blob: 9ae9180e12a76ef6377e34810571bed81befc913 [file] [log] [blame]
* File: sky130_osu_sc_12T_ls__buf_4.pex.spice
* Created: Mon Nov 16 21:31:15 2020
* Program "Calibre xRC"
* Version "v2020.2_35.23"
* Nominal Temperature: 27C
* Circuit Temperature: 27C
*
.subckt PM_SKY130_OSU_SC_12T_LS__BUF_4%GND 1 2 3 22 26 30 34 36 41 43 46
r61 41 43 0.633381 $w=3.05e-07 $l=1.36e-06 $layer=MET1_cond $X=0.34 $Y=0.152
+ $X2=1.7 $Y2=0.152
r62 32 36 7.55824 $w=3.05e-07 $l=1.90825e-07 $layer=LI1_cond $X=2.41 $Y=0.305
+ $X2=2.325 $Y2=0.152
r63 32 34 29.3583 $w=1.68e-07 $l=4.5e-07 $layer=LI1_cond $X=2.41 $Y=0.305
+ $X2=2.41 $Y2=0.755
r64 28 46 3.38889 $w=3.06e-07 $l=8.6487e-08 $layer=LI1_cond $X=1.55 $Y=0.155
+ $X2=1.635 $Y2=0.152
r65 28 30 29.3583 $w=1.68e-07 $l=4.5e-07 $layer=LI1_cond $X=1.55 $Y=0.305
+ $X2=1.55 $Y2=0.755
r66 24 26 29.3583 $w=1.68e-07 $l=4.5e-07 $layer=LI1_cond $X=0.69 $Y=0.305
+ $X2=0.69 $Y2=0.755
r67 22 28 21.1307 $w=3.06e-07 $l=5.3e-07 $layer=LI1_cond $X=1.02 $Y=0.155
+ $X2=1.55 $Y2=0.155
r68 22 24 13.1569 $w=3.06e-07 $l=3.3e-07 $layer=LI1_cond $X=1.02 $Y=0.155
+ $X2=0.69 $Y2=0.155
r69 22 24 13.9542 $w=3.06e-07 $l=3.5e-07 $layer=LI1_cond $X=0.34 $Y=0.155
+ $X2=0.69 $Y2=0.155
r70 22 36 23.6156 $w=3.03e-07 $l=6.25e-07 $layer=LI1_cond $X=1.7 $Y=0.152
+ $X2=2.325 $Y2=0.152
r71 22 46 2.45603 $w=3.03e-07 $l=6.5e-08 $layer=LI1_cond $X=1.7 $Y=0.152
+ $X2=1.635 $Y2=0.152
r72 22 43 6.2 $w=1.7e-07 $l=2.55e-07 $layer=mcon $count=1 $X=1.7 $Y=0.17 $X2=1.7
+ $Y2=0.17
r73 22 41 6.2 $w=1.7e-07 $l=2.55e-07 $layer=mcon $count=1 $X=0.34 $Y=0.17
+ $X2=0.34 $Y2=0.17
r74 3 34 182 $w=1.7e-07 $l=2.4e-07 $layer=licon1_NDIFF $count=1 $X=2.27 $Y=0.575
+ $X2=2.41 $Y2=0.755
r75 2 30 182 $w=1.7e-07 $l=2.4e-07 $layer=licon1_NDIFF $count=1 $X=1.41 $Y=0.575
+ $X2=1.55 $Y2=0.755
r76 1 26 182 $w=1.7e-07 $l=2.4e-07 $layer=licon1_NDIFF $count=1 $X=0.55 $Y=0.575
+ $X2=0.69 $Y2=0.755
.ends
.subckt PM_SKY130_OSU_SC_12T_LS__BUF_4%VDD 1 2 3 19 23 25 31 37 41 45 47 52
r44 52 59 6.2 $w=1.7e-07 $l=2.55e-07 $layer=mcon $count=1 $X=1.7 $Y=4.27 $X2=1.7
+ $Y2=4.27
r45 47 52 0.633381 $w=3.05e-07 $l=1.36e-06 $layer=MET1_cond $X=0.34 $Y=4.287
+ $X2=1.7 $Y2=4.287
r46 47 56 6.2 $w=1.7e-07 $l=2.55e-07 $layer=mcon $count=1 $X=0.34 $Y=4.27
