* File: sky130_osu_sc_12T_ls__xor2_l.pex.spice
* Created: Mon Nov 16 21:35:10 2020
* Program "Calibre xRC"
* Version "v2020.2_35.23"
* Nominal Temperature: 27C
* Circuit Temperature: 27C
* 
.subckt PM_SKY130_OSU_SC_12T_LS__XOR2_L%GND 1 2 23 27 29 39 43 49 51
r67 49 51 0.950071 $w=3.05e-07 $l=2.04e-06 $layer=MET1_cond $X=0.34 $Y=0.152
+ $X2=2.38 $Y2=0.152
r68 43 44 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=0.605 $Y=0.152
+ $X2=0.69 $Y2=0.152
r69 37 39 29.3583 $w=1.68e-07 $l=4.5e-07 $layer=LI1_cond $X=2.44 $Y=0.305
+ $X2=2.44 $Y2=0.755
r70 30 44 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=0.775 $Y=0.152
+ $X2=0.69 $Y2=0.152
r71 25 44 3.51065 $w=1.7e-07 $l=1.53e-07 $layer=LI1_cond $X=0.69 $Y=0.305
+ $X2=0.69 $Y2=0.152
r72 25 27 29.3583 $w=1.68e-07 $l=4.5e-07 $layer=LI1_cond $X=0.69 $Y=0.305
+ $X2=0.69 $Y2=0.755
r73 23 37 3.51065 $w=1.7e-07 $l=1.53e-07 $layer=LI1_cond $X=2.44 $Y=0.152
+ $X2=2.44 $Y2=0.305
r74 23 29 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=2.44 $Y=0.152
+ $X2=2.355 $Y2=0.152
r75 23 43 10.013 $w=3.03e-07 $l=2.65e-07 $layer=LI1_cond $X=0.34 $Y=0.152
+ $X2=0.605 $Y2=0.152
r76 23 51 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=2.38 $Y=0.17
+ $X2=2.38 $Y2=0.17
r77 23 49 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=0.34 $Y=0.17
+ $X2=0.34 $Y2=0.17
r78 23 29 24.7492 $w=3.03e-07 $l=6.55e-07 $layer=LI1_cond $X=1.7 $Y=0.152
+ $X2=2.355 $Y2=0.152
r79 23 30 9.25733 $w=3.03e-07 $l=2.45e-07 $layer=LI1_cond $X=1.02 $Y=0.152
+ $X2=0.775 $Y2=0.152
r80 2 39 182 $w=1.7e-07 $l=2.4e-07 $layer=licon1_NDIFF $count=1 $X=2.3 $Y=0.575
+ $X2=2.44 $Y2=0.755
r81 1 27 182 $w=1.7e-07 $l=2.4e-07 $layer=licon1_NDIFF $count=1 $X=0.55 $Y=0.575
+ $X2=0.69 $Y2=0.755
.ends

.subckt PM_SKY130_OSU_SC_12T_LS__XOR2_L%VDD 1 2 19 23 25 33 37 40 45 46
r45 45 46 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=2.38 $Y=4.27
+ $X2=2.38 $Y2=4.27
r46 40 45 0.950071 $w=3.05e-07 $l=2.04e-06 $layer=MET1_cond $X=0.34 $Y=4.287
+ $X2=2.38 $Y2=4.287
r47 40 49 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=0.34 $Y=4.27
+ $X2=0.34 $Y2=4.27
r48 37 49 10.013 $w=3.03e-07 $l=2.65e-07 $layer=LI1_cond $X=0.605 $Y=4.287
+ $X2=0.34 $Y2=4.287
r49 37 38 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=0.605 $Y=4.287
+ $X2=0.69 $Y2=4.287
r50 31 46 3.51065 $w=1.7e-07 $l=1.52e-07 $layer=LI1_cond $X=2.44 $Y=4.135
