| # Copyright 2020 The SkyWater PDK Authors |
| # |
| # Licensed under the Apache License, Version 2.0 (the "License"); |
| # you may not use this file except in compliance with the License. |
| # You may obtain a copy of the License at |
| # |
| # https://www.apache.org/licenses/LICENSE-2.0 |
| # |
| # Unless required by applicable law or agreed to in writing, software |
| # distributed under the License is distributed on an "AS IS" BASIS, |
| # WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied. |
| # See the License for the specific language governing permissions and |
| # limitations under the License. |
| # |
| # SPDX-License-Identifier: Apache-2.0 |
| |
| VERSION 5.7 ; |
| |
| BUSBITCHARS "[]" ; |
| DIVIDERCHAR "/" ; |
| |
| UNITS |
| TIME NANOSECONDS 1 ; |
| CAPACITANCE PICOFARADS 1 ; |
| RESISTANCE OHMS 1 ; |
| DATABASE MICRONS 1000 ; |
| END UNITS |
| |
| MANUFACTURINGGRID 0.005 ; |
| |
| SITE 18T |
| SYMMETRY X Y ; |
| CLASS CORE ; |
| SIZE 0.11 BY 6.66 ; |
| END 18T |
| |
| LAYER diff |
| TYPE MASTERSLICE ; |
| END diff |
| |
| LAYER poly |
| TYPE MASTERSLICE ; |
| END poly |
| |
| # NOTE: |
| # The use of li1 as a routing layer is commented |
| # out and replaced with a definition of li1 as a |
| # non-routing layer. This is done to ensure good |
| # results regardless of tool used. |
| # |
| # If li1 is enabled as a routing layer take note |
| # of its resistance compared to that of metal1. |
| |
| #LAYER licon1 |
| # TYPE CUT ; |
| #END licon1 |
| |
| LAYER li1 |
| TYPE MASTERSLICE ; |
| END li1 |
| |
| #LAYER li1 |
| # TYPE ROUTING ; |
| # DIRECTION VERTICAL ; |
| |
| # PITCH 0.48 ; |
| # MINWIDTH 0.17 ; |
| |
| # WIDTH 0.17 ; # LI 1 |
| # SPACING 0.17 ; # LI 2 |
| # SPACINGTABLE |
| # PARALLELRUNLENGTH 0 |
| # WIDTH 0 0.17 ; |
| # AREA 0.0561 ; # LI 6 |
| # THICKNESS 0.1 ; |
| # EDGECAPACITANCE 40.697E-6 ; |
| # CAPACITANCE CPERSQDIST 36.9866E-6 ; |
| # RESISTANCE RPERSQ 12.2 ; |
| |
| # ANTENNADIFFSIDEAREARATIO PWL ( ( 0 75 ) ( 0.0125 75 ) ( 0.0225 85.125 ) ( 22.5 10200 ) ) ; |
| #END li1 |
| |
| LAYER mcon |
| TYPE CUT ; |
| END mcon |
| |
| LAYER met1 |
| TYPE ROUTING ; |
| DIRECTION HORIZONTAL ; |
| |
| PITCH 0.37 ; |
| MINENCLOSEDAREA 0.14 ; |
| MINWIDTH 0.14 ; |
| |
| WIDTH 0.14 ; # Met1 1 |
| # SPACING 0.14 ; # Met1 2 |
| # SPACING 0.28 RANGE 3.001 100 ; # Met1 3b |
| SPACINGTABLE |
| PARALLELRUNLENGTH 0 |
| WIDTH 0 0.14 |
| WIDTH 3 0.28 ; |