+ $X2=0.34 $Y2=4.27
r47 45 59 23.6156 $w=3.03e-07 $l=6.25e-07 $layer=LI1_cond $X=2.325 $Y=4.287
+ $X2=1.7 $Y2=4.287
r48 43 59 2.45603 $w=3.03e-07 $l=6.5e-08 $layer=LI1_cond $X=1.635 $Y=4.287
+ $X2=1.7 $Y2=4.287
r49 43 44 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=1.635 $Y=4.287
+ $X2=1.55 $Y2=4.287
r50 41 56 10.013 $w=3.03e-07 $l=2.65e-07 $layer=LI1_cond $X=0.605 $Y=4.287
+ $X2=0.34 $Y2=4.287
r51 41 42 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=0.605 $Y=4.287
+ $X2=0.69 $Y2=4.287
r52 37 40 44.3636 $w=1.68e-07 $l=6.8e-07 $layer=LI1_cond $X=2.41 $Y=2.955
+ $X2=2.41 $Y2=3.635
r53 35 45 7.55824 $w=3.05e-07 $l=1.898e-07 $layer=LI1_cond $X=2.41 $Y=4.135
+ $X2=2.325 $Y2=4.287
r54 35 40 32.6203 $w=1.68e-07 $l=5e-07 $layer=LI1_cond $X=2.41 $Y=4.135 $X2=2.41
+ $Y2=3.635
r55 31 34 44.3636 $w=1.68e-07 $l=6.8e-07 $layer=LI1_cond $X=1.55 $Y=2.955
+ $X2=1.55 $Y2=3.635
r56 29 44 3.51065 $w=1.7e-07 $l=1.52e-07 $layer=LI1_cond $X=1.55 $Y=4.135
+ $X2=1.55 $Y2=4.287
r57 29 34 32.6203 $w=1.68e-07 $l=5e-07 $layer=LI1_cond $X=1.55 $Y=4.135 $X2=1.55
+ $Y2=3.635
r58 26 42 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=0.775 $Y=4.287
+ $X2=0.69 $Y2=4.287
r59 26 28 9.25733 $w=3.03e-07 $l=2.45e-07 $layer=LI1_cond $X=0.775 $Y=4.287
+ $X2=1.02 $Y2=4.287
r60 25 44 3.10218 $w=3.05e-07 $l=8.5e-08 $layer=LI1_cond $X=1.465 $Y=4.287
+ $X2=1.55 $Y2=4.287
r61 25 28 16.8143 $w=3.03e-07 $l=4.45e-07 $layer=LI1_cond $X=1.465 $Y=4.287
+ $X2=1.02 $Y2=4.287
r62 21 42 3.51065 $w=1.7e-07 $l=1.52e-07 $layer=LI1_cond $X=0.69 $Y=4.135
+ $X2=0.69 $Y2=4.287
r63 21 23 32.6203 $w=1.68e-07 $l=5e-07 $layer=LI1_cond $X=0.69 $Y=4.135 $X2=0.69
+ $Y2=3.635
r64 19 59 182 $w=1.7e-07 $l=2.43824e-07 $layer=licon1_NTAP_notbjt $count=1
+ $X=1.495 $Y=4.135 $X2=1.7 $Y2=4.22
r65 19 56 182 $w=1.7e-07 $l=2.43824e-07 $layer=licon1_NTAP_notbjt $count=1
+ $X=0.135 $Y=4.135 $X2=0.34 $Y2=4.22
r66 19 28 182 $w=1.7e-07 $l=2.43824e-07 $layer=licon1_NTAP_notbjt $count=1
+ $X=0.815 $Y=4.135 $X2=1.02 $Y2=4.22
r67 3 40 400 $w=1.7e-07 $l=1.09777e-06 $layer=licon1_PDIFF $count=1 $X=2.27
+ $Y=2.605 $X2=2.41 $Y2=3.635
r68 3 37 400 $w=1.7e-07 $l=4.14126e-07 $layer=licon1_PDIFF $count=1 $X=2.27
+ $Y=2.605 $X2=2.41 $Y2=2.955
