blob: d281c20da194a7b754f6c5a5ac4a5cd6145ae1bc [file] [log] [blame]
* File: sky130_osu_sc_15T_hs__xnor2_l.pex.spice
* Created: Thu Oct 29 17:45:38 2020
* Program "Calibre xRC"
* Version "v2020.2_35.23"
* Nominal Temperature: 27C
* Circuit Temperature: 27C
*
.subckt PM_SKY130_OSU_SC_15T_HS__XNOR2_L%GND 1 2 23 27 29 39 43 49 51
r70 49 51 0.950071 $w=3.05e-07 $l=2.04e-06 $layer=MET1_cond $X=0.34 $Y=0.152
+ $X2=2.38 $Y2=0.152
r71 43 44 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=0.605 $Y=0.152
+ $X2=0.69 $Y2=0.152
r72 37 39 28.3797 $w=1.68e-07 $l=4.35e-07 $layer=LI1_cond $X=2.44 $Y=0.305
+ $X2=2.44 $Y2=0.74
r73 30 44 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=0.775 $Y=0.152
+ $X2=0.69 $Y2=0.152
r74 25 44 3.51065 $w=1.7e-07 $l=1.53e-07 $layer=LI1_cond $X=0.69 $Y=0.305
+ $X2=0.69 $Y2=0.152
r75 25 27 28.3797 $w=1.68e-07 $l=4.35e-07 $layer=LI1_cond $X=0.69 $Y=0.305
+ $X2=0.69 $Y2=0.74
r76 23 37 3.51065 $w=1.7e-07 $l=1.53e-07 $layer=LI1_cond $X=2.44 $Y=0.152
+ $X2=2.44 $Y2=0.305
r77 23 29 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=2.44 $Y=0.152
+ $X2=2.355 $Y2=0.152
r78 23 43 10.013 $w=3.03e-07 $l=2.65e-07 $layer=LI1_cond $X=0.34 $Y=0.152
+ $X2=0.605 $Y2=0.152
r79 23 51 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=2.38 $Y=0.17
+ $X2=2.38 $Y2=0.17
r80 23 49 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=0.34 $Y=0.17
+ $X2=0.34 $Y2=0.17
r81 23 29 24.7492 $w=3.03e-07 $l=6.55e-07 $layer=LI1_cond $X=1.7 $Y=0.152
+ $X2=2.355 $Y2=0.152
r82 23 30 9.25733 $w=3.03e-07 $l=2.45e-07 $layer=LI1_cond $X=1.02 $Y=0.152
+ $X2=0.775 $Y2=0.152
r83 2 39 182 $w=1.7e-07 $l=2.24332e-07 $layer=licon1_NDIFF $count=1 $X=2.3
+ $Y=0.575 $X2=2.44 $Y2=0.74
r84 1 27 182 $w=1.7e-07 $l=2.24332e-07 $layer=licon1_NDIFF $count=1 $X=0.55
+ $Y=0.575 $X2=0.69 $Y2=0.74
.ends
.subckt PM_SKY130_OSU_SC_15T_HS__XNOR2_L%VDD 1 2 19 23 27 35 41 44 49 50
c40 23 0 1.59951e-19 $X=0.69 $Y=3.205
r41 49 50 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=2.38 $Y=5.38
+ $X2=2.38 $Y2=5.38
r42 44 49 0.950071 $w=3.05e-07 $l=2.04e-06 $layer=MET1_cond $X=0.34 $Y=5.397
+ $X2=2.38 $Y2=5.397
r43 44 53 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=0.34 $Y=5.38
+ $X2=0.34 $Y2=5.38
r44 41 53 10.013 $w=3.03e-07 $l=2.65e-07 $layer=LI1_cond $X=0.605 $Y=5.397
+ $X2=0.34 $Y2=5.397
