Add a primitive OpenRCX configuration based on spef_extractor
This is a band-aid until magic-extracted values are stable enough.
Obtained from https://github.com/efabless/openrcx-calibration.
diff --git a/sky130/openlane/config.tcl b/sky130/openlane/config.tcl
index 19e6afb..a1172d9 100755
--- a/sky130/openlane/config.tcl
+++ b/sky130/openlane/config.tcl
@@ -128,9 +128,9 @@
set ::env(DRC_EXCLUDE_CELL_LIST_OPT) "$::env(PDK_ROOT)/$::env(PDK)/libs.tech/openlane/$::env(STD_CELL_LIBRARY_OPT)/drc_exclude.cells"
# Open-RCX Rules File
-set ::env(RCX_RULES) "$::env(PDK_ROOT)/$::env(PDK)/libs.tech/openlane/rules.openrcx.$::env(PDK).nom.magic"
-set ::env(RCX_RULES_MIN) "$::env(PDK_ROOT)/$::env(PDK)/libs.tech/openlane/rules.openrcx.$::env(PDK).min.magic"
-set ::env(RCX_RULES_MAX) "$::env(PDK_ROOT)/$::env(PDK)/libs.tech/openlane/rules.openrcx.$::env(PDK).max.magic"
+set ::env(RCX_RULES) "$::env(PDK_ROOT)/$::env(PDK)/libs.tech/openlane/rules.openrcx.$::env(PDK).nom.spef_extractor"
+set ::env(RCX_RULES_MIN) "$::env(PDK_ROOT)/$::env(PDK)/libs.tech/openlane/rules.openrcx.$::env(PDK).min.spef_extractor"
+set ::env(RCX_RULES_MAX) "$::env(PDK_ROOT)/$::env(PDK)/libs.tech/openlane/rules.openrcx.$::env(PDK).max.spef_extractor"
# Extra PDN configs
set ::env(FP_PDN_RAILS_LAYER) met1
diff --git a/sky130/openlane/rules.openrcx.sky130A.max.spef_extractor b/sky130/openlane/rules.openrcx.sky130A.max.spef_extractor
new file mode 100644
index 0000000..f9b1fb7
--- /dev/null
+++ b/sky130/openlane/rules.openrcx.sky130A.max.spef_extractor
@@ -0,0 +1,1645 @@
+Extraction Rules for OpenRCX
+
+DIAGMODEL ON
+
+LayerCount 6
+DensityRate 1 0
+
+DensityModel 0
+
+Metal 1 RESOVER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 RESOVER 0
+DIST count 55 width 0.17
+0 0 0 0.1
+0 0.29 0 0.1
+0 0.46 0 0.1
+0 0.665 0 0.1
+0 0.75 0 0.1
+0 0.92 0 0.1
+0 1.125 0 0.1
+0 1.21 0 0.1
+0 1.38 0 0.1
+0 1.84 0 0.1
+0.29 0.29 0 0.1
+0.29 0.46 0 0.1
+0.29 0.665 0 0.1
+0.29 0.75 0 0.1
+0.29 0.92 0 0.1
+0.29 1.125 0 0.1
+0.29 1.21 0 0.1
+0.29 1.38 0 0.1
+0.29 1.84 0 0.1
+0.46 0.46 0 0.1
+0.46 0.665 0 0.1
+0.46 0.75 0 0.1
+0.46 0.92 0 0.1
+0.46 1.125 0 0.1
+0.46 1.21 0 0.1
+0.46 1.38 0 0.1
+0.46 1.84 0 0.1
+0.665 0.665 0 0.1
+0.665 0.75 0 0.1
+0.665 0.92 0 0.1
+0.665 1.125 0 0.1
+0.665 1.21 0 0.1
+0.665 1.38 0 0.1
+0.665 1.84 0 0.1
+0.75 0.75 0 0.1
+0.75 0.92 0 0.1
+0.75 1.125 0 0.1
+0.75 1.21 0 0.1
+0.75 1.38 0 0.1
+0.75 1.84 0 0.1
+0.92 0.92 0 0.1
+0.92 1.125 0 0.1
+0.92 1.21 0 0.1
+0.92 1.38 0 0.1
+0.92 1.84 0 0.1
+1.125 1.125 0 0.1
+1.125 1.21 0 0.1
+1.125 1.38 0 0.1
+1.125 1.84 0 0.1
+1.21 1.21 0 0.1
+1.21 1.38 0 0.1
+1.21 1.84 0 0.1
+1.38 1.38 0 0.1
+1.38 1.84 0 0.1
+1.84 0 1.84 0.1
+END DIST
+
+Metal 1 OVER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 OVER 0
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.05
+0.34 0 4.42519e-05 0.05
+0.425 0 4.42519e-05 0.05
+0.51 0 4.42519e-05 0.05
+0.595 0 4.42519e-05 0.05
+0.68 0 4.42519e-05 0.05
+0.765 0 4.42519e-05 0.05
+0.85 0 4.42519e-05 0.05
+1.02 0 4.42519e-05 0.05
+1.36 0 4.42519e-05 0.05
+1.7 0 4.42519e-05 0.05
+2.04 0 4.42519e-05 0.05
+END DIST
+
+Metal 1 UNDER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 UNDER 2
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.05
+0.34 0 4.42519e-05 0.05
+0.425 0 4.42519e-05 0.05
+0.51 0 4.42519e-05 0.05
+0.595 0 4.42519e-05 0.05
+0.68 0 4.42519e-05 0.05
+0.765 0 4.42519e-05 0.05
+0.85 0 4.42519e-05 0.05
+1.02 0 4.42519e-05 0.05
+1.36 0 4.42519e-05 0.05
+1.7 0 4.42519e-05 0.05
+2.04 0 4.42519e-05 0.05
+END DIST
+
+Metal 1 UNDER 3
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.05
+0.34 0 4.42519e-05 0.05
+0.425 0 4.42519e-05 0.05
+0.51 0 4.42519e-05 0.05
+0.595 0 4.42519e-05 0.05
+0.68 0 4.42519e-05 0.05
+0.765 0 4.42519e-05 0.05
+0.85 0 4.42519e-05 0.05
+1.02 0 4.42519e-05 0.05
+1.36 0 4.42519e-05 0.05
+1.7 0 4.42519e-05 0.05
+2.04 0 4.42519e-05 0.05
+END DIST
+
+Metal 1 UNDER 4
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.05
+0.34 0 4.42519e-05 0.05
+0.425 0 4.42519e-05 0.05
+0.51 0 4.42519e-05 0.05
+0.595 0 4.42519e-05 0.05
+0.68 0 4.42519e-05 0.05
+0.765 0 4.42519e-05 0.05
+0.85 0 4.42519e-05 0.05
+1.02 0 4.42519e-05 0.05
+1.36 0 4.42519e-05 0.05
+1.7 0 4.42519e-05 0.05
+2.04 0 4.42519e-05 0.05
+END DIST
+
+Metal 1 UNDER 5
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.05
+0.34 0 4.42519e-05 0.05
+0.425 0 4.42519e-05 0.05
+0.51 0 4.42519e-05 0.05
+0.595 0 4.42519e-05 0.05
+0.68 0 4.42519e-05 0.05
+0.765 0 4.42519e-05 0.05
+0.85 0 4.42519e-05 0.05
+1.02 0 4.42519e-05 0.05
+1.36 0 4.42519e-05 0.05
+1.7 0 4.42519e-05 0.05
+2.04 0 4.42519e-05 0.05
+END DIST
+
+Metal 1 UNDER 6
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.05
+0.34 0 4.42519e-05 0.05
+0.425 0 4.42519e-05 0.05
+0.51 0 4.42519e-05 0.05
+0.595 0 4.42519e-05 0.05
+0.68 0 4.42519e-05 0.05
+0.765 0 4.42519e-05 0.05
+0.85 0 4.42519e-05 0.05
+1.02 0 4.42519e-05 0.05
+1.36 0 4.42519e-05 0.05
+1.7 0 4.42519e-05 0.05
+2.04 0 4.42519e-05 0.05
+END DIST
+
+Metal 1 DIAGUNDER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 DIAGUNDER 2
+DIST count 13 width 0.17
+0 0 0 0.05
+0.17 0 0 0.05
+0.34 0 0 0.05
+0.425 0 0 0.05
+0.51 0 0 0.05
+0.595 0 0 0.05
+0.68 0 0 0.05
+0.765 0 0 0.05
+0.85 0 0 0.05
+1.02 0 0 0.05
+1.36 0 0 0.05
+1.7 0 0 0.05
+2.04 0 0 0.05
+END DIST
+
+Metal 1 DIAGUNDER 3
+DIST count 13 width 0.17
+0 0 0 0.05
+0.17 0 0 0.05
+0.34 0 0 0.05
+0.425 0 0 0.05
+0.51 0 0 0.05
+0.595 0 0 0.05
+0.68 0 0 0.05
+0.765 0 0 0.05
+0.85 0 0 0.05
+1.02 0 0 0.05
+1.36 0 0 0.05
+1.7 0 0 0.05
+2.04 0 0 0.05
+END DIST
+
+Metal 1 DIAGUNDER 4
+DIST count 13 width 0.17
+0 0 0 0.05
+0.17 0 0 0.05
+0.34 0 0 0.05
+0.425 0 0 0.05
+0.51 0 0 0.05
+0.595 0 0 0.05
+0.68 0 0 0.05
+0.765 0 0 0.05
+0.85 0 0 0.05
+1.02 0 0 0.05
+1.36 0 0 0.05
+1.7 0 0 0.05
+2.04 0 0 0.05
+END DIST
+
+Metal 1 DIAGUNDER 5
+DIST count 13 width 0.17
+0 0 0 0.05
+0.17 0 0 0.05
+0.34 0 0 0.05
+0.425 0 0 0.05
+0.51 0 0 0.05
+0.595 0 0 0.05
+0.68 0 0 0.05
+0.765 0 0 0.05
+0.85 0 0 0.05
+1.02 0 0 0.05
+1.36 0 0 0.05
+1.7 0 0 0.05
+2.04 0 0 0.05
+END DIST
+
+Metal 1 DIAGUNDER 6
+DIST count 0 width 0.17
+END DIST
+
+Metal 2 RESOVER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.00103571
+0 0.2 0 0.00103571
+0 0.34 0 0.00103571
+0 0.47 0 0.00103571
+0 0.54 0 0.00103571
+0 0.68 0 0.00103571
+0 0.81 0 0.00103571
+0 0.88 0 0.00103571
+0 1.02 0 0.00103571
+0 1.36 0 0.00103571
+0.2 0.2 0 0.00103571
+0.2 0.34 0 0.00103571
+0.2 0.47 0 0.00103571
+0.2 0.54 0 0.00103571
+0.2 0.68 0 0.00103571
+0.2 0.81 0 0.00103571
+0.2 0.88 0 0.00103571
+0.2 1.02 0 0.00103571
+0.2 1.36 0 0.00103571
+0.34 0.34 0 0.00103571
+0.34 0.47 0 0.00103571
+0.34 0.54 0 0.00103571
+0.34 0.68 0 0.00103571
+0.34 0.81 0 0.00103571
+0.34 0.88 0 0.00103571
+0.34 1.02 0 0.00103571
+0.34 1.36 0 0.00103571
+0.47 0.47 0 0.00103571
+0.47 0.54 0 0.00103571
+0.47 0.68 0 0.00103571
+0.47 0.81 0 0.00103571
+0.47 0.88 0 0.00103571
+0.47 1.02 0 0.00103571
+0.47 1.36 0 0.00103571
+0.54 0.54 0 0.00103571
+0.54 0.68 0 0.00103571
+0.54 0.81 0 0.00103571
+0.54 0.88 0 0.00103571
+0.54 1.02 0 0.00103571
+0.54 1.36 0 0.00103571
+0.68 0.68 0 0.00103571
+0.68 0.81 0 0.00103571
+0.68 0.88 0 0.00103571
+0.68 1.02 0 0.00103571
+0.68 1.36 0 0.00103571
+0.81 0.81 0 0.00103571
+0.81 0.88 0 0.00103571
+0.81 1.02 0 0.00103571
+0.81 1.36 0 0.00103571
+0.88 0.88 0 0.00103571
+0.88 1.02 0 0.00103571
+0.88 1.36 0 0.00103571
+1.02 1.02 0 0.00103571
+1.02 1.36 0 0.00103571
+1.36 0 1.36 0.00103571
+END DIST
+
+Metal 2 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 2 OVER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 OVER 0
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000517857
+0.28 0 4.27813e-05 0.000517857
+0.35 0 4.27813e-05 0.000517857
+0.42 0 4.27813e-05 0.000517857
+0.49 0 4.27813e-05 0.000517857
+0.56 0 4.27813e-05 0.000517857
+0.63 0 4.27813e-05 0.000517857
+0.7 0 4.27813e-05 0.000517857
+0.84 0 4.27813e-05 0.000517857
+1.12 0 4.27813e-05 0.000517857
+1.4 0 4.27813e-05 0.000517857
+1.68 0 4.27813e-05 0.000517857
+END DIST
+
+Metal 2 OVER 1
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000517857
+0.28 0 4.27813e-05 0.000517857
+0.35 0 4.27813e-05 0.000517857
+0.42 0 4.27813e-05 0.000517857
+0.49 0 4.27813e-05 0.000517857
+0.56 0 4.27813e-05 0.000517857
+0.63 0 4.27813e-05 0.000517857
+0.7 0 4.27813e-05 0.000517857
+0.84 0 4.27813e-05 0.000517857
+1.12 0 4.27813e-05 0.000517857
+1.4 0 4.27813e-05 0.000517857
+1.68 0 4.27813e-05 0.000517857
+END DIST
+
+Metal 2 UNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 UNDER 3
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000517857
+0.28 0 4.27813e-05 0.000517857
+0.35 0 4.27813e-05 0.000517857
+0.42 0 4.27813e-05 0.000517857
+0.49 0 4.27813e-05 0.000517857
+0.56 0 4.27813e-05 0.000517857
+0.63 0 4.27813e-05 0.000517857
+0.7 0 4.27813e-05 0.000517857
+0.84 0 4.27813e-05 0.000517857
+1.12 0 4.27813e-05 0.000517857
+1.4 0 4.27813e-05 0.000517857
+1.68 0 4.27813e-05 0.000517857
+END DIST
+
+Metal 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000517857
+0.28 0 4.27813e-05 0.000517857
+0.35 0 4.27813e-05 0.000517857
+0.42 0 4.27813e-05 0.000517857
+0.49 0 4.27813e-05 0.000517857
+0.56 0 4.27813e-05 0.000517857
+0.63 0 4.27813e-05 0.000517857
+0.7 0 4.27813e-05 0.000517857
+0.84 0 4.27813e-05 0.000517857
+1.12 0 4.27813e-05 0.000517857
+1.4 0 4.27813e-05 0.000517857
+1.68 0 4.27813e-05 0.000517857
+END DIST
+
+Metal 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000517857
+0.28 0 4.27813e-05 0.000517857
+0.35 0 4.27813e-05 0.000517857
+0.42 0 4.27813e-05 0.000517857
+0.49 0 4.27813e-05 0.000517857
+0.56 0 4.27813e-05 0.000517857
+0.63 0 4.27813e-05 0.000517857
+0.7 0 4.27813e-05 0.000517857
+0.84 0 4.27813e-05 0.000517857
+1.12 0 4.27813e-05 0.000517857
+1.4 0 4.27813e-05 0.000517857
+1.68 0 4.27813e-05 0.000517857
+END DIST
+
+Metal 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000517857
+0.28 0 4.27813e-05 0.000517857
+0.35 0 4.27813e-05 0.000517857
+0.42 0 4.27813e-05 0.000517857
+0.49 0 4.27813e-05 0.000517857
+0.56 0 4.27813e-05 0.000517857
+0.63 0 4.27813e-05 0.000517857
+0.7 0 4.27813e-05 0.000517857
+0.84 0 4.27813e-05 0.000517857
+1.12 0 4.27813e-05 0.000517857
+1.4 0 4.27813e-05 0.000517857
+1.68 0 4.27813e-05 0.000517857
+END DIST
+
+Metal 2 DIAGUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 DIAGUNDER 3
+DIST count 13 width 0.14
+0 0 0 0.000517857
+0.14 0 0 0.000517857
+0.28 0 0 0.000517857
+0.35 0 0 0.000517857
+0.42 0 0 0.000517857
+0.49 0 0 0.000517857
+0.56 0 0 0.000517857
+0.63 0 0 0.000517857
+0.7 0 0 0.000517857
+0.84 0 0 0.000517857
+1.12 0 0 0.000517857
+1.4 0 0 0.000517857
+1.68 0 0 0.000517857
+END DIST
+
+Metal 2 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 0 0.000517857
+0.14 0 0 0.000517857
+0.28 0 0 0.000517857
+0.35 0 0 0.000517857
+0.42 0 0 0.000517857
+0.49 0 0 0.000517857
+0.56 0 0 0.000517857
+0.63 0 0 0.000517857
+0.7 0 0 0.000517857
+0.84 0 0 0.000517857
+1.12 0 0 0.000517857
+1.4 0 0 0.000517857
+1.68 0 0 0.000517857
+END DIST
+
+Metal 2 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 0 0.000517857
+0.14 0 0 0.000517857
+0.28 0 0 0.000517857
+0.35 0 0 0.000517857
+0.42 0 0 0.000517857
+0.49 0 0 0.000517857
+0.56 0 0 0.000517857
+0.63 0 0 0.000517857
+0.7 0 0 0.000517857
+0.84 0 0 0.000517857
+1.12 0 0 0.000517857
+1.4 0 0 0.000517857
+1.68 0 0 0.000517857
+END DIST
+
+Metal 2 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 0 0.000517857
+0.14 0 0 0.000517857
+0.28 0 0 0.000517857
+0.35 0 0 0.000517857
+0.42 0 0 0.000517857
+0.49 0 0 0.000517857
+0.56 0 0 0.000517857
+0.63 0 0 0.000517857
+0.7 0 0 0.000517857
+0.84 0 0 0.000517857
+1.12 0 0 0.000517857
+1.4 0 0 0.000517857
+1.68 0 0 0.000517857
+END DIST
+
+Metal 2 OVERUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 OVER 1 UNDER 3
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000517857
+0.28 0 4.27813e-05 0.000517857
+0.35 0 4.27813e-05 0.000517857
+0.42 0 4.27813e-05 0.000517857
+0.49 0 4.27813e-05 0.000517857
+0.56 0 4.27813e-05 0.000517857
+0.63 0 4.27813e-05 0.000517857
+0.7 0 4.27813e-05 0.000517857
+0.84 0 4.27813e-05 0.000517857
+1.12 0 4.27813e-05 0.000517857
+1.4 0 4.27813e-05 0.000517857
+1.68 0 4.27813e-05 0.000517857
+END DIST
+
+Metal 2 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000517857
+0.28 0 4.27813e-05 0.000517857
+0.35 0 4.27813e-05 0.000517857
+0.42 0 4.27813e-05 0.000517857
+0.49 0 4.27813e-05 0.000517857
+0.56 0 4.27813e-05 0.000517857
+0.63 0 4.27813e-05 0.000517857
+0.7 0 4.27813e-05 0.000517857
+0.84 0 4.27813e-05 0.000517857
+1.12 0 4.27813e-05 0.000517857
+1.4 0 4.27813e-05 0.000517857
+1.68 0 4.27813e-05 0.000517857
+END DIST
+
+Metal 2 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000517857
+0.28 0 4.27813e-05 0.000517857
+0.35 0 4.27813e-05 0.000517857
+0.42 0 4.27813e-05 0.000517857
+0.49 0 4.27813e-05 0.000517857
+0.56 0 4.27813e-05 0.000517857
+0.63 0 4.27813e-05 0.000517857
+0.7 0 4.27813e-05 0.000517857
+0.84 0 4.27813e-05 0.000517857
+1.12 0 4.27813e-05 0.000517857
+1.4 0 4.27813e-05 0.000517857
+1.68 0 4.27813e-05 0.000517857
+END DIST
+
+Metal 2 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000517857
+0.28 0 4.27813e-05 0.000517857
+0.35 0 4.27813e-05 0.000517857
+0.42 0 4.27813e-05 0.000517857
+0.49 0 4.27813e-05 0.000517857
+0.56 0 4.27813e-05 0.000517857
+0.63 0 4.27813e-05 0.000517857
+0.7 0 4.27813e-05 0.000517857
+0.84 0 4.27813e-05 0.000517857
+1.12 0 4.27813e-05 0.000517857
+1.4 0 4.27813e-05 0.000517857
+1.68 0 4.27813e-05 0.000517857
+END DIST
+
+Metal 3 RESOVER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.00103571
+0 0.32 0 0.00103571
+0 0.46 0 0.00103571
+0 0.71 0 0.00103571
+0 0.78 0 0.00103571
+0 0.92 0 0.00103571
+0 1.17 0 0.00103571
+0 1.24 0 0.00103571
+0 1.38 0 0.00103571
+0 1.84 0 0.00103571
+0.32 0.32 0 0.00103571
+0.32 0.46 0 0.00103571
+0.32 0.71 0 0.00103571
+0.32 0.78 0 0.00103571
+0.32 0.92 0 0.00103571
+0.32 1.17 0 0.00103571
+0.32 1.24 0 0.00103571
+0.32 1.38 0 0.00103571
+0.32 1.84 0 0.00103571
+0.46 0.46 0 0.00103571
+0.46 0.71 0 0.00103571
+0.46 0.78 0 0.00103571
+0.46 0.92 0 0.00103571
+0.46 1.17 0 0.00103571
+0.46 1.24 0 0.00103571
+0.46 1.38 0 0.00103571
+0.46 1.84 0 0.00103571
+0.71 0.71 0 0.00103571
+0.71 0.78 0 0.00103571
+0.71 0.92 0 0.00103571
+0.71 1.17 0 0.00103571
+0.71 1.24 0 0.00103571
+0.71 1.38 0 0.00103571
+0.71 1.84 0 0.00103571
+0.78 0.78 0 0.00103571
+0.78 0.92 0 0.00103571
+0.78 1.17 0 0.00103571
+0.78 1.24 0 0.00103571
+0.78 1.38 0 0.00103571
+0.78 1.84 0 0.00103571
+0.92 0.92 0 0.00103571
+0.92 1.17 0 0.00103571
+0.92 1.24 0 0.00103571
+0.92 1.38 0 0.00103571
+0.92 1.84 0 0.00103571
+1.17 1.17 0 0.00103571
+1.17 1.24 0 0.00103571
+1.17 1.38 0 0.00103571
+1.17 1.84 0 0.00103571
+1.24 1.24 0 0.00103571
+1.24 1.38 0 0.00103571
+1.24 1.84 0 0.00103571
+1.38 1.38 0 0.00103571
+1.38 1.84 0 0.00103571
+1.84 0 1.84 0.00103571
+END DIST
+
+Metal 3 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 RESOVER 2
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 OVER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 OVER 0
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000517857
+0.28 0 3.93264e-05 0.000517857
+0.35 0 3.93264e-05 0.000517857
+0.42 0 3.93264e-05 0.000517857
+0.49 0 3.93264e-05 0.000517857
+0.56 0 3.93264e-05 0.000517857
+0.63 0 3.93264e-05 0.000517857
+0.7 0 3.93264e-05 0.000517857
+0.84 0 3.93264e-05 0.000517857
+1.12 0 3.93264e-05 0.000517857
+1.4 0 3.93264e-05 0.000517857
+1.68 0 3.93264e-05 0.000517857
+END DIST
+
+Metal 3 OVER 1
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000517857
+0.28 0 3.93264e-05 0.000517857
+0.35 0 3.93264e-05 0.000517857
+0.42 0 3.93264e-05 0.000517857
+0.49 0 3.93264e-05 0.000517857
+0.56 0 3.93264e-05 0.000517857
+0.63 0 3.93264e-05 0.000517857
+0.7 0 3.93264e-05 0.000517857
+0.84 0 3.93264e-05 0.000517857
+1.12 0 3.93264e-05 0.000517857
+1.4 0 3.93264e-05 0.000517857
+1.68 0 3.93264e-05 0.000517857
+END DIST
+
+Metal 3 OVER 2
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000517857
+0.28 0 3.93264e-05 0.000517857
+0.35 0 3.93264e-05 0.000517857
+0.42 0 3.93264e-05 0.000517857
+0.49 0 3.93264e-05 0.000517857
+0.56 0 3.93264e-05 0.000517857
+0.63 0 3.93264e-05 0.000517857
+0.7 0 3.93264e-05 0.000517857
+0.84 0 3.93264e-05 0.000517857
+1.12 0 3.93264e-05 0.000517857
+1.4 0 3.93264e-05 0.000517857
+1.68 0 3.93264e-05 0.000517857
+END DIST
+
+Metal 3 UNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 UNDER 4
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000517857
+0.28 0 3.93264e-05 0.000517857
+0.35 0 3.93264e-05 0.000517857
+0.42 0 3.93264e-05 0.000517857
+0.49 0 3.93264e-05 0.000517857
+0.56 0 3.93264e-05 0.000517857
+0.63 0 3.93264e-05 0.000517857
+0.7 0 3.93264e-05 0.000517857
+0.84 0 3.93264e-05 0.000517857
+1.12 0 3.93264e-05 0.000517857
+1.4 0 3.93264e-05 0.000517857
+1.68 0 3.93264e-05 0.000517857
+END DIST
+
+Metal 3 UNDER 5
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000517857
+0.28 0 3.93264e-05 0.000517857
+0.35 0 3.93264e-05 0.000517857
+0.42 0 3.93264e-05 0.000517857
+0.49 0 3.93264e-05 0.000517857
+0.56 0 3.93264e-05 0.000517857
+0.63 0 3.93264e-05 0.000517857
+0.7 0 3.93264e-05 0.000517857
+0.84 0 3.93264e-05 0.000517857
+1.12 0 3.93264e-05 0.000517857
+1.4 0 3.93264e-05 0.000517857
+1.68 0 3.93264e-05 0.000517857
+END DIST
+
+Metal 3 UNDER 6
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000517857
+0.28 0 3.93264e-05 0.000517857
+0.35 0 3.93264e-05 0.000517857
+0.42 0 3.93264e-05 0.000517857
+0.49 0 3.93264e-05 0.000517857
+0.56 0 3.93264e-05 0.000517857
+0.63 0 3.93264e-05 0.000517857
+0.7 0 3.93264e-05 0.000517857
+0.84 0 3.93264e-05 0.000517857
+1.12 0 3.93264e-05 0.000517857
+1.4 0 3.93264e-05 0.000517857
+1.68 0 3.93264e-05 0.000517857
+END DIST
+
+Metal 3 DIAGUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 0 0.000517857
+0.14 0 0 0.000517857
+0.28 0 0 0.000517857
+0.35 0 0 0.000517857
+0.42 0 0 0.000517857
+0.49 0 0 0.000517857
+0.56 0 0 0.000517857
+0.63 0 0 0.000517857
+0.7 0 0 0.000517857
+0.84 0 0 0.000517857
+1.12 0 0 0.000517857
+1.4 0 0 0.000517857
+1.68 0 0 0.000517857
+END DIST
+
+Metal 3 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 0 0.000517857
+0.14 0 0 0.000517857
+0.28 0 0 0.000517857
+0.35 0 0 0.000517857
+0.42 0 0 0.000517857
+0.49 0 0 0.000517857
+0.56 0 0 0.000517857
+0.63 0 0 0.000517857
+0.7 0 0 0.000517857
+0.84 0 0 0.000517857
+1.12 0 0 0.000517857
+1.4 0 0 0.000517857
+1.68 0 0 0.000517857
+END DIST
+
+Metal 3 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 0 0.000517857
+0.14 0 0 0.000517857
+0.28 0 0 0.000517857
+0.35 0 0 0.000517857
+0.42 0 0 0.000517857
+0.49 0 0 0.000517857
+0.56 0 0 0.000517857
+0.63 0 0 0.000517857
+0.7 0 0 0.000517857
+0.84 0 0 0.000517857
+1.12 0 0 0.000517857
+1.4 0 0 0.000517857
+1.68 0 0 0.000517857
+END DIST
+
+Metal 3 OVERUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000517857
+0.28 0 3.93264e-05 0.000517857
+0.35 0 3.93264e-05 0.000517857
+0.42 0 3.93264e-05 0.000517857
+0.49 0 3.93264e-05 0.000517857
+0.56 0 3.93264e-05 0.000517857
+0.63 0 3.93264e-05 0.000517857
+0.7 0 3.93264e-05 0.000517857
+0.84 0 3.93264e-05 0.000517857
+1.12 0 3.93264e-05 0.000517857
+1.4 0 3.93264e-05 0.000517857
+1.68 0 3.93264e-05 0.000517857
+END DIST
+
+Metal 3 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000517857
+0.28 0 3.93264e-05 0.000517857
+0.35 0 3.93264e-05 0.000517857
+0.42 0 3.93264e-05 0.000517857
+0.49 0 3.93264e-05 0.000517857
+0.56 0 3.93264e-05 0.000517857
+0.63 0 3.93264e-05 0.000517857
+0.7 0 3.93264e-05 0.000517857
+0.84 0 3.93264e-05 0.000517857
+1.12 0 3.93264e-05 0.000517857
+1.4 0 3.93264e-05 0.000517857
+1.68 0 3.93264e-05 0.000517857
+END DIST
+
+Metal 3 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000517857
+0.28 0 3.93264e-05 0.000517857
+0.35 0 3.93264e-05 0.000517857
+0.42 0 3.93264e-05 0.000517857
+0.49 0 3.93264e-05 0.000517857
+0.56 0 3.93264e-05 0.000517857
+0.63 0 3.93264e-05 0.000517857
+0.7 0 3.93264e-05 0.000517857
+0.84 0 3.93264e-05 0.000517857
+1.12 0 3.93264e-05 0.000517857
+1.4 0 3.93264e-05 0.000517857
+1.68 0 3.93264e-05 0.000517857
+END DIST
+
+Metal 3 OVER 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000517857
+0.28 0 3.93264e-05 0.000517857
+0.35 0 3.93264e-05 0.000517857
+0.42 0 3.93264e-05 0.000517857
+0.49 0 3.93264e-05 0.000517857
+0.56 0 3.93264e-05 0.000517857
+0.63 0 3.93264e-05 0.000517857
+0.7 0 3.93264e-05 0.000517857
+0.84 0 3.93264e-05 0.000517857
+1.12 0 3.93264e-05 0.000517857
+1.4 0 3.93264e-05 0.000517857
+1.68 0 3.93264e-05 0.000517857
+END DIST
+
+Metal 3 OVER 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000517857
+0.28 0 3.93264e-05 0.000517857
+0.35 0 3.93264e-05 0.000517857
+0.42 0 3.93264e-05 0.000517857
+0.49 0 3.93264e-05 0.000517857
+0.56 0 3.93264e-05 0.000517857
+0.63 0 3.93264e-05 0.000517857
+0.7 0 3.93264e-05 0.000517857
+0.84 0 3.93264e-05 0.000517857
+1.12 0 3.93264e-05 0.000517857
+1.4 0 3.93264e-05 0.000517857
+1.68 0 3.93264e-05 0.000517857
+END DIST
+
+Metal 3 OVER 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000517857
+0.28 0 3.93264e-05 0.000517857
+0.35 0 3.93264e-05 0.000517857
+0.42 0 3.93264e-05 0.000517857
+0.49 0 3.93264e-05 0.000517857
+0.56 0 3.93264e-05 0.000517857
+0.63 0 3.93264e-05 0.000517857
+0.7 0 3.93264e-05 0.000517857
+0.84 0 3.93264e-05 0.000517857
+1.12 0 3.93264e-05 0.000517857
+1.4 0 3.93264e-05 0.000517857
+1.68 0 3.93264e-05 0.000517857
+END DIST
+
+Metal 4 RESOVER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000186667
+0 0.38 0 0.000186667
+0 0.68 0 0.000186667
+0 0.91 0 0.000186667
+0 1.06 0 0.000186667
+0 1.36 0 0.000186667
+0 1.59 0 0.000186667
+0 1.74 0 0.000186667
+0 2.04 0 0.000186667
+0 2.72 0 0.000186667
+0.38 0.38 0 0.000186667
+0.38 0.68 0 0.000186667
+0.38 0.91 0 0.000186667
+0.38 1.06 0 0.000186667
+0.38 1.36 0 0.000186667
+0.38 1.59 0 0.000186667
+0.38 1.74 0 0.000186667
+0.38 2.04 0 0.000186667
+0.38 2.72 0 0.000186667
+0.68 0.68 0 0.000186667
+0.68 0.91 0 0.000186667
+0.68 1.06 0 0.000186667
+0.68 1.36 0 0.000186667
+0.68 1.59 0 0.000186667
+0.68 1.74 0 0.000186667
+0.68 2.04 0 0.000186667
+0.68 2.72 0 0.000186667
+0.91 0.91 0 0.000186667
+0.91 1.06 0 0.000186667
+0.91 1.36 0 0.000186667
+0.91 1.59 0 0.000186667
+0.91 1.74 0 0.000186667
+0.91 2.04 0 0.000186667
+0.91 2.72 0 0.000186667
+1.06 1.06 0 0.000186667
+1.06 1.36 0 0.000186667
+1.06 1.59 0 0.000186667
+1.06 1.74 0 0.000186667
+1.06 2.04 0 0.000186667
+1.06 2.72 0 0.000186667
+1.36 1.36 0 0.000186667
+1.36 1.59 0 0.000186667
+1.36 1.74 0 0.000186667
+1.36 2.04 0 0.000186667
+1.36 2.72 0 0.000186667
+1.59 1.59 0 0.000186667
+1.59 1.74 0 0.000186667
+1.59 2.04 0 0.000186667
+1.59 2.72 0 0.000186667
+1.74 1.74 0 0.000186667
+1.74 2.04 0 0.000186667
+1.74 2.72 0 0.000186667
+2.04 2.04 0 0.000186667
+2.04 2.72 0 0.000186667
+2.72 0 2.72 0.000186667
+END DIST
+
+Metal 4 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 OVER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 OVER 0
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 9.33333e-05
+0.6 0 4.3259e-05 9.33333e-05
+0.75 0 4.3259e-05 9.33333e-05
+0.9 0 4.3259e-05 9.33333e-05
+1.05 0 4.3259e-05 9.33333e-05
+1.2 0 4.3259e-05 9.33333e-05
+1.35 0 4.3259e-05 9.33333e-05
+1.5 0 4.3259e-05 9.33333e-05
+1.8 0 4.3259e-05 9.33333e-05
+2.4 0 4.3259e-05 9.33333e-05
+3 0 4.3259e-05 9.33333e-05
+3.6 0 4.3259e-05 9.33333e-05
+END DIST
+
+Metal 4 OVER 1
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 9.33333e-05
+0.6 0 4.3259e-05 9.33333e-05
+0.75 0 4.3259e-05 9.33333e-05
+0.9 0 4.3259e-05 9.33333e-05
+1.05 0 4.3259e-05 9.33333e-05
+1.2 0 4.3259e-05 9.33333e-05
+1.35 0 4.3259e-05 9.33333e-05
+1.5 0 4.3259e-05 9.33333e-05
+1.8 0 4.3259e-05 9.33333e-05
+2.4 0 4.3259e-05 9.33333e-05
+3 0 4.3259e-05 9.33333e-05
+3.6 0 4.3259e-05 9.33333e-05
+END DIST
+
+Metal 4 OVER 2
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 9.33333e-05
+0.6 0 4.3259e-05 9.33333e-05
+0.75 0 4.3259e-05 9.33333e-05
+0.9 0 4.3259e-05 9.33333e-05
+1.05 0 4.3259e-05 9.33333e-05
+1.2 0 4.3259e-05 9.33333e-05
+1.35 0 4.3259e-05 9.33333e-05
+1.5 0 4.3259e-05 9.33333e-05
+1.8 0 4.3259e-05 9.33333e-05
+2.4 0 4.3259e-05 9.33333e-05
+3 0 4.3259e-05 9.33333e-05
+3.6 0 4.3259e-05 9.33333e-05
+END DIST
+
+Metal 4 OVER 3
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 9.33333e-05
+0.6 0 4.3259e-05 9.33333e-05
+0.75 0 4.3259e-05 9.33333e-05
+0.9 0 4.3259e-05 9.33333e-05
+1.05 0 4.3259e-05 9.33333e-05
+1.2 0 4.3259e-05 9.33333e-05
+1.35 0 4.3259e-05 9.33333e-05
+1.5 0 4.3259e-05 9.33333e-05
+1.8 0 4.3259e-05 9.33333e-05
+2.4 0 4.3259e-05 9.33333e-05
+3 0 4.3259e-05 9.33333e-05
+3.6 0 4.3259e-05 9.33333e-05
+END DIST
+
+Metal 4 UNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 UNDER 5
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 9.33333e-05
+0.6 0 4.3259e-05 9.33333e-05
+0.75 0 4.3259e-05 9.33333e-05
+0.9 0 4.3259e-05 9.33333e-05
+1.05 0 4.3259e-05 9.33333e-05
+1.2 0 4.3259e-05 9.33333e-05
+1.35 0 4.3259e-05 9.33333e-05
+1.5 0 4.3259e-05 9.33333e-05
+1.8 0 4.3259e-05 9.33333e-05
+2.4 0 4.3259e-05 9.33333e-05
+3 0 4.3259e-05 9.33333e-05
+3.6 0 4.3259e-05 9.33333e-05
+END DIST
+
+Metal 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 9.33333e-05
+0.6 0 4.3259e-05 9.33333e-05
+0.75 0 4.3259e-05 9.33333e-05
+0.9 0 4.3259e-05 9.33333e-05
+1.05 0 4.3259e-05 9.33333e-05
+1.2 0 4.3259e-05 9.33333e-05
+1.35 0 4.3259e-05 9.33333e-05
+1.5 0 4.3259e-05 9.33333e-05
+1.8 0 4.3259e-05 9.33333e-05
+2.4 0 4.3259e-05 9.33333e-05
+3 0 4.3259e-05 9.33333e-05
+3.6 0 4.3259e-05 9.33333e-05
+END DIST
+
+Metal 4 DIAGUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 DIAGUNDER 5
+DIST count 13 width 0.3
+0 0 0 9.33333e-05
+0.3 0 0 9.33333e-05
+0.6 0 0 9.33333e-05
+0.75 0 0 9.33333e-05
+0.9 0 0 9.33333e-05
+1.05 0 0 9.33333e-05
+1.2 0 0 9.33333e-05
+1.35 0 0 9.33333e-05
+1.5 0 0 9.33333e-05
+1.8 0 0 9.33333e-05
+2.4 0 0 9.33333e-05
+3 0 0 9.33333e-05
+3.6 0 0 9.33333e-05
+END DIST
+
+Metal 4 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 0 9.33333e-05
+0.3 0 0 9.33333e-05
+0.6 0 0 9.33333e-05
+0.75 0 0 9.33333e-05
+0.9 0 0 9.33333e-05
+1.05 0 0 9.33333e-05
+1.2 0 0 9.33333e-05
+1.35 0 0 9.33333e-05
+1.5 0 0 9.33333e-05
+1.8 0 0 9.33333e-05
+2.4 0 0 9.33333e-05
+3 0 0 9.33333e-05
+3.6 0 0 9.33333e-05
+END DIST
+
+Metal 4 OVERUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 OVER 1 UNDER 5
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 9.33333e-05
+0.6 0 4.3259e-05 9.33333e-05
+0.75 0 4.3259e-05 9.33333e-05
+0.9 0 4.3259e-05 9.33333e-05
+1.05 0 4.3259e-05 9.33333e-05
+1.2 0 4.3259e-05 9.33333e-05
+1.35 0 4.3259e-05 9.33333e-05
+1.5 0 4.3259e-05 9.33333e-05
+1.8 0 4.3259e-05 9.33333e-05
+2.4 0 4.3259e-05 9.33333e-05
+3 0 4.3259e-05 9.33333e-05
+3.6 0 4.3259e-05 9.33333e-05
+END DIST
+
+Metal 4 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 9.33333e-05
+0.6 0 4.3259e-05 9.33333e-05
+0.75 0 4.3259e-05 9.33333e-05
+0.9 0 4.3259e-05 9.33333e-05
+1.05 0 4.3259e-05 9.33333e-05
+1.2 0 4.3259e-05 9.33333e-05
+1.35 0 4.3259e-05 9.33333e-05
+1.5 0 4.3259e-05 9.33333e-05
+1.8 0 4.3259e-05 9.33333e-05
+2.4 0 4.3259e-05 9.33333e-05
+3 0 4.3259e-05 9.33333e-05
+3.6 0 4.3259e-05 9.33333e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 5
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 9.33333e-05
+0.6 0 4.3259e-05 9.33333e-05
+0.75 0 4.3259e-05 9.33333e-05
+0.9 0 4.3259e-05 9.33333e-05
+1.05 0 4.3259e-05 9.33333e-05
+1.2 0 4.3259e-05 9.33333e-05
+1.35 0 4.3259e-05 9.33333e-05
+1.5 0 4.3259e-05 9.33333e-05
+1.8 0 4.3259e-05 9.33333e-05
+2.4 0 4.3259e-05 9.33333e-05
+3 0 4.3259e-05 9.33333e-05
+3.6 0 4.3259e-05 9.33333e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 9.33333e-05
+0.6 0 4.3259e-05 9.33333e-05
+0.75 0 4.3259e-05 9.33333e-05
+0.9 0 4.3259e-05 9.33333e-05
+1.05 0 4.3259e-05 9.33333e-05
+1.2 0 4.3259e-05 9.33333e-05
+1.35 0 4.3259e-05 9.33333e-05
+1.5 0 4.3259e-05 9.33333e-05
+1.8 0 4.3259e-05 9.33333e-05
+2.4 0 4.3259e-05 9.33333e-05
+3 0 4.3259e-05 9.33333e-05
+3.6 0 4.3259e-05 9.33333e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 5
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 9.33333e-05
+0.6 0 4.3259e-05 9.33333e-05
+0.75 0 4.3259e-05 9.33333e-05
+0.9 0 4.3259e-05 9.33333e-05
+1.05 0 4.3259e-05 9.33333e-05
+1.2 0 4.3259e-05 9.33333e-05
+1.35 0 4.3259e-05 9.33333e-05
+1.5 0 4.3259e-05 9.33333e-05
+1.8 0 4.3259e-05 9.33333e-05
+2.4 0 4.3259e-05 9.33333e-05
+3 0 4.3259e-05 9.33333e-05
+3.6 0 4.3259e-05 9.33333e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 9.33333e-05
+0.6 0 4.3259e-05 9.33333e-05
+0.75 0 4.3259e-05 9.33333e-05
+0.9 0 4.3259e-05 9.33333e-05
+1.05 0 4.3259e-05 9.33333e-05
+1.2 0 4.3259e-05 9.33333e-05
+1.35 0 4.3259e-05 9.33333e-05
+1.5 0 4.3259e-05 9.33333e-05
+1.8 0 4.3259e-05 9.33333e-05
+2.4 0 4.3259e-05 9.33333e-05
+3 0 4.3259e-05 9.33333e-05
+3.6 0 4.3259e-05 9.33333e-05
+END DIST
+
+Metal 5 RESOVER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000186667