r69 2 34 400 $w=1.7e-07 $l=1.09777e-06 $layer=licon1_PDIFF $count=1 $X=1.41
+ $Y=2.605 $X2=1.55 $Y2=3.635
r70 2 31 400 $w=1.7e-07 $l=4.14126e-07 $layer=licon1_PDIFF $count=1 $X=1.41
+ $Y=2.605 $X2=1.55 $Y2=2.955
r71 1 23 600 $w=1.7e-07 $l=1.09777e-06 $layer=licon1_PDIFF $count=1 $X=0.55
+ $Y=2.605 $X2=0.69 $Y2=3.635
.ends
.subckt PM_SKY130_OSU_SC_12T_LS__BUF_4%A 3 7 10 15 16
r39 16 18 46.7569 $w=3.7e-07 $l=1.65e-07 $layer=POLY_cond $X=0.585 $Y=2
+ $X2=0.585 $Y2=2.165
r40 16 17 46.7569 $w=3.7e-07 $l=1.65e-07 $layer=POLY_cond $X=0.585 $Y=2
+ $X2=0.585 $Y2=1.835
r41 15 16 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=0.635 $Y=2
+ $X2=0.635 $Y2=2
r42 12 15 55.4545 $w=1.68e-07 $l=8.5e-07 $layer=LI1_cond $X=0.635 $Y=2.85
+ $X2=0.635 $Y2=2
r43 10 12 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.635 $Y=2.85
+ $X2=0.635 $Y2=2.85
r44 7 18 548.66 $w=1.5e-07 $l=1.07e-06 $layer=POLY_cond $X=0.475 $Y=3.235
+ $X2=0.475 $Y2=2.165
r45 3 17 512.766 $w=1.5e-07 $l=1e-06 $layer=POLY_cond $X=0.475 $Y=0.835
+ $X2=0.475 $Y2=1.835
.ends
.subckt PM_SKY130_OSU_SC_12T_LS__BUF_4%A_27_115# 1 2 9 11 13 15 18 20 22 23 24
+ 25 26 29 31 33 34 36 40 42 44 49 50 53 57 61 63 66
c118 31 0 1.33323e-19 $X=1.765 $Y=2.53
c119 29 0 1.33323e-19 $X=1.765 $Y=0.835
c120 20 0 1.33323e-19 $X=1.335 $Y=2.53
c121 18 0 1.33323e-19 $X=1.335 $Y=0.835
r122 67 71 36.879 $w=2.81e-07 $l=2.15e-07 $layer=POLY_cond $X=0.965 $Y=1.455
+ $X2=1.18 $Y2=1.455
r123 67 69 10.2918 $w=2.81e-07 $l=6e-08 $layer=POLY_cond $X=0.965 $Y=1.455
+ $X2=0.905 $Y2=1.455
r124 66 67 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=0.965
+ $Y=1.455 $X2=0.965 $Y2=1.455
r125 62 63 1.34256 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=0.345 $Y=1.455
+ $X2=0.26 $Y2=1.455
r126 61 66 0.716491 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=0.88 $Y=1.455
+ $X2=0.965 $Y2=1.455
r127 61 62 34.9037 $w=1.68e-07 $l=5.35e-07 $layer=LI1_cond $X=0.88 $Y=1.455
+ $X2=0.345 $Y2=1.455
r128 57 59 44.3636 $w=1.68e-07 $l=6.8e-07 $layer=LI1_cond $X=0.26 $Y=2.955
+ $X2=0.26 $Y2=3.635
r129 55 63 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=0.26 $Y=1.54
+ $X2=0.26 $Y2=1.455
r130 55 57 92.3155 $w=1.68e-07 $l=1.415e-06 $layer=LI1_cond $X=0.26 $Y=1.54