r45 41 42 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=0.605 $Y=5.397
+ $X2=0.69 $Y2=5.397
r46 35 38 88.7273 $w=1.68e-07 $l=1.36e-06 $layer=LI1_cond $X=2.44 $Y=3.205
+ $X2=2.44 $Y2=4.565
r47 33 50 3.51065 $w=1.7e-07 $l=1.52e-07 $layer=LI1_cond $X=2.44 $Y=5.245
+ $X2=2.44 $Y2=5.397
r48 33 38 44.3636 $w=1.68e-07 $l=6.8e-07 $layer=LI1_cond $X=2.44 $Y=5.245
+ $X2=2.44 $Y2=4.565
r49 30 32 25.6938 $w=3.03e-07 $l=6.8e-07 $layer=LI1_cond $X=1.02 $Y=5.397
+ $X2=1.7 $Y2=5.397
r50 28 42 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=0.775 $Y=5.397
+ $X2=0.69 $Y2=5.397
r51 28 30 9.25733 $w=3.03e-07 $l=2.45e-07 $layer=LI1_cond $X=0.775 $Y=5.397
+ $X2=1.02 $Y2=5.397
r52 27 50 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=2.355 $Y=5.397
+ $X2=2.44 $Y2=5.397
r53 27 32 24.7492 $w=3.03e-07 $l=6.55e-07 $layer=LI1_cond $X=2.355 $Y=5.397
+ $X2=1.7 $Y2=5.397
r54 23 26 88.7273 $w=1.68e-07 $l=1.36e-06 $layer=LI1_cond $X=0.69 $Y=3.205
+ $X2=0.69 $Y2=4.565
r55 21 42 3.51065 $w=1.7e-07 $l=1.52e-07 $layer=LI1_cond $X=0.69 $Y=5.245
+ $X2=0.69 $Y2=5.397
r56 21 26 44.3636 $w=1.68e-07 $l=6.8e-07 $layer=LI1_cond $X=0.69 $Y=5.245
+ $X2=0.69 $Y2=4.565
r57 19 50 182 $w=1.7e-07 $l=2.43824e-07 $layer=licon1_NTAP_notbjt $count=1
+ $X=2.175 $Y=5.245 $X2=2.38 $Y2=5.33
r58 19 53 182 $w=1.7e-07 $l=2.43824e-07 $layer=licon1_NTAP_notbjt $count=1
+ $X=0.135 $Y=5.245 $X2=0.34 $Y2=5.33
r59 19 32 182 $w=1.7e-07 $l=2.43824e-07 $layer=licon1_NTAP_notbjt $count=1
+ $X=1.495 $Y=5.245 $X2=1.7 $Y2=5.33
r60 19 30 182 $w=1.7e-07 $l=2.43824e-07 $layer=licon1_NTAP_notbjt $count=1
+ $X=0.815 $Y=5.245 $X2=1.02 $Y2=5.33
r61 2 38 240 $w=1.7e-07 $l=1.80865e-06 $layer=licon1_PDIFF $count=2 $X=2.3
+ $Y=2.825 $X2=2.44 $Y2=4.565
r62 2 35 240 $w=1.7e-07 $l=4.44522e-07 $layer=licon1_PDIFF $count=2 $X=2.3
+ $Y=2.825 $X2=2.44 $Y2=3.205
r63 1 26 240 $w=1.7e-07 $l=1.80865e-06 $layer=licon1_PDIFF $count=2 $X=0.55
+ $Y=2.825 $X2=0.69 $Y2=4.565
r64 1 23 240 $w=1.7e-07 $l=4.44522e-07 $layer=licon1_PDIFF $count=2 $X=0.55
+ $Y=2.825 $X2=0.69 $Y2=3.205
.ends
.subckt PM_SKY130_OSU_SC_15T_HS__XNOR2_L%A 3 5 8 9 13 16 18 19 20 24 27 28 31 33
+ 36 37 39 40 45
r114 42 43 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=0.845
+ $Y=1.59 $X2=0.845 $Y2=1.59
r115 39 43 27.7717 $w=2.7e-07 $l=1.25e-07 $layer=POLY_cond $X=0.845 $Y=1.465
