* File: sky130_fd_sc_ms__clkbuf_4.pex.spice
* Created: Wed Sep  2 12:00:34 2020
* Program "Calibre xRC"
* Version "v2018.4_34.26"
* Nominal Temperature: 27C
* Circuit Temperature: 27C
* 
.subckt PM_SKY130_FD_SC_MS__CLKBUF_4%A_83_270# 1 2 9 13 17 21 25 29 33 37 39 44
+ 48 53 57 58 62 74
c109 57 0 5.35093e-20 $X=1.885 $Y=1.55
c110 21 0 1.55247e-19 $X=0.955 $Y=2.4
r111 73 74 2.62292 $w=3.3e-07 $l=1.5e-08 $layer=POLY_cond $X=1.84 $Y=1.515
+ $X2=1.855 $Y2=1.515
r112 70 71 6.12014 $w=3.3e-07 $l=3.5e-08 $layer=POLY_cond $X=1.37 $Y=1.515
+ $X2=1.405 $Y2=1.515
r113 67 68 2.62292 $w=3.3e-07 $l=1.5e-08 $layer=POLY_cond $X=0.94 $Y=1.515
+ $X2=0.955 $Y2=1.515
r114 66 67 75.1904 $w=3.3e-07 $l=4.3e-07 $layer=POLY_cond $X=0.51 $Y=1.515
+ $X2=0.94 $Y2=1.515
r115 64 66 0.874306 $w=3.3e-07 $l=5e-09 $layer=POLY_cond $X=0.505 $Y=1.515
+ $X2=0.51 $Y2=1.515
r116 60 62 4.1907 $w=3.28e-07 $l=1.2e-07 $layer=LI1_cond $X=2.59 $Y=0.645
+ $X2=2.71 $Y2=0.645
r117 56 73 20.9834 $w=3.3e-07 $l=1.2e-07 $layer=POLY_cond $X=1.72 $Y=1.515
+ $X2=1.84 $Y2=1.515
r118 56 71 55.0813 $w=3.3e-07 $l=3.15e-07 $layer=POLY_cond $X=1.72 $Y=1.515
+ $X2=1.405 $Y2=1.515
r119 55 57 8.64761 $w=3.98e-07 $l=1.65e-07 $layer=LI1_cond $X=1.72 $Y=1.55
+ $X2=1.885 $Y2=1.55
r120 55 56 96.8533 $w=1.7e-07 $l=2.55e-07 $layer=licon1_POLY $count=1 $X=1.72
+ $Y=1.515 $X2=1.72 $Y2=1.515
r121 53 58 3.40559 $w=2.75e-07 $l=1.41244e-07 $layer=LI1_cond $X=2.71 $Y=1.58
+ $X2=2.605 $Y2=1.665
r122 52 62 4.62375 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.71 $Y=0.81
+ $X2=2.71 $Y2=0.645
r123 52 53 50.2353 $w=1.68e-07 $l=7.7e-07 $layer=LI1_cond $X=2.71 $Y=0.81
+ $X2=2.71 $Y2=1.58
r124 48 50 25.1718 $w=3.78e-07 $l=8.3e-07 $layer=LI1_cond $X=2.605 $Y=1.985
+ $X2=2.605 $Y2=2.815
r125 46 58 3.40559 $w=2.75e-07 $l=8.5e-08 $layer=LI1_cond $X=2.605 $Y=1.75
+ $X2=2.605 $Y2=1.665
r126 46 48 7.12695 $w=3.78e-07 $l=2.35e-07 $layer=LI1_cond $X=2.605 $Y=1.75
+ $X2=2.605 $Y2=1.985
r127 44 58 3.11956 $w=1.7e-07 $l=1.9e-07 $layer=LI1_cond $X=2.415 $Y=1.665
+ $X2=2.605 $Y2=1.665
r128 44 57 34.5775 $w=1.68e-07 $l=5.3e-07 $layer=LI1_cond $X=2.415 $Y=1.665
+ $X2=1.885 $Y2=1.665
r129 42 70 57.7042 $w=3.3e-07 $l=3.3e-07 $layer=POLY_cond $X=1.04 $Y=1.515
+ $X2=1.37 $Y2=1.515
r130 42 68 14.8632 $w=3.3e-07 $l=8.5e-08 $layer=POLY_cond $X=1.04 $Y=1.515
