| * File: sky130_fd_sc_ms__clkdlyinv5sd1_1.pex.spice |
| * Created: Fri Aug 28 17:18:47 2020 |
| * Program "Calibre xRC" |
| * Version "v2018.4_34.26" |
| * Nominal Temperature: 27C |
| * Circuit Temperature: 27C |
| * |
| .subckt PM_SKY130_FD_SC_MS__CLKDLYINV5SD1_1%A 3 7 9 10 14 |
| r34 14 17 40.6903 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=0.57 $Y=1.355 |
| + $X2=0.57 $Y2=1.52 |
| r35 14 16 46.2115 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=0.57 $Y=1.355 |
| + $X2=0.57 $Y2=1.19 |
| r36 14 15 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=0.57 |
| + $Y=1.355 $X2=0.57 $Y2=1.355 |
| r37 10 15 5.88547 $w=6.28e-07 $l=3.1e-07 $layer=LI1_cond $X=0.415 $Y=1.665 |
| + $X2=0.415 $Y2=1.355 |
| r38 9 15 1.13912 $w=6.28e-07 $l=6e-08 $layer=LI1_cond $X=0.415 $Y=1.295 |
| + $X2=0.415 $Y2=1.355 |
| r39 7 17 342.065 $w=1.8e-07 $l=8.8e-07 $layer=POLY_cond $X=0.495 $Y=2.4 |
| + $X2=0.495 $Y2=1.52 |
| r40 3 16 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=0.48 $Y=0.58 $X2=0.48 |
| + $Y2=1.19 |
| .ends |
| |
| .subckt PM_SKY130_FD_SC_MS__CLKDLYINV5SD1_1%A_28_74# 1 2 9 13 15 16 19 21 23 25 |
| + 27 28 32 |
| r60 32 33 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=1.14 |
| + $Y=1.295 $X2=1.14 $Y2=1.295 |
| r61 30 32 25.668 $w=3.28e-07 $l=7.35e-07 $layer=LI1_cond $X=1.14 $Y=2.03 |
| + $X2=1.14 $Y2=1.295 |
| r62 29 32 9.60369 $w=3.28e-07 $l=2.75e-07 $layer=LI1_cond $X=1.14 $Y=1.02 |
| + $X2=1.14 $Y2=1.295 |
| r63 27 29 7.36389 $w=2e-07 $l=2.09105e-07 $layer=LI1_cond $X=0.975 $Y=0.92 |
| + $X2=1.14 $Y2=1.02 |
| r64 27 28 31.3318 $w=1.98e-07 $l=5.65e-07 $layer=LI1_cond $X=0.975 $Y=0.92 |
| + $X2=0.41 $Y2=0.92 |
| r65 26 35 4.75367 $w=1.75e-07 $l=1.53e-07 $layer=LI1_cond $X=0.4 $Y=2.117 |
| + $X2=0.247 $Y2=2.117 |
| r66 25 30 7.68689 $w=1.75e-07 $l=2.03912e-07 $layer=LI1_cond $X=0.975 $Y=2.117 |
| + $X2=1.14 $Y2=2.03 |
| r67 25 26 36.4416 $w=1.73e-07 $l=5.75e-07 $layer=LI1_cond $X=0.975 $Y=2.117 |
| + $X2=0.4 $Y2=2.117 |
| r68 21 35 2.73414 $w=3.05e-07 $l=8.8e-08 $layer=LI1_cond $X=0.247 $Y=2.205 |
| + $X2=0.247 $Y2=2.117 |
| r69 21 23 13.4137 $w=3.03e-07 $l=3.55e-07 $layer=LI1_cond $X=0.247 $Y=2.205 |
| + $X2=0.247 $Y2=2.56 |
| r70 17 28 7.26812 $w=2e-07 $l=2.01901e-07 $layer=LI1_cond $X=0.252 $Y=0.82 |
| + $X2=0.41 $Y2=0.92 |
| r71 17 19 8.78052 $w=3.13e-07 $l=2.4e-07 $layer=LI1_cond $X=0.252 $Y=0.82 |
| + $X2=0.252 $Y2=0.58 |
| r72 15 33 26.2292 $w=3.3e-07 $l=1.5e-07 $layer=POLY_cond $X=1.29 $Y=1.295 |
