Moved the fill type GDS import into the regular GDS import instead
of in its own special section. Created new types for poly and FOM
fill. Created type "fillblock4" to block all fill up to but not
including metal5.
diff --git a/sky130/magic/sky130.tech b/sky130/magic/sky130.tech
index 3c1bc09..7ba5b9a 100644
--- a/sky130/magic/sky130.tech
+++ b/sky130/magic/sky130.tech
@@ -177,6 +177,7 @@
-active srampvar,corepvar,corepvaractor
# Diffusions
+ -active fomfill
active ndiff,ndiffusion,ndif
active pdiff,pdiffusion,pdif
active mvndiff,mvndiffusion,mvndif
@@ -200,6 +201,7 @@
active poly,p,polysilicon
active polycont,pc,pcontact,polycut,polyc
active xpolycontact,xpolyc,xpc
+ -active polyfill
# Resistors
active npolyres,npres,mrp1
@@ -292,7 +294,7 @@
# Miscellaneous
-block glass
- -block fillblock
+ -block fillblock,fillblock4
comment comment
-comment obscomment
# fixed resistor width identifiers
@@ -407,7 +409,7 @@
alldiffmvnonfet allndiffmvnonfet,allpdiffmvnonfet
alldiffnonfet alldifflvnonfet,alldiffmvnonfet
- alldiff alldifflv,alldiffmv
+ alldiff alldifflv,alldiffmv,fomfill
allpolyres mrp1,xhrpoly,uhrpoly,rmp
allpolynonfet *poly,allpolyres,xpc
@@ -456,6 +458,7 @@
pwell pwell
rpwell pwell ptransistor_stripes
ndiff ndiffusion
+ fomfill ndiffusion
pdiff pdiffusion
nsd ndiff_in_nwell
psd pdiff_in_pwell
@@ -501,6 +504,7 @@
mvpsc pdiff_in_pwell metal1 contact_X'es hvpdiff_mask
poly polysilicon
+ polyfill polysilicon
pc polysilicon metal1 contact_X'es
npolyres polysilicon silicide_block nselect2
ppolyres polysilicon silicide_block pselect2
@@ -590,6 +594,7 @@
error_s error_waffle
error_ps error_waffle
fillblock cwell
+ fillblock4 cwell
obswell cwell
obsactive implant4
@@ -678,7 +683,7 @@
#endif (METAL5)
allnactivenonfet allnactivenonfet
allpactivenonfet allpactivenonfet
- *poly,xpc,allfets *poly,xpc,allfets
+ *poly,xpc,allfets,polyfill *poly,xpc,allfets,polyfill
#ifdef REDISTRIBUTION
# RDL connects to m5 (i.e., padl) through glass cut
*mrdl *mrdl
@@ -783,6 +788,14 @@
calma 65 44
#----------------------------------------------------------------
+# FOM
+#----------------------------------------------------------------
+
+ layer FOMFILL fomfill
+ labels fomfill
+ calma 65 28
+
+#----------------------------------------------------------------
# PPLUS, NPLUS (PSDM, NSDM)
#----------------------------------------------------------------
@@ -981,6 +994,10 @@
labels allpoly port
calma 66 5
+ layer POLYFILL polyfill
+ labels polyfill
+ calma 66 28
+
#----------------------------------------------------------------
# THKOX (HVI) (includes rules NWELL 8-11 and DIFFTAP 14-26)
#----------------------------------------------------------------
@@ -1327,16 +1344,16 @@
#----------------------------------------------------------------
# FILLBLOCK
#----------------------------------------------------------------
- layer FILLOBSM1 fillblock
+ layer FILLOBSM1 fillblock,fillblock4
calma 62 24
- layer FILLOBSM2 fillblock
+ layer FILLOBSM2 fillblock,fillblock4
calma 105 52
- layer FILLOBSM3 fillblock
+ layer FILLOBSM3 fillblock,fillblock4
calma 107 24
- layer FILLOBSM4 fillblock
+ layer FILLOBSM4 fillblock,fillblock4
calma 112 4
render DNWELL cwell -0.1 0.1
@@ -1836,28 +1853,23 @@
grow 245
