Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.0760547
0 0.29 0 0.0760547
0 0.46 0 0.0760547
0 0.665 0 0.0760547
0 0.75 0 0.0760547
0 0.92 0 0.0760547
0 1.125 0 0.0760547
0 1.21 0 0.0760547
0 1.38 0 0.0760547
0 1.84 0 0.0760547
0.29 0.29 0 0.0760547
0.29 0.46 0 0.0760547
0.29 0.665 0 0.0760547
0.29 0.75 0 0.0760547
0.29 0.92 0 0.0760547
0.29 1.125 0 0.0760547
0.29 1.21 0 0.0760547
0.29 1.38 0 0.0760547
0.29 1.84 0 0.0760547
0.46 0.46 0 0.0760547
0.46 0.665 0 0.0760547
0.46 0.75 0 0.0760547
0.46 0.92 0 0.0760547
0.46 1.125 0 0.0760547
0.46 1.21 0 0.0760547
0.46 1.38 0 0.0760547
0.46 1.84 0 0.0760547
0.665 0.665 0 0.0760547
0.665 0.75 0 0.0760547
0.665 0.92 0 0.0760547
0.665 1.125 0 0.0760547
0.665 1.21 0 0.0760547
0.665 1.38 0 0.0760547
0.665 1.84 0 0.0760547
0.75 0.75 0 0.0760547
0.75 0.92 0 0.0760547
0.75 1.125 0 0.0760547
0.75 1.21 0 0.0760547
0.75 1.38 0 0.0760547
0.75 1.84 0 0.0760547
0.92 0.92 0 0.0760547
0.92 1.125 0 0.0760547
0.92 1.21 0 0.0760547
0.92 1.38 0 0.0760547
0.92 1.84 0 0.0760547
1.125 1.125 0 0.0760547
1.125 1.21 0 0.0760547
1.125 1.38 0 0.0760547
1.125 1.84 0 0.0760547
1.21 1.21 0 0.0760547
1.21 1.38 0 0.0760547
1.21 1.84 0 0.0760547
1.38 1.38 0 0.0760547
1.38 1.84 0 0.0760547
1.84 0 1.84 0.0760547
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 0.000422526 6.80969e-06 0.0380273
0.34 0.000237077 8.17445e-06 0.0380273
0.425 0.000197012 8.85502e-06 0.0380273
0.51 0.000169228 9.53411e-06 0.0380273
0.595 0.000148685 1.02116e-05 0.0380273
0.68 0.000132804 1.08871e-05 0.0380273
0.765 0.000120118 1.15607e-05 0.0380273
0.85 0.000109728 1.2232e-05 0.0380273
1.02 9.36767e-05 1.35673e-05 0.0380273
1.36 7.26724e-05 1.6203e-05 0.0380273
1.7 5.94617e-05 1.87824e-05 0.0380273
2.04 0 7.16486e-05 0.0380273
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 0.000422526 5.17131e-05 0.0380273
0.34 0.000237077 5.42405e-05 0.0380273
0.425 0.000197012 5.55018e-05 0.0380273
0.51 0.000169228 5.67587e-05 0.0380273
0.595 0.000148685 5.80155e-05 0.0380273
0.68 0.000132804 5.92659e-05 0.0380273
0.765 0.000120118 6.05132e-05 0.0380273
0.85 0.000109728 6.17576e-05 0.0380273
1.02 9.36767e-05 6.4232e-05 0.0380273
1.36 7.26724e-05 6.9115e-05 0.0380273
1.7 5.94617e-05 7.38925e-05 0.0380273
2.04 0 0.000128901 0.0380273
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 0.000422526 3.68654e-05 0.0380273
0.34 0.000237077 3.89591e-05 0.0380273
0.425 0.000197012 4.00035e-05 0.0380273
0.51 0.000169228 4.10444e-05 0.0380273
0.595 0.000148685 4.20849e-05 0.0380273
0.68 0.000132804 4.31213e-05 0.0380273
0.765 0.000120118 4.41534e-05 0.0380273
0.85 0.000109728 4.51843e-05 0.0380273
1.02 9.36767e-05 4.72335e-05 0.0380273
1.36 7.26724e-05 5.12764e-05 0.0380273
1.7 5.94617e-05 5.52338e-05 0.0380273
2.04 0 0.000109442 0.0380273
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 0.000422526 2.20682e-05 0.0380273
0.34 0.000237077 2.3936e-05 0.0380273
0.425 0.000197012 2.48677e-05 0.0380273
0.51 0.000169228 2.57967e-05 0.0380273
0.595 0.000148685 2.6724e-05 0.0380273
0.68 0.000132804 2.76491e-05 0.0380273
0.765 0.000120118 2.85707e-05 0.0380273
0.85 0.000109728 2.94899e-05 0.0380273
1.02 9.36767e-05 3.13177e-05 0.0380273
1.36 7.26724e-05 3.49253e-05 0.0380273
1.7 5.94617e-05 3.84561e-05 0.0380273
2.04 0 9.22488e-05 0.0380273
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 0.000422526 1.903e-05 0.0380273
0.34 0.000237077 2.07332e-05 0.0380273
0.425 0.000197012 2.15829e-05 0.0380273
0.51 0.000169228 2.24299e-05 0.0380273
0.595 0.000148685 2.3275e-05 0.0380273
0.68 0.000132804 2.41182e-05 0.0380273
0.765 0.000120118 2.49592e-05 0.0380273
0.85 0.000109728 2.57965e-05 0.0380273
1.02 9.36767e-05 2.74633e-05 0.0380273
1.36 7.26724e-05 3.07526e-05 0.0380273
1.7 5.94617e-05 3.39718e-05 0.0380273
2.04 0 8.74602e-05 0.0380273
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 0.000422526 1.04506e-05 0.0380273
0.34 0.000237077 1.20865e-05 0.0380273
0.425 0.000197012 1.29024e-05 0.0380273
0.51 0.000169228 1.37165e-05 0.0380273
0.595 0.000148685 1.45287e-05 0.0380273
0.68 0.000132804 1.53383e-05 0.0380273
0.765 0.000120118 1.61459e-05 0.0380273
0.85 0.000109728 1.69506e-05 0.0380273
1.02 9.36767e-05 1.85512e-05 0.0380273
1.36 7.26724e-05 2.17109e-05 0.0380273
1.7 5.94617e-05 2.48031e-05 0.0380273
2.04 0 7.81684e-05 0.0380273
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 7.62507e-05 0.0380273
0.17 0 0 0.0380273
0.34 0 0 0.0380273
0.425 0 0 0.0380273
0.51 0 0 0.0380273
0.595 0 0 0.0380273
0.68 0 0 0.0380273
0.765 0 0 0.0380273
0.85 0 0 0.0380273
1.02 0 0 0.0380273
1.36 0 0 0.0380273
1.7 0 0 0.0380273
2.04 0 0 0.0380273
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 5.2059e-05 0.0380273
0.17 0 0 0.0380273
0.34 0 0 0.0380273
0.425 0 0 0.0380273
0.51 0 0 0.0380273
0.595 0 0 0.0380273
0.68 0 0 0.0380273
0.765 0 0 0.0380273
0.85 0 0 0.0380273
1.02 0 0 0.0380273
1.36 0 0 0.0380273
1.7 0 0 0.0380273
2.04 0 0 0.0380273
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 1.88023e-05 0.0380273
0.17 0 0 0.0380273
0.34 0 0 0.0380273
0.425 0 0 0.0380273
0.51 0 0 0.0380273
0.595 0 0 0.0380273
0.68 0 0 0.0380273
0.765 0 0 0.0380273
0.85 0 0 0.0380273
1.02 0 0 0.0380273
