diff --git a/sky130/magic/sky130.tech b/sky130/magic/sky130.tech
index 3462a17..beac3de 100644
--- a/sky130/magic/sky130.tech
+++ b/sky130/magic/sky130.tech
@@ -6009,8 +6009,8 @@
 	pwell,space/w a=area
 
 #ifdef MIM
- device subcircuit sky130_fd_pr__cap_mim_m3_1 *mimcap  *m3 w=w l=l
- device subcircuit sky130_fd_pr__cap_mim_m3_2 *mimcap2 *m4 w=w l=l
+ device csubcircuit sky130_fd_pr__cap_mim_m3_1 *mimcap  *m3 w=w l=l
+ device csubcircuit sky130_fd_pr__cap_mim_m3_2 *mimcap2 *m4 w=w l=l
 #endif (MIM)
 
  variants (orig)