+ $X2=0.26 $Y2=2.955
r131 51 63 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=0.26 $Y=1.37
+ $X2=0.26 $Y2=1.455
r132 51 53 40.123 $w=1.68e-07 $l=6.15e-07 $layer=LI1_cond $X=0.26 $Y=1.37
+ $X2=0.26 $Y2=0.755
r133 47 48 79.4787 $w=1.5e-07 $l=1.55e-07 $layer=POLY_cond $X=1.18 $Y=2.455
+ $X2=1.335 $Y2=2.455
r134 45 47 141.011 $w=1.5e-07 $l=2.75e-07 $layer=POLY_cond $X=0.905 $Y=2.455
+ $X2=1.18 $Y2=2.455
r135 42 44 226.54 $w=1.5e-07 $l=7.05e-07 $layer=POLY_cond $X=2.195 $Y=2.53
+ $X2=2.195 $Y2=3.235
r136 38 40 233.309 $w=1.5e-07 $l=4.55e-07 $layer=POLY_cond $X=2.195 $Y=1.29
+ $X2=2.195 $Y2=0.835
r137 37 50 20.4101 $w=1.5e-07 $l=7.5e-08 $layer=POLY_cond $X=1.84 $Y=2.455
+ $X2=1.765 $Y2=2.455
r138 36 42 26.9307 $w=1.5e-07 $l=1.06066e-07 $layer=POLY_cond $X=2.12 $Y=2.455
+ $X2=2.195 $Y2=2.53
r139 36 37 143.574 $w=1.5e-07 $l=2.8e-07 $layer=POLY_cond $X=2.12 $Y=2.455
+ $X2=1.84 $Y2=2.455
r140 35 49 20.4101 $w=1.5e-07 $l=7.5e-08 $layer=POLY_cond $X=1.84 $Y=1.365
+ $X2=1.765 $Y2=1.365
r141 34 38 26.9307 $w=1.5e-07 $l=1.06066e-07 $layer=POLY_cond $X=2.12 $Y=1.365
+ $X2=2.195 $Y2=1.29
r142 34 35 143.574 $w=1.5e-07 $l=2.8e-07 $layer=POLY_cond $X=2.12 $Y=1.365
+ $X2=1.84 $Y2=1.365
r143 31 50 5.30422 $w=1.5e-07 $l=7.5e-08 $layer=POLY_cond $X=1.765 $Y=2.53
+ $X2=1.765 $Y2=2.455
r144 31 33 226.54 $w=1.5e-07 $l=7.05e-07 $layer=POLY_cond $X=1.765 $Y=2.53
+ $X2=1.765 $Y2=3.235
r145 27 49 5.30422 $w=1.5e-07 $l=7.5e-08 $layer=POLY_cond $X=1.765 $Y=1.29
+ $X2=1.765 $Y2=1.365
r146 27 29 233.309 $w=1.5e-07 $l=4.55e-07 $layer=POLY_cond $X=1.765 $Y=1.29
+ $X2=1.765 $Y2=0.835
r147 26 48 38.4574 $w=1.5e-07 $l=7.5e-08 $layer=POLY_cond $X=1.41 $Y=2.455
+ $X2=1.335 $Y2=2.455
r148 25 50 20.4101 $w=1.5e-07 $l=7.5e-08 $layer=POLY_cond $X=1.69 $Y=2.455
+ $X2=1.765 $Y2=2.455
r149 25 26 143.574 $w=1.5e-07 $l=2.8e-07 $layer=POLY_cond $X=1.69 $Y=2.455
+ $X2=1.41 $Y2=2.455
r150 23 49 20.4101 $w=1.5e-07 $l=7.5e-08 $layer=POLY_cond $X=1.69 $Y=1.365
+ $X2=1.765 $Y2=1.365
r151 23 24 143.574 $w=1.5e-07 $l=2.8e-07 $layer=POLY_cond $X=1.69 $Y=1.365
+ $X2=1.41 $Y2=1.365
r152 20 48 2.83073 $w=1.5e-07 $l=7.5e-08 $layer=POLY_cond $X=1.335 $Y=2.53
+ $X2=1.335 $Y2=2.455
