diff --git a/sky130/Makefile.in b/sky130/Makefile.in
index 9005dac..db8e314 100644
--- a/sky130/Makefile.in
+++ b/sky130/Makefile.in
@@ -899,7 +899,7 @@
 		fi ; \
 	fi
 
-openlane-%: openlane/config.tcl openlane/rcx_rules.info openlane/sky130_fd_sc_hd/config.tcl  openlane/sky130_fd_sc_hs/config.tcl openlane/sky130_fd_sc_ms/config.tcl openlane/sky130_fd_sc_ls/config.tcl openlane/sky130_fd_sc_hdll/config.tcl openlane/sky130_osu_sc_t18/config.tcl
+openlane-%: openlane/config.tcl openlane/sky130_fd_sc_hd/config.tcl openlane/sky130_fd_sc_hs/config.tcl openlane/sky130_fd_sc_ms/config.tcl openlane/sky130_fd_sc_ls/config.tcl openlane/sky130_fd_sc_hdll/config.tcl openlane/sky130_osu_sc_t18/config.tcl
 	mkdir -p ${OPENLANETOP_STAGING_$*}
 	mkdir -p ${OPENLANE_STAGING_$*}
 	rm -rf ${OPENLANE_STAGING_$*}/custom_cells/*
@@ -934,9 +934,20 @@
 	    rm -f ${OPENLANE_STAGING_$*}/sky130_osu_sc_t18/$$file ; \
 	done
 
+	rm -f ${OPENLANE_STAGING_$*}/rcx_rules.info
+	rm -f ${OPENLANE_STAGING_$*}/rules.openrcx.sky130$*.min.magic
+	rm -f ${OPENLANE_STAGING_$*}/rules.openrcx.sky130$*.nom.magic
+	rm -f ${OPENLANE_STAGING_$*}/rules.openrcx.sky130$*.max.magic
+
 	cp -r openlane/custom_cells ${OPENLANE_STAGING_$*}
 	${CPP} ${SKY130$*_DEFS} openlane/config.tcl ${OPENLANE_STAGING_$*}/config.tcl
-	${CPP} ${SKY130$*_DEFS} openlane/rcx_rules.info ${OPENLANE_STAGING_$*}/rcx_rules.info
+
+	${CPP} ${SKY130$*_DEFS} openlane/rules.openrcx.sky130$*.min.magic \
+		${OPENLANE_STAGING_$*}/rules.openrcx.sky130$*.min.magic
+	${CPP} ${SKY130$*_DEFS} openlane/rules.openrcx.sky130$*.nom.magic \
+		${OPENLANE_STAGING_$*}/rules.openrcx.sky130$*.nom.magic
+	${CPP} ${SKY130$*_DEFS} openlane/rules.openrcx.sky130$*.max.magic \
+		${OPENLANE_STAGING_$*}/rules.openrcx.sky130$*.max.magic
 
 	for file in ${OPENLANE_COMMON} ; do \
 	    ${CPP} -quiet ${SKY130$*_DEFS} openlane/sky130_fd_sc_hd/$$file \
diff --git a/sky130/openlane/rcx_rules.info b/sky130/openlane/rcx_rules.info
deleted file mode 100644
index 558f2ca..0000000
--- a/sky130/openlane/rcx_rules.info
+++ /dev/null
@@ -1,1645 +0,0 @@
-Extraction Rules for OpenRCX
-
-DIAGMODEL ON
-
-LayerCount 6
-DensityRate 1  0
-
-DensityModel 0
-
-Metal 1 RESOVER
-WIDTH Table 1 entries:  0.17
-
-Metal 1 RESOVER 0
-DIST count 55 width 0.17
-0 0 0 0.0681705
-0 0.31 0 0.0681705
-0 0.48 0 0.0681705
-0 0.705 0 0.0681705
-0 0.79 0 0.0681705
-0 0.96 0 0.0681705
-0 1.185 0 0.0681705
-0 1.27 0 0.0681705
-0 1.44 0 0.0681705
-0 1.92 0 0.0681705
-0.31 0.31 0 0.0681705
-0.31 0.48 0 0.0681705
-0.31 0.705 0 0.0681705
-0.31 0.79 0 0.0681705
-0.31 0.96 0 0.0681705
-0.31 1.185 0 0.0681705
-0.31 1.27 0 0.0681705
-0.31 1.44 0 0.0681705
-0.31 1.92 0 0.0681705
-0.48 0.48 0 0.0681705
-0.48 0.705 0 0.0681705
-0.48 0.79 0 0.0681705
-0.48 0.96 0 0.0681705
-0.48 1.185 0 0.0681705
-0.48 1.27 0 0.0681705
-0.48 1.44 0 0.0681705
-0.48 1.92 0 0.0681705
-0.705 0.705 0 0.0681705
-0.705 0.79 0 0.0681705
-0.705 0.96 0 0.0681705
-0.705 1.185 0 0.0681705
-0.705 1.27 0 0.0681705
-0.705 1.44 0 0.0681705
-0.705 1.92 0 0.0681705
-0.79 0.79 0 0.0681705
-0.79 0.96 0 0.0681705
-0.79 1.185 0 0.0681705
-0.79 1.27 0 0.0681705
-0.79 1.44 0 0.0681705
-0.79 1.92 0 0.0681705
-0.96 0.96 0 0.0681705
-0.96 1.185 0 0.0681705
-0.96 1.27 0 0.0681705
-0.96 1.44 0 0.0681705
-0.96 1.92 0 0.0681705
-1.185 1.185 0 0.0681705
-1.185 1.27 0 0.0681705
-1.185 1.44 0 0.0681705
-1.185 1.92 0 0.0681705
-1.27 1.27 0 0.0681705
-1.27 1.44 0 0.0681705
-1.27 1.92 0 0.0681705
-1.44 1.44 0 0.0681705
-1.44 1.92 0 0.0681705
-1.92 0 1.92 0.0681705
-END DIST
-
-Metal 1 OVER
-WIDTH Table 1 entries:  0.17
-
-Metal 1 OVER 0
-DIST count 12 width 0.17
-0.17 8.61372e-05 9.44952e-06 0.0340853
-0.34 5.12844e-05 1.33801e-05 0.0340853
-0.425 4.3541e-05 1.4824e-05 0.0340853
-0.51 3.88428e-05 1.54397e-05 0.0340853
-0.595 3.34495e-05 1.78955e-05 0.0340853
-0.68 3.09507e-05 1.8301e-05 0.0340853
-0.765 2.52695e-05 2.19586e-05 0.0340853
-0.85 2.37271e-05 2.22492e-05 0.0340853
-1.02 2.19149e-05 2.261e-05 0.0340853
-1.36 1.91487e-05 2.24345e-05 0.0340853
-1.7 0 3.91595e-05 0.0340853
-2.04 0 3.91595e-05 0.0340853
-END DIST
-
-Metal 1 UNDER
-WIDTH Table 1 entries:  0.17
-
-Metal 1 UNDER 2
-DIST count 12 width 0.17
-0.17 6.80777e-05 3.34433e-05 0.0340853
-0.34 3.61876e-05 3.33933e-05 0.0340853
-0.425 3.23648e-05 3.24802e-05 0.0340853
-0.51 2.79091e-05 3.41271e-05 0.0340853
-0.595 2.3655e-05 3.64674e-05 0.0340853
-0.68 1.98402e-05 3.89822e-05 0.0340853
-0.765 1.61768e-05 4.11339e-05 0.0340853
-0.85 1.35702e-05 4.31009e-05 0.0340853
-1.02 9.32626e-06 4.69828e-05 0.0340853
-1.36 1.29978e-05 4.73246e-05 0.0340853
-1.7 0 5.96826e-05 0.0340853
-2.04 0 5.96818e-05 0.0340853
-END DIST
-
-Metal 1 UNDER 3
-DIST count 12 width 0.17
-0.17 7.93746e-05 1.67654e-05 0.0340853
-0.34 4.55879e-05 1.9837e-05 0.0340853
-0.425 3.80076e-05 2.15216e-05 0.0340853
-0.51 3.33286e-05 2.23055e-05 0.0340853
-0.595 2.90274e-05 2.37905e-05 0.0340853
-0.68 2.61838e-05 2.46021e-05 0.0340853
-0.765 2.17494e-05 2.71055e-05 0.0340853
-0.85 1.97574e-05 2.80056e-05 0.0340853
-1.02 1.68608e-05 2.99991e-05 0.0340853
-1.36 1.18524e-05 3.36875e-05 0.0340853
-1.7 0 4.32588e-05 0.0340853
-2.04 0 4.32588e-05 0.0340853
-END DIST
-
-Metal 1 UNDER 4
-DIST count 12 width 0.17
-0.17 8.1339e-05 1.43746e-05 0.0340853
-0.34 4.83253e-05 1.64574e-05 0.0340853
-0.425 4.06995e-05 1.81761e-05 0.0340853
-0.51 3.59956e-05 1.90192e-05 0.0340853
-0.595 3.09877e-05 2.11822e-05 0.0340853
-0.68 2.81327e-05 2.18956e-05 0.0340853
-0.765 2.30317e-05 2.48824e-05 0.0340853
-0.85 2.11752e-05 2.54048e-05 0.0340853
-1.02 1.88539e-05 2.62139e-05 0.0340853
-1.36 1.58653e-05 2.65591e-05 0.0340853
-1.7 0 4.12234e-05 0.0340853
-2.04 0 4.12234e-05 0.0340853
-END DIST
-
-Metal 1 UNDER 5
-DIST count 12 width 0.17
-0.17 8.24722e-05 1.31413e-05 0.0340853
-0.34 4.90302e-05 1.57381e-05 0.0340853
-0.425 4.16521e-05 1.71229e-05 0.0340853
-0.51 3.71326e-05 1.76188e-05 0.0340853
-0.595 3.23129e-05 1.94861e-05 0.0340853
-0.68 2.95651e-05 2.00547e-05 0.0340853
-0.765 2.44851e-05 2.3032e-05 0.0340853
-0.85 2.26448e-05 2.35791e-05 0.0340853
-1.02 2.0326e-05 2.45073e-05 0.0340853
-1.36 1.72821e-05 2.52146e-05 0.0340853
-1.7 0 4.02602e-05 0.0340853
-2.04 0 4.02602e-05 0.0340853
-END DIST
-
-Metal 1 UNDER 6
-DIST count 12 width 0.17
-0.17 8.19265e-05 1.35744e-05 0.0340853
-0.34 4.90529e-05 1.5458e-05 0.0340853
-0.425 4.1736e-05 1.67972e-05 0.0340853
-0.51 3.7272e-05 1.72522e-05 0.0340853
-0.595 3.24866e-05 1.90445e-05 0.0340853
-0.68 2.97193e-05 1.95578e-05 0.0340853
-0.765 2.46764e-05 2.24312e-05 0.0340853
-0.85 2.28305e-05 2.29498e-05 0.0340853
-1.02 2.0544e-05 2.39104e-05 0.0340853
-1.36 1.7595e-05 2.51078e-05 0.0340853
-1.7 0 3.97983e-05 0.0340853
-2.04 0 3.97982e-05 0.0340853
-END DIST
-
-Metal 1 DIAGUNDER
-WIDTH Table 1 entries:  0.17
-
-Metal 1 DIAGUNDER 2
-DIST count 13 width 0.17
-0 0 2.66887e-05 0.0340853
-0.17 0 2.24007e-05 0.0340853
-0.34 0 1.9211e-05 0.0340853
-0.425 0 1.79128e-05 0.0340853
-0.51 0 1.68696e-05 0.0340853
-0.595 0 1.60676e-05 0.0340853
-0.68 0 1.54732e-05 0.0340853
-0.765 0 1.50473e-05 0.0340853
-0.85 0 1.47528e-05 0.0340853
-1.02 0 1.44392e-05 0.0340853
-1.36 0 1.43783e-05 0.0340853
-1.7 0 9.51316e-06 0.0340853
-2.04 0 0 0.0340853
-END DIST
-
-Metal 1 DIAGUNDER 3
-DIST count 13 width 0.17
-0 0 1.30121e-05 0.0340853
-0.17 0 1.24717e-05 0.0340853
-0.34 0 1.19979e-05 0.0340853
-0.425 0 1.17403e-05 0.0340853
-0.51 0 1.14754e-05 0.0340853
-0.595 0 1.12057e-05 0.0340853
-0.68 0 1.09324e-05 0.0340853
-0.765 0 1.06556e-05 0.0340853
-0.85 0 1.03755e-05 0.0340853
-1.02 0 9.80591e-06 0.0340853
-1.36 0 1.0251e-05 0.0340853
-1.7 0 9.16462e-06 0.0340853
-2.04 0 8.19109e-06 0.0340853
-END DIST
-
-Metal 1 DIAGUNDER 4
-DIST count 13 width 0.17
-0 0 9.24997e-06 0.0340853
-0.17 0 0 0.0340853
-0.34 0 0 0.0340853
-0.425 0 0 0.0340853
-0.51 0 0 0.0340853
-0.595 0 0 0.0340853
-0.68 0 0 0.0340853
-0.765 0 0 0.0340853
-0.85 0 0 0.0340853
-1.02 0 0 0.0340853
-1.36 0 0 0.0340853
-1.7 0 0 0.0340853
-2.04 0 0 0.0340853
-END DIST
-
-Metal 1 DIAGUNDER 5
-DIST count 13 width 0.17
-0 0 6.03723e-06 0.0340853
-0.17 0 0 0.0340853
-0.34 0 0 0.0340853
-0.425 0 0 0.0340853
-0.51 0 0 0.0340853
-0.595 0 0 0.0340853
-0.68 0 0 0.0340853
-0.765 0 0 0.0340853
-0.85 0 0 0.0340853
-1.02 0 0 0.0340853
-1.36 0 0 0.0340853
-1.7 0 0 0.0340853
-2.04 0 0 0.0340853
-END DIST
-
-Metal 1 DIAGUNDER 6
-DIST count 0 width 0.17
-END DIST
-
-Metal 2 RESOVER
-WIDTH Table 1 entries:  0.14
-
-Metal 2 RESOVER 0
-DIST count 55 width 0.14
-0 0 0 0.00120566
-0 0.23 0 0.00120566
-0 0.37 0 0.00120566
-0 0.53 0 0.00120566
-0 0.6 0 0.00120566
-0 0.74 0 0.00120566
-0 0.9 0 0.00120566
-0 0.97 0 0.00120566
-0 1.11 0 0.00120566
-0 1.48 0 0.00120566
-0.23 0.23 0 0.00120566
-0.23 0.37 0 0.00120566
-0.23 0.53 0 0.00120566
-0.23 0.6 0 0.00120566
-0.23 0.74 0 0.00120566
-0.23 0.9 0 0.00120566
-0.23 0.97 0 0.00120566
-0.23 1.11 0 0.00120566
-0.23 1.48 0 0.00120566
-0.37 0.37 0 0.00120566
-0.37 0.53 0 0.00120566
-0.37 0.6 0 0.00120566
-0.37 0.74 0 0.00120566
-0.37 0.9 0 0.00120566
-0.37 0.97 0 0.00120566
-0.37 1.11 0 0.00120566
-0.37 1.48 0 0.00120566
-0.53 0.53 0 0.00120566
-0.53 0.6 0 0.00120566
-0.53 0.74 0 0.00120566
-0.53 0.9 0 0.00120566
-0.53 0.97 0 0.00120566
-0.53 1.11 0 0.00120566
-0.53 1.48 0 0.00120566
-0.6 0.6 0 0.00120566
-0.6 0.74 0 0.00120566
-0.6 0.9 0 0.00120566
-0.6 0.97 0 0.00120566
-0.6 1.11 0 0.00120566
-0.6 1.48 0 0.00120566
-0.74 0.74 0 0.00120566
-0.74 0.9 0 0.00120566
-0.74 0.97 0 0.00120566
-0.74 1.11 0 0.00120566
-0.74 1.48 0 0.00120566
-0.9 0.9 0 0.00120566
-0.9 0.97 0 0.00120566
-0.9 1.11 0 0.00120566
-0.9 1.48 0 0.00120566
-0.97 0.97 0 0.00120566
-0.97 1.11 0 0.00120566
-0.97 1.48 0 0.00120566
-1.11 1.11 0 0.00120566
-1.11 1.48 0 0.00120566
-1.48 0 1.48 0.00120566
-END DIST
-
-Metal 2 RESOVER 1
-DIST count 0 width 0.14
-END DIST
-
-Metal 2 OVER
-WIDTH Table 1 entries:  0.14
-
-Metal 2 OVER 0
-DIST count 12 width 0.14
-0.14 0.000138118 5.73561e-06 0.000602828
-0.28 8.52281e-05 7.80545e-06 0.000602828
-0.35 7.30176e-05 8.35076e-06 0.000602828
-0.42 6.58219e-05 8.11883e-06 0.000602828
-0.49 5.71535e-05 1.02824e-05 0.000602828
-0.56 5.08842e-05 1.18282e-05 0.000602828
-0.63 4.11549e-05 1.83851e-05 0.000602828
-0.7 3.76403e-05 1.93881e-05 0.000602828
-0.84 3.18492e-05 2.13832e-05 0.000602828
-1.12 2.39134e-05 2.43226e-05 0.000602828
-1.4 1.83959e-05 2.6658e-05 0.000602828
-1.68 0 4.29842e-05 0.000602828
-END DIST
-
-Metal 2 OVER 1
-DIST count 12 width 0.14
-0.14 0.000130654 1.567e-05 0.000602828
-0.28 7.42447e-05 2.18678e-05 0.000602828
-0.35 6.24752e-05 2.35482e-05 0.000602828
-0.42 5.54264e-05 2.41468e-05 0.000602828
-0.49 4.83787e-05 2.59601e-05 0.000602828
-0.56 4.21914e-05 2.84295e-05 0.000602828
-0.63 3.48531e-05 3.32113e-05 0.000602828
-0.7 3.12986e-05 3.48401e-05 0.000602828
-0.84 2.36804e-05 3.98139e-05 0.000602828
-1.12 1.6881e-05 4.38251e-05 0.000602828
-1.4 1.26539e-05 4.67742e-05 0.000602828
-1.68 0 5.8778e-05 0.000602828
-END DIST
-
-Metal 2 UNDER
-WIDTH Table 1 entries:  0.14
-
-Metal 2 UNDER 3
-DIST count 12 width 0.14
-0.14 0.000125315 2.16179e-05 0.000602828
-0.28 6.95395e-05 2.85793e-05 0.000602828
-0.35 5.66731e-05 3.2483e-05 0.000602828
-0.42 4.79433e-05 3.60836e-05 0.000602828
-0.49 4.07063e-05 3.92515e-05 0.000602828
-0.56 3.44506e-05 4.25667e-05 0.000602828
-0.63 2.73011e-05 4.77156e-05 0.000602828
-0.7 2.39016e-05 4.955e-05 0.000602828
-0.84 1.85187e-05 5.2665e-05 0.000602828
-1.12 9.52476e-06 5.89915e-05 0.000602828
-1.4 7.1476e-06 6.0619e-05 0.000602828
-1.68 0 6.7952e-05 0.000602828
-END DIST
-
-Metal 2 UNDER 4
-DIST count 12 width 0.14
-0.14 0.000130705 1.50119e-05 0.000602828
-0.28 7.79806e-05 1.64308e-05 0.000602828
-0.35 6.60048e-05 1.74046e-05 0.000602828
-0.42 5.88336e-05 1.74203e-05 0.000602828
-0.49 5.20059e-05 1.8409e-05 0.000602828
-0.56 4.54686e-05 2.03003e-05 0.000602828
-0.63 3.79594e-05 2.46138e-05 0.000602828
-0.7 3.42363e-05 2.57893e-05 0.000602828
-0.84 2.82732e-05 2.79929e-05 0.000602828
-1.12 2.04041e-05 3.13738e-05 0.000602828
-1.4 1.49853e-05 3.43422e-05 0.000602828
-1.68 0 4.79875e-05 0.000602828
-END DIST
-
-Metal 2 UNDER 5
-DIST count 12 width 0.14
-0.14 0.000132208 1.2287e-05 0.000602828
-0.28 8.20972e-05 1.12027e-05 0.000602828
-0.35 6.98093e-05 1.22795e-05 0.000602828
-0.42 6.24113e-05 1.21279e-05 0.000602828
-0.49 5.46395e-05 1.37539e-05 0.000602828
-0.56 4.82341e-05 1.53582e-05 0.000602828
-0.63 3.98791e-05 2.04812e-05 0.000602828
-0.7 3.64359e-05 2.14036e-05 0.000602828
-0.84 3.09173e-05 2.32351e-05 0.000602828
-1.12 2.32619e-05 2.6199e-05 0.000602828
-1.4 1.74854e-05 2.89191e-05 0.000602828
-1.68 0 4.43916e-05 0.000602828
-END DIST
-
-Metal 2 UNDER 6
-DIST count 12 width 0.14
-0.14 0.000129054 1.46584e-05 0.000602828
-0.28 7.94672e-05 1.26295e-05 0.000602828
-0.35 6.82334e-05 1.28446e-05 0.000602828
-0.42 6.16935e-05 1.22491e-05 0.000602828
-0.49 5.4609e-05 1.35439e-05 0.000602828
-0.56 4.85906e-05 1.49208e-05 0.000602828
-0.63 4.0474e-05 1.9796e-05 0.000602828
-0.7 3.71105e-05 2.05385e-05 0.000602828
-0.84 3.16873e-05 2.20032e-05 0.000602828
-1.12 2.4533e-05 2.42645e-05 0.000602828
-1.4 1.95902e-05 2.6429e-05 0.000602828
-1.68 0 4.43317e-05 0.000602828
-END DIST
-
-Metal 2 DIAGUNDER
-WIDTH Table 1 entries:  0.14
-
-Metal 2 DIAGUNDER 3
-DIST count 13 width 0.14
-0 0 3.31347e-05 0.000602828
-0.14 0 2.73289e-05 0.000602828
-0.28 0 2.33157e-05 0.000602828
-0.35 0 2.14946e-05 0.000602828
-0.42 0 1.99143e-05 0.000602828
-0.49 0 1.8593e-05 0.000602828
-0.56 0 1.71886e-05 0.000602828
-0.63 0 1.63751e-05 0.000602828
-0.7 0 1.57544e-05 0.000602828
-0.84 0 1.49643e-05 0.000602828
-1.12 0 1.45003e-05 0.000602828
-1.4 0 1.4692e-05 0.000602828
-1.68 0 1.49947e-05 0.000602828
-END DIST
-
-Metal 2 DIAGUNDER 4
-DIST count 13 width 0.14
-0 0 1.71233e-05 0.000602828
-0.14 0 1.6158e-05 0.000602828
-0.28 0 1.57688e-05 0.000602828
-0.35 0 1.55375e-05 0.000602828
-0.42 0 1.52888e-05 0.000602828
-0.49 0 1.50272e-05 0.000602828
-0.56 0 1.44808e-05 0.000602828
-0.63 0 1.4219e-05 0.000602828
-0.7 0 1.39606e-05 0.000602828
-0.84 0 1.34715e-05 0.000602828
-1.12 0 1.26613e-05 0.000602828
-1.4 0 1.20702e-05 0.000602828
-1.68 0 1.16482e-05 0.000602828
-END DIST
-
-Metal 2 DIAGUNDER 5
-DIST count 13 width 0.14
-0 0 9.81043e-06 0.000602828
-0.14 0 9.44235e-06 0.000602828
-0.28 0 9.37367e-06 0.000602828
-0.35 0 9.33254e-06 0.000602828
-0.42 0 9.28864e-06 0.000602828
-0.49 0 9.24217e-06 0.000602828
-0.56 0 9.02038e-06 0.000602828
-0.63 0 8.97284e-06 0.000602828
-0.7 0 8.92341e-06 0.000602828
-0.84 0 8.81955e-06 0.000602828
-1.12 0 8.59823e-06 0.000602828
-1.4 0 8.37071e-06 0.000602828
-1.68 0 0 0.000602828
-END DIST
-
-Metal 2 DIAGUNDER 6
-DIST count 13 width 0.14
-0 0 8.57973e-06 0.000602828
-0.14 0 0 0.000602828
-0.28 0 0 0.000602828
-0.35 0 0 0.000602828
-0.42 0 0 0.000602828
-0.49 0 0 0.000602828
-0.56 0 0 0.000602828
-0.63 0 0 0.000602828
-0.7 0 0 0.000602828
-0.84 0 0 0.000602828
-1.12 0 0 0.000602828
-1.4 0 0 0.000602828
-1.68 0 0 0.000602828
-END DIST
-
-Metal 2 OVERUNDER
-WIDTH Table 1 entries:  0.14
-
-Metal 2 OVER 1 UNDER 3
-DIST count 12 width 0.14
-0.14 0.000119372 3.57253e-05 0.000602828
-0.28 6.27954e-05 4.44719e-05 0.000602828
-0.35 4.88178e-05 5.08946e-05 0.000602828
-0.42 3.95403e-05 5.63268e-05 0.000602828
-0.49 3.34018e-05 6.23328e-05 0.000602828
-0.56 2.73394e-05 6.6527e-05 0.000602828
-0.63 2.16318e-05 7.10757e-05 0.000602828
-0.7 1.83906e-05 7.35041e-05 0.000602828
-0.84 1.35103e-05 7.73619e-05 0.000602828
-1.12 8.4057e-06 8.16741e-05 0.000602828
-1.4 6.46386e-06 8.30622e-05 0.000602828
-1.68 0 8.8504e-05 0.000602828
-END DIST
-
-Metal 2 OVER 1 UNDER 4
-DIST count 12 width 0.14
-0.14 0.000124988 2.29842e-05 0.000602828
-0.28 6.90886e-05 2.85542e-05 0.000602828
-0.35 5.76192e-05 3.0258e-05 0.000602828
-0.42 5.06751e-05 3.09869e-05 0.000602828
-0.49 4.45953e-05 3.23341e-05 0.000602828
-0.56 3.82076e-05 3.51534e-05 0.000602828
-0.63 3.19793e-05 3.88739e-05 0.000602828
-0.7 2.82205e-05 4.07125e-05 0.000602828
-0.84 2.02291e-05 4.60782e-05 0.000602828
-1.12 1.35021e-05 5.02313e-05 0.000602828
-1.4 9.5176e-06 5.33196e-05 0.000602828
-1.68 0 6.26264e-05 0.000602828
-END DIST
-
-Metal 2 OVER 1 UNDER 5
-DIST count 12 width 0.14
-0.14 0.000126034 2.05039e-05 0.000602828
-0.28 7.19999e-05 2.42552e-05 0.000602828
-0.35 6.00408e-05 2.63318e-05 0.000602828
-0.42 5.27087e-05 2.71038e-05 0.000602828
-0.49 4.60601e-05 2.87162e-05 0.000602828
-0.56 3.97624e-05 3.12743e-05 0.000602828
-0.63 3.32514e-05 3.52182e-05 0.000602828
-0.7 2.9778e-05 3.67814e-05 0.000602828
-0.84 2.22918e-05 4.17105e-05 0.000602828
-1.12 1.59869e-05 4.53682e-05 0.000602828
-1.4 1.17684e-05 4.82969e-05 0.000602828
-1.68 0 5.93339e-05 0.000602828
-END DIST
-
-Metal 2 OVER 1 UNDER 6
-DIST count 12 width 0.14
-0.14 0.000124315 2.20393e-05 0.000602828
-0.28 7.07847e-05 2.48307e-05 0.000602828
-0.35 5.91661e-05 2.66924e-05 0.000602828
-0.42 5.21487e-05 2.73862e-05 0.000602828
-0.49 4.57906e-05 2.8894e-05 0.000602828
-0.56 3.97363e-05 3.12372e-05 0.000602828
-0.63 3.33777e-05 3.49493e-05 0.000602828
-0.7 3.0004e-05 3.62833e-05 0.000602828
-0.84 2.26829e-05 4.077e-05 0.000602828
-1.12 1.67524e-05 4.38231e-05 0.000602828
-1.4 1.29366e-05 4.64806e-05 0.000602828
-1.68 0 5.88991e-05 0.000602828
-END DIST
-
-Metal 3 RESOVER
-WIDTH Table 1 entries:  0.14
-
-Metal 3 RESOVER 0
-DIST count 55 width 0.14
-0 0 0 0.00122133
-0 0.34 0 0.00122133
-0 0.48 0 0.00122133
-0 0.75 0 0.00122133
-0 0.82 0 0.00122133
-0 0.96 0 0.00122133
-0 1.23 0 0.00122133
-0 1.3 0 0.00122133
-0 1.44 0 0.00122133
-0 1.92 0 0.00122133
-0.34 0.34 0 0.00122133
-0.34 0.48 0 0.00122133
-0.34 0.75 0 0.00122133
-0.34 0.82 0 0.00122133
-0.34 0.96 0 0.00122133
-0.34 1.23 0 0.00122133
-0.34 1.3 0 0.00122133
-0.34 1.44 0 0.00122133
-0.34 1.92 0 0.00122133
-0.48 0.48 0 0.00122133
-0.48 0.75 0 0.00122133
-0.48 0.82 0 0.00122133
-0.48 0.96 0 0.00122133
-0.48 1.23 0 0.00122133
-0.48 1.3 0 0.00122133
-0.48 1.44 0 0.00122133
-0.48 1.92 0 0.00122133
-0.75 0.75 0 0.00122133
-0.75 0.82 0 0.00122133
-0.75 0.96 0 0.00122133
-0.75 1.23 0 0.00122133
-0.75 1.3 0 0.00122133
-0.75 1.44 0 0.00122133
-0.75 1.92 0 0.00122133
-0.82 0.82 0 0.00122133
-0.82 0.96 0 0.00122133
-0.82 1.23 0 0.00122133
-0.82 1.3 0 0.00122133
-0.82 1.44 0 0.00122133
-0.82 1.92 0 0.00122133
-0.96 0.96 0 0.00122133
-0.96 1.23 0 0.00122133
-0.96 1.3 0 0.00122133
-0.96 1.44 0 0.00122133
-0.96 1.92 0 0.00122133
-1.23 1.23 0 0.00122133
-1.23 1.3 0 0.00122133
-1.23 1.44 0 0.00122133
-1.23 1.92 0 0.00122133
-1.3 1.3 0 0.00122133
-1.3 1.44 0 0.00122133
-1.3 1.92 0 0.00122133
-1.44 1.44 0 0.00122133
-1.44 1.92 0 0.00122133
-1.92 0 1.92 0.00122133
-END DIST
-
-Metal 3 RESOVER 1
-DIST count 0 width 0.14
-END DIST
-
-Metal 3 RESOVER 2
-DIST count 0 width 0.14
-END DIST
-
-Metal 3 OVER
-WIDTH Table 1 entries:  0.14
-
-Metal 3 OVER 0
-DIST count 12 width 0.14
-0.14 0.000136816 6.4904e-06 0.000610664
-0.28 8.34141e-05 9.07691e-06 0.000610664
-0.35 7.14996e-05 9.78972e-06 0.000610664
-0.42 6.58888e-05 8.30119e-06 0.000610664
-0.49 5.83556e-05 9.50429e-06 0.000610664
-0.56 4.70158e-05 1.65661e-05 0.000610664
-0.63 4.32143e-05 1.7029e-05 0.000610664
-0.7 4.01096e-05 1.74903e-05 0.000610664
-0.84 3.52495e-05 1.84518e-05 0.000610664
-1.12 2.83e-05 2.04259e-05 0.000610664
-1.4 2.35213e-05 2.18521e-05 0.000610664
-1.68 0 4.29564e-05 0.000610664
-END DIST
-
-Metal 3 OVER 1
-DIST count 12 width 0.14
-0.14 0.000127192 1.69995e-05 0.000610664
-0.28 7.66247e-05 1.63418e-05 0.000610664
-0.35 6.50566e-05 1.70294e-05 0.000610664
-0.42 5.90549e-05 1.62173e-05 0.000610664
-0.49 5.32273e-05 1.65602e-05 0.000610664
-0.56 4.46891e-05 2.114e-05 0.000610664
-0.63 4.07293e-05 2.19278e-05 0.000610664
-0.7 3.74585e-05 2.26078e-05 0.000610664
-0.84 3.23579e-05 2.37641e-05 0.000610664
-1.12 2.54578e-05 2.5716e-05 0.000610664
-1.4 2.10804e-05 2.71969e-05 0.000610664
-1.68 0 4.64982e-05 0.000610664
-END DIST
-
-Metal 3 OVER 2
-DIST count 12 width 0.14
-0.14 0.000124423 2.32963e-05 0.000610664
-0.28 6.96191e-05 2.85508e-05 0.000610664
-0.35 5.56138e-05 3.34378e-05 0.000610664
-0.42 4.92953e-05 3.40191e-05 0.000610664
-0.49 4.27985e-05 3.56844e-05 0.000610664
-0.56 3.40381e-05 4.10225e-05 0.000610664
-0.63 2.98499e-05 4.25768e-05 0.000610664
-0.7 2.64613e-05 4.39629e-05 0.000610664
-0.84 2.01626e-05 4.76138e-05 0.000610664
-1.12 1.40572e-05 5.12535e-05 0.000610664
-1.4 1.08465e-05 5.32306e-05 0.000610664
-1.68 0 6.30477e-05 0.000610664
-END DIST
-
-Metal 3 UNDER
-WIDTH Table 1 entries:  0.14
-
-Metal 3 UNDER 4
-DIST count 12 width 0.14
-0.14 0.000126123 1.95052e-05 0.000610664
-0.28 7.26959e-05 2.23848e-05 0.000610664
-0.35 5.95301e-05 2.56742e-05 0.000610664
-0.42 5.08436e-05 2.8336e-05 0.000610664
-0.49 4.43139e-05 3.00085e-05 0.000610664
-0.56 3.54721e-05 3.54467e-05 0.000610664
-0.63 3.14061e-05 3.68564e-05 0.000610664
-0.7 2.81522e-05 3.8015e-05 0.000610664
-0.84 2.33034e-05 3.98469e-05 0.000610664
-1.12 1.70668e-05 4.26181e-05 0.000610664
-1.4 1.30512e-05 4.46023e-05 0.000610664
-1.68 0 5.62342e-05 0.000610664
-END DIST
-
-Metal 3 UNDER 5
-DIST count 12 width 0.14
-0.14 0.000128808 1.51914e-05 0.000610664
-0.28 7.72605e-05 1.52063e-05 0.000610664
-0.35 6.57281e-05 1.59295e-05 0.000610664
-0.42 5.97961e-05 1.5065e-05 0.000610664
-0.49 5.40428e-05 1.52938e-05 0.000610664
-0.56 4.55078e-05 1.98013e-05 0.000610664
-0.63 4.15542e-05 2.05024e-05 0.000610664
-0.7 3.82674e-05 2.11168e-05 0.000610664
-0.84 3.30494e-05 2.22271e-05 0.000610664
-1.12 2.56053e-05 2.43909e-05 0.000610664
-1.4 2.05985e-05 2.61987e-05 0.000610664
-1.68 0 4.48263e-05 0.000610664
-END DIST
-
-Metal 3 UNDER 6
-DIST count 12 width 0.14
-0.14 0.000131355 1.24995e-05 0.000610664
-0.28 8.05674e-05 1.16327e-05 0.000610664
-0.35 6.90668e-05 1.23992e-05 0.000610664
-0.42 6.29339e-05 1.15131e-05 0.000610664
-0.49 5.61372e-05 1.25383e-05 0.000610664
-0.56 4.63299e-05 1.80852e-05 0.000610664
-0.63 4.22832e-05 1.87244e-05 0.000610664
-0.7 3.8944e-05 1.93101e-05 0.000610664
-0.84 3.37351e-05 2.04174e-05 0.000610664
-1.12 2.65995e-05 2.25418e-05 0.000610664
-1.4 2.1936e-05 2.41638e-05 0.000610664
-1.68 0 4.40076e-05 0.000610664
-END DIST
-
-Metal 3 DIAGUNDER
-WIDTH Table 1 entries:  0.14
-
-Metal 3 DIAGUNDER 4
-DIST count 13 width 0.14
-0 0 2.89764e-05 0.000610664
-0.14 0 2.70012e-05 0.000610664
-0.28 0 2.51016e-05 0.000610664
-0.35 0 2.40922e-05 0.000610664
-0.42 0 2.30957e-05 0.000610664
-0.49 0 2.21433e-05 0.000610664
-0.56 0 2.12575e-05 0.000610664
-0.63 0 2.04523e-05 0.000610664
-0.7 0 1.97342e-05 0.000610664
-0.84 0 1.85571e-05 0.000610664
-1.12 0 1.70525e-05 0.000610664
-1.4 0 1.62383e-05 0.000610664
-1.68 0 1.57202e-05 0.000610664
-END DIST
-
-Metal 3 DIAGUNDER 5
-DIST count 13 width 0.14
-0 0 1.23209e-05 0.000610664
-0.14 0 1.19729e-05 0.000610664
-0.28 0 1.18364e-05 0.000610664
-0.35 0 1.1765e-05 0.000610664
-0.42 0 1.1692e-05 0.000610664
-0.49 0 1.16174e-05 0.000610664
-0.56 0 1.15415e-05 0.000610664
-0.63 0 1.14645e-05 0.000610664
-0.7 0 1.13866e-05 0.000610664
-0.84 0 1.12286e-05 0.000610664
-1.12 0 1.09062e-05 0.000610664
-1.4 0 1.05776e-05 0.000610664
-1.68 0 1.02431e-05 0.000610664
-END DIST
-
-Metal 3 DIAGUNDER 6
-DIST count 13 width 0.14
-0 0 1.0436e-05 0.000610664
-0.14 0 1.03181e-05 0.000610664
-0.28 0 1.02827e-05 0.000610664
-0.35 0 1.02641e-05 0.000610664
-0.42 0 1.0245e-05 0.000610664
-0.49 0 1.02253e-05 0.000610664
-0.56 0 1.0205e-05 0.000610664
-0.63 0 1.01841e-05 0.000610664
-0.7 0 1.01626e-05 0.000610664
-0.84 0 1.01175e-05 0.000610664
-1.12 0 1.00172e-05 0.000610664
-1.4 0 9.8733e-06 0.000610664
-1.68 0 9.58175e-06 0.000610664
-END DIST
-
-Metal 3 OVERUNDER
-WIDTH Table 1 entries:  0.14
-
-Metal 3 OVER 1 UNDER 4
-DIST count 12 width 0.14
-0.14 0.000121272 2.58426e-05 0.000610664
-0.28 6.86112e-05 2.78188e-05 0.000610664
-0.35 5.54947e-05 3.12117e-05 0.000610664
-0.42 4.65322e-05 3.42706e-05 0.000610664
-0.49 4.08755e-05 3.55205e-05 0.000610664
-0.56 3.35405e-05 3.96486e-05 0.000610664
-0.63 2.94009e-05 4.12735e-05 0.000610664
-0.7 2.60535e-05 4.26151e-05 0.000610664
-0.84 2.10025e-05 4.47461e-05 0.000610664
-1.12 1.4424e-05 4.80529e-05 0.000610664
-1.4 1.03605e-05 5.03658e-05 0.000610664
-1.68 0 5.95973e-05 0.000610664
-END DIST
-
-Metal 3 OVER 1 UNDER 5
-DIST count 12 width 0.14
-0.14 0.000123453 2.16163e-05 0.000610664
-0.28 7.35216e-05 1.98995e-05 0.000610664
-0.35 6.18244e-05 2.10267e-05 0.000610664
-0.42 5.53367e-05 2.0826e-05 0.000610664
-0.49 5.02035e-05 2.08249e-05 0.000610664
-0.56 4.30336e-05 2.41143e-05 0.000610664
-0.63 3.89508e-05 2.5055e-05 0.000610664
-0.7 3.55934e-05 2.58272e-05 0.000610664
-0.84 3.04001e-05 2.70796e-05 0.000610664
-1.12 2.34671e-05 2.92113e-05 0.000610664
-1.4 1.90797e-05 3.10369e-05 0.000610664
-1.68 0 4.87429e-05 0.000610664
-END DIST
-
-Metal 3 OVER 1 UNDER 6
-DIST count 12 width 0.14
-0.14 0.000124949 1.96143e-05 0.000610664
-0.28 7.52264e-05 1.76242e-05 0.000610664
-0.35 6.37136e-05 1.85306e-05 0.000610664
-0.42 5.72626e-05 1.81979e-05 0.000610664
-0.49 5.17016e-05 1.85489e-05 0.000610664
-0.56 4.39077e-05 2.23637e-05 0.000610664
-0.63 3.9734e-05 2.33058e-05 0.000610664
-0.7 3.62877e-05 2.4091e-05 0.000610664
-0.84 3.09712e-05 2.53663e-05 0.000610664
-1.12 2.40379e-05 2.745e-05 0.000610664
-1.4 1.97744e-05 2.91518e-05 0.000610664
-1.68 0 4.74739e-05 0.000610664
-END DIST
-
-Metal 3 OVER 2 UNDER 4
-DIST count 12 width 0.14
-0.14 0.000115608 3.50312e-05 0.000610664
-0.28 5.83119e-05 4.55418e-05 0.000610664
-0.35 4.49743e-05 5.09966e-05 0.000610664
-0.42 3.77431e-05 5.36392e-05 0.000610664
-0.49 3.17863e-05 5.8277e-05 0.000610664
-0.56 2.4851e-05 6.28011e-05 0.000610664
-0.63 2.09385e-05 6.49097e-05 0.000610664
-0.7 1.79023e-05 6.66157e-05 0.000610664
-0.84 1.3077e-05 6.97887e-05 0.000610664
-1.12 8.49625e-06 7.31327e-05 0.000610664
-1.4 6.21704e-06 7.4809e-05 0.000610664
-1.68 0 8.01802e-05 0.000610664
-END DIST
-
-Metal 3 OVER 2 UNDER 5
-DIST count 12 width 0.14
-0.14 0.000119812 2.94677e-05 0.000610664
-0.28 6.54912e-05 3.40758e-05 0.000610664
-0.35 5.13057e-05 3.94727e-05 0.000610664
-0.42 4.45564e-05 4.07913e-05 0.000610664
-0.49 3.88127e-05 4.2283e-05 0.000610664
-0.56 3.15132e-05 4.63845e-05 0.000610664
-0.63 2.72338e-05 4.81364e-05 0.000610664
-0.7 2.37708e-05 4.96133e-05 0.000610664
-0.84 1.73816e-05 5.3278e-05 0.000610664
-1.12 1.12978e-05 5.68197e-05 0.000610664
-1.4 8.22247e-06 5.88459e-05 0.000610664
-1.68 0 6.6398e-05 0.000610664
-END DIST
-
-Metal 3 OVER 2 UNDER 6
-DIST count 12 width 0.14
-0.14 0.000121356 2.66641e-05 0.000610664
-0.28 6.77499e-05 3.03143e-05 0.000610664
-0.35 5.37608e-05 3.54326e-05 0.000610664
-0.42 4.70926e-05 3.64729e-05 0.000610664
-0.49 4.08946e-05 3.81779e-05 0.000610664
-0.56 3.29078e-05 4.27905e-05 0.000610664
-0.63 2.85927e-05 4.44477e-05 0.000610664
-0.7 2.51025e-05 4.58613e-05 0.000610664
-0.84 1.86949e-05 4.94652e-05 0.000610664
-1.12 1.26703e-05 5.29469e-05 0.000610664
-1.4 9.66659e-06 5.48745e-05 0.000610664
-1.68 0 6.37319e-05 0.000610664
-END DIST
-
-Metal 4 RESOVER
-WIDTH Table 1 entries:  0.3
-
-Metal 4 RESOVER 0
-DIST count 55 width 0.3
-0 0 0 0.000166283
-0 0.44 0 0.000166283
-0 0.74 0 0.000166283
-0 1.03 0 0.000166283
-0 1.18 0 0.000166283
-0 1.48 0 0.000166283
-0 1.77 0 0.000166283
-0 1.92 0 0.000166283
-0 2.22 0 0.000166283
-0 2.96 0 0.000166283
-0.44 0.44 0 0.000166283
-0.44 0.74 0 0.000166283
-0.44 1.03 0 0.000166283
-0.44 1.18 0 0.000166283
-0.44 1.48 0 0.000166283
-0.44 1.77 0 0.000166283
-0.44 1.92 0 0.000166283
-0.44 2.22 0 0.000166283
-0.44 2.96 0 0.000166283
-0.74 0.74 0 0.000166283
-0.74 1.03 0 0.000166283
-0.74 1.18 0 0.000166283
-0.74 1.48 0 0.000166283
-0.74 1.77 0 0.000166283
-0.74 1.92 0 0.000166283
-0.74 2.22 0 0.000166283
-0.74 2.96 0 0.000166283
-1.03 1.03 0 0.000166283
-1.03 1.18 0 0.000166283
-1.03 1.48 0 0.000166283
-1.03 1.77 0 0.000166283
-1.03 1.92 0 0.000166283
-1.03 2.22 0 0.000166283
-1.03 2.96 0 0.000166283
-1.18 1.18 0 0.000166283
-1.18 1.48 0 0.000166283
-1.18 1.77 0 0.000166283
-1.18 1.92 0 0.000166283
-1.18 2.22 0 0.000166283
-1.18 2.96 0 0.000166283
-1.48 1.48 0 0.000166283
-1.48 1.77 0 0.000166283
-1.48 1.92 0 0.000166283
-1.48 2.22 0 0.000166283
-1.48 2.96 0 0.000166283
-1.77 1.77 0 0.000166283
-1.77 1.92 0 0.000166283
-1.77 2.22 0 0.000166283
-1.77 2.96 0 0.000166283
-1.92 1.92 0 0.000166283
-1.92 2.22 0 0.000166283
-1.92 2.96 0 0.000166283
-2.22 2.22 0 0.000166283
-2.22 2.96 0 0.000166283
-2.96 0 2.96 0.000166283
-END DIST
-
-Metal 4 RESOVER 1
-DIST count 0 width 0.3
-END DIST
-
-Metal 4 RESOVER 2
-DIST count 0 width 0.3
-END DIST
-
-Metal 4 RESOVER 3
-DIST count 0 width 0.3
-END DIST
-
-Metal 4 OVER
-WIDTH Table 1 entries:  0.3
-
-Metal 4 OVER 0
-DIST count 12 width 0.3
-0.3 0.00014806 6.0032e-06 8.31416e-05
-0.6 8.72099e-05 8.08133e-06 8.31416e-05
-0.75 7.37384e-05 9.38141e-06 8.31416e-05
-0.9 6.50704e-05 1.01538e-05 8.31416e-05
-1.05 5.63535e-05 1.19692e-05 8.31416e-05
-1.2 4.99443e-05 1.33485e-05 8.31416e-05
-1.35 4.57542e-05 1.41569e-05 8.31416e-05
-1.5 3.71365e-05 2.01545e-05 8.31416e-05
-1.8 3.21699e-05 2.13106e-05 8.31416e-05
-2.4 2.52504e-05 2.33487e-05 8.31416e-05
-3 1.95583e-05 2.58394e-05 8.31416e-05
-3.6 0 4.34504e-05 8.31416e-05
-END DIST
-
-Metal 4 OVER 1
-DIST count 12 width 0.3
-0.3 0.00014111 1.38723e-05 8.31416e-05
-0.6 8.1707e-05 1.43318e-05 8.31416e-05
-0.75 6.84653e-05 1.55604e-05 8.31416e-05
-0.9 6.02964e-05 1.57031e-05 8.31416e-05
-1.05 5.3374e-05 1.62431e-05 8.31416e-05
-1.2 4.68504e-05 1.79145e-05 8.31416e-05
-1.35 4.25354e-05 1.89832e-05 8.31416e-05
-1.5 3.61744e-05 2.28577e-05 8.31416e-05
-1.8 3.09981e-05 2.44961e-05 8.31416e-05
-2.4 2.4072e-05 2.71202e-05 8.31416e-05
-3 1.86949e-05 2.98237e-05 8.31416e-05
-3.6 0 4.6886e-05 8.31416e-05
-END DIST
-
-Metal 4 OVER 2
-DIST count 12 width 0.3
-0.3 0.000140269 1.5854e-05 8.31416e-05
-0.6 7.95803e-05 1.82502e-05 8.31416e-05
-0.75 6.60577e-05 2.0166e-05 8.31416e-05
-0.9 5.75943e-05 2.08744e-05 8.31416e-05
-1.05 5.04916e-05 2.17562e-05 8.31416e-05
-1.2 4.40156e-05 2.35596e-05 8.31416e-05
-1.35 3.97364e-05 2.47136e-05 8.31416e-05
-1.5 3.3428e-05 2.86658e-05 8.31416e-05
-1.8 2.82882e-05 3.05424e-05 8.31416e-05
-2.4 2.12886e-05 3.37244e-05 8.31416e-05
-3 1.59798e-05 3.67443e-05 8.31416e-05
-3.6 0 5.13943e-05 8.31416e-05
-END DIST
-
-Metal 4 OVER 3
-DIST count 12 width 0.3
-0.3 0.000134986 2.28838e-05 8.31416e-05
-0.6 6.96619e-05 3.38989e-05 8.31416e-05
-0.75 5.72228e-05 3.7435e-05 8.31416e-05
-0.9 4.84984e-05 4.06081e-05 8.31416e-05
-1.05 4.09459e-05 4.37168e-05 8.31416e-05
-1.2 3.44564e-05 4.69265e-05 8.31416e-05
-1.35 3.02674e-05 4.88497e-05 8.31416e-05
-1.5 2.42707e-05 5.31037e-05 8.31416e-05
-1.8 2.00089e-05 5.48545e-05 8.31416e-05
-2.4 1.37294e-05 5.79563e-05 8.31416e-05
-3 9.76125e-06 6.05071e-05 8.31416e-05
-3.6 0 7.07783e-05 8.31416e-05
-END DIST
-
-Metal 4 UNDER
-WIDTH Table 1 entries:  0.3
-
-Metal 4 UNDER 5
-DIST count 12 width 0.3
-0.3 0.000135316 2.36301e-05 8.31416e-05
-0.6 6.7595e-05 3.84026e-05 8.31416e-05
-0.75 5.37506e-05 4.24264e-05 8.31416e-05
-0.9 4.48935e-05 4.50291e-05 8.31416e-05
-1.05 3.71003e-05 4.78004e-05 8.31416e-05
-1.2 3.05564e-05 5.08231e-05 8.31416e-05
-1.35 2.61856e-05 5.28313e-05 8.31416e-05
-1.5 2.00076e-05 5.73068e-05 8.31416e-05
-1.8 1.53513e-05 5.98066e-05 8.31416e-05
-2.4 1.05063e-05 6.30361e-05 8.31416e-05
-3 7.41771e-06 6.59394e-05 8.31416e-05
-3.6 0 7.35747e-05 8.31416e-05
-END DIST
-
-Metal 4 UNDER 6
-DIST count 12 width 0.3
-0.3 0.000140175 1.46544e-05 8.31416e-05
-0.6 7.96936e-05 1.62943e-05 8.31416e-05
-0.75 6.66489e-05 1.76954e-05 8.31416e-05
-0.9 5.85025e-05 1.82527e-05 8.31416e-05
-1.05 5.14615e-05 1.91808e-05 8.31416e-05
-1.2 4.47278e-05 2.11824e-05 8.31416e-05
-1.35 4.00772e-05 2.25606e-05 8.31416e-05
-1.5 3.34277e-05 2.66501e-05 8.31416e-05
-1.8 2.76247e-05 2.87572e-05 8.31416e-05
-2.4 2.01469e-05 3.18759e-05 8.31416e-05
-3 1.50997e-05 3.45089e-05 8.31416e-05
-3.6 0 4.83455e-05 8.31416e-05
-END DIST
-
-Metal 4 DIAGUNDER
-WIDTH Table 1 entries:  0.3
-
-Metal 4 DIAGUNDER 5
-DIST count 13 width 0.3
-0 0 3.85072e-05 8.31416e-05
-0.3 0 3.01556e-05 8.31416e-05
-0.6 0 2.5149e-05 8.31416e-05
-0.75 0 2.30367e-05 8.31416e-05
-0.9 0 2.12534e-05 8.31416e-05
-1.05 0 1.9782e-05 8.31416e-05
-1.2 0 1.82214e-05 8.31416e-05
-1.35 0 1.72774e-05 8.31416e-05
-1.5 0 1.65106e-05 8.31416e-05
-1.8 0 1.53432e-05 8.31416e-05
-2.4 0 1.36758e-05 8.31416e-05
-3 0 1.22058e-05 8.31416e-05
-3.6 0 1.081e-05 8.31416e-05
-END DIST
-
-Metal 4 DIAGUNDER 6
-DIST count 13 width 0.3
-0 0 2.21675e-05 8.31416e-05
-0.3 0 2.00002e-05 8.31416e-05
-0.6 0 1.91215e-05 8.31416e-05
-0.75 0 1.86582e-05 8.31416e-05
-0.9 0 1.81798e-05 8.31416e-05
-1.05 0 1.76901e-05 8.31416e-05
-1.2 0 1.68822e-05 8.31416e-05
-1.35 0 1.63993e-05 8.31416e-05
-1.5 0 1.59259e-05 8.31416e-05
-1.8 0 1.50316e-05 8.31416e-05
-2.4 0 1.35353e-05 8.31416e-05
-3 0 1.24338e-05 8.31416e-05
-3.6 0 1.16745e-05 8.31416e-05
-END DIST
-
-Metal 4 OVERUNDER
-WIDTH Table 1 entries:  0.3
-
-Metal 4 OVER 1 UNDER 5
-DIST count 12 width 0.3
-0.3 0.00013111 2.80842e-05 8.31416e-05
-0.6 6.3731e-05 4.26296e-05 8.31416e-05
-0.75 4.98984e-05 4.67934e-05 8.31416e-05
-0.9 4.12459e-05 4.91916e-05 8.31416e-05
-1.05 3.44301e-05 5.13265e-05 8.31416e-05
-1.2 2.79386e-05 5.44243e-05 8.31416e-05
-1.35 2.36e-05 5.64935e-05 8.31416e-05
-1.5 1.87452e-05 5.97169e-05 8.31416e-05
-1.8 1.41858e-05 6.2241e-05 8.31416e-05
-2.4 9.61199e-06 6.5411e-05 8.31416e-05
-3 6.7497e-06 6.83087e-05 8.31416e-05
-3.6 0 7.54357e-05 8.31416e-05
-END DIST
-
-Metal 4 OVER 1 UNDER 6
-DIST count 12 width 0.3
-0.3 0.000136187 1.91389e-05 8.31416e-05
-0.6 7.62508e-05 2.01372e-05 8.31416e-05
-0.75 6.32123e-05 2.166e-05 8.31416e-05
-0.9 5.52146e-05 2.19936e-05 8.31416e-05
-1.05 4.90399e-05 2.23067e-05 8.31416e-05
-1.2 4.23351e-05 2.43965e-05 8.31416e-05
-1.35 3.77281e-05 2.58409e-05 8.31416e-05
-1.5 3.23347e-05 2.88066e-05 8.31416e-05
-1.8 2.65807e-05 3.11811e-05 8.31416e-05
-2.4 1.90483e-05 3.50262e-05 8.31416e-05
-3 1.38838e-05 3.82661e-05 8.31416e-05
-3.6 0 5.10799e-05 8.31416e-05
-END DIST
-
-Metal 4 OVER 2 UNDER 5
-DIST count 12 width 0.3
-0.3 0.000130463 3.46028e-05 8.31416e-05
-0.6 6.14767e-05 5.13019e-05 8.31416e-05
-0.75 4.76882e-05 5.56297e-05 8.31416e-05
-0.9 3.90712e-05 5.83052e-05 8.31416e-05
-1.05 3.22341e-05 6.07652e-05 8.31416e-05
-1.2 2.57497e-05 6.41631e-05 8.31416e-05
-1.35 2.13483e-05 6.64895e-05 8.31416e-05
-1.5 1.64351e-05 6.99231e-05 8.31416e-05
-1.8 1.16403e-05 7.28914e-05 8.31416e-05
-2.4 6.74808e-06 7.66804e-05 8.31416e-05
-3 4.16879e-06 7.95897e-05 8.31416e-05
-3.6 0 8.44473e-05 8.31416e-05
-END DIST
-
-Metal 4 OVER 2 UNDER 6
-DIST count 12 width 0.3
-0.3 0.000135514 2.16781e-05 8.31416e-05
-0.6 7.419e-05 2.46774e-05 8.31416e-05
-0.75 6.09601e-05 2.66896e-05 8.31416e-05
-0.9 5.27865e-05 2.74323e-05 8.31416e-05
-1.05 4.65146e-05 2.8029e-05 8.31416e-05
-1.2 3.99084e-05 3.02435e-05 8.31416e-05
-1.35 3.53859e-05 3.17739e-05 8.31416e-05
-1.5 3.00802e-05 3.48175e-05 8.31416e-05
-1.8 2.44429e-05 3.73692e-05 8.31416e-05
-2.4 1.69841e-05 4.15359e-05 8.31416e-05
-3 1.19713e-05 4.48686e-05 8.31416e-05
-3.6 0 5.59586e-05 8.31416e-05
-END DIST
-
-Metal 4 OVER 3 UNDER 5
-DIST count 12 width 0.3
-0.3 0.000124023 4.81241e-05 8.31416e-05
-0.6 5.5732e-05 6.81708e-05 8.31416e-05
-0.75 4.23479e-05 7.49865e-05 8.31416e-05
-0.9 3.3955e-05 7.98024e-05 8.31416e-05
-1.05 2.75282e-05 8.64411e-05 8.31416e-05
-1.2 2.18668e-05 9.0314e-05 8.31416e-05
-1.35 1.83112e-05 9.26748e-05 8.31416e-05
-1.5 1.43465e-05 9.57613e-05 8.31416e-05
-1.8 1.10711e-05 9.77788e-05 8.31416e-05
-2.4 7.06034e-06 0.000100394 8.31416e-05
-3 4.69938e-06 0.000103191 8.31416e-05
-3.6 0 0.000110319 8.31416e-05
-END DIST
-
-Metal 4 OVER 3 UNDER 6
-DIST count 12 width 0.3
-0.3 0.000130844 2.78049e-05 8.31416e-05
-0.6 6.47308e-05 4.00049e-05 8.31416e-05
-0.75 5.24353e-05 4.338e-05 8.31416e-05
-0.9 4.37548e-05 4.66835e-05 8.31416e-05
-1.05 3.70952e-05 4.97306e-05 8.31416e-05
-1.2 2.80431e-05 5.45739e-05 8.31416e-05
-1.35 2.3947e-05 5.67216e-05 8.31416e-05
-1.5 1.93211e-05 5.98575e-05 8.31416e-05
-1.8 1.49852e-05 6.20868e-05 8.31416e-05
-2.4 8.75022e-06 6.57655e-05 8.31416e-05
-3 5.19751e-06 6.83347e-05 8.31416e-05
-3.6 0 7.4217e-05 8.31416e-05
-END DIST
-
-Metal 5 RESOVER
-WIDTH Table 1 entries:  0.3
-
-Metal 5 RESOVER 0
-DIST count 55 width 0.3
-0 0 0 0.000168094
-0 0.66 0 0.000168094
-0 0.96 0 0.000168094
-0 1.47 0 0.000168094
-0 1.62 0 0.000168094
-0 1.92 0 0.000168094
-0 2.43 0 0.000168094
-0 2.58 0 0.000168094
-0 2.88 0 0.000168094
-0 3.84 0 0.000168094
-0.66 0.66 0 0.000168094
-0.66 0.96 0 0.000168094
-0.66 1.47 0 0.000168094
-0.66 1.62 0 0.000168094
-0.66 1.92 0 0.000168094
-0.66 2.43 0 0.000168094
-0.66 2.58 0 0.000168094
-0.66 2.88 0 0.000168094
-0.66 3.84 0 0.000168094
-0.96 0.96 0 0.000168094
-0.96 1.47 0 0.000168094
-0.96 1.62 0 0.000168094
-0.96 1.92 0 0.000168094
-0.96 2.43 0 0.000168094
-0.96 2.58 0 0.000168094
-0.96 2.88 0 0.000168094
-0.96 3.84 0 0.000168094
-1.47 1.47 0 0.000168094
-1.47 1.62 0 0.000168094
-1.47 1.92 0 0.000168094
-1.47 2.43 0 0.000168094
-1.47 2.58 0 0.000168094
-1.47 2.88 0 0.000168094
-1.47 3.84 0 0.000168094
-1.62 1.62 0 0.000168094
-1.62 1.92 0 0.000168094
-1.62 2.43 0 0.000168094
-1.62 2.58 0 0.000168094
-1.62 2.88 0 0.000168094
-1.62 3.84 0 0.000168094
-1.92 1.92 0 0.000168094
-1.92 2.43 0 0.000168094
-1.92 2.58 0 0.000168094
-1.92 2.88 0 0.000168094
-1.92 3.84 0 0.000168094
-2.43 2.43 0 0.000168094
-2.43 2.58 0 0.000168094
-2.43 2.88 0 0.000168094
-2.43 3.84 0 0.000168094
-2.58 2.58 0 0.000168094
-2.58 2.88 0 0.000168094
-2.58 3.84 0 0.000168094
-2.88 2.88 0 0.000168094
-2.88 3.84 0 0.000168094
-3.84 0 3.84 0.000168094
-END DIST
-
-Metal 5 RESOVER 1
-DIST count 0 width 0.3
-END DIST
-
-Metal 5 RESOVER 2
-DIST count 0 width 0.3
-END DIST
-
-Metal 5 RESOVER 3
-DIST count 0 width 0.3
-END DIST
-
-Metal 5 RESOVER 4
-DIST count 0 width 0.3
-END DIST
-
-Metal 5 OVER
-WIDTH Table 1 entries:  0.3
-
-Metal 5 OVER 0
-DIST count 12 width 0.3
-0.3 0.000146568 5.02495e-06 8.4047e-05
-0.6 8.65107e-05 7.72704e-06 8.4047e-05
-0.75 7.44525e-05 8.10027e-06 8.4047e-05
-0.9 6.91912e-05 6.92988e-06 8.4047e-05
-1.05 6.10527e-05 7.63648e-06 8.4047e-05
-1.2 4.90899e-05 1.52999e-05 8.4047e-05
-1.35 4.47325e-05 1.6183e-05 8.4047e-05
-1.5 4.10382e-05 1.70125e-05 8.4047e-05
-1.8 3.51456e-05 1.84732e-05 8.4047e-05
-2.4 2.72684e-05 2.05896e-05 8.4047e-05
-3 2.27245e-05 2.16227e-05 8.4047e-05
-3.6 0 4.21628e-05 8.4047e-05
-END DIST
-
-Metal 5 OVER 1
-DIST count 12 width 0.3
-0.3 0.000139132 1.26134e-05 8.4047e-05
-0.6 8.14751e-05 1.24631e-05 8.4047e-05
-0.75 6.96557e-05 1.26639e-05 8.4047e-05
-0.9 6.39559e-05 1.16561e-05 8.4047e-05
-1.05 5.80155e-05 1.14228e-05 8.4047e-05
-1.2 4.84838e-05 1.68488e-05 8.4047e-05
-1.35 4.4164e-05 1.77571e-05 8.4047e-05
-1.5 4.04466e-05 1.85645e-05 8.4047e-05
-1.8 3.44414e-05 1.98822e-05 8.4047e-05
-2.4 2.65257e-05 2.16293e-05 8.4047e-05
-3 2.22986e-05 2.24663e-05 8.4047e-05
-3.6 0 4.30286e-05 8.4047e-05
-END DIST
-
-Metal 5 OVER 2
-DIST count 12 width 0.3
-0.3 0.000138894 1.35323e-05 8.4047e-05
-0.6 8.12519e-05 1.35359e-05 8.4047e-05
-0.75 6.93507e-05 1.41118e-05 8.4047e-05
-0.9 6.32992e-05 1.31999e-05 8.4047e-05
-1.05 5.69962e-05 1.29368e-05 8.4047e-05
-1.2 4.73217e-05 1.82256e-05 8.4047e-05
-1.35 4.29978e-05 1.90478e-05 8.4047e-05
-1.5 3.93936e-05 1.98249e-05 8.4047e-05
-1.8 3.37407e-05 2.12537e-05 8.4047e-05
-2.4 2.61844e-05 2.36108e-05 8.4047e-05
-3 2.15726e-05 2.51067e-05 8.4047e-05
-3.6 0 4.46569e-05 8.4047e-05
