blob: 550a50b5bf5080758a4a9c96ae6bce79f4984f4b [file] [log] [blame]
* File: sky130_osu_sc_12T_ms__xnor2_l.pex.spice
* Created: Mon Nov 16 22:25:08 2020
* Program "Calibre xRC"
* Version "v2020.2_35.23"
* Nominal Temperature: 27C
* Circuit Temperature: 27C
*
.subckt PM_SKY130_OSU_SC_12T_MS__XNOR2_L%GND 1 2 23 27 29 39 43 49 51
c73 1 0 9.76214e-20 $X=0.55 $Y=0.575
r74 49 51 0.950071 $w=3.05e-07 $l=2.04e-06 $layer=MET1_cond $X=0.34 $Y=0.152
+ $X2=2.38 $Y2=0.152
r75 43 44 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=0.605 $Y=0.152
+ $X2=0.69 $Y2=0.152
r76 37 39 28.3797 $w=1.68e-07 $l=4.35e-07 $layer=LI1_cond $X=2.44 $Y=0.305
+ $X2=2.44 $Y2=0.74
r77 30 44 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=0.775 $Y=0.152
+ $X2=0.69 $Y2=0.152
r78 25 44 3.51065 $w=1.7e-07 $l=1.53e-07 $layer=LI1_cond $X=0.69 $Y=0.305
+ $X2=0.69 $Y2=0.152
r79 25 27 28.3797 $w=1.68e-07 $l=4.35e-07 $layer=LI1_cond $X=0.69 $Y=0.305
+ $X2=0.69 $Y2=0.74
r80 23 37 3.51065 $w=1.7e-07 $l=1.53e-07 $layer=LI1_cond $X=2.44 $Y=0.152
+ $X2=2.44 $Y2=0.305
r81 23 29 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=2.44 $Y=0.152
+ $X2=2.355 $Y2=0.152
r82 23 43 10.013 $w=3.03e-07 $l=2.65e-07 $layer=LI1_cond $X=0.34 $Y=0.152
+ $X2=0.605 $Y2=0.152
r83 23 51 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=2.38 $Y=0.17
+ $X2=2.38 $Y2=0.17
r84 23 49 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=0.34 $Y=0.17
+ $X2=0.34 $Y2=0.17
r85 23 29 24.7492 $w=3.03e-07 $l=6.55e-07 $layer=LI1_cond $X=1.7 $Y=0.152
+ $X2=2.355 $Y2=0.152
r86 23 30 9.25733 $w=3.03e-07 $l=2.45e-07 $layer=LI1_cond $X=1.02 $Y=0.152
+ $X2=0.775 $Y2=0.152
r87 2 39 182 $w=1.7e-07 $l=2.24332e-07 $layer=licon1_NDIFF $count=1 $X=2.3
+ $Y=0.575 $X2=2.44 $Y2=0.74
r88 1 27 182 $w=1.7e-07 $l=2.24332e-07 $layer=licon1_NDIFF $count=1 $X=0.55
+ $Y=0.575 $X2=0.69 $Y2=0.74
.ends
.subckt PM_SKY130_OSU_SC_12T_MS__XNOR2_L%VDD 1 2 19 23 27 35 41 44 49 50
c40 23 0 1.59951e-19 $X=0.69 $Y=2.955
r41 49 50 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=2.38 $Y=4.27
+ $X2=2.38 $Y2=4.27
r42 44 49 0.950071 $w=3.05e-07 $l=2.04e-06 $layer=MET1_cond $X=0.34 $Y=4.287
+ $X2=2.38 $Y2=4.287
r43 44 53 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=0.34 $Y=4.27
+ $X2=0.34 $Y2=4.27
r44 41 53 10.013 $w=3.03e-07 $l=2.65e-07 $layer=LI1_cond $X=0.605 $Y=4.287