1.36 0 0 0.0380273
1.7 0 0 0.0380273
2.04 0 0 0.0380273
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 1.22463e-05 0.0380273
0.17 0 0 0.0380273
0.34 0 0 0.0380273
0.425 0 0 0.0380273
0.51 0 0 0.0380273
0.595 0 0 0.0380273
0.68 0 0 0.0380273
0.765 0 0 0.0380273
0.85 0 0 0.0380273
1.02 0 0 0.0380273
1.36 0 0 0.0380273
1.7 0 0 0.0380273
2.04 0 0 0.0380273
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000901876
0 0.2 0 0.000901876
0 0.34 0 0.000901876
0 0.47 0 0.000901876
0 0.54 0 0.000901876
0 0.68 0 0.000901876
0 0.81 0 0.000901876
0 0.88 0 0.000901876
0 1.02 0 0.000901876
0 1.36 0 0.000901876
0.2 0.2 0 0.000901876
0.2 0.34 0 0.000901876
0.2 0.47 0 0.000901876
0.2 0.54 0 0.000901876
0.2 0.68 0 0.000901876
0.2 0.81 0 0.000901876
0.2 0.88 0 0.000901876
0.2 1.02 0 0.000901876
0.2 1.36 0 0.000901876
0.34 0.34 0 0.000901876
0.34 0.47 0 0.000901876
0.34 0.54 0 0.000901876
0.34 0.68 0 0.000901876
0.34 0.81 0 0.000901876
0.34 0.88 0 0.000901876
0.34 1.02 0 0.000901876
0.34 1.36 0 0.000901876
0.47 0.47 0 0.000901876
0.47 0.54 0 0.000901876
0.47 0.68 0 0.000901876
0.47 0.81 0 0.000901876
0.47 0.88 0 0.000901876
0.47 1.02 0 0.000901876
0.47 1.36 0 0.000901876
0.54 0.54 0 0.000901876
0.54 0.68 0 0.000901876
0.54 0.81 0 0.000901876
0.54 0.88 0 0.000901876
0.54 1.02 0 0.000901876
0.54 1.36 0 0.000901876
0.68 0.68 0 0.000901876
0.68 0.81 0 0.000901876
0.68 0.88 0 0.000901876
0.68 1.02 0 0.000901876
0.68 1.36 0 0.000901876
0.81 0.81 0 0.000901876
0.81 0.88 0 0.000901876
0.81 1.02 0 0.000901876
0.81 1.36 0 0.000901876
0.88 0.88 0 0.000901876
0.88 1.02 0 0.000901876
0.88 1.36 0 0.000901876
1.02 1.02 0 0.000901876
1.02 1.36 0 0.000901876
1.36 0 1.36 0.000901876
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0.000687771 4.72439e-06 0.000450938
0.28 0.000386468 5.84722e-06 0.000450938
0.35 0.000321024 6.40768e-06 0.000450938
0.42 0.000275575 6.96735e-06 0.000450938
0.49 0.000241948 7.52612e-06 0.000450938
0.56 0.000215945 8.08387e-06 0.000450938
0.63 0.000195177 8.64055e-06 0.000450938
0.7 0.000178172 9.196e-06 0.000450938
0.84 0.000151919 1.03028e-05 0.000450938
1.12 0.000117617 1.24974e-05 0.000450938
1.4 9.6089e-05 1.46609e-05 0.000450938
1.68 0 9.80629e-05 0.000450938
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0.000687771 2.69268e-05 0.000450938
0.28 0.000386468 2.91393e-05 0.000450938
0.35 0.000321024 3.02442e-05 0.000450938
0.42 0.000275575 3.13468e-05 0.000450938
0.49 0.000241948 3.24481e-05 0.000450938
0.56 0.000215945 3.35484e-05 0.000450938
0.63 0.000195177 3.46443e-05 0.000450938
0.7 0.000178172 3.57401e-05 0.000450938
0.84 0.000151919 3.79207e-05 0.000450938
1.12 0.000117617 4.22452e-05 0.000450938
1.4 9.6089e-05 4.65089e-05 0.000450938
1.68 0 0.000131975 0.000450938
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0.000687771 4.65463e-05 0.000450938
0.28 0.000386468 4.90034e-05 0.000450938
0.35 0.000321024 5.02288e-05 0.000450938
0.42 0.000275575 5.14544e-05 0.000450938
0.49 0.000241948 5.26768e-05 0.000450938
0.56 0.000215945 5.38961e-05 0.000450938
0.63 0.000195177 5.51152e-05 0.000450938
0.7 0.000178172 5.63288e-05 0.000450938
0.84 0.000151919 5.87512e-05 0.000450938
1.12 0.000117617 6.35518e-05 0.000450938
1.4 9.6089e-05 6.8286e-05 0.000450938
1.68 0 0.000154213 0.000450938
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000687771 1.9524e-05 0.000450938
0.28 0.000386468 2.13751e-05 0.000450938
0.35 0.000321024 2.2299e-05 0.000450938
0.42 0.000275575 2.32216e-05 0.000450938
0.49 0.000241948 2.41424e-05 0.000450938
0.56 0.000215945 2.50618e-05 0.000450938
0.63 0.000195177 2.59789e-05 0.000450938
0.7 0.000178172 2.68944e-05 0.000450938
0.84 0.000151919 2.87185e-05 0.000450938
1.12 0.000117617 3.23362e-05 0.000450938
1.4 9.6089e-05 3.59022e-05 0.000450938
1.68 0 0.000120682 0.000450938
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000687771 1.51347e-05 0.000450938
0.28 0.000386468 1.67056e-05 0.000450938
0.35 0.000321024 1.74899e-05 0.000450938
0.42 0.000275575 1.82723e-05 0.000450938
0.49 0.000241948 1.90546e-05 0.000450938
0.56 0.000215945 1.98347e-05 0.000450938
0.63 0.000195177 2.06128e-05 0.000450938
0.7 0.000178172 2.13902e-05 0.000450938
0.84 0.000151919 2.29386e-05 0.000450938
1.12 0.000117617 2.6009e-05 0.000450938
1.4 9.6089e-05 2.90356e-05 0.000450938
1.68 0 0.000113286 0.000450938
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000687771 8.22958e-06 0.000450938
0.28 0.000386468 9.7136e-06 0.000450938
0.35 0.000321024 1.04543e-05 0.000450938
0.42 0.000275575 1.11941e-05 0.000450938
0.49 0.000241948 1.19325e-05 0.000450938
0.56 0.000215945 1.26698e-05 0.000450938
0.63 0.000195177 1.34055e-05 0.000450938
0.7 0.000178172 1.41395e-05 0.000450938
0.84 0.000151919 1.56024e-05 0.000450938
1.12 0.000117617 1.8503e-05 0.000450938
1.4 9.6089e-05 2.13624e-05 0.000450938
1.68 0 0.000105448 0.000450938
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 2.40921e-05 0.000450938
0.14 0 1.02266e-05 0.000450938
0.28 0 1.00807e-05 0.000450938
0.35 0 9.98622e-06 0.000450938
0.42 0 9.89343e-06 0.000450938
0.49 0 9.80238e-06 0.000450938
0.56 0 9.71299e-06 0.000450938
0.63 0 9.62518e-06 0.000450938
0.7 0 9.49697e-06 0.000450938
