0.84 0 1.19826e-05 0.000258089
0.98 0 1.17674e-05 0.000258089
1.12 0 1.12587e-05 0.000258089
1.26 0 1.08275e-05 0.000258089
1.4 0 1.04574e-05 0.000258089
1.68 0 9.85503e-06 0.000258089
2.24 0 8.60747e-06 0.000258089
2.8 0 7.4211e-06 0.000258089
3.36 0 6.61766e-06 0.000258089
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.28
0 0 1.17961e-05 0.000258089
0.28 0 9.2121e-06 0.000258089
0.56 0 9.26526e-06 0.000258089
0.7 0 9.2004e-06 0.000258089
0.84 0 9.14277e-06 0.000258089
0.98 0 9.0695e-06 0.000258089
1.12 0 8.93618e-06 0.000258089
1.26 0 8.82166e-06 0.000258089
1.4 0 8.72213e-06 0.000258089
1.68 0 8.48676e-06 0.000258089
2.24 0 7.82585e-06 0.000258089
2.8 0 7.23427e-06 0.000258089
3.36 0 6.77085e-06 0.000258089
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.28

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.28
0.28 0.000109014 3.7333e-05 0.000258089
0.56 4.62623e-05 5.93013e-05 0.000258089
0.7 3.2953e-05 6.84201e-05 0.000258089
0.84 2.45551e-05 7.63838e-05 0.000258089
0.98 1.78732e-05 8.26268e-05 0.000258089
1.12 1.36293e-05 8.5984e-05 0.000258089
1.26 1.03985e-05 9.16087e-05 0.000258089
1.4 7.90503e-06 9.46984e-05 0.000258089
1.68 4.4469e-06 9.41025e-05 0.000258089
2.24 2.60119e-06 9.8561e-05 0.000258089
2.8 0 0.000101464 0.000258089
3.36 0 0.000101692 0.000258089
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.28
0.28 0.000121388 2.28209e-05 0.000258089
0.56 5.58518e-05 4.16082e-05 0.000258089
0.7 4.24563e-05 4.83365e-05 0.000258089
0.84 3.39662e-05 5.37824e-05 0.000258089
0.98 2.68201e-05 5.89361e-05 0.000258089
1.12 2.22177e-05 6.20366e-05 0.000258089
1.26 1.81944e-05 6.67051e-05 0.000258089
1.4 1.49806e-05 6.9906e-05 0.000258089
1.68 1.05236e-05 7.2151e-05 0.000258089
2.24 6.62981e-06 7.7591e-05 0.000258089
2.8 3.91499e-06 8.07827e-05 0.000258089
3.36 0 8.50585e-05 0.000258089
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000124974 1.95208e-05 0.000258089
0.56 6.23675e-05 3.43412e-05 0.000258089
0.7 4.87191e-05 4.08332e-05 0.000258089
0.84 4.09319e-05 4.6834e-05 0.000258089
0.98 3.14537e-05 5.48404e-05 0.000258089
1.12 2.63387e-05 5.76234e-05 0.000258089
1.26 2.20083e-05 6.13336e-05 0.000258089
1.4 1.83949e-05 6.42656e-05 0.000258089
1.68 1.34386e-05 6.61515e-05 0.000258089
2.24 8.91706e-06 7.20801e-05 0.000258089
2.8 5.72096e-06 7.56667e-05 0.000258089
3.36 0 8.16832e-05 0.000258089
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.28

