Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 1  0

DensityModel 0

Metal 1 RESOVER
WIDTH Table 1 entries:  0.17

Metal 1 RESOVER 0
DIST count 55 width 0.17
0 0 0 0.0760547
0 0.29 0 0.0760547
0 0.46 0 0.0760547
0 0.665 0 0.0760547
0 0.75 0 0.0760547
0 0.92 0 0.0760547
0 1.125 0 0.0760547
0 1.21 0 0.0760547
0 1.38 0 0.0760547
0 1.84 0 0.0760547
0.29 0.29 0 0.0760547
0.29 0.46 0 0.0760547
0.29 0.665 0 0.0760547
0.29 0.75 0 0.0760547
0.29 0.92 0 0.0760547
0.29 1.125 0 0.0760547
0.29 1.21 0 0.0760547
0.29 1.38 0 0.0760547
0.29 1.84 0 0.0760547
0.46 0.46 0 0.0760547
0.46 0.665 0 0.0760547
0.46 0.75 0 0.0760547
0.46 0.92 0 0.0760547
0.46 1.125 0 0.0760547
0.46 1.21 0 0.0760547
0.46 1.38 0 0.0760547
0.46 1.84 0 0.0760547
0.665 0.665 0 0.0760547
0.665 0.75 0 0.0760547
0.665 0.92 0 0.0760547
0.665 1.125 0 0.0760547
0.665 1.21 0 0.0760547
0.665 1.38 0 0.0760547
0.665 1.84 0 0.0760547
0.75 0.75 0 0.0760547
0.75 0.92 0 0.0760547
0.75 1.125 0 0.0760547
0.75 1.21 0 0.0760547
0.75 1.38 0 0.0760547
0.75 1.84 0 0.0760547
0.92 0.92 0 0.0760547
0.92 1.125 0 0.0760547
0.92 1.21 0 0.0760547
0.92 1.38 0 0.0760547
0.92 1.84 0 0.0760547
1.125 1.125 0 0.0760547
1.125 1.21 0 0.0760547
1.125 1.38 0 0.0760547
1.125 1.84 0 0.0760547
1.21 1.21 0 0.0760547
1.21 1.38 0 0.0760547
1.21 1.84 0 0.0760547
1.38 1.38 0 0.0760547
1.38 1.84 0 0.0760547
1.84 0 1.84 0.0760547
END DIST

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 0.000422526 6.80969e-06 0.0380273
0.34 0.000237077 8.17445e-06 0.0380273
0.425 0.000197012 8.85502e-06 0.0380273
0.51 0.000169228 9.53411e-06 0.0380273
0.595 0.000148685 1.02116e-05 0.0380273
0.68 0.000132804 1.08871e-05 0.0380273
0.765 0.000120118 1.15607e-05 0.0380273
0.85 0.000109728 1.2232e-05 0.0380273
1.02 9.36767e-05 1.35673e-05 0.0380273
1.36 7.26724e-05 1.6203e-05 0.0380273
1.7 5.94617e-05 1.87824e-05 0.0380273
2.04 0 7.16486e-05 0.0380273
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 0.000422526 5.17131e-05 0.0380273
0.34 0.000237077 5.42405e-05 0.0380273
0.425 0.000197012 5.55018e-05 0.0380273
0.51 0.000169228 5.67587e-05 0.0380273
0.595 0.000148685 5.80155e-05 0.0380273
0.68 0.000132804 5.92659e-05 0.0380273
0.765 0.000120118 6.05132e-05 0.0380273
0.85 0.000109728 6.17576e-05 0.0380273
1.02 9.36767e-05 6.4232e-05 0.0380273
1.36 7.26724e-05 6.9115e-05 0.0380273
1.7 5.94617e-05 7.38925e-05 0.0380273
2.04 0 0.000128901 0.0380273
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 0.000422526 2.98567e-05 0.0380273
0.34 0.000237077 3.17805e-05 0.0380273
0.425 0.000197012 3.27413e-05 0.0380273
0.51 0.000169228 3.36983e-05 0.0380273
0.595 0.000148685 3.46534e-05 0.0380273
0.68 0.000132804 3.56043e-05 0.0380273
0.765 0.000120118 3.65547e-05 0.0380273
0.85 0.000109728 3.75007e-05 0.0380273
1.02 9.36767e-05 3.93836e-05 0.0380273
1.36 7.26724e-05 4.30983e-05 0.0380273
1.7 5.94617e-05 4.67345e-05 0.0380273
2.04 0 0.000100629 0.0380273
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 0.000422526 1.98654e-05 0.0380273
0.34 0.000237077 2.16608e-05 0.0380273
0.425 0.000197012 2.25559e-05 0.0380273
0.51 0.000169228 2.34494e-05 0.0380273
0.595 0.000148685 2.43411e-05 0.0380273
0.68 0.000132804 2.52296e-05 0.0380273
0.765 0.000120118 2.61159e-05 0.0380273
0.85 0.000109728 2.69985e-05 0.0380273
1.02 9.36767e-05 2.87556e-05 0.0380273
1.36 7.26724e-05 3.22226e-05 0.0380273
1.7 5.94617e-05 3.5616e-05 0.0380273
2.04 0 8.92737e-05 0.0380273
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 0.000422526 1.79316e-05 0.0380273
0.34 0.000237077 1.96046e-05 0.0380273
0.425 0.000197012 2.04381e-05 0.0380273
0.51 0.000169228 2.12709e-05 0.0380273
0.595 0.000148685 2.2101e-05 0.0380273
0.68 0.000132804 2.2929e-05 0.0380273
0.765 0.000120118 2.3755e-05 0.0380273
0.85 0.000109728 2.45775e-05 0.0380273
1.02 9.36767e-05 2.62142e-05 0.0380273
1.36 7.26724e-05 2.94447e-05 0.0380273
1.7 5.94617e-05 3.2607e-05 0.0380273
2.04 0 8.60397e-05 0.0380273
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 0.000422526 1.02185e-05 0.0380273
0.34 0.000237077 1.1837e-05 0.0380273
0.425 0.000197012 1.26442e-05 0.0380273
0.51 0.000169228 1.34496e-05 0.0380273
0.595 0.000148685 1.42531e-05 0.0380273
0.68 0.000132804 1.50543e-05 0.0380273
0.765 0.000120118 1.58532e-05 0.0380273
0.85 0.000109728 1.66494e-05 0.0380273
1.02 9.36767e-05 1.82331e-05 0.0380273
1.36 7.26724e-05 2.13591e-05 0.0380273
1.7 5.94617e-05 2.44182e-05 0.0380273
2.04 0 7.77517e-05 0.0380273
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 13 width 0.17
0 0 7.62507e-05 0.0380273
0.17 0 0 0.0380273
0.34 0 0 0.0380273
0.425 0 0 0.0380273
0.51 0 0 0.0380273
0.595 0 0 0.0380273
0.68 0 0 0.0380273
0.765 0 0 0.0380273
0.85 0 0 0.0380273
1.02 0 0 0.0380273
1.36 0 0 0.0380273
1.7 0 0 0.0380273
2.04 0 0 0.0380273
END DIST

Metal 1 DIAGUNDER 3
DIST count 13 width 0.17
0 0 3.99212e-05 0.0380273
0.17 0 0 0.0380273
0.34 0 0 0.0380273
0.425 0 0 0.0380273
0.51 0 0 0.0380273
0.595 0 0 0.0380273
0.68 0 0 0.0380273
0.765 0 0 0.0380273
0.85 0 0 0.0380273
1.02 0 0 0.0380273
1.36 0 0 0.0380273
1.7 0 0 0.0380273
2.04 0 0 0.0380273
END DIST