0.84 0 4.70613e-06 0.000450938
1.12 0 0 0.000450938
1.4 0 0 0.000450938
1.68 0 0 0.000450938
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 3.66679e-05 0.000450938
0.14 0 9.79661e-06 0.000450938
0.28 0 9.66263e-06 0.000450938
0.35 0 9.57569e-06 0.000450938
0.42 0 9.49033e-06 0.000450938
0.49 0 9.40649e-06 0.000450938
0.56 0 4.68247e-06 0.000450938
0.63 0 0 0.000450938
0.7 0 0 0.000450938
0.84 0 0 0.000450938
1.12 0 0 0.000450938
1.4 0 0 0.000450938
1.68 0 0 0.000450938
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 2.35874e-05 0.000450938
0.14 0 9.79661e-06 0.000450938
0.28 0 9.66263e-06 0.000450938
0.35 0 9.57569e-06 0.000450938
0.42 0 9.49033e-06 0.000450938
0.49 0 9.40649e-06 0.000450938
0.56 0 4.68247e-06 0.000450938
0.63 0 0 0.000450938
0.7 0 0 0.000450938
0.84 0 0 0.000450938
1.12 0 0 0.000450938
1.4 0 0 0.000450938
1.68 0 0 0.000450938
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.3482e-05 0.000450938
0.14 0 0 0.000450938
0.28 0 0 0.000450938
0.35 0 0 0.000450938
0.42 0 0 0.000450938
0.49 0 0 0.000450938
0.56 0 0 0.000450938
0.63 0 0 0.000450938
0.7 0 0 0.000450938
0.84 0 0 0.000450938
1.12 0 0 0.000450938
1.4 0 0 0.000450938
1.68 0 0 0.000450938
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 0.000687825 6.98402e-05 0.000450938
0.28 0.000386472 7.34263e-05 0.000450938
0.35 0.000321024 7.52084e-05 0.000450938
0.42 0.000275575 7.69861e-05 0.000450938
0.49 0.00024196 7.87532e-05 0.000450938
0.56 0.00021598 8.05096e-05 0.000450938
0.63 0.000195228 8.22661e-05 0.000450938
0.7 0.000178199 8.40392e-05 0.000450938
0.84 0.00015195 8.75363e-05 0.000450938
1.12 0.000117637 9.44725e-05 0.000450938
1.4 9.6089e-05 0.000101317 0.000450938
1.68 0 0.000189308 0.000450938
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.00068788 4.28256e-05 0.000450938
0.28 0.000386527 4.57718e-05 0.000450938
0.35 0.000321079 4.72403e-05 0.000450938
0.42 0.00027563 4.87061e-05 0.000450938
0.49 0.000242015 5.01684e-05 0.000450938
0.56 0.000216035 5.16277e-05 0.000450938
0.63 0.000195283 5.30824e-05 0.000450938
0.7 0.000178254 5.45408e-05 0.000450938
0.84 0.000152005 5.74382e-05 0.000450938
1.12 0.000117691 6.31871e-05 0.000450938
1.4 9.61439e-05 6.88553e-05 0.000450938
1.68 0 0.000155754 0.000450938
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.00068788 3.84363e-05 0.000450938
0.28 0.000386523 4.11588e-05 0.000450938
0.35 -2.58998e-05 3.18535e-06 0.000450938
0.42 0.00027563 4.26461e-05 0.000450938
0.49 0.000242003 4.39709e-05 0.000450938
0.56 0.000216 4.52936e-05 0.000450938
0.63 0.000195232 4.66108e-05 0.000450938
0.7 0.000178227 4.79287e-05 0.000450938
0.84 0.000151974 5.05508e-05 0.000450938
1.12 0.000117672 5.57511e-05 0.000450938
1.4 9.61439e-05 6.08779e-05 0.000450938
1.68 0 -1.37225 0.000450938
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000687825 3.0423e-05 0.000450938
0.28 0.000386468 3.30056e-05 0.000450938
0.35 0.000321024 3.42908e-05 0.000450938
0.42 0.000275575 3.55735e-05 0.000450938
0.49 0.000241948 3.68545e-05 0.000450938
0.56 0.000215945 3.81343e-05 0.000450938
0.63 0.000195177 3.94092e-05 0.000450938
0.7 0.000178172 4.06836e-05 0.000450938
0.84 0.000151919 4.32202e-05 0.000450938
1.12 0.000117617 4.82508e-05 0.000450938
1.4 9.6089e-05 5.32104e-05 0.000450938
1.68 0 0.000139361 0.000450938
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000901876
0 0.32 0 0.000901876
0 0.46 0 0.000901876
0 0.71 0 0.000901876
0 0.78 0 0.000901876
0 0.92 0 0.000901876
0 1.17 0 0.000901876
0 1.24 0 0.000901876
0 1.38 0 0.000901876
0 1.84 0 0.000901876
0.32 0.32 0 0.000901876
0.32 0.46 0 0.000901876
0.32 0.71 0 0.000901876
0.32 0.78 0 0.000901876
0.32 0.92 0 0.000901876
0.32 1.17 0 0.000901876
0.32 1.24 0 0.000901876
0.32 1.38 0 0.000901876
0.32 1.84 0 0.000901876
0.46 0.46 0 0.000901876
0.46 0.71 0 0.000901876
0.46 0.78 0 0.000901876
0.46 0.92 0 0.000901876
0.46 1.17 0 0.000901876
0.46 1.24 0 0.000901876
0.46 1.38 0 0.000901876
0.46 1.84 0 0.000901876
0.71 0.71 0 0.000901876
0.71 0.78 0 0.000901876
0.71 0.92 0 0.000901876
0.71 1.17 0 0.000901876
0.71 1.24 0 0.000901876
0.71 1.38 0 0.000901876
0.71 1.84 0 0.000901876
0.78 0.78 0 0.000901876
0.78 0.92 0 0.000901876
0.78 1.17 0 0.000901876
0.78 1.24 0 0.000901876
0.78 1.38 0 0.000901876
0.78 1.84 0 0.000901876
0.92 0.92 0 0.000901876
0.92 1.17 0 0.000901876
0.92 1.24 0 0.000901876
0.92 1.38 0 0.000901876
0.92 1.84 0 0.000901876
1.17 1.17 0 0.000901876
1.17 1.24 0 0.000901876
1.17 1.38 0 0.000901876
1.17 1.84 0 0.000901876
1.24 1.24 0 0.000901876
1.24 1.38 0 0.000901876
1.24 1.84 0 0.000901876
1.38 1.38 0 0.000901876
1.38 1.84 0 0.000901876
1.84 0 1.84 0.000901876
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0.000695863 4.34242e-06 0.000450938
0.28 0.00038885 5.386e-06 0.000450938
0.35 0.000323204 5.90678e-06 0.000450938
0.42 0.000277832 6.42673e-06 0.000450938
0.49 0.000244351 6.94574e-06 0.000450938
0.56 0.000218495 7.46378e-06 0.000450938
0.63 0.000197849 7.98066e-06 0.000450938
0.7 0.000180938 8.49636e-06 0.000450938
0.84 0.000154797 9.52374e-06 0.000450938
1.12 0.00012052 1.15597e-05 0.000450938
1.4 9.8889e-05 1.35654e-05 0.000450938
1.68 0 9.94638e-05 0.000450938