+ $X2=0.955 $Y2=1.515
r131 41 42 96.8533 $w=1.7e-07 $l=2.55e-07 $layer=licon1_POLY $count=1 $X=1.04
+ $Y=1.515 $X2=1.04 $Y2=1.515
r132 39 55 1.00839 $w=3.98e-07 $l=3.5e-08 $layer=LI1_cond $X=1.685 $Y=1.55
+ $X2=1.72 $Y2=1.55
r133 39 41 18.5831 $w=3.98e-07 $l=6.45e-07 $layer=LI1_cond $X=1.685 $Y=1.55
+ $X2=1.04 $Y2=1.55
r134 35 74 16.9318 $w=1.8e-07 $l=1.65e-07 $layer=POLY_cond $X=1.855 $Y=1.68
+ $X2=1.855 $Y2=1.515
r135 35 37 279.871 $w=1.8e-07 $l=7.2e-07 $layer=POLY_cond $X=1.855 $Y=1.68
+ $X2=1.855 $Y2=2.4
r136 31 73 21.2229 $w=1.5e-07 $l=1.65e-07 $layer=POLY_cond $X=1.84 $Y=1.35
+ $X2=1.84 $Y2=1.515
r137 31 33 394.83 $w=1.5e-07 $l=7.7e-07 $layer=POLY_cond $X=1.84 $Y=1.35
+ $X2=1.84 $Y2=0.58
r138 27 71 16.9318 $w=1.8e-07 $l=1.65e-07 $layer=POLY_cond $X=1.405 $Y=1.68
+ $X2=1.405 $Y2=1.515
r139 27 29 279.871 $w=1.8e-07 $l=7.2e-07 $layer=POLY_cond $X=1.405 $Y=1.68
+ $X2=1.405 $Y2=2.4
r140 23 70 21.2229 $w=1.5e-07 $l=1.65e-07 $layer=POLY_cond $X=1.37 $Y=1.35
+ $X2=1.37 $Y2=1.515
r141 23 25 394.83 $w=1.5e-07 $l=7.7e-07 $layer=POLY_cond $X=1.37 $Y=1.35
+ $X2=1.37 $Y2=0.58
r142 19 68 16.9318 $w=1.8e-07 $l=1.65e-07 $layer=POLY_cond $X=0.955 $Y=1.68
+ $X2=0.955 $Y2=1.515
r143 19 21 279.871 $w=1.8e-07 $l=7.2e-07 $layer=POLY_cond $X=0.955 $Y=1.68
+ $X2=0.955 $Y2=2.4
r144 15 67 21.2229 $w=1.5e-07 $l=1.65e-07 $layer=POLY_cond $X=0.94 $Y=1.35
+ $X2=0.94 $Y2=1.515
r145 15 17 394.83 $w=1.5e-07 $l=7.7e-07 $layer=POLY_cond $X=0.94 $Y=1.35
+ $X2=0.94 $Y2=0.58
r146 11 66 21.2229 $w=1.5e-07 $l=1.65e-07 $layer=POLY_cond $X=0.51 $Y=1.35
+ $X2=0.51 $Y2=1.515
r147 11 13 394.83 $w=1.5e-07 $l=7.7e-07 $layer=POLY_cond $X=0.51 $Y=1.35
+ $X2=0.51 $Y2=0.58
r148 7 64 16.9318 $w=1.8e-07 $l=1.65e-07 $layer=POLY_cond $X=0.505 $Y=1.68
+ $X2=0.505 $Y2=1.515
r149 7 9 279.871 $w=1.8e-07 $l=7.2e-07 $layer=POLY_cond $X=0.505 $Y=1.68
+ $X2=0.505 $Y2=2.4
r150 2 50 400 $w=1.7e-07 $l=1.04031e-06 $layer=licon1_PDIFF $count=1 $X=2.445
+ $Y=1.84 $X2=2.58 $Y2=2.815
r151 2 48 400 $w=1.7e-07 $l=2.01494e-07 $layer=licon1_PDIFF $count=1 $X=2.445
+ $Y=1.84 $X2=2.58 $Y2=1.985
r152 1 60 182 $w=1.7e-07 $l=3.39853e-07 $layer=licon1_NDIFF $count=1 $X=2.445
+ $Y=0.37 $X2=2.59 $Y2=0.645
.ends

.subckt PM_SKY130_FD_SC_MS__CLKBUF_4%A 3 7 9 12 13
c36 12 0 5.35093e-20 $X=2.32 $Y=1.245