#---------------------------------------------------
- templayer fomfill
- or fomfill_pass1
+ layer FOMFILL fomfill_pass1
or fomfill_pass2
or fomfill_coarse
or fomfill_fine
-
- templayer polyfill
- or polyfill_pass1
- or polyfill_coarse
- or polyfill_medium
- or polyfill_fine
-
- layer FOMFILL fomfill
calma 65 28
- layer POLYFILL polyfill
+
+ layer POLYFILL polyfill_pass1
+ or polyfill_coarse
+ or polyfill_medium
+ or polyfill_fine
calma 66 28
#---------------------------------------------------
# MET1 fill
#---------------------------------------------------
- templayer obstruct_m1_coarse allm1,allpad,obsm1,m1fill,fillblock
+ templayer obstruct_m1_coarse allm1,allpad,obsm1,m1fill,fillblock,fillblock4
grow 3000
templayer met1fill_coarse topbox
slots 0 2000 200 0 2000 200 700 0
@@ -1866,7 +1878,7 @@
shrink 995
grow 995
- templayer obstruct_m1_medium allm1,allpad,obsm1,m1fill,fillblock
+ templayer obstruct_m1_medium allm1,allpad,obsm1,m1fill,fillblock,fillblock4
grow 2800
or met1fill_coarse
grow 200
@@ -1877,7 +1889,7 @@
shrink 495
grow 495
- templayer obstruct_m1_fine allm1,allpad,obsm1,m1fill,fillblock
+ templayer obstruct_m1_fine allm1,allpad,obsm1,m1fill,fillblock,fillblock4
grow 300
or met1fill_coarse,met1fill_medium
grow 200
@@ -1888,7 +1900,7 @@
shrink 285
grow 285
- templayer obstruct_m1_veryfine allm1,allpad,obsm1,m1fill,fillblock
+ templayer obstruct_m1_veryfine allm1,allpad,obsm1,m1fill,fillblock,fillblock4
grow 100
or met1fill_coarse,met1fill_medium,met1fill_fine
grow 200
@@ -1908,7 +1920,7 @@
#---------------------------------------------------
# MET2 fill
#---------------------------------------------------
- templayer obstruct_m2 allm2,allpad,obsm2,m2fill,fillblock
+ templayer obstruct_m2 allm2,allpad,obsm2,m2fill,fillblock,fillblock4
grow 3000
templayer met2fill_coarse topbox
slots 0 2000 200 0 2000 200 700 350
@@ -1917,7 +1929,7 @@
shrink 995
grow 995
- templayer obstruct_m2_medium allm2,allpad,obsm2,m2fill,fillblock
+ templayer obstruct_m2_medium allm2,allpad,obsm2,m2fill,fillblock,fillblock4
grow 2800
or met2fill_coarse
grow 200
@@ -1928,7 +1940,7 @@
shrink 495
grow 495
- templayer obstruct_m2_fine allm2,allpad,obsm2,m2fill,fillblock
+ templayer obstruct_m2_fine allm2,allpad,obsm2,m2fill,fillblock,fillblock4
grow 300
or met2fill_coarse,met2fill_medium
grow 200
@@ -1939,7 +1951,7 @@
shrink 285
grow 285
- templayer obstruct_m2_veryfine allm2,allpad,obsm2,m2fill,fillblock
+ templayer obstruct_m2_veryfine allm2,allpad,obsm2,m2fill,fillblock,fillblock4
grow 100
or met2fill_coarse,met2fill_medium,met2fill_fine
grow 200
@@ -1959,7 +1971,7 @@
#---------------------------------------------------
# MET3 fill
#---------------------------------------------------
- templayer obstruct_m3 allm3,allpad,obsm3,m3fill,fillblock
+ templayer obstruct_m3 allm3,allpad,obsm3,m3fill,fillblock,fillblock4
grow 3000
templayer met3fill_coarse topbox
slots 0 2000 300 0 2000 300 700 700
@@ -1968,7 +1980,7 @@
shrink 995
grow 995
- templayer obstruct_m3_medium allm3,allpad,obsm3,m3fill,fillblock
+ templayer obstruct_m3_medium allm3,allpad,obsm3,m3fill,fillblock,fillblock4
grow 2700
or met3fill_coarse
grow 300
@@ -1979,7 +1991,7 @@
shrink 495
grow 495
- templayer obstruct_m3_fine allm3,allpad,obsm3,m3fill,fillblock