+ $X2=2.44 $Y2=4.287
r51 31 33 32.6203 $w=1.68e-07 $l=5e-07 $layer=LI1_cond $X=2.44 $Y=4.135 $X2=2.44
+ $Y2=3.635
r52 28 30 25.6938 $w=3.03e-07 $l=6.8e-07 $layer=LI1_cond $X=1.02 $Y=4.287
+ $X2=1.7 $Y2=4.287
r53 26 38 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=0.775 $Y=4.287
+ $X2=0.69 $Y2=4.287
r54 26 28 9.25733 $w=3.03e-07 $l=2.45e-07 $layer=LI1_cond $X=0.775 $Y=4.287
+ $X2=1.02 $Y2=4.287
r55 25 46 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=2.355 $Y=4.287
+ $X2=2.44 $Y2=4.287
r56 25 30 24.7492 $w=3.03e-07 $l=6.55e-07 $layer=LI1_cond $X=2.355 $Y=4.287
+ $X2=1.7 $Y2=4.287
r57 21 38 3.51065 $w=1.7e-07 $l=1.52e-07 $layer=LI1_cond $X=0.69 $Y=4.135
+ $X2=0.69 $Y2=4.287
r58 21 23 32.6203 $w=1.68e-07 $l=5e-07 $layer=LI1_cond $X=0.69 $Y=4.135 $X2=0.69
+ $Y2=3.635
r59 19 46 182 $w=1.7e-07 $l=2.43824e-07 $layer=licon1_NTAP_notbjt $count=1
+ $X=2.175 $Y=4.135 $X2=2.38 $Y2=4.22
r60 19 49 182 $w=1.7e-07 $l=2.43824e-07 $layer=licon1_NTAP_notbjt $count=1
+ $X=0.135 $Y=4.135 $X2=0.34 $Y2=4.22
r61 19 30 182 $w=1.7e-07 $l=2.43824e-07 $layer=licon1_NTAP_notbjt $count=1
+ $X=1.495 $Y=4.135 $X2=1.7 $Y2=4.22
r62 19 28 182 $w=1.7e-07 $l=2.43824e-07 $layer=licon1_NTAP_notbjt $count=1
+ $X=0.815 $Y=4.135 $X2=1.02 $Y2=4.22
r63 2 33 600 $w=1.7e-07 $l=1.09777e-06 $layer=licon1_PDIFF $count=1 $X=2.3
+ $Y=2.605 $X2=2.44 $Y2=3.635
r64 1 23 600 $w=1.7e-07 $l=1.09777e-06 $layer=licon1_PDIFF $count=1 $X=0.55
+ $Y=2.605 $X2=0.69 $Y2=3.635
.ends

.subckt PM_SKY130_OSU_SC_12T_LS__XOR2_L%A_27_115# 1 2 9 13 17 21 25 29 32 33 35
c76 32 0 6.74854e-20 $X=1.805 $Y=2.285
c77 25 0 1.52002e-20 $X=1.72 $Y=1.745
r78 33 41 48.4159 $w=2.7e-07 $l=1.65e-07 $layer=POLY_cond $X=1.805 $Y=2.285
+ $X2=1.805 $Y2=2.45
r79 32 33 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=1.805
+ $Y=2.285 $X2=1.805 $Y2=2.285
r80 30 32 29.6845 $w=1.68e-07 $l=4.55e-07 $layer=LI1_cond $X=1.805 $Y=1.83
+ $X2=1.805 $Y2=2.285
r81 29 37 48.4159 $w=2.7e-07 $l=1.65e-07 $layer=POLY_cond $X=0.845 $Y=1.745
+ $X2=0.845 $Y2=1.58
r82 28 29 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=0.845
+ $Y=1.745 $X2=0.845 $Y2=1.745
r83 26 35 1.34256 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=0.345 $Y=1.745
+ $X2=0.26 $Y2=1.745
r84 26 28 32.6203 $w=1.68e-07 $l=5e-07 $layer=LI1_cond $X=0.345 $Y=1.745
+ $X2=0.845 $Y2=1.745