| AREA 0.083 ; # Met1 6 |
| THICKNESS 0.35 ; |
| |
| ANTENNADIFFSIDEAREARATIO PWL ( ( 0 400 ) ( 0.0125 400 ) ( 0.0225 2609 ) ( 22.5 11600 ) ) ; |
| |
| EDGECAPACITANCE 40.567E-6 ; |
| CAPACITANCE CPERSQDIST 25.7784E-6 ; |
| DCCURRENTDENSITY AVERAGE 2.8 ; # mA/um Iavg_max at Tj = 90oC |
| ACCURRENTDENSITY RMS 6.1 ; # mA/um Irms_max at Tj = 90oC |
| |
| RESISTANCE RPERSQ 0.125 ; |
| END met1 |
| |
| LAYER via |
| TYPE CUT ; |
| WIDTH 0.15 ; # Via 1a |
| SPACING 0.17 ; # Via 2 |
| ENCLOSURE BELOW 0.055 0.085 ; # Via 4a / Via 5a |
| ENCLOSURE ABOVE 0.055 0.085 ; # Met2 4 / Met2 5 |
| |
| ANTENNADIFFAREARATIO PWL ( ( 0 6 ) ( 0.0125 6 ) ( 0.0225 6.81 ) ( 22.5 816 ) ) ; |
| DCCURRENTDENSITY AVERAGE 0.29 ; # mA per via Iavg_max at Tj = 90oC |
| END via |
| |
| LAYER met2 |
| TYPE ROUTING ; |
| DIRECTION VERTICAL ; |
| |
| PITCH 0.48 ; |
| MINENCLOSEDAREA 0.14 ; |
| MINWIDTH 0.14 ; |
| |
| WIDTH 0.14 ; # Met2 1 |
| # SPACING 0.14 ; # Met2 2 |
| # SPACING 0.28 RANGE 3.001 100 ; # Met2 3b |
| SPACINGTABLE |
| PARALLELRUNLENGTH 0 |
| WIDTH 0 0.14 |
| WIDTH 3 0.28 ; |
| AREA 0.0676 ; # Met2 6 |
| THICKNESS 0.35 ; |
| |
| EDGECAPACITANCE 37.759E-6 ; |
| CAPACITANCE CPERSQDIST 16.9423E-6 ; |
| RESISTANCE RPERSQ 0.125 ; |
| DCCURRENTDENSITY AVERAGE 2.8 ; # mA/um Iavg_max at Tj = 90oC |
| ACCURRENTDENSITY RMS 6.1 ; # mA/um Irms_max at Tj = 90oC |
| ANTENNADIFFSIDEAREARATIO PWL ( ( 0 400 ) ( 0.0125 400 ) ( 0.0225 2609 ) ( 22.5 11600 ) ) ; |
| END met2 |
| |
| # ******** Layer via2, type routing, number 44 ************** |
| LAYER via2 |
| TYPE CUT ; |
| WIDTH 0.2 ; # Via2 1 |
| SPACING 0.2 ; # Via2 2 |
| ENCLOSURE BELOW 0.04 0.085 ; # Via2 4 |
| ENCLOSURE ABOVE 0.065 0.065 ; # Met3 4 |
| ANTENNADIFFAREARATIO PWL ( ( 0 6 ) ( 0.0125 6 ) ( 0.0225 6.81 ) ( 22.5 816 ) ) ; |
| DCCURRENTDENSITY AVERAGE 0.48 ; # mA per via Iavg_max at Tj = 90oC |
| END via2 |
| |
| LAYER met3 |
| TYPE ROUTING ; |
| DIRECTION HORIZONTAL ; |
| |
| PITCH 0.74 ; |
| MINWIDTH 0.3 ; |
| |
| WIDTH 0.3 ; # Met3 1 |
| # SPACING 0.3 ; # Met3 2 |
| SPACINGTABLE |
| PARALLELRUNLENGTH 0 |
| WIDTH 0 0.3 |
| WIDTH 3 0.4 ; |
| AREA 0.24 ; # Met3 6 |
| THICKNESS 0.8 ; |
| |
| EDGECAPACITANCE 40.989E-6 ; |
| CAPACITANCE CPERSQDIST 12.3729E-6 ; |
| RESISTANCE RPERSQ 0.047 ; |
| DCCURRENTDENSITY AVERAGE 6.8 ; # mA/um Iavg_max at Tj = 90oC |
| ACCURRENTDENSITY RMS 14.9 ; # mA/um Irms_max at Tj = 90oC |
| |
