* File: sky130_fd_sc_ms__clkdlyinv3sd1_1.pex.spice
* Created: Wed Sep  2 12:00:47 2020
* Program "Calibre xRC"
* Version "v2018.4_34.26"
* Nominal Temperature: 27C
* Circuit Temperature: 27C
* 
.subckt PM_SKY130_FD_SC_MS__CLKDLYINV3SD1_1%A 3 7 9 10 14
r34 14 17 40.6903 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=0.57 $Y=1.355
+ $X2=0.57 $Y2=1.52
r35 14 16 46.2115 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=0.57 $Y=1.355
+ $X2=0.57 $Y2=1.19
r36 14 15 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=0.57
+ $Y=1.355 $X2=0.57 $Y2=1.355
r37 10 15 5.88547 $w=6.28e-07 $l=3.1e-07 $layer=LI1_cond $X=0.415 $Y=1.665
+ $X2=0.415 $Y2=1.355
r38 9 15 1.13912 $w=6.28e-07 $l=6e-08 $layer=LI1_cond $X=0.415 $Y=1.295
+ $X2=0.415 $Y2=1.355
r39 7 17 342.065 $w=1.8e-07 $l=8.8e-07 $layer=POLY_cond $X=0.495 $Y=2.4
+ $X2=0.495 $Y2=1.52
r40 3 16 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=0.48 $Y=0.58 $X2=0.48
+ $Y2=1.19
.ends

.subckt PM_SKY130_FD_SC_MS__CLKDLYINV3SD1_1%A_28_74# 1 2 9 13 17 19 21 23 25 26
+ 30 37
r60 36 37 0.874306 $w=3.3e-07 $l=5e-09 $layer=POLY_cond $X=1.365 $Y=1.295
+ $X2=1.37 $Y2=1.295
r61 31 36 39.3438 $w=3.3e-07 $l=2.25e-07 $layer=POLY_cond $X=1.14 $Y=1.295
+ $X2=1.365 $Y2=1.295
r62 30 31 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=1.14
+ $Y=1.295 $X2=1.14 $Y2=1.295
r63 28 30 25.668 $w=3.28e-07 $l=7.35e-07 $layer=LI1_cond $X=1.14 $Y=2.03
+ $X2=1.14 $Y2=1.295
r64 27 30 9.60369 $w=3.28e-07 $l=2.75e-07 $layer=LI1_cond $X=1.14 $Y=1.02
+ $X2=1.14 $Y2=1.295
r65 25 27 7.36389 $w=2e-07 $l=2.09105e-07 $layer=LI1_cond $X=0.975 $Y=0.92
+ $X2=1.14 $Y2=1.02
r66 25 26 31.3318 $w=1.98e-07 $l=5.65e-07 $layer=LI1_cond $X=0.975 $Y=0.92
+ $X2=0.41 $Y2=0.92
r67 24 33 4.75367 $w=1.75e-07 $l=1.53e-07 $layer=LI1_cond $X=0.4 $Y=2.117
+ $X2=0.247 $Y2=2.117
r68 23 28 7.68689 $w=1.75e-07 $l=2.03912e-07 $layer=LI1_cond $X=0.975 $Y=2.117
+ $X2=1.14 $Y2=2.03
r69 23 24 36.4416 $w=1.73e-07 $l=5.75e-07 $layer=LI1_cond $X=0.975 $Y=2.117
+ $X2=0.4 $Y2=2.117
r70 19 33 2.73414 $w=3.05e-07 $l=8.8e-08 $layer=LI1_cond $X=0.247 $Y=2.205
+ $X2=0.247 $Y2=2.117
r71 19 21 13.4137 $w=3.03e-07 $l=3.55e-07 $layer=LI1_cond $X=0.247 $Y=2.205
+ $X2=0.247 $Y2=2.56
r72 15 26 7.26812 $w=2e-07 $l=2.01901e-07 $layer=LI1_cond $X=0.252 $Y=0.82