Metal 3 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000516178
0 0.28 0 0.000516178
0 0.56 0 0.000516178
0 0.7 0 0.000516178
0 0.84 0 0.000516178
0 1.12 0 0.000516178
0 1.26 0 0.000516178
0 1.4 0 0.000516178
0 1.68 0 0.000516178
0 2.24 0 0.000516178
0.28 0.28 0 0.000516178
0.28 0.56 0 0.000516178
0.28 0.7 0 0.000516178
0.28 0.84 0 0.000516178
0.28 1.12 0 0.000516178
0.28 1.26 0 0.000516178
0.28 1.4 0 0.000516178
0.28 1.68 0 0.000516178
0.28 2.24 0 0.000516178
0.56 0.56 0 0.000516178
0.56 0.7 0 0.000516178
0.56 0.84 0 0.000516178
0.56 1.12 0 0.000516178
0.56 1.26 0 0.000516178
0.56 1.4 0 0.000516178
0.56 1.68 0 0.000516178
0.56 2.24 0 0.000516178
0.7 0.7 0 0.000516178
0.7 0.84 0 0.000516178
0.7 1.12 0 0.000516178
0.7 1.26 0 0.000516178
0.7 1.4 0 0.000516178
0.7 1.68 0 0.000516178
0.7 2.24 0 0.000516178
0.84 0.84 0 0.000516178
0.84 1.12 0 0.000516178
0.84 1.26 0 0.000516178
0.84 1.4 0 0.000516178
0.84 1.68 0 0.000516178
0.84 2.24 0 0.000516178
1.12 1.12 0 0.000516178
1.12 1.26 0 0.000516178
1.12 1.4 0 0.000516178
1.12 1.68 0 0.000516178
1.12 2.24 0 0.000516178
1.26 1.26 0 0.000516178
1.26 1.4 0 0.000516178
1.26 1.68 0 0.000516178
1.26 2.24 0 0.000516178
1.4 1.4 0 0.000516178
1.4 1.68 0 0.000516178
1.4 2.24 0 0.000516178
1.68 1.68 0 0.000516178
1.68 2.24 0 0.000516178
2.24 0 2.24 0.000516178
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.28
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.28
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.28

Metal 3 OVER 0
DIST count 12 width 0.28
0.28 0.000149147 5.41126e-08 0.000258089
0.56 8.72777e-05 5.41125e-08 0.000258089
0.7 7.36868e-05 1.09439e-07 0.000258089
0.84 6.51071e-05 1.59481e-06 0.000258089
0.98 5.75535e-05 3.47437e-06 0.000258089
1.12 5.2699e-05 4.72031e-06 0.000258089
1.26 4.79471e-05 6.36621e-06 0.000258089
1.4 4.41956e-05 7.64549e-06 0.000258089
1.68 3.5025e-05 1.33875e-05 0.000258089
2.24 2.79808e-05 1.68495e-05 0.000258089
2.8 2.28612e-05 1.94283e-05 0.000258089
3.36 0 4.03687e-05 0.000258089
END DIST

Metal 3 OVER 1
DIST count 12 width 0.28
0.28 0.00014271 5.41126e-08 0.000258089
0.56 8.04309e-05 7.59638e-06 0.000258089
0.7 6.6686e-05 1.10551e-05 0.000258089
0.84 5.79942e-05 1.34444e-05 0.000258089
0.98 5.03198e-05 1.63875e-05 0.000258089
1.12 4.53787e-05 1.83125e-05 0.000258089
1.26 3.74901e-05 2.4042e-05 0.000258089
1.4 3.38259e-05 2.59991e-05 0.000258089
1.68 2.86306e-05 2.87366e-05 0.000258089
2.24 2.18693e-05 3.40769e-05 0.000258089
2.8 1.69883e-05 3.80158e-05 0.000258089
3.36 0 5.42918e-05 0.000258089
END DIST

Metal 3 OVER 2
DIST count 12 width 0.28
0.28 0.000128152 1.69656e-05 0.000258089
0.56 6.60121e-05 3.05937e-05 0.000258089
0.7 5.25818e-05 3.65123e-05 0.000258089
0.84 4.40994e-05 4.14685e-05 0.000258089
0.98 3.45604e-05 4.83452e-05 0.000258089
1.12 3.00189e-05 5.08297e-05 0.000258089
1.26 2.59294e-05 5.51933e-05 0.000258089
1.4 2.26819e-05 5.80158e-05 0.000258089
1.68 1.80901e-05 5.95578e-05 0.000258089
2.24 1.17377e-05 6.70813e-05 0.000258089
2.8 8.46903e-06 7.05157e-05 0.000258089
3.36 0 7.91102e-05 0.000258089
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.28