| ANTENNADIFFSIDEAREARATIO PWL ( ( 0 400 ) ( 0.0125 400 ) ( 0.0225 2609 ) ( 22.5 11600 ) ) ; |
| END met3 |
| |
| LAYER via3 |
| TYPE CUT ; |
| WIDTH 0.2 ; # Via3 1 |
| SPACING 0.2 ; # Via3 2 |
| ENCLOSURE BELOW 0.06 0.09 ; # Via3 4 / Via3 5 |
| ENCLOSURE ABOVE 0.065 0.065 ; # Met4 3 |
| ANTENNADIFFAREARATIO PWL ( ( 0 6 ) ( 0.0125 6 ) ( 0.0225 6.81 ) ( 22.5 816 ) ) ; |
| DCCURRENTDENSITY AVERAGE 0.48 ; # mA per via Iavg_max at Tj = 90oC |
| END via3 |
| |
| LAYER met4 |
| TYPE ROUTING ; |
| DIRECTION VERTICAL ; |
| |
| PITCH 0.96 ; |
| MINWIDTH 0.3 ; |
| |
| WIDTH 0.3 ; # Met4 1 |
| # SPACING 0.3 ; # Met4 2 |
| SPACINGTABLE |
| PARALLELRUNLENGTH 0 |
| WIDTH 0 0.3 |
| WIDTH 3 0.4 ; |
| AREA 0.24 ; # Met4 4a |
| |
| THICKNESS 0.8 ; |
| |
| EDGECAPACITANCE 36.676E-6 ; |
| CAPACITANCE CPERSQDIST 8.41537E-6 ; |
| RESISTANCE RPERSQ 0.047 ; |
| DCCURRENTDENSITY AVERAGE 6.8 ; # mA/um Iavg_max at Tj = 90oC |
| ACCURRENTDENSITY RMS 14.9 ; # mA/um Irms_max at Tj = 90oC |
| |
| ANTENNADIFFSIDEAREARATIO PWL ( ( 0 400 ) ( 0.0125 400 ) ( 0.0225 2609 ) ( 22.5 11600 ) ) ; |
| END met4 |
| |
| LAYER via4 |
| TYPE CUT ; |
| |
| WIDTH 0.8 ; # Via4 1 |
| SPACING 0.8 ; # Via4 2 |
| ENCLOSURE BELOW 0.19 0.19 ; # Via4 4 |
| ENCLOSURE ABOVE 0.31 0.31 ; # Met5 3 |
| ANTENNADIFFAREARATIO PWL ( ( 0 6 ) ( 0.0125 6 ) ( 0.0225 6.81 ) ( 22.5 816 ) ) ; |
| DCCURRENTDENSITY AVERAGE 2.49 ; # mA per via Iavg_max at Tj = 90oC |
| END via4 |
| |
| LAYER met5 |
| TYPE ROUTING ; |
| DIRECTION HORIZONTAL ; |
| |
| PITCH 3.33 ; |
| MINWIDTH 1.6 ; |
| |
| WIDTH 1.6 ; # Met5 1 |
| #SPACING 1.6 ; # Met5 2 |
| SPACINGTABLE |
| PARALLELRUNLENGTH 0 |
| WIDTH 0 1.6 ; |
| AREA 4 ; # Met5 4 |
| |
| THICKNESS 1.2 ; |
| |
| EDGECAPACITANCE 38.851E-6 ; |
| CAPACITANCE CPERSQDIST 6.32063E-6 ; |
| RESISTANCE RPERSQ 0.0285 ; |
| DCCURRENTDENSITY AVERAGE 10.17 ; # mA/um Iavg_max at Tj = 90oC |
| ACCURRENTDENSITY RMS 22.34 ; # mA/um Irms_max at Tj = 90oC |
| |
| ANTENNADIFFSIDEAREARATIO PWL ( ( 0 400 ) ( 0.0125 400 ) ( 0.0225 2609 ) ( 22.5 11600 ) ) ; |
| END met5 |
| |
| |
| ### Routing via cells section ### |
| # Plus via rule, metals are along the prefered direction |
| VIA L1M1_PR DEFAULT |
| LAYER mcon ; |
| RECT -0.085 -0.085 0.085 0.085 ; |
| LAYER li1 ; |
| RECT -0.085 -0.085 0.085 0.085 ; |
| LAYER met1 ; |
| RECT -0.145 -0.115 0.145 0.115 ; |
| END L1M1_PR |
| |
| VIARULE L1M1_PR GENERATE |
| LAYER li1 ; |
| ENCLOSURE 0 0 ; |
