Add SPEF Extractor OpenRCX calibration to installed files

sky130/Makefile.in

diff --git a/sky130/Makefile.in b/sky130/Makefile.in
index b9b547f..500e65c 100644
--- a/sky130/Makefile.in
+++ b/sky130/Makefile.in
@@ -943,6 +943,10 @@
 	rm -f ${OPENLANE_STAGING_$*}/rules.openrcx.sky130$*.nom.magic
 	rm -f ${OPENLANE_STAGING_$*}/rules.openrcx.sky130$*.max.magic
 
+	rm -f ${OPENLANE_STAGING_$*}/rules.openrcx.sky130$*.min.spef_extractor
+	rm -f ${OPENLANE_STAGING_$*}/rules.openrcx.sky130$*.nom.spef_extractor
+	rm -f ${OPENLANE_STAGING_$*}/rules.openrcx.sky130$*.max.spef_extractor
+
 	cp -r openlane/custom_cells ${OPENLANE_STAGING_$*}
 	${CPP} ${SKY130$*_DEFS} openlane/config.tcl ${OPENLANE_STAGING_$*}/config.tcl
 
@@ -953,6 +957,13 @@
 	${CPP} ${SKY130$*_DEFS} openlane/rules.openrcx.sky130$*.max.magic \
 		${OPENLANE_STAGING_$*}/rules.openrcx.sky130$*.max.magic
 
+	${CPP} ${SKY130$*_DEFS} openlane/rules.openrcx.sky130$*.min.spef_extractor \
+		${OPENLANE_STAGING_$*}/rules.openrcx.sky130$*.min.spef_extractor
+	${CPP} ${SKY130$*_DEFS} openlane/rules.openrcx.sky130$*.nom.spef_extractor \
+		${OPENLANE_STAGING_$*}/rules.openrcx.sky130$*.nom.spef_extractor
+	${CPP} ${SKY130$*_DEFS} openlane/rules.openrcx.sky130$*.max.spef_extractor \
+		${OPENLANE_STAGING_$*}/rules.openrcx.sky130$*.max.spef_extractor
+
 	for file in ${OPENLANE_COMMON} ; do \
 	    ${CPP} -quiet ${SKY130$*_DEFS} openlane/sky130_fd_sc_hd/$$file \
 		${OPENLANE_STAGING_$*}/sky130_fd_sc_hd/$$file ; \