-END DIST
-
-Metal 5 OVER 3
-DIST count 12 width 0.3
-0.3 0.000140746 1.25047e-05 8.4047e-05
-0.6 8.04344e-05 1.50092e-05 8.4047e-05
-0.75 6.85846e-05 1.55484e-05 8.4047e-05
-0.9 6.25594e-05 1.46735e-05 8.4047e-05
-1.05 5.62133e-05 1.45239e-05 8.4047e-05
-1.2 4.70636e-05 1.9347e-05 8.4047e-05
-1.35 4.25966e-05 2.03596e-05 8.4047e-05
-1.5 3.88407e-05 2.13303e-05 8.4047e-05
-1.8 3.29027e-05 2.31458e-05 8.4047e-05
-2.4 2.49448e-05 2.623e-05 8.4047e-05
-3 2.01555e-05 2.832e-05 8.4047e-05
-3.6 0 4.68405e-05 8.4047e-05
-END DIST
-
-Metal 5 OVER 4
-DIST count 12 width 0.3
-0.3 0.000130323 2.7435e-05 8.4047e-05
-0.6 7.04223e-05 3.27562e-05 8.4047e-05
-0.75 5.49589e-05 3.93818e-05 8.4047e-05
-0.9 4.83178e-05 4.11065e-05 8.4047e-05
-1.05 4.12148e-05 4.33268e-05 8.4047e-05
-1.2 3.03307e-05 5.11997e-05 8.4047e-05
-1.35 2.59923e-05 5.32006e-05 8.4047e-05
-1.5 2.2525e-05 5.4826e-05 8.4047e-05
-1.8 1.75039e-05 5.72524e-05 8.4047e-05
-2.4 1.2014e-05 6.00704e-05 8.4047e-05
-3 9.63567e-06 6.14787e-05 8.4047e-05
-3.6 0 7.15441e-05 8.4047e-05
-END DIST
-
-Metal 5 UNDER
-WIDTH Table 1 entries:  0.3
-
-Metal 5 UNDER 6
-DIST count 12 width 0.3
-0.3 0.000135394 1.99172e-05 8.4047e-05
-0.6 7.39111e-05 2.64392e-05 8.4047e-05
-0.75 6.12317e-05 2.88519e-05 8.4047e-05
-0.9 5.4377e-05 2.97303e-05 8.4047e-05
-1.05 4.71828e-05 3.13796e-05 8.4047e-05
-1.2 3.38324e-05 4.13796e-05 8.4047e-05
-1.35 2.91927e-05 4.35272e-05 8.4047e-05
-1.5 2.41842e-05 4.66622e-05 8.4047e-05
-1.8 1.84051e-05 4.9899e-05 8.4047e-05
-2.4 1.12487e-05 5.44266e-05 8.4047e-05
-3 7.63229e-06 5.67835e-05 8.4047e-05
-3.6 0 6.38373e-05 8.4047e-05
-END DIST
-
-Metal 5 DIAGUNDER
-WIDTH Table 1 entries:  0.3
-
-Metal 5 DIAGUNDER 6
-DIST count 13 width 0.3
-0 0 4.72749e-05 8.4047e-05
-0.3 0 3.51949e-05 8.4047e-05
-0.6 0 3.04805e-05 8.4047e-05
-0.75 0 2.825e-05 8.4047e-05
-0.9 0 2.61827e-05 8.4047e-05
-1.05 0 2.43165e-05 8.4047e-05
-1.2 0 2.26714e-05 8.4047e-05
-1.35 0 2.12505e-05 8.4047e-05
-1.5 0 2.00436e-05 8.4047e-05
-1.8 0 1.81939e-05 8.4047e-05
-2.4 0 1.60884e-05 8.4047e-05
-3 0 1.50833e-05 8.4047e-05
-3.6 0 1.44881e-05 8.4047e-05
-END DIST
-
-Metal 5 OVERUNDER
-WIDTH Table 1 entries:  0.3
-
-Metal 5 OVER 1 UNDER 6
-DIST count 12 width 0.3
-0.3 0.000130415 2.48133e-05 8.4047e-05
-0.6 7.05944e-05 2.94872e-05 8.4047e-05
-0.75 5.80652e-05 3.17832e-05 8.4047e-05
-0.9 5.10577e-05 3.27111e-05 8.4047e-05
-1.05 4.50728e-05 3.3816e-05 8.4047e-05
-1.2 3.3103e-05 4.25359e-05 8.4047e-05
-1.35 2.86203e-05 4.45457e-05 8.4047e-05
-1.5 2.37263e-05 4.75243e-05 8.4047e-05
-1.8 1.80881e-05 5.04655e-05 8.4047e-05
-2.4 1.1084e-05 5.46675e-05 8.4047e-05
-3 7.59864e-06 5.70364e-05 8.4047e-05
-3.6 0 6.4353e-05 8.4047e-05
-END DIST
-
-Metal 5 OVER 2 UNDER 6
-DIST count 12 width 0.3
-0.3 0.000130619 2.48189e-05 8.4047e-05
-0.6 6.96794e-05 3.06705e-05 8.4047e-05
-0.75 5.74717e-05 3.28595e-05 8.4047e-05
-0.9 5.05803e-05 3.36095e-05 8.4047e-05
-1.05 4.45757e-05 3.45797e-05 8.4047e-05
-1.2 3.2531e-05 4.32459e-05 8.4047e-05
-1.35 2.79494e-05 4.5307e-05 8.4047e-05
-1.5 2.29816e-05 4.83948e-05 8.4047e-05
-1.8 1.72821e-05 5.16195e-05 8.4047e-05
-2.4 1.02488e-05 5.63096e-05 8.4047e-05
-3 6.59638e-06 5.89457e-05 8.4047e-05
-3.6 0 6.50934e-05 8.4047e-05
-END DIST
-
-Metal 5 OVER 3 UNDER 6
-DIST count 12 width 0.3
-0.3 0.000131118 2.47014e-05 8.4047e-05
-0.6 6.94604e-05 3.13388e-05 8.4047e-05
-0.75 5.69323e-05 3.38298e-05 8.4047e-05
-0.9 4.9774e-05 3.48387e-05 8.4047e-05
-1.05 4.36041e-05 3.60161e-05 8.4047e-05
-1.2 3.18776e-05 4.44441e-05 8.4047e-05
-1.35 2.73375e-05 4.65611e-05 8.4047e-05
-1.5 2.24295e-05 4.96856e-05 8.4047e-05
-1.8 1.68119e-05 5.30052e-05 8.4047e-05
-2.4 9.73429e-06 5.8046e-05 8.4047e-05
-3 5.9483e-06 6.1081e-05 8.4047e-05
-3.6 0 6.67856e-05 8.4047e-05
-END DIST
-
-Metal 5 OVER 4 UNDER 6
-DIST count 12 width 0.3
-0.3 0.000121594 3.98517e-05 8.4047e-05
-0.6 5.85944e-05 5.19191e-05 8.4047e-05
-0.75 4.42835e-05 5.86967e-05 8.4047e-05
-0.9 3.6782e-05 6.21109e-05 8.4047e-05
-1.05 3.02917e-05 6.69761e-05 8.4047e-05
-1.2 2.21398e-05 7.30627e-05 8.4047e-05
-1.35 1.81325e-05 7.5572e-05 8.4047e-05
-1.5 1.50838e-05 7.75133e-05 8.4047e-05
-1.8 1.08526e-05 8.04382e-05 8.4047e-05
-2.4 6.6501e-06 8.36963e-05 8.4047e-05
-3 4.87423e-06 8.54392e-05 8.4047e-05
-3.6 0 9.10599e-05 8.4047e-05
-END DIST
-
-Metal 6 RESOVER
-WIDTH Table 1 entries:  1.6
-
-Metal 6 RESOVER 0
-DIST count 55 width 1.6
-0 0 0 1.83563e-05
-0 1.73 0 1.83563e-05
-0 3.33 0 1.83563e-05
-0 4.26 0 1.83563e-05
-0 5.06 0 1.83563e-05
-0 6.66 0 1.83563e-05
-0 7.59 0 1.83563e-05
-0 8.39 0 1.83563e-05
-0 9.99 0 1.83563e-05
-0 13.32 0 1.83563e-05
-1.73 1.73 0 1.83563e-05
-1.73 3.33 0 1.83563e-05
-1.73 4.26 0 1.83563e-05
-1.73 5.06 0 1.83563e-05
-1.73 6.66 0 1.83563e-05
-1.73 7.59 0 1.83563e-05
-1.73 8.39 0 1.83563e-05
-1.73 9.99 0 1.83563e-05
-1.73 13.32 0 1.83563e-05
-3.33 3.33 0 1.83563e-05
-3.33 4.26 0 1.83563e-05
-3.33 5.06 0 1.83563e-05
-3.33 6.66 0 1.83563e-05
-3.33 7.59 0 1.83563e-05
-3.33 8.39 0 1.83563e-05
-3.33 9.99 0 1.83563e-05
-3.33 13.32 0 1.83563e-05
-4.26 4.26 0 1.83563e-05
-4.26 5.06 0 1.83563e-05
-4.26 6.66 0 1.83563e-05
-4.26 7.59 0 1.83563e-05
-4.26 8.39 0 1.83563e-05
-4.26 9.99 0 1.83563e-05
-4.26 13.32 0 1.83563e-05
-5.06 5.06 0 1.83563e-05
-5.06 6.66 0 1.83563e-05
-5.06 7.59 0 1.83563e-05
-5.06 8.39 0 1.83563e-05
-5.06 9.99 0 1.83563e-05
-5.06 13.32 0 1.83563e-05
-6.66 6.66 0 1.83563e-05
-6.66 7.59 0 1.83563e-05
-6.66 8.39 0 1.83563e-05
-6.66 9.99 0 1.83563e-05
-6.66 13.32 0 1.83563e-05
-7.59 7.59 0 1.83563e-05
-7.59 8.39 0 1.83563e-05
-7.59 9.99 0 1.83563e-05
-7.59 13.32 0 1.83563e-05
-8.39 8.39 0 1.83563e-05
-8.39 9.99 0 1.83563e-05
-8.39 13.32 0 1.83563e-05
-9.99 9.99 0 1.83563e-05
-9.99 13.32 0 1.83563e-05
-13.32 0 13.32 1.83563e-05
-END DIST
-
-Metal 6 RESOVER 1
-DIST count 0 width 1.6
-END DIST
-
-Metal 6 RESOVER 2
-DIST count 0 width 1.6
-END DIST
-
-Metal 6 RESOVER 3
-DIST count 0 width 1.6
-END DIST
-
-Metal 6 RESOVER 4
-DIST count 0 width 1.6
-END DIST
-
-Metal 6 RESOVER 5
-DIST count 0 width 1.6
-END DIST
-
-Metal 6 OVER
-WIDTH Table 1 entries:  1.6
-
-Metal 6 OVER 0
-DIST count 12 width 1.6
-1.6 7.70727e-05 1.28051e-05 9.17806e-06
-3.2 4.16244e-05 1.8829e-05 9.17806e-06
-4 3.48304e-05 2.0061e-05 9.17806e-06
-4.8 2.63231e-05 2.44747e-05 9.17806e-06
-5.6 2.11476e-05 2.79939e-05 9.17806e-06
-6.4 1.8024e-05 2.94438e-05 9.17806e-06
-7.2 1.52959e-05 3.08495e-05 9.17806e-06
-8 1.31579e-05 3.18988e-05 9.17806e-06
-9.6 0 4.2381e-05 9.17806e-06
-12.8 0 4.2381e-05 9.17806e-06
-16 0 4.2381e-05 9.17806e-06
-19.2 0 4.2381e-05 9.17806e-06
-END DIST
-
-Metal 6 OVER 1
-DIST count 12 width 1.6
-1.6 7.19495e-05 1.88937e-05 9.17806e-06
-3.2 3.77517e-05 2.41014e-05 9.17806e-06
-4 3.12477e-05 2.54782e-05 9.17806e-06
-4.8 2.41341e-05 2.88483e-05 9.17806e-06
-5.6 2.0153e-05 3.08419e-05 9.17806e-06
-6.4 1.72664e-05 3.20493e-05 9.17806e-06
-7.2 1.49348e-05 3.3145e-05 9.17806e-06
-8 1.29865e-05 3.41298e-05 9.17806e-06
-9.6 0 4.51026e-05 9.17806e-06
-12.8 0 4.51026e-05 9.17806e-06
-16 0 4.51026e-05 9.17806e-06
-19.2 0 4.51026e-05 9.17806e-06
-END DIST
-
-Metal 6 OVER 2
-DIST count 12 width 1.6
-1.6 7.10698e-05 2.03921e-05 9.17806e-06
-3.2 3.71086e-05 2.56048e-05 9.17806e-06
-4 3.09144e-05 2.68625e-05 9.17806e-06
-4.8 2.38044e-05 3.0346e-05 9.17806e-06
-5.6 1.95741e-05 3.26598e-05 9.17806e-06
-6.4 1.63623e-05 3.43051e-05 9.17806e-06
-7.2 1.36436e-05 3.6008e-05 9.17806e-06
-8 1.15478e-05 3.73638e-05 9.17806e-06
-9.6 0 4.69941e-05 9.17806e-06
-12.8 0 4.69941e-05 9.17806e-06
-16 0 4.69941e-05 9.17806e-06
-19.2 0 4.69943e-05 9.17806e-06
-END DIST
-
-Metal 6 OVER 3
-DIST count 12 width 1.6
-1.6 7.02531e-05 2.24514e-05 9.17806e-06
-3.2 3.64029e-05 2.78811e-05 9.17806e-06
-4 3.02924e-05 2.92348e-05 9.17806e-06
-4.8 2.33056e-05 3.29001e-05 9.17806e-06
-5.6 1.89839e-05 3.55508e-05 9.17806e-06
-6.4 1.56356e-05 3.74956e-05 9.17806e-06
-7.2 1.27249e-05 3.94579e-05 9.17806e-06
-8 1.04566e-05 4.11284e-05 9.17806e-06
-9.6 0 4.95055e-05 9.17806e-06
-12.8 0 4.95055e-05 9.17806e-06
-16 0 4.95055e-05 9.17806e-06
-19.2 0 4.95055e-05 9.17806e-06
-END DIST
-
-Metal 6 OVER 4
-DIST count 12 width 1.6
-1.6 6.80015e-05 3.08859e-05 9.17806e-06
-3.2 3.36584e-05 3.85538e-05 9.17806e-06
-4 2.75006e-05 4.04561e-05 9.17806e-06
-4.8 2.0938e-05 4.40865e-05 9.17806e-06
-5.6 1.71447e-05 4.65752e-05 9.17806e-06
-6.4 1.43547e-05 4.82697e-05 9.17806e-06
-7.2 1.19269e-05 4.99141e-05 9.17806e-06
-8 1.01083e-05 5.09463e-05 9.17806e-06
-9.6 0 5.93995e-05 9.17806e-06
-12.8 0 5.93995e-05 9.17806e-06
-16 0 5.93995e-05 9.17806e-06
-19.2 0 5.93995e-05 9.17806e-06
-END DIST
-
-Metal 6 OVER 5
-DIST count 12 width 1.6
-1.6 4.59423e-05 8.66424e-05 9.17806e-06
-3.2 1.95217e-05 9.2759e-05 9.17806e-06
-4 1.68641e-05 9.08466e-05 9.17806e-06
-4.8 1.25324e-05 9.34708e-05 9.17806e-06
-5.6 1.03412e-05 9.52085e-05 9.17806e-06
-6.4 8.94776e-06 9.61762e-05 9.17806e-06
-7.2 7.93763e-06 9.69672e-05 9.17806e-06
-8 8.77156e-06 9.43731e-05 9.17806e-06
-9.6 0 0.000104426 9.17806e-06
-12.8 0 0.000104418 9.17806e-06
-16 0 0.000104412 9.17806e-06
-19.2 0 0.000104445 9.17806e-06
-END DIST
-
-Metal 6 UNDER
-WIDTH Table 0 entries: 
-
-Metal 6 DIAGUNDER
-WIDTH Table 0 entries: 
-END DensityModel 0
\ No newline at end of file
diff --git a/sky130/openlane/rules.openrcx.sky130A.max.magic b/sky130/openlane/rules.openrcx.sky130A.max.magic
new file mode 100644
index 0000000..65406c9
--- /dev/null
+++ b/sky130/openlane/rules.openrcx.sky130A.max.magic
@@ -0,0 +1,1645 @@
+Extraction Rules for OpenRCX
+
+DIAGMODEL ON
+
+LayerCount 6
+DensityRate 1  0
+
+DensityModel 0
+
+Metal 1 RESOVER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 RESOVER 0
+DIST count 55 width 0.17
+0 0 0 0.10101
+0 0.29 0 0.10101
+0 0.46 0 0.10101
+0 0.665 0 0.10101
+0 0.75 0 0.10101
+0 0.92 0 0.10101
+0 1.125 0 0.10101
+0 1.21 0 0.10101
+0 1.38 0 0.10101
+0 1.84 0 0.10101
+0.29 0.29 0 0.10101
+0.29 0.46 0 0.10101
+0.29 0.665 0 0.10101
+0.29 0.75 0 0.10101
+0.29 0.92 0 0.10101
+0.29 1.125 0 0.10101
+0.29 1.21 0 0.10101
+0.29 1.38 0 0.10101
+0.29 1.84 0 0.10101
+0.46 0.46 0 0.10101
+0.46 0.665 0 0.10101
+0.46 0.75 0 0.10101
+0.46 0.92 0 0.10101
+0.46 1.125 0 0.10101
+0.46 1.21 0 0.10101
+0.46 1.38 0 0.10101
+0.46 1.84 0 0.10101
+0.665 0.665 0 0.10101
+0.665 0.75 0 0.10101
+0.665 0.92 0 0.10101
+0.665 1.125 0 0.10101
+0.665 1.21 0 0.10101
+0.665 1.38 0 0.10101
+0.665 1.84 0 0.10101
+0.75 0.75 0 0.10101
+0.75 0.92 0 0.10101
+0.75 1.125 0 0.10101
+0.75 1.21 0 0.10101
+0.75 1.38 0 0.10101
+0.75 1.84 0 0.10101
+0.92 0.92 0 0.10101
+0.92 1.125 0 0.10101
+0.92 1.21 0 0.10101
+0.92 1.38 0 0.10101
+0.92 1.84 0 0.10101
+1.125 1.125 0 0.10101
+1.125 1.21 0 0.10101
+1.125 1.38 0 0.10101
+1.125 1.84 0 0.10101
+1.21 1.21 0 0.10101
+1.21 1.38 0 0.10101
+1.21 1.84 0 0.10101
+1.38 1.38 0 0.10101
+1.38 1.84 0 0.10101
+1.84 0 1.84 0.10101
+END DIST
+
+Metal 1 OVER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 OVER 0
+DIST count 12 width 0.17
+0.17 0.000497977 4.50051e-05 0.0505051
+0.34 0.000279412 4.50051e-05 0.0505051
+0.425 0.000232192 4.50051e-05 0.0505051
+0.51 0.000199448 4.50051e-05 0.0505051
+0.595 0.000175236 4.50051e-05 0.0505051
+0.68 0.000156519 4.50051e-05 0.0505051
+0.765 0.000141568 4.50051e-05 0.0505051
+0.85 0.000129322 4.50051e-05 0.0505051
+1.02 0.000110405 4.50051e-05 0.0505051
+1.36 8.56497e-05 4.50051e-05 0.0505051
+1.7 3.92157e-05 4.50051e-05 0.0505051
+2.04 0 4.50051e-05 0.0505051
+END DIST
+
+Metal 1 UNDER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 UNDER 2
+DIST count 12 width 0.17
+0.17 0.000497977 0.00016261 0.0505051
+0.34 0.000279412 0.00016261 0.0505051
+0.425 0.000232192 0.00016261 0.0505051
+0.51 0.000199448 0.00016261 0.0505051
+0.595 0.000175236 0.00016261 0.0505051
+0.68 0.000156519 0.00016261 0.0505051
+0.765 0.000141568 0.00016261 0.0505051
+0.85 0.000129322 0.00016261 0.0505051
+1.02 0.000110405 0.00016261 0.0505051
+1.36 8.56497e-05 0.00016261 0.0505051
+1.7 3.92157e-05 0.00016261 0.0505051
+2.04 0 0.00016261 0.0505051
+END DIST
+
+Metal 1 UNDER 3
+DIST count 12 width 0.17
+0.17 0.000497977 0.000126933 0.0505051
+0.34 0.000279412 0.000126933 0.0505051
+0.425 0.000232192 0.000126933 0.0505051
+0.51 0.000199448 0.000126933 0.0505051
+0.595 0.000175236 0.000126933 0.0505051
+0.68 0.000156519 0.000126933 0.0505051
+0.765 0.000141568 0.000126933 0.0505051
+0.85 0.000129322 0.000126933 0.0505051
+1.02 0.000110405 0.000126933 0.0505051
+1.36 8.56497e-05 0.000126933 0.0505051
+1.7 3.92157e-05 0.000126933 0.0505051
+2.04 0 0.000126933 0.0505051
+END DIST
+
+Metal 1 UNDER 4
+DIST count 12 width 0.17
+0.17 0.000497977 8.90919e-05 0.0505051
+0.34 0.000279412 8.90919e-05 0.0505051
+0.425 0.000232192 8.90919e-05 0.0505051
+0.51 0.000199448 8.90919e-05 0.0505051
+0.595 0.000175236 8.90919e-05 0.0505051
+0.68 0.000156519 8.90919e-05 0.0505051
+0.765 0.000141568 8.90919e-05 0.0505051
+0.85 0.000129322 8.90919e-05 0.0505051
+1.02 0.000110405 8.90919e-05 0.0505051
+1.36 8.56497e-05 8.90919e-05 0.0505051
+1.7 3.92157e-05 8.90919e-05 0.0505051
+2.04 0 8.90919e-05 0.0505051
+END DIST
+
+Metal 1 UNDER 5
+DIST count 12 width 0.17
+0.17 0.000497977 7.92153e-05 0.0505051
+0.34 0.000279412 7.92153e-05 0.0505051
+0.425 0.000232192 7.92153e-05 0.0505051
+0.51 0.000199448 7.92153e-05 0.0505051
+0.595 0.000175236 7.92153e-05 0.0505051
+0.68 0.000156519 7.92153e-05 0.0505051
+0.765 0.000141568 7.92153e-05 0.0505051
+0.85 0.000129322 7.92153e-05 0.0505051
+1.02 0.000110405 7.92153e-05 0.0505051
+1.36 8.56497e-05 7.92153e-05 0.0505051
+1.7 3.92157e-05 7.92153e-05 0.0505051
+2.04 0 7.92153e-05 0.0505051
+END DIST
+
+Metal 1 UNDER 6
+DIST count 12 width 0.17
+0.17 0.000497977 5.85915e-05 0.0505051
+0.34 0.000279412 5.85915e-05 0.0505051
+0.425 0.000232192 5.85915e-05 0.0505051
+0.51 0.000199448 5.85915e-05 0.0505051
+0.595 0.000175236 5.85915e-05 0.0505051
+0.68 0.000156519 5.85915e-05 0.0505051
+0.765 0.000141568 5.85915e-05 0.0505051
+0.85 0.000129322 5.85915e-05 0.0505051
+1.02 0.000110405 5.85915e-05 0.0505051
+1.36 8.56497e-05 5.85915e-05 0.0505051
+1.7 3.92157e-05 5.85915e-05 0.0505051
+2.04 0 5.85915e-05 0.0505051
+END DIST
+
+Metal 1 DIAGUNDER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 DIAGUNDER 2
+DIST count 13 width 0.17
+0 0 7.57172e-05 0.0505051
+0.17 0 0 0.0505051
+0.34 0 0 0.0505051
+0.425 0 0 0.0505051
+0.51 0 0 0.0505051
+0.595 0 0 0.0505051
+0.68 0 0 0.0505051
+0.765 0 0 0.0505051
+0.85 0 0 0.0505051
+1.02 0 0 0.0505051
+1.36 0 0 0.0505051
+1.7 0 0 0.0505051
+2.04 0 0 0.0505051
+END DIST
+
+Metal 1 DIAGUNDER 3
+DIST count 13 width 0.17
+0 0 5.18384e-05 0.0505051
+0.17 0 0 0.0505051
+0.34 0 0 0.0505051
+0.425 0 0 0.0505051
+0.51 0 0 0.0505051
+0.595 0 0 0.0505051
+0.68 0 0 0.0505051
+0.765 0 0 0.0505051
+0.85 0 0 0.0505051
+1.02 0 0 0.0505051
+1.36 0 0 0.0505051
+1.7 0 0 0.0505051
+2.04 0 0 0.0505051
+END DIST
+
+Metal 1 DIAGUNDER 4
+DIST count 13 width 0.17
+0 0 1.87576e-05 0.0505051
+0.17 0 0 0.0505051
+0.34 0 0 0.0505051
+0.425 0 0 0.0505051
+0.51 0 0 0.0505051
+0.595 0 0 0.0505051
+0.68 0 0 0.0505051
+0.765 0 0 0.0505051
+0.85 0 0 0.0505051
+1.02 0 0 0.0505051
+1.36 0 0 0.0505051
+1.7 0 0 0.0505051
+2.04 0 0 0.0505051
+END DIST
+
+Metal 1 DIAGUNDER 5
+DIST count 13 width 0.17
+0 0 1.21616e-05 0.0505051
+0.17 0 0 0.0505051
+0.34 0 0 0.0505051
+0.425 0 0 0.0505051
+0.51 0 0 0.0505051
+0.595 0 0 0.0505051
+0.68 0 0 0.0505051
+0.765 0 0 0.0505051
+0.85 0 0 0.0505051
+1.02 0 0 0.0505051
+1.36 0 0 0.0505051
+1.7 0 0 0.0505051
+2.04 0 0 0.0505051
+END DIST
+
+Metal 1 DIAGUNDER 6
+DIST count 0 width 0.17
+END DIST
+
+Metal 2 RESOVER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.00104618
+0 0.2 0 0.00104618
+0 0.34 0 0.00104618
+0 0.47 0 0.00104618
+0 0.54 0 0.00104618
+0 0.68 0 0.00104618
+0 0.81 0 0.00104618
+0 0.88 0 0.00104618
+0 1.02 0 0.00104618
+0 1.36 0 0.00104618
+0.2 0.2 0 0.00104618
+0.2 0.34 0 0.00104618
+0.2 0.47 0 0.00104618
+0.2 0.54 0 0.00104618
+0.2 0.68 0 0.00104618
+0.2 0.81 0 0.00104618
+0.2 0.88 0 0.00104618
+0.2 1.02 0 0.00104618
+0.2 1.36 0 0.00104618
+0.34 0.34 0 0.00104618
+0.34 0.47 0 0.00104618
+0.34 0.54 0 0.00104618
+0.34 0.68 0 0.00104618
+0.34 0.81 0 0.00104618
+0.34 0.88 0 0.00104618
+0.34 1.02 0 0.00104618
+0.34 1.36 0 0.00104618
+0.47 0.47 0 0.00104618
+0.47 0.54 0 0.00104618
+0.47 0.68 0 0.00104618
+0.47 0.81 0 0.00104618
+0.47 0.88 0 0.00104618
+0.47 1.02 0 0.00104618
+0.47 1.36 0 0.00104618
+0.54 0.54 0 0.00104618
+0.54 0.68 0 0.00104618
+0.54 0.81 0 0.00104618
+0.54 0.88 0 0.00104618
+0.54 1.02 0 0.00104618
+0.54 1.36 0 0.00104618
+0.68 0.68 0 0.00104618
+0.68 0.81 0 0.00104618
+0.68 0.88 0 0.00104618
+0.68 1.02 0 0.00104618
+0.68 1.36 0 0.00104618
+0.81 0.81 0 0.00104618
+0.81 0.88 0 0.00104618
+0.81 1.02 0 0.00104618
+0.81 1.36 0 0.00104618
+0.88 0.88 0 0.00104618
+0.88 1.02 0 0.00104618
+0.88 1.36 0 0.00104618
+1.02 1.02 0 0.00104618
+1.02 1.36 0 0.00104618
+1.36 0 1.36 0.00104618
+END DIST
+
+Metal 2 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 2 OVER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 OVER 0
+DIST count 12 width 0.14
+0.14 0.000838745 4.36667e-05 0.000523088
+0.28 0.000471303 4.36667e-05 0.000523088
+0.35 0.000391492 4.36667e-05 0.000523088
+0.42 0.000336067 4.36667e-05 0.000523088
+0.49 0.000295057 4.36667e-05 0.000523088
+0.56 0.000263348 4.36667e-05 0.000523088
+0.63 0.000238021 4.36667e-05 0.000523088
+0.7 0.000217283 4.36667e-05 0.000523088
+0.84 0.000185267 4.36667e-05 0.000523088
+1.12 0.000143435 4.36667e-05 0.000523088
+1.4 0.000117182 4.36667e-05 0.000523088
+1.68 0 9.77792e-05 0.000523088
+END DIST
+
+Metal 2 OVER 1
+DIST count 12 width 0.14
+0.14 0.000838745 0.000119272 0.000523088
+0.28 0.000471303 0.000119272 0.000523088
+0.35 0.000391492 0.000119272 0.000523088
+0.42 0.000336067 0.000119272 0.000523088
+0.49 0.000295057 0.000119272 0.000523088
+0.56 0.000263348 0.000119272 0.000523088
+0.63 0.000238021 0.000119272 0.000523088
+0.7 0.000217283 0.000119272 0.000523088
+0.84 0.000185267 0.000119272 0.000523088
+1.12 0.000143435 0.000119272 0.000523088
+1.4 0.000117182 0.000119272 0.000523088
+1.68 0 0.000173385 0.000523088
+END DIST
+
+Metal 2 UNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 UNDER 3
+DIST count 12 width 0.14
+0.14 0.000838745 0.000170271 0.000523088
+0.28 0.000471303 0.000170271 0.000523088
+0.35 0.000391492 0.000170271 0.000523088
+0.42 0.000336067 0.000170271 0.000523088
+0.49 0.000295057 0.000170271 0.000523088
+0.56 0.000263348 0.000170271 0.000523088
+0.63 0.000238021 0.000170271 0.000523088
+0.7 0.000217283 0.000170271 0.000523088
+0.84 0.000185267 0.000170271 0.000523088
+1.12 0.000143435 0.000170271 0.000523088
+1.4 0.000117182 0.000170271 0.000523088
+1.68 0 0.000224384 0.000523088
+END DIST
+
+Metal 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000838745 9.85447e-05 0.000523088
+0.28 0.000471303 9.85447e-05 0.000523088
+0.35 0.000391492 9.85447e-05 0.000523088
+0.42 0.000336067 9.85447e-05 0.000523088
+0.49 0.000295057 9.85447e-05 0.000523088
+0.56 0.000263348 9.85447e-05 0.000523088
+0.63 0.000238021 9.85447e-05 0.000523088
+0.7 0.000217283 9.85447e-05 0.000523088
+0.84 0.000185267 9.85447e-05 0.000523088
+1.12 0.000143435 9.85447e-05 0.000523088
+1.4 0.000117182 9.85447e-05 0.000523088
+1.68 0 0.000152657 0.000523088
+END DIST
+
+Metal 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000838745 8.06227e-05 0.000523088
+0.28 0.000471303 8.06227e-05 0.000523088
+0.35 0.000391492 8.06227e-05 0.000523088
+0.42 0.000336067 8.06227e-05 0.000523088
+0.49 0.000295057 8.06227e-05 0.000523088
+0.56 0.000263348 8.06227e-05 0.000523088
+0.63 0.000238021 8.06227e-05 0.000523088
+0.7 0.000217283 8.06227e-05 0.000523088
+0.84 0.000185267 8.06227e-05 0.000523088
+1.12 0.000143435 8.06227e-05 0.000523088
+1.4 0.000117182 8.06227e-05 0.000523088
+1.68 0 0.000134735 0.000523088
+END DIST
+
+Metal 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000838745 6.12349e-05 0.000523088
+0.28 0.000471303 6.12349e-05 0.000523088
+0.35 0.000391492 6.12349e-05 0.000523088
+0.42 0.000336067 6.12349e-05 0.000523088
+0.49 0.000295057 6.12349e-05 0.000523088
+0.56 0.000263348 6.12349e-05 0.000523088
+0.63 0.000238021 6.12349e-05 0.000523088
+0.7 0.000217283 6.12349e-05 0.000523088
+0.84 0.000185267 6.12349e-05 0.000523088
+1.12 0.000143435 6.12349e-05 0.000523088
+1.4 0.000117182 6.12349e-05 0.000523088
+1.68 0 0.000115347 0.000523088
+END DIST
+
+Metal 2 DIAGUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 DIAGUNDER 3
+DIST count 13 width 0.14
+0 0 1.89495e-05 0.000523088
+0.14 0 0 0.000523088
+0.28 0 0 0.000523088
+0.35 0 0 0.000523088
+0.42 0 0 0.000523088
+0.49 0 0 0.000523088
+0.56 0 0 0.000523088
+0.63 0 0 0.000523088
+0.7 0 0 0.000523088
+0.84 0 0 0.000523088
+1.12 0 0 0.000523088
+1.4 0 0 0.000523088
+1.68 0 0 0.000523088
+END DIST
+
+Metal 2 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 3.22222e-05 0.000523088
+0.14 0 0 0.000523088
+0.28 0 0 0.000523088
+0.35 0 0 0.000523088
+0.42 0 0 0.000523088
+0.49 0 0 0.000523088
+0.56 0 0 0.000523088
+0.63 0 0 0.000523088
+0.7 0 0 0.000523088
+0.84 0 0 0.000523088
+1.12 0 0 0.000523088
+1.4 0 0 0.000523088
+1.68 0 0 0.000523088
+END DIST
+
+Metal 2 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 1.82828e-05 0.000523088
+0.14 0 0 0.000523088
+0.28 0 0 0.000523088
+0.35 0 0 0.000523088
+0.42 0 0 0.000523088
+0.49 0 0 0.000523088
+0.56 0 0 0.000523088
+0.63 0 0 0.000523088
+0.7 0 0 0.000523088
+0.84 0 0 0.000523088
+1.12 0 0 0.000523088
+1.4 0 0 0.000523088
+1.68 0 0 0.000523088
+END DIST
+
+Metal 2 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 1.33939e-05 0.000523088
+0.14 0 0 0.000523088
+0.28 0 0 0.000523088
+0.35 0 0 0.000523088
+0.42 0 0 0.000523088
+0.49 0 0 0.000523088
+0.56 0 0 0.000523088
+0.63 0 0 0.000523088
+0.7 0 0 0.000523088
+0.84 0 0 0.000523088
+1.12 0 0 0.000523088
+1.4 0 0 0.000523088
+1.68 0 0 0.000523088
+END DIST
+
+Metal 2 OVERUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 OVER 1 UNDER 3
+DIST count 12 width 0.14
+0.14 0.000838745 0.000245877 0.000523088
+0.28 0.000471303 0.000245877 0.000523088
+0.35 0.000391492 0.000245877 0.000523088
+0.42 0.000336067 0.000245877 0.000523088
+0.49 0.000295057 0.000245877 0.000523088
+0.56 0.000263348 0.000245877 0.000523088
+0.63 0.000238021 0.000245877 0.000523088
+0.7 0.000217283 0.000245877 0.000523088
+0.84 0.000185267 0.000245877 0.000523088
+1.12 0.000143435 0.000245877 0.000523088
+1.4 0.000117182 0.000245877 0.000523088
+1.68 0 0.00029999 0.000523088
+END DIST
+
+Metal 2 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000838745 0.000174151 0.000523088
+0.28 0.000471303 0.000174151 0.000523088
+0.35 0.000391492 0.000174151 0.000523088
+0.42 0.000336067 0.000174151 0.000523088
+0.49 0.000295057 0.000174151 0.000523088
+0.56 0.000263348 0.000174151 0.000523088
+0.63 0.000238021 0.000174151 0.000523088
+0.7 0.000217283 0.000174151 0.000523088
+0.84 0.000185267 0.000174151 0.000523088
+1.12 0.000143435 0.000174151 0.000523088
+1.4 0.000117182 0.000174151 0.000523088
+1.68 0 0.000228263 0.000523088
+END DIST
+
+Metal 2 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000838745 0.000156228 0.000523088
+0.28 0.000471303 0.000156228 0.000523088
+0.35 0.000391492 0.000156228 0.000523088
+0.42 0.000336067 0.000156228 0.000523088
+0.49 0.000295057 0.000156228 0.000523088
+0.56 0.000263348 0.000156228 0.000523088
+0.63 0.000238021 0.000156228 0.000523088
+0.7 0.000217283 0.000156228 0.000523088
+0.84 0.000185267 0.000156228 0.000523088
+1.12 0.000143435 0.000156228 0.000523088
+1.4 0.000117182 0.000156228 0.000523088
+1.68 0 0.000210341 0.000523088
+END DIST
+
+Metal 2 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000838745 0.000136841 0.000523088
+0.28 0.000471303 0.000136841 0.000523088
+0.35 0.000391492 0.000136841 0.000523088
+0.42 0.000336067 0.000136841 0.000523088
+0.49 0.000295057 0.000136841 0.000523088
+0.56 0.000263348 0.000136841 0.000523088
+0.63 0.000238021 0.000136841 0.000523088
+0.7 0.000217283 0.000136841 0.000523088
+0.84 0.000185267 0.000136841 0.000523088
+1.12 0.000143435 0.000136841 0.000523088
+1.4 0.000117182 0.000136841 0.000523088
+1.68 0 0.000190953 0.000523088
+END DIST
+
+Metal 3 RESOVER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.00104618
+0 0.32 0 0.00104618
+0 0.46 0 0.00104618
+0 0.71 0 0.00104618
+0 0.78 0 0.00104618
+0 0.92 0 0.00104618
+0 1.17 0 0.00104618
+0 1.24 0 0.00104618
+0 1.38 0 0.00104618
+0 1.84 0 0.00104618
+0.32 0.32 0 0.00104618
+0.32 0.46 0 0.00104618
+0.32 0.71 0 0.00104618
+0.32 0.78 0 0.00104618
+0.32 0.92 0 0.00104618
+0.32 1.17 0 0.00104618
+0.32 1.24 0 0.00104618
+0.32 1.38 0 0.00104618
+0.32 1.84 0 0.00104618
+0.46 0.46 0 0.00104618
+0.46 0.71 0 0.00104618
+0.46 0.78 0 0.00104618
+0.46 0.92 0 0.00104618
+0.46 1.17 0 0.00104618
+0.46 1.24 0 0.00104618
+0.46 1.38 0 0.00104618
+0.46 1.84 0 0.00104618
+0.71 0.71 0 0.00104618
+0.71 0.78 0 0.00104618
+0.71 0.92 0 0.00104618
+0.71 1.17 0 0.00104618
+0.71 1.24 0 0.00104618
+0.71 1.38 0 0.00104618
+0.71 1.84 0 0.00104618
+0.78 0.78 0 0.00104618
+0.78 0.92 0 0.00104618
+0.78 1.17 0 0.00104618
+0.78 1.24 0 0.00104618
+0.78 1.38 0 0.00104618
+0.78 1.84 0 0.00104618
+0.92 0.92 0 0.00104618
+0.92 1.17 0 0.00104618
+0.92 1.24 0 0.00104618
+0.92 1.38 0 0.00104618
+0.92 1.84 0 0.00104618
+1.17 1.17 0 0.00104618
+1.17 1.24 0 0.00104618
+1.17 1.38 0 0.00104618
+1.17 1.84 0 0.00104618
+1.24 1.24 0 0.00104618
+1.24 1.38 0 0.00104618
+1.24 1.84 0 0.00104618
+1.38 1.38 0 0.00104618
+1.38 1.84 0 0.00104618
+1.84 0 1.84 0.00104618
+END DIST
+
+Metal 3 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 RESOVER 2
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 OVER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 OVER 0
+DIST count 12 width 0.14
+0.14 0.000889851 3.99697e-05 0.000523088
+0.28 0.000497251 3.99697e-05 0.000523088
+0.35 0.000413304 3.99697e-05 0.000523088
+0.42 0.000355285 3.99697e-05 0.000523088
+0.49 0.000312469 3.99697e-05 0.000523088
+0.56 0.000279405 3.99697e-05 0.000523088
+0.63 0.000253003 3.99697e-05 0.000523088
+0.7 0.000231378 3.99697e-05 0.000523088
+0.84 0.00019795 3.99697e-05 0.000523088
+1.12 0.000154118 3.99697e-05 0.000523088
+1.4 0.000126457 3.99697e-05 0.000523088
+1.68 0 0.000100095 0.000523088
+END DIST
+
+Metal 3 OVER 1
+DIST count 12 width 0.14
+0.14 0.000889851 8.81281e-05 0.000523088
+0.28 0.000497251 8.81281e-05 0.000523088
+0.35 0.000413304 8.81281e-05 0.000523088
+0.42 0.000355285 8.81281e-05 0.000523088
+0.49 0.000312469 8.81281e-05 0.000523088
+0.56 0.000279405 8.81281e-05 0.000523088
+0.63 0.000253003 8.81281e-05 0.000523088
+0.7 0.000231378 8.81281e-05 0.000523088
+0.84 0.00019795 8.81281e-05 0.000523088
+1.12 0.000154118 8.81281e-05 0.000523088
+1.4 0.000126457 8.81281e-05 0.000523088
+1.68 0 0.000148253 0.000523088
+END DIST
+
+Metal 3 OVER 2
+DIST count 12 width 0.14
+0.14 0.000889851 0.000145812 0.000523088
+0.28 0.000497251 0.000145812 0.000523088
+0.35 0.000413304 0.000145812 0.000523088
+0.42 0.000355285 0.000145812 0.000523088
+0.49 0.000312469 0.000145812 0.000523088
+0.56 0.000279405 0.000145812 0.000523088
+0.63 0.000253003 0.000145812 0.000523088
+0.7 0.000231378 0.000145812 0.000523088
+0.84 0.00019795 0.000145812 0.000523088
+1.12 0.000154118 0.000145812 0.000523088
+1.4 0.000126457 0.000145812 0.000523088
+1.68 0 0.000205937 0.000523088
+END DIST
+
+Metal 3 UNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000889851 0.000123883 0.000523088
+0.28 0.000497251 0.000123883 0.000523088
+0.35 0.000413304 0.000123883 0.000523088
+0.42 0.000355285 0.000123883 0.000523088
+0.49 0.000312469 0.000123883 0.000523088
+0.56 0.000279405 0.000123883 0.000523088
+0.63 0.000253003 0.000123883 0.000523088
+0.7 0.000231378 0.000123883 0.000523088
+0.84 0.00019795 0.000123883 0.000523088
+1.12 0.000154118 0.000123883 0.000523088
+1.4 0.000126457 0.000123883 0.000523088
+1.68 0 0.000184008 0.000523088
+END DIST
+
+Metal 3 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000889851 8.55316e-05 0.000523088
+0.28 0.000497251 8.55316e-05 0.000523088
+0.35 0.000413304 8.55316e-05 0.000523088
+0.42 0.000355285 8.55316e-05 0.000523088
+0.49 0.000312469 8.55316e-05 0.000523088
+0.56 0.000279405 8.55316e-05 0.000523088
+0.63 0.000253003 8.55316e-05 0.000523088
+0.7 0.000231378 8.55316e-05 0.000523088
+0.84 0.00019795 8.55316e-05 0.000523088
+1.12 0.000154118 8.55316e-05 0.000523088
+1.4 0.000126457 8.55316e-05 0.000523088
+1.68 0 0.000145657 0.000523088
+END DIST
+
+Metal 3 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000889851 6.25593e-05 0.000523088
+0.28 0.000497251 6.25593e-05 0.000523088
+0.35 0.000413304 6.25593e-05 0.000523088
+0.42 0.000355285 6.25593e-05 0.000523088
+0.49 0.000312469 6.25593e-05 0.000523088
+0.56 0.000279405 6.25593e-05 0.000523088
+0.63 0.000253003 6.25593e-05 0.000523088
+0.7 0.000231378 6.25593e-05 0.000523088
+0.84 0.00019795 6.25593e-05 0.000523088
+1.12 0.000154118 6.25593e-05 0.000523088
+1.4 0.000126457 6.25593e-05 0.000523088
+1.68 0 0.000122684 0.000523088
+END DIST
+
+Metal 3 DIAGUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 5.66061e-05 0.000523088
+0.14 0 0 0.000523088
+0.28 0 0 0.000523088
+0.35 0 0 0.000523088
+0.42 0 0 0.000523088
+0.49 0 0 0.000523088
+0.56 0 0 0.000523088
+0.63 0 0 0.000523088
+0.7 0 0 0.000523088
+0.84 0 0 0.000523088
+1.12 0 0 0.000523088
+1.4 0 0 0.000523088
+1.68 0 0 0.000523088
+END DIST
+
+Metal 3 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 2.50505e-05 0.000523088
+0.14 0 0 0.000523088
+0.28 0 0 0.000523088
+0.35 0 0 0.000523088
+0.42 0 0 0.000523088
+0.49 0 0 0.000523088
+0.56 0 0 0.000523088
+0.63 0 0 0.000523088
+0.7 0 0 0.000523088
+0.84 0 0 0.000523088
+1.12 0 0 0.000523088
+1.4 0 0 0.000523088
+1.68 0 0 0.000523088
+END DIST
+
+Metal 3 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 1.77172e-05 0.000523088
+0.14 0 0 0.000523088
+0.28 0 0 0.000523088
+0.35 0 0 0.000523088
+0.42 0 0 0.000523088
+0.49 0 0 0.000523088
+0.56 0 0 0.000523088
+0.63 0 0 0.000523088
+0.7 0 0 0.000523088
+0.84 0 0 0.000523088
+1.12 0 0 0.000523088
+1.4 0 0 0.000523088
+1.68 0 0 0.000523088
+END DIST
+
+Metal 3 OVERUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000889851 0.000172041 0.000523088
+0.28 0.000497251 0.000172041 0.000523088
+0.35 0.000413304 0.000172041 0.000523088
+0.42 0.000355285 0.000172041 0.000523088
+0.49 0.000312469 0.000172041 0.000523088
+0.56 0.000279405 0.000172041 0.000523088
+0.63 0.000253003 0.000172041 0.000523088
+0.7 0.000231378 0.000172041 0.000523088
+0.84 0.00019795 0.000172041 0.000523088
+1.12 0.000154118 0.000172041 0.000523088
+1.4 0.000126457 0.000172041 0.000523088
+1.68 0 0.000232167 0.000523088
+END DIST
+
+Metal 3 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000889851 0.00013369 0.000523088
+0.28 0.000497251 0.00013369 0.000523088
+0.35 0.000413304 0.00013369 0.000523088
+0.42 0.000355285 0.00013369 0.000523088
+0.49 0.000312469 0.00013369 0.000523088
+0.56 0.000279405 0.00013369 0.000523088
+0.63 0.000253003 0.00013369 0.000523088
+0.7 0.000231378 0.00013369 0.000523088
+0.84 0.00019795 0.00013369 0.000523088
+1.12 0.000154118 0.00013369 0.000523088
+1.4 0.000126457 0.00013369 0.000523088
+1.68 0 0.000193815 0.000523088
+END DIST
+
+Metal 3 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000889851 0.000110718 0.000523088
+0.28 0.000497251 0.000110718 0.000523088
+0.35 0.000413304 0.000110718 0.000523088
+0.42 0.000355285 0.000110718 0.000523088
+0.49 0.000312469 0.000110718 0.000523088
+0.56 0.000279405 0.000110718 0.000523088
+0.63 0.000253003 0.000110718 0.000523088
+0.7 0.000231378 0.000110718 0.000523088
+0.84 0.00019795 0.000110718 0.000523088
+1.12 0.000154118 0.000110718 0.000523088
+1.4 0.000126457 0.000110718 0.000523088
+1.68 0 0.000170843 0.000523088
+END DIST
+
+Metal 3 OVER 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000889851 0.000229725 0.000523088
+0.28 0.000497251 0.000229725 0.000523088
+0.35 0.000413304 0.000229725 0.000523088
+0.42 0.000355285 0.000229725 0.000523088
+0.49 0.000312469 0.000229725 0.000523088
+0.56 0.000279405 0.000229725 0.000523088
+0.63 0.000253003 0.000229725 0.000523088
+0.7 0.000231378 0.000229725 0.000523088
+0.84 0.00019795 0.000229725 0.000523088
+1.12 0.000154118 0.000229725 0.000523088
+1.4 0.000126457 0.000229725 0.000523088
+1.68 0 0.00028985 0.000523088
+END DIST
+
+Metal 3 OVER 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000889851 0.000191374 0.000523088
+0.28 0.000497251 0.000191374 0.000523088
+0.35 0.000413304 0.000191374 0.000523088
+0.42 0.000355285 0.000191374 0.000523088
+0.49 0.000312469 0.000191374 0.000523088
+0.56 0.000279405 0.000191374 0.000523088
+0.63 0.000253003 0.000191374 0.000523088
+0.7 0.000231378 0.000191374 0.000523088
+0.84 0.00019795 0.000191374 0.000523088
+1.12 0.000154118 0.000191374 0.000523088
+1.4 0.000126457 0.000191374 0.000523088
+1.68 0 0.000251499 0.000523088
+END DIST
+
+Metal 3 OVER 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000889851 0.000168401 0.000523088
+0.28 0.000497251 0.000168401 0.000523088
+0.35 0.000413304 0.000168401 0.000523088
+0.42 0.000355285 0.000168401 0.000523088
+0.49 0.000312469 0.000168401 0.000523088
+0.56 0.000279405 0.000168401 0.000523088
+0.63 0.000253003 0.000168401 0.000523088
+0.7 0.000231378 0.000168401 0.000523088
+0.84 0.00019795 0.000168401 0.000523088
+1.12 0.000154118 0.000168401 0.000523088
+1.4 0.000126457 0.000168401 0.000523088
+1.68 0 0.000228526 0.000523088
+END DIST
+
+Metal 4 RESOVER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000188552
+0 0.38 0 0.000188552
+0 0.68 0 0.000188552
+0 0.91 0 0.000188552
+0 1.06 0 0.000188552
+0 1.36 0 0.000188552
+0 1.59 0 0.000188552
+0 1.74 0 0.000188552
+0 2.04 0 0.000188552
+0 2.72 0 0.000188552
+0.38 0.38 0 0.000188552
+0.38 0.68 0 0.000188552
+0.38 0.91 0 0.000188552
+0.38 1.06 0 0.000188552
+0.38 1.36 0 0.000188552
+0.38 1.59 0 0.000188552
+0.38 1.74 0 0.000188552
+0.38 2.04 0 0.000188552
+0.38 2.72 0 0.000188552
+0.68 0.68 0 0.000188552
+0.68 0.91 0 0.000188552
+0.68 1.06 0 0.000188552
+0.68 1.36 0 0.000188552
+0.68 1.59 0 0.000188552
+0.68 1.74 0 0.000188552
+0.68 2.04 0 0.000188552
+0.68 2.72 0 0.000188552
+0.91 0.91 0 0.000188552
+0.91 1.06 0 0.000188552
+0.91 1.36 0 0.000188552
+0.91 1.59 0 0.000188552
+0.91 1.74 0 0.000188552
+0.91 2.04 0 0.000188552
+0.91 2.72 0 0.000188552
+1.06 1.06 0 0.000188552
+1.06 1.36 0 0.000188552
+1.06 1.59 0 0.000188552
+1.06 1.74 0 0.000188552
+1.06 2.04 0 0.000188552
+1.06 2.72 0 0.000188552
+1.36 1.36 0 0.000188552
+1.36 1.59 0 0.000188552
+1.36 1.74 0 0.000188552
+1.36 2.04 0 0.000188552
+1.36 2.72 0 0.000188552
+1.59 1.59 0 0.000188552
+1.59 1.74 0 0.000188552
+1.59 2.04 0 0.000188552
+1.59 2.72 0 0.000188552
+1.74 1.74 0 0.000188552
+1.74 2.04 0 0.000188552
+1.74 2.72 0 0.000188552
+2.04 2.04 0 0.000188552
+2.04 2.72 0 0.000188552
+2.72 0 2.72 0.000188552
+END DIST
+
+Metal 4 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 OVER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 OVER 0
+DIST count 12 width 0.3
+0.3 0.000554112 4.36465e-05 9.42761e-05
+0.6 0.000311553 4.36465e-05 9.42761e-05
+0.75 0.000258699 4.36465e-05 9.42761e-05
+0.9 0.000221966 4.36465e-05 9.42761e-05
+1.05 0.00019478 4.36465e-05 9.42761e-05
+1.2 0.000173759 4.36465e-05 9.42761e-05
+1.35 9.42761e-05 4.36465e-05 9.42761e-05
+1.5 8.48485e-05 4.36465e-05 9.42761e-05
+1.8 7.07071e-05 4.36465e-05 9.42761e-05
+2.4 0 4.36465e-05 9.42761e-05
+3 0 4.36465e-05 9.42761e-05
+3.6 0 4.36465e-05 9.42761e-05
+END DIST
+
+Metal 4 OVER 1
+DIST count 12 width 0.3
+0.3 0.000554112 9.96987e-05 9.42761e-05
+0.6 0.000311553 9.96987e-05 9.42761e-05
+0.75 0.000258699 9.96987e-05 9.42761e-05
+0.9 0.000221966 9.96987e-05 9.42761e-05
+1.05 0.00019478 9.96987e-05 9.42761e-05
+1.2 0.000173759 9.96987e-05 9.42761e-05
+1.35 9.42761e-05 9.96987e-05 9.42761e-05
+1.5 8.48485e-05 9.96987e-05 9.42761e-05
+1.8 7.07071e-05 9.96987e-05 9.42761e-05
+2.4 0 9.96987e-05 9.42761e-05
+3 0 9.96987e-05 9.42761e-05
+3.6 0 9.96987e-05 9.42761e-05
+END DIST
+
+Metal 4 OVER 2
+DIST count 12 width 0.3
+0.3 0.000554112 0.000141874 9.42761e-05
+0.6 0.000311553 0.000141874 9.42761e-05
+0.75 0.000258699 0.000141874 9.42761e-05
+0.9 0.000221966 0.000141874 9.42761e-05
+1.05 0.00019478 0.000141874 9.42761e-05
+1.2 0.000173759 0.000141874 9.42761e-05
+1.35 9.42761e-05 0.000141874 9.42761e-05
+1.5 8.48485e-05 0.000141874 9.42761e-05
+1.8 7.07071e-05 0.000141874 9.42761e-05
+2.4 0 0.000141874 9.42761e-05
+3 0 0.000141874 9.42761e-05
+3.6 0 0.000141874 9.42761e-05
+END DIST
+
+Metal 4 OVER 3
+DIST count 12 width 0.3
+0.3 0.000554112 0.000201823 9.42761e-05
+0.6 0.000311553 0.000201823 9.42761e-05
+0.75 0.000258699 0.000201823 9.42761e-05
+0.9 0.000221966 0.000201823 9.42761e-05
+1.05 0.00019478 0.000201823 9.42761e-05
+1.2 0.000173759 0.000201823 9.42761e-05
+1.35 9.42761e-05 0.000201823 9.42761e-05
+1.5 8.48485e-05 0.000201823 9.42761e-05
+1.8 7.07071e-05 0.000201823 9.42761e-05
+2.4 0 0.000201823 9.42761e-05
+3 0 0.000201823 9.42761e-05
+3.6 0 0.000201823 9.42761e-05
+END DIST
+
+Metal 4 UNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.000172394 9.42761e-05
+0.6 0.000311553 0.000172394 9.42761e-05
+0.75 0.000258699 0.000172394 9.42761e-05
+0.9 0.000221966 0.000172394 9.42761e-05
+1.05 0.00019478 0.000172394 9.42761e-05
+1.2 0.000173759 0.000172394 9.42761e-05
+1.35 9.42761e-05 0.000172394 9.42761e-05
+1.5 8.48485e-05 0.000172394 9.42761e-05
+1.8 7.07071e-05 0.000172394 9.42761e-05
+2.4 0 0.000172394 9.42761e-05
+3 0 0.000172394 9.42761e-05
+3.6 0 0.000172394 9.42761e-05
+END DIST
+
+Metal 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 8.62741e-05 9.42761e-05
+0.6 0.000311553 8.62741e-05 9.42761e-05
+0.75 0.000258699 8.62741e-05 9.42761e-05
+0.9 0.000221966 8.62741e-05 9.42761e-05
+1.05 0.00019478 8.62741e-05 9.42761e-05
+1.2 0.000173759 8.62741e-05 9.42761e-05
+1.35 9.42761e-05 8.62741e-05 9.42761e-05
+1.5 8.48485e-05 8.62741e-05 9.42761e-05
+1.8 7.07071e-05 8.62741e-05 9.42761e-05
+2.4 0 8.62741e-05 9.42761e-05
+3 0 8.62741e-05 9.42761e-05
+3.6 0 8.62741e-05 9.42761e-05
+END DIST
+
+Metal 4 DIAGUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 DIAGUNDER 5
+DIST count 13 width 0.3
+0 0 2.54545e-05 9.42761e-05
+0.3 0 0 9.42761e-05
+0.6 0 0 9.42761e-05
+0.75 0 0 9.42761e-05
+0.9 0 0 9.42761e-05
+1.05 0 0 9.42761e-05
+1.2 0 0 9.42761e-05
+1.35 0 0 9.42761e-05
+1.5 0 0 9.42761e-05
+1.8 0 0 9.42761e-05
+2.4 0 0 9.42761e-05
+3 0 0 9.42761e-05
+3.6 0 0 9.42761e-05
+END DIST
+
+Metal 4 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 3.43434e-05 9.42761e-05
+0.3 0 0 9.42761e-05
+0.6 0 0 9.42761e-05
+0.75 0 0 9.42761e-05
+0.9 0 0 9.42761e-05
+1.05 0 0 9.42761e-05
+1.2 0 0 9.42761e-05
+1.35 0 0 9.42761e-05
+1.5 0 0 9.42761e-05
+1.8 0 0 9.42761e-05
+2.4 0 0 9.42761e-05
+3 0 0 9.42761e-05
+3.6 0 0 9.42761e-05
+END DIST
+
+Metal 4 OVERUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 OVER 1 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.000228446 9.42761e-05
+0.6 0.000311553 0.000228446 9.42761e-05
+0.75 0.000258699 0.000228446 9.42761e-05
+0.9 0.000221966 0.000228446 9.42761e-05
+1.05 0.00019478 0.000228446 9.42761e-05
+1.2 0.000173759 0.000228446 9.42761e-05
+1.35 9.42761e-05 0.000228446 9.42761e-05
+1.5 8.48485e-05 0.000228446 9.42761e-05
+1.8 7.07071e-05 0.000228446 9.42761e-05
+2.4 0 0.000228446 9.42761e-05
+3 0 0.000228446 9.42761e-05