+ templayer obstruct_m3_fine allm3,allpad,obsm3,m3fill,fillblock,fillblock4
grow 200
or met3fill_coarse,met3fill_medium
grow 300
@@ -1990,7 +2002,7 @@
shrink 285
grow 285
- templayer obstruct_m3_veryfine allm3,allpad,obsm3,m3fill,fillblock
+ templayer obstruct_m3_veryfine allm3,allpad,obsm3,m3fill,fillblock,fillblock4
# Note: Adding 0.1 to waffle rule to clear wide spacing rule
grow 100
or met3fill_coarse,met3fill_medium,met3fill_fine
@@ -2012,7 +2024,7 @@
#---------------------------------------------------
# MET4 fill
#---------------------------------------------------
- templayer obstruct_m4 allm4,allpad,obsm4,m4fill,fillblock
+ templayer obstruct_m4 allm4,allpad,obsm4,m4fill,fillblock,fillblock4
grow 3000
templayer met4fill_coarse topbox
slots 0 2000 300 0 2000 300 700 1050
@@ -2021,7 +2033,7 @@
shrink 995
grow 995
- templayer obstruct_m4_medium allm4,allpad,obsm4,m4fill,fillblock
+ templayer obstruct_m4_medium allm4,allpad,obsm4,m4fill,fillblock,fillblock4
grow 2700
or met4fill_coarse
grow 300
@@ -2031,7 +2043,7 @@
shrink 495
grow 495
- templayer obstruct_m4_fine allm4,allpad,obsm4,m4fill,fillblock
+ templayer obstruct_m4_fine allm4,allpad,obsm4,m4fill,fillblock,fillblock4
grow 200
or met4fill_coarse,met4fill_medium
grow 300
@@ -2042,7 +2054,7 @@
shrink 285
grow 285
- templayer obstruct_m4_veryfine allm4,allpad,obsm4,m4fill,fillblock
+ templayer obstruct_m4_veryfine allm4,allpad,obsm4,m4fill,fillblock,fillblock4
# Note: Adding 0.1 to waffle rule to clear wide spacing rule
grow 100
or met4fill_coarse,met4fill_medium,met4fill_fine
@@ -3061,6 +3073,12 @@
or mvpdicbase
labels CONT
+ layer fomfill FOMFILL
+ labels FOMFILL
+
+ layer polyfill POLYFILL
+ labels POLYFILL
+
layer coreli LI,LITXT,LIPIN
and-not LIRES,LISHORT
and COREID
@@ -5181,24 +5199,6 @@
calma FILLOBSM2 105 52
calma FILLOBSM3 107 24
calma FILLOBSM4 112 4
-
-style waffleimport
- # This style is for reading back and validating shapes
- # generated by the "wafflefill" cifoutput style.
-
- scalefactor 10 nanometers
- gridlimit 5
-
- options ignore-unknown-layer-labels no-reconnect-labels
-
- layer ndiff FOMFILL
- layer poly POLYFILL
- layer m1fill MET1FILL
- layer m2fill MET2FILL
- layer m3fill MET3FILL
- layer m4fill MET4FILL
- layer m5fill MET5FILL
-
calma FOMFILL 65 28
calma POLYFILL 66 28
calma MET1FILL 68 28
@@ -5282,7 +5282,7 @@
# DIFF
#-----------------------------
- width *ndiff,nfet,scnfet,npd,npass,*nsd,*ndiode,ndiffres,*pdiff,pfet,scpfet,scpfethvt,ppu,*psd,*pdiode,pdiffres \
+ width *ndiff,nfet,scnfet,npd,npass,*nsd,*ndiode,ndiffres,*pdiff,pfet,scpfet,scpfethvt,ppu,*psd,*pdiode,pdiffres,fomfill \
150 "Diffusion width < %d (diff/tap.1)"
width *mvndiff,mvnfet,mvnfetesd,mvnnfet,*mvndiode,*nndiode,mvndiffres,*mvpdiff,mvpfet,mvpfetesd,*mvpdiode,mvpdiffres 290 \
"MV Diffusion width < %d (diff/tap.14)"
@@ -5293,7 +5293,7 @@
extend *psd *ndiff 290 "Butting tap length < %d (diff/tap.4)"
extend *nsd *pdiff 290 "Butting tap length < %d (diff/tap.4)"
width mvpdiffres 150 "MV P-Diffusion resistor width < %d (diff/tap.14a)"
- spacing alldifflv,var,varhvt alldifflv,var,varhvt 270 touching_ok \
+ spacing alldifflv,var,varhvt,fomfill alldifflv,var,varhvt,fomfill 270 touching_ok \
"Diffusion spacing < %d (diff/tap.3)"