+ $X2=0.34 $Y2=4.287
r45 41 42 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=0.605 $Y=4.287
+ $X2=0.69 $Y2=4.287
r46 35 38 44.3636 $w=1.68e-07 $l=6.8e-07 $layer=LI1_cond $X=2.44 $Y=2.955
+ $X2=2.44 $Y2=3.635
r47 33 50 3.51065 $w=1.7e-07 $l=1.52e-07 $layer=LI1_cond $X=2.44 $Y=4.135
+ $X2=2.44 $Y2=4.287
r48 33 38 32.6203 $w=1.68e-07 $l=5e-07 $layer=LI1_cond $X=2.44 $Y=4.135 $X2=2.44
+ $Y2=3.635
r49 30 32 25.6938 $w=3.03e-07 $l=6.8e-07 $layer=LI1_cond $X=1.02 $Y=4.287
+ $X2=1.7 $Y2=4.287
r50 28 42 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=0.775 $Y=4.287
+ $X2=0.69 $Y2=4.287
r51 28 30 9.25733 $w=3.03e-07 $l=2.45e-07 $layer=LI1_cond $X=0.775 $Y=4.287
+ $X2=1.02 $Y2=4.287
r52 27 50 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=2.355 $Y=4.287
+ $X2=2.44 $Y2=4.287
r53 27 32 24.7492 $w=3.03e-07 $l=6.55e-07 $layer=LI1_cond $X=2.355 $Y=4.287
+ $X2=1.7 $Y2=4.287
r54 23 26 44.3636 $w=1.68e-07 $l=6.8e-07 $layer=LI1_cond $X=0.69 $Y=2.955
+ $X2=0.69 $Y2=3.635
r55 21 42 3.51065 $w=1.7e-07 $l=1.52e-07 $layer=LI1_cond $X=0.69 $Y=4.135
+ $X2=0.69 $Y2=4.287
r56 21 26 32.6203 $w=1.68e-07 $l=5e-07 $layer=LI1_cond $X=0.69 $Y=4.135 $X2=0.69
+ $Y2=3.635
r57 19 50 182 $w=1.7e-07 $l=2.43824e-07 $layer=licon1_NTAP_notbjt $count=1
+ $X=2.175 $Y=4.135 $X2=2.38 $Y2=4.22
r58 19 53 182 $w=1.7e-07 $l=2.43824e-07 $layer=licon1_NTAP_notbjt $count=1
+ $X=0.135 $Y=4.135 $X2=0.34 $Y2=4.22
r59 19 32 182 $w=1.7e-07 $l=2.43824e-07 $layer=licon1_NTAP_notbjt $count=1
+ $X=1.495 $Y=4.135 $X2=1.7 $Y2=4.22
r60 19 30 182 $w=1.7e-07 $l=2.43824e-07 $layer=licon1_NTAP_notbjt $count=1
+ $X=0.815 $Y=4.135 $X2=1.02 $Y2=4.22
r61 2 38 400 $w=1.7e-07 $l=1.09777e-06 $layer=licon1_PDIFF $count=1 $X=2.3
+ $Y=2.605 $X2=2.44 $Y2=3.635
r62 2 35 400 $w=1.7e-07 $l=4.14126e-07 $layer=licon1_PDIFF $count=1 $X=2.3
+ $Y=2.605 $X2=2.44 $Y2=2.955
r63 1 26 400 $w=1.7e-07 $l=1.09777e-06 $layer=licon1_PDIFF $count=1 $X=0.55
+ $Y=2.605 $X2=0.69 $Y2=3.635
r64 1 23 400 $w=1.7e-07 $l=4.14126e-07 $layer=licon1_PDIFF $count=1 $X=0.55
+ $Y=2.605 $X2=0.69 $Y2=2.955
.ends
.subckt PM_SKY130_OSU_SC_12T_MS__XNOR2_L%A 3 5 8 9 13 16 18 19 20 22 23 24 28 30
+ 34 35 36 38 39 44
c121 36 0 1.09094e-19 $X=2.107 $Y=1.625
c122 22 0 9.76214e-20 $X=0.845 $Y=1.255
r123 44 47 73.8383 $w=2.35e-07 $l=3.6e-07 $layer=POLY_cond $X=1.865 $Y=1.925
