* File: sky130_fd_sc_ms__a32o_2.pex.spice
* Created: Wed Sep  2 11:55:47 2020
* Program "Calibre xRC"
* Version "v2018.4_34.26"
* Nominal Temperature: 27C
* Circuit Temperature: 27C
* 
.subckt PM_SKY130_FD_SC_MS__A32O_2%A_45_264# 1 2 9 13 17 21 24 25 26 28 30 31 32
+ 33 37 42 46 48 52
c116 17 0 1.21125e-19 $X=0.955 $Y=2.4
r117 52 53 6.71517 $w=3.23e-07 $l=4.5e-08 $layer=POLY_cond $X=0.955 $Y=1.485
+ $X2=1 $Y2=1.485
r118 51 52 58.9443 $w=3.23e-07 $l=3.95e-07 $layer=POLY_cond $X=0.56 $Y=1.485
+ $X2=0.955 $Y2=1.485
r119 50 51 8.20743 $w=3.23e-07 $l=5.5e-08 $layer=POLY_cond $X=0.505 $Y=1.485
+ $X2=0.56 $Y2=1.485
r120 43 50 17.161 $w=3.23e-07 $l=1.15e-07 $layer=POLY_cond $X=0.39 $Y=1.485
+ $X2=0.505 $Y2=1.485
r121 42 45 8.46218 $w=3.28e-07 $l=1.65e-07 $layer=LI1_cond $X=0.39 $Y=1.485
+ $X2=0.39 $Y2=1.65
r122 42 43 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=0.39
+ $Y=1.485 $X2=0.39 $Y2=1.485
r123 35 37 17.2866 $w=3.28e-07 $l=4.95e-07 $layer=LI1_cond $X=2.94 $Y=1.01
+ $X2=2.94 $Y2=0.515
r124 34 46 1.34256 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=1.275 $Y=2.035
+ $X2=1.19 $Y2=2.035
r125 33 48 5.12568 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=3.375 $Y=2.035
+ $X2=3.54 $Y2=2.035
r126 33 34 137.005 $w=1.68e-07 $l=2.1e-06 $layer=LI1_cond $X=3.375 $Y=2.035
+ $X2=1.275 $Y2=2.035
r127 31 35 7.76618 $w=1.7e-07 $l=2.03101e-07 $layer=LI1_cond $X=2.775 $Y=1.095
+ $X2=2.94 $Y2=1.01
r128 31 32 97.861 $w=1.68e-07 $l=1.5e-06 $layer=LI1_cond $X=2.775 $Y=1.095
+ $X2=1.275 $Y2=1.095
r129 29 46 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=1.19 $Y=2.12
+ $X2=1.19 $Y2=2.035
r130 29 30 13.0481 $w=1.68e-07 $l=2e-07 $layer=LI1_cond $X=1.19 $Y=2.12 $X2=1.19
+ $Y2=2.32
r131 28 46 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=1.19 $Y=1.95
+ $X2=1.19 $Y2=2.035
r132 27 32 6.81649 $w=1.7e-07 $l=1.20208e-07 $layer=LI1_cond $X=1.19 $Y=1.18
+ $X2=1.275 $Y2=1.095
r133 27 28 50.2353 $w=1.68e-07 $l=7.7e-07 $layer=LI1_cond $X=1.19 $Y=1.18
+ $X2=1.19 $Y2=1.95
r134 25 30 6.81649 $w=1.7e-07 $l=1.20208e-07 $layer=LI1_cond $X=1.105 $Y=2.405
+ $X2=1.19 $Y2=2.32
r135 25 26 46.3209 $w=1.68e-07 $l=7.1e-07 $layer=LI1_cond $X=1.105 $Y=2.405
+ $X2=0.395 $Y2=2.405
r136 24 26 6.81649 $w=1.7e-07 $l=1.20208e-07 $layer=LI1_cond $X=0.31 $Y=2.32
+ $X2=0.395 $Y2=2.405
r137 24 45 43.7112 $w=1.68e-07 $l=6.7e-07 $layer=LI1_cond $X=0.31 $Y=2.32
+ $X2=0.31 $Y2=1.65
r138 19 53 20.7134 $w=1.5e-07 $l=1.65e-07 $layer=POLY_cond $X=1 $Y=1.32 $X2=1