+0 0.62 0 0.000186667
+0 0.92 0 0.000186667
+0 1.39 0 0.000186667
+0 1.54 0 0.000186667
+0 1.84 0 0.000186667
+0 2.31 0 0.000186667
+0 2.46 0 0.000186667
+0 2.76 0 0.000186667
+0 3.68 0 0.000186667
+0.62 0.62 0 0.000186667
+0.62 0.92 0 0.000186667
+0.62 1.39 0 0.000186667
+0.62 1.54 0 0.000186667
+0.62 1.84 0 0.000186667
+0.62 2.31 0 0.000186667
+0.62 2.46 0 0.000186667
+0.62 2.76 0 0.000186667
+0.62 3.68 0 0.000186667
+0.92 0.92 0 0.000186667
+0.92 1.39 0 0.000186667
+0.92 1.54 0 0.000186667
+0.92 1.84 0 0.000186667
+0.92 2.31 0 0.000186667
+0.92 2.46 0 0.000186667
+0.92 2.76 0 0.000186667
+0.92 3.68 0 0.000186667
+1.39 1.39 0 0.000186667
+1.39 1.54 0 0.000186667
+1.39 1.84 0 0.000186667
+1.39 2.31 0 0.000186667
+1.39 2.46 0 0.000186667
+1.39 2.76 0 0.000186667
+1.39 3.68 0 0.000186667
+1.54 1.54 0 0.000186667
+1.54 1.84 0 0.000186667
+1.54 2.31 0 0.000186667
+1.54 2.46 0 0.000186667
+1.54 2.76 0 0.000186667
+1.54 3.68 0 0.000186667
+1.84 1.84 0 0.000186667
+1.84 2.31 0 0.000186667
+1.84 2.46 0 0.000186667
+1.84 2.76 0 0.000186667
+1.84 3.68 0 0.000186667
+2.31 2.31 0 0.000186667
+2.31 2.46 0 0.000186667
+2.31 2.76 0 0.000186667
+2.31 3.68 0 0.000186667
+2.46 2.46 0 0.000186667
+2.46 2.76 0 0.000186667
+2.46 3.68 0 0.000186667
+2.76 2.76 0 0.000186667
+2.76 3.68 0 0.000186667
+3.68 0 3.68 0.000186667
+END DIST
+
+Metal 5 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 4
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 OVER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 OVER 0
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 9.33333e-05
+0.6 0 3.83088e-05 9.33333e-05
+0.75 0 3.83088e-05 9.33333e-05
+0.9 0 3.83088e-05 9.33333e-05
+1.05 0 3.83088e-05 9.33333e-05
+1.2 0 3.83088e-05 9.33333e-05
+1.35 0 3.83088e-05 9.33333e-05
+1.5 0 3.83088e-05 9.33333e-05
+1.8 0 3.83088e-05 9.33333e-05
+2.4 0 3.83088e-05 9.33333e-05
+3 0 3.83088e-05 9.33333e-05
+3.6 0 3.83088e-05 9.33333e-05
+END DIST
+
+Metal 5 OVER 1
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 9.33333e-05
+0.6 0 3.83088e-05 9.33333e-05
+0.75 0 3.83088e-05 9.33333e-05
+0.9 0 3.83088e-05 9.33333e-05
+1.05 0 3.83088e-05 9.33333e-05
+1.2 0 3.83088e-05 9.33333e-05
+1.35 0 3.83088e-05 9.33333e-05
+1.5 0 3.83088e-05 9.33333e-05
+1.8 0 3.83088e-05 9.33333e-05
+2.4 0 3.83088e-05 9.33333e-05
+3 0 3.83088e-05 9.33333e-05
+3.6 0 3.83088e-05 9.33333e-05
+END DIST
+
+Metal 5 OVER 2
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 9.33333e-05
+0.6 0 3.83088e-05 9.33333e-05
+0.75 0 3.83088e-05 9.33333e-05
+0.9 0 3.83088e-05 9.33333e-05
+1.05 0 3.83088e-05 9.33333e-05
+1.2 0 3.83088e-05 9.33333e-05
+1.35 0 3.83088e-05 9.33333e-05
+1.5 0 3.83088e-05 9.33333e-05
+1.8 0 3.83088e-05 9.33333e-05
+2.4 0 3.83088e-05 9.33333e-05
+3 0 3.83088e-05 9.33333e-05
+3.6 0 3.83088e-05 9.33333e-05
+END DIST
+
+Metal 5 OVER 3
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 9.33333e-05
+0.6 0 3.83088e-05 9.33333e-05
+0.75 0 3.83088e-05 9.33333e-05
+0.9 0 3.83088e-05 9.33333e-05
+1.05 0 3.83088e-05 9.33333e-05
+1.2 0 3.83088e-05 9.33333e-05
+1.35 0 3.83088e-05 9.33333e-05
+1.5 0 3.83088e-05 9.33333e-05
+1.8 0 3.83088e-05 9.33333e-05
+2.4 0 3.83088e-05 9.33333e-05
+3 0 3.83088e-05 9.33333e-05
+3.6 0 3.83088e-05 9.33333e-05
+END DIST
+
+Metal 5 OVER 4
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 9.33333e-05
+0.6 0 3.83088e-05 9.33333e-05
+0.75 0 3.83088e-05 9.33333e-05
+0.9 0 3.83088e-05 9.33333e-05
+1.05 0 3.83088e-05 9.33333e-05
+1.2 0 3.83088e-05 9.33333e-05
+1.35 0 3.83088e-05 9.33333e-05
+1.5 0 3.83088e-05 9.33333e-05
+1.8 0 3.83088e-05 9.33333e-05
+2.4 0 3.83088e-05 9.33333e-05
+3 0 3.83088e-05 9.33333e-05
+3.6 0 3.83088e-05 9.33333e-05
+END DIST
+
+Metal 5 UNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 9.33333e-05
+0.6 0 3.83088e-05 9.33333e-05
+0.75 0 3.83088e-05 9.33333e-05
+0.9 0 3.83088e-05 9.33333e-05
+1.05 0 3.83088e-05 9.33333e-05
+1.2 0 3.83088e-05 9.33333e-05
+1.35 0 3.83088e-05 9.33333e-05
+1.5 0 3.83088e-05 9.33333e-05
+1.8 0 3.83088e-05 9.33333e-05
+2.4 0 3.83088e-05 9.33333e-05
+3 0 3.83088e-05 9.33333e-05
+3.6 0 3.83088e-05 9.33333e-05
+END DIST
+
+Metal 5 DIAGUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 0 9.33333e-05
+0.3 0 0 9.33333e-05
+0.6 0 0 9.33333e-05
+0.75 0 0 9.33333e-05
+0.9 0 0 9.33333e-05
+1.05 0 0 9.33333e-05
+1.2 0 0 9.33333e-05
+1.35 0 0 9.33333e-05
+1.5 0 0 9.33333e-05
+1.8 0 0 9.33333e-05
+2.4 0 0 9.33333e-05
+3 0 0 9.33333e-05
+3.6 0 0 9.33333e-05
+END DIST
+
+Metal 5 OVERUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 9.33333e-05
+0.6 0 3.83088e-05 9.33333e-05
+0.75 0 3.83088e-05 9.33333e-05
+0.9 0 3.83088e-05 9.33333e-05
+1.05 0 3.83088e-05 9.33333e-05
+1.2 0 3.83088e-05 9.33333e-05
+1.35 0 3.83088e-05 9.33333e-05
+1.5 0 3.83088e-05 9.33333e-05
+1.8 0 3.83088e-05 9.33333e-05
+2.4 0 3.83088e-05 9.33333e-05
+3 0 3.83088e-05 9.33333e-05
+3.6 0 3.83088e-05 9.33333e-05
+END DIST
+
+Metal 5 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 9.33333e-05
+0.6 0 3.83088e-05 9.33333e-05
+0.75 0 3.83088e-05 9.33333e-05
+0.9 0 3.83088e-05 9.33333e-05
+1.05 0 3.83088e-05 9.33333e-05
+1.2 0 3.83088e-05 9.33333e-05
+1.35 0 3.83088e-05 9.33333e-05
+1.5 0 3.83088e-05 9.33333e-05
+1.8 0 3.83088e-05 9.33333e-05
+2.4 0 3.83088e-05 9.33333e-05
+3 0 3.83088e-05 9.33333e-05
+3.6 0 3.83088e-05 9.33333e-05
+END DIST
+
+Metal 5 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 9.33333e-05
+0.6 0 3.83088e-05 9.33333e-05
+0.75 0 3.83088e-05 9.33333e-05
+0.9 0 3.83088e-05 9.33333e-05
+1.05 0 3.83088e-05 9.33333e-05
+1.2 0 3.83088e-05 9.33333e-05
+1.35 0 3.83088e-05 9.33333e-05
+1.5 0 3.83088e-05 9.33333e-05
+1.8 0 3.83088e-05 9.33333e-05
+2.4 0 3.83088e-05 9.33333e-05
+3 0 3.83088e-05 9.33333e-05
+3.6 0 3.83088e-05 9.33333e-05
+END DIST
+
+Metal 5 OVER 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 9.33333e-05
+0.6 0 3.83088e-05 9.33333e-05
+0.75 0 3.83088e-05 9.33333e-05
+0.9 0 3.83088e-05 9.33333e-05
+1.05 0 3.83088e-05 9.33333e-05
+1.2 0 3.83088e-05 9.33333e-05
+1.35 0 3.83088e-05 9.33333e-05
+1.5 0 3.83088e-05 9.33333e-05
+1.8 0 3.83088e-05 9.33333e-05
+2.4 0 3.83088e-05 9.33333e-05
+3 0 3.83088e-05 9.33333e-05
+3.6 0 3.83088e-05 9.33333e-05
+END DIST
+
+Metal 6 RESOVER
+WIDTH Table 1 entries: 1.6
+
+Metal 6 RESOVER 0
+DIST count 55 width 1.6
+0 0 0 2.2375e-05
+0 1.8 0 2.2375e-05
+0 3.4 0 2.2375e-05
+0 4.4 0 2.2375e-05
+0 5.2 0 2.2375e-05
+0 6.8 0 2.2375e-05
+0 7.8 0 2.2375e-05
+0 8.6 0 2.2375e-05
+0 10.2 0 2.2375e-05
+0 13.6 0 2.2375e-05
+1.8 1.8 0 2.2375e-05
+1.8 3.4 0 2.2375e-05
+1.8 4.4 0 2.2375e-05
+1.8 5.2 0 2.2375e-05
+1.8 6.8 0 2.2375e-05
+1.8 7.8 0 2.2375e-05
+1.8 8.6 0 2.2375e-05
+1.8 10.2 0 2.2375e-05
+1.8 13.6 0 2.2375e-05
+3.4 3.4 0 2.2375e-05
+3.4 4.4 0 2.2375e-05
+3.4 5.2 0 2.2375e-05
+3.4 6.8 0 2.2375e-05
+3.4 7.8 0 2.2375e-05
+3.4 8.6 0 2.2375e-05
+3.4 10.2 0 2.2375e-05
+3.4 13.6 0 2.2375e-05
+4.4 4.4 0 2.2375e-05
+4.4 5.2 0 2.2375e-05
+4.4 6.8 0 2.2375e-05
+4.4 7.8 0 2.2375e-05
+4.4 8.6 0 2.2375e-05
+4.4 10.2 0 2.2375e-05
+4.4 13.6 0 2.2375e-05
+5.2 5.2 0 2.2375e-05
+5.2 6.8 0 2.2375e-05
+5.2 7.8 0 2.2375e-05
+5.2 8.6 0 2.2375e-05
+5.2 10.2 0 2.2375e-05
+5.2 13.6 0 2.2375e-05
+6.8 6.8 0 2.2375e-05
+6.8 7.8 0 2.2375e-05
+6.8 8.6 0 2.2375e-05
+6.8 10.2 0 2.2375e-05
+6.8 13.6 0 2.2375e-05
+7.8 7.8 0 2.2375e-05
+7.8 8.6 0 2.2375e-05
+7.8 10.2 0 2.2375e-05
+7.8 13.6 0 2.2375e-05
+8.6 8.6 0 2.2375e-05
+8.6 10.2 0 2.2375e-05
+8.6 13.6 0 2.2375e-05
+10.2 10.2 0 2.2375e-05
+10.2 13.6 0 2.2375e-05
+13.6 0 13.6 2.2375e-05
+END DIST
+
+Metal 6 RESOVER 1
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 2
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 3
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 4
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 5
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 OVER
+WIDTH Table 1 entries: 1.6
+
+Metal 6 OVER 0
+DIST count 12 width 1.6
+1.6 0 4.42999e-05 1.11875e-05
+3.2 0 4.42999e-05 1.11875e-05
+4 0 4.42999e-05 1.11875e-05
+4.8 0 4.42999e-05 1.11875e-05
+5.6 0 4.42999e-05 1.11875e-05
+6.4 0 4.42999e-05 1.11875e-05
+7.2 0 4.42999e-05 1.11875e-05
+8 0 4.42999e-05 1.11875e-05
+9.6 0 4.42999e-05 1.11875e-05
+12.8 0 4.42999e-05 1.11875e-05
+16 0 4.42999e-05 1.11875e-05
+19.2 0 4.42999e-05 1.11875e-05
+END DIST
+
+Metal 6 OVER 1
+DIST count 12 width 1.6
+1.6 0 4.42999e-05 1.11875e-05
+3.2 0 4.42999e-05 1.11875e-05
+4 0 4.42999e-05 1.11875e-05
+4.8 0 4.42999e-05 1.11875e-05
+5.6 0 4.42999e-05 1.11875e-05
+6.4 0 4.42999e-05 1.11875e-05
+7.2 0 4.42999e-05 1.11875e-05
+8 0 4.42999e-05 1.11875e-05
+9.6 0 4.42999e-05 1.11875e-05
+12.8 0 4.42999e-05 1.11875e-05
+16 0 4.42999e-05 1.11875e-05
+19.2 0 4.42999e-05 1.11875e-05
+END DIST
+
+Metal 6 OVER 2
+DIST count 12 width 1.6
+1.6 0 4.42999e-05 1.11875e-05
+3.2 0 4.42999e-05 1.11875e-05
+4 0 4.42999e-05 1.11875e-05
+4.8 0 4.42999e-05 1.11875e-05
+5.6 0 4.42999e-05 1.11875e-05
+6.4 0 4.42999e-05 1.11875e-05
+7.2 0 4.42999e-05 1.11875e-05
+8 0 4.42999e-05 1.11875e-05
+9.6 0 4.42999e-05 1.11875e-05
+12.8 0 4.42999e-05 1.11875e-05
+16 0 4.42999e-05 1.11875e-05
+19.2 0 4.42999e-05 1.11875e-05
+END DIST
+
+Metal 6 OVER 3
+DIST count 12 width 1.6
+1.6 0 4.42999e-05 1.11875e-05
+3.2 0 4.42999e-05 1.11875e-05
+4 0 4.42999e-05 1.11875e-05
+4.8 0 4.42999e-05 1.11875e-05
+5.6 0 4.42999e-05 1.11875e-05
+6.4 0 4.42999e-05 1.11875e-05
+7.2 0 4.42999e-05 1.11875e-05
+8 0 4.42999e-05 1.11875e-05
+9.6 0 4.42999e-05 1.11875e-05
+12.8 0 4.42999e-05 1.11875e-05
+16 0 4.42999e-05 1.11875e-05
+19.2 0 4.42999e-05 1.11875e-05
+END DIST
+
+Metal 6 OVER 4
+DIST count 12 width 1.6
+1.6 0 4.42999e-05 1.11875e-05
+3.2 0 4.42999e-05 1.11875e-05
+4 0 4.42999e-05 1.11875e-05
+4.8 0 4.42999e-05 1.11875e-05
+5.6 0 4.42999e-05 1.11875e-05
+6.4 0 4.42999e-05 1.11875e-05
+7.2 0 4.42999e-05 1.11875e-05
+8 0 4.42999e-05 1.11875e-05
+9.6 0 4.42999e-05 1.11875e-05
+12.8 0 4.42999e-05 1.11875e-05
+16 0 4.42999e-05 1.11875e-05
+19.2 0 4.42999e-05 1.11875e-05
+END DIST
+
+Metal 6 OVER 5
+DIST count 12 width 1.6
+1.6 0 4.42999e-05 1.11875e-05
+3.2 0 4.42999e-05 1.11875e-05
+4 0 4.42999e-05 1.11875e-05
+4.8 0 4.42999e-05 1.11875e-05
+5.6 0 4.42999e-05 1.11875e-05
+6.4 0 4.42999e-05 1.11875e-05
+7.2 0 4.42999e-05 1.11875e-05
+8 0 4.42999e-05 1.11875e-05
+9.6 0 4.42999e-05 1.11875e-05
+12.8 0 4.42999e-05 1.11875e-05
+16 0 4.42999e-05 1.11875e-05
+19.2 0 4.42999e-05 1.11875e-05
+END DIST
+
+Metal 6 UNDER
+WIDTH Table 0 entries:
+
+Metal 6 DIAGUNDER
+WIDTH Table 0 entries:
+END DensityModel 0
diff --git a/sky130/openlane/rules.openrcx.sky130A.min.spef_extractor b/sky130/openlane/rules.openrcx.sky130A.min.spef_extractor
new file mode 100644
index 0000000..cb25913
--- /dev/null
+++ b/sky130/openlane/rules.openrcx.sky130A.min.spef_extractor
@@ -0,0 +1,1645 @@
+Extraction Rules for OpenRCX
+
+DIAGMODEL ON
+
+LayerCount 6
+DensityRate 1 0
+
+DensityModel 0
+
+Metal 1 RESOVER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 RESOVER 0
+DIST count 55 width 0.17
+0 0 0 0.0541176
+0 0.29 0 0.0541176
+0 0.46 0 0.0541176
+0 0.665 0 0.0541176
+0 0.75 0 0.0541176
+0 0.92 0 0.0541176
+0 1.125 0 0.0541176
+0 1.21 0 0.0541176
+0 1.38 0 0.0541176
+0 1.84 0 0.0541176
+0.29 0.29 0 0.0541176
+0.29 0.46 0 0.0541176
+0.29 0.665 0 0.0541176
+0.29 0.75 0 0.0541176
+0.29 0.92 0 0.0541176
+0.29 1.125 0 0.0541176
+0.29 1.21 0 0.0541176
+0.29 1.38 0 0.0541176
+0.29 1.84 0 0.0541176
+0.46 0.46 0 0.0541176
+0.46 0.665 0 0.0541176
+0.46 0.75 0 0.0541176
+0.46 0.92 0 0.0541176
+0.46 1.125 0 0.0541176
+0.46 1.21 0 0.0541176
+0.46 1.38 0 0.0541176
+0.46 1.84 0 0.0541176
+0.665 0.665 0 0.0541176
+0.665 0.75 0 0.0541176
+0.665 0.92 0 0.0541176
+0.665 1.125 0 0.0541176
+0.665 1.21 0 0.0541176
+0.665 1.38 0 0.0541176
+0.665 1.84 0 0.0541176
+0.75 0.75 0 0.0541176
+0.75 0.92 0 0.0541176
+0.75 1.125 0 0.0541176
+0.75 1.21 0 0.0541176
+0.75 1.38 0 0.0541176
+0.75 1.84 0 0.0541176
+0.92 0.92 0 0.0541176
+0.92 1.125 0 0.0541176
+0.92 1.21 0 0.0541176
+0.92 1.38 0 0.0541176
+0.92 1.84 0 0.0541176
+1.125 1.125 0 0.0541176
+1.125 1.21 0 0.0541176
+1.125 1.38 0 0.0541176
+1.125 1.84 0 0.0541176
+1.21 1.21 0 0.0541176
+1.21 1.38 0 0.0541176
+1.21 1.84 0 0.0541176
+1.38 1.38 0 0.0541176
+1.38 1.84 0 0.0541176
+1.84 0 1.84 0.0541176
+END DIST
+
+Metal 1 OVER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 OVER 0
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0270588
+0.34 0 4.42519e-05 0.0270588
+0.425 0 4.42519e-05 0.0270588
+0.51 0 4.42519e-05 0.0270588
+0.595 0 4.42519e-05 0.0270588
+0.68 0 4.42519e-05 0.0270588
+0.765 0 4.42519e-05 0.0270588
+0.85 0 4.42519e-05 0.0270588
+1.02 0 4.42519e-05 0.0270588
+1.36 0 4.42519e-05 0.0270588
+1.7 0 4.42519e-05 0.0270588
+2.04 0 4.42519e-05 0.0270588
+END DIST
+
+Metal 1 UNDER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 UNDER 2
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0270588
+0.34 0 4.42519e-05 0.0270588
+0.425 0 4.42519e-05 0.0270588
+0.51 0 4.42519e-05 0.0270588
+0.595 0 4.42519e-05 0.0270588
+0.68 0 4.42519e-05 0.0270588
+0.765 0 4.42519e-05 0.0270588
+0.85 0 4.42519e-05 0.0270588
+1.02 0 4.42519e-05 0.0270588
+1.36 0 4.42519e-05 0.0270588
+1.7 0 4.42519e-05 0.0270588
+2.04 0 4.42519e-05 0.0270588
+END DIST
+
+Metal 1 UNDER 3
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0270588
+0.34 0 4.42519e-05 0.0270588
+0.425 0 4.42519e-05 0.0270588
+0.51 0 4.42519e-05 0.0270588
+0.595 0 4.42519e-05 0.0270588
+0.68 0 4.42519e-05 0.0270588
+0.765 0 4.42519e-05 0.0270588
+0.85 0 4.42519e-05 0.0270588
+1.02 0 4.42519e-05 0.0270588
+1.36 0 4.42519e-05 0.0270588
+1.7 0 4.42519e-05 0.0270588
+2.04 0 4.42519e-05 0.0270588
+END DIST
+
+Metal 1 UNDER 4
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0270588
+0.34 0 4.42519e-05 0.0270588
+0.425 0 4.42519e-05 0.0270588
+0.51 0 4.42519e-05 0.0270588
+0.595 0 4.42519e-05 0.0270588
+0.68 0 4.42519e-05 0.0270588
+0.765 0 4.42519e-05 0.0270588
+0.85 0 4.42519e-05 0.0270588
+1.02 0 4.42519e-05 0.0270588
+1.36 0 4.42519e-05 0.0270588
+1.7 0 4.42519e-05 0.0270588
+2.04 0 4.42519e-05 0.0270588
+END DIST
+
+Metal 1 UNDER 5
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0270588
+0.34 0 4.42519e-05 0.0270588
+0.425 0 4.42519e-05 0.0270588
+0.51 0 4.42519e-05 0.0270588
+0.595 0 4.42519e-05 0.0270588
+0.68 0 4.42519e-05 0.0270588
+0.765 0 4.42519e-05 0.0270588
+0.85 0 4.42519e-05 0.0270588
+1.02 0 4.42519e-05 0.0270588
+1.36 0 4.42519e-05 0.0270588
+1.7 0 4.42519e-05 0.0270588
+2.04 0 4.42519e-05 0.0270588
+END DIST
+
+Metal 1 UNDER 6
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0270588
+0.34 0 4.42519e-05 0.0270588
+0.425 0 4.42519e-05 0.0270588
+0.51 0 4.42519e-05 0.0270588
+0.595 0 4.42519e-05 0.0270588
+0.68 0 4.42519e-05 0.0270588
+0.765 0 4.42519e-05 0.0270588
+0.85 0 4.42519e-05 0.0270588
+1.02 0 4.42519e-05 0.0270588
+1.36 0 4.42519e-05 0.0270588
+1.7 0 4.42519e-05 0.0270588
+2.04 0 4.42519e-05 0.0270588
+END DIST
+
+Metal 1 DIAGUNDER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 DIAGUNDER 2
+DIST count 13 width 0.17
+0 0 0 0.0270588
+0.17 0 0 0.0270588
+0.34 0 0 0.0270588
+0.425 0 0 0.0270588
+0.51 0 0 0.0270588
+0.595 0 0 0.0270588
+0.68 0 0 0.0270588
+0.765 0 0 0.0270588
+0.85 0 0 0.0270588
+1.02 0 0 0.0270588
+1.36 0 0 0.0270588
+1.7 0 0 0.0270588
+2.04 0 0 0.0270588
+END DIST
+
+Metal 1 DIAGUNDER 3
+DIST count 13 width 0.17
+0 0 0 0.0270588
+0.17 0 0 0.0270588
+0.34 0 0 0.0270588
+0.425 0 0 0.0270588
+0.51 0 0 0.0270588
+0.595 0 0 0.0270588
+0.68 0 0 0.0270588
+0.765 0 0 0.0270588
+0.85 0 0 0.0270588
+1.02 0 0 0.0270588
+1.36 0 0 0.0270588
+1.7 0 0 0.0270588
+2.04 0 0 0.0270588
+END DIST
+
+Metal 1 DIAGUNDER 4
+DIST count 13 width 0.17
+0 0 0 0.0270588
+0.17 0 0 0.0270588
+0.34 0 0 0.0270588
+0.425 0 0 0.0270588
+0.51 0 0 0.0270588
+0.595 0 0 0.0270588
+0.68 0 0 0.0270588
+0.765 0 0 0.0270588
+0.85 0 0 0.0270588
+1.02 0 0 0.0270588
+1.36 0 0 0.0270588
+1.7 0 0 0.0270588
+2.04 0 0 0.0270588
+END DIST
+
+Metal 1 DIAGUNDER 5
+DIST count 13 width 0.17
+0 0 0 0.0270588
+0.17 0 0 0.0270588
+0.34 0 0 0.0270588
+0.425 0 0 0.0270588
+0.51 0 0 0.0270588
+0.595 0 0 0.0270588
+0.68 0 0 0.0270588
+0.765 0 0 0.0270588
+0.85 0 0 0.0270588
+1.02 0 0 0.0270588
+1.36 0 0 0.0270588
+1.7 0 0 0.0270588
+2.04 0 0 0.0270588
+END DIST
+
+Metal 1 DIAGUNDER 6
+DIST count 0 width 0.17
+END DIST
+
+Metal 2 RESOVER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.00075
+0 0.2 0 0.00075
+0 0.34 0 0.00075
+0 0.47 0 0.00075
+0 0.54 0 0.00075
+0 0.68 0 0.00075
+0 0.81 0 0.00075
+0 0.88 0 0.00075
+0 1.02 0 0.00075
+0 1.36 0 0.00075
+0.2 0.2 0 0.00075
+0.2 0.34 0 0.00075
+0.2 0.47 0 0.00075
+0.2 0.54 0 0.00075
+0.2 0.68 0 0.00075
+0.2 0.81 0 0.00075
+0.2 0.88 0 0.00075
+0.2 1.02 0 0.00075
+0.2 1.36 0 0.00075
+0.34 0.34 0 0.00075
+0.34 0.47 0 0.00075
+0.34 0.54 0 0.00075
+0.34 0.68 0 0.00075
+0.34 0.81 0 0.00075
+0.34 0.88 0 0.00075
+0.34 1.02 0 0.00075
+0.34 1.36 0 0.00075
+0.47 0.47 0 0.00075
+0.47 0.54 0 0.00075
+0.47 0.68 0 0.00075
+0.47 0.81 0 0.00075
+0.47 0.88 0 0.00075
+0.47 1.02 0 0.00075
+0.47 1.36 0 0.00075
+0.54 0.54 0 0.00075
+0.54 0.68 0 0.00075
+0.54 0.81 0 0.00075
+0.54 0.88 0 0.00075
+0.54 1.02 0 0.00075
+0.54 1.36 0 0.00075
+0.68 0.68 0 0.00075
+0.68 0.81 0 0.00075
+0.68 0.88 0 0.00075
+0.68 1.02 0 0.00075
+0.68 1.36 0 0.00075
+0.81 0.81 0 0.00075
+0.81 0.88 0 0.00075
+0.81 1.02 0 0.00075
+0.81 1.36 0 0.00075
+0.88 0.88 0 0.00075
+0.88 1.02 0 0.00075
+0.88 1.36 0 0.00075
+1.02 1.02 0 0.00075
+1.02 1.36 0 0.00075
+1.36 0 1.36 0.00075
+END DIST
+
+Metal 2 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 2 OVER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 OVER 0
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000375
+0.28 0 4.27813e-05 0.000375
+0.35 0 4.27813e-05 0.000375
+0.42 0 4.27813e-05 0.000375
+0.49 0 4.27813e-05 0.000375
+0.56 0 4.27813e-05 0.000375
+0.63 0 4.27813e-05 0.000375
+0.7 0 4.27813e-05 0.000375
+0.84 0 4.27813e-05 0.000375
+1.12 0 4.27813e-05 0.000375
+1.4 0 4.27813e-05 0.000375
+1.68 0 4.27813e-05 0.000375
+END DIST
+
+Metal 2 OVER 1
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000375
+0.28 0 4.27813e-05 0.000375
+0.35 0 4.27813e-05 0.000375
+0.42 0 4.27813e-05 0.000375
+0.49 0 4.27813e-05 0.000375
+0.56 0 4.27813e-05 0.000375
+0.63 0 4.27813e-05 0.000375
+0.7 0 4.27813e-05 0.000375
+0.84 0 4.27813e-05 0.000375
+1.12 0 4.27813e-05 0.000375
+1.4 0 4.27813e-05 0.000375
+1.68 0 4.27813e-05 0.000375
+END DIST
+
+Metal 2 UNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 UNDER 3
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000375
+0.28 0 4.27813e-05 0.000375
+0.35 0 4.27813e-05 0.000375
+0.42 0 4.27813e-05 0.000375
+0.49 0 4.27813e-05 0.000375
+0.56 0 4.27813e-05 0.000375
+0.63 0 4.27813e-05 0.000375
+0.7 0 4.27813e-05 0.000375
+0.84 0 4.27813e-05 0.000375
+1.12 0 4.27813e-05 0.000375
+1.4 0 4.27813e-05 0.000375
+1.68 0 4.27813e-05 0.000375
+END DIST
+
+Metal 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000375
+0.28 0 4.27813e-05 0.000375
+0.35 0 4.27813e-05 0.000375
+0.42 0 4.27813e-05 0.000375
+0.49 0 4.27813e-05 0.000375
+0.56 0 4.27813e-05 0.000375
+0.63 0 4.27813e-05 0.000375
+0.7 0 4.27813e-05 0.000375
+0.84 0 4.27813e-05 0.000375
+1.12 0 4.27813e-05 0.000375
+1.4 0 4.27813e-05 0.000375
+1.68 0 4.27813e-05 0.000375
+END DIST
+
+Metal 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000375
+0.28 0 4.27813e-05 0.000375
+0.35 0 4.27813e-05 0.000375
+0.42 0 4.27813e-05 0.000375
+0.49 0 4.27813e-05 0.000375
+0.56 0 4.27813e-05 0.000375
+0.63 0 4.27813e-05 0.000375
+0.7 0 4.27813e-05 0.000375
+0.84 0 4.27813e-05 0.000375
+1.12 0 4.27813e-05 0.000375
+1.4 0 4.27813e-05 0.000375
+1.68 0 4.27813e-05 0.000375
+END DIST
+
+Metal 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000375
+0.28 0 4.27813e-05 0.000375
+0.35 0 4.27813e-05 0.000375
+0.42 0 4.27813e-05 0.000375
+0.49 0 4.27813e-05 0.000375
+0.56 0 4.27813e-05 0.000375
+0.63 0 4.27813e-05 0.000375
+0.7 0 4.27813e-05 0.000375
+0.84 0 4.27813e-05 0.000375
+1.12 0 4.27813e-05 0.000375
+1.4 0 4.27813e-05 0.000375
+1.68 0 4.27813e-05 0.000375
+END DIST
+
+Metal 2 DIAGUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 DIAGUNDER 3
+DIST count 13 width 0.14
+0 0 0 0.000375
+0.14 0 0 0.000375
+0.28 0 0 0.000375
+0.35 0 0 0.000375
+0.42 0 0 0.000375
+0.49 0 0 0.000375
+0.56 0 0 0.000375
+0.63 0 0 0.000375
+0.7 0 0 0.000375
+0.84 0 0 0.000375
+1.12 0 0 0.000375
+1.4 0 0 0.000375
+1.68 0 0 0.000375
+END DIST
+
+Metal 2 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 0 0.000375
+0.14 0 0 0.000375
+0.28 0 0 0.000375
+0.35 0 0 0.000375
+0.42 0 0 0.000375
+0.49 0 0 0.000375
+0.56 0 0 0.000375
+0.63 0 0 0.000375
+0.7 0 0 0.000375
+0.84 0 0 0.000375
+1.12 0 0 0.000375
+1.4 0 0 0.000375
+1.68 0 0 0.000375
+END DIST
+
+Metal 2 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 0 0.000375
+0.14 0 0 0.000375
+0.28 0 0 0.000375
+0.35 0 0 0.000375
+0.42 0 0 0.000375
+0.49 0 0 0.000375
+0.56 0 0 0.000375
+0.63 0 0 0.000375
+0.7 0 0 0.000375
+0.84 0 0 0.000375
+1.12 0 0 0.000375
+1.4 0 0 0.000375
+1.68 0 0 0.000375
+END DIST
+
+Metal 2 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 0 0.000375
+0.14 0 0 0.000375
+0.28 0 0 0.000375
+0.35 0 0 0.000375
+0.42 0 0 0.000375
+0.49 0 0 0.000375
+0.56 0 0 0.000375
+0.63 0 0 0.000375
+0.7 0 0 0.000375
+0.84 0 0 0.000375
+1.12 0 0 0.000375
+1.4 0 0 0.000375
+1.68 0 0 0.000375
+END DIST
+
+Metal 2 OVERUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 OVER 1 UNDER 3
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000375
+0.28 0 4.27813e-05 0.000375
+0.35 0 4.27813e-05 0.000375
+0.42 0 4.27813e-05 0.000375
+0.49 0 4.27813e-05 0.000375
+0.56 0 4.27813e-05 0.000375
+0.63 0 4.27813e-05 0.000375
+0.7 0 4.27813e-05 0.000375
+0.84 0 4.27813e-05 0.000375
+1.12 0 4.27813e-05 0.000375
+1.4 0 4.27813e-05 0.000375
+1.68 0 4.27813e-05 0.000375
+END DIST
+
+Metal 2 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000375
+0.28 0 4.27813e-05 0.000375
+0.35 0 4.27813e-05 0.000375
+0.42 0 4.27813e-05 0.000375
+0.49 0 4.27813e-05 0.000375
+0.56 0 4.27813e-05 0.000375
+0.63 0 4.27813e-05 0.000375
+0.7 0 4.27813e-05 0.000375
+0.84 0 4.27813e-05 0.000375
+1.12 0 4.27813e-05 0.000375
+1.4 0 4.27813e-05 0.000375
+1.68 0 4.27813e-05 0.000375
+END DIST
+
+Metal 2 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000375
+0.28 0 4.27813e-05 0.000375
+0.35 0 4.27813e-05 0.000375
+0.42 0 4.27813e-05 0.000375
+0.49 0 4.27813e-05 0.000375
+0.56 0 4.27813e-05 0.000375
+0.63 0 4.27813e-05 0.000375
+0.7 0 4.27813e-05 0.000375
+0.84 0 4.27813e-05 0.000375
+1.12 0 4.27813e-05 0.000375
+1.4 0 4.27813e-05 0.000375
+1.68 0 4.27813e-05 0.000375
+END DIST
+
+Metal 2 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000375
+0.28 0 4.27813e-05 0.000375
+0.35 0 4.27813e-05 0.000375
+0.42 0 4.27813e-05 0.000375
+0.49 0 4.27813e-05 0.000375
+0.56 0 4.27813e-05 0.000375
+0.63 0 4.27813e-05 0.000375
+0.7 0 4.27813e-05 0.000375
+0.84 0 4.27813e-05 0.000375
+1.12 0 4.27813e-05 0.000375
+1.4 0 4.27813e-05 0.000375
+1.68 0 4.27813e-05 0.000375
+END DIST
+
+Metal 3 RESOVER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.00075
+0 0.32 0 0.00075
+0 0.46 0 0.00075
+0 0.71 0 0.00075
+0 0.78 0 0.00075
+0 0.92 0 0.00075
+0 1.17 0 0.00075
+0 1.24 0 0.00075
+0 1.38 0 0.00075
+0 1.84 0 0.00075
+0.32 0.32 0 0.00075
+0.32 0.46 0 0.00075
+0.32 0.71 0 0.00075
+0.32 0.78 0 0.00075
+0.32 0.92 0 0.00075
+0.32 1.17 0 0.00075
+0.32 1.24 0 0.00075
+0.32 1.38 0 0.00075
+0.32 1.84 0 0.00075
+0.46 0.46 0 0.00075
+0.46 0.71 0 0.00075
+0.46 0.78 0 0.00075
+0.46 0.92 0 0.00075
+0.46 1.17 0 0.00075
+0.46 1.24 0 0.00075
+0.46 1.38 0 0.00075
+0.46 1.84 0 0.00075
+0.71 0.71 0 0.00075
+0.71 0.78 0 0.00075
+0.71 0.92 0 0.00075
+0.71 1.17 0 0.00075
+0.71 1.24 0 0.00075
+0.71 1.38 0 0.00075
+0.71 1.84 0 0.00075
+0.78 0.78 0 0.00075
+0.78 0.92 0 0.00075
+0.78 1.17 0 0.00075
+0.78 1.24 0 0.00075
+0.78 1.38 0 0.00075
+0.78 1.84 0 0.00075
+0.92 0.92 0 0.00075
+0.92 1.17 0 0.00075
+0.92 1.24 0 0.00075
+0.92 1.38 0 0.00075
+0.92 1.84 0 0.00075
+1.17 1.17 0 0.00075
+1.17 1.24 0 0.00075
+1.17 1.38 0 0.00075
+1.17 1.84 0 0.00075
+1.24 1.24 0 0.00075
+1.24 1.38 0 0.00075
+1.24 1.84 0 0.00075
+1.38 1.38 0 0.00075
+1.38 1.84 0 0.00075
+1.84 0 1.84 0.00075
+END DIST
+
+Metal 3 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 RESOVER 2
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 OVER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 OVER 0
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000375
+0.28 0 3.93264e-05 0.000375
+0.35 0 3.93264e-05 0.000375
+0.42 0 3.93264e-05 0.000375
+0.49 0 3.93264e-05 0.000375
+0.56 0 3.93264e-05 0.000375
+0.63 0 3.93264e-05 0.000375
+0.7 0 3.93264e-05 0.000375
+0.84 0 3.93264e-05 0.000375
+1.12 0 3.93264e-05 0.000375
+1.4 0 3.93264e-05 0.000375
+1.68 0 3.93264e-05 0.000375
+END DIST
+
+Metal 3 OVER 1
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000375
+0.28 0 3.93264e-05 0.000375
+0.35 0 3.93264e-05 0.000375
+0.42 0 3.93264e-05 0.000375
+0.49 0 3.93264e-05 0.000375
+0.56 0 3.93264e-05 0.000375
+0.63 0 3.93264e-05 0.000375
+0.7 0 3.93264e-05 0.000375
+0.84 0 3.93264e-05 0.000375
+1.12 0 3.93264e-05 0.000375
+1.4 0 3.93264e-05 0.000375
+1.68 0 3.93264e-05 0.000375
+END DIST
+
+Metal 3 OVER 2
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000375
+0.28 0 3.93264e-05 0.000375
+0.35 0 3.93264e-05 0.000375
+0.42 0 3.93264e-05 0.000375
+0.49 0 3.93264e-05 0.000375
+0.56 0 3.93264e-05 0.000375
+0.63 0 3.93264e-05 0.000375
+0.7 0 3.93264e-05 0.000375
+0.84 0 3.93264e-05 0.000375
+1.12 0 3.93264e-05 0.000375
+1.4 0 3.93264e-05 0.000375
+1.68 0 3.93264e-05 0.000375
+END DIST
+
+Metal 3 UNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 UNDER 4
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000375
+0.28 0 3.93264e-05 0.000375
+0.35 0 3.93264e-05 0.000375
+0.42 0 3.93264e-05 0.000375
+0.49 0 3.93264e-05 0.000375
+0.56 0 3.93264e-05 0.000375
+0.63 0 3.93264e-05 0.000375
+0.7 0 3.93264e-05 0.000375
+0.84 0 3.93264e-05 0.000375
+1.12 0 3.93264e-05 0.000375
+1.4 0 3.93264e-05 0.000375
+1.68 0 3.93264e-05 0.000375
+END DIST
+
+Metal 3 UNDER 5
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000375
+0.28 0 3.93264e-05 0.000375
+0.35 0 3.93264e-05 0.000375
+0.42 0 3.93264e-05 0.000375
+0.49 0 3.93264e-05 0.000375
+0.56 0 3.93264e-05 0.000375
+0.63 0 3.93264e-05 0.000375
+0.7 0 3.93264e-05 0.000375
+0.84 0 3.93264e-05 0.000375
+1.12 0 3.93264e-05 0.000375
+1.4 0 3.93264e-05 0.000375
+1.68 0 3.93264e-05 0.000375
+END DIST
+
+Metal 3 UNDER 6
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000375
+0.28 0 3.93264e-05 0.000375
+0.35 0 3.93264e-05 0.000375
+0.42 0 3.93264e-05 0.000375
+0.49 0 3.93264e-05 0.000375
+0.56 0 3.93264e-05 0.000375
+0.63 0 3.93264e-05 0.000375
+0.7 0 3.93264e-05 0.000375
+0.84 0 3.93264e-05 0.000375
+1.12 0 3.93264e-05 0.000375
+1.4 0 3.93264e-05 0.000375
+1.68 0 3.93264e-05 0.000375
+END DIST
+
+Metal 3 DIAGUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 0 0.000375
+0.14 0 0 0.000375
+0.28 0 0 0.000375
+0.35 0 0 0.000375
+0.42 0 0 0.000375
+0.49 0 0 0.000375
+0.56 0 0 0.000375
+0.63 0 0 0.000375
+0.7 0 0 0.000375
+0.84 0 0 0.000375
+1.12 0 0 0.000375
+1.4 0 0 0.000375
+1.68 0 0 0.000375
+END DIST
+
+Metal 3 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 0 0.000375
+0.14 0 0 0.000375
+0.28 0 0 0.000375
+0.35 0 0 0.000375
+0.42 0 0 0.000375
+0.49 0 0 0.000375
+0.56 0 0 0.000375
+0.63 0 0 0.000375
+0.7 0 0 0.000375
+0.84 0 0 0.000375
+1.12 0 0 0.000375
+1.4 0 0 0.000375
+1.68 0 0 0.000375
+END DIST
+
+Metal 3 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 0 0.000375
+0.14 0 0 0.000375
+0.28 0 0 0.000375
+0.35 0 0 0.000375
+0.42 0 0 0.000375
+0.49 0 0 0.000375
+0.56 0 0 0.000375
+0.63 0 0 0.000375
+0.7 0 0 0.000375
+0.84 0 0 0.000375
+1.12 0 0 0.000375
+1.4 0 0 0.000375
+1.68 0 0 0.000375
+END DIST
+
+Metal 3 OVERUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000375
+0.28 0 3.93264e-05 0.000375
+0.35 0 3.93264e-05 0.000375
+0.42 0 3.93264e-05 0.000375
+0.49 0 3.93264e-05 0.000375
+0.56 0 3.93264e-05 0.000375
+0.63 0 3.93264e-05 0.000375
+0.7 0 3.93264e-05 0.000375
+0.84 0 3.93264e-05 0.000375
+1.12 0 3.93264e-05 0.000375
+1.4 0 3.93264e-05 0.000375
+1.68 0 3.93264e-05 0.000375
+END DIST
+
+Metal 3 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000375
+0.28 0 3.93264e-05 0.000375
+0.35 0 3.93264e-05 0.000375
+0.42 0 3.93264e-05 0.000375
+0.49 0 3.93264e-05 0.000375
+0.56 0 3.93264e-05 0.000375
+0.63 0 3.93264e-05 0.000375
+0.7 0 3.93264e-05 0.000375
+0.84 0 3.93264e-05 0.000375
+1.12 0 3.93264e-05 0.000375
+1.4 0 3.93264e-05 0.000375
+1.68 0 3.93264e-05 0.000375
+END DIST
+
+Metal 3 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000375
+0.28 0 3.93264e-05 0.000375
+0.35 0 3.93264e-05 0.000375
+0.42 0 3.93264e-05 0.000375
+0.49 0 3.93264e-05 0.000375
+0.56 0 3.93264e-05 0.000375
+0.63 0 3.93264e-05 0.000375
+0.7 0 3.93264e-05 0.000375
+0.84 0 3.93264e-05 0.000375
+1.12 0 3.93264e-05 0.000375
+1.4 0 3.93264e-05 0.000375
+1.68 0 3.93264e-05 0.000375