+ $X2=0.41 $Y2=0.92
r73 15 17 8.78052 $w=3.13e-07 $l=2.4e-07 $layer=LI1_cond $X=0.252 $Y=0.82
+ $X2=0.252 $Y2=0.58
r74 11 37 21.2229 $w=1.5e-07 $l=1.65e-07 $layer=POLY_cond $X=1.37 $Y=1.46
+ $X2=1.37 $Y2=1.295
r75 11 13 512.766 $w=1.5e-07 $l=1e-06 $layer=POLY_cond $X=1.37 $Y=1.46 $X2=1.37
+ $Y2=2.46
r76 7 36 21.2229 $w=1.5e-07 $l=1.65e-07 $layer=POLY_cond $X=1.365 $Y=1.13
+ $X2=1.365 $Y2=1.295
r77 7 9 282.021 $w=1.5e-07 $l=5.5e-07 $layer=POLY_cond $X=1.365 $Y=1.13
+ $X2=1.365 $Y2=0.58
r78 2 33 600 $w=1.7e-07 $l=3.31662e-07 $layer=licon1_PDIFF $count=1 $X=0.14
+ $Y=1.84 $X2=0.265 $Y2=2.115
r79 2 21 600 $w=1.7e-07 $l=7.8e-07 $layer=licon1_PDIFF $count=1 $X=0.14 $Y=1.84
+ $X2=0.265 $Y2=2.56
r80 1 17 182 $w=1.7e-07 $l=2.65236e-07 $layer=licon1_NDIFF $count=1 $X=0.14
+ $Y=0.37 $X2=0.265 $Y2=0.58
.ends

.subckt PM_SKY130_FD_SC_MS__CLKDLYINV3SD1_1%A_288_74# 1 2 9 13 17 22 25 26 29 32
r44 29 30 6.17723 $w=3.28e-07 $l=1.65e-07 $layer=LI1_cond $X=1.58 $Y=2.815
+ $X2=1.58 $Y2=2.65
r45 26 35 40.6903 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=2.275 $Y=1.46
+ $X2=2.275 $Y2=1.625
r46 26 34 46.2115 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=2.275 $Y=1.46
+ $X2=2.275 $Y2=1.295
r47 25 26 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=2.275
+ $Y=1.46 $X2=2.275 $Y2=1.46
r48 23 32 0.466467 $w=3.3e-07 $l=1.35e-07 $layer=LI1_cond $X=1.745 $Y=1.46
+ $X2=1.61 $Y2=1.46
r49 23 25 18.5089 $w=3.28e-07 $l=5.3e-07 $layer=LI1_cond $X=1.745 $Y=1.46
+ $X2=2.275 $Y2=1.46
r50 22 30 23.2623 $w=2.68e-07 $l=5.45e-07 $layer=LI1_cond $X=1.61 $Y=2.105
+ $X2=1.61 $Y2=2.65
r51 19 32 6.31733 $w=2.57e-07 $l=1.65e-07 $layer=LI1_cond $X=1.61 $Y=1.625
+ $X2=1.61 $Y2=1.46
r52 19 22 20.4879 $w=2.68e-07 $l=4.8e-07 $layer=LI1_cond $X=1.61 $Y=1.625
+ $X2=1.61 $Y2=2.105
r53 15 32 6.31733 $w=2.57e-07 $l=1.71377e-07 $layer=LI1_cond $X=1.597 $Y=1.295
+ $X2=1.61 $Y2=1.46
r54 15 17 33.6325 $w=2.43e-07 $l=7.15e-07 $layer=LI1_cond $X=1.597 $Y=1.295
+ $X2=1.597 $Y2=0.58
r55 13 34 366.628 $w=1.5e-07 $l=7.15e-07 $layer=POLY_cond $X=2.315 $Y=0.58
+ $X2=2.315 $Y2=1.295
r56 9 35 301.25 $w=1.8e-07 $l=7.75e-07 $layer=POLY_cond $X=2.325 $Y=2.4
+ $X2=2.325 $Y2=1.625
r57 2 29 600 $w=1.7e-07 $l=9.20027e-07 $layer=licon1_PDIFF $count=1 $X=1.445
+ $Y=1.96 $X2=1.58 $Y2=2.815