+3.6 0 0.000228446 9.42761e-05
+END DIST
+
+Metal 4 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 0.000142326 9.42761e-05
+0.6 0.000311553 0.000142326 9.42761e-05
+0.75 0.000258699 0.000142326 9.42761e-05
+0.9 0.000221966 0.000142326 9.42761e-05
+1.05 0.00019478 0.000142326 9.42761e-05
+1.2 0.000173759 0.000142326 9.42761e-05
+1.35 9.42761e-05 0.000142326 9.42761e-05
+1.5 8.48485e-05 0.000142326 9.42761e-05
+1.8 7.07071e-05 0.000142326 9.42761e-05
+2.4 0 0.000142326 9.42761e-05
+3 0 0.000142326 9.42761e-05
+3.6 0 0.000142326 9.42761e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.000270621 9.42761e-05
+0.6 0.000311553 0.000270621 9.42761e-05
+0.75 0.000258699 0.000270621 9.42761e-05
+0.9 0.000221966 0.000270621 9.42761e-05
+1.05 0.00019478 0.000270621 9.42761e-05
+1.2 0.000173759 0.000270621 9.42761e-05
+1.35 9.42761e-05 0.000270621 9.42761e-05
+1.5 8.48485e-05 0.000270621 9.42761e-05
+1.8 7.07071e-05 0.000270621 9.42761e-05
+2.4 0 0.000270621 9.42761e-05
+3 0 0.000270621 9.42761e-05
+3.6 0 0.000270621 9.42761e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 0.000184501 9.42761e-05
+0.6 0.000311553 0.000184501 9.42761e-05
+0.75 0.000258699 0.000184501 9.42761e-05
+0.9 0.000221966 0.000184501 9.42761e-05
+1.05 0.00019478 0.000184501 9.42761e-05
+1.2 0.000173759 0.000184501 9.42761e-05
+1.35 9.42761e-05 0.000184501 9.42761e-05
+1.5 8.48485e-05 0.000184501 9.42761e-05
+1.8 7.07071e-05 0.000184501 9.42761e-05
+2.4 0 0.000184501 9.42761e-05
+3 0 0.000184501 9.42761e-05
+3.6 0 0.000184501 9.42761e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.000330571 9.42761e-05
+0.6 0.000311553 0.000330571 9.42761e-05
+0.75 0.000258699 0.000330571 9.42761e-05
+0.9 0.000221966 0.000330571 9.42761e-05
+1.05 0.00019478 0.000330571 9.42761e-05
+1.2 0.000173759 0.000330571 9.42761e-05
+1.35 9.42761e-05 0.000330571 9.42761e-05
+1.5 8.48485e-05 0.000330571 9.42761e-05
+1.8 7.07071e-05 0.000330571 9.42761e-05
+2.4 0 0.000330571 9.42761e-05
+3 0 0.000330571 9.42761e-05
+3.6 0 0.000330571 9.42761e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 0.000244451 9.42761e-05
+0.6 0.000311553 0.000244451 9.42761e-05
+0.75 0.000258699 0.000244451 9.42761e-05
+0.9 0.000221966 0.000244451 9.42761e-05
+1.05 0.00019478 0.000244451 9.42761e-05
+1.2 0.000173759 0.000244451 9.42761e-05
+1.35 9.42761e-05 0.000244451 9.42761e-05
+1.5 8.48485e-05 0.000244451 9.42761e-05
+1.8 7.07071e-05 0.000244451 9.42761e-05
+2.4 0 0.000244451 9.42761e-05
+3 0 0.000244451 9.42761e-05
+3.6 0 0.000244451 9.42761e-05
+END DIST
+
+Metal 5 RESOVER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000188552
+0 0.62 0 0.000188552
+0 0.92 0 0.000188552
+0 1.39 0 0.000188552
+0 1.54 0 0.000188552
+0 1.84 0 0.000188552
+0 2.31 0 0.000188552
+0 2.46 0 0.000188552
+0 2.76 0 0.000188552
+0 3.68 0 0.000188552
+0.62 0.62 0 0.000188552
+0.62 0.92 0 0.000188552
+0.62 1.39 0 0.000188552
+0.62 1.54 0 0.000188552
+0.62 1.84 0 0.000188552
+0.62 2.31 0 0.000188552
+0.62 2.46 0 0.000188552
+0.62 2.76 0 0.000188552
+0.62 3.68 0 0.000188552
+0.92 0.92 0 0.000188552
+0.92 1.39 0 0.000188552
+0.92 1.54 0 0.000188552
+0.92 1.84 0 0.000188552
+0.92 2.31 0 0.000188552
+0.92 2.46 0 0.000188552
+0.92 2.76 0 0.000188552
+0.92 3.68 0 0.000188552
+1.39 1.39 0 0.000188552
+1.39 1.54 0 0.000188552
+1.39 1.84 0 0.000188552
+1.39 2.31 0 0.000188552
+1.39 2.46 0 0.000188552
+1.39 2.76 0 0.000188552
+1.39 3.68 0 0.000188552
+1.54 1.54 0 0.000188552
+1.54 1.84 0 0.000188552
+1.54 2.31 0 0.000188552
+1.54 2.46 0 0.000188552
+1.54 2.76 0 0.000188552
+1.54 3.68 0 0.000188552
+1.84 1.84 0 0.000188552
+1.84 2.31 0 0.000188552
+1.84 2.46 0 0.000188552
+1.84 2.76 0 0.000188552
+1.84 3.68 0 0.000188552
+2.31 2.31 0 0.000188552
+2.31 2.46 0 0.000188552
+2.31 2.76 0 0.000188552
+2.31 3.68 0 0.000188552
+2.46 2.46 0 0.000188552
+2.46 2.76 0 0.000188552
+2.46 3.68 0 0.000188552
+2.76 2.76 0 0.000188552
+2.76 3.68 0 0.000188552
+3.68 0 3.68 0.000188552
+END DIST
+
+Metal 5 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 4
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 OVER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 OVER 0
+DIST count 12 width 0.3
+0.3 0.000562124 3.89596e-05 9.42761e-05
+0.6 0.000314638 3.89596e-05 9.42761e-05
+0.75 0.000261521 3.89596e-05 9.42761e-05
+0.9 0.000224763 3.89596e-05 9.42761e-05
+1.05 0.000197615 3.89596e-05 9.42761e-05
+1.2 0.000112795 3.89596e-05 9.42761e-05
+1.35 0.000100262 3.89596e-05 9.42761e-05
+1.5 9.02357e-05 3.89596e-05 9.42761e-05
+1.8 7.51966e-05 3.89596e-05 9.42761e-05
+2.4 0 3.89596e-05 9.42761e-05
+3 0 3.89596e-05 9.42761e-05
+3.6 0 3.89596e-05 9.42761e-05
+END DIST
+
+Metal 5 OVER 1
+DIST count 12 width 0.3
+0.3 0.000562124 7.96056e-05 9.42761e-05
+0.6 0.000314638 7.96056e-05 9.42761e-05
+0.75 0.000261521 7.96056e-05 9.42761e-05
+0.9 0.000224763 7.96056e-05 9.42761e-05
+1.05 0.000197615 7.96056e-05 9.42761e-05
+1.2 0.000112795 7.96056e-05 9.42761e-05
+1.35 0.000100262 7.96056e-05 9.42761e-05
+1.5 9.02357e-05 7.96056e-05 9.42761e-05
+1.8 7.51966e-05 7.96056e-05 9.42761e-05
+2.4 0 7.96056e-05 9.42761e-05
+3 0 7.96056e-05 9.42761e-05
+3.6 0 7.96056e-05 9.42761e-05
+END DIST
+
+Metal 5 OVER 2
+DIST count 12 width 0.3
+0.3 0.000562124 0.00010049 9.42761e-05
+0.6 0.000314638 0.00010049 9.42761e-05
+0.75 0.000261521 0.00010049 9.42761e-05
+0.9 0.000224763 0.00010049 9.42761e-05
+1.05 0.000197615 0.00010049 9.42761e-05
+1.2 0.000112795 0.00010049 9.42761e-05
+1.35 0.000100262 0.00010049 9.42761e-05
+1.5 9.02357e-05 0.00010049 9.42761e-05
+1.8 7.51966e-05 0.00010049 9.42761e-05
+2.4 0 0.00010049 9.42761e-05
+3 0 0.00010049 9.42761e-05
+3.6 0 0.00010049 9.42761e-05
+END DIST
+
+Metal 5 OVER 3
+DIST count 12 width 0.3
+0.3 0.000562124 0.000117313 9.42761e-05
+0.6 0.000314638 0.000117313 9.42761e-05
+0.75 0.000261521 0.000117313 9.42761e-05
+0.9 0.000224763 0.000117313 9.42761e-05
+1.05 0.000197615 0.000117313 9.42761e-05
+1.2 0.000112795 0.000117313 9.42761e-05
+1.35 0.000100262 0.000117313 9.42761e-05
+1.5 9.02357e-05 0.000117313 9.42761e-05
+1.8 7.51966e-05 0.000117313 9.42761e-05
+2.4 0 0.000117313 9.42761e-05
+3 0 0.000117313 9.42761e-05
+3.6 0 0.000117313 9.42761e-05
+END DIST
+
+Metal 5 OVER 4
+DIST count 12 width 0.3
+0.3 0.000562124 0.000147545 9.42761e-05
+0.6 0.000314638 0.000147545 9.42761e-05
+0.75 0.000261521 0.000147545 9.42761e-05
+0.9 0.000224763 0.000147545 9.42761e-05
+1.05 0.000197615 0.000147545 9.42761e-05
+1.2 0.000112795 0.000147545 9.42761e-05
+1.35 0.000100262 0.000147545 9.42761e-05
+1.5 9.02357e-05 0.000147545 9.42761e-05
+1.8 7.51966e-05 0.000147545 9.42761e-05
+2.4 0 0.000147545 9.42761e-05
+3 0 0.000147545 9.42761e-05
+3.6 0 0.000147545 9.42761e-05
+END DIST
+
+Metal 5 UNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.00011345 9.42761e-05
+0.6 0.000314638 0.00011345 9.42761e-05
+0.75 0.000261521 0.00011345 9.42761e-05
+0.9 0.000224763 0.00011345 9.42761e-05
+1.05 0.000197615 0.00011345 9.42761e-05
+1.2 0.000112795 0.00011345 9.42761e-05
+1.35 0.000100262 0.00011345 9.42761e-05
+1.5 9.02357e-05 0.00011345 9.42761e-05
+1.8 7.51966e-05 0.00011345 9.42761e-05
+2.4 0 0.00011345 9.42761e-05
+3 0 0.00011345 9.42761e-05
+3.6 0 0.00011345 9.42761e-05
+END DIST
+
+Metal 5 DIAGUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 6.80808e-05 9.42761e-05
+0.3 0 0 9.42761e-05
+0.6 0 0 9.42761e-05
+0.75 0 0 9.42761e-05
+0.9 0 0 9.42761e-05
+1.05 0 0 9.42761e-05
+1.2 0 0 9.42761e-05
+1.35 0 0 9.42761e-05
+1.5 0 0 9.42761e-05
+1.8 0 0 9.42761e-05
+2.4 0 0 9.42761e-05
+3 0 0 9.42761e-05
+3.6 0 0 9.42761e-05
+END DIST
+
+Metal 5 OVERUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.000154096 9.42761e-05
+0.6 0.000314638 0.000154096 9.42761e-05
+0.75 0.000261521 0.000154096 9.42761e-05
+0.9 0.000224763 0.000154096 9.42761e-05
+1.05 0.000197615 0.000154096 9.42761e-05
+1.2 0.000112795 0.000154096 9.42761e-05
+1.35 0.000100262 0.000154096 9.42761e-05
+1.5 9.02357e-05 0.000154096 9.42761e-05
+1.8 7.51966e-05 0.000154096 9.42761e-05
+2.4 0 0.000154096 9.42761e-05
+3 0 0.000154096 9.42761e-05
+3.6 0 0.000154096 9.42761e-05
+END DIST
+
+Metal 5 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.00017498 9.42761e-05
+0.6 0.000314638 0.00017498 9.42761e-05
+0.75 0.000261521 0.00017498 9.42761e-05
+0.9 0.000224763 0.00017498 9.42761e-05
+1.05 0.000197615 0.00017498 9.42761e-05
+1.2 0.000112795 0.00017498 9.42761e-05
+1.35 0.000100262 0.00017498 9.42761e-05
+1.5 9.02357e-05 0.00017498 9.42761e-05
+1.8 7.51966e-05 0.00017498 9.42761e-05
+2.4 0 0.00017498 9.42761e-05
+3 0 0.00017498 9.42761e-05
+3.6 0 0.00017498 9.42761e-05
+END DIST
+
+Metal 5 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.000191803 9.42761e-05
+0.6 0.000314638 0.000191803 9.42761e-05
+0.75 0.000261521 0.000191803 9.42761e-05
+0.9 0.000224763 0.000191803 9.42761e-05
+1.05 0.000197615 0.000191803 9.42761e-05
+1.2 0.000112795 0.000191803 9.42761e-05
+1.35 0.000100262 0.000191803 9.42761e-05
+1.5 9.02357e-05 0.000191803 9.42761e-05
+1.8 7.51966e-05 0.000191803 9.42761e-05
+2.4 0 0.000191803 9.42761e-05
+3 0 0.000191803 9.42761e-05
+3.6 0 0.000191803 9.42761e-05
+END DIST
+
+Metal 5 OVER 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.000222035 9.42761e-05
+0.6 0.000314638 0.000222035 9.42761e-05
+0.75 0.000261521 0.000222035 9.42761e-05
+0.9 0.000224763 0.000222035 9.42761e-05
+1.05 0.000197615 0.000222035 9.42761e-05
+1.2 0.000112795 0.000222035 9.42761e-05
+1.35 0.000100262 0.000222035 9.42761e-05
+1.5 9.02357e-05 0.000222035 9.42761e-05
+1.8 7.51966e-05 0.000222035 9.42761e-05
+2.4 0 0.000222035 9.42761e-05
+3 0 0.000222035 9.42761e-05
+3.6 0 0.000222035 9.42761e-05
+END DIST
+
+Metal 6 RESOVER
+WIDTH Table 1 entries:  1.6
+
+Metal 6 RESOVER 0
+DIST count 55 width 1.6
+0 0 0 2.27273e-05
+0 1.8 0 2.27273e-05
+0 3.4 0 2.27273e-05
+0 4.4 0 2.27273e-05
+0 5.2 0 2.27273e-05
+0 6.8 0 2.27273e-05
+0 7.8 0 2.27273e-05
+0 8.6 0 2.27273e-05
+0 10.2 0 2.27273e-05
+0 13.6 0 2.27273e-05
+1.8 1.8 0 2.27273e-05
+1.8 3.4 0 2.27273e-05
+1.8 4.4 0 2.27273e-05
+1.8 5.2 0 2.27273e-05
+1.8 6.8 0 2.27273e-05
+1.8 7.8 0 2.27273e-05
+1.8 8.6 0 2.27273e-05
+1.8 10.2 0 2.27273e-05
+1.8 13.6 0 2.27273e-05
+3.4 3.4 0 2.27273e-05
+3.4 4.4 0 2.27273e-05
+3.4 5.2 0 2.27273e-05
+3.4 6.8 0 2.27273e-05
+3.4 7.8 0 2.27273e-05
+3.4 8.6 0 2.27273e-05
+3.4 10.2 0 2.27273e-05
+3.4 13.6 0 2.27273e-05
+4.4 4.4 0 2.27273e-05
+4.4 5.2 0 2.27273e-05
+4.4 6.8 0 2.27273e-05
+4.4 7.8 0 2.27273e-05
+4.4 8.6 0 2.27273e-05
+4.4 10.2 0 2.27273e-05
+4.4 13.6 0 2.27273e-05
+5.2 5.2 0 2.27273e-05
+5.2 6.8 0 2.27273e-05
+5.2 7.8 0 2.27273e-05
+5.2 8.6 0 2.27273e-05
+5.2 10.2 0 2.27273e-05
+5.2 13.6 0 2.27273e-05
+6.8 6.8 0 2.27273e-05
+6.8 7.8 0 2.27273e-05
+6.8 8.6 0 2.27273e-05
+6.8 10.2 0 2.27273e-05
+6.8 13.6 0 2.27273e-05
+7.8 7.8 0 2.27273e-05
+7.8 8.6 0 2.27273e-05
+7.8 10.2 0 2.27273e-05
+7.8 13.6 0 2.27273e-05
+8.6 8.6 0 2.27273e-05
+8.6 10.2 0 2.27273e-05
+8.6 13.6 0 2.27273e-05
+10.2 10.2 0 2.27273e-05
+10.2 13.6 0 2.27273e-05
+13.6 0 13.6 2.27273e-05
+END DIST
+
+Metal 6 RESOVER 1
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 2
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 3
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 4
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 5
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 OVER
+WIDTH Table 1 entries:  1.6
+
+Metal 6 OVER 0
+DIST count 12 width 1.6
+1.6 0.000160354 4.46364e-05 1.13636e-05
+3.2 0 4.46364e-05 1.13636e-05
+4 0 4.46364e-05 1.13636e-05
+4.8 0 4.46364e-05 1.13636e-05
+5.6 0 4.46364e-05 1.13636e-05
+6.4 0 4.46364e-05 1.13636e-05
+7.2 0 4.46364e-05 1.13636e-05
+8 0 4.46364e-05 1.13636e-05
+9.6 0 4.46364e-05 1.13636e-05
+12.8 0 4.46364e-05 1.13636e-05
+16 0 4.46364e-05 1.13636e-05
+19.2 0 4.46364e-05 1.13636e-05
+END DIST
+
+Metal 6 OVER 1
+DIST count 12 width 1.6
+1.6 0.000160354 0.000146457 1.13636e-05
+3.2 0 0.000146457 1.13636e-05
+4 0 0.000146457 1.13636e-05
+4.8 0 0.000146457 1.13636e-05
+5.6 0 0.000146457 1.13636e-05
+6.4 0 0.000146457 1.13636e-05
+7.2 0 0.000146457 1.13636e-05
+8 0 0.000146457 1.13636e-05
+9.6 0 0.000146457 1.13636e-05
+12.8 0 0.000146457 1.13636e-05
+16 0 0.000146457 1.13636e-05
+19.2 0 0.000146457 1.13636e-05
+END DIST
+
+Metal 6 OVER 2
+DIST count 12 width 1.6
+1.6 0.000160354 0.000212019 1.13636e-05
+3.2 0 0.000212019 1.13636e-05
+4 0 0.000212019 1.13636e-05
+4.8 0 0.000212019 1.13636e-05
+5.6 0 0.000212019 1.13636e-05
+6.4 0 0.000212019 1.13636e-05
+7.2 0 0.000212019 1.13636e-05
+8 0 0.000212019 1.13636e-05
+9.6 0 0.000212019 1.13636e-05
+12.8 0 0.000212019 1.13636e-05
+16 0 0.000212019 1.13636e-05
+19.2 0 0.000212019 1.13636e-05
+END DIST
+
+Metal 6 OVER 3
+DIST count 12 width 1.6
+1.6 0.000160354 0.00026288 1.13636e-05
+3.2 0 0.00026288 1.13636e-05
+4 0 0.00026288 1.13636e-05
+4.8 0 0.00026288 1.13636e-05
+5.6 0 0.00026288 1.13636e-05
+6.4 0 0.00026288 1.13636e-05
+7.2 0 0.00026288 1.13636e-05
+8 0 0.00026288 1.13636e-05
+9.6 0 0.00026288 1.13636e-05
+12.8 0 0.00026288 1.13636e-05
+16 0 0.00026288 1.13636e-05
+19.2 0 0.00026288 1.13636e-05
+END DIST
+
+Metal 6 OVER 4
+DIST count 12 width 1.6
+1.6 0.000160354 0.000244318 1.13636e-05
+3.2 0 0.000244318 1.13636e-05
+4 0 0.000244318 1.13636e-05
+4.8 0 0.000244318 1.13636e-05
+5.6 0 0.000244318 1.13636e-05
+6.4 0 0.000244318 1.13636e-05
+7.2 0 0.000244318 1.13636e-05
+8 0 0.000244318 1.13636e-05
+9.6 0 0.000244318 1.13636e-05
+12.8 0 0.000244318 1.13636e-05
+16 0 0.000244318 1.13636e-05
+19.2 0 0.000244318 1.13636e-05
+END DIST
+
+Metal 6 OVER 5
+DIST count 12 width 1.6
+1.6 0.000160354 0.000414985 1.13636e-05
+3.2 0 0.000414985 1.13636e-05
+4 0 0.000414985 1.13636e-05
+4.8 0 0.000414985 1.13636e-05
+5.6 0 0.000414985 1.13636e-05
+6.4 0 0.000414985 1.13636e-05
+7.2 0 0.000414985 1.13636e-05
+8 0 0.000414985 1.13636e-05
+9.6 0 0.000414985 1.13636e-05
+12.8 0 0.000414985 1.13636e-05
+16 0 0.000414985 1.13636e-05
+19.2 0 0.000414985 1.13636e-05
+END DIST
+
+Metal 6 UNDER
+WIDTH Table 0 entries: 
+
+Metal 6 DIAGUNDER
+WIDTH Table 0 entries: 
+END DensityModel 0
diff --git a/sky130/openlane/rules.openrcx.sky130A.min.magic b/sky130/openlane/rules.openrcx.sky130A.min.magic
new file mode 100644
index 0000000..6c9b736
--- /dev/null
+++ b/sky130/openlane/rules.openrcx.sky130A.min.magic
@@ -0,0 +1,1645 @@
+Extraction Rules for OpenRCX
+
+DIAGMODEL ON
+
+LayerCount 6
+DensityRate 1  0
+
+DensityModel 0
+
+Metal 1 RESOVER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 RESOVER 0
+DIST count 55 width 0.17
+0 0 0 0.0623886
+0 0.29 0 0.0623886
+0 0.46 0 0.0623886
+0 0.665 0 0.0623886
+0 0.75 0 0.0623886
+0 0.92 0 0.0623886
+0 1.125 0 0.0623886
+0 1.21 0 0.0623886
+0 1.38 0 0.0623886
+0 1.84 0 0.0623886
+0.29 0.29 0 0.0623886
+0.29 0.46 0 0.0623886
+0.29 0.665 0 0.0623886
+0.29 0.75 0 0.0623886
+0.29 0.92 0 0.0623886
+0.29 1.125 0 0.0623886
+0.29 1.21 0 0.0623886
+0.29 1.38 0 0.0623886
+0.29 1.84 0 0.0623886
+0.46 0.46 0 0.0623886
+0.46 0.665 0 0.0623886
+0.46 0.75 0 0.0623886
+0.46 0.92 0 0.0623886
+0.46 1.125 0 0.0623886
+0.46 1.21 0 0.0623886
+0.46 1.38 0 0.0623886
+0.46 1.84 0 0.0623886
+0.665 0.665 0 0.0623886
+0.665 0.75 0 0.0623886
+0.665 0.92 0 0.0623886
+0.665 1.125 0 0.0623886
+0.665 1.21 0 0.0623886
+0.665 1.38 0 0.0623886
+0.665 1.84 0 0.0623886
+0.75 0.75 0 0.0623886
+0.75 0.92 0 0.0623886
+0.75 1.125 0 0.0623886
+0.75 1.21 0 0.0623886
+0.75 1.38 0 0.0623886
+0.75 1.84 0 0.0623886
+0.92 0.92 0 0.0623886
+0.92 1.125 0 0.0623886
+0.92 1.21 0 0.0623886
+0.92 1.38 0 0.0623886
+0.92 1.84 0 0.0623886
+1.125 1.125 0 0.0623886
+1.125 1.21 0 0.0623886
+1.125 1.38 0 0.0623886
+1.125 1.84 0 0.0623886
+1.21 1.21 0 0.0623886
+1.21 1.38 0 0.0623886
+1.21 1.84 0 0.0623886
+1.38 1.38 0 0.0623886
+1.38 1.84 0 0.0623886
+1.84 0 1.84 0.0623886
+END DIST
+
+Metal 1 OVER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 OVER 0
+DIST count 12 width 0.17
+0.17 0.000497977 4.50051e-05 0.0311943
+0.34 0.000279412 4.50051e-05 0.0311943
+0.425 0.000232192 4.50051e-05 0.0311943
+0.51 0.000199448 4.50051e-05 0.0311943
+0.595 0.000175236 4.50051e-05 0.0311943
+0.68 0.000156519 4.50051e-05 0.0311943
+0.765 0.000141568 4.50051e-05 0.0311943
+0.85 0.000129322 4.50051e-05 0.0311943
+1.02 0.000110405 4.50051e-05 0.0311943
+1.36 8.56497e-05 4.50051e-05 0.0311943
+1.7 3.92157e-05 4.50051e-05 0.0311943
+2.04 0 4.50051e-05 0.0311943
+END DIST
+
+Metal 1 UNDER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 UNDER 2
+DIST count 12 width 0.17
+0.17 0.000497977 0.00016261 0.0311943
+0.34 0.000279412 0.00016261 0.0311943
+0.425 0.000232192 0.00016261 0.0311943
+0.51 0.000199448 0.00016261 0.0311943
+0.595 0.000175236 0.00016261 0.0311943
+0.68 0.000156519 0.00016261 0.0311943
+0.765 0.000141568 0.00016261 0.0311943
+0.85 0.000129322 0.00016261 0.0311943
+1.02 0.000110405 0.00016261 0.0311943
+1.36 8.56497e-05 0.00016261 0.0311943
+1.7 3.92157e-05 0.00016261 0.0311943
+2.04 0 0.00016261 0.0311943
+END DIST
+
+Metal 1 UNDER 3
+DIST count 12 width 0.17
+0.17 0.000497977 0.000126933 0.0311943
+0.34 0.000279412 0.000126933 0.0311943
+0.425 0.000232192 0.000126933 0.0311943
+0.51 0.000199448 0.000126933 0.0311943
+0.595 0.000175236 0.000126933 0.0311943
+0.68 0.000156519 0.000126933 0.0311943
+0.765 0.000141568 0.000126933 0.0311943
+0.85 0.000129322 0.000126933 0.0311943
+1.02 0.000110405 0.000126933 0.0311943
+1.36 8.56497e-05 0.000126933 0.0311943
+1.7 3.92157e-05 0.000126933 0.0311943
+2.04 0 0.000126933 0.0311943
+END DIST
+
+Metal 1 UNDER 4
+DIST count 12 width 0.17
+0.17 0.000497977 8.90919e-05 0.0311943
+0.34 0.000279412 8.90919e-05 0.0311943
+0.425 0.000232192 8.90919e-05 0.0311943
+0.51 0.000199448 8.90919e-05 0.0311943
+0.595 0.000175236 8.90919e-05 0.0311943
+0.68 0.000156519 8.90919e-05 0.0311943
+0.765 0.000141568 8.90919e-05 0.0311943
+0.85 0.000129322 8.90919e-05 0.0311943
+1.02 0.000110405 8.90919e-05 0.0311943
+1.36 8.56497e-05 8.90919e-05 0.0311943
+1.7 3.92157e-05 8.90919e-05 0.0311943
+2.04 0 8.90919e-05 0.0311943
+END DIST
+
+Metal 1 UNDER 5
+DIST count 12 width 0.17
+0.17 0.000497977 7.92153e-05 0.0311943
+0.34 0.000279412 7.92153e-05 0.0311943
+0.425 0.000232192 7.92153e-05 0.0311943
+0.51 0.000199448 7.92153e-05 0.0311943
+0.595 0.000175236 7.92153e-05 0.0311943
+0.68 0.000156519 7.92153e-05 0.0311943
+0.765 0.000141568 7.92153e-05 0.0311943
+0.85 0.000129322 7.92153e-05 0.0311943
+1.02 0.000110405 7.92153e-05 0.0311943
+1.36 8.56497e-05 7.92153e-05 0.0311943
+1.7 3.92157e-05 7.92153e-05 0.0311943
+2.04 0 7.92153e-05 0.0311943
+END DIST
+
+Metal 1 UNDER 6
+DIST count 12 width 0.17
+0.17 0.000497977 5.85915e-05 0.0311943
+0.34 0.000279412 5.85915e-05 0.0311943
+0.425 0.000232192 5.85915e-05 0.0311943
+0.51 0.000199448 5.85915e-05 0.0311943
+0.595 0.000175236 5.85915e-05 0.0311943
+0.68 0.000156519 5.85915e-05 0.0311943
+0.765 0.000141568 5.85915e-05 0.0311943
+0.85 0.000129322 5.85915e-05 0.0311943
+1.02 0.000110405 5.85915e-05 0.0311943
+1.36 8.56497e-05 5.85915e-05 0.0311943
+1.7 3.92157e-05 5.85915e-05 0.0311943
+2.04 0 5.85915e-05 0.0311943
+END DIST
+
+Metal 1 DIAGUNDER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 DIAGUNDER 2
+DIST count 13 width 0.17
+0 0 7.57172e-05 0.0311943
+0.17 0 0 0.0311943
+0.34 0 0 0.0311943
+0.425 0 0 0.0311943
+0.51 0 0 0.0311943
+0.595 0 0 0.0311943
+0.68 0 0 0.0311943
+0.765 0 0 0.0311943
+0.85 0 0 0.0311943
+1.02 0 0 0.0311943
+1.36 0 0 0.0311943
+1.7 0 0 0.0311943
+2.04 0 0 0.0311943
+END DIST
+
+Metal 1 DIAGUNDER 3
+DIST count 13 width 0.17
+0 0 5.18384e-05 0.0311943
+0.17 0 0 0.0311943
+0.34 0 0 0.0311943
+0.425 0 0 0.0311943
+0.51 0 0 0.0311943
+0.595 0 0 0.0311943
+0.68 0 0 0.0311943
+0.765 0 0 0.0311943
+0.85 0 0 0.0311943
+1.02 0 0 0.0311943
+1.36 0 0 0.0311943
+1.7 0 0 0.0311943
+2.04 0 0 0.0311943
+END DIST
+
+Metal 1 DIAGUNDER 4
+DIST count 13 width 0.17
+0 0 1.87576e-05 0.0311943
+0.17 0 0 0.0311943
+0.34 0 0 0.0311943
+0.425 0 0 0.0311943
+0.51 0 0 0.0311943
+0.595 0 0 0.0311943
+0.68 0 0 0.0311943
+0.765 0 0 0.0311943
+0.85 0 0 0.0311943
+1.02 0 0 0.0311943
+1.36 0 0 0.0311943
+1.7 0 0 0.0311943
+2.04 0 0 0.0311943
+END DIST
+
+Metal 1 DIAGUNDER 5
+DIST count 13 width 0.17
+0 0 1.21616e-05 0.0311943
+0.17 0 0 0.0311943
+0.34 0 0 0.0311943
+0.425 0 0 0.0311943
+0.51 0 0 0.0311943
+0.595 0 0 0.0311943
+0.68 0 0 0.0311943
+0.765 0 0 0.0311943
+0.85 0 0 0.0311943
+1.02 0 0 0.0311943
+1.36 0 0 0.0311943
+1.7 0 0 0.0311943
+2.04 0 0 0.0311943
+END DIST
+
+Metal 1 DIAGUNDER 6
+DIST count 0 width 0.17
+END DIST
+
+Metal 2 RESOVER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.000757576
+0 0.2 0 0.000757576
+0 0.34 0 0.000757576
+0 0.47 0 0.000757576
+0 0.54 0 0.000757576
+0 0.68 0 0.000757576
+0 0.81 0 0.000757576
+0 0.88 0 0.000757576
+0 1.02 0 0.000757576
+0 1.36 0 0.000757576
+0.2 0.2 0 0.000757576
+0.2 0.34 0 0.000757576
+0.2 0.47 0 0.000757576
+0.2 0.54 0 0.000757576
+0.2 0.68 0 0.000757576
+0.2 0.81 0 0.000757576
+0.2 0.88 0 0.000757576
+0.2 1.02 0 0.000757576
+0.2 1.36 0 0.000757576
+0.34 0.34 0 0.000757576
+0.34 0.47 0 0.000757576
+0.34 0.54 0 0.000757576
+0.34 0.68 0 0.000757576
+0.34 0.81 0 0.000757576
+0.34 0.88 0 0.000757576
+0.34 1.02 0 0.000757576
+0.34 1.36 0 0.000757576
+0.47 0.47 0 0.000757576
+0.47 0.54 0 0.000757576
+0.47 0.68 0 0.000757576
+0.47 0.81 0 0.000757576
+0.47 0.88 0 0.000757576
+0.47 1.02 0 0.000757576
+0.47 1.36 0 0.000757576
+0.54 0.54 0 0.000757576
+0.54 0.68 0 0.000757576
+0.54 0.81 0 0.000757576
+0.54 0.88 0 0.000757576
+0.54 1.02 0 0.000757576
+0.54 1.36 0 0.000757576
+0.68 0.68 0 0.000757576
+0.68 0.81 0 0.000757576
+0.68 0.88 0 0.000757576
+0.68 1.02 0 0.000757576
+0.68 1.36 0 0.000757576
+0.81 0.81 0 0.000757576
+0.81 0.88 0 0.000757576
+0.81 1.02 0 0.000757576
+0.81 1.36 0 0.000757576
+0.88 0.88 0 0.000757576
+0.88 1.02 0 0.000757576
+0.88 1.36 0 0.000757576
+1.02 1.02 0 0.000757576
+1.02 1.36 0 0.000757576
+1.36 0 1.36 0.000757576
+END DIST
+
+Metal 2 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 2 OVER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 OVER 0
+DIST count 12 width 0.14
+0.14 0.000838745 4.36667e-05 0.000378788
+0.28 0.000471303 4.36667e-05 0.000378788
+0.35 0.000391492 4.36667e-05 0.000378788
+0.42 0.000336067 4.36667e-05 0.000378788
+0.49 0.000295057 4.36667e-05 0.000378788
+0.56 0.000263348 4.36667e-05 0.000378788
+0.63 0.000238021 4.36667e-05 0.000378788
+0.7 0.000217283 4.36667e-05 0.000378788
+0.84 0.000185267 4.36667e-05 0.000378788
+1.12 0.000143435 4.36667e-05 0.000378788
+1.4 0.000117182 4.36667e-05 0.000378788
+1.68 0 9.77792e-05 0.000378788
+END DIST
+
+Metal 2 OVER 1
+DIST count 12 width 0.14
+0.14 0.000838745 0.000119272 0.000378788
+0.28 0.000471303 0.000119272 0.000378788
+0.35 0.000391492 0.000119272 0.000378788
+0.42 0.000336067 0.000119272 0.000378788
+0.49 0.000295057 0.000119272 0.000378788
+0.56 0.000263348 0.000119272 0.000378788
+0.63 0.000238021 0.000119272 0.000378788
+0.7 0.000217283 0.000119272 0.000378788
+0.84 0.000185267 0.000119272 0.000378788
+1.12 0.000143435 0.000119272 0.000378788
+1.4 0.000117182 0.000119272 0.000378788
+1.68 0 0.000173385 0.000378788
+END DIST
+
+Metal 2 UNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 UNDER 3
+DIST count 12 width 0.14
+0.14 0.000838745 0.000170271 0.000378788
+0.28 0.000471303 0.000170271 0.000378788
+0.35 0.000391492 0.000170271 0.000378788
+0.42 0.000336067 0.000170271 0.000378788
+0.49 0.000295057 0.000170271 0.000378788
+0.56 0.000263348 0.000170271 0.000378788
+0.63 0.000238021 0.000170271 0.000378788
+0.7 0.000217283 0.000170271 0.000378788
+0.84 0.000185267 0.000170271 0.000378788
+1.12 0.000143435 0.000170271 0.000378788
+1.4 0.000117182 0.000170271 0.000378788
+1.68 0 0.000224384 0.000378788
+END DIST
+
+Metal 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000838745 9.85447e-05 0.000378788
+0.28 0.000471303 9.85447e-05 0.000378788
+0.35 0.000391492 9.85447e-05 0.000378788
+0.42 0.000336067 9.85447e-05 0.000378788
+0.49 0.000295057 9.85447e-05 0.000378788
+0.56 0.000263348 9.85447e-05 0.000378788
+0.63 0.000238021 9.85447e-05 0.000378788
+0.7 0.000217283 9.85447e-05 0.000378788
+0.84 0.000185267 9.85447e-05 0.000378788
+1.12 0.000143435 9.85447e-05 0.000378788
+1.4 0.000117182 9.85447e-05 0.000378788
+1.68 0 0.000152657 0.000378788
+END DIST
+
+Metal 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000838745 8.06227e-05 0.000378788
+0.28 0.000471303 8.06227e-05 0.000378788
+0.35 0.000391492 8.06227e-05 0.000378788
+0.42 0.000336067 8.06227e-05 0.000378788
+0.49 0.000295057 8.06227e-05 0.000378788
+0.56 0.000263348 8.06227e-05 0.000378788
+0.63 0.000238021 8.06227e-05 0.000378788
+0.7 0.000217283 8.06227e-05 0.000378788
+0.84 0.000185267 8.06227e-05 0.000378788
+1.12 0.000143435 8.06227e-05 0.000378788
+1.4 0.000117182 8.06227e-05 0.000378788
+1.68 0 0.000134735 0.000378788
+END DIST
+
+Metal 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000838745 6.12349e-05 0.000378788
+0.28 0.000471303 6.12349e-05 0.000378788
+0.35 0.000391492 6.12349e-05 0.000378788
+0.42 0.000336067 6.12349e-05 0.000378788
+0.49 0.000295057 6.12349e-05 0.000378788
+0.56 0.000263348 6.12349e-05 0.000378788
+0.63 0.000238021 6.12349e-05 0.000378788
+0.7 0.000217283 6.12349e-05 0.000378788
+0.84 0.000185267 6.12349e-05 0.000378788
+1.12 0.000143435 6.12349e-05 0.000378788
+1.4 0.000117182 6.12349e-05 0.000378788
+1.68 0 0.000115347 0.000378788
+END DIST
+
+Metal 2 DIAGUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 DIAGUNDER 3
+DIST count 13 width 0.14
+0 0 1.89495e-05 0.000378788
+0.14 0 0 0.000378788
+0.28 0 0 0.000378788
+0.35 0 0 0.000378788
+0.42 0 0 0.000378788
+0.49 0 0 0.000378788
+0.56 0 0 0.000378788
+0.63 0 0 0.000378788
+0.7 0 0 0.000378788
+0.84 0 0 0.000378788
+1.12 0 0 0.000378788
+1.4 0 0 0.000378788
+1.68 0 0 0.000378788
+END DIST
+
+Metal 2 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 3.22222e-05 0.000378788
+0.14 0 0 0.000378788
+0.28 0 0 0.000378788
+0.35 0 0 0.000378788
+0.42 0 0 0.000378788
+0.49 0 0 0.000378788
+0.56 0 0 0.000378788
+0.63 0 0 0.000378788
+0.7 0 0 0.000378788
+0.84 0 0 0.000378788
+1.12 0 0 0.000378788
+1.4 0 0 0.000378788
+1.68 0 0 0.000378788
+END DIST
+
+Metal 2 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 1.82828e-05 0.000378788
+0.14 0 0 0.000378788
+0.28 0 0 0.000378788
+0.35 0 0 0.000378788
+0.42 0 0 0.000378788
+0.49 0 0 0.000378788
+0.56 0 0 0.000378788
+0.63 0 0 0.000378788
+0.7 0 0 0.000378788
+0.84 0 0 0.000378788
+1.12 0 0 0.000378788
+1.4 0 0 0.000378788
+1.68 0 0 0.000378788
+END DIST
+
+Metal 2 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 1.33939e-05 0.000378788
+0.14 0 0 0.000378788
+0.28 0 0 0.000378788
+0.35 0 0 0.000378788
+0.42 0 0 0.000378788
+0.49 0 0 0.000378788
+0.56 0 0 0.000378788
+0.63 0 0 0.000378788
+0.7 0 0 0.000378788
+0.84 0 0 0.000378788
+1.12 0 0 0.000378788
+1.4 0 0 0.000378788
+1.68 0 0 0.000378788
+END DIST
+
+Metal 2 OVERUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 OVER 1 UNDER 3
+DIST count 12 width 0.14
+0.14 0.000838745 0.000245877 0.000378788
+0.28 0.000471303 0.000245877 0.000378788
+0.35 0.000391492 0.000245877 0.000378788
+0.42 0.000336067 0.000245877 0.000378788
+0.49 0.000295057 0.000245877 0.000378788
+0.56 0.000263348 0.000245877 0.000378788
+0.63 0.000238021 0.000245877 0.000378788
+0.7 0.000217283 0.000245877 0.000378788
+0.84 0.000185267 0.000245877 0.000378788
+1.12 0.000143435 0.000245877 0.000378788
+1.4 0.000117182 0.000245877 0.000378788
+1.68 0 0.00029999 0.000378788
+END DIST
+
+Metal 2 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000838745 0.000174151 0.000378788
+0.28 0.000471303 0.000174151 0.000378788
+0.35 0.000391492 0.000174151 0.000378788
+0.42 0.000336067 0.000174151 0.000378788
+0.49 0.000295057 0.000174151 0.000378788
+0.56 0.000263348 0.000174151 0.000378788
+0.63 0.000238021 0.000174151 0.000378788
+0.7 0.000217283 0.000174151 0.000378788
+0.84 0.000185267 0.000174151 0.000378788
+1.12 0.000143435 0.000174151 0.000378788
+1.4 0.000117182 0.000174151 0.000378788
+1.68 0 0.000228263 0.000378788
+END DIST
+
+Metal 2 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000838745 0.000156228 0.000378788
+0.28 0.000471303 0.000156228 0.000378788
+0.35 0.000391492 0.000156228 0.000378788
+0.42 0.000336067 0.000156228 0.000378788
+0.49 0.000295057 0.000156228 0.000378788
+0.56 0.000263348 0.000156228 0.000378788
+0.63 0.000238021 0.000156228 0.000378788
+0.7 0.000217283 0.000156228 0.000378788
+0.84 0.000185267 0.000156228 0.000378788
+1.12 0.000143435 0.000156228 0.000378788
+1.4 0.000117182 0.000156228 0.000378788
+1.68 0 0.000210341 0.000378788
+END DIST
+
+Metal 2 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000838745 0.000136841 0.000378788
+0.28 0.000471303 0.000136841 0.000378788
+0.35 0.000391492 0.000136841 0.000378788
+0.42 0.000336067 0.000136841 0.000378788
+0.49 0.000295057 0.000136841 0.000378788
+0.56 0.000263348 0.000136841 0.000378788
+0.63 0.000238021 0.000136841 0.000378788
+0.7 0.000217283 0.000136841 0.000378788
+0.84 0.000185267 0.000136841 0.000378788
+1.12 0.000143435 0.000136841 0.000378788
+1.4 0.000117182 0.000136841 0.000378788
+1.68 0 0.000190953 0.000378788
+END DIST
+
+Metal 3 RESOVER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.000757576
+0 0.32 0 0.000757576
+0 0.46 0 0.000757576
+0 0.71 0 0.000757576
+0 0.78 0 0.000757576
+0 0.92 0 0.000757576
+0 1.17 0 0.000757576
+0 1.24 0 0.000757576
+0 1.38 0 0.000757576
+0 1.84 0 0.000757576
+0.32 0.32 0 0.000757576
+0.32 0.46 0 0.000757576
+0.32 0.71 0 0.000757576
+0.32 0.78 0 0.000757576
+0.32 0.92 0 0.000757576
+0.32 1.17 0 0.000757576
+0.32 1.24 0 0.000757576
+0.32 1.38 0 0.000757576
+0.32 1.84 0 0.000757576
+0.46 0.46 0 0.000757576
+0.46 0.71 0 0.000757576
+0.46 0.78 0 0.000757576
+0.46 0.92 0 0.000757576
+0.46 1.17 0 0.000757576
+0.46 1.24 0 0.000757576
+0.46 1.38 0 0.000757576
+0.46 1.84 0 0.000757576
+0.71 0.71 0 0.000757576
+0.71 0.78 0 0.000757576
+0.71 0.92 0 0.000757576
+0.71 1.17 0 0.000757576
+0.71 1.24 0 0.000757576
+0.71 1.38 0 0.000757576
+0.71 1.84 0 0.000757576
+0.78 0.78 0 0.000757576
+0.78 0.92 0 0.000757576
+0.78 1.17 0 0.000757576
+0.78 1.24 0 0.000757576
+0.78 1.38 0 0.000757576
+0.78 1.84 0 0.000757576
+0.92 0.92 0 0.000757576
+0.92 1.17 0 0.000757576
+0.92 1.24 0 0.000757576
+0.92 1.38 0 0.000757576
+0.92 1.84 0 0.000757576
+1.17 1.17 0 0.000757576
+1.17 1.24 0 0.000757576
+1.17 1.38 0 0.000757576
+1.17 1.84 0 0.000757576
+1.24 1.24 0 0.000757576
+1.24 1.38 0 0.000757576
+1.24 1.84 0 0.000757576
+1.38 1.38 0 0.000757576
+1.38 1.84 0 0.000757576
+1.84 0 1.84 0.000757576
+END DIST
+
+Metal 3 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 RESOVER 2
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 OVER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 OVER 0
+DIST count 12 width 0.14
+0.14 0.000889851 3.99697e-05 0.000378788
+0.28 0.000497251 3.99697e-05 0.000378788
+0.35 0.000413304 3.99697e-05 0.000378788
+0.42 0.000355285 3.99697e-05 0.000378788
+0.49 0.000312469 3.99697e-05 0.000378788
+0.56 0.000279405 3.99697e-05 0.000378788
+0.63 0.000253003 3.99697e-05 0.000378788
+0.7 0.000231378 3.99697e-05 0.000378788
+0.84 0.00019795 3.99697e-05 0.000378788
+1.12 0.000154118 3.99697e-05 0.000378788
+1.4 0.000126457 3.99697e-05 0.000378788
+1.68 0 0.000100095 0.000378788
+END DIST
+
+Metal 3 OVER 1
+DIST count 12 width 0.14
+0.14 0.000889851 8.81281e-05 0.000378788
+0.28 0.000497251 8.81281e-05 0.000378788
+0.35 0.000413304 8.81281e-05 0.000378788
+0.42 0.000355285 8.81281e-05 0.000378788
+0.49 0.000312469 8.81281e-05 0.000378788
+0.56 0.000279405 8.81281e-05 0.000378788
+0.63 0.000253003 8.81281e-05 0.000378788
+0.7 0.000231378 8.81281e-05 0.000378788
+0.84 0.00019795 8.81281e-05 0.000378788
+1.12 0.000154118 8.81281e-05 0.000378788
+1.4 0.000126457 8.81281e-05 0.000378788
+1.68 0 0.000148253 0.000378788
+END DIST
+
+Metal 3 OVER 2
+DIST count 12 width 0.14
+0.14 0.000889851 0.000145812 0.000378788
+0.28 0.000497251 0.000145812 0.000378788
+0.35 0.000413304 0.000145812 0.000378788
+0.42 0.000355285 0.000145812 0.000378788
+0.49 0.000312469 0.000145812 0.000378788
+0.56 0.000279405 0.000145812 0.000378788
+0.63 0.000253003 0.000145812 0.000378788
+0.7 0.000231378 0.000145812 0.000378788
+0.84 0.00019795 0.000145812 0.000378788
+1.12 0.000154118 0.000145812 0.000378788
+1.4 0.000126457 0.000145812 0.000378788
+1.68 0 0.000205937 0.000378788
+END DIST
+
+Metal 3 UNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000889851 0.000123883 0.000378788
+0.28 0.000497251 0.000123883 0.000378788
+0.35 0.000413304 0.000123883 0.000378788
+0.42 0.000355285 0.000123883 0.000378788
+0.49 0.000312469 0.000123883 0.000378788
+0.56 0.000279405 0.000123883 0.000378788
+0.63 0.000253003 0.000123883 0.000378788
+0.7 0.000231378 0.000123883 0.000378788
+0.84 0.00019795 0.000123883 0.000378788
+1.12 0.000154118 0.000123883 0.000378788
+1.4 0.000126457 0.000123883 0.000378788
+1.68 0 0.000184008 0.000378788
+END DIST
+
+Metal 3 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000889851 8.55316e-05 0.000378788
+0.28 0.000497251 8.55316e-05 0.000378788
+0.35 0.000413304 8.55316e-05 0.000378788
+0.42 0.000355285 8.55316e-05 0.000378788
+0.49 0.000312469 8.55316e-05 0.000378788
+0.56 0.000279405 8.55316e-05 0.000378788
+0.63 0.000253003 8.55316e-05 0.000378788
+0.7 0.000231378 8.55316e-05 0.000378788
+0.84 0.00019795 8.55316e-05 0.000378788
+1.12 0.000154118 8.55316e-05 0.000378788
+1.4 0.000126457 8.55316e-05 0.000378788
+1.68 0 0.000145657 0.000378788
+END DIST
+
+Metal 3 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000889851 6.25593e-05 0.000378788
+0.28 0.000497251 6.25593e-05 0.000378788
+0.35 0.000413304 6.25593e-05 0.000378788
+0.42 0.000355285 6.25593e-05 0.000378788
+0.49 0.000312469 6.25593e-05 0.000378788
+0.56 0.000279405 6.25593e-05 0.000378788
+0.63 0.000253003 6.25593e-05 0.000378788
+0.7 0.000231378 6.25593e-05 0.000378788
+0.84 0.00019795 6.25593e-05 0.000378788
+1.12 0.000154118 6.25593e-05 0.000378788
+1.4 0.000126457 6.25593e-05 0.000378788
+1.68 0 0.000122684 0.000378788
+END DIST
+
+Metal 3 DIAGUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 5.66061e-05 0.000378788
+0.14 0 0 0.000378788
+0.28 0 0 0.000378788
+0.35 0 0 0.000378788
+0.42 0 0 0.000378788
+0.49 0 0 0.000378788
+0.56 0 0 0.000378788
+0.63 0 0 0.000378788
+0.7 0 0 0.000378788
+0.84 0 0 0.000378788
+1.12 0 0 0.000378788
+1.4 0 0 0.000378788
+1.68 0 0 0.000378788
+END DIST
+
+Metal 3 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 2.50505e-05 0.000378788
+0.14 0 0 0.000378788
+0.28 0 0 0.000378788
+0.35 0 0 0.000378788
+0.42 0 0 0.000378788
+0.49 0 0 0.000378788
+0.56 0 0 0.000378788
+0.63 0 0 0.000378788
+0.7 0 0 0.000378788
+0.84 0 0 0.000378788
+1.12 0 0 0.000378788
+1.4 0 0 0.000378788
+1.68 0 0 0.000378788
+END DIST
+
+Metal 3 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 1.77172e-05 0.000378788
+0.14 0 0 0.000378788
+0.28 0 0 0.000378788
+0.35 0 0 0.000378788
+0.42 0 0 0.000378788
+0.49 0 0 0.000378788
+0.56 0 0 0.000378788
+0.63 0 0 0.000378788
+0.7 0 0 0.000378788
+0.84 0 0 0.000378788
+1.12 0 0 0.000378788
+1.4 0 0 0.000378788
+1.68 0 0 0.000378788
+END DIST
+
+Metal 3 OVERUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000889851 0.000172041 0.000378788
+0.28 0.000497251 0.000172041 0.000378788
+0.35 0.000413304 0.000172041 0.000378788
+0.42 0.000355285 0.000172041 0.000378788
+0.49 0.000312469 0.000172041 0.000378788
+0.56 0.000279405 0.000172041 0.000378788
+0.63 0.000253003 0.000172041 0.000378788
+0.7 0.000231378 0.000172041 0.000378788
+0.84 0.00019795 0.000172041 0.000378788
+1.12 0.000154118 0.000172041 0.000378788
+1.4 0.000126457 0.000172041 0.000378788
+1.68 0 0.000232167 0.000378788
+END DIST
+
+Metal 3 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000889851 0.00013369 0.000378788
+0.28 0.000497251 0.00013369 0.000378788
+0.35 0.000413304 0.00013369 0.000378788
+0.42 0.000355285 0.00013369 0.000378788
+0.49 0.000312469 0.00013369 0.000378788
+0.56 0.000279405 0.00013369 0.000378788
+0.63 0.000253003 0.00013369 0.000378788
+0.7 0.000231378 0.00013369 0.000378788
+0.84 0.00019795 0.00013369 0.000378788
+1.12 0.000154118 0.00013369 0.000378788
+1.4 0.000126457 0.00013369 0.000378788
+1.68 0 0.000193815 0.000378788
+END DIST
+
+Metal 3 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000889851 0.000110718 0.000378788
+0.28 0.000497251 0.000110718 0.000378788
+0.35 0.000413304 0.000110718 0.000378788
+0.42 0.000355285 0.000110718 0.000378788
+0.49 0.000312469 0.000110718 0.000378788
+0.56 0.000279405 0.000110718 0.000378788
+0.63 0.000253003 0.000110718 0.000378788
+0.7 0.000231378 0.000110718 0.000378788
+0.84 0.00019795 0.000110718 0.000378788
+1.12 0.000154118 0.000110718 0.000378788
+1.4 0.000126457 0.000110718 0.000378788
+1.68 0 0.000170843 0.000378788
+END DIST
+
+Metal 3 OVER 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000889851 0.000229725 0.000378788
+0.28 0.000497251 0.000229725 0.000378788
+0.35 0.000413304 0.000229725 0.000378788
+0.42 0.000355285 0.000229725 0.000378788
+0.49 0.000312469 0.000229725 0.000378788
+0.56 0.000279405 0.000229725 0.000378788
+0.63 0.000253003 0.000229725 0.000378788
+0.7 0.000231378 0.000229725 0.000378788
+0.84 0.00019795 0.000229725 0.000378788
+1.12 0.000154118 0.000229725 0.000378788
+1.4 0.000126457 0.000229725 0.000378788
+1.68 0 0.00028985 0.000378788
+END DIST
+
+Metal 3 OVER 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000889851 0.000191374 0.000378788
+0.28 0.000497251 0.000191374 0.000378788
+0.35 0.000413304 0.000191374 0.000378788
+0.42 0.000355285 0.000191374 0.000378788
+0.49 0.000312469 0.000191374 0.000378788
+0.56 0.000279405 0.000191374 0.000378788
+0.63 0.000253003 0.000191374 0.000378788
+0.7 0.000231378 0.000191374 0.000378788
+0.84 0.00019795 0.000191374 0.000378788
+1.12 0.000154118 0.000191374 0.000378788
+1.4 0.000126457 0.000191374 0.000378788
+1.68 0 0.000251499 0.000378788
+END DIST
+
+Metal 3 OVER 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000889851 0.000168401 0.000378788
+0.28 0.000497251 0.000168401 0.000378788
+0.35 0.000413304 0.000168401 0.000378788
+0.42 0.000355285 0.000168401 0.000378788
+0.49 0.000312469 0.000168401 0.000378788
+0.56 0.000279405 0.000168401 0.000378788
+0.63 0.000253003 0.000168401 0.000378788
+0.7 0.000231378 0.000168401 0.000378788
+0.84 0.00019795 0.000168401 0.000378788
+1.12 0.000154118 0.000168401 0.000378788
+1.4 0.000126457 0.000168401 0.000378788
+1.68 0 0.000228526 0.000378788
+END DIST
+
+Metal 4 RESOVER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000127946
+0 0.38 0 0.000127946
+0 0.68 0 0.000127946
+0 0.91 0 0.000127946
+0 1.06 0 0.000127946
+0 1.36 0 0.000127946
+0 1.59 0 0.000127946
+0 1.74 0 0.000127946
+0 2.04 0 0.000127946
+0 2.72 0 0.000127946
+0.38 0.38 0 0.000127946
+0.38 0.68 0 0.000127946
+0.38 0.91 0 0.000127946
+0.38 1.06 0 0.000127946
+0.38 1.36 0 0.000127946
+0.38 1.59 0 0.000127946
+0.38 1.74 0 0.000127946
+0.38 2.04 0 0.000127946
+0.38 2.72 0 0.000127946
+0.68 0.68 0 0.000127946
+0.68 0.91 0 0.000127946
+0.68 1.06 0 0.000127946
+0.68 1.36 0 0.000127946
+0.68 1.59 0 0.000127946
+0.68 1.74 0 0.000127946
+0.68 2.04 0 0.000127946
+0.68 2.72 0 0.000127946
+0.91 0.91 0 0.000127946
+0.91 1.06 0 0.000127946
+0.91 1.36 0 0.000127946
+0.91 1.59 0 0.000127946
+0.91 1.74 0 0.000127946
+0.91 2.04 0 0.000127946