| LAYER met1 ; |
| ENCLOSURE 0.06 0.03 ; |
| LAYER mcon ; |
| RECT -0.085 -0.085 0.085 0.085 ; |
| SPACING 0.36 BY 0.36 ; |
| END L1M1_PR |
| |
| # Plus via rule, metals are along the non prefered direction |
| VIA L1M1_PR_R DEFAULT |
| LAYER mcon ; |
| RECT -0.085 -0.085 0.085 0.085 ; |
| LAYER li1 ; |
| RECT -0.085 -0.085 0.085 0.085 ; |
| LAYER met1 ; |
| RECT -0.115 -0.145 0.115 0.145 ; |
| END L1M1_PR_R |
| |
| VIARULE L1M1_PR_R GENERATE |
| LAYER li1 ; |
| ENCLOSURE 0 0 ; |
| LAYER met1 ; |
| ENCLOSURE 0.03 0.06 ; |
| LAYER mcon ; |
| RECT -0.085 -0.085 0.085 0.085 ; |
| SPACING 0.36 BY 0.36 ; |
| END L1M1_PR_R |
| |
| # Minus via rule, lower layer metal is along prefered direction |
| VIA L1M1_PR_M DEFAULT |
| LAYER mcon ; |
| RECT -0.085 -0.085 0.085 0.085 ; |
| LAYER li1 ; |
| RECT -0.085 -0.085 0.085 0.085 ; |
| LAYER met1 ; |
| RECT -0.115 -0.145 0.115 0.145 ; |
| END L1M1_PR_M |
| |
| VIARULE L1M1_PR_M GENERATE |
| LAYER li1 ; |
| ENCLOSURE 0 0 ; |
| LAYER met1 ; |
| ENCLOSURE 0.03 0.06 ; |
| LAYER mcon ; |
| RECT -0.085 -0.085 0.085 0.085 ; |
| SPACING 0.36 BY 0.36 ; |
| END L1M1_PR_M |
| |
| # Minus via rule, upper layer metal is along prefered direction |
| VIA L1M1_PR_MR DEFAULT |
| LAYER mcon ; |
| RECT -0.085 -0.085 0.085 0.085 ; |
| LAYER li1 ; |
| RECT -0.085 -0.085 0.085 0.085 ; |
| LAYER met1 ; |
| RECT -0.145 -0.115 0.145 0.115 ; |
| END L1M1_PR_MR |
| |
| VIARULE L1M1_PR_MR GENERATE |
| LAYER li1 ; |
| ENCLOSURE 0 0 ; |
| LAYER met1 ; |
| ENCLOSURE 0.06 0.03 ; |
| LAYER mcon ; |
| RECT -0.085 -0.085 0.085 0.085 ; |
| SPACING 0.36 BY 0.36 ; |
| END L1M1_PR_MR |
| |
| # Centered via rule, we really do not want to use it |
| VIA L1M1_PR_C DEFAULT |
| LAYER mcon ; |
| RECT -0.085 -0.085 0.085 0.085 ; |
| LAYER li1 ; |
| RECT -0.085 -0.085 0.085 0.085 ; |
| LAYER met1 ; |
| RECT -0.145 -0.145 0.145 0.145 ; |
| END L1M1_PR_C |
| |
| VIARULE L1M1_PR_C GENERATE |
| LAYER li1 ; |
| ENCLOSURE 0 0 ; |
| LAYER met1 ; |
| ENCLOSURE 0.06 0.06 ; |
| LAYER mcon ; |
| RECT -0.085 -0.085 0.085 0.085 ; |
| SPACING 0.36 BY 0.36 ; |
| END L1M1_PR_C |
| |
| # Plus via rule, metals are along the prefered direction |
| VIA M1M2_PR DEFAULT |
| LAYER via ; |
| RECT -0.075 -0.075 0.075 0.075 ; |
| LAYER met1 ; |
| RECT -0.16 -0.13 0.16 0.13 ; |
| LAYER met2 ; |
| RECT -0.13 -0.16 0.13 0.16 ; |
| END M1M2_PR |
| |
| VIARULE M1M2_PR GENERATE |
| LAYER met1 ; |
