* File: sky130_fd_sc_ms__a31o_2.pex.spice
* Created: Wed Sep  2 11:55:08 2020
* Program "Calibre xRC"
* Version "v2018.4_34.26"
* Nominal Temperature: 27C
* Circuit Temperature: 27C
* 
.subckt PM_SKY130_FD_SC_MS__A31O_2%A_97_296# 1 2 9 13 17 21 24 25 26 27 29 31 35
+ 40 48
r110 47 48 4.40854 $w=3.28e-07 $l=3e-08 $layer=POLY_cond $X=0.995 $Y=1.465
+ $X2=1.025 $Y2=1.465
r111 46 47 61.7195 $w=3.28e-07 $l=4.2e-07 $layer=POLY_cond $X=0.575 $Y=1.465
+ $X2=0.995 $Y2=1.465
r112 45 46 1.46951 $w=3.28e-07 $l=1e-08 $layer=POLY_cond $X=0.565 $Y=1.465
+ $X2=0.575 $Y2=1.465
r113 41 48 13.9604 $w=3.28e-07 $l=9.5e-08 $layer=POLY_cond $X=1.12 $Y=1.465
+ $X2=1.025 $Y2=1.465
r114 40 41 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=1.12
+ $Y=1.465 $X2=1.12 $Y2=1.465
r115 35 37 24.0657 $w=3.38e-07 $l=7.1e-07 $layer=LI1_cond $X=3.555 $Y=1.985
+ $X2=3.555 $Y2=2.695
r116 33 35 3.22006 $w=3.38e-07 $l=9.5e-08 $layer=LI1_cond $X=3.555 $Y=1.89
+ $X2=3.555 $Y2=1.985
r117 29 44 2.6405 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=3.015 $Y=0.84
+ $X2=3.015 $Y2=0.925
r118 29 31 12.0483 $w=3.28e-07 $l=3.45e-07 $layer=LI1_cond $X=3.015 $Y=0.84
+ $X2=3.015 $Y2=0.495
r119 28 40 15.363 $w=2.7e-07 $l=4.1845e-07 $layer=LI1_cond $X=1.305 $Y=1.805
+ $X2=1.13 $Y2=1.465
r120 27 33 7.85115 $w=1.7e-07 $l=2.08207e-07 $layer=LI1_cond $X=3.385 $Y=1.805
+ $X2=3.555 $Y2=1.89
r121 27 28 135.701 $w=1.68e-07 $l=2.08e-06 $layer=LI1_cond $X=3.385 $Y=1.805
+ $X2=1.305 $Y2=1.805
r122 25 44 5.12568 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.85 $Y=0.925
+ $X2=3.015 $Y2=0.925
r123 25 26 100.797 $w=1.68e-07 $l=1.545e-06 $layer=LI1_cond $X=2.85 $Y=0.925
+ $X2=1.305 $Y2=0.925
r124 24 40 9.12098 $w=2.7e-07 $l=2.05122e-07 $layer=LI1_cond $X=1.22 $Y=1.3
+ $X2=1.13 $Y2=1.465
r125 23 26 6.81649 $w=1.7e-07 $l=1.20208e-07 $layer=LI1_cond $X=1.22 $Y=1.01
+ $X2=1.305 $Y2=0.925
r126 23 24 18.9198 $w=1.68e-07 $l=2.9e-07 $layer=LI1_cond $X=1.22 $Y=1.01
+ $X2=1.22 $Y2=1.3
r127 19 48 16.7902 $w=1.8e-07 $l=1.65e-07 $layer=POLY_cond $X=1.025 $Y=1.63
+ $X2=1.025 $Y2=1.465
r128 19 21 299.306 $w=1.8e-07 $l=7.7e-07 $layer=POLY_cond $X=1.025 $Y=1.63
+ $X2=1.025 $Y2=2.4
r129 15 47 21.0783 $w=1.5e-07 $l=1.65e-07 $layer=POLY_cond $X=0.995 $Y=1.3
+ $X2=0.995 $Y2=1.465
r130 15 17 287.149 $w=1.5e-07 $l=5.6e-07 $layer=POLY_cond $X=0.995 $Y=1.3
+ $X2=0.995 $Y2=0.74