r37 12 15 40.6903 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=2.32 $Y=1.245
+ $X2=2.32 $Y2=1.41
r38 12 14 46.2115 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=2.32 $Y=1.245
+ $X2=2.32 $Y2=1.08
r39 12 13 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=2.32
+ $Y=1.245 $X2=2.32 $Y2=1.245
r40 9 13 5.5876 $w=3.28e-07 $l=1.6e-07 $layer=LI1_cond $X=2.16 $Y=1.245 $X2=2.32
+ $Y2=1.245
r41 7 14 256.383 $w=1.5e-07 $l=5e-07 $layer=POLY_cond $X=2.37 $Y=0.58 $X2=2.37
+ $Y2=1.08
r42 3 15 384.823 $w=1.8e-07 $l=9.9e-07 $layer=POLY_cond $X=2.355 $Y=2.4
+ $X2=2.355 $Y2=1.41
.ends

.subckt PM_SKY130_FD_SC_MS__CLKBUF_4%VPWR 1 2 3 10 12 18 22 27 28 29 35 41 42 48
r42 48 49 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.16 $Y=3.33
+ $X2=2.16 $Y2=3.33
r43 45 46 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.24 $Y=3.33
+ $X2=0.24 $Y2=3.33
r44 42 49 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=2.64 $Y=3.33
+ $X2=2.16 $Y2=3.33
r45 41 42 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.64 $Y=3.33
+ $X2=2.64 $Y2=3.33
r46 39 48 7.02821 $w=1.7e-07 $l=1.25e-07 $layer=LI1_cond $X=2.245 $Y=3.33
+ $X2=2.12 $Y2=3.33
r47 39 41 25.7701 $w=1.68e-07 $l=3.95e-07 $layer=LI1_cond $X=2.245 $Y=3.33
+ $X2=2.64 $Y2=3.33
r48 38 49 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=1.68 $Y=3.33
+ $X2=2.16 $Y2=3.33
r49 37 38 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=1.68 $Y=3.33
+ $X2=1.68 $Y2=3.33
r50 35 48 7.02821 $w=1.7e-07 $l=1.25e-07 $layer=LI1_cond $X=1.995 $Y=3.33
+ $X2=2.12 $Y2=3.33
r51 35 37 20.5508 $w=1.68e-07 $l=3.15e-07 $layer=LI1_cond $X=1.995 $Y=3.33
+ $X2=1.68 $Y2=3.33
r52 34 46 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.72 $Y=3.33
+ $X2=0.24 $Y2=3.33
r53 33 34 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.72 $Y=3.33
+ $X2=0.72 $Y2=3.33
r54 31 45 4.00981 $w=1.7e-07 $l=1.83e-07 $layer=LI1_cond $X=0.365 $Y=3.33
+ $X2=0.182 $Y2=3.33
r55 31 33 23.1604 $w=1.68e-07 $l=3.55e-07 $layer=LI1_cond $X=0.365 $Y=3.33
+ $X2=0.72 $Y2=3.33
r56 29 38 0.0668963 $w=4.9e-07 $l=2.4e-07 $layer=MET1_cond $X=1.44 $Y=3.33
+ $X2=1.68 $Y2=3.33
r57 29 34 0.200689 $w=4.9e-07 $l=7.2e-07 $layer=MET1_cond $X=1.44 $Y=3.33
+ $X2=0.72 $Y2=3.33
r58 27 33 19.246 $w=1.68e-07 $l=2.95e-07 $layer=LI1_cond $X=1.015 $Y=3.33
+ $X2=0.72 $Y2=3.33