Metal 3 UNDER 4
DIST count 12 width 0.28
0.28 0.000125587 1.90628e-05 0.000258089
0.56 6.29907e-05 3.30531e-05 0.000258089
0.7 4.93419e-05 3.91757e-05 0.000258089
0.84 4.07139e-05 4.42418e-05 0.000258089
0.98 3.00943e-05 5.22146e-05 0.000258089
1.12 2.55586e-05 5.48415e-05 0.000258089
1.26 2.15234e-05 5.91472e-05 0.000258089
1.4 1.82874e-05 6.19806e-05 0.000258089
1.68 1.37995e-05 6.32794e-05 0.000258089
2.24 9.23201e-06 6.92481e-05 0.000258089
2.8 5.99988e-06 7.26566e-05 0.000258089
3.36 0 7.87899e-05 0.000258089
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.28
0.28 0.000140534 1.92569e-06 0.000258089
0.56 7.78682e-05 9.39598e-06 0.000258089
0.7 6.38979e-05 1.28714e-05 0.000258089
0.84 5.57536e-05 1.60929e-05 0.000258089
0.98 4.87202e-05 1.97107e-05 0.000258089
1.12 4.30953e-05 2.18062e-05 0.000258089
1.26 3.7881e-05 2.36446e-05 0.000258089
1.4 3.33952e-05 2.50449e-05 0.000258089
1.68 2.55249e-05 3.01912e-05 0.000258089
2.24 1.83947e-05 3.58426e-05 0.000258089
2.8 1.32766e-05 3.99811e-05 0.000258089
3.36 0 5.25171e-05 0.000258089
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.28

Metal 3 DIAGUNDER 4
DIST count 13 width 0.28
0 0 3.528e-05 0.000258089
0.28 0 2.63902e-05 0.000258089
0.56 0 2.28488e-05 0.000258089
0.7 0 2.13215e-05 0.000258089
0.84 0 2.00775e-05 0.000258089
0.98 0 1.89824e-05 0.000258089
1.12 0 1.7642e-05 0.000258089
1.26 0 1.6506e-05 0.000258089
1.4 0 1.55309e-05 0.000258089
1.68 0 1.39436e-05 0.000258089
2.24 0 1.14151e-05 0.000258089
2.8 0 9.51551e-06 0.000258089
3.36 0 8.22902e-06 0.000258089
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.28
0 0 1.76072e-05 0.000258089
0.28 0 1.41002e-05 0.000258089
0.56 0 1.38934e-05 0.000258089
0.7 0 1.36856e-05 0.000258089
0.84 0 1.35036e-05 0.000258089
0.98 0 1.32927e-05 0.000258089
1.12 0 1.29589e-05 0.000258089
1.26 0 1.26721e-05 0.000258089
1.4 0 1.24229e-05 0.000258089
1.68 0 1.18997e-05 0.000258089
2.24 0 1.06498e-05 0.000258089
2.8 0 9.58782e-06 0.000258089
3.36 0 8.78626e-06 0.000258089
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.28

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.28
0.28 0.00012156 2.24446e-05 0.000258089
0.56 5.58669e-05 4.13585e-05 0.000258089
0.7 4.24505e-05 4.80276e-05 0.000258089
0.84 3.39443e-05 5.35643e-05 0.000258089
0.98 2.68018e-05 5.87226e-05 0.000258089
1.12 2.22045e-05 6.18067e-05 0.000258089
1.26 1.81819e-05 6.66481e-05 0.000258089
1.4 1.49681e-05 6.98655e-05 0.000258089
1.68 1.0511e-05 7.16063e-05 0.000258089
2.24 6.61629e-06 7.72476e-05 0.000258089
2.8 3.90075e-06 8.03704e-05 0.000258089
3.36 0 8.45788e-05 0.000258089
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000135669 6.26641e-06 0.000258089
0.56 7.26124e-05 1.61187e-05 0.000258089
0.7 5.95447e-05 2.12499e-05 0.000258089
0.84 5.13022e-05 2.60307e-05 0.000258089
0.98 4.145e-05 3.17496e-05 0.000258089
1.12 3.58888e-05 3.41194e-05 0.000258089
1.26 3.09329e-05 3.63298e-05 0.000258089
1.4 2.65744e-05 3.85401e-05 0.000258089
1.68 1.94935e-05 4.27747e-05 0.000258089
2.24 1.32681e-05 4.88484e-05 0.000258089
2.8 8.80041e-06 5.33047e-05 0.000258089
3.36 0 6.20964e-05 0.000258089
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.28
0.28 0.000109026 3.70804e-05 0.000258089
0.56 4.62679e-05 5.89619e-05 0.000258089
0.7 3.29571e-05 6.80504e-05 0.000258089
0.84 2.45582e-05 7.60688e-05 0.000258089
0.98 1.78755e-05 8.2318e-05 0.000258089
1.12 1.3631e-05 8.56187e-05 0.000258089
1.26 1.03998e-05 9.13478e-05 0.000258089
1.4 7.90603e-06 9.44496e-05 0.000258089
1.68 4.44745e-06 9.366e-05 0.000258089
2.24 2.60151e-06 9.81881e-05 0.000258089
2.8 0 0.000101088 0.000258089
3.36 0 0.000101314 0.000258089
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.28
0.28 0.000122729 2.12339e-05 0.000258089
0.56 5.98102e-05 3.69372e-05 0.000258089
0.7 4.34041e-05 4.6517e-05 0.000258089
0.84 3.56876e-05 5.2532e-05 0.000258089
0.98 2.92943e-05 5.74759e-05 0.000258089
1.12 2.41091e-05 6.05218e-05 0.000258089
1.26 1.97538e-05 6.44818e-05 0.000258089
1.4 1.62801e-05 6.76103e-05 0.000258089
1.68 1.14191e-05 6.96594e-05 0.000258089
2.24 7.2931e-06 7.53865e-05 0.000258089
2.8 4.40153e-06 7.8743e-05 0.000258089
3.36 0 8.34964e-05 0.000258089
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.28