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.000695863 1.63425e-05 0.000450938
0.28 0.00038885 1.81464e-05 0.000450938
0.35 0.000323204 1.90464e-05 0.000450938
0.42 0.000277832 1.99438e-05 0.000450938
0.49 0.000244351 2.08403e-05 0.000450938
0.56 0.000218495 2.17359e-05 0.000450938
0.63 0.000197849 2.26285e-05 0.000450938
0.7 0.000180938 2.35199e-05 0.000450938
0.84 0.000154797 2.52952e-05 0.000450938
1.12 0.00012052 2.88128e-05 0.000450938
1.4 9.8889e-05 3.22773e-05 0.000450938
1.68 0 0.00011961 0.000450938
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 0.000695863 3.71669e-05 0.000450938
0.28 0.00038885 3.95424e-05 0.000450938
0.35 0.000323204 4.07268e-05 0.000450938
0.42 0.000277832 4.19103e-05 0.000450938
0.49 0.000244351 4.30921e-05 0.000450938
0.56 0.000218495 4.4271e-05 0.000450938
0.63 0.000197849 4.54467e-05 0.000450938
0.7 0.000180938 4.66207e-05 0.000450938
0.84 0.000154797 4.89573e-05 0.000450938
1.12 0.00012052 5.35919e-05 0.000450938
1.4 9.8889e-05 5.8156e-05 0.000450938
1.68 0 0.000146566 0.000450938
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.000695863 2.85234e-05 0.000450938
0.28 0.00038885 3.07877e-05 0.000450938
0.35 0.000323204 3.19186e-05 0.000450938
0.42 0.000277832 3.30465e-05 0.000450938
0.49 0.000244351 3.41729e-05 0.000450938
0.56 0.000218495 3.52969e-05 0.000450938
0.63 0.000197849 3.64184e-05 0.000450938
0.7 0.000180938 3.7537e-05 0.000450938
0.84 0.000154797 3.9767e-05 0.000450938
1.12 0.00012052 4.41842e-05 0.000450938
1.4 9.8889e-05 4.85367e-05 0.000450938
1.68 0 0.00013674 0.000450938
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.000695863 1.72097e-05 0.000450938
0.28 0.00038885 1.88666e-05 0.000450938
0.35 0.000323204 1.96935e-05 0.000450938
0.42 0.000277832 2.05196e-05 0.000450938
0.49 0.000244351 2.13434e-05 0.000450938
0.56 0.000218495 2.21662e-05 0.000450938
0.63 0.000197849 2.29872e-05 0.000450938
0.7 0.000180938 2.3806e-05 0.000450938
0.84 0.000154797 2.54376e-05 0.000450938
1.12 0.00012052 2.86705e-05 0.000450938
1.4 9.8889e-05 3.18559e-05 0.000450938
1.68 0 0.000118912 0.000450938
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.000695863 8.89242e-06 0.000450938
0.28 0.00038885 1.04032e-05 0.000450938
0.35 0.000323204 1.1157e-05 0.000450938
0.42 0.000277832 1.19097e-05 0.000450938
0.49 0.000244351 1.2661e-05 0.000450938
0.56 0.000218495 1.34109e-05 0.000450938
0.63 0.000197849 1.41591e-05 0.000450938
0.7 0.000180938 1.49056e-05 0.000450938
0.84 0.000154797 1.63929e-05 0.000450938
1.12 0.00012052 1.93398e-05 0.000450938
1.4 9.8889e-05 2.22435e-05 0.000450938
1.68 0 0.000109023 0.000450938
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 5.70672e-05 0.000450938
0.14 0 0 0.000450938
0.28 0 0 0.000450938
0.35 0 0 0.000450938
0.42 0 0 0.000450938
0.49 0 0 0.000450938
0.56 0 0 0.000450938
0.63 0 0 0.000450938
0.7 0 0 0.000450938
0.84 0 0 0.000450938
1.12 0 0 0.000450938
1.4 0 0 0.000450938
1.68 0 0 0.000450938
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 2.54305e-05 0.000450938
0.14 0 0 0.000450938
0.28 0 0 0.000450938
0.35 0 0 0.000450938
0.42 0 0 0.000450938
0.49 0 0 0.000450938
0.56 0 0 0.000450938
0.63 0 0 0.000450938
0.7 0 0 0.000450938
0.84 0 0 0.000450938
1.12 0 0 0.000450938
1.4 0 0 0.000450938
1.68 0 0 0.000450938
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.74521e-05 0.000450938
0.14 0 0 0.000450938
0.28 0 0 0.000450938
0.35 0 0 0.000450938
0.42 0 0 0.000450938
0.49 0 0 0.000450938
0.56 0 0 0.000450938
0.63 0 0 0.000450938
0.7 0 0 0.000450938
0.84 0 0 0.000450938
1.12 0 0 0.000450938
1.4 0 0 0.000450938
1.68 0 0 0.000450938
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000695863 4.05235e-05 0.000450938
0.28 0.00038885 4.35481e-05 0.000450938
0.35 0.000323204 4.50582e-05 0.000450938
0.42 0.000277832 4.65636e-05 0.000450938
0.49 0.000244351 4.80674e-05 0.000450938
0.56 0.000218495 4.9569e-05 0.000450938
0.63 0.000197849 5.10662e-05 0.000450938
0.7 0.000180938 5.25606e-05 0.000450938
0.84 0.000154797 5.55385e-05 0.000450938
1.12 0.00012052 6.14374e-05 0.000450938
1.4 9.8889e-05 6.72485e-05 0.000450938
1.68 0 0.000156886 0.000450938
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000695863 2.92098e-05 0.000450938
0.28 0.00038885 3.1627e-05 0.000450938
0.35 0.000323204 3.28331e-05 0.000450938
0.42 0.000277832 3.40367e-05 0.000450938
0.49 0.000244351 3.5238e-05 0.000450938
0.56 0.000218495 3.64383e-05 0.000450938
0.63 0.000197849 3.7635e-05 0.000450938
0.7 0.000180938 3.88296e-05 0.000450938
0.84 0.000154797 4.12091e-05 0.000450938
1.12 0.00012052 4.59237e-05 0.000450938
1.4 9.8889e-05 5.05678e-05 0.000450938
1.68 0 0.000139058 0.000450938
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000695863 2.08925e-05 0.000450938
0.28 0.00038885 2.31636e-05 0.000450938
0.35 0.000323204 2.42966e-05 0.000450938
0.42 0.000277832 2.54268e-05 0.000450938
0.49 0.000244351 2.65555e-05 0.000450938
0.56 0.000218495 2.7683e-05 0.000450938
0.63 0.000197849 2.88069e-05 0.000450938
0.7 0.000180938 2.99291e-05 0.000450938
0.84 0.000154797 3.21644e-05 0.000450938
1.12 0.00012052 3.6593e-05 0.000450938
1.4 9.8889e-05 4.09554e-05 0.000450938
1.68 0 0.000129169 0.000450938
