Updated the magic techfile with the first draft of the completed
automated waffle fill cif output style.
diff --git a/sky130/magic/sky130.tech b/sky130/magic/sky130.tech
index ee75912..6de5487 100644
--- a/sky130/magic/sky130.tech
+++ b/sky130/magic/sky130.tech
@@ -360,12 +360,6 @@
padl m1 m2 m3 glass
#endif (!METAL5)
- res0p35 implant1
- res0p69 implant1
- res1p41 implant1
- res2p85 implant1
- res5p73 implant1
-
#ifdef REDISTRIBUTION
mrdlc metal5 mrdl
#endif (REDISTRIBUTION)
@@ -508,6 +502,12 @@
xpc polysilicon pselect2 metal1 contact_X'es
rmp polysilicon poly_resist_stripes
+ res0p35 implant1
+ res0p69 implant1
+ res1p41 implant1
+ res2p85 implant1
+ res5p73 implant1
+
pdiode pdiffusion pselect2
ndiode ndiffusion nselect2
pdiodec pdiffusion pselect2 metal1 contact_X'es
@@ -1494,116 +1494,147 @@
options calma-permissive-labels
gridlimit 5
+#----------------------------------------------------------------
+# Generate guard-band around nwells to keep FOM from crossing
+# Spacing from nwell = Diff/Tap 9 = 0.34um
+# Enclosure by nwell = Diff/Tap 8 = 0.18um
+#----------------------------------------------------------------
+ templayer well_shrink nwell
+ shrink 180
+ templayer well_guardband nwell
+ grow 340
+ and-not well_shrink
+
#---------------------------------------------------
-# FOM fill (under development)
+# Interleaved FOM and POLY fill
#---------------------------------------------------
templayer slots_fom_pass1
bbox top
slots 0 4080 1320 0 4080 1320 1360 0
templayer obstruct_fom_pass1 alldiff,allpoly,rpw
grow 500
+ or well_guardband
templayer fomfill_pass1 slots_fom_pass1
and-not obstruct_fom_pass1
shrink 2035
grow 2035
+#---------------------------------------------------
+
+ templayer slots_poly_pass1
+ bbox top
+ slots 0 720 360 0 720 360 240 0
+ templayer obstruct_poly_pass1 alldiff,allpoly,rpw
+ grow 700
+ or fomfill_pass1
+ grow 300
+ or well_guardband
+ templayer polyfill_pass1 slots_poly_pass1
+ and-not obstruct_poly_pass1
+ shrink 355
+ grow 355
+
+#---------------------------------------------------
+
templayer slots_fom_pass2
bbox top
slots 0 2500 1320 0 2500 1320 1360 0
templayer obstruct_fom_pass2 fomfill_pass1
grow 820
- or alldiff,allpoly,rpw
- grow 500
+ grow 200
+ or polyfill_pass1
+ grow 300
+ or obstruct_fom_pass1
templayer fomfill_pass2 slots_fom_pass2
and-not obstruct_fom_pass2
shrink 1245
grow 1245
- templayer slots_fom_coarse
- bbox top
- slots 0 1500 1320 0 1500 1320 1360 0
- templayer obstruct_fom_coarse fomfill_pass1,fomfill_pass2
- grow 820
- or alldiff,allpoly,rpw
- grow 500
- templayer fomfill_coarse slots_fom_coarse
- and-not obstruct_fom_coarse
- shrink 745
- grow 745
-
- templayer slots_fom_fine
- bbox top
- slots 0 500 400 0 500 400 160 0
- templayer obstruct_fom_fine fomfill_pass1,fomfill_pass2,fomfill_coarse
- grow 820
- or alldiff,allpoly,rpw
- grow 500
- templayer fomfill_fine slots_fom_fine
- and-not obstruct_fom_fine
- shrink 245
- grow 245
-
- layer FOMMASK fomfill_pass1
- or fomfill_pass2
- or fomfill_coarse
- or fomfill_fine
- calma 23 0
-
#---------------------------------------------------
-# POLY fill (under development)
-#---------------------------------------------------
- templayer slots_poly_pass1
- bbox top
- slots 0 720 360 0 720 360 240 0
- templayer obstruct_poly_pass1 alldiff,allpoly,rpw
- grow 1000
- templayer polyfill_pass1 slots_poly_pass1
- and-not obstruct_poly_pass1
- shrink 355
- grow 355
templayer slots_poly_coarse
bbox top
slots 0 720 360 0 720 360 240 120
- templayer obstruct_poly_coarse alldiff,allpoly,rpw
- grow 640
- or polyfill_pass1
- grow 360
+ templayer obstruct_poly_coarse polyfill_pass1
+ grow 60
+ or fomfill_pass1,fomfill_pass2
+ grow 300
+ or obstruct_poly_pass1
templayer polyfill_coarse slots_poly_coarse
and-not obstruct_poly_coarse
shrink 355
grow 355
+#---------------------------------------------------
+
+ templayer slots_fom_coarse
+ bbox top
+ slots 0 1500 1320 0 1500 1320 1360 0
+ templayer obstruct_fom_coarse fomfill_pass1,fomfill_pass2
+ grow 1020
+ or polyfill_pass1,polyfill_coarse
+ grow 300
+ or obstruct_fom_pass1
+ templayer fomfill_coarse slots_fom_coarse
+ and-not obstruct_fom_coarse
+ shrink 745
+ grow 745
+
+#---------------------------------------------------
templayer slots_poly_medium
bbox top
slots 0 540 360 0 540 360 240 100
- templayer obstruct_poly_medium alldiff,allpoly,rpw
- grow 650
- or polyfill_pass1,polyfill_coarse
- grow 360
+ templayer obstruct_poly_medium polyfill_pass1,polyfill_coarse
+ grow 1010
+ or obstruct_poly_pass1
templayer polyfill_medium slots_poly_medium
and-not obstruct_poly_medium
shrink 265
grow 265
+#---------------------------------------------------
+
+ templayer slots_fom_fine
+ bbox top
+ slots 0 500 400 0 500 400 160 0
+ templayer obstruct_fom_fine fomfill_pass1,fomfill_pass2,fomfill_coarse
+ grow 1320
+ or obstruct_fom_pass1
+ templayer fomfill_fine slots_fom_fine
+ and-not obstruct_fom_fine
+ shrink 245
+ grow 245
+
+#---------------------------------------------------
templayer slots_poly_fine
bbox top
slots 0 480 360 0 480 360 240 200
- templayer obstruct_poly_fine alldiff,allpoly,rpw
+ templayer obstruct_poly_fine polyfill_pass1,polyfill_coarse,polyfill_medium
grow 650
or polyfill_pass1,polyfill_coarse,polyfill_medium
grow 360
+ or obstruct_poly_pass1
templayer polyfill_fine slots_poly_fine
and-not obstruct_poly_fine
shrink 235
grow 235
- layer POLYMASK polyfill_pass1
+#---------------------------------------------------
+ templayer fomfill fomfill_pass1
+ or fomfill_pass2
+ or fomfill_coarse
+ or fomfill_fine
+ calma 23 0
+
+ templayer polyfill polyfill_pass1
or polyfill_coarse
or polyfill_medium
or polyfill_fine
calma 28 0
+ layer FOMMASK fomfill
+ layer POLYMASK polyfill
+
#---------------------------------------------------
# MET1 fill
#---------------------------------------------------