Metal 1 DIAGUNDER 4
DIST count 13 width 0.17
0 0 1.60851e-05 0.0380273
0.17 0 0 0.0380273
0.34 0 0 0.0380273
0.425 0 0 0.0380273
0.51 0 0 0.0380273
0.595 0 0 0.0380273
0.68 0 0 0.0380273
0.765 0 0 0.0380273
0.85 0 0 0.0380273
1.02 0 0 0.0380273
1.36 0 0 0.0380273
1.7 0 0 0.0380273
2.04 0 0 0.0380273
END DIST

Metal 1 DIAGUNDER 5
DIST count 13 width 0.17
0 0 1.11469e-05 0.0380273
0.17 0 0 0.0380273
0.34 0 0 0.0380273
0.425 0 0 0.0380273
0.51 0 0 0.0380273
0.595 0 0 0.0380273
0.68 0 0 0.0380273
0.765 0 0 0.0380273
0.85 0 0 0.0380273
1.02 0 0 0.0380273
1.36 0 0 0.0380273
1.7 0 0 0.0380273
2.04 0 0 0.0380273
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 RESOVER
WIDTH Table 1 entries:  0.14

Metal 2 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000901876
0 0.2 0 0.000901876
0 0.34 0 0.000901876
0 0.47 0 0.000901876
0 0.54 0 0.000901876
0 0.68 0 0.000901876
0 0.81 0 0.000901876
0 0.88 0 0.000901876
0 1.02 0 0.000901876
0 1.36 0 0.000901876
0.2 0.2 0 0.000901876
0.2 0.34 0 0.000901876
0.2 0.47 0 0.000901876
0.2 0.54 0 0.000901876
0.2 0.68 0 0.000901876
0.2 0.81 0 0.000901876
0.2 0.88 0 0.000901876
0.2 1.02 0 0.000901876
0.2 1.36 0 0.000901876
0.34 0.34 0 0.000901876
0.34 0.47 0 0.000901876
0.34 0.54 0 0.000901876
0.34 0.68 0 0.000901876
0.34 0.81 0 0.000901876
0.34 0.88 0 0.000901876
0.34 1.02 0 0.000901876
0.34 1.36 0 0.000901876
0.47 0.47 0 0.000901876
0.47 0.54 0 0.000901876
0.47 0.68 0 0.000901876
0.47 0.81 0 0.000901876
0.47 0.88 0 0.000901876
0.47 1.02 0 0.000901876
0.47 1.36 0 0.000901876
0.54 0.54 0 0.000901876
0.54 0.68 0 0.000901876
0.54 0.81 0 0.000901876
0.54 0.88 0 0.000901876
0.54 1.02 0 0.000901876
0.54 1.36 0 0.000901876
0.68 0.68 0 0.000901876
0.68 0.81 0 0.000901876
0.68 0.88 0 0.000901876
0.68 1.02 0 0.000901876
0.68 1.36 0 0.000901876
0.81 0.81 0 0.000901876
0.81 0.88 0 0.000901876
0.81 1.02 0 0.000901876
0.81 1.36 0 0.000901876
0.88 0.88 0 0.000901876
0.88 1.02 0 0.000901876
0.88 1.36 0 0.000901876
1.02 1.02 0 0.000901876
1.02 1.36 0 0.000901876
1.36 0 1.36 0.000901876
END DIST

Metal 2 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0.000687771 4.72439e-06 0.000450938
0.28 0.000386468 5.84722e-06 0.000450938
0.35 0.000321024 6.40768e-06 0.000450938
0.42 0.000275575 6.96735e-06 0.000450938
0.49 0.000241948 7.52612e-06 0.000450938
0.56 0.000215945 8.08387e-06 0.000450938
0.63 0.000195177 8.64055e-06 0.000450938
0.7 0.000178172 9.196e-06 0.000450938
0.84 0.000151919 1.03028e-05 0.000450938
1.12 0.000117617 1.24974e-05 0.000450938
1.4 9.6089e-05 1.46609e-05 0.000450938
1.68 0 9.80629e-05 0.000450938
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0.000687771 2.69268e-05 0.000450938
0.28 0.000386468 2.91393e-05 0.000450938
0.35 0.000321024 3.02442e-05 0.000450938
0.42 0.000275575 3.13468e-05 0.000450938
0.49 0.000241948 3.24481e-05 0.000450938
0.56 0.000215945 3.35484e-05 0.000450938
0.63 0.000195177 3.46443e-05 0.000450938
0.7 0.000178172 3.57401e-05 0.000450938
0.84 0.000151919 3.79207e-05 0.000450938
1.12 0.000117617 4.22452e-05 0.000450938
1.4 9.6089e-05 4.65089e-05 0.000450938
1.68 0 0.000131975 0.000450938
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0.000687771 2.47099e-05 0.000450938
0.28 0.000386468 2.64692e-05 0.000450938
0.35 0.000321024 2.73491e-05 0.000450938
0.42 0.000275575 2.82262e-05 0.000450938
0.49 0.000241948 2.91025e-05 0.000450938
0.56 0.000215945 2.99755e-05 0.000450938
0.63 0.000195177 3.08488e-05 0.000450938
0.7 0.000178172 3.17189e-05 0.000450938
0.84 0.000151919 3.34556e-05 0.000450938
1.12 0.000117617 3.68952e-05 0.000450938
1.4 9.6089e-05 4.02863e-05 0.000450938
1.68 0 0.000124896 0.000450938
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000687771 1.62785e-05 0.000450938
0.28 0.000386468 1.79693e-05 0.000450938
0.35 0.000321024 1.88135e-05 0.000450938
0.42 0.000275575 1.96565e-05 0.000450938
0.49 0.000241948 2.04978e-05 0.000450938
0.56 0.000215945 2.13378e-05 0.000450938
0.63 0.000195177 2.21765e-05 0.000450938
0.7 0.000178172 2.30134e-05 0.000450938
0.84 0.000151919 2.468e-05 0.000450938
1.12 0.000117617 2.7985e-05 0.000450938
1.4 9.6089e-05 3.12436e-05 0.000450938
1.68 0 0.000115722 0.000450938
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000687771 1.39455e-05 0.000450938
0.28 0.000386468 1.54649e-05 0.000450938
0.35 0.000321024 1.62232e-05 0.000450938
0.42 0.000275575 1.69803e-05 0.000450938
0.49 0.000241948 1.77366e-05 0.000450938
0.56 0.000215945 1.84916e-05 0.000450938
0.63 0.000195177 1.92453e-05 0.000450938
0.7 0.000178172 1.99968e-05 0.000450938
0.84 0.000151919 2.14941e-05 0.000450938
1.12 0.000117617 2.44645e-05 0.000450938
1.4 9.6089e-05 2.7392e-05 0.000450938
1.68 0 0.000111545 0.000450938
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000687771 7.96688e-06 0.000450938
0.28 0.000386468 9.42385e-06 0.000450938
0.35 0.000321024 1.01512e-05 0.000450938
0.42 0.000275575 1.08774e-05 0.000450938
0.49 0.000241948 1.16024e-05 0.000450938
0.56 0.000215945 1.2326e-05 0.000450938
0.63 0.000195177 1.30484e-05 0.000450938
0.7 0.000178172 1.37692e-05 0.000450938
0.84 0.000151919 1.52054e-05 0.000450938
1.12 0.000117617 1.80529e-05 0.000450938
1.4 9.6089e-05 2.08604e-05 0.000450938
1.68 0 0.000104895 0.000450938
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 13 width 0.14
0 0 1.42087e-05 0.000450938
0.14 0 1.02266e-05 0.000450938
0.28 0 1.00807e-05 0.000450938
0.35 0 9.98622e-06 0.000450938
0.42 0 9.89343e-06 0.000450938
0.49 0 9.80238e-06 0.000450938
0.56 0 9.71299e-06 0.000450938
0.63 0 9.62518e-06 0.000450938
0.7 0 9.49697e-06 0.000450938
0.84 0 4.70613e-06 0.000450938
1.12 0 0 0.000450938
1.4 0 0 0.000450938
1.68 0 0 0.000450938
END DIST