spacing alldiffmvnontap,mvvar alldiffmvnontap,mvvar 300 touching_ok \
"MV Diffusion spacing < %d (diff/tap.15a)"
@@ -5379,10 +5379,10 @@
# POLY
#-----------------------------
- width allpoly 150 "poly width < %d (poly.1a)"
- spacing allpoly allpoly 210 touching_ok "poly spacing < %d (poly.2)"
+ width allpoly,polyfill 150 "poly width < %d (poly.1a)"
+ spacing allpoly,polyfill allpoly,polyfill 210 touching_ok "poly spacing < %d (poly.2)"
- spacing allpolynonfet \
+ spacing allpolynonfet,polyfill \
*ndiff,*mvndiff,*ndiode,*nndiode,ndiffres,*ndiodelvt,*pdiff,*mvpdiff,*pdiode,pdiffres,*pdiodelvt,*pdiodehvt \
75 corner_ok allfets \
"poly spacing to Diffusion < %d (poly.4)"
@@ -5409,7 +5409,7 @@
spacing xhrpoly,uhrpoly,xpc allndiffmvnontap 830 touching_illegal \
"Distance from precision resistor to MV N+ diffusion < %d (rpm.3 + rpm.9)"
- angles allpoly 90 "Only 90 degree angles permitted on poly (x.2)"
+ angles allpoly,polyfill 90 "Only 90 degree angles permitted on poly (x.2)"
#--------------------------------------------------------------------
# HVTP
@@ -5607,7 +5607,7 @@
#-------------------------------------------------------------
width *m1,rm1 140 "Metal1 width < %d (met1.1)"
- spacing allm1 allm1,*obsm1 140 touching_ok "Metal1 spacing < %d (met1.2)"
+ spacing allm1,m1fill allm1,*obsm1,m1fill 140 touching_ok "Metal1 spacing < %d (met1.2)"
area allm1,*obsm1 83000 140 "Metal1 minimum area < %a (met1.6)"
surround lic/m1 *met1 30 absence_illegal \
@@ -5615,10 +5615,10 @@
surround lic/m1 *met1 60 directional \
"Metal1 overlap of local interconnect contact < %d in one direction (met1.5)"
- angles allm1 45 "Only 45 and 90 degree angles permitted on metal1 (x.3a)"
+ angles allm1,m1fill 45 "Only 45 and 90 degree angles permitted on metal1 (x.3a)"
variants (fast),(full)
- widespacing allm1 3005 allm1,*obsm1 280 touching_ok \
+ widespacing allm1 3005 allm1,*obsm1,m1fill 280 touching_ok \
"Metal1 > 3um spacing to unrelated m1 < %d (met1.3b)"
widespacing *obsm1 3005 allm1 280 touching_ok \
"Metal1 > 3um spacing to unrelated m1 < %d (met1.3b)"
@@ -5648,14 +5648,14 @@
# METAL2 -
#--------------------------------------------------
- width allm2 140 "Metal2 width < %d (met2.1)"
- spacing allm2 allm2,obsm2 140 touching_ok "Metal2 spacing < %d (met2.2)"
+ width allm2,m2fill 140 "Metal2 width < %d (met2.1)"
+ spacing allm2 allm2,obsm2,m2fill 140 touching_ok "Metal2 spacing < %d (met2.2)"
area allm2,obsm2 67600 140 "Metal2 minimum area < %a (met2.6)"
angles allm2 45 "Only 45 and 90 degree angles permitted on metal2 (x.3a)"
variants (fast),(full)
- widespacing allm2 3005 allm2,obsm2 280 touching_ok \
+ widespacing allm2 3005 allm2,obsm2,m2fill 280 touching_ok \
"Metal2 > 3um spacing to unrelated m2 < %d (met2.3b)"
widespacing obsm2 3005 allm2 280 touching_ok \
"Metal2 > 3um spacing to unrelated m2 < %d (met2.3b)"
@@ -5686,14 +5686,14 @@
# METAL3 -
#--------------------------------------------------
- width allm3 300 "Metal3 width < %d (met3.1)"
- spacing allm3 allm3,obsm3 300 touching_ok "Metal3 spacing < %d (met3.2)"
+ width allm3,m3fill 300 "Metal3 width < %d (met3.1)"
+ spacing allm3 allm3,obsm3,m3fill 300 touching_ok "Metal3 spacing < %d (met3.2)"
area allm3,obsm3 240000 300 "Metal3 minimum area < %a (met3.6)"