+END DIST
+
+Metal 3 OVER 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000375
+0.28 0 3.93264e-05 0.000375
+0.35 0 3.93264e-05 0.000375
+0.42 0 3.93264e-05 0.000375
+0.49 0 3.93264e-05 0.000375
+0.56 0 3.93264e-05 0.000375
+0.63 0 3.93264e-05 0.000375
+0.7 0 3.93264e-05 0.000375
+0.84 0 3.93264e-05 0.000375
+1.12 0 3.93264e-05 0.000375
+1.4 0 3.93264e-05 0.000375
+1.68 0 3.93264e-05 0.000375
+END DIST
+
+Metal 3 OVER 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000375
+0.28 0 3.93264e-05 0.000375
+0.35 0 3.93264e-05 0.000375
+0.42 0 3.93264e-05 0.000375
+0.49 0 3.93264e-05 0.000375
+0.56 0 3.93264e-05 0.000375
+0.63 0 3.93264e-05 0.000375
+0.7 0 3.93264e-05 0.000375
+0.84 0 3.93264e-05 0.000375
+1.12 0 3.93264e-05 0.000375
+1.4 0 3.93264e-05 0.000375
+1.68 0 3.93264e-05 0.000375
+END DIST
+
+Metal 3 OVER 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000375
+0.28 0 3.93264e-05 0.000375
+0.35 0 3.93264e-05 0.000375
+0.42 0 3.93264e-05 0.000375
+0.49 0 3.93264e-05 0.000375
+0.56 0 3.93264e-05 0.000375
+0.63 0 3.93264e-05 0.000375
+0.7 0 3.93264e-05 0.000375
+0.84 0 3.93264e-05 0.000375
+1.12 0 3.93264e-05 0.000375
+1.4 0 3.93264e-05 0.000375
+1.68 0 3.93264e-05 0.000375
+END DIST
+
+Metal 4 RESOVER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000126667
+0 0.38 0 0.000126667
+0 0.68 0 0.000126667
+0 0.91 0 0.000126667
+0 1.06 0 0.000126667
+0 1.36 0 0.000126667
+0 1.59 0 0.000126667
+0 1.74 0 0.000126667
+0 2.04 0 0.000126667
+0 2.72 0 0.000126667
+0.38 0.38 0 0.000126667
+0.38 0.68 0 0.000126667
+0.38 0.91 0 0.000126667
+0.38 1.06 0 0.000126667
+0.38 1.36 0 0.000126667
+0.38 1.59 0 0.000126667
+0.38 1.74 0 0.000126667
+0.38 2.04 0 0.000126667
+0.38 2.72 0 0.000126667
+0.68 0.68 0 0.000126667
+0.68 0.91 0 0.000126667
+0.68 1.06 0 0.000126667
+0.68 1.36 0 0.000126667
+0.68 1.59 0 0.000126667
+0.68 1.74 0 0.000126667
+0.68 2.04 0 0.000126667
+0.68 2.72 0 0.000126667
+0.91 0.91 0 0.000126667
+0.91 1.06 0 0.000126667
+0.91 1.36 0 0.000126667
+0.91 1.59 0 0.000126667
+0.91 1.74 0 0.000126667
+0.91 2.04 0 0.000126667
+0.91 2.72 0 0.000126667
+1.06 1.06 0 0.000126667
+1.06 1.36 0 0.000126667
+1.06 1.59 0 0.000126667
+1.06 1.74 0 0.000126667
+1.06 2.04 0 0.000126667
+1.06 2.72 0 0.000126667
+1.36 1.36 0 0.000126667
+1.36 1.59 0 0.000126667
+1.36 1.74 0 0.000126667
+1.36 2.04 0 0.000126667
+1.36 2.72 0 0.000126667
+1.59 1.59 0 0.000126667
+1.59 1.74 0 0.000126667
+1.59 2.04 0 0.000126667
+1.59 2.72 0 0.000126667
+1.74 1.74 0 0.000126667
+1.74 2.04 0 0.000126667
+1.74 2.72 0 0.000126667
+2.04 2.04 0 0.000126667
+2.04 2.72 0 0.000126667
+2.72 0 2.72 0.000126667
+END DIST
+
+Metal 4 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 OVER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 OVER 0
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 6.33333e-05
+0.6 0 4.3259e-05 6.33333e-05
+0.75 0 4.3259e-05 6.33333e-05
+0.9 0 4.3259e-05 6.33333e-05
+1.05 0 4.3259e-05 6.33333e-05
+1.2 0 4.3259e-05 6.33333e-05
+1.35 0 4.3259e-05 6.33333e-05
+1.5 0 4.3259e-05 6.33333e-05
+1.8 0 4.3259e-05 6.33333e-05
+2.4 0 4.3259e-05 6.33333e-05
+3 0 4.3259e-05 6.33333e-05
+3.6 0 4.3259e-05 6.33333e-05
+END DIST
+
+Metal 4 OVER 1
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 6.33333e-05
+0.6 0 4.3259e-05 6.33333e-05
+0.75 0 4.3259e-05 6.33333e-05
+0.9 0 4.3259e-05 6.33333e-05
+1.05 0 4.3259e-05 6.33333e-05
+1.2 0 4.3259e-05 6.33333e-05
+1.35 0 4.3259e-05 6.33333e-05
+1.5 0 4.3259e-05 6.33333e-05
+1.8 0 4.3259e-05 6.33333e-05
+2.4 0 4.3259e-05 6.33333e-05
+3 0 4.3259e-05 6.33333e-05
+3.6 0 4.3259e-05 6.33333e-05
+END DIST
+
+Metal 4 OVER 2
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 6.33333e-05
+0.6 0 4.3259e-05 6.33333e-05
+0.75 0 4.3259e-05 6.33333e-05
+0.9 0 4.3259e-05 6.33333e-05
+1.05 0 4.3259e-05 6.33333e-05
+1.2 0 4.3259e-05 6.33333e-05
+1.35 0 4.3259e-05 6.33333e-05
+1.5 0 4.3259e-05 6.33333e-05
+1.8 0 4.3259e-05 6.33333e-05
+2.4 0 4.3259e-05 6.33333e-05
+3 0 4.3259e-05 6.33333e-05
+3.6 0 4.3259e-05 6.33333e-05
+END DIST
+
+Metal 4 OVER 3
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 6.33333e-05
+0.6 0 4.3259e-05 6.33333e-05
+0.75 0 4.3259e-05 6.33333e-05
+0.9 0 4.3259e-05 6.33333e-05
+1.05 0 4.3259e-05 6.33333e-05
+1.2 0 4.3259e-05 6.33333e-05
+1.35 0 4.3259e-05 6.33333e-05
+1.5 0 4.3259e-05 6.33333e-05
+1.8 0 4.3259e-05 6.33333e-05
+2.4 0 4.3259e-05 6.33333e-05
+3 0 4.3259e-05 6.33333e-05
+3.6 0 4.3259e-05 6.33333e-05
+END DIST
+
+Metal 4 UNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 UNDER 5
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 6.33333e-05
+0.6 0 4.3259e-05 6.33333e-05
+0.75 0 4.3259e-05 6.33333e-05
+0.9 0 4.3259e-05 6.33333e-05
+1.05 0 4.3259e-05 6.33333e-05
+1.2 0 4.3259e-05 6.33333e-05
+1.35 0 4.3259e-05 6.33333e-05
+1.5 0 4.3259e-05 6.33333e-05
+1.8 0 4.3259e-05 6.33333e-05
+2.4 0 4.3259e-05 6.33333e-05
+3 0 4.3259e-05 6.33333e-05
+3.6 0 4.3259e-05 6.33333e-05
+END DIST
+
+Metal 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 6.33333e-05
+0.6 0 4.3259e-05 6.33333e-05
+0.75 0 4.3259e-05 6.33333e-05
+0.9 0 4.3259e-05 6.33333e-05
+1.05 0 4.3259e-05 6.33333e-05
+1.2 0 4.3259e-05 6.33333e-05
+1.35 0 4.3259e-05 6.33333e-05
+1.5 0 4.3259e-05 6.33333e-05
+1.8 0 4.3259e-05 6.33333e-05
+2.4 0 4.3259e-05 6.33333e-05
+3 0 4.3259e-05 6.33333e-05
+3.6 0 4.3259e-05 6.33333e-05
+END DIST
+
+Metal 4 DIAGUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 DIAGUNDER 5
+DIST count 13 width 0.3
+0 0 0 6.33333e-05
+0.3 0 0 6.33333e-05
+0.6 0 0 6.33333e-05
+0.75 0 0 6.33333e-05
+0.9 0 0 6.33333e-05
+1.05 0 0 6.33333e-05
+1.2 0 0 6.33333e-05
+1.35 0 0 6.33333e-05
+1.5 0 0 6.33333e-05
+1.8 0 0 6.33333e-05
+2.4 0 0 6.33333e-05
+3 0 0 6.33333e-05
+3.6 0 0 6.33333e-05
+END DIST
+
+Metal 4 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 0 6.33333e-05
+0.3 0 0 6.33333e-05
+0.6 0 0 6.33333e-05
+0.75 0 0 6.33333e-05
+0.9 0 0 6.33333e-05
+1.05 0 0 6.33333e-05
+1.2 0 0 6.33333e-05
+1.35 0 0 6.33333e-05
+1.5 0 0 6.33333e-05
+1.8 0 0 6.33333e-05
+2.4 0 0 6.33333e-05
+3 0 0 6.33333e-05
+3.6 0 0 6.33333e-05
+END DIST
+
+Metal 4 OVERUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 OVER 1 UNDER 5
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 6.33333e-05
+0.6 0 4.3259e-05 6.33333e-05
+0.75 0 4.3259e-05 6.33333e-05
+0.9 0 4.3259e-05 6.33333e-05
+1.05 0 4.3259e-05 6.33333e-05
+1.2 0 4.3259e-05 6.33333e-05
+1.35 0 4.3259e-05 6.33333e-05
+1.5 0 4.3259e-05 6.33333e-05
+1.8 0 4.3259e-05 6.33333e-05
+2.4 0 4.3259e-05 6.33333e-05
+3 0 4.3259e-05 6.33333e-05
+3.6 0 4.3259e-05 6.33333e-05
+END DIST
+
+Metal 4 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 6.33333e-05
+0.6 0 4.3259e-05 6.33333e-05
+0.75 0 4.3259e-05 6.33333e-05
+0.9 0 4.3259e-05 6.33333e-05
+1.05 0 4.3259e-05 6.33333e-05
+1.2 0 4.3259e-05 6.33333e-05
+1.35 0 4.3259e-05 6.33333e-05
+1.5 0 4.3259e-05 6.33333e-05
+1.8 0 4.3259e-05 6.33333e-05
+2.4 0 4.3259e-05 6.33333e-05
+3 0 4.3259e-05 6.33333e-05
+3.6 0 4.3259e-05 6.33333e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 5
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 6.33333e-05
+0.6 0 4.3259e-05 6.33333e-05
+0.75 0 4.3259e-05 6.33333e-05
+0.9 0 4.3259e-05 6.33333e-05
+1.05 0 4.3259e-05 6.33333e-05
+1.2 0 4.3259e-05 6.33333e-05
+1.35 0 4.3259e-05 6.33333e-05
+1.5 0 4.3259e-05 6.33333e-05
+1.8 0 4.3259e-05 6.33333e-05
+2.4 0 4.3259e-05 6.33333e-05
+3 0 4.3259e-05 6.33333e-05
+3.6 0 4.3259e-05 6.33333e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 6.33333e-05
+0.6 0 4.3259e-05 6.33333e-05
+0.75 0 4.3259e-05 6.33333e-05
+0.9 0 4.3259e-05 6.33333e-05
+1.05 0 4.3259e-05 6.33333e-05
+1.2 0 4.3259e-05 6.33333e-05
+1.35 0 4.3259e-05 6.33333e-05
+1.5 0 4.3259e-05 6.33333e-05
+1.8 0 4.3259e-05 6.33333e-05
+2.4 0 4.3259e-05 6.33333e-05
+3 0 4.3259e-05 6.33333e-05
+3.6 0 4.3259e-05 6.33333e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 5
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 6.33333e-05
+0.6 0 4.3259e-05 6.33333e-05
+0.75 0 4.3259e-05 6.33333e-05
+0.9 0 4.3259e-05 6.33333e-05
+1.05 0 4.3259e-05 6.33333e-05
+1.2 0 4.3259e-05 6.33333e-05
+1.35 0 4.3259e-05 6.33333e-05
+1.5 0 4.3259e-05 6.33333e-05
+1.8 0 4.3259e-05 6.33333e-05
+2.4 0 4.3259e-05 6.33333e-05
+3 0 4.3259e-05 6.33333e-05
+3.6 0 4.3259e-05 6.33333e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 6.33333e-05
+0.6 0 4.3259e-05 6.33333e-05
+0.75 0 4.3259e-05 6.33333e-05
+0.9 0 4.3259e-05 6.33333e-05
+1.05 0 4.3259e-05 6.33333e-05
+1.2 0 4.3259e-05 6.33333e-05
+1.35 0 4.3259e-05 6.33333e-05
+1.5 0 4.3259e-05 6.33333e-05
+1.8 0 4.3259e-05 6.33333e-05
+2.4 0 4.3259e-05 6.33333e-05
+3 0 4.3259e-05 6.33333e-05
+3.6 0 4.3259e-05 6.33333e-05
+END DIST
+
+Metal 5 RESOVER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000126667
+0 0.62 0 0.000126667
+0 0.92 0 0.000126667
+0 1.39 0 0.000126667
+0 1.54 0 0.000126667
+0 1.84 0 0.000126667
+0 2.31 0 0.000126667
+0 2.46 0 0.000126667
+0 2.76 0 0.000126667
+0 3.68 0 0.000126667
+0.62 0.62 0 0.000126667
+0.62 0.92 0 0.000126667
+0.62 1.39 0 0.000126667
+0.62 1.54 0 0.000126667
+0.62 1.84 0 0.000126667
+0.62 2.31 0 0.000126667
+0.62 2.46 0 0.000126667
+0.62 2.76 0 0.000126667
+0.62 3.68 0 0.000126667
+0.92 0.92 0 0.000126667
+0.92 1.39 0 0.000126667
+0.92 1.54 0 0.000126667
+0.92 1.84 0 0.000126667
+0.92 2.31 0 0.000126667
+0.92 2.46 0 0.000126667
+0.92 2.76 0 0.000126667
+0.92 3.68 0 0.000126667
+1.39 1.39 0 0.000126667
+1.39 1.54 0 0.000126667
+1.39 1.84 0 0.000126667
+1.39 2.31 0 0.000126667
+1.39 2.46 0 0.000126667
+1.39 2.76 0 0.000126667
+1.39 3.68 0 0.000126667
+1.54 1.54 0 0.000126667
+1.54 1.84 0 0.000126667
+1.54 2.31 0 0.000126667
+1.54 2.46 0 0.000126667
+1.54 2.76 0 0.000126667
+1.54 3.68 0 0.000126667
+1.84 1.84 0 0.000126667
+1.84 2.31 0 0.000126667
+1.84 2.46 0 0.000126667
+1.84 2.76 0 0.000126667
+1.84 3.68 0 0.000126667
+2.31 2.31 0 0.000126667
+2.31 2.46 0 0.000126667
+2.31 2.76 0 0.000126667
+2.31 3.68 0 0.000126667
+2.46 2.46 0 0.000126667
+2.46 2.76 0 0.000126667
+2.46 3.68 0 0.000126667
+2.76 2.76 0 0.000126667
+2.76 3.68 0 0.000126667
+3.68 0 3.68 0.000126667
+END DIST
+
+Metal 5 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 4
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 OVER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 OVER 0
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 6.33333e-05
+0.6 0 3.83088e-05 6.33333e-05
+0.75 0 3.83088e-05 6.33333e-05
+0.9 0 3.83088e-05 6.33333e-05
+1.05 0 3.83088e-05 6.33333e-05
+1.2 0 3.83088e-05 6.33333e-05
+1.35 0 3.83088e-05 6.33333e-05
+1.5 0 3.83088e-05 6.33333e-05
+1.8 0 3.83088e-05 6.33333e-05
+2.4 0 3.83088e-05 6.33333e-05
+3 0 3.83088e-05 6.33333e-05
+3.6 0 3.83088e-05 6.33333e-05
+END DIST
+
+Metal 5 OVER 1
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 6.33333e-05
+0.6 0 3.83088e-05 6.33333e-05
+0.75 0 3.83088e-05 6.33333e-05
+0.9 0 3.83088e-05 6.33333e-05
+1.05 0 3.83088e-05 6.33333e-05
+1.2 0 3.83088e-05 6.33333e-05
+1.35 0 3.83088e-05 6.33333e-05
+1.5 0 3.83088e-05 6.33333e-05
+1.8 0 3.83088e-05 6.33333e-05
+2.4 0 3.83088e-05 6.33333e-05
+3 0 3.83088e-05 6.33333e-05
+3.6 0 3.83088e-05 6.33333e-05
+END DIST
+
+Metal 5 OVER 2
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 6.33333e-05
+0.6 0 3.83088e-05 6.33333e-05
+0.75 0 3.83088e-05 6.33333e-05
+0.9 0 3.83088e-05 6.33333e-05
+1.05 0 3.83088e-05 6.33333e-05
+1.2 0 3.83088e-05 6.33333e-05
+1.35 0 3.83088e-05 6.33333e-05
+1.5 0 3.83088e-05 6.33333e-05
+1.8 0 3.83088e-05 6.33333e-05
+2.4 0 3.83088e-05 6.33333e-05
+3 0 3.83088e-05 6.33333e-05
+3.6 0 3.83088e-05 6.33333e-05
+END DIST
+
+Metal 5 OVER 3
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 6.33333e-05
+0.6 0 3.83088e-05 6.33333e-05
+0.75 0 3.83088e-05 6.33333e-05
+0.9 0 3.83088e-05 6.33333e-05
+1.05 0 3.83088e-05 6.33333e-05
+1.2 0 3.83088e-05 6.33333e-05
+1.35 0 3.83088e-05 6.33333e-05
+1.5 0 3.83088e-05 6.33333e-05
+1.8 0 3.83088e-05 6.33333e-05
+2.4 0 3.83088e-05 6.33333e-05
+3 0 3.83088e-05 6.33333e-05
+3.6 0 3.83088e-05 6.33333e-05
+END DIST
+
+Metal 5 OVER 4
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 6.33333e-05
+0.6 0 3.83088e-05 6.33333e-05
+0.75 0 3.83088e-05 6.33333e-05
+0.9 0 3.83088e-05 6.33333e-05
+1.05 0 3.83088e-05 6.33333e-05
+1.2 0 3.83088e-05 6.33333e-05
+1.35 0 3.83088e-05 6.33333e-05
+1.5 0 3.83088e-05 6.33333e-05
+1.8 0 3.83088e-05 6.33333e-05
+2.4 0 3.83088e-05 6.33333e-05
+3 0 3.83088e-05 6.33333e-05
+3.6 0 3.83088e-05 6.33333e-05
+END DIST
+
+Metal 5 UNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 6.33333e-05
+0.6 0 3.83088e-05 6.33333e-05
+0.75 0 3.83088e-05 6.33333e-05
+0.9 0 3.83088e-05 6.33333e-05
+1.05 0 3.83088e-05 6.33333e-05
+1.2 0 3.83088e-05 6.33333e-05
+1.35 0 3.83088e-05 6.33333e-05
+1.5 0 3.83088e-05 6.33333e-05
+1.8 0 3.83088e-05 6.33333e-05
+2.4 0 3.83088e-05 6.33333e-05
+3 0 3.83088e-05 6.33333e-05
+3.6 0 3.83088e-05 6.33333e-05
+END DIST
+
+Metal 5 DIAGUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 0 6.33333e-05
+0.3 0 0 6.33333e-05
+0.6 0 0 6.33333e-05
+0.75 0 0 6.33333e-05
+0.9 0 0 6.33333e-05
+1.05 0 0 6.33333e-05
+1.2 0 0 6.33333e-05
+1.35 0 0 6.33333e-05
+1.5 0 0 6.33333e-05
+1.8 0 0 6.33333e-05
+2.4 0 0 6.33333e-05
+3 0 0 6.33333e-05
+3.6 0 0 6.33333e-05
+END DIST
+
+Metal 5 OVERUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 6.33333e-05
+0.6 0 3.83088e-05 6.33333e-05
+0.75 0 3.83088e-05 6.33333e-05
+0.9 0 3.83088e-05 6.33333e-05
+1.05 0 3.83088e-05 6.33333e-05
+1.2 0 3.83088e-05 6.33333e-05
+1.35 0 3.83088e-05 6.33333e-05
+1.5 0 3.83088e-05 6.33333e-05
+1.8 0 3.83088e-05 6.33333e-05
+2.4 0 3.83088e-05 6.33333e-05
+3 0 3.83088e-05 6.33333e-05
+3.6 0 3.83088e-05 6.33333e-05
+END DIST
+
+Metal 5 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 6.33333e-05
+0.6 0 3.83088e-05 6.33333e-05
+0.75 0 3.83088e-05 6.33333e-05
+0.9 0 3.83088e-05 6.33333e-05
+1.05 0 3.83088e-05 6.33333e-05
+1.2 0 3.83088e-05 6.33333e-05
+1.35 0 3.83088e-05 6.33333e-05
+1.5 0 3.83088e-05 6.33333e-05
+1.8 0 3.83088e-05 6.33333e-05
+2.4 0 3.83088e-05 6.33333e-05
+3 0 3.83088e-05 6.33333e-05
+3.6 0 3.83088e-05 6.33333e-05
+END DIST
+
+Metal 5 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 6.33333e-05
+0.6 0 3.83088e-05 6.33333e-05
+0.75 0 3.83088e-05 6.33333e-05
+0.9 0 3.83088e-05 6.33333e-05
+1.05 0 3.83088e-05 6.33333e-05
+1.2 0 3.83088e-05 6.33333e-05
+1.35 0 3.83088e-05 6.33333e-05
+1.5 0 3.83088e-05 6.33333e-05
+1.8 0 3.83088e-05 6.33333e-05
+2.4 0 3.83088e-05 6.33333e-05
+3 0 3.83088e-05 6.33333e-05
+3.6 0 3.83088e-05 6.33333e-05
+END DIST
+
+Metal 5 OVER 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 6.33333e-05
+0.6 0 3.83088e-05 6.33333e-05
+0.75 0 3.83088e-05 6.33333e-05
+0.9 0 3.83088e-05 6.33333e-05
+1.05 0 3.83088e-05 6.33333e-05
+1.2 0 3.83088e-05 6.33333e-05
+1.35 0 3.83088e-05 6.33333e-05
+1.5 0 3.83088e-05 6.33333e-05
+1.8 0 3.83088e-05 6.33333e-05
+2.4 0 3.83088e-05 6.33333e-05
+3 0 3.83088e-05 6.33333e-05
+3.6 0 3.83088e-05 6.33333e-05
+END DIST
+
+Metal 6 RESOVER
+WIDTH Table 1 entries: 1.6
+
+Metal 6 RESOVER 0
+DIST count 55 width 1.6
+0 0 0 1.325e-05
+0 1.8 0 1.325e-05
+0 3.4 0 1.325e-05
+0 4.4 0 1.325e-05
+0 5.2 0 1.325e-05
+0 6.8 0 1.325e-05
+0 7.8 0 1.325e-05
+0 8.6 0 1.325e-05
+0 10.2 0 1.325e-05
+0 13.6 0 1.325e-05
+1.8 1.8 0 1.325e-05
+1.8 3.4 0 1.325e-05
+1.8 4.4 0 1.325e-05
+1.8 5.2 0 1.325e-05
+1.8 6.8 0 1.325e-05
+1.8 7.8 0 1.325e-05
+1.8 8.6 0 1.325e-05
+1.8 10.2 0 1.325e-05
+1.8 13.6 0 1.325e-05
+3.4 3.4 0 1.325e-05
+3.4 4.4 0 1.325e-05
+3.4 5.2 0 1.325e-05
+3.4 6.8 0 1.325e-05
+3.4 7.8 0 1.325e-05
+3.4 8.6 0 1.325e-05
+3.4 10.2 0 1.325e-05
+3.4 13.6 0 1.325e-05
+4.4 4.4 0 1.325e-05
+4.4 5.2 0 1.325e-05
+4.4 6.8 0 1.325e-05
+4.4 7.8 0 1.325e-05
+4.4 8.6 0 1.325e-05
+4.4 10.2 0 1.325e-05
+4.4 13.6 0 1.325e-05
+5.2 5.2 0 1.325e-05
+5.2 6.8 0 1.325e-05
+5.2 7.8 0 1.325e-05
+5.2 8.6 0 1.325e-05
+5.2 10.2 0 1.325e-05
+5.2 13.6 0 1.325e-05
+6.8 6.8 0 1.325e-05
+6.8 7.8 0 1.325e-05
+6.8 8.6 0 1.325e-05
+6.8 10.2 0 1.325e-05
+6.8 13.6 0 1.325e-05
+7.8 7.8 0 1.325e-05
+7.8 8.6 0 1.325e-05
+7.8 10.2 0 1.325e-05
+7.8 13.6 0 1.325e-05
+8.6 8.6 0 1.325e-05
+8.6 10.2 0 1.325e-05
+8.6 13.6 0 1.325e-05
+10.2 10.2 0 1.325e-05
+10.2 13.6 0 1.325e-05
+13.6 0 13.6 1.325e-05
+END DIST
+
+Metal 6 RESOVER 1
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 2
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 3
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 4
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 5
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 OVER
+WIDTH Table 1 entries: 1.6
+
+Metal 6 OVER 0
+DIST count 12 width 1.6
+1.6 0 4.42999e-05 6.625e-06
+3.2 0 4.42999e-05 6.625e-06
+4 0 4.42999e-05 6.625e-06
+4.8 0 4.42999e-05 6.625e-06
+5.6 0 4.42999e-05 6.625e-06
+6.4 0 4.42999e-05 6.625e-06
+7.2 0 4.42999e-05 6.625e-06
+8 0 4.42999e-05 6.625e-06
+9.6 0 4.42999e-05 6.625e-06
+12.8 0 4.42999e-05 6.625e-06
+16 0 4.42999e-05 6.625e-06
+19.2 0 4.42999e-05 6.625e-06
+END DIST
+
+Metal 6 OVER 1
+DIST count 12 width 1.6
+1.6 0 4.42999e-05 6.625e-06
+3.2 0 4.42999e-05 6.625e-06
+4 0 4.42999e-05 6.625e-06
+4.8 0 4.42999e-05 6.625e-06
+5.6 0 4.42999e-05 6.625e-06
+6.4 0 4.42999e-05 6.625e-06
+7.2 0 4.42999e-05 6.625e-06
+8 0 4.42999e-05 6.625e-06
+9.6 0 4.42999e-05 6.625e-06
+12.8 0 4.42999e-05 6.625e-06
+16 0 4.42999e-05 6.625e-06
+19.2 0 4.42999e-05 6.625e-06
+END DIST
+
+Metal 6 OVER 2
+DIST count 12 width 1.6
+1.6 0 4.42999e-05 6.625e-06
+3.2 0 4.42999e-05 6.625e-06
+4 0 4.42999e-05 6.625e-06
+4.8 0 4.42999e-05 6.625e-06
+5.6 0 4.42999e-05 6.625e-06
+6.4 0 4.42999e-05 6.625e-06
+7.2 0 4.42999e-05 6.625e-06
+8 0 4.42999e-05 6.625e-06
+9.6 0 4.42999e-05 6.625e-06
+12.8 0 4.42999e-05 6.625e-06
+16 0 4.42999e-05 6.625e-06
+19.2 0 4.42999e-05 6.625e-06
+END DIST
+
+Metal 6 OVER 3
+DIST count 12 width 1.6
+1.6 0 4.42999e-05 6.625e-06
+3.2 0 4.42999e-05 6.625e-06
+4 0 4.42999e-05 6.625e-06
+4.8 0 4.42999e-05 6.625e-06
+5.6 0 4.42999e-05 6.625e-06
+6.4 0 4.42999e-05 6.625e-06
+7.2 0 4.42999e-05 6.625e-06
+8 0 4.42999e-05 6.625e-06
+9.6 0 4.42999e-05 6.625e-06
+12.8 0 4.42999e-05 6.625e-06
+16 0 4.42999e-05 6.625e-06
+19.2 0 4.42999e-05 6.625e-06
+END DIST
+
+Metal 6 OVER 4
+DIST count 12 width 1.6
+1.6 0 4.42999e-05 6.625e-06
+3.2 0 4.42999e-05 6.625e-06
+4 0 4.42999e-05 6.625e-06
+4.8 0 4.42999e-05 6.625e-06
+5.6 0 4.42999e-05 6.625e-06
+6.4 0 4.42999e-05 6.625e-06
+7.2 0 4.42999e-05 6.625e-06
+8 0 4.42999e-05 6.625e-06
+9.6 0 4.42999e-05 6.625e-06
+12.8 0 4.42999e-05 6.625e-06
+16 0 4.42999e-05 6.625e-06
+19.2 0 4.42999e-05 6.625e-06
+END DIST
+
+Metal 6 OVER 5
+DIST count 12 width 1.6
+1.6 0 4.42999e-05 6.625e-06
+3.2 0 4.42999e-05 6.625e-06
+4 0 4.42999e-05 6.625e-06
+4.8 0 4.42999e-05 6.625e-06
+5.6 0 4.42999e-05 6.625e-06
+6.4 0 4.42999e-05 6.625e-06
+7.2 0 4.42999e-05 6.625e-06
+8 0 4.42999e-05 6.625e-06
+9.6 0 4.42999e-05 6.625e-06
+12.8 0 4.42999e-05 6.625e-06
+16 0 4.42999e-05 6.625e-06
+19.2 0 4.42999e-05 6.625e-06
+END DIST
+
+Metal 6 UNDER
+WIDTH Table 0 entries:
+
+Metal 6 DIAGUNDER
+WIDTH Table 0 entries:
+END DensityModel 0
diff --git a/sky130/openlane/rules.openrcx.sky130A.nom.spef_extractor b/sky130/openlane/rules.openrcx.sky130A.nom.spef_extractor
new file mode 100644
index 0000000..0563642
--- /dev/null
+++ b/sky130/openlane/rules.openrcx.sky130A.nom.spef_extractor
@@ -0,0 +1,1645 @@
+Extraction Rules for OpenRCX
+
+DIAGMODEL ON
+
+LayerCount 6
+DensityRate 1 0
+
+DensityModel 0
+
+Metal 1 RESOVER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 RESOVER 0
+DIST count 55 width 0.17
+0 0 0 0.0752941
+0 0.29 0 0.0752941
+0 0.46 0 0.0752941
+0 0.665 0 0.0752941
+0 0.75 0 0.0752941
+0 0.92 0 0.0752941
+0 1.125 0 0.0752941
+0 1.21 0 0.0752941
+0 1.38 0 0.0752941
+0 1.84 0 0.0752941
+0.29 0.29 0 0.0752941
+0.29 0.46 0 0.0752941
+0.29 0.665 0 0.0752941
+0.29 0.75 0 0.0752941
+0.29 0.92 0 0.0752941
+0.29 1.125 0 0.0752941
+0.29 1.21 0 0.0752941
+0.29 1.38 0 0.0752941
+0.29 1.84 0 0.0752941
+0.46 0.46 0 0.0752941
+0.46 0.665 0 0.0752941
+0.46 0.75 0 0.0752941
+0.46 0.92 0 0.0752941
+0.46 1.125 0 0.0752941
+0.46 1.21 0 0.0752941
+0.46 1.38 0 0.0752941
+0.46 1.84 0 0.0752941
+0.665 0.665 0 0.0752941
+0.665 0.75 0 0.0752941
+0.665 0.92 0 0.0752941
+0.665 1.125 0 0.0752941
+0.665 1.21 0 0.0752941
+0.665 1.38 0 0.0752941
+0.665 1.84 0 0.0752941
+0.75 0.75 0 0.0752941
+0.75 0.92 0 0.0752941
+0.75 1.125 0 0.0752941
+0.75 1.21 0 0.0752941
+0.75 1.38 0 0.0752941
+0.75 1.84 0 0.0752941
+0.92 0.92 0 0.0752941
+0.92 1.125 0 0.0752941
+0.92 1.21 0 0.0752941
+0.92 1.38 0 0.0752941
+0.92 1.84 0 0.0752941
+1.125 1.125 0 0.0752941
+1.125 1.21 0 0.0752941
+1.125 1.38 0 0.0752941
+1.125 1.84 0 0.0752941
+1.21 1.21 0 0.0752941
+1.21 1.38 0 0.0752941
+1.21 1.84 0 0.0752941
+1.38 1.38 0 0.0752941
+1.38 1.84 0 0.0752941
+1.84 0 1.84 0.0752941
+END DIST
+
+Metal 1 OVER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 OVER 0
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0376471
+0.34 0 4.42519e-05 0.0376471
+0.425 0 4.42519e-05 0.0376471
+0.51 0 4.42519e-05 0.0376471
+0.595 0 4.42519e-05 0.0376471
+0.68 0 4.42519e-05 0.0376471
+0.765 0 4.42519e-05 0.0376471
+0.85 0 4.42519e-05 0.0376471
+1.02 0 4.42519e-05 0.0376471
+1.36 0 4.42519e-05 0.0376471
+1.7 0 4.42519e-05 0.0376471
+2.04 0 4.42519e-05 0.0376471
+END DIST
+
+Metal 1 UNDER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 UNDER 2
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0376471
+0.34 0 4.42519e-05 0.0376471
+0.425 0 4.42519e-05 0.0376471
+0.51 0 4.42519e-05 0.0376471
+0.595 0 4.42519e-05 0.0376471
+0.68 0 4.42519e-05 0.0376471
+0.765 0 4.42519e-05 0.0376471
+0.85 0 4.42519e-05 0.0376471
+1.02 0 4.42519e-05 0.0376471
+1.36 0 4.42519e-05 0.0376471
+1.7 0 4.42519e-05 0.0376471
+2.04 0 4.42519e-05 0.0376471
+END DIST
+
+Metal 1 UNDER 3
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0376471
+0.34 0 4.42519e-05 0.0376471
+0.425 0 4.42519e-05 0.0376471
+0.51 0 4.42519e-05 0.0376471
+0.595 0 4.42519e-05 0.0376471
+0.68 0 4.42519e-05 0.0376471
+0.765 0 4.42519e-05 0.0376471
+0.85 0 4.42519e-05 0.0376471
+1.02 0 4.42519e-05 0.0376471
+1.36 0 4.42519e-05 0.0376471
+1.7 0 4.42519e-05 0.0376471
+2.04 0 4.42519e-05 0.0376471
+END DIST
+
+Metal 1 UNDER 4
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0376471
+0.34 0 4.42519e-05 0.0376471
+0.425 0 4.42519e-05 0.0376471
+0.51 0 4.42519e-05 0.0376471
+0.595 0 4.42519e-05 0.0376471
+0.68 0 4.42519e-05 0.0376471
+0.765 0 4.42519e-05 0.0376471
+0.85 0 4.42519e-05 0.0376471
+1.02 0 4.42519e-05 0.0376471
+1.36 0 4.42519e-05 0.0376471
+1.7 0 4.42519e-05 0.0376471
+2.04 0 4.42519e-05 0.0376471
+END DIST
+
+Metal 1 UNDER 5
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0376471
+0.34 0 4.42519e-05 0.0376471
+0.425 0 4.42519e-05 0.0376471
+0.51 0 4.42519e-05 0.0376471
+0.595 0 4.42519e-05 0.0376471
+0.68 0 4.42519e-05 0.0376471
+0.765 0 4.42519e-05 0.0376471
+0.85 0 4.42519e-05 0.0376471
+1.02 0 4.42519e-05 0.0376471
+1.36 0 4.42519e-05 0.0376471
+1.7 0 4.42519e-05 0.0376471
+2.04 0 4.42519e-05 0.0376471
+END DIST
+
+Metal 1 UNDER 6
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0376471
+0.34 0 4.42519e-05 0.0376471
+0.425 0 4.42519e-05 0.0376471
+0.51 0 4.42519e-05 0.0376471
+0.595 0 4.42519e-05 0.0376471
+0.68 0 4.42519e-05 0.0376471
+0.765 0 4.42519e-05 0.0376471
+0.85 0 4.42519e-05 0.0376471
+1.02 0 4.42519e-05 0.0376471
+1.36 0 4.42519e-05 0.0376471
+1.7 0 4.42519e-05 0.0376471
+2.04 0 4.42519e-05 0.0376471
+END DIST
+
+Metal 1 DIAGUNDER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 DIAGUNDER 2
+DIST count 13 width 0.17
+0 0 0 0.0376471
+0.17 0 0 0.0376471
+0.34 0 0 0.0376471
+0.425 0 0 0.0376471
+0.51 0 0 0.0376471
+0.595 0 0 0.0376471
+0.68 0 0 0.0376471
+0.765 0 0 0.0376471
+0.85 0 0 0.0376471
+1.02 0 0 0.0376471
+1.36 0 0 0.0376471
+1.7 0 0 0.0376471
+2.04 0 0 0.0376471
+END DIST
+
+Metal 1 DIAGUNDER 3
+DIST count 13 width 0.17
+0 0 0 0.0376471
+0.17 0 0 0.0376471
+0.34 0 0 0.0376471
+0.425 0 0 0.0376471
+0.51 0 0 0.0376471
+0.595 0 0 0.0376471
+0.68 0 0 0.0376471
+0.765 0 0 0.0376471
+0.85 0 0 0.0376471
+1.02 0 0 0.0376471
+1.36 0 0 0.0376471
+1.7 0 0 0.0376471
+2.04 0 0 0.0376471
+END DIST
+
+Metal 1 DIAGUNDER 4
+DIST count 13 width 0.17
+0 0 0 0.0376471
+0.17 0 0 0.0376471
+0.34 0 0 0.0376471
+0.425 0 0 0.0376471
+0.51 0 0 0.0376471
+0.595 0 0 0.0376471
+0.68 0 0 0.0376471
+0.765 0 0 0.0376471
+0.85 0 0 0.0376471
+1.02 0 0 0.0376471
+1.36 0 0 0.0376471
+1.7 0 0 0.0376471
+2.04 0 0 0.0376471
+END DIST
+
+Metal 1 DIAGUNDER 5
+DIST count 13 width 0.17
+0 0 0 0.0376471
+0.17 0 0 0.0376471
+0.34 0 0 0.0376471
+0.425 0 0 0.0376471
+0.51 0 0 0.0376471
+0.595 0 0 0.0376471
+0.68 0 0 0.0376471
+0.765 0 0 0.0376471
+0.85 0 0 0.0376471
+1.02 0 0 0.0376471
+1.36 0 0 0.0376471
+1.7 0 0 0.0376471
+2.04 0 0 0.0376471
+END DIST
+
+Metal 1 DIAGUNDER 6
+DIST count 0 width 0.17
+END DIST
+
+Metal 2 RESOVER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.000892857
+0 0.2 0 0.000892857
+0 0.34 0 0.000892857
+0 0.47 0 0.000892857
+0 0.54 0 0.000892857
+0 0.68 0 0.000892857
+0 0.81 0 0.000892857
+0 0.88 0 0.000892857
+0 1.02 0 0.000892857
+0 1.36 0 0.000892857
+0.2 0.2 0 0.000892857
+0.2 0.34 0 0.000892857
+0.2 0.47 0 0.000892857
+0.2 0.54 0 0.000892857
+0.2 0.68 0 0.000892857
+0.2 0.81 0 0.000892857
+0.2 0.88 0 0.000892857
+0.2 1.02 0 0.000892857
+0.2 1.36 0 0.000892857
+0.34 0.34 0 0.000892857
+0.34 0.47 0 0.000892857
+0.34 0.54 0 0.000892857
+0.34 0.68 0 0.000892857
+0.34 0.81 0 0.000892857
+0.34 0.88 0 0.000892857
+0.34 1.02 0 0.000892857
+0.34 1.36 0 0.000892857
+0.47 0.47 0 0.000892857
+0.47 0.54 0 0.000892857
+0.47 0.68 0 0.000892857
+0.47 0.81 0 0.000892857
+0.47 0.88 0 0.000892857
+0.47 1.02 0 0.000892857
+0.47 1.36 0 0.000892857
+0.54 0.54 0 0.000892857
+0.54 0.68 0 0.000892857
+0.54 0.81 0 0.000892857
+0.54 0.88 0 0.000892857
+0.54 1.02 0 0.000892857
+0.54 1.36 0 0.000892857
+0.68 0.68 0 0.000892857
+0.68 0.81 0 0.000892857
+0.68 0.88 0 0.000892857
+0.68 1.02 0 0.000892857
+0.68 1.36 0 0.000892857
+0.81 0.81 0 0.000892857
+0.81 0.88 0 0.000892857
+0.81 1.02 0 0.000892857
+0.81 1.36 0 0.000892857
+0.88 0.88 0 0.000892857
+0.88 1.02 0 0.000892857
+0.88 1.36 0 0.000892857
+1.02 1.02 0 0.000892857
+1.02 1.36 0 0.000892857
+1.36 0 1.36 0.000892857
+END DIST
+
+Metal 2 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 2 OVER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 OVER 0
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000446429
+0.28 0 4.27813e-05 0.000446429
+0.35 0 4.27813e-05 0.000446429
+0.42 0 4.27813e-05 0.000446429
+0.49 0 4.27813e-05 0.000446429
+0.56 0 4.27813e-05 0.000446429
+0.63 0 4.27813e-05 0.000446429
+0.7 0 4.27813e-05 0.000446429
+0.84 0 4.27813e-05 0.000446429
+1.12 0 4.27813e-05 0.000446429
+1.4 0 4.27813e-05 0.000446429
+1.68 0 4.27813e-05 0.000446429
+END DIST
+
+Metal 2 OVER 1
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000446429
+0.28 0 4.27813e-05 0.000446429
+0.35 0 4.27813e-05 0.000446429
+0.42 0 4.27813e-05 0.000446429
+0.49 0 4.27813e-05 0.000446429
+0.56 0 4.27813e-05 0.000446429
+0.63 0 4.27813e-05 0.000446429
+0.7 0 4.27813e-05 0.000446429
+0.84 0 4.27813e-05 0.000446429
+1.12 0 4.27813e-05 0.000446429
+1.4 0 4.27813e-05 0.000446429
+1.68 0 4.27813e-05 0.000446429
+END DIST
+
+Metal 2 UNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 UNDER 3
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000446429
+0.28 0 4.27813e-05 0.000446429
+0.35 0 4.27813e-05 0.000446429
+0.42 0 4.27813e-05 0.000446429
+0.49 0 4.27813e-05 0.000446429
+0.56 0 4.27813e-05 0.000446429
+0.63 0 4.27813e-05 0.000446429
+0.7 0 4.27813e-05 0.000446429
+0.84 0 4.27813e-05 0.000446429
+1.12 0 4.27813e-05 0.000446429
+1.4 0 4.27813e-05 0.000446429
+1.68 0 4.27813e-05 0.000446429
+END DIST
+
+Metal 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000446429
+0.28 0 4.27813e-05 0.000446429
+0.35 0 4.27813e-05 0.000446429
+0.42 0 4.27813e-05 0.000446429
+0.49 0 4.27813e-05 0.000446429
+0.56 0 4.27813e-05 0.000446429
+0.63 0 4.27813e-05 0.000446429
+0.7 0 4.27813e-05 0.000446429
+0.84 0 4.27813e-05 0.000446429
+1.12 0 4.27813e-05 0.000446429
+1.4 0 4.27813e-05 0.000446429
+1.68 0 4.27813e-05 0.000446429
+END DIST
+
+Metal 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000446429
+0.28 0 4.27813e-05 0.000446429
+0.35 0 4.27813e-05 0.000446429
+0.42 0 4.27813e-05 0.000446429
+0.49 0 4.27813e-05 0.000446429
+0.56 0 4.27813e-05 0.000446429
+0.63 0 4.27813e-05 0.000446429
+0.7 0 4.27813e-05 0.000446429
+0.84 0 4.27813e-05 0.000446429
+1.12 0 4.27813e-05 0.000446429
+1.4 0 4.27813e-05 0.000446429
+1.68 0 4.27813e-05 0.000446429
+END DIST
+
+Metal 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000446429
+0.28 0 4.27813e-05 0.000446429
+0.35 0 4.27813e-05 0.000446429
+0.42 0 4.27813e-05 0.000446429
+0.49 0 4.27813e-05 0.000446429
+0.56 0 4.27813e-05 0.000446429
+0.63 0 4.27813e-05 0.000446429
+0.7 0 4.27813e-05 0.000446429
+0.84 0 4.27813e-05 0.000446429
+1.12 0 4.27813e-05 0.000446429
+1.4 0 4.27813e-05 0.000446429