Metal 2 DIAGUNDER 4
DIST count 13 width 0.14
0 0 2.97109e-05 0.000450938
0.14 0 9.79661e-06 0.000450938
0.28 0 9.66263e-06 0.000450938
0.35 0 9.57569e-06 0.000450938
0.42 0 9.49033e-06 0.000450938
0.49 0 9.40649e-06 0.000450938
0.56 0 4.68247e-06 0.000450938
0.63 0 0 0.000450938
0.7 0 0 0.000450938
0.84 0 0 0.000450938
1.12 0 0 0.000450938
1.4 0 0 0.000450938
1.68 0 0 0.000450938
END DIST

Metal 2 DIAGUNDER 5
DIST count 13 width 0.14
0 0 2.14528e-05 0.000450938
0.14 0 9.79661e-06 0.000450938
0.28 0 9.66263e-06 0.000450938
0.35 0 9.57569e-06 0.000450938
0.42 0 9.49033e-06 0.000450938
0.49 0 9.40649e-06 0.000450938
0.56 0 4.68247e-06 0.000450938
0.63 0 0 0.000450938
0.7 0 0 0.000450938
0.84 0 0 0.000450938
1.12 0 0 0.000450938
1.4 0 0 0.000450938
1.68 0 0 0.000450938
END DIST

Metal 2 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.24725e-05 0.000450938
0.14 0 0 0.000450938
0.28 0 0 0.000450938
0.35 0 0 0.000450938
0.42 0 0 0.000450938
0.49 0 0 0.000450938
0.56 0 0 0.000450938
0.63 0 0 0.000450938
0.7 0 0 0.000450938
0.84 0 0 0.000450938
1.12 0 0 0.000450938
1.4 0 0 0.000450938
1.68 0 0 0.000450938
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 0.000687825 4.80108e-05 0.000450938
0.28 0.000386472 5.08693e-05 0.000450938
0.35 0.000321024 5.22832e-05 0.000450938
0.42 0.000275575 5.36913e-05 0.000450938
0.49 0.00024196 5.50933e-05 0.000450938
0.56 0.00021598 5.6487e-05 0.000450938
0.63 0.000195228 5.7881e-05 0.000450938
0.7 0.000178199 5.92897e-05 0.000450938
0.84 0.00015195 6.20912e-05 0.000450938
1.12 0.000117637 6.76673e-05 0.000450938
1.4 9.6089e-05 7.3168e-05 0.000450938
1.68 0 0.000159843 0.000450938
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.00068788 3.95801e-05 0.000450938
0.28 0.000386527 4.23661e-05 0.000450938
0.35 0.000321079 4.37549e-05 0.000450938
0.42 0.00027563 4.51411e-05 0.000450938
0.49 0.000242015 4.65238e-05 0.000450938
0.56 0.000216035 4.79038e-05 0.000450938
0.63 0.000195283 4.92801e-05 0.000450938
0.7 0.000178254 5.06597e-05 0.000450938
0.84 0.000152005 5.33996e-05 0.000450938
1.12 0.000117691 5.88359e-05 0.000450938
1.4 9.61439e-05 6.41967e-05 0.000450938
1.68 0 0.000150794 0.000450938
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.00068788 3.72471e-05 0.000450938
0.28 0.000386523 3.96637e-05 0.000450938
0.35 0.000321079 4.04024e-05 0.000450938
0.42 0.00027563 4.13541e-05 0.000450938
0.49 0.000242003 4.26529e-05 0.000450938
0.56 0.000216 4.39504e-05 0.000450938
0.63 0.000195232 4.52434e-05 0.000450938
0.7 0.000178227 4.65353e-05 0.000450938
0.84 0.000151974 4.91063e-05 0.000450938
1.12 0.000117672 5.42067e-05 0.000450938
1.4 9.61439e-05 5.92343e-05 0.000450938
1.68 0 0.000145567 0.000450938
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000687825 3.01605e-05 0.000450938
0.28 0.000386468 3.27159e-05 0.000450938
0.35 0.000321024 3.39877e-05 0.000450938
0.42 0.000275575 3.52568e-05 0.000450938
0.49 0.000241948 3.65244e-05 0.000450938
0.56 0.000215945 3.77905e-05 0.000450938
0.63 0.000195177 3.90521e-05 0.000450938
0.7 0.000178172 4.03133e-05 0.000450938
0.84 0.000151919 4.28233e-05 0.000450938
1.12 0.000117617 4.78007e-05 0.000450938
1.4 9.6089e-05 5.27083e-05 0.000450938
1.68 0 0.000138807 0.000450938
END DIST

Metal 3 RESOVER
WIDTH Table 1 entries:  0.14

Metal 3 RESOVER 0
DIST count 55 width 0.14
0 0 0 0.000901876
0 0.32 0 0.000901876
0 0.46 0 0.000901876
0 0.71 0 0.000901876
0 0.78 0 0.000901876
0 0.92 0 0.000901876
0 1.17 0 0.000901876
0 1.24 0 0.000901876
0 1.38 0 0.000901876
0 1.84 0 0.000901876
0.32 0.32 0 0.000901876
0.32 0.46 0 0.000901876
0.32 0.71 0 0.000901876
0.32 0.78 0 0.000901876
0.32 0.92 0 0.000901876
0.32 1.17 0 0.000901876
0.32 1.24 0 0.000901876
0.32 1.38 0 0.000901876
0.32 1.84 0 0.000901876
0.46 0.46 0 0.000901876
0.46 0.71 0 0.000901876
0.46 0.78 0 0.000901876
0.46 0.92 0 0.000901876
0.46 1.17 0 0.000901876
0.46 1.24 0 0.000901876
0.46 1.38 0 0.000901876
0.46 1.84 0 0.000901876
0.71 0.71 0 0.000901876
0.71 0.78 0 0.000901876
0.71 0.92 0 0.000901876
0.71 1.17 0 0.000901876
0.71 1.24 0 0.000901876
0.71 1.38 0 0.000901876
0.71 1.84 0 0.000901876
0.78 0.78 0 0.000901876
0.78 0.92 0 0.000901876
0.78 1.17 0 0.000901876
0.78 1.24 0 0.000901876
0.78 1.38 0 0.000901876
0.78 1.84 0 0.000901876
0.92 0.92 0 0.000901876
0.92 1.17 0 0.000901876
0.92 1.24 0 0.000901876
0.92 1.38 0 0.000901876
0.92 1.84 0 0.000901876
1.17 1.17 0 0.000901876
1.17 1.24 0 0.000901876
1.17 1.38 0 0.000901876
1.17 1.84 0 0.000901876
1.24 1.24 0 0.000901876
1.24 1.38 0 0.000901876
1.24 1.84 0 0.000901876
1.38 1.38 0 0.000901876
1.38 1.84 0 0.000901876
1.84 0 1.84 0.000901876
END DIST