+ $X2=2.225 $Y2=1.925
r124 38 42 27.7717 $w=2.7e-07 $l=1.25e-07 $layer=POLY_cond $X=0.845 $Y=1.245
+ $X2=0.845 $Y2=1.37
r125 38 39 28.4203 $w=2.7e-07 $l=7.5e-08 $layer=POLY_cond $X=0.845 $Y=1.245
+ $X2=0.845 $Y2=1.17
r126 35 47 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=2.225
+ $Y=1.91 $X2=2.225 $Y2=1.91
r127 34 36 0.0806629 $w=2.95e-07 $l=1.15e-07 $layer=MET1_cond $X=2.107 $Y=1.74
+ $X2=2.107 $Y2=1.625
r128 34 35 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.105 $Y=1.74
+ $X2=2.105 $Y2=1.74
r129 30 42 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=0.845
+ $Y=1.37 $X2=0.845 $Y2=1.37
r130 28 30 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.845 $Y=1.37
+ $X2=0.845 $Y2=1.37
r131 25 36 0.519956 $w=1.7e-07 $l=5.4e-07 $layer=MET1_cond $X=2.105 $Y=1.085
+ $X2=2.105 $Y2=1.625
r132 23 25 0.0698411 $w=1.7e-07 $l=1.20208e-07 $layer=MET1_cond $X=2.02 $Y=1
+ $X2=2.105 $Y2=1.085
r133 23 24 1.04954 $w=1.7e-07 $l=1.09e-06 $layer=MET1_cond $X=2.02 $Y=1 $X2=0.93
+ $Y2=1
r134 22 28 0.0804477 $w=2.9e-07 $l=1.15e-07 $layer=MET1_cond $X=0.845 $Y=1.255
+ $X2=0.845 $Y2=1.37
r135 21 24 0.0698411 $w=1.7e-07 $l=1.20208e-07 $layer=MET1_cond $X=0.845
+ $Y=1.085 $X2=0.93 $Y2=1
r136 21 22 0.16369 $w=1.7e-07 $l=1.7e-07 $layer=MET1_cond $X=0.845 $Y=1.085
+ $X2=0.845 $Y2=1.255
r137 19 20 49.7366 $w=2e-07 $l=1.5e-07 $layer=POLY_cond $X=0.45 $Y=2.38 $X2=0.45
+ $Y2=2.53
r138 14 44 13.2911 $w=1.5e-07 $l=1.5e-07 $layer=POLY_cond $X=1.865 $Y=2.075
+ $X2=1.865 $Y2=1.925
r139 14 16 594.809 $w=1.5e-07 $l=1.16e-06 $layer=POLY_cond $X=1.865 $Y=2.075
+ $X2=1.865 $Y2=3.235
r140 13 39 107.647 $w=1.5e-07 $l=3.35e-07 $layer=POLY_cond $X=0.905 $Y=0.835
+ $X2=0.905 $Y2=1.17
r141 10 18 5.30422 $w=1.5e-07 $l=1e-07 $layer=POLY_cond $X=0.55 $Y=1.245
+ $X2=0.45 $Y2=1.245
r142 9 38 16.5046 $w=1.5e-07 $l=1.35e-07 $layer=POLY_cond $X=0.71 $Y=1.245
+ $X2=0.845 $Y2=1.245
r143 9 10 82.0426 $w=1.5e-07 $l=1.6e-07 $layer=POLY_cond $X=0.71 $Y=1.245
+ $X2=0.55 $Y2=1.245
r144 8 20 226.54 $w=1.5e-07 $l=7.05e-07 $layer=POLY_cond $X=0.475 $Y=3.235
+ $X2=0.475 $Y2=2.53
r145 3 18 20.4101 $w=1.5e-07 $l=8.66025e-08 $layer=POLY_cond $X=0.475 $Y=1.17
+ $X2=0.45 $Y2=1.245
r146 3 5 107.647 $w=1.5e-07 $l=3.35e-07 $layer=POLY_cond $X=0.475 $Y=1.17
+ $X2=0.475 $Y2=0.835