+ $Y2=1.485
r139 19 21 297.404 $w=1.5e-07 $l=5.8e-07 $layer=POLY_cond $X=1 $Y=1.32 $X2=1
+ $Y2=0.74
r140 15 52 16.4327 $w=1.8e-07 $l=1.65e-07 $layer=POLY_cond $X=0.955 $Y=1.65
+ $X2=0.955 $Y2=1.485
r141 15 17 291.532 $w=1.8e-07 $l=7.5e-07 $layer=POLY_cond $X=0.955 $Y=1.65
+ $X2=0.955 $Y2=2.4
r142 11 51 20.7134 $w=1.5e-07 $l=1.65e-07 $layer=POLY_cond $X=0.56 $Y=1.32
+ $X2=0.56 $Y2=1.485
r143 11 13 297.404 $w=1.5e-07 $l=5.8e-07 $layer=POLY_cond $X=0.56 $Y=1.32
+ $X2=0.56 $Y2=0.74
r144 7 50 16.4327 $w=1.8e-07 $l=1.65e-07 $layer=POLY_cond $X=0.505 $Y=1.65
+ $X2=0.505 $Y2=1.485
r145 7 9 291.532 $w=1.8e-07 $l=7.5e-07 $layer=POLY_cond $X=0.505 $Y=1.65
+ $X2=0.505 $Y2=2.4
r146 2 48 300 $w=1.7e-07 $l=3.03727e-07 $layer=licon1_PDIFF $count=2 $X=3.355
+ $Y=1.84 $X2=3.54 $Y2=2.065
r147 1 37 91 $w=1.7e-07 $l=2.67862e-07 $layer=licon1_NDIFF $count=2 $X=2.735
+ $Y=0.37 $X2=2.94 $Y2=0.515
.ends

.subckt PM_SKY130_FD_SC_MS__A32O_2%A3 3 7 9 12 13
c36 7 0 1.22536e-19 $X=1.7 $Y=0.74
c37 3 0 2.64426e-19 $X=1.655 $Y=2.34
r38 12 15 40.6903 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=1.61 $Y=1.515
+ $X2=1.61 $Y2=1.68
r39 12 14 46.2115 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=1.61 $Y=1.515
+ $X2=1.61 $Y2=1.35
r40 12 13 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=1.61
+ $Y=1.515 $X2=1.61 $Y2=1.515
r41 9 13 5.23838 $w=3.28e-07 $l=1.5e-07 $layer=LI1_cond $X=1.61 $Y=1.665
+ $X2=1.61 $Y2=1.515
r42 7 14 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=1.7 $Y=0.74 $X2=1.7
+ $Y2=1.35
r43 3 15 256.548 $w=1.8e-07 $l=6.6e-07 $layer=POLY_cond $X=1.655 $Y=2.34
+ $X2=1.655 $Y2=1.68
.ends

.subckt PM_SKY130_FD_SC_MS__A32O_2%A2 3 7 9 12 13
c35 13 0 1.21952e-19 $X=2.18 $Y=1.515
r36 12 15 40.6903 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=2.18 $Y=1.515
+ $X2=2.18 $Y2=1.68
r37 12 14 46.2115 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=2.18 $Y=1.515
+ $X2=2.18 $Y2=1.35
r38 12 13 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=2.18
+ $Y=1.515 $X2=2.18 $Y2=1.515
r39 9 13 5.23838 $w=3.28e-07 $l=1.5e-07 $layer=LI1_cond $X=2.18 $Y=1.665
+ $X2=2.18 $Y2=1.515
r40 7 15 256.548 $w=1.8e-07 $l=6.6e-07 $layer=POLY_cond $X=2.105 $Y=2.34
+ $X2=2.105 $Y2=1.68
r41 3 14 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=2.09 $Y=0.74 $X2=2.09
+ $Y2=1.35
.ends

.subckt PM_SKY130_FD_SC_MS__A32O_2%A1 3 7 9 12 13
