#-------------------------------------------------------
# SkyWater
#-------------------------------------------------------
# Technology LEF file for
# Process: S8 130nm / 180nm hybrid
# Metal stack option: s8phirs_10r
# Standard cell libraries: Standard (scs8hs, scs8ms, scs8ls, scs8lp)
# Reference: S8_TDR_2018-03-30.pdf
# Date: March 20, 2019
#------------------------------------------------------

VERSION 5.7 ;
BUSBITCHARS "[]" ;
DIVIDERCHAR "/" ;

UNITS
    DATABASE MICRONS 200  ;
    CAPACITANCE PICOFARADS 1 ;
    CURRENT MILLIAMPS 1 ;
    RESISTANCE OHMS 1 ;
END UNITS

MANUFACTURINGGRID 0.005 ;
CLEARANCEMEASURE EUCLIDEAN ;

SITE s8_osu130
  CLASS CORE ;
  SIZE 0.11 BY 7.2 ;
END s8_osu130

LAYER diff
    TYPE MASTERSLICE ;
END diff

LAYER poly
    TYPE MASTERSLICE ;
END poly

LAYER licon1
    TYPE CUT ;
END licon1

LAYER li1
    TYPE ROUTING ;
    DIRECTION HORIZONTAL ;

    PITCH 0.40 ;
    OFFSET 0 ;

    WIDTH    0.170 ;                    # LI 1
    SPACING  0.170 ;                    # LI 2
    AREA 0.0561 ;                       # LI 6
    THICKNESS 0.10 ; 

    RESISTANCE RPERSQ 12.8 ;
END li1

LAYER mcon
  TYPE CUT ;
  WIDTH   0.17 ;		# Mcon 1
  SPACING 0.17 ;		# Mcon 2
  ENCLOSURE BELOW 0.0 0.0 ;	# Mcon 4
  ENCLOSURE ABOVE 0.030 0.060 ; # Met1 4 / Met1 5
END mcon

LAYER met1
    TYPE ROUTING ;
    DIRECTION HORIZONTAL ;

    PITCH 0.40 ;
    OFFSET 0 ;

    WIDTH    0.140 ;                    # Met1 1
    SPACING  0.140 ;                    # Met1 2
    SPACING  0.280 RANGE 3.001 100 ;	# Met1 3b
    AREA 0.083 ;                        # Met1 6
    THICKNESS 0.36 ; 

    ANTENNAMODEL OXIDE1 ;
    ANTENNACUMAREARATIO 2200 ;
    ANTENNAAREARATIO 400 ;
    ANTENNADIFFAREARATIO 400 ;
    ANTENNAGATEPLUSDIFF 0.35 ;

    MAXIMUMDENSITY 70.0 ;
    DENSITYCHECKWINDOW 700.0 700.0 ;
    DENSITYCHECKSTEP 70.0 ;

    RESISTANCE RPERSQ 0.125 ;
END met1

LAYER via1
  TYPE CUT ;
  WIDTH   0.15 ;		# Via 1a
  SPACING 0.17  ;		# Via 2
  ENCLOSURE BELOW 0.055 0.085 ; # Via 4a / Via 5a
  ENCLOSURE ABOVE 0.055 0.085 ; # Met2 4 / Met2 5
END via1

LAYER met2
    TYPE ROUTING ;
    DIRECTION VERTICAL ;

    PITCH  0.48 ;
    OFFSET 0.24 ;

    WIDTH    0.140 ;                    # Met2 1
    SPACING  0.140 ;                    # Met2 2
    SPACING  0.280 RANGE 3.001 100 ;	# Met2 3b
    AREA 0.0676 ;                       # Met2 6
    THICKNESS 0.36 ; 

    ANTENNAMODEL OXIDE1 ;
    ANTENNACUMAREARATIO 2200 ;
    ANTENNAAREARATIO 400 ;
    ANTENNADIFFAREARATIO 400 ;
    ANTENNAGATEPLUSDIFF 0.35 ;

    MAXIMUMDENSITY 70.0 ;
    DENSITYCHECKWINDOW 700.0 700.0 ;
    DENSITYCHECKSTEP 70.0 ;
    RESISTANCE RPERSQ 0.125 ;
END met2

LAYER via2
  TYPE CUT ;
  WIDTH   0.20 ;		# Via2 1
  SPACING 0.20 ;		# Via2 2
  ENCLOSURE BELOW 0.040 0.085 ;	# Via2 4
  ENCLOSURE ABOVE 0.065 0.065 ;	# Met3 4

END via2

LAYER met3
    TYPE ROUTING ;
    DIRECTION HORIZONTAL ;

    PITCH  0.74 ;
    OFFSET 0.37 ;

    WIDTH    0.300 ;            # Met3 1
    SPACING  0.300 ;		# Met3 2
    AREA     0.240 ;            # Met3 6
    THICKNESS 0.845 ;