r85 25 30 6.81649 $w=1.7e-07 $l=1.20208e-07 $layer=LI1_cond $X=1.72 $Y=1.745
+ $X2=1.805 $Y2=1.83
r86 25 28 57.0856 $w=1.68e-07 $l=8.75e-07 $layer=LI1_cond $X=1.72 $Y=1.745
+ $X2=0.845 $Y2=1.745
r87 21 23 44.3636 $w=1.68e-07 $l=6.8e-07 $layer=LI1_cond $X=0.26 $Y=2.955
+ $X2=0.26 $Y2=3.635
r88 19 35 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=0.26 $Y=1.83 $X2=0.26
+ $Y2=1.745
r89 19 21 73.3957 $w=1.68e-07 $l=1.125e-06 $layer=LI1_cond $X=0.26 $Y=1.83
+ $X2=0.26 $Y2=2.955
r90 15 35 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=0.26 $Y=1.66 $X2=0.26
+ $Y2=1.745
r91 15 17 59.0428 $w=1.68e-07 $l=9.05e-07 $layer=LI1_cond $X=0.26 $Y=1.66
+ $X2=0.26 $Y2=0.755
r92 13 41 402.521 $w=1.5e-07 $l=7.85e-07 $layer=POLY_cond $X=1.865 $Y=3.235
+ $X2=1.865 $Y2=2.45
r93 9 37 382.011 $w=1.5e-07 $l=7.45e-07 $layer=POLY_cond $X=0.905 $Y=0.835
+ $X2=0.905 $Y2=1.58
r94 2 23 400 $w=1.7e-07 $l=1.09071e-06 $layer=licon1_PDIFF $count=1 $X=0.135
+ $Y=2.605 $X2=0.26 $Y2=3.635
r95 2 21 400 $w=1.7e-07 $l=4.07738e-07 $layer=licon1_PDIFF $count=1 $X=0.135
+ $Y=2.605 $X2=0.26 $Y2=2.955
r96 1 17 182 $w=1.7e-07 $l=2.34307e-07 $layer=licon1_NDIFF $count=1 $X=0.135
+ $Y=0.575 $X2=0.26 $Y2=0.755
.ends

.subckt PM_SKY130_OSU_SC_12T_LS__XOR2_L%A 2 5 6 8 9 13 16 18 19 20 21 22 24 26
+ 27 33 36 37 40 42 45 46 51 52
c122 33 0 3.28297e-19 $X=2.235 $Y=1.74
r123 50 51 28.4203 $w=2.7e-07 $l=7.5e-08 $layer=POLY_cond $X=0.845 $Y=2.455
+ $X2=0.845 $Y2=2.53
r124 45 46 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.145 $Y=2.85
+ $X2=2.145 $Y2=2.85
r125 40 58 15.6578 $w=1.68e-07 $l=2.4e-07 $layer=LI1_cond $X=1.085 $Y=2.85
+ $X2=0.845 $Y2=2.85
r126 40 42 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.085 $Y=2.85
+ $X2=1.085 $Y2=2.85
r127 37 42 0.103375 $w=2.3e-07 $l=1.45e-07 $layer=MET1_cond $X=1.23 $Y=2.85
+ $X2=1.085 $Y2=2.85
r128 36 45 0.103375 $w=2.3e-07 $l=1.45e-07 $layer=MET1_cond $X=2 $Y=2.85
+ $X2=2.145 $Y2=2.85
r129 36 37 0.741419 $w=1.7e-07 $l=7.7e-07 $layer=MET1_cond $X=2 $Y=2.85 $X2=1.23
+ $Y2=2.85
r130 34 52 29.9935 $w=2.7e-07 $l=1.35e-07 $layer=POLY_cond $X=2.235 $Y=1.74
+ $X2=2.235 $Y2=1.605
r131 33 34 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=2.235
+ $Y=1.74 $X2=2.235 $Y2=1.74
r132 30 46 66.8717 $w=1.68e-07 $l=1.025e-06 $layer=LI1_cond $X=2.145 $Y=1.825
+ $X2=2.145 $Y2=2.85