| + $X2=1.14 $Y2=1.295 |
| r73 15 16 5.03009 $w=3.3e-07 $l=7.7e-08 $layer=POLY_cond $X=1.29 $Y=1.295 |
| + $X2=1.367 $Y2=1.295 |
| r74 11 16 37.0704 $w=1.5e-07 $l=1.66493e-07 $layer=POLY_cond $X=1.37 $Y=1.46 |
| + $X2=1.367 $Y2=1.295 |
| r75 11 13 512.766 $w=1.5e-07 $l=1e-06 $layer=POLY_cond $X=1.37 $Y=1.46 $X2=1.37 |
| + $Y2=2.46 |
| r76 7 16 37.0704 $w=1.5e-07 $l=1.65997e-07 $layer=POLY_cond $X=1.365 $Y=1.13 |
| + $X2=1.367 $Y2=1.295 |
| r77 7 9 282.021 $w=1.5e-07 $l=5.5e-07 $layer=POLY_cond $X=1.365 $Y=1.13 |
| + $X2=1.365 $Y2=0.58 |
| r78 2 35 600 $w=1.7e-07 $l=3.31662e-07 $layer=licon1_PDIFF $count=1 $X=0.14 |
| + $Y=1.84 $X2=0.265 $Y2=2.115 |
| r79 2 23 600 $w=1.7e-07 $l=7.8e-07 $layer=licon1_PDIFF $count=1 $X=0.14 $Y=1.84 |
| + $X2=0.265 $Y2=2.56 |
| r80 1 19 182 $w=1.7e-07 $l=2.65236e-07 $layer=licon1_NDIFF $count=1 $X=0.14 |
| + $Y=0.37 $X2=0.265 $Y2=0.58 |
| .ends |
| |
| .subckt PM_SKY130_FD_SC_MS__CLKDLYINV5SD1_1%A_288_74# 1 2 9 13 15 16 19 24 27 31 |
| + 34 |
| r44 31 32 6.17723 $w=3.28e-07 $l=1.65e-07 $layer=LI1_cond $X=1.58 $Y=2.815 |
| + $X2=1.58 $Y2=2.65 |
| r45 27 28 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=2.425 |
| + $Y=1.305 $X2=2.425 $Y2=1.305 |
| r46 25 34 0.466467 $w=3.3e-07 $l=1.35e-07 $layer=LI1_cond $X=1.745 $Y=1.305 |
| + $X2=1.61 $Y2=1.305 |
| r47 25 27 23.7473 $w=3.28e-07 $l=6.8e-07 $layer=LI1_cond $X=1.745 $Y=1.305 |
| + $X2=2.425 $Y2=1.305 |
| r48 24 32 23.2623 $w=2.68e-07 $l=5.45e-07 $layer=LI1_cond $X=1.61 $Y=2.105 |
| + $X2=1.61 $Y2=2.65 |
| r49 21 34 6.31733 $w=2.57e-07 $l=1.65e-07 $layer=LI1_cond $X=1.61 $Y=1.47 |
| + $X2=1.61 $Y2=1.305 |
| r50 21 24 27.1038 $w=2.68e-07 $l=6.35e-07 $layer=LI1_cond $X=1.61 $Y=1.47 |
| + $X2=1.61 $Y2=2.105 |
| r51 17 34 6.31733 $w=2.57e-07 $l=1.71377e-07 $layer=LI1_cond $X=1.597 $Y=1.14 |
| + $X2=1.61 $Y2=1.305 |
| r52 17 19 26.3416 $w=2.43e-07 $l=5.6e-07 $layer=LI1_cond $X=1.597 $Y=1.14 |
| + $X2=1.597 $Y2=0.58 |
| r53 15 28 29.7264 $w=3.3e-07 $l=1.7e-07 $layer=POLY_cond $X=2.595 $Y=1.305 |
| + $X2=2.425 $Y2=1.305 |
| r54 15 16 5.03009 $w=3.3e-07 $l=7.5e-08 $layer=POLY_cond $X=2.595 $Y=1.305 |
| + $X2=2.67 $Y2=1.305 |
| r55 11 16 37.0704 $w=1.5e-07 $l=1.65e-07 $layer=POLY_cond $X=2.67 $Y=1.47 |
| + $X2=2.67 $Y2=1.305 |
| r56 11 13 507.638 $w=1.5e-07 $l=9.9e-07 $layer=POLY_cond $X=2.67 $Y=1.47 |
| + $X2=2.67 $Y2=2.46 |
| r57 7 16 37.0704 $w=1.5e-07 $l=1.65e-07 $layer=POLY_cond $X=2.67 $Y=1.14 |
| + $X2=2.67 $Y2=1.305 |