    ANTENNAMODEL OXIDE1 ;
    ANTENNACUMAREARATIO 2200 ;
    ANTENNAAREARATIO 400 ;
    ANTENNADIFFAREARATIO 400 ;
    ANTENNAGATEPLUSDIFF 0.8 ;

    MAXIMUMDENSITY 70.0 ;
    DENSITYCHECKWINDOW 700.0 700.0 ;
    DENSITYCHECKSTEP 70.0 ;
    RESISTANCE RPERSQ 0.047 ;
END met3

LAYER via3
  TYPE CUT ;

  WIDTH   0.20 ;		# Via3 1
  SPACING 0.20 ;		# Via3 2
  ENCLOSURE BELOW 0.060 0.090 ;	# Via3 4 / Via3 5
  ENCLOSURE ABOVE 0.065 0.065 ;	# Met4 3
END via3

LAYER met4
    TYPE ROUTING ;
    DIRECTION VERTICAL ;

    PITCH  0.96 ;
    OFFSET 0.48 ;

    WIDTH    0.300 ;            # Met4 1
    SPACING  0.300 ;		# Met4 2
    AREA     0.240 ;            # Met4 4a

    THICKNESS 0.845 ;

    ANTENNAMODEL OXIDE1 ;
    ANTENNACUMAREARATIO 2200 ;
    ANTENNAAREARATIO 400 ;
    ANTENNADIFFAREARATIO 400 ;
    ANTENNAGATEPLUSDIFF 0.8 ;

    MAXIMUMDENSITY 70.0 ;
    DENSITYCHECKWINDOW 700.0 700.0 ;
    DENSITYCHECKSTEP 70.0 ;
    RESISTANCE RPERSQ 0.047 ;
END met4

LAYER via4
  TYPE CUT ;

  WIDTH   0.80 ;		# Via4 1
  SPACING 0.80 ;		# Via4 2
  ENCLOSURE BELOW 0.190 0.190 ;	# Via4 4
  ENCLOSURE ABOVE 0.310 0.310 ;	# Met5 3

END via4

LAYER met5
    TYPE ROUTING ;
    DIRECTION HORIZONTAL ;

    PITCH  3.7 ;
    OFFSET 1.85 ; 

    WIDTH    1.600 ;       # Met5 1
    SPACING  1.600 ;       # Met5 2
    AREA     4.000 ;       # Met5 4

    THICKNESS 1.26 ;

    ANTENNAMODEL OXIDE1 ;
    ANTENNACUMAREARATIO 2200 ;
    ANTENNAAREARATIO 400 ;
    ANTENNADIFFAREARATIO 400 ;
    ANTENNAGATEPLUSDIFF 1.2 ;

    RESISTANCE RPERSQ 0.0285 ;
END met5

LAYER PR_bndry
TYPE MASTERSLICE ;
END PR_bndry

#---------------------------------
# Via Definitions
#---------------------------------

#---------------------------------
# MCON
#---------------------------------

 VIA MCON_HH   DEFAULT
 LAYER mcon ;
 RECT -0.085 -0.085 0.085 0.085 ;
 LAYER li1 ;
 RECT -0.165 -0.085 0.165 0.085 ;
 LAYER met1 ;
 RECT -0.16 -0.13 0.16 0.13 ;
 END MCON_HH
 
 VIA MCON_HV   DEFAULT
 LAYER mcon ;
 RECT -0.085 -0.085 0.085 0.085 ;
 LAYER li1 ;
 RECT -0.165 -0.085 0.165 0.085 ;
 LAYER met1 ;
 RECT -0.13 -0.16 0.13 0.16 ;
 END MCON_HV
 
 VIA MCON_VH   DEFAULT
 LAYER mcon ;
 RECT -0.085 -0.085 0.085 0.085 ;
 LAYER li1 ;
 RECT -0.085 -0.165 0.085 0.165 ;
 LAYER met1 ;
 RECT -0.16 -0.13 0.16 0.13 ;
 END MCON_VH
 
 VIA MCON_VV   DEFAULT
 LAYER mcon ;
 RECT -0.085 -0.085 0.085 0.085 ;
 LAYER li1 ;
 RECT -0.085 -0.165 0.085 0.165 ;
 LAYER met1 ;
 RECT -0.13 -0.16 0.13 0.16 ;
 END MCON_VV

VIARULE MCON_GEN GENERATE
 LAYER li1 ;
 ENCLOSURE 0.000 0.080 ;
 LAYER met1 ;
 ENCLOSURE 0.030 0.060 ;
 LAYER mcon ;
 RECT -0.085 -0.085 0.085 0.085 ;
 SPACING 0.360 BY 0.360 ;
END MCON_GEN