r131 11 45 21.0783 $w=1.5e-07 $l=1.65e-07 $layer=POLY_cond $X=0.565 $Y=1.3
+ $X2=0.565 $Y2=1.465
r132 11 13 287.149 $w=1.5e-07 $l=5.6e-07 $layer=POLY_cond $X=0.565 $Y=1.3
+ $X2=0.565 $Y2=0.74
r133 7 46 16.7902 $w=1.8e-07 $l=1.65e-07 $layer=POLY_cond $X=0.575 $Y=1.63
+ $X2=0.575 $Y2=1.465
r134 7 9 299.306 $w=1.8e-07 $l=7.7e-07 $layer=POLY_cond $X=0.575 $Y=1.63
+ $X2=0.575 $Y2=2.4
r135 2 37 400 $w=1.7e-07 $l=9.22348e-07 $layer=licon1_PDIFF $count=1 $X=3.415
+ $Y=1.84 $X2=3.555 $Y2=2.695
r136 2 35 400 $w=1.7e-07 $l=2.03286e-07 $layer=licon1_PDIFF $count=1 $X=3.415
+ $Y=1.84 $X2=3.555 $Y2=1.985
r137 1 44 182 $w=1.7e-07 $l=6.47321e-07 $layer=licon1_NDIFF $count=1 $X=2.815
+ $Y=0.37 $X2=3.015 $Y2=0.925
r138 1 31 182 $w=1.7e-07 $l=2.54951e-07 $layer=licon1_NDIFF $count=1 $X=2.815
+ $Y=0.37 $X2=3.015 $Y2=0.495
.ends

.subckt PM_SKY130_FD_SC_MS__A31O_2%A3 3 7 8 11 13
r36 11 14 40.6903 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=1.69 $Y=1.385
+ $X2=1.69 $Y2=1.55
r37 11 13 46.2115 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=1.69 $Y=1.385
+ $X2=1.69 $Y2=1.22
r38 11 12 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=1.69
+ $Y=1.385 $X2=1.69 $Y2=1.385
r39 8 12 3.14303 $w=3.28e-07 $l=9e-08 $layer=LI1_cond $X=1.69 $Y=1.295 $X2=1.69
+ $Y2=1.385
r40 7 13 154.24 $w=1.5e-07 $l=4.8e-07 $layer=POLY_cond $X=1.78 $Y=0.74 $X2=1.78
+ $Y2=1.22
r41 3 14 307.081 $w=1.8e-07 $l=7.9e-07 $layer=POLY_cond $X=1.735 $Y=2.34
+ $X2=1.735 $Y2=1.55
.ends

.subckt PM_SKY130_FD_SC_MS__A31O_2%A2 3 6 8 11 12 13
c32 13 0 3.78493e-20 $X=2.26 $Y=1.22
c33 12 0 1.63365e-19 $X=2.26 $Y=1.385
r34 11 14 40.6903 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=2.26 $Y=1.385
+ $X2=2.26 $Y2=1.55
r35 11 13 46.2115 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=2.26 $Y=1.385
+ $X2=2.26 $Y2=1.22
r36 11 12 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=2.26
+ $Y=1.385 $X2=2.26 $Y2=1.385
r37 8 12 3.11471 $w=3.68e-07 $l=1e-07 $layer=LI1_cond $X=2.16 $Y=1.365 $X2=2.26
+ $Y2=1.365
r38 6 14 307.081 $w=1.8e-07 $l=7.9e-07 $layer=POLY_cond $X=2.185 $Y=2.34
+ $X2=2.185 $Y2=1.55
r39 3 13 154.24 $w=1.5e-07 $l=4.8e-07 $layer=POLY_cond $X=2.17 $Y=0.74 $X2=2.17
+ $Y2=1.22
.ends

.subckt PM_SKY130_FD_SC_MS__A31O_2%A1 3 6 8 11 13
c35 13 0 1.63365e-19 $X=2.83 $Y=1.22
c36 8 0 3.78493e-20 $X=3.12 $Y=1.295