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000695863 6.13479e-05 0.000450938
0.28 0.00038885 6.49442e-05 0.000450938
0.35 0.000323204 6.67387e-05 0.000450938
0.42 0.000277832 6.85301e-05 0.000450938
0.49 0.000244351 7.03193e-05 0.000450938
0.56 0.000218495 7.21041e-05 0.000450938
0.63 0.000197849 7.38844e-05 0.000450938
0.7 0.000180938 7.56614e-05 0.000450938
0.84 0.000154797 7.92005e-05 0.000450938
1.12 0.00012052 8.62164e-05 0.000450938
1.4 9.8889e-05 9.31272e-05 0.000450938
1.68 0 0.000183842 0.000450938
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000695863 5.00342e-05 0.000450938
0.28 0.00038885 5.3023e-05 0.000450938
0.35 0.000323204 5.45136e-05 0.000450938
0.42 0.000277832 5.60031e-05 0.000450938
0.49 0.000244351 5.74898e-05 0.000450938
0.56 0.000218495 5.89734e-05 0.000450938
0.63 0.000197849 6.04532e-05 0.000450938
0.7 0.000180938 6.19304e-05 0.000450938
0.84 0.000154797 6.48711e-05 0.000450938
1.12 0.00012052 7.07027e-05 0.000450938
1.4 9.8889e-05 7.64464e-05 0.000450938
1.68 0 0.000166014 0.000450938
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000695863 4.17169e-05 0.000450938
0.28 0.00038885 4.45596e-05 0.000450938
0.35 0.000323204 4.59771e-05 0.000450938
0.42 0.000277832 4.73933e-05 0.000450938
0.49 0.000244351 4.88074e-05 0.000450938
0.56 0.000218495 5.02181e-05 0.000450938
0.63 0.000197849 5.16251e-05 0.000450938
0.7 0.000180938 5.30299e-05 0.000450938
0.84 0.000154797 5.58264e-05 0.000450938
1.12 0.00012052 6.1372e-05 0.000450938
1.4 9.8889e-05 6.6834e-05 0.000450938
1.68 0 0.000156125 0.000450938
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000158249
0 0.38 0 0.000158249
0 0.68 0 0.000158249
0 0.91 0 0.000158249
0 1.06 0 0.000158249
0 1.36 0 0.000158249
0 1.59 0 0.000158249
0 1.74 0 0.000158249
0 2.04 0 0.000158249
0 2.72 0 0.000158249
0.38 0.38 0 0.000158249
0.38 0.68 0 0.000158249
0.38 0.91 0 0.000158249
0.38 1.06 0 0.000158249
0.38 1.36 0 0.000158249
0.38 1.59 0 0.000158249
0.38 1.74 0 0.000158249
0.38 2.04 0 0.000158249
0.38 2.72 0 0.000158249
0.68 0.68 0 0.000158249
0.68 0.91 0 0.000158249
0.68 1.06 0 0.000158249
0.68 1.36 0 0.000158249
0.68 1.59 0 0.000158249
0.68 1.74 0 0.000158249
0.68 2.04 0 0.000158249
0.68 2.72 0 0.000158249
0.91 0.91 0 0.000158249
0.91 1.06 0 0.000158249
0.91 1.36 0 0.000158249
0.91 1.59 0 0.000158249
0.91 1.74 0 0.000158249
0.91 2.04 0 0.000158249
0.91 2.72 0 0.000158249
1.06 1.06 0 0.000158249
1.06 1.36 0 0.000158249
1.06 1.59 0 0.000158249
1.06 1.74 0 0.000158249
1.06 2.04 0 0.000158249
1.06 2.72 0 0.000158249
1.36 1.36 0 0.000158249
1.36 1.59 0 0.000158249
1.36 1.74 0 0.000158249
1.36 2.04 0 0.000158249
1.36 2.72 0 0.000158249
1.59 1.59 0 0.000158249
1.59 1.74 0 0.000158249
1.59 2.04 0 0.000158249
1.59 2.72 0 0.000158249
1.74 1.74 0 0.000158249
1.74 2.04 0 0.000158249
1.74 2.72 0 0.000158249
2.04 2.04 0 0.000158249
2.04 2.72 0 0.000158249
2.72 0 2.72 0.000158249
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.000494304 7.46668e-06 7.91246e-05
0.6 0.000277925 9.87089e-06 7.91246e-05
0.75 0.000230776 1.10637e-05 7.91246e-05
0.9 0.000198008 1.22488e-05 7.91246e-05
1.05 0.000173756 1.34253e-05 7.91246e-05
1.2 0.000155004 1.45921e-05 7.91246e-05
1.35 0.000140029 1.57483e-05 7.91246e-05
1.5 0.000127771 1.68928e-05 7.91246e-05
1.8 0.000108856 1.91428e-05 7.91246e-05
2.4 8.41685e-05 2.34596e-05 7.91246e-05
3 6.86971e-05 2.7483e-05 7.91246e-05
3.6 0 8.92214e-05 7.91246e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.000494304 2.61063e-05 7.91246e-05
0.6 0.000277925 3.00518e-05 7.91246e-05
0.75 0.000230776 3.20083e-05 7.91246e-05
0.9 0.000198008 3.39543e-05 7.91246e-05
1.05 0.000173756 3.58846e-05 7.91246e-05
1.2 0.000155004 3.78007e-05 7.91246e-05
1.35 0.000140029 3.96971e-05 7.91246e-05
1.5 0.000127771 4.15755e-05 7.91246e-05
1.8 0.000108856 4.52682e-05 7.91246e-05
2.4 8.41685e-05 5.23538e-05 7.91246e-05
3 6.86971e-05 5.89566e-05 7.91246e-05
3.6 0 0.00012305 7.91246e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.000494304 4.40548e-05 7.91246e-05
0.6 0.000277925 4.84714e-05 7.91246e-05
0.75 0.000230776 5.06624e-05 7.91246e-05
0.9 0.000198008 5.28415e-05 7.91246e-05
1.05 0.000173756 5.50027e-05 7.91246e-05
1.2 0.000155004 5.71451e-05 7.91246e-05
1.35 0.000140029 5.92703e-05 7.91246e-05
1.5 0.000127771 6.13723e-05 7.91246e-05
1.8 0.000108856 6.5506e-05 7.91246e-05
2.4 8.41685e-05 7.34365e-05 7.91246e-05
3 6.86971e-05 8.08273e-05 7.91246e-05
3.6 0 0.000145642 7.91246e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.000494304 7.23006e-05 7.91246e-05
0.6 0.000277925 7.76004e-05 7.91246e-05
0.75 0.000230776 8.02311e-05 7.91246e-05
0.9 0.000198008 8.28409e-05 7.91246e-05
1.05 0.000173756 8.54346e-05 7.91246e-05
1.2 0.000155004 8.80059e-05 7.91246e-05
1.35 0.000140029 9.0554e-05 7.91246e-05
1.5 0.000127771 9.30775e-05 7.91246e-05
1.8 0.000108856 9.80371e-05 7.91246e-05
2.4 8.41685e-05 0.000107551 7.91246e-05
3 6.86971e-05 0.000116418 7.91246e-05
3.6 0 0.000182581 7.91246e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.000494304 6.12535e-05 7.91246e-05
0.6 0.000277925 6.6158e-05 7.91246e-05
0.75 0.000230776 6.85915e-05 7.91246e-05
0.9 0.000198008 7.10103e-05 7.91246e-05