+0.91 2.72 0 0.000127946
+1.06 1.06 0 0.000127946
+1.06 1.36 0 0.000127946
+1.06 1.59 0 0.000127946
+1.06 1.74 0 0.000127946
+1.06 2.04 0 0.000127946
+1.06 2.72 0 0.000127946
+1.36 1.36 0 0.000127946
+1.36 1.59 0 0.000127946
+1.36 1.74 0 0.000127946
+1.36 2.04 0 0.000127946
+1.36 2.72 0 0.000127946
+1.59 1.59 0 0.000127946
+1.59 1.74 0 0.000127946
+1.59 2.04 0 0.000127946
+1.59 2.72 0 0.000127946
+1.74 1.74 0 0.000127946
+1.74 2.04 0 0.000127946
+1.74 2.72 0 0.000127946
+2.04 2.04 0 0.000127946
+2.04 2.72 0 0.000127946
+2.72 0 2.72 0.000127946
+END DIST
+
+Metal 4 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 OVER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 OVER 0
+DIST count 12 width 0.3
+0.3 0.000554112 4.36465e-05 6.39731e-05
+0.6 0.000311553 4.36465e-05 6.39731e-05
+0.75 0.000258699 4.36465e-05 6.39731e-05
+0.9 0.000221966 4.36465e-05 6.39731e-05
+1.05 0.00019478 4.36465e-05 6.39731e-05
+1.2 0.000173759 4.36465e-05 6.39731e-05
+1.35 9.42761e-05 4.36465e-05 6.39731e-05
+1.5 8.48485e-05 4.36465e-05 6.39731e-05
+1.8 7.07071e-05 4.36465e-05 6.39731e-05
+2.4 0 4.36465e-05 6.39731e-05
+3 0 4.36465e-05 6.39731e-05
+3.6 0 4.36465e-05 6.39731e-05
+END DIST
+
+Metal 4 OVER 1
+DIST count 12 width 0.3
+0.3 0.000554112 9.96987e-05 6.39731e-05
+0.6 0.000311553 9.96987e-05 6.39731e-05
+0.75 0.000258699 9.96987e-05 6.39731e-05
+0.9 0.000221966 9.96987e-05 6.39731e-05
+1.05 0.00019478 9.96987e-05 6.39731e-05
+1.2 0.000173759 9.96987e-05 6.39731e-05
+1.35 9.42761e-05 9.96987e-05 6.39731e-05
+1.5 8.48485e-05 9.96987e-05 6.39731e-05
+1.8 7.07071e-05 9.96987e-05 6.39731e-05
+2.4 0 9.96987e-05 6.39731e-05
+3 0 9.96987e-05 6.39731e-05
+3.6 0 9.96987e-05 6.39731e-05
+END DIST
+
+Metal 4 OVER 2
+DIST count 12 width 0.3
+0.3 0.000554112 0.000141874 6.39731e-05
+0.6 0.000311553 0.000141874 6.39731e-05
+0.75 0.000258699 0.000141874 6.39731e-05
+0.9 0.000221966 0.000141874 6.39731e-05
+1.05 0.00019478 0.000141874 6.39731e-05
+1.2 0.000173759 0.000141874 6.39731e-05
+1.35 9.42761e-05 0.000141874 6.39731e-05
+1.5 8.48485e-05 0.000141874 6.39731e-05
+1.8 7.07071e-05 0.000141874 6.39731e-05
+2.4 0 0.000141874 6.39731e-05
+3 0 0.000141874 6.39731e-05
+3.6 0 0.000141874 6.39731e-05
+END DIST
+
+Metal 4 OVER 3
+DIST count 12 width 0.3
+0.3 0.000554112 0.000201823 6.39731e-05
+0.6 0.000311553 0.000201823 6.39731e-05
+0.75 0.000258699 0.000201823 6.39731e-05
+0.9 0.000221966 0.000201823 6.39731e-05
+1.05 0.00019478 0.000201823 6.39731e-05
+1.2 0.000173759 0.000201823 6.39731e-05
+1.35 9.42761e-05 0.000201823 6.39731e-05
+1.5 8.48485e-05 0.000201823 6.39731e-05
+1.8 7.07071e-05 0.000201823 6.39731e-05
+2.4 0 0.000201823 6.39731e-05
+3 0 0.000201823 6.39731e-05
+3.6 0 0.000201823 6.39731e-05
+END DIST
+
+Metal 4 UNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.000172394 6.39731e-05
+0.6 0.000311553 0.000172394 6.39731e-05
+0.75 0.000258699 0.000172394 6.39731e-05
+0.9 0.000221966 0.000172394 6.39731e-05
+1.05 0.00019478 0.000172394 6.39731e-05
+1.2 0.000173759 0.000172394 6.39731e-05
+1.35 9.42761e-05 0.000172394 6.39731e-05
+1.5 8.48485e-05 0.000172394 6.39731e-05
+1.8 7.07071e-05 0.000172394 6.39731e-05
+2.4 0 0.000172394 6.39731e-05
+3 0 0.000172394 6.39731e-05
+3.6 0 0.000172394 6.39731e-05
+END DIST
+
+Metal 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 8.62741e-05 6.39731e-05
+0.6 0.000311553 8.62741e-05 6.39731e-05
+0.75 0.000258699 8.62741e-05 6.39731e-05
+0.9 0.000221966 8.62741e-05 6.39731e-05
+1.05 0.00019478 8.62741e-05 6.39731e-05
+1.2 0.000173759 8.62741e-05 6.39731e-05
+1.35 9.42761e-05 8.62741e-05 6.39731e-05
+1.5 8.48485e-05 8.62741e-05 6.39731e-05
+1.8 7.07071e-05 8.62741e-05 6.39731e-05
+2.4 0 8.62741e-05 6.39731e-05
+3 0 8.62741e-05 6.39731e-05
+3.6 0 8.62741e-05 6.39731e-05
+END DIST
+
+Metal 4 DIAGUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 DIAGUNDER 5
+DIST count 13 width 0.3
+0 0 2.54545e-05 6.39731e-05
+0.3 0 0 6.39731e-05
+0.6 0 0 6.39731e-05
+0.75 0 0 6.39731e-05
+0.9 0 0 6.39731e-05
+1.05 0 0 6.39731e-05
+1.2 0 0 6.39731e-05
+1.35 0 0 6.39731e-05
+1.5 0 0 6.39731e-05
+1.8 0 0 6.39731e-05
+2.4 0 0 6.39731e-05
+3 0 0 6.39731e-05
+3.6 0 0 6.39731e-05
+END DIST
+
+Metal 4 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 3.43434e-05 6.39731e-05
+0.3 0 0 6.39731e-05
+0.6 0 0 6.39731e-05
+0.75 0 0 6.39731e-05
+0.9 0 0 6.39731e-05
+1.05 0 0 6.39731e-05
+1.2 0 0 6.39731e-05
+1.35 0 0 6.39731e-05
+1.5 0 0 6.39731e-05
+1.8 0 0 6.39731e-05
+2.4 0 0 6.39731e-05
+3 0 0 6.39731e-05
+3.6 0 0 6.39731e-05
+END DIST
+
+Metal 4 OVERUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 OVER 1 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.000228446 6.39731e-05
+0.6 0.000311553 0.000228446 6.39731e-05
+0.75 0.000258699 0.000228446 6.39731e-05
+0.9 0.000221966 0.000228446 6.39731e-05
+1.05 0.00019478 0.000228446 6.39731e-05
+1.2 0.000173759 0.000228446 6.39731e-05
+1.35 9.42761e-05 0.000228446 6.39731e-05
+1.5 8.48485e-05 0.000228446 6.39731e-05
+1.8 7.07071e-05 0.000228446 6.39731e-05
+2.4 0 0.000228446 6.39731e-05
+3 0 0.000228446 6.39731e-05
+3.6 0 0.000228446 6.39731e-05
+END DIST
+
+Metal 4 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 0.000142326 6.39731e-05
+0.6 0.000311553 0.000142326 6.39731e-05
+0.75 0.000258699 0.000142326 6.39731e-05
+0.9 0.000221966 0.000142326 6.39731e-05
+1.05 0.00019478 0.000142326 6.39731e-05
+1.2 0.000173759 0.000142326 6.39731e-05
+1.35 9.42761e-05 0.000142326 6.39731e-05
+1.5 8.48485e-05 0.000142326 6.39731e-05
+1.8 7.07071e-05 0.000142326 6.39731e-05
+2.4 0 0.000142326 6.39731e-05
+3 0 0.000142326 6.39731e-05
+3.6 0 0.000142326 6.39731e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.000270621 6.39731e-05
+0.6 0.000311553 0.000270621 6.39731e-05
+0.75 0.000258699 0.000270621 6.39731e-05
+0.9 0.000221966 0.000270621 6.39731e-05
+1.05 0.00019478 0.000270621 6.39731e-05
+1.2 0.000173759 0.000270621 6.39731e-05
+1.35 9.42761e-05 0.000270621 6.39731e-05
+1.5 8.48485e-05 0.000270621 6.39731e-05
+1.8 7.07071e-05 0.000270621 6.39731e-05
+2.4 0 0.000270621 6.39731e-05
+3 0 0.000270621 6.39731e-05
+3.6 0 0.000270621 6.39731e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 0.000184501 6.39731e-05
+0.6 0.000311553 0.000184501 6.39731e-05
+0.75 0.000258699 0.000184501 6.39731e-05
+0.9 0.000221966 0.000184501 6.39731e-05
+1.05 0.00019478 0.000184501 6.39731e-05
+1.2 0.000173759 0.000184501 6.39731e-05
+1.35 9.42761e-05 0.000184501 6.39731e-05
+1.5 8.48485e-05 0.000184501 6.39731e-05
+1.8 7.07071e-05 0.000184501 6.39731e-05
+2.4 0 0.000184501 6.39731e-05
+3 0 0.000184501 6.39731e-05
+3.6 0 0.000184501 6.39731e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.000330571 6.39731e-05
+0.6 0.000311553 0.000330571 6.39731e-05
+0.75 0.000258699 0.000330571 6.39731e-05
+0.9 0.000221966 0.000330571 6.39731e-05
+1.05 0.00019478 0.000330571 6.39731e-05
+1.2 0.000173759 0.000330571 6.39731e-05
+1.35 9.42761e-05 0.000330571 6.39731e-05
+1.5 8.48485e-05 0.000330571 6.39731e-05
+1.8 7.07071e-05 0.000330571 6.39731e-05
+2.4 0 0.000330571 6.39731e-05
+3 0 0.000330571 6.39731e-05
+3.6 0 0.000330571 6.39731e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 0.000244451 6.39731e-05
+0.6 0.000311553 0.000244451 6.39731e-05
+0.75 0.000258699 0.000244451 6.39731e-05
+0.9 0.000221966 0.000244451 6.39731e-05
+1.05 0.00019478 0.000244451 6.39731e-05
+1.2 0.000173759 0.000244451 6.39731e-05
+1.35 9.42761e-05 0.000244451 6.39731e-05
+1.5 8.48485e-05 0.000244451 6.39731e-05
+1.8 7.07071e-05 0.000244451 6.39731e-05
+2.4 0 0.000244451 6.39731e-05
+3 0 0.000244451 6.39731e-05
+3.6 0 0.000244451 6.39731e-05
+END DIST
+
+Metal 5 RESOVER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000127946
+0 0.62 0 0.000127946
+0 0.92 0 0.000127946
+0 1.39 0 0.000127946
+0 1.54 0 0.000127946
+0 1.84 0 0.000127946
+0 2.31 0 0.000127946
+0 2.46 0 0.000127946
+0 2.76 0 0.000127946
+0 3.68 0 0.000127946
+0.62 0.62 0 0.000127946
+0.62 0.92 0 0.000127946
+0.62 1.39 0 0.000127946
+0.62 1.54 0 0.000127946
+0.62 1.84 0 0.000127946
+0.62 2.31 0 0.000127946
+0.62 2.46 0 0.000127946
+0.62 2.76 0 0.000127946
+0.62 3.68 0 0.000127946
+0.92 0.92 0 0.000127946
+0.92 1.39 0 0.000127946
+0.92 1.54 0 0.000127946
+0.92 1.84 0 0.000127946
+0.92 2.31 0 0.000127946
+0.92 2.46 0 0.000127946
+0.92 2.76 0 0.000127946
+0.92 3.68 0 0.000127946
+1.39 1.39 0 0.000127946
+1.39 1.54 0 0.000127946
+1.39 1.84 0 0.000127946
+1.39 2.31 0 0.000127946
+1.39 2.46 0 0.000127946
+1.39 2.76 0 0.000127946
+1.39 3.68 0 0.000127946
+1.54 1.54 0 0.000127946
+1.54 1.84 0 0.000127946
+1.54 2.31 0 0.000127946
+1.54 2.46 0 0.000127946
+1.54 2.76 0 0.000127946
+1.54 3.68 0 0.000127946
+1.84 1.84 0 0.000127946
+1.84 2.31 0 0.000127946
+1.84 2.46 0 0.000127946
+1.84 2.76 0 0.000127946
+1.84 3.68 0 0.000127946
+2.31 2.31 0 0.000127946
+2.31 2.46 0 0.000127946
+2.31 2.76 0 0.000127946
+2.31 3.68 0 0.000127946
+2.46 2.46 0 0.000127946
+2.46 2.76 0 0.000127946
+2.46 3.68 0 0.000127946
+2.76 2.76 0 0.000127946
+2.76 3.68 0 0.000127946
+3.68 0 3.68 0.000127946
+END DIST
+
+Metal 5 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 4
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 OVER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 OVER 0
+DIST count 12 width 0.3
+0.3 0.000562124 3.89596e-05 6.39731e-05
+0.6 0.000314638 3.89596e-05 6.39731e-05
+0.75 0.000261521 3.89596e-05 6.39731e-05
+0.9 0.000224763 3.89596e-05 6.39731e-05
+1.05 0.000197615 3.89596e-05 6.39731e-05
+1.2 0.000112795 3.89596e-05 6.39731e-05
+1.35 0.000100262 3.89596e-05 6.39731e-05
+1.5 9.02357e-05 3.89596e-05 6.39731e-05
+1.8 7.51966e-05 3.89596e-05 6.39731e-05
+2.4 0 3.89596e-05 6.39731e-05
+3 0 3.89596e-05 6.39731e-05
+3.6 0 3.89596e-05 6.39731e-05
+END DIST
+
+Metal 5 OVER 1
+DIST count 12 width 0.3
+0.3 0.000562124 7.96056e-05 6.39731e-05
+0.6 0.000314638 7.96056e-05 6.39731e-05
+0.75 0.000261521 7.96056e-05 6.39731e-05
+0.9 0.000224763 7.96056e-05 6.39731e-05
+1.05 0.000197615 7.96056e-05 6.39731e-05
+1.2 0.000112795 7.96056e-05 6.39731e-05
+1.35 0.000100262 7.96056e-05 6.39731e-05
+1.5 9.02357e-05 7.96056e-05 6.39731e-05
+1.8 7.51966e-05 7.96056e-05 6.39731e-05
+2.4 0 7.96056e-05 6.39731e-05
+3 0 7.96056e-05 6.39731e-05
+3.6 0 7.96056e-05 6.39731e-05
+END DIST
+
+Metal 5 OVER 2
+DIST count 12 width 0.3
+0.3 0.000562124 0.00010049 6.39731e-05
+0.6 0.000314638 0.00010049 6.39731e-05
+0.75 0.000261521 0.00010049 6.39731e-05
+0.9 0.000224763 0.00010049 6.39731e-05
+1.05 0.000197615 0.00010049 6.39731e-05
+1.2 0.000112795 0.00010049 6.39731e-05
+1.35 0.000100262 0.00010049 6.39731e-05
+1.5 9.02357e-05 0.00010049 6.39731e-05
+1.8 7.51966e-05 0.00010049 6.39731e-05
+2.4 0 0.00010049 6.39731e-05
+3 0 0.00010049 6.39731e-05
+3.6 0 0.00010049 6.39731e-05
+END DIST
+
+Metal 5 OVER 3
+DIST count 12 width 0.3
+0.3 0.000562124 0.000117313 6.39731e-05
+0.6 0.000314638 0.000117313 6.39731e-05
+0.75 0.000261521 0.000117313 6.39731e-05
+0.9 0.000224763 0.000117313 6.39731e-05
+1.05 0.000197615 0.000117313 6.39731e-05
+1.2 0.000112795 0.000117313 6.39731e-05
+1.35 0.000100262 0.000117313 6.39731e-05
+1.5 9.02357e-05 0.000117313 6.39731e-05
+1.8 7.51966e-05 0.000117313 6.39731e-05
+2.4 0 0.000117313 6.39731e-05
+3 0 0.000117313 6.39731e-05
+3.6 0 0.000117313 6.39731e-05
+END DIST
+
+Metal 5 OVER 4
+DIST count 12 width 0.3
+0.3 0.000562124 0.000147545 6.39731e-05
+0.6 0.000314638 0.000147545 6.39731e-05
+0.75 0.000261521 0.000147545 6.39731e-05
+0.9 0.000224763 0.000147545 6.39731e-05
+1.05 0.000197615 0.000147545 6.39731e-05
+1.2 0.000112795 0.000147545 6.39731e-05
+1.35 0.000100262 0.000147545 6.39731e-05
+1.5 9.02357e-05 0.000147545 6.39731e-05
+1.8 7.51966e-05 0.000147545 6.39731e-05
+2.4 0 0.000147545 6.39731e-05
+3 0 0.000147545 6.39731e-05
+3.6 0 0.000147545 6.39731e-05
+END DIST
+
+Metal 5 UNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.00011345 6.39731e-05
+0.6 0.000314638 0.00011345 6.39731e-05
+0.75 0.000261521 0.00011345 6.39731e-05
+0.9 0.000224763 0.00011345 6.39731e-05
+1.05 0.000197615 0.00011345 6.39731e-05
+1.2 0.000112795 0.00011345 6.39731e-05
+1.35 0.000100262 0.00011345 6.39731e-05
+1.5 9.02357e-05 0.00011345 6.39731e-05
+1.8 7.51966e-05 0.00011345 6.39731e-05
+2.4 0 0.00011345 6.39731e-05
+3 0 0.00011345 6.39731e-05
+3.6 0 0.00011345 6.39731e-05
+END DIST
+
+Metal 5 DIAGUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 6.80808e-05 6.39731e-05
+0.3 0 0 6.39731e-05
+0.6 0 0 6.39731e-05
+0.75 0 0 6.39731e-05
+0.9 0 0 6.39731e-05
+1.05 0 0 6.39731e-05
+1.2 0 0 6.39731e-05
+1.35 0 0 6.39731e-05
+1.5 0 0 6.39731e-05
+1.8 0 0 6.39731e-05
+2.4 0 0 6.39731e-05
+3 0 0 6.39731e-05
+3.6 0 0 6.39731e-05
+END DIST
+
+Metal 5 OVERUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.000154096 6.39731e-05
+0.6 0.000314638 0.000154096 6.39731e-05
+0.75 0.000261521 0.000154096 6.39731e-05
+0.9 0.000224763 0.000154096 6.39731e-05
+1.05 0.000197615 0.000154096 6.39731e-05
+1.2 0.000112795 0.000154096 6.39731e-05
+1.35 0.000100262 0.000154096 6.39731e-05
+1.5 9.02357e-05 0.000154096 6.39731e-05
+1.8 7.51966e-05 0.000154096 6.39731e-05
+2.4 0 0.000154096 6.39731e-05
+3 0 0.000154096 6.39731e-05
+3.6 0 0.000154096 6.39731e-05
+END DIST
+
+Metal 5 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.00017498 6.39731e-05
+0.6 0.000314638 0.00017498 6.39731e-05
+0.75 0.000261521 0.00017498 6.39731e-05
+0.9 0.000224763 0.00017498 6.39731e-05
+1.05 0.000197615 0.00017498 6.39731e-05
+1.2 0.000112795 0.00017498 6.39731e-05
+1.35 0.000100262 0.00017498 6.39731e-05
+1.5 9.02357e-05 0.00017498 6.39731e-05
+1.8 7.51966e-05 0.00017498 6.39731e-05
+2.4 0 0.00017498 6.39731e-05
+3 0 0.00017498 6.39731e-05
+3.6 0 0.00017498 6.39731e-05
+END DIST
+
+Metal 5 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.000191803 6.39731e-05
+0.6 0.000314638 0.000191803 6.39731e-05
+0.75 0.000261521 0.000191803 6.39731e-05
+0.9 0.000224763 0.000191803 6.39731e-05
+1.05 0.000197615 0.000191803 6.39731e-05
+1.2 0.000112795 0.000191803 6.39731e-05
+1.35 0.000100262 0.000191803 6.39731e-05
+1.5 9.02357e-05 0.000191803 6.39731e-05
+1.8 7.51966e-05 0.000191803 6.39731e-05
+2.4 0 0.000191803 6.39731e-05
+3 0 0.000191803 6.39731e-05
+3.6 0 0.000191803 6.39731e-05
+END DIST
+
+Metal 5 OVER 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.000222035 6.39731e-05
+0.6 0.000314638 0.000222035 6.39731e-05
+0.75 0.000261521 0.000222035 6.39731e-05
+0.9 0.000224763 0.000222035 6.39731e-05
+1.05 0.000197615 0.000222035 6.39731e-05
+1.2 0.000112795 0.000222035 6.39731e-05
+1.35 0.000100262 0.000222035 6.39731e-05
+1.5 9.02357e-05 0.000222035 6.39731e-05
+1.8 7.51966e-05 0.000222035 6.39731e-05
+2.4 0 0.000222035 6.39731e-05
+3 0 0.000222035 6.39731e-05
+3.6 0 0.000222035 6.39731e-05
+END DIST
+
+Metal 6 RESOVER
+WIDTH Table 1 entries:  1.6
+
+Metal 6 RESOVER 0
+DIST count 55 width 1.6
+0 0 0 1.32576e-05
+0 1.8 0 1.32576e-05
+0 3.4 0 1.32576e-05
+0 4.4 0 1.32576e-05
+0 5.2 0 1.32576e-05
+0 6.8 0 1.32576e-05
+0 7.8 0 1.32576e-05
+0 8.6 0 1.32576e-05
+0 10.2 0 1.32576e-05
+0 13.6 0 1.32576e-05
+1.8 1.8 0 1.32576e-05
+1.8 3.4 0 1.32576e-05
+1.8 4.4 0 1.32576e-05
+1.8 5.2 0 1.32576e-05
+1.8 6.8 0 1.32576e-05
+1.8 7.8 0 1.32576e-05
+1.8 8.6 0 1.32576e-05
+1.8 10.2 0 1.32576e-05
+1.8 13.6 0 1.32576e-05
+3.4 3.4 0 1.32576e-05
+3.4 4.4 0 1.32576e-05
+3.4 5.2 0 1.32576e-05
+3.4 6.8 0 1.32576e-05
+3.4 7.8 0 1.32576e-05
+3.4 8.6 0 1.32576e-05
+3.4 10.2 0 1.32576e-05
+3.4 13.6 0 1.32576e-05
+4.4 4.4 0 1.32576e-05
+4.4 5.2 0 1.32576e-05
+4.4 6.8 0 1.32576e-05
+4.4 7.8 0 1.32576e-05
+4.4 8.6 0 1.32576e-05
+4.4 10.2 0 1.32576e-05
+4.4 13.6 0 1.32576e-05
+5.2 5.2 0 1.32576e-05
+5.2 6.8 0 1.32576e-05
+5.2 7.8 0 1.32576e-05
+5.2 8.6 0 1.32576e-05
+5.2 10.2 0 1.32576e-05
+5.2 13.6 0 1.32576e-05
+6.8 6.8 0 1.32576e-05
+6.8 7.8 0 1.32576e-05
+6.8 8.6 0 1.32576e-05
+6.8 10.2 0 1.32576e-05
+6.8 13.6 0 1.32576e-05
+7.8 7.8 0 1.32576e-05
+7.8 8.6 0 1.32576e-05
+7.8 10.2 0 1.32576e-05
+7.8 13.6 0 1.32576e-05
+8.6 8.6 0 1.32576e-05
+8.6 10.2 0 1.32576e-05
+8.6 13.6 0 1.32576e-05
+10.2 10.2 0 1.32576e-05
+10.2 13.6 0 1.32576e-05
+13.6 0 13.6 1.32576e-05
+END DIST
+
+Metal 6 RESOVER 1
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 2
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 3
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 4
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 5
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 OVER
+WIDTH Table 1 entries:  1.6
+
+Metal 6 OVER 0
+DIST count 12 width 1.6
+1.6 0.000160354 4.46364e-05 6.62879e-06
+3.2 0 4.46364e-05 6.62879e-06
+4 0 4.46364e-05 6.62879e-06
+4.8 0 4.46364e-05 6.62879e-06
+5.6 0 4.46364e-05 6.62879e-06
+6.4 0 4.46364e-05 6.62879e-06
+7.2 0 4.46364e-05 6.62879e-06
+8 0 4.46364e-05 6.62879e-06
+9.6 0 4.46364e-05 6.62879e-06
+12.8 0 4.46364e-05 6.62879e-06
+16 0 4.46364e-05 6.62879e-06
+19.2 0 4.46364e-05 6.62879e-06
+END DIST
+
+Metal 6 OVER 1
+DIST count 12 width 1.6
+1.6 0.000160354 0.000146457 6.62879e-06
+3.2 0 0.000146457 6.62879e-06
+4 0 0.000146457 6.62879e-06
+4.8 0 0.000146457 6.62879e-06
+5.6 0 0.000146457 6.62879e-06
+6.4 0 0.000146457 6.62879e-06
+7.2 0 0.000146457 6.62879e-06
+8 0 0.000146457 6.62879e-06
+9.6 0 0.000146457 6.62879e-06
+12.8 0 0.000146457 6.62879e-06
+16 0 0.000146457 6.62879e-06
+19.2 0 0.000146457 6.62879e-06
+END DIST
+
+Metal 6 OVER 2
+DIST count 12 width 1.6
+1.6 0.000160354 0.000212019 6.62879e-06
+3.2 0 0.000212019 6.62879e-06
+4 0 0.000212019 6.62879e-06
+4.8 0 0.000212019 6.62879e-06
+5.6 0 0.000212019 6.62879e-06
+6.4 0 0.000212019 6.62879e-06
+7.2 0 0.000212019 6.62879e-06
+8 0 0.000212019 6.62879e-06
+9.6 0 0.000212019 6.62879e-06
+12.8 0 0.000212019 6.62879e-06
+16 0 0.000212019 6.62879e-06
+19.2 0 0.000212019 6.62879e-06
+END DIST
+
+Metal 6 OVER 3
+DIST count 12 width 1.6
+1.6 0.000160354 0.00026288 6.62879e-06
+3.2 0 0.00026288 6.62879e-06
+4 0 0.00026288 6.62879e-06
+4.8 0 0.00026288 6.62879e-06
+5.6 0 0.00026288 6.62879e-06
+6.4 0 0.00026288 6.62879e-06
+7.2 0 0.00026288 6.62879e-06
+8 0 0.00026288 6.62879e-06
+9.6 0 0.00026288 6.62879e-06
+12.8 0 0.00026288 6.62879e-06
+16 0 0.00026288 6.62879e-06
+19.2 0 0.00026288 6.62879e-06
+END DIST
+
+Metal 6 OVER 4
+DIST count 12 width 1.6
+1.6 0.000160354 0.000244318 6.62879e-06
+3.2 0 0.000244318 6.62879e-06
+4 0 0.000244318 6.62879e-06
+4.8 0 0.000244318 6.62879e-06
+5.6 0 0.000244318 6.62879e-06
+6.4 0 0.000244318 6.62879e-06
+7.2 0 0.000244318 6.62879e-06
+8 0 0.000244318 6.62879e-06
+9.6 0 0.000244318 6.62879e-06
+12.8 0 0.000244318 6.62879e-06
+16 0 0.000244318 6.62879e-06
+19.2 0 0.000244318 6.62879e-06
+END DIST
+
+Metal 6 OVER 5
+DIST count 12 width 1.6
+1.6 0.000160354 0.000414985 6.62879e-06
+3.2 0 0.000414985 6.62879e-06
+4 0 0.000414985 6.62879e-06
+4.8 0 0.000414985 6.62879e-06
+5.6 0 0.000414985 6.62879e-06
+6.4 0 0.000414985 6.62879e-06
+7.2 0 0.000414985 6.62879e-06
+8 0 0.000414985 6.62879e-06
+9.6 0 0.000414985 6.62879e-06
+12.8 0 0.000414985 6.62879e-06
+16 0 0.000414985 6.62879e-06
+19.2 0 0.000414985 6.62879e-06
+END DIST
+
+Metal 6 UNDER
+WIDTH Table 0 entries: 
+
+Metal 6 DIAGUNDER
+WIDTH Table 0 entries: 
+END DensityModel 0
diff --git a/sky130/openlane/rules.openrcx.sky130A.nom.magic b/sky130/openlane/rules.openrcx.sky130A.nom.magic
new file mode 100644
index 0000000..a998649
--- /dev/null
+++ b/sky130/openlane/rules.openrcx.sky130A.nom.magic
@@ -0,0 +1,1645 @@
+Extraction Rules for OpenRCX
+
+DIAGMODEL ON
+
+LayerCount 6
+DensityRate 1  0
+
+DensityModel 0
+
+Metal 1 RESOVER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 RESOVER 0
+DIST count 55 width 0.17
+0 0 0 0.0760547
+0 0.29 0 0.0760547
+0 0.46 0 0.0760547
+0 0.665 0 0.0760547
+0 0.75 0 0.0760547
+0 0.92 0 0.0760547
+0 1.125 0 0.0760547
+0 1.21 0 0.0760547
+0 1.38 0 0.0760547
+0 1.84 0 0.0760547
+0.29 0.29 0 0.0760547
+0.29 0.46 0 0.0760547
+0.29 0.665 0 0.0760547
+0.29 0.75 0 0.0760547
+0.29 0.92 0 0.0760547
+0.29 1.125 0 0.0760547
+0.29 1.21 0 0.0760547
+0.29 1.38 0 0.0760547
+0.29 1.84 0 0.0760547
+0.46 0.46 0 0.0760547
+0.46 0.665 0 0.0760547
+0.46 0.75 0 0.0760547
+0.46 0.92 0 0.0760547
+0.46 1.125 0 0.0760547
+0.46 1.21 0 0.0760547
+0.46 1.38 0 0.0760547
+0.46 1.84 0 0.0760547
+0.665 0.665 0 0.0760547
+0.665 0.75 0 0.0760547
+0.665 0.92 0 0.0760547
+0.665 1.125 0 0.0760547
+0.665 1.21 0 0.0760547
+0.665 1.38 0 0.0760547
+0.665 1.84 0 0.0760547
+0.75 0.75 0 0.0760547
+0.75 0.92 0 0.0760547
+0.75 1.125 0 0.0760547
+0.75 1.21 0 0.0760547
+0.75 1.38 0 0.0760547
+0.75 1.84 0 0.0760547
+0.92 0.92 0 0.0760547
+0.92 1.125 0 0.0760547
+0.92 1.21 0 0.0760547
+0.92 1.38 0 0.0760547
+0.92 1.84 0 0.0760547
+1.125 1.125 0 0.0760547
+1.125 1.21 0 0.0760547
+1.125 1.38 0 0.0760547
+1.125 1.84 0 0.0760547
+1.21 1.21 0 0.0760547
+1.21 1.38 0 0.0760547
+1.21 1.84 0 0.0760547
+1.38 1.38 0 0.0760547
+1.38 1.84 0 0.0760547
+1.84 0 1.84 0.0760547
+END DIST
+
+Metal 1 OVER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 OVER 0
+DIST count 12 width 0.17
+0.17 0.000497977 4.50051e-05 0.0380273
+0.34 0.000279412 4.50051e-05 0.0380273
+0.425 0.000232192 4.50051e-05 0.0380273
+0.51 0.000199448 4.50051e-05 0.0380273
+0.595 0.000175236 4.50051e-05 0.0380273
+0.68 0.000156519 4.50051e-05 0.0380273
+0.765 0.000141568 4.50051e-05 0.0380273
+0.85 0.000129322 4.50051e-05 0.0380273
+1.02 0.000110405 4.50051e-05 0.0380273
+1.36 8.56497e-05 4.50051e-05 0.0380273
+1.7 3.92157e-05 4.50051e-05 0.0380273
+2.04 0 4.50051e-05 0.0380273
+END DIST
+
+Metal 1 UNDER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 UNDER 2
+DIST count 12 width 0.17
+0.17 0.000497977 0.00016261 0.0380273
+0.34 0.000279412 0.00016261 0.0380273
+0.425 0.000232192 0.00016261 0.0380273
+0.51 0.000199448 0.00016261 0.0380273
+0.595 0.000175236 0.00016261 0.0380273
+0.68 0.000156519 0.00016261 0.0380273
+0.765 0.000141568 0.00016261 0.0380273
+0.85 0.000129322 0.00016261 0.0380273
+1.02 0.000110405 0.00016261 0.0380273
+1.36 8.56497e-05 0.00016261 0.0380273
+1.7 3.92157e-05 0.00016261 0.0380273
+2.04 0 0.00016261 0.0380273
+END DIST
+
+Metal 1 UNDER 3
+DIST count 12 width 0.17
+0.17 0.000497977 0.000126933 0.0380273
+0.34 0.000279412 0.000126933 0.0380273
+0.425 0.000232192 0.000126933 0.0380273
+0.51 0.000199448 0.000126933 0.0380273
+0.595 0.000175236 0.000126933 0.0380273
+0.68 0.000156519 0.000126933 0.0380273
+0.765 0.000141568 0.000126933 0.0380273
+0.85 0.000129322 0.000126933 0.0380273
+1.02 0.000110405 0.000126933 0.0380273
+1.36 8.56497e-05 0.000126933 0.0380273
+1.7 3.92157e-05 0.000126933 0.0380273
+2.04 0 0.000126933 0.0380273
+END DIST
+
+Metal 1 UNDER 4
+DIST count 12 width 0.17
+0.17 0.000497977 8.90919e-05 0.0380273
+0.34 0.000279412 8.90919e-05 0.0380273
+0.425 0.000232192 8.90919e-05 0.0380273
+0.51 0.000199448 8.90919e-05 0.0380273
+0.595 0.000175236 8.90919e-05 0.0380273
+0.68 0.000156519 8.90919e-05 0.0380273
+0.765 0.000141568 8.90919e-05 0.0380273
+0.85 0.000129322 8.90919e-05 0.0380273
+1.02 0.000110405 8.90919e-05 0.0380273
+1.36 8.56497e-05 8.90919e-05 0.0380273
+1.7 3.92157e-05 8.90919e-05 0.0380273
+2.04 0 8.90919e-05 0.0380273
+END DIST
+
+Metal 1 UNDER 5
+DIST count 12 width 0.17
+0.17 0.000497977 7.92153e-05 0.0380273
+0.34 0.000279412 7.92153e-05 0.0380273
+0.425 0.000232192 7.92153e-05 0.0380273
+0.51 0.000199448 7.92153e-05 0.0380273
+0.595 0.000175236 7.92153e-05 0.0380273
+0.68 0.000156519 7.92153e-05 0.0380273
+0.765 0.000141568 7.92153e-05 0.0380273
+0.85 0.000129322 7.92153e-05 0.0380273
+1.02 0.000110405 7.92153e-05 0.0380273
+1.36 8.56497e-05 7.92153e-05 0.0380273
+1.7 3.92157e-05 7.92153e-05 0.0380273
+2.04 0 7.92153e-05 0.0380273
+END DIST
+
+Metal 1 UNDER 6
+DIST count 12 width 0.17
+0.17 0.000497977 5.85915e-05 0.0380273
+0.34 0.000279412 5.85915e-05 0.0380273
+0.425 0.000232192 5.85915e-05 0.0380273
+0.51 0.000199448 5.85915e-05 0.0380273
+0.595 0.000175236 5.85915e-05 0.0380273
+0.68 0.000156519 5.85915e-05 0.0380273
+0.765 0.000141568 5.85915e-05 0.0380273
+0.85 0.000129322 5.85915e-05 0.0380273
+1.02 0.000110405 5.85915e-05 0.0380273
+1.36 8.56497e-05 5.85915e-05 0.0380273
+1.7 3.92157e-05 5.85915e-05 0.0380273
+2.04 0 5.85915e-05 0.0380273
+END DIST
+
+Metal 1 DIAGUNDER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 DIAGUNDER 2
+DIST count 13 width 0.17
+0 0 7.57172e-05 0.0380273
+0.17 0 0 0.0380273
+0.34 0 0 0.0380273
+0.425 0 0 0.0380273
+0.51 0 0 0.0380273
+0.595 0 0 0.0380273
+0.68 0 0 0.0380273
+0.765 0 0 0.0380273
+0.85 0 0 0.0380273
+1.02 0 0 0.0380273
+1.36 0 0 0.0380273
+1.7 0 0 0.0380273
+2.04 0 0 0.0380273
+END DIST
+
+Metal 1 DIAGUNDER 3
+DIST count 13 width 0.17
+0 0 5.18384e-05 0.0380273
+0.17 0 0 0.0380273
+0.34 0 0 0.0380273
+0.425 0 0 0.0380273
+0.51 0 0 0.0380273
+0.595 0 0 0.0380273
+0.68 0 0 0.0380273
+0.765 0 0 0.0380273
+0.85 0 0 0.0380273
+1.02 0 0 0.0380273
+1.36 0 0 0.0380273
+1.7 0 0 0.0380273
+2.04 0 0 0.0380273
+END DIST
+
+Metal 1 DIAGUNDER 4
+DIST count 13 width 0.17
+0 0 1.87576e-05 0.0380273
+0.17 0 0 0.0380273
+0.34 0 0 0.0380273
+0.425 0 0 0.0380273
+0.51 0 0 0.0380273
+0.595 0 0 0.0380273
+0.68 0 0 0.0380273
+0.765 0 0 0.0380273
+0.85 0 0 0.0380273
+1.02 0 0 0.0380273
+1.36 0 0 0.0380273
+1.7 0 0 0.0380273
+2.04 0 0 0.0380273
+END DIST
+
+Metal 1 DIAGUNDER 5
+DIST count 13 width 0.17
+0 0 1.21616e-05 0.0380273
+0.17 0 0 0.0380273
+0.34 0 0 0.0380273
+0.425 0 0 0.0380273
+0.51 0 0 0.0380273
+0.595 0 0 0.0380273
+0.68 0 0 0.0380273
+0.765 0 0 0.0380273
+0.85 0 0 0.0380273
+1.02 0 0 0.0380273
+1.36 0 0 0.0380273
+1.7 0 0 0.0380273
+2.04 0 0 0.0380273
+END DIST
+
+Metal 1 DIAGUNDER 6
+DIST count 0 width 0.17
+END DIST
+
+Metal 2 RESOVER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.000901876
+0 0.2 0 0.000901876
+0 0.34 0 0.000901876
+0 0.47 0 0.000901876
+0 0.54 0 0.000901876
+0 0.68 0 0.000901876
+0 0.81 0 0.000901876
+0 0.88 0 0.000901876
+0 1.02 0 0.000901876
+0 1.36 0 0.000901876
+0.2 0.2 0 0.000901876
+0.2 0.34 0 0.000901876
+0.2 0.47 0 0.000901876
+0.2 0.54 0 0.000901876
+0.2 0.68 0 0.000901876
+0.2 0.81 0 0.000901876
+0.2 0.88 0 0.000901876
+0.2 1.02 0 0.000901876
+0.2 1.36 0 0.000901876
+0.34 0.34 0 0.000901876
+0.34 0.47 0 0.000901876
+0.34 0.54 0 0.000901876
+0.34 0.68 0 0.000901876
+0.34 0.81 0 0.000901876
+0.34 0.88 0 0.000901876
+0.34 1.02 0 0.000901876
+0.34 1.36 0 0.000901876
+0.47 0.47 0 0.000901876
+0.47 0.54 0 0.000901876
+0.47 0.68 0 0.000901876
+0.47 0.81 0 0.000901876
+0.47 0.88 0 0.000901876
+0.47 1.02 0 0.000901876
+0.47 1.36 0 0.000901876
+0.54 0.54 0 0.000901876
+0.54 0.68 0 0.000901876
+0.54 0.81 0 0.000901876
+0.54 0.88 0 0.000901876
+0.54 1.02 0 0.000901876
+0.54 1.36 0 0.000901876
+0.68 0.68 0 0.000901876
+0.68 0.81 0 0.000901876
+0.68 0.88 0 0.000901876
+0.68 1.02 0 0.000901876
+0.68 1.36 0 0.000901876
+0.81 0.81 0 0.000901876
+0.81 0.88 0 0.000901876
+0.81 1.02 0 0.000901876
+0.81 1.36 0 0.000901876
+0.88 0.88 0 0.000901876
+0.88 1.02 0 0.000901876
+0.88 1.36 0 0.000901876
+1.02 1.02 0 0.000901876
+1.02 1.36 0 0.000901876
+1.36 0 1.36 0.000901876
+END DIST
+
+Metal 2 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 2 OVER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 OVER 0
+DIST count 12 width 0.14
+0.14 0.000838745 4.36667e-05 0.000450938
+0.28 0.000471303 4.36667e-05 0.000450938
+0.35 0.000391492 4.36667e-05 0.000450938
+0.42 0.000336067 4.36667e-05 0.000450938
+0.49 0.000295057 4.36667e-05 0.000450938
+0.56 0.000263348 4.36667e-05 0.000450938
+0.63 0.000238021 4.36667e-05 0.000450938
+0.7 0.000217283 4.36667e-05 0.000450938
+0.84 0.000185267 4.36667e-05 0.000450938
+1.12 0.000143435 4.36667e-05 0.000450938
+1.4 0.000117182 4.36667e-05 0.000450938
+1.68 0 9.77792e-05 0.000450938
+END DIST
+
+Metal 2 OVER 1
+DIST count 12 width 0.14
+0.14 0.000838745 0.000119272 0.000450938
+0.28 0.000471303 0.000119272 0.000450938
+0.35 0.000391492 0.000119272 0.000450938
+0.42 0.000336067 0.000119272 0.000450938
+0.49 0.000295057 0.000119272 0.000450938
+0.56 0.000263348 0.000119272 0.000450938
+0.63 0.000238021 0.000119272 0.000450938
+0.7 0.000217283 0.000119272 0.000450938
+0.84 0.000185267 0.000119272 0.000450938
+1.12 0.000143435 0.000119272 0.000450938
+1.4 0.000117182 0.000119272 0.000450938
+1.68 0 0.000173385 0.000450938
+END DIST
+
+Metal 2 UNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 UNDER 3
+DIST count 12 width 0.14
+0.14 0.000838745 0.000170271 0.000450938
+0.28 0.000471303 0.000170271 0.000450938
+0.35 0.000391492 0.000170271 0.000450938
+0.42 0.000336067 0.000170271 0.000450938
+0.49 0.000295057 0.000170271 0.000450938
+0.56 0.000263348 0.000170271 0.000450938
+0.63 0.000238021 0.000170271 0.000450938
+0.7 0.000217283 0.000170271 0.000450938
+0.84 0.000185267 0.000170271 0.000450938
+1.12 0.000143435 0.000170271 0.000450938
+1.4 0.000117182 0.000170271 0.000450938
+1.68 0 0.000224384 0.000450938
+END DIST
+
+Metal 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000838745 9.85447e-05 0.000450938
+0.28 0.000471303 9.85447e-05 0.000450938
+0.35 0.000391492 9.85447e-05 0.000450938
+0.42 0.000336067 9.85447e-05 0.000450938
+0.49 0.000295057 9.85447e-05 0.000450938
+0.56 0.000263348 9.85447e-05 0.000450938
+0.63 0.000238021 9.85447e-05 0.000450938
+0.7 0.000217283 9.85447e-05 0.000450938
+0.84 0.000185267 9.85447e-05 0.000450938
+1.12 0.000143435 9.85447e-05 0.000450938
+1.4 0.000117182 9.85447e-05 0.000450938
+1.68 0 0.000152657 0.000450938
+END DIST
+
+Metal 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000838745 8.06227e-05 0.000450938
+0.28 0.000471303 8.06227e-05 0.000450938
+0.35 0.000391492 8.06227e-05 0.000450938
+0.42 0.000336067 8.06227e-05 0.000450938
+0.49 0.000295057 8.06227e-05 0.000450938
+0.56 0.000263348 8.06227e-05 0.000450938
+0.63 0.000238021 8.06227e-05 0.000450938
+0.7 0.000217283 8.06227e-05 0.000450938
+0.84 0.000185267 8.06227e-05 0.000450938
+1.12 0.000143435 8.06227e-05 0.000450938
+1.4 0.000117182 8.06227e-05 0.000450938
+1.68 0 0.000134735 0.000450938
+END DIST
+
+Metal 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000838745 6.12349e-05 0.000450938
+0.28 0.000471303 6.12349e-05 0.000450938
+0.35 0.000391492 6.12349e-05 0.000450938
+0.42 0.000336067 6.12349e-05 0.000450938
+0.49 0.000295057 6.12349e-05 0.000450938
+0.56 0.000263348 6.12349e-05 0.000450938
+0.63 0.000238021 6.12349e-05 0.000450938
+0.7 0.000217283 6.12349e-05 0.000450938
+0.84 0.000185267 6.12349e-05 0.000450938
+1.12 0.000143435 6.12349e-05 0.000450938
+1.4 0.000117182 6.12349e-05 0.000450938
+1.68 0 0.000115347 0.000450938
+END DIST
+
+Metal 2 DIAGUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 DIAGUNDER 3
+DIST count 13 width 0.14
+0 0 1.89495e-05 0.000450938
+0.14 0 0 0.000450938
+0.28 0 0 0.000450938
+0.35 0 0 0.000450938
+0.42 0 0 0.000450938
+0.49 0 0 0.000450938
+0.56 0 0 0.000450938
+0.63 0 0 0.000450938
+0.7 0 0 0.000450938
+0.84 0 0 0.000450938
+1.12 0 0 0.000450938
+1.4 0 0 0.000450938
+1.68 0 0 0.000450938
+END DIST
+
+Metal 2 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 3.22222e-05 0.000450938
+0.14 0 0 0.000450938
+0.28 0 0 0.000450938
+0.35 0 0 0.000450938
+0.42 0 0 0.000450938
+0.49 0 0 0.000450938
+0.56 0 0 0.000450938
+0.63 0 0 0.000450938
+0.7 0 0 0.000450938
+0.84 0 0 0.000450938
+1.12 0 0 0.000450938
+1.4 0 0 0.000450938
+1.68 0 0 0.000450938
+END DIST
+
+Metal 2 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 1.82828e-05 0.000450938
+0.14 0 0 0.000450938
+0.28 0 0 0.000450938
+0.35 0 0 0.000450938
+0.42 0 0 0.000450938
+0.49 0 0 0.000450938
+0.56 0 0 0.000450938
+0.63 0 0 0.000450938
+0.7 0 0 0.000450938
+0.84 0 0 0.000450938
+1.12 0 0 0.000450938
+1.4 0 0 0.000450938
+1.68 0 0 0.000450938
+END DIST
+
+Metal 2 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 1.33939e-05 0.000450938
+0.14 0 0 0.000450938
+0.28 0 0 0.000450938
+0.35 0 0 0.000450938
+0.42 0 0 0.000450938
+0.49 0 0 0.000450938
+0.56 0 0 0.000450938
+0.63 0 0 0.000450938
+0.7 0 0 0.000450938
+0.84 0 0 0.000450938
+1.12 0 0 0.000450938
+1.4 0 0 0.000450938
+1.68 0 0 0.000450938
+END DIST
+
+Metal 2 OVERUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 OVER 1 UNDER 3
+DIST count 12 width 0.14
+0.14 0.000838745 0.000245877 0.000450938
+0.28 0.000471303 0.000245877 0.000450938
+0.35 0.000391492 0.000245877 0.000450938
+0.42 0.000336067 0.000245877 0.000450938
+0.49 0.000295057 0.000245877 0.000450938
+0.56 0.000263348 0.000245877 0.000450938
+0.63 0.000238021 0.000245877 0.000450938
+0.7 0.000217283 0.000245877 0.000450938
+0.84 0.000185267 0.000245877 0.000450938
+1.12 0.000143435 0.000245877 0.000450938
+1.4 0.000117182 0.000245877 0.000450938
+1.68 0 0.00029999 0.000450938
+END DIST
+
+Metal 2 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000838745 0.000174151 0.000450938
+0.28 0.000471303 0.000174151 0.000450938
+0.35 0.000391492 0.000174151 0.000450938
+0.42 0.000336067 0.000174151 0.000450938
+0.49 0.000295057 0.000174151 0.000450938
+0.56 0.000263348 0.000174151 0.000450938
+0.63 0.000238021 0.000174151 0.000450938
+0.7 0.000217283 0.000174151 0.000450938
+0.84 0.000185267 0.000174151 0.000450938
+1.12 0.000143435 0.000174151 0.000450938
+1.4 0.000117182 0.000174151 0.000450938
+1.68 0 0.000228263 0.000450938
+END DIST
+
+Metal 2 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000838745 0.000156228 0.000450938
+0.28 0.000471303 0.000156228 0.000450938
+0.35 0.000391492 0.000156228 0.000450938
+0.42 0.000336067 0.000156228 0.000450938
+0.49 0.000295057 0.000156228 0.000450938
+0.56 0.000263348 0.000156228 0.000450938
+0.63 0.000238021 0.000156228 0.000450938
+0.7 0.000217283 0.000156228 0.000450938
+0.84 0.000185267 0.000156228 0.000450938
+1.12 0.000143435 0.000156228 0.000450938
+1.4 0.000117182 0.000156228 0.000450938
+1.68 0 0.000210341 0.000450938
+END DIST
+
+Metal 2 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000838745 0.000136841 0.000450938
+0.28 0.000471303 0.000136841 0.000450938
+0.35 0.000391492 0.000136841 0.000450938
+0.42 0.000336067 0.000136841 0.000450938
+0.49 0.000295057 0.000136841 0.000450938
+0.56 0.000263348 0.000136841 0.000450938
+0.63 0.000238021 0.000136841 0.000450938
+0.7 0.000217283 0.000136841 0.000450938
+0.84 0.000185267 0.000136841 0.000450938
+1.12 0.000143435 0.000136841 0.000450938
+1.4 0.000117182 0.000136841 0.000450938
+1.68 0 0.000190953 0.000450938
+END DIST
+
+Metal 3 RESOVER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.000901876
+0 0.32 0 0.000901876
+0 0.46 0 0.000901876
+0 0.71 0 0.000901876
+0 0.78 0 0.000901876
+0 0.92 0 0.000901876
+0 1.17 0 0.000901876
+0 1.24 0 0.000901876
+0 1.38 0 0.000901876
+0 1.84 0 0.000901876
+0.32 0.32 0 0.000901876
+0.32 0.46 0 0.000901876
+0.32 0.71 0 0.000901876
+0.32 0.78 0 0.000901876
+0.32 0.92 0 0.000901876
+0.32 1.17 0 0.000901876
+0.32 1.24 0 0.000901876
+0.32 1.38 0 0.000901876
+0.32 1.84 0 0.000901876
+0.46 0.46 0 0.000901876
+0.46 0.71 0 0.000901876
+0.46 0.78 0 0.000901876
+0.46 0.92 0 0.000901876
+0.46 1.17 0 0.000901876
+0.46 1.24 0 0.000901876
+0.46 1.38 0 0.000901876
+0.46 1.84 0 0.000901876
+0.71 0.71 0 0.000901876
+0.71 0.78 0 0.000901876
+0.71 0.92 0 0.000901876
+0.71 1.17 0 0.000901876
+0.71 1.24 0 0.000901876
+0.71 1.38 0 0.000901876
+0.71 1.84 0 0.000901876
+0.78 0.78 0 0.000901876
+0.78 0.92 0 0.000901876
+0.78 1.17 0 0.000901876
+0.78 1.24 0 0.000901876
+0.78 1.38 0 0.000901876
+0.78 1.84 0 0.000901876
+0.92 0.92 0 0.000901876
+0.92 1.17 0 0.000901876
+0.92 1.24 0 0.000901876
+0.92 1.38 0 0.000901876
+0.92 1.84 0 0.000901876
+1.17 1.17 0 0.000901876
+1.17 1.24 0 0.000901876
+1.17 1.38 0 0.000901876
+1.17 1.84 0 0.000901876
+1.24 1.24 0 0.000901876
+1.24 1.38 0 0.000901876
+1.24 1.84 0 0.000901876
+1.38 1.38 0 0.000901876
+1.38 1.84 0 0.000901876
+1.84 0 1.84 0.000901876
+END DIST
+
+Metal 3 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 RESOVER 2
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 OVER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 OVER 0
+DIST count 12 width 0.14
+0.14 0.000889851 3.99697e-05 0.000450938
+0.28 0.000497251 3.99697e-05 0.000450938
+0.35 0.000413304 3.99697e-05 0.000450938
+0.42 0.000355285 3.99697e-05 0.000450938
+0.49 0.000312469 3.99697e-05 0.000450938
+0.56 0.000279405 3.99697e-05 0.000450938
+0.63 0.000253003 3.99697e-05 0.000450938
+0.7 0.000231378 3.99697e-05 0.000450938
+0.84 0.00019795 3.99697e-05 0.000450938
+1.12 0.000154118 3.99697e-05 0.000450938
+1.4 0.000126457 3.99697e-05 0.000450938
+1.68 0 0.000100095 0.000450938
+END DIST
+
+Metal 3 OVER 1
+DIST count 12 width 0.14
+0.14 0.000889851 8.81281e-05 0.000450938
+0.28 0.000497251 8.81281e-05 0.000450938
+0.35 0.000413304 8.81281e-05 0.000450938
+0.42 0.000355285 8.81281e-05 0.000450938
+0.49 0.000312469 8.81281e-05 0.000450938
+0.56 0.000279405 8.81281e-05 0.000450938
+0.63 0.000253003 8.81281e-05 0.000450938
+0.7 0.000231378 8.81281e-05 0.000450938
+0.84 0.00019795 8.81281e-05 0.000450938
+1.12 0.000154118 8.81281e-05 0.000450938
+1.4 0.000126457 8.81281e-05 0.000450938
+1.68 0 0.000148253 0.000450938
+END DIST
+
+Metal 3 OVER 2
+DIST count 12 width 0.14
+0.14 0.000889851 0.000145812 0.000450938
+0.28 0.000497251 0.000145812 0.000450938
+0.35 0.000413304 0.000145812 0.000450938
+0.42 0.000355285 0.000145812 0.000450938
+0.49 0.000312469 0.000145812 0.000450938
+0.56 0.000279405 0.000145812 0.000450938
+0.63 0.000253003 0.000145812 0.000450938
+0.7 0.000231378 0.000145812 0.000450938
+0.84 0.00019795 0.000145812 0.000450938
+1.12 0.000154118 0.000145812 0.000450938
+1.4 0.000126457 0.000145812 0.000450938
+1.68 0 0.000205937 0.000450938
+END DIST
+
+Metal 3 UNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000889851 0.000123883 0.000450938
+0.28 0.000497251 0.000123883 0.000450938
+0.35 0.000413304 0.000123883 0.000450938
+0.42 0.000355285 0.000123883 0.000450938
+0.49 0.000312469 0.000123883 0.000450938
+0.56 0.000279405 0.000123883 0.000450938
+0.63 0.000253003 0.000123883 0.000450938
+0.7 0.000231378 0.000123883 0.000450938
+0.84 0.00019795 0.000123883 0.000450938
+1.12 0.000154118 0.000123883 0.000450938
+1.4 0.000126457 0.000123883 0.000450938
+1.68 0 0.000184008 0.000450938
+END DIST
+
+Metal 3 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000889851 8.55316e-05 0.000450938
+0.28 0.000497251 8.55316e-05 0.000450938
+0.35 0.000413304 8.55316e-05 0.000450938
+0.42 0.000355285 8.55316e-05 0.000450938
+0.49 0.000312469 8.55316e-05 0.000450938
+0.56 0.000279405 8.55316e-05 0.000450938
+0.63 0.000253003 8.55316e-05 0.000450938
+0.7 0.000231378 8.55316e-05 0.000450938
+0.84 0.00019795 8.55316e-05 0.000450938
+1.12 0.000154118 8.55316e-05 0.000450938
+1.4 0.000126457 8.55316e-05 0.000450938
+1.68 0 0.000145657 0.000450938
+END DIST
+
+Metal 3 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000889851 6.25593e-05 0.000450938
+0.28 0.000497251 6.25593e-05 0.000450938
+0.35 0.000413304 6.25593e-05 0.000450938
+0.42 0.000355285 6.25593e-05 0.000450938
+0.49 0.000312469 6.25593e-05 0.000450938
+0.56 0.000279405 6.25593e-05 0.000450938
+0.63 0.000253003 6.25593e-05 0.000450938
+0.7 0.000231378 6.25593e-05 0.000450938
+0.84 0.00019795 6.25593e-05 0.000450938
+1.12 0.000154118 6.25593e-05 0.000450938
+1.4 0.000126457 6.25593e-05 0.000450938
+1.68 0 0.000122684 0.000450938
+END DIST
+
+Metal 3 DIAGUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 5.66061e-05 0.000450938
+0.14 0 0 0.000450938
+0.28 0 0 0.000450938
+0.35 0 0 0.000450938
+0.42 0 0 0.000450938
+0.49 0 0 0.000450938
+0.56 0 0 0.000450938
+0.63 0 0 0.000450938