r39 12 15 40.6903 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=2.75 $Y=1.515
+ $X2=2.75 $Y2=1.68
r40 12 14 46.2115 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=2.75 $Y=1.515
+ $X2=2.75 $Y2=1.35
r41 12 13 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=2.75
+ $Y=1.515 $X2=2.75 $Y2=1.515
r42 9 13 4.43247 $w=3.88e-07 $l=1.5e-07 $layer=LI1_cond $X=2.72 $Y=1.665
+ $X2=2.72 $Y2=1.515
r43 7 15 256.548 $w=1.8e-07 $l=6.6e-07 $layer=POLY_cond $X=2.815 $Y=2.34
+ $X2=2.815 $Y2=1.68
r44 3 14 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=2.66 $Y=0.74 $X2=2.66
+ $Y2=1.35
.ends

.subckt PM_SKY130_FD_SC_MS__A32O_2%B1 3 7 9 12
c36 7 0 6.19918e-20 $X=3.265 $Y=2.34
r37 12 15 40.6903 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=3.32 $Y=1.515
+ $X2=3.32 $Y2=1.68
r38 12 14 46.2115 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=3.32 $Y=1.515
+ $X2=3.32 $Y2=1.35
r39 12 13 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=3.32
+ $Y=1.515 $X2=3.32 $Y2=1.515
r40 9 13 7.50428 $w=4.28e-07 $l=2.8e-07 $layer=LI1_cond $X=3.6 $Y=1.565 $X2=3.32
+ $Y2=1.565
r41 7 15 256.548 $w=1.8e-07 $l=6.6e-07 $layer=POLY_cond $X=3.265 $Y=2.34
+ $X2=3.265 $Y2=1.68
r42 3 14 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=3.23 $Y=0.74 $X2=3.23
+ $Y2=1.35
.ends

.subckt PM_SKY130_FD_SC_MS__A32O_2%B2 3 7 9 15 16
c24 16 0 6.19918e-20 $X=4.05 $Y=1.465
r25 15 16 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=4.05
+ $Y=1.465 $X2=4.05 $Y2=1.465
r26 13 15 41.0924 $w=3.3e-07 $l=2.35e-07 $layer=POLY_cond $X=3.815 $Y=1.465
+ $X2=4.05 $Y2=1.465
r27 11 13 2.62292 $w=3.3e-07 $l=1.5e-08 $layer=POLY_cond $X=3.8 $Y=1.465
+ $X2=3.815 $Y2=1.465
r28 9 16 6.9845 $w=3.28e-07 $l=2e-07 $layer=LI1_cond $X=4.05 $Y=1.665 $X2=4.05
+ $Y2=1.465
r29 5 13 16.9318 $w=1.8e-07 $l=1.65e-07 $layer=POLY_cond $X=3.815 $Y=1.63
+ $X2=3.815 $Y2=1.465
r30 5 7 275.984 $w=1.8e-07 $l=7.1e-07 $layer=POLY_cond $X=3.815 $Y=1.63
+ $X2=3.815 $Y2=2.34
r31 1 11 21.2229 $w=1.5e-07 $l=1.65e-07 $layer=POLY_cond $X=3.8 $Y=1.3 $X2=3.8
+ $Y2=1.465
r32 1 3 287.149 $w=1.5e-07 $l=5.6e-07 $layer=POLY_cond $X=3.8 $Y=1.3 $X2=3.8
+ $Y2=0.74
.ends

.subckt PM_SKY130_FD_SC_MS__A32O_2%VPWR 1 2 3 10 12 16 20 22 24 29 36 37 43 46
r55 46 47 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=2.64 $Y=3.33
+ $X2=2.64 $Y2=3.33
r56 43 44 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.2 $Y=3.33 $X2=1.2
+ $Y2=3.33
r57 40 41 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.24 $Y=3.33