Metal 4 RESOVER 0
DIST count 55 width 0.28
0 0 0 0.000516178
0 0.28 0 0.000516178
0 0.56 0 0.000516178
0 0.7 0 0.000516178
0 0.84 0 0.000516178
0 1.12 0 0.000516178
0 1.26 0 0.000516178
0 1.4 0 0.000516178
0 1.68 0 0.000516178
0 2.24 0 0.000516178
0.28 0.28 0 0.000516178
0.28 0.56 0 0.000516178
0.28 0.7 0 0.000516178
0.28 0.84 0 0.000516178
0.28 1.12 0 0.000516178
0.28 1.26 0 0.000516178
0.28 1.4 0 0.000516178
0.28 1.68 0 0.000516178
0.28 2.24 0 0.000516178
0.56 0.56 0 0.000516178
0.56 0.7 0 0.000516178
0.56 0.84 0 0.000516178
0.56 1.12 0 0.000516178
0.56 1.26 0 0.000516178
0.56 1.4 0 0.000516178
0.56 1.68 0 0.000516178
0.56 2.24 0 0.000516178
0.7 0.7 0 0.000516178
0.7 0.84 0 0.000516178
0.7 1.12 0 0.000516178
0.7 1.26 0 0.000516178
0.7 1.4 0 0.000516178
0.7 1.68 0 0.000516178
0.7 2.24 0 0.000516178
0.84 0.84 0 0.000516178
0.84 1.12 0 0.000516178
0.84 1.26 0 0.000516178
0.84 1.4 0 0.000516178
0.84 1.68 0 0.000516178
0.84 2.24 0 0.000516178
1.12 1.12 0 0.000516178
1.12 1.26 0 0.000516178
1.12 1.4 0 0.000516178
1.12 1.68 0 0.000516178
1.12 2.24 0 0.000516178
1.26 1.26 0 0.000516178
1.26 1.4 0 0.000516178
1.26 1.68 0 0.000516178
1.26 2.24 0 0.000516178
1.4 1.4 0 0.000516178
1.4 1.68 0 0.000516178
1.4 2.24 0 0.000516178
1.68 1.68 0 0.000516178
1.68 2.24 0 0.000516178
2.24 0 2.24 0.000516178
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.28
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.28
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.28
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.28

Metal 4 OVER 0
DIST count 12 width 0.28
0.28 0.000150486 5.41125e-08 0.000258089
0.56 8.88158e-05 5.41126e-08 0.000258089
0.7 7.53255e-05 5.41126e-08 0.000258089
0.84 6.68127e-05 5.41126e-08 0.000258089
0.98 5.93429e-05 1.17098e-06 0.000258089
1.12 5.45446e-05 2.30385e-06 0.000258089
1.26 4.98652e-05 3.79153e-06 0.000258089
1.4 4.61717e-05 4.93777e-06 0.000258089
1.68 3.68687e-05 1.07082e-05 0.000258089
2.24 2.98679e-05 1.38417e-05 0.000258089
2.8 2.47677e-05 1.6188e-05 0.000258089
3.36 0 3.88738e-05 0.000258089
END DIST