+1.68 0 4.27813e-05 0.000446429
+END DIST
+
+Metal 2 DIAGUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 DIAGUNDER 3
+DIST count 13 width 0.14
+0 0 0 0.000446429
+0.14 0 0 0.000446429
+0.28 0 0 0.000446429
+0.35 0 0 0.000446429
+0.42 0 0 0.000446429
+0.49 0 0 0.000446429
+0.56 0 0 0.000446429
+0.63 0 0 0.000446429
+0.7 0 0 0.000446429
+0.84 0 0 0.000446429
+1.12 0 0 0.000446429
+1.4 0 0 0.000446429
+1.68 0 0 0.000446429
+END DIST
+
+Metal 2 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 0 0.000446429
+0.14 0 0 0.000446429
+0.28 0 0 0.000446429
+0.35 0 0 0.000446429
+0.42 0 0 0.000446429
+0.49 0 0 0.000446429
+0.56 0 0 0.000446429
+0.63 0 0 0.000446429
+0.7 0 0 0.000446429
+0.84 0 0 0.000446429
+1.12 0 0 0.000446429
+1.4 0 0 0.000446429
+1.68 0 0 0.000446429
+END DIST
+
+Metal 2 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 0 0.000446429
+0.14 0 0 0.000446429
+0.28 0 0 0.000446429
+0.35 0 0 0.000446429
+0.42 0 0 0.000446429
+0.49 0 0 0.000446429
+0.56 0 0 0.000446429
+0.63 0 0 0.000446429
+0.7 0 0 0.000446429
+0.84 0 0 0.000446429
+1.12 0 0 0.000446429
+1.4 0 0 0.000446429
+1.68 0 0 0.000446429
+END DIST
+
+Metal 2 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 0 0.000446429
+0.14 0 0 0.000446429
+0.28 0 0 0.000446429
+0.35 0 0 0.000446429
+0.42 0 0 0.000446429
+0.49 0 0 0.000446429
+0.56 0 0 0.000446429
+0.63 0 0 0.000446429
+0.7 0 0 0.000446429
+0.84 0 0 0.000446429
+1.12 0 0 0.000446429
+1.4 0 0 0.000446429
+1.68 0 0 0.000446429
+END DIST
+
+Metal 2 OVERUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 OVER 1 UNDER 3
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000446429
+0.28 0 4.27813e-05 0.000446429
+0.35 0 4.27813e-05 0.000446429
+0.42 0 4.27813e-05 0.000446429
+0.49 0 4.27813e-05 0.000446429
+0.56 0 4.27813e-05 0.000446429
+0.63 0 4.27813e-05 0.000446429
+0.7 0 4.27813e-05 0.000446429
+0.84 0 4.27813e-05 0.000446429
+1.12 0 4.27813e-05 0.000446429
+1.4 0 4.27813e-05 0.000446429
+1.68 0 4.27813e-05 0.000446429
+END DIST
+
+Metal 2 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000446429
+0.28 0 4.27813e-05 0.000446429
+0.35 0 4.27813e-05 0.000446429
+0.42 0 4.27813e-05 0.000446429
+0.49 0 4.27813e-05 0.000446429
+0.56 0 4.27813e-05 0.000446429
+0.63 0 4.27813e-05 0.000446429
+0.7 0 4.27813e-05 0.000446429
+0.84 0 4.27813e-05 0.000446429
+1.12 0 4.27813e-05 0.000446429
+1.4 0 4.27813e-05 0.000446429
+1.68 0 4.27813e-05 0.000446429
+END DIST
+
+Metal 2 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000446429
+0.28 0 4.27813e-05 0.000446429
+0.35 0 4.27813e-05 0.000446429
+0.42 0 4.27813e-05 0.000446429
+0.49 0 4.27813e-05 0.000446429
+0.56 0 4.27813e-05 0.000446429
+0.63 0 4.27813e-05 0.000446429
+0.7 0 4.27813e-05 0.000446429
+0.84 0 4.27813e-05 0.000446429
+1.12 0 4.27813e-05 0.000446429
+1.4 0 4.27813e-05 0.000446429
+1.68 0 4.27813e-05 0.000446429
+END DIST
+
+Metal 2 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000446429
+0.28 0 4.27813e-05 0.000446429
+0.35 0 4.27813e-05 0.000446429
+0.42 0 4.27813e-05 0.000446429
+0.49 0 4.27813e-05 0.000446429
+0.56 0 4.27813e-05 0.000446429
+0.63 0 4.27813e-05 0.000446429
+0.7 0 4.27813e-05 0.000446429
+0.84 0 4.27813e-05 0.000446429
+1.12 0 4.27813e-05 0.000446429
+1.4 0 4.27813e-05 0.000446429
+1.68 0 4.27813e-05 0.000446429
+END DIST
+
+Metal 3 RESOVER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.000892857
+0 0.32 0 0.000892857
+0 0.46 0 0.000892857
+0 0.71 0 0.000892857
+0 0.78 0 0.000892857
+0 0.92 0 0.000892857
+0 1.17 0 0.000892857
+0 1.24 0 0.000892857
+0 1.38 0 0.000892857
+0 1.84 0 0.000892857
+0.32 0.32 0 0.000892857
+0.32 0.46 0 0.000892857
+0.32 0.71 0 0.000892857
+0.32 0.78 0 0.000892857
+0.32 0.92 0 0.000892857
+0.32 1.17 0 0.000892857
+0.32 1.24 0 0.000892857
+0.32 1.38 0 0.000892857
+0.32 1.84 0 0.000892857
+0.46 0.46 0 0.000892857
+0.46 0.71 0 0.000892857
+0.46 0.78 0 0.000892857
+0.46 0.92 0 0.000892857
+0.46 1.17 0 0.000892857
+0.46 1.24 0 0.000892857
+0.46 1.38 0 0.000892857
+0.46 1.84 0 0.000892857
+0.71 0.71 0 0.000892857
+0.71 0.78 0 0.000892857
+0.71 0.92 0 0.000892857
+0.71 1.17 0 0.000892857
+0.71 1.24 0 0.000892857
+0.71 1.38 0 0.000892857
+0.71 1.84 0 0.000892857
+0.78 0.78 0 0.000892857
+0.78 0.92 0 0.000892857
+0.78 1.17 0 0.000892857
+0.78 1.24 0 0.000892857
+0.78 1.38 0 0.000892857
+0.78 1.84 0 0.000892857
+0.92 0.92 0 0.000892857
+0.92 1.17 0 0.000892857
+0.92 1.24 0 0.000892857
+0.92 1.38 0 0.000892857
+0.92 1.84 0 0.000892857
+1.17 1.17 0 0.000892857
+1.17 1.24 0 0.000892857
+1.17 1.38 0 0.000892857
+1.17 1.84 0 0.000892857
+1.24 1.24 0 0.000892857
+1.24 1.38 0 0.000892857
+1.24 1.84 0 0.000892857
+1.38 1.38 0 0.000892857
+1.38 1.84 0 0.000892857
+1.84 0 1.84 0.000892857
+END DIST
+
+Metal 3 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 RESOVER 2
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 OVER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 OVER 0
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000446429
+0.28 0 3.93264e-05 0.000446429
+0.35 0 3.93264e-05 0.000446429
+0.42 0 3.93264e-05 0.000446429
+0.49 0 3.93264e-05 0.000446429
+0.56 0 3.93264e-05 0.000446429
+0.63 0 3.93264e-05 0.000446429
+0.7 0 3.93264e-05 0.000446429
+0.84 0 3.93264e-05 0.000446429
+1.12 0 3.93264e-05 0.000446429
+1.4 0 3.93264e-05 0.000446429
+1.68 0 3.93264e-05 0.000446429
+END DIST
+
+Metal 3 OVER 1
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000446429
+0.28 0 3.93264e-05 0.000446429
+0.35 0 3.93264e-05 0.000446429
+0.42 0 3.93264e-05 0.000446429
+0.49 0 3.93264e-05 0.000446429
+0.56 0 3.93264e-05 0.000446429
+0.63 0 3.93264e-05 0.000446429
+0.7 0 3.93264e-05 0.000446429
+0.84 0 3.93264e-05 0.000446429
+1.12 0 3.93264e-05 0.000446429
+1.4 0 3.93264e-05 0.000446429
+1.68 0 3.93264e-05 0.000446429
+END DIST
+
+Metal 3 OVER 2
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000446429
+0.28 0 3.93264e-05 0.000446429
+0.35 0 3.93264e-05 0.000446429
+0.42 0 3.93264e-05 0.000446429
+0.49 0 3.93264e-05 0.000446429
+0.56 0 3.93264e-05 0.000446429
+0.63 0 3.93264e-05 0.000446429
+0.7 0 3.93264e-05 0.000446429
+0.84 0 3.93264e-05 0.000446429
+1.12 0 3.93264e-05 0.000446429
+1.4 0 3.93264e-05 0.000446429
+1.68 0 3.93264e-05 0.000446429
+END DIST
+
+Metal 3 UNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 UNDER 4
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000446429
+0.28 0 3.93264e-05 0.000446429
+0.35 0 3.93264e-05 0.000446429
+0.42 0 3.93264e-05 0.000446429
+0.49 0 3.93264e-05 0.000446429
+0.56 0 3.93264e-05 0.000446429
+0.63 0 3.93264e-05 0.000446429
+0.7 0 3.93264e-05 0.000446429
+0.84 0 3.93264e-05 0.000446429
+1.12 0 3.93264e-05 0.000446429
+1.4 0 3.93264e-05 0.000446429
+1.68 0 3.93264e-05 0.000446429
+END DIST
+
+Metal 3 UNDER 5
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000446429
+0.28 0 3.93264e-05 0.000446429
+0.35 0 3.93264e-05 0.000446429
+0.42 0 3.93264e-05 0.000446429
+0.49 0 3.93264e-05 0.000446429
+0.56 0 3.93264e-05 0.000446429
+0.63 0 3.93264e-05 0.000446429
+0.7 0 3.93264e-05 0.000446429
+0.84 0 3.93264e-05 0.000446429
+1.12 0 3.93264e-05 0.000446429
+1.4 0 3.93264e-05 0.000446429
+1.68 0 3.93264e-05 0.000446429
+END DIST
+
+Metal 3 UNDER 6
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000446429
+0.28 0 3.93264e-05 0.000446429
+0.35 0 3.93264e-05 0.000446429
+0.42 0 3.93264e-05 0.000446429
+0.49 0 3.93264e-05 0.000446429
+0.56 0 3.93264e-05 0.000446429
+0.63 0 3.93264e-05 0.000446429
+0.7 0 3.93264e-05 0.000446429
+0.84 0 3.93264e-05 0.000446429
+1.12 0 3.93264e-05 0.000446429
+1.4 0 3.93264e-05 0.000446429
+1.68 0 3.93264e-05 0.000446429
+END DIST
+
+Metal 3 DIAGUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 0 0.000446429
+0.14 0 0 0.000446429
+0.28 0 0 0.000446429
+0.35 0 0 0.000446429
+0.42 0 0 0.000446429
+0.49 0 0 0.000446429
+0.56 0 0 0.000446429
+0.63 0 0 0.000446429
+0.7 0 0 0.000446429
+0.84 0 0 0.000446429
+1.12 0 0 0.000446429
+1.4 0 0 0.000446429
+1.68 0 0 0.000446429
+END DIST
+
+Metal 3 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 0 0.000446429
+0.14 0 0 0.000446429
+0.28 0 0 0.000446429
+0.35 0 0 0.000446429
+0.42 0 0 0.000446429
+0.49 0 0 0.000446429
+0.56 0 0 0.000446429
+0.63 0 0 0.000446429
+0.7 0 0 0.000446429
+0.84 0 0 0.000446429
+1.12 0 0 0.000446429
+1.4 0 0 0.000446429
+1.68 0 0 0.000446429
+END DIST
+
+Metal 3 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 0 0.000446429
+0.14 0 0 0.000446429
+0.28 0 0 0.000446429
+0.35 0 0 0.000446429
+0.42 0 0 0.000446429
+0.49 0 0 0.000446429
+0.56 0 0 0.000446429
+0.63 0 0 0.000446429
+0.7 0 0 0.000446429
+0.84 0 0 0.000446429
+1.12 0 0 0.000446429
+1.4 0 0 0.000446429
+1.68 0 0 0.000446429
+END DIST
+
+Metal 3 OVERUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000446429
+0.28 0 3.93264e-05 0.000446429
+0.35 0 3.93264e-05 0.000446429
+0.42 0 3.93264e-05 0.000446429
+0.49 0 3.93264e-05 0.000446429
+0.56 0 3.93264e-05 0.000446429
+0.63 0 3.93264e-05 0.000446429
+0.7 0 3.93264e-05 0.000446429
+0.84 0 3.93264e-05 0.000446429
+1.12 0 3.93264e-05 0.000446429
+1.4 0 3.93264e-05 0.000446429
+1.68 0 3.93264e-05 0.000446429
+END DIST
+
+Metal 3 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000446429
+0.28 0 3.93264e-05 0.000446429
+0.35 0 3.93264e-05 0.000446429
+0.42 0 3.93264e-05 0.000446429
+0.49 0 3.93264e-05 0.000446429
+0.56 0 3.93264e-05 0.000446429
+0.63 0 3.93264e-05 0.000446429
+0.7 0 3.93264e-05 0.000446429
+0.84 0 3.93264e-05 0.000446429
+1.12 0 3.93264e-05 0.000446429
+1.4 0 3.93264e-05 0.000446429
+1.68 0 3.93264e-05 0.000446429
+END DIST
+
+Metal 3 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000446429
+0.28 0 3.93264e-05 0.000446429
+0.35 0 3.93264e-05 0.000446429
+0.42 0 3.93264e-05 0.000446429
+0.49 0 3.93264e-05 0.000446429
+0.56 0 3.93264e-05 0.000446429
+0.63 0 3.93264e-05 0.000446429
+0.7 0 3.93264e-05 0.000446429
+0.84 0 3.93264e-05 0.000446429
+1.12 0 3.93264e-05 0.000446429
+1.4 0 3.93264e-05 0.000446429
+1.68 0 3.93264e-05 0.000446429
+END DIST
+
+Metal 3 OVER 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000446429
+0.28 0 3.93264e-05 0.000446429
+0.35 0 3.93264e-05 0.000446429
+0.42 0 3.93264e-05 0.000446429
+0.49 0 3.93264e-05 0.000446429
+0.56 0 3.93264e-05 0.000446429
+0.63 0 3.93264e-05 0.000446429
+0.7 0 3.93264e-05 0.000446429
+0.84 0 3.93264e-05 0.000446429
+1.12 0 3.93264e-05 0.000446429
+1.4 0 3.93264e-05 0.000446429
+1.68 0 3.93264e-05 0.000446429
+END DIST
+
+Metal 3 OVER 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000446429
+0.28 0 3.93264e-05 0.000446429
+0.35 0 3.93264e-05 0.000446429
+0.42 0 3.93264e-05 0.000446429
+0.49 0 3.93264e-05 0.000446429
+0.56 0 3.93264e-05 0.000446429
+0.63 0 3.93264e-05 0.000446429
+0.7 0 3.93264e-05 0.000446429
+0.84 0 3.93264e-05 0.000446429
+1.12 0 3.93264e-05 0.000446429
+1.4 0 3.93264e-05 0.000446429
+1.68 0 3.93264e-05 0.000446429
+END DIST
+
+Metal 3 OVER 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0 3.93264e-05 0.000446429
+0.28 0 3.93264e-05 0.000446429
+0.35 0 3.93264e-05 0.000446429
+0.42 0 3.93264e-05 0.000446429
+0.49 0 3.93264e-05 0.000446429
+0.56 0 3.93264e-05 0.000446429
+0.63 0 3.93264e-05 0.000446429
+0.7 0 3.93264e-05 0.000446429
+0.84 0 3.93264e-05 0.000446429
+1.12 0 3.93264e-05 0.000446429
+1.4 0 3.93264e-05 0.000446429
+1.68 0 3.93264e-05 0.000446429
+END DIST
+
+Metal 4 RESOVER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000156667
+0 0.38 0 0.000156667
+0 0.68 0 0.000156667
+0 0.91 0 0.000156667
+0 1.06 0 0.000156667
+0 1.36 0 0.000156667
+0 1.59 0 0.000156667
+0 1.74 0 0.000156667
+0 2.04 0 0.000156667
+0 2.72 0 0.000156667
+0.38 0.38 0 0.000156667
+0.38 0.68 0 0.000156667
+0.38 0.91 0 0.000156667
+0.38 1.06 0 0.000156667
+0.38 1.36 0 0.000156667
+0.38 1.59 0 0.000156667
+0.38 1.74 0 0.000156667
+0.38 2.04 0 0.000156667
+0.38 2.72 0 0.000156667
+0.68 0.68 0 0.000156667
+0.68 0.91 0 0.000156667
+0.68 1.06 0 0.000156667
+0.68 1.36 0 0.000156667
+0.68 1.59 0 0.000156667
+0.68 1.74 0 0.000156667
+0.68 2.04 0 0.000156667
+0.68 2.72 0 0.000156667
+0.91 0.91 0 0.000156667
+0.91 1.06 0 0.000156667
+0.91 1.36 0 0.000156667
+0.91 1.59 0 0.000156667
+0.91 1.74 0 0.000156667
+0.91 2.04 0 0.000156667
+0.91 2.72 0 0.000156667
+1.06 1.06 0 0.000156667
+1.06 1.36 0 0.000156667
+1.06 1.59 0 0.000156667
+1.06 1.74 0 0.000156667
+1.06 2.04 0 0.000156667
+1.06 2.72 0 0.000156667
+1.36 1.36 0 0.000156667
+1.36 1.59 0 0.000156667
+1.36 1.74 0 0.000156667
+1.36 2.04 0 0.000156667
+1.36 2.72 0 0.000156667
+1.59 1.59 0 0.000156667
+1.59 1.74 0 0.000156667
+1.59 2.04 0 0.000156667
+1.59 2.72 0 0.000156667
+1.74 1.74 0 0.000156667
+1.74 2.04 0 0.000156667
+1.74 2.72 0 0.000156667
+2.04 2.04 0 0.000156667
+2.04 2.72 0 0.000156667
+2.72 0 2.72 0.000156667
+END DIST
+
+Metal 4 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 OVER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 OVER 0
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 7.83333e-05
+0.6 0 4.3259e-05 7.83333e-05
+0.75 0 4.3259e-05 7.83333e-05
+0.9 0 4.3259e-05 7.83333e-05
+1.05 0 4.3259e-05 7.83333e-05
+1.2 0 4.3259e-05 7.83333e-05
+1.35 0 4.3259e-05 7.83333e-05
+1.5 0 4.3259e-05 7.83333e-05
+1.8 0 4.3259e-05 7.83333e-05
+2.4 0 4.3259e-05 7.83333e-05
+3 0 4.3259e-05 7.83333e-05
+3.6 0 4.3259e-05 7.83333e-05
+END DIST
+
+Metal 4 OVER 1
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 7.83333e-05
+0.6 0 4.3259e-05 7.83333e-05
+0.75 0 4.3259e-05 7.83333e-05
+0.9 0 4.3259e-05 7.83333e-05
+1.05 0 4.3259e-05 7.83333e-05
+1.2 0 4.3259e-05 7.83333e-05
+1.35 0 4.3259e-05 7.83333e-05
+1.5 0 4.3259e-05 7.83333e-05
+1.8 0 4.3259e-05 7.83333e-05
+2.4 0 4.3259e-05 7.83333e-05
+3 0 4.3259e-05 7.83333e-05
+3.6 0 4.3259e-05 7.83333e-05
+END DIST
+
+Metal 4 OVER 2
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 7.83333e-05
+0.6 0 4.3259e-05 7.83333e-05
+0.75 0 4.3259e-05 7.83333e-05
+0.9 0 4.3259e-05 7.83333e-05
+1.05 0 4.3259e-05 7.83333e-05
+1.2 0 4.3259e-05 7.83333e-05
+1.35 0 4.3259e-05 7.83333e-05
+1.5 0 4.3259e-05 7.83333e-05
+1.8 0 4.3259e-05 7.83333e-05
+2.4 0 4.3259e-05 7.83333e-05
+3 0 4.3259e-05 7.83333e-05
+3.6 0 4.3259e-05 7.83333e-05
+END DIST
+
+Metal 4 OVER 3
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 7.83333e-05
+0.6 0 4.3259e-05 7.83333e-05
+0.75 0 4.3259e-05 7.83333e-05
+0.9 0 4.3259e-05 7.83333e-05
+1.05 0 4.3259e-05 7.83333e-05
+1.2 0 4.3259e-05 7.83333e-05
+1.35 0 4.3259e-05 7.83333e-05
+1.5 0 4.3259e-05 7.83333e-05
+1.8 0 4.3259e-05 7.83333e-05
+2.4 0 4.3259e-05 7.83333e-05
+3 0 4.3259e-05 7.83333e-05
+3.6 0 4.3259e-05 7.83333e-05
+END DIST
+
+Metal 4 UNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 UNDER 5
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 7.83333e-05
+0.6 0 4.3259e-05 7.83333e-05
+0.75 0 4.3259e-05 7.83333e-05
+0.9 0 4.3259e-05 7.83333e-05
+1.05 0 4.3259e-05 7.83333e-05
+1.2 0 4.3259e-05 7.83333e-05
+1.35 0 4.3259e-05 7.83333e-05
+1.5 0 4.3259e-05 7.83333e-05
+1.8 0 4.3259e-05 7.83333e-05
+2.4 0 4.3259e-05 7.83333e-05
+3 0 4.3259e-05 7.83333e-05
+3.6 0 4.3259e-05 7.83333e-05
+END DIST
+
+Metal 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 7.83333e-05
+0.6 0 4.3259e-05 7.83333e-05
+0.75 0 4.3259e-05 7.83333e-05
+0.9 0 4.3259e-05 7.83333e-05
+1.05 0 4.3259e-05 7.83333e-05
+1.2 0 4.3259e-05 7.83333e-05
+1.35 0 4.3259e-05 7.83333e-05
+1.5 0 4.3259e-05 7.83333e-05
+1.8 0 4.3259e-05 7.83333e-05
+2.4 0 4.3259e-05 7.83333e-05
+3 0 4.3259e-05 7.83333e-05
+3.6 0 4.3259e-05 7.83333e-05
+END DIST
+
+Metal 4 DIAGUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 DIAGUNDER 5
+DIST count 13 width 0.3
+0 0 0 7.83333e-05
+0.3 0 0 7.83333e-05
+0.6 0 0 7.83333e-05
+0.75 0 0 7.83333e-05
+0.9 0 0 7.83333e-05
+1.05 0 0 7.83333e-05
+1.2 0 0 7.83333e-05
+1.35 0 0 7.83333e-05
+1.5 0 0 7.83333e-05
+1.8 0 0 7.83333e-05
+2.4 0 0 7.83333e-05
+3 0 0 7.83333e-05
+3.6 0 0 7.83333e-05
+END DIST
+
+Metal 4 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 0 7.83333e-05
+0.3 0 0 7.83333e-05
+0.6 0 0 7.83333e-05
+0.75 0 0 7.83333e-05
+0.9 0 0 7.83333e-05
+1.05 0 0 7.83333e-05
+1.2 0 0 7.83333e-05
+1.35 0 0 7.83333e-05
+1.5 0 0 7.83333e-05
+1.8 0 0 7.83333e-05
+2.4 0 0 7.83333e-05
+3 0 0 7.83333e-05
+3.6 0 0 7.83333e-05
+END DIST
+
+Metal 4 OVERUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 OVER 1 UNDER 5
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 7.83333e-05
+0.6 0 4.3259e-05 7.83333e-05
+0.75 0 4.3259e-05 7.83333e-05
+0.9 0 4.3259e-05 7.83333e-05
+1.05 0 4.3259e-05 7.83333e-05
+1.2 0 4.3259e-05 7.83333e-05
+1.35 0 4.3259e-05 7.83333e-05
+1.5 0 4.3259e-05 7.83333e-05
+1.8 0 4.3259e-05 7.83333e-05
+2.4 0 4.3259e-05 7.83333e-05
+3 0 4.3259e-05 7.83333e-05
+3.6 0 4.3259e-05 7.83333e-05
+END DIST
+
+Metal 4 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 7.83333e-05
+0.6 0 4.3259e-05 7.83333e-05
+0.75 0 4.3259e-05 7.83333e-05
+0.9 0 4.3259e-05 7.83333e-05
+1.05 0 4.3259e-05 7.83333e-05
+1.2 0 4.3259e-05 7.83333e-05
+1.35 0 4.3259e-05 7.83333e-05
+1.5 0 4.3259e-05 7.83333e-05
+1.8 0 4.3259e-05 7.83333e-05
+2.4 0 4.3259e-05 7.83333e-05
+3 0 4.3259e-05 7.83333e-05
+3.6 0 4.3259e-05 7.83333e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 5
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 7.83333e-05
+0.6 0 4.3259e-05 7.83333e-05
+0.75 0 4.3259e-05 7.83333e-05
+0.9 0 4.3259e-05 7.83333e-05
+1.05 0 4.3259e-05 7.83333e-05
+1.2 0 4.3259e-05 7.83333e-05
+1.35 0 4.3259e-05 7.83333e-05
+1.5 0 4.3259e-05 7.83333e-05
+1.8 0 4.3259e-05 7.83333e-05
+2.4 0 4.3259e-05 7.83333e-05
+3 0 4.3259e-05 7.83333e-05
+3.6 0 4.3259e-05 7.83333e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 7.83333e-05
+0.6 0 4.3259e-05 7.83333e-05
+0.75 0 4.3259e-05 7.83333e-05
+0.9 0 4.3259e-05 7.83333e-05
+1.05 0 4.3259e-05 7.83333e-05
+1.2 0 4.3259e-05 7.83333e-05
+1.35 0 4.3259e-05 7.83333e-05
+1.5 0 4.3259e-05 7.83333e-05
+1.8 0 4.3259e-05 7.83333e-05
+2.4 0 4.3259e-05 7.83333e-05
+3 0 4.3259e-05 7.83333e-05
+3.6 0 4.3259e-05 7.83333e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 5
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 7.83333e-05
+0.6 0 4.3259e-05 7.83333e-05
+0.75 0 4.3259e-05 7.83333e-05
+0.9 0 4.3259e-05 7.83333e-05
+1.05 0 4.3259e-05 7.83333e-05
+1.2 0 4.3259e-05 7.83333e-05
+1.35 0 4.3259e-05 7.83333e-05
+1.5 0 4.3259e-05 7.83333e-05
+1.8 0 4.3259e-05 7.83333e-05
+2.4 0 4.3259e-05 7.83333e-05
+3 0 4.3259e-05 7.83333e-05
+3.6 0 4.3259e-05 7.83333e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0 4.3259e-05 7.83333e-05
+0.6 0 4.3259e-05 7.83333e-05
+0.75 0 4.3259e-05 7.83333e-05
+0.9 0 4.3259e-05 7.83333e-05
+1.05 0 4.3259e-05 7.83333e-05
+1.2 0 4.3259e-05 7.83333e-05
+1.35 0 4.3259e-05 7.83333e-05
+1.5 0 4.3259e-05 7.83333e-05
+1.8 0 4.3259e-05 7.83333e-05
+2.4 0 4.3259e-05 7.83333e-05
+3 0 4.3259e-05 7.83333e-05
+3.6 0 4.3259e-05 7.83333e-05
+END DIST
+
+Metal 5 RESOVER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000156667
+0 0.62 0 0.000156667
+0 0.92 0 0.000156667
+0 1.39 0 0.000156667
+0 1.54 0 0.000156667
+0 1.84 0 0.000156667
+0 2.31 0 0.000156667
+0 2.46 0 0.000156667
+0 2.76 0 0.000156667
+0 3.68 0 0.000156667
+0.62 0.62 0 0.000156667
+0.62 0.92 0 0.000156667
+0.62 1.39 0 0.000156667
+0.62 1.54 0 0.000156667
+0.62 1.84 0 0.000156667
+0.62 2.31 0 0.000156667
+0.62 2.46 0 0.000156667
+0.62 2.76 0 0.000156667
+0.62 3.68 0 0.000156667
+0.92 0.92 0 0.000156667
+0.92 1.39 0 0.000156667
+0.92 1.54 0 0.000156667
+0.92 1.84 0 0.000156667
+0.92 2.31 0 0.000156667
+0.92 2.46 0 0.000156667
+0.92 2.76 0 0.000156667
+0.92 3.68 0 0.000156667
+1.39 1.39 0 0.000156667
+1.39 1.54 0 0.000156667
+1.39 1.84 0 0.000156667
+1.39 2.31 0 0.000156667
+1.39 2.46 0 0.000156667
+1.39 2.76 0 0.000156667
+1.39 3.68 0 0.000156667
+1.54 1.54 0 0.000156667
+1.54 1.84 0 0.000156667
+1.54 2.31 0 0.000156667
+1.54 2.46 0 0.000156667
+1.54 2.76 0 0.000156667
+1.54 3.68 0 0.000156667
+1.84 1.84 0 0.000156667
+1.84 2.31 0 0.000156667
+1.84 2.46 0 0.000156667
+1.84 2.76 0 0.000156667
+1.84 3.68 0 0.000156667
+2.31 2.31 0 0.000156667
+2.31 2.46 0 0.000156667
+2.31 2.76 0 0.000156667
+2.31 3.68 0 0.000156667
+2.46 2.46 0 0.000156667
+2.46 2.76 0 0.000156667
+2.46 3.68 0 0.000156667
+2.76 2.76 0 0.000156667
+2.76 3.68 0 0.000156667
+3.68 0 3.68 0.000156667
+END DIST
+
+Metal 5 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 4
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 OVER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 OVER 0
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 7.83333e-05
+0.6 0 3.83088e-05 7.83333e-05
+0.75 0 3.83088e-05 7.83333e-05
+0.9 0 3.83088e-05 7.83333e-05
+1.05 0 3.83088e-05 7.83333e-05
+1.2 0 3.83088e-05 7.83333e-05
+1.35 0 3.83088e-05 7.83333e-05
+1.5 0 3.83088e-05 7.83333e-05
+1.8 0 3.83088e-05 7.83333e-05
+2.4 0 3.83088e-05 7.83333e-05
+3 0 3.83088e-05 7.83333e-05
+3.6 0 3.83088e-05 7.83333e-05
+END DIST
+
+Metal 5 OVER 1
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 7.83333e-05
+0.6 0 3.83088e-05 7.83333e-05
+0.75 0 3.83088e-05 7.83333e-05
+0.9 0 3.83088e-05 7.83333e-05
+1.05 0 3.83088e-05 7.83333e-05
+1.2 0 3.83088e-05 7.83333e-05
+1.35 0 3.83088e-05 7.83333e-05
+1.5 0 3.83088e-05 7.83333e-05
+1.8 0 3.83088e-05 7.83333e-05
+2.4 0 3.83088e-05 7.83333e-05
+3 0 3.83088e-05 7.83333e-05
+3.6 0 3.83088e-05 7.83333e-05
+END DIST
+
+Metal 5 OVER 2
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 7.83333e-05
+0.6 0 3.83088e-05 7.83333e-05
+0.75 0 3.83088e-05 7.83333e-05
+0.9 0 3.83088e-05 7.83333e-05
+1.05 0 3.83088e-05 7.83333e-05
+1.2 0 3.83088e-05 7.83333e-05
+1.35 0 3.83088e-05 7.83333e-05
+1.5 0 3.83088e-05 7.83333e-05
+1.8 0 3.83088e-05 7.83333e-05
+2.4 0 3.83088e-05 7.83333e-05
+3 0 3.83088e-05 7.83333e-05
+3.6 0 3.83088e-05 7.83333e-05
+END DIST
+
+Metal 5 OVER 3
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 7.83333e-05
+0.6 0 3.83088e-05 7.83333e-05
+0.75 0 3.83088e-05 7.83333e-05
+0.9 0 3.83088e-05 7.83333e-05
+1.05 0 3.83088e-05 7.83333e-05
+1.2 0 3.83088e-05 7.83333e-05
+1.35 0 3.83088e-05 7.83333e-05
+1.5 0 3.83088e-05 7.83333e-05
+1.8 0 3.83088e-05 7.83333e-05
+2.4 0 3.83088e-05 7.83333e-05
+3 0 3.83088e-05 7.83333e-05
+3.6 0 3.83088e-05 7.83333e-05
+END DIST
+
+Metal 5 OVER 4
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 7.83333e-05
+0.6 0 3.83088e-05 7.83333e-05
+0.75 0 3.83088e-05 7.83333e-05
+0.9 0 3.83088e-05 7.83333e-05
+1.05 0 3.83088e-05 7.83333e-05
+1.2 0 3.83088e-05 7.83333e-05
+1.35 0 3.83088e-05 7.83333e-05
+1.5 0 3.83088e-05 7.83333e-05
+1.8 0 3.83088e-05 7.83333e-05
+2.4 0 3.83088e-05 7.83333e-05
+3 0 3.83088e-05 7.83333e-05
+3.6 0 3.83088e-05 7.83333e-05
+END DIST
+
+Metal 5 UNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 7.83333e-05
+0.6 0 3.83088e-05 7.83333e-05
+0.75 0 3.83088e-05 7.83333e-05
+0.9 0 3.83088e-05 7.83333e-05
+1.05 0 3.83088e-05 7.83333e-05
+1.2 0 3.83088e-05 7.83333e-05
+1.35 0 3.83088e-05 7.83333e-05
+1.5 0 3.83088e-05 7.83333e-05
+1.8 0 3.83088e-05 7.83333e-05
+2.4 0 3.83088e-05 7.83333e-05
+3 0 3.83088e-05 7.83333e-05
+3.6 0 3.83088e-05 7.83333e-05
+END DIST
+
+Metal 5 DIAGUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 0 7.83333e-05
+0.3 0 0 7.83333e-05
+0.6 0 0 7.83333e-05
+0.75 0 0 7.83333e-05
+0.9 0 0 7.83333e-05
+1.05 0 0 7.83333e-05
+1.2 0 0 7.83333e-05
+1.35 0 0 7.83333e-05
+1.5 0 0 7.83333e-05
+1.8 0 0 7.83333e-05
+2.4 0 0 7.83333e-05
+3 0 0 7.83333e-05
+3.6 0 0 7.83333e-05
+END DIST
+
+Metal 5 OVERUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 7.83333e-05
+0.6 0 3.83088e-05 7.83333e-05
+0.75 0 3.83088e-05 7.83333e-05
+0.9 0 3.83088e-05 7.83333e-05
+1.05 0 3.83088e-05 7.83333e-05
+1.2 0 3.83088e-05 7.83333e-05
+1.35 0 3.83088e-05 7.83333e-05
+1.5 0 3.83088e-05 7.83333e-05
+1.8 0 3.83088e-05 7.83333e-05
+2.4 0 3.83088e-05 7.83333e-05
+3 0 3.83088e-05 7.83333e-05
+3.6 0 3.83088e-05 7.83333e-05
+END DIST
+
+Metal 5 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 7.83333e-05
+0.6 0 3.83088e-05 7.83333e-05
+0.75 0 3.83088e-05 7.83333e-05
+0.9 0 3.83088e-05 7.83333e-05
+1.05 0 3.83088e-05 7.83333e-05
+1.2 0 3.83088e-05 7.83333e-05
+1.35 0 3.83088e-05 7.83333e-05
+1.5 0 3.83088e-05 7.83333e-05
+1.8 0 3.83088e-05 7.83333e-05
+2.4 0 3.83088e-05 7.83333e-05
+3 0 3.83088e-05 7.83333e-05
+3.6 0 3.83088e-05 7.83333e-05
+END DIST
+
+Metal 5 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 7.83333e-05
+0.6 0 3.83088e-05 7.83333e-05
+0.75 0 3.83088e-05 7.83333e-05
+0.9 0 3.83088e-05 7.83333e-05
+1.05 0 3.83088e-05 7.83333e-05
+1.2 0 3.83088e-05 7.83333e-05
+1.35 0 3.83088e-05 7.83333e-05
+1.5 0 3.83088e-05 7.83333e-05
+1.8 0 3.83088e-05 7.83333e-05
+2.4 0 3.83088e-05 7.83333e-05
+3 0 3.83088e-05 7.83333e-05
+3.6 0 3.83088e-05 7.83333e-05
+END DIST
+
+Metal 5 OVER 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.83088e-05 7.83333e-05
+0.6 0 3.83088e-05 7.83333e-05
+0.75 0 3.83088e-05 7.83333e-05
+0.9 0 3.83088e-05 7.83333e-05
+1.05 0 3.83088e-05 7.83333e-05
+1.2 0 3.83088e-05 7.83333e-05
+1.35 0 3.83088e-05 7.83333e-05
+1.5 0 3.83088e-05 7.83333e-05
+1.8 0 3.83088e-05 7.83333e-05
+2.4 0 3.83088e-05 7.83333e-05
+3 0 3.83088e-05 7.83333e-05
+3.6 0 3.83088e-05 7.83333e-05
+END DIST
+
+Metal 6 RESOVER
+WIDTH Table 1 entries: 1.6
+
+Metal 6 RESOVER 0
+DIST count 55 width 1.6
+0 0 0 1.78125e-05
+0 1.8 0 1.78125e-05
+0 3.4 0 1.78125e-05
+0 4.4 0 1.78125e-05
+0 5.2 0 1.78125e-05
+0 6.8 0 1.78125e-05
+0 7.8 0 1.78125e-05
+0 8.6 0 1.78125e-05
+0 10.2 0 1.78125e-05
+0 13.6 0 1.78125e-05
+1.8 1.8 0 1.78125e-05
+1.8 3.4 0 1.78125e-05
+1.8 4.4 0 1.78125e-05
+1.8 5.2 0 1.78125e-05
+1.8 6.8 0 1.78125e-05
+1.8 7.8 0 1.78125e-05
+1.8 8.6 0 1.78125e-05
+1.8 10.2 0 1.78125e-05
+1.8 13.6 0 1.78125e-05
+3.4 3.4 0 1.78125e-05
+3.4 4.4 0 1.78125e-05
+3.4 5.2 0 1.78125e-05
+3.4 6.8 0 1.78125e-05
+3.4 7.8 0 1.78125e-05
+3.4 8.6 0 1.78125e-05
+3.4 10.2 0 1.78125e-05
+3.4 13.6 0 1.78125e-05
+4.4 4.4 0 1.78125e-05
+4.4 5.2 0 1.78125e-05
+4.4 6.8 0 1.78125e-05
+4.4 7.8 0 1.78125e-05
+4.4 8.6 0 1.78125e-05
+4.4 10.2 0 1.78125e-05
+4.4 13.6 0 1.78125e-05
+5.2 5.2 0 1.78125e-05
+5.2 6.8 0 1.78125e-05
+5.2 7.8 0 1.78125e-05
+5.2 8.6 0 1.78125e-05
+5.2 10.2 0 1.78125e-05
+5.2 13.6 0 1.78125e-05
+6.8 6.8 0 1.78125e-05
+6.8 7.8 0 1.78125e-05
+6.8 8.6 0 1.78125e-05
+6.8 10.2 0 1.78125e-05
+6.8 13.6 0 1.78125e-05
+7.8 7.8 0 1.78125e-05
+7.8 8.6 0 1.78125e-05
+7.8 10.2 0 1.78125e-05
+7.8 13.6 0 1.78125e-05
+8.6 8.6 0 1.78125e-05
+8.6 10.2 0 1.78125e-05
+8.6 13.6 0 1.78125e-05
+10.2 10.2 0 1.78125e-05
+10.2 13.6 0 1.78125e-05
+13.6 0 13.6 1.78125e-05
+END DIST
+
+Metal 6 RESOVER 1
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 2
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 3
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 4
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 5
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 OVER
+WIDTH Table 1 entries: 1.6
+
+Metal 6 OVER 0
+DIST count 12 width 1.6
+1.6 0 4.42999e-05 8.90625e-06
+3.2 0 4.42999e-05 8.90625e-06
+4 0 4.42999e-05 8.90625e-06
+4.8 0 4.42999e-05 8.90625e-06
+5.6 0 4.42999e-05 8.90625e-06
+6.4 0 4.42999e-05 8.90625e-06
+7.2 0 4.42999e-05 8.90625e-06
+8 0 4.42999e-05 8.90625e-06
+9.6 0 4.42999e-05 8.90625e-06
+12.8 0 4.42999e-05 8.90625e-06
+16 0 4.42999e-05 8.90625e-06
+19.2 0 4.42999e-05 8.90625e-06
+END DIST
+
+Metal 6 OVER 1
+DIST count 12 width 1.6
+1.6 0 4.42999e-05 8.90625e-06
+3.2 0 4.42999e-05 8.90625e-06
+4 0 4.42999e-05 8.90625e-06
+4.8 0 4.42999e-05 8.90625e-06
+5.6 0 4.42999e-05 8.90625e-06
+6.4 0 4.42999e-05 8.90625e-06
+7.2 0 4.42999e-05 8.90625e-06
+8 0 4.42999e-05 8.90625e-06
+9.6 0 4.42999e-05 8.90625e-06
+12.8 0 4.42999e-05 8.90625e-06
+16 0 4.42999e-05 8.90625e-06
+19.2 0 4.42999e-05 8.90625e-06
+END DIST
+
+Metal 6 OVER 2
+DIST count 12 width 1.6
+1.6 0 4.42999e-05 8.90625e-06
+3.2 0 4.42999e-05 8.90625e-06
+4 0 4.42999e-05 8.90625e-06
+4.8 0 4.42999e-05 8.90625e-06
+5.6 0 4.42999e-05 8.90625e-06
+6.4 0 4.42999e-05 8.90625e-06
+7.2 0 4.42999e-05 8.90625e-06
+8 0 4.42999e-05 8.90625e-06
+9.6 0 4.42999e-05 8.90625e-06
+12.8 0 4.42999e-05 8.90625e-06
+16 0 4.42999e-05 8.90625e-06
+19.2 0 4.42999e-05 8.90625e-06
+END DIST
+
+Metal 6 OVER 3
+DIST count 12 width 1.6
+1.6 0 4.42999e-05 8.90625e-06
+3.2 0 4.42999e-05 8.90625e-06
+4 0 4.42999e-05 8.90625e-06
+4.8 0 4.42999e-05 8.90625e-06
+5.6 0 4.42999e-05 8.90625e-06
+6.4 0 4.42999e-05 8.90625e-06
+7.2 0 4.42999e-05 8.90625e-06
+8 0 4.42999e-05 8.90625e-06
+9.6 0 4.42999e-05 8.90625e-06
+12.8 0 4.42999e-05 8.90625e-06
+16 0 4.42999e-05 8.90625e-06
+19.2 0 4.42999e-05 8.90625e-06
+END DIST
+
+Metal 6 OVER 4
+DIST count 12 width 1.6
+1.6 0 4.42999e-05 8.90625e-06
+3.2 0 4.42999e-05 8.90625e-06
+4 0 4.42999e-05 8.90625e-06
+4.8 0 4.42999e-05 8.90625e-06
+5.6 0 4.42999e-05 8.90625e-06
+6.4 0 4.42999e-05 8.90625e-06
+7.2 0 4.42999e-05 8.90625e-06
+8 0 4.42999e-05 8.90625e-06
+9.6 0 4.42999e-05 8.90625e-06
+12.8 0 4.42999e-05 8.90625e-06
+16 0 4.42999e-05 8.90625e-06
+19.2 0 4.42999e-05 8.90625e-06
+END DIST
+
+Metal 6 OVER 5
+DIST count 12 width 1.6
+1.6 0 4.42999e-05 8.90625e-06
+3.2 0 4.42999e-05 8.90625e-06
+4 0 4.42999e-05 8.90625e-06