+0.7 0 0 0.000450938
+0.84 0 0 0.000450938
+1.12 0 0 0.000450938
+1.4 0 0 0.000450938
+1.68 0 0 0.000450938
+END DIST
+
+Metal 3 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 2.50505e-05 0.000450938
+0.14 0 0 0.000450938
+0.28 0 0 0.000450938
+0.35 0 0 0.000450938
+0.42 0 0 0.000450938
+0.49 0 0 0.000450938
+0.56 0 0 0.000450938
+0.63 0 0 0.000450938
+0.7 0 0 0.000450938
+0.84 0 0 0.000450938
+1.12 0 0 0.000450938
+1.4 0 0 0.000450938
+1.68 0 0 0.000450938
+END DIST
+
+Metal 3 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 1.77172e-05 0.000450938
+0.14 0 0 0.000450938
+0.28 0 0 0.000450938
+0.35 0 0 0.000450938
+0.42 0 0 0.000450938
+0.49 0 0 0.000450938
+0.56 0 0 0.000450938
+0.63 0 0 0.000450938
+0.7 0 0 0.000450938
+0.84 0 0 0.000450938
+1.12 0 0 0.000450938
+1.4 0 0 0.000450938
+1.68 0 0 0.000450938
+END DIST
+
+Metal 3 OVERUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000889851 0.000172041 0.000450938
+0.28 0.000497251 0.000172041 0.000450938
+0.35 0.000413304 0.000172041 0.000450938
+0.42 0.000355285 0.000172041 0.000450938
+0.49 0.000312469 0.000172041 0.000450938
+0.56 0.000279405 0.000172041 0.000450938
+0.63 0.000253003 0.000172041 0.000450938
+0.7 0.000231378 0.000172041 0.000450938
+0.84 0.00019795 0.000172041 0.000450938
+1.12 0.000154118 0.000172041 0.000450938
+1.4 0.000126457 0.000172041 0.000450938
+1.68 0 0.000232167 0.000450938
+END DIST
+
+Metal 3 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000889851 0.00013369 0.000450938
+0.28 0.000497251 0.00013369 0.000450938
+0.35 0.000413304 0.00013369 0.000450938
+0.42 0.000355285 0.00013369 0.000450938
+0.49 0.000312469 0.00013369 0.000450938
+0.56 0.000279405 0.00013369 0.000450938
+0.63 0.000253003 0.00013369 0.000450938
+0.7 0.000231378 0.00013369 0.000450938
+0.84 0.00019795 0.00013369 0.000450938
+1.12 0.000154118 0.00013369 0.000450938
+1.4 0.000126457 0.00013369 0.000450938
+1.68 0 0.000193815 0.000450938
+END DIST
+
+Metal 3 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000889851 0.000110718 0.000450938
+0.28 0.000497251 0.000110718 0.000450938
+0.35 0.000413304 0.000110718 0.000450938
+0.42 0.000355285 0.000110718 0.000450938
+0.49 0.000312469 0.000110718 0.000450938
+0.56 0.000279405 0.000110718 0.000450938
+0.63 0.000253003 0.000110718 0.000450938
+0.7 0.000231378 0.000110718 0.000450938
+0.84 0.00019795 0.000110718 0.000450938
+1.12 0.000154118 0.000110718 0.000450938
+1.4 0.000126457 0.000110718 0.000450938
+1.68 0 0.000170843 0.000450938
+END DIST
+
+Metal 3 OVER 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000889851 0.000229725 0.000450938
+0.28 0.000497251 0.000229725 0.000450938
+0.35 0.000413304 0.000229725 0.000450938
+0.42 0.000355285 0.000229725 0.000450938
+0.49 0.000312469 0.000229725 0.000450938
+0.56 0.000279405 0.000229725 0.000450938
+0.63 0.000253003 0.000229725 0.000450938
+0.7 0.000231378 0.000229725 0.000450938
+0.84 0.00019795 0.000229725 0.000450938
+1.12 0.000154118 0.000229725 0.000450938
+1.4 0.000126457 0.000229725 0.000450938
+1.68 0 0.00028985 0.000450938
+END DIST
+
+Metal 3 OVER 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000889851 0.000191374 0.000450938
+0.28 0.000497251 0.000191374 0.000450938
+0.35 0.000413304 0.000191374 0.000450938
+0.42 0.000355285 0.000191374 0.000450938
+0.49 0.000312469 0.000191374 0.000450938
+0.56 0.000279405 0.000191374 0.000450938
+0.63 0.000253003 0.000191374 0.000450938
+0.7 0.000231378 0.000191374 0.000450938
+0.84 0.00019795 0.000191374 0.000450938
+1.12 0.000154118 0.000191374 0.000450938
+1.4 0.000126457 0.000191374 0.000450938
+1.68 0 0.000251499 0.000450938
+END DIST
+
+Metal 3 OVER 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000889851 0.000168401 0.000450938
+0.28 0.000497251 0.000168401 0.000450938
+0.35 0.000413304 0.000168401 0.000450938
+0.42 0.000355285 0.000168401 0.000450938
+0.49 0.000312469 0.000168401 0.000450938
+0.56 0.000279405 0.000168401 0.000450938
+0.63 0.000253003 0.000168401 0.000450938
+0.7 0.000231378 0.000168401 0.000450938
+0.84 0.00019795 0.000168401 0.000450938
+1.12 0.000154118 0.000168401 0.000450938
+1.4 0.000126457 0.000168401 0.000450938
+1.68 0 0.000228526 0.000450938
+END DIST
+
+Metal 4 RESOVER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000158249
+0 0.38 0 0.000158249
+0 0.68 0 0.000158249
+0 0.91 0 0.000158249
+0 1.06 0 0.000158249
+0 1.36 0 0.000158249
+0 1.59 0 0.000158249
+0 1.74 0 0.000158249
+0 2.04 0 0.000158249
+0 2.72 0 0.000158249
+0.38 0.38 0 0.000158249
+0.38 0.68 0 0.000158249
+0.38 0.91 0 0.000158249
+0.38 1.06 0 0.000158249
+0.38 1.36 0 0.000158249
+0.38 1.59 0 0.000158249
+0.38 1.74 0 0.000158249
+0.38 2.04 0 0.000158249
+0.38 2.72 0 0.000158249
+0.68 0.68 0 0.000158249
+0.68 0.91 0 0.000158249
+0.68 1.06 0 0.000158249
+0.68 1.36 0 0.000158249
+0.68 1.59 0 0.000158249
+0.68 1.74 0 0.000158249
+0.68 2.04 0 0.000158249
+0.68 2.72 0 0.000158249
+0.91 0.91 0 0.000158249
+0.91 1.06 0 0.000158249
+0.91 1.36 0 0.000158249
+0.91 1.59 0 0.000158249
+0.91 1.74 0 0.000158249
+0.91 2.04 0 0.000158249
+0.91 2.72 0 0.000158249
+1.06 1.06 0 0.000158249
+1.06 1.36 0 0.000158249
+1.06 1.59 0 0.000158249
+1.06 1.74 0 0.000158249
+1.06 2.04 0 0.000158249
+1.06 2.72 0 0.000158249
+1.36 1.36 0 0.000158249
+1.36 1.59 0 0.000158249
+1.36 1.74 0 0.000158249
+1.36 2.04 0 0.000158249
+1.36 2.72 0 0.000158249
+1.59 1.59 0 0.000158249
+1.59 1.74 0 0.000158249
+1.59 2.04 0 0.000158249
+1.59 2.72 0 0.000158249
+1.74 1.74 0 0.000158249
+1.74 2.04 0 0.000158249
+1.74 2.72 0 0.000158249
+2.04 2.04 0 0.000158249
+2.04 2.72 0 0.000158249
+2.72 0 2.72 0.000158249
+END DIST
+
+Metal 4 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 OVER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 OVER 0
+DIST count 12 width 0.3
+0.3 0.000554112 4.36465e-05 7.91246e-05
+0.6 0.000311553 4.36465e-05 7.91246e-05
+0.75 0.000258699 4.36465e-05 7.91246e-05
+0.9 0.000221966 4.36465e-05 7.91246e-05
+1.05 0.00019478 4.36465e-05 7.91246e-05
+1.2 0.000173759 4.36465e-05 7.91246e-05
+1.35 9.42761e-05 4.36465e-05 7.91246e-05
+1.5 8.48485e-05 4.36465e-05 7.91246e-05
+1.8 7.07071e-05 4.36465e-05 7.91246e-05
+2.4 0 4.36465e-05 7.91246e-05
+3 0 4.36465e-05 7.91246e-05
+3.6 0 4.36465e-05 7.91246e-05
+END DIST
+
+Metal 4 OVER 1
+DIST count 12 width 0.3
+0.3 0.000554112 9.96987e-05 7.91246e-05
+0.6 0.000311553 9.96987e-05 7.91246e-05
+0.75 0.000258699 9.96987e-05 7.91246e-05
+0.9 0.000221966 9.96987e-05 7.91246e-05
+1.05 0.00019478 9.96987e-05 7.91246e-05
+1.2 0.000173759 9.96987e-05 7.91246e-05
+1.35 9.42761e-05 9.96987e-05 7.91246e-05
+1.5 8.48485e-05 9.96987e-05 7.91246e-05
+1.8 7.07071e-05 9.96987e-05 7.91246e-05
+2.4 0 9.96987e-05 7.91246e-05
+3 0 9.96987e-05 7.91246e-05
+3.6 0 9.96987e-05 7.91246e-05
+END DIST
+
+Metal 4 OVER 2
+DIST count 12 width 0.3
+0.3 0.000554112 0.000141874 7.91246e-05
+0.6 0.000311553 0.000141874 7.91246e-05
+0.75 0.000258699 0.000141874 7.91246e-05
+0.9 0.000221966 0.000141874 7.91246e-05
+1.05 0.00019478 0.000141874 7.91246e-05
+1.2 0.000173759 0.000141874 7.91246e-05
+1.35 9.42761e-05 0.000141874 7.91246e-05
+1.5 8.48485e-05 0.000141874 7.91246e-05
+1.8 7.07071e-05 0.000141874 7.91246e-05
+2.4 0 0.000141874 7.91246e-05
+3 0 0.000141874 7.91246e-05
+3.6 0 0.000141874 7.91246e-05
+END DIST
+
+Metal 4 OVER 3
+DIST count 12 width 0.3
+0.3 0.000554112 0.000201823 7.91246e-05
+0.6 0.000311553 0.000201823 7.91246e-05
+0.75 0.000258699 0.000201823 7.91246e-05
+0.9 0.000221966 0.000201823 7.91246e-05
+1.05 0.00019478 0.000201823 7.91246e-05
+1.2 0.000173759 0.000201823 7.91246e-05
+1.35 9.42761e-05 0.000201823 7.91246e-05
+1.5 8.48485e-05 0.000201823 7.91246e-05
+1.8 7.07071e-05 0.000201823 7.91246e-05
+2.4 0 0.000201823 7.91246e-05
+3 0 0.000201823 7.91246e-05
+3.6 0 0.000201823 7.91246e-05
+END DIST
+
+Metal 4 UNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.000172394 7.91246e-05
+0.6 0.000311553 0.000172394 7.91246e-05
+0.75 0.000258699 0.000172394 7.91246e-05
+0.9 0.000221966 0.000172394 7.91246e-05
+1.05 0.00019478 0.000172394 7.91246e-05
+1.2 0.000173759 0.000172394 7.91246e-05
+1.35 9.42761e-05 0.000172394 7.91246e-05
+1.5 8.48485e-05 0.000172394 7.91246e-05
+1.8 7.07071e-05 0.000172394 7.91246e-05
+2.4 0 0.000172394 7.91246e-05
+3 0 0.000172394 7.91246e-05
+3.6 0 0.000172394 7.91246e-05
+END DIST
+
+Metal 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 8.62741e-05 7.91246e-05
+0.6 0.000311553 8.62741e-05 7.91246e-05
+0.75 0.000258699 8.62741e-05 7.91246e-05
+0.9 0.000221966 8.62741e-05 7.91246e-05
+1.05 0.00019478 8.62741e-05 7.91246e-05
+1.2 0.000173759 8.62741e-05 7.91246e-05
+1.35 9.42761e-05 8.62741e-05 7.91246e-05
+1.5 8.48485e-05 8.62741e-05 7.91246e-05
+1.8 7.07071e-05 8.62741e-05 7.91246e-05
+2.4 0 8.62741e-05 7.91246e-05
+3 0 8.62741e-05 7.91246e-05
+3.6 0 8.62741e-05 7.91246e-05
+END DIST
+
+Metal 4 DIAGUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 DIAGUNDER 5
+DIST count 13 width 0.3
+0 0 2.54545e-05 7.91246e-05
+0.3 0 0 7.91246e-05
+0.6 0 0 7.91246e-05
+0.75 0 0 7.91246e-05
+0.9 0 0 7.91246e-05
+1.05 0 0 7.91246e-05
+1.2 0 0 7.91246e-05
+1.35 0 0 7.91246e-05
+1.5 0 0 7.91246e-05
+1.8 0 0 7.91246e-05
+2.4 0 0 7.91246e-05
+3 0 0 7.91246e-05
+3.6 0 0 7.91246e-05
+END DIST
+
+Metal 4 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 3.43434e-05 7.91246e-05
+0.3 0 0 7.91246e-05
+0.6 0 0 7.91246e-05
+0.75 0 0 7.91246e-05
+0.9 0 0 7.91246e-05
+1.05 0 0 7.91246e-05
+1.2 0 0 7.91246e-05
+1.35 0 0 7.91246e-05
+1.5 0 0 7.91246e-05
+1.8 0 0 7.91246e-05
+2.4 0 0 7.91246e-05
+3 0 0 7.91246e-05
+3.6 0 0 7.91246e-05
+END DIST
+
+Metal 4 OVERUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 OVER 1 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.000228446 7.91246e-05
+0.6 0.000311553 0.000228446 7.91246e-05
+0.75 0.000258699 0.000228446 7.91246e-05
+0.9 0.000221966 0.000228446 7.91246e-05
+1.05 0.00019478 0.000228446 7.91246e-05
+1.2 0.000173759 0.000228446 7.91246e-05
+1.35 9.42761e-05 0.000228446 7.91246e-05
+1.5 8.48485e-05 0.000228446 7.91246e-05
+1.8 7.07071e-05 0.000228446 7.91246e-05
+2.4 0 0.000228446 7.91246e-05
+3 0 0.000228446 7.91246e-05
+3.6 0 0.000228446 7.91246e-05
+END DIST
+
+Metal 4 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 0.000142326 7.91246e-05
+0.6 0.000311553 0.000142326 7.91246e-05
+0.75 0.000258699 0.000142326 7.91246e-05
+0.9 0.000221966 0.000142326 7.91246e-05
+1.05 0.00019478 0.000142326 7.91246e-05
+1.2 0.000173759 0.000142326 7.91246e-05
+1.35 9.42761e-05 0.000142326 7.91246e-05
+1.5 8.48485e-05 0.000142326 7.91246e-05
+1.8 7.07071e-05 0.000142326 7.91246e-05
+2.4 0 0.000142326 7.91246e-05
+3 0 0.000142326 7.91246e-05
+3.6 0 0.000142326 7.91246e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.000270621 7.91246e-05
+0.6 0.000311553 0.000270621 7.91246e-05
+0.75 0.000258699 0.000270621 7.91246e-05
+0.9 0.000221966 0.000270621 7.91246e-05
+1.05 0.00019478 0.000270621 7.91246e-05
+1.2 0.000173759 0.000270621 7.91246e-05
+1.35 9.42761e-05 0.000270621 7.91246e-05
+1.5 8.48485e-05 0.000270621 7.91246e-05
+1.8 7.07071e-05 0.000270621 7.91246e-05
+2.4 0 0.000270621 7.91246e-05
+3 0 0.000270621 7.91246e-05
+3.6 0 0.000270621 7.91246e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 0.000184501 7.91246e-05
+0.6 0.000311553 0.000184501 7.91246e-05
+0.75 0.000258699 0.000184501 7.91246e-05
+0.9 0.000221966 0.000184501 7.91246e-05
+1.05 0.00019478 0.000184501 7.91246e-05
+1.2 0.000173759 0.000184501 7.91246e-05
+1.35 9.42761e-05 0.000184501 7.91246e-05
+1.5 8.48485e-05 0.000184501 7.91246e-05
+1.8 7.07071e-05 0.000184501 7.91246e-05
+2.4 0 0.000184501 7.91246e-05
+3 0 0.000184501 7.91246e-05
+3.6 0 0.000184501 7.91246e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.000330571 7.91246e-05
+0.6 0.000311553 0.000330571 7.91246e-05
+0.75 0.000258699 0.000330571 7.91246e-05
+0.9 0.000221966 0.000330571 7.91246e-05
+1.05 0.00019478 0.000330571 7.91246e-05
+1.2 0.000173759 0.000330571 7.91246e-05
+1.35 9.42761e-05 0.000330571 7.91246e-05
+1.5 8.48485e-05 0.000330571 7.91246e-05
+1.8 7.07071e-05 0.000330571 7.91246e-05
+2.4 0 0.000330571 7.91246e-05
+3 0 0.000330571 7.91246e-05
+3.6 0 0.000330571 7.91246e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 0.000244451 7.91246e-05
+0.6 0.000311553 0.000244451 7.91246e-05
+0.75 0.000258699 0.000244451 7.91246e-05
+0.9 0.000221966 0.000244451 7.91246e-05
+1.05 0.00019478 0.000244451 7.91246e-05
+1.2 0.000173759 0.000244451 7.91246e-05
+1.35 9.42761e-05 0.000244451 7.91246e-05
+1.5 8.48485e-05 0.000244451 7.91246e-05
+1.8 7.07071e-05 0.000244451 7.91246e-05
+2.4 0 0.000244451 7.91246e-05
+3 0 0.000244451 7.91246e-05
+3.6 0 0.000244451 7.91246e-05
+END DIST
+
+Metal 5 RESOVER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000158249
+0 0.62 0 0.000158249
+0 0.92 0 0.000158249
+0 1.39 0 0.000158249
+0 1.54 0 0.000158249
+0 1.84 0 0.000158249
+0 2.31 0 0.000158249
+0 2.46 0 0.000158249
+0 2.76 0 0.000158249
+0 3.68 0 0.000158249
+0.62 0.62 0 0.000158249
+0.62 0.92 0 0.000158249
+0.62 1.39 0 0.000158249
+0.62 1.54 0 0.000158249
+0.62 1.84 0 0.000158249
+0.62 2.31 0 0.000158249
+0.62 2.46 0 0.000158249
+0.62 2.76 0 0.000158249
+0.62 3.68 0 0.000158249
+0.92 0.92 0 0.000158249
+0.92 1.39 0 0.000158249
+0.92 1.54 0 0.000158249
+0.92 1.84 0 0.000158249
+0.92 2.31 0 0.000158249
+0.92 2.46 0 0.000158249
+0.92 2.76 0 0.000158249
+0.92 3.68 0 0.000158249
+1.39 1.39 0 0.000158249
+1.39 1.54 0 0.000158249
+1.39 1.84 0 0.000158249
+1.39 2.31 0 0.000158249
+1.39 2.46 0 0.000158249
+1.39 2.76 0 0.000158249
+1.39 3.68 0 0.000158249
+1.54 1.54 0 0.000158249
+1.54 1.84 0 0.000158249
+1.54 2.31 0 0.000158249
+1.54 2.46 0 0.000158249
+1.54 2.76 0 0.000158249
+1.54 3.68 0 0.000158249
+1.84 1.84 0 0.000158249
+1.84 2.31 0 0.000158249
+1.84 2.46 0 0.000158249
+1.84 2.76 0 0.000158249
+1.84 3.68 0 0.000158249
+2.31 2.31 0 0.000158249
+2.31 2.46 0 0.000158249
+2.31 2.76 0 0.000158249
+2.31 3.68 0 0.000158249
+2.46 2.46 0 0.000158249
+2.46 2.76 0 0.000158249
+2.46 3.68 0 0.000158249
+2.76 2.76 0 0.000158249
+2.76 3.68 0 0.000158249
+3.68 0 3.68 0.000158249
+END DIST
+
+Metal 5 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 4
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 OVER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 OVER 0
+DIST count 12 width 0.3
+0.3 0.000562124 3.89596e-05 7.91246e-05
+0.6 0.000314638 3.89596e-05 7.91246e-05
+0.75 0.000261521 3.89596e-05 7.91246e-05
+0.9 0.000224763 3.89596e-05 7.91246e-05
+1.05 0.000197615 3.89596e-05 7.91246e-05
+1.2 0.000112795 3.89596e-05 7.91246e-05
+1.35 0.000100262 3.89596e-05 7.91246e-05
+1.5 9.02357e-05 3.89596e-05 7.91246e-05
+1.8 7.51966e-05 3.89596e-05 7.91246e-05
+2.4 0 3.89596e-05 7.91246e-05
+3 0 3.89596e-05 7.91246e-05
+3.6 0 3.89596e-05 7.91246e-05
+END DIST
+
+Metal 5 OVER 1
+DIST count 12 width 0.3
+0.3 0.000562124 7.96056e-05 7.91246e-05
+0.6 0.000314638 7.96056e-05 7.91246e-05
+0.75 0.000261521 7.96056e-05 7.91246e-05
+0.9 0.000224763 7.96056e-05 7.91246e-05
+1.05 0.000197615 7.96056e-05 7.91246e-05
+1.2 0.000112795 7.96056e-05 7.91246e-05
+1.35 0.000100262 7.96056e-05 7.91246e-05
+1.5 9.02357e-05 7.96056e-05 7.91246e-05
+1.8 7.51966e-05 7.96056e-05 7.91246e-05
+2.4 0 7.96056e-05 7.91246e-05
+3 0 7.96056e-05 7.91246e-05
+3.6 0 7.96056e-05 7.91246e-05
+END DIST
+
+Metal 5 OVER 2
+DIST count 12 width 0.3
+0.3 0.000562124 0.00010049 7.91246e-05
+0.6 0.000314638 0.00010049 7.91246e-05
+0.75 0.000261521 0.00010049 7.91246e-05
+0.9 0.000224763 0.00010049 7.91246e-05
+1.05 0.000197615 0.00010049 7.91246e-05
+1.2 0.000112795 0.00010049 7.91246e-05
+1.35 0.000100262 0.00010049 7.91246e-05
+1.5 9.02357e-05 0.00010049 7.91246e-05
+1.8 7.51966e-05 0.00010049 7.91246e-05
+2.4 0 0.00010049 7.91246e-05
+3 0 0.00010049 7.91246e-05
+3.6 0 0.00010049 7.91246e-05
+END DIST
+
+Metal 5 OVER 3
+DIST count 12 width 0.3
+0.3 0.000562124 0.000117313 7.91246e-05
+0.6 0.000314638 0.000117313 7.91246e-05
+0.75 0.000261521 0.000117313 7.91246e-05
+0.9 0.000224763 0.000117313 7.91246e-05
+1.05 0.000197615 0.000117313 7.91246e-05
+1.2 0.000112795 0.000117313 7.91246e-05
+1.35 0.000100262 0.000117313 7.91246e-05
+1.5 9.02357e-05 0.000117313 7.91246e-05
+1.8 7.51966e-05 0.000117313 7.91246e-05
+2.4 0 0.000117313 7.91246e-05
+3 0 0.000117313 7.91246e-05
+3.6 0 0.000117313 7.91246e-05
+END DIST
+
+Metal 5 OVER 4
+DIST count 12 width 0.3
+0.3 0.000562124 0.000147545 7.91246e-05
+0.6 0.000314638 0.000147545 7.91246e-05
+0.75 0.000261521 0.000147545 7.91246e-05
+0.9 0.000224763 0.000147545 7.91246e-05
+1.05 0.000197615 0.000147545 7.91246e-05
+1.2 0.000112795 0.000147545 7.91246e-05
+1.35 0.000100262 0.000147545 7.91246e-05
+1.5 9.02357e-05 0.000147545 7.91246e-05
+1.8 7.51966e-05 0.000147545 7.91246e-05
+2.4 0 0.000147545 7.91246e-05
+3 0 0.000147545 7.91246e-05
+3.6 0 0.000147545 7.91246e-05
+END DIST
+
+Metal 5 UNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.00011345 7.91246e-05
+0.6 0.000314638 0.00011345 7.91246e-05
+0.75 0.000261521 0.00011345 7.91246e-05
+0.9 0.000224763 0.00011345 7.91246e-05
+1.05 0.000197615 0.00011345 7.91246e-05
+1.2 0.000112795 0.00011345 7.91246e-05
+1.35 0.000100262 0.00011345 7.91246e-05
+1.5 9.02357e-05 0.00011345 7.91246e-05
+1.8 7.51966e-05 0.00011345 7.91246e-05
+2.4 0 0.00011345 7.91246e-05
+3 0 0.00011345 7.91246e-05
+3.6 0 0.00011345 7.91246e-05
+END DIST
+
+Metal 5 DIAGUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 6.80808e-05 7.91246e-05
+0.3 0 0 7.91246e-05
+0.6 0 0 7.91246e-05
+0.75 0 0 7.91246e-05
+0.9 0 0 7.91246e-05
+1.05 0 0 7.91246e-05
+1.2 0 0 7.91246e-05
+1.35 0 0 7.91246e-05
+1.5 0 0 7.91246e-05
+1.8 0 0 7.91246e-05
+2.4 0 0 7.91246e-05
+3 0 0 7.91246e-05
+3.6 0 0 7.91246e-05
+END DIST
+
+Metal 5 OVERUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.000154096 7.91246e-05
+0.6 0.000314638 0.000154096 7.91246e-05
+0.75 0.000261521 0.000154096 7.91246e-05
+0.9 0.000224763 0.000154096 7.91246e-05
+1.05 0.000197615 0.000154096 7.91246e-05
+1.2 0.000112795 0.000154096 7.91246e-05
+1.35 0.000100262 0.000154096 7.91246e-05
+1.5 9.02357e-05 0.000154096 7.91246e-05
+1.8 7.51966e-05 0.000154096 7.91246e-05
+2.4 0 0.000154096 7.91246e-05
+3 0 0.000154096 7.91246e-05
+3.6 0 0.000154096 7.91246e-05
+END DIST
+
+Metal 5 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.00017498 7.91246e-05
+0.6 0.000314638 0.00017498 7.91246e-05
+0.75 0.000261521 0.00017498 7.91246e-05
+0.9 0.000224763 0.00017498 7.91246e-05
+1.05 0.000197615 0.00017498 7.91246e-05
+1.2 0.000112795 0.00017498 7.91246e-05
+1.35 0.000100262 0.00017498 7.91246e-05
+1.5 9.02357e-05 0.00017498 7.91246e-05
+1.8 7.51966e-05 0.00017498 7.91246e-05
+2.4 0 0.00017498 7.91246e-05
+3 0 0.00017498 7.91246e-05
+3.6 0 0.00017498 7.91246e-05
+END DIST
+
+Metal 5 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.000191803 7.91246e-05
+0.6 0.000314638 0.000191803 7.91246e-05
+0.75 0.000261521 0.000191803 7.91246e-05
+0.9 0.000224763 0.000191803 7.91246e-05
+1.05 0.000197615 0.000191803 7.91246e-05
+1.2 0.000112795 0.000191803 7.91246e-05
+1.35 0.000100262 0.000191803 7.91246e-05
+1.5 9.02357e-05 0.000191803 7.91246e-05
+1.8 7.51966e-05 0.000191803 7.91246e-05
+2.4 0 0.000191803 7.91246e-05
+3 0 0.000191803 7.91246e-05
+3.6 0 0.000191803 7.91246e-05
+END DIST
+
+Metal 5 OVER 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.000222035 7.91246e-05
+0.6 0.000314638 0.000222035 7.91246e-05
+0.75 0.000261521 0.000222035 7.91246e-05
+0.9 0.000224763 0.000222035 7.91246e-05
+1.05 0.000197615 0.000222035 7.91246e-05
+1.2 0.000112795 0.000222035 7.91246e-05
+1.35 0.000100262 0.000222035 7.91246e-05
+1.5 9.02357e-05 0.000222035 7.91246e-05
+1.8 7.51966e-05 0.000222035 7.91246e-05
+2.4 0 0.000222035 7.91246e-05
+3 0 0.000222035 7.91246e-05
+3.6 0 0.000222035 7.91246e-05
+END DIST
+
+Metal 6 RESOVER
+WIDTH Table 1 entries:  1.6
+
+Metal 6 RESOVER 0
+DIST count 55 width 1.6
+0 0 0 1.83081e-05
+0 1.8 0 1.83081e-05
+0 3.4 0 1.83081e-05
+0 4.4 0 1.83081e-05
+0 5.2 0 1.83081e-05
+0 6.8 0 1.83081e-05
+0 7.8 0 1.83081e-05
+0 8.6 0 1.83081e-05
+0 10.2 0 1.83081e-05
+0 13.6 0 1.83081e-05
+1.8 1.8 0 1.83081e-05
+1.8 3.4 0 1.83081e-05
+1.8 4.4 0 1.83081e-05
+1.8 5.2 0 1.83081e-05
+1.8 6.8 0 1.83081e-05
+1.8 7.8 0 1.83081e-05
+1.8 8.6 0 1.83081e-05
+1.8 10.2 0 1.83081e-05
+1.8 13.6 0 1.83081e-05
+3.4 3.4 0 1.83081e-05
+3.4 4.4 0 1.83081e-05
+3.4 5.2 0 1.83081e-05
+3.4 6.8 0 1.83081e-05
+3.4 7.8 0 1.83081e-05
+3.4 8.6 0 1.83081e-05
+3.4 10.2 0 1.83081e-05
+3.4 13.6 0 1.83081e-05
+4.4 4.4 0 1.83081e-05
+4.4 5.2 0 1.83081e-05
+4.4 6.8 0 1.83081e-05
+4.4 7.8 0 1.83081e-05
+4.4 8.6 0 1.83081e-05
+4.4 10.2 0 1.83081e-05
+4.4 13.6 0 1.83081e-05
+5.2 5.2 0 1.83081e-05
+5.2 6.8 0 1.83081e-05
+5.2 7.8 0 1.83081e-05
+5.2 8.6 0 1.83081e-05
+5.2 10.2 0 1.83081e-05
+5.2 13.6 0 1.83081e-05
+6.8 6.8 0 1.83081e-05
+6.8 7.8 0 1.83081e-05
+6.8 8.6 0 1.83081e-05
+6.8 10.2 0 1.83081e-05
+6.8 13.6 0 1.83081e-05
+7.8 7.8 0 1.83081e-05
+7.8 8.6 0 1.83081e-05
+7.8 10.2 0 1.83081e-05
+7.8 13.6 0 1.83081e-05
+8.6 8.6 0 1.83081e-05
+8.6 10.2 0 1.83081e-05
+8.6 13.6 0 1.83081e-05
+10.2 10.2 0 1.83081e-05
+10.2 13.6 0 1.83081e-05
+13.6 0 13.6 1.83081e-05
+END DIST
+
+Metal 6 RESOVER 1
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 2
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 3
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 4
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 5
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 OVER
+WIDTH Table 1 entries:  1.6
+
+Metal 6 OVER 0
+DIST count 12 width 1.6
+1.6 0.000160354 4.46364e-05 9.15404e-06
+3.2 0 4.46364e-05 9.15404e-06
+4 0 4.46364e-05 9.15404e-06
+4.8 0 4.46364e-05 9.15404e-06
+5.6 0 4.46364e-05 9.15404e-06
+6.4 0 4.46364e-05 9.15404e-06
+7.2 0 4.46364e-05 9.15404e-06
+8 0 4.46364e-05 9.15404e-06
+9.6 0 4.46364e-05 9.15404e-06
+12.8 0 4.46364e-05 9.15404e-06
+16 0 4.46364e-05 9.15404e-06
+19.2 0 4.46364e-05 9.15404e-06
+END DIST
+
+Metal 6 OVER 1
+DIST count 12 width 1.6
+1.6 0.000160354 0.000146457 9.15404e-06
+3.2 0 0.000146457 9.15404e-06
+4 0 0.000146457 9.15404e-06
+4.8 0 0.000146457 9.15404e-06
+5.6 0 0.000146457 9.15404e-06
+6.4 0 0.000146457 9.15404e-06
+7.2 0 0.000146457 9.15404e-06
+8 0 0.000146457 9.15404e-06
+9.6 0 0.000146457 9.15404e-06
+12.8 0 0.000146457 9.15404e-06
+16 0 0.000146457 9.15404e-06
+19.2 0 0.000146457 9.15404e-06
+END DIST
+
+Metal 6 OVER 2
+DIST count 12 width 1.6
+1.6 0.000160354 0.000212019 9.15404e-06
+3.2 0 0.000212019 9.15404e-06
+4 0 0.000212019 9.15404e-06
+4.8 0 0.000212019 9.15404e-06
+5.6 0 0.000212019 9.15404e-06
+6.4 0 0.000212019 9.15404e-06
+7.2 0 0.000212019 9.15404e-06
+8 0 0.000212019 9.15404e-06
+9.6 0 0.000212019 9.15404e-06
+12.8 0 0.000212019 9.15404e-06
+16 0 0.000212019 9.15404e-06
+19.2 0 0.000212019 9.15404e-06
+END DIST
+
+Metal 6 OVER 3
+DIST count 12 width 1.6
+1.6 0.000160354 0.00026288 9.15404e-06
+3.2 0 0.00026288 9.15404e-06
+4 0 0.00026288 9.15404e-06
+4.8 0 0.00026288 9.15404e-06
+5.6 0 0.00026288 9.15404e-06
+6.4 0 0.00026288 9.15404e-06
+7.2 0 0.00026288 9.15404e-06
+8 0 0.00026288 9.15404e-06
+9.6 0 0.00026288 9.15404e-06
+12.8 0 0.00026288 9.15404e-06
+16 0 0.00026288 9.15404e-06
+19.2 0 0.00026288 9.15404e-06
+END DIST
+
+Metal 6 OVER 4
+DIST count 12 width 1.6
+1.6 0.000160354 0.000244318 9.15404e-06
+3.2 0 0.000244318 9.15404e-06
+4 0 0.000244318 9.15404e-06
+4.8 0 0.000244318 9.15404e-06
+5.6 0 0.000244318 9.15404e-06
+6.4 0 0.000244318 9.15404e-06
+7.2 0 0.000244318 9.15404e-06
+8 0 0.000244318 9.15404e-06
+9.6 0 0.000244318 9.15404e-06
+12.8 0 0.000244318 9.15404e-06
+16 0 0.000244318 9.15404e-06
+19.2 0 0.000244318 9.15404e-06
+END DIST
+
+Metal 6 OVER 5
+DIST count 12 width 1.6
+1.6 0.000160354 0.000414985 9.15404e-06
+3.2 0 0.000414985 9.15404e-06
+4 0 0.000414985 9.15404e-06
+4.8 0 0.000414985 9.15404e-06
+5.6 0 0.000414985 9.15404e-06
+6.4 0 0.000414985 9.15404e-06
+7.2 0 0.000414985 9.15404e-06
+8 0 0.000414985 9.15404e-06
+9.6 0 0.000414985 9.15404e-06
+12.8 0 0.000414985 9.15404e-06
+16 0 0.000414985 9.15404e-06
+19.2 0 0.000414985 9.15404e-06
+END DIST
+
+Metal 6 UNDER
+WIDTH Table 0 entries: 
+
+Metal 6 DIAGUNDER
+WIDTH Table 0 entries: 
+END DensityModel 0
diff --git a/sky130/openlane/rules.openrcx.sky130B.max.magic b/sky130/openlane/rules.openrcx.sky130B.max.magic
new file mode 100644
index 0000000..947c02f
--- /dev/null
+++ b/sky130/openlane/rules.openrcx.sky130B.max.magic
@@ -0,0 +1,1645 @@
+Extraction Rules for OpenRCX
+
+DIAGMODEL ON
+
+LayerCount 6
+DensityRate 1  0
+
+DensityModel 0
+
+Metal 1 RESOVER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 RESOVER 0
+DIST count 55 width 0.17
+0 0 0 0.10101
+0 0.29 0 0.10101
+0 0.46 0 0.10101
+0 0.665 0 0.10101
+0 0.75 0 0.10101
+0 0.92 0 0.10101
+0 1.125 0 0.10101
+0 1.21 0 0.10101
+0 1.38 0 0.10101
+0 1.84 0 0.10101
+0.29 0.29 0 0.10101
+0.29 0.46 0 0.10101
+0.29 0.665 0 0.10101
+0.29 0.75 0 0.10101
+0.29 0.92 0 0.10101
+0.29 1.125 0 0.10101
+0.29 1.21 0 0.10101
+0.29 1.38 0 0.10101
+0.29 1.84 0 0.10101
+0.46 0.46 0 0.10101
+0.46 0.665 0 0.10101
+0.46 0.75 0 0.10101
+0.46 0.92 0 0.10101
+0.46 1.125 0 0.10101
+0.46 1.21 0 0.10101
+0.46 1.38 0 0.10101
+0.46 1.84 0 0.10101
+0.665 0.665 0 0.10101
+0.665 0.75 0 0.10101
+0.665 0.92 0 0.10101
+0.665 1.125 0 0.10101
+0.665 1.21 0 0.10101
+0.665 1.38 0 0.10101
+0.665 1.84 0 0.10101
+0.75 0.75 0 0.10101
+0.75 0.92 0 0.10101
+0.75 1.125 0 0.10101
+0.75 1.21 0 0.10101
+0.75 1.38 0 0.10101
+0.75 1.84 0 0.10101
+0.92 0.92 0 0.10101
+0.92 1.125 0 0.10101
+0.92 1.21 0 0.10101
+0.92 1.38 0 0.10101
+0.92 1.84 0 0.10101
+1.125 1.125 0 0.10101
+1.125 1.21 0 0.10101
+1.125 1.38 0 0.10101
+1.125 1.84 0 0.10101
+1.21 1.21 0 0.10101
+1.21 1.38 0 0.10101
+1.21 1.84 0 0.10101
+1.38 1.38 0 0.10101
+1.38 1.84 0 0.10101
+1.84 0 1.84 0.10101
+END DIST
+
+Metal 1 OVER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 OVER 0
+DIST count 12 width 0.17
+0.17 0.000497977 4.50051e-05 0.0505051
+0.34 0.000279412 4.50051e-05 0.0505051
+0.425 0.000232192 4.50051e-05 0.0505051
+0.51 0.000199448 4.50051e-05 0.0505051
+0.595 0.000175236 4.50051e-05 0.0505051
+0.68 0.000156519 4.50051e-05 0.0505051
+0.765 0.000141568 4.50051e-05 0.0505051
+0.85 0.000129322 4.50051e-05 0.0505051
+1.02 0.000110405 4.50051e-05 0.0505051
+1.36 8.56497e-05 4.50051e-05 0.0505051
+1.7 3.92157e-05 4.50051e-05 0.0505051
+2.04 0 4.50051e-05 0.0505051
+END DIST
+
+Metal 1 UNDER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 UNDER 2
+DIST count 12 width 0.17
+0.17 0.000497977 0.00016261 0.0505051
+0.34 0.000279412 0.00016261 0.0505051
+0.425 0.000232192 0.00016261 0.0505051
+0.51 0.000199448 0.00016261 0.0505051
+0.595 0.000175236 0.00016261 0.0505051
+0.68 0.000156519 0.00016261 0.0505051
+0.765 0.000141568 0.00016261 0.0505051
+0.85 0.000129322 0.00016261 0.0505051
+1.02 0.000110405 0.00016261 0.0505051
+1.36 8.56497e-05 0.00016261 0.0505051
+1.7 3.92157e-05 0.00016261 0.0505051
+2.04 0 0.00016261 0.0505051
+END DIST
+
+Metal 1 UNDER 3
+DIST count 12 width 0.17
+0.17 0.000497977 0.000107615 0.0505051
+0.34 0.000279412 0.000107615 0.0505051
+0.425 0.000232192 0.000107615 0.0505051
+0.51 0.000199448 0.000107615 0.0505051
+0.595 0.000175236 0.000107615 0.0505051
+0.68 0.000156519 0.000107615 0.0505051
+0.765 0.000141568 0.000107615 0.0505051
+0.85 0.000129322 0.000107615 0.0505051
+1.02 0.000110405 0.000107615 0.0505051
+1.36 8.56497e-05 0.000107615 0.0505051
+1.7 3.92157e-05 0.000107615 0.0505051
+2.04 0 0.000107615 0.0505051
+END DIST
+
+Metal 1 UNDER 4
+DIST count 12 width 0.17
+0.17 0.000497977 8.27744e-05 0.0505051
+0.34 0.000279412 8.27744e-05 0.0505051
+0.425 0.000232192 8.27744e-05 0.0505051
+0.51 0.000199448 8.27744e-05 0.0505051
+0.595 0.000175236 8.27744e-05 0.0505051
+0.68 0.000156519 8.27744e-05 0.0505051
+0.765 0.000141568 8.27744e-05 0.0505051
+0.85 0.000129322 8.27744e-05 0.0505051
+1.02 0.000110405 8.27744e-05 0.0505051
+1.36 8.56497e-05 8.27744e-05 0.0505051
+1.7 3.92157e-05 8.27744e-05 0.0505051
+2.04 0 8.27744e-05 0.0505051
+END DIST
+
+Metal 1 UNDER 5
+DIST count 12 width 0.17
+0.17 0.000497977 7.58113e-05 0.0505051
+0.34 0.000279412 7.58113e-05 0.0505051
+0.425 0.000232192 7.58113e-05 0.0505051
+0.51 0.000199448 7.58113e-05 0.0505051
+0.595 0.000175236 7.58113e-05 0.0505051
+0.68 0.000156519 7.58113e-05 0.0505051
+0.765 0.000141568 7.58113e-05 0.0505051
+0.85 0.000129322 7.58113e-05 0.0505051
+1.02 0.000110405 7.58113e-05 0.0505051
+1.36 8.56497e-05 7.58113e-05 0.0505051
+1.7 3.92157e-05 7.58113e-05 0.0505051
+2.04 0 7.58113e-05 0.0505051
+END DIST
+
+Metal 1 UNDER 6
+DIST count 12 width 0.17
+0.17 0.000497977 5.72998e-05 0.0505051
+0.34 0.000279412 5.72998e-05 0.0505051
+0.425 0.000232192 5.72998e-05 0.0505051
+0.51 0.000199448 5.72998e-05 0.0505051
+0.595 0.000175236 5.72998e-05 0.0505051
+0.68 0.000156519 5.72998e-05 0.0505051
+0.765 0.000141568 5.72998e-05 0.0505051
+0.85 0.000129322 5.72998e-05 0.0505051
+1.02 0.000110405 5.72998e-05 0.0505051
+1.36 8.56497e-05 5.72998e-05 0.0505051
+1.7 3.92157e-05 5.72998e-05 0.0505051
+2.04 0 5.72998e-05 0.0505051
+END DIST
+
+Metal 1 DIAGUNDER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 DIAGUNDER 2
+DIST count 13 width 0.17
+0 0 7.57172e-05 0.0505051
+0.17 0 0 0.0505051
+0.34 0 0 0.0505051
+0.425 0 0 0.0505051
+0.51 0 0 0.0505051
+0.595 0 0 0.0505051
+0.68 0 0 0.0505051
+0.765 0 0 0.0505051
+0.85 0 0 0.0505051
+1.02 0 0 0.0505051
+1.36 0 0 0.0505051
+1.7 0 0 0.0505051
+2.04 0 0 0.0505051
+END DIST
+
+Metal 1 DIAGUNDER 3
+DIST count 13 width 0.17
+0 0 3.94545e-05 0.0505051
+0.17 0 0 0.0505051
+0.34 0 0 0.0505051
+0.425 0 0 0.0505051
+0.51 0 0 0.0505051
+0.595 0 0 0.0505051
+0.68 0 0 0.0505051
+0.765 0 0 0.0505051
+0.85 0 0 0.0505051
+1.02 0 0 0.0505051
+1.36 0 0 0.0505051
+1.7 0 0 0.0505051
+2.04 0 0 0.0505051
+END DIST
+
+Metal 1 DIAGUNDER 4
+DIST count 13 width 0.17
+0 0 1.62222e-05 0.0505051
+0.17 0 0 0.0505051
+0.34 0 0 0.0505051
+0.425 0 0 0.0505051
+0.51 0 0 0.0505051
+0.595 0 0 0.0505051
+0.68 0 0 0.0505051
+0.765 0 0 0.0505051
+0.85 0 0 0.0505051
+1.02 0 0 0.0505051
+1.36 0 0 0.0505051
+1.7 0 0 0.0505051
+2.04 0 0 0.0505051
+END DIST
+
+Metal 1 DIAGUNDER 5
+DIST count 13 width 0.17
+0 0 1.09798e-05 0.0505051
+0.17 0 0 0.0505051
+0.34 0 0 0.0505051
+0.425 0 0 0.0505051
+0.51 0 0 0.0505051
+0.595 0 0 0.0505051
+0.68 0 0 0.0505051
+0.765 0 0 0.0505051
+0.85 0 0 0.0505051
+1.02 0 0 0.0505051
+1.36 0 0 0.0505051
+1.7 0 0 0.0505051
+2.04 0 0 0.0505051
+END DIST
+
+Metal 1 DIAGUNDER 6
+DIST count 0 width 0.17
+END DIST
+
+Metal 2 RESOVER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.00104618
+0 0.2 0 0.00104618
+0 0.34 0 0.00104618
+0 0.47 0 0.00104618
+0 0.54 0 0.00104618
+0 0.68 0 0.00104618
+0 0.81 0 0.00104618
+0 0.88 0 0.00104618
+0 1.02 0 0.00104618
+0 1.36 0 0.00104618
+0.2 0.2 0 0.00104618
+0.2 0.34 0 0.00104618
+0.2 0.47 0 0.00104618
+0.2 0.54 0 0.00104618
+0.2 0.68 0 0.00104618
+0.2 0.81 0 0.00104618
+0.2 0.88 0 0.00104618
+0.2 1.02 0 0.00104618
+0.2 1.36 0 0.00104618
+0.34 0.34 0 0.00104618
+0.34 0.47 0 0.00104618
+0.34 0.54 0 0.00104618
+0.34 0.68 0 0.00104618
+0.34 0.81 0 0.00104618
+0.34 0.88 0 0.00104618
+0.34 1.02 0 0.00104618
+0.34 1.36 0 0.00104618
+0.47 0.47 0 0.00104618
+0.47 0.54 0 0.00104618
+0.47 0.68 0 0.00104618
+0.47 0.81 0 0.00104618
+0.47 0.88 0 0.00104618
+0.47 1.02 0 0.00104618
+0.47 1.36 0 0.00104618
+0.54 0.54 0 0.00104618
+0.54 0.68 0 0.00104618
+0.54 0.81 0 0.00104618
+0.54 0.88 0 0.00104618
+0.54 1.02 0 0.00104618
+0.54 1.36 0 0.00104618
+0.68 0.68 0 0.00104618
+0.68 0.81 0 0.00104618
+0.68 0.88 0 0.00104618
+0.68 1.02 0 0.00104618
+0.68 1.36 0 0.00104618
+0.81 0.81 0 0.00104618
+0.81 0.88 0 0.00104618
+0.81 1.02 0 0.00104618
+0.81 1.36 0 0.00104618
+0.88 0.88 0 0.00104618
+0.88 1.02 0 0.00104618
+0.88 1.36 0 0.00104618
+1.02 1.02 0 0.00104618
+1.02 1.36 0 0.00104618
+1.36 0 1.36 0.00104618
+END DIST
+
+Metal 2 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 2 OVER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 OVER 0
+DIST count 12 width 0.14
+0.14 0.000838745 4.36667e-05 0.000523088
+0.28 0.000471303 4.36667e-05 0.000523088
+0.35 0.000391492 4.36667e-05 0.000523088
+0.42 0.000336067 4.36667e-05 0.000523088
+0.49 0.000295057 4.36667e-05 0.000523088
+0.56 0.000263348 4.36667e-05 0.000523088
+0.63 0.000238021 4.36667e-05 0.000523088
+0.7 0.000217283 4.36667e-05 0.000523088
+0.84 0.000185267 4.36667e-05 0.000523088
+1.12 0.000143435 4.36667e-05 0.000523088
+1.4 0.000117182 4.36667e-05 0.000523088
+1.68 0 9.77792e-05 0.000523088
+END DIST
+
+Metal 2 OVER 1
+DIST count 12 width 0.14
+0.14 0.000838745 0.000119272 0.000523088
+0.28 0.000471303 0.000119272 0.000523088
+0.35 0.000391492 0.000119272 0.000523088
+0.42 0.000336067 0.000119272 0.000523088
+0.49 0.000295057 0.000119272 0.000523088
+0.56 0.000263348 0.000119272 0.000523088
+0.63 0.000238021 0.000119272 0.000523088
+0.7 0.000217283 0.000119272 0.000523088
+0.84 0.000185267 0.000119272 0.000523088
+1.12 0.000143435 0.000119272 0.000523088
+1.4 0.000117182 0.000119272 0.000523088
+1.68 0 0.000173385 0.000523088
+END DIST
+
+Metal 2 UNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 UNDER 3
+DIST count 12 width 0.14
+0.14 0.000838745 0.000104211 0.000523088
+0.28 0.000471303 0.000104211 0.000523088
+0.35 0.000391492 0.000104211 0.000523088
+0.42 0.000336067 0.000104211 0.000523088
+0.49 0.000295057 0.000104211 0.000523088
+0.56 0.000263348 0.000104211 0.000523088
+0.63 0.000238021 0.000104211 0.000523088
+0.7 0.000217283 0.000104211 0.000523088
+0.84 0.000185267 0.000104211 0.000523088
+1.12 0.000143435 0.000104211 0.000523088
+1.4 0.000117182 0.000104211 0.000523088
+1.68 0 0.000158323 0.000523088
+END DIST
+
+Metal 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000838745 8.64374e-05 0.000523088
+0.28 0.000471303 8.64374e-05 0.000523088
+0.35 0.000391492 8.64374e-05 0.000523088
+0.42 0.000336067 8.64374e-05 0.000523088
+0.49 0.000295057 8.64374e-05 0.000523088
+0.56 0.000263348 8.64374e-05 0.000523088
+0.63 0.000238021 8.64374e-05 0.000523088
+0.7 0.000217283 8.64374e-05 0.000523088
+0.84 0.000185267 8.64374e-05 0.000523088
+1.12 0.000143435 8.64374e-05 0.000523088
+1.4 0.000117182 8.64374e-05 0.000523088
+1.68 0 0.00014055 0.000523088
+END DIST
+
+Metal 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000838745 7.71644e-05 0.000523088
+0.28 0.000471303 7.71644e-05 0.000523088
+0.35 0.000391492 7.71644e-05 0.000523088
+0.42 0.000336067 7.71644e-05 0.000523088
+0.49 0.000295057 7.71644e-05 0.000523088
+0.56 0.000263348 7.71644e-05 0.000523088
+0.63 0.000238021 7.71644e-05 0.000523088
+0.7 0.000217283 7.71644e-05 0.000523088
+0.84 0.000185267 7.71644e-05 0.000523088
+1.12 0.000143435 7.71644e-05 0.000523088
+1.4 0.000117182 7.71644e-05 0.000523088
+1.68 0 0.000131277 0.000523088
+END DIST
+
+Metal 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000838745 5.98756e-05 0.000523088
+0.28 0.000471303 5.98756e-05 0.000523088
+0.35 0.000391492 5.98756e-05 0.000523088
+0.42 0.000336067 5.98756e-05 0.000523088
+0.49 0.000295057 5.98756e-05 0.000523088
+0.56 0.000263348 5.98756e-05 0.000523088
+0.63 0.000238021 5.98756e-05 0.000523088
+0.7 0.000217283 5.98756e-05 0.000523088
+0.84 0.000185267 5.98756e-05 0.000523088
+1.12 0.000143435 5.98756e-05 0.000523088
+1.4 0.000117182 5.98756e-05 0.000523088
+1.68 0 0.000113988 0.000523088
+END DIST
+
+Metal 2 DIAGUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 DIAGUNDER 3
+DIST count 13 width 0.14
+0 0 9.05051e-06 0.000523088
+0.14 0 0 0.000523088
+0.28 0 0 0.000523088
+0.35 0 0 0.000523088
+0.42 0 0 0.000523088
+0.49 0 0 0.000523088
+0.56 0 0 0.000523088
+0.63 0 0 0.000523088
+0.7 0 0 0.000523088
+0.84 0 0 0.000523088
+1.12 0 0 0.000523088
+1.4 0 0 0.000523088
+1.68 0 0 0.000523088
+END DIST
+
+Metal 2 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 2.50303e-05 0.000523088
+0.14 0 0 0.000523088
+0.28 0 0 0.000523088
+0.35 0 0 0.000523088
+0.42 0 0 0.000523088
+0.49 0 0 0.000523088
+0.56 0 0 0.000523088
+0.63 0 0 0.000523088
+0.7 0 0 0.000523088
+0.84 0 0 0.000523088
+1.12 0 0 0.000523088
+1.4 0 0 0.000523088
+1.68 0 0 0.000523088
+END DIST
+
+Metal 2 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 1.69899e-05 0.000523088
+0.14 0 0 0.000523088
+0.28 0 0 0.000523088
+0.35 0 0 0.000523088
+0.42 0 0 0.000523088
+0.49 0 0 0.000523088
+0.56 0 0 0.000523088
+0.63 0 0 0.000523088
+0.7 0 0 0.000523088
+0.84 0 0 0.000523088
+1.12 0 0 0.000523088
+1.4 0 0 0.000523088
+1.68 0 0 0.000523088
+END DIST
+
+Metal 2 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 1.23838e-05 0.000523088
+0.14 0 0 0.000523088
+0.28 0 0 0.000523088
+0.35 0 0 0.000523088
+0.42 0 0 0.000523088
+0.49 0 0 0.000523088
+0.56 0 0 0.000523088
+0.63 0 0 0.000523088
+0.7 0 0 0.000523088
+0.84 0 0 0.000523088
+1.12 0 0 0.000523088
+1.4 0 0 0.000523088
+1.68 0 0 0.000523088
+END DIST
+
+Metal 2 OVERUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 OVER 1 UNDER 3
+DIST count 12 width 0.14
+0.14 0.000838745 0.000179817 0.000523088
+0.28 0.000471303 0.000179817 0.000523088
+0.35 0.000391492 0.000179817 0.000523088
+0.42 0.000336067 0.000179817 0.000523088
+0.49 0.000295057 0.000179817 0.000523088
+0.56 0.000263348 0.000179817 0.000523088
+0.63 0.000238021 0.000179817 0.000523088
+0.7 0.000217283 0.000179817 0.000523088
+0.84 0.000185267 0.000179817 0.000523088
+1.12 0.000143435 0.000179817 0.000523088
+1.4 0.000117182 0.000179817 0.000523088
+1.68 0 0.000233929 0.000523088
+END DIST
+
+Metal 2 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000838745 0.000162043 0.000523088
+0.28 0.000471303 0.000162043 0.000523088
+0.35 0.000391492 0.000162043 0.000523088
+0.42 0.000336067 0.000162043 0.000523088
+0.49 0.000295057 0.000162043 0.000523088
+0.56 0.000263348 0.000162043 0.000523088
+0.63 0.000238021 0.000162043 0.000523088
+0.7 0.000217283 0.000162043 0.000523088
+0.84 0.000185267 0.000162043 0.000523088
+1.12 0.000143435 0.000162043 0.000523088
+1.4 0.000117182 0.000162043 0.000523088
+1.68 0 0.000216156 0.000523088
+END DIST
+
+Metal 2 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000838745 0.00015277 0.000523088
+0.28 0.000471303 0.00015277 0.000523088
+0.35 0.000391492 0.00015277 0.000523088
+0.42 0.000336067 0.00015277 0.000523088
+0.49 0.000295057 0.00015277 0.000523088
+0.56 0.000263348 0.00015277 0.000523088
+0.63 0.000238021 0.00015277 0.000523088
+0.7 0.000217283 0.00015277 0.000523088
+0.84 0.000185267 0.00015277 0.000523088
+1.12 0.000143435 0.00015277 0.000523088
+1.4 0.000117182 0.00015277 0.000523088
+1.68 0 0.000206883 0.000523088
+END DIST
+
+Metal 2 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000838745 0.000135481 0.000523088
+0.28 0.000471303 0.000135481 0.000523088
+0.35 0.000391492 0.000135481 0.000523088
+0.42 0.000336067 0.000135481 0.000523088
+0.49 0.000295057 0.000135481 0.000523088
+0.56 0.000263348 0.000135481 0.000523088
+0.63 0.000238021 0.000135481 0.000523088
+0.7 0.000217283 0.000135481 0.000523088
+0.84 0.000185267 0.000135481 0.000523088
+1.12 0.000143435 0.000135481 0.000523088
+1.4 0.000117182 0.000135481 0.000523088
+1.68 0 0.000189594 0.000523088
+END DIST
+
+Metal 3 RESOVER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.00104618
+0 0.32 0 0.00104618
+0 0.46 0 0.00104618
+0 0.71 0 0.00104618
+0 0.78 0 0.00104618
+0 0.92 0 0.00104618
+0 1.17 0 0.00104618
+0 1.24 0 0.00104618
+0 1.38 0 0.00104618
+0 1.84 0 0.00104618