Metal 3 RESOVER 1
DIST count 0 width 0.14
END DIST

Metal 3 RESOVER 2
DIST count 0 width 0.14
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0.000695863 3.78553e-06 0.000450938
0.28 0.00038885 4.69538e-06 0.000450938
0.35 0.000323204 5.14939e-06 0.000450938
0.42 0.000277832 5.60267e-06 0.000450938
0.49 0.000244351 6.05519e-06 0.000450938
0.56 0.000218495 6.50682e-06 0.000450938
0.63 0.000197849 6.95747e-06 0.000450938
0.7 0.000180938 7.40703e-06 0.000450938
0.84 0.000154797 8.30274e-06 0.000450938
1.12 0.00012052 1.00777e-05 0.000450938
1.4 9.8889e-05 1.18264e-05 0.000450938
1.68 0 9.74723e-05 0.000450938
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.000695863 1.27589e-05 0.000450938
0.28 0.00038885 1.4196e-05 0.000450938
0.35 0.000323204 1.49136e-05 0.000450938
0.42 0.000277832 1.56301e-05 0.000450938
0.49 0.000244351 1.63447e-05 0.000450938
0.56 0.000218495 1.70584e-05 0.000450938
0.63 0.000197849 1.77696e-05 0.000450938
0.7 0.000180938 1.84797e-05 0.000450938
0.84 0.000154797 1.98945e-05 0.000450938
1.12 0.00012052 2.26982e-05 0.000450938
1.4 9.8889e-05 2.54617e-05 0.000450938
1.68 0 0.000112103 0.000450938
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 0.000695863 1.86918e-05 0.000450938
0.28 0.00038885 2.00329e-05 0.000450938
0.35 0.000323204 2.07013e-05 0.000450938
0.42 0.000277832 2.13685e-05 0.000450938
0.49 0.000244351 2.20366e-05 0.000450938
0.56 0.000218495 2.27007e-05 0.000450938
0.63 0.000197849 2.3365e-05 0.000450938
0.7 0.000180938 2.40273e-05 0.000450938
0.84 0.000154797 2.53472e-05 0.000450938
1.12 0.00012052 2.79623e-05 0.000450938
1.4 9.8889e-05 3.05391e-05 0.000450938
1.68 0 0.000116997 0.000450938
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.000695863 2.79666e-05 0.000450938
0.28 0.00038885 3.00971e-05 0.000450938
0.35 0.000323204 3.11612e-05 0.000450938
0.42 0.000277832 3.22224e-05 0.000450938
0.49 0.000244351 3.32823e-05 0.000450938
0.56 0.000218495 3.43399e-05 0.000450938
0.63 0.000197849 3.53952e-05 0.000450938
0.7 0.000180938 3.64477e-05 0.000450938
0.84 0.000154797 3.8546e-05 0.000450938
1.12 0.00012052 4.27022e-05 0.000450938
1.4 9.8889e-05 4.67976e-05 0.000450938
1.68 0 0.000134748 0.000450938
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.000695863 1.66529e-05 0.000450938
0.28 0.00038885 1.8176e-05 0.000450938
0.35 0.000323204 1.89361e-05 0.000450938
0.42 0.000277832 1.96955e-05 0.000450938
0.49 0.000244351 2.04529e-05 0.000450938
0.56 0.000218495 2.12092e-05 0.000450938
0.63 0.000197849 2.1964e-05 0.000450938
0.7 0.000180938 2.27167e-05 0.000450938
0.84 0.000154797 2.42166e-05 0.000450938
1.12 0.00012052 2.71885e-05 0.000450938
1.4 9.8889e-05 3.01168e-05 0.000450938
1.68 0 0.00011692 0.000450938
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.000695863 8.33553e-06 0.000450938
0.28 0.00038885 9.71255e-06 0.000450938
0.35 0.000323204 1.03996e-05 0.000450938
0.42 0.000277832 1.10856e-05 0.000450938
0.49 0.000244351 1.17704e-05 0.000450938
0.56 0.000218495 1.24539e-05 0.000450938
0.63 0.000197849 1.31359e-05 0.000450938
0.7 0.000180938 1.38163e-05 0.000450938
0.84 0.000154797 1.51719e-05 0.000450938
1.12 0.00012052 1.78579e-05 0.000450938
1.4 9.8889e-05 2.05044e-05 0.000450938
1.68 0 0.000107032 0.000450938
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 13 width 0.14
0 0 5.70672e-05 0.000450938
0.14 0 0 0.000450938
0.28 0 0 0.000450938
0.35 0 0 0.000450938
0.42 0 0 0.000450938
0.49 0 0 0.000450938
0.56 0 0 0.000450938
0.63 0 0 0.000450938
0.7 0 0 0.000450938
0.84 0 0 0.000450938
1.12 0 0 0.000450938
1.4 0 0 0.000450938
1.68 0 0 0.000450938
END DIST

Metal 3 DIAGUNDER 5
DIST count 13 width 0.14
0 0 2.54305e-05 0.000450938
0.14 0 0 0.000450938
0.28 0 0 0.000450938
0.35 0 0 0.000450938
0.42 0 0 0.000450938
0.49 0 0 0.000450938
0.56 0 0 0.000450938
0.63 0 0 0.000450938
0.7 0 0 0.000450938
0.84 0 0 0.000450938
1.12 0 0 0.000450938
1.4 0 0 0.000450938
1.68 0 0 0.000450938
END DIST

Metal 3 DIAGUNDER 6
DIST count 13 width 0.14
0 0 1.74521e-05 0.000450938
0.14 0 0 0.000450938
0.28 0 0 0.000450938
0.35 0 0 0.000450938
0.42 0 0 0.000450938
0.49 0 0 0.000450938
0.56 0 0 0.000450938
0.63 0 0 0.000450938
0.7 0 0 0.000450938
0.84 0 0 0.000450938
1.12 0 0 0.000450938
1.4 0 0 0.000450938
1.68 0 0 0.000450938
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000695863 3.69399e-05 0.000450938
0.28 0.00038885 3.95977e-05 0.000450938
0.35 0.000323204 4.09255e-05 0.000450938
0.42 0.000277832 4.22499e-05 0.000450938
0.49 0.000244351 4.35719e-05 0.000450938
0.56 0.000218495 4.48916e-05 0.000450938
0.63 0.000197849 4.62074e-05 0.000450938
0.7 0.000180938 4.75203e-05 0.000450938
0.84 0.000154797 5.01378e-05 0.000450938
1.12 0.00012052 5.53228e-05 0.000450938
1.4 9.8889e-05 6.04329e-05 0.000450938
1.68 0 0.000149378 0.000450938
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000695863 2.56262e-05 0.000450938
0.28 0.00038885 2.76766e-05 0.000450938
0.35 0.000323204 2.87004e-05 0.000450938
0.42 0.000277832 2.97229e-05 0.000450938
0.49 0.000244351 3.07424e-05 0.000450938
0.56 0.000218495 3.17608e-05 0.000450938
0.63 0.000197849 3.27762e-05 0.000450938
0.7 0.000180938 3.37893e-05 0.000450938
0.84 0.000154797 3.58084e-05 0.000450938
1.12 0.00012052 3.98091e-05 0.000450938
1.4 9.8889e-05 4.37521e-05 0.000450938
1.68 0 0.000131551 0.000450938
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000695863 1.73089e-05 0.000450938
0.28 0.00038885 1.92132e-05 0.000450938
0.35 0.000323204 2.01639e-05 0.000450938
0.42 0.000277832 2.11131e-05 0.000450938
0.49 0.000244351 2.206e-05 0.000450938
0.56 0.000218495 2.30056e-05 0.000450938
0.63 0.000197849 2.39481e-05 0.000450938
0.7 0.000180938 2.48889e-05 0.000450938
0.84 0.000154797 2.67637e-05 0.000450938
1.12 0.00012052 3.04784e-05 0.000450938
1.4 9.8889e-05 3.41397e-05 0.000450938
1.68 0 0.000121662 0.000450938
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000695863 4.28729e-05 0.000450938
0.28 0.00038885 4.54347e-05 0.000450938
0.35 0.000323204 4.67131e-05 0.000450938
0.42 0.000277832 4.79883e-05 0.000450938
0.49 0.000244351 4.92637e-05 0.000450938
0.56 0.000218495 5.05338e-05 0.000450938
0.63 0.000197849 5.18028e-05 0.000450938
0.7 0.000180938 5.3068e-05 0.000450938
0.84 0.000154797 5.55905e-05 0.000450938
1.12 0.00012052 6.05868e-05 0.000450938
1.4 9.8889e-05 6.55103e-05 0.000450938
1.68 0 0.000154273 0.000450938
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000695863 3.15592e-05 0.000450938
0.28 0.00038885 3.35135e-05 0.000450938
0.35 0.000323204 3.4488e-05 0.000450938
0.42 0.000277832 3.54614e-05 0.000450938
0.49 0.000244351 3.64343e-05 0.000450938
0.56 0.000218495 3.74031e-05 0.000450938
0.63 0.000197849 3.83716e-05 0.000450938
0.7 0.000180938 3.93369e-05 0.000450938
0.84 0.000154797 4.12611e-05 0.000450938
1.12 0.00012052 4.50731e-05 0.000450938
1.4 9.8889e-05 4.88296e-05 0.000450938
1.68 0 0.000136445 0.000450938
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000695863 2.32418e-05 0.000450938
0.28 0.00038885 2.50501e-05 0.000450938
0.35 0.000323204 2.59515e-05 0.000450938
0.42 0.000277832 2.68515e-05 0.000450938
0.49 0.000244351 2.77518e-05 0.000450938
0.56 0.000218495 2.86478e-05 0.000450938
0.63 0.000197849 2.95435e-05 0.000450938
0.7 0.000180938 3.04365e-05 0.000450938
0.84 0.000154797 3.22164e-05 0.000450938
1.12 0.00012052 3.57424e-05 0.000450938
1.4 9.8889e-05 3.92172e-05 0.000450938
1.68 0 0.000126557 0.000450938
END DIST