r58 2 22 300 $w=1.7e-07 $l=2.01494e-07 $layer=licon1_PDIFF $count=2 $X=1.445
+ $Y=1.96 $X2=1.58 $Y2=2.105
r59 1 17 182 $w=1.7e-07 $l=2.71109e-07 $layer=licon1_NDIFF $count=1 $X=1.44
+ $Y=0.37 $X2=1.58 $Y2=0.58
.ends

.subckt PM_SKY130_FD_SC_MS__CLKDLYINV3SD1_1%VPWR 1 2 9 13 17 19 24 31 32 35 38
+ 46
r34 39 46 0.0668963 $w=4.9e-07 $l=2.4e-07 $layer=MET1_cond $X=2.16 $Y=3.33
+ $X2=1.92 $Y2=3.33
r35 38 39 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.16 $Y=3.33
+ $X2=2.16 $Y2=3.33
r36 35 36 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.72 $Y=3.33
+ $X2=0.72 $Y2=3.33
r37 32 39 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=2.64 $Y=3.33
+ $X2=2.16 $Y2=3.33
r38 31 32 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.64 $Y=3.33
+ $X2=2.64 $Y2=3.33
r39 29 38 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.265 $Y=3.33
+ $X2=2.1 $Y2=3.33
r40 29 31 24.4652 $w=1.68e-07 $l=3.75e-07 $layer=LI1_cond $X=2.265 $Y=3.33
+ $X2=2.64 $Y2=3.33
r41 28 46 0.0668963 $w=4.9e-07 $l=2.4e-07 $layer=MET1_cond $X=1.68 $Y=3.33
+ $X2=1.92 $Y2=3.33
r42 27 28 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=1.68 $Y=3.33
+ $X2=1.68 $Y2=3.33
r43 25 35 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=0.905 $Y=3.33
+ $X2=0.74 $Y2=3.33
r44 25 27 50.5615 $w=1.68e-07 $l=7.75e-07 $layer=LI1_cond $X=0.905 $Y=3.33
+ $X2=1.68 $Y2=3.33
r45 24 38 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=1.935 $Y=3.33
+ $X2=2.1 $Y2=3.33
r46 24 27 16.6364 $w=1.68e-07 $l=2.55e-07 $layer=LI1_cond $X=1.935 $Y=3.33
+ $X2=1.68 $Y2=3.33
r47 22 36 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.24 $Y=3.33
+ $X2=0.72 $Y2=3.33
r48 21 22 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.24 $Y=3.33
+ $X2=0.24 $Y2=3.33
r49 19 35 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=0.575 $Y=3.33
+ $X2=0.74 $Y2=3.33
r50 19 21 21.8556 $w=1.68e-07 $l=3.35e-07 $layer=LI1_cond $X=0.575 $Y=3.33
+ $X2=0.24 $Y2=3.33
r51 17 28 0.0668963 $w=4.9e-07 $l=2.4e-07 $layer=MET1_cond $X=1.44 $Y=3.33
+ $X2=1.68 $Y2=3.33
r52 17 36 0.200689 $w=4.9e-07 $l=7.2e-07 $layer=MET1_cond $X=1.44 $Y=3.33
+ $X2=0.72 $Y2=3.33
r53 13 16 28.8111 $w=3.28e-07 $l=8.25e-07 $layer=LI1_cond $X=2.1 $Y=1.985
+ $X2=2.1 $Y2=2.81
r54 11 38 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=2.1 $Y=3.245 $X2=2.1