+ $X2=0.845 $Y2=1.59
r116 39 40 28.4203 $w=2.7e-07 $l=7.5e-08 $layer=POLY_cond $X=0.845 $Y=1.465
+ $X2=0.845 $Y2=1.39
r117 36 37 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.145 $Y=1.22
+ $X2=2.145 $Y2=1.22
r118 31 42 24.139 $w=1.68e-07 $l=3.7e-07 $layer=LI1_cond $X=0.845 $Y=1.22
+ $X2=0.845 $Y2=1.59
r119 31 33 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.845 $Y=1.22
+ $X2=0.845 $Y2=1.22
r120 28 33 0.103375 $w=2.3e-07 $l=1.45e-07 $layer=MET1_cond $X=0.99 $Y=1.22
+ $X2=0.845 $Y2=1.22
r121 27 36 0.103375 $w=2.3e-07 $l=1.45e-07 $layer=MET1_cond $X=2 $Y=1.22
+ $X2=2.145 $Y2=1.22
r122 27 28 0.972511 $w=1.7e-07 $l=1.01e-06 $layer=MET1_cond $X=2 $Y=1.22
+ $X2=0.99 $Y2=1.22
r123 25 45 73.8383 $w=2.35e-07 $l=3.6e-07 $layer=POLY_cond $X=2.225 $Y=2.145
+ $X2=1.865 $Y2=2.145
r124 24 25 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=2.225
+ $Y=2.13 $X2=2.225 $Y2=2.13
r125 22 37 53.8235 $w=1.68e-07 $l=8.25e-07 $layer=LI1_cond $X=2.145 $Y=2.045
+ $X2=2.145 $Y2=1.22
r126 22 24 0.716491 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=2.145 $Y=2.045
+ $X2=2.145 $Y2=2.13
r127 19 20 49.7366 $w=2e-07 $l=1.5e-07 $layer=POLY_cond $X=0.45 $Y=2.6 $X2=0.45
+ $Y2=2.75
r128 14 45 13.2911 $w=1.5e-07 $l=1.5e-07 $layer=POLY_cond $X=1.865 $Y=2.295
+ $X2=1.865 $Y2=2.145
r129 14 16 784.532 $w=1.5e-07 $l=1.53e-06 $layer=POLY_cond $X=1.865 $Y=2.295
+ $X2=1.865 $Y2=3.825
r130 13 40 142.993 $w=1.5e-07 $l=4.45e-07 $layer=POLY_cond $X=0.905 $Y=0.945
+ $X2=0.905 $Y2=1.39
r131 10 18 5.30422 $w=1.5e-07 $l=1e-07 $layer=POLY_cond $X=0.55 $Y=1.465
+ $X2=0.45 $Y2=1.465
r132 9 39 16.5046 $w=1.5e-07 $l=1.35e-07 $layer=POLY_cond $X=0.71 $Y=1.465
+ $X2=0.845 $Y2=1.465
r133 9 10 82.0426 $w=1.5e-07 $l=1.6e-07 $layer=POLY_cond $X=0.71 $Y=1.465
+ $X2=0.55 $Y2=1.465
r134 8 20 345.433 $w=1.5e-07 $l=1.075e-06 $layer=POLY_cond $X=0.475 $Y=3.825
+ $X2=0.475 $Y2=2.75
r135 3 18 20.4101 $w=1.5e-07 $l=8.66025e-08 $layer=POLY_cond $X=0.475 $Y=1.39
+ $X2=0.45 $Y2=1.465
r136 3 5 142.993 $w=1.5e-07 $l=4.45e-07 $layer=POLY_cond $X=0.475 $Y=1.39
+ $X2=0.475 $Y2=0.945
r137 1 18 20.4101 $w=1.5e-07 $l=8.66025e-08 $layer=POLY_cond $X=0.425 $Y=1.54
+ $X2=0.45 $Y2=1.465
r138 1 19 543.532 $w=1.5e-07 $l=1.06e-06 $layer=POLY_cond $X=0.425 $Y=1.54
+ $X2=0.425 $Y2=2.6
.ends