+ $X2=0.24 $Y2=3.33
r58 37 47 0.401378 $w=4.9e-07 $l=1.44e-06 $layer=MET1_cond $X=4.08 $Y=3.33
+ $X2=2.64 $Y2=3.33
r59 36 37 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=4.08 $Y=3.33
+ $X2=4.08 $Y2=3.33
r60 34 46 9.48355 $w=1.7e-07 $l=1.9e-07 $layer=LI1_cond $X=2.645 $Y=3.33
+ $X2=2.455 $Y2=3.33
r61 34 36 93.6203 $w=1.68e-07 $l=1.435e-06 $layer=LI1_cond $X=2.645 $Y=3.33
+ $X2=4.08 $Y2=3.33
r62 30 43 9.97069 $w=1.7e-07 $l=2.05e-07 $layer=LI1_cond $X=1.51 $Y=3.33
+ $X2=1.305 $Y2=3.33
r63 30 32 42.4064 $w=1.68e-07 $l=6.5e-07 $layer=LI1_cond $X=1.51 $Y=3.33
+ $X2=2.16 $Y2=3.33
r64 29 46 9.48355 $w=1.7e-07 $l=1.9e-07 $layer=LI1_cond $X=2.265 $Y=3.33
+ $X2=2.455 $Y2=3.33
r65 29 32 6.85027 $w=1.68e-07 $l=1.05e-07 $layer=LI1_cond $X=2.265 $Y=3.33
+ $X2=2.16 $Y2=3.33
r66 28 44 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.72 $Y=3.33
+ $X2=1.2 $Y2=3.33
r67 28 41 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.72 $Y=3.33
+ $X2=0.24 $Y2=3.33
r68 27 28 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.72 $Y=3.33
+ $X2=0.72 $Y2=3.33
r69 25 40 4.73185 $w=1.7e-07 $l=2.23e-07 $layer=LI1_cond $X=0.445 $Y=3.33
+ $X2=0.222 $Y2=3.33
r70 25 27 17.9412 $w=1.68e-07 $l=2.75e-07 $layer=LI1_cond $X=0.445 $Y=3.33
+ $X2=0.72 $Y2=3.33
r71 24 43 9.97069 $w=1.7e-07 $l=2.05e-07 $layer=LI1_cond $X=1.1 $Y=3.33
+ $X2=1.305 $Y2=3.33
r72 24 27 24.7914 $w=1.68e-07 $l=3.8e-07 $layer=LI1_cond $X=1.1 $Y=3.33 $X2=0.72
+ $Y2=3.33
r73 22 47 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=2.16 $Y=3.33
+ $X2=2.64 $Y2=3.33
r74 22 44 0.267585 $w=4.9e-07 $l=9.6e-07 $layer=MET1_cond $X=2.16 $Y=3.33
+ $X2=1.2 $Y2=3.33
r75 22 32 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=2.16 $Y=3.33
+ $X2=2.16 $Y2=3.33
r76 18 46 1.31983 $w=3.8e-07 $l=8.5e-08 $layer=LI1_cond $X=2.455 $Y=3.245
+ $X2=2.455 $Y2=3.33
r77 18 20 16.0735 $w=3.78e-07 $l=5.3e-07 $layer=LI1_cond $X=2.455 $Y=3.245
+ $X2=2.455 $Y2=2.715
r78 14 43 1.53834 $w=4.1e-07 $l=8.5e-08 $layer=LI1_cond $X=1.305 $Y=3.245
+ $X2=1.305 $Y2=3.33
r79 14 16 11.8055 $w=4.08e-07 $l=4.2e-07 $layer=LI1_cond $X=1.305 $Y=3.245
+ $X2=1.305 $Y2=2.825
r80 10 40 3.03433 $w=3.3e-07 $l=1.1025e-07 $layer=LI1_cond $X=0.28 $Y=3.245
+ $X2=0.222 $Y2=3.33
r81 10 12 16.239 $w=3.28e-07 $l=4.65e-07 $layer=LI1_cond $X=0.28 $Y=3.245
+ $X2=0.28 $Y2=2.78
r82 3 20 600 $w=1.7e-07 $l=9.98749e-07 $layer=licon1_PDIFF $count=1 $X=2.195
+ $Y=1.84 $X2=2.46 $Y2=2.715