+4.8 0 4.42999e-05 8.90625e-06
+5.6 0 4.42999e-05 8.90625e-06
+6.4 0 4.42999e-05 8.90625e-06
+7.2 0 4.42999e-05 8.90625e-06
+8 0 4.42999e-05 8.90625e-06
+9.6 0 4.42999e-05 8.90625e-06
+12.8 0 4.42999e-05 8.90625e-06
+16 0 4.42999e-05 8.90625e-06
+19.2 0 4.42999e-05 8.90625e-06
+END DIST
+
+Metal 6 UNDER
+WIDTH Table 0 entries:
+
+Metal 6 DIAGUNDER
+WIDTH Table 0 entries:
+END DensityModel 0
diff --git a/sky130/openlane/rules.openrcx.sky130B.max.spef_extractor b/sky130/openlane/rules.openrcx.sky130B.max.spef_extractor
new file mode 100644
index 0000000..78feaf3
--- /dev/null
+++ b/sky130/openlane/rules.openrcx.sky130B.max.spef_extractor
@@ -0,0 +1,1645 @@
+Extraction Rules for OpenRCX
+
+DIAGMODEL ON
+
+LayerCount 6
+DensityRate 1 0
+
+DensityModel 0
+
+Metal 1 RESOVER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 RESOVER 0
+DIST count 55 width 0.17
+0 0 0 0.1
+0 0.29 0 0.1
+0 0.46 0 0.1
+0 0.665 0 0.1
+0 0.75 0 0.1
+0 0.92 0 0.1
+0 1.125 0 0.1
+0 1.21 0 0.1
+0 1.38 0 0.1
+0 1.84 0 0.1
+0.29 0.29 0 0.1
+0.29 0.46 0 0.1
+0.29 0.665 0 0.1
+0.29 0.75 0 0.1
+0.29 0.92 0 0.1
+0.29 1.125 0 0.1
+0.29 1.21 0 0.1
+0.29 1.38 0 0.1
+0.29 1.84 0 0.1
+0.46 0.46 0 0.1
+0.46 0.665 0 0.1
+0.46 0.75 0 0.1
+0.46 0.92 0 0.1
+0.46 1.125 0 0.1
+0.46 1.21 0 0.1
+0.46 1.38 0 0.1
+0.46 1.84 0 0.1
+0.665 0.665 0 0.1
+0.665 0.75 0 0.1
+0.665 0.92 0 0.1
+0.665 1.125 0 0.1
+0.665 1.21 0 0.1
+0.665 1.38 0 0.1
+0.665 1.84 0 0.1
+0.75 0.75 0 0.1
+0.75 0.92 0 0.1
+0.75 1.125 0 0.1
+0.75 1.21 0 0.1
+0.75 1.38 0 0.1
+0.75 1.84 0 0.1
+0.92 0.92 0 0.1
+0.92 1.125 0 0.1
+0.92 1.21 0 0.1
+0.92 1.38 0 0.1
+0.92 1.84 0 0.1
+1.125 1.125 0 0.1
+1.125 1.21 0 0.1
+1.125 1.38 0 0.1
+1.125 1.84 0 0.1
+1.21 1.21 0 0.1
+1.21 1.38 0 0.1
+1.21 1.84 0 0.1
+1.38 1.38 0 0.1
+1.38 1.84 0 0.1
+1.84 0 1.84 0.1
+END DIST
+
+Metal 1 OVER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 OVER 0
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.05
+0.34 0 4.42519e-05 0.05
+0.425 0 4.42519e-05 0.05
+0.51 0 4.42519e-05 0.05
+0.595 0 4.42519e-05 0.05
+0.68 0 4.42519e-05 0.05
+0.765 0 4.42519e-05 0.05
+0.85 0 4.42519e-05 0.05
+1.02 0 4.42519e-05 0.05
+1.36 0 4.42519e-05 0.05
+1.7 0 4.42519e-05 0.05
+2.04 0 4.42519e-05 0.05
+END DIST
+
+Metal 1 UNDER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 UNDER 2
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.05
+0.34 0 4.42519e-05 0.05
+0.425 0 4.42519e-05 0.05
+0.51 0 4.42519e-05 0.05
+0.595 0 4.42519e-05 0.05
+0.68 0 4.42519e-05 0.05
+0.765 0 4.42519e-05 0.05
+0.85 0 4.42519e-05 0.05
+1.02 0 4.42519e-05 0.05
+1.36 0 4.42519e-05 0.05
+1.7 0 4.42519e-05 0.05
+2.04 0 4.42519e-05 0.05
+END DIST
+
+Metal 1 UNDER 3
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.05
+0.34 0 4.42519e-05 0.05
+0.425 0 4.42519e-05 0.05
+0.51 0 4.42519e-05 0.05
+0.595 0 4.42519e-05 0.05
+0.68 0 4.42519e-05 0.05
+0.765 0 4.42519e-05 0.05
+0.85 0 4.42519e-05 0.05
+1.02 0 4.42519e-05 0.05
+1.36 0 4.42519e-05 0.05
+1.7 0 4.42519e-05 0.05
+2.04 0 4.42519e-05 0.05
+END DIST
+
+Metal 1 UNDER 4
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.05
+0.34 0 4.42519e-05 0.05
+0.425 0 4.42519e-05 0.05
+0.51 0 4.42519e-05 0.05
+0.595 0 4.42519e-05 0.05
+0.68 0 4.42519e-05 0.05
+0.765 0 4.42519e-05 0.05
+0.85 0 4.42519e-05 0.05
+1.02 0 4.42519e-05 0.05
+1.36 0 4.42519e-05 0.05
+1.7 0 4.42519e-05 0.05
+2.04 0 4.42519e-05 0.05
+END DIST
+
+Metal 1 UNDER 5
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.05
+0.34 0 4.42519e-05 0.05
+0.425 0 4.42519e-05 0.05
+0.51 0 4.42519e-05 0.05
+0.595 0 4.42519e-05 0.05
+0.68 0 4.42519e-05 0.05
+0.765 0 4.42519e-05 0.05
+0.85 0 4.42519e-05 0.05
+1.02 0 4.42519e-05 0.05
+1.36 0 4.42519e-05 0.05
+1.7 0 4.42519e-05 0.05
+2.04 0 4.42519e-05 0.05
+END DIST
+
+Metal 1 UNDER 6
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.05
+0.34 0 4.42519e-05 0.05
+0.425 0 4.42519e-05 0.05
+0.51 0 4.42519e-05 0.05
+0.595 0 4.42519e-05 0.05
+0.68 0 4.42519e-05 0.05
+0.765 0 4.42519e-05 0.05
+0.85 0 4.42519e-05 0.05
+1.02 0 4.42519e-05 0.05
+1.36 0 4.42519e-05 0.05
+1.7 0 4.42519e-05 0.05
+2.04 0 4.42519e-05 0.05
+END DIST
+
+Metal 1 DIAGUNDER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 DIAGUNDER 2
+DIST count 13 width 0.17
+0 0 0 0.05
+0.17 0 0 0.05
+0.34 0 0 0.05
+0.425 0 0 0.05
+0.51 0 0 0.05
+0.595 0 0 0.05
+0.68 0 0 0.05
+0.765 0 0 0.05
+0.85 0 0 0.05
+1.02 0 0 0.05
+1.36 0 0 0.05
+1.7 0 0 0.05
+2.04 0 0 0.05
+END DIST
+
+Metal 1 DIAGUNDER 3
+DIST count 13 width 0.17
+0 0 0 0.05
+0.17 0 0 0.05
+0.34 0 0 0.05
+0.425 0 0 0.05
+0.51 0 0 0.05
+0.595 0 0 0.05
+0.68 0 0 0.05
+0.765 0 0 0.05
+0.85 0 0 0.05
+1.02 0 0 0.05
+1.36 0 0 0.05
+1.7 0 0 0.05
+2.04 0 0 0.05
+END DIST
+
+Metal 1 DIAGUNDER 4
+DIST count 13 width 0.17
+0 0 0 0.05
+0.17 0 0 0.05
+0.34 0 0 0.05
+0.425 0 0 0.05
+0.51 0 0 0.05
+0.595 0 0 0.05
+0.68 0 0 0.05
+0.765 0 0 0.05
+0.85 0 0 0.05
+1.02 0 0 0.05
+1.36 0 0 0.05
+1.7 0 0 0.05
+2.04 0 0 0.05
+END DIST
+
+Metal 1 DIAGUNDER 5
+DIST count 13 width 0.17
+0 0 0 0.05
+0.17 0 0 0.05
+0.34 0 0 0.05
+0.425 0 0 0.05
+0.51 0 0 0.05
+0.595 0 0 0.05
+0.68 0 0 0.05
+0.765 0 0 0.05
+0.85 0 0 0.05
+1.02 0 0 0.05
+1.36 0 0 0.05
+1.7 0 0 0.05
+2.04 0 0 0.05
+END DIST
+
+Metal 1 DIAGUNDER 6
+DIST count 0 width 0.17
+END DIST
+
+Metal 2 RESOVER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.00103571
+0 0.2 0 0.00103571
+0 0.34 0 0.00103571
+0 0.47 0 0.00103571
+0 0.54 0 0.00103571
+0 0.68 0 0.00103571
+0 0.81 0 0.00103571
+0 0.88 0 0.00103571
+0 1.02 0 0.00103571
+0 1.36 0 0.00103571
+0.2 0.2 0 0.00103571
+0.2 0.34 0 0.00103571
+0.2 0.47 0 0.00103571
+0.2 0.54 0 0.00103571
+0.2 0.68 0 0.00103571
+0.2 0.81 0 0.00103571
+0.2 0.88 0 0.00103571
+0.2 1.02 0 0.00103571
+0.2 1.36 0 0.00103571
+0.34 0.34 0 0.00103571
+0.34 0.47 0 0.00103571
+0.34 0.54 0 0.00103571
+0.34 0.68 0 0.00103571
+0.34 0.81 0 0.00103571
+0.34 0.88 0 0.00103571
+0.34 1.02 0 0.00103571
+0.34 1.36 0 0.00103571
+0.47 0.47 0 0.00103571
+0.47 0.54 0 0.00103571
+0.47 0.68 0 0.00103571
+0.47 0.81 0 0.00103571
+0.47 0.88 0 0.00103571
+0.47 1.02 0 0.00103571
+0.47 1.36 0 0.00103571
+0.54 0.54 0 0.00103571
+0.54 0.68 0 0.00103571
+0.54 0.81 0 0.00103571
+0.54 0.88 0 0.00103571
+0.54 1.02 0 0.00103571
+0.54 1.36 0 0.00103571
+0.68 0.68 0 0.00103571
+0.68 0.81 0 0.00103571
+0.68 0.88 0 0.00103571
+0.68 1.02 0 0.00103571
+0.68 1.36 0 0.00103571
+0.81 0.81 0 0.00103571
+0.81 0.88 0 0.00103571
+0.81 1.02 0 0.00103571
+0.81 1.36 0 0.00103571
+0.88 0.88 0 0.00103571
+0.88 1.02 0 0.00103571
+0.88 1.36 0 0.00103571
+1.02 1.02 0 0.00103571
+1.02 1.36 0 0.00103571
+1.36 0 1.36 0.00103571
+END DIST
+
+Metal 2 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 2 OVER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 OVER 0
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000517857
+0.28 0 4.27813e-05 0.000517857
+0.35 0 4.27813e-05 0.000517857
+0.42 0 4.27813e-05 0.000517857
+0.49 0 4.27813e-05 0.000517857
+0.56 0 4.27813e-05 0.000517857
+0.63 0 4.27813e-05 0.000517857
+0.7 0 4.27813e-05 0.000517857
+0.84 0 4.27813e-05 0.000517857
+1.12 0 4.27813e-05 0.000517857
+1.4 0 4.27813e-05 0.000517857
+1.68 0 4.27813e-05 0.000517857
+END DIST
+
+Metal 2 OVER 1
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000517857
+0.28 0 4.27813e-05 0.000517857
+0.35 0 4.27813e-05 0.000517857
+0.42 0 4.27813e-05 0.000517857
+0.49 0 4.27813e-05 0.000517857
+0.56 0 4.27813e-05 0.000517857
+0.63 0 4.27813e-05 0.000517857
+0.7 0 4.27813e-05 0.000517857
+0.84 0 4.27813e-05 0.000517857
+1.12 0 4.27813e-05 0.000517857
+1.4 0 4.27813e-05 0.000517857
+1.68 0 4.27813e-05 0.000517857
+END DIST
+
+Metal 2 UNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 UNDER 3
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000517857
+0.28 0 4.27813e-05 0.000517857
+0.35 0 4.27813e-05 0.000517857
+0.42 0 4.27813e-05 0.000517857
+0.49 0 4.27813e-05 0.000517857
+0.56 0 4.27813e-05 0.000517857
+0.63 0 4.27813e-05 0.000517857
+0.7 0 4.27813e-05 0.000517857
+0.84 0 4.27813e-05 0.000517857
+1.12 0 4.27813e-05 0.000517857
+1.4 0 4.27813e-05 0.000517857
+1.68 0 4.27813e-05 0.000517857
+END DIST
+
+Metal 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000517857
+0.28 0 4.27813e-05 0.000517857
+0.35 0 4.27813e-05 0.000517857
+0.42 0 4.27813e-05 0.000517857
+0.49 0 4.27813e-05 0.000517857
+0.56 0 4.27813e-05 0.000517857
+0.63 0 4.27813e-05 0.000517857
+0.7 0 4.27813e-05 0.000517857
+0.84 0 4.27813e-05 0.000517857
+1.12 0 4.27813e-05 0.000517857
+1.4 0 4.27813e-05 0.000517857
+1.68 0 4.27813e-05 0.000517857
+END DIST
+
+Metal 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000517857
+0.28 0 4.27813e-05 0.000517857
+0.35 0 4.27813e-05 0.000517857
+0.42 0 4.27813e-05 0.000517857
+0.49 0 4.27813e-05 0.000517857
+0.56 0 4.27813e-05 0.000517857
+0.63 0 4.27813e-05 0.000517857
+0.7 0 4.27813e-05 0.000517857
+0.84 0 4.27813e-05 0.000517857
+1.12 0 4.27813e-05 0.000517857
+1.4 0 4.27813e-05 0.000517857
+1.68 0 4.27813e-05 0.000517857
+END DIST
+
+Metal 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000517857
+0.28 0 4.27813e-05 0.000517857
+0.35 0 4.27813e-05 0.000517857
+0.42 0 4.27813e-05 0.000517857
+0.49 0 4.27813e-05 0.000517857
+0.56 0 4.27813e-05 0.000517857
+0.63 0 4.27813e-05 0.000517857
+0.7 0 4.27813e-05 0.000517857
+0.84 0 4.27813e-05 0.000517857
+1.12 0 4.27813e-05 0.000517857
+1.4 0 4.27813e-05 0.000517857
+1.68 0 4.27813e-05 0.000517857
+END DIST
+
+Metal 2 DIAGUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 DIAGUNDER 3
+DIST count 13 width 0.14
+0 0 0 0.000517857
+0.14 0 0 0.000517857
+0.28 0 0 0.000517857
+0.35 0 0 0.000517857
+0.42 0 0 0.000517857
+0.49 0 0 0.000517857
+0.56 0 0 0.000517857
+0.63 0 0 0.000517857
+0.7 0 0 0.000517857
+0.84 0 0 0.000517857
+1.12 0 0 0.000517857
+1.4 0 0 0.000517857
+1.68 0 0 0.000517857
+END DIST
+
+Metal 2 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 0 0.000517857
+0.14 0 0 0.000517857
+0.28 0 0 0.000517857
+0.35 0 0 0.000517857
+0.42 0 0 0.000517857
+0.49 0 0 0.000517857
+0.56 0 0 0.000517857
+0.63 0 0 0.000517857
+0.7 0 0 0.000517857
+0.84 0 0 0.000517857
+1.12 0 0 0.000517857
+1.4 0 0 0.000517857
+1.68 0 0 0.000517857
+END DIST
+
+Metal 2 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 0 0.000517857
+0.14 0 0 0.000517857
+0.28 0 0 0.000517857
+0.35 0 0 0.000517857
+0.42 0 0 0.000517857
+0.49 0 0 0.000517857
+0.56 0 0 0.000517857
+0.63 0 0 0.000517857
+0.7 0 0 0.000517857
+0.84 0 0 0.000517857
+1.12 0 0 0.000517857
+1.4 0 0 0.000517857
+1.68 0 0 0.000517857
+END DIST
+
+Metal 2 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 0 0.000517857
+0.14 0 0 0.000517857
+0.28 0 0 0.000517857
+0.35 0 0 0.000517857
+0.42 0 0 0.000517857
+0.49 0 0 0.000517857
+0.56 0 0 0.000517857
+0.63 0 0 0.000517857
+0.7 0 0 0.000517857
+0.84 0 0 0.000517857
+1.12 0 0 0.000517857
+1.4 0 0 0.000517857
+1.68 0 0 0.000517857
+END DIST
+
+Metal 2 OVERUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 OVER 1 UNDER 3
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000517857
+0.28 0 4.27813e-05 0.000517857
+0.35 0 4.27813e-05 0.000517857
+0.42 0 4.27813e-05 0.000517857
+0.49 0 4.27813e-05 0.000517857
+0.56 0 4.27813e-05 0.000517857
+0.63 0 4.27813e-05 0.000517857
+0.7 0 4.27813e-05 0.000517857
+0.84 0 4.27813e-05 0.000517857
+1.12 0 4.27813e-05 0.000517857
+1.4 0 4.27813e-05 0.000517857
+1.68 0 4.27813e-05 0.000517857
+END DIST
+
+Metal 2 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000517857
+0.28 0 4.27813e-05 0.000517857
+0.35 0 4.27813e-05 0.000517857
+0.42 0 4.27813e-05 0.000517857
+0.49 0 4.27813e-05 0.000517857
+0.56 0 4.27813e-05 0.000517857
+0.63 0 4.27813e-05 0.000517857
+0.7 0 4.27813e-05 0.000517857
+0.84 0 4.27813e-05 0.000517857
+1.12 0 4.27813e-05 0.000517857
+1.4 0 4.27813e-05 0.000517857
+1.68 0 4.27813e-05 0.000517857
+END DIST
+
+Metal 2 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000517857
+0.28 0 4.27813e-05 0.000517857
+0.35 0 4.27813e-05 0.000517857
+0.42 0 4.27813e-05 0.000517857
+0.49 0 4.27813e-05 0.000517857
+0.56 0 4.27813e-05 0.000517857
+0.63 0 4.27813e-05 0.000517857
+0.7 0 4.27813e-05 0.000517857
+0.84 0 4.27813e-05 0.000517857
+1.12 0 4.27813e-05 0.000517857
+1.4 0 4.27813e-05 0.000517857
+1.68 0 4.27813e-05 0.000517857
+END DIST
+
+Metal 2 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000517857
+0.28 0 4.27813e-05 0.000517857
+0.35 0 4.27813e-05 0.000517857
+0.42 0 4.27813e-05 0.000517857
+0.49 0 4.27813e-05 0.000517857
+0.56 0 4.27813e-05 0.000517857
+0.63 0 4.27813e-05 0.000517857
+0.7 0 4.27813e-05 0.000517857
+0.84 0 4.27813e-05 0.000517857
+1.12 0 4.27813e-05 0.000517857
+1.4 0 4.27813e-05 0.000517857
+1.68 0 4.27813e-05 0.000517857
+END DIST
+
+Metal 3 RESOVER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.00103571
+0 0.32 0 0.00103571
+0 0.46 0 0.00103571
+0 0.71 0 0.00103571
+0 0.78 0 0.00103571
+0 0.92 0 0.00103571
+0 1.17 0 0.00103571
+0 1.24 0 0.00103571
+0 1.38 0 0.00103571
+0 1.84 0 0.00103571
+0.32 0.32 0 0.00103571
+0.32 0.46 0 0.00103571
+0.32 0.71 0 0.00103571
+0.32 0.78 0 0.00103571
+0.32 0.92 0 0.00103571
+0.32 1.17 0 0.00103571
+0.32 1.24 0 0.00103571
+0.32 1.38 0 0.00103571
+0.32 1.84 0 0.00103571
+0.46 0.46 0 0.00103571
+0.46 0.71 0 0.00103571
+0.46 0.78 0 0.00103571
+0.46 0.92 0 0.00103571
+0.46 1.17 0 0.00103571
+0.46 1.24 0 0.00103571
+0.46 1.38 0 0.00103571
+0.46 1.84 0 0.00103571
+0.71 0.71 0 0.00103571
+0.71 0.78 0 0.00103571
+0.71 0.92 0 0.00103571
+0.71 1.17 0 0.00103571
+0.71 1.24 0 0.00103571
+0.71 1.38 0 0.00103571
+0.71 1.84 0 0.00103571
+0.78 0.78 0 0.00103571
+0.78 0.92 0 0.00103571
+0.78 1.17 0 0.00103571
+0.78 1.24 0 0.00103571
+0.78 1.38 0 0.00103571
+0.78 1.84 0 0.00103571
+0.92 0.92 0 0.00103571
+0.92 1.17 0 0.00103571
+0.92 1.24 0 0.00103571
+0.92 1.38 0 0.00103571
+0.92 1.84 0 0.00103571
+1.17 1.17 0 0.00103571
+1.17 1.24 0 0.00103571
+1.17 1.38 0 0.00103571
+1.17 1.84 0 0.00103571
+1.24 1.24 0 0.00103571
+1.24 1.38 0 0.00103571
+1.24 1.84 0 0.00103571
+1.38 1.38 0 0.00103571
+1.38 1.84 0 0.00103571
+1.84 0 1.84 0.00103571
+END DIST
+
+Metal 3 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 RESOVER 2
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 OVER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 OVER 0
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000517857
+0.28 0 3.42844e-05 0.000517857
+0.35 0 3.42844e-05 0.000517857
+0.42 0 3.42844e-05 0.000517857
+0.49 0 3.42844e-05 0.000517857
+0.56 0 3.42844e-05 0.000517857
+0.63 0 3.42844e-05 0.000517857
+0.7 0 3.42844e-05 0.000517857
+0.84 0 3.42844e-05 0.000517857
+1.12 0 3.42844e-05 0.000517857
+1.4 0 3.42844e-05 0.000517857
+1.68 0 3.42844e-05 0.000517857
+END DIST
+
+Metal 3 OVER 1
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000517857
+0.28 0 3.42844e-05 0.000517857
+0.35 0 3.42844e-05 0.000517857
+0.42 0 3.42844e-05 0.000517857
+0.49 0 3.42844e-05 0.000517857
+0.56 0 3.42844e-05 0.000517857
+0.63 0 3.42844e-05 0.000517857
+0.7 0 3.42844e-05 0.000517857
+0.84 0 3.42844e-05 0.000517857
+1.12 0 3.42844e-05 0.000517857
+1.4 0 3.42844e-05 0.000517857
+1.68 0 3.42844e-05 0.000517857
+END DIST
+
+Metal 3 OVER 2
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000517857
+0.28 0 3.42844e-05 0.000517857
+0.35 0 3.42844e-05 0.000517857
+0.42 0 3.42844e-05 0.000517857
+0.49 0 3.42844e-05 0.000517857
+0.56 0 3.42844e-05 0.000517857
+0.63 0 3.42844e-05 0.000517857
+0.7 0 3.42844e-05 0.000517857
+0.84 0 3.42844e-05 0.000517857
+1.12 0 3.42844e-05 0.000517857
+1.4 0 3.42844e-05 0.000517857
+1.68 0 3.42844e-05 0.000517857
+END DIST
+
+Metal 3 UNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 UNDER 4
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000517857
+0.28 0 3.42844e-05 0.000517857
+0.35 0 3.42844e-05 0.000517857
+0.42 0 3.42844e-05 0.000517857
+0.49 0 3.42844e-05 0.000517857
+0.56 0 3.42844e-05 0.000517857
+0.63 0 3.42844e-05 0.000517857
+0.7 0 3.42844e-05 0.000517857
+0.84 0 3.42844e-05 0.000517857
+1.12 0 3.42844e-05 0.000517857
+1.4 0 3.42844e-05 0.000517857
+1.68 0 3.42844e-05 0.000517857
+END DIST
+
+Metal 3 UNDER 5
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000517857
+0.28 0 3.42844e-05 0.000517857
+0.35 0 3.42844e-05 0.000517857
+0.42 0 3.42844e-05 0.000517857
+0.49 0 3.42844e-05 0.000517857
+0.56 0 3.42844e-05 0.000517857
+0.63 0 3.42844e-05 0.000517857
+0.7 0 3.42844e-05 0.000517857
+0.84 0 3.42844e-05 0.000517857
+1.12 0 3.42844e-05 0.000517857
+1.4 0 3.42844e-05 0.000517857
+1.68 0 3.42844e-05 0.000517857
+END DIST
+
+Metal 3 UNDER 6
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000517857
+0.28 0 3.42844e-05 0.000517857
+0.35 0 3.42844e-05 0.000517857
+0.42 0 3.42844e-05 0.000517857
+0.49 0 3.42844e-05 0.000517857
+0.56 0 3.42844e-05 0.000517857
+0.63 0 3.42844e-05 0.000517857
+0.7 0 3.42844e-05 0.000517857
+0.84 0 3.42844e-05 0.000517857
+1.12 0 3.42844e-05 0.000517857
+1.4 0 3.42844e-05 0.000517857
+1.68 0 3.42844e-05 0.000517857
+END DIST
+
+Metal 3 DIAGUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 0 0.000517857
+0.14 0 0 0.000517857
+0.28 0 0 0.000517857
+0.35 0 0 0.000517857
+0.42 0 0 0.000517857
+0.49 0 0 0.000517857
+0.56 0 0 0.000517857
+0.63 0 0 0.000517857
+0.7 0 0 0.000517857
+0.84 0 0 0.000517857
+1.12 0 0 0.000517857
+1.4 0 0 0.000517857
+1.68 0 0 0.000517857
+END DIST
+
+Metal 3 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 0 0.000517857
+0.14 0 0 0.000517857
+0.28 0 0 0.000517857
+0.35 0 0 0.000517857
+0.42 0 0 0.000517857
+0.49 0 0 0.000517857
+0.56 0 0 0.000517857
+0.63 0 0 0.000517857
+0.7 0 0 0.000517857
+0.84 0 0 0.000517857
+1.12 0 0 0.000517857
+1.4 0 0 0.000517857
+1.68 0 0 0.000517857
+END DIST
+
+Metal 3 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 0 0.000517857
+0.14 0 0 0.000517857
+0.28 0 0 0.000517857
+0.35 0 0 0.000517857
+0.42 0 0 0.000517857
+0.49 0 0 0.000517857
+0.56 0 0 0.000517857
+0.63 0 0 0.000517857
+0.7 0 0 0.000517857
+0.84 0 0 0.000517857
+1.12 0 0 0.000517857
+1.4 0 0 0.000517857
+1.68 0 0 0.000517857
+END DIST
+
+Metal 3 OVERUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000517857
+0.28 0 3.42844e-05 0.000517857
+0.35 0 3.42844e-05 0.000517857
+0.42 0 3.42844e-05 0.000517857
+0.49 0 3.42844e-05 0.000517857
+0.56 0 3.42844e-05 0.000517857
+0.63 0 3.42844e-05 0.000517857
+0.7 0 3.42844e-05 0.000517857
+0.84 0 3.42844e-05 0.000517857
+1.12 0 3.42844e-05 0.000517857
+1.4 0 3.42844e-05 0.000517857
+1.68 0 3.42844e-05 0.000517857
+END DIST
+
+Metal 3 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000517857
+0.28 0 3.42844e-05 0.000517857
+0.35 0 3.42844e-05 0.000517857
+0.42 0 3.42844e-05 0.000517857
+0.49 0 3.42844e-05 0.000517857
+0.56 0 3.42844e-05 0.000517857
+0.63 0 3.42844e-05 0.000517857
+0.7 0 3.42844e-05 0.000517857
+0.84 0 3.42844e-05 0.000517857
+1.12 0 3.42844e-05 0.000517857
+1.4 0 3.42844e-05 0.000517857
+1.68 0 3.42844e-05 0.000517857
+END DIST
+
+Metal 3 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000517857
+0.28 0 3.42844e-05 0.000517857
+0.35 0 3.42844e-05 0.000517857
+0.42 0 3.42844e-05 0.000517857
+0.49 0 3.42844e-05 0.000517857
+0.56 0 3.42844e-05 0.000517857
+0.63 0 3.42844e-05 0.000517857
+0.7 0 3.42844e-05 0.000517857
+0.84 0 3.42844e-05 0.000517857
+1.12 0 3.42844e-05 0.000517857
+1.4 0 3.42844e-05 0.000517857
+1.68 0 3.42844e-05 0.000517857
+END DIST
+
+Metal 3 OVER 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000517857
+0.28 0 3.42844e-05 0.000517857
+0.35 0 3.42844e-05 0.000517857
+0.42 0 3.42844e-05 0.000517857
+0.49 0 3.42844e-05 0.000517857
+0.56 0 3.42844e-05 0.000517857
+0.63 0 3.42844e-05 0.000517857
+0.7 0 3.42844e-05 0.000517857
+0.84 0 3.42844e-05 0.000517857
+1.12 0 3.42844e-05 0.000517857
+1.4 0 3.42844e-05 0.000517857
+1.68 0 3.42844e-05 0.000517857
+END DIST
+
+Metal 3 OVER 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000517857
+0.28 0 3.42844e-05 0.000517857
+0.35 0 3.42844e-05 0.000517857
+0.42 0 3.42844e-05 0.000517857
+0.49 0 3.42844e-05 0.000517857
+0.56 0 3.42844e-05 0.000517857
+0.63 0 3.42844e-05 0.000517857
+0.7 0 3.42844e-05 0.000517857
+0.84 0 3.42844e-05 0.000517857
+1.12 0 3.42844e-05 0.000517857
+1.4 0 3.42844e-05 0.000517857
+1.68 0 3.42844e-05 0.000517857
+END DIST
+
+Metal 3 OVER 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000517857
+0.28 0 3.42844e-05 0.000517857
+0.35 0 3.42844e-05 0.000517857
+0.42 0 3.42844e-05 0.000517857
+0.49 0 3.42844e-05 0.000517857
+0.56 0 3.42844e-05 0.000517857
+0.63 0 3.42844e-05 0.000517857
+0.7 0 3.42844e-05 0.000517857
+0.84 0 3.42844e-05 0.000517857
+1.12 0 3.42844e-05 0.000517857
+1.4 0 3.42844e-05 0.000517857
+1.68 0 3.42844e-05 0.000517857
+END DIST
+
+Metal 4 RESOVER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000186667
+0 0.38 0 0.000186667
+0 0.68 0 0.000186667
+0 0.91 0 0.000186667
+0 1.06 0 0.000186667
+0 1.36 0 0.000186667
+0 1.59 0 0.000186667
+0 1.74 0 0.000186667
+0 2.04 0 0.000186667
+0 2.72 0 0.000186667
+0.38 0.38 0 0.000186667
+0.38 0.68 0 0.000186667
+0.38 0.91 0 0.000186667
+0.38 1.06 0 0.000186667
+0.38 1.36 0 0.000186667
+0.38 1.59 0 0.000186667
+0.38 1.74 0 0.000186667
+0.38 2.04 0 0.000186667
+0.38 2.72 0 0.000186667
+0.68 0.68 0 0.000186667
+0.68 0.91 0 0.000186667
+0.68 1.06 0 0.000186667
+0.68 1.36 0 0.000186667
+0.68 1.59 0 0.000186667
+0.68 1.74 0 0.000186667
+0.68 2.04 0 0.000186667
+0.68 2.72 0 0.000186667
+0.91 0.91 0 0.000186667
+0.91 1.06 0 0.000186667
+0.91 1.36 0 0.000186667
+0.91 1.59 0 0.000186667
+0.91 1.74 0 0.000186667
+0.91 2.04 0 0.000186667
+0.91 2.72 0 0.000186667
+1.06 1.06 0 0.000186667
+1.06 1.36 0 0.000186667
+1.06 1.59 0 0.000186667
+1.06 1.74 0 0.000186667
+1.06 2.04 0 0.000186667
+1.06 2.72 0 0.000186667
+1.36 1.36 0 0.000186667
+1.36 1.59 0 0.000186667
+1.36 1.74 0 0.000186667
+1.36 2.04 0 0.000186667
+1.36 2.72 0 0.000186667
+1.59 1.59 0 0.000186667
+1.59 1.74 0 0.000186667
+1.59 2.04 0 0.000186667
+1.59 2.72 0 0.000186667
+1.74 1.74 0 0.000186667
+1.74 2.04 0 0.000186667
+1.74 2.72 0 0.000186667
+2.04 2.04 0 0.000186667
+2.04 2.72 0 0.000186667
+2.72 0 2.72 0.000186667
+END DIST
+
+Metal 4 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 OVER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 OVER 0
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 9.33333e-05
+0.6 0 3.91176e-05 9.33333e-05
+0.75 0 3.91176e-05 9.33333e-05
+0.9 0 3.91176e-05 9.33333e-05
+1.05 0 3.91176e-05 9.33333e-05
+1.2 0 3.91176e-05 9.33333e-05
+1.35 0 3.91176e-05 9.33333e-05
+1.5 0 3.91176e-05 9.33333e-05
+1.8 0 3.91176e-05 9.33333e-05
+2.4 0 3.91176e-05 9.33333e-05
+3 0 3.91176e-05 9.33333e-05
+3.6 0 3.91176e-05 9.33333e-05
+END DIST
+
+Metal 4 OVER 1
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 9.33333e-05
+0.6 0 3.91176e-05 9.33333e-05
+0.75 0 3.91176e-05 9.33333e-05
+0.9 0 3.91176e-05 9.33333e-05
+1.05 0 3.91176e-05 9.33333e-05
+1.2 0 3.91176e-05 9.33333e-05
+1.35 0 3.91176e-05 9.33333e-05
+1.5 0 3.91176e-05 9.33333e-05
+1.8 0 3.91176e-05 9.33333e-05
+2.4 0 3.91176e-05 9.33333e-05
+3 0 3.91176e-05 9.33333e-05
+3.6 0 3.91176e-05 9.33333e-05
+END DIST
+
+Metal 4 OVER 2
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 9.33333e-05
+0.6 0 3.91176e-05 9.33333e-05
+0.75 0 3.91176e-05 9.33333e-05
+0.9 0 3.91176e-05 9.33333e-05
+1.05 0 3.91176e-05 9.33333e-05
+1.2 0 3.91176e-05 9.33333e-05
+1.35 0 3.91176e-05 9.33333e-05
+1.5 0 3.91176e-05 9.33333e-05
+1.8 0 3.91176e-05 9.33333e-05
+2.4 0 3.91176e-05 9.33333e-05
+3 0 3.91176e-05 9.33333e-05
+3.6 0 3.91176e-05 9.33333e-05
+END DIST
+
+Metal 4 OVER 3
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 9.33333e-05
+0.6 0 3.91176e-05 9.33333e-05
+0.75 0 3.91176e-05 9.33333e-05
+0.9 0 3.91176e-05 9.33333e-05
+1.05 0 3.91176e-05 9.33333e-05
+1.2 0 3.91176e-05 9.33333e-05
+1.35 0 3.91176e-05 9.33333e-05
+1.5 0 3.91176e-05 9.33333e-05
+1.8 0 3.91176e-05 9.33333e-05
+2.4 0 3.91176e-05 9.33333e-05
+3 0 3.91176e-05 9.33333e-05
+3.6 0 3.91176e-05 9.33333e-05
+END DIST
+
+Metal 4 UNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 UNDER 5
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 9.33333e-05
+0.6 0 3.91176e-05 9.33333e-05
+0.75 0 3.91176e-05 9.33333e-05
+0.9 0 3.91176e-05 9.33333e-05
+1.05 0 3.91176e-05 9.33333e-05
+1.2 0 3.91176e-05 9.33333e-05
+1.35 0 3.91176e-05 9.33333e-05
+1.5 0 3.91176e-05 9.33333e-05
+1.8 0 3.91176e-05 9.33333e-05
+2.4 0 3.91176e-05 9.33333e-05
+3 0 3.91176e-05 9.33333e-05
+3.6 0 3.91176e-05 9.33333e-05
+END DIST
+
+Metal 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 9.33333e-05
+0.6 0 3.91176e-05 9.33333e-05
+0.75 0 3.91176e-05 9.33333e-05
+0.9 0 3.91176e-05 9.33333e-05
+1.05 0 3.91176e-05 9.33333e-05
+1.2 0 3.91176e-05 9.33333e-05
+1.35 0 3.91176e-05 9.33333e-05
+1.5 0 3.91176e-05 9.33333e-05
+1.8 0 3.91176e-05 9.33333e-05
+2.4 0 3.91176e-05 9.33333e-05
+3 0 3.91176e-05 9.33333e-05
+3.6 0 3.91176e-05 9.33333e-05
+END DIST
+
+Metal 4 DIAGUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 DIAGUNDER 5
+DIST count 13 width 0.3
+0 0 0 9.33333e-05
+0.3 0 0 9.33333e-05
+0.6 0 0 9.33333e-05
+0.75 0 0 9.33333e-05
+0.9 0 0 9.33333e-05
+1.05 0 0 9.33333e-05
+1.2 0 0 9.33333e-05
+1.35 0 0 9.33333e-05
+1.5 0 0 9.33333e-05
+1.8 0 0 9.33333e-05
+2.4 0 0 9.33333e-05
+3 0 0 9.33333e-05
+3.6 0 0 9.33333e-05
+END DIST
+
+Metal 4 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 0 9.33333e-05
+0.3 0 0 9.33333e-05
+0.6 0 0 9.33333e-05
+0.75 0 0 9.33333e-05
+0.9 0 0 9.33333e-05
+1.05 0 0 9.33333e-05
+1.2 0 0 9.33333e-05
+1.35 0 0 9.33333e-05
+1.5 0 0 9.33333e-05
+1.8 0 0 9.33333e-05
+2.4 0 0 9.33333e-05
+3 0 0 9.33333e-05
+3.6 0 0 9.33333e-05
+END DIST
+
+Metal 4 OVERUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 OVER 1 UNDER 5
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 9.33333e-05
+0.6 0 3.91176e-05 9.33333e-05
+0.75 0 3.91176e-05 9.33333e-05
+0.9 0 3.91176e-05 9.33333e-05
+1.05 0 3.91176e-05 9.33333e-05
+1.2 0 3.91176e-05 9.33333e-05
+1.35 0 3.91176e-05 9.33333e-05
+1.5 0 3.91176e-05 9.33333e-05
+1.8 0 3.91176e-05 9.33333e-05
+2.4 0 3.91176e-05 9.33333e-05
+3 0 3.91176e-05 9.33333e-05
+3.6 0 3.91176e-05 9.33333e-05
+END DIST
+
+Metal 4 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 9.33333e-05
+0.6 0 3.91176e-05 9.33333e-05
+0.75 0 3.91176e-05 9.33333e-05
+0.9 0 3.91176e-05 9.33333e-05
+1.05 0 3.91176e-05 9.33333e-05
+1.2 0 3.91176e-05 9.33333e-05
+1.35 0 3.91176e-05 9.33333e-05
+1.5 0 3.91176e-05 9.33333e-05
+1.8 0 3.91176e-05 9.33333e-05
+2.4 0 3.91176e-05 9.33333e-05
+3 0 3.91176e-05 9.33333e-05
+3.6 0 3.91176e-05 9.33333e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 5
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 9.33333e-05
+0.6 0 3.91176e-05 9.33333e-05
+0.75 0 3.91176e-05 9.33333e-05
+0.9 0 3.91176e-05 9.33333e-05
+1.05 0 3.91176e-05 9.33333e-05
+1.2 0 3.91176e-05 9.33333e-05
+1.35 0 3.91176e-05 9.33333e-05
+1.5 0 3.91176e-05 9.33333e-05
+1.8 0 3.91176e-05 9.33333e-05
+2.4 0 3.91176e-05 9.33333e-05
+3 0 3.91176e-05 9.33333e-05
+3.6 0 3.91176e-05 9.33333e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 9.33333e-05
+0.6 0 3.91176e-05 9.33333e-05
+0.75 0 3.91176e-05 9.33333e-05
+0.9 0 3.91176e-05 9.33333e-05
+1.05 0 3.91176e-05 9.33333e-05
+1.2 0 3.91176e-05 9.33333e-05
+1.35 0 3.91176e-05 9.33333e-05
+1.5 0 3.91176e-05 9.33333e-05
+1.8 0 3.91176e-05 9.33333e-05
+2.4 0 3.91176e-05 9.33333e-05
+3 0 3.91176e-05 9.33333e-05
+3.6 0 3.91176e-05 9.33333e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 5
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 9.33333e-05
+0.6 0 3.91176e-05 9.33333e-05
+0.75 0 3.91176e-05 9.33333e-05
+0.9 0 3.91176e-05 9.33333e-05
+1.05 0 3.91176e-05 9.33333e-05
+1.2 0 3.91176e-05 9.33333e-05
+1.35 0 3.91176e-05 9.33333e-05
+1.5 0 3.91176e-05 9.33333e-05
+1.8 0 3.91176e-05 9.33333e-05
+2.4 0 3.91176e-05 9.33333e-05
+3 0 3.91176e-05 9.33333e-05
+3.6 0 3.91176e-05 9.33333e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 9.33333e-05
+0.6 0 3.91176e-05 9.33333e-05
+0.75 0 3.91176e-05 9.33333e-05
+0.9 0 3.91176e-05 9.33333e-05
+1.05 0 3.91176e-05 9.33333e-05
+1.2 0 3.91176e-05 9.33333e-05
+1.35 0 3.91176e-05 9.33333e-05
+1.5 0 3.91176e-05 9.33333e-05
+1.8 0 3.91176e-05 9.33333e-05
+2.4 0 3.91176e-05 9.33333e-05
+3 0 3.91176e-05 9.33333e-05
+3.6 0 3.91176e-05 9.33333e-05
+END DIST
+
+Metal 5 RESOVER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000186667
+0 0.62 0 0.000186667
+0 0.92 0 0.000186667
+0 1.39 0 0.000186667
+0 1.54 0 0.000186667
+0 1.84 0 0.000186667
+0 2.31 0 0.000186667
+0 2.46 0 0.000186667
+0 2.76 0 0.000186667
+0 3.68 0 0.000186667
+0.62 0.62 0 0.000186667
+0.62 0.92 0 0.000186667
+0.62 1.39 0 0.000186667
+0.62 1.54 0 0.000186667
+0.62 1.84 0 0.000186667
+0.62 2.31 0 0.000186667
+0.62 2.46 0 0.000186667
+0.62 2.76 0 0.000186667
+0.62 3.68 0 0.000186667
+0.92 0.92 0 0.000186667
+0.92 1.39 0 0.000186667
+0.92 1.54 0 0.000186667
+0.92 1.84 0 0.000186667
+0.92 2.31 0 0.000186667
+0.92 2.46 0 0.000186667
+0.92 2.76 0 0.000186667
+0.92 3.68 0 0.000186667
+1.39 1.39 0 0.000186667
+1.39 1.54 0 0.000186667
+1.39 1.84 0 0.000186667
+1.39 2.31 0 0.000186667
+1.39 2.46 0 0.000186667