1.05 0.000173756 7.34095e-05 7.91246e-05
1.2 0.000155004 7.57901e-05 7.91246e-05
1.35 0.000140029 7.81498e-05 7.91246e-05
1.5 0.000127771 8.04846e-05 7.91246e-05
1.8 0.000108856 8.50747e-05 7.91246e-05
2.4 8.41685e-05 9.3883e-05 7.91246e-05
3 6.86971e-05 0.000102092 7.91246e-05
3.6 0 0.000167652 7.91246e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000494304 2.01555e-05 7.91246e-05
0.6 0.000277925 2.42275e-05 7.91246e-05
0.75 0.000230776 2.62475e-05 7.91246e-05
0.9 0.000198008 2.82548e-05 7.91246e-05
1.05 0.000173756 3.02475e-05 7.91246e-05
1.2 0.000155004 3.22236e-05 7.91246e-05
1.35 0.000140029 3.41819e-05 7.91246e-05
1.5 0.000127771 3.61203e-05 7.91246e-05
1.8 0.000108856 3.9931e-05 7.91246e-05
2.4 8.41685e-05 4.72423e-05 7.91246e-05
3 6.86971e-05 5.40566e-05 7.91246e-05
3.6 0 0.000118344 7.91246e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 2.54636e-05 7.91246e-05
0.3 0 0 7.91246e-05
0.6 0 0 7.91246e-05
0.75 0 0 7.91246e-05
0.9 0 0 7.91246e-05
1.05 0 0 7.91246e-05
1.2 0 0 7.91246e-05
1.35 0 0 7.91246e-05
1.5 0 0 7.91246e-05
1.8 0 0 7.91246e-05
2.4 0 0 7.91246e-05
3 0 0 7.91246e-05
3.6 0 0 7.91246e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 3.40697e-05 7.91246e-05
0.3 0 0 7.91246e-05
0.6 0 0 7.91246e-05
0.75 0 0 7.91246e-05
0.9 0 0 7.91246e-05
1.05 0 0 7.91246e-05
1.2 0 0 7.91246e-05
1.35 0 0 7.91246e-05
1.5 0 0 7.91246e-05
1.8 0 0 7.91246e-05
2.4 0 0 7.91246e-05
3 0 0 7.91246e-05
3.6 0 0 7.91246e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.000494304 7.98932e-05 7.91246e-05
0.6 0.000277925 8.63389e-05 7.91246e-05
0.75 0.000230776 8.95361e-05 7.91246e-05
0.9 0.000198008 9.27158e-05 7.91246e-05
1.05 0.000173756 9.58688e-05 7.91246e-05
1.2 0.000155004 9.89986e-05 7.91246e-05
1.35 0.000140029 0.000102099 7.91246e-05
1.5 0.000127771 0.000105167 7.91246e-05
1.8 0.000108856 0.0001112 7.91246e-05
2.4 8.41685e-05 0.000122777 7.91246e-05
3 6.86971e-05 0.000133565 7.91246e-05
3.6 0 0.000201481 7.91246e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000494304 3.87952e-05 7.91246e-05
0.6 0.000277925 4.44084e-05 7.91246e-05
0.75 0.000230776 4.71921e-05 7.91246e-05
0.9 0.000198008 4.99603e-05 7.91246e-05
1.05 0.000173756 5.27069e-05 7.91246e-05
1.2 0.000155004 5.54321e-05 7.91246e-05
1.35 0.000140029 5.81307e-05 7.91246e-05
1.5 0.000127771 6.08031e-05 7.91246e-05
1.8 0.000108856 6.60565e-05 7.91246e-05
2.4 8.41685e-05 7.61365e-05 7.91246e-05
3 6.86971e-05 8.55302e-05 7.91246e-05
3.6 0 0.000152173 7.91246e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0.000494304 9.78417e-05 7.91246e-05
0.6 0.000277925 0.000104759 7.91246e-05
0.75 0.000230776 0.00010819 7.91246e-05
0.9 0.000198008 0.000111603 7.91246e-05
1.05 0.000173756 0.000114987 7.91246e-05
1.2 0.000155004 0.000118343 7.91246e-05
1.35 0.000140029 0.000121672 7.91246e-05
1.5 0.000127771 0.000124964 7.91246e-05
1.8 0.000108856 0.000131438 7.91246e-05
2.4 8.41685e-05 0.00014386 7.91246e-05
3 6.86971e-05 0.000155436 7.91246e-05
3.6 0 0.000224072 7.91246e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000494304 5.67437e-05 7.91246e-05
0.6 0.000277925 6.2828e-05 7.91246e-05
0.75 0.000230776 6.58463e-05 7.91246e-05
0.9 0.000198008 6.88475e-05 7.91246e-05
1.05 0.000173756 7.18249e-05 7.91246e-05
1.2 0.000155004 7.47766e-05 7.91246e-05
1.35 0.000140029 7.77038e-05 7.91246e-05
1.5 0.000127771 8.05999e-05 7.91246e-05
1.8 0.000108856 8.62943e-05 7.91246e-05
2.4 8.41685e-05 9.72192e-05 7.91246e-05
3 6.86971e-05 0.000107401 7.91246e-05
3.6 0 0.000174764 7.91246e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 0.000494304 0.000126087 7.91246e-05
0.6 0.000277925 0.000133888 7.91246e-05
0.75 0.000230776 0.000137759 7.91246e-05
0.9 0.000198008 0.000141602 7.91246e-05
1.05 0.000173756 0.000145419 7.91246e-05
1.2 0.000155004 0.000149204 7.91246e-05
1.35 0.000140029 0.000152955 7.91246e-05
1.5 0.000127771 0.000156669 7.91246e-05
1.8 0.000108856 0.000163969 7.91246e-05
2.4 8.41685e-05 0.000177975 7.91246e-05
3 6.86971e-05 0.000191026 7.91246e-05
3.6 0 0.000261012 7.91246e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000494304 8.49894e-05 7.91246e-05
0.6 0.000277925 9.1957e-05 7.91246e-05
0.75 0.000230776 9.5415e-05 7.91246e-05
0.9 0.000198008 9.88469e-05 7.91246e-05
1.05 0.000173756 0.000102257 7.91246e-05
1.2 0.000155004 0.000105637 7.91246e-05
1.35 0.000140029 0.000108988 7.91246e-05
1.5 0.000127771 0.000112305 7.91246e-05
1.8 0.000108856 0.000118825 7.91246e-05
2.4 8.41685e-05 0.000131334 7.91246e-05
3 6.86971e-05 0.000142991 7.91246e-05
3.6 0 0.000211704 7.91246e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000158249
0 0.62 0 0.000158249
0 0.92 0 0.000158249
0 1.39 0 0.000158249
0 1.54 0 0.000158249
0 1.84 0 0.000158249
0 2.31 0 0.000158249
0 2.46 0 0.000158249
0 2.76 0 0.000158249
0 3.68 0 0.000158249
0.62 0.62 0 0.000158249
0.62 0.92 0 0.000158249
0.62 1.39 0 0.000158249
0.62 1.54 0 0.000158249
0.62 1.84 0 0.000158249
0.62 2.31 0 0.000158249
0.62 2.46 0 0.000158249
0.62 2.76 0 0.000158249
0.62 3.68 0 0.000158249
0.92 0.92 0 0.000158249
0.92 1.39 0 0.000158249
0.92 1.54 0 0.000158249
0.92 1.84 0 0.000158249
0.92 2.31 0 0.000158249
0.92 2.46 0 0.000158249
0.92 2.76 0 0.000158249