.subckt PM_SKY130_OSU_SC_15T_HS__XNOR2_L%A_27_115# 1 2 9 11 13 16 20 24 28 31 32
+ 34
c78 31 0 1.07013e-19 $X=1.765 $Y=1.59
r79 32 39 15.9603 $w=3.02e-07 $l=1e-07 $layer=POLY_cond $X=1.765 $Y=1.59
+ $X2=1.865 $Y2=1.59
r80 31 32 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=1.765
+ $Y=1.59 $X2=1.765 $Y2=1.59
r81 29 31 29.6845 $w=1.68e-07 $l=4.55e-07 $layer=LI1_cond $X=1.765 $Y=2.045
+ $X2=1.765 $Y2=1.59
r82 28 37 48.4159 $w=2.7e-07 $l=1.65e-07 $layer=POLY_cond $X=0.845 $Y=2.13
+ $X2=0.845 $Y2=2.295
r83 27 28 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=0.845
+ $Y=2.13 $X2=0.845 $Y2=2.13
r84 25 34 1.34256 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=0.345 $Y=2.13
+ $X2=0.26 $Y2=2.13
r85 25 27 32.6203 $w=1.68e-07 $l=5e-07 $layer=LI1_cond $X=0.345 $Y=2.13
+ $X2=0.845 $Y2=2.13
r86 24 29 6.81649 $w=1.7e-07 $l=1.20208e-07 $layer=LI1_cond $X=1.68 $Y=2.13
+ $X2=1.765 $Y2=2.045
r87 24 27 54.4759 $w=1.68e-07 $l=8.35e-07 $layer=LI1_cond $X=1.68 $Y=2.13
+ $X2=0.845 $Y2=2.13
r88 20 22 88.7273 $w=1.68e-07 $l=1.36e-06 $layer=LI1_cond $X=0.26 $Y=3.205
+ $X2=0.26 $Y2=4.565
r89 18 34 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=0.26 $Y=2.215
+ $X2=0.26 $Y2=2.13
r90 18 20 64.5882 $w=1.68e-07 $l=9.9e-07 $layer=LI1_cond $X=0.26 $Y=2.215
+ $X2=0.26 $Y2=3.205
r91 14 34 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=0.26 $Y=2.045
+ $X2=0.26 $Y2=2.13
r92 14 16 76.984 $w=1.68e-07 $l=1.18e-06 $layer=LI1_cond $X=0.26 $Y=2.045
+ $X2=0.26 $Y2=0.865
r93 11 39 19.1248 $w=1.5e-07 $l=1.65e-07 $layer=POLY_cond $X=1.865 $Y=1.425
+ $X2=1.865 $Y2=1.59
r94 11 13 154.24 $w=1.5e-07 $l=4.8e-07 $layer=POLY_cond $X=1.865 $Y=1.425
+ $X2=1.865 $Y2=0.945
r95 9 37 784.532 $w=1.5e-07 $l=1.53e-06 $layer=POLY_cond $X=0.905 $Y=3.825
+ $X2=0.905 $Y2=2.295
r96 2 22 240 $w=1.7e-07 $l=1.80142e-06 $layer=licon1_PDIFF $count=2 $X=0.135
+ $Y=2.825 $X2=0.26 $Y2=4.565
r97 2 20 240 $w=1.7e-07 $l=4.38064e-07 $layer=licon1_PDIFF $count=2 $X=0.135
+ $Y=2.825 $X2=0.26 $Y2=3.205
r98 1 16 182 $w=1.7e-07 $l=3.46915e-07 $layer=licon1_NDIFF $count=1 $X=0.135
+ $Y=0.575 $X2=0.26 $Y2=0.865
.ends
.subckt PM_SKY130_OSU_SC_15T_HS__XNOR2_L%A_238_89# 1 2 9 13 15 18 22 26 30
r60 26 28 88.7273 $w=1.68e-07 $l=1.36e-06 $layer=LI1_cond $X=2.87 $Y=3.205
+ $X2=2.87 $Y2=4.565
r61 24 30 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=2.87 $Y=2.59 $X2=2.87