+ $Y2=3.33
r55 11 16 15.1913 $w=3.28e-07 $l=4.35e-07 $layer=LI1_cond $X=2.1 $Y=3.245
+ $X2=2.1 $Y2=2.81
r56 7 35 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=0.74 $Y=3.245 $X2=0.74
+ $Y2=3.33
r57 7 9 27.2396 $w=3.28e-07 $l=7.8e-07 $layer=LI1_cond $X=0.74 $Y=3.245 $X2=0.74
+ $Y2=2.465
r58 2 16 400 $w=1.7e-07 $l=1.03061e-06 $layer=licon1_PDIFF $count=1 $X=1.975
+ $Y=1.84 $X2=2.1 $Y2=2.81
r59 2 13 400 $w=1.7e-07 $l=1.97864e-07 $layer=licon1_PDIFF $count=1 $X=1.975
+ $Y=1.84 $X2=2.1 $Y2=1.985
r60 1 9 300 $w=1.7e-07 $l=6.98212e-07 $layer=licon1_PDIFF $count=2 $X=0.585
+ $Y=1.84 $X2=0.74 $Y2=2.465
.ends

.subckt PM_SKY130_FD_SC_MS__CLKDLYINV3SD1_1%Y 1 2 7 8 9 10 11 12 13 32
r17 44 45 6.10729 $w=3.58e-07 $l=1.65e-07 $layer=LI1_cond $X=2.615 $Y=0.59
+ $X2=2.615 $Y2=0.755
r18 30 32 1.28049 $w=3.58e-07 $l=4e-08 $layer=LI1_cond $X=2.615 $Y=1.995
+ $X2=2.615 $Y2=2.035
r19 13 47 6.52326 $w=2.63e-07 $l=1.5e-07 $layer=LI1_cond $X=2.662 $Y=1.665
+ $X2=2.662 $Y2=1.815
r20 11 12 11.8446 $w=3.58e-07 $l=3.7e-07 $layer=LI1_cond $X=2.615 $Y=2.405
+ $X2=2.615 $Y2=2.775
r21 10 30 0.736283 $w=3.58e-07 $l=2.3e-08 $layer=LI1_cond $X=2.615 $Y=1.972
+ $X2=2.615 $Y2=1.995
r22 10 47 5.85119 $w=3.58e-07 $l=1.57e-07 $layer=LI1_cond $X=2.615 $Y=1.972
+ $X2=2.615 $Y2=1.815
r23 10 11 11.1403 $w=3.58e-07 $l=3.48e-07 $layer=LI1_cond $X=2.615 $Y=2.057
+ $X2=2.615 $Y2=2.405
r24 10 32 0.704271 $w=3.58e-07 $l=2.2e-08 $layer=LI1_cond $X=2.615 $Y=2.057
+ $X2=2.615 $Y2=2.035
r25 9 13 16.0907 $w=2.63e-07 $l=3.7e-07 $layer=LI1_cond $X=2.662 $Y=1.295
+ $X2=2.662 $Y2=1.665
r26 8 9 16.0907 $w=2.63e-07 $l=3.7e-07 $layer=LI1_cond $X=2.662 $Y=0.925
+ $X2=2.662 $Y2=1.295
r27 8 45 7.39303 $w=2.63e-07 $l=1.7e-07 $layer=LI1_cond $X=2.662 $Y=0.925
+ $X2=2.662 $Y2=0.755
r28 7 44 1.12043 $w=3.58e-07 $l=3.5e-08 $layer=LI1_cond $X=2.615 $Y=0.555
+ $X2=2.615 $Y2=0.59
r29 2 10 400 $w=1.7e-07 $l=2.03286e-07 $layer=licon1_PDIFF $count=1 $X=2.415
+ $Y=1.84 $X2=2.555 $Y2=1.985
r30 2 12 400 $w=1.7e-07 $l=1.03764e-06 $layer=licon1_PDIFF $count=1 $X=2.415
+ $Y=1.84 $X2=2.555 $Y2=2.81
r31 1 44 182 $w=1.7e-07 $l=2.81425e-07 $layer=licon1_NDIFF $count=1 $X=2.39
+ $Y=0.37 $X2=2.53 $Y2=0.59
.ends

.subckt PM_SKY130_FD_SC_MS__CLKDLYINV3SD1_1%VGND 1 2 9 13 15 17 22 29 30 33 36
+ 44