Metal 4 RESOVER
WIDTH Table 1 entries:  0.3

Metal 4 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000158249
0 0.38 0 0.000158249
0 0.68 0 0.000158249
0 0.91 0 0.000158249
0 1.06 0 0.000158249
0 1.36 0 0.000158249
0 1.59 0 0.000158249
0 1.74 0 0.000158249
0 2.04 0 0.000158249
0 2.72 0 0.000158249
0.38 0.38 0 0.000158249
0.38 0.68 0 0.000158249
0.38 0.91 0 0.000158249
0.38 1.06 0 0.000158249
0.38 1.36 0 0.000158249
0.38 1.59 0 0.000158249
0.38 1.74 0 0.000158249
0.38 2.04 0 0.000158249
0.38 2.72 0 0.000158249
0.68 0.68 0 0.000158249
0.68 0.91 0 0.000158249
0.68 1.06 0 0.000158249
0.68 1.36 0 0.000158249
0.68 1.59 0 0.000158249
0.68 1.74 0 0.000158249
0.68 2.04 0 0.000158249
0.68 2.72 0 0.000158249
0.91 0.91 0 0.000158249
0.91 1.06 0 0.000158249
0.91 1.36 0 0.000158249
0.91 1.59 0 0.000158249
0.91 1.74 0 0.000158249
0.91 2.04 0 0.000158249
0.91 2.72 0 0.000158249
1.06 1.06 0 0.000158249
1.06 1.36 0 0.000158249
1.06 1.59 0 0.000158249
1.06 1.74 0 0.000158249
1.06 2.04 0 0.000158249
1.06 2.72 0 0.000158249
1.36 1.36 0 0.000158249
1.36 1.59 0 0.000158249
1.36 1.74 0 0.000158249
1.36 2.04 0 0.000158249
1.36 2.72 0 0.000158249
1.59 1.59 0 0.000158249
1.59 1.74 0 0.000158249
1.59 2.04 0 0.000158249
1.59 2.72 0 0.000158249
1.74 1.74 0 0.000158249
1.74 2.04 0 0.000158249
1.74 2.72 0 0.000158249
2.04 2.04 0 0.000158249
2.04 2.72 0 0.000158249
2.72 0 2.72 0.000158249
END DIST

