blob: 5e7752958c78d386e7744a7f3b483cf3c367ce8a [file] [log] [blame]
* File: sky130_fd_sc_ms__buf_4.pex.spice
* Created: Fri Aug 28 17:15:38 2020
* Program "Calibre xRC"
* Version "v2018.4_34.26"
* Nominal Temperature: 27C
* Circuit Temperature: 27C
*
.subckt PM_SKY130_FD_SC_MS__BUF_4%A_86_260# 1 2 9 13 19 23 27 31 35 39 41 42 51
+ 52 53 54 60 63 64 66 73
c117 53 0 1.88724e-19 $X=2.285 $Y=1.045
r118 70 71 53.3327 $w=3.3e-07 $l=3.05e-07 $layer=POLY_cond $X=1.565 $Y=1.465
+ $X2=1.87 $Y2=1.465
r119 69 70 25.3549 $w=3.3e-07 $l=1.45e-07 $layer=POLY_cond $X=1.42 $Y=1.465
+ $X2=1.565 $Y2=1.465
r120 65 67 4.37153 $w=3.3e-07 $l=2.5e-08 $layer=POLY_cond $X=0.97 $Y=1.465
+ $X2=0.995 $Y2=1.465
r121 65 66 33.0969 $w=3.3e-07 $l=9e-08 $layer=POLY_cond $X=0.97 $Y=1.465
+ $X2=0.88 $Y2=1.465
r122 62 64 3.70735 $w=2.5e-07 $l=1.18427e-07 $layer=LI1_cond $X=3.16 $Y=1.13
+ $X2=3.08 $Y2=1.045
r123 62 63 53.4973 $w=1.68e-07 $l=8.2e-07 $layer=LI1_cond $X=3.16 $Y=1.13
+ $X2=3.16 $Y2=1.95
r124 58 64 3.70735 $w=2.5e-07 $l=8.5e-08 $layer=LI1_cond $X=3.08 $Y=0.96
+ $X2=3.08 $Y2=1.045
r125 58 60 15.5405 $w=3.28e-07 $l=4.45e-07 $layer=LI1_cond $X=3.08 $Y=0.96
+ $X2=3.08 $Y2=0.515
r126 54 63 7.14316 $w=2.5e-07 $l=1.62019e-07 $layer=LI1_cond $X=3.075 $Y=2.075
+ $X2=3.16 $Y2=1.95
r127 54 56 20.5135 $w=2.48e-07 $l=4.45e-07 $layer=LI1_cond $X=3.075 $Y=2.075
+ $X2=2.63 $Y2=2.075
r128 52 64 2.76166 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.915 $Y=1.045
+ $X2=3.08 $Y2=1.045
r129 52 53 41.1016 $w=1.68e-07 $l=6.3e-07 $layer=LI1_cond $X=2.915 $Y=1.045
+ $X2=2.285 $Y2=1.045
r130 50 53 6.81649 $w=1.7e-07 $l=1.20208e-07 $layer=LI1_cond $X=2.2 $Y=1.13
+ $X2=2.285 $Y2=1.045
r131 50 51 11.0909 $w=1.68e-07 $l=1.7e-07 $layer=LI1_cond $X=2.2 $Y=1.13 $X2=2.2
+ $Y2=1.3
r132 49 73 15.7375 $w=3.3e-07 $l=9e-08 $layer=POLY_cond $X=1.905 $Y=1.465
+ $X2=1.995 $Y2=1.465
r133 49 71 6.12014 $w=3.3e-07 $l=3.5e-08 $layer=POLY_cond $X=1.905 $Y=1.465
+ $X2=1.87 $Y2=1.465
r134 48 49 96.8533 $w=1.7e-07 $l=2.55e-07 $layer=licon1_POLY $count=1 $X=1.905