| r58 7 9 287.149 $w=1.5e-07 $l=5.6e-07 $layer=POLY_cond $X=2.67 $Y=1.14 $X2=2.67 |
| + $Y2=0.58 |
| r59 2 31 600 $w=1.7e-07 $l=9.20027e-07 $layer=licon1_PDIFF $count=1 $X=1.445 |
| + $Y=1.96 $X2=1.58 $Y2=2.815 |
| r60 2 24 300 $w=1.7e-07 $l=2.01494e-07 $layer=licon1_PDIFF $count=2 $X=1.445 |
| + $Y=1.96 $X2=1.58 $Y2=2.105 |
| r61 1 19 182 $w=1.7e-07 $l=2.71109e-07 $layer=licon1_NDIFF $count=1 $X=1.44 |
| + $Y=0.37 $X2=1.58 $Y2=0.58 |
| .ends |
| |
| .subckt PM_SKY130_FD_SC_MS__CLKDLYINV5SD1_1%A_549_74# 1 2 9 13 15 16 19 23 29 32 |
| c49 29 0 6.34885e-20 $X=3.84 $Y=1.305 |
| c50 16 0 1.3327e-19 $X=4.02 $Y=1.14 |
| r51 29 30 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=3.84 |
| + $Y=1.305 $X2=3.84 $Y2=1.305 |
| r52 27 32 1.34256 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=2.97 $Y=1.305 |
| + $X2=2.885 $Y2=1.305 |
| r53 27 29 56.7594 $w=1.68e-07 $l=8.7e-07 $layer=LI1_cond $X=2.97 $Y=1.305 |
| + $X2=3.84 $Y2=1.305 |
| r54 23 25 46.3209 $w=1.68e-07 $l=7.1e-07 $layer=LI1_cond $X=2.885 $Y=2.105 |
| + $X2=2.885 $Y2=2.815 |
| r55 21 32 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=2.885 $Y=1.39 |
| + $X2=2.885 $Y2=1.305 |
| r56 21 23 46.6471 $w=1.68e-07 $l=7.15e-07 $layer=LI1_cond $X=2.885 $Y=1.39 |
| + $X2=2.885 $Y2=2.105 |
| r57 17 32 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=2.885 $Y=1.22 |
| + $X2=2.885 $Y2=1.305 |
| r58 17 19 41.754 $w=1.68e-07 $l=6.4e-07 $layer=LI1_cond $X=2.885 $Y=1.22 |
| + $X2=2.885 $Y2=0.58 |
| r59 15 30 31.475 $w=3.3e-07 $l=1.8e-07 $layer=POLY_cond $X=4.02 $Y=1.305 |
| + $X2=3.84 $Y2=1.305 |
| r60 15 16 5.03009 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=4.02 $Y=1.305 |
| + $X2=4.02 $Y2=1.14 |
| r61 11 16 37.0704 $w=1.5e-07 $l=8e-08 $layer=POLY_cond $X=4.1 $Y=1.14 $X2=4.02 |
| + $Y2=1.14 |
| r62 11 13 287.149 $w=1.5e-07 $l=5.6e-07 $layer=POLY_cond $X=4.1 $Y=1.14 $X2=4.1 |
| + $Y2=0.58 |
| r63 7 16 37.0704 $w=1.5e-07 $l=3.65582e-07 $layer=POLY_cond $X=4.095 $Y=1.47 |
| + $X2=4.02 $Y2=1.14 |
| r64 7 9 507.638 $w=1.5e-07 $l=9.9e-07 $layer=POLY_cond $X=4.095 $Y=1.47 |
| + $X2=4.095 $Y2=2.46 |
| r65 2 25 400 $w=1.7e-07 $l=9.22348e-07 $layer=licon1_PDIFF $count=1 $X=2.745 |
| + $Y=1.96 $X2=2.885 $Y2=2.815 |
| r66 2 23 400 $w=1.7e-07 $l=2.03286e-07 $layer=licon1_PDIFF $count=1 $X=2.745 |
| + $Y=1.96 $X2=2.885 $Y2=2.105 |
| r67 1 19 182 $w=1.7e-07 $l=2.71109e-07 $layer=licon1_NDIFF $count=1 $X=2.745 |
| + $Y=0.37 $X2=2.885 $Y2=0.58 |
| .ends |
| |