Metal 4 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 4 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.000494304 6.75308e-06 7.91246e-05
0.6 0.000277925 8.92736e-06 7.91246e-05
0.75 0.000230776 1.0006e-05 7.91246e-05
0.9 0.000198008 1.10778e-05 7.91246e-05
1.05 0.000173756 1.21418e-05 7.91246e-05
1.2 0.000155004 1.31971e-05 7.91246e-05
1.35 0.000140029 1.42427e-05 7.91246e-05
1.5 0.000127771 1.52777e-05 7.91246e-05
1.8 0.000108856 1.73125e-05 7.91246e-05
2.4 8.41685e-05 2.12165e-05 7.91246e-05
3 6.86971e-05 2.48552e-05 7.91246e-05
3.6 0 8.62423e-05 7.91246e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.000494304 2.25161e-05 7.91246e-05
0.6 0.000277925 2.59508e-05 7.91246e-05
0.75 0.000230776 2.7656e-05 7.91246e-05
0.9 0.000198008 2.93493e-05 7.91246e-05
1.05 0.000173756 3.10297e-05 7.91246e-05
1.2 0.000155004 3.26968e-05 7.91246e-05
1.35 0.000140029 3.43475e-05 7.91246e-05
1.5 0.000127771 3.59834e-05 7.91246e-05
1.8 0.000108856 3.91968e-05 7.91246e-05
2.4 8.41685e-05 4.53646e-05 7.91246e-05
3 6.86971e-05 5.11137e-05 7.91246e-05
3.6 0 0.000114427 7.91246e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.000494304 3.48571e-05 7.91246e-05
0.6 0.000277925 3.8452e-05 7.91246e-05
0.75 0.000230776 4.02361e-05 7.91246e-05
0.9 0.000198008 4.20094e-05 7.91246e-05
1.05 0.000173756 4.3771e-05 7.91246e-05
1.2 0.000155004 4.55177e-05 7.91246e-05
1.35 0.000140029 4.72458e-05 7.91246e-05
1.5 0.000127771 4.89575e-05 7.91246e-05
1.8 0.000108856 5.23236e-05 7.91246e-05
2.4 8.41685e-05 5.87843e-05 7.91246e-05
3 6.86971e-05 6.48029e-05 7.91246e-05
3.6 0 0.000128364 7.91246e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.000494304 7.19437e-05 7.91246e-05
0.6 0.000277925 7.71287e-05 7.91246e-05
0.75 0.000230776 7.97023e-05 7.91246e-05
0.9 0.000198008 8.22555e-05 7.91246e-05
1.05 0.000173756 8.47929e-05 7.91246e-05
1.2 0.000155004 8.73084e-05 7.91246e-05
1.35 0.000140029 8.98012e-05 7.91246e-05
1.5 0.000127771 9.22699e-05 7.91246e-05
1.8 0.000108856 9.7122e-05 7.91246e-05
2.4 8.41685e-05 0.00010643 7.91246e-05
3 6.86971e-05 0.000115104 7.91246e-05
3.6 0 0.000181092 7.91246e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.000494304 6.05399e-05 7.91246e-05
0.6 0.000277925 6.52145e-05 7.91246e-05
0.75 0.000230776 6.75339e-05 7.91246e-05
0.9 0.000198008 6.98394e-05 7.91246e-05
1.05 0.000173756 7.2126e-05 7.91246e-05
1.2 0.000155004 7.43951e-05 7.91246e-05
1.35 0.000140029 7.66442e-05 7.91246e-05
1.5 0.000127771 7.88695e-05 7.91246e-05
1.8 0.000108856 8.32444e-05 7.91246e-05
2.4 8.41685e-05 9.16399e-05 7.91246e-05
3 6.86971e-05 9.94638e-05 7.91246e-05
3.6 0 0.000164672 7.91246e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000494304 1.94419e-05 7.91246e-05
0.6 0.000277925 2.3284e-05 7.91246e-05
0.75 0.000230776 2.51899e-05 7.91246e-05
0.9 0.000198008 2.70838e-05 7.91246e-05
1.05 0.000173756 2.89641e-05 7.91246e-05
1.2 0.000155004 3.08286e-05 7.91246e-05
1.35 0.000140029 3.26762e-05 7.91246e-05
1.5 0.000127771 3.45053e-05 7.91246e-05
1.8 0.000108856 3.81007e-05 7.91246e-05
2.4 8.41685e-05 4.49992e-05 7.91246e-05
3 6.86971e-05 5.14289e-05 7.91246e-05
3.6 0 0.000115365 7.91246e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 13 width 0.3
0 0 2.54636e-05 7.91246e-05
0.3 0 0 7.91246e-05
0.6 0 0 7.91246e-05
0.75 0 0 7.91246e-05
0.9 0 0 7.91246e-05
1.05 0 0 7.91246e-05
1.2 0 0 7.91246e-05
1.35 0 0 7.91246e-05
1.5 0 0 7.91246e-05
1.8 0 0 7.91246e-05
2.4 0 0 7.91246e-05
3 0 0 7.91246e-05
3.6 0 0 7.91246e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 13 width 0.3
0 0 3.40697e-05 7.91246e-05
0.3 0 0 7.91246e-05
0.6 0 0 7.91246e-05
0.75 0 0 7.91246e-05
0.9 0 0 7.91246e-05
1.05 0 0 7.91246e-05
1.2 0 0 7.91246e-05
1.35 0 0 7.91246e-05
1.5 0 0 7.91246e-05
1.8 0 0 7.91246e-05
2.4 0 0 7.91246e-05
3 0 0 7.91246e-05
3.6 0 0 7.91246e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.000494304 7.63029e-05 7.91246e-05
0.6 0.000277925 8.22379e-05 7.91246e-05
0.75 0.000230776 8.51839e-05 7.91246e-05
0.9 0.000198008 8.81108e-05 7.91246e-05
1.05 0.000173756 9.10139e-05 7.91246e-05
1.2 0.000155004 9.38948e-05 7.91246e-05
1.35 0.000140029 9.6749e-05 7.91246e-05
1.5 0.000127771 9.95752e-05 7.91246e-05
1.8 0.000108856 0.000105129 7.91246e-05
2.4 8.41685e-05 0.000115788 7.91246e-05
3 6.86971e-05 0.000125722 7.91246e-05
3.6 0 0.000192858 7.91246e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000494304 3.52049e-05 7.91246e-05
0.6 0.000277925 4.03074e-05 7.91246e-05
0.75 0.000230776 4.28399e-05 7.91246e-05
0.9 0.000198008 4.53553e-05 7.91246e-05
1.05 0.000173756 4.78519e-05 7.91246e-05
1.2 0.000155004 5.03283e-05 7.91246e-05
1.35 0.000140029 5.27811e-05 7.91246e-05
1.5 0.000127771 5.52109e-05 7.91246e-05
1.8 0.000108856 5.99851e-05 7.91246e-05
2.4 8.41685e-05 6.91473e-05 7.91246e-05
3 6.86971e-05 7.76873e-05 7.91246e-05
3.6 0 0.00014355 7.91246e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0.000494304 8.8644e-05 7.91246e-05
0.6 0.000277925 9.47391e-05 7.91246e-05
0.75 0.000230776 9.7764e-05 7.91246e-05
0.9 0.000198008 0.000100771 7.91246e-05
1.05 0.000173756 0.000103755 7.91246e-05
1.2 0.000155004 0.000106716 7.91246e-05
1.35 0.000140029 0.000109647 7.91246e-05
1.5 0.000127771 0.000112549 7.91246e-05
1.8 0.000108856 0.000118255 7.91246e-05
2.4 8.41685e-05 0.000129208 7.91246e-05
3 6.86971e-05 0.000139411 7.91246e-05
3.6 0 0.000206794 7.91246e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000494304 4.7546e-05 7.91246e-05
0.6 0.000277925 5.28086e-05 7.91246e-05
0.75 0.000230776 5.542e-05 7.91246e-05
0.9 0.000198008 5.80154e-05 7.91246e-05
1.05 0.000173756 6.05932e-05 7.91246e-05
1.2 0.000155004 6.31492e-05 7.91246e-05
1.35 0.000140029 6.56794e-05 7.91246e-05
1.5 0.000127771 6.81851e-05 7.91246e-05
1.8 0.000108856 7.31119e-05 7.91246e-05
2.4 8.41685e-05 8.2567e-05 7.91246e-05
3 6.86971e-05 9.13765e-05 7.91246e-05
3.6 0 0.000157486 7.91246e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 0.000494304 0.000125731 7.91246e-05
0.6 0.000277925 0.000133416 7.91246e-05
0.75 0.000230776 0.00013723 7.91246e-05
0.9 0.000198008 0.000141017 7.91246e-05
1.05 0.000173756 0.000144777 7.91246e-05
1.2 0.000155004 0.000148506 7.91246e-05
1.35 0.000140029 0.000152203 7.91246e-05
1.5 0.000127771 0.000155862 7.91246e-05
1.8 0.000108856 0.000163054 7.91246e-05
2.4 8.41685e-05 0.000176853 7.91246e-05
3 6.86971e-05 0.000189712 7.91246e-05
3.6 0 0.000259522 7.91246e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000494304 8.46326e-05 7.91246e-05
0.6 0.000277925 9.14853e-05 7.91246e-05
0.75 0.000230776 9.48862e-05 7.91246e-05
0.9 0.000198008 9.82614e-05 7.91246e-05
1.05 0.000173756 0.000101615 7.91246e-05
1.2 0.000155004 0.00010494 7.91246e-05
1.35 0.000140029 0.000108235 7.91246e-05
1.5 0.000127771 0.000111498 7.91246e-05
1.8 0.000108856 0.00011791 7.91246e-05
2.4 8.41685e-05 0.000130212 7.91246e-05
3 6.86971e-05 0.000141678 7.91246e-05
3.6 0 0.000210214 7.91246e-05
END DIST

Metal 5 RESOVER
WIDTH Table 1 entries:  0.3

Metal 5 RESOVER 0
DIST count 55 width 0.3
0 0 0 0.000158249
0 0.62 0 0.000158249
0 0.92 0 0.000158249
0 1.39 0 0.000158249
0 1.54 0 0.000158249
0 1.84 0 0.000158249
0 2.31 0 0.000158249
0 2.46 0 0.000158249
0 2.76 0 0.000158249
0 3.68 0 0.000158249
0.62 0.62 0 0.000158249
0.62 0.92 0 0.000158249
0.62 1.39 0 0.000158249
0.62 1.54 0 0.000158249
0.62 1.84 0 0.000158249
0.62 2.31 0 0.000158249
0.62 2.46 0 0.000158249
0.62 2.76 0 0.000158249
0.62 3.68 0 0.000158249
0.92 0.92 0 0.000158249
0.92 1.39 0 0.000158249
0.92 1.54 0 0.000158249
0.92 1.84 0 0.000158249
0.92 2.31 0 0.000158249
0.92 2.46 0 0.000158249
0.92 2.76 0 0.000158249
0.92 3.68 0 0.000158249
1.39 1.39 0 0.000158249
1.39 1.54 0 0.000158249
1.39 1.84 0 0.000158249
1.39 2.31 0 0.000158249
1.39 2.46 0 0.000158249
1.39 2.76 0 0.000158249
1.39 3.68 0 0.000158249
1.54 1.54 0 0.000158249
1.54 1.84 0 0.000158249
1.54 2.31 0 0.000158249
1.54 2.46 0 0.000158249
1.54 2.76 0 0.000158249
1.54 3.68 0 0.000158249
1.84 1.84 0 0.000158249
1.84 2.31 0 0.000158249
1.84 2.46 0 0.000158249
1.84 2.76 0 0.000158249
1.84 3.68 0 0.000158249
2.31 2.31 0 0.000158249
2.31 2.46 0 0.000158249
2.31 2.76 0 0.000158249
2.31 3.68 0 0.000158249
2.46 2.46 0 0.000158249
2.46 2.76 0 0.000158249
2.46 3.68 0 0.000158249
2.76 2.76 0 0.000158249
2.76 3.68 0 0.000158249
3.68 0 3.68 0.000158249
END DIST