r37 11 14 40.6903 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=2.83 $Y=1.385
+ $X2=2.83 $Y2=1.55
r38 11 13 46.2115 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=2.83 $Y=1.385
+ $X2=2.83 $Y2=1.22
r39 11 12 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=2.83
+ $Y=1.385 $X2=2.83 $Y2=1.385
r40 8 12 9.03266 $w=3.68e-07 $l=2.9e-07 $layer=LI1_cond $X=3.12 $Y=1.365
+ $X2=2.83 $Y2=1.365
r41 6 14 307.081 $w=1.8e-07 $l=7.9e-07 $layer=POLY_cond $X=2.825 $Y=2.34
+ $X2=2.825 $Y2=1.55
r42 3 13 154.24 $w=1.5e-07 $l=4.8e-07 $layer=POLY_cond $X=2.74 $Y=0.74 $X2=2.74
+ $Y2=1.22
.ends

.subckt PM_SKY130_FD_SC_MS__A31O_2%B1 1 3 6 8 14
r24 14 15 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=3.57
+ $Y=1.385 $X2=3.57 $Y2=1.385
r25 12 14 42.841 $w=3.3e-07 $l=2.45e-07 $layer=POLY_cond $X=3.325 $Y=1.385
+ $X2=3.57 $Y2=1.385
r26 10 12 2.62292 $w=3.3e-07 $l=1.5e-08 $layer=POLY_cond $X=3.31 $Y=1.385
+ $X2=3.325 $Y2=1.385
r27 8 15 3.14303 $w=3.28e-07 $l=9e-08 $layer=LI1_cond $X=3.57 $Y=1.295 $X2=3.57
+ $Y2=1.385
r28 4 12 16.9318 $w=1.8e-07 $l=1.65e-07 $layer=POLY_cond $X=3.325 $Y=1.55
+ $X2=3.325 $Y2=1.385
r29 4 6 307.081 $w=1.8e-07 $l=7.9e-07 $layer=POLY_cond $X=3.325 $Y=1.55
+ $X2=3.325 $Y2=2.34
r30 1 10 21.2229 $w=1.5e-07 $l=1.65e-07 $layer=POLY_cond $X=3.31 $Y=1.22
+ $X2=3.31 $Y2=1.385
r31 1 3 154.24 $w=1.5e-07 $l=4.8e-07 $layer=POLY_cond $X=3.31 $Y=1.22 $X2=3.31
+ $Y2=0.74
.ends

.subckt PM_SKY130_FD_SC_MS__A31O_2%VPWR 1 2 3 10 12 18 24 26 28 33 40 41 47 50
r50 50 51 6.2 $w=1.7e-07 $l=2.55e-07 $layer=mcon $count=1 $X=2.64 $Y=3.33
+ $X2=2.64 $Y2=3.33
r51 47 48 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.2 $Y=3.33 $X2=1.2
+ $Y2=3.33
r52 44 45 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.24 $Y=3.33
+ $X2=0.24 $Y2=3.33
r53 41 51 0.267585 $w=4.9e-07 $l=9.6e-07 $layer=MET1_cond $X=3.6 $Y=3.33
+ $X2=2.64 $Y2=3.33
r54 40 41 6.2 $w=1.7e-07 $l=2.55e-07 $layer=mcon $count=1 $X=3.6 $Y=3.33 $X2=3.6
+ $Y2=3.33
r55 38 50 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.68 $Y=3.33
+ $X2=2.515 $Y2=3.33
r56 38 40 60.0214 $w=1.68e-07 $l=9.2e-07 $layer=LI1_cond $X=2.68 $Y=3.33 $X2=3.6
+ $Y2=3.33
r57 37 51 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=2.16 $Y=3.33
+ $X2=2.64 $Y2=3.33
r58 36 37 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=2.16 $Y=3.33
+ $X2=2.16 $Y2=3.33