+ $Y2=2.505
r62 24 26 40.123 $w=1.68e-07 $l=6.15e-07 $layer=LI1_cond $X=2.87 $Y=2.59
+ $X2=2.87 $Y2=3.205
r63 20 30 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=2.87 $Y=2.42 $X2=2.87
+ $Y2=2.505
r64 20 22 101.449 $w=1.68e-07 $l=1.555e-06 $layer=LI1_cond $X=2.87 $Y=2.42
+ $X2=2.87 $Y2=0.865
r65 18 33 48.4159 $w=2.7e-07 $l=1.65e-07 $layer=POLY_cond $X=1.325 $Y=2.505
+ $X2=1.325 $Y2=2.67
r66 18 32 48.4159 $w=2.7e-07 $l=1.65e-07 $layer=POLY_cond $X=1.325 $Y=2.505
+ $X2=1.325 $Y2=2.34
r67 17 18 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=1.325
+ $Y=2.505 $X2=1.325 $Y2=2.505
r68 15 30 1.34256 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=2.785 $Y=2.505
+ $X2=2.87 $Y2=2.505
r69 15 17 95.2513 $w=1.68e-07 $l=1.46e-06 $layer=LI1_cond $X=2.785 $Y=2.505
+ $X2=1.325 $Y2=2.505
r70 13 33 592.245 $w=1.5e-07 $l=1.155e-06 $layer=POLY_cond $X=1.265 $Y=3.825
+ $X2=1.265 $Y2=2.67
r71 9 32 715.309 $w=1.5e-07 $l=1.395e-06 $layer=POLY_cond $X=1.265 $Y=0.945
+ $X2=1.265 $Y2=2.34
r72 2 28 240 $w=1.7e-07 $l=1.80865e-06 $layer=licon1_PDIFF $count=2 $X=2.73
+ $Y=2.825 $X2=2.87 $Y2=4.565
r73 2 26 240 $w=1.7e-07 $l=4.44522e-07 $layer=licon1_PDIFF $count=2 $X=2.73
+ $Y=2.825 $X2=2.87 $Y2=3.205
r74 1 22 182 $w=1.7e-07 $l=3.53129e-07 $layer=licon1_NDIFF $count=1 $X=2.73
+ $Y=0.575 $X2=2.87 $Y2=0.865
.ends
.subckt PM_SKY130_OSU_SC_15T_HS__XNOR2_L%B 1 3 4 6 7 8 9 11 13 14 16 17 19 21 27
c57 27 0 1.07013e-19 $X=2.655 $Y=1.572
r58 26 27 21.9891 $w=2.74e-07 $l=1.25e-07 $layer=POLY_cond $X=2.53 $Y=1.572
+ $X2=2.655 $Y2=1.572
r59 21 26 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=2.53
+ $Y=1.59 $X2=2.53 $Y2=1.59
r60 19 21 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.53 $Y=1.59
+ $X2=2.53 $Y2=1.59
r61 14 17 20.4101 $w=1.5e-07 $l=7.5e-08 $layer=POLY_cond $X=2.655 $Y=2.75
+ $X2=2.655 $Y2=2.675
r62 14 16 345.433 $w=1.5e-07 $l=1.075e-06 $layer=POLY_cond $X=2.655 $Y=2.75
+ $X2=2.655 $Y2=3.825
r63 13 17 20.4101 $w=1.5e-07 $l=7.5e-08 $layer=POLY_cond $X=2.655 $Y=2.6
+ $X2=2.655 $Y2=2.675
r64 12 27 16.847 $w=1.5e-07 $l=1.83e-07 $layer=POLY_cond $X=2.655 $Y=1.755
+ $X2=2.655 $Y2=1.572
r65 12 13 433.287 $w=1.5e-07 $l=8.45e-07 $layer=POLY_cond $X=2.655 $Y=1.755
+ $X2=2.655 $Y2=2.6
r66 9 27 16.847 $w=1.5e-07 $l=1.82e-07 $layer=POLY_cond $X=2.655 $Y=1.39