Metal 5 RESOVER 1
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 2
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 3
DIST count 0 width 0.3
END DIST

Metal 5 RESOVER 4
DIST count 0 width 0.3
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.000495005 6.64423e-06 7.91246e-05
0.6 0.000277069 8.63677e-06 7.91246e-05
0.75 0.000230295 9.62423e-06 7.91246e-05
0.9 0.000197926 1.06047e-05 7.91246e-05
1.05 0.000174019 1.15772e-05 7.91246e-05
1.2 0.000155549 1.25411e-05 7.91246e-05
1.35 0.000140798 1.34954e-05 7.91246e-05
1.5 0.000128714 1.44393e-05 7.91246e-05
1.8 0.000110038 1.62928e-05 7.91246e-05
2.4 8.55645e-05 1.98397e-05 7.91246e-05
3 7.01368e-05 2.3133e-05 7.91246e-05
3.6 0 8.56054e-05 7.91246e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.000495005 1.83556e-05 7.91246e-05
0.6 0.000277069 2.14556e-05 7.91246e-05
0.75 0.000230295 2.29932e-05 7.91246e-05
0.9 0.000197926 2.45189e-05 7.91246e-05
1.05 0.000174019 2.60318e-05 7.91246e-05
1.2 0.000155549 2.75314e-05 7.91246e-05
1.35 0.000140798 2.90171e-05 7.91246e-05
1.5 0.000128714 3.04859e-05 7.91246e-05
1.8 0.000110038 3.33705e-05 7.91246e-05
2.4 8.55645e-05 3.88886e-05 7.91246e-05
3 7.01368e-05 4.40146e-05 7.91246e-05
3.6 0 0.000108153 7.91246e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.000495005 2.65997e-05 7.91246e-05
0.6 0.000277069 2.97949e-05 7.91246e-05
0.75 0.000230295 3.13789e-05 7.91246e-05
0.9 0.000197926 3.2952e-05 7.91246e-05
1.05 0.000174019 3.45136e-05 7.91246e-05
1.2 0.000155549 3.60603e-05 7.91246e-05
1.35 0.000140798 3.75888e-05 7.91246e-05
1.5 0.000128714 3.91038e-05 7.91246e-05
1.8 0.000110038 4.20774e-05 7.91246e-05
2.4 8.55645e-05 4.77677e-05 7.91246e-05
3 7.01368e-05 5.30499e-05 7.91246e-05
3.6 0 0.000117332 7.91246e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.000495005 3.71912e-05 7.91246e-05
0.6 0.000277069 4.0895e-05 7.91246e-05
0.75 0.000230295 4.27288e-05 7.91246e-05
0.9 0.000197926 4.45512e-05 7.91246e-05
1.05 0.000174019 4.63589e-05 7.91246e-05
1.2 0.000155549 4.8151e-05 7.91246e-05
1.35 0.000140798 4.99244e-05 7.91246e-05
1.5 0.000128714 5.16783e-05 7.91246e-05
1.8 0.000110038 5.5122e-05 7.91246e-05
2.4 8.55645e-05 6.17151e-05 7.91246e-05
3 7.01368e-05 6.78352e-05 7.91246e-05
3.6 0 0.000132877 7.91246e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0.000495005 4.78203e-05 7.91246e-05
0.6 0.000277069 5.29292e-05 7.91246e-05
0.75 0.000230295 5.54602e-05 7.91246e-05
0.9 0.000197926 5.79739e-05 7.91246e-05
1.05 0.000174019 6.04684e-05 7.91246e-05
1.2 0.000155549 6.29387e-05 7.91246e-05
1.35 0.000140798 6.53856e-05 7.91246e-05
1.5 0.000128714 6.78053e-05 7.91246e-05
1.8 0.000110038 7.2557e-05 7.91246e-05
2.4 8.55645e-05 8.16518e-05 7.91246e-05
3 7.01368e-05 9.00947e-05 7.91246e-05
3.6 0 0.000157249 7.91246e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.000495005 3.34286e-05 7.91246e-05
0.6 0.000277069 3.81753e-05 7.91246e-05
0.75 0.000230295 4.05276e-05 7.91246e-05
0.9 0.000197926 4.28634e-05 7.91246e-05
1.05 0.000174019 4.51802e-05 7.91246e-05
1.2 0.000155549 4.74763e-05 7.91246e-05
1.35 0.000140798 4.97498e-05 7.91246e-05
1.5 0.000128714 5.19983e-05 7.91246e-05
1.8 0.000110038 5.64136e-05 7.91246e-05
2.4 8.55645e-05 6.48635e-05 7.91246e-05
3 7.01368e-05 7.27085e-05 7.91246e-05
3.6 0 0.000139319 7.91246e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 13 width 0.3
0 0 6.81606e-05 7.91246e-05
0.3 0 0 7.91246e-05
0.6 0 0 7.91246e-05
0.75 0 0 7.91246e-05
0.9 0 0 7.91246e-05
1.05 0 0 7.91246e-05
1.2 0 0 7.91246e-05
1.35 0 0 7.91246e-05
1.5 0 0 7.91246e-05
1.8 0 0 7.91246e-05
2.4 0 0 7.91246e-05
3 0 0 7.91246e-05
3.6 0 0 7.91246e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000495005 4.51401e-05 7.91246e-05
0.6 0.000277069 5.09941e-05 7.91246e-05
0.75 0.000230295 5.38966e-05 7.91246e-05
0.9 0.000197926 5.67776e-05 7.91246e-05
1.05 0.000174019 5.96348e-05 7.91246e-05
1.2 0.000155549 6.24666e-05 7.91246e-05
1.35 0.000140798 6.52715e-05 7.91246e-05
1.5 0.000128714 6.80449e-05 7.91246e-05
1.8 0.000110038 7.34914e-05 7.91246e-05
2.4 8.55645e-05 8.39123e-05 7.91246e-05
3 7.01368e-05 9.35901e-05 7.91246e-05
3.6 0 0.000161866 7.91246e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000495005 5.33841e-05 7.91246e-05
0.6 0.000277069 5.93334e-05 7.91246e-05
0.75 0.000230295 6.22823e-05 7.91246e-05
0.9 0.000197926 6.52108e-05 7.91246e-05
1.05 0.000174019 6.81166e-05 7.91246e-05
1.2 0.000155549 7.09956e-05 7.91246e-05
1.35 0.000140798 7.38431e-05 7.91246e-05
1.5 0.000128714 7.66628e-05 7.91246e-05
1.8 0.000110038 8.21982e-05 7.91246e-05
2.4 8.55645e-05 9.27914e-05 7.91246e-05
3 7.01368e-05 0.000102625 7.91246e-05
3.6 0 0.000171045 7.91246e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000495005 6.39756e-05 7.91246e-05
0.6 0.000277069 7.04335e-05 7.91246e-05
0.75 0.000230295 7.36322e-05 7.91246e-05
0.9 0.000197926 7.681e-05 7.91246e-05
1.05 0.000174019 7.99619e-05 7.91246e-05
1.2 0.000155549 8.30863e-05 7.91246e-05
1.35 0.000140798 8.61788e-05 7.91246e-05
1.5 0.000128714 8.92373e-05 7.91246e-05
1.8 0.000110038 9.52429e-05 7.91246e-05
2.4 8.55645e-05 0.000106739 7.91246e-05
3 7.01368e-05 0.000117411 7.91246e-05
3.6 0 0.00018659 7.91246e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000495005 7.46047e-05 7.91246e-05
0.6 0.000277069 8.24677e-05 7.91246e-05
0.75 0.000230295 8.63636e-05 7.91246e-05
0.9 0.000197926 9.02327e-05 7.91246e-05
1.05 0.000174019 9.40714e-05 7.91246e-05
1.2 0.000155549 9.78739e-05 7.91246e-05
1.35 0.000140798 0.00010164 7.91246e-05
1.5 0.000128714 0.000105364 7.91246e-05
1.8 0.000110038 0.000112678 7.91246e-05
2.4 8.55645e-05 0.000126676 7.91246e-05
3 7.01368e-05 0.00013967 7.91246e-05
3.6 0 0.000210962 7.91246e-05
END DIST