r59 27 28 7.02821 $w=1.7e-07 $l=1.25e-07 $layer=LI1_cond $X=1.015 $Y=3.33
+ $X2=1.14 $Y2=3.33
r60 26 37 27.0749 $w=1.68e-07 $l=4.15e-07 $layer=LI1_cond $X=1.265 $Y=3.33
+ $X2=1.68 $Y2=3.33
r61 26 28 7.02821 $w=1.7e-07 $l=1.25e-07 $layer=LI1_cond $X=1.265 $Y=3.33
+ $X2=1.14 $Y2=3.33
r62 22 25 33.6513 $w=2.48e-07 $l=7.3e-07 $layer=LI1_cond $X=2.12 $Y=2.085
+ $X2=2.12 $Y2=2.815
r63 20 48 0.00168595 $w=2.5e-07 $l=8.5e-08 $layer=LI1_cond $X=2.12 $Y=3.245
+ $X2=2.12 $Y2=3.33
r64 20 25 19.822 $w=2.48e-07 $l=4.3e-07 $layer=LI1_cond $X=2.12 $Y=3.245
+ $X2=2.12 $Y2=2.815
r65 16 28 0.00168595 $w=2.5e-07 $l=8.5e-08 $layer=LI1_cond $X=1.14 $Y=3.245
+ $X2=1.14 $Y2=3.33
r66 16 18 37.8001 $w=2.48e-07 $l=8.2e-07 $layer=LI1_cond $X=1.14 $Y=3.245
+ $X2=1.14 $Y2=2.425
r67 12 15 38.2611 $w=2.48e-07 $l=8.3e-07 $layer=LI1_cond $X=0.24 $Y=1.985
+ $X2=0.24 $Y2=2.815
r68 10 45 3.13335 $w=2.5e-07 $l=1.1025e-07 $layer=LI1_cond $X=0.24 $Y=3.245
+ $X2=0.182 $Y2=3.33
r69 10 15 19.822 $w=2.48e-07 $l=4.3e-07 $layer=LI1_cond $X=0.24 $Y=3.245
+ $X2=0.24 $Y2=2.815
r70 3 25 400 $w=1.7e-07 $l=1.04031e-06 $layer=licon1_PDIFF $count=1 $X=1.945
+ $Y=1.84 $X2=2.08 $Y2=2.815
r71 3 22 400 $w=1.7e-07 $l=3.05123e-07 $layer=licon1_PDIFF $count=1 $X=1.945
+ $Y=1.84 $X2=2.08 $Y2=2.085
r72 2 18 300 $w=1.7e-07 $l=6.48999e-07 $layer=licon1_PDIFF $count=2 $X=1.045
+ $Y=1.84 $X2=1.18 $Y2=2.425
r73 1 15 400 $w=1.7e-07 $l=1.04499e-06 $layer=licon1_PDIFF $count=1 $X=0.135
+ $Y=1.84 $X2=0.28 $Y2=2.815
r74 1 12 400 $w=1.7e-07 $l=2.05061e-07 $layer=licon1_PDIFF $count=1 $X=0.135
+ $Y=1.84 $X2=0.28 $Y2=1.985
.ends

.subckt PM_SKY130_FD_SC_MS__CLKBUF_4%X 1 2 3 4 14 17 19 21 25 27 29 32 35 36 47
c64 17 0 1.55247e-19 $X=0.73 $Y=2.815
r65 40 47 1.92074 $w=3.28e-07 $l=5.5e-08 $layer=LI1_cond $X=0.725 $Y=0.98
+ $X2=0.725 $Y2=0.925
r66 36 40 3.70735 $w=2.5e-07 $l=9.12688e-08 $layer=LI1_cond $X=0.712 $Y=1.065
+ $X2=0.725 $Y2=0.98
r67 36 47 0.523838 $w=3.28e-07 $l=1.5e-08 $layer=LI1_cond $X=0.725 $Y=0.91
+ $X2=0.725 $Y2=0.925
r68 35 36 12.3975 $w=3.28e-07 $l=3.55e-07 $layer=LI1_cond $X=0.725 $Y=0.555
+ $X2=0.725 $Y2=0.91
r69 27 34 2.6405 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=1.63 $Y=2.09 $X2=1.63
+ $Y2=2.005
r70 27 29 25.3188 $w=3.28e-07 $l=7.25e-07 $layer=LI1_cond $X=1.63 $Y=2.09
+ $X2=1.63 $Y2=2.815