r83 2 16 600 $w=1.7e-07 $l=1.1074e-06 $layer=licon1_PDIFF $count=1 $X=1.045
+ $Y=1.84 $X2=1.305 $Y2=2.825
r84 1 12 600 $w=1.7e-07 $l=1.0099e-06 $layer=licon1_PDIFF $count=1 $X=0.135
+ $Y=1.84 $X2=0.28 $Y2=2.78
.ends

.subckt PM_SKY130_FD_SC_MS__A32O_2%X 1 2 9 13 14 18
c31 18 0 5.74543e-20 $X=0.75 $Y=1.82
c32 14 0 1.12123e-19 $X=0.72 $Y=2.035
c33 13 0 9.54331e-20 $X=0.775 $Y=1.15
r34 14 18 7.2765 $w=3.68e-07 $l=1.65e-07 $layer=LI1_cond $X=0.75 $Y=1.985
+ $X2=0.75 $Y2=1.82
r35 13 18 35.3853 $w=2.08e-07 $l=6.7e-07 $layer=LI1_cond $X=0.83 $Y=1.15
+ $X2=0.83 $Y2=1.82
r36 7 13 7.12386 $w=3.18e-07 $l=1.6e-07 $layer=LI1_cond $X=0.775 $Y=0.99
+ $X2=0.775 $Y2=1.15
r37 7 9 17.8269 $w=3.18e-07 $l=4.95e-07 $layer=LI1_cond $X=0.775 $Y=0.99
+ $X2=0.775 $Y2=0.495
r38 2 14 600 $w=1.7e-07 $l=2.01494e-07 $layer=licon1_PDIFF $count=1 $X=0.595
+ $Y=1.84 $X2=0.73 $Y2=1.985
r39 1 9 91 $w=1.7e-07 $l=1.97864e-07 $layer=licon1_NDIFF $count=2 $X=0.635
+ $Y=0.37 $X2=0.78 $Y2=0.495
.ends

.subckt PM_SKY130_FD_SC_MS__A32O_2%A_349_368# 1 2 3 12 14 15 16 17 20 23
c44 23 0 1.21125e-19 $X=1.88 $Y=2.375
r45 18 20 29.3349 $w=3.28e-07 $l=8.4e-07 $layer=LI1_cond $X=4.04 $Y=2.905
+ $X2=4.04 $Y2=2.065
r46 16 18 7.76618 $w=1.7e-07 $l=2.03101e-07 $layer=LI1_cond $X=3.875 $Y=2.99
+ $X2=4.04 $Y2=2.905
r47 16 17 43.7112 $w=1.68e-07 $l=6.7e-07 $layer=LI1_cond $X=3.875 $Y=2.99
+ $X2=3.205 $Y2=2.99
r48 15 17 7.76618 $w=1.7e-07 $l=2.03101e-07 $layer=LI1_cond $X=3.04 $Y=2.905
+ $X2=3.205 $Y2=2.99
r49 14 25 2.6405 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=3.04 $Y=2.46 $X2=3.04
+ $Y2=2.375
r50 14 15 15.5405 $w=3.28e-07 $l=4.45e-07 $layer=LI1_cond $X=3.04 $Y=2.46
+ $X2=3.04 $Y2=2.905
r51 13 23 5.12568 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.045 $Y=2.375
+ $X2=1.88 $Y2=2.375
r52 12 25 5.12568 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.875 $Y=2.375
+ $X2=3.04 $Y2=2.375
r53 12 13 54.1497 $w=1.68e-07 $l=8.3e-07 $layer=LI1_cond $X=2.875 $Y=2.375
+ $X2=2.045 $Y2=2.375
r54 3 20 300 $w=1.7e-07 $l=2.84605e-07 $layer=licon1_PDIFF $count=2 $X=3.905
+ $Y=1.84 $X2=4.04 $Y2=2.065
r55 2 25 300 $w=1.7e-07 $l=5.98707e-07 $layer=licon1_PDIFF $count=2 $X=2.905
+ $Y=1.84 $X2=3.04 $Y2=2.375
r56 1 23 300 $w=1.7e-07 $l=5.98707e-07 $layer=licon1_PDIFF $count=2 $X=1.745
+ $Y=1.84 $X2=1.88 $Y2=2.375
.ends

.subckt PM_SKY130_FD_SC_MS__A32O_2%VGND 1 2 3 10 12 14 18 20 22 24 26 38 42
r42 41 42 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=4.08 $Y=0 $X2=4.08