| .subckt PM_SKY130_FD_SC_MS__CLKDLYINV5SD1_1%A_682_74# 1 2 9 13 17 21 25 26 27 28 |
| + 32 33 |
| c59 25 0 1.3327e-19 $X=4.53 $Y=1.645 |
| c60 13 0 6.34885e-20 $X=4.71 $Y=0.58 |
| r61 33 36 40.6903 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=4.67 $Y=1.46 |
| + $X2=4.67 $Y2=1.625 |
| r62 33 35 46.2115 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=4.67 $Y=1.46 |
| + $X2=4.67 $Y2=1.295 |
| r63 32 33 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=4.67 |
| + $Y=1.46 $X2=4.67 $Y2=1.46 |
| r64 30 32 5.12197 $w=2.23e-07 $l=1e-07 $layer=LI1_cond $X=4.642 $Y=1.56 |
| + $X2=4.642 $Y2=1.46 |
| r65 29 32 21.0001 $w=2.23e-07 $l=4.1e-07 $layer=LI1_cond $X=4.642 $Y=1.05 |
| + $X2=4.642 $Y2=1.46 |
| r66 27 29 9.89123 $w=1.39e-07 $l=1.4854e-07 $layer=LI1_cond $X=4.53 $Y=0.965 |
| + $X2=4.642 $Y2=1.05 |
| r67 27 28 54.1497 $w=1.68e-07 $l=8.3e-07 $layer=LI1_cond $X=4.53 $Y=0.965 |
| + $X2=3.7 $Y2=0.965 |
| r68 25 30 6.9898 $w=1.7e-07 $l=1.4854e-07 $layer=LI1_cond $X=4.53 $Y=1.645 |
| + $X2=4.642 $Y2=1.56 |
| r69 25 26 57.0856 $w=1.68e-07 $l=8.75e-07 $layer=LI1_cond $X=4.53 $Y=1.645 |
| + $X2=3.655 $Y2=1.645 |
| r70 21 23 34.0931 $w=2.38e-07 $l=7.1e-07 $layer=LI1_cond $X=3.535 $Y=2.105 |
| + $X2=3.535 $Y2=2.815 |
| r71 19 26 7.07814 $w=1.7e-07 $l=1.56844e-07 $layer=LI1_cond $X=3.535 $Y=1.73 |
| + $X2=3.655 $Y2=1.645 |
| r72 19 21 18.0069 $w=2.38e-07 $l=3.75e-07 $layer=LI1_cond $X=3.535 $Y=1.73 |
| + $X2=3.535 $Y2=2.105 |
| r73 15 28 7.76618 $w=1.7e-07 $l=2.03101e-07 $layer=LI1_cond $X=3.535 $Y=0.88 |
| + $X2=3.7 $Y2=0.965 |
| r74 15 17 11.0006 $w=3.28e-07 $l=3.15e-07 $layer=LI1_cond $X=3.535 $Y=0.88 |
| + $X2=3.535 $Y2=0.565 |
| r75 13 35 366.628 $w=1.5e-07 $l=7.15e-07 $layer=POLY_cond $X=4.71 $Y=0.58 |
| + $X2=4.71 $Y2=1.295 |
| r76 9 36 301.25 $w=1.8e-07 $l=7.75e-07 $layer=POLY_cond $X=4.72 $Y=2.4 $X2=4.72 |
| + $Y2=1.625 |
| r77 2 23 400 $w=1.7e-07 $l=9.15369e-07 $layer=licon1_PDIFF $count=1 $X=3.41 |
| + $Y=1.96 $X2=3.535 $Y2=2.815 |
| r78 2 21 400 $w=1.7e-07 $l=1.97864e-07 $layer=licon1_PDIFF $count=1 $X=3.41 |
| + $Y=1.96 $X2=3.535 $Y2=2.105 |
| r79 1 17 182 $w=1.7e-07 $l=2.498e-07 $layer=licon1_NDIFF $count=1 $X=3.41 |
| + $Y=0.37 $X2=3.535 $Y2=0.565 |
| .ends |
| |
| .subckt PM_SKY130_FD_SC_MS__CLKDLYINV5SD1_1%VPWR 1 2 3 12 16 22 26 28 33 38 48 |
| + 49 52 55 58 65 |
| r51 58 59 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=4.56 $Y=3.33 |
| + $X2=4.56 $Y2=3.33 |
| r52 56 65 0.0668963 $w=4.9e-07 $l=2.4e-07 $layer=MET1_cond $X=2.16 $Y=3.33 |