r153 20 22 226.54 $w=1.5e-07 $l=7.05e-07 $layer=POLY_cond $X=1.335 $Y=2.53
+ $X2=1.335 $Y2=3.235
r154 16 24 23.2782 $w=2.81e-07 $l=1.06066e-07 $layer=POLY_cond $X=1.335 $Y=1.29
+ $X2=1.41 $Y2=1.365
r155 16 71 26.5872 $w=2.81e-07 $l=2.29783e-07 $layer=POLY_cond $X=1.335 $Y=1.29
+ $X2=1.18 $Y2=1.455
r156 16 18 233.309 $w=1.5e-07 $l=4.55e-07 $layer=POLY_cond $X=1.335 $Y=1.29
+ $X2=1.335 $Y2=0.835
r157 15 47 2.83073 $w=1.5e-07 $l=7.5e-08 $layer=POLY_cond $X=1.18 $Y=2.38
+ $X2=1.18 $Y2=2.455
r158 14 71 17.4353 $w=1.5e-07 $l=1.65e-07 $layer=POLY_cond $X=1.18 $Y=1.62
+ $X2=1.18 $Y2=1.455
r159 14 15 389.702 $w=1.5e-07 $l=7.6e-07 $layer=POLY_cond $X=1.18 $Y=1.62
+ $X2=1.18 $Y2=2.38
r160 11 45 2.83073 $w=1.5e-07 $l=7.5e-08 $layer=POLY_cond $X=0.905 $Y=2.53
+ $X2=0.905 $Y2=2.455
r161 11 13 226.54 $w=1.5e-07 $l=7.05e-07 $layer=POLY_cond $X=0.905 $Y=2.53
+ $X2=0.905 $Y2=3.235
r162 7 69 17.4353 $w=1.5e-07 $l=1.65e-07 $layer=POLY_cond $X=0.905 $Y=1.29
+ $X2=0.905 $Y2=1.455
r163 7 9 233.309 $w=1.5e-07 $l=4.55e-07 $layer=POLY_cond $X=0.905 $Y=1.29
+ $X2=0.905 $Y2=0.835
r164 2 59 400 $w=1.7e-07 $l=1.09071e-06 $layer=licon1_PDIFF $count=1 $X=0.135
+ $Y=2.605 $X2=0.26 $Y2=3.635
r165 2 57 400 $w=1.7e-07 $l=4.07738e-07 $layer=licon1_PDIFF $count=1 $X=0.135
+ $Y=2.605 $X2=0.26 $Y2=2.955
r166 1 53 182 $w=1.7e-07 $l=2.34307e-07 $layer=licon1_NDIFF $count=1 $X=0.135
+ $Y=0.575 $X2=0.26 $Y2=0.755
.ends
.subckt PM_SKY130_OSU_SC_12T_LS__BUF_4%Y 1 2 3 4 13 14 16 18 20 22 23 29 35 37
+ 49
c84 23 0 1.33323e-19 $X=1.98 $Y=2.365
c85 22 0 1.33323e-19 $X=1.98 $Y=1.115
c86 14 0 1.33323e-19 $X=1.12 $Y=2.365
c87 13 0 1.33323e-19 $X=1.12 $Y=1.115
r88 56 58 44.3636 $w=1.68e-07 $l=6.8e-07 $layer=LI1_cond $X=1.98 $Y=2.955
+ $X2=1.98 $Y2=3.635
r89 44 46 44.3636 $w=1.68e-07 $l=6.8e-07 $layer=LI1_cond $X=1.12 $Y=2.955
+ $X2=1.12 $Y2=3.635
r90 35 56 30.9893 $w=1.68e-07 $l=4.75e-07 $layer=LI1_cond $X=1.98 $Y=2.48
+ $X2=1.98 $Y2=2.955
r91 34 35 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.98 $Y=2.48
+ $X2=1.98 $Y2=2.48
r92 32 49 15.984 $w=1.68e-07 $l=2.45e-07 $layer=LI1_cond $X=1.98 $Y=1 $X2=1.98
+ $Y2=0.755
r93 31 32 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.98 $Y=1 $X2=1.98
+ $Y2=1
r94 29 44 30.9893 $w=1.68e-07 $l=4.75e-07 $layer=LI1_cond $X=1.12 $Y=2.48