r147 1 18 20.4101 $w=1.5e-07 $l=8.66025e-08 $layer=POLY_cond $X=0.425 $Y=1.32
+ $X2=0.45 $Y2=1.245
r148 1 19 543.532 $w=1.5e-07 $l=1.06e-06 $layer=POLY_cond $X=0.425 $Y=1.32
+ $X2=0.425 $Y2=2.38
.ends
.subckt PM_SKY130_OSU_SC_12T_MS__XNOR2_L%A_27_115# 1 2 9 11 13 16 20 24 28 31 32
+ 34
r85 32 39 15.9603 $w=3.02e-07 $l=1e-07 $layer=POLY_cond $X=1.765 $Y=1.37
+ $X2=1.865 $Y2=1.37
r86 31 32 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=1.765
+ $Y=1.37 $X2=1.765 $Y2=1.37
r87 29 31 29.6845 $w=1.68e-07 $l=4.55e-07 $layer=LI1_cond $X=1.765 $Y=1.825
+ $X2=1.765 $Y2=1.37
r88 28 37 48.4159 $w=2.7e-07 $l=1.65e-07 $layer=POLY_cond $X=0.845 $Y=1.91
+ $X2=0.845 $Y2=2.075
r89 27 28 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=0.845
+ $Y=1.91 $X2=0.845 $Y2=1.91
r90 25 34 1.34256 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=0.345 $Y=1.91
+ $X2=0.26 $Y2=1.91
r91 25 27 32.6203 $w=1.68e-07 $l=5e-07 $layer=LI1_cond $X=0.345 $Y=1.91
+ $X2=0.845 $Y2=1.91
r92 24 29 6.81649 $w=1.7e-07 $l=1.20208e-07 $layer=LI1_cond $X=1.68 $Y=1.91
+ $X2=1.765 $Y2=1.825
r93 24 27 54.4759 $w=1.68e-07 $l=8.35e-07 $layer=LI1_cond $X=1.68 $Y=1.91
+ $X2=0.845 $Y2=1.91
r94 20 22 44.3636 $w=1.68e-07 $l=6.8e-07 $layer=LI1_cond $X=0.26 $Y=2.955
+ $X2=0.26 $Y2=3.635
r95 18 34 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=0.26 $Y=1.995
+ $X2=0.26 $Y2=1.91
r96 18 20 62.631 $w=1.68e-07 $l=9.6e-07 $layer=LI1_cond $X=0.26 $Y=1.995
+ $X2=0.26 $Y2=2.955
r97 14 34 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=0.26 $Y=1.825
+ $X2=0.26 $Y2=1.91
r98 14 16 69.8075 $w=1.68e-07 $l=1.07e-06 $layer=LI1_cond $X=0.26 $Y=1.825
+ $X2=0.26 $Y2=0.755
r99 11 39 19.1248 $w=1.5e-07 $l=1.65e-07 $layer=POLY_cond $X=1.865 $Y=1.205
+ $X2=1.865 $Y2=1.37
r100 11 13 118.893 $w=1.5e-07 $l=3.7e-07 $layer=POLY_cond $X=1.865 $Y=1.205
+ $X2=1.865 $Y2=0.835
r101 9 37 594.809 $w=1.5e-07 $l=1.16e-06 $layer=POLY_cond $X=0.905 $Y=3.235
+ $X2=0.905 $Y2=2.075
r102 2 22 400 $w=1.7e-07 $l=1.09071e-06 $layer=licon1_PDIFF $count=1 $X=0.135
+ $Y=2.605 $X2=0.26 $Y2=3.635
r103 2 20 400 $w=1.7e-07 $l=4.07738e-07 $layer=licon1_PDIFF $count=1 $X=0.135
+ $Y=2.605 $X2=0.26 $Y2=2.955
r104 1 16 182 $w=1.7e-07 $l=2.34307e-07 $layer=licon1_NDIFF $count=1 $X=0.135
+ $Y=0.575 $X2=0.26 $Y2=0.755
.ends
.subckt PM_SKY130_OSU_SC_12T_MS__XNOR2_L%A_238_89# 1 2 9 13 15 18 22 26 30