+ $Y2=0
r43 38 39 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=1.2 $Y=0 $X2=1.2
+ $Y2=0
r44 36 39 0.267585 $w=4.9e-07 $l=9.6e-07 $layer=MET1_cond $X=0.24 $Y=0 $X2=1.2
+ $Y2=0
r45 35 36 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.24 $Y=0 $X2=0.24
+ $Y2=0
r46 33 42 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=3.6 $Y=0 $X2=4.08
+ $Y2=0
r47 32 33 3.72 $w=1.7e-07 $l=4.25e-07 $layer=mcon $count=2 $X=3.6 $Y=0 $X2=3.6
+ $Y2=0
r48 30 39 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=1.68 $Y=0 $X2=1.2
+ $Y2=0
r49 29 32 125.262 $w=1.68e-07 $l=1.92e-06 $layer=LI1_cond $X=1.68 $Y=0 $X2=3.6
+ $Y2=0
r50 29 30 3.72 $w=1.7e-07 $l=4.25e-07 $layer=mcon $count=2 $X=1.68 $Y=0 $X2=1.68
+ $Y2=0
r51 27 38 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=1.515 $Y=0 $X2=1.35
+ $Y2=0
r52 27 29 10.7647 $w=1.68e-07 $l=1.65e-07 $layer=LI1_cond $X=1.515 $Y=0 $X2=1.68
+ $Y2=0
r53 26 41 4.67962 $w=1.7e-07 $l=2.35e-07 $layer=LI1_cond $X=3.85 $Y=0 $X2=4.085
+ $Y2=0
r54 26 32 16.3102 $w=1.68e-07 $l=2.5e-07 $layer=LI1_cond $X=3.85 $Y=0 $X2=3.6
+ $Y2=0
r55 24 33 0.401378 $w=4.9e-07 $l=1.44e-06 $layer=MET1_cond $X=2.16 $Y=0 $X2=3.6
+ $Y2=0
r56 24 30 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=2.16 $Y=0 $X2=1.68
+ $Y2=0
r57 20 41 3.08656 $w=3.3e-07 $l=1.14782e-07 $layer=LI1_cond $X=4.015 $Y=0.085
+ $X2=4.085 $Y2=0
r58 20 22 15.0167 $w=3.28e-07 $l=4.3e-07 $layer=LI1_cond $X=4.015 $Y=0.085
+ $X2=4.015 $Y2=0.515
r59 16 38 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=1.35 $Y=0.085
+ $X2=1.35 $Y2=0
r60 16 18 20.6043 $w=3.28e-07 $l=5.9e-07 $layer=LI1_cond $X=1.35 $Y=0.085
+ $X2=1.35 $Y2=0.675
r61 15 35 4.73185 $w=1.7e-07 $l=2.23e-07 $layer=LI1_cond $X=0.445 $Y=0 $X2=0.222
+ $Y2=0
r62 14 38 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=1.185 $Y=0 $X2=1.35
+ $Y2=0
r63 14 15 48.2781 $w=1.68e-07 $l=7.4e-07 $layer=LI1_cond $X=1.185 $Y=0 $X2=0.445
+ $Y2=0
r64 10 35 3.03433 $w=3.3e-07 $l=1.1025e-07 $layer=LI1_cond $X=0.28 $Y=0.085
+ $X2=0.222 $Y2=0
r65 10 12 15.0167 $w=3.28e-07 $l=4.3e-07 $layer=LI1_cond $X=0.28 $Y=0.085
+ $X2=0.28 $Y2=0.515
r66 3 22 91 $w=1.7e-07 $l=2.03286e-07 $layer=licon1_NDIFF $count=2 $X=3.875
+ $Y=0.37 $X2=4.015 $Y2=0.515
r67 2 18 182 $w=1.7e-07 $l=4.20595e-07 $layer=licon1_NDIFF $count=1 $X=1.075
+ $Y=0.37 $X2=1.35 $Y2=0.675
r68 1 12 91 $w=1.7e-07 $l=2.05061e-07 $layer=licon1_NDIFF $count=2 $X=0.135
+ $Y=0.37 $X2=0.28 $Y2=0.515
.ends