| + $X2=1.92 $Y2=3.33 |
| r53 55 56 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.16 $Y=3.33 |
| + $X2=2.16 $Y2=3.33 |
| r54 52 53 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.72 $Y=3.33 |
| + $X2=0.72 $Y2=3.33 |
| r55 49 59 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=5.04 $Y=3.33 |
| + $X2=4.56 $Y2=3.33 |
| r56 48 49 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=5.04 $Y=3.33 |
| + $X2=5.04 $Y2=3.33 |
| r57 46 58 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=4.66 $Y=3.33 |
| + $X2=4.495 $Y2=3.33 |
| r58 46 48 24.7914 $w=1.68e-07 $l=3.8e-07 $layer=LI1_cond $X=4.66 $Y=3.33 |
| + $X2=5.04 $Y2=3.33 |
| r59 45 59 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=4.08 $Y=3.33 |
| + $X2=4.56 $Y2=3.33 |
| r60 44 45 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=4.08 $Y=3.33 |
| + $X2=4.08 $Y2=3.33 |
| r61 41 44 93.9465 $w=1.68e-07 $l=1.44e-06 $layer=LI1_cond $X=2.64 $Y=3.33 |
| + $X2=4.08 $Y2=3.33 |
| r62 39 55 8.9695 $w=1.7e-07 $l=1.75e-07 $layer=LI1_cond $X=2.265 $Y=3.33 |
| + $X2=2.09 $Y2=3.33 |
| r63 39 41 24.4652 $w=1.68e-07 $l=3.75e-07 $layer=LI1_cond $X=2.265 $Y=3.33 |
| + $X2=2.64 $Y2=3.33 |
| r64 38 58 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=4.33 $Y=3.33 |
| + $X2=4.495 $Y2=3.33 |
| r65 38 44 16.3102 $w=1.68e-07 $l=2.5e-07 $layer=LI1_cond $X=4.33 $Y=3.33 |
| + $X2=4.08 $Y2=3.33 |
| r66 37 65 0.0668963 $w=4.9e-07 $l=2.4e-07 $layer=MET1_cond $X=1.68 $Y=3.33 |
| + $X2=1.92 $Y2=3.33 |
| r67 37 53 0.267585 $w=4.9e-07 $l=9.6e-07 $layer=MET1_cond $X=1.68 $Y=3.33 |
| + $X2=0.72 $Y2=3.33 |
| r68 36 37 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=1.68 $Y=3.33 |
| + $X2=1.68 $Y2=3.33 |
| r69 34 52 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=0.905 $Y=3.33 |
| + $X2=0.74 $Y2=3.33 |
| r70 34 36 50.5615 $w=1.68e-07 $l=7.75e-07 $layer=LI1_cond $X=0.905 $Y=3.33 |
| + $X2=1.68 $Y2=3.33 |
| r71 33 55 8.9695 $w=1.7e-07 $l=1.75e-07 $layer=LI1_cond $X=1.915 $Y=3.33 |
| + $X2=2.09 $Y2=3.33 |
| r72 33 36 15.3316 $w=1.68e-07 $l=2.35e-07 $layer=LI1_cond $X=1.915 $Y=3.33 |
| + $X2=1.68 $Y2=3.33 |
| r73 31 53 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.24 $Y=3.33 |
| + $X2=0.72 $Y2=3.33 |
| r74 30 31 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.24 $Y=3.33 |
| + $X2=0.24 $Y2=3.33 |
| r75 28 52 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=0.575 $Y=3.33 |
| + $X2=0.74 $Y2=3.33 |