+1.39 2.76 0 0.000186667
+1.39 3.68 0 0.000186667
+1.54 1.54 0 0.000186667
+1.54 1.84 0 0.000186667
+1.54 2.31 0 0.000186667
+1.54 2.46 0 0.000186667
+1.54 2.76 0 0.000186667
+1.54 3.68 0 0.000186667
+1.84 1.84 0 0.000186667
+1.84 2.31 0 0.000186667
+1.84 2.46 0 0.000186667
+1.84 2.76 0 0.000186667
+1.84 3.68 0 0.000186667
+2.31 2.31 0 0.000186667
+2.31 2.46 0 0.000186667
+2.31 2.76 0 0.000186667
+2.31 3.68 0 0.000186667
+2.46 2.46 0 0.000186667
+2.46 2.76 0 0.000186667
+2.46 3.68 0 0.000186667
+2.76 2.76 0 0.000186667
+2.76 3.68 0 0.000186667
+3.68 0 3.68 0.000186667
+END DIST
+
+Metal 5 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 4
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 OVER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 OVER 0
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 9.33333e-05
+0.6 0 3.56902e-05 9.33333e-05
+0.75 0 3.56902e-05 9.33333e-05
+0.9 0 3.56902e-05 9.33333e-05
+1.05 0 3.56902e-05 9.33333e-05
+1.2 0 3.56902e-05 9.33333e-05
+1.35 0 3.56902e-05 9.33333e-05
+1.5 0 3.56902e-05 9.33333e-05
+1.8 0 3.56902e-05 9.33333e-05
+2.4 0 3.56902e-05 9.33333e-05
+3 0 3.56902e-05 9.33333e-05
+3.6 0 3.56902e-05 9.33333e-05
+END DIST
+
+Metal 5 OVER 1
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 9.33333e-05
+0.6 0 3.56902e-05 9.33333e-05
+0.75 0 3.56902e-05 9.33333e-05
+0.9 0 3.56902e-05 9.33333e-05
+1.05 0 3.56902e-05 9.33333e-05
+1.2 0 3.56902e-05 9.33333e-05
+1.35 0 3.56902e-05 9.33333e-05
+1.5 0 3.56902e-05 9.33333e-05
+1.8 0 3.56902e-05 9.33333e-05
+2.4 0 3.56902e-05 9.33333e-05
+3 0 3.56902e-05 9.33333e-05
+3.6 0 3.56902e-05 9.33333e-05
+END DIST
+
+Metal 5 OVER 2
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 9.33333e-05
+0.6 0 3.56902e-05 9.33333e-05
+0.75 0 3.56902e-05 9.33333e-05
+0.9 0 3.56902e-05 9.33333e-05
+1.05 0 3.56902e-05 9.33333e-05
+1.2 0 3.56902e-05 9.33333e-05
+1.35 0 3.56902e-05 9.33333e-05
+1.5 0 3.56902e-05 9.33333e-05
+1.8 0 3.56902e-05 9.33333e-05
+2.4 0 3.56902e-05 9.33333e-05
+3 0 3.56902e-05 9.33333e-05
+3.6 0 3.56902e-05 9.33333e-05
+END DIST
+
+Metal 5 OVER 3
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 9.33333e-05
+0.6 0 3.56902e-05 9.33333e-05
+0.75 0 3.56902e-05 9.33333e-05
+0.9 0 3.56902e-05 9.33333e-05
+1.05 0 3.56902e-05 9.33333e-05
+1.2 0 3.56902e-05 9.33333e-05
+1.35 0 3.56902e-05 9.33333e-05
+1.5 0 3.56902e-05 9.33333e-05
+1.8 0 3.56902e-05 9.33333e-05
+2.4 0 3.56902e-05 9.33333e-05
+3 0 3.56902e-05 9.33333e-05
+3.6 0 3.56902e-05 9.33333e-05
+END DIST
+
+Metal 5 OVER 4
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 9.33333e-05
+0.6 0 3.56902e-05 9.33333e-05
+0.75 0 3.56902e-05 9.33333e-05
+0.9 0 3.56902e-05 9.33333e-05
+1.05 0 3.56902e-05 9.33333e-05
+1.2 0 3.56902e-05 9.33333e-05
+1.35 0 3.56902e-05 9.33333e-05
+1.5 0 3.56902e-05 9.33333e-05
+1.8 0 3.56902e-05 9.33333e-05
+2.4 0 3.56902e-05 9.33333e-05
+3 0 3.56902e-05 9.33333e-05
+3.6 0 3.56902e-05 9.33333e-05
+END DIST
+
+Metal 5 UNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 9.33333e-05
+0.6 0 3.56902e-05 9.33333e-05
+0.75 0 3.56902e-05 9.33333e-05
+0.9 0 3.56902e-05 9.33333e-05
+1.05 0 3.56902e-05 9.33333e-05
+1.2 0 3.56902e-05 9.33333e-05
+1.35 0 3.56902e-05 9.33333e-05
+1.5 0 3.56902e-05 9.33333e-05
+1.8 0 3.56902e-05 9.33333e-05
+2.4 0 3.56902e-05 9.33333e-05
+3 0 3.56902e-05 9.33333e-05
+3.6 0 3.56902e-05 9.33333e-05
+END DIST
+
+Metal 5 DIAGUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 0 9.33333e-05
+0.3 0 0 9.33333e-05
+0.6 0 0 9.33333e-05
+0.75 0 0 9.33333e-05
+0.9 0 0 9.33333e-05
+1.05 0 0 9.33333e-05
+1.2 0 0 9.33333e-05
+1.35 0 0 9.33333e-05
+1.5 0 0 9.33333e-05
+1.8 0 0 9.33333e-05
+2.4 0 0 9.33333e-05
+3 0 0 9.33333e-05
+3.6 0 0 9.33333e-05
+END DIST
+
+Metal 5 OVERUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 9.33333e-05
+0.6 0 3.56902e-05 9.33333e-05
+0.75 0 3.56902e-05 9.33333e-05
+0.9 0 3.56902e-05 9.33333e-05
+1.05 0 3.56902e-05 9.33333e-05
+1.2 0 3.56902e-05 9.33333e-05
+1.35 0 3.56902e-05 9.33333e-05
+1.5 0 3.56902e-05 9.33333e-05
+1.8 0 3.56902e-05 9.33333e-05
+2.4 0 3.56902e-05 9.33333e-05
+3 0 3.56902e-05 9.33333e-05
+3.6 0 3.56902e-05 9.33333e-05
+END DIST
+
+Metal 5 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 9.33333e-05
+0.6 0 3.56902e-05 9.33333e-05
+0.75 0 3.56902e-05 9.33333e-05
+0.9 0 3.56902e-05 9.33333e-05
+1.05 0 3.56902e-05 9.33333e-05
+1.2 0 3.56902e-05 9.33333e-05
+1.35 0 3.56902e-05 9.33333e-05
+1.5 0 3.56902e-05 9.33333e-05
+1.8 0 3.56902e-05 9.33333e-05
+2.4 0 3.56902e-05 9.33333e-05
+3 0 3.56902e-05 9.33333e-05
+3.6 0 3.56902e-05 9.33333e-05
+END DIST
+
+Metal 5 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 9.33333e-05
+0.6 0 3.56902e-05 9.33333e-05
+0.75 0 3.56902e-05 9.33333e-05
+0.9 0 3.56902e-05 9.33333e-05
+1.05 0 3.56902e-05 9.33333e-05
+1.2 0 3.56902e-05 9.33333e-05
+1.35 0 3.56902e-05 9.33333e-05
+1.5 0 3.56902e-05 9.33333e-05
+1.8 0 3.56902e-05 9.33333e-05
+2.4 0 3.56902e-05 9.33333e-05
+3 0 3.56902e-05 9.33333e-05
+3.6 0 3.56902e-05 9.33333e-05
+END DIST
+
+Metal 5 OVER 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 9.33333e-05
+0.6 0 3.56902e-05 9.33333e-05
+0.75 0 3.56902e-05 9.33333e-05
+0.9 0 3.56902e-05 9.33333e-05
+1.05 0 3.56902e-05 9.33333e-05
+1.2 0 3.56902e-05 9.33333e-05
+1.35 0 3.56902e-05 9.33333e-05
+1.5 0 3.56902e-05 9.33333e-05
+1.8 0 3.56902e-05 9.33333e-05
+2.4 0 3.56902e-05 9.33333e-05
+3 0 3.56902e-05 9.33333e-05
+3.6 0 3.56902e-05 9.33333e-05
+END DIST
+
+Metal 6 RESOVER
+WIDTH Table 1 entries: 1.6
+
+Metal 6 RESOVER 0
+DIST count 55 width 1.6
+0 0 0 2.2375e-05
+0 1.8 0 2.2375e-05
+0 3.4 0 2.2375e-05
+0 4.4 0 2.2375e-05
+0 5.2 0 2.2375e-05
+0 6.8 0 2.2375e-05
+0 7.8 0 2.2375e-05
+0 8.6 0 2.2375e-05
+0 10.2 0 2.2375e-05
+0 13.6 0 2.2375e-05
+1.8 1.8 0 2.2375e-05
+1.8 3.4 0 2.2375e-05
+1.8 4.4 0 2.2375e-05
+1.8 5.2 0 2.2375e-05
+1.8 6.8 0 2.2375e-05
+1.8 7.8 0 2.2375e-05
+1.8 8.6 0 2.2375e-05
+1.8 10.2 0 2.2375e-05
+1.8 13.6 0 2.2375e-05
+3.4 3.4 0 2.2375e-05
+3.4 4.4 0 2.2375e-05
+3.4 5.2 0 2.2375e-05
+3.4 6.8 0 2.2375e-05
+3.4 7.8 0 2.2375e-05
+3.4 8.6 0 2.2375e-05
+3.4 10.2 0 2.2375e-05
+3.4 13.6 0 2.2375e-05
+4.4 4.4 0 2.2375e-05
+4.4 5.2 0 2.2375e-05
+4.4 6.8 0 2.2375e-05
+4.4 7.8 0 2.2375e-05
+4.4 8.6 0 2.2375e-05
+4.4 10.2 0 2.2375e-05
+4.4 13.6 0 2.2375e-05
+5.2 5.2 0 2.2375e-05
+5.2 6.8 0 2.2375e-05
+5.2 7.8 0 2.2375e-05
+5.2 8.6 0 2.2375e-05
+5.2 10.2 0 2.2375e-05
+5.2 13.6 0 2.2375e-05
+6.8 6.8 0 2.2375e-05
+6.8 7.8 0 2.2375e-05
+6.8 8.6 0 2.2375e-05
+6.8 10.2 0 2.2375e-05
+6.8 13.6 0 2.2375e-05
+7.8 7.8 0 2.2375e-05
+7.8 8.6 0 2.2375e-05
+7.8 10.2 0 2.2375e-05
+7.8 13.6 0 2.2375e-05
+8.6 8.6 0 2.2375e-05
+8.6 10.2 0 2.2375e-05
+8.6 13.6 0 2.2375e-05
+10.2 10.2 0 2.2375e-05
+10.2 13.6 0 2.2375e-05
+13.6 0 13.6 2.2375e-05
+END DIST
+
+Metal 6 RESOVER 1
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 2
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 3
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 4
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 5
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 OVER
+WIDTH Table 1 entries: 1.6
+
+Metal 6 OVER 0
+DIST count 12 width 1.6
+1.6 0 4.19932e-05 1.11875e-05
+3.2 0 4.19932e-05 1.11875e-05
+4 0 4.19932e-05 1.11875e-05
+4.8 0 4.19932e-05 1.11875e-05
+5.6 0 4.19932e-05 1.11875e-05
+6.4 0 4.19932e-05 1.11875e-05
+7.2 0 4.19932e-05 1.11875e-05
+8 0 4.19932e-05 1.11875e-05
+9.6 0 4.19932e-05 1.11875e-05
+12.8 0 4.19932e-05 1.11875e-05
+16 0 4.19932e-05 1.11875e-05
+19.2 0 4.19932e-05 1.11875e-05
+END DIST
+
+Metal 6 OVER 1
+DIST count 12 width 1.6
+1.6 0 4.19932e-05 1.11875e-05
+3.2 0 4.19932e-05 1.11875e-05
+4 0 4.19932e-05 1.11875e-05
+4.8 0 4.19932e-05 1.11875e-05
+5.6 0 4.19932e-05 1.11875e-05
+6.4 0 4.19932e-05 1.11875e-05
+7.2 0 4.19932e-05 1.11875e-05
+8 0 4.19932e-05 1.11875e-05
+9.6 0 4.19932e-05 1.11875e-05
+12.8 0 4.19932e-05 1.11875e-05
+16 0 4.19932e-05 1.11875e-05
+19.2 0 4.19932e-05 1.11875e-05
+END DIST
+
+Metal 6 OVER 2
+DIST count 12 width 1.6
+1.6 0 4.19932e-05 1.11875e-05
+3.2 0 4.19932e-05 1.11875e-05
+4 0 4.19932e-05 1.11875e-05
+4.8 0 4.19932e-05 1.11875e-05
+5.6 0 4.19932e-05 1.11875e-05
+6.4 0 4.19932e-05 1.11875e-05
+7.2 0 4.19932e-05 1.11875e-05
+8 0 4.19932e-05 1.11875e-05
+9.6 0 4.19932e-05 1.11875e-05
+12.8 0 4.19932e-05 1.11875e-05
+16 0 4.19932e-05 1.11875e-05
+19.2 0 4.19932e-05 1.11875e-05
+END DIST
+
+Metal 6 OVER 3
+DIST count 12 width 1.6
+1.6 0 4.19932e-05 1.11875e-05
+3.2 0 4.19932e-05 1.11875e-05
+4 0 4.19932e-05 1.11875e-05
+4.8 0 4.19932e-05 1.11875e-05
+5.6 0 4.19932e-05 1.11875e-05
+6.4 0 4.19932e-05 1.11875e-05
+7.2 0 4.19932e-05 1.11875e-05
+8 0 4.19932e-05 1.11875e-05
+9.6 0 4.19932e-05 1.11875e-05
+12.8 0 4.19932e-05 1.11875e-05
+16 0 4.19932e-05 1.11875e-05
+19.2 0 4.19932e-05 1.11875e-05
+END DIST
+
+Metal 6 OVER 4
+DIST count 12 width 1.6
+1.6 0 4.19932e-05 1.11875e-05
+3.2 0 4.19932e-05 1.11875e-05
+4 0 4.19932e-05 1.11875e-05
+4.8 0 4.19932e-05 1.11875e-05
+5.6 0 4.19932e-05 1.11875e-05
+6.4 0 4.19932e-05 1.11875e-05
+7.2 0 4.19932e-05 1.11875e-05
+8 0 4.19932e-05 1.11875e-05
+9.6 0 4.19932e-05 1.11875e-05
+12.8 0 4.19932e-05 1.11875e-05
+16 0 4.19932e-05 1.11875e-05
+19.2 0 4.19932e-05 1.11875e-05
+END DIST
+
+Metal 6 OVER 5
+DIST count 12 width 1.6
+1.6 0 4.19932e-05 1.11875e-05
+3.2 0 4.19932e-05 1.11875e-05
+4 0 4.19932e-05 1.11875e-05
+4.8 0 4.19932e-05 1.11875e-05
+5.6 0 4.19932e-05 1.11875e-05
+6.4 0 4.19932e-05 1.11875e-05
+7.2 0 4.19932e-05 1.11875e-05
+8 0 4.19932e-05 1.11875e-05
+9.6 0 4.19932e-05 1.11875e-05
+12.8 0 4.19932e-05 1.11875e-05
+16 0 4.19932e-05 1.11875e-05
+19.2 0 4.19932e-05 1.11875e-05
+END DIST
+
+Metal 6 UNDER
+WIDTH Table 0 entries:
+
+Metal 6 DIAGUNDER
+WIDTH Table 0 entries:
+END DensityModel 0
diff --git a/sky130/openlane/rules.openrcx.sky130B.min.spef_extractor b/sky130/openlane/rules.openrcx.sky130B.min.spef_extractor
new file mode 100644
index 0000000..8335f7e
--- /dev/null
+++ b/sky130/openlane/rules.openrcx.sky130B.min.spef_extractor
@@ -0,0 +1,1645 @@
+Extraction Rules for OpenRCX
+
+DIAGMODEL ON
+
+LayerCount 6
+DensityRate 1 0
+
+DensityModel 0
+
+Metal 1 RESOVER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 RESOVER 0
+DIST count 55 width 0.17
+0 0 0 0.0541176
+0 0.29 0 0.0541176
+0 0.46 0 0.0541176
+0 0.665 0 0.0541176
+0 0.75 0 0.0541176
+0 0.92 0 0.0541176
+0 1.125 0 0.0541176
+0 1.21 0 0.0541176
+0 1.38 0 0.0541176
+0 1.84 0 0.0541176
+0.29 0.29 0 0.0541176
+0.29 0.46 0 0.0541176
+0.29 0.665 0 0.0541176
+0.29 0.75 0 0.0541176
+0.29 0.92 0 0.0541176
+0.29 1.125 0 0.0541176
+0.29 1.21 0 0.0541176
+0.29 1.38 0 0.0541176
+0.29 1.84 0 0.0541176
+0.46 0.46 0 0.0541176
+0.46 0.665 0 0.0541176
+0.46 0.75 0 0.0541176
+0.46 0.92 0 0.0541176
+0.46 1.125 0 0.0541176
+0.46 1.21 0 0.0541176
+0.46 1.38 0 0.0541176
+0.46 1.84 0 0.0541176
+0.665 0.665 0 0.0541176
+0.665 0.75 0 0.0541176
+0.665 0.92 0 0.0541176
+0.665 1.125 0 0.0541176
+0.665 1.21 0 0.0541176
+0.665 1.38 0 0.0541176
+0.665 1.84 0 0.0541176
+0.75 0.75 0 0.0541176
+0.75 0.92 0 0.0541176
+0.75 1.125 0 0.0541176
+0.75 1.21 0 0.0541176
+0.75 1.38 0 0.0541176
+0.75 1.84 0 0.0541176
+0.92 0.92 0 0.0541176
+0.92 1.125 0 0.0541176
+0.92 1.21 0 0.0541176
+0.92 1.38 0 0.0541176
+0.92 1.84 0 0.0541176
+1.125 1.125 0 0.0541176
+1.125 1.21 0 0.0541176
+1.125 1.38 0 0.0541176
+1.125 1.84 0 0.0541176
+1.21 1.21 0 0.0541176
+1.21 1.38 0 0.0541176
+1.21 1.84 0 0.0541176
+1.38 1.38 0 0.0541176
+1.38 1.84 0 0.0541176
+1.84 0 1.84 0.0541176
+END DIST
+
+Metal 1 OVER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 OVER 0
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0270588
+0.34 0 4.42519e-05 0.0270588
+0.425 0 4.42519e-05 0.0270588
+0.51 0 4.42519e-05 0.0270588
+0.595 0 4.42519e-05 0.0270588
+0.68 0 4.42519e-05 0.0270588
+0.765 0 4.42519e-05 0.0270588
+0.85 0 4.42519e-05 0.0270588
+1.02 0 4.42519e-05 0.0270588
+1.36 0 4.42519e-05 0.0270588
+1.7 0 4.42519e-05 0.0270588
+2.04 0 4.42519e-05 0.0270588
+END DIST
+
+Metal 1 UNDER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 UNDER 2
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0270588
+0.34 0 4.42519e-05 0.0270588
+0.425 0 4.42519e-05 0.0270588
+0.51 0 4.42519e-05 0.0270588
+0.595 0 4.42519e-05 0.0270588
+0.68 0 4.42519e-05 0.0270588
+0.765 0 4.42519e-05 0.0270588
+0.85 0 4.42519e-05 0.0270588
+1.02 0 4.42519e-05 0.0270588
+1.36 0 4.42519e-05 0.0270588
+1.7 0 4.42519e-05 0.0270588
+2.04 0 4.42519e-05 0.0270588
+END DIST
+
+Metal 1 UNDER 3
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0270588
+0.34 0 4.42519e-05 0.0270588
+0.425 0 4.42519e-05 0.0270588
+0.51 0 4.42519e-05 0.0270588
+0.595 0 4.42519e-05 0.0270588
+0.68 0 4.42519e-05 0.0270588
+0.765 0 4.42519e-05 0.0270588
+0.85 0 4.42519e-05 0.0270588
+1.02 0 4.42519e-05 0.0270588
+1.36 0 4.42519e-05 0.0270588
+1.7 0 4.42519e-05 0.0270588
+2.04 0 4.42519e-05 0.0270588
+END DIST
+
+Metal 1 UNDER 4
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0270588
+0.34 0 4.42519e-05 0.0270588
+0.425 0 4.42519e-05 0.0270588
+0.51 0 4.42519e-05 0.0270588
+0.595 0 4.42519e-05 0.0270588
+0.68 0 4.42519e-05 0.0270588
+0.765 0 4.42519e-05 0.0270588
+0.85 0 4.42519e-05 0.0270588
+1.02 0 4.42519e-05 0.0270588
+1.36 0 4.42519e-05 0.0270588
+1.7 0 4.42519e-05 0.0270588
+2.04 0 4.42519e-05 0.0270588
+END DIST
+
+Metal 1 UNDER 5
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0270588
+0.34 0 4.42519e-05 0.0270588
+0.425 0 4.42519e-05 0.0270588
+0.51 0 4.42519e-05 0.0270588
+0.595 0 4.42519e-05 0.0270588
+0.68 0 4.42519e-05 0.0270588
+0.765 0 4.42519e-05 0.0270588
+0.85 0 4.42519e-05 0.0270588
+1.02 0 4.42519e-05 0.0270588
+1.36 0 4.42519e-05 0.0270588
+1.7 0 4.42519e-05 0.0270588
+2.04 0 4.42519e-05 0.0270588
+END DIST
+
+Metal 1 UNDER 6
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0270588
+0.34 0 4.42519e-05 0.0270588
+0.425 0 4.42519e-05 0.0270588
+0.51 0 4.42519e-05 0.0270588
+0.595 0 4.42519e-05 0.0270588
+0.68 0 4.42519e-05 0.0270588
+0.765 0 4.42519e-05 0.0270588
+0.85 0 4.42519e-05 0.0270588
+1.02 0 4.42519e-05 0.0270588
+1.36 0 4.42519e-05 0.0270588
+1.7 0 4.42519e-05 0.0270588
+2.04 0 4.42519e-05 0.0270588
+END DIST
+
+Metal 1 DIAGUNDER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 DIAGUNDER 2
+DIST count 13 width 0.17
+0 0 0 0.0270588
+0.17 0 0 0.0270588
+0.34 0 0 0.0270588
+0.425 0 0 0.0270588
+0.51 0 0 0.0270588
+0.595 0 0 0.0270588
+0.68 0 0 0.0270588
+0.765 0 0 0.0270588
+0.85 0 0 0.0270588
+1.02 0 0 0.0270588
+1.36 0 0 0.0270588
+1.7 0 0 0.0270588
+2.04 0 0 0.0270588
+END DIST
+
+Metal 1 DIAGUNDER 3
+DIST count 13 width 0.17
+0 0 0 0.0270588
+0.17 0 0 0.0270588
+0.34 0 0 0.0270588
+0.425 0 0 0.0270588
+0.51 0 0 0.0270588
+0.595 0 0 0.0270588
+0.68 0 0 0.0270588
+0.765 0 0 0.0270588
+0.85 0 0 0.0270588
+1.02 0 0 0.0270588
+1.36 0 0 0.0270588
+1.7 0 0 0.0270588
+2.04 0 0 0.0270588
+END DIST
+
+Metal 1 DIAGUNDER 4
+DIST count 13 width 0.17
+0 0 0 0.0270588
+0.17 0 0 0.0270588
+0.34 0 0 0.0270588
+0.425 0 0 0.0270588
+0.51 0 0 0.0270588
+0.595 0 0 0.0270588
+0.68 0 0 0.0270588
+0.765 0 0 0.0270588
+0.85 0 0 0.0270588
+1.02 0 0 0.0270588
+1.36 0 0 0.0270588
+1.7 0 0 0.0270588
+2.04 0 0 0.0270588
+END DIST
+
+Metal 1 DIAGUNDER 5
+DIST count 13 width 0.17
+0 0 0 0.0270588
+0.17 0 0 0.0270588
+0.34 0 0 0.0270588
+0.425 0 0 0.0270588
+0.51 0 0 0.0270588
+0.595 0 0 0.0270588
+0.68 0 0 0.0270588
+0.765 0 0 0.0270588
+0.85 0 0 0.0270588
+1.02 0 0 0.0270588
+1.36 0 0 0.0270588
+1.7 0 0 0.0270588
+2.04 0 0 0.0270588
+END DIST
+
+Metal 1 DIAGUNDER 6
+DIST count 0 width 0.17
+END DIST
+
+Metal 2 RESOVER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.00075
+0 0.2 0 0.00075
+0 0.34 0 0.00075
+0 0.47 0 0.00075
+0 0.54 0 0.00075
+0 0.68 0 0.00075
+0 0.81 0 0.00075
+0 0.88 0 0.00075
+0 1.02 0 0.00075
+0 1.36 0 0.00075
+0.2 0.2 0 0.00075
+0.2 0.34 0 0.00075
+0.2 0.47 0 0.00075
+0.2 0.54 0 0.00075
+0.2 0.68 0 0.00075
+0.2 0.81 0 0.00075
+0.2 0.88 0 0.00075
+0.2 1.02 0 0.00075
+0.2 1.36 0 0.00075
+0.34 0.34 0 0.00075
+0.34 0.47 0 0.00075
+0.34 0.54 0 0.00075
+0.34 0.68 0 0.00075
+0.34 0.81 0 0.00075
+0.34 0.88 0 0.00075
+0.34 1.02 0 0.00075
+0.34 1.36 0 0.00075
+0.47 0.47 0 0.00075
+0.47 0.54 0 0.00075
+0.47 0.68 0 0.00075
+0.47 0.81 0 0.00075
+0.47 0.88 0 0.00075
+0.47 1.02 0 0.00075
+0.47 1.36 0 0.00075
+0.54 0.54 0 0.00075
+0.54 0.68 0 0.00075
+0.54 0.81 0 0.00075
+0.54 0.88 0 0.00075
+0.54 1.02 0 0.00075
+0.54 1.36 0 0.00075
+0.68 0.68 0 0.00075
+0.68 0.81 0 0.00075
+0.68 0.88 0 0.00075
+0.68 1.02 0 0.00075
+0.68 1.36 0 0.00075
+0.81 0.81 0 0.00075
+0.81 0.88 0 0.00075
+0.81 1.02 0 0.00075
+0.81 1.36 0 0.00075
+0.88 0.88 0 0.00075
+0.88 1.02 0 0.00075
+0.88 1.36 0 0.00075
+1.02 1.02 0 0.00075
+1.02 1.36 0 0.00075
+1.36 0 1.36 0.00075
+END DIST
+
+Metal 2 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 2 OVER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 OVER 0
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000375
+0.28 0 4.27813e-05 0.000375
+0.35 0 4.27813e-05 0.000375
+0.42 0 4.27813e-05 0.000375
+0.49 0 4.27813e-05 0.000375
+0.56 0 4.27813e-05 0.000375
+0.63 0 4.27813e-05 0.000375
+0.7 0 4.27813e-05 0.000375
+0.84 0 4.27813e-05 0.000375
+1.12 0 4.27813e-05 0.000375
+1.4 0 4.27813e-05 0.000375
+1.68 0 4.27813e-05 0.000375
+END DIST
+
+Metal 2 OVER 1
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000375
+0.28 0 4.27813e-05 0.000375
+0.35 0 4.27813e-05 0.000375
+0.42 0 4.27813e-05 0.000375
+0.49 0 4.27813e-05 0.000375
+0.56 0 4.27813e-05 0.000375
+0.63 0 4.27813e-05 0.000375
+0.7 0 4.27813e-05 0.000375
+0.84 0 4.27813e-05 0.000375
+1.12 0 4.27813e-05 0.000375
+1.4 0 4.27813e-05 0.000375
+1.68 0 4.27813e-05 0.000375
+END DIST
+
+Metal 2 UNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 UNDER 3
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000375
+0.28 0 4.27813e-05 0.000375
+0.35 0 4.27813e-05 0.000375
+0.42 0 4.27813e-05 0.000375
+0.49 0 4.27813e-05 0.000375
+0.56 0 4.27813e-05 0.000375
+0.63 0 4.27813e-05 0.000375
+0.7 0 4.27813e-05 0.000375
+0.84 0 4.27813e-05 0.000375
+1.12 0 4.27813e-05 0.000375
+1.4 0 4.27813e-05 0.000375
+1.68 0 4.27813e-05 0.000375
+END DIST
+
+Metal 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000375
+0.28 0 4.27813e-05 0.000375
+0.35 0 4.27813e-05 0.000375
+0.42 0 4.27813e-05 0.000375
+0.49 0 4.27813e-05 0.000375
+0.56 0 4.27813e-05 0.000375
+0.63 0 4.27813e-05 0.000375
+0.7 0 4.27813e-05 0.000375
+0.84 0 4.27813e-05 0.000375
+1.12 0 4.27813e-05 0.000375
+1.4 0 4.27813e-05 0.000375
+1.68 0 4.27813e-05 0.000375
+END DIST
+
+Metal 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000375
+0.28 0 4.27813e-05 0.000375
+0.35 0 4.27813e-05 0.000375
+0.42 0 4.27813e-05 0.000375
+0.49 0 4.27813e-05 0.000375
+0.56 0 4.27813e-05 0.000375
+0.63 0 4.27813e-05 0.000375
+0.7 0 4.27813e-05 0.000375
+0.84 0 4.27813e-05 0.000375
+1.12 0 4.27813e-05 0.000375
+1.4 0 4.27813e-05 0.000375
+1.68 0 4.27813e-05 0.000375
+END DIST
+
+Metal 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000375
+0.28 0 4.27813e-05 0.000375
+0.35 0 4.27813e-05 0.000375
+0.42 0 4.27813e-05 0.000375
+0.49 0 4.27813e-05 0.000375
+0.56 0 4.27813e-05 0.000375
+0.63 0 4.27813e-05 0.000375
+0.7 0 4.27813e-05 0.000375
+0.84 0 4.27813e-05 0.000375
+1.12 0 4.27813e-05 0.000375
+1.4 0 4.27813e-05 0.000375
+1.68 0 4.27813e-05 0.000375
+END DIST
+
+Metal 2 DIAGUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 DIAGUNDER 3
+DIST count 13 width 0.14
+0 0 0 0.000375
+0.14 0 0 0.000375
+0.28 0 0 0.000375
+0.35 0 0 0.000375
+0.42 0 0 0.000375
+0.49 0 0 0.000375
+0.56 0 0 0.000375
+0.63 0 0 0.000375
+0.7 0 0 0.000375
+0.84 0 0 0.000375
+1.12 0 0 0.000375
+1.4 0 0 0.000375
+1.68 0 0 0.000375
+END DIST
+
+Metal 2 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 0 0.000375
+0.14 0 0 0.000375
+0.28 0 0 0.000375
+0.35 0 0 0.000375
+0.42 0 0 0.000375
+0.49 0 0 0.000375
+0.56 0 0 0.000375
+0.63 0 0 0.000375
+0.7 0 0 0.000375
+0.84 0 0 0.000375
+1.12 0 0 0.000375
+1.4 0 0 0.000375
+1.68 0 0 0.000375
+END DIST
+
+Metal 2 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 0 0.000375
+0.14 0 0 0.000375
+0.28 0 0 0.000375
+0.35 0 0 0.000375
+0.42 0 0 0.000375
+0.49 0 0 0.000375
+0.56 0 0 0.000375
+0.63 0 0 0.000375
+0.7 0 0 0.000375
+0.84 0 0 0.000375
+1.12 0 0 0.000375
+1.4 0 0 0.000375
+1.68 0 0 0.000375
+END DIST
+
+Metal 2 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 0 0.000375
+0.14 0 0 0.000375
+0.28 0 0 0.000375
+0.35 0 0 0.000375
+0.42 0 0 0.000375
+0.49 0 0 0.000375
+0.56 0 0 0.000375
+0.63 0 0 0.000375
+0.7 0 0 0.000375
+0.84 0 0 0.000375
+1.12 0 0 0.000375
+1.4 0 0 0.000375
+1.68 0 0 0.000375
+END DIST
+
+Metal 2 OVERUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 OVER 1 UNDER 3
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000375
+0.28 0 4.27813e-05 0.000375
+0.35 0 4.27813e-05 0.000375
+0.42 0 4.27813e-05 0.000375
+0.49 0 4.27813e-05 0.000375
+0.56 0 4.27813e-05 0.000375
+0.63 0 4.27813e-05 0.000375
+0.7 0 4.27813e-05 0.000375
+0.84 0 4.27813e-05 0.000375
+1.12 0 4.27813e-05 0.000375
+1.4 0 4.27813e-05 0.000375
+1.68 0 4.27813e-05 0.000375
+END DIST
+
+Metal 2 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000375
+0.28 0 4.27813e-05 0.000375
+0.35 0 4.27813e-05 0.000375
+0.42 0 4.27813e-05 0.000375
+0.49 0 4.27813e-05 0.000375
+0.56 0 4.27813e-05 0.000375
+0.63 0 4.27813e-05 0.000375
+0.7 0 4.27813e-05 0.000375
+0.84 0 4.27813e-05 0.000375
+1.12 0 4.27813e-05 0.000375
+1.4 0 4.27813e-05 0.000375
+1.68 0 4.27813e-05 0.000375
+END DIST
+
+Metal 2 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000375
+0.28 0 4.27813e-05 0.000375
+0.35 0 4.27813e-05 0.000375
+0.42 0 4.27813e-05 0.000375
+0.49 0 4.27813e-05 0.000375
+0.56 0 4.27813e-05 0.000375
+0.63 0 4.27813e-05 0.000375
+0.7 0 4.27813e-05 0.000375
+0.84 0 4.27813e-05 0.000375
+1.12 0 4.27813e-05 0.000375
+1.4 0 4.27813e-05 0.000375
+1.68 0 4.27813e-05 0.000375
+END DIST
+
+Metal 2 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000375
+0.28 0 4.27813e-05 0.000375
+0.35 0 4.27813e-05 0.000375
+0.42 0 4.27813e-05 0.000375
+0.49 0 4.27813e-05 0.000375
+0.56 0 4.27813e-05 0.000375
+0.63 0 4.27813e-05 0.000375
+0.7 0 4.27813e-05 0.000375
+0.84 0 4.27813e-05 0.000375
+1.12 0 4.27813e-05 0.000375
+1.4 0 4.27813e-05 0.000375
+1.68 0 4.27813e-05 0.000375
+END DIST
+
+Metal 3 RESOVER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.00075
+0 0.32 0 0.00075
+0 0.46 0 0.00075
+0 0.71 0 0.00075
+0 0.78 0 0.00075
+0 0.92 0 0.00075
+0 1.17 0 0.00075
+0 1.24 0 0.00075
+0 1.38 0 0.00075
+0 1.84 0 0.00075
+0.32 0.32 0 0.00075
+0.32 0.46 0 0.00075
+0.32 0.71 0 0.00075
+0.32 0.78 0 0.00075
+0.32 0.92 0 0.00075
+0.32 1.17 0 0.00075
+0.32 1.24 0 0.00075
+0.32 1.38 0 0.00075
+0.32 1.84 0 0.00075
+0.46 0.46 0 0.00075
+0.46 0.71 0 0.00075
+0.46 0.78 0 0.00075
+0.46 0.92 0 0.00075
+0.46 1.17 0 0.00075
+0.46 1.24 0 0.00075
+0.46 1.38 0 0.00075
+0.46 1.84 0 0.00075
+0.71 0.71 0 0.00075
+0.71 0.78 0 0.00075
+0.71 0.92 0 0.00075
+0.71 1.17 0 0.00075
+0.71 1.24 0 0.00075
+0.71 1.38 0 0.00075
+0.71 1.84 0 0.00075
+0.78 0.78 0 0.00075
+0.78 0.92 0 0.00075
+0.78 1.17 0 0.00075
+0.78 1.24 0 0.00075
+0.78 1.38 0 0.00075
+0.78 1.84 0 0.00075
+0.92 0.92 0 0.00075
+0.92 1.17 0 0.00075
+0.92 1.24 0 0.00075
+0.92 1.38 0 0.00075
+0.92 1.84 0 0.00075
+1.17 1.17 0 0.00075
+1.17 1.24 0 0.00075
+1.17 1.38 0 0.00075
+1.17 1.84 0 0.00075
+1.24 1.24 0 0.00075
+1.24 1.38 0 0.00075
+1.24 1.84 0 0.00075
+1.38 1.38 0 0.00075
+1.38 1.84 0 0.00075
+1.84 0 1.84 0.00075
+END DIST
+
+Metal 3 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 RESOVER 2
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 OVER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 OVER 0
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000375
+0.28 0 3.42844e-05 0.000375
+0.35 0 3.42844e-05 0.000375
+0.42 0 3.42844e-05 0.000375
+0.49 0 3.42844e-05 0.000375
+0.56 0 3.42844e-05 0.000375
+0.63 0 3.42844e-05 0.000375
+0.7 0 3.42844e-05 0.000375
+0.84 0 3.42844e-05 0.000375
+1.12 0 3.42844e-05 0.000375
+1.4 0 3.42844e-05 0.000375
+1.68 0 3.42844e-05 0.000375
+END DIST
+
+Metal 3 OVER 1
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000375
+0.28 0 3.42844e-05 0.000375
+0.35 0 3.42844e-05 0.000375
+0.42 0 3.42844e-05 0.000375
+0.49 0 3.42844e-05 0.000375
+0.56 0 3.42844e-05 0.000375
+0.63 0 3.42844e-05 0.000375
+0.7 0 3.42844e-05 0.000375
+0.84 0 3.42844e-05 0.000375
+1.12 0 3.42844e-05 0.000375
+1.4 0 3.42844e-05 0.000375
+1.68 0 3.42844e-05 0.000375
+END DIST
+
+Metal 3 OVER 2
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000375
+0.28 0 3.42844e-05 0.000375
+0.35 0 3.42844e-05 0.000375
+0.42 0 3.42844e-05 0.000375
+0.49 0 3.42844e-05 0.000375
+0.56 0 3.42844e-05 0.000375
+0.63 0 3.42844e-05 0.000375
+0.7 0 3.42844e-05 0.000375
+0.84 0 3.42844e-05 0.000375
+1.12 0 3.42844e-05 0.000375
+1.4 0 3.42844e-05 0.000375
+1.68 0 3.42844e-05 0.000375
+END DIST
+
+Metal 3 UNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 UNDER 4
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000375
+0.28 0 3.42844e-05 0.000375
+0.35 0 3.42844e-05 0.000375
+0.42 0 3.42844e-05 0.000375
+0.49 0 3.42844e-05 0.000375
+0.56 0 3.42844e-05 0.000375
+0.63 0 3.42844e-05 0.000375
+0.7 0 3.42844e-05 0.000375
+0.84 0 3.42844e-05 0.000375
+1.12 0 3.42844e-05 0.000375
+1.4 0 3.42844e-05 0.000375
+1.68 0 3.42844e-05 0.000375
+END DIST
+
+Metal 3 UNDER 5
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000375
+0.28 0 3.42844e-05 0.000375
+0.35 0 3.42844e-05 0.000375
+0.42 0 3.42844e-05 0.000375
+0.49 0 3.42844e-05 0.000375
+0.56 0 3.42844e-05 0.000375
+0.63 0 3.42844e-05 0.000375
+0.7 0 3.42844e-05 0.000375
+0.84 0 3.42844e-05 0.000375
+1.12 0 3.42844e-05 0.000375
+1.4 0 3.42844e-05 0.000375
+1.68 0 3.42844e-05 0.000375
+END DIST
+
+Metal 3 UNDER 6
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000375
+0.28 0 3.42844e-05 0.000375
+0.35 0 3.42844e-05 0.000375
+0.42 0 3.42844e-05 0.000375
+0.49 0 3.42844e-05 0.000375
+0.56 0 3.42844e-05 0.000375
+0.63 0 3.42844e-05 0.000375
+0.7 0 3.42844e-05 0.000375
+0.84 0 3.42844e-05 0.000375
+1.12 0 3.42844e-05 0.000375
+1.4 0 3.42844e-05 0.000375
+1.68 0 3.42844e-05 0.000375
+END DIST
+
+Metal 3 DIAGUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 0 0.000375
+0.14 0 0 0.000375
+0.28 0 0 0.000375
+0.35 0 0 0.000375
+0.42 0 0 0.000375
+0.49 0 0 0.000375
+0.56 0 0 0.000375
+0.63 0 0 0.000375
+0.7 0 0 0.000375
+0.84 0 0 0.000375
+1.12 0 0 0.000375
+1.4 0 0 0.000375
+1.68 0 0 0.000375
+END DIST
+
+Metal 3 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 0 0.000375
+0.14 0 0 0.000375
+0.28 0 0 0.000375
+0.35 0 0 0.000375
+0.42 0 0 0.000375
+0.49 0 0 0.000375
+0.56 0 0 0.000375
+0.63 0 0 0.000375
+0.7 0 0 0.000375
+0.84 0 0 0.000375
+1.12 0 0 0.000375
+1.4 0 0 0.000375
+1.68 0 0 0.000375
+END DIST
+
+Metal 3 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 0 0.000375
+0.14 0 0 0.000375
+0.28 0 0 0.000375
+0.35 0 0 0.000375
+0.42 0 0 0.000375
+0.49 0 0 0.000375
+0.56 0 0 0.000375
+0.63 0 0 0.000375
+0.7 0 0 0.000375
+0.84 0 0 0.000375
+1.12 0 0 0.000375
+1.4 0 0 0.000375
+1.68 0 0 0.000375
+END DIST
+
+Metal 3 OVERUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000375
+0.28 0 3.42844e-05 0.000375
+0.35 0 3.42844e-05 0.000375
+0.42 0 3.42844e-05 0.000375
+0.49 0 3.42844e-05 0.000375
+0.56 0 3.42844e-05 0.000375
+0.63 0 3.42844e-05 0.000375
+0.7 0 3.42844e-05 0.000375
+0.84 0 3.42844e-05 0.000375
+1.12 0 3.42844e-05 0.000375
+1.4 0 3.42844e-05 0.000375
+1.68 0 3.42844e-05 0.000375
+END DIST
+
+Metal 3 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000375
+0.28 0 3.42844e-05 0.000375
+0.35 0 3.42844e-05 0.000375
+0.42 0 3.42844e-05 0.000375
+0.49 0 3.42844e-05 0.000375
+0.56 0 3.42844e-05 0.000375
+0.63 0 3.42844e-05 0.000375
+0.7 0 3.42844e-05 0.000375
+0.84 0 3.42844e-05 0.000375
+1.12 0 3.42844e-05 0.000375
+1.4 0 3.42844e-05 0.000375
+1.68 0 3.42844e-05 0.000375
+END DIST
+
+Metal 3 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000375
+0.28 0 3.42844e-05 0.000375
+0.35 0 3.42844e-05 0.000375
+0.42 0 3.42844e-05 0.000375
+0.49 0 3.42844e-05 0.000375
+0.56 0 3.42844e-05 0.000375
+0.63 0 3.42844e-05 0.000375
+0.7 0 3.42844e-05 0.000375
+0.84 0 3.42844e-05 0.000375
+1.12 0 3.42844e-05 0.000375
+1.4 0 3.42844e-05 0.000375
+1.68 0 3.42844e-05 0.000375
+END DIST
+
+Metal 3 OVER 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000375
+0.28 0 3.42844e-05 0.000375
+0.35 0 3.42844e-05 0.000375
+0.42 0 3.42844e-05 0.000375
+0.49 0 3.42844e-05 0.000375
+0.56 0 3.42844e-05 0.000375
+0.63 0 3.42844e-05 0.000375
+0.7 0 3.42844e-05 0.000375
+0.84 0 3.42844e-05 0.000375
+1.12 0 3.42844e-05 0.000375
+1.4 0 3.42844e-05 0.000375
+1.68 0 3.42844e-05 0.000375
+END DIST
+
+Metal 3 OVER 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000375
+0.28 0 3.42844e-05 0.000375
+0.35 0 3.42844e-05 0.000375
+0.42 0 3.42844e-05 0.000375
+0.49 0 3.42844e-05 0.000375
+0.56 0 3.42844e-05 0.000375
+0.63 0 3.42844e-05 0.000375
+0.7 0 3.42844e-05 0.000375
+0.84 0 3.42844e-05 0.000375
+1.12 0 3.42844e-05 0.000375