+ $X2=1.12 $Y2=2.955
r95 28 29 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.12 $Y=2.48
+ $X2=1.12 $Y2=2.48
r96 26 37 15.984 $w=1.68e-07 $l=2.45e-07 $layer=LI1_cond $X=1.12 $Y=1 $X2=1.12
+ $Y2=0.755
r97 25 26 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.12 $Y=1 $X2=1.12
+ $Y2=1
r98 23 34 0.0308913 $w=1.7e-07 $l=1.15e-07 $layer=MET1_cond $X=1.98 $Y=2.365
+ $X2=1.98 $Y2=2.48
r99 22 31 0.0308913 $w=1.7e-07 $l=1.15e-07 $layer=MET1_cond $X=1.98 $Y=1.115
+ $X2=1.98 $Y2=1
r100 22 23 1.2036 $w=1.7e-07 $l=1.25e-06 $layer=MET1_cond $X=1.98 $Y=1.115
+ $X2=1.98 $Y2=2.365
r101 21 28 0.0389498 $w=1.7e-07 $l=1.45e-07 $layer=MET1_cond $X=1.265 $Y=2.48
+ $X2=1.12 $Y2=2.48
r102 20 34 0.0389498 $w=1.7e-07 $l=1.45e-07 $layer=MET1_cond $X=1.835 $Y=2.48
+ $X2=1.98 $Y2=2.48
r103 20 21 0.548843 $w=1.7e-07 $l=5.7e-07 $layer=MET1_cond $X=1.835 $Y=2.48
+ $X2=1.265 $Y2=2.48
r104 19 25 0.0389498 $w=1.7e-07 $l=1.45e-07 $layer=MET1_cond $X=1.265 $Y=1
+ $X2=1.12 $Y2=1
r105 18 31 0.0389498 $w=1.7e-07 $l=1.45e-07 $layer=MET1_cond $X=1.835 $Y=1
+ $X2=1.98 $Y2=1
r106 18 19 0.548843 $w=1.7e-07 $l=5.7e-07 $layer=MET1_cond $X=1.835 $Y=1
+ $X2=1.265 $Y2=1
r107 14 28 0.0308913 $w=1.7e-07 $l=1.15e-07 $layer=MET1_cond $X=1.12 $Y=2.365
+ $X2=1.12 $Y2=2.48
r108 14 16 0.553657 $w=1.7e-07 $l=5.75e-07 $layer=MET1_cond $X=1.12 $Y=2.365
+ $X2=1.12 $Y2=1.79
r109 13 25 0.0308913 $w=1.7e-07 $l=1.15e-07 $layer=MET1_cond $X=1.12 $Y=1.115
+ $X2=1.12 $Y2=1
r110 13 16 0.649946 $w=1.7e-07 $l=6.75e-07 $layer=MET1_cond $X=1.12 $Y=1.115
+ $X2=1.12 $Y2=1.79
r111 4 58 400 $w=1.7e-07 $l=1.09777e-06 $layer=licon1_PDIFF $count=1 $X=1.84
+ $Y=2.605 $X2=1.98 $Y2=3.635
r112 4 56 400 $w=1.7e-07 $l=4.14126e-07 $layer=licon1_PDIFF $count=1 $X=1.84
+ $Y=2.605 $X2=1.98 $Y2=2.955
r113 3 46 400 $w=1.7e-07 $l=1.09777e-06 $layer=licon1_PDIFF $count=1 $X=0.98
+ $Y=2.605 $X2=1.12 $Y2=3.635
r114 3 44 400 $w=1.7e-07 $l=4.14126e-07 $layer=licon1_PDIFF $count=1 $X=0.98
+ $Y=2.605 $X2=1.12 $Y2=2.955
r115 2 49 182 $w=1.7e-07 $l=2.4e-07 $layer=licon1_NDIFF $count=1 $X=1.84
+ $Y=0.575 $X2=1.98 $Y2=0.755
r116 1 37 182 $w=1.7e-07 $l=2.4e-07 $layer=licon1_NDIFF $count=1 $X=0.98
+ $Y=0.575 $X2=1.12 $Y2=0.755
.ends