r71 23 25 13.969 $w=3.28e-07 $l=4e-07 $layer=LI1_cond $X=1.585 $Y=0.98 $X2=1.585
+ $Y2=0.58
r72 22 36 2.76166 $w=1.7e-07 $l=1.78e-07 $layer=LI1_cond $X=0.89 $Y=1.065
+ $X2=0.712 $Y2=1.065
r73 21 23 7.76618 $w=1.7e-07 $l=2.03101e-07 $layer=LI1_cond $X=1.42 $Y=1.065
+ $X2=1.585 $Y2=0.98
r74 21 22 34.5775 $w=1.68e-07 $l=5.3e-07 $layer=LI1_cond $X=1.42 $Y=1.065
+ $X2=0.89 $Y2=1.065
r75 20 32 2.36881 $w=1.7e-07 $l=1.4e-07 $layer=LI1_cond $X=0.815 $Y=2.005
+ $X2=0.675 $Y2=2.005
r76 19 34 5.12568 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=1.465 $Y=2.005
+ $X2=1.63 $Y2=2.005
r77 19 20 42.4064 $w=1.68e-07 $l=6.5e-07 $layer=LI1_cond $X=1.465 $Y=2.005
+ $X2=0.815 $Y2=2.005
r78 15 32 4.06715 $w=2.25e-07 $l=8.5e-08 $layer=LI1_cond $X=0.675 $Y=2.09
+ $X2=0.675 $Y2=2.005
r79 15 17 29.84 $w=2.78e-07 $l=7.25e-07 $layer=LI1_cond $X=0.675 $Y=2.09
+ $X2=0.675 $Y2=2.815
r80 14 32 4.06715 $w=2.25e-07 $l=1.09087e-07 $layer=LI1_cond $X=0.62 $Y=1.92
+ $X2=0.675 $Y2=2.005
r81 13 36 3.70735 $w=2.5e-07 $l=1.27609e-07 $layer=LI1_cond $X=0.62 $Y=1.15
+ $X2=0.712 $Y2=1.065
r82 13 14 50.2353 $w=1.68e-07 $l=7.7e-07 $layer=LI1_cond $X=0.62 $Y=1.15
+ $X2=0.62 $Y2=1.92
r83 4 34 400 $w=1.7e-07 $l=3.05123e-07 $layer=licon1_PDIFF $count=1 $X=1.495
+ $Y=1.84 $X2=1.63 $Y2=2.085
r84 4 29 400 $w=1.7e-07 $l=1.04031e-06 $layer=licon1_PDIFF $count=1 $X=1.495
+ $Y=1.84 $X2=1.63 $Y2=2.815
r85 3 32 400 $w=1.7e-07 $l=3.05123e-07 $layer=licon1_PDIFF $count=1 $X=0.595
+ $Y=1.84 $X2=0.73 $Y2=2.085
r86 3 17 400 $w=1.7e-07 $l=1.04031e-06 $layer=licon1_PDIFF $count=1 $X=0.595
+ $Y=1.84 $X2=0.73 $Y2=2.815
r87 2 25 182 $w=1.7e-07 $l=2.71109e-07 $layer=licon1_NDIFF $count=1 $X=1.445
+ $Y=0.37 $X2=1.585 $Y2=0.58
r88 1 35 182 $w=1.7e-07 $l=2.71109e-07 $layer=licon1_NDIFF $count=1 $X=0.585
+ $Y=0.37 $X2=0.725 $Y2=0.58
.ends

.subckt PM_SKY130_FD_SC_MS__CLKBUF_4%VGND 1 2 3 10 12 16 20 23 24 25 31 37 38 44
r40 44 45 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.16 $Y=0 $X2=2.16
+ $Y2=0
r41 41 42 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.24 $Y=0 $X2=0.24
+ $Y2=0
r42 38 45 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=2.64 $Y=0 $X2=2.16
+ $Y2=0
r43 37 38 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.64 $Y=0 $X2=2.64
+ $Y2=0
r44 35 44 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.25 $Y=0 $X2=2.085