+1.4 0 3.42844e-05 0.000375
+1.68 0 3.42844e-05 0.000375
+END DIST
+
+Metal 3 OVER 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000375
+0.28 0 3.42844e-05 0.000375
+0.35 0 3.42844e-05 0.000375
+0.42 0 3.42844e-05 0.000375
+0.49 0 3.42844e-05 0.000375
+0.56 0 3.42844e-05 0.000375
+0.63 0 3.42844e-05 0.000375
+0.7 0 3.42844e-05 0.000375
+0.84 0 3.42844e-05 0.000375
+1.12 0 3.42844e-05 0.000375
+1.4 0 3.42844e-05 0.000375
+1.68 0 3.42844e-05 0.000375
+END DIST
+
+Metal 4 RESOVER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000126667
+0 0.38 0 0.000126667
+0 0.68 0 0.000126667
+0 0.91 0 0.000126667
+0 1.06 0 0.000126667
+0 1.36 0 0.000126667
+0 1.59 0 0.000126667
+0 1.74 0 0.000126667
+0 2.04 0 0.000126667
+0 2.72 0 0.000126667
+0.38 0.38 0 0.000126667
+0.38 0.68 0 0.000126667
+0.38 0.91 0 0.000126667
+0.38 1.06 0 0.000126667
+0.38 1.36 0 0.000126667
+0.38 1.59 0 0.000126667
+0.38 1.74 0 0.000126667
+0.38 2.04 0 0.000126667
+0.38 2.72 0 0.000126667
+0.68 0.68 0 0.000126667
+0.68 0.91 0 0.000126667
+0.68 1.06 0 0.000126667
+0.68 1.36 0 0.000126667
+0.68 1.59 0 0.000126667
+0.68 1.74 0 0.000126667
+0.68 2.04 0 0.000126667
+0.68 2.72 0 0.000126667
+0.91 0.91 0 0.000126667
+0.91 1.06 0 0.000126667
+0.91 1.36 0 0.000126667
+0.91 1.59 0 0.000126667
+0.91 1.74 0 0.000126667
+0.91 2.04 0 0.000126667
+0.91 2.72 0 0.000126667
+1.06 1.06 0 0.000126667
+1.06 1.36 0 0.000126667
+1.06 1.59 0 0.000126667
+1.06 1.74 0 0.000126667
+1.06 2.04 0 0.000126667
+1.06 2.72 0 0.000126667
+1.36 1.36 0 0.000126667
+1.36 1.59 0 0.000126667
+1.36 1.74 0 0.000126667
+1.36 2.04 0 0.000126667
+1.36 2.72 0 0.000126667
+1.59 1.59 0 0.000126667
+1.59 1.74 0 0.000126667
+1.59 2.04 0 0.000126667
+1.59 2.72 0 0.000126667
+1.74 1.74 0 0.000126667
+1.74 2.04 0 0.000126667
+1.74 2.72 0 0.000126667
+2.04 2.04 0 0.000126667
+2.04 2.72 0 0.000126667
+2.72 0 2.72 0.000126667
+END DIST
+
+Metal 4 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 OVER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 OVER 0
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 6.33333e-05
+0.6 0 3.91176e-05 6.33333e-05
+0.75 0 3.91176e-05 6.33333e-05
+0.9 0 3.91176e-05 6.33333e-05
+1.05 0 3.91176e-05 6.33333e-05
+1.2 0 3.91176e-05 6.33333e-05
+1.35 0 3.91176e-05 6.33333e-05
+1.5 0 3.91176e-05 6.33333e-05
+1.8 0 3.91176e-05 6.33333e-05
+2.4 0 3.91176e-05 6.33333e-05
+3 0 3.91176e-05 6.33333e-05
+3.6 0 3.91176e-05 6.33333e-05
+END DIST
+
+Metal 4 OVER 1
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 6.33333e-05
+0.6 0 3.91176e-05 6.33333e-05
+0.75 0 3.91176e-05 6.33333e-05
+0.9 0 3.91176e-05 6.33333e-05
+1.05 0 3.91176e-05 6.33333e-05
+1.2 0 3.91176e-05 6.33333e-05
+1.35 0 3.91176e-05 6.33333e-05
+1.5 0 3.91176e-05 6.33333e-05
+1.8 0 3.91176e-05 6.33333e-05
+2.4 0 3.91176e-05 6.33333e-05
+3 0 3.91176e-05 6.33333e-05
+3.6 0 3.91176e-05 6.33333e-05
+END DIST
+
+Metal 4 OVER 2
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 6.33333e-05
+0.6 0 3.91176e-05 6.33333e-05
+0.75 0 3.91176e-05 6.33333e-05
+0.9 0 3.91176e-05 6.33333e-05
+1.05 0 3.91176e-05 6.33333e-05
+1.2 0 3.91176e-05 6.33333e-05
+1.35 0 3.91176e-05 6.33333e-05
+1.5 0 3.91176e-05 6.33333e-05
+1.8 0 3.91176e-05 6.33333e-05
+2.4 0 3.91176e-05 6.33333e-05
+3 0 3.91176e-05 6.33333e-05
+3.6 0 3.91176e-05 6.33333e-05
+END DIST
+
+Metal 4 OVER 3
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 6.33333e-05
+0.6 0 3.91176e-05 6.33333e-05
+0.75 0 3.91176e-05 6.33333e-05
+0.9 0 3.91176e-05 6.33333e-05
+1.05 0 3.91176e-05 6.33333e-05
+1.2 0 3.91176e-05 6.33333e-05
+1.35 0 3.91176e-05 6.33333e-05
+1.5 0 3.91176e-05 6.33333e-05
+1.8 0 3.91176e-05 6.33333e-05
+2.4 0 3.91176e-05 6.33333e-05
+3 0 3.91176e-05 6.33333e-05
+3.6 0 3.91176e-05 6.33333e-05
+END DIST
+
+Metal 4 UNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 UNDER 5
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 6.33333e-05
+0.6 0 3.91176e-05 6.33333e-05
+0.75 0 3.91176e-05 6.33333e-05
+0.9 0 3.91176e-05 6.33333e-05
+1.05 0 3.91176e-05 6.33333e-05
+1.2 0 3.91176e-05 6.33333e-05
+1.35 0 3.91176e-05 6.33333e-05
+1.5 0 3.91176e-05 6.33333e-05
+1.8 0 3.91176e-05 6.33333e-05
+2.4 0 3.91176e-05 6.33333e-05
+3 0 3.91176e-05 6.33333e-05
+3.6 0 3.91176e-05 6.33333e-05
+END DIST
+
+Metal 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 6.33333e-05
+0.6 0 3.91176e-05 6.33333e-05
+0.75 0 3.91176e-05 6.33333e-05
+0.9 0 3.91176e-05 6.33333e-05
+1.05 0 3.91176e-05 6.33333e-05
+1.2 0 3.91176e-05 6.33333e-05
+1.35 0 3.91176e-05 6.33333e-05
+1.5 0 3.91176e-05 6.33333e-05
+1.8 0 3.91176e-05 6.33333e-05
+2.4 0 3.91176e-05 6.33333e-05
+3 0 3.91176e-05 6.33333e-05
+3.6 0 3.91176e-05 6.33333e-05
+END DIST
+
+Metal 4 DIAGUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 DIAGUNDER 5
+DIST count 13 width 0.3
+0 0 0 6.33333e-05
+0.3 0 0 6.33333e-05
+0.6 0 0 6.33333e-05
+0.75 0 0 6.33333e-05
+0.9 0 0 6.33333e-05
+1.05 0 0 6.33333e-05
+1.2 0 0 6.33333e-05
+1.35 0 0 6.33333e-05
+1.5 0 0 6.33333e-05
+1.8 0 0 6.33333e-05
+2.4 0 0 6.33333e-05
+3 0 0 6.33333e-05
+3.6 0 0 6.33333e-05
+END DIST
+
+Metal 4 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 0 6.33333e-05
+0.3 0 0 6.33333e-05
+0.6 0 0 6.33333e-05
+0.75 0 0 6.33333e-05
+0.9 0 0 6.33333e-05
+1.05 0 0 6.33333e-05
+1.2 0 0 6.33333e-05
+1.35 0 0 6.33333e-05
+1.5 0 0 6.33333e-05
+1.8 0 0 6.33333e-05
+2.4 0 0 6.33333e-05
+3 0 0 6.33333e-05
+3.6 0 0 6.33333e-05
+END DIST
+
+Metal 4 OVERUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 OVER 1 UNDER 5
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 6.33333e-05
+0.6 0 3.91176e-05 6.33333e-05
+0.75 0 3.91176e-05 6.33333e-05
+0.9 0 3.91176e-05 6.33333e-05
+1.05 0 3.91176e-05 6.33333e-05
+1.2 0 3.91176e-05 6.33333e-05
+1.35 0 3.91176e-05 6.33333e-05
+1.5 0 3.91176e-05 6.33333e-05
+1.8 0 3.91176e-05 6.33333e-05
+2.4 0 3.91176e-05 6.33333e-05
+3 0 3.91176e-05 6.33333e-05
+3.6 0 3.91176e-05 6.33333e-05
+END DIST
+
+Metal 4 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 6.33333e-05
+0.6 0 3.91176e-05 6.33333e-05
+0.75 0 3.91176e-05 6.33333e-05
+0.9 0 3.91176e-05 6.33333e-05
+1.05 0 3.91176e-05 6.33333e-05
+1.2 0 3.91176e-05 6.33333e-05
+1.35 0 3.91176e-05 6.33333e-05
+1.5 0 3.91176e-05 6.33333e-05
+1.8 0 3.91176e-05 6.33333e-05
+2.4 0 3.91176e-05 6.33333e-05
+3 0 3.91176e-05 6.33333e-05
+3.6 0 3.91176e-05 6.33333e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 5
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 6.33333e-05
+0.6 0 3.91176e-05 6.33333e-05
+0.75 0 3.91176e-05 6.33333e-05
+0.9 0 3.91176e-05 6.33333e-05
+1.05 0 3.91176e-05 6.33333e-05
+1.2 0 3.91176e-05 6.33333e-05
+1.35 0 3.91176e-05 6.33333e-05
+1.5 0 3.91176e-05 6.33333e-05
+1.8 0 3.91176e-05 6.33333e-05
+2.4 0 3.91176e-05 6.33333e-05
+3 0 3.91176e-05 6.33333e-05
+3.6 0 3.91176e-05 6.33333e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 6.33333e-05
+0.6 0 3.91176e-05 6.33333e-05
+0.75 0 3.91176e-05 6.33333e-05
+0.9 0 3.91176e-05 6.33333e-05
+1.05 0 3.91176e-05 6.33333e-05
+1.2 0 3.91176e-05 6.33333e-05
+1.35 0 3.91176e-05 6.33333e-05
+1.5 0 3.91176e-05 6.33333e-05
+1.8 0 3.91176e-05 6.33333e-05
+2.4 0 3.91176e-05 6.33333e-05
+3 0 3.91176e-05 6.33333e-05
+3.6 0 3.91176e-05 6.33333e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 5
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 6.33333e-05
+0.6 0 3.91176e-05 6.33333e-05
+0.75 0 3.91176e-05 6.33333e-05
+0.9 0 3.91176e-05 6.33333e-05
+1.05 0 3.91176e-05 6.33333e-05
+1.2 0 3.91176e-05 6.33333e-05
+1.35 0 3.91176e-05 6.33333e-05
+1.5 0 3.91176e-05 6.33333e-05
+1.8 0 3.91176e-05 6.33333e-05
+2.4 0 3.91176e-05 6.33333e-05
+3 0 3.91176e-05 6.33333e-05
+3.6 0 3.91176e-05 6.33333e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 6.33333e-05
+0.6 0 3.91176e-05 6.33333e-05
+0.75 0 3.91176e-05 6.33333e-05
+0.9 0 3.91176e-05 6.33333e-05
+1.05 0 3.91176e-05 6.33333e-05
+1.2 0 3.91176e-05 6.33333e-05
+1.35 0 3.91176e-05 6.33333e-05
+1.5 0 3.91176e-05 6.33333e-05
+1.8 0 3.91176e-05 6.33333e-05
+2.4 0 3.91176e-05 6.33333e-05
+3 0 3.91176e-05 6.33333e-05
+3.6 0 3.91176e-05 6.33333e-05
+END DIST
+
+Metal 5 RESOVER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000126667
+0 0.62 0 0.000126667
+0 0.92 0 0.000126667
+0 1.39 0 0.000126667
+0 1.54 0 0.000126667
+0 1.84 0 0.000126667
+0 2.31 0 0.000126667
+0 2.46 0 0.000126667
+0 2.76 0 0.000126667
+0 3.68 0 0.000126667
+0.62 0.62 0 0.000126667
+0.62 0.92 0 0.000126667
+0.62 1.39 0 0.000126667
+0.62 1.54 0 0.000126667
+0.62 1.84 0 0.000126667
+0.62 2.31 0 0.000126667
+0.62 2.46 0 0.000126667
+0.62 2.76 0 0.000126667
+0.62 3.68 0 0.000126667
+0.92 0.92 0 0.000126667
+0.92 1.39 0 0.000126667
+0.92 1.54 0 0.000126667
+0.92 1.84 0 0.000126667
+0.92 2.31 0 0.000126667
+0.92 2.46 0 0.000126667
+0.92 2.76 0 0.000126667
+0.92 3.68 0 0.000126667
+1.39 1.39 0 0.000126667
+1.39 1.54 0 0.000126667
+1.39 1.84 0 0.000126667
+1.39 2.31 0 0.000126667
+1.39 2.46 0 0.000126667
+1.39 2.76 0 0.000126667
+1.39 3.68 0 0.000126667
+1.54 1.54 0 0.000126667
+1.54 1.84 0 0.000126667
+1.54 2.31 0 0.000126667
+1.54 2.46 0 0.000126667
+1.54 2.76 0 0.000126667
+1.54 3.68 0 0.000126667
+1.84 1.84 0 0.000126667
+1.84 2.31 0 0.000126667
+1.84 2.46 0 0.000126667
+1.84 2.76 0 0.000126667
+1.84 3.68 0 0.000126667
+2.31 2.31 0 0.000126667
+2.31 2.46 0 0.000126667
+2.31 2.76 0 0.000126667
+2.31 3.68 0 0.000126667
+2.46 2.46 0 0.000126667
+2.46 2.76 0 0.000126667
+2.46 3.68 0 0.000126667
+2.76 2.76 0 0.000126667
+2.76 3.68 0 0.000126667
+3.68 0 3.68 0.000126667
+END DIST
+
+Metal 5 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 4
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 OVER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 OVER 0
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 6.33333e-05
+0.6 0 3.56902e-05 6.33333e-05
+0.75 0 3.56902e-05 6.33333e-05
+0.9 0 3.56902e-05 6.33333e-05
+1.05 0 3.56902e-05 6.33333e-05
+1.2 0 3.56902e-05 6.33333e-05
+1.35 0 3.56902e-05 6.33333e-05
+1.5 0 3.56902e-05 6.33333e-05
+1.8 0 3.56902e-05 6.33333e-05
+2.4 0 3.56902e-05 6.33333e-05
+3 0 3.56902e-05 6.33333e-05
+3.6 0 3.56902e-05 6.33333e-05
+END DIST
+
+Metal 5 OVER 1
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 6.33333e-05
+0.6 0 3.56902e-05 6.33333e-05
+0.75 0 3.56902e-05 6.33333e-05
+0.9 0 3.56902e-05 6.33333e-05
+1.05 0 3.56902e-05 6.33333e-05
+1.2 0 3.56902e-05 6.33333e-05
+1.35 0 3.56902e-05 6.33333e-05
+1.5 0 3.56902e-05 6.33333e-05
+1.8 0 3.56902e-05 6.33333e-05
+2.4 0 3.56902e-05 6.33333e-05
+3 0 3.56902e-05 6.33333e-05
+3.6 0 3.56902e-05 6.33333e-05
+END DIST
+
+Metal 5 OVER 2
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 6.33333e-05
+0.6 0 3.56902e-05 6.33333e-05
+0.75 0 3.56902e-05 6.33333e-05
+0.9 0 3.56902e-05 6.33333e-05
+1.05 0 3.56902e-05 6.33333e-05
+1.2 0 3.56902e-05 6.33333e-05
+1.35 0 3.56902e-05 6.33333e-05
+1.5 0 3.56902e-05 6.33333e-05
+1.8 0 3.56902e-05 6.33333e-05
+2.4 0 3.56902e-05 6.33333e-05
+3 0 3.56902e-05 6.33333e-05
+3.6 0 3.56902e-05 6.33333e-05
+END DIST
+
+Metal 5 OVER 3
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 6.33333e-05
+0.6 0 3.56902e-05 6.33333e-05
+0.75 0 3.56902e-05 6.33333e-05
+0.9 0 3.56902e-05 6.33333e-05
+1.05 0 3.56902e-05 6.33333e-05
+1.2 0 3.56902e-05 6.33333e-05
+1.35 0 3.56902e-05 6.33333e-05
+1.5 0 3.56902e-05 6.33333e-05
+1.8 0 3.56902e-05 6.33333e-05
+2.4 0 3.56902e-05 6.33333e-05
+3 0 3.56902e-05 6.33333e-05
+3.6 0 3.56902e-05 6.33333e-05
+END DIST
+
+Metal 5 OVER 4
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 6.33333e-05
+0.6 0 3.56902e-05 6.33333e-05
+0.75 0 3.56902e-05 6.33333e-05
+0.9 0 3.56902e-05 6.33333e-05
+1.05 0 3.56902e-05 6.33333e-05
+1.2 0 3.56902e-05 6.33333e-05
+1.35 0 3.56902e-05 6.33333e-05
+1.5 0 3.56902e-05 6.33333e-05
+1.8 0 3.56902e-05 6.33333e-05
+2.4 0 3.56902e-05 6.33333e-05
+3 0 3.56902e-05 6.33333e-05
+3.6 0 3.56902e-05 6.33333e-05
+END DIST
+
+Metal 5 UNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 6.33333e-05
+0.6 0 3.56902e-05 6.33333e-05
+0.75 0 3.56902e-05 6.33333e-05
+0.9 0 3.56902e-05 6.33333e-05
+1.05 0 3.56902e-05 6.33333e-05
+1.2 0 3.56902e-05 6.33333e-05
+1.35 0 3.56902e-05 6.33333e-05
+1.5 0 3.56902e-05 6.33333e-05
+1.8 0 3.56902e-05 6.33333e-05
+2.4 0 3.56902e-05 6.33333e-05
+3 0 3.56902e-05 6.33333e-05
+3.6 0 3.56902e-05 6.33333e-05
+END DIST
+
+Metal 5 DIAGUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 0 6.33333e-05
+0.3 0 0 6.33333e-05
+0.6 0 0 6.33333e-05
+0.75 0 0 6.33333e-05
+0.9 0 0 6.33333e-05
+1.05 0 0 6.33333e-05
+1.2 0 0 6.33333e-05
+1.35 0 0 6.33333e-05
+1.5 0 0 6.33333e-05
+1.8 0 0 6.33333e-05
+2.4 0 0 6.33333e-05
+3 0 0 6.33333e-05
+3.6 0 0 6.33333e-05
+END DIST
+
+Metal 5 OVERUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 6.33333e-05
+0.6 0 3.56902e-05 6.33333e-05
+0.75 0 3.56902e-05 6.33333e-05
+0.9 0 3.56902e-05 6.33333e-05
+1.05 0 3.56902e-05 6.33333e-05
+1.2 0 3.56902e-05 6.33333e-05
+1.35 0 3.56902e-05 6.33333e-05
+1.5 0 3.56902e-05 6.33333e-05
+1.8 0 3.56902e-05 6.33333e-05
+2.4 0 3.56902e-05 6.33333e-05
+3 0 3.56902e-05 6.33333e-05
+3.6 0 3.56902e-05 6.33333e-05
+END DIST
+
+Metal 5 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 6.33333e-05
+0.6 0 3.56902e-05 6.33333e-05
+0.75 0 3.56902e-05 6.33333e-05
+0.9 0 3.56902e-05 6.33333e-05
+1.05 0 3.56902e-05 6.33333e-05
+1.2 0 3.56902e-05 6.33333e-05
+1.35 0 3.56902e-05 6.33333e-05
+1.5 0 3.56902e-05 6.33333e-05
+1.8 0 3.56902e-05 6.33333e-05
+2.4 0 3.56902e-05 6.33333e-05
+3 0 3.56902e-05 6.33333e-05
+3.6 0 3.56902e-05 6.33333e-05
+END DIST
+
+Metal 5 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 6.33333e-05
+0.6 0 3.56902e-05 6.33333e-05
+0.75 0 3.56902e-05 6.33333e-05
+0.9 0 3.56902e-05 6.33333e-05
+1.05 0 3.56902e-05 6.33333e-05
+1.2 0 3.56902e-05 6.33333e-05
+1.35 0 3.56902e-05 6.33333e-05
+1.5 0 3.56902e-05 6.33333e-05
+1.8 0 3.56902e-05 6.33333e-05
+2.4 0 3.56902e-05 6.33333e-05
+3 0 3.56902e-05 6.33333e-05
+3.6 0 3.56902e-05 6.33333e-05
+END DIST
+
+Metal 5 OVER 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 6.33333e-05
+0.6 0 3.56902e-05 6.33333e-05
+0.75 0 3.56902e-05 6.33333e-05
+0.9 0 3.56902e-05 6.33333e-05
+1.05 0 3.56902e-05 6.33333e-05
+1.2 0 3.56902e-05 6.33333e-05
+1.35 0 3.56902e-05 6.33333e-05
+1.5 0 3.56902e-05 6.33333e-05
+1.8 0 3.56902e-05 6.33333e-05
+2.4 0 3.56902e-05 6.33333e-05
+3 0 3.56902e-05 6.33333e-05
+3.6 0 3.56902e-05 6.33333e-05
+END DIST
+
+Metal 6 RESOVER
+WIDTH Table 1 entries: 1.6
+
+Metal 6 RESOVER 0
+DIST count 55 width 1.6
+0 0 0 1.325e-05
+0 1.8 0 1.325e-05
+0 3.4 0 1.325e-05
+0 4.4 0 1.325e-05
+0 5.2 0 1.325e-05
+0 6.8 0 1.325e-05
+0 7.8 0 1.325e-05
+0 8.6 0 1.325e-05
+0 10.2 0 1.325e-05
+0 13.6 0 1.325e-05
+1.8 1.8 0 1.325e-05
+1.8 3.4 0 1.325e-05
+1.8 4.4 0 1.325e-05
+1.8 5.2 0 1.325e-05
+1.8 6.8 0 1.325e-05
+1.8 7.8 0 1.325e-05
+1.8 8.6 0 1.325e-05
+1.8 10.2 0 1.325e-05
+1.8 13.6 0 1.325e-05
+3.4 3.4 0 1.325e-05
+3.4 4.4 0 1.325e-05
+3.4 5.2 0 1.325e-05
+3.4 6.8 0 1.325e-05
+3.4 7.8 0 1.325e-05
+3.4 8.6 0 1.325e-05
+3.4 10.2 0 1.325e-05
+3.4 13.6 0 1.325e-05
+4.4 4.4 0 1.325e-05
+4.4 5.2 0 1.325e-05
+4.4 6.8 0 1.325e-05
+4.4 7.8 0 1.325e-05
+4.4 8.6 0 1.325e-05
+4.4 10.2 0 1.325e-05
+4.4 13.6 0 1.325e-05
+5.2 5.2 0 1.325e-05
+5.2 6.8 0 1.325e-05
+5.2 7.8 0 1.325e-05
+5.2 8.6 0 1.325e-05
+5.2 10.2 0 1.325e-05
+5.2 13.6 0 1.325e-05
+6.8 6.8 0 1.325e-05
+6.8 7.8 0 1.325e-05
+6.8 8.6 0 1.325e-05
+6.8 10.2 0 1.325e-05
+6.8 13.6 0 1.325e-05
+7.8 7.8 0 1.325e-05
+7.8 8.6 0 1.325e-05
+7.8 10.2 0 1.325e-05
+7.8 13.6 0 1.325e-05
+8.6 8.6 0 1.325e-05
+8.6 10.2 0 1.325e-05
+8.6 13.6 0 1.325e-05
+10.2 10.2 0 1.325e-05
+10.2 13.6 0 1.325e-05
+13.6 0 13.6 1.325e-05
+END DIST
+
+Metal 6 RESOVER 1
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 2
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 3
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 4
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 5
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 OVER
+WIDTH Table 1 entries: 1.6
+
+Metal 6 OVER 0
+DIST count 12 width 1.6
+1.6 0 4.19932e-05 6.625e-06
+3.2 0 4.19932e-05 6.625e-06
+4 0 4.19932e-05 6.625e-06
+4.8 0 4.19932e-05 6.625e-06
+5.6 0 4.19932e-05 6.625e-06
+6.4 0 4.19932e-05 6.625e-06
+7.2 0 4.19932e-05 6.625e-06
+8 0 4.19932e-05 6.625e-06
+9.6 0 4.19932e-05 6.625e-06
+12.8 0 4.19932e-05 6.625e-06
+16 0 4.19932e-05 6.625e-06
+19.2 0 4.19932e-05 6.625e-06
+END DIST
+
+Metal 6 OVER 1
+DIST count 12 width 1.6
+1.6 0 4.19932e-05 6.625e-06
+3.2 0 4.19932e-05 6.625e-06
+4 0 4.19932e-05 6.625e-06
+4.8 0 4.19932e-05 6.625e-06
+5.6 0 4.19932e-05 6.625e-06
+6.4 0 4.19932e-05 6.625e-06
+7.2 0 4.19932e-05 6.625e-06
+8 0 4.19932e-05 6.625e-06
+9.6 0 4.19932e-05 6.625e-06
+12.8 0 4.19932e-05 6.625e-06
+16 0 4.19932e-05 6.625e-06
+19.2 0 4.19932e-05 6.625e-06
+END DIST
+
+Metal 6 OVER 2
+DIST count 12 width 1.6
+1.6 0 4.19932e-05 6.625e-06
+3.2 0 4.19932e-05 6.625e-06
+4 0 4.19932e-05 6.625e-06
+4.8 0 4.19932e-05 6.625e-06
+5.6 0 4.19932e-05 6.625e-06
+6.4 0 4.19932e-05 6.625e-06
+7.2 0 4.19932e-05 6.625e-06
+8 0 4.19932e-05 6.625e-06
+9.6 0 4.19932e-05 6.625e-06
+12.8 0 4.19932e-05 6.625e-06
+16 0 4.19932e-05 6.625e-06
+19.2 0 4.19932e-05 6.625e-06
+END DIST
+
+Metal 6 OVER 3
+DIST count 12 width 1.6
+1.6 0 4.19932e-05 6.625e-06
+3.2 0 4.19932e-05 6.625e-06
+4 0 4.19932e-05 6.625e-06
+4.8 0 4.19932e-05 6.625e-06
+5.6 0 4.19932e-05 6.625e-06
+6.4 0 4.19932e-05 6.625e-06
+7.2 0 4.19932e-05 6.625e-06
+8 0 4.19932e-05 6.625e-06
+9.6 0 4.19932e-05 6.625e-06
+12.8 0 4.19932e-05 6.625e-06
+16 0 4.19932e-05 6.625e-06
+19.2 0 4.19932e-05 6.625e-06
+END DIST
+
+Metal 6 OVER 4
+DIST count 12 width 1.6
+1.6 0 4.19932e-05 6.625e-06
+3.2 0 4.19932e-05 6.625e-06
+4 0 4.19932e-05 6.625e-06
+4.8 0 4.19932e-05 6.625e-06
+5.6 0 4.19932e-05 6.625e-06
+6.4 0 4.19932e-05 6.625e-06
+7.2 0 4.19932e-05 6.625e-06
+8 0 4.19932e-05 6.625e-06
+9.6 0 4.19932e-05 6.625e-06
+12.8 0 4.19932e-05 6.625e-06
+16 0 4.19932e-05 6.625e-06
+19.2 0 4.19932e-05 6.625e-06
+END DIST
+
+Metal 6 OVER 5
+DIST count 12 width 1.6
+1.6 0 4.19932e-05 6.625e-06
+3.2 0 4.19932e-05 6.625e-06
+4 0 4.19932e-05 6.625e-06
+4.8 0 4.19932e-05 6.625e-06
+5.6 0 4.19932e-05 6.625e-06
+6.4 0 4.19932e-05 6.625e-06
+7.2 0 4.19932e-05 6.625e-06
+8 0 4.19932e-05 6.625e-06
+9.6 0 4.19932e-05 6.625e-06
+12.8 0 4.19932e-05 6.625e-06
+16 0 4.19932e-05 6.625e-06
+19.2 0 4.19932e-05 6.625e-06
+END DIST
+
+Metal 6 UNDER
+WIDTH Table 0 entries:
+
+Metal 6 DIAGUNDER
+WIDTH Table 0 entries:
+END DensityModel 0
diff --git a/sky130/openlane/rules.openrcx.sky130B.nom.spef_extractor b/sky130/openlane/rules.openrcx.sky130B.nom.spef_extractor
new file mode 100644
index 0000000..bcd0eec
--- /dev/null
+++ b/sky130/openlane/rules.openrcx.sky130B.nom.spef_extractor
@@ -0,0 +1,1645 @@
+Extraction Rules for OpenRCX
+
+DIAGMODEL ON
+
+LayerCount 6
+DensityRate 1 0
+
+DensityModel 0
+
+Metal 1 RESOVER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 RESOVER 0
+DIST count 55 width 0.17
+0 0 0 0.0752941
+0 0.29 0 0.0752941
+0 0.46 0 0.0752941
+0 0.665 0 0.0752941
+0 0.75 0 0.0752941
+0 0.92 0 0.0752941
+0 1.125 0 0.0752941
+0 1.21 0 0.0752941
+0 1.38 0 0.0752941
+0 1.84 0 0.0752941
+0.29 0.29 0 0.0752941
+0.29 0.46 0 0.0752941
+0.29 0.665 0 0.0752941
+0.29 0.75 0 0.0752941
+0.29 0.92 0 0.0752941
+0.29 1.125 0 0.0752941
+0.29 1.21 0 0.0752941
+0.29 1.38 0 0.0752941
+0.29 1.84 0 0.0752941
+0.46 0.46 0 0.0752941
+0.46 0.665 0 0.0752941
+0.46 0.75 0 0.0752941
+0.46 0.92 0 0.0752941
+0.46 1.125 0 0.0752941
+0.46 1.21 0 0.0752941
+0.46 1.38 0 0.0752941
+0.46 1.84 0 0.0752941
+0.665 0.665 0 0.0752941
+0.665 0.75 0 0.0752941
+0.665 0.92 0 0.0752941
+0.665 1.125 0 0.0752941
+0.665 1.21 0 0.0752941
+0.665 1.38 0 0.0752941
+0.665 1.84 0 0.0752941
+0.75 0.75 0 0.0752941
+0.75 0.92 0 0.0752941
+0.75 1.125 0 0.0752941
+0.75 1.21 0 0.0752941
+0.75 1.38 0 0.0752941
+0.75 1.84 0 0.0752941
+0.92 0.92 0 0.0752941
+0.92 1.125 0 0.0752941
+0.92 1.21 0 0.0752941
+0.92 1.38 0 0.0752941
+0.92 1.84 0 0.0752941
+1.125 1.125 0 0.0752941
+1.125 1.21 0 0.0752941
+1.125 1.38 0 0.0752941
+1.125 1.84 0 0.0752941
+1.21 1.21 0 0.0752941
+1.21 1.38 0 0.0752941
+1.21 1.84 0 0.0752941
+1.38 1.38 0 0.0752941
+1.38 1.84 0 0.0752941
+1.84 0 1.84 0.0752941
+END DIST
+
+Metal 1 OVER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 OVER 0
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0376471
+0.34 0 4.42519e-05 0.0376471
+0.425 0 4.42519e-05 0.0376471
+0.51 0 4.42519e-05 0.0376471
+0.595 0 4.42519e-05 0.0376471
+0.68 0 4.42519e-05 0.0376471
+0.765 0 4.42519e-05 0.0376471
+0.85 0 4.42519e-05 0.0376471
+1.02 0 4.42519e-05 0.0376471
+1.36 0 4.42519e-05 0.0376471
+1.7 0 4.42519e-05 0.0376471
+2.04 0 4.42519e-05 0.0376471
+END DIST
+
+Metal 1 UNDER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 UNDER 2
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0376471
+0.34 0 4.42519e-05 0.0376471
+0.425 0 4.42519e-05 0.0376471
+0.51 0 4.42519e-05 0.0376471
+0.595 0 4.42519e-05 0.0376471
+0.68 0 4.42519e-05 0.0376471
+0.765 0 4.42519e-05 0.0376471
+0.85 0 4.42519e-05 0.0376471
+1.02 0 4.42519e-05 0.0376471
+1.36 0 4.42519e-05 0.0376471
+1.7 0 4.42519e-05 0.0376471
+2.04 0 4.42519e-05 0.0376471
+END DIST
+
+Metal 1 UNDER 3
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0376471
+0.34 0 4.42519e-05 0.0376471
+0.425 0 4.42519e-05 0.0376471
+0.51 0 4.42519e-05 0.0376471
+0.595 0 4.42519e-05 0.0376471
+0.68 0 4.42519e-05 0.0376471
+0.765 0 4.42519e-05 0.0376471
+0.85 0 4.42519e-05 0.0376471
+1.02 0 4.42519e-05 0.0376471
+1.36 0 4.42519e-05 0.0376471
+1.7 0 4.42519e-05 0.0376471
+2.04 0 4.42519e-05 0.0376471
+END DIST
+
+Metal 1 UNDER 4
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0376471
+0.34 0 4.42519e-05 0.0376471
+0.425 0 4.42519e-05 0.0376471
+0.51 0 4.42519e-05 0.0376471
+0.595 0 4.42519e-05 0.0376471
+0.68 0 4.42519e-05 0.0376471
+0.765 0 4.42519e-05 0.0376471
+0.85 0 4.42519e-05 0.0376471
+1.02 0 4.42519e-05 0.0376471
+1.36 0 4.42519e-05 0.0376471
+1.7 0 4.42519e-05 0.0376471
+2.04 0 4.42519e-05 0.0376471
+END DIST
+
+Metal 1 UNDER 5
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0376471
+0.34 0 4.42519e-05 0.0376471
+0.425 0 4.42519e-05 0.0376471
+0.51 0 4.42519e-05 0.0376471
+0.595 0 4.42519e-05 0.0376471
+0.68 0 4.42519e-05 0.0376471
+0.765 0 4.42519e-05 0.0376471
+0.85 0 4.42519e-05 0.0376471
+1.02 0 4.42519e-05 0.0376471
+1.36 0 4.42519e-05 0.0376471
+1.7 0 4.42519e-05 0.0376471
+2.04 0 4.42519e-05 0.0376471
+END DIST
+
+Metal 1 UNDER 6
+DIST count 12 width 0.17
+0.17 0 4.42519e-05 0.0376471
+0.34 0 4.42519e-05 0.0376471
+0.425 0 4.42519e-05 0.0376471
+0.51 0 4.42519e-05 0.0376471
+0.595 0 4.42519e-05 0.0376471
+0.68 0 4.42519e-05 0.0376471
+0.765 0 4.42519e-05 0.0376471
+0.85 0 4.42519e-05 0.0376471
+1.02 0 4.42519e-05 0.0376471
+1.36 0 4.42519e-05 0.0376471
+1.7 0 4.42519e-05 0.0376471
+2.04 0 4.42519e-05 0.0376471
+END DIST
+
+Metal 1 DIAGUNDER
+WIDTH Table 1 entries: 0.17
+
+Metal 1 DIAGUNDER 2
+DIST count 13 width 0.17
+0 0 0 0.0376471
+0.17 0 0 0.0376471
+0.34 0 0 0.0376471
+0.425 0 0 0.0376471
+0.51 0 0 0.0376471
+0.595 0 0 0.0376471
+0.68 0 0 0.0376471
+0.765 0 0 0.0376471
+0.85 0 0 0.0376471
+1.02 0 0 0.0376471
+1.36 0 0 0.0376471
+1.7 0 0 0.0376471
+2.04 0 0 0.0376471
+END DIST
+
+Metal 1 DIAGUNDER 3
+DIST count 13 width 0.17
+0 0 0 0.0376471
+0.17 0 0 0.0376471
+0.34 0 0 0.0376471
+0.425 0 0 0.0376471
+0.51 0 0 0.0376471
+0.595 0 0 0.0376471
+0.68 0 0 0.0376471
+0.765 0 0 0.0376471
+0.85 0 0 0.0376471
+1.02 0 0 0.0376471
+1.36 0 0 0.0376471
+1.7 0 0 0.0376471
+2.04 0 0 0.0376471
+END DIST
+
+Metal 1 DIAGUNDER 4
+DIST count 13 width 0.17
+0 0 0 0.0376471
+0.17 0 0 0.0376471
+0.34 0 0 0.0376471
+0.425 0 0 0.0376471
+0.51 0 0 0.0376471
+0.595 0 0 0.0376471
+0.68 0 0 0.0376471
+0.765 0 0 0.0376471
+0.85 0 0 0.0376471
+1.02 0 0 0.0376471
+1.36 0 0 0.0376471
+1.7 0 0 0.0376471
+2.04 0 0 0.0376471
+END DIST
+
+Metal 1 DIAGUNDER 5
+DIST count 13 width 0.17
+0 0 0 0.0376471
+0.17 0 0 0.0376471
+0.34 0 0 0.0376471
+0.425 0 0 0.0376471
+0.51 0 0 0.0376471
+0.595 0 0 0.0376471
+0.68 0 0 0.0376471
+0.765 0 0 0.0376471
+0.85 0 0 0.0376471
+1.02 0 0 0.0376471
+1.36 0 0 0.0376471
+1.7 0 0 0.0376471
+2.04 0 0 0.0376471
+END DIST
+
+Metal 1 DIAGUNDER 6
+DIST count 0 width 0.17
+END DIST
+
+Metal 2 RESOVER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.000892857
+0 0.2 0 0.000892857
+0 0.34 0 0.000892857
+0 0.47 0 0.000892857
+0 0.54 0 0.000892857
+0 0.68 0 0.000892857
+0 0.81 0 0.000892857
+0 0.88 0 0.000892857
+0 1.02 0 0.000892857
+0 1.36 0 0.000892857
+0.2 0.2 0 0.000892857
+0.2 0.34 0 0.000892857
+0.2 0.47 0 0.000892857
+0.2 0.54 0 0.000892857
+0.2 0.68 0 0.000892857
+0.2 0.81 0 0.000892857
+0.2 0.88 0 0.000892857
+0.2 1.02 0 0.000892857
+0.2 1.36 0 0.000892857
+0.34 0.34 0 0.000892857
+0.34 0.47 0 0.000892857
+0.34 0.54 0 0.000892857
+0.34 0.68 0 0.000892857
+0.34 0.81 0 0.000892857
+0.34 0.88 0 0.000892857
+0.34 1.02 0 0.000892857
+0.34 1.36 0 0.000892857
+0.47 0.47 0 0.000892857
+0.47 0.54 0 0.000892857
+0.47 0.68 0 0.000892857
+0.47 0.81 0 0.000892857
+0.47 0.88 0 0.000892857
+0.47 1.02 0 0.000892857
+0.47 1.36 0 0.000892857
+0.54 0.54 0 0.000892857
+0.54 0.68 0 0.000892857
+0.54 0.81 0 0.000892857
+0.54 0.88 0 0.000892857
+0.54 1.02 0 0.000892857
+0.54 1.36 0 0.000892857
+0.68 0.68 0 0.000892857
+0.68 0.81 0 0.000892857
+0.68 0.88 0 0.000892857
+0.68 1.02 0 0.000892857
+0.68 1.36 0 0.000892857
+0.81 0.81 0 0.000892857
+0.81 0.88 0 0.000892857
+0.81 1.02 0 0.000892857
+0.81 1.36 0 0.000892857
+0.88 0.88 0 0.000892857
+0.88 1.02 0 0.000892857
+0.88 1.36 0 0.000892857
+1.02 1.02 0 0.000892857
+1.02 1.36 0 0.000892857
+1.36 0 1.36 0.000892857
+END DIST
+
+Metal 2 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 2 OVER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 OVER 0
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000446429
+0.28 0 4.27813e-05 0.000446429
+0.35 0 4.27813e-05 0.000446429
+0.42 0 4.27813e-05 0.000446429
+0.49 0 4.27813e-05 0.000446429
+0.56 0 4.27813e-05 0.000446429
+0.63 0 4.27813e-05 0.000446429
+0.7 0 4.27813e-05 0.000446429
+0.84 0 4.27813e-05 0.000446429
+1.12 0 4.27813e-05 0.000446429
+1.4 0 4.27813e-05 0.000446429
+1.68 0 4.27813e-05 0.000446429
+END DIST
+
+Metal 2 OVER 1
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000446429
+0.28 0 4.27813e-05 0.000446429
+0.35 0 4.27813e-05 0.000446429
+0.42 0 4.27813e-05 0.000446429
+0.49 0 4.27813e-05 0.000446429
+0.56 0 4.27813e-05 0.000446429
+0.63 0 4.27813e-05 0.000446429
+0.7 0 4.27813e-05 0.000446429
+0.84 0 4.27813e-05 0.000446429
+1.12 0 4.27813e-05 0.000446429
+1.4 0 4.27813e-05 0.000446429
+1.68 0 4.27813e-05 0.000446429
+END DIST
+
+Metal 2 UNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 UNDER 3
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000446429
+0.28 0 4.27813e-05 0.000446429
+0.35 0 4.27813e-05 0.000446429
+0.42 0 4.27813e-05 0.000446429
+0.49 0 4.27813e-05 0.000446429
+0.56 0 4.27813e-05 0.000446429
+0.63 0 4.27813e-05 0.000446429
+0.7 0 4.27813e-05 0.000446429
+0.84 0 4.27813e-05 0.000446429
+1.12 0 4.27813e-05 0.000446429
+1.4 0 4.27813e-05 0.000446429
+1.68 0 4.27813e-05 0.000446429
+END DIST
+
+Metal 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000446429
+0.28 0 4.27813e-05 0.000446429
+0.35 0 4.27813e-05 0.000446429
+0.42 0 4.27813e-05 0.000446429
+0.49 0 4.27813e-05 0.000446429
+0.56 0 4.27813e-05 0.000446429
+0.63 0 4.27813e-05 0.000446429
+0.7 0 4.27813e-05 0.000446429
+0.84 0 4.27813e-05 0.000446429
+1.12 0 4.27813e-05 0.000446429
+1.4 0 4.27813e-05 0.000446429
+1.68 0 4.27813e-05 0.000446429
+END DIST
+
+Metal 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000446429
+0.28 0 4.27813e-05 0.000446429
+0.35 0 4.27813e-05 0.000446429
+0.42 0 4.27813e-05 0.000446429
+0.49 0 4.27813e-05 0.000446429
+0.56 0 4.27813e-05 0.000446429
+0.63 0 4.27813e-05 0.000446429
+0.7 0 4.27813e-05 0.000446429
+0.84 0 4.27813e-05 0.000446429
+1.12 0 4.27813e-05 0.000446429
+1.4 0 4.27813e-05 0.000446429
+1.68 0 4.27813e-05 0.000446429
+END DIST
+
+Metal 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000446429
+0.28 0 4.27813e-05 0.000446429
+0.35 0 4.27813e-05 0.000446429
+0.42 0 4.27813e-05 0.000446429
+0.49 0 4.27813e-05 0.000446429
+0.56 0 4.27813e-05 0.000446429
+0.63 0 4.27813e-05 0.000446429
+0.7 0 4.27813e-05 0.000446429
+0.84 0 4.27813e-05 0.000446429
+1.12 0 4.27813e-05 0.000446429
+1.4 0 4.27813e-05 0.000446429
+1.68 0 4.27813e-05 0.000446429
+END DIST
+
+Metal 2 DIAGUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 DIAGUNDER 3
+DIST count 13 width 0.14
+0 0 0 0.000446429
+0.14 0 0 0.000446429
+0.28 0 0 0.000446429
+0.35 0 0 0.000446429
+0.42 0 0 0.000446429
+0.49 0 0 0.000446429
+0.56 0 0 0.000446429
+0.63 0 0 0.000446429
+0.7 0 0 0.000446429
+0.84 0 0 0.000446429
+1.12 0 0 0.000446429
+1.4 0 0 0.000446429
+1.68 0 0 0.000446429
+END DIST
+
+Metal 2 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 0 0.000446429
+0.14 0 0 0.000446429
+0.28 0 0 0.000446429
+0.35 0 0 0.000446429
+0.42 0 0 0.000446429
+0.49 0 0 0.000446429
+0.56 0 0 0.000446429