r133 29 33 5.87166 $w=1.68e-07 $l=9e-08 $layer=LI1_cond $X=2.145 $Y=1.74
+ $X2=2.235 $Y2=1.74
r134 29 30 0.716491 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=2.145 $Y=1.74
+ $X2=2.145 $Y2=1.825
r135 27 50 37.7695 $w=2.7e-07 $l=1.7e-07 $layer=POLY_cond $X=0.845 $Y=2.285
+ $X2=0.845 $Y2=2.455
r136 26 27 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=0.845
+ $Y=2.285 $X2=0.845 $Y2=2.285
r137 24 58 0.716491 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=0.845 $Y=2.765
+ $X2=0.845 $Y2=2.85
r138 23 26 5.66838 $w=3.28e-07 $l=8.5e-08 $layer=LI1_cond $X=0.845 $Y=2.37
+ $X2=0.845 $Y2=2.285
r139 23 24 25.7701 $w=1.68e-07 $l=3.95e-07 $layer=LI1_cond $X=0.845 $Y=2.37
+ $X2=0.845 $Y2=2.765
r140 20 21 41.4471 $w=2e-07 $l=1.25e-07 $layer=POLY_cond $X=0.45 $Y=1.17
+ $X2=0.45 $Y2=1.295
r141 18 52 16.5046 $w=1.5e-07 $l=1.35e-07 $layer=POLY_cond $X=2.1 $Y=1.605
+ $X2=2.235 $Y2=1.605
r142 18 19 82.0426 $w=1.5e-07 $l=1.6e-07 $layer=POLY_cond $X=2.1 $Y=1.605
+ $X2=1.94 $Y2=1.605
r143 14 19 26.9307 $w=1.5e-07 $l=1.06066e-07 $layer=POLY_cond $X=1.865 $Y=1.53
+ $X2=1.94 $Y2=1.605
r144 14 16 356.372 $w=1.5e-07 $l=6.95e-07 $layer=POLY_cond $X=1.865 $Y=1.53
+ $X2=1.865 $Y2=0.835
r145 13 51 226.54 $w=1.5e-07 $l=7.05e-07 $layer=POLY_cond $X=0.905 $Y=3.235
+ $X2=0.905 $Y2=2.53
r146 10 22 5.30422 $w=1.5e-07 $l=1e-07 $layer=POLY_cond $X=0.55 $Y=2.455
+ $X2=0.45 $Y2=2.455
r147 9 50 16.5046 $w=1.5e-07 $l=1.35e-07 $layer=POLY_cond $X=0.71 $Y=2.455
+ $X2=0.845 $Y2=2.455
r148 9 10 82.0426 $w=1.5e-07 $l=1.6e-07 $layer=POLY_cond $X=0.71 $Y=2.455
+ $X2=0.55 $Y2=2.455
r149 6 22 20.4101 $w=1.5e-07 $l=8.66025e-08 $layer=POLY_cond $X=0.475 $Y=2.53
+ $X2=0.45 $Y2=2.455
r150 6 8 226.54 $w=1.5e-07 $l=7.05e-07 $layer=POLY_cond $X=0.475 $Y=2.53
+ $X2=0.475 $Y2=3.235
r151 5 20 107.647 $w=1.5e-07 $l=3.35e-07 $layer=POLY_cond $X=0.475 $Y=0.835
+ $X2=0.475 $Y2=1.17
r152 2 22 20.4101 $w=1.5e-07 $l=8.66025e-08 $layer=POLY_cond $X=0.425 $Y=2.38
+ $X2=0.45 $Y2=2.455
r153 2 21 556.351 $w=1.5e-07 $l=1.085e-06 $layer=POLY_cond $X=0.425 $Y=2.38
+ $X2=0.425 $Y2=1.295
.ends

.subckt PM_SKY130_OSU_SC_12T_LS__XOR2_L%A_238_89# 1 2 9 12 14 17 21 25 29 31
r64 25 27 44.3636 $w=1.68e-07 $l=6.8e-07 $layer=LI1_cond $X=2.87 $Y=2.955
+ $X2=2.87 $Y2=3.635
r65 23 29 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=2.87 $Y=1.455
+ $X2=2.87 $Y2=1.37