| r76 28 30 21.8556 $w=1.68e-07 $l=3.35e-07 $layer=LI1_cond $X=0.575 $Y=3.33 |
| + $X2=0.24 $Y2=3.33 |
| r77 26 45 0.401378 $w=4.9e-07 $l=1.44e-06 $layer=MET1_cond $X=2.64 $Y=3.33 |
| + $X2=4.08 $Y2=3.33 |
| r78 26 56 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=2.64 $Y=3.33 |
| + $X2=2.16 $Y2=3.33 |
| r79 26 41 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=2.64 $Y=3.33 |
| + $X2=2.64 $Y2=3.33 |
| r80 22 25 15.0167 $w=3.28e-07 $l=4.3e-07 $layer=LI1_cond $X=4.495 $Y=1.985 |
| + $X2=4.495 $Y2=2.415 |
| r81 20 58 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=4.495 $Y=3.245 |
| + $X2=4.495 $Y2=3.33 |
| r82 20 25 28.9857 $w=3.28e-07 $l=8.3e-07 $layer=LI1_cond $X=4.495 $Y=3.245 |
| + $X2=4.495 $Y2=2.415 |
| r83 16 19 23.3781 $w=3.48e-07 $l=7.1e-07 $layer=LI1_cond $X=2.09 $Y=2.105 |
| + $X2=2.09 $Y2=2.815 |
| r84 14 55 1.07557 $w=3.5e-07 $l=8.5e-08 $layer=LI1_cond $X=2.09 $Y=3.245 |
| + $X2=2.09 $Y2=3.33 |
| r85 14 19 14.1586 $w=3.48e-07 $l=4.3e-07 $layer=LI1_cond $X=2.09 $Y=3.245 |
| + $X2=2.09 $Y2=2.815 |
| r86 10 52 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=0.74 $Y=3.245 |
| + $X2=0.74 $Y2=3.33 |
| r87 10 12 27.2396 $w=3.28e-07 $l=7.8e-07 $layer=LI1_cond $X=0.74 $Y=3.245 |
| + $X2=0.74 $Y2=2.465 |
| r88 3 25 300 $w=1.7e-07 $l=5.95735e-07 $layer=licon1_PDIFF $count=2 $X=4.17 |
| + $Y=1.96 $X2=4.495 $Y2=2.415 |
| r89 3 22 600 $w=1.7e-07 $l=3.37268e-07 $layer=licon1_PDIFF $count=1 $X=4.17 |
| + $Y=1.96 $X2=4.495 $Y2=1.985 |
| r90 2 19 400 $w=1.7e-07 $l=9.15369e-07 $layer=licon1_PDIFF $count=1 $X=1.975 |
| + $Y=1.96 $X2=2.1 $Y2=2.815 |
| r91 2 16 400 $w=1.7e-07 $l=1.97864e-07 $layer=licon1_PDIFF $count=1 $X=1.975 |
| + $Y=1.96 $X2=2.1 $Y2=2.105 |
| r92 1 12 300 $w=1.7e-07 $l=6.98212e-07 $layer=licon1_PDIFF $count=2 $X=0.585 |
| + $Y=1.84 $X2=0.74 $Y2=2.465 |
| .ends |
| |
| .subckt PM_SKY130_FD_SC_MS__CLKDLYINV5SD1_1%Y 1 2 7 8 9 10 11 12 13 47 |
| r18 42 43 6.10729 $w=3.58e-07 $l=1.65e-07 $layer=LI1_cond $X=5.01 $Y=0.59 |
| + $X2=5.01 $Y2=0.755 |
| r19 30 47 1.44055 $w=3.58e-07 $l=4.5e-08 $layer=LI1_cond $X=5.01 $Y=2.08 |
| + $X2=5.01 $Y2=2.035 |
| r20 13 45 10.2198 $w=2.63e-07 $l=2.35e-07 $layer=LI1_cond $X=5.057 $Y=1.665 |
| + $X2=5.057 $Y2=1.9 |
| r21 11 12 11.8446 $w=3.58e-07 $l=3.7e-07 $layer=LI1_cond $X=5.01 $Y=2.405 |
| + $X2=5.01 $Y2=2.775 |
| r22 10 47 0.640246 $w=3.58e-07 $l=2e-08 $layer=LI1_cond $X=5.01 $Y=2.015 |
| + $X2=5.01 $Y2=2.035 |
| r23 10 45 4.50667 $w=3.58e-07 $l=1.15e-07 $layer=LI1_cond $X=5.01 $Y=2.015 |