| ENCLOSURE 0.085 0.055 ; |
| LAYER met2 ; |
| ENCLOSURE 0.055 0.085 ; |
| LAYER via ; |
| RECT -0.075 -0.075 0.075 0.075 ; |
| SPACING 0.32 BY 0.32 ; |
| END M1M2_PR |
| |
| # Plus via rule, metals are along the non prefered direction |
| VIA M1M2_PR_R DEFAULT |
| LAYER via ; |
| RECT -0.075 -0.075 0.075 0.075 ; |
| LAYER met1 ; |
| RECT -0.13 -0.16 0.13 0.16 ; |
| LAYER met2 ; |
| RECT -0.16 -0.13 0.16 0.13 ; |
| END M1M2_PR_R |
| |
| VIARULE M1M2_PR_R GENERATE |
| LAYER met1 ; |
| ENCLOSURE 0.055 0.085 ; |
| LAYER met2 ; |
| ENCLOSURE 0.085 0.055 ; |
| LAYER via ; |
| RECT -0.075 -0.075 0.075 0.075 ; |
| SPACING 0.32 BY 0.32 ; |
| END M1M2_PR_R |
| |
| # Minus via rule, lower layer metal is along prefered direction |
| VIA M1M2_PR_M DEFAULT |
| LAYER via ; |
| RECT -0.075 -0.075 0.075 0.075 ; |
| LAYER met1 ; |
| RECT -0.16 -0.13 0.16 0.13 ; |
| LAYER met2 ; |
| RECT -0.16 -0.13 0.16 0.13 ; |
| END M1M2_PR_M |
| |
| VIARULE M1M2_PR_M GENERATE |
| LAYER met1 ; |
| ENCLOSURE 0.085 0.055 ; |
| LAYER met2 ; |
| ENCLOSURE 0.085 0.055 ; |
| LAYER via ; |
| RECT -0.075 -0.075 0.075 0.075 ; |
| SPACING 0.32 BY 0.32 ; |
| END M1M2_PR_M |
| |
| # Minus via rule, upper layer metal is along prefered direction |
| VIA M1M2_PR_MR DEFAULT |
| LAYER via ; |
| RECT -0.075 -0.075 0.075 0.075 ; |
| LAYER met1 ; |
| RECT -0.13 -0.16 0.13 0.16 ; |
| LAYER met2 ; |
| RECT -0.13 -0.16 0.13 0.16 ; |
| END M1M2_PR_MR |
| |
| VIARULE M1M2_PR_MR GENERATE |
| LAYER met1 ; |
| ENCLOSURE 0.055 0.085 ; |
| LAYER met2 ; |
| ENCLOSURE 0.055 0.085 ; |
| LAYER via ; |
| RECT -0.075 -0.075 0.075 0.075 ; |
| SPACING 0.32 BY 0.32 ; |
| END M1M2_PR_MR |
| |
| # Centered via rule, we really do not want to use it |
| VIA M1M2_PR_C DEFAULT |
| LAYER via ; |
| RECT -0.075 -0.075 0.075 0.075 ; |
| LAYER met1 ; |
| RECT -0.16 -0.16 0.16 0.16 ; |
| LAYER met2 ; |
| RECT -0.16 -0.16 0.16 0.16 ; |
| END M1M2_PR_C |
| |
| VIARULE M1M2_PR_C GENERATE |
| LAYER met1 ; |
| ENCLOSURE 0.085 0.085 ; |
| LAYER met2 ; |
| ENCLOSURE 0.085 0.085 ; |
| LAYER via ; |
| RECT -0.075 -0.075 0.075 0.075 ; |
| SPACING 0.32 BY 0.32 ; |
| END M1M2_PR_C |
| |
| # Plus via rule, metals are along the prefered direction |
| VIA M2M3_PR DEFAULT |
| LAYER via2 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| LAYER met2 ; |
| RECT -0.14 -0.185 0.14 0.185 ; |
| LAYER met3 ; |
| RECT -0.165 -0.165 0.165 0.165 ; |
| END M2M3_PR |
| |