+0.32 0.32 0 0.00104618
+0.32 0.46 0 0.00104618
+0.32 0.71 0 0.00104618
+0.32 0.78 0 0.00104618
+0.32 0.92 0 0.00104618
+0.32 1.17 0 0.00104618
+0.32 1.24 0 0.00104618
+0.32 1.38 0 0.00104618
+0.32 1.84 0 0.00104618
+0.46 0.46 0 0.00104618
+0.46 0.71 0 0.00104618
+0.46 0.78 0 0.00104618
+0.46 0.92 0 0.00104618
+0.46 1.17 0 0.00104618
+0.46 1.24 0 0.00104618
+0.46 1.38 0 0.00104618
+0.46 1.84 0 0.00104618
+0.71 0.71 0 0.00104618
+0.71 0.78 0 0.00104618
+0.71 0.92 0 0.00104618
+0.71 1.17 0 0.00104618
+0.71 1.24 0 0.00104618
+0.71 1.38 0 0.00104618
+0.71 1.84 0 0.00104618
+0.78 0.78 0 0.00104618
+0.78 0.92 0 0.00104618
+0.78 1.17 0 0.00104618
+0.78 1.24 0 0.00104618
+0.78 1.38 0 0.00104618
+0.78 1.84 0 0.00104618
+0.92 0.92 0 0.00104618
+0.92 1.17 0 0.00104618
+0.92 1.24 0 0.00104618
+0.92 1.38 0 0.00104618
+0.92 1.84 0 0.00104618
+1.17 1.17 0 0.00104618
+1.17 1.24 0 0.00104618
+1.17 1.38 0 0.00104618
+1.17 1.84 0 0.00104618
+1.24 1.24 0 0.00104618
+1.24 1.38 0 0.00104618
+1.24 1.84 0 0.00104618
+1.38 1.38 0 0.00104618
+1.38 1.84 0 0.00104618
+1.84 0 1.84 0.00104618
+END DIST
+
+Metal 3 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 RESOVER 2
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 OVER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 OVER 0
+DIST count 12 width 0.14
+0.14 0.000889851 3.47273e-05 0.000523088
+0.28 0.000497251 3.47273e-05 0.000523088
+0.35 0.000413304 3.47273e-05 0.000523088
+0.42 0.000355285 3.47273e-05 0.000523088
+0.49 0.000312469 3.47273e-05 0.000523088
+0.56 0.000279405 3.47273e-05 0.000523088
+0.63 0.000253003 3.47273e-05 0.000523088
+0.7 0.000231378 3.47273e-05 0.000523088
+0.84 0.00019795 3.47273e-05 0.000523088
+1.12 0.000154118 3.47273e-05 0.000523088
+1.4 0.000126457 3.47273e-05 0.000523088
+1.68 0 9.48524e-05 0.000523088
+END DIST
+
+Metal 3 OVER 1
+DIST count 12 width 0.14
+0.14 0.000889851 6.94309e-05 0.000523088
+0.28 0.000497251 6.94309e-05 0.000523088
+0.35 0.000413304 6.94309e-05 0.000523088
+0.42 0.000355285 6.94309e-05 0.000523088
+0.49 0.000312469 6.94309e-05 0.000523088
+0.56 0.000279405 6.94309e-05 0.000523088
+0.63 0.000253003 6.94309e-05 0.000523088
+0.7 0.000231378 6.94309e-05 0.000523088
+0.84 0.00019795 6.94309e-05 0.000523088
+1.12 0.000154118 6.94309e-05 0.000523088
+1.4 0.000126457 6.94309e-05 0.000523088
+1.68 0 0.000129556 0.000523088
+END DIST
+
+Metal 3 OVER 2
+DIST count 12 width 0.14
+0.14 0.000889851 7.76097e-05 0.000523088
+0.28 0.000497251 7.76097e-05 0.000523088
+0.35 0.000413304 7.76097e-05 0.000523088
+0.42 0.000355285 7.76097e-05 0.000523088
+0.49 0.000312469 7.76097e-05 0.000523088
+0.56 0.000279405 7.76097e-05 0.000523088
+0.63 0.000253003 7.76097e-05 0.000523088
+0.7 0.000231378 7.76097e-05 0.000523088
+0.84 0.00019795 7.76097e-05 0.000523088
+1.12 0.000154118 7.76097e-05 0.000523088
+1.4 0.000126457 7.76097e-05 0.000523088
+1.68 0 0.000137735 0.000523088
+END DIST
+
+Metal 3 UNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000889851 0.000118641 0.000523088
+0.28 0.000497251 0.000118641 0.000523088
+0.35 0.000413304 0.000118641 0.000523088
+0.42 0.000355285 0.000118641 0.000523088
+0.49 0.000312469 0.000118641 0.000523088
+0.56 0.000279405 0.000118641 0.000523088
+0.63 0.000253003 0.000118641 0.000523088
+0.7 0.000231378 0.000118641 0.000523088
+0.84 0.00019795 0.000118641 0.000523088
+1.12 0.000154118 0.000118641 0.000523088
+1.4 0.000126457 0.000118641 0.000523088
+1.68 0 0.000178766 0.000523088
+END DIST
+
+Metal 3 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000889851 8.02892e-05 0.000523088
+0.28 0.000497251 8.02892e-05 0.000523088
+0.35 0.000413304 8.02892e-05 0.000523088
+0.42 0.000355285 8.02892e-05 0.000523088
+0.49 0.000312469 8.02892e-05 0.000523088
+0.56 0.000279405 8.02892e-05 0.000523088
+0.63 0.000253003 8.02892e-05 0.000523088
+0.7 0.000231378 8.02892e-05 0.000523088
+0.84 0.00019795 8.02892e-05 0.000523088
+1.12 0.000154118 8.02892e-05 0.000523088
+1.4 0.000126457 8.02892e-05 0.000523088
+1.68 0 0.000140414 0.000523088
+END DIST
+
+Metal 3 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000889851 5.73169e-05 0.000523088
+0.28 0.000497251 5.73169e-05 0.000523088
+0.35 0.000413304 5.73169e-05 0.000523088
+0.42 0.000355285 5.73169e-05 0.000523088
+0.49 0.000312469 5.73169e-05 0.000523088
+0.56 0.000279405 5.73169e-05 0.000523088
+0.63 0.000253003 5.73169e-05 0.000523088
+0.7 0.000231378 5.73169e-05 0.000523088
+0.84 0.00019795 5.73169e-05 0.000523088
+1.12 0.000154118 5.73169e-05 0.000523088
+1.4 0.000126457 5.73169e-05 0.000523088
+1.68 0 0.000117442 0.000523088
+END DIST
+
+Metal 3 DIAGUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 5.66061e-05 0.000523088
+0.14 0 0 0.000523088
+0.28 0 0 0.000523088
+0.35 0 0 0.000523088
+0.42 0 0 0.000523088
+0.49 0 0 0.000523088
+0.56 0 0 0.000523088
+0.63 0 0 0.000523088
+0.7 0 0 0.000523088
+0.84 0 0 0.000523088
+1.12 0 0 0.000523088
+1.4 0 0 0.000523088
+1.68 0 0 0.000523088
+END DIST
+
+Metal 3 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 2.50505e-05 0.000523088
+0.14 0 0 0.000523088
+0.28 0 0 0.000523088
+0.35 0 0 0.000523088
+0.42 0 0 0.000523088
+0.49 0 0 0.000523088
+0.56 0 0 0.000523088
+0.63 0 0 0.000523088
+0.7 0 0 0.000523088
+0.84 0 0 0.000523088
+1.12 0 0 0.000523088
+1.4 0 0 0.000523088
+1.68 0 0 0.000523088
+END DIST
+
+Metal 3 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 1.77172e-05 0.000523088
+0.14 0 0 0.000523088
+0.28 0 0 0.000523088
+0.35 0 0 0.000523088
+0.42 0 0 0.000523088
+0.49 0 0 0.000523088
+0.56 0 0 0.000523088
+0.63 0 0 0.000523088
+0.7 0 0 0.000523088
+0.84 0 0 0.000523088
+1.12 0 0 0.000523088
+1.4 0 0 0.000523088
+1.68 0 0 0.000523088
+END DIST
+
+Metal 3 OVERUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000889851 0.000153344 0.000523088
+0.28 0.000497251 0.000153344 0.000523088
+0.35 0.000413304 0.000153344 0.000523088
+0.42 0.000355285 0.000153344 0.000523088
+0.49 0.000312469 0.000153344 0.000523088
+0.56 0.000279405 0.000153344 0.000523088
+0.63 0.000253003 0.000153344 0.000523088
+0.7 0.000231378 0.000153344 0.000523088
+0.84 0.00019795 0.000153344 0.000523088
+1.12 0.000154118 0.000153344 0.000523088
+1.4 0.000126457 0.000153344 0.000523088
+1.68 0 0.000213469 0.000523088
+END DIST
+
+Metal 3 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000889851 0.000114993 0.000523088
+0.28 0.000497251 0.000114993 0.000523088
+0.35 0.000413304 0.000114993 0.000523088
+0.42 0.000355285 0.000114993 0.000523088
+0.49 0.000312469 0.000114993 0.000523088
+0.56 0.000279405 0.000114993 0.000523088
+0.63 0.000253003 0.000114993 0.000523088
+0.7 0.000231378 0.000114993 0.000523088
+0.84 0.00019795 0.000114993 0.000523088
+1.12 0.000154118 0.000114993 0.000523088
+1.4 0.000126457 0.000114993 0.000523088
+1.68 0 0.000175118 0.000523088
+END DIST
+
+Metal 3 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000889851 9.20205e-05 0.000523088
+0.28 0.000497251 9.20205e-05 0.000523088
+0.35 0.000413304 9.20205e-05 0.000523088
+0.42 0.000355285 9.20205e-05 0.000523088
+0.49 0.000312469 9.20205e-05 0.000523088
+0.56 0.000279405 9.20205e-05 0.000523088
+0.63 0.000253003 9.20205e-05 0.000523088
+0.7 0.000231378 9.20205e-05 0.000523088
+0.84 0.00019795 9.20205e-05 0.000523088
+1.12 0.000154118 9.20205e-05 0.000523088
+1.4 0.000126457 9.20205e-05 0.000523088
+1.68 0 0.000152146 0.000523088
+END DIST
+
+Metal 3 OVER 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000889851 0.000161523 0.000523088
+0.28 0.000497251 0.000161523 0.000523088
+0.35 0.000413304 0.000161523 0.000523088
+0.42 0.000355285 0.000161523 0.000523088
+0.49 0.000312469 0.000161523 0.000523088
+0.56 0.000279405 0.000161523 0.000523088
+0.63 0.000253003 0.000161523 0.000523088
+0.7 0.000231378 0.000161523 0.000523088
+0.84 0.00019795 0.000161523 0.000523088
+1.12 0.000154118 0.000161523 0.000523088
+1.4 0.000126457 0.000161523 0.000523088
+1.68 0 0.000221648 0.000523088
+END DIST
+
+Metal 3 OVER 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000889851 0.000123172 0.000523088
+0.28 0.000497251 0.000123172 0.000523088
+0.35 0.000413304 0.000123172 0.000523088
+0.42 0.000355285 0.000123172 0.000523088
+0.49 0.000312469 0.000123172 0.000523088
+0.56 0.000279405 0.000123172 0.000523088
+0.63 0.000253003 0.000123172 0.000523088
+0.7 0.000231378 0.000123172 0.000523088
+0.84 0.00019795 0.000123172 0.000523088
+1.12 0.000154118 0.000123172 0.000523088
+1.4 0.000126457 0.000123172 0.000523088
+1.68 0 0.000183297 0.000523088
+END DIST
+
+Metal 3 OVER 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000889851 0.000100199 0.000523088
+0.28 0.000497251 0.000100199 0.000523088
+0.35 0.000413304 0.000100199 0.000523088
+0.42 0.000355285 0.000100199 0.000523088
+0.49 0.000312469 0.000100199 0.000523088
+0.56 0.000279405 0.000100199 0.000523088
+0.63 0.000253003 0.000100199 0.000523088
+0.7 0.000231378 0.000100199 0.000523088
+0.84 0.00019795 0.000100199 0.000523088
+1.12 0.000154118 0.000100199 0.000523088
+1.4 0.000126457 0.000100199 0.000523088
+1.68 0 0.000160324 0.000523088
+END DIST
+
+Metal 4 RESOVER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000188552
+0 0.38 0 0.000188552
+0 0.68 0 0.000188552
+0 0.91 0 0.000188552
+0 1.06 0 0.000188552
+0 1.36 0 0.000188552
+0 1.59 0 0.000188552
+0 1.74 0 0.000188552
+0 2.04 0 0.000188552
+0 2.72 0 0.000188552
+0.38 0.38 0 0.000188552
+0.38 0.68 0 0.000188552
+0.38 0.91 0 0.000188552
+0.38 1.06 0 0.000188552
+0.38 1.36 0 0.000188552
+0.38 1.59 0 0.000188552
+0.38 1.74 0 0.000188552
+0.38 2.04 0 0.000188552
+0.38 2.72 0 0.000188552
+0.68 0.68 0 0.000188552
+0.68 0.91 0 0.000188552
+0.68 1.06 0 0.000188552
+0.68 1.36 0 0.000188552
+0.68 1.59 0 0.000188552
+0.68 1.74 0 0.000188552
+0.68 2.04 0 0.000188552
+0.68 2.72 0 0.000188552
+0.91 0.91 0 0.000188552
+0.91 1.06 0 0.000188552
+0.91 1.36 0 0.000188552
+0.91 1.59 0 0.000188552
+0.91 1.74 0 0.000188552
+0.91 2.04 0 0.000188552
+0.91 2.72 0 0.000188552
+1.06 1.06 0 0.000188552
+1.06 1.36 0 0.000188552
+1.06 1.59 0 0.000188552
+1.06 1.74 0 0.000188552
+1.06 2.04 0 0.000188552
+1.06 2.72 0 0.000188552
+1.36 1.36 0 0.000188552
+1.36 1.59 0 0.000188552
+1.36 1.74 0 0.000188552
+1.36 2.04 0 0.000188552
+1.36 2.72 0 0.000188552
+1.59 1.59 0 0.000188552
+1.59 1.74 0 0.000188552
+1.59 2.04 0 0.000188552
+1.59 2.72 0 0.000188552
+1.74 1.74 0 0.000188552
+1.74 2.04 0 0.000188552
+1.74 2.72 0 0.000188552
+2.04 2.04 0 0.000188552
+2.04 2.72 0 0.000188552
+2.72 0 2.72 0.000188552
+END DIST
+
+Metal 4 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 OVER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 OVER 0
+DIST count 12 width 0.3
+0.3 0.000554112 3.94141e-05 9.42761e-05
+0.6 0.000311553 3.94141e-05 9.42761e-05
+0.75 0.000258699 3.94141e-05 9.42761e-05
+0.9 0.000221966 3.94141e-05 9.42761e-05
+1.05 0.00019478 3.94141e-05 9.42761e-05
+1.2 0.000173759 3.94141e-05 9.42761e-05
+1.35 9.42761e-05 3.94141e-05 9.42761e-05
+1.5 8.48485e-05 3.94141e-05 9.42761e-05
+1.8 7.07071e-05 3.94141e-05 9.42761e-05
+2.4 0 3.94141e-05 9.42761e-05
+3 0 3.94141e-05 9.42761e-05
+3.6 0 3.94141e-05 9.42761e-05
+END DIST
+
+Metal 4 OVER 1
+DIST count 12 width 0.3
+0.3 0.000554112 8.64165e-05 9.42761e-05
+0.6 0.000311553 8.64165e-05 9.42761e-05
+0.75 0.000258699 8.64165e-05 9.42761e-05
+0.9 0.000221966 8.64165e-05 9.42761e-05
+1.05 0.00019478 8.64165e-05 9.42761e-05
+1.2 0.000173759 8.64165e-05 9.42761e-05
+1.35 9.42761e-05 8.64165e-05 9.42761e-05
+1.5 8.48485e-05 8.64165e-05 9.42761e-05
+1.8 7.07071e-05 8.64165e-05 9.42761e-05
+2.4 0 8.64165e-05 9.42761e-05
+3 0 8.64165e-05 9.42761e-05
+3.6 0 8.64165e-05 9.42761e-05
+END DIST
+
+Metal 4 OVER 2
+DIST count 12 width 0.3
+0.3 0.000554112 0.000113273 9.42761e-05
+0.6 0.000311553 0.000113273 9.42761e-05
+0.75 0.000258699 0.000113273 9.42761e-05
+0.9 0.000221966 0.000113273 9.42761e-05
+1.05 0.00019478 0.000113273 9.42761e-05
+1.2 0.000173759 0.000113273 9.42761e-05
+1.35 9.42761e-05 0.000113273 9.42761e-05
+1.5 8.48485e-05 0.000113273 9.42761e-05
+1.8 7.07071e-05 0.000113273 9.42761e-05
+2.4 0 0.000113273 9.42761e-05
+3 0 0.000113273 9.42761e-05
+3.6 0 0.000113273 9.42761e-05
+END DIST
+
+Metal 4 OVER 3
+DIST count 12 width 0.3
+0.3 0.000554112 0.000199707 9.42761e-05
+0.6 0.000311553 0.000199707 9.42761e-05
+0.75 0.000258699 0.000199707 9.42761e-05
+0.9 0.000221966 0.000199707 9.42761e-05
+1.05 0.00019478 0.000199707 9.42761e-05
+1.2 0.000173759 0.000199707 9.42761e-05
+1.35 9.42761e-05 0.000199707 9.42761e-05
+1.5 8.48485e-05 0.000199707 9.42761e-05
+1.8 7.07071e-05 0.000199707 9.42761e-05
+2.4 0 0.000199707 9.42761e-05
+3 0 0.000199707 9.42761e-05
+3.6 0 0.000199707 9.42761e-05
+END DIST
+
+Metal 4 UNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.000168162 9.42761e-05
+0.6 0.000311553 0.000168162 9.42761e-05
+0.75 0.000258699 0.000168162 9.42761e-05
+0.9 0.000221966 0.000168162 9.42761e-05
+1.05 0.00019478 0.000168162 9.42761e-05
+1.2 0.000173759 0.000168162 9.42761e-05
+1.35 9.42761e-05 0.000168162 9.42761e-05
+1.5 8.48485e-05 0.000168162 9.42761e-05
+1.8 7.07071e-05 0.000168162 9.42761e-05
+2.4 0 0.000168162 9.42761e-05
+3 0 0.000168162 9.42761e-05
+3.6 0 0.000168162 9.42761e-05
+END DIST
+
+Metal 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 8.20418e-05 9.42761e-05
+0.6 0.000311553 8.20418e-05 9.42761e-05
+0.75 0.000258699 8.20418e-05 9.42761e-05
+0.9 0.000221966 8.20418e-05 9.42761e-05
+1.05 0.00019478 8.20418e-05 9.42761e-05
+1.2 0.000173759 8.20418e-05 9.42761e-05
+1.35 9.42761e-05 8.20418e-05 9.42761e-05
+1.5 8.48485e-05 8.20418e-05 9.42761e-05
+1.8 7.07071e-05 8.20418e-05 9.42761e-05
+2.4 0 8.20418e-05 9.42761e-05
+3 0 8.20418e-05 9.42761e-05
+3.6 0 8.20418e-05 9.42761e-05
+END DIST
+
+Metal 4 DIAGUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 DIAGUNDER 5
+DIST count 13 width 0.3
+0 0 2.54545e-05 9.42761e-05
+0.3 0 0 9.42761e-05
+0.6 0 0 9.42761e-05
+0.75 0 0 9.42761e-05
+0.9 0 0 9.42761e-05
+1.05 0 0 9.42761e-05
+1.2 0 0 9.42761e-05
+1.35 0 0 9.42761e-05
+1.5 0 0 9.42761e-05
+1.8 0 0 9.42761e-05
+2.4 0 0 9.42761e-05
+3 0 0 9.42761e-05
+3.6 0 0 9.42761e-05
+END DIST
+
+Metal 4 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 3.43434e-05 9.42761e-05
+0.3 0 0 9.42761e-05
+0.6 0 0 9.42761e-05
+0.75 0 0 9.42761e-05
+0.9 0 0 9.42761e-05
+1.05 0 0 9.42761e-05
+1.2 0 0 9.42761e-05
+1.35 0 0 9.42761e-05
+1.5 0 0 9.42761e-05
+1.8 0 0 9.42761e-05
+2.4 0 0 9.42761e-05
+3 0 0 9.42761e-05
+3.6 0 0 9.42761e-05
+END DIST
+
+Metal 4 OVERUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 OVER 1 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.000215164 9.42761e-05
+0.6 0.000311553 0.000215164 9.42761e-05
+0.75 0.000258699 0.000215164 9.42761e-05
+0.9 0.000221966 0.000215164 9.42761e-05
+1.05 0.00019478 0.000215164 9.42761e-05
+1.2 0.000173759 0.000215164 9.42761e-05
+1.35 9.42761e-05 0.000215164 9.42761e-05
+1.5 8.48485e-05 0.000215164 9.42761e-05
+1.8 7.07071e-05 0.000215164 9.42761e-05
+2.4 0 0.000215164 9.42761e-05
+3 0 0.000215164 9.42761e-05
+3.6 0 0.000215164 9.42761e-05
+END DIST
+
+Metal 4 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 0.000129044 9.42761e-05
+0.6 0.000311553 0.000129044 9.42761e-05
+0.75 0.000258699 0.000129044 9.42761e-05
+0.9 0.000221966 0.000129044 9.42761e-05
+1.05 0.00019478 0.000129044 9.42761e-05
+1.2 0.000173759 0.000129044 9.42761e-05
+1.35 9.42761e-05 0.000129044 9.42761e-05
+1.5 8.48485e-05 0.000129044 9.42761e-05
+1.8 7.07071e-05 0.000129044 9.42761e-05
+2.4 0 0.000129044 9.42761e-05
+3 0 0.000129044 9.42761e-05
+3.6 0 0.000129044 9.42761e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.00024202 9.42761e-05
+0.6 0.000311553 0.00024202 9.42761e-05
+0.75 0.000258699 0.00024202 9.42761e-05
+0.9 0.000221966 0.00024202 9.42761e-05
+1.05 0.00019478 0.00024202 9.42761e-05
+1.2 0.000173759 0.00024202 9.42761e-05
+1.35 9.42761e-05 0.00024202 9.42761e-05
+1.5 8.48485e-05 0.00024202 9.42761e-05
+1.8 7.07071e-05 0.00024202 9.42761e-05
+2.4 0 0.00024202 9.42761e-05
+3 0 0.00024202 9.42761e-05
+3.6 0 0.00024202 9.42761e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 0.0001559 9.42761e-05
+0.6 0.000311553 0.0001559 9.42761e-05
+0.75 0.000258699 0.0001559 9.42761e-05
+0.9 0.000221966 0.0001559 9.42761e-05
+1.05 0.00019478 0.0001559 9.42761e-05
+1.2 0.000173759 0.0001559 9.42761e-05
+1.35 9.42761e-05 0.0001559 9.42761e-05
+1.5 8.48485e-05 0.0001559 9.42761e-05
+1.8 7.07071e-05 0.0001559 9.42761e-05
+2.4 0 0.0001559 9.42761e-05
+3 0 0.0001559 9.42761e-05
+3.6 0 0.0001559 9.42761e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.000328455 9.42761e-05
+0.6 0.000311553 0.000328455 9.42761e-05
+0.75 0.000258699 0.000328455 9.42761e-05
+0.9 0.000221966 0.000328455 9.42761e-05
+1.05 0.00019478 0.000328455 9.42761e-05
+1.2 0.000173759 0.000328455 9.42761e-05
+1.35 9.42761e-05 0.000328455 9.42761e-05
+1.5 8.48485e-05 0.000328455 9.42761e-05
+1.8 7.07071e-05 0.000328455 9.42761e-05
+2.4 0 0.000328455 9.42761e-05
+3 0 0.000328455 9.42761e-05
+3.6 0 0.000328455 9.42761e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 0.000242335 9.42761e-05
+0.6 0.000311553 0.000242335 9.42761e-05
+0.75 0.000258699 0.000242335 9.42761e-05
+0.9 0.000221966 0.000242335 9.42761e-05
+1.05 0.00019478 0.000242335 9.42761e-05
+1.2 0.000173759 0.000242335 9.42761e-05
+1.35 9.42761e-05 0.000242335 9.42761e-05
+1.5 8.48485e-05 0.000242335 9.42761e-05
+1.8 7.07071e-05 0.000242335 9.42761e-05
+2.4 0 0.000242335 9.42761e-05
+3 0 0.000242335 9.42761e-05
+3.6 0 0.000242335 9.42761e-05
+END DIST
+
+Metal 5 RESOVER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000188552
+0 0.62 0 0.000188552
+0 0.92 0 0.000188552
+0 1.39 0 0.000188552
+0 1.54 0 0.000188552
+0 1.84 0 0.000188552
+0 2.31 0 0.000188552
+0 2.46 0 0.000188552
+0 2.76 0 0.000188552
+0 3.68 0 0.000188552
+0.62 0.62 0 0.000188552
+0.62 0.92 0 0.000188552
+0.62 1.39 0 0.000188552
+0.62 1.54 0 0.000188552
+0.62 1.84 0 0.000188552
+0.62 2.31 0 0.000188552
+0.62 2.46 0 0.000188552
+0.62 2.76 0 0.000188552
+0.62 3.68 0 0.000188552
+0.92 0.92 0 0.000188552
+0.92 1.39 0 0.000188552
+0.92 1.54 0 0.000188552
+0.92 1.84 0 0.000188552
+0.92 2.31 0 0.000188552
+0.92 2.46 0 0.000188552
+0.92 2.76 0 0.000188552
+0.92 3.68 0 0.000188552
+1.39 1.39 0 0.000188552
+1.39 1.54 0 0.000188552
+1.39 1.84 0 0.000188552
+1.39 2.31 0 0.000188552
+1.39 2.46 0 0.000188552
+1.39 2.76 0 0.000188552
+1.39 3.68 0 0.000188552
+1.54 1.54 0 0.000188552
+1.54 1.84 0 0.000188552
+1.54 2.31 0 0.000188552
+1.54 2.46 0 0.000188552
+1.54 2.76 0 0.000188552
+1.54 3.68 0 0.000188552
+1.84 1.84 0 0.000188552
+1.84 2.31 0 0.000188552
+1.84 2.46 0 0.000188552
+1.84 2.76 0 0.000188552
+1.84 3.68 0 0.000188552
+2.31 2.31 0 0.000188552
+2.31 2.46 0 0.000188552
+2.31 2.76 0 0.000188552
+2.31 3.68 0 0.000188552
+2.46 2.46 0 0.000188552
+2.46 2.76 0 0.000188552
+2.46 3.68 0 0.000188552
+2.76 2.76 0 0.000188552
+2.76 3.68 0 0.000188552
+3.68 0 3.68 0.000188552
+END DIST
+
+Metal 5 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 4
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 OVER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 OVER 0
+DIST count 12 width 0.3
+0.3 0.000562124 3.5899e-05 9.42761e-05
+0.6 0.000314638 3.5899e-05 9.42761e-05
+0.75 0.000261521 3.5899e-05 9.42761e-05
+0.9 0.000224763 3.5899e-05 9.42761e-05
+1.05 0.000197615 3.5899e-05 9.42761e-05
+1.2 0.000112795 3.5899e-05 9.42761e-05
+1.35 0.000100262 3.5899e-05 9.42761e-05
+1.5 9.02357e-05 3.5899e-05 9.42761e-05
+1.8 7.51966e-05 3.5899e-05 9.42761e-05
+2.4 0 3.5899e-05 9.42761e-05
+3 0 3.5899e-05 9.42761e-05
+3.6 0 3.5899e-05 9.42761e-05
+END DIST
+
+Metal 5 OVER 1
+DIST count 12 width 0.3
+0.3 0.000562124 7.20976e-05 9.42761e-05
+0.6 0.000314638 7.20976e-05 9.42761e-05
+0.75 0.000261521 7.20976e-05 9.42761e-05
+0.9 0.000224763 7.20976e-05 9.42761e-05
+1.05 0.000197615 7.20976e-05 9.42761e-05
+1.2 0.000112795 7.20976e-05 9.42761e-05
+1.35 0.000100262 7.20976e-05 9.42761e-05
+1.5 9.02357e-05 7.20976e-05 9.42761e-05
+1.8 7.51966e-05 7.20976e-05 9.42761e-05
+2.4 0 7.20976e-05 9.42761e-05
+3 0 7.20976e-05 9.42761e-05
+3.6 0 7.20976e-05 9.42761e-05
+END DIST
+
+Metal 5 OVER 2
+DIST count 12 width 0.3
+0.3 0.000562124 9.13533e-05 9.42761e-05
+0.6 0.000314638 9.13533e-05 9.42761e-05
+0.75 0.000261521 9.13533e-05 9.42761e-05
+0.9 0.000224763 9.13533e-05 9.42761e-05
+1.05 0.000197615 9.13533e-05 9.42761e-05
+1.2 0.000112795 9.13533e-05 9.42761e-05
+1.35 0.000100262 9.13533e-05 9.42761e-05
+1.5 9.02357e-05 9.13533e-05 9.42761e-05
+1.8 7.51966e-05 9.13533e-05 9.42761e-05
+2.4 0 9.13533e-05 9.42761e-05
+3 0 9.13533e-05 9.42761e-05
+3.6 0 9.13533e-05 9.42761e-05
+END DIST
+
+Metal 5 OVER 3
+DIST count 12 width 0.3
+0.3 0.000562124 0.0001158 9.42761e-05
+0.6 0.000314638 0.0001158 9.42761e-05
+0.75 0.000261521 0.0001158 9.42761e-05
+0.9 0.000224763 0.0001158 9.42761e-05
+1.05 0.000197615 0.0001158 9.42761e-05
+1.2 0.000112795 0.0001158 9.42761e-05
+1.35 0.000100262 0.0001158 9.42761e-05
+1.5 9.02357e-05 0.0001158 9.42761e-05
+1.8 7.51966e-05 0.0001158 9.42761e-05
+2.4 0 0.0001158 9.42761e-05
+3 0 0.0001158 9.42761e-05
+3.6 0 0.0001158 9.42761e-05
+END DIST
+
+Metal 5 OVER 4
+DIST count 12 width 0.3
+0.3 0.000562124 0.000146 9.42761e-05
+0.6 0.000314638 0.000146 9.42761e-05
+0.75 0.000261521 0.000146 9.42761e-05
+0.9 0.000224763 0.000146 9.42761e-05
+1.05 0.000197615 0.000146 9.42761e-05
+1.2 0.000112795 0.000146 9.42761e-05
+1.35 0.000100262 0.000146 9.42761e-05
+1.5 9.02357e-05 0.000146 9.42761e-05
+1.8 7.51966e-05 0.000146 9.42761e-05
+2.4 0 0.000146 9.42761e-05
+3 0 0.000146 9.42761e-05
+3.6 0 0.000146 9.42761e-05
+END DIST
+
+Metal 5 UNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.000110389 9.42761e-05
+0.6 0.000314638 0.000110389 9.42761e-05
+0.75 0.000261521 0.000110389 9.42761e-05
+0.9 0.000224763 0.000110389 9.42761e-05
+1.05 0.000197615 0.000110389 9.42761e-05
+1.2 0.000112795 0.000110389 9.42761e-05
+1.35 0.000100262 0.000110389 9.42761e-05
+1.5 9.02357e-05 0.000110389 9.42761e-05
+1.8 7.51966e-05 0.000110389 9.42761e-05
+2.4 0 0.000110389 9.42761e-05
+3 0 0.000110389 9.42761e-05
+3.6 0 0.000110389 9.42761e-05
+END DIST
+
+Metal 5 DIAGUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 6.80808e-05 9.42761e-05
+0.3 0 0 9.42761e-05
+0.6 0 0 9.42761e-05
+0.75 0 0 9.42761e-05
+0.9 0 0 9.42761e-05
+1.05 0 0 9.42761e-05
+1.2 0 0 9.42761e-05
+1.35 0 0 9.42761e-05
+1.5 0 0 9.42761e-05
+1.8 0 0 9.42761e-05
+2.4 0 0 9.42761e-05
+3 0 0 9.42761e-05
+3.6 0 0 9.42761e-05
+END DIST
+
+Metal 5 OVERUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.000146588 9.42761e-05
+0.6 0.000314638 0.000146588 9.42761e-05
+0.75 0.000261521 0.000146588 9.42761e-05
+0.9 0.000224763 0.000146588 9.42761e-05
+1.05 0.000197615 0.000146588 9.42761e-05
+1.2 0.000112795 0.000146588 9.42761e-05
+1.35 0.000100262 0.000146588 9.42761e-05
+1.5 9.02357e-05 0.000146588 9.42761e-05
+1.8 7.51966e-05 0.000146588 9.42761e-05
+2.4 0 0.000146588 9.42761e-05
+3 0 0.000146588 9.42761e-05
+3.6 0 0.000146588 9.42761e-05
+END DIST
+
+Metal 5 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.000165843 9.42761e-05
+0.6 0.000314638 0.000165843 9.42761e-05
+0.75 0.000261521 0.000165843 9.42761e-05
+0.9 0.000224763 0.000165843 9.42761e-05
+1.05 0.000197615 0.000165843 9.42761e-05
+1.2 0.000112795 0.000165843 9.42761e-05
+1.35 0.000100262 0.000165843 9.42761e-05
+1.5 9.02357e-05 0.000165843 9.42761e-05
+1.8 7.51966e-05 0.000165843 9.42761e-05
+2.4 0 0.000165843 9.42761e-05
+3 0 0.000165843 9.42761e-05
+3.6 0 0.000165843 9.42761e-05
+END DIST
+
+Metal 5 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.00019029 9.42761e-05
+0.6 0.000314638 0.00019029 9.42761e-05
+0.75 0.000261521 0.00019029 9.42761e-05
+0.9 0.000224763 0.00019029 9.42761e-05
+1.05 0.000197615 0.00019029 9.42761e-05
+1.2 0.000112795 0.00019029 9.42761e-05
+1.35 0.000100262 0.00019029 9.42761e-05
+1.5 9.02357e-05 0.00019029 9.42761e-05
+1.8 7.51966e-05 0.00019029 9.42761e-05
+2.4 0 0.00019029 9.42761e-05
+3 0 0.00019029 9.42761e-05
+3.6 0 0.00019029 9.42761e-05
+END DIST
+
+Metal 5 OVER 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.00022049 9.42761e-05
+0.6 0.000314638 0.00022049 9.42761e-05
+0.75 0.000261521 0.00022049 9.42761e-05
+0.9 0.000224763 0.00022049 9.42761e-05
+1.05 0.000197615 0.00022049 9.42761e-05
+1.2 0.000112795 0.00022049 9.42761e-05
+1.35 0.000100262 0.00022049 9.42761e-05
+1.5 9.02357e-05 0.00022049 9.42761e-05
+1.8 7.51966e-05 0.00022049 9.42761e-05
+2.4 0 0.00022049 9.42761e-05
+3 0 0.00022049 9.42761e-05
+3.6 0 0.00022049 9.42761e-05
+END DIST
+
+Metal 6 RESOVER
+WIDTH Table 1 entries:  1.6
+
+Metal 6 RESOVER 0
+DIST count 55 width 1.6
+0 0 0 2.27273e-05
+0 1.8 0 2.27273e-05
+0 3.4 0 2.27273e-05
+0 4.4 0 2.27273e-05
+0 5.2 0 2.27273e-05
+0 6.8 0 2.27273e-05
+0 7.8 0 2.27273e-05
+0 8.6 0 2.27273e-05
+0 10.2 0 2.27273e-05
+0 13.6 0 2.27273e-05
+1.8 1.8 0 2.27273e-05
+1.8 3.4 0 2.27273e-05
+1.8 4.4 0 2.27273e-05
+1.8 5.2 0 2.27273e-05
+1.8 6.8 0 2.27273e-05
+1.8 7.8 0 2.27273e-05
+1.8 8.6 0 2.27273e-05
+1.8 10.2 0 2.27273e-05
+1.8 13.6 0 2.27273e-05
+3.4 3.4 0 2.27273e-05
+3.4 4.4 0 2.27273e-05
+3.4 5.2 0 2.27273e-05
+3.4 6.8 0 2.27273e-05
+3.4 7.8 0 2.27273e-05
+3.4 8.6 0 2.27273e-05
+3.4 10.2 0 2.27273e-05
+3.4 13.6 0 2.27273e-05
+4.4 4.4 0 2.27273e-05
+4.4 5.2 0 2.27273e-05
+4.4 6.8 0 2.27273e-05
+4.4 7.8 0 2.27273e-05
+4.4 8.6 0 2.27273e-05
+4.4 10.2 0 2.27273e-05
+4.4 13.6 0 2.27273e-05
+5.2 5.2 0 2.27273e-05
+5.2 6.8 0 2.27273e-05
+5.2 7.8 0 2.27273e-05
+5.2 8.6 0 2.27273e-05
+5.2 10.2 0 2.27273e-05
+5.2 13.6 0 2.27273e-05
+6.8 6.8 0 2.27273e-05
+6.8 7.8 0 2.27273e-05
+6.8 8.6 0 2.27273e-05
+6.8 10.2 0 2.27273e-05
+6.8 13.6 0 2.27273e-05
+7.8 7.8 0 2.27273e-05
+7.8 8.6 0 2.27273e-05
+7.8 10.2 0 2.27273e-05
+7.8 13.6 0 2.27273e-05
+8.6 8.6 0 2.27273e-05
+8.6 10.2 0 2.27273e-05
+8.6 13.6 0 2.27273e-05
+10.2 10.2 0 2.27273e-05
+10.2 13.6 0 2.27273e-05
+13.6 0 13.6 2.27273e-05
+END DIST
+
+Metal 6 RESOVER 1
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 2
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 3
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 4
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 5
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 OVER
+WIDTH Table 1 entries:  1.6
+
+Metal 6 OVER 0
+DIST count 12 width 1.6
+1.6 0.000160354 4.15758e-05 1.13636e-05
+3.2 0 4.15758e-05 1.13636e-05
+4 0 4.15758e-05 1.13636e-05
+4.8 0 4.15758e-05 1.13636e-05
+5.6 0 4.15758e-05 1.13636e-05
+6.4 0 4.15758e-05 1.13636e-05
+7.2 0 4.15758e-05 1.13636e-05
+8 0 4.15758e-05 1.13636e-05
+9.6 0 4.15758e-05 1.13636e-05
+12.8 0 4.15758e-05 1.13636e-05
+16 0 4.15758e-05 1.13636e-05
+19.2 0 4.15758e-05 1.13636e-05
+END DIST
+
+Metal 6 OVER 1
+DIST count 12 width 1.6
+1.6 0.000160354 0.000133386 1.13636e-05
+3.2 0 0.000133386 1.13636e-05
+4 0 0.000133386 1.13636e-05
+4.8 0 0.000133386 1.13636e-05
+5.6 0 0.000133386 1.13636e-05
+6.4 0 0.000133386 1.13636e-05
+7.2 0 0.000133386 1.13636e-05
+8 0 0.000133386 1.13636e-05
+9.6 0 0.000133386 1.13636e-05
+12.8 0 0.000133386 1.13636e-05
+16 0 0.000133386 1.13636e-05
+19.2 0 0.000133386 1.13636e-05
+END DIST
+
+Metal 6 OVER 2
+DIST count 12 width 1.6
+1.6 0.000160354 0.000195882 1.13636e-05
+3.2 0 0.000195882 1.13636e-05
+4 0 0.000195882 1.13636e-05
+4.8 0 0.000195882 1.13636e-05
+5.6 0 0.000195882 1.13636e-05
+6.4 0 0.000195882 1.13636e-05
+7.2 0 0.000195882 1.13636e-05
+8 0 0.000195882 1.13636e-05
+9.6 0 0.000195882 1.13636e-05
+12.8 0 0.000195882 1.13636e-05
+16 0 0.000195882 1.13636e-05
+19.2 0 0.000195882 1.13636e-05
+END DIST
+
+Metal 6 OVER 3
+DIST count 12 width 1.6
+1.6 0.000160354 0.000261351 1.13636e-05
+3.2 0 0.000261351 1.13636e-05
+4 0 0.000261351 1.13636e-05
+4.8 0 0.000261351 1.13636e-05
+5.6 0 0.000261351 1.13636e-05
+6.4 0 0.000261351 1.13636e-05
+7.2 0 0.000261351 1.13636e-05
+8 0 0.000261351 1.13636e-05
+9.6 0 0.000261351 1.13636e-05
+12.8 0 0.000261351 1.13636e-05
+16 0 0.000261351 1.13636e-05
+19.2 0 0.000261351 1.13636e-05
+END DIST
+
+Metal 6 OVER 4
+DIST count 12 width 1.6
+1.6 0.000160354 0.000242788 1.13636e-05
+3.2 0 0.000242788 1.13636e-05
+4 0 0.000242788 1.13636e-05
+4.8 0 0.000242788 1.13636e-05
+5.6 0 0.000242788 1.13636e-05
+6.4 0 0.000242788 1.13636e-05
+7.2 0 0.000242788 1.13636e-05
+8 0 0.000242788 1.13636e-05
+9.6 0 0.000242788 1.13636e-05
+12.8 0 0.000242788 1.13636e-05
+16 0 0.000242788 1.13636e-05
+19.2 0 0.000242788 1.13636e-05
+END DIST
+
+Metal 6 OVER 5
+DIST count 12 width 1.6
+1.6 0.000160354 0.000413455 1.13636e-05
+3.2 0 0.000413455 1.13636e-05
+4 0 0.000413455 1.13636e-05
+4.8 0 0.000413455 1.13636e-05
+5.6 0 0.000413455 1.13636e-05
+6.4 0 0.000413455 1.13636e-05
+7.2 0 0.000413455 1.13636e-05
+8 0 0.000413455 1.13636e-05
+9.6 0 0.000413455 1.13636e-05
+12.8 0 0.000413455 1.13636e-05
+16 0 0.000413455 1.13636e-05
+19.2 0 0.000413455 1.13636e-05
+END DIST
+
+Metal 6 UNDER
+WIDTH Table 0 entries: 
+
+Metal 6 DIAGUNDER
+WIDTH Table 0 entries: 
+END DensityModel 0
diff --git a/sky130/openlane/rules.openrcx.sky130B.min.magic b/sky130/openlane/rules.openrcx.sky130B.min.magic
new file mode 100644
index 0000000..02a1f42
--- /dev/null
+++ b/sky130/openlane/rules.openrcx.sky130B.min.magic
@@ -0,0 +1,1645 @@
+Extraction Rules for OpenRCX
+
+DIAGMODEL ON
+
+LayerCount 6
+DensityRate 1  0
+
+DensityModel 0
+
+Metal 1 RESOVER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 RESOVER 0
+DIST count 55 width 0.17
+0 0 0 0.0623886
+0 0.29 0 0.0623886
+0 0.46 0 0.0623886
+0 0.665 0 0.0623886
+0 0.75 0 0.0623886
+0 0.92 0 0.0623886
+0 1.125 0 0.0623886
+0 1.21 0 0.0623886
+0 1.38 0 0.0623886
+0 1.84 0 0.0623886
+0.29 0.29 0 0.0623886
+0.29 0.46 0 0.0623886
+0.29 0.665 0 0.0623886
+0.29 0.75 0 0.0623886
+0.29 0.92 0 0.0623886
+0.29 1.125 0 0.0623886
+0.29 1.21 0 0.0623886
+0.29 1.38 0 0.0623886
+0.29 1.84 0 0.0623886
+0.46 0.46 0 0.0623886
+0.46 0.665 0 0.0623886
+0.46 0.75 0 0.0623886
+0.46 0.92 0 0.0623886
+0.46 1.125 0 0.0623886
+0.46 1.21 0 0.0623886
+0.46 1.38 0 0.0623886
+0.46 1.84 0 0.0623886
+0.665 0.665 0 0.0623886
+0.665 0.75 0 0.0623886
+0.665 0.92 0 0.0623886
+0.665 1.125 0 0.0623886
+0.665 1.21 0 0.0623886
+0.665 1.38 0 0.0623886
+0.665 1.84 0 0.0623886
+0.75 0.75 0 0.0623886
+0.75 0.92 0 0.0623886
+0.75 1.125 0 0.0623886
+0.75 1.21 0 0.0623886
+0.75 1.38 0 0.0623886
+0.75 1.84 0 0.0623886
+0.92 0.92 0 0.0623886
+0.92 1.125 0 0.0623886
+0.92 1.21 0 0.0623886
+0.92 1.38 0 0.0623886
+0.92 1.84 0 0.0623886
+1.125 1.125 0 0.0623886
+1.125 1.21 0 0.0623886
+1.125 1.38 0 0.0623886
+1.125 1.84 0 0.0623886
+1.21 1.21 0 0.0623886
+1.21 1.38 0 0.0623886
+1.21 1.84 0 0.0623886
+1.38 1.38 0 0.0623886
+1.38 1.84 0 0.0623886
+1.84 0 1.84 0.0623886
+END DIST
+
+Metal 1 OVER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 OVER 0
+DIST count 12 width 0.17
+0.17 0.000497977 4.50051e-05 0.0311943
+0.34 0.000279412 4.50051e-05 0.0311943
+0.425 0.000232192 4.50051e-05 0.0311943
+0.51 0.000199448 4.50051e-05 0.0311943
+0.595 0.000175236 4.50051e-05 0.0311943
+0.68 0.000156519 4.50051e-05 0.0311943
+0.765 0.000141568 4.50051e-05 0.0311943
+0.85 0.000129322 4.50051e-05 0.0311943
+1.02 0.000110405 4.50051e-05 0.0311943
+1.36 8.56497e-05 4.50051e-05 0.0311943
+1.7 3.92157e-05 4.50051e-05 0.0311943
+2.04 0 4.50051e-05 0.0311943
+END DIST
+
+Metal 1 UNDER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 UNDER 2
+DIST count 12 width 0.17
+0.17 0.000497977 0.00016261 0.0311943
+0.34 0.000279412 0.00016261 0.0311943
+0.425 0.000232192 0.00016261 0.0311943
+0.51 0.000199448 0.00016261 0.0311943
+0.595 0.000175236 0.00016261 0.0311943
+0.68 0.000156519 0.00016261 0.0311943
+0.765 0.000141568 0.00016261 0.0311943
+0.85 0.000129322 0.00016261 0.0311943
+1.02 0.000110405 0.00016261 0.0311943
+1.36 8.56497e-05 0.00016261 0.0311943
+1.7 3.92157e-05 0.00016261 0.0311943
+2.04 0 0.00016261 0.0311943
+END DIST
+
+Metal 1 UNDER 3
+DIST count 12 width 0.17
+0.17 0.000497977 0.000107615 0.0311943
+0.34 0.000279412 0.000107615 0.0311943
+0.425 0.000232192 0.000107615 0.0311943
+0.51 0.000199448 0.000107615 0.0311943
+0.595 0.000175236 0.000107615 0.0311943
+0.68 0.000156519 0.000107615 0.0311943
+0.765 0.000141568 0.000107615 0.0311943
+0.85 0.000129322 0.000107615 0.0311943
+1.02 0.000110405 0.000107615 0.0311943
+1.36 8.56497e-05 0.000107615 0.0311943
+1.7 3.92157e-05 0.000107615 0.0311943
+2.04 0 0.000107615 0.0311943
+END DIST
+
+Metal 1 UNDER 4
+DIST count 12 width 0.17
+0.17 0.000497977 8.27744e-05 0.0311943
+0.34 0.000279412 8.27744e-05 0.0311943
+0.425 0.000232192 8.27744e-05 0.0311943
+0.51 0.000199448 8.27744e-05 0.0311943
+0.595 0.000175236 8.27744e-05 0.0311943
+0.68 0.000156519 8.27744e-05 0.0311943
+0.765 0.000141568 8.27744e-05 0.0311943
+0.85 0.000129322 8.27744e-05 0.0311943
+1.02 0.000110405 8.27744e-05 0.0311943
+1.36 8.56497e-05 8.27744e-05 0.0311943
+1.7 3.92157e-05 8.27744e-05 0.0311943
+2.04 0 8.27744e-05 0.0311943
+END DIST
+
+Metal 1 UNDER 5
+DIST count 12 width 0.17
+0.17 0.000497977 7.58113e-05 0.0311943
+0.34 0.000279412 7.58113e-05 0.0311943
+0.425 0.000232192 7.58113e-05 0.0311943
+0.51 0.000199448 7.58113e-05 0.0311943
+0.595 0.000175236 7.58113e-05 0.0311943
+0.68 0.000156519 7.58113e-05 0.0311943
+0.765 0.000141568 7.58113e-05 0.0311943
+0.85 0.000129322 7.58113e-05 0.0311943
+1.02 0.000110405 7.58113e-05 0.0311943
+1.36 8.56497e-05 7.58113e-05 0.0311943
+1.7 3.92157e-05 7.58113e-05 0.0311943
+2.04 0 7.58113e-05 0.0311943
+END DIST
+
+Metal 1 UNDER 6
+DIST count 12 width 0.17
+0.17 0.000497977 5.72998e-05 0.0311943
+0.34 0.000279412 5.72998e-05 0.0311943
+0.425 0.000232192 5.72998e-05 0.0311943
+0.51 0.000199448 5.72998e-05 0.0311943
+0.595 0.000175236 5.72998e-05 0.0311943
+0.68 0.000156519 5.72998e-05 0.0311943
+0.765 0.000141568 5.72998e-05 0.0311943
+0.85 0.000129322 5.72998e-05 0.0311943
+1.02 0.000110405 5.72998e-05 0.0311943
+1.36 8.56497e-05 5.72998e-05 0.0311943
+1.7 3.92157e-05 5.72998e-05 0.0311943
+2.04 0 5.72998e-05 0.0311943
+END DIST
+
+Metal 1 DIAGUNDER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 DIAGUNDER 2
+DIST count 13 width 0.17
+0 0 7.57172e-05 0.0311943
+0.17 0 0 0.0311943
+0.34 0 0 0.0311943
+0.425 0 0 0.0311943
+0.51 0 0 0.0311943
+0.595 0 0 0.0311943
+0.68 0 0 0.0311943
+0.765 0 0 0.0311943
+0.85 0 0 0.0311943
+1.02 0 0 0.0311943
+1.36 0 0 0.0311943
+1.7 0 0 0.0311943
+2.04 0 0 0.0311943
+END DIST
+
+Metal 1 DIAGUNDER 3
+DIST count 13 width 0.17
+0 0 3.94545e-05 0.0311943
+0.17 0 0 0.0311943
+0.34 0 0 0.0311943
+0.425 0 0 0.0311943
+0.51 0 0 0.0311943
+0.595 0 0 0.0311943
+0.68 0 0 0.0311943
+0.765 0 0 0.0311943
+0.85 0 0 0.0311943
+1.02 0 0 0.0311943
+1.36 0 0 0.0311943
+1.7 0 0 0.0311943
+2.04 0 0 0.0311943
+END DIST
+
+Metal 1 DIAGUNDER 4
+DIST count 13 width 0.17
+0 0 1.62222e-05 0.0311943
+0.17 0 0 0.0311943
+0.34 0 0 0.0311943
+0.425 0 0 0.0311943
+0.51 0 0 0.0311943
+0.595 0 0 0.0311943
+0.68 0 0 0.0311943
+0.765 0 0 0.0311943
+0.85 0 0 0.0311943
+1.02 0 0 0.0311943
+1.36 0 0 0.0311943
+1.7 0 0 0.0311943
+2.04 0 0 0.0311943
+END DIST
+
+Metal 1 DIAGUNDER 5
+DIST count 13 width 0.17
+0 0 1.09798e-05 0.0311943
+0.17 0 0 0.0311943
+0.34 0 0 0.0311943
+0.425 0 0 0.0311943
+0.51 0 0 0.0311943
+0.595 0 0 0.0311943
+0.68 0 0 0.0311943
+0.765 0 0 0.0311943
+0.85 0 0 0.0311943
+1.02 0 0 0.0311943
+1.36 0 0 0.0311943
+1.7 0 0 0.0311943
+2.04 0 0 0.0311943
+END DIST
+
+Metal 1 DIAGUNDER 6
+DIST count 0 width 0.17
+END DIST
+
+Metal 2 RESOVER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.000757576
+0 0.2 0 0.000757576
+0 0.34 0 0.000757576
+0 0.47 0 0.000757576
+0 0.54 0 0.000757576
+0 0.68 0 0.000757576
+0 0.81 0 0.000757576
+0 0.88 0 0.000757576
+0 1.02 0 0.000757576
+0 1.36 0 0.000757576
+0.2 0.2 0 0.000757576
+0.2 0.34 0 0.000757576
+0.2 0.47 0 0.000757576
+0.2 0.54 0 0.000757576
+0.2 0.68 0 0.000757576
+0.2 0.81 0 0.000757576
+0.2 0.88 0 0.000757576
+0.2 1.02 0 0.000757576
+0.2 1.36 0 0.000757576
+0.34 0.34 0 0.000757576
+0.34 0.47 0 0.000757576
+0.34 0.54 0 0.000757576
+0.34 0.68 0 0.000757576
+0.34 0.81 0 0.000757576
+0.34 0.88 0 0.000757576
+0.34 1.02 0 0.000757576
+0.34 1.36 0 0.000757576
+0.47 0.47 0 0.000757576
+0.47 0.54 0 0.000757576
+0.47 0.68 0 0.000757576
+0.47 0.81 0 0.000757576
+0.47 0.88 0 0.000757576
+0.47 1.02 0 0.000757576
+0.47 1.36 0 0.000757576
+0.54 0.54 0 0.000757576
+0.54 0.68 0 0.000757576
+0.54 0.81 0 0.000757576
+0.54 0.88 0 0.000757576
+0.54 1.02 0 0.000757576
+0.54 1.36 0 0.000757576
+0.68 0.68 0 0.000757576
+0.68 0.81 0 0.000757576
+0.68 0.88 0 0.000757576
+0.68 1.02 0 0.000757576
+0.68 1.36 0 0.000757576
+0.81 0.81 0 0.000757576
+0.81 0.88 0 0.000757576
+0.81 1.02 0 0.000757576
+0.81 1.36 0 0.000757576
+0.88 0.88 0 0.000757576
+0.88 1.02 0 0.000757576
+0.88 1.36 0 0.000757576
+1.02 1.02 0 0.000757576
+1.02 1.36 0 0.000757576
+1.36 0 1.36 0.000757576
+END DIST
+
+Metal 2 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 2 OVER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 OVER 0
+DIST count 12 width 0.14
+0.14 0.000838745 4.36667e-05 0.000378788
+0.28 0.000471303 4.36667e-05 0.000378788
+0.35 0.000391492 4.36667e-05 0.000378788
+0.42 0.000336067 4.36667e-05 0.000378788
+0.49 0.000295057 4.36667e-05 0.000378788
+0.56 0.000263348 4.36667e-05 0.000378788
+0.63 0.000238021 4.36667e-05 0.000378788
+0.7 0.000217283 4.36667e-05 0.000378788
+0.84 0.000185267 4.36667e-05 0.000378788
+1.12 0.000143435 4.36667e-05 0.000378788
+1.4 0.000117182 4.36667e-05 0.000378788
+1.68 0 9.77792e-05 0.000378788
+END DIST
+
+Metal 2 OVER 1
+DIST count 12 width 0.14
+0.14 0.000838745 0.000119272 0.000378788
+0.28 0.000471303 0.000119272 0.000378788
+0.35 0.000391492 0.000119272 0.000378788
+0.42 0.000336067 0.000119272 0.000378788
+0.49 0.000295057 0.000119272 0.000378788
+0.56 0.000263348 0.000119272 0.000378788
+0.63 0.000238021 0.000119272 0.000378788
+0.7 0.000217283 0.000119272 0.000378788
+0.84 0.000185267 0.000119272 0.000378788
+1.12 0.000143435 0.000119272 0.000378788
+1.4 0.000117182 0.000119272 0.000378788
+1.68 0 0.000173385 0.000378788
+END DIST
+
+Metal 2 UNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 UNDER 3
+DIST count 12 width 0.14
+0.14 0.000838745 0.000104211 0.000378788
+0.28 0.000471303 0.000104211 0.000378788
+0.35 0.000391492 0.000104211 0.000378788
+0.42 0.000336067 0.000104211 0.000378788
+0.49 0.000295057 0.000104211 0.000378788
+0.56 0.000263348 0.000104211 0.000378788
+0.63 0.000238021 0.000104211 0.000378788
+0.7 0.000217283 0.000104211 0.000378788
+0.84 0.000185267 0.000104211 0.000378788
+1.12 0.000143435 0.000104211 0.000378788
+1.4 0.000117182 0.000104211 0.000378788
+1.68 0 0.000158323 0.000378788
+END DIST
+
+Metal 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000838745 8.64374e-05 0.000378788
+0.28 0.000471303 8.64374e-05 0.000378788
+0.35 0.000391492 8.64374e-05 0.000378788
+0.42 0.000336067 8.64374e-05 0.000378788
+0.49 0.000295057 8.64374e-05 0.000378788
+0.56 0.000263348 8.64374e-05 0.000378788
+0.63 0.000238021 8.64374e-05 0.000378788
+0.7 0.000217283 8.64374e-05 0.000378788
+0.84 0.000185267 8.64374e-05 0.000378788
+1.12 0.000143435 8.64374e-05 0.000378788
+1.4 0.000117182 8.64374e-05 0.000378788
+1.68 0 0.00014055 0.000378788
+END DIST
+
+Metal 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000838745 7.71644e-05 0.000378788
+0.28 0.000471303 7.71644e-05 0.000378788
+0.35 0.000391492 7.71644e-05 0.000378788
+0.42 0.000336067 7.71644e-05 0.000378788