r59 34 47 11.757 $w=1.7e-07 $l=2.68e-07 $layer=LI1_cond $X=1.625 $Y=3.33
+ $X2=1.357 $Y2=3.33
r60 34 36 34.9037 $w=1.68e-07 $l=5.35e-07 $layer=LI1_cond $X=1.625 $Y=3.33
+ $X2=2.16 $Y2=3.33
r61 33 50 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.35 $Y=3.33
+ $X2=2.515 $Y2=3.33
r62 33 36 12.3957 $w=1.68e-07 $l=1.9e-07 $layer=LI1_cond $X=2.35 $Y=3.33
+ $X2=2.16 $Y2=3.33
r63 32 48 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.72 $Y=3.33
+ $X2=1.2 $Y2=3.33
r64 32 45 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.72 $Y=3.33
+ $X2=0.24 $Y2=3.33
r65 31 32 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.72 $Y=3.33
+ $X2=0.72 $Y2=3.33
r66 29 44 3.93235 $w=1.7e-07 $l=2.18e-07 $layer=LI1_cond $X=0.435 $Y=3.33
+ $X2=0.217 $Y2=3.33
r67 29 31 18.5936 $w=1.68e-07 $l=2.85e-07 $layer=LI1_cond $X=0.435 $Y=3.33
+ $X2=0.72 $Y2=3.33
r68 28 47 11.757 $w=1.7e-07 $l=2.67e-07 $layer=LI1_cond $X=1.09 $Y=3.33
+ $X2=1.357 $Y2=3.33
r69 28 31 24.139 $w=1.68e-07 $l=3.7e-07 $layer=LI1_cond $X=1.09 $Y=3.33 $X2=0.72
+ $Y2=3.33
r70 26 37 0.0668963 $w=4.9e-07 $l=2.4e-07 $layer=MET1_cond $X=1.92 $Y=3.33
+ $X2=2.16 $Y2=3.33
r71 26 48 0.200689 $w=4.9e-07 $l=7.2e-07 $layer=MET1_cond $X=1.92 $Y=3.33
+ $X2=1.2 $Y2=3.33
r72 22 50 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=2.515 $Y=3.245
+ $X2=2.515 $Y2=3.33
r73 22 24 23.7473 $w=3.28e-07 $l=6.8e-07 $layer=LI1_cond $X=2.515 $Y=3.245
+ $X2=2.515 $Y2=2.565
r74 18 21 15.4261 $w=5.33e-07 $l=6.9e-07 $layer=LI1_cond $X=1.357 $Y=2.145
+ $X2=1.357 $Y2=2.835
r75 16 47 2.24534 $w=5.35e-07 $l=8.5e-08 $layer=LI1_cond $X=1.357 $Y=3.245
+ $X2=1.357 $Y2=3.33
r76 16 21 9.16621 $w=5.33e-07 $l=4.1e-07 $layer=LI1_cond $X=1.357 $Y=3.245
+ $X2=1.357 $Y2=2.835
r77 12 15 38.2611 $w=2.48e-07 $l=8.3e-07 $layer=LI1_cond $X=0.31 $Y=1.985
+ $X2=0.31 $Y2=2.815
r78 10 44 3.21082 $w=2.5e-07 $l=1.28662e-07 $layer=LI1_cond $X=0.31 $Y=3.245
+ $X2=0.217 $Y2=3.33
r79 10 15 19.822 $w=2.48e-07 $l=4.3e-07 $layer=LI1_cond $X=0.31 $Y=3.245
+ $X2=0.31 $Y2=2.815
r80 3 24 600 $w=1.7e-07 $l=8.36436e-07 $layer=licon1_PDIFF $count=1 $X=2.275
+ $Y=1.84 $X2=2.515 $Y2=2.565
r81 2 21 600 $w=1.7e-07 $l=1.0627e-06 $layer=licon1_PDIFF $count=1 $X=1.115
+ $Y=1.84 $X2=1.255 $Y2=2.835
r82 2 18 300 $w=1.7e-07 $l=3.68409e-07 $layer=licon1_PDIFF $count=2 $X=1.115
+ $Y=1.84 $X2=1.255 $Y2=2.145