r32 37 44 0.0668963 $w=4.9e-07 $l=2.4e-07 $layer=MET1_cond $X=2.16 $Y=0 $X2=1.92
+ $Y2=0
r33 36 37 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.16 $Y=0 $X2=2.16
+ $Y2=0
r34 33 34 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.72 $Y=0 $X2=0.72
+ $Y2=0
r35 30 37 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=2.64 $Y=0 $X2=2.16
+ $Y2=0
r36 29 30 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.64 $Y=0 $X2=2.64
+ $Y2=0
r37 27 36 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.265 $Y=0 $X2=2.1
+ $Y2=0
r38 27 29 24.4652 $w=1.68e-07 $l=3.75e-07 $layer=LI1_cond $X=2.265 $Y=0 $X2=2.64
+ $Y2=0
r39 26 44 0.0668963 $w=4.9e-07 $l=2.4e-07 $layer=MET1_cond $X=1.68 $Y=0 $X2=1.92
+ $Y2=0
r40 25 26 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=1.68 $Y=0 $X2=1.68
+ $Y2=0
r41 23 33 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=0.915 $Y=0 $X2=0.75
+ $Y2=0
r42 23 25 49.9091 $w=1.68e-07 $l=7.65e-07 $layer=LI1_cond $X=0.915 $Y=0 $X2=1.68
+ $Y2=0
r43 22 36 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=1.935 $Y=0 $X2=2.1
+ $Y2=0
r44 22 25 16.6364 $w=1.68e-07 $l=2.55e-07 $layer=LI1_cond $X=1.935 $Y=0 $X2=1.68
+ $Y2=0
r45 20 34 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.24 $Y=0 $X2=0.72
+ $Y2=0
r46 19 20 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.24 $Y=0 $X2=0.24
+ $Y2=0
r47 17 33 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=0.585 $Y=0 $X2=0.75
+ $Y2=0
r48 17 19 22.508 $w=1.68e-07 $l=3.45e-07 $layer=LI1_cond $X=0.585 $Y=0 $X2=0.24
+ $Y2=0
r49 15 26 0.0668963 $w=4.9e-07 $l=2.4e-07 $layer=MET1_cond $X=1.44 $Y=0 $X2=1.68
+ $Y2=0
r50 15 34 0.200689 $w=4.9e-07 $l=7.2e-07 $layer=MET1_cond $X=1.44 $Y=0 $X2=0.72
+ $Y2=0
r51 11 36 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=2.1 $Y=0.085 $X2=2.1
+ $Y2=0
r52 11 13 17.4613 $w=3.28e-07 $l=5e-07 $layer=LI1_cond $X=2.1 $Y=0.085 $X2=2.1
+ $Y2=0.585
r53 7 33 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=0.75 $Y=0.085 $X2=0.75
+ $Y2=0
r54 7 9 16.7628 $w=3.28e-07 $l=4.8e-07 $layer=LI1_cond $X=0.75 $Y=0.085 $X2=0.75
+ $Y2=0.565
r55 2 13 182 $w=1.7e-07 $l=2.7037e-07 $layer=licon1_NDIFF $count=1 $X=1.975
+ $Y=0.37 $X2=2.1 $Y2=0.585
r56 1 9 182 $w=1.7e-07 $l=2.75772e-07 $layer=licon1_NDIFF $count=1 $X=0.555
+ $Y=0.37 $X2=0.75 $Y2=0.565
.ends