+0.49 0.000295057 7.71644e-05 0.000378788
+0.56 0.000263348 7.71644e-05 0.000378788
+0.63 0.000238021 7.71644e-05 0.000378788
+0.7 0.000217283 7.71644e-05 0.000378788
+0.84 0.000185267 7.71644e-05 0.000378788
+1.12 0.000143435 7.71644e-05 0.000378788
+1.4 0.000117182 7.71644e-05 0.000378788
+1.68 0 0.000131277 0.000378788
+END DIST
+
+Metal 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000838745 5.98756e-05 0.000378788
+0.28 0.000471303 5.98756e-05 0.000378788
+0.35 0.000391492 5.98756e-05 0.000378788
+0.42 0.000336067 5.98756e-05 0.000378788
+0.49 0.000295057 5.98756e-05 0.000378788
+0.56 0.000263348 5.98756e-05 0.000378788
+0.63 0.000238021 5.98756e-05 0.000378788
+0.7 0.000217283 5.98756e-05 0.000378788
+0.84 0.000185267 5.98756e-05 0.000378788
+1.12 0.000143435 5.98756e-05 0.000378788
+1.4 0.000117182 5.98756e-05 0.000378788
+1.68 0 0.000113988 0.000378788
+END DIST
+
+Metal 2 DIAGUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 DIAGUNDER 3
+DIST count 13 width 0.14
+0 0 9.05051e-06 0.000378788
+0.14 0 0 0.000378788
+0.28 0 0 0.000378788
+0.35 0 0 0.000378788
+0.42 0 0 0.000378788
+0.49 0 0 0.000378788
+0.56 0 0 0.000378788
+0.63 0 0 0.000378788
+0.7 0 0 0.000378788
+0.84 0 0 0.000378788
+1.12 0 0 0.000378788
+1.4 0 0 0.000378788
+1.68 0 0 0.000378788
+END DIST
+
+Metal 2 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 2.50303e-05 0.000378788
+0.14 0 0 0.000378788
+0.28 0 0 0.000378788
+0.35 0 0 0.000378788
+0.42 0 0 0.000378788
+0.49 0 0 0.000378788
+0.56 0 0 0.000378788
+0.63 0 0 0.000378788
+0.7 0 0 0.000378788
+0.84 0 0 0.000378788
+1.12 0 0 0.000378788
+1.4 0 0 0.000378788
+1.68 0 0 0.000378788
+END DIST
+
+Metal 2 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 1.69899e-05 0.000378788
+0.14 0 0 0.000378788
+0.28 0 0 0.000378788
+0.35 0 0 0.000378788
+0.42 0 0 0.000378788
+0.49 0 0 0.000378788
+0.56 0 0 0.000378788
+0.63 0 0 0.000378788
+0.7 0 0 0.000378788
+0.84 0 0 0.000378788
+1.12 0 0 0.000378788
+1.4 0 0 0.000378788
+1.68 0 0 0.000378788
+END DIST
+
+Metal 2 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 1.23838e-05 0.000378788
+0.14 0 0 0.000378788
+0.28 0 0 0.000378788
+0.35 0 0 0.000378788
+0.42 0 0 0.000378788
+0.49 0 0 0.000378788
+0.56 0 0 0.000378788
+0.63 0 0 0.000378788
+0.7 0 0 0.000378788
+0.84 0 0 0.000378788
+1.12 0 0 0.000378788
+1.4 0 0 0.000378788
+1.68 0 0 0.000378788
+END DIST
+
+Metal 2 OVERUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 OVER 1 UNDER 3
+DIST count 12 width 0.14
+0.14 0.000838745 0.000179817 0.000378788
+0.28 0.000471303 0.000179817 0.000378788
+0.35 0.000391492 0.000179817 0.000378788
+0.42 0.000336067 0.000179817 0.000378788
+0.49 0.000295057 0.000179817 0.000378788
+0.56 0.000263348 0.000179817 0.000378788
+0.63 0.000238021 0.000179817 0.000378788
+0.7 0.000217283 0.000179817 0.000378788
+0.84 0.000185267 0.000179817 0.000378788
+1.12 0.000143435 0.000179817 0.000378788
+1.4 0.000117182 0.000179817 0.000378788
+1.68 0 0.000233929 0.000378788
+END DIST
+
+Metal 2 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000838745 0.000162043 0.000378788
+0.28 0.000471303 0.000162043 0.000378788
+0.35 0.000391492 0.000162043 0.000378788
+0.42 0.000336067 0.000162043 0.000378788
+0.49 0.000295057 0.000162043 0.000378788
+0.56 0.000263348 0.000162043 0.000378788
+0.63 0.000238021 0.000162043 0.000378788
+0.7 0.000217283 0.000162043 0.000378788
+0.84 0.000185267 0.000162043 0.000378788
+1.12 0.000143435 0.000162043 0.000378788
+1.4 0.000117182 0.000162043 0.000378788
+1.68 0 0.000216156 0.000378788
+END DIST
+
+Metal 2 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000838745 0.00015277 0.000378788
+0.28 0.000471303 0.00015277 0.000378788
+0.35 0.000391492 0.00015277 0.000378788
+0.42 0.000336067 0.00015277 0.000378788
+0.49 0.000295057 0.00015277 0.000378788
+0.56 0.000263348 0.00015277 0.000378788
+0.63 0.000238021 0.00015277 0.000378788
+0.7 0.000217283 0.00015277 0.000378788
+0.84 0.000185267 0.00015277 0.000378788
+1.12 0.000143435 0.00015277 0.000378788
+1.4 0.000117182 0.00015277 0.000378788
+1.68 0 0.000206883 0.000378788
+END DIST
+
+Metal 2 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000838745 0.000135481 0.000378788
+0.28 0.000471303 0.000135481 0.000378788
+0.35 0.000391492 0.000135481 0.000378788
+0.42 0.000336067 0.000135481 0.000378788
+0.49 0.000295057 0.000135481 0.000378788
+0.56 0.000263348 0.000135481 0.000378788
+0.63 0.000238021 0.000135481 0.000378788
+0.7 0.000217283 0.000135481 0.000378788
+0.84 0.000185267 0.000135481 0.000378788
+1.12 0.000143435 0.000135481 0.000378788
+1.4 0.000117182 0.000135481 0.000378788
+1.68 0 0.000189594 0.000378788
+END DIST
+
+Metal 3 RESOVER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.000757576
+0 0.32 0 0.000757576
+0 0.46 0 0.000757576
+0 0.71 0 0.000757576
+0 0.78 0 0.000757576
+0 0.92 0 0.000757576
+0 1.17 0 0.000757576
+0 1.24 0 0.000757576
+0 1.38 0 0.000757576
+0 1.84 0 0.000757576
+0.32 0.32 0 0.000757576
+0.32 0.46 0 0.000757576
+0.32 0.71 0 0.000757576
+0.32 0.78 0 0.000757576
+0.32 0.92 0 0.000757576
+0.32 1.17 0 0.000757576
+0.32 1.24 0 0.000757576
+0.32 1.38 0 0.000757576
+0.32 1.84 0 0.000757576
+0.46 0.46 0 0.000757576
+0.46 0.71 0 0.000757576
+0.46 0.78 0 0.000757576
+0.46 0.92 0 0.000757576
+0.46 1.17 0 0.000757576
+0.46 1.24 0 0.000757576
+0.46 1.38 0 0.000757576
+0.46 1.84 0 0.000757576
+0.71 0.71 0 0.000757576
+0.71 0.78 0 0.000757576
+0.71 0.92 0 0.000757576
+0.71 1.17 0 0.000757576
+0.71 1.24 0 0.000757576
+0.71 1.38 0 0.000757576
+0.71 1.84 0 0.000757576
+0.78 0.78 0 0.000757576
+0.78 0.92 0 0.000757576
+0.78 1.17 0 0.000757576
+0.78 1.24 0 0.000757576
+0.78 1.38 0 0.000757576
+0.78 1.84 0 0.000757576
+0.92 0.92 0 0.000757576
+0.92 1.17 0 0.000757576
+0.92 1.24 0 0.000757576
+0.92 1.38 0 0.000757576
+0.92 1.84 0 0.000757576
+1.17 1.17 0 0.000757576
+1.17 1.24 0 0.000757576
+1.17 1.38 0 0.000757576
+1.17 1.84 0 0.000757576
+1.24 1.24 0 0.000757576
+1.24 1.38 0 0.000757576
+1.24 1.84 0 0.000757576
+1.38 1.38 0 0.000757576
+1.38 1.84 0 0.000757576
+1.84 0 1.84 0.000757576
+END DIST
+
+Metal 3 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 RESOVER 2
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 OVER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 OVER 0
+DIST count 12 width 0.14
+0.14 0.000889851 3.47273e-05 0.000378788
+0.28 0.000497251 3.47273e-05 0.000378788
+0.35 0.000413304 3.47273e-05 0.000378788
+0.42 0.000355285 3.47273e-05 0.000378788
+0.49 0.000312469 3.47273e-05 0.000378788
+0.56 0.000279405 3.47273e-05 0.000378788
+0.63 0.000253003 3.47273e-05 0.000378788
+0.7 0.000231378 3.47273e-05 0.000378788
+0.84 0.00019795 3.47273e-05 0.000378788
+1.12 0.000154118 3.47273e-05 0.000378788
+1.4 0.000126457 3.47273e-05 0.000378788
+1.68 0 9.48524e-05 0.000378788
+END DIST
+
+Metal 3 OVER 1
+DIST count 12 width 0.14
+0.14 0.000889851 6.94309e-05 0.000378788
+0.28 0.000497251 6.94309e-05 0.000378788
+0.35 0.000413304 6.94309e-05 0.000378788
+0.42 0.000355285 6.94309e-05 0.000378788
+0.49 0.000312469 6.94309e-05 0.000378788
+0.56 0.000279405 6.94309e-05 0.000378788
+0.63 0.000253003 6.94309e-05 0.000378788
+0.7 0.000231378 6.94309e-05 0.000378788
+0.84 0.00019795 6.94309e-05 0.000378788
+1.12 0.000154118 6.94309e-05 0.000378788
+1.4 0.000126457 6.94309e-05 0.000378788
+1.68 0 0.000129556 0.000378788
+END DIST
+
+Metal 3 OVER 2
+DIST count 12 width 0.14
+0.14 0.000889851 7.76097e-05 0.000378788
+0.28 0.000497251 7.76097e-05 0.000378788
+0.35 0.000413304 7.76097e-05 0.000378788
+0.42 0.000355285 7.76097e-05 0.000378788
+0.49 0.000312469 7.76097e-05 0.000378788
+0.56 0.000279405 7.76097e-05 0.000378788
+0.63 0.000253003 7.76097e-05 0.000378788
+0.7 0.000231378 7.76097e-05 0.000378788
+0.84 0.00019795 7.76097e-05 0.000378788
+1.12 0.000154118 7.76097e-05 0.000378788
+1.4 0.000126457 7.76097e-05 0.000378788
+1.68 0 0.000137735 0.000378788
+END DIST
+
+Metal 3 UNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000889851 0.000118641 0.000378788
+0.28 0.000497251 0.000118641 0.000378788
+0.35 0.000413304 0.000118641 0.000378788
+0.42 0.000355285 0.000118641 0.000378788
+0.49 0.000312469 0.000118641 0.000378788
+0.56 0.000279405 0.000118641 0.000378788
+0.63 0.000253003 0.000118641 0.000378788
+0.7 0.000231378 0.000118641 0.000378788
+0.84 0.00019795 0.000118641 0.000378788
+1.12 0.000154118 0.000118641 0.000378788
+1.4 0.000126457 0.000118641 0.000378788
+1.68 0 0.000178766 0.000378788
+END DIST
+
+Metal 3 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000889851 8.02892e-05 0.000378788
+0.28 0.000497251 8.02892e-05 0.000378788
+0.35 0.000413304 8.02892e-05 0.000378788
+0.42 0.000355285 8.02892e-05 0.000378788
+0.49 0.000312469 8.02892e-05 0.000378788
+0.56 0.000279405 8.02892e-05 0.000378788
+0.63 0.000253003 8.02892e-05 0.000378788
+0.7 0.000231378 8.02892e-05 0.000378788
+0.84 0.00019795 8.02892e-05 0.000378788
+1.12 0.000154118 8.02892e-05 0.000378788
+1.4 0.000126457 8.02892e-05 0.000378788
+1.68 0 0.000140414 0.000378788
+END DIST
+
+Metal 3 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000889851 5.73169e-05 0.000378788
+0.28 0.000497251 5.73169e-05 0.000378788
+0.35 0.000413304 5.73169e-05 0.000378788
+0.42 0.000355285 5.73169e-05 0.000378788
+0.49 0.000312469 5.73169e-05 0.000378788
+0.56 0.000279405 5.73169e-05 0.000378788
+0.63 0.000253003 5.73169e-05 0.000378788
+0.7 0.000231378 5.73169e-05 0.000378788
+0.84 0.00019795 5.73169e-05 0.000378788
+1.12 0.000154118 5.73169e-05 0.000378788
+1.4 0.000126457 5.73169e-05 0.000378788
+1.68 0 0.000117442 0.000378788
+END DIST
+
+Metal 3 DIAGUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 5.66061e-05 0.000378788
+0.14 0 0 0.000378788
+0.28 0 0 0.000378788
+0.35 0 0 0.000378788
+0.42 0 0 0.000378788
+0.49 0 0 0.000378788
+0.56 0 0 0.000378788
+0.63 0 0 0.000378788
+0.7 0 0 0.000378788
+0.84 0 0 0.000378788
+1.12 0 0 0.000378788
+1.4 0 0 0.000378788
+1.68 0 0 0.000378788
+END DIST
+
+Metal 3 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 2.50505e-05 0.000378788
+0.14 0 0 0.000378788
+0.28 0 0 0.000378788
+0.35 0 0 0.000378788
+0.42 0 0 0.000378788
+0.49 0 0 0.000378788
+0.56 0 0 0.000378788
+0.63 0 0 0.000378788
+0.7 0 0 0.000378788
+0.84 0 0 0.000378788
+1.12 0 0 0.000378788
+1.4 0 0 0.000378788
+1.68 0 0 0.000378788
+END DIST
+
+Metal 3 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 1.77172e-05 0.000378788
+0.14 0 0 0.000378788
+0.28 0 0 0.000378788
+0.35 0 0 0.000378788
+0.42 0 0 0.000378788
+0.49 0 0 0.000378788
+0.56 0 0 0.000378788
+0.63 0 0 0.000378788
+0.7 0 0 0.000378788
+0.84 0 0 0.000378788
+1.12 0 0 0.000378788
+1.4 0 0 0.000378788
+1.68 0 0 0.000378788
+END DIST
+
+Metal 3 OVERUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000889851 0.000153344 0.000378788
+0.28 0.000497251 0.000153344 0.000378788
+0.35 0.000413304 0.000153344 0.000378788
+0.42 0.000355285 0.000153344 0.000378788
+0.49 0.000312469 0.000153344 0.000378788
+0.56 0.000279405 0.000153344 0.000378788
+0.63 0.000253003 0.000153344 0.000378788
+0.7 0.000231378 0.000153344 0.000378788
+0.84 0.00019795 0.000153344 0.000378788
+1.12 0.000154118 0.000153344 0.000378788
+1.4 0.000126457 0.000153344 0.000378788
+1.68 0 0.000213469 0.000378788
+END DIST
+
+Metal 3 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000889851 0.000114993 0.000378788
+0.28 0.000497251 0.000114993 0.000378788
+0.35 0.000413304 0.000114993 0.000378788
+0.42 0.000355285 0.000114993 0.000378788
+0.49 0.000312469 0.000114993 0.000378788
+0.56 0.000279405 0.000114993 0.000378788
+0.63 0.000253003 0.000114993 0.000378788
+0.7 0.000231378 0.000114993 0.000378788
+0.84 0.00019795 0.000114993 0.000378788
+1.12 0.000154118 0.000114993 0.000378788
+1.4 0.000126457 0.000114993 0.000378788
+1.68 0 0.000175118 0.000378788
+END DIST
+
+Metal 3 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000889851 9.20205e-05 0.000378788
+0.28 0.000497251 9.20205e-05 0.000378788
+0.35 0.000413304 9.20205e-05 0.000378788
+0.42 0.000355285 9.20205e-05 0.000378788
+0.49 0.000312469 9.20205e-05 0.000378788
+0.56 0.000279405 9.20205e-05 0.000378788
+0.63 0.000253003 9.20205e-05 0.000378788
+0.7 0.000231378 9.20205e-05 0.000378788
+0.84 0.00019795 9.20205e-05 0.000378788
+1.12 0.000154118 9.20205e-05 0.000378788
+1.4 0.000126457 9.20205e-05 0.000378788
+1.68 0 0.000152146 0.000378788
+END DIST
+
+Metal 3 OVER 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000889851 0.000161523 0.000378788
+0.28 0.000497251 0.000161523 0.000378788
+0.35 0.000413304 0.000161523 0.000378788
+0.42 0.000355285 0.000161523 0.000378788
+0.49 0.000312469 0.000161523 0.000378788
+0.56 0.000279405 0.000161523 0.000378788
+0.63 0.000253003 0.000161523 0.000378788
+0.7 0.000231378 0.000161523 0.000378788
+0.84 0.00019795 0.000161523 0.000378788
+1.12 0.000154118 0.000161523 0.000378788
+1.4 0.000126457 0.000161523 0.000378788
+1.68 0 0.000221648 0.000378788
+END DIST
+
+Metal 3 OVER 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000889851 0.000123172 0.000378788
+0.28 0.000497251 0.000123172 0.000378788
+0.35 0.000413304 0.000123172 0.000378788
+0.42 0.000355285 0.000123172 0.000378788
+0.49 0.000312469 0.000123172 0.000378788
+0.56 0.000279405 0.000123172 0.000378788
+0.63 0.000253003 0.000123172 0.000378788
+0.7 0.000231378 0.000123172 0.000378788
+0.84 0.00019795 0.000123172 0.000378788
+1.12 0.000154118 0.000123172 0.000378788
+1.4 0.000126457 0.000123172 0.000378788
+1.68 0 0.000183297 0.000378788
+END DIST
+
+Metal 3 OVER 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000889851 0.000100199 0.000378788
+0.28 0.000497251 0.000100199 0.000378788
+0.35 0.000413304 0.000100199 0.000378788
+0.42 0.000355285 0.000100199 0.000378788
+0.49 0.000312469 0.000100199 0.000378788
+0.56 0.000279405 0.000100199 0.000378788
+0.63 0.000253003 0.000100199 0.000378788
+0.7 0.000231378 0.000100199 0.000378788
+0.84 0.00019795 0.000100199 0.000378788
+1.12 0.000154118 0.000100199 0.000378788
+1.4 0.000126457 0.000100199 0.000378788
+1.68 0 0.000160324 0.000378788
+END DIST
+
+Metal 4 RESOVER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000127946
+0 0.38 0 0.000127946
+0 0.68 0 0.000127946
+0 0.91 0 0.000127946
+0 1.06 0 0.000127946
+0 1.36 0 0.000127946
+0 1.59 0 0.000127946
+0 1.74 0 0.000127946
+0 2.04 0 0.000127946
+0 2.72 0 0.000127946
+0.38 0.38 0 0.000127946
+0.38 0.68 0 0.000127946
+0.38 0.91 0 0.000127946
+0.38 1.06 0 0.000127946
+0.38 1.36 0 0.000127946
+0.38 1.59 0 0.000127946
+0.38 1.74 0 0.000127946
+0.38 2.04 0 0.000127946
+0.38 2.72 0 0.000127946
+0.68 0.68 0 0.000127946
+0.68 0.91 0 0.000127946
+0.68 1.06 0 0.000127946
+0.68 1.36 0 0.000127946
+0.68 1.59 0 0.000127946
+0.68 1.74 0 0.000127946
+0.68 2.04 0 0.000127946
+0.68 2.72 0 0.000127946
+0.91 0.91 0 0.000127946
+0.91 1.06 0 0.000127946
+0.91 1.36 0 0.000127946
+0.91 1.59 0 0.000127946
+0.91 1.74 0 0.000127946
+0.91 2.04 0 0.000127946
+0.91 2.72 0 0.000127946
+1.06 1.06 0 0.000127946
+1.06 1.36 0 0.000127946
+1.06 1.59 0 0.000127946
+1.06 1.74 0 0.000127946
+1.06 2.04 0 0.000127946
+1.06 2.72 0 0.000127946
+1.36 1.36 0 0.000127946
+1.36 1.59 0 0.000127946
+1.36 1.74 0 0.000127946
+1.36 2.04 0 0.000127946
+1.36 2.72 0 0.000127946
+1.59 1.59 0 0.000127946
+1.59 1.74 0 0.000127946
+1.59 2.04 0 0.000127946
+1.59 2.72 0 0.000127946
+1.74 1.74 0 0.000127946
+1.74 2.04 0 0.000127946
+1.74 2.72 0 0.000127946
+2.04 2.04 0 0.000127946
+2.04 2.72 0 0.000127946
+2.72 0 2.72 0.000127946
+END DIST
+
+Metal 4 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 OVER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 OVER 0
+DIST count 12 width 0.3
+0.3 0.000554112 3.94141e-05 6.39731e-05
+0.6 0.000311553 3.94141e-05 6.39731e-05
+0.75 0.000258699 3.94141e-05 6.39731e-05
+0.9 0.000221966 3.94141e-05 6.39731e-05
+1.05 0.00019478 3.94141e-05 6.39731e-05
+1.2 0.000173759 3.94141e-05 6.39731e-05
+1.35 9.42761e-05 3.94141e-05 6.39731e-05
+1.5 8.48485e-05 3.94141e-05 6.39731e-05
+1.8 7.07071e-05 3.94141e-05 6.39731e-05
+2.4 0 3.94141e-05 6.39731e-05
+3 0 3.94141e-05 6.39731e-05
+3.6 0 3.94141e-05 6.39731e-05
+END DIST
+
+Metal 4 OVER 1
+DIST count 12 width 0.3
+0.3 0.000554112 8.64165e-05 6.39731e-05
+0.6 0.000311553 8.64165e-05 6.39731e-05
+0.75 0.000258699 8.64165e-05 6.39731e-05
+0.9 0.000221966 8.64165e-05 6.39731e-05
+1.05 0.00019478 8.64165e-05 6.39731e-05
+1.2 0.000173759 8.64165e-05 6.39731e-05
+1.35 9.42761e-05 8.64165e-05 6.39731e-05
+1.5 8.48485e-05 8.64165e-05 6.39731e-05
+1.8 7.07071e-05 8.64165e-05 6.39731e-05
+2.4 0 8.64165e-05 6.39731e-05
+3 0 8.64165e-05 6.39731e-05
+3.6 0 8.64165e-05 6.39731e-05
+END DIST
+
+Metal 4 OVER 2
+DIST count 12 width 0.3
+0.3 0.000554112 0.000113273 6.39731e-05
+0.6 0.000311553 0.000113273 6.39731e-05
+0.75 0.000258699 0.000113273 6.39731e-05
+0.9 0.000221966 0.000113273 6.39731e-05
+1.05 0.00019478 0.000113273 6.39731e-05
+1.2 0.000173759 0.000113273 6.39731e-05
+1.35 9.42761e-05 0.000113273 6.39731e-05
+1.5 8.48485e-05 0.000113273 6.39731e-05
+1.8 7.07071e-05 0.000113273 6.39731e-05
+2.4 0 0.000113273 6.39731e-05
+3 0 0.000113273 6.39731e-05
+3.6 0 0.000113273 6.39731e-05
+END DIST
+
+Metal 4 OVER 3
+DIST count 12 width 0.3
+0.3 0.000554112 0.000199707 6.39731e-05
+0.6 0.000311553 0.000199707 6.39731e-05
+0.75 0.000258699 0.000199707 6.39731e-05
+0.9 0.000221966 0.000199707 6.39731e-05
+1.05 0.00019478 0.000199707 6.39731e-05
+1.2 0.000173759 0.000199707 6.39731e-05
+1.35 9.42761e-05 0.000199707 6.39731e-05
+1.5 8.48485e-05 0.000199707 6.39731e-05
+1.8 7.07071e-05 0.000199707 6.39731e-05
+2.4 0 0.000199707 6.39731e-05
+3 0 0.000199707 6.39731e-05
+3.6 0 0.000199707 6.39731e-05
+END DIST
+
+Metal 4 UNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.000168162 6.39731e-05
+0.6 0.000311553 0.000168162 6.39731e-05
+0.75 0.000258699 0.000168162 6.39731e-05
+0.9 0.000221966 0.000168162 6.39731e-05
+1.05 0.00019478 0.000168162 6.39731e-05
+1.2 0.000173759 0.000168162 6.39731e-05
+1.35 9.42761e-05 0.000168162 6.39731e-05
+1.5 8.48485e-05 0.000168162 6.39731e-05
+1.8 7.07071e-05 0.000168162 6.39731e-05
+2.4 0 0.000168162 6.39731e-05
+3 0 0.000168162 6.39731e-05
+3.6 0 0.000168162 6.39731e-05
+END DIST
+
+Metal 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 8.20418e-05 6.39731e-05
+0.6 0.000311553 8.20418e-05 6.39731e-05
+0.75 0.000258699 8.20418e-05 6.39731e-05
+0.9 0.000221966 8.20418e-05 6.39731e-05
+1.05 0.00019478 8.20418e-05 6.39731e-05
+1.2 0.000173759 8.20418e-05 6.39731e-05
+1.35 9.42761e-05 8.20418e-05 6.39731e-05
+1.5 8.48485e-05 8.20418e-05 6.39731e-05
+1.8 7.07071e-05 8.20418e-05 6.39731e-05
+2.4 0 8.20418e-05 6.39731e-05
+3 0 8.20418e-05 6.39731e-05
+3.6 0 8.20418e-05 6.39731e-05
+END DIST
+
+Metal 4 DIAGUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 DIAGUNDER 5
+DIST count 13 width 0.3
+0 0 2.54545e-05 6.39731e-05
+0.3 0 0 6.39731e-05
+0.6 0 0 6.39731e-05
+0.75 0 0 6.39731e-05
+0.9 0 0 6.39731e-05
+1.05 0 0 6.39731e-05
+1.2 0 0 6.39731e-05
+1.35 0 0 6.39731e-05
+1.5 0 0 6.39731e-05
+1.8 0 0 6.39731e-05
+2.4 0 0 6.39731e-05
+3 0 0 6.39731e-05
+3.6 0 0 6.39731e-05
+END DIST
+
+Metal 4 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 3.43434e-05 6.39731e-05
+0.3 0 0 6.39731e-05
+0.6 0 0 6.39731e-05
+0.75 0 0 6.39731e-05
+0.9 0 0 6.39731e-05
+1.05 0 0 6.39731e-05
+1.2 0 0 6.39731e-05
+1.35 0 0 6.39731e-05
+1.5 0 0 6.39731e-05
+1.8 0 0 6.39731e-05
+2.4 0 0 6.39731e-05
+3 0 0 6.39731e-05
+3.6 0 0 6.39731e-05
+END DIST
+
+Metal 4 OVERUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 OVER 1 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.000215164 6.39731e-05
+0.6 0.000311553 0.000215164 6.39731e-05
+0.75 0.000258699 0.000215164 6.39731e-05
+0.9 0.000221966 0.000215164 6.39731e-05
+1.05 0.00019478 0.000215164 6.39731e-05
+1.2 0.000173759 0.000215164 6.39731e-05
+1.35 9.42761e-05 0.000215164 6.39731e-05
+1.5 8.48485e-05 0.000215164 6.39731e-05
+1.8 7.07071e-05 0.000215164 6.39731e-05
+2.4 0 0.000215164 6.39731e-05
+3 0 0.000215164 6.39731e-05
+3.6 0 0.000215164 6.39731e-05
+END DIST
+
+Metal 4 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 0.000129044 6.39731e-05
+0.6 0.000311553 0.000129044 6.39731e-05
+0.75 0.000258699 0.000129044 6.39731e-05
+0.9 0.000221966 0.000129044 6.39731e-05
+1.05 0.00019478 0.000129044 6.39731e-05
+1.2 0.000173759 0.000129044 6.39731e-05
+1.35 9.42761e-05 0.000129044 6.39731e-05
+1.5 8.48485e-05 0.000129044 6.39731e-05
+1.8 7.07071e-05 0.000129044 6.39731e-05
+2.4 0 0.000129044 6.39731e-05
+3 0 0.000129044 6.39731e-05
+3.6 0 0.000129044 6.39731e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.00024202 6.39731e-05
+0.6 0.000311553 0.00024202 6.39731e-05
+0.75 0.000258699 0.00024202 6.39731e-05
+0.9 0.000221966 0.00024202 6.39731e-05
+1.05 0.00019478 0.00024202 6.39731e-05
+1.2 0.000173759 0.00024202 6.39731e-05
+1.35 9.42761e-05 0.00024202 6.39731e-05
+1.5 8.48485e-05 0.00024202 6.39731e-05
+1.8 7.07071e-05 0.00024202 6.39731e-05
+2.4 0 0.00024202 6.39731e-05
+3 0 0.00024202 6.39731e-05
+3.6 0 0.00024202 6.39731e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 0.0001559 6.39731e-05
+0.6 0.000311553 0.0001559 6.39731e-05
+0.75 0.000258699 0.0001559 6.39731e-05
+0.9 0.000221966 0.0001559 6.39731e-05
+1.05 0.00019478 0.0001559 6.39731e-05
+1.2 0.000173759 0.0001559 6.39731e-05
+1.35 9.42761e-05 0.0001559 6.39731e-05
+1.5 8.48485e-05 0.0001559 6.39731e-05
+1.8 7.07071e-05 0.0001559 6.39731e-05
+2.4 0 0.0001559 6.39731e-05
+3 0 0.0001559 6.39731e-05
+3.6 0 0.0001559 6.39731e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.000328455 6.39731e-05
+0.6 0.000311553 0.000328455 6.39731e-05
+0.75 0.000258699 0.000328455 6.39731e-05
+0.9 0.000221966 0.000328455 6.39731e-05
+1.05 0.00019478 0.000328455 6.39731e-05
+1.2 0.000173759 0.000328455 6.39731e-05
+1.35 9.42761e-05 0.000328455 6.39731e-05
+1.5 8.48485e-05 0.000328455 6.39731e-05
+1.8 7.07071e-05 0.000328455 6.39731e-05
+2.4 0 0.000328455 6.39731e-05
+3 0 0.000328455 6.39731e-05
+3.6 0 0.000328455 6.39731e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 0.000242335 6.39731e-05
+0.6 0.000311553 0.000242335 6.39731e-05
+0.75 0.000258699 0.000242335 6.39731e-05
+0.9 0.000221966 0.000242335 6.39731e-05
+1.05 0.00019478 0.000242335 6.39731e-05
+1.2 0.000173759 0.000242335 6.39731e-05
+1.35 9.42761e-05 0.000242335 6.39731e-05
+1.5 8.48485e-05 0.000242335 6.39731e-05
+1.8 7.07071e-05 0.000242335 6.39731e-05
+2.4 0 0.000242335 6.39731e-05
+3 0 0.000242335 6.39731e-05
+3.6 0 0.000242335 6.39731e-05
+END DIST
+
+Metal 5 RESOVER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000127946
+0 0.62 0 0.000127946
+0 0.92 0 0.000127946
+0 1.39 0 0.000127946
+0 1.54 0 0.000127946
+0 1.84 0 0.000127946
+0 2.31 0 0.000127946
+0 2.46 0 0.000127946
+0 2.76 0 0.000127946
+0 3.68 0 0.000127946
+0.62 0.62 0 0.000127946
+0.62 0.92 0 0.000127946
+0.62 1.39 0 0.000127946
+0.62 1.54 0 0.000127946
+0.62 1.84 0 0.000127946
+0.62 2.31 0 0.000127946
+0.62 2.46 0 0.000127946
+0.62 2.76 0 0.000127946
+0.62 3.68 0 0.000127946
+0.92 0.92 0 0.000127946
+0.92 1.39 0 0.000127946
+0.92 1.54 0 0.000127946
+0.92 1.84 0 0.000127946
+0.92 2.31 0 0.000127946
+0.92 2.46 0 0.000127946
+0.92 2.76 0 0.000127946
+0.92 3.68 0 0.000127946
+1.39 1.39 0 0.000127946
+1.39 1.54 0 0.000127946
+1.39 1.84 0 0.000127946
+1.39 2.31 0 0.000127946
+1.39 2.46 0 0.000127946
+1.39 2.76 0 0.000127946
+1.39 3.68 0 0.000127946
+1.54 1.54 0 0.000127946
+1.54 1.84 0 0.000127946
+1.54 2.31 0 0.000127946
+1.54 2.46 0 0.000127946
+1.54 2.76 0 0.000127946
+1.54 3.68 0 0.000127946
+1.84 1.84 0 0.000127946
+1.84 2.31 0 0.000127946
+1.84 2.46 0 0.000127946
+1.84 2.76 0 0.000127946
+1.84 3.68 0 0.000127946
+2.31 2.31 0 0.000127946
+2.31 2.46 0 0.000127946
+2.31 2.76 0 0.000127946
+2.31 3.68 0 0.000127946
+2.46 2.46 0 0.000127946
+2.46 2.76 0 0.000127946
+2.46 3.68 0 0.000127946
+2.76 2.76 0 0.000127946
+2.76 3.68 0 0.000127946
+3.68 0 3.68 0.000127946
+END DIST
+
+Metal 5 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 4
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 OVER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 OVER 0
+DIST count 12 width 0.3
+0.3 0.000562124 3.5899e-05 6.39731e-05
+0.6 0.000314638 3.5899e-05 6.39731e-05
+0.75 0.000261521 3.5899e-05 6.39731e-05
+0.9 0.000224763 3.5899e-05 6.39731e-05
+1.05 0.000197615 3.5899e-05 6.39731e-05
+1.2 0.000112795 3.5899e-05 6.39731e-05
+1.35 0.000100262 3.5899e-05 6.39731e-05
+1.5 9.02357e-05 3.5899e-05 6.39731e-05
+1.8 7.51966e-05 3.5899e-05 6.39731e-05
+2.4 0 3.5899e-05 6.39731e-05
+3 0 3.5899e-05 6.39731e-05
+3.6 0 3.5899e-05 6.39731e-05
+END DIST
+
+Metal 5 OVER 1
+DIST count 12 width 0.3
+0.3 0.000562124 7.20976e-05 6.39731e-05
+0.6 0.000314638 7.20976e-05 6.39731e-05
+0.75 0.000261521 7.20976e-05 6.39731e-05
+0.9 0.000224763 7.20976e-05 6.39731e-05
+1.05 0.000197615 7.20976e-05 6.39731e-05
+1.2 0.000112795 7.20976e-05 6.39731e-05
+1.35 0.000100262 7.20976e-05 6.39731e-05
+1.5 9.02357e-05 7.20976e-05 6.39731e-05
+1.8 7.51966e-05 7.20976e-05 6.39731e-05
+2.4 0 7.20976e-05 6.39731e-05
+3 0 7.20976e-05 6.39731e-05
+3.6 0 7.20976e-05 6.39731e-05
+END DIST
+
+Metal 5 OVER 2
+DIST count 12 width 0.3
+0.3 0.000562124 9.13533e-05 6.39731e-05
+0.6 0.000314638 9.13533e-05 6.39731e-05
+0.75 0.000261521 9.13533e-05 6.39731e-05
+0.9 0.000224763 9.13533e-05 6.39731e-05
+1.05 0.000197615 9.13533e-05 6.39731e-05
+1.2 0.000112795 9.13533e-05 6.39731e-05
+1.35 0.000100262 9.13533e-05 6.39731e-05
+1.5 9.02357e-05 9.13533e-05 6.39731e-05
+1.8 7.51966e-05 9.13533e-05 6.39731e-05
+2.4 0 9.13533e-05 6.39731e-05
+3 0 9.13533e-05 6.39731e-05
+3.6 0 9.13533e-05 6.39731e-05
+END DIST
+
+Metal 5 OVER 3
+DIST count 12 width 0.3
+0.3 0.000562124 0.0001158 6.39731e-05
+0.6 0.000314638 0.0001158 6.39731e-05
+0.75 0.000261521 0.0001158 6.39731e-05
+0.9 0.000224763 0.0001158 6.39731e-05
+1.05 0.000197615 0.0001158 6.39731e-05
+1.2 0.000112795 0.0001158 6.39731e-05
+1.35 0.000100262 0.0001158 6.39731e-05
+1.5 9.02357e-05 0.0001158 6.39731e-05
+1.8 7.51966e-05 0.0001158 6.39731e-05
+2.4 0 0.0001158 6.39731e-05
+3 0 0.0001158 6.39731e-05
+3.6 0 0.0001158 6.39731e-05
+END DIST
+
+Metal 5 OVER 4
+DIST count 12 width 0.3
+0.3 0.000562124 0.000146 6.39731e-05
+0.6 0.000314638 0.000146 6.39731e-05
+0.75 0.000261521 0.000146 6.39731e-05
+0.9 0.000224763 0.000146 6.39731e-05
+1.05 0.000197615 0.000146 6.39731e-05
+1.2 0.000112795 0.000146 6.39731e-05
+1.35 0.000100262 0.000146 6.39731e-05
+1.5 9.02357e-05 0.000146 6.39731e-05
+1.8 7.51966e-05 0.000146 6.39731e-05
+2.4 0 0.000146 6.39731e-05
+3 0 0.000146 6.39731e-05
+3.6 0 0.000146 6.39731e-05
+END DIST
+
+Metal 5 UNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.000110389 6.39731e-05
+0.6 0.000314638 0.000110389 6.39731e-05
+0.75 0.000261521 0.000110389 6.39731e-05
+0.9 0.000224763 0.000110389 6.39731e-05
+1.05 0.000197615 0.000110389 6.39731e-05
+1.2 0.000112795 0.000110389 6.39731e-05
+1.35 0.000100262 0.000110389 6.39731e-05
+1.5 9.02357e-05 0.000110389 6.39731e-05
+1.8 7.51966e-05 0.000110389 6.39731e-05
+2.4 0 0.000110389 6.39731e-05
+3 0 0.000110389 6.39731e-05
+3.6 0 0.000110389 6.39731e-05
+END DIST
+
+Metal 5 DIAGUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 6.80808e-05 6.39731e-05
+0.3 0 0 6.39731e-05
+0.6 0 0 6.39731e-05
+0.75 0 0 6.39731e-05
+0.9 0 0 6.39731e-05
+1.05 0 0 6.39731e-05
+1.2 0 0 6.39731e-05
+1.35 0 0 6.39731e-05
+1.5 0 0 6.39731e-05
+1.8 0 0 6.39731e-05
+2.4 0 0 6.39731e-05
+3 0 0 6.39731e-05
+3.6 0 0 6.39731e-05
+END DIST
+
+Metal 5 OVERUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.000146588 6.39731e-05
+0.6 0.000314638 0.000146588 6.39731e-05
+0.75 0.000261521 0.000146588 6.39731e-05
+0.9 0.000224763 0.000146588 6.39731e-05
+1.05 0.000197615 0.000146588 6.39731e-05
+1.2 0.000112795 0.000146588 6.39731e-05
+1.35 0.000100262 0.000146588 6.39731e-05
+1.5 9.02357e-05 0.000146588 6.39731e-05
+1.8 7.51966e-05 0.000146588 6.39731e-05
+2.4 0 0.000146588 6.39731e-05
+3 0 0.000146588 6.39731e-05
+3.6 0 0.000146588 6.39731e-05
+END DIST
+
+Metal 5 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.000165843 6.39731e-05
+0.6 0.000314638 0.000165843 6.39731e-05
+0.75 0.000261521 0.000165843 6.39731e-05
+0.9 0.000224763 0.000165843 6.39731e-05
+1.05 0.000197615 0.000165843 6.39731e-05
+1.2 0.000112795 0.000165843 6.39731e-05
+1.35 0.000100262 0.000165843 6.39731e-05
+1.5 9.02357e-05 0.000165843 6.39731e-05
+1.8 7.51966e-05 0.000165843 6.39731e-05
+2.4 0 0.000165843 6.39731e-05
+3 0 0.000165843 6.39731e-05
+3.6 0 0.000165843 6.39731e-05
+END DIST
+
+Metal 5 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.00019029 6.39731e-05
+0.6 0.000314638 0.00019029 6.39731e-05
+0.75 0.000261521 0.00019029 6.39731e-05
+0.9 0.000224763 0.00019029 6.39731e-05
+1.05 0.000197615 0.00019029 6.39731e-05
+1.2 0.000112795 0.00019029 6.39731e-05
+1.35 0.000100262 0.00019029 6.39731e-05
+1.5 9.02357e-05 0.00019029 6.39731e-05
+1.8 7.51966e-05 0.00019029 6.39731e-05
+2.4 0 0.00019029 6.39731e-05
+3 0 0.00019029 6.39731e-05
+3.6 0 0.00019029 6.39731e-05
+END DIST
+
+Metal 5 OVER 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.00022049 6.39731e-05
+0.6 0.000314638 0.00022049 6.39731e-05
+0.75 0.000261521 0.00022049 6.39731e-05
+0.9 0.000224763 0.00022049 6.39731e-05
+1.05 0.000197615 0.00022049 6.39731e-05
+1.2 0.000112795 0.00022049 6.39731e-05
+1.35 0.000100262 0.00022049 6.39731e-05
+1.5 9.02357e-05 0.00022049 6.39731e-05
+1.8 7.51966e-05 0.00022049 6.39731e-05
+2.4 0 0.00022049 6.39731e-05
+3 0 0.00022049 6.39731e-05
+3.6 0 0.00022049 6.39731e-05
+END DIST
+
+Metal 6 RESOVER
+WIDTH Table 1 entries:  1.6
+
+Metal 6 RESOVER 0
+DIST count 55 width 1.6
+0 0 0 1.32576e-05
+0 1.8 0 1.32576e-05
+0 3.4 0 1.32576e-05
+0 4.4 0 1.32576e-05
+0 5.2 0 1.32576e-05
+0 6.8 0 1.32576e-05
+0 7.8 0 1.32576e-05
+0 8.6 0 1.32576e-05
+0 10.2 0 1.32576e-05
+0 13.6 0 1.32576e-05
+1.8 1.8 0 1.32576e-05
+1.8 3.4 0 1.32576e-05
+1.8 4.4 0 1.32576e-05
+1.8 5.2 0 1.32576e-05
+1.8 6.8 0 1.32576e-05
+1.8 7.8 0 1.32576e-05
+1.8 8.6 0 1.32576e-05
+1.8 10.2 0 1.32576e-05
+1.8 13.6 0 1.32576e-05
+3.4 3.4 0 1.32576e-05
+3.4 4.4 0 1.32576e-05
+3.4 5.2 0 1.32576e-05
+3.4 6.8 0 1.32576e-05
+3.4 7.8 0 1.32576e-05
+3.4 8.6 0 1.32576e-05
+3.4 10.2 0 1.32576e-05
+3.4 13.6 0 1.32576e-05
+4.4 4.4 0 1.32576e-05
+4.4 5.2 0 1.32576e-05
+4.4 6.8 0 1.32576e-05
+4.4 7.8 0 1.32576e-05
+4.4 8.6 0 1.32576e-05
+4.4 10.2 0 1.32576e-05
+4.4 13.6 0 1.32576e-05
+5.2 5.2 0 1.32576e-05
+5.2 6.8 0 1.32576e-05
+5.2 7.8 0 1.32576e-05
+5.2 8.6 0 1.32576e-05
+5.2 10.2 0 1.32576e-05
+5.2 13.6 0 1.32576e-05
+6.8 6.8 0 1.32576e-05
+6.8 7.8 0 1.32576e-05
+6.8 8.6 0 1.32576e-05
+6.8 10.2 0 1.32576e-05
+6.8 13.6 0 1.32576e-05
+7.8 7.8 0 1.32576e-05
+7.8 8.6 0 1.32576e-05
+7.8 10.2 0 1.32576e-05
+7.8 13.6 0 1.32576e-05
+8.6 8.6 0 1.32576e-05
+8.6 10.2 0 1.32576e-05
+8.6 13.6 0 1.32576e-05
+10.2 10.2 0 1.32576e-05
+10.2 13.6 0 1.32576e-05
+13.6 0 13.6 1.32576e-05
+END DIST
+
+Metal 6 RESOVER 1
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 2
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 3
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 4
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 5
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 OVER
+WIDTH Table 1 entries:  1.6
+
+Metal 6 OVER 0
+DIST count 12 width 1.6
+1.6 0.000160354 4.15758e-05 6.62879e-06
+3.2 0 4.15758e-05 6.62879e-06
+4 0 4.15758e-05 6.62879e-06
+4.8 0 4.15758e-05 6.62879e-06
+5.6 0 4.15758e-05 6.62879e-06
+6.4 0 4.15758e-05 6.62879e-06
+7.2 0 4.15758e-05 6.62879e-06
+8 0 4.15758e-05 6.62879e-06
+9.6 0 4.15758e-05 6.62879e-06
+12.8 0 4.15758e-05 6.62879e-06
+16 0 4.15758e-05 6.62879e-06
+19.2 0 4.15758e-05 6.62879e-06
+END DIST
+
+Metal 6 OVER 1
+DIST count 12 width 1.6
+1.6 0.000160354 0.000133386 6.62879e-06
+3.2 0 0.000133386 6.62879e-06
+4 0 0.000133386 6.62879e-06
+4.8 0 0.000133386 6.62879e-06
+5.6 0 0.000133386 6.62879e-06
+6.4 0 0.000133386 6.62879e-06
+7.2 0 0.000133386 6.62879e-06
+8 0 0.000133386 6.62879e-06
+9.6 0 0.000133386 6.62879e-06
+12.8 0 0.000133386 6.62879e-06
+16 0 0.000133386 6.62879e-06
+19.2 0 0.000133386 6.62879e-06
+END DIST
+
+Metal 6 OVER 2
+DIST count 12 width 1.6
+1.6 0.000160354 0.000195882 6.62879e-06
+3.2 0 0.000195882 6.62879e-06
+4 0 0.000195882 6.62879e-06
+4.8 0 0.000195882 6.62879e-06
+5.6 0 0.000195882 6.62879e-06
+6.4 0 0.000195882 6.62879e-06
+7.2 0 0.000195882 6.62879e-06
+8 0 0.000195882 6.62879e-06
+9.6 0 0.000195882 6.62879e-06
+12.8 0 0.000195882 6.62879e-06
+16 0 0.000195882 6.62879e-06
+19.2 0 0.000195882 6.62879e-06
+END DIST
+
+Metal 6 OVER 3
+DIST count 12 width 1.6
+1.6 0.000160354 0.000261351 6.62879e-06
+3.2 0 0.000261351 6.62879e-06
+4 0 0.000261351 6.62879e-06
+4.8 0 0.000261351 6.62879e-06
+5.6 0 0.000261351 6.62879e-06
+6.4 0 0.000261351 6.62879e-06
+7.2 0 0.000261351 6.62879e-06
+8 0 0.000261351 6.62879e-06
+9.6 0 0.000261351 6.62879e-06
+12.8 0 0.000261351 6.62879e-06
+16 0 0.000261351 6.62879e-06
+19.2 0 0.000261351 6.62879e-06
+END DIST
+
+Metal 6 OVER 4
+DIST count 12 width 1.6
+1.6 0.000160354 0.000242788 6.62879e-06
+3.2 0 0.000242788 6.62879e-06
+4 0 0.000242788 6.62879e-06
+4.8 0 0.000242788 6.62879e-06
+5.6 0 0.000242788 6.62879e-06
+6.4 0 0.000242788 6.62879e-06
+7.2 0 0.000242788 6.62879e-06
+8 0 0.000242788 6.62879e-06
+9.6 0 0.000242788 6.62879e-06
+12.8 0 0.000242788 6.62879e-06
+16 0 0.000242788 6.62879e-06
+19.2 0 0.000242788 6.62879e-06
+END DIST
+
+Metal 6 OVER 5
+DIST count 12 width 1.6
+1.6 0.000160354 0.000413455 6.62879e-06
+3.2 0 0.000413455 6.62879e-06
+4 0 0.000413455 6.62879e-06
+4.8 0 0.000413455 6.62879e-06
+5.6 0 0.000413455 6.62879e-06
+6.4 0 0.000413455 6.62879e-06
+7.2 0 0.000413455 6.62879e-06
+8 0 0.000413455 6.62879e-06
+9.6 0 0.000413455 6.62879e-06
+12.8 0 0.000413455 6.62879e-06
+16 0 0.000413455 6.62879e-06
+19.2 0 0.000413455 6.62879e-06
+END DIST
+
+Metal 6 UNDER
+WIDTH Table 0 entries: 
+
+Metal 6 DIAGUNDER
+WIDTH Table 0 entries: 
+END DensityModel 0
diff --git a/sky130/openlane/rules.openrcx.sky130B.nom.magic b/sky130/openlane/rules.openrcx.sky130B.nom.magic
new file mode 100644
index 0000000..40ce038
--- /dev/null
+++ b/sky130/openlane/rules.openrcx.sky130B.nom.magic
@@ -0,0 +1,1645 @@
+Extraction Rules for OpenRCX
+
+DIAGMODEL ON
+
+LayerCount 6
+DensityRate 1  0
+
+DensityModel 0
+
+Metal 1 RESOVER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 RESOVER 0
+DIST count 55 width 0.17
+0 0 0 0.0760547
+0 0.29 0 0.0760547
+0 0.46 0 0.0760547
+0 0.665 0 0.0760547
+0 0.75 0 0.0760547
+0 0.92 0 0.0760547
+0 1.125 0 0.0760547
+0 1.21 0 0.0760547
+0 1.38 0 0.0760547
+0 1.84 0 0.0760547
+0.29 0.29 0 0.0760547
+0.29 0.46 0 0.0760547
+0.29 0.665 0 0.0760547
+0.29 0.75 0 0.0760547
+0.29 0.92 0 0.0760547
+0.29 1.125 0 0.0760547
+0.29 1.21 0 0.0760547
+0.29 1.38 0 0.0760547
+0.29 1.84 0 0.0760547
+0.46 0.46 0 0.0760547
+0.46 0.665 0 0.0760547
+0.46 0.75 0 0.0760547
+0.46 0.92 0 0.0760547
+0.46 1.125 0 0.0760547
+0.46 1.21 0 0.0760547
+0.46 1.38 0 0.0760547
+0.46 1.84 0 0.0760547
+0.665 0.665 0 0.0760547
+0.665 0.75 0 0.0760547
+0.665 0.92 0 0.0760547
+0.665 1.125 0 0.0760547
+0.665 1.21 0 0.0760547
+0.665 1.38 0 0.0760547
+0.665 1.84 0 0.0760547
+0.75 0.75 0 0.0760547
+0.75 0.92 0 0.0760547
+0.75 1.125 0 0.0760547
+0.75 1.21 0 0.0760547
+0.75 1.38 0 0.0760547
+0.75 1.84 0 0.0760547
+0.92 0.92 0 0.0760547
+0.92 1.125 0 0.0760547
+0.92 1.21 0 0.0760547
+0.92 1.38 0 0.0760547
+0.92 1.84 0 0.0760547
+1.125 1.125 0 0.0760547
+1.125 1.21 0 0.0760547
+1.125 1.38 0 0.0760547
+1.125 1.84 0 0.0760547
+1.21 1.21 0 0.0760547
+1.21 1.38 0 0.0760547
+1.21 1.84 0 0.0760547
+1.38 1.38 0 0.0760547
+1.38 1.84 0 0.0760547
+1.84 0 1.84 0.0760547
+END DIST
+
+Metal 1 OVER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 OVER 0
+DIST count 12 width 0.17
+0.17 0.000497977 4.50051e-05 0.0380273
+0.34 0.000279412 4.50051e-05 0.0380273
+0.425 0.000232192 4.50051e-05 0.0380273
+0.51 0.000199448 4.50051e-05 0.0380273
+0.595 0.000175236 4.50051e-05 0.0380273
+0.68 0.000156519 4.50051e-05 0.0380273
+0.765 0.000141568 4.50051e-05 0.0380273
+0.85 0.000129322 4.50051e-05 0.0380273
+1.02 0.000110405 4.50051e-05 0.0380273
+1.36 8.56497e-05 4.50051e-05 0.0380273
+1.7 3.92157e-05 4.50051e-05 0.0380273
+2.04 0 4.50051e-05 0.0380273
+END DIST
+
+Metal 1 UNDER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 UNDER 2
+DIST count 12 width 0.17
+0.17 0.000497977 0.00016261 0.0380273
+0.34 0.000279412 0.00016261 0.0380273
+0.425 0.000232192 0.00016261 0.0380273
+0.51 0.000199448 0.00016261 0.0380273
+0.595 0.000175236 0.00016261 0.0380273
+0.68 0.000156519 0.00016261 0.0380273
+0.765 0.000141568 0.00016261 0.0380273
+0.85 0.000129322 0.00016261 0.0380273
+1.02 0.000110405 0.00016261 0.0380273
+1.36 8.56497e-05 0.00016261 0.0380273
+1.7 3.92157e-05 0.00016261 0.0380273
+2.04 0 0.00016261 0.0380273
+END DIST
+
+Metal 1 UNDER 3
+DIST count 12 width 0.17
+0.17 0.000497977 0.000107615 0.0380273
+0.34 0.000279412 0.000107615 0.0380273
+0.425 0.000232192 0.000107615 0.0380273
+0.51 0.000199448 0.000107615 0.0380273
+0.595 0.000175236 0.000107615 0.0380273
+0.68 0.000156519 0.000107615 0.0380273
+0.765 0.000141568 0.000107615 0.0380273
+0.85 0.000129322 0.000107615 0.0380273
+1.02 0.000110405 0.000107615 0.0380273
+1.36 8.56497e-05 0.000107615 0.0380273
+1.7 3.92157e-05 0.000107615 0.0380273
+2.04 0 0.000107615 0.0380273
+END DIST
+
+Metal 1 UNDER 4
+DIST count 12 width 0.17
+0.17 0.000497977 8.27744e-05 0.0380273
+0.34 0.000279412 8.27744e-05 0.0380273
+0.425 0.000232192 8.27744e-05 0.0380273
+0.51 0.000199448 8.27744e-05 0.0380273
+0.595 0.000175236 8.27744e-05 0.0380273
+0.68 0.000156519 8.27744e-05 0.0380273
+0.765 0.000141568 8.27744e-05 0.0380273
+0.85 0.000129322 8.27744e-05 0.0380273
+1.02 0.000110405 8.27744e-05 0.0380273
+1.36 8.56497e-05 8.27744e-05 0.0380273
+1.7 3.92157e-05 8.27744e-05 0.0380273
+2.04 0 8.27744e-05 0.0380273
+END DIST
+
+Metal 1 UNDER 5
+DIST count 12 width 0.17
+0.17 0.000497977 7.58113e-05 0.0380273
+0.34 0.000279412 7.58113e-05 0.0380273
+0.425 0.000232192 7.58113e-05 0.0380273
+0.51 0.000199448 7.58113e-05 0.0380273
+0.595 0.000175236 7.58113e-05 0.0380273
+0.68 0.000156519 7.58113e-05 0.0380273
+0.765 0.000141568 7.58113e-05 0.0380273
+0.85 0.000129322 7.58113e-05 0.0380273
+1.02 0.000110405 7.58113e-05 0.0380273
+1.36 8.56497e-05 7.58113e-05 0.0380273
+1.7 3.92157e-05 7.58113e-05 0.0380273
+2.04 0 7.58113e-05 0.0380273
+END DIST
+
+Metal 1 UNDER 6
+DIST count 12 width 0.17
+0.17 0.000497977 5.72998e-05 0.0380273
+0.34 0.000279412 5.72998e-05 0.0380273
+0.425 0.000232192 5.72998e-05 0.0380273
+0.51 0.000199448 5.72998e-05 0.0380273
+0.595 0.000175236 5.72998e-05 0.0380273
+0.68 0.000156519 5.72998e-05 0.0380273
+0.765 0.000141568 5.72998e-05 0.0380273
+0.85 0.000129322 5.72998e-05 0.0380273
+1.02 0.000110405 5.72998e-05 0.0380273
+1.36 8.56497e-05 5.72998e-05 0.0380273
+1.7 3.92157e-05 5.72998e-05 0.0380273
+2.04 0 5.72998e-05 0.0380273
+END DIST
+
+Metal 1 DIAGUNDER
+WIDTH Table 1 entries:  0.17
+
+Metal 1 DIAGUNDER 2
+DIST count 13 width 0.17
+0 0 7.57172e-05 0.0380273
+0.17 0 0 0.0380273
+0.34 0 0 0.0380273
+0.425 0 0 0.0380273
+0.51 0 0 0.0380273
+0.595 0 0 0.0380273
+0.68 0 0 0.0380273
+0.765 0 0 0.0380273
+0.85 0 0 0.0380273
+1.02 0 0 0.0380273
+1.36 0 0 0.0380273
+1.7 0 0 0.0380273
+2.04 0 0 0.0380273
+END DIST
+
+Metal 1 DIAGUNDER 3
+DIST count 13 width 0.17
+0 0 3.94545e-05 0.0380273
+0.17 0 0 0.0380273