Metal 6 RESOVER
WIDTH Table 1 entries:  1.6

Metal 6 RESOVER 0
DIST count 55 width 1.6
0 0 0 1.83081e-05
0 1.8 0 1.83081e-05
0 3.4 0 1.83081e-05
0 4.4 0 1.83081e-05
0 5.2 0 1.83081e-05
0 6.8 0 1.83081e-05
0 7.8 0 1.83081e-05
0 8.6 0 1.83081e-05
0 10.2 0 1.83081e-05
0 13.6 0 1.83081e-05
1.8 1.8 0 1.83081e-05
1.8 3.4 0 1.83081e-05
1.8 4.4 0 1.83081e-05
1.8 5.2 0 1.83081e-05
1.8 6.8 0 1.83081e-05
1.8 7.8 0 1.83081e-05
1.8 8.6 0 1.83081e-05
1.8 10.2 0 1.83081e-05
1.8 13.6 0 1.83081e-05
3.4 3.4 0 1.83081e-05
3.4 4.4 0 1.83081e-05
3.4 5.2 0 1.83081e-05
3.4 6.8 0 1.83081e-05
3.4 7.8 0 1.83081e-05
3.4 8.6 0 1.83081e-05
3.4 10.2 0 1.83081e-05
3.4 13.6 0 1.83081e-05
4.4 4.4 0 1.83081e-05
4.4 5.2 0 1.83081e-05
4.4 6.8 0 1.83081e-05
4.4 7.8 0 1.83081e-05
4.4 8.6 0 1.83081e-05
4.4 10.2 0 1.83081e-05
4.4 13.6 0 1.83081e-05
5.2 5.2 0 1.83081e-05
5.2 6.8 0 1.83081e-05
5.2 7.8 0 1.83081e-05
5.2 8.6 0 1.83081e-05
5.2 10.2 0 1.83081e-05
5.2 13.6 0 1.83081e-05
6.8 6.8 0 1.83081e-05
6.8 7.8 0 1.83081e-05
6.8 8.6 0 1.83081e-05
6.8 10.2 0 1.83081e-05
6.8 13.6 0 1.83081e-05
7.8 7.8 0 1.83081e-05
7.8 8.6 0 1.83081e-05
7.8 10.2 0 1.83081e-05
7.8 13.6 0 1.83081e-05
8.6 8.6 0 1.83081e-05
8.6 10.2 0 1.83081e-05
8.6 13.6 0 1.83081e-05
10.2 10.2 0 1.83081e-05
10.2 13.6 0 1.83081e-05
13.6 0 13.6 1.83081e-05
END DIST

Metal 6 RESOVER 1
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 2
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 3
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 4
DIST count 0 width 1.6
END DIST

Metal 6 RESOVER 5
DIST count 0 width 1.6
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 0.0001585 2.64287e-05 9.15404e-06
3.2 8.91471e-05 3.40505e-05 9.15404e-06
4 7.39927e-05 3.6839e-05 9.15404e-06
4.8 4.00253e-05 3.53122e-05 9.15404e-06
5.6 3.43073e-05 3.83621e-05 9.15404e-06
6.4 3.00189e-05 4.05956e-05 9.15404e-06
7.2 2.66835e-05 4.19574e-05 9.15404e-06
8 0 4.24145e-05 9.15404e-06
9.6 0 4.24145e-05 9.15404e-06
12.8 0 4.24145e-05 9.15404e-06
16 0 4.24145e-05 9.15404e-06
19.2 0 4.24145e-05 9.15404e-06
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 0.0001585 7.6678e-05 9.15404e-06
3.2 8.91471e-05 8.84665e-05 9.15404e-06
4 7.39927e-05 9.27795e-05 9.15404e-06
4.8 4.00253e-05 9.0417e-05 9.15404e-06
5.6 3.43073e-05 9.5137e-05 9.15404e-06
6.4 3.00189e-05 9.85899e-05 9.15404e-06
7.2 2.66835e-05 0.000100698 9.15404e-06
8 0 0.000101405 9.15404e-06
9.6 0 0.000101405 9.15404e-06
12.8 0 0.000101405 9.15404e-06
16 0 0.000101405 9.15404e-06
19.2 0 0.000101405 9.15404e-06
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 0.0001585 0.000109446 9.15404e-06
3.2 8.91471e-05 0.000121528 9.15404e-06
4 7.39927e-05 0.000125946 9.15404e-06
4.8 4.00253e-05 0.000123526 9.15404e-06
5.6 3.43073e-05 0.00012836 9.15404e-06
6.4 3.00189e-05 0.000131898 9.15404e-06
7.2 2.66835e-05 0.000134059 9.15404e-06
8 0 0.000134782 9.15404e-06
9.6 0 0.000134782 9.15404e-06
12.8 0 0.000134782 9.15404e-06
16 0 0.000134782 9.15404e-06
19.2 0 0.000134782 9.15404e-06
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 0.0001585 0.000141839 9.15404e-06
3.2 8.91471e-05 0.000155087 9.15404e-06
4 7.39927e-05 0.000159935 9.15404e-06
4.8 4.00253e-05 0.00015728 9.15404e-06
5.6 3.43073e-05 0.000162583 9.15404e-06
6.4 3.00189e-05 0.000166464 9.15404e-06
7.2 2.66835e-05 0.00016883 9.15404e-06
8 0 0.000169625 9.15404e-06
9.6 0 0.000169625 9.15404e-06
12.8 0 0.000169625 9.15404e-06
16 0 0.000169625 9.15404e-06
19.2 0 0.000169625 9.15404e-06
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 0.0001585 0.000139445 9.15404e-06
3.2 8.91471e-05 0.000154463 9.15404e-06
4 7.39927e-05 0.000159956 9.15404e-06
4.8 4.00253e-05 0.000156949 9.15404e-06
5.6 3.43073e-05 0.000162957 9.15404e-06
6.4 3.00189e-05 0.000167358 9.15404e-06
7.2 2.66835e-05 0.000170041 9.15404e-06
8 0 0.000170941 9.15404e-06
9.6 0 0.000170941 9.15404e-06
12.8 0 0.000170941 9.15404e-06
16 0 0.000170941 9.15404e-06
19.2 0 0.000170941 9.15404e-06
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 0.0001585 0.000249661 9.15404e-06
3.2 8.91471e-05 0.000270612 9.15404e-06
4 7.39927e-05 0.000278277 9.15404e-06
4.8 4.00253e-05 0.000274079 9.15404e-06
5.6 3.43073e-05 0.000282463 9.15404e-06
6.4 3.00189e-05 0.000288601 9.15404e-06
7.2 2.66835e-05 0.000292345 9.15404e-06
8 0 0.000293602 9.15404e-06
9.6 0 0.000293602 9.15404e-06
12.8 0 0.000293602 9.15404e-06
16 0 0.000293602 9.15404e-06
19.2 0 0.000293602 9.15404e-06
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0