r83 1 15 400 $w=1.7e-07 $l=1.04499e-06 $layer=licon1_PDIFF $count=1 $X=0.205
+ $Y=1.84 $X2=0.35 $Y2=2.815
r84 1 12 400 $w=1.7e-07 $l=2.05061e-07 $layer=licon1_PDIFF $count=1 $X=0.205
+ $Y=1.84 $X2=0.35 $Y2=1.985
.ends

.subckt PM_SKY130_FD_SC_MS__A31O_2%X 1 2 9 13 14 15 16 24 33
r31 21 24 0.292684 $w=3.13e-07 $l=8e-09 $layer=LI1_cond $X=0.762 $Y=1.977
+ $X2=0.762 $Y2=1.985
r32 15 16 13.5366 $w=3.13e-07 $l=3.7e-07 $layer=LI1_cond $X=0.762 $Y=2.405
+ $X2=0.762 $Y2=2.775
r33 14 21 0.512197 $w=3.13e-07 $l=1.4e-08 $layer=LI1_cond $X=0.762 $Y=1.963
+ $X2=0.762 $Y2=1.977
r34 14 33 7.65769 $w=3.13e-07 $l=1.43e-07 $layer=LI1_cond $X=0.762 $Y=1.963
+ $X2=0.762 $Y2=1.82
r35 14 15 13.061 $w=3.13e-07 $l=3.57e-07 $layer=LI1_cond $X=0.762 $Y=2.048
+ $X2=0.762 $Y2=2.405
r36 14 24 2.30489 $w=3.13e-07 $l=6.3e-08 $layer=LI1_cond $X=0.762 $Y=2.048
+ $X2=0.762 $Y2=1.985
r37 13 33 45.016 $w=1.68e-07 $l=6.9e-07 $layer=LI1_cond $X=0.7 $Y=1.13 $X2=0.7
+ $Y2=1.82
r38 7 13 7.41084 $w=2.73e-07 $l=1.37e-07 $layer=LI1_cond $X=0.752 $Y=0.993
+ $X2=0.752 $Y2=1.13
r39 7 9 20.0316 $w=2.73e-07 $l=4.78e-07 $layer=LI1_cond $X=0.752 $Y=0.993
+ $X2=0.752 $Y2=0.515
r40 2 16 400 $w=1.7e-07 $l=1.04031e-06 $layer=licon1_PDIFF $count=1 $X=0.665
+ $Y=1.84 $X2=0.8 $Y2=2.815
r41 2 24 400 $w=1.7e-07 $l=2.01494e-07 $layer=licon1_PDIFF $count=1 $X=0.665
+ $Y=1.84 $X2=0.8 $Y2=1.985
r42 1 9 91 $w=1.7e-07 $l=2.03286e-07 $layer=licon1_NDIFF $count=2 $X=0.64
+ $Y=0.37 $X2=0.78 $Y2=0.515
.ends

.subckt PM_SKY130_FD_SC_MS__A31O_2%A_365_368# 1 2 9 14 16
r26 10 14 5.12568 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.125 $Y=2.145
+ $X2=1.96 $Y2=2.145
r27 9 16 5.12568 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.885 $Y=2.145
+ $X2=3.05 $Y2=2.145
r28 9 10 49.5829 $w=1.68e-07 $l=7.6e-07 $layer=LI1_cond $X=2.885 $Y=2.145
+ $X2=2.125 $Y2=2.145
r29 2 16 300 $w=1.7e-07 $l=3.91727e-07 $layer=licon1_PDIFF $count=2 $X=2.915
+ $Y=1.84 $X2=3.05 $Y2=2.17
r30 1 14 300 $w=1.7e-07 $l=3.81576e-07 $layer=licon1_PDIFF $count=2 $X=1.825
+ $Y=1.84 $X2=1.96 $Y2=2.16
.ends

.subckt PM_SKY130_FD_SC_MS__A31O_2%VGND 1 2 3 10 12 14 16 18 20 25 35 44
r44 43 44 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=3.6 $Y=0 $X2=3.6
+ $Y2=0
r45 36 38 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=1.2 $Y=0 $X2=1.68
+ $Y2=0
r46 35 40 9.19374 $w=6.68e-07 $l=5.15e-07 $layer=LI1_cond $X=1.395 $Y=0