+ $X2=2.655 $Y2=1.572
r67 9 11 142.993 $w=1.5e-07 $l=4.45e-07 $layer=POLY_cond $X=2.655 $Y=1.39
+ $X2=2.655 $Y2=0.945
r68 7 17 5.30422 $w=1.5e-07 $l=7.5e-08 $layer=POLY_cond $X=2.58 $Y=2.675
+ $X2=2.655 $Y2=2.675
r69 7 8 143.574 $w=1.5e-07 $l=2.8e-07 $layer=POLY_cond $X=2.58 $Y=2.675 $X2=2.3
+ $Y2=2.675
r70 4 8 26.9307 $w=1.5e-07 $l=1.06066e-07 $layer=POLY_cond $X=2.225 $Y=2.75
+ $X2=2.3 $Y2=2.675
r71 4 6 345.433 $w=1.5e-07 $l=1.075e-06 $layer=POLY_cond $X=2.225 $Y=2.75
+ $X2=2.225 $Y2=3.825
r72 1 26 53.6533 $w=2.74e-07 $l=3.85402e-07 $layer=POLY_cond $X=2.225 $Y=1.39
+ $X2=2.53 $Y2=1.572
r73 1 3 142.993 $w=1.5e-07 $l=4.45e-07 $layer=POLY_cond $X=2.225 $Y=1.39
+ $X2=2.225 $Y2=0.945
.ends
.subckt PM_SKY130_OSU_SC_15T_HS__XNOR2_L%Y 1 2 9 11 13 19 23 26 27 30
c56 23 0 1.59951e-19 $X=1.42 $Y=1.875
r57 30 31 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.425 $Y=3.07
+ $X2=1.425 $Y2=3.07
r58 26 27 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.425 $Y=1.59
+ $X2=1.425 $Y2=1.59
r59 21 30 0.0804477 $w=2.9e-07 $l=1.15e-07 $layer=MET1_cond $X=1.425 $Y=2.955
+ $X2=1.425 $Y2=3.07
r60 21 23 1.03991 $w=1.7e-07 $l=1.08e-06 $layer=MET1_cond $X=1.425 $Y=2.955
+ $X2=1.425 $Y2=1.875
r61 20 26 0.0804477 $w=2.9e-07 $l=1.15e-07 $layer=MET1_cond $X=1.425 $Y=1.705
+ $X2=1.425 $Y2=1.59
r62 20 23 0.16369 $w=1.7e-07 $l=1.7e-07 $layer=MET1_cond $X=1.425 $Y=1.705
+ $X2=1.425 $Y2=1.875
r63 19 27 28.3797 $w=1.68e-07 $l=4.35e-07 $layer=LI1_cond $X=1.425 $Y=1.155
+ $X2=1.425 $Y2=1.59
r64 18 19 8.64139 $w=3.38e-07 $l=1.7e-07 $layer=LI1_cond $X=1.537 $Y=0.985
+ $X2=1.537 $Y2=1.155
r65 13 15 46.0977 $w=3.38e-07 $l=1.36e-06 $layer=LI1_cond $X=1.565 $Y=3.205
+ $X2=1.565 $Y2=4.565
r66 11 31 3.84112 $w=3.85e-07 $l=1.28238e-07 $layer=LI1_cond $X=1.565 $Y=3.185
+ $X2=1.537 $Y2=3.07
r67 11 13 0.677908 $w=3.38e-07 $l=2e-08 $layer=LI1_cond $X=1.565 $Y=3.185
+ $X2=1.565 $Y2=3.205
r68 9 18 4.06745 $w=3.38e-07 $l=1.2e-07 $layer=LI1_cond $X=1.565 $Y=0.865
+ $X2=1.565 $Y2=0.985
r69 2 15 240 $w=1.7e-07 $l=1.84908e-06 $layer=licon1_PDIFF $count=2 $X=1.34
+ $Y=2.825 $X2=1.565 $Y2=4.565
r70 2 13 240 $w=1.7e-07 $l=4.79479e-07 $layer=licon1_PDIFF $count=2 $X=1.34
+ $Y=2.825 $X2=1.565 $Y2=3.205
r71 1 9 182 $w=1.7e-07 $l=3.86458e-07 $layer=licon1_NDIFF $count=1 $X=1.34
+ $Y=0.575 $X2=1.565 $Y2=0.865
.ends