r66 23 25 97.861 $w=1.68e-07 $l=1.5e-06 $layer=LI1_cond $X=2.87 $Y=1.455
+ $X2=2.87 $Y2=2.955
r67 19 29 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=2.87 $Y=1.285
+ $X2=2.87 $Y2=1.37
r68 19 21 34.5775 $w=1.68e-07 $l=5.3e-07 $layer=LI1_cond $X=2.87 $Y=1.285
+ $X2=2.87 $Y2=0.755
r69 17 32 48.4159 $w=2.7e-07 $l=1.65e-07 $layer=POLY_cond $X=1.325 $Y=1.37
+ $X2=1.325 $Y2=1.535
r70 17 31 48.4159 $w=2.7e-07 $l=1.65e-07 $layer=POLY_cond $X=1.325 $Y=1.37
+ $X2=1.325 $Y2=1.205
r71 16 17 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=1.325
+ $Y=1.37 $X2=1.325 $Y2=1.37
r72 14 29 1.34256 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=2.785 $Y=1.37
+ $X2=2.87 $Y2=1.37
r73 14 16 95.2513 $w=1.68e-07 $l=1.46e-06 $layer=LI1_cond $X=2.785 $Y=1.37
+ $X2=1.325 $Y2=1.37
r74 12 32 871.702 $w=1.5e-07 $l=1.7e-06 $layer=POLY_cond $X=1.265 $Y=3.235
+ $X2=1.265 $Y2=1.535
r75 9 31 118.893 $w=1.5e-07 $l=3.7e-07 $layer=POLY_cond $X=1.265 $Y=0.835
+ $X2=1.265 $Y2=1.205
r76 2 27 400 $w=1.7e-07 $l=1.09777e-06 $layer=licon1_PDIFF $count=1 $X=2.73
+ $Y=2.605 $X2=2.87 $Y2=3.635
r77 2 25 400 $w=1.7e-07 $l=4.14126e-07 $layer=licon1_PDIFF $count=1 $X=2.73
+ $Y=2.605 $X2=2.87 $Y2=2.955
r78 1 21 182 $w=1.7e-07 $l=2.4e-07 $layer=licon1_NDIFF $count=1 $X=2.73 $Y=0.575
+ $X2=2.87 $Y2=0.755
.ends

.subckt PM_SKY130_OSU_SC_12T_LS__XOR2_L%B 1 3 4 6 7 8 9 11 13 14 16 17 19 25 27
c56 27 0 6.74854e-20 $X=2.655 $Y=2.325
c57 13 0 1.52002e-20 $X=2.655 $Y=2.12
c58 8 0 1.7901e-19 $X=2.3 $Y=1.245
c59 7 0 1.49287e-19 $X=2.58 $Y=1.245
r60 26 27 20.0833 $w=3e-07 $l=1.25e-07 $layer=POLY_cond $X=2.53 $Y=2.325
+ $X2=2.655 $Y2=2.325
r61 25 26 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=2.53
+ $Y=2.285 $X2=2.53 $Y2=2.285
r62 21 25 12.7219 $w=1.68e-07 $l=1.95e-07 $layer=LI1_cond $X=2.53 $Y=2.48
+ $X2=2.53 $Y2=2.285
r63 19 21 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.53 $Y=2.48
+ $X2=2.53 $Y2=2.48
r64 14 27 18.9685 $w=1.5e-07 $l=2.05e-07 $layer=POLY_cond $X=2.655 $Y=2.53
+ $X2=2.655 $Y2=2.325
r65 14 16 226.54 $w=1.5e-07 $l=7.05e-07 $layer=POLY_cond $X=2.655 $Y=2.53
+ $X2=2.655 $Y2=3.235
r66 13 27 18.9685 $w=1.5e-07 $l=2.05e-07 $layer=POLY_cond $X=2.655 $Y=2.12
+ $X2=2.655 $Y2=2.325
r67 12 17 20.4101 $w=1.5e-07 $l=7.5e-08 $layer=POLY_cond $X=2.655 $Y=1.32
+ $X2=2.655 $Y2=1.245
r68 12 13 410.213 $w=1.5e-07 $l=8e-07 $layer=POLY_cond $X=2.655 $Y=1.32