| + $X2=5.01 $Y2=1.9 |
| r24 10 11 9.76375 $w=3.58e-07 $l=3.05e-07 $layer=LI1_cond $X=5.01 $Y=2.1 |
| + $X2=5.01 $Y2=2.405 |
| r25 10 30 0.640246 $w=3.58e-07 $l=2e-08 $layer=LI1_cond $X=5.01 $Y=2.1 $X2=5.01 |
| + $Y2=2.08 |
| r26 9 13 16.0907 $w=2.63e-07 $l=3.7e-07 $layer=LI1_cond $X=5.057 $Y=1.295 |
| + $X2=5.057 $Y2=1.665 |
| r27 8 9 16.0907 $w=2.63e-07 $l=3.7e-07 $layer=LI1_cond $X=5.057 $Y=0.925 |
| + $X2=5.057 $Y2=1.295 |
| r28 8 43 7.39303 $w=2.63e-07 $l=1.7e-07 $layer=LI1_cond $X=5.057 $Y=0.925 |
| + $X2=5.057 $Y2=0.755 |
| r29 7 42 1.12043 $w=3.58e-07 $l=3.5e-08 $layer=LI1_cond $X=5.01 $Y=0.555 |
| + $X2=5.01 $Y2=0.59 |
| r30 2 47 400 $w=1.7e-07 $l=2.86575e-07 $layer=licon1_PDIFF $count=1 $X=4.81 |
| + $Y=1.84 $X2=4.95 $Y2=2.065 |
| r31 2 12 400 $w=1.7e-07 $l=1.03764e-06 $layer=licon1_PDIFF $count=1 $X=4.81 |
| + $Y=1.84 $X2=4.95 $Y2=2.81 |
| r32 1 42 182 $w=1.7e-07 $l=2.81425e-07 $layer=licon1_NDIFF $count=1 $X=4.785 |
| + $Y=0.37 $X2=4.925 $Y2=0.59 |
| .ends |
| |
| .subckt PM_SKY130_FD_SC_MS__CLKDLYINV5SD1_1%VGND 1 2 3 12 16 20 22 24 29 34 44 |
| + 45 48 51 54 61 |
| r48 54 55 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=4.56 $Y=0 $X2=4.56 |
| + $Y2=0 |
| r49 52 61 0.0668963 $w=4.9e-07 $l=2.4e-07 $layer=MET1_cond $X=2.16 $Y=0 $X2=1.92 |
| + $Y2=0 |
| r50 51 52 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.16 $Y=0 $X2=2.16 |
| + $Y2=0 |
| r51 48 49 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.72 $Y=0 $X2=0.72 |
| + $Y2=0 |
| r52 45 55 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=5.04 $Y=0 $X2=4.56 |
| + $Y2=0 |
| r53 44 45 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=5.04 $Y=0 $X2=5.04 |
| + $Y2=0 |
| r54 42 54 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=4.66 $Y=0 $X2=4.495 |
| + $Y2=0 |
| r55 42 44 24.7914 $w=1.68e-07 $l=3.8e-07 $layer=LI1_cond $X=4.66 $Y=0 $X2=5.04 |
| + $Y2=0 |
| r56 41 55 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=4.08 $Y=0 $X2=4.56 |
| + $Y2=0 |
| r57 40 41 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=4.08 $Y=0 $X2=4.08 |
| + $Y2=0 |
| r58 37 40 93.9465 $w=1.68e-07 $l=1.44e-06 $layer=LI1_cond $X=2.64 $Y=0 $X2=4.08 |
| + $Y2=0 |
| r59 35 51 8.9695 $w=1.7e-07 $l=1.75e-07 $layer=LI1_cond $X=2.265 $Y=0 $X2=2.09 |
| + $Y2=0 |
| r60 35 37 24.4652 $w=1.68e-07 $l=3.75e-07 $layer=LI1_cond $X=2.265 $Y=0 $X2=2.64 |
| + $Y2=0 |
| r61 34 54 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=4.33 $Y=0 $X2=4.495 |