+ $Y2=0
r45 35 37 25.4438 $w=1.68e-07 $l=3.9e-07 $layer=LI1_cond $X=2.25 $Y=0 $X2=2.64
+ $Y2=0
r46 34 45 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=1.68 $Y=0 $X2=2.16
+ $Y2=0
r47 33 34 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=1.68 $Y=0 $X2=1.68
+ $Y2=0
r48 31 44 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=1.92 $Y=0 $X2=2.085
+ $Y2=0
r49 31 33 15.6578 $w=1.68e-07 $l=2.4e-07 $layer=LI1_cond $X=1.92 $Y=0 $X2=1.68
+ $Y2=0
r50 30 42 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.72 $Y=0 $X2=0.24
+ $Y2=0
r51 29 30 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.72 $Y=0 $X2=0.72
+ $Y2=0
r52 27 41 3.99177 $w=1.7e-07 $l=1.9e-07 $layer=LI1_cond $X=0.38 $Y=0 $X2=0.19
+ $Y2=0
r53 27 29 22.1818 $w=1.68e-07 $l=3.4e-07 $layer=LI1_cond $X=0.38 $Y=0 $X2=0.72
+ $Y2=0
r54 25 34 0.0668963 $w=4.9e-07 $l=2.4e-07 $layer=MET1_cond $X=1.44 $Y=0 $X2=1.68
+ $Y2=0
r55 25 30 0.200689 $w=4.9e-07 $l=7.2e-07 $layer=MET1_cond $X=1.44 $Y=0 $X2=0.72
+ $Y2=0
r56 23 29 22.8342 $w=1.68e-07 $l=3.5e-07 $layer=LI1_cond $X=1.07 $Y=0 $X2=0.72
+ $Y2=0
r57 23 24 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=1.07 $Y=0 $X2=1.155
+ $Y2=0
r58 22 33 28.7059 $w=1.68e-07 $l=4.4e-07 $layer=LI1_cond $X=1.24 $Y=0 $X2=1.68
+ $Y2=0
r59 22 24 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=1.24 $Y=0 $X2=1.155
+ $Y2=0
r60 18 44 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=2.085 $Y=0.085
+ $X2=2.085 $Y2=0
r61 18 20 17.2866 $w=3.28e-07 $l=4.95e-07 $layer=LI1_cond $X=2.085 $Y=0.085
+ $X2=2.085 $Y2=0.58
r62 14 24 1.34256 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=1.155 $Y=0.085
+ $X2=1.155 $Y2=0
r63 14 16 32.2941 $w=1.68e-07 $l=4.95e-07 $layer=LI1_cond $X=1.155 $Y=0.085
+ $X2=1.155 $Y2=0.58
r64 10 41 3.1514 $w=2.5e-07 $l=1.12916e-07 $layer=LI1_cond $X=0.255 $Y=0.085
+ $X2=0.19 $Y2=0
r65 10 12 22.8184 $w=2.48e-07 $l=4.95e-07 $layer=LI1_cond $X=0.255 $Y=0.085
+ $X2=0.255 $Y2=0.58
r66 3 20 182 $w=1.7e-07 $l=2.82489e-07 $layer=licon1_NDIFF $count=1 $X=1.915
+ $Y=0.37 $X2=2.085 $Y2=0.58
r67 2 16 182 $w=1.7e-07 $l=2.71109e-07 $layer=licon1_NDIFF $count=1 $X=1.015
+ $Y=0.37 $X2=1.155 $Y2=0.58
r68 1 12 182 $w=1.7e-07 $l=2.73038e-07 $layer=licon1_NDIFF $count=1 $X=0.15
+ $Y=0.37 $X2=0.295 $Y2=0.58
.ends