| VIARULE M2M3_PR GENERATE |
| LAYER met2 ; |
| ENCLOSURE 0.04 0.085 ; |
| LAYER met3 ; |
| ENCLOSURE 0.065 0.065 ; |
| LAYER via2 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| SPACING 0.4 BY 0.4 ; |
| END M2M3_PR |
| |
| # Plus via rule, metals are along the non prefered direction |
| VIA M2M3_PR_R DEFAULT |
| LAYER via2 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| LAYER met2 ; |
| RECT -0.185 -0.14 0.185 0.14 ; |
| LAYER met3 ; |
| RECT -0.165 -0.165 0.165 0.165 ; |
| END M2M3_PR_R |
| |
| VIARULE M2M3_PR_R GENERATE |
| LAYER met2 ; |
| ENCLOSURE 0.085 0.04 ; |
| LAYER met3 ; |
| ENCLOSURE 0.065 0.065 ; |
| LAYER via2 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| SPACING 0.4 BY 0.4 ; |
| END M2M3_PR_R |
| |
| # Minus via rule, lower layer metal is along prefered direction |
| VIA M2M3_PR_M DEFAULT |
| LAYER via2 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| LAYER met2 ; |
| RECT -0.14 -0.185 0.14 0.185 ; |
| LAYER met3 ; |
| RECT -0.165 -0.165 0.165 0.165 ; |
| END M2M3_PR_M |
| |
| VIARULE M2M3_PR_M GENERATE |
| LAYER met2 ; |
| ENCLOSURE 0.04 0.085 ; |
| LAYER met3 ; |
| ENCLOSURE 0.065 0.065 ; |
| LAYER via2 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| SPACING 0.4 BY 0.4 ; |
| END M2M3_PR_M |
| |
| # Minus via rule, upper layer metal is along prefered direction |
| VIA M2M3_PR_MR DEFAULT |
| LAYER via2 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| LAYER met2 ; |
| RECT -0.185 -0.14 0.185 0.14 ; |
| LAYER met3 ; |
| RECT -0.165 -0.165 0.165 0.165 ; |
| END M2M3_PR_MR |
| |
| VIARULE M2M3_PR_MR GENERATE |
| LAYER met2 ; |
| ENCLOSURE 0.085 0.04 ; |
| LAYER met3 ; |
| ENCLOSURE 0.065 0.065 ; |
| LAYER via2 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| SPACING 0.4 BY 0.4 ; |
| END M2M3_PR_MR |
| |
| # Centered via rule, we really do not want to use it |
| VIA M2M3_PR_C DEFAULT |
| LAYER via2 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| LAYER met2 ; |
| RECT -0.185 -0.185 0.185 0.185 ; |
| LAYER met3 ; |
| RECT -0.165 -0.165 0.165 0.165 ; |
| END M2M3_PR_C |
| |
| VIARULE M2M3_PR_C GENERATE |
| LAYER met2 ; |
| ENCLOSURE 0.085 0.085 ; |
| LAYER met3 ; |
| ENCLOSURE 0.065 0.065 ; |
| LAYER via2 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| SPACING 0.4 BY 0.4 ; |
| END M2M3_PR_C |
| |
| # Plus via rule, metals are along the prefered direction |
| VIA M3M4_PR DEFAULT |