| + $Y2=0 |
| r62 34 40 16.3102 $w=1.68e-07 $l=2.5e-07 $layer=LI1_cond $X=4.33 $Y=0 $X2=4.08 |
| + $Y2=0 |
| r63 33 61 0.0668963 $w=4.9e-07 $l=2.4e-07 $layer=MET1_cond $X=1.68 $Y=0 $X2=1.92 |
| + $Y2=0 |
| r64 33 49 0.267585 $w=4.9e-07 $l=9.6e-07 $layer=MET1_cond $X=1.68 $Y=0 $X2=0.72 |
| + $Y2=0 |
| r65 32 33 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=1.68 $Y=0 $X2=1.68 |
| + $Y2=0 |
| r66 30 48 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=0.915 $Y=0 $X2=0.75 |
| + $Y2=0 |
| r67 30 32 49.9091 $w=1.68e-07 $l=7.65e-07 $layer=LI1_cond $X=0.915 $Y=0 $X2=1.68 |
| + $Y2=0 |
| r68 29 51 8.9695 $w=1.7e-07 $l=1.75e-07 $layer=LI1_cond $X=1.915 $Y=0 $X2=2.09 |
| + $Y2=0 |
| r69 29 32 15.3316 $w=1.68e-07 $l=2.35e-07 $layer=LI1_cond $X=1.915 $Y=0 $X2=1.68 |
| + $Y2=0 |
| r70 27 49 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.24 $Y=0 $X2=0.72 |
| + $Y2=0 |
| r71 26 27 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.24 $Y=0 $X2=0.24 |
| + $Y2=0 |
| r72 24 48 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=0.585 $Y=0 $X2=0.75 |
| + $Y2=0 |
| r73 24 26 22.508 $w=1.68e-07 $l=3.45e-07 $layer=LI1_cond $X=0.585 $Y=0 $X2=0.24 |
| + $Y2=0 |
| r74 22 41 0.401378 $w=4.9e-07 $l=1.44e-06 $layer=MET1_cond $X=2.64 $Y=0 $X2=4.08 |
| + $Y2=0 |
| r75 22 52 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=2.64 $Y=0 $X2=2.16 |
| + $Y2=0 |
| r76 22 37 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=2.64 $Y=0 $X2=2.64 |
| + $Y2=0 |
| r77 18 54 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=4.495 $Y=0.085 |
| + $X2=4.495 $Y2=0 |
| r78 18 20 17.4613 $w=3.28e-07 $l=5e-07 $layer=LI1_cond $X=4.495 $Y=0.085 |
| + $X2=4.495 $Y2=0.585 |
| r79 14 51 1.07557 $w=3.5e-07 $l=8.5e-08 $layer=LI1_cond $X=2.09 $Y=0.085 |
| + $X2=2.09 $Y2=0 |
| r80 14 16 16.2988 $w=3.48e-07 $l=4.95e-07 $layer=LI1_cond $X=2.09 $Y=0.085 |
| + $X2=2.09 $Y2=0.58 |
| r81 10 48 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=0.75 $Y=0.085 |
| + $X2=0.75 $Y2=0 |
| r82 10 12 16.7628 $w=3.28e-07 $l=4.8e-07 $layer=LI1_cond $X=0.75 $Y=0.085 |
| + $X2=0.75 $Y2=0.565 |
| r83 3 20 182 $w=1.7e-07 $l=4.13763e-07 $layer=licon1_NDIFF $count=1 $X=4.175 |
| + $Y=0.37 $X2=4.495 $Y2=0.585 |
| r84 2 16 182 $w=1.7e-07 $l=2.67208e-07 $layer=licon1_NDIFF $count=1 $X=1.975 |
| + $Y=0.37 $X2=2.105 $Y2=0.58 |
| r85 1 12 182 $w=1.7e-07 $l=2.75772e-07 $layer=licon1_NDIFF $count=1 $X=0.555 |
| + $Y=0.37 $X2=0.75 $Y2=0.565 |
| .ends |
| |