+0.63 0 0 0.000446429
+0.7 0 0 0.000446429
+0.84 0 0 0.000446429
+1.12 0 0 0.000446429
+1.4 0 0 0.000446429
+1.68 0 0 0.000446429
+END DIST
+
+Metal 2 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 0 0.000446429
+0.14 0 0 0.000446429
+0.28 0 0 0.000446429
+0.35 0 0 0.000446429
+0.42 0 0 0.000446429
+0.49 0 0 0.000446429
+0.56 0 0 0.000446429
+0.63 0 0 0.000446429
+0.7 0 0 0.000446429
+0.84 0 0 0.000446429
+1.12 0 0 0.000446429
+1.4 0 0 0.000446429
+1.68 0 0 0.000446429
+END DIST
+
+Metal 2 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 0 0.000446429
+0.14 0 0 0.000446429
+0.28 0 0 0.000446429
+0.35 0 0 0.000446429
+0.42 0 0 0.000446429
+0.49 0 0 0.000446429
+0.56 0 0 0.000446429
+0.63 0 0 0.000446429
+0.7 0 0 0.000446429
+0.84 0 0 0.000446429
+1.12 0 0 0.000446429
+1.4 0 0 0.000446429
+1.68 0 0 0.000446429
+END DIST
+
+Metal 2 OVERUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 2 OVER 1 UNDER 3
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000446429
+0.28 0 4.27813e-05 0.000446429
+0.35 0 4.27813e-05 0.000446429
+0.42 0 4.27813e-05 0.000446429
+0.49 0 4.27813e-05 0.000446429
+0.56 0 4.27813e-05 0.000446429
+0.63 0 4.27813e-05 0.000446429
+0.7 0 4.27813e-05 0.000446429
+0.84 0 4.27813e-05 0.000446429
+1.12 0 4.27813e-05 0.000446429
+1.4 0 4.27813e-05 0.000446429
+1.68 0 4.27813e-05 0.000446429
+END DIST
+
+Metal 2 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000446429
+0.28 0 4.27813e-05 0.000446429
+0.35 0 4.27813e-05 0.000446429
+0.42 0 4.27813e-05 0.000446429
+0.49 0 4.27813e-05 0.000446429
+0.56 0 4.27813e-05 0.000446429
+0.63 0 4.27813e-05 0.000446429
+0.7 0 4.27813e-05 0.000446429
+0.84 0 4.27813e-05 0.000446429
+1.12 0 4.27813e-05 0.000446429
+1.4 0 4.27813e-05 0.000446429
+1.68 0 4.27813e-05 0.000446429
+END DIST
+
+Metal 2 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000446429
+0.28 0 4.27813e-05 0.000446429
+0.35 0 4.27813e-05 0.000446429
+0.42 0 4.27813e-05 0.000446429
+0.49 0 4.27813e-05 0.000446429
+0.56 0 4.27813e-05 0.000446429
+0.63 0 4.27813e-05 0.000446429
+0.7 0 4.27813e-05 0.000446429
+0.84 0 4.27813e-05 0.000446429
+1.12 0 4.27813e-05 0.000446429
+1.4 0 4.27813e-05 0.000446429
+1.68 0 4.27813e-05 0.000446429
+END DIST
+
+Metal 2 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0 4.27813e-05 0.000446429
+0.28 0 4.27813e-05 0.000446429
+0.35 0 4.27813e-05 0.000446429
+0.42 0 4.27813e-05 0.000446429
+0.49 0 4.27813e-05 0.000446429
+0.56 0 4.27813e-05 0.000446429
+0.63 0 4.27813e-05 0.000446429
+0.7 0 4.27813e-05 0.000446429
+0.84 0 4.27813e-05 0.000446429
+1.12 0 4.27813e-05 0.000446429
+1.4 0 4.27813e-05 0.000446429
+1.68 0 4.27813e-05 0.000446429
+END DIST
+
+Metal 3 RESOVER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.000892857
+0 0.32 0 0.000892857
+0 0.46 0 0.000892857
+0 0.71 0 0.000892857
+0 0.78 0 0.000892857
+0 0.92 0 0.000892857
+0 1.17 0 0.000892857
+0 1.24 0 0.000892857
+0 1.38 0 0.000892857
+0 1.84 0 0.000892857
+0.32 0.32 0 0.000892857
+0.32 0.46 0 0.000892857
+0.32 0.71 0 0.000892857
+0.32 0.78 0 0.000892857
+0.32 0.92 0 0.000892857
+0.32 1.17 0 0.000892857
+0.32 1.24 0 0.000892857
+0.32 1.38 0 0.000892857
+0.32 1.84 0 0.000892857
+0.46 0.46 0 0.000892857
+0.46 0.71 0 0.000892857
+0.46 0.78 0 0.000892857
+0.46 0.92 0 0.000892857
+0.46 1.17 0 0.000892857
+0.46 1.24 0 0.000892857
+0.46 1.38 0 0.000892857
+0.46 1.84 0 0.000892857
+0.71 0.71 0 0.000892857
+0.71 0.78 0 0.000892857
+0.71 0.92 0 0.000892857
+0.71 1.17 0 0.000892857
+0.71 1.24 0 0.000892857
+0.71 1.38 0 0.000892857
+0.71 1.84 0 0.000892857
+0.78 0.78 0 0.000892857
+0.78 0.92 0 0.000892857
+0.78 1.17 0 0.000892857
+0.78 1.24 0 0.000892857
+0.78 1.38 0 0.000892857
+0.78 1.84 0 0.000892857
+0.92 0.92 0 0.000892857
+0.92 1.17 0 0.000892857
+0.92 1.24 0 0.000892857
+0.92 1.38 0 0.000892857
+0.92 1.84 0 0.000892857
+1.17 1.17 0 0.000892857
+1.17 1.24 0 0.000892857
+1.17 1.38 0 0.000892857
+1.17 1.84 0 0.000892857
+1.24 1.24 0 0.000892857
+1.24 1.38 0 0.000892857
+1.24 1.84 0 0.000892857
+1.38 1.38 0 0.000892857
+1.38 1.84 0 0.000892857
+1.84 0 1.84 0.000892857
+END DIST
+
+Metal 3 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 RESOVER 2
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 OVER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 OVER 0
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000446429
+0.28 0 3.42844e-05 0.000446429
+0.35 0 3.42844e-05 0.000446429
+0.42 0 3.42844e-05 0.000446429
+0.49 0 3.42844e-05 0.000446429
+0.56 0 3.42844e-05 0.000446429
+0.63 0 3.42844e-05 0.000446429
+0.7 0 3.42844e-05 0.000446429
+0.84 0 3.42844e-05 0.000446429
+1.12 0 3.42844e-05 0.000446429
+1.4 0 3.42844e-05 0.000446429
+1.68 0 3.42844e-05 0.000446429
+END DIST
+
+Metal 3 OVER 1
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000446429
+0.28 0 3.42844e-05 0.000446429
+0.35 0 3.42844e-05 0.000446429
+0.42 0 3.42844e-05 0.000446429
+0.49 0 3.42844e-05 0.000446429
+0.56 0 3.42844e-05 0.000446429
+0.63 0 3.42844e-05 0.000446429
+0.7 0 3.42844e-05 0.000446429
+0.84 0 3.42844e-05 0.000446429
+1.12 0 3.42844e-05 0.000446429
+1.4 0 3.42844e-05 0.000446429
+1.68 0 3.42844e-05 0.000446429
+END DIST
+
+Metal 3 OVER 2
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000446429
+0.28 0 3.42844e-05 0.000446429
+0.35 0 3.42844e-05 0.000446429
+0.42 0 3.42844e-05 0.000446429
+0.49 0 3.42844e-05 0.000446429
+0.56 0 3.42844e-05 0.000446429
+0.63 0 3.42844e-05 0.000446429
+0.7 0 3.42844e-05 0.000446429
+0.84 0 3.42844e-05 0.000446429
+1.12 0 3.42844e-05 0.000446429
+1.4 0 3.42844e-05 0.000446429
+1.68 0 3.42844e-05 0.000446429
+END DIST
+
+Metal 3 UNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 UNDER 4
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000446429
+0.28 0 3.42844e-05 0.000446429
+0.35 0 3.42844e-05 0.000446429
+0.42 0 3.42844e-05 0.000446429
+0.49 0 3.42844e-05 0.000446429
+0.56 0 3.42844e-05 0.000446429
+0.63 0 3.42844e-05 0.000446429
+0.7 0 3.42844e-05 0.000446429
+0.84 0 3.42844e-05 0.000446429
+1.12 0 3.42844e-05 0.000446429
+1.4 0 3.42844e-05 0.000446429
+1.68 0 3.42844e-05 0.000446429
+END DIST
+
+Metal 3 UNDER 5
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000446429
+0.28 0 3.42844e-05 0.000446429
+0.35 0 3.42844e-05 0.000446429
+0.42 0 3.42844e-05 0.000446429
+0.49 0 3.42844e-05 0.000446429
+0.56 0 3.42844e-05 0.000446429
+0.63 0 3.42844e-05 0.000446429
+0.7 0 3.42844e-05 0.000446429
+0.84 0 3.42844e-05 0.000446429
+1.12 0 3.42844e-05 0.000446429
+1.4 0 3.42844e-05 0.000446429
+1.68 0 3.42844e-05 0.000446429
+END DIST
+
+Metal 3 UNDER 6
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000446429
+0.28 0 3.42844e-05 0.000446429
+0.35 0 3.42844e-05 0.000446429
+0.42 0 3.42844e-05 0.000446429
+0.49 0 3.42844e-05 0.000446429
+0.56 0 3.42844e-05 0.000446429
+0.63 0 3.42844e-05 0.000446429
+0.7 0 3.42844e-05 0.000446429
+0.84 0 3.42844e-05 0.000446429
+1.12 0 3.42844e-05 0.000446429
+1.4 0 3.42844e-05 0.000446429
+1.68 0 3.42844e-05 0.000446429
+END DIST
+
+Metal 3 DIAGUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 0 0.000446429
+0.14 0 0 0.000446429
+0.28 0 0 0.000446429
+0.35 0 0 0.000446429
+0.42 0 0 0.000446429
+0.49 0 0 0.000446429
+0.56 0 0 0.000446429
+0.63 0 0 0.000446429
+0.7 0 0 0.000446429
+0.84 0 0 0.000446429
+1.12 0 0 0.000446429
+1.4 0 0 0.000446429
+1.68 0 0 0.000446429
+END DIST
+
+Metal 3 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 0 0.000446429
+0.14 0 0 0.000446429
+0.28 0 0 0.000446429
+0.35 0 0 0.000446429
+0.42 0 0 0.000446429
+0.49 0 0 0.000446429
+0.56 0 0 0.000446429
+0.63 0 0 0.000446429
+0.7 0 0 0.000446429
+0.84 0 0 0.000446429
+1.12 0 0 0.000446429
+1.4 0 0 0.000446429
+1.68 0 0 0.000446429
+END DIST
+
+Metal 3 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 0 0.000446429
+0.14 0 0 0.000446429
+0.28 0 0 0.000446429
+0.35 0 0 0.000446429
+0.42 0 0 0.000446429
+0.49 0 0 0.000446429
+0.56 0 0 0.000446429
+0.63 0 0 0.000446429
+0.7 0 0 0.000446429
+0.84 0 0 0.000446429
+1.12 0 0 0.000446429
+1.4 0 0 0.000446429
+1.68 0 0 0.000446429
+END DIST
+
+Metal 3 OVERUNDER
+WIDTH Table 1 entries: 0.14
+
+Metal 3 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000446429
+0.28 0 3.42844e-05 0.000446429
+0.35 0 3.42844e-05 0.000446429
+0.42 0 3.42844e-05 0.000446429
+0.49 0 3.42844e-05 0.000446429
+0.56 0 3.42844e-05 0.000446429
+0.63 0 3.42844e-05 0.000446429
+0.7 0 3.42844e-05 0.000446429
+0.84 0 3.42844e-05 0.000446429
+1.12 0 3.42844e-05 0.000446429
+1.4 0 3.42844e-05 0.000446429
+1.68 0 3.42844e-05 0.000446429
+END DIST
+
+Metal 3 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000446429
+0.28 0 3.42844e-05 0.000446429
+0.35 0 3.42844e-05 0.000446429
+0.42 0 3.42844e-05 0.000446429
+0.49 0 3.42844e-05 0.000446429
+0.56 0 3.42844e-05 0.000446429
+0.63 0 3.42844e-05 0.000446429
+0.7 0 3.42844e-05 0.000446429
+0.84 0 3.42844e-05 0.000446429
+1.12 0 3.42844e-05 0.000446429
+1.4 0 3.42844e-05 0.000446429
+1.68 0 3.42844e-05 0.000446429
+END DIST
+
+Metal 3 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000446429
+0.28 0 3.42844e-05 0.000446429
+0.35 0 3.42844e-05 0.000446429
+0.42 0 3.42844e-05 0.000446429
+0.49 0 3.42844e-05 0.000446429
+0.56 0 3.42844e-05 0.000446429
+0.63 0 3.42844e-05 0.000446429
+0.7 0 3.42844e-05 0.000446429
+0.84 0 3.42844e-05 0.000446429
+1.12 0 3.42844e-05 0.000446429
+1.4 0 3.42844e-05 0.000446429
+1.68 0 3.42844e-05 0.000446429
+END DIST
+
+Metal 3 OVER 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000446429
+0.28 0 3.42844e-05 0.000446429
+0.35 0 3.42844e-05 0.000446429
+0.42 0 3.42844e-05 0.000446429
+0.49 0 3.42844e-05 0.000446429
+0.56 0 3.42844e-05 0.000446429
+0.63 0 3.42844e-05 0.000446429
+0.7 0 3.42844e-05 0.000446429
+0.84 0 3.42844e-05 0.000446429
+1.12 0 3.42844e-05 0.000446429
+1.4 0 3.42844e-05 0.000446429
+1.68 0 3.42844e-05 0.000446429
+END DIST
+
+Metal 3 OVER 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000446429
+0.28 0 3.42844e-05 0.000446429
+0.35 0 3.42844e-05 0.000446429
+0.42 0 3.42844e-05 0.000446429
+0.49 0 3.42844e-05 0.000446429
+0.56 0 3.42844e-05 0.000446429
+0.63 0 3.42844e-05 0.000446429
+0.7 0 3.42844e-05 0.000446429
+0.84 0 3.42844e-05 0.000446429
+1.12 0 3.42844e-05 0.000446429
+1.4 0 3.42844e-05 0.000446429
+1.68 0 3.42844e-05 0.000446429
+END DIST
+
+Metal 3 OVER 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0 3.42844e-05 0.000446429
+0.28 0 3.42844e-05 0.000446429
+0.35 0 3.42844e-05 0.000446429
+0.42 0 3.42844e-05 0.000446429
+0.49 0 3.42844e-05 0.000446429
+0.56 0 3.42844e-05 0.000446429
+0.63 0 3.42844e-05 0.000446429
+0.7 0 3.42844e-05 0.000446429
+0.84 0 3.42844e-05 0.000446429
+1.12 0 3.42844e-05 0.000446429
+1.4 0 3.42844e-05 0.000446429
+1.68 0 3.42844e-05 0.000446429
+END DIST
+
+Metal 4 RESOVER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000156667
+0 0.38 0 0.000156667
+0 0.68 0 0.000156667
+0 0.91 0 0.000156667
+0 1.06 0 0.000156667
+0 1.36 0 0.000156667
+0 1.59 0 0.000156667
+0 1.74 0 0.000156667
+0 2.04 0 0.000156667
+0 2.72 0 0.000156667
+0.38 0.38 0 0.000156667
+0.38 0.68 0 0.000156667
+0.38 0.91 0 0.000156667
+0.38 1.06 0 0.000156667
+0.38 1.36 0 0.000156667
+0.38 1.59 0 0.000156667
+0.38 1.74 0 0.000156667
+0.38 2.04 0 0.000156667
+0.38 2.72 0 0.000156667
+0.68 0.68 0 0.000156667
+0.68 0.91 0 0.000156667
+0.68 1.06 0 0.000156667
+0.68 1.36 0 0.000156667
+0.68 1.59 0 0.000156667
+0.68 1.74 0 0.000156667
+0.68 2.04 0 0.000156667
+0.68 2.72 0 0.000156667
+0.91 0.91 0 0.000156667
+0.91 1.06 0 0.000156667
+0.91 1.36 0 0.000156667
+0.91 1.59 0 0.000156667
+0.91 1.74 0 0.000156667
+0.91 2.04 0 0.000156667
+0.91 2.72 0 0.000156667
+1.06 1.06 0 0.000156667
+1.06 1.36 0 0.000156667
+1.06 1.59 0 0.000156667
+1.06 1.74 0 0.000156667
+1.06 2.04 0 0.000156667
+1.06 2.72 0 0.000156667
+1.36 1.36 0 0.000156667
+1.36 1.59 0 0.000156667
+1.36 1.74 0 0.000156667
+1.36 2.04 0 0.000156667
+1.36 2.72 0 0.000156667
+1.59 1.59 0 0.000156667
+1.59 1.74 0 0.000156667
+1.59 2.04 0 0.000156667
+1.59 2.72 0 0.000156667
+1.74 1.74 0 0.000156667
+1.74 2.04 0 0.000156667
+1.74 2.72 0 0.000156667
+2.04 2.04 0 0.000156667
+2.04 2.72 0 0.000156667
+2.72 0 2.72 0.000156667
+END DIST
+
+Metal 4 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 OVER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 OVER 0
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 7.83333e-05
+0.6 0 3.91176e-05 7.83333e-05
+0.75 0 3.91176e-05 7.83333e-05
+0.9 0 3.91176e-05 7.83333e-05
+1.05 0 3.91176e-05 7.83333e-05
+1.2 0 3.91176e-05 7.83333e-05
+1.35 0 3.91176e-05 7.83333e-05
+1.5 0 3.91176e-05 7.83333e-05
+1.8 0 3.91176e-05 7.83333e-05
+2.4 0 3.91176e-05 7.83333e-05
+3 0 3.91176e-05 7.83333e-05
+3.6 0 3.91176e-05 7.83333e-05
+END DIST
+
+Metal 4 OVER 1
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 7.83333e-05
+0.6 0 3.91176e-05 7.83333e-05
+0.75 0 3.91176e-05 7.83333e-05
+0.9 0 3.91176e-05 7.83333e-05
+1.05 0 3.91176e-05 7.83333e-05
+1.2 0 3.91176e-05 7.83333e-05
+1.35 0 3.91176e-05 7.83333e-05
+1.5 0 3.91176e-05 7.83333e-05
+1.8 0 3.91176e-05 7.83333e-05
+2.4 0 3.91176e-05 7.83333e-05
+3 0 3.91176e-05 7.83333e-05
+3.6 0 3.91176e-05 7.83333e-05
+END DIST
+
+Metal 4 OVER 2
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 7.83333e-05
+0.6 0 3.91176e-05 7.83333e-05
+0.75 0 3.91176e-05 7.83333e-05
+0.9 0 3.91176e-05 7.83333e-05
+1.05 0 3.91176e-05 7.83333e-05
+1.2 0 3.91176e-05 7.83333e-05
+1.35 0 3.91176e-05 7.83333e-05
+1.5 0 3.91176e-05 7.83333e-05
+1.8 0 3.91176e-05 7.83333e-05
+2.4 0 3.91176e-05 7.83333e-05
+3 0 3.91176e-05 7.83333e-05
+3.6 0 3.91176e-05 7.83333e-05
+END DIST
+
+Metal 4 OVER 3
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 7.83333e-05
+0.6 0 3.91176e-05 7.83333e-05
+0.75 0 3.91176e-05 7.83333e-05
+0.9 0 3.91176e-05 7.83333e-05
+1.05 0 3.91176e-05 7.83333e-05
+1.2 0 3.91176e-05 7.83333e-05
+1.35 0 3.91176e-05 7.83333e-05
+1.5 0 3.91176e-05 7.83333e-05
+1.8 0 3.91176e-05 7.83333e-05
+2.4 0 3.91176e-05 7.83333e-05
+3 0 3.91176e-05 7.83333e-05
+3.6 0 3.91176e-05 7.83333e-05
+END DIST
+
+Metal 4 UNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 UNDER 5
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 7.83333e-05
+0.6 0 3.91176e-05 7.83333e-05
+0.75 0 3.91176e-05 7.83333e-05
+0.9 0 3.91176e-05 7.83333e-05
+1.05 0 3.91176e-05 7.83333e-05
+1.2 0 3.91176e-05 7.83333e-05
+1.35 0 3.91176e-05 7.83333e-05
+1.5 0 3.91176e-05 7.83333e-05
+1.8 0 3.91176e-05 7.83333e-05
+2.4 0 3.91176e-05 7.83333e-05
+3 0 3.91176e-05 7.83333e-05
+3.6 0 3.91176e-05 7.83333e-05
+END DIST
+
+Metal 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 7.83333e-05
+0.6 0 3.91176e-05 7.83333e-05
+0.75 0 3.91176e-05 7.83333e-05
+0.9 0 3.91176e-05 7.83333e-05
+1.05 0 3.91176e-05 7.83333e-05
+1.2 0 3.91176e-05 7.83333e-05
+1.35 0 3.91176e-05 7.83333e-05
+1.5 0 3.91176e-05 7.83333e-05
+1.8 0 3.91176e-05 7.83333e-05
+2.4 0 3.91176e-05 7.83333e-05
+3 0 3.91176e-05 7.83333e-05
+3.6 0 3.91176e-05 7.83333e-05
+END DIST
+
+Metal 4 DIAGUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 DIAGUNDER 5
+DIST count 13 width 0.3
+0 0 0 7.83333e-05
+0.3 0 0 7.83333e-05
+0.6 0 0 7.83333e-05
+0.75 0 0 7.83333e-05
+0.9 0 0 7.83333e-05
+1.05 0 0 7.83333e-05
+1.2 0 0 7.83333e-05
+1.35 0 0 7.83333e-05
+1.5 0 0 7.83333e-05
+1.8 0 0 7.83333e-05
+2.4 0 0 7.83333e-05
+3 0 0 7.83333e-05
+3.6 0 0 7.83333e-05
+END DIST
+
+Metal 4 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 0 7.83333e-05
+0.3 0 0 7.83333e-05
+0.6 0 0 7.83333e-05
+0.75 0 0 7.83333e-05
+0.9 0 0 7.83333e-05
+1.05 0 0 7.83333e-05
+1.2 0 0 7.83333e-05
+1.35 0 0 7.83333e-05
+1.5 0 0 7.83333e-05
+1.8 0 0 7.83333e-05
+2.4 0 0 7.83333e-05
+3 0 0 7.83333e-05
+3.6 0 0 7.83333e-05
+END DIST
+
+Metal 4 OVERUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 4 OVER 1 UNDER 5
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 7.83333e-05
+0.6 0 3.91176e-05 7.83333e-05
+0.75 0 3.91176e-05 7.83333e-05
+0.9 0 3.91176e-05 7.83333e-05
+1.05 0 3.91176e-05 7.83333e-05
+1.2 0 3.91176e-05 7.83333e-05
+1.35 0 3.91176e-05 7.83333e-05
+1.5 0 3.91176e-05 7.83333e-05
+1.8 0 3.91176e-05 7.83333e-05
+2.4 0 3.91176e-05 7.83333e-05
+3 0 3.91176e-05 7.83333e-05
+3.6 0 3.91176e-05 7.83333e-05
+END DIST
+
+Metal 4 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 7.83333e-05
+0.6 0 3.91176e-05 7.83333e-05
+0.75 0 3.91176e-05 7.83333e-05
+0.9 0 3.91176e-05 7.83333e-05
+1.05 0 3.91176e-05 7.83333e-05
+1.2 0 3.91176e-05 7.83333e-05
+1.35 0 3.91176e-05 7.83333e-05
+1.5 0 3.91176e-05 7.83333e-05
+1.8 0 3.91176e-05 7.83333e-05
+2.4 0 3.91176e-05 7.83333e-05
+3 0 3.91176e-05 7.83333e-05
+3.6 0 3.91176e-05 7.83333e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 5
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 7.83333e-05
+0.6 0 3.91176e-05 7.83333e-05
+0.75 0 3.91176e-05 7.83333e-05
+0.9 0 3.91176e-05 7.83333e-05
+1.05 0 3.91176e-05 7.83333e-05
+1.2 0 3.91176e-05 7.83333e-05
+1.35 0 3.91176e-05 7.83333e-05
+1.5 0 3.91176e-05 7.83333e-05
+1.8 0 3.91176e-05 7.83333e-05
+2.4 0 3.91176e-05 7.83333e-05
+3 0 3.91176e-05 7.83333e-05
+3.6 0 3.91176e-05 7.83333e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 7.83333e-05
+0.6 0 3.91176e-05 7.83333e-05
+0.75 0 3.91176e-05 7.83333e-05
+0.9 0 3.91176e-05 7.83333e-05
+1.05 0 3.91176e-05 7.83333e-05
+1.2 0 3.91176e-05 7.83333e-05
+1.35 0 3.91176e-05 7.83333e-05
+1.5 0 3.91176e-05 7.83333e-05
+1.8 0 3.91176e-05 7.83333e-05
+2.4 0 3.91176e-05 7.83333e-05
+3 0 3.91176e-05 7.83333e-05
+3.6 0 3.91176e-05 7.83333e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 5
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 7.83333e-05
+0.6 0 3.91176e-05 7.83333e-05
+0.75 0 3.91176e-05 7.83333e-05
+0.9 0 3.91176e-05 7.83333e-05
+1.05 0 3.91176e-05 7.83333e-05
+1.2 0 3.91176e-05 7.83333e-05
+1.35 0 3.91176e-05 7.83333e-05
+1.5 0 3.91176e-05 7.83333e-05
+1.8 0 3.91176e-05 7.83333e-05
+2.4 0 3.91176e-05 7.83333e-05
+3 0 3.91176e-05 7.83333e-05
+3.6 0 3.91176e-05 7.83333e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.91176e-05 7.83333e-05
+0.6 0 3.91176e-05 7.83333e-05
+0.75 0 3.91176e-05 7.83333e-05
+0.9 0 3.91176e-05 7.83333e-05
+1.05 0 3.91176e-05 7.83333e-05
+1.2 0 3.91176e-05 7.83333e-05
+1.35 0 3.91176e-05 7.83333e-05
+1.5 0 3.91176e-05 7.83333e-05
+1.8 0 3.91176e-05 7.83333e-05
+2.4 0 3.91176e-05 7.83333e-05
+3 0 3.91176e-05 7.83333e-05
+3.6 0 3.91176e-05 7.83333e-05
+END DIST
+
+Metal 5 RESOVER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000156667
+0 0.62 0 0.000156667
+0 0.92 0 0.000156667
+0 1.39 0 0.000156667
+0 1.54 0 0.000156667
+0 1.84 0 0.000156667
+0 2.31 0 0.000156667
+0 2.46 0 0.000156667
+0 2.76 0 0.000156667
+0 3.68 0 0.000156667
+0.62 0.62 0 0.000156667
+0.62 0.92 0 0.000156667
+0.62 1.39 0 0.000156667
+0.62 1.54 0 0.000156667
+0.62 1.84 0 0.000156667
+0.62 2.31 0 0.000156667
+0.62 2.46 0 0.000156667
+0.62 2.76 0 0.000156667
+0.62 3.68 0 0.000156667
+0.92 0.92 0 0.000156667
+0.92 1.39 0 0.000156667
+0.92 1.54 0 0.000156667
+0.92 1.84 0 0.000156667
+0.92 2.31 0 0.000156667
+0.92 2.46 0 0.000156667
+0.92 2.76 0 0.000156667
+0.92 3.68 0 0.000156667
+1.39 1.39 0 0.000156667
+1.39 1.54 0 0.000156667
+1.39 1.84 0 0.000156667
+1.39 2.31 0 0.000156667
+1.39 2.46 0 0.000156667
+1.39 2.76 0 0.000156667
+1.39 3.68 0 0.000156667
+1.54 1.54 0 0.000156667
+1.54 1.84 0 0.000156667
+1.54 2.31 0 0.000156667
+1.54 2.46 0 0.000156667
+1.54 2.76 0 0.000156667
+1.54 3.68 0 0.000156667
+1.84 1.84 0 0.000156667
+1.84 2.31 0 0.000156667
+1.84 2.46 0 0.000156667
+1.84 2.76 0 0.000156667
+1.84 3.68 0 0.000156667
+2.31 2.31 0 0.000156667
+2.31 2.46 0 0.000156667
+2.31 2.76 0 0.000156667
+2.31 3.68 0 0.000156667
+2.46 2.46 0 0.000156667
+2.46 2.76 0 0.000156667
+2.46 3.68 0 0.000156667
+2.76 2.76 0 0.000156667
+2.76 3.68 0 0.000156667
+3.68 0 3.68 0.000156667
+END DIST
+
+Metal 5 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 4
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 OVER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 OVER 0
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 7.83333e-05
+0.6 0 3.56902e-05 7.83333e-05
+0.75 0 3.56902e-05 7.83333e-05
+0.9 0 3.56902e-05 7.83333e-05
+1.05 0 3.56902e-05 7.83333e-05
+1.2 0 3.56902e-05 7.83333e-05
+1.35 0 3.56902e-05 7.83333e-05
+1.5 0 3.56902e-05 7.83333e-05
+1.8 0 3.56902e-05 7.83333e-05
+2.4 0 3.56902e-05 7.83333e-05
+3 0 3.56902e-05 7.83333e-05
+3.6 0 3.56902e-05 7.83333e-05
+END DIST
+
+Metal 5 OVER 1
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 7.83333e-05
+0.6 0 3.56902e-05 7.83333e-05
+0.75 0 3.56902e-05 7.83333e-05
+0.9 0 3.56902e-05 7.83333e-05
+1.05 0 3.56902e-05 7.83333e-05
+1.2 0 3.56902e-05 7.83333e-05
+1.35 0 3.56902e-05 7.83333e-05
+1.5 0 3.56902e-05 7.83333e-05
+1.8 0 3.56902e-05 7.83333e-05
+2.4 0 3.56902e-05 7.83333e-05
+3 0 3.56902e-05 7.83333e-05
+3.6 0 3.56902e-05 7.83333e-05
+END DIST
+
+Metal 5 OVER 2
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 7.83333e-05
+0.6 0 3.56902e-05 7.83333e-05
+0.75 0 3.56902e-05 7.83333e-05
+0.9 0 3.56902e-05 7.83333e-05
+1.05 0 3.56902e-05 7.83333e-05
+1.2 0 3.56902e-05 7.83333e-05
+1.35 0 3.56902e-05 7.83333e-05
+1.5 0 3.56902e-05 7.83333e-05
+1.8 0 3.56902e-05 7.83333e-05
+2.4 0 3.56902e-05 7.83333e-05
+3 0 3.56902e-05 7.83333e-05
+3.6 0 3.56902e-05 7.83333e-05
+END DIST
+
+Metal 5 OVER 3
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 7.83333e-05
+0.6 0 3.56902e-05 7.83333e-05
+0.75 0 3.56902e-05 7.83333e-05
+0.9 0 3.56902e-05 7.83333e-05
+1.05 0 3.56902e-05 7.83333e-05
+1.2 0 3.56902e-05 7.83333e-05
+1.35 0 3.56902e-05 7.83333e-05
+1.5 0 3.56902e-05 7.83333e-05
+1.8 0 3.56902e-05 7.83333e-05
+2.4 0 3.56902e-05 7.83333e-05
+3 0 3.56902e-05 7.83333e-05
+3.6 0 3.56902e-05 7.83333e-05
+END DIST
+
+Metal 5 OVER 4
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 7.83333e-05
+0.6 0 3.56902e-05 7.83333e-05
+0.75 0 3.56902e-05 7.83333e-05
+0.9 0 3.56902e-05 7.83333e-05
+1.05 0 3.56902e-05 7.83333e-05
+1.2 0 3.56902e-05 7.83333e-05
+1.35 0 3.56902e-05 7.83333e-05
+1.5 0 3.56902e-05 7.83333e-05
+1.8 0 3.56902e-05 7.83333e-05
+2.4 0 3.56902e-05 7.83333e-05
+3 0 3.56902e-05 7.83333e-05
+3.6 0 3.56902e-05 7.83333e-05
+END DIST
+
+Metal 5 UNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 7.83333e-05
+0.6 0 3.56902e-05 7.83333e-05
+0.75 0 3.56902e-05 7.83333e-05
+0.9 0 3.56902e-05 7.83333e-05
+1.05 0 3.56902e-05 7.83333e-05
+1.2 0 3.56902e-05 7.83333e-05
+1.35 0 3.56902e-05 7.83333e-05
+1.5 0 3.56902e-05 7.83333e-05
+1.8 0 3.56902e-05 7.83333e-05
+2.4 0 3.56902e-05 7.83333e-05
+3 0 3.56902e-05 7.83333e-05
+3.6 0 3.56902e-05 7.83333e-05
+END DIST
+
+Metal 5 DIAGUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 0 7.83333e-05
+0.3 0 0 7.83333e-05
+0.6 0 0 7.83333e-05
+0.75 0 0 7.83333e-05
+0.9 0 0 7.83333e-05
+1.05 0 0 7.83333e-05
+1.2 0 0 7.83333e-05
+1.35 0 0 7.83333e-05
+1.5 0 0 7.83333e-05
+1.8 0 0 7.83333e-05
+2.4 0 0 7.83333e-05
+3 0 0 7.83333e-05
+3.6 0 0 7.83333e-05
+END DIST
+
+Metal 5 OVERUNDER
+WIDTH Table 1 entries: 0.3
+
+Metal 5 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 7.83333e-05
+0.6 0 3.56902e-05 7.83333e-05
+0.75 0 3.56902e-05 7.83333e-05
+0.9 0 3.56902e-05 7.83333e-05
+1.05 0 3.56902e-05 7.83333e-05
+1.2 0 3.56902e-05 7.83333e-05
+1.35 0 3.56902e-05 7.83333e-05
+1.5 0 3.56902e-05 7.83333e-05
+1.8 0 3.56902e-05 7.83333e-05
+2.4 0 3.56902e-05 7.83333e-05
+3 0 3.56902e-05 7.83333e-05
+3.6 0 3.56902e-05 7.83333e-05
+END DIST
+
+Metal 5 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 7.83333e-05
+0.6 0 3.56902e-05 7.83333e-05
+0.75 0 3.56902e-05 7.83333e-05
+0.9 0 3.56902e-05 7.83333e-05
+1.05 0 3.56902e-05 7.83333e-05
+1.2 0 3.56902e-05 7.83333e-05
+1.35 0 3.56902e-05 7.83333e-05
+1.5 0 3.56902e-05 7.83333e-05
+1.8 0 3.56902e-05 7.83333e-05
+2.4 0 3.56902e-05 7.83333e-05
+3 0 3.56902e-05 7.83333e-05
+3.6 0 3.56902e-05 7.83333e-05
+END DIST
+
+Metal 5 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 7.83333e-05
+0.6 0 3.56902e-05 7.83333e-05
+0.75 0 3.56902e-05 7.83333e-05
+0.9 0 3.56902e-05 7.83333e-05
+1.05 0 3.56902e-05 7.83333e-05
+1.2 0 3.56902e-05 7.83333e-05
+1.35 0 3.56902e-05 7.83333e-05
+1.5 0 3.56902e-05 7.83333e-05
+1.8 0 3.56902e-05 7.83333e-05
+2.4 0 3.56902e-05 7.83333e-05
+3 0 3.56902e-05 7.83333e-05
+3.6 0 3.56902e-05 7.83333e-05
+END DIST
+
+Metal 5 OVER 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0 3.56902e-05 7.83333e-05
+0.6 0 3.56902e-05 7.83333e-05
+0.75 0 3.56902e-05 7.83333e-05
+0.9 0 3.56902e-05 7.83333e-05
+1.05 0 3.56902e-05 7.83333e-05
+1.2 0 3.56902e-05 7.83333e-05
+1.35 0 3.56902e-05 7.83333e-05
+1.5 0 3.56902e-05 7.83333e-05
+1.8 0 3.56902e-05 7.83333e-05
+2.4 0 3.56902e-05 7.83333e-05
+3 0 3.56902e-05 7.83333e-05
+3.6 0 3.56902e-05 7.83333e-05
+END DIST
+
+Metal 6 RESOVER
+WIDTH Table 1 entries: 1.6
+
+Metal 6 RESOVER 0
+DIST count 55 width 1.6
+0 0 0 1.78125e-05
+0 1.8 0 1.78125e-05
+0 3.4 0 1.78125e-05
+0 4.4 0 1.78125e-05
+0 5.2 0 1.78125e-05
+0 6.8 0 1.78125e-05
+0 7.8 0 1.78125e-05
+0 8.6 0 1.78125e-05
+0 10.2 0 1.78125e-05
+0 13.6 0 1.78125e-05
+1.8 1.8 0 1.78125e-05
+1.8 3.4 0 1.78125e-05
+1.8 4.4 0 1.78125e-05
+1.8 5.2 0 1.78125e-05
+1.8 6.8 0 1.78125e-05
+1.8 7.8 0 1.78125e-05
+1.8 8.6 0 1.78125e-05
+1.8 10.2 0 1.78125e-05
+1.8 13.6 0 1.78125e-05
+3.4 3.4 0 1.78125e-05
+3.4 4.4 0 1.78125e-05
+3.4 5.2 0 1.78125e-05
+3.4 6.8 0 1.78125e-05
+3.4 7.8 0 1.78125e-05
+3.4 8.6 0 1.78125e-05
+3.4 10.2 0 1.78125e-05
+3.4 13.6 0 1.78125e-05
+4.4 4.4 0 1.78125e-05
+4.4 5.2 0 1.78125e-05
+4.4 6.8 0 1.78125e-05
+4.4 7.8 0 1.78125e-05
+4.4 8.6 0 1.78125e-05
+4.4 10.2 0 1.78125e-05
+4.4 13.6 0 1.78125e-05
+5.2 5.2 0 1.78125e-05
+5.2 6.8 0 1.78125e-05
+5.2 7.8 0 1.78125e-05
+5.2 8.6 0 1.78125e-05
+5.2 10.2 0 1.78125e-05
+5.2 13.6 0 1.78125e-05
+6.8 6.8 0 1.78125e-05
+6.8 7.8 0 1.78125e-05
+6.8 8.6 0 1.78125e-05
+6.8 10.2 0 1.78125e-05
+6.8 13.6 0 1.78125e-05
+7.8 7.8 0 1.78125e-05
+7.8 8.6 0 1.78125e-05
+7.8 10.2 0 1.78125e-05
+7.8 13.6 0 1.78125e-05
+8.6 8.6 0 1.78125e-05
+8.6 10.2 0 1.78125e-05
+8.6 13.6 0 1.78125e-05
+10.2 10.2 0 1.78125e-05
+10.2 13.6 0 1.78125e-05
+13.6 0 13.6 1.78125e-05
+END DIST
+
+Metal 6 RESOVER 1
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 2
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 3
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 4
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 5
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 OVER
+WIDTH Table 1 entries: 1.6
+
+Metal 6 OVER 0
+DIST count 12 width 1.6
+1.6 0 4.19932e-05 8.90625e-06
+3.2 0 4.19932e-05 8.90625e-06
+4 0 4.19932e-05 8.90625e-06
+4.8 0 4.19932e-05 8.90625e-06
+5.6 0 4.19932e-05 8.90625e-06
+6.4 0 4.19932e-05 8.90625e-06
+7.2 0 4.19932e-05 8.90625e-06
+8 0 4.19932e-05 8.90625e-06
+9.6 0 4.19932e-05 8.90625e-06
+12.8 0 4.19932e-05 8.90625e-06
+16 0 4.19932e-05 8.90625e-06
+19.2 0 4.19932e-05 8.90625e-06
+END DIST
+
+Metal 6 OVER 1
+DIST count 12 width 1.6
+1.6 0 4.19932e-05 8.90625e-06
+3.2 0 4.19932e-05 8.90625e-06
+4 0 4.19932e-05 8.90625e-06
+4.8 0 4.19932e-05 8.90625e-06
+5.6 0 4.19932e-05 8.90625e-06
+6.4 0 4.19932e-05 8.90625e-06
+7.2 0 4.19932e-05 8.90625e-06
+8 0 4.19932e-05 8.90625e-06
+9.6 0 4.19932e-05 8.90625e-06
+12.8 0 4.19932e-05 8.90625e-06
+16 0 4.19932e-05 8.90625e-06
+19.2 0 4.19932e-05 8.90625e-06
+END DIST
+
+Metal 6 OVER 2
+DIST count 12 width 1.6
+1.6 0 4.19932e-05 8.90625e-06
+3.2 0 4.19932e-05 8.90625e-06
+4 0 4.19932e-05 8.90625e-06
+4.8 0 4.19932e-05 8.90625e-06
+5.6 0 4.19932e-05 8.90625e-06
+6.4 0 4.19932e-05 8.90625e-06
+7.2 0 4.19932e-05 8.90625e-06
+8 0 4.19932e-05 8.90625e-06
+9.6 0 4.19932e-05 8.90625e-06
+12.8 0 4.19932e-05 8.90625e-06
+16 0 4.19932e-05 8.90625e-06
+19.2 0 4.19932e-05 8.90625e-06
+END DIST
+
+Metal 6 OVER 3
+DIST count 12 width 1.6
+1.6 0 4.19932e-05 8.90625e-06
+3.2 0 4.19932e-05 8.90625e-06
+4 0 4.19932e-05 8.90625e-06
+4.8 0 4.19932e-05 8.90625e-06
+5.6 0 4.19932e-05 8.90625e-06
+6.4 0 4.19932e-05 8.90625e-06
+7.2 0 4.19932e-05 8.90625e-06
+8 0 4.19932e-05 8.90625e-06
+9.6 0 4.19932e-05 8.90625e-06
+12.8 0 4.19932e-05 8.90625e-06
+16 0 4.19932e-05 8.90625e-06
+19.2 0 4.19932e-05 8.90625e-06
+END DIST
+
+Metal 6 OVER 4
+DIST count 12 width 1.6
+1.6 0 4.19932e-05 8.90625e-06
+3.2 0 4.19932e-05 8.90625e-06
+4 0 4.19932e-05 8.90625e-06
+4.8 0 4.19932e-05 8.90625e-06
+5.6 0 4.19932e-05 8.90625e-06
+6.4 0 4.19932e-05 8.90625e-06
+7.2 0 4.19932e-05 8.90625e-06
+8 0 4.19932e-05 8.90625e-06
+9.6 0 4.19932e-05 8.90625e-06
+12.8 0 4.19932e-05 8.90625e-06
+16 0 4.19932e-05 8.90625e-06
+19.2 0 4.19932e-05 8.90625e-06
+END DIST
+
+Metal 6 OVER 5
+DIST count 12 width 1.6
+1.6 0 4.19932e-05 8.90625e-06
+3.2 0 4.19932e-05 8.90625e-06
+4 0 4.19932e-05 8.90625e-06
+4.8 0 4.19932e-05 8.90625e-06
+5.6 0 4.19932e-05 8.90625e-06
+6.4 0 4.19932e-05 8.90625e-06
+7.2 0 4.19932e-05 8.90625e-06
+8 0 4.19932e-05 8.90625e-06
+9.6 0 4.19932e-05 8.90625e-06
+12.8 0 4.19932e-05 8.90625e-06
+16 0 4.19932e-05 8.90625e-06
+19.2 0 4.19932e-05 8.90625e-06
+END DIST
+
+Metal 6 UNDER
+WIDTH Table 0 entries:
+
+Metal 6 DIAGUNDER
+WIDTH Table 0 entries:
+END DensityModel 0