+ $X2=1.395 $Y2=0.515
r47 35 38 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=1.68 $Y=0 $X2=1.68
+ $Y2=0
r48 35 36 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.2 $Y=0 $X2=1.2
+ $Y2=0
r49 31 32 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.24 $Y=0 $X2=0.24
+ $Y2=0
r50 29 44 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=3.12 $Y=0 $X2=3.6
+ $Y2=0
r51 28 29 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=3.12 $Y=0 $X2=3.12
+ $Y2=0
r52 26 35 9.03384 $w=1.7e-07 $l=3.35e-07 $layer=LI1_cond $X=1.73 $Y=0 $X2=1.395
+ $Y2=0
r53 26 28 90.6845 $w=1.68e-07 $l=1.39e-06 $layer=LI1_cond $X=1.73 $Y=0 $X2=3.12
+ $Y2=0
r54 25 43 4.65971 $w=1.7e-07 $l=2.4e-07 $layer=LI1_cond $X=3.36 $Y=0 $X2=3.6
+ $Y2=0
r55 25 28 15.6578 $w=1.68e-07 $l=2.4e-07 $layer=LI1_cond $X=3.36 $Y=0 $X2=3.12
+ $Y2=0
r56 24 36 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.72 $Y=0 $X2=1.2
+ $Y2=0
r57 24 32 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.72 $Y=0 $X2=0.24
+ $Y2=0
r58 23 24 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.72 $Y=0 $X2=0.72
+ $Y2=0
r59 21 31 4.73185 $w=1.7e-07 $l=2.23e-07 $layer=LI1_cond $X=0.445 $Y=0 $X2=0.222
+ $Y2=0
r60 21 23 17.9412 $w=1.68e-07 $l=2.75e-07 $layer=LI1_cond $X=0.445 $Y=0 $X2=0.72
+ $Y2=0
r61 20 35 9.03384 $w=1.7e-07 $l=3.35e-07 $layer=LI1_cond $X=1.06 $Y=0 $X2=1.395
+ $Y2=0
r62 20 23 22.1818 $w=1.68e-07 $l=3.4e-07 $layer=LI1_cond $X=1.06 $Y=0 $X2=0.72
+ $Y2=0
r63 18 29 0.334482 $w=4.9e-07 $l=1.2e-06 $layer=MET1_cond $X=1.92 $Y=0 $X2=3.12
+ $Y2=0
r64 18 38 0.0668963 $w=4.9e-07 $l=2.4e-07 $layer=MET1_cond $X=1.92 $Y=0 $X2=1.68
+ $Y2=0
r65 14 43 3.10647 $w=3.3e-07 $l=1.16619e-07 $layer=LI1_cond $X=3.525 $Y=0.085
+ $X2=3.6 $Y2=0
r66 14 16 15.0167 $w=3.28e-07 $l=4.3e-07 $layer=LI1_cond $X=3.525 $Y=0.085
+ $X2=3.525 $Y2=0.515
r67 10 31 3.03433 $w=3.3e-07 $l=1.1025e-07 $layer=LI1_cond $X=0.28 $Y=0.085
+ $X2=0.222 $Y2=0
r68 10 12 15.0167 $w=3.28e-07 $l=4.3e-07 $layer=LI1_cond $X=0.28 $Y=0.085
+ $X2=0.28 $Y2=0.515
r69 3 16 91 $w=1.7e-07 $l=2.03286e-07 $layer=licon1_NDIFF $count=2 $X=3.385
+ $Y=0.37 $X2=3.525 $Y2=0.515
r70 2 40 91 $w=1.7e-07 $l=5.6285e-07 $layer=licon1_NDIFF $count=2 $X=1.07
+ $Y=0.37 $X2=1.565 $Y2=0.515
r71 1 12 91 $w=1.7e-07 $l=2.05061e-07 $layer=licon1_NDIFF $count=2 $X=0.135
+ $Y=0.37 $X2=0.28 $Y2=0.515
.ends