Metal 4 OVER 1
DIST count 12 width 0.28
0.28 0.000147177 5.41125e-08 0.000258089
0.56 8.52598e-05 1.46733e-06 0.000258089
0.7 7.22034e-05 4.86649e-06 0.000258089
0.84 6.39853e-05 7.15414e-06 0.000258089
0.98 5.65353e-05 8.76907e-06 0.000258089
1.12 5.123e-05 9.94966e-06 0.000258089
1.26 4.63956e-05 1.12358e-05 0.000258089
1.4 4.239e-05 1.33203e-05 0.000258089
1.68 3.33463e-05 1.97137e-05 0.000258089
2.24 2.62862e-05 2.43529e-05 0.000258089
2.8 2.11599e-05 2.78003e-05 0.000258089
3.36 0 4.76908e-05 0.000258089
END DIST

Metal 4 OVER 2
DIST count 12 width 0.28
0.28 0.000142397 1.0078e-07 0.000258089
0.56 8.01861e-05 7.61499e-06 0.000258089
0.7 6.64734e-05 1.10286e-05 0.000258089
0.84 5.78018e-05 1.34095e-05 0.000258089
0.98 5.01538e-05 1.63145e-05 0.000258089
1.12 4.5229e-05 1.81919e-05 0.000258089
1.26 3.74685e-05 2.38034e-05 0.000258089
1.4 3.38141e-05 2.57406e-05 0.000258089
1.68 2.86361e-05 2.84145e-05 0.000258089
2.24 2.18553e-05 3.37503e-05 0.000258089
2.8 1.69557e-05 3.76903e-05 0.000258089
3.36 0 5.39207e-05 0.000258089
END DIST

Metal 4 OVER 3
DIST count 12 width 0.28
0.28 0.000127999 1.7002e-05 0.000258089
0.56 6.59045e-05 3.05387e-05 0.000258089
0.7 5.24963e-05 3.6421e-05 0.000258089
0.84 4.40277e-05 4.13672e-05 0.000258089
0.98 3.4576e-05 4.81471e-05 0.000258089
1.12 3.00421e-05 5.0641e-05 0.000258089
1.26 2.5962e-05 5.50011e-05 0.000258089
1.4 2.2721e-05 5.78098e-05 0.000258089
1.68 1.81407e-05 5.92296e-05 0.000258089
2.24 1.18077e-05 6.68045e-05 0.000258089
2.8 8.51565e-06 7.02572e-05 0.000258089
3.36 0 7.88942e-05 0.000258089
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.28

Metal 4 UNDER 5
DIST count 12 width 0.28
0.28 0.000131848 1.111e-05 0.000258089
0.56 6.91739e-05 2.19412e-05 0.000258089
0.7 5.53524e-05 2.68022e-05 0.000258089
0.84 4.65984e-05 2.99533e-05 0.000258089
0.98 3.89685e-05 3.3938e-05 0.000258089
1.12 3.40551e-05 3.6834e-05 0.000258089
1.26 2.77386e-05 4.15931e-05 0.000258089
1.4 2.41624e-05 4.41636e-05 0.000258089
1.68 1.91157e-05 4.80771e-05 0.000258089
2.24 1.23174e-05 5.46481e-05 0.000258089
2.8 8.42518e-06 5.84528e-05 0.000258089
3.36 0 6.6812e-05 0.000258089
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.28

Metal 4 DIAGUNDER 5
DIST count 13 width 0.28
0 0 3.14434e-05 0.000258089
0.28 0 2.4725e-05 0.000258089
0.56 0 2.30366e-05 0.000258089
0.7 0 2.19921e-05 0.000258089
0.84 0 2.11073e-05 0.000258089
0.98 0 2.02868e-05 0.000258089
1.12 0 1.9304e-05 0.000258089
1.26 0 1.84573e-05 0.000258089
1.4 0 1.77198e-05 0.000258089
1.68 0 1.6387e-05 0.000258089
2.24 0 1.39527e-05 0.000258089
2.8 0 1.20797e-05 0.000258089
3.36 0 1.07152e-05 0.000258089
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.28