#---------------------------------
# VIA1
#---------------------------------

 VIA VIA1_HH   DEFAULT
 LAYER via1 ;
 RECT -0.075 -0.075 0.075 0.075 ;
 LAYER met1 ;
 RECT -0.16 -0.13 0.16 0.13 ;
 LAYER met2 ;
 RECT -0.16 -0.13 0.16 0.13 ;
 END VIA1_HH  
 
 VIA VIA1_HV   DEFAULT
 LAYER via1 ;
 RECT -0.075 -0.075 0.075 0.075 ;
 LAYER met1 ;
 RECT -0.16 -0.13 0.16 0.13 ;
 LAYER met2 ;
 RECT -0.13 -0.16 0.13 0.16 ;
 END VIA1_HV  
 
 VIA VIA1_VH   DEFAULT
 LAYER via1 ;
 RECT -0.075 -0.075 0.075 0.075 ;
 LAYER met1 ;
 RECT -0.13 -0.16 0.13 0.16 ;
 LAYER met2 ;
 RECT -0.16 -0.13 0.16 0.13 ;
 END VIA1_VH  
 
 VIA VIA1_VV   DEFAULT
 LAYER via1 ;
 RECT -0.075 -0.075 0.075 0.075 ;
 LAYER met1 ;
 RECT -0.13 -0.16 0.13 0.16 ;
 LAYER met2 ;
 RECT -0.13 -0.16 0.13 0.16 ;
 END VIA1_VV  
 
VIARULE VIA1_GEN GENERATE
 LAYER met1 ;
 ENCLOSURE 0.055 0.085 ;
 LAYER met2 ;
 ENCLOSURE 0.055 0.085 ;
 LAYER via1 ;
 RECT -0.075 -0.075 0.075 0.075 ;
 SPACING 0.320 BY 0.320 ;
END VIA1_GEN

#---------------------------------
# VIA2
#---------------------------------

 VIA VIA2_H   DEFAULT
 LAYER via2 ;
 RECT -0.1 -0.1 0.1 0.1 ;
 LAYER met2 ;
 RECT -0.185 -0.14 0.185 0.14 ;
 LAYER met3 ;
 RECT -0.165 -0.165 0.165 0.165 ;
 END VIA2_H  
 
 VIA VIA2_V   DEFAULT
 LAYER via2 ;
 RECT -0.1 -0.1 0.1 0.1 ;
 LAYER met2 ;
 RECT -0.14 -0.185 0.14 0.185 ;
 LAYER met3 ;
 RECT -0.165 -0.165 0.165 0.165 ;
 END VIA2_V  
 
VIARULE VIA2_GEN GENERATE
 LAYER met2 ;
 ENCLOSURE 0.040 0.085 ;
 LAYER met3 ;
 ENCLOSURE 0.065 0.065 ;
 LAYER via2 ;
 RECT -0.1 -0.1 0.1 0.1 ;
 SPACING 0.40 BY 0.40 ;
END VIA2_GEN

#---------------------------------
# VIA3
#---------------------------------

 VIA VIA3_H   DEFAULT
 LAYER via3 ;
 RECT -0.1 -0.1 0.1 0.1 ;
 LAYER met3 ;
 RECT -0.19 -0.16 0.19 0.16 ;
 LAYER met4 ;
 RECT -0.165 -0.165 0.165 0.165 ;
 END VIA3_H  
 
 VIA VIA3_V   DEFAULT
 LAYER via3 ;
 RECT -0.1 -0.1 0.1 0.1 ;
 LAYER met3 ;
 RECT -0.16 -0.19 0.16 0.19 ;
 LAYER met4 ;
 RECT -0.165 -0.165 0.165 0.165 ;
 END VIA3_V  
 
VIARULE VIA3_GEN GENERATE
 LAYER met3 ;
 ENCLOSURE 0.06 0.09 ;
 LAYER met4 ;
 ENCLOSURE 0.065 0.065 ;
 LAYER via3 ;
 RECT -0.1 -0.1 0.1 0.1 ;
 SPACING 0.40 BY 0.40 ;
END VIA3_GEN

#---------------------------------
# VIA4
#---------------------------------

 VIA VIA4_O   DEFAULT
 LAYER via4 ;
 RECT -0.4 -0.4 0.4 0.4 ;
 LAYER met4 ;
 RECT -0.59 -0.59 0.59 0.59 ;
 LAYER met5 ;
 RECT -0.71 -0.71 0.71 0.71 ;
 END VIA4_O  
 
VIARULE VIA4_GEN GENERATE
 LAYER met4 ;
 ENCLOSURE 0.190 0.190 ;
 LAYER met5 ;
 ENCLOSURE 0.310 0.310 ;
 LAYER via4 ;
 RECT -0.4 -0.4 0.4 0.4 ;
 SPACING 1.60 BY 1.60 ;
END VIA4_GEN

END LIBRARY