+0.34 0 0 0.0380273
+0.425 0 0 0.0380273
+0.51 0 0 0.0380273
+0.595 0 0 0.0380273
+0.68 0 0 0.0380273
+0.765 0 0 0.0380273
+0.85 0 0 0.0380273
+1.02 0 0 0.0380273
+1.36 0 0 0.0380273
+1.7 0 0 0.0380273
+2.04 0 0 0.0380273
+END DIST
+
+Metal 1 DIAGUNDER 4
+DIST count 13 width 0.17
+0 0 1.62222e-05 0.0380273
+0.17 0 0 0.0380273
+0.34 0 0 0.0380273
+0.425 0 0 0.0380273
+0.51 0 0 0.0380273
+0.595 0 0 0.0380273
+0.68 0 0 0.0380273
+0.765 0 0 0.0380273
+0.85 0 0 0.0380273
+1.02 0 0 0.0380273
+1.36 0 0 0.0380273
+1.7 0 0 0.0380273
+2.04 0 0 0.0380273
+END DIST
+
+Metal 1 DIAGUNDER 5
+DIST count 13 width 0.17
+0 0 1.09798e-05 0.0380273
+0.17 0 0 0.0380273
+0.34 0 0 0.0380273
+0.425 0 0 0.0380273
+0.51 0 0 0.0380273
+0.595 0 0 0.0380273
+0.68 0 0 0.0380273
+0.765 0 0 0.0380273
+0.85 0 0 0.0380273
+1.02 0 0 0.0380273
+1.36 0 0 0.0380273
+1.7 0 0 0.0380273
+2.04 0 0 0.0380273
+END DIST
+
+Metal 1 DIAGUNDER 6
+DIST count 0 width 0.17
+END DIST
+
+Metal 2 RESOVER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.000901876
+0 0.2 0 0.000901876
+0 0.34 0 0.000901876
+0 0.47 0 0.000901876
+0 0.54 0 0.000901876
+0 0.68 0 0.000901876
+0 0.81 0 0.000901876
+0 0.88 0 0.000901876
+0 1.02 0 0.000901876
+0 1.36 0 0.000901876
+0.2 0.2 0 0.000901876
+0.2 0.34 0 0.000901876
+0.2 0.47 0 0.000901876
+0.2 0.54 0 0.000901876
+0.2 0.68 0 0.000901876
+0.2 0.81 0 0.000901876
+0.2 0.88 0 0.000901876
+0.2 1.02 0 0.000901876
+0.2 1.36 0 0.000901876
+0.34 0.34 0 0.000901876
+0.34 0.47 0 0.000901876
+0.34 0.54 0 0.000901876
+0.34 0.68 0 0.000901876
+0.34 0.81 0 0.000901876
+0.34 0.88 0 0.000901876
+0.34 1.02 0 0.000901876
+0.34 1.36 0 0.000901876
+0.47 0.47 0 0.000901876
+0.47 0.54 0 0.000901876
+0.47 0.68 0 0.000901876
+0.47 0.81 0 0.000901876
+0.47 0.88 0 0.000901876
+0.47 1.02 0 0.000901876
+0.47 1.36 0 0.000901876
+0.54 0.54 0 0.000901876
+0.54 0.68 0 0.000901876
+0.54 0.81 0 0.000901876
+0.54 0.88 0 0.000901876
+0.54 1.02 0 0.000901876
+0.54 1.36 0 0.000901876
+0.68 0.68 0 0.000901876
+0.68 0.81 0 0.000901876
+0.68 0.88 0 0.000901876
+0.68 1.02 0 0.000901876
+0.68 1.36 0 0.000901876
+0.81 0.81 0 0.000901876
+0.81 0.88 0 0.000901876
+0.81 1.02 0 0.000901876
+0.81 1.36 0 0.000901876
+0.88 0.88 0 0.000901876
+0.88 1.02 0 0.000901876
+0.88 1.36 0 0.000901876
+1.02 1.02 0 0.000901876
+1.02 1.36 0 0.000901876
+1.36 0 1.36 0.000901876
+END DIST
+
+Metal 2 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 2 OVER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 OVER 0
+DIST count 12 width 0.14
+0.14 0.000838745 4.36667e-05 0.000450938
+0.28 0.000471303 4.36667e-05 0.000450938
+0.35 0.000391492 4.36667e-05 0.000450938
+0.42 0.000336067 4.36667e-05 0.000450938
+0.49 0.000295057 4.36667e-05 0.000450938
+0.56 0.000263348 4.36667e-05 0.000450938
+0.63 0.000238021 4.36667e-05 0.000450938
+0.7 0.000217283 4.36667e-05 0.000450938
+0.84 0.000185267 4.36667e-05 0.000450938
+1.12 0.000143435 4.36667e-05 0.000450938
+1.4 0.000117182 4.36667e-05 0.000450938
+1.68 0 9.77792e-05 0.000450938
+END DIST
+
+Metal 2 OVER 1
+DIST count 12 width 0.14
+0.14 0.000838745 0.000119272 0.000450938
+0.28 0.000471303 0.000119272 0.000450938
+0.35 0.000391492 0.000119272 0.000450938
+0.42 0.000336067 0.000119272 0.000450938
+0.49 0.000295057 0.000119272 0.000450938
+0.56 0.000263348 0.000119272 0.000450938
+0.63 0.000238021 0.000119272 0.000450938
+0.7 0.000217283 0.000119272 0.000450938
+0.84 0.000185267 0.000119272 0.000450938
+1.12 0.000143435 0.000119272 0.000450938
+1.4 0.000117182 0.000119272 0.000450938
+1.68 0 0.000173385 0.000450938
+END DIST
+
+Metal 2 UNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 UNDER 3
+DIST count 12 width 0.14
+0.14 0.000838745 0.000104211 0.000450938
+0.28 0.000471303 0.000104211 0.000450938
+0.35 0.000391492 0.000104211 0.000450938
+0.42 0.000336067 0.000104211 0.000450938
+0.49 0.000295057 0.000104211 0.000450938
+0.56 0.000263348 0.000104211 0.000450938
+0.63 0.000238021 0.000104211 0.000450938
+0.7 0.000217283 0.000104211 0.000450938
+0.84 0.000185267 0.000104211 0.000450938
+1.12 0.000143435 0.000104211 0.000450938
+1.4 0.000117182 0.000104211 0.000450938
+1.68 0 0.000158323 0.000450938
+END DIST
+
+Metal 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000838745 8.64374e-05 0.000450938
+0.28 0.000471303 8.64374e-05 0.000450938
+0.35 0.000391492 8.64374e-05 0.000450938
+0.42 0.000336067 8.64374e-05 0.000450938
+0.49 0.000295057 8.64374e-05 0.000450938
+0.56 0.000263348 8.64374e-05 0.000450938
+0.63 0.000238021 8.64374e-05 0.000450938
+0.7 0.000217283 8.64374e-05 0.000450938
+0.84 0.000185267 8.64374e-05 0.000450938
+1.12 0.000143435 8.64374e-05 0.000450938
+1.4 0.000117182 8.64374e-05 0.000450938
+1.68 0 0.00014055 0.000450938
+END DIST
+
+Metal 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000838745 7.71644e-05 0.000450938
+0.28 0.000471303 7.71644e-05 0.000450938
+0.35 0.000391492 7.71644e-05 0.000450938
+0.42 0.000336067 7.71644e-05 0.000450938
+0.49 0.000295057 7.71644e-05 0.000450938
+0.56 0.000263348 7.71644e-05 0.000450938
+0.63 0.000238021 7.71644e-05 0.000450938
+0.7 0.000217283 7.71644e-05 0.000450938
+0.84 0.000185267 7.71644e-05 0.000450938
+1.12 0.000143435 7.71644e-05 0.000450938
+1.4 0.000117182 7.71644e-05 0.000450938
+1.68 0 0.000131277 0.000450938
+END DIST
+
+Metal 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000838745 5.98756e-05 0.000450938
+0.28 0.000471303 5.98756e-05 0.000450938
+0.35 0.000391492 5.98756e-05 0.000450938
+0.42 0.000336067 5.98756e-05 0.000450938
+0.49 0.000295057 5.98756e-05 0.000450938
+0.56 0.000263348 5.98756e-05 0.000450938
+0.63 0.000238021 5.98756e-05 0.000450938
+0.7 0.000217283 5.98756e-05 0.000450938
+0.84 0.000185267 5.98756e-05 0.000450938
+1.12 0.000143435 5.98756e-05 0.000450938
+1.4 0.000117182 5.98756e-05 0.000450938
+1.68 0 0.000113988 0.000450938
+END DIST
+
+Metal 2 DIAGUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 DIAGUNDER 3
+DIST count 13 width 0.14
+0 0 9.05051e-06 0.000450938
+0.14 0 0 0.000450938
+0.28 0 0 0.000450938
+0.35 0 0 0.000450938
+0.42 0 0 0.000450938
+0.49 0 0 0.000450938
+0.56 0 0 0.000450938
+0.63 0 0 0.000450938
+0.7 0 0 0.000450938
+0.84 0 0 0.000450938
+1.12 0 0 0.000450938
+1.4 0 0 0.000450938
+1.68 0 0 0.000450938
+END DIST
+
+Metal 2 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 2.50303e-05 0.000450938
+0.14 0 0 0.000450938
+0.28 0 0 0.000450938
+0.35 0 0 0.000450938
+0.42 0 0 0.000450938
+0.49 0 0 0.000450938
+0.56 0 0 0.000450938
+0.63 0 0 0.000450938
+0.7 0 0 0.000450938
+0.84 0 0 0.000450938
+1.12 0 0 0.000450938
+1.4 0 0 0.000450938
+1.68 0 0 0.000450938
+END DIST
+
+Metal 2 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 1.69899e-05 0.000450938
+0.14 0 0 0.000450938
+0.28 0 0 0.000450938
+0.35 0 0 0.000450938
+0.42 0 0 0.000450938
+0.49 0 0 0.000450938
+0.56 0 0 0.000450938
+0.63 0 0 0.000450938
+0.7 0 0 0.000450938
+0.84 0 0 0.000450938
+1.12 0 0 0.000450938
+1.4 0 0 0.000450938
+1.68 0 0 0.000450938
+END DIST
+
+Metal 2 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 1.23838e-05 0.000450938
+0.14 0 0 0.000450938
+0.28 0 0 0.000450938
+0.35 0 0 0.000450938
+0.42 0 0 0.000450938
+0.49 0 0 0.000450938
+0.56 0 0 0.000450938
+0.63 0 0 0.000450938
+0.7 0 0 0.000450938
+0.84 0 0 0.000450938
+1.12 0 0 0.000450938
+1.4 0 0 0.000450938
+1.68 0 0 0.000450938
+END DIST
+
+Metal 2 OVERUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 2 OVER 1 UNDER 3
+DIST count 12 width 0.14
+0.14 0.000838745 0.000179817 0.000450938
+0.28 0.000471303 0.000179817 0.000450938
+0.35 0.000391492 0.000179817 0.000450938
+0.42 0.000336067 0.000179817 0.000450938
+0.49 0.000295057 0.000179817 0.000450938
+0.56 0.000263348 0.000179817 0.000450938
+0.63 0.000238021 0.000179817 0.000450938
+0.7 0.000217283 0.000179817 0.000450938
+0.84 0.000185267 0.000179817 0.000450938
+1.12 0.000143435 0.000179817 0.000450938
+1.4 0.000117182 0.000179817 0.000450938
+1.68 0 0.000233929 0.000450938
+END DIST
+
+Metal 2 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000838745 0.000162043 0.000450938
+0.28 0.000471303 0.000162043 0.000450938
+0.35 0.000391492 0.000162043 0.000450938
+0.42 0.000336067 0.000162043 0.000450938
+0.49 0.000295057 0.000162043 0.000450938
+0.56 0.000263348 0.000162043 0.000450938
+0.63 0.000238021 0.000162043 0.000450938
+0.7 0.000217283 0.000162043 0.000450938
+0.84 0.000185267 0.000162043 0.000450938
+1.12 0.000143435 0.000162043 0.000450938
+1.4 0.000117182 0.000162043 0.000450938
+1.68 0 0.000216156 0.000450938
+END DIST
+
+Metal 2 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000838745 0.00015277 0.000450938
+0.28 0.000471303 0.00015277 0.000450938
+0.35 0.000391492 0.00015277 0.000450938
+0.42 0.000336067 0.00015277 0.000450938
+0.49 0.000295057 0.00015277 0.000450938
+0.56 0.000263348 0.00015277 0.000450938
+0.63 0.000238021 0.00015277 0.000450938
+0.7 0.000217283 0.00015277 0.000450938
+0.84 0.000185267 0.00015277 0.000450938
+1.12 0.000143435 0.00015277 0.000450938
+1.4 0.000117182 0.00015277 0.000450938
+1.68 0 0.000206883 0.000450938
+END DIST
+
+Metal 2 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000838745 0.000135481 0.000450938
+0.28 0.000471303 0.000135481 0.000450938
+0.35 0.000391492 0.000135481 0.000450938
+0.42 0.000336067 0.000135481 0.000450938
+0.49 0.000295057 0.000135481 0.000450938
+0.56 0.000263348 0.000135481 0.000450938
+0.63 0.000238021 0.000135481 0.000450938
+0.7 0.000217283 0.000135481 0.000450938
+0.84 0.000185267 0.000135481 0.000450938
+1.12 0.000143435 0.000135481 0.000450938
+1.4 0.000117182 0.000135481 0.000450938
+1.68 0 0.000189594 0.000450938
+END DIST
+
+Metal 3 RESOVER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 RESOVER 0
+DIST count 55 width 0.14
+0 0 0 0.000901876
+0 0.32 0 0.000901876
+0 0.46 0 0.000901876
+0 0.71 0 0.000901876
+0 0.78 0 0.000901876
+0 0.92 0 0.000901876
+0 1.17 0 0.000901876
+0 1.24 0 0.000901876
+0 1.38 0 0.000901876
+0 1.84 0 0.000901876
+0.32 0.32 0 0.000901876
+0.32 0.46 0 0.000901876
+0.32 0.71 0 0.000901876
+0.32 0.78 0 0.000901876
+0.32 0.92 0 0.000901876
+0.32 1.17 0 0.000901876
+0.32 1.24 0 0.000901876
+0.32 1.38 0 0.000901876
+0.32 1.84 0 0.000901876
+0.46 0.46 0 0.000901876
+0.46 0.71 0 0.000901876
+0.46 0.78 0 0.000901876
+0.46 0.92 0 0.000901876
+0.46 1.17 0 0.000901876
+0.46 1.24 0 0.000901876
+0.46 1.38 0 0.000901876
+0.46 1.84 0 0.000901876
+0.71 0.71 0 0.000901876
+0.71 0.78 0 0.000901876
+0.71 0.92 0 0.000901876
+0.71 1.17 0 0.000901876
+0.71 1.24 0 0.000901876
+0.71 1.38 0 0.000901876
+0.71 1.84 0 0.000901876
+0.78 0.78 0 0.000901876
+0.78 0.92 0 0.000901876
+0.78 1.17 0 0.000901876
+0.78 1.24 0 0.000901876
+0.78 1.38 0 0.000901876
+0.78 1.84 0 0.000901876
+0.92 0.92 0 0.000901876
+0.92 1.17 0 0.000901876
+0.92 1.24 0 0.000901876
+0.92 1.38 0 0.000901876
+0.92 1.84 0 0.000901876
+1.17 1.17 0 0.000901876
+1.17 1.24 0 0.000901876
+1.17 1.38 0 0.000901876
+1.17 1.84 0 0.000901876
+1.24 1.24 0 0.000901876
+1.24 1.38 0 0.000901876
+1.24 1.84 0 0.000901876
+1.38 1.38 0 0.000901876
+1.38 1.84 0 0.000901876
+1.84 0 1.84 0.000901876
+END DIST
+
+Metal 3 RESOVER 1
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 RESOVER 2
+DIST count 0 width 0.14
+END DIST
+
+Metal 3 OVER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 OVER 0
+DIST count 12 width 0.14
+0.14 0.000889851 3.47273e-05 0.000450938
+0.28 0.000497251 3.47273e-05 0.000450938
+0.35 0.000413304 3.47273e-05 0.000450938
+0.42 0.000355285 3.47273e-05 0.000450938
+0.49 0.000312469 3.47273e-05 0.000450938
+0.56 0.000279405 3.47273e-05 0.000450938
+0.63 0.000253003 3.47273e-05 0.000450938
+0.7 0.000231378 3.47273e-05 0.000450938
+0.84 0.00019795 3.47273e-05 0.000450938
+1.12 0.000154118 3.47273e-05 0.000450938
+1.4 0.000126457 3.47273e-05 0.000450938
+1.68 0 9.48524e-05 0.000450938
+END DIST
+
+Metal 3 OVER 1
+DIST count 12 width 0.14
+0.14 0.000889851 6.94309e-05 0.000450938
+0.28 0.000497251 6.94309e-05 0.000450938
+0.35 0.000413304 6.94309e-05 0.000450938
+0.42 0.000355285 6.94309e-05 0.000450938
+0.49 0.000312469 6.94309e-05 0.000450938
+0.56 0.000279405 6.94309e-05 0.000450938
+0.63 0.000253003 6.94309e-05 0.000450938
+0.7 0.000231378 6.94309e-05 0.000450938
+0.84 0.00019795 6.94309e-05 0.000450938
+1.12 0.000154118 6.94309e-05 0.000450938
+1.4 0.000126457 6.94309e-05 0.000450938
+1.68 0 0.000129556 0.000450938
+END DIST
+
+Metal 3 OVER 2
+DIST count 12 width 0.14
+0.14 0.000889851 7.76097e-05 0.000450938
+0.28 0.000497251 7.76097e-05 0.000450938
+0.35 0.000413304 7.76097e-05 0.000450938
+0.42 0.000355285 7.76097e-05 0.000450938
+0.49 0.000312469 7.76097e-05 0.000450938
+0.56 0.000279405 7.76097e-05 0.000450938
+0.63 0.000253003 7.76097e-05 0.000450938
+0.7 0.000231378 7.76097e-05 0.000450938
+0.84 0.00019795 7.76097e-05 0.000450938
+1.12 0.000154118 7.76097e-05 0.000450938
+1.4 0.000126457 7.76097e-05 0.000450938
+1.68 0 0.000137735 0.000450938
+END DIST
+
+Metal 3 UNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000889851 0.000118641 0.000450938
+0.28 0.000497251 0.000118641 0.000450938
+0.35 0.000413304 0.000118641 0.000450938
+0.42 0.000355285 0.000118641 0.000450938
+0.49 0.000312469 0.000118641 0.000450938
+0.56 0.000279405 0.000118641 0.000450938
+0.63 0.000253003 0.000118641 0.000450938
+0.7 0.000231378 0.000118641 0.000450938
+0.84 0.00019795 0.000118641 0.000450938
+1.12 0.000154118 0.000118641 0.000450938
+1.4 0.000126457 0.000118641 0.000450938
+1.68 0 0.000178766 0.000450938
+END DIST
+
+Metal 3 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000889851 8.02892e-05 0.000450938
+0.28 0.000497251 8.02892e-05 0.000450938
+0.35 0.000413304 8.02892e-05 0.000450938
+0.42 0.000355285 8.02892e-05 0.000450938
+0.49 0.000312469 8.02892e-05 0.000450938
+0.56 0.000279405 8.02892e-05 0.000450938
+0.63 0.000253003 8.02892e-05 0.000450938
+0.7 0.000231378 8.02892e-05 0.000450938
+0.84 0.00019795 8.02892e-05 0.000450938
+1.12 0.000154118 8.02892e-05 0.000450938
+1.4 0.000126457 8.02892e-05 0.000450938
+1.68 0 0.000140414 0.000450938
+END DIST
+
+Metal 3 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000889851 5.73169e-05 0.000450938
+0.28 0.000497251 5.73169e-05 0.000450938
+0.35 0.000413304 5.73169e-05 0.000450938
+0.42 0.000355285 5.73169e-05 0.000450938
+0.49 0.000312469 5.73169e-05 0.000450938
+0.56 0.000279405 5.73169e-05 0.000450938
+0.63 0.000253003 5.73169e-05 0.000450938
+0.7 0.000231378 5.73169e-05 0.000450938
+0.84 0.00019795 5.73169e-05 0.000450938
+1.12 0.000154118 5.73169e-05 0.000450938
+1.4 0.000126457 5.73169e-05 0.000450938
+1.68 0 0.000117442 0.000450938
+END DIST
+
+Metal 3 DIAGUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 DIAGUNDER 4
+DIST count 13 width 0.14
+0 0 5.66061e-05 0.000450938
+0.14 0 0 0.000450938
+0.28 0 0 0.000450938
+0.35 0 0 0.000450938
+0.42 0 0 0.000450938
+0.49 0 0 0.000450938
+0.56 0 0 0.000450938
+0.63 0 0 0.000450938
+0.7 0 0 0.000450938
+0.84 0 0 0.000450938
+1.12 0 0 0.000450938
+1.4 0 0 0.000450938
+1.68 0 0 0.000450938
+END DIST
+
+Metal 3 DIAGUNDER 5
+DIST count 13 width 0.14
+0 0 2.50505e-05 0.000450938
+0.14 0 0 0.000450938
+0.28 0 0 0.000450938
+0.35 0 0 0.000450938
+0.42 0 0 0.000450938
+0.49 0 0 0.000450938
+0.56 0 0 0.000450938
+0.63 0 0 0.000450938
+0.7 0 0 0.000450938
+0.84 0 0 0.000450938
+1.12 0 0 0.000450938
+1.4 0 0 0.000450938
+1.68 0 0 0.000450938
+END DIST
+
+Metal 3 DIAGUNDER 6
+DIST count 13 width 0.14
+0 0 1.77172e-05 0.000450938
+0.14 0 0 0.000450938
+0.28 0 0 0.000450938
+0.35 0 0 0.000450938
+0.42 0 0 0.000450938
+0.49 0 0 0.000450938
+0.56 0 0 0.000450938
+0.63 0 0 0.000450938
+0.7 0 0 0.000450938
+0.84 0 0 0.000450938
+1.12 0 0 0.000450938
+1.4 0 0 0.000450938
+1.68 0 0 0.000450938
+END DIST
+
+Metal 3 OVERUNDER
+WIDTH Table 1 entries:  0.14
+
+Metal 3 OVER 1 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000889851 0.000153344 0.000450938
+0.28 0.000497251 0.000153344 0.000450938
+0.35 0.000413304 0.000153344 0.000450938
+0.42 0.000355285 0.000153344 0.000450938
+0.49 0.000312469 0.000153344 0.000450938
+0.56 0.000279405 0.000153344 0.000450938
+0.63 0.000253003 0.000153344 0.000450938
+0.7 0.000231378 0.000153344 0.000450938
+0.84 0.00019795 0.000153344 0.000450938
+1.12 0.000154118 0.000153344 0.000450938
+1.4 0.000126457 0.000153344 0.000450938
+1.68 0 0.000213469 0.000450938
+END DIST
+
+Metal 3 OVER 1 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000889851 0.000114993 0.000450938
+0.28 0.000497251 0.000114993 0.000450938
+0.35 0.000413304 0.000114993 0.000450938
+0.42 0.000355285 0.000114993 0.000450938
+0.49 0.000312469 0.000114993 0.000450938
+0.56 0.000279405 0.000114993 0.000450938
+0.63 0.000253003 0.000114993 0.000450938
+0.7 0.000231378 0.000114993 0.000450938
+0.84 0.00019795 0.000114993 0.000450938
+1.12 0.000154118 0.000114993 0.000450938
+1.4 0.000126457 0.000114993 0.000450938
+1.68 0 0.000175118 0.000450938
+END DIST
+
+Metal 3 OVER 1 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000889851 9.20205e-05 0.000450938
+0.28 0.000497251 9.20205e-05 0.000450938
+0.35 0.000413304 9.20205e-05 0.000450938
+0.42 0.000355285 9.20205e-05 0.000450938
+0.49 0.000312469 9.20205e-05 0.000450938
+0.56 0.000279405 9.20205e-05 0.000450938
+0.63 0.000253003 9.20205e-05 0.000450938
+0.7 0.000231378 9.20205e-05 0.000450938
+0.84 0.00019795 9.20205e-05 0.000450938
+1.12 0.000154118 9.20205e-05 0.000450938
+1.4 0.000126457 9.20205e-05 0.000450938
+1.68 0 0.000152146 0.000450938
+END DIST
+
+Metal 3 OVER 2 UNDER 4
+DIST count 12 width 0.14
+0.14 0.000889851 0.000161523 0.000450938
+0.28 0.000497251 0.000161523 0.000450938
+0.35 0.000413304 0.000161523 0.000450938
+0.42 0.000355285 0.000161523 0.000450938
+0.49 0.000312469 0.000161523 0.000450938
+0.56 0.000279405 0.000161523 0.000450938
+0.63 0.000253003 0.000161523 0.000450938
+0.7 0.000231378 0.000161523 0.000450938
+0.84 0.00019795 0.000161523 0.000450938
+1.12 0.000154118 0.000161523 0.000450938
+1.4 0.000126457 0.000161523 0.000450938
+1.68 0 0.000221648 0.000450938
+END DIST
+
+Metal 3 OVER 2 UNDER 5
+DIST count 12 width 0.14
+0.14 0.000889851 0.000123172 0.000450938
+0.28 0.000497251 0.000123172 0.000450938
+0.35 0.000413304 0.000123172 0.000450938
+0.42 0.000355285 0.000123172 0.000450938
+0.49 0.000312469 0.000123172 0.000450938
+0.56 0.000279405 0.000123172 0.000450938
+0.63 0.000253003 0.000123172 0.000450938
+0.7 0.000231378 0.000123172 0.000450938
+0.84 0.00019795 0.000123172 0.000450938
+1.12 0.000154118 0.000123172 0.000450938
+1.4 0.000126457 0.000123172 0.000450938
+1.68 0 0.000183297 0.000450938
+END DIST
+
+Metal 3 OVER 2 UNDER 6
+DIST count 12 width 0.14
+0.14 0.000889851 0.000100199 0.000450938
+0.28 0.000497251 0.000100199 0.000450938
+0.35 0.000413304 0.000100199 0.000450938
+0.42 0.000355285 0.000100199 0.000450938
+0.49 0.000312469 0.000100199 0.000450938
+0.56 0.000279405 0.000100199 0.000450938
+0.63 0.000253003 0.000100199 0.000450938
+0.7 0.000231378 0.000100199 0.000450938
+0.84 0.00019795 0.000100199 0.000450938
+1.12 0.000154118 0.000100199 0.000450938
+1.4 0.000126457 0.000100199 0.000450938
+1.68 0 0.000160324 0.000450938
+END DIST
+
+Metal 4 RESOVER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000158249
+0 0.38 0 0.000158249
+0 0.68 0 0.000158249
+0 0.91 0 0.000158249
+0 1.06 0 0.000158249
+0 1.36 0 0.000158249
+0 1.59 0 0.000158249
+0 1.74 0 0.000158249
+0 2.04 0 0.000158249
+0 2.72 0 0.000158249
+0.38 0.38 0 0.000158249
+0.38 0.68 0 0.000158249
+0.38 0.91 0 0.000158249
+0.38 1.06 0 0.000158249
+0.38 1.36 0 0.000158249
+0.38 1.59 0 0.000158249
+0.38 1.74 0 0.000158249
+0.38 2.04 0 0.000158249
+0.38 2.72 0 0.000158249
+0.68 0.68 0 0.000158249
+0.68 0.91 0 0.000158249
+0.68 1.06 0 0.000158249
+0.68 1.36 0 0.000158249
+0.68 1.59 0 0.000158249
+0.68 1.74 0 0.000158249
+0.68 2.04 0 0.000158249
+0.68 2.72 0 0.000158249
+0.91 0.91 0 0.000158249
+0.91 1.06 0 0.000158249
+0.91 1.36 0 0.000158249
+0.91 1.59 0 0.000158249
+0.91 1.74 0 0.000158249
+0.91 2.04 0 0.000158249
+0.91 2.72 0 0.000158249
+1.06 1.06 0 0.000158249
+1.06 1.36 0 0.000158249
+1.06 1.59 0 0.000158249
+1.06 1.74 0 0.000158249
+1.06 2.04 0 0.000158249
+1.06 2.72 0 0.000158249
+1.36 1.36 0 0.000158249
+1.36 1.59 0 0.000158249
+1.36 1.74 0 0.000158249
+1.36 2.04 0 0.000158249
+1.36 2.72 0 0.000158249
+1.59 1.59 0 0.000158249
+1.59 1.74 0 0.000158249
+1.59 2.04 0 0.000158249
+1.59 2.72 0 0.000158249
+1.74 1.74 0 0.000158249
+1.74 2.04 0 0.000158249
+1.74 2.72 0 0.000158249
+2.04 2.04 0 0.000158249
+2.04 2.72 0 0.000158249
+2.72 0 2.72 0.000158249
+END DIST
+
+Metal 4 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 4 OVER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 OVER 0
+DIST count 12 width 0.3
+0.3 0.000554112 3.94141e-05 7.91246e-05
+0.6 0.000311553 3.94141e-05 7.91246e-05
+0.75 0.000258699 3.94141e-05 7.91246e-05
+0.9 0.000221966 3.94141e-05 7.91246e-05
+1.05 0.00019478 3.94141e-05 7.91246e-05
+1.2 0.000173759 3.94141e-05 7.91246e-05
+1.35 9.42761e-05 3.94141e-05 7.91246e-05
+1.5 8.48485e-05 3.94141e-05 7.91246e-05
+1.8 7.07071e-05 3.94141e-05 7.91246e-05
+2.4 0 3.94141e-05 7.91246e-05
+3 0 3.94141e-05 7.91246e-05
+3.6 0 3.94141e-05 7.91246e-05
+END DIST
+
+Metal 4 OVER 1
+DIST count 12 width 0.3
+0.3 0.000554112 8.64165e-05 7.91246e-05
+0.6 0.000311553 8.64165e-05 7.91246e-05
+0.75 0.000258699 8.64165e-05 7.91246e-05
+0.9 0.000221966 8.64165e-05 7.91246e-05
+1.05 0.00019478 8.64165e-05 7.91246e-05
+1.2 0.000173759 8.64165e-05 7.91246e-05
+1.35 9.42761e-05 8.64165e-05 7.91246e-05
+1.5 8.48485e-05 8.64165e-05 7.91246e-05
+1.8 7.07071e-05 8.64165e-05 7.91246e-05
+2.4 0 8.64165e-05 7.91246e-05
+3 0 8.64165e-05 7.91246e-05
+3.6 0 8.64165e-05 7.91246e-05
+END DIST
+
+Metal 4 OVER 2
+DIST count 12 width 0.3
+0.3 0.000554112 0.000113273 7.91246e-05
+0.6 0.000311553 0.000113273 7.91246e-05
+0.75 0.000258699 0.000113273 7.91246e-05
+0.9 0.000221966 0.000113273 7.91246e-05
+1.05 0.00019478 0.000113273 7.91246e-05
+1.2 0.000173759 0.000113273 7.91246e-05
+1.35 9.42761e-05 0.000113273 7.91246e-05
+1.5 8.48485e-05 0.000113273 7.91246e-05
+1.8 7.07071e-05 0.000113273 7.91246e-05
+2.4 0 0.000113273 7.91246e-05
+3 0 0.000113273 7.91246e-05
+3.6 0 0.000113273 7.91246e-05
+END DIST
+
+Metal 4 OVER 3
+DIST count 12 width 0.3
+0.3 0.000554112 0.000199707 7.91246e-05
+0.6 0.000311553 0.000199707 7.91246e-05
+0.75 0.000258699 0.000199707 7.91246e-05
+0.9 0.000221966 0.000199707 7.91246e-05
+1.05 0.00019478 0.000199707 7.91246e-05
+1.2 0.000173759 0.000199707 7.91246e-05
+1.35 9.42761e-05 0.000199707 7.91246e-05
+1.5 8.48485e-05 0.000199707 7.91246e-05
+1.8 7.07071e-05 0.000199707 7.91246e-05
+2.4 0 0.000199707 7.91246e-05
+3 0 0.000199707 7.91246e-05
+3.6 0 0.000199707 7.91246e-05
+END DIST
+
+Metal 4 UNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.000168162 7.91246e-05
+0.6 0.000311553 0.000168162 7.91246e-05
+0.75 0.000258699 0.000168162 7.91246e-05
+0.9 0.000221966 0.000168162 7.91246e-05
+1.05 0.00019478 0.000168162 7.91246e-05
+1.2 0.000173759 0.000168162 7.91246e-05
+1.35 9.42761e-05 0.000168162 7.91246e-05
+1.5 8.48485e-05 0.000168162 7.91246e-05
+1.8 7.07071e-05 0.000168162 7.91246e-05
+2.4 0 0.000168162 7.91246e-05
+3 0 0.000168162 7.91246e-05
+3.6 0 0.000168162 7.91246e-05
+END DIST
+
+Metal 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 8.20418e-05 7.91246e-05
+0.6 0.000311553 8.20418e-05 7.91246e-05
+0.75 0.000258699 8.20418e-05 7.91246e-05
+0.9 0.000221966 8.20418e-05 7.91246e-05
+1.05 0.00019478 8.20418e-05 7.91246e-05
+1.2 0.000173759 8.20418e-05 7.91246e-05
+1.35 9.42761e-05 8.20418e-05 7.91246e-05
+1.5 8.48485e-05 8.20418e-05 7.91246e-05
+1.8 7.07071e-05 8.20418e-05 7.91246e-05
+2.4 0 8.20418e-05 7.91246e-05
+3 0 8.20418e-05 7.91246e-05
+3.6 0 8.20418e-05 7.91246e-05
+END DIST
+
+Metal 4 DIAGUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 DIAGUNDER 5
+DIST count 13 width 0.3
+0 0 2.54545e-05 7.91246e-05
+0.3 0 0 7.91246e-05
+0.6 0 0 7.91246e-05
+0.75 0 0 7.91246e-05
+0.9 0 0 7.91246e-05
+1.05 0 0 7.91246e-05
+1.2 0 0 7.91246e-05
+1.35 0 0 7.91246e-05
+1.5 0 0 7.91246e-05
+1.8 0 0 7.91246e-05
+2.4 0 0 7.91246e-05
+3 0 0 7.91246e-05
+3.6 0 0 7.91246e-05
+END DIST
+
+Metal 4 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 3.43434e-05 7.91246e-05
+0.3 0 0 7.91246e-05
+0.6 0 0 7.91246e-05
+0.75 0 0 7.91246e-05
+0.9 0 0 7.91246e-05
+1.05 0 0 7.91246e-05
+1.2 0 0 7.91246e-05
+1.35 0 0 7.91246e-05
+1.5 0 0 7.91246e-05
+1.8 0 0 7.91246e-05
+2.4 0 0 7.91246e-05
+3 0 0 7.91246e-05
+3.6 0 0 7.91246e-05
+END DIST
+
+Metal 4 OVERUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 4 OVER 1 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.000215164 7.91246e-05
+0.6 0.000311553 0.000215164 7.91246e-05
+0.75 0.000258699 0.000215164 7.91246e-05
+0.9 0.000221966 0.000215164 7.91246e-05
+1.05 0.00019478 0.000215164 7.91246e-05
+1.2 0.000173759 0.000215164 7.91246e-05
+1.35 9.42761e-05 0.000215164 7.91246e-05
+1.5 8.48485e-05 0.000215164 7.91246e-05
+1.8 7.07071e-05 0.000215164 7.91246e-05
+2.4 0 0.000215164 7.91246e-05
+3 0 0.000215164 7.91246e-05
+3.6 0 0.000215164 7.91246e-05
+END DIST
+
+Metal 4 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 0.000129044 7.91246e-05
+0.6 0.000311553 0.000129044 7.91246e-05
+0.75 0.000258699 0.000129044 7.91246e-05
+0.9 0.000221966 0.000129044 7.91246e-05
+1.05 0.00019478 0.000129044 7.91246e-05
+1.2 0.000173759 0.000129044 7.91246e-05
+1.35 9.42761e-05 0.000129044 7.91246e-05
+1.5 8.48485e-05 0.000129044 7.91246e-05
+1.8 7.07071e-05 0.000129044 7.91246e-05
+2.4 0 0.000129044 7.91246e-05
+3 0 0.000129044 7.91246e-05
+3.6 0 0.000129044 7.91246e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.00024202 7.91246e-05
+0.6 0.000311553 0.00024202 7.91246e-05
+0.75 0.000258699 0.00024202 7.91246e-05
+0.9 0.000221966 0.00024202 7.91246e-05
+1.05 0.00019478 0.00024202 7.91246e-05
+1.2 0.000173759 0.00024202 7.91246e-05
+1.35 9.42761e-05 0.00024202 7.91246e-05
+1.5 8.48485e-05 0.00024202 7.91246e-05
+1.8 7.07071e-05 0.00024202 7.91246e-05
+2.4 0 0.00024202 7.91246e-05
+3 0 0.00024202 7.91246e-05
+3.6 0 0.00024202 7.91246e-05
+END DIST
+
+Metal 4 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 0.0001559 7.91246e-05
+0.6 0.000311553 0.0001559 7.91246e-05
+0.75 0.000258699 0.0001559 7.91246e-05
+0.9 0.000221966 0.0001559 7.91246e-05
+1.05 0.00019478 0.0001559 7.91246e-05
+1.2 0.000173759 0.0001559 7.91246e-05
+1.35 9.42761e-05 0.0001559 7.91246e-05
+1.5 8.48485e-05 0.0001559 7.91246e-05
+1.8 7.07071e-05 0.0001559 7.91246e-05
+2.4 0 0.0001559 7.91246e-05
+3 0 0.0001559 7.91246e-05
+3.6 0 0.0001559 7.91246e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 5
+DIST count 12 width 0.3
+0.3 0.000554112 0.000328455 7.91246e-05
+0.6 0.000311553 0.000328455 7.91246e-05
+0.75 0.000258699 0.000328455 7.91246e-05
+0.9 0.000221966 0.000328455 7.91246e-05
+1.05 0.00019478 0.000328455 7.91246e-05
+1.2 0.000173759 0.000328455 7.91246e-05
+1.35 9.42761e-05 0.000328455 7.91246e-05
+1.5 8.48485e-05 0.000328455 7.91246e-05
+1.8 7.07071e-05 0.000328455 7.91246e-05
+2.4 0 0.000328455 7.91246e-05
+3 0 0.000328455 7.91246e-05
+3.6 0 0.000328455 7.91246e-05
+END DIST
+
+Metal 4 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000554112 0.000242335 7.91246e-05
+0.6 0.000311553 0.000242335 7.91246e-05
+0.75 0.000258699 0.000242335 7.91246e-05
+0.9 0.000221966 0.000242335 7.91246e-05
+1.05 0.00019478 0.000242335 7.91246e-05
+1.2 0.000173759 0.000242335 7.91246e-05
+1.35 9.42761e-05 0.000242335 7.91246e-05
+1.5 8.48485e-05 0.000242335 7.91246e-05
+1.8 7.07071e-05 0.000242335 7.91246e-05
+2.4 0 0.000242335 7.91246e-05
+3 0 0.000242335 7.91246e-05
+3.6 0 0.000242335 7.91246e-05
+END DIST
+
+Metal 5 RESOVER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 RESOVER 0
+DIST count 55 width 0.3
+0 0 0 0.000158249
+0 0.62 0 0.000158249
+0 0.92 0 0.000158249
+0 1.39 0 0.000158249
+0 1.54 0 0.000158249
+0 1.84 0 0.000158249
+0 2.31 0 0.000158249
+0 2.46 0 0.000158249
+0 2.76 0 0.000158249
+0 3.68 0 0.000158249
+0.62 0.62 0 0.000158249
+0.62 0.92 0 0.000158249
+0.62 1.39 0 0.000158249
+0.62 1.54 0 0.000158249
+0.62 1.84 0 0.000158249
+0.62 2.31 0 0.000158249
+0.62 2.46 0 0.000158249
+0.62 2.76 0 0.000158249
+0.62 3.68 0 0.000158249
+0.92 0.92 0 0.000158249
+0.92 1.39 0 0.000158249
+0.92 1.54 0 0.000158249
+0.92 1.84 0 0.000158249
+0.92 2.31 0 0.000158249
+0.92 2.46 0 0.000158249
+0.92 2.76 0 0.000158249
+0.92 3.68 0 0.000158249
+1.39 1.39 0 0.000158249
+1.39 1.54 0 0.000158249
+1.39 1.84 0 0.000158249
+1.39 2.31 0 0.000158249
+1.39 2.46 0 0.000158249
+1.39 2.76 0 0.000158249
+1.39 3.68 0 0.000158249
+1.54 1.54 0 0.000158249
+1.54 1.84 0 0.000158249
+1.54 2.31 0 0.000158249
+1.54 2.46 0 0.000158249
+1.54 2.76 0 0.000158249
+1.54 3.68 0 0.000158249
+1.84 1.84 0 0.000158249
+1.84 2.31 0 0.000158249
+1.84 2.46 0 0.000158249
+1.84 2.76 0 0.000158249
+1.84 3.68 0 0.000158249
+2.31 2.31 0 0.000158249
+2.31 2.46 0 0.000158249
+2.31 2.76 0 0.000158249
+2.31 3.68 0 0.000158249
+2.46 2.46 0 0.000158249
+2.46 2.76 0 0.000158249
+2.46 3.68 0 0.000158249
+2.76 2.76 0 0.000158249
+2.76 3.68 0 0.000158249
+3.68 0 3.68 0.000158249
+END DIST
+
+Metal 5 RESOVER 1
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 2
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 3
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 RESOVER 4
+DIST count 0 width 0.3
+END DIST
+
+Metal 5 OVER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 OVER 0
+DIST count 12 width 0.3
+0.3 0.000562124 3.5899e-05 7.91246e-05
+0.6 0.000314638 3.5899e-05 7.91246e-05
+0.75 0.000261521 3.5899e-05 7.91246e-05
+0.9 0.000224763 3.5899e-05 7.91246e-05
+1.05 0.000197615 3.5899e-05 7.91246e-05
+1.2 0.000112795 3.5899e-05 7.91246e-05
+1.35 0.000100262 3.5899e-05 7.91246e-05
+1.5 9.02357e-05 3.5899e-05 7.91246e-05
+1.8 7.51966e-05 3.5899e-05 7.91246e-05
+2.4 0 3.5899e-05 7.91246e-05
+3 0 3.5899e-05 7.91246e-05
+3.6 0 3.5899e-05 7.91246e-05
+END DIST
+
+Metal 5 OVER 1
+DIST count 12 width 0.3
+0.3 0.000562124 7.20976e-05 7.91246e-05
+0.6 0.000314638 7.20976e-05 7.91246e-05
+0.75 0.000261521 7.20976e-05 7.91246e-05
+0.9 0.000224763 7.20976e-05 7.91246e-05
+1.05 0.000197615 7.20976e-05 7.91246e-05
+1.2 0.000112795 7.20976e-05 7.91246e-05
+1.35 0.000100262 7.20976e-05 7.91246e-05
+1.5 9.02357e-05 7.20976e-05 7.91246e-05
+1.8 7.51966e-05 7.20976e-05 7.91246e-05
+2.4 0 7.20976e-05 7.91246e-05
+3 0 7.20976e-05 7.91246e-05
+3.6 0 7.20976e-05 7.91246e-05
+END DIST
+
+Metal 5 OVER 2
+DIST count 12 width 0.3
+0.3 0.000562124 9.13533e-05 7.91246e-05
+0.6 0.000314638 9.13533e-05 7.91246e-05
+0.75 0.000261521 9.13533e-05 7.91246e-05
+0.9 0.000224763 9.13533e-05 7.91246e-05
+1.05 0.000197615 9.13533e-05 7.91246e-05
+1.2 0.000112795 9.13533e-05 7.91246e-05
+1.35 0.000100262 9.13533e-05 7.91246e-05
+1.5 9.02357e-05 9.13533e-05 7.91246e-05
+1.8 7.51966e-05 9.13533e-05 7.91246e-05
+2.4 0 9.13533e-05 7.91246e-05
+3 0 9.13533e-05 7.91246e-05
+3.6 0 9.13533e-05 7.91246e-05
+END DIST
+
+Metal 5 OVER 3
+DIST count 12 width 0.3
+0.3 0.000562124 0.0001158 7.91246e-05
+0.6 0.000314638 0.0001158 7.91246e-05
+0.75 0.000261521 0.0001158 7.91246e-05
+0.9 0.000224763 0.0001158 7.91246e-05
+1.05 0.000197615 0.0001158 7.91246e-05
+1.2 0.000112795 0.0001158 7.91246e-05
+1.35 0.000100262 0.0001158 7.91246e-05
+1.5 9.02357e-05 0.0001158 7.91246e-05
+1.8 7.51966e-05 0.0001158 7.91246e-05
+2.4 0 0.0001158 7.91246e-05
+3 0 0.0001158 7.91246e-05
+3.6 0 0.0001158 7.91246e-05
+END DIST
+
+Metal 5 OVER 4
+DIST count 12 width 0.3
+0.3 0.000562124 0.000146 7.91246e-05
+0.6 0.000314638 0.000146 7.91246e-05
+0.75 0.000261521 0.000146 7.91246e-05
+0.9 0.000224763 0.000146 7.91246e-05
+1.05 0.000197615 0.000146 7.91246e-05
+1.2 0.000112795 0.000146 7.91246e-05
+1.35 0.000100262 0.000146 7.91246e-05
+1.5 9.02357e-05 0.000146 7.91246e-05
+1.8 7.51966e-05 0.000146 7.91246e-05
+2.4 0 0.000146 7.91246e-05
+3 0 0.000146 7.91246e-05
+3.6 0 0.000146 7.91246e-05
+END DIST
+
+Metal 5 UNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.000110389 7.91246e-05
+0.6 0.000314638 0.000110389 7.91246e-05
+0.75 0.000261521 0.000110389 7.91246e-05
+0.9 0.000224763 0.000110389 7.91246e-05
+1.05 0.000197615 0.000110389 7.91246e-05
+1.2 0.000112795 0.000110389 7.91246e-05
+1.35 0.000100262 0.000110389 7.91246e-05
+1.5 9.02357e-05 0.000110389 7.91246e-05
+1.8 7.51966e-05 0.000110389 7.91246e-05
+2.4 0 0.000110389 7.91246e-05
+3 0 0.000110389 7.91246e-05
+3.6 0 0.000110389 7.91246e-05
+END DIST
+
+Metal 5 DIAGUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 DIAGUNDER 6
+DIST count 13 width 0.3
+0 0 6.80808e-05 7.91246e-05
+0.3 0 0 7.91246e-05
+0.6 0 0 7.91246e-05
+0.75 0 0 7.91246e-05
+0.9 0 0 7.91246e-05
+1.05 0 0 7.91246e-05
+1.2 0 0 7.91246e-05
+1.35 0 0 7.91246e-05
+1.5 0 0 7.91246e-05
+1.8 0 0 7.91246e-05
+2.4 0 0 7.91246e-05
+3 0 0 7.91246e-05
+3.6 0 0 7.91246e-05
+END DIST
+
+Metal 5 OVERUNDER
+WIDTH Table 1 entries:  0.3
+
+Metal 5 OVER 1 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.000146588 7.91246e-05
+0.6 0.000314638 0.000146588 7.91246e-05
+0.75 0.000261521 0.000146588 7.91246e-05
+0.9 0.000224763 0.000146588 7.91246e-05
+1.05 0.000197615 0.000146588 7.91246e-05
+1.2 0.000112795 0.000146588 7.91246e-05
+1.35 0.000100262 0.000146588 7.91246e-05
+1.5 9.02357e-05 0.000146588 7.91246e-05
+1.8 7.51966e-05 0.000146588 7.91246e-05
+2.4 0 0.000146588 7.91246e-05
+3 0 0.000146588 7.91246e-05
+3.6 0 0.000146588 7.91246e-05
+END DIST
+
+Metal 5 OVER 2 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.000165843 7.91246e-05
+0.6 0.000314638 0.000165843 7.91246e-05
+0.75 0.000261521 0.000165843 7.91246e-05
+0.9 0.000224763 0.000165843 7.91246e-05
+1.05 0.000197615 0.000165843 7.91246e-05
+1.2 0.000112795 0.000165843 7.91246e-05
+1.35 0.000100262 0.000165843 7.91246e-05
+1.5 9.02357e-05 0.000165843 7.91246e-05
+1.8 7.51966e-05 0.000165843 7.91246e-05
+2.4 0 0.000165843 7.91246e-05
+3 0 0.000165843 7.91246e-05
+3.6 0 0.000165843 7.91246e-05
+END DIST
+
+Metal 5 OVER 3 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.00019029 7.91246e-05
+0.6 0.000314638 0.00019029 7.91246e-05
+0.75 0.000261521 0.00019029 7.91246e-05
+0.9 0.000224763 0.00019029 7.91246e-05
+1.05 0.000197615 0.00019029 7.91246e-05
+1.2 0.000112795 0.00019029 7.91246e-05
+1.35 0.000100262 0.00019029 7.91246e-05
+1.5 9.02357e-05 0.00019029 7.91246e-05
+1.8 7.51966e-05 0.00019029 7.91246e-05
+2.4 0 0.00019029 7.91246e-05
+3 0 0.00019029 7.91246e-05
+3.6 0 0.00019029 7.91246e-05
+END DIST
+
+Metal 5 OVER 4 UNDER 6
+DIST count 12 width 0.3
+0.3 0.000562124 0.00022049 7.91246e-05
+0.6 0.000314638 0.00022049 7.91246e-05
+0.75 0.000261521 0.00022049 7.91246e-05
+0.9 0.000224763 0.00022049 7.91246e-05
+1.05 0.000197615 0.00022049 7.91246e-05
+1.2 0.000112795 0.00022049 7.91246e-05
+1.35 0.000100262 0.00022049 7.91246e-05
+1.5 9.02357e-05 0.00022049 7.91246e-05
+1.8 7.51966e-05 0.00022049 7.91246e-05
+2.4 0 0.00022049 7.91246e-05
+3 0 0.00022049 7.91246e-05
+3.6 0 0.00022049 7.91246e-05
+END DIST
+
+Metal 6 RESOVER
+WIDTH Table 1 entries:  1.6
+
+Metal 6 RESOVER 0
+DIST count 55 width 1.6
+0 0 0 1.83081e-05
+0 1.8 0 1.83081e-05
+0 3.4 0 1.83081e-05
+0 4.4 0 1.83081e-05
+0 5.2 0 1.83081e-05
+0 6.8 0 1.83081e-05
+0 7.8 0 1.83081e-05
+0 8.6 0 1.83081e-05
+0 10.2 0 1.83081e-05
+0 13.6 0 1.83081e-05
+1.8 1.8 0 1.83081e-05
+1.8 3.4 0 1.83081e-05
+1.8 4.4 0 1.83081e-05
+1.8 5.2 0 1.83081e-05
+1.8 6.8 0 1.83081e-05
+1.8 7.8 0 1.83081e-05
+1.8 8.6 0 1.83081e-05
+1.8 10.2 0 1.83081e-05
+1.8 13.6 0 1.83081e-05
+3.4 3.4 0 1.83081e-05
+3.4 4.4 0 1.83081e-05
+3.4 5.2 0 1.83081e-05
+3.4 6.8 0 1.83081e-05
+3.4 7.8 0 1.83081e-05
+3.4 8.6 0 1.83081e-05
+3.4 10.2 0 1.83081e-05
+3.4 13.6 0 1.83081e-05
+4.4 4.4 0 1.83081e-05
+4.4 5.2 0 1.83081e-05
+4.4 6.8 0 1.83081e-05
+4.4 7.8 0 1.83081e-05
+4.4 8.6 0 1.83081e-05
+4.4 10.2 0 1.83081e-05
+4.4 13.6 0 1.83081e-05
+5.2 5.2 0 1.83081e-05
+5.2 6.8 0 1.83081e-05
+5.2 7.8 0 1.83081e-05
+5.2 8.6 0 1.83081e-05
+5.2 10.2 0 1.83081e-05
+5.2 13.6 0 1.83081e-05
+6.8 6.8 0 1.83081e-05
+6.8 7.8 0 1.83081e-05
+6.8 8.6 0 1.83081e-05
+6.8 10.2 0 1.83081e-05
+6.8 13.6 0 1.83081e-05
+7.8 7.8 0 1.83081e-05
+7.8 8.6 0 1.83081e-05
+7.8 10.2 0 1.83081e-05
+7.8 13.6 0 1.83081e-05
+8.6 8.6 0 1.83081e-05
+8.6 10.2 0 1.83081e-05
+8.6 13.6 0 1.83081e-05
+10.2 10.2 0 1.83081e-05
+10.2 13.6 0 1.83081e-05
+13.6 0 13.6 1.83081e-05
+END DIST
+
+Metal 6 RESOVER 1
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 2
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 3
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 4
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 RESOVER 5
+DIST count 0 width 1.6
+END DIST
+
+Metal 6 OVER
+WIDTH Table 1 entries:  1.6
+
+Metal 6 OVER 0
+DIST count 12 width 1.6
+1.6 0.000160354 4.15758e-05 9.15404e-06
+3.2 0 4.15758e-05 9.15404e-06
+4 0 4.15758e-05 9.15404e-06
+4.8 0 4.15758e-05 9.15404e-06
+5.6 0 4.15758e-05 9.15404e-06
+6.4 0 4.15758e-05 9.15404e-06
+7.2 0 4.15758e-05 9.15404e-06
+8 0 4.15758e-05 9.15404e-06
+9.6 0 4.15758e-05 9.15404e-06
+12.8 0 4.15758e-05 9.15404e-06
+16 0 4.15758e-05 9.15404e-06
+19.2 0 4.15758e-05 9.15404e-06
+END DIST
+
+Metal 6 OVER 1
+DIST count 12 width 1.6
+1.6 0.000160354 0.000133386 9.15404e-06
+3.2 0 0.000133386 9.15404e-06
+4 0 0.000133386 9.15404e-06
+4.8 0 0.000133386 9.15404e-06
+5.6 0 0.000133386 9.15404e-06
+6.4 0 0.000133386 9.15404e-06
+7.2 0 0.000133386 9.15404e-06
+8 0 0.000133386 9.15404e-06
+9.6 0 0.000133386 9.15404e-06
+12.8 0 0.000133386 9.15404e-06
+16 0 0.000133386 9.15404e-06
+19.2 0 0.000133386 9.15404e-06
+END DIST
+
+Metal 6 OVER 2
+DIST count 12 width 1.6
+1.6 0.000160354 0.000195882 9.15404e-06
+3.2 0 0.000195882 9.15404e-06
+4 0 0.000195882 9.15404e-06
+4.8 0 0.000195882 9.15404e-06
+5.6 0 0.000195882 9.15404e-06
+6.4 0 0.000195882 9.15404e-06
+7.2 0 0.000195882 9.15404e-06
+8 0 0.000195882 9.15404e-06
+9.6 0 0.000195882 9.15404e-06
+12.8 0 0.000195882 9.15404e-06
+16 0 0.000195882 9.15404e-06
+19.2 0 0.000195882 9.15404e-06
+END DIST
+
+Metal 6 OVER 3
+DIST count 12 width 1.6
+1.6 0.000160354 0.000261351 9.15404e-06
+3.2 0 0.000261351 9.15404e-06
+4 0 0.000261351 9.15404e-06
+4.8 0 0.000261351 9.15404e-06
+5.6 0 0.000261351 9.15404e-06
+6.4 0 0.000261351 9.15404e-06
+7.2 0 0.000261351 9.15404e-06
+8 0 0.000261351 9.15404e-06
+9.6 0 0.000261351 9.15404e-06
+12.8 0 0.000261351 9.15404e-06
+16 0 0.000261351 9.15404e-06
+19.2 0 0.000261351 9.15404e-06
+END DIST
+
+Metal 6 OVER 4
+DIST count 12 width 1.6
+1.6 0.000160354 0.000242788 9.15404e-06
+3.2 0 0.000242788 9.15404e-06
+4 0 0.000242788 9.15404e-06
+4.8 0 0.000242788 9.15404e-06
+5.6 0 0.000242788 9.15404e-06
+6.4 0 0.000242788 9.15404e-06
+7.2 0 0.000242788 9.15404e-06
+8 0 0.000242788 9.15404e-06
+9.6 0 0.000242788 9.15404e-06
+12.8 0 0.000242788 9.15404e-06
+16 0 0.000242788 9.15404e-06
+19.2 0 0.000242788 9.15404e-06
+END DIST
+
+Metal 6 OVER 5
+DIST count 12 width 1.6
+1.6 0.000160354 0.000413455 9.15404e-06
+3.2 0 0.000413455 9.15404e-06
+4 0 0.000413455 9.15404e-06
+4.8 0 0.000413455 9.15404e-06
+5.6 0 0.000413455 9.15404e-06
+6.4 0 0.000413455 9.15404e-06
+7.2 0 0.000413455 9.15404e-06
+8 0 0.000413455 9.15404e-06
+9.6 0 0.000413455 9.15404e-06
+12.8 0 0.000413455 9.15404e-06
+16 0 0.000413455 9.15404e-06
+19.2 0 0.000413455 9.15404e-06
+END DIST
+
+Metal 6 UNDER
+WIDTH Table 0 entries: 
+
+Metal 6 DIAGUNDER
+WIDTH Table 0 entries: 
+END DensityModel 0