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.28
0.28 0.000130073 1.22961e-05 0.000258089
0.56 6.71631e-05 2.43627e-05 0.000258089
0.7 5.41908e-05 3.02726e-05 0.000258089
0.84 4.60427e-05 3.53673e-05 0.000258089
0.98 3.67921e-05 4.11492e-05 0.000258089
1.12 2.99374e-05 4.56377e-05 0.000258089
1.26 2.53709e-05 4.78961e-05 0.000258089
1.4 2.14473e-05 5.02785e-05 0.000258089
1.68 1.60997e-05 5.3866e-05 0.000258089
2.24 1.0787e-05 5.9446e-05 0.000258089
2.8 7.0051e-06 6.34975e-05 0.000258089
3.36 0 7.07066e-05 0.000258089
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.28
0.28 0.00012673 1.53309e-05 0.000258089
0.56 6.35009e-05 2.86361e-05 0.000258089
0.7 4.68304e-05 3.72542e-05 0.000258089
0.84 3.82149e-05 4.09757e-05 0.000258089
0.98 3.08301e-05 4.5498e-05 0.000258089
1.12 2.60535e-05 4.87123e-05 0.000258089
1.26 2.17002e-05 5.22232e-05 0.000258089
1.4 1.81905e-05 5.52614e-05 0.000258089
1.68 1.33231e-05 5.96144e-05 0.000258089
2.24 8.55374e-06 6.48936e-05 0.000258089
2.8 5.19041e-06 6.8691e-05 0.000258089
3.36 0 7.42096e-05 0.000258089
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.28
0.28 0.000113232 3.09607e-05 0.000258089
0.56 5.06126e-05 4.9663e-05 0.000258089
0.7 3.71194e-05 5.77168e-05 0.000258089
0.84 2.85724e-05 6.40181e-05 0.000258089
0.98 2.15478e-05 6.99199e-05 0.000258089
1.12 1.70497e-05 7.36133e-05 0.000258089
1.26 1.33793e-05 7.83353e-05 0.000258089
1.4 1.0495e-05 8.15484e-05 0.000258089
1.68 6.49495e-06 8.37051e-05 0.000258089
2.24 3.89128e-06 8.79712e-05 0.000258089
2.8 2.14152e-06 9.01359e-05 0.000258089
3.36 0 9.25912e-05 0.000258089
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.44

Metal 5 RESOVER 0
DIST count 55 width 0.44
0 0 0 0.000161545
0 0.46 0 0.000161545
0 0.9 0 0.000161545
0 1.14 0 0.000161545
0 1.36 0 0.000161545
0 1.8 0 0.000161545
0 2.04 0 0.000161545
0 2.26 0 0.000161545
0 2.7 0 0.000161545
0 3.6 0 0.000161545
0.46 0.46 0 0.000161545
0.46 0.9 0 0.000161545
0.46 1.14 0 0.000161545
0.46 1.36 0 0.000161545
0.46 1.8 0 0.000161545
0.46 2.04 0 0.000161545
0.46 2.26 0 0.000161545
0.46 2.7 0 0.000161545
0.46 3.6 0 0.000161545
0.9 0.9 0 0.000161545
0.9 1.14 0 0.000161545
0.9 1.36 0 0.000161545
0.9 1.8 0 0.000161545
0.9 2.04 0 0.000161545
0.9 2.26 0 0.000161545
0.9 2.7 0 0.000161545
0.9 3.6 0 0.000161545
1.14 1.14 0 0.000161545
1.14 1.36 0 0.000161545
1.14 1.8 0 0.000161545
1.14 2.04 0 0.000161545
1.14 2.26 0 0.000161545
1.14 2.7 0 0.000161545
1.14 3.6 0 0.000161545
1.36 1.36 0 0.000161545
1.36 1.8 0 0.000161545
1.36 2.04 0 0.000161545
1.36 2.26 0 0.000161545
1.36 2.7 0 0.000161545
1.36 3.6 0 0.000161545
1.8 1.8 0 0.000161545
1.8 2.04 0 0.000161545
1.8 2.26 0 0.000161545
1.8 2.7 0 0.000161545
1.8 3.6 0 0.000161545
2.04 2.04 0 0.000161545
2.04 2.26 0 0.000161545
2.04 2.7 0 0.000161545
2.04 3.6 0 0.000161545
2.26 2.26 0 0.000161545
2.26 2.7 0 0.000161545
2.26 3.6 0 0.000161545
2.7 2.7 0 0.000161545
2.7 3.6 0 0.000161545
3.6 0 3.6 0.000161545
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.44
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.44
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.44
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.44
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.44