r64 26 28 44.3636 $w=1.68e-07 $l=6.8e-07 $layer=LI1_cond $X=2.87 $Y=2.955
+ $X2=2.87 $Y2=3.635
r65 24 30 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=2.87 $Y=2.37 $X2=2.87
+ $Y2=2.285
r66 24 26 38.1658 $w=1.68e-07 $l=5.85e-07 $layer=LI1_cond $X=2.87 $Y=2.37
+ $X2=2.87 $Y2=2.955
r67 20 30 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=2.87 $Y=2.2 $X2=2.87
+ $Y2=2.285
r68 20 22 94.2727 $w=1.68e-07 $l=1.445e-06 $layer=LI1_cond $X=2.87 $Y=2.2
+ $X2=2.87 $Y2=0.755
r69 18 33 48.4159 $w=2.7e-07 $l=1.65e-07 $layer=POLY_cond $X=1.325 $Y=2.285
+ $X2=1.325 $Y2=2.45
r70 18 32 48.4159 $w=2.7e-07 $l=1.65e-07 $layer=POLY_cond $X=1.325 $Y=2.285
+ $X2=1.325 $Y2=2.12
r71 17 18 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=1.325
+ $Y=2.285 $X2=1.325 $Y2=2.285
r72 15 30 1.34256 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=2.785 $Y=2.285
+ $X2=2.87 $Y2=2.285
r73 15 17 95.2513 $w=1.68e-07 $l=1.46e-06 $layer=LI1_cond $X=2.785 $Y=2.285
+ $X2=1.325 $Y2=2.285
r74 13 33 402.521 $w=1.5e-07 $l=7.85e-07 $layer=POLY_cond $X=1.265 $Y=3.235
+ $X2=1.265 $Y2=2.45
r75 9 32 658.904 $w=1.5e-07 $l=1.285e-06 $layer=POLY_cond $X=1.265 $Y=0.835
+ $X2=1.265 $Y2=2.12
r76 2 28 400 $w=1.7e-07 $l=1.09777e-06 $layer=licon1_PDIFF $count=1 $X=2.73
+ $Y=2.605 $X2=2.87 $Y2=3.635
r77 2 26 400 $w=1.7e-07 $l=4.14126e-07 $layer=licon1_PDIFF $count=1 $X=2.73
+ $Y=2.605 $X2=2.87 $Y2=2.955
r78 1 22 182 $w=1.7e-07 $l=2.4e-07 $layer=licon1_NDIFF $count=1 $X=2.73 $Y=0.575
+ $X2=2.87 $Y2=0.755
.ends
.subckt PM_SKY130_OSU_SC_12T_MS__XNOR2_L%B 1 3 4 6 7 8 9 11 13 14 16 17 19 21 27
r58 26 27 21.9891 $w=2.74e-07 $l=1.25e-07 $layer=POLY_cond $X=2.53 $Y=1.352
+ $X2=2.655 $Y2=1.352
r59 21 26 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=2.53
+ $Y=1.37 $X2=2.53 $Y2=1.37
r60 19 21 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.53 $Y=1.37
+ $X2=2.53 $Y2=1.37
r61 14 17 20.4101 $w=1.5e-07 $l=7.5e-08 $layer=POLY_cond $X=2.655 $Y=2.53
+ $X2=2.655 $Y2=2.455
r62 14 16 226.54 $w=1.5e-07 $l=7.05e-07 $layer=POLY_cond $X=2.655 $Y=2.53
+ $X2=2.655 $Y2=3.235
r63 13 17 20.4101 $w=1.5e-07 $l=7.5e-08 $layer=POLY_cond $X=2.655 $Y=2.38
+ $X2=2.655 $Y2=2.455
r64 12 27 16.847 $w=1.5e-07 $l=1.83e-07 $layer=POLY_cond $X=2.655 $Y=1.535
+ $X2=2.655 $Y2=1.352
r65 12 13 433.287 $w=1.5e-07 $l=8.45e-07 $layer=POLY_cond $X=2.655 $Y=1.535
