040000 tree 5b3ee4cf4258303f67cfaf09cfd1a578b03e1be0	sky130_fd_io
040000 tree 4c539a589120ebb927fa252ce6f2ca511681baa4	sky130_fd_pr
040000 tree 21df36b4a0a40370dedd428ccc0aaf5f415e28fa	sky130_fd_sc_hd
040000 tree d9aa5fe24c8828c7367dffef817f0f08ec8a2360	sky130_fd_sc_hvl
040000 tree ca076f97178c1944e406ca5ba5e97dc9d90a2211	sky130_ml_xx_hd