Metal 5 OVER 0
DIST count 12 width 0.44
0.46 0.000182182 3.44353e-08 8.07726e-05
0.92 0.000104072 3.44353e-08 8.07726e-05
1.15 8.70834e-05 3.44353e-08 8.07726e-05
1.38 7.64875e-05 3.44353e-08 8.07726e-05
1.61 6.71719e-05 1.31019e-06 8.07726e-05
1.84 6.12836e-05 2.50629e-06 8.07726e-05
2.07 5.54489e-05 4.14145e-06 8.07726e-05
2.3 5.09034e-05 5.36927e-06 8.07726e-05
2.76 4.07148e-05 1.09482e-05 8.07726e-05
3.68 2.91362e-05 1.74582e-05 8.07726e-05
4.6 0 3.50365e-05 8.07726e-05
5.52 0 3.50365e-05 8.07726e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.44
0.46 0.000179652 3.44353e-08 8.07726e-05
0.92 0.000101388 3.44353e-08 8.07726e-05
1.15 8.43424e-05 2.84004e-06 8.07726e-05
1.38 7.35195e-05 4.85832e-06 8.07726e-05
1.61 6.42437e-05 7.15273e-06 8.07726e-05
1.84 5.82222e-05 8.89562e-06 8.07726e-05
2.07 5.24924e-05 1.08393e-05 8.07726e-05
2.3 4.78836e-05 1.25612e-05 8.07726e-05
2.76 3.80588e-05 1.83747e-05 8.07726e-05
3.68 2.69083e-05 2.59559e-05 8.07726e-05
4.6 0 4.87178e-05 8.07726e-05
5.52 0 4.87178e-05 8.07726e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.44
0.46 0.000176873 4.74852e-07 8.07726e-05
0.92 9.84639e-05 3.53506e-06 8.07726e-05
1.15 8.1354e-05 6.6879e-06 8.07726e-05
1.38 7.06732e-05 8.75356e-06 8.07726e-05
1.61 6.12462e-05 1.1465e-05 8.07726e-05
1.84 5.52737e-05 1.34065e-05 8.07726e-05
2.07 4.93707e-05 1.57241e-05 8.07726e-05
2.3 4.47607e-05 1.76724e-05 8.07726e-05
2.76 3.53833e-05 2.33513e-05 8.07726e-05
3.68 2.46507e-05 3.12128e-05 8.07726e-05
4.6 0 5.34802e-05 8.07726e-05
5.52 0 5.34791e-05 8.07726e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.44
0.46 0.000171918 1.73675e-06 8.07726e-05
0.92 9.33765e-05 9.91395e-06 8.07726e-05
1.15 7.62475e-05 1.37697e-05 8.07726e-05
1.38 6.55474e-05 1.63182e-05 8.07726e-05
1.61 5.61432e-05 1.96262e-05 8.07726e-05
1.84 5.01818e-05 2.2006e-05 8.07726e-05
2.07 4.43492e-05 2.47786e-05 8.07726e-05
2.3 3.97839e-05 2.71452e-05 8.07726e-05
2.76 3.10017e-05 3.28726e-05 8.07726e-05
3.68 2.11407e-05 4.09541e-05 8.07726e-05
4.6 0 6.17293e-05 8.07726e-05
5.52 0 6.17293e-05 8.07726e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.44
0.46 0.000161015 1.56009e-05 8.07726e-05
0.92 8.28298e-05 2.88075e-05 8.07726e-05
1.15 6.60317e-05 3.46352e-05 8.07726e-05
1.38 5.55483e-05 3.85041e-05 8.07726e-05
1.61 4.6535e-05 4.31258e-05 8.07726e-05
1.84 4.08357e-05 4.65473e-05 8.07726e-05
2.07 3.33285e-05 5.20234e-05 8.07726e-05
2.3 2.92405e-05 5.48909e-05 8.07726e-05
2.76 2.3451e-05 5.89848e-05 8.07726e-05
3.68 1.53418e-05 6.68003e-05 8.07726e-05
4.6 0 8.36858e-05 8.07726e-05
5.52 0 8.36858e-05 8.07726e-05
END DIST

Metal 5 UNDER
WIDTH Table 0 entries: 

Metal 5 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0