0.92 3.68 0 0.000158249
1.39 1.39 0 0.000158249
1.39 1.54 0 0.000158249
1.39 1.84 0 0.000158249
1.39 2.31 0 0.000158249
1.39 2.46 0 0.000158249
1.39 2.76 0 0.000158249
1.39 3.68 0 0.000158249
1.54 1.54 0 0.000158249
1.54 1.84 0 0.000158249
1.54 2.31 0 0.000158249
1.54 2.46 0 0.000158249
1.54 2.76 0 0.000158249
1.54 3.68 0 0.000158249
1.84 1.84 0 0.000158249
1.84 2.31 0 0.000158249
1.84 2.46 0 0.000158249
1.84 2.76 0 0.000158249
1.84 3.68 0 0.000158249
2.31 2.31 0 0.000158249
2.31 2.46 0 0.000158249
2.31 2.76 0 0.000158249
2.31 3.68 0 0.000158249
2.46 2.46 0 0.000158249
2.46 2.76 0 0.000158249
2.46 3.68 0 0.000158249
2.76 2.76 0 0.000158249
2.76 3.68 0 0.000158249
3.68 0 3.68 0.000158249
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.000495005 7.1329e-06 7.91246e-05
0.6 0.000277069 9.27182e-06 7.91246e-05
0.75 0.000230295 1.03318e-05 7.91246e-05
0.9 0.000197926 1.13843e-05 7.91246e-05
1.05 0.000174019 1.24283e-05 7.91246e-05
1.2 0.000155549 1.34629e-05 7.91246e-05
1.35 0.000140798 1.44873e-05 7.91246e-05
1.5 0.000128714 1.55006e-05 7.91246e-05
1.8 0.000110038 1.74902e-05 7.91246e-05
2.4 8.55645e-05 2.12978e-05 7.91246e-05
3 7.01368e-05 2.48328e-05 7.91246e-05
3.6 0 8.75251e-05 7.91246e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.000495005 2.0078e-05 7.91246e-05
0.6 0.000277069 2.3459e-05 7.91246e-05
0.75 0.000230295 2.51364e-05 7.91246e-05
0.9 0.000197926 2.67992e-05 7.91246e-05
1.05 0.000174019 2.84511e-05 7.91246e-05
1.2 0.000155549 3.00869e-05 7.91246e-05
1.35 0.000140798 3.17058e-05 7.91246e-05
1.5 0.000128714 3.33073e-05 7.91246e-05
1.8 0.000110038 3.6453e-05 7.91246e-05
2.4 8.55645e-05 4.2474e-05 7.91246e-05
3 7.01368e-05 4.80626e-05 7.91246e-05
3.6 0 0.000112622 7.91246e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.000495005 2.98605e-05 7.91246e-05
0.6 0.000277069 3.34137e-05 7.91246e-05
0.75 0.000230295 3.51747e-05 7.91246e-05
0.9 0.000197926 3.69243e-05 7.91246e-05
1.05 0.000174019 3.86593e-05 7.91246e-05
1.2 0.000155549 4.03759e-05 7.91246e-05
1.35 0.000140798 4.20789e-05 7.91246e-05
1.5 0.000128714 4.37624e-05 7.91246e-05
1.8 0.000110038 4.70677e-05 7.91246e-05
2.4 8.55645e-05 5.33911e-05 7.91246e-05
3 7.01368e-05 5.92634e-05 7.91246e-05
3.6 0 0.000124082 7.91246e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.000495005 3.74225e-05 7.91246e-05
0.6 0.000277069 4.11994e-05 7.91246e-05
0.75 0.000230295 4.30695e-05 7.91246e-05
0.9 0.000197926 4.49278e-05 7.91246e-05
1.05 0.000174019 4.67711e-05 7.91246e-05
1.2 0.000155549 4.85987e-05 7.91246e-05
1.35 0.000140798 5.04071e-05 7.91246e-05
1.5 0.000128714 5.21956e-05 7.91246e-05
1.8 0.000110038 5.57073e-05 7.91246e-05
2.4 8.55645e-05 6.24304e-05 7.91246e-05
3 7.01368e-05 6.86713e-05 7.91246e-05
3.6 0 0.000133823 7.91246e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0.000495005 4.80773e-05 7.91246e-05
0.6 0.000277069 5.32594e-05 7.91246e-05
0.75 0.000230295 5.58267e-05 7.91246e-05
0.9 0.000197926 5.83764e-05 7.91246e-05
1.05 0.000174019 6.09066e-05 7.91246e-05
1.2 0.000155549 6.34123e-05 7.91246e-05
1.35 0.000140798 6.58942e-05 7.91246e-05
1.5 0.000128714 6.83487e-05 7.91246e-05
1.8 0.000110038 7.31684e-05 7.91246e-05
2.4 8.55645e-05 8.23935e-05 7.91246e-05
3 7.01368e-05 9.09573e-05 7.91246e-05
3.6 0 0.000158221 7.91246e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.000495005 3.39173e-05 7.91246e-05
0.6 0.000277069 3.88103e-05 7.91246e-05
0.75 0.000230295 4.12352e-05 7.91246e-05
0.9 0.000197926 4.3643e-05 7.91246e-05
1.05 0.000174019 4.60313e-05 7.91246e-05
1.2 0.000155549 4.83981e-05 7.91246e-05
1.35 0.000140798 5.07417e-05 7.91246e-05
1.5 0.000128714 5.30596e-05 7.91246e-05
1.8 0.000110038 5.76111e-05 7.91246e-05
2.4 8.55645e-05 6.63216e-05 7.91246e-05
3 7.01368e-05 7.44083e-05 7.91246e-05
3.6 0 0.000141239 7.91246e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 6.81606e-05 7.91246e-05
0.3 0 0 7.91246e-05
0.6 0 0 7.91246e-05
0.75 0 0 7.91246e-05
0.9 0 0 7.91246e-05
1.05 0 0 7.91246e-05
1.2 0 0 7.91246e-05
1.35 0 0 7.91246e-05
1.5 0 0 7.91246e-05
1.8 0 0 7.91246e-05
2.4 0 0 7.91246e-05
3 0 0 7.91246e-05
3.6 0 0 7.91246e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000495005 4.68624e-05 7.91246e-05
0.6 0.000277069 5.29975e-05 7.91246e-05
0.75 0.000230295 5.60398e-05 7.91246e-05
0.9 0.000197926 5.90579e-05 7.91246e-05
1.05 0.000174019 6.20541e-05 7.91246e-05
1.2 0.000155549 6.50221e-05 7.91246e-05
1.35 0.000140798 6.79601e-05 7.91246e-05
1.5 0.000128714 7.08663e-05 7.91246e-05
1.8 0.000110038 7.65739e-05 7.91246e-05
2.4 8.55645e-05 8.74978e-05 7.91246e-05
3 7.01368e-05 9.76381e-05 7.91246e-05
3.6 0 0.000166336 7.91246e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000495005 5.66449e-05 7.91246e-05
0.6 0.000277069 6.29523e-05 7.91246e-05
0.75 0.000230295 6.60781e-05 7.91246e-05
0.9 0.000197926 6.9183e-05 7.91246e-05
1.05 0.000174019 7.22623e-05 7.91246e-05
1.2 0.000155549 7.53112e-05 7.91246e-05
1.35 0.000140798 7.83333e-05 7.91246e-05
1.5 0.000128714 8.13214e-05 7.91246e-05
1.8 0.000110038 8.71886e-05 7.91246e-05
2.4 8.55645e-05 9.84149e-05 7.91246e-05
3 7.01368e-05 0.000108839 7.91246e-05