+ $X2=2.655 $Y2=2.12
r69 9 17 20.4101 $w=1.5e-07 $l=7.5e-08 $layer=POLY_cond $X=2.655 $Y=1.17
+ $X2=2.655 $Y2=1.245
r70 9 11 107.647 $w=1.5e-07 $l=3.35e-07 $layer=POLY_cond $X=2.655 $Y=1.17
+ $X2=2.655 $Y2=0.835
r71 7 17 5.30422 $w=1.5e-07 $l=7.5e-08 $layer=POLY_cond $X=2.58 $Y=1.245
+ $X2=2.655 $Y2=1.245
r72 7 8 143.574 $w=1.5e-07 $l=2.8e-07 $layer=POLY_cond $X=2.58 $Y=1.245 $X2=2.3
+ $Y2=1.245
r73 4 26 49.0033 $w=3e-07 $l=3.94398e-07 $layer=POLY_cond $X=2.225 $Y=2.53
+ $X2=2.53 $Y2=2.325
r74 4 6 226.54 $w=1.5e-07 $l=7.05e-07 $layer=POLY_cond $X=2.225 $Y=2.53
+ $X2=2.225 $Y2=3.235
r75 1 8 26.9307 $w=1.5e-07 $l=1.06066e-07 $layer=POLY_cond $X=2.225 $Y=1.17
+ $X2=2.3 $Y2=1.245
r76 1 3 107.647 $w=1.5e-07 $l=3.35e-07 $layer=POLY_cond $X=2.225 $Y=1.17
+ $X2=2.225 $Y2=0.835
.ends

.subckt PM_SKY130_OSU_SC_12T_LS__XOR2_L%Y 1 2 9 15 19 22 23 25 32
r59 28 32 10.3069 $w=2.9e-07 $l=2.45e-07 $layer=LI1_cond $X=1.565 $Y=1 $X2=1.565
+ $Y2=0.755
r60 27 28 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.565 $Y=1 $X2=1.565
+ $Y2=1
r61 25 27 0.0784753 $w=2.23e-07 $l=1.4e-07 $layer=MET1_cond $X=1.425 $Y=1
+ $X2=1.565 $Y2=1
r62 22 23 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.425 $Y=2.11
+ $X2=1.425 $Y2=2.11
r63 17 22 0.0804477 $w=2.9e-07 $l=1.15e-07 $layer=MET1_cond $X=1.425 $Y=1.995
+ $X2=1.425 $Y2=2.11
r64 17 19 0.0433297 $w=1.7e-07 $l=4.5e-08 $layer=MET1_cond $X=1.425 $Y=1.995
+ $X2=1.425 $Y2=1.95
r65 16 25 0.0238602 $w=1.7e-07 $l=1.15e-07 $layer=MET1_cond $X=1.425 $Y=1.115
+ $X2=1.425 $Y2=1
r66 16 19 0.804007 $w=1.7e-07 $l=8.35e-07 $layer=MET1_cond $X=1.425 $Y=1.115
+ $X2=1.425 $Y2=1.95
r67 14 23 40.123 $w=1.68e-07 $l=6.15e-07 $layer=LI1_cond $X=1.425 $Y=2.725
+ $X2=1.425 $Y2=2.11
r68 14 15 8.64139 $w=3.38e-07 $l=1.7e-07 $layer=LI1_cond $X=1.537 $Y=2.725
+ $X2=1.537 $Y2=2.895
r69 9 11 23.0489 $w=3.38e-07 $l=6.8e-07 $layer=LI1_cond $X=1.565 $Y=2.955
+ $X2=1.565 $Y2=3.635
r70 9 15 2.03372 $w=3.38e-07 $l=6e-08 $layer=LI1_cond $X=1.565 $Y=2.955
+ $X2=1.565 $Y2=2.895
r71 2 11 400 $w=1.7e-07 $l=1.13695e-06 $layer=licon1_PDIFF $count=1 $X=1.34
+ $Y=2.605 $X2=1.565 $Y2=3.635
r72 2 9 400 $w=1.7e-07 $l=4.48609e-07 $layer=licon1_PDIFF $count=1 $X=1.34
+ $Y=2.605 $X2=1.565 $Y2=2.955
r73 1 32 182 $w=1.7e-07 $l=3.01869e-07 $layer=licon1_NDIFF $count=1 $X=1.34
+ $Y=0.575 $X2=1.565 $Y2=0.755
.ends