| LAYER via3 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| LAYER met3 ; |
| RECT -0.19 -0.16 0.19 0.16 ; |
| LAYER met4 ; |
| RECT -0.165 -0.165 0.165 0.165 ; |
| END M3M4_PR |
| |
| VIARULE M3M4_PR GENERATE |
| LAYER met3 ; |
| ENCLOSURE 0.09 0.06 ; |
| LAYER met4 ; |
| ENCLOSURE 0.065 0.065 ; |
| LAYER via3 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| SPACING 0.4 BY 0.4 ; |
| END M3M4_PR |
| |
| # Plus via rule, metals are along the non prefered direction |
| VIA M3M4_PR_R DEFAULT |
| LAYER via3 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| LAYER met3 ; |
| RECT -0.16 -0.19 0.16 0.19 ; |
| LAYER met4 ; |
| RECT -0.165 -0.165 0.165 0.165 ; |
| END M3M4_PR_R |
| |
| VIARULE M3M4_PR_R GENERATE |
| LAYER met3 ; |
| ENCLOSURE 0.06 0.09 ; |
| LAYER met4 ; |
| ENCLOSURE 0.065 0.065 ; |
| LAYER via3 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| SPACING 0.4 BY 0.4 ; |
| END M3M4_PR_R |
| |
| # Minus via rule, lower layer metal is along prefered direction |
| VIA M3M4_PR_M DEFAULT |
| LAYER via3 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| LAYER met3 ; |
| RECT -0.19 -0.16 0.19 0.16 ; |
| LAYER met4 ; |
| RECT -0.165 -0.165 0.165 0.165 ; |
| END M3M4_PR_M |
| |
| VIARULE M3M4_PR_M GENERATE |
| LAYER met3 ; |
| ENCLOSURE 0.09 0.06 ; |
| LAYER met4 ; |
| ENCLOSURE 0.065 0.065 ; |
| LAYER via3 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| SPACING 0.4 BY 0.4 ; |
| END M3M4_PR_M |
| |
| # Minus via rule, upper layer metal is along prefered direction |
| VIA M3M4_PR_MR DEFAULT |
| LAYER via3 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| LAYER met3 ; |
| RECT -0.16 -0.19 0.16 0.19 ; |
| LAYER met4 ; |
| RECT -0.165 -0.165 0.165 0.165 ; |
| END M3M4_PR_MR |
| |
| VIARULE M3M4_PR_MR GENERATE |
| LAYER met3 ; |
| ENCLOSURE 0.06 0.09 ; |
| LAYER met4 ; |
| ENCLOSURE 0.065 0.065 ; |
| LAYER via3 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| SPACING 0.4 BY 0.4 ; |
| END M3M4_PR_MR |
| |
| # Centered via rule, we really do not want to use it |
| VIA M3M4_PR_C DEFAULT |
| LAYER via3 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| LAYER met3 ; |
| RECT -0.19 -0.19 0.19 0.19 ; |
| LAYER met4 ; |
| RECT -0.165 -0.165 0.165 0.165 ; |
| END M3M4_PR_C |
| |
| VIARULE M3M4_PR_C GENERATE |
| LAYER met3 ; |
| ENCLOSURE 0.09 0.09 ; |
| LAYER met4 ; |
| ENCLOSURE 0.065 0.065 ; |
| LAYER via3 ; |
| RECT -0.1 -0.1 0.1 0.1 ; |
| SPACING 0.4 BY 0.4 ; |