3.6 0 0.000177795 7.91246e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000495005 6.42069e-05 7.91246e-05
0.6 0.000277069 7.07379e-05 7.91246e-05
0.75 0.000230295 7.39729e-05 7.91246e-05
0.9 0.000197926 7.71866e-05 7.91246e-05
1.05 0.000174019 8.03741e-05 7.91246e-05
1.2 0.000155549 8.35339e-05 7.91246e-05
1.35 0.000140798 8.66615e-05 7.91246e-05
1.5 0.000128714 8.97546e-05 7.91246e-05
1.8 0.000110038 9.58281e-05 7.91246e-05
2.4 8.55645e-05 0.000107454 7.91246e-05
3 7.01368e-05 0.000118247 7.91246e-05
3.6 0 0.000187536 7.91246e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000495005 7.48617e-05 7.91246e-05
0.6 0.000277069 8.27979e-05 7.91246e-05
0.75 0.000230295 8.67301e-05 7.91246e-05
0.9 0.000197926 9.06352e-05 7.91246e-05
1.05 0.000174019 9.45096e-05 7.91246e-05
1.2 0.000155549 9.83475e-05 7.91246e-05
1.35 0.000140798 0.000102149 7.91246e-05
1.5 0.000128714 0.000105908 7.91246e-05
1.8 0.000110038 0.000113289 7.91246e-05
2.4 8.55645e-05 0.000127417 7.91246e-05
3 7.01368e-05 0.000140533 7.91246e-05
3.6 0 0.000211935 7.91246e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 1.83081e-05
0 1.8 0 1.83081e-05
0 3.4 0 1.83081e-05
0 4.4 0 1.83081e-05
0 5.2 0 1.83081e-05
0 6.8 0 1.83081e-05
0 7.8 0 1.83081e-05
0 8.6 0 1.83081e-05
0 10.2 0 1.83081e-05
0 13.6 0 1.83081e-05
1.8 1.8 0 1.83081e-05
1.8 3.4 0 1.83081e-05
1.8 4.4 0 1.83081e-05
1.8 5.2 0 1.83081e-05
1.8 6.8 0 1.83081e-05
1.8 7.8 0 1.83081e-05
1.8 8.6 0 1.83081e-05
1.8 10.2 0 1.83081e-05
1.8 13.6 0 1.83081e-05
3.4 3.4 0 1.83081e-05
3.4 4.4 0 1.83081e-05
3.4 5.2 0 1.83081e-05
3.4 6.8 0 1.83081e-05
3.4 7.8 0 1.83081e-05
3.4 8.6 0 1.83081e-05
3.4 10.2 0 1.83081e-05
3.4 13.6 0 1.83081e-05
4.4 4.4 0 1.83081e-05
4.4 5.2 0 1.83081e-05
4.4 6.8 0 1.83081e-05
4.4 7.8 0 1.83081e-05
4.4 8.6 0 1.83081e-05
4.4 10.2 0 1.83081e-05
4.4 13.6 0 1.83081e-05
5.2 5.2 0 1.83081e-05
5.2 6.8 0 1.83081e-05
5.2 7.8 0 1.83081e-05
5.2 8.6 0 1.83081e-05
5.2 10.2 0 1.83081e-05
5.2 13.6 0 1.83081e-05
6.8 6.8 0 1.83081e-05
6.8 7.8 0 1.83081e-05
6.8 8.6 0 1.83081e-05
6.8 10.2 0 1.83081e-05
6.8 13.6 0 1.83081e-05
7.8 7.8 0 1.83081e-05
7.8 8.6 0 1.83081e-05
7.8 10.2 0 1.83081e-05
7.8 13.6 0 1.83081e-05
8.6 8.6 0 1.83081e-05
8.6 10.2 0 1.83081e-05
8.6 13.6 0 1.83081e-05
10.2 10.2 0 1.83081e-05
10.2 13.6 0 1.83081e-05
13.6 0 13.6 1.83081e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 0.0001585 2.78794e-05 9.15404e-06
3.2 8.91471e-05 3.59192e-05 9.15404e-06
4 7.39927e-05 3.88608e-05 9.15404e-06
4.8 4.00253e-05 3.725e-05 9.15404e-06
5.6 3.43073e-05 4.04672e-05 9.15404e-06
6.4 3.00189e-05 4.28232e-05 9.15404e-06
7.2 2.66835e-05 4.42598e-05 9.15404e-06
8 0 4.47418e-05 9.15404e-06
9.6 0 4.47418e-05 9.15404e-06
12.8 0 4.47418e-05 9.15404e-06
16 0 4.47418e-05 9.15404e-06
19.2 0 4.47418e-05 9.15404e-06
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 0.0001585 8.17344e-05 9.15404e-06
3.2 8.91471e-05 9.42758e-05 9.15404e-06
4 7.39927e-05 9.88616e-05 9.15404e-06
4.8 4.00253e-05 9.63501e-05 9.15404e-06
5.6 3.43073e-05 0.000101368 9.15404e-06
6.4 3.00189e-05 0.000105043 9.15404e-06
7.2 2.66835e-05 0.000107283 9.15404e-06
8 0 0.000108035 9.15404e-06
9.6 0 0.000108035 9.15404e-06
12.8 0 0.000108035 9.15404e-06
16 0 0.000108035 9.15404e-06
19.2 0 0.000108035 9.15404e-06
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 0.0001585 0.000117965 9.15404e-06
3.2 8.91471e-05 0.000130923 9.15404e-06
4 7.39927e-05 0.000135666 9.15404e-06
4.8 4.00253e-05 0.000133071 9.15404e-06
5.6 3.43073e-05 0.000138256 9.15404e-06
6.4 3.00189e-05 0.000142054 9.15404e-06
7.2 2.66835e-05 0.00014437 9.15404e-06
8 0 0.000145146 9.15404e-06
9.6 0 0.000145146 9.15404e-06
12.8 0 0.000145146 9.15404e-06
16 0 0.000145146 9.15404e-06
19.2 0 0.000145146 9.15404e-06
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 0.0001585 0.000142564 9.15404e-06
3.2 8.91471e-05 0.000156021 9.15404e-06
4 7.39927e-05 0.000160945 9.15404e-06
4.8 4.00253e-05 0.000158249 9.15404e-06
5.6 3.43073e-05 0.000163635 9.15404e-06
6.4 3.00189e-05 0.000167577 9.15404e-06
7.2 2.66835e-05 0.000169981 9.15404e-06
8 0 0.000170789 9.15404e-06
9.6 0 0.000170789 9.15404e-06
12.8 0 0.000170789 9.15404e-06
16 0 0.000170789 9.15404e-06
19.2 0 0.000170789 9.15404e-06
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 0.0001585 0.00014017 9.15404e-06
3.2 8.91471e-05 0.000155397 9.15404e-06
4 7.39927e-05 0.000160967 9.15404e-06
4.8 4.00253e-05 0.000157918 9.15404e-06
5.6 3.43073e-05 0.000164009 9.15404e-06
6.4 3.00189e-05 0.000168472 9.15404e-06
7.2 2.66835e-05 0.000171192 9.15404e-06
8 0 0.000172105 9.15404e-06
9.6 0 0.000172105 9.15404e-06
12.8 0 0.000172105 9.15404e-06
16 0 0.000172105 9.15404e-06
19.2 0 0.000172105 9.15404e-06
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 0.0001585 0.000250386 9.15404e-06
3.2 8.91471e-05 0.000271546 9.15404e-06
4 7.39927e-05 0.000279288 9.15404e-06
4.8 4.00253e-05 0.000275048 9.15404e-06
5.6 3.43073e-05 0.000283515 9.15404e-06
6.4 3.00189e-05 0.000289715 9.15404e-06
7.2 2.66835e-05 0.000293496 9.15404e-06
8 0 0.000294765 9.15404e-06
9.6 0 0.000294765 9.15404e-06
12.8 0 0.000294765 9.15404e-06
16 0 0.000294765 9.15404e-06
19.2 0 0.000294765 9.15404e-06
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0