+ $X2=2.655 $Y2=2.38
r66 9 27 16.847 $w=1.5e-07 $l=1.82e-07 $layer=POLY_cond $X=2.655 $Y=1.17
+ $X2=2.655 $Y2=1.352
r67 9 11 107.647 $w=1.5e-07 $l=3.35e-07 $layer=POLY_cond $X=2.655 $Y=1.17
+ $X2=2.655 $Y2=0.835
r68 7 17 5.30422 $w=1.5e-07 $l=7.5e-08 $layer=POLY_cond $X=2.58 $Y=2.455
+ $X2=2.655 $Y2=2.455
r69 7 8 143.574 $w=1.5e-07 $l=2.8e-07 $layer=POLY_cond $X=2.58 $Y=2.455 $X2=2.3
+ $Y2=2.455
r70 4 8 26.9307 $w=1.5e-07 $l=1.06066e-07 $layer=POLY_cond $X=2.225 $Y=2.53
+ $X2=2.3 $Y2=2.455
r71 4 6 226.54 $w=1.5e-07 $l=7.05e-07 $layer=POLY_cond $X=2.225 $Y=2.53
+ $X2=2.225 $Y2=3.235
r72 1 26 53.6533 $w=2.74e-07 $l=3.85402e-07 $layer=POLY_cond $X=2.225 $Y=1.17
+ $X2=2.53 $Y2=1.352
r73 1 3 107.647 $w=1.5e-07 $l=3.35e-07 $layer=POLY_cond $X=2.225 $Y=1.17
+ $X2=2.225 $Y2=0.835
.ends
.subckt PM_SKY130_OSU_SC_12T_MS__XNOR2_L%Y 1 2 7 9 11 18 21 22 25
c59 18 0 1.59951e-19 $X=1.42 $Y=1.655
r60 25 26 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.425 $Y=2.85
+ $X2=1.425 $Y2=2.85
r61 21 22 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.425 $Y=1.37
+ $X2=1.425 $Y2=1.37
r62 16 25 0.0804477 $w=2.9e-07 $l=1.15e-07 $layer=MET1_cond $X=1.425 $Y=2.735
+ $X2=1.425 $Y2=2.85
r63 16 18 1.03991 $w=1.7e-07 $l=1.08e-06 $layer=MET1_cond $X=1.425 $Y=2.735
+ $X2=1.425 $Y2=1.655
r64 15 21 0.0804477 $w=2.9e-07 $l=1.15e-07 $layer=MET1_cond $X=1.425 $Y=1.485
+ $X2=1.425 $Y2=1.37
r65 15 18 0.16369 $w=1.7e-07 $l=1.7e-07 $layer=MET1_cond $X=1.425 $Y=1.485
+ $X2=1.425 $Y2=1.655
r66 12 22 28.3797 $w=1.68e-07 $l=4.35e-07 $layer=LI1_cond $X=1.425 $Y=0.935
+ $X2=1.425 $Y2=1.37
r67 11 14 5.12913 $w=3.33e-07 $l=1.4e-07 $layer=LI1_cond $X=1.425 $Y=0.755
+ $X2=1.565 $Y2=0.755
r68 11 12 4.67747 $w=1.7e-07 $l=1.8e-07 $layer=LI1_cond $X=1.425 $Y=0.755
+ $X2=1.425 $Y2=0.935
r69 7 26 3.84112 $w=3.85e-07 $l=1.28238e-07 $layer=LI1_cond $X=1.565 $Y=2.965
+ $X2=1.537 $Y2=2.85
r70 7 9 22.7099 $w=3.38e-07 $l=6.7e-07 $layer=LI1_cond $X=1.565 $Y=2.965
+ $X2=1.565 $Y2=3.635
r71 2 26 400 $w=1.7e-07 $l=4.48609e-07 $layer=licon1_PDIFF $count=1 $X=1.34
+ $Y=2.605 $X2=1.565 $Y2=2.955
r72 2 9 400 $w=1.7e-07 $l=1.13695e-06 $layer=licon1_PDIFF $count=1 $X=1.34
+ $Y=2.605 $X2=1.565 $Y2=3.635
r73 1 14 182 $w=1.7e-07 $l=3.01869e-07 $layer=licon1_NDIFF $count=1 $X=1.34
+ $Y=0.575 $X2=1.565 $Y2=0.755
.ends