| END M3M4_PR_C |
| |
| # Plus via rule, metals are along the prefered direction |
| VIA M4M5_PR DEFAULT |
| LAYER via4 ; |
| RECT -0.4 -0.4 0.4 0.4 ; |
| LAYER met4 ; |
| RECT -0.59 -0.59 0.59 0.59 ; |
| LAYER met5 ; |
| RECT -0.71 -0.71 0.71 0.71 ; |
| END M4M5_PR |
| |
| VIARULE M4M5_PR GENERATE |
| LAYER met4 ; |
| ENCLOSURE 0.19 0.19 ; |
| LAYER met5 ; |
| ENCLOSURE 0.31 0.31 ; |
| LAYER via4 ; |
| RECT -0.4 -0.4 0.4 0.4 ; |
| SPACING 1.6 BY 1.6 ; |
| END M4M5_PR |
| |
| # Plus via rule, metals are along the non prefered direction |
| VIA M4M5_PR_R DEFAULT |
| LAYER via4 ; |
| RECT -0.4 -0.4 0.4 0.4 ; |
| LAYER met4 ; |
| RECT -0.59 -0.59 0.59 0.59 ; |
| LAYER met5 ; |
| RECT -0.71 -0.71 0.71 0.71 ; |
| END M4M5_PR_R |
| |
| VIARULE M4M5_PR_R GENERATE |
| LAYER met4 ; |
| ENCLOSURE 0.19 0.19 ; |
| LAYER met5 ; |
| ENCLOSURE 0.31 0.31 ; |
| LAYER via4 ; |
| RECT -0.4 -0.4 0.4 0.4 ; |
| SPACING 1.6 BY 1.6 ; |
| END M4M5_PR_R |
| |
| # Minus via rule, lower layer metal is along prefered direction |
| VIA M4M5_PR_M DEFAULT |
| LAYER via4 ; |
| RECT -0.4 -0.4 0.4 0.4 ; |
| LAYER met4 ; |
| RECT -0.59 -0.59 0.59 0.59 ; |
| LAYER met5 ; |
| RECT -0.71 -0.71 0.71 0.71 ; |
| END M4M5_PR_M |
| |
| VIARULE M4M5_PR_M GENERATE |
| LAYER met4 ; |
| ENCLOSURE 0.19 0.19 ; |
| LAYER met5 ; |
| ENCLOSURE 0.31 0.31 ; |
| LAYER via4 ; |
| RECT -0.4 -0.4 0.4 0.4 ; |
| SPACING 1.6 BY 1.6 ; |
| END M4M5_PR_M |
| |
| # Minus via rule, upper layer metal is along prefered direction |
| VIA M4M5_PR_MR DEFAULT |
| LAYER via4 ; |
| RECT -0.4 -0.4 0.4 0.4 ; |
| LAYER met4 ; |
| RECT -0.59 -0.59 0.59 0.59 ; |
| LAYER met5 ; |
| RECT -0.71 -0.71 0.71 0.71 ; |
| END M4M5_PR_MR |
| |
| VIARULE M4M5_PR_MR GENERATE |
| LAYER met4 ; |
| ENCLOSURE 0.19 0.19 ; |
| LAYER met5 ; |
| ENCLOSURE 0.31 0.31 ; |
| LAYER via4 ; |
| RECT -0.4 -0.4 0.4 0.4 ; |
| SPACING 1.6 BY 1.6 ; |
| END M4M5_PR_MR |
| |
| # Centered via rule, we really do not want to use it |
| VIA M4M5_PR_C DEFAULT |
| LAYER via4 ; |
| RECT -0.4 -0.4 0.4 0.4 ; |
| LAYER met4 ; |
| RECT -0.59 -0.59 0.59 0.59 ; |
| LAYER met5 ; |
| RECT -0.71 -0.71 0.71 0.71 ; |
| END M4M5_PR_C |
| |
| VIARULE M4M5_PR_C GENERATE |
| LAYER met4 ; |
| ENCLOSURE 0.19 0.19 ; |
| LAYER met5 ; |
| ENCLOSURE 0.31 0.31 ; |
| LAYER via4 ; |
| RECT -0.4 -0.4 0.4 0.4 ; |
| SPACING 1.6 BY 1.6 ; |
| END M4M5_PR_C |
| ### end of single via cells ### |
| |
| END LIBRARY |