angles allm3 45 "Only 45 and 90 degree angles permitted on metal3 (x.3a)"
variants (fast),(full)
- widespacing allm3 3005 allm3,obsm3 400 touching_ok \
+ widespacing allm3,m3fill 3005 allm3,obsm3 400 touching_ok \
"Metal3 > 3um spacing to unrelated m3 < %d (met3.3d)"
widespacing obsm3 3005 allm3 400 touching_ok \
"Metal3 > 3um spacing to unrelated m3 < %d (met3.3d)"
@@ -5724,14 +5724,14 @@
variants *
- width allm4 300 "Metal4 width < %d (met4.1)"
- spacing allm4 allm4,obsm4 300 touching_ok "Metal4 spacing < %d (met4.2)"
+ width allm4,m4fill 300 "Metal4 width < %d (met4.1)"
+ spacing allm4 allm4,obsm4,m4fill 300 touching_ok "Metal4 spacing < %d (met4.2)"
area allm4,obsm4 240000 300 "Metal4 minimum area < %a (met4.4a)"
angles allm4 45 "Only 45 and 90 degree angles permitted on metal4 (x.3a)"
variants (fast),(full)
- widespacing allm4 3005 allm4,obsm4 400 touching_ok \
+ widespacing allm4,m4fill 3005 allm4,obsm4 400 touching_ok \
"Metal4 > 3um spacing to unrelated m4 < %d (met4.5b)"
widespacing obsm4 3005 allm4 400 touching_ok \
"Metal4 > 3um spacing to unrelated m4 < %d (met4.5b)"
@@ -5755,8 +5755,8 @@
# METAL5 - METAL5 Module
#-----------------------------
- width allm5 1600 "Metal5 width < %d (met5.1)"
- spacing allm5 allm5,obsm5 1600 touching_ok "Metal5 spacing < %d (met5.2)"
+ width allm5,m5fill 1600 "Metal5 width < %d (met5.1)"
+ spacing allm5 allm5,obsm5,m5fill 1600 touching_ok "Metal5 spacing < %d (met5.2)"
area allm5,obsm5 4000000 1600 "Metal5 minimum area < %a (met5.4)"
angles allm5 45 "Only 45 and 90 degree angles permitted on metal5 (x.3a)"
@@ -5793,9 +5793,9 @@
# Except: Note that standard cells allow transistor width minimum 0.36um
width pfetlvt 350 "LVT PMOS gate length < %d (poly.1b)"
- spacing allpolynonfet *nsd 55 corner_ok varactor \
+ spacing allpolynonfet,polyfill *nsd 55 corner_ok varactor \
"poly spacing to diffusion tap < %d (poly.5)"
- spacing allpolynonfet *mvnsd 55 corner_ok mvvaractor \
+ spacing allpolynonfet,polyfill *mvnsd 55 corner_ok mvvaractor \
"poly spacing to diffusion tap < %d (poly.5)"
edge4way *psd *ndiff 300 ~(nfet,npass,npd,scnfet,nfetlvt,nsonos)/a *psd 300 \
@@ -6093,21 +6093,28 @@
height dnwell -0.1 0.1
height nwell,pwell 0.0 0.2062
height alldiff 0.2062 0.12
+ height fomfill 0.2062 0.12
height allpoly 0.3262 0.18
+ height polyfill 0.3262 0.18
height alldiffcont 0.3262 0.61
height pc 0.5062 0.43
height allli 0.9361 0.10
height lic 1.0361 0.34
height allm1 1.3761 0.36
+ height m1fill 1.3761 0.36
height v1 1.7361 0.27
height allm2 2.0061 0.36
+ height m2fill 1.3761 0.36
height v2 2.3661 0.42
height allm3 2.7861 0.845
+ height m3fill 1.3761 0.36
#ifdef METAL5
height v3 3.6311 0.39
height allm4 4.0211 0.845
+ height m4fill 1.3761 0.36
height v4 4.8661 0.505
height allm5 5.3711 1.26
+ height m5fill 1.3761 0.36
height mimcap 2.4661 0.2
height mimcap2 3.7311 0.2
height mimcc 2.6661 0.12
@@ -6679,6 +6686,14 @@
style pnm
default
draw fillblock no_color_at_all
+ draw fillblock4 no_color_at_all
+ draw fomfill no_color_at_all
+ draw polyfill no_color_at_all
+ draw m1fill no_color_at_all
+ draw m2fill no_color_at_all
+ draw m3fill no_color_at_all
+ draw m4fill no_color_at_all
+ draw m5fill no_color_at_all
draw nwell cwell
end