+ $Y=1.465 $X2=1.905 $Y2=1.465
r135 45 69 34.0979 $w=3.3e-07 $l=1.95e-07 $layer=POLY_cond $X=1.225 $Y=1.465
+ $X2=1.42 $Y2=1.465
r136 45 67 40.2181 $w=3.3e-07 $l=2.3e-07 $layer=POLY_cond $X=1.225 $Y=1.465
+ $X2=0.995 $Y2=1.465
r137 44 48 23.7473 $w=3.28e-07 $l=6.8e-07 $layer=LI1_cond $X=1.225 $Y=1.465
+ $X2=1.905 $Y2=1.465
r138 44 45 96.8533 $w=1.7e-07 $l=2.55e-07 $layer=licon1_POLY $count=1 $X=1.225
+ $Y=1.465 $X2=1.225 $Y2=1.465
r139 42 51 7.76618 $w=3.3e-07 $l=2.03101e-07 $layer=LI1_cond $X=2.115 $Y=1.465
+ $X2=2.2 $Y2=1.3
r140 42 48 7.33373 $w=3.28e-07 $l=2.1e-07 $layer=LI1_cond $X=2.115 $Y=1.465
+ $X2=1.905 $Y2=1.465
r141 37 73 21.2229 $w=1.5e-07 $l=1.65e-07 $layer=POLY_cond $X=1.995 $Y=1.3
+ $X2=1.995 $Y2=1.465
r142 37 39 287.149 $w=1.5e-07 $l=5.6e-07 $layer=POLY_cond $X=1.995 $Y=1.3
+ $X2=1.995 $Y2=0.74
r143 33 71 16.9318 $w=1.8e-07 $l=1.65e-07 $layer=POLY_cond $X=1.87 $Y=1.63
+ $X2=1.87 $Y2=1.465
r144 33 35 299.306 $w=1.8e-07 $l=7.7e-07 $layer=POLY_cond $X=1.87 $Y=1.63
+ $X2=1.87 $Y2=2.4
r145 29 70 21.2229 $w=1.5e-07 $l=1.65e-07 $layer=POLY_cond $X=1.565 $Y=1.3
+ $X2=1.565 $Y2=1.465
r146 29 31 287.149 $w=1.5e-07 $l=5.6e-07 $layer=POLY_cond $X=1.565 $Y=1.3
+ $X2=1.565 $Y2=0.74
r147 25 69 16.9318 $w=1.8e-07 $l=1.65e-07 $layer=POLY_cond $X=1.42 $Y=1.63
+ $X2=1.42 $Y2=1.465
r148 25 27 299.306 $w=1.8e-07 $l=7.7e-07 $layer=POLY_cond $X=1.42 $Y=1.63
+ $X2=1.42 $Y2=2.4
r149 21 67 21.2229 $w=1.5e-07 $l=1.65e-07 $layer=POLY_cond $X=0.995 $Y=1.3
+ $X2=0.995 $Y2=1.465
r150 21 23 287.149 $w=1.5e-07 $l=5.6e-07 $layer=POLY_cond $X=0.995 $Y=1.3
+ $X2=0.995 $Y2=0.74
r151 17 65 16.9318 $w=1.8e-07 $l=1.65e-07 $layer=POLY_cond $X=0.97 $Y=1.63
+ $X2=0.97 $Y2=1.465
r152 17 19 299.306 $w=1.8e-07 $l=7.7e-07 $layer=POLY_cond $X=0.97 $Y=1.63
+ $X2=0.97 $Y2=2.4
r153 16 41 6.66866 $w=1.5e-07 $l=1.05e-07 $layer=POLY_cond $X=0.64 $Y=1.375
+ $X2=0.535 $Y2=1.375
r154 16 66 123.064 $w=1.5e-07 $l=2.4e-07 $layer=POLY_cond $X=0.64 $Y=1.375
+ $X2=0.88 $Y2=1.375
r155 11 41 18.8402 $w=1.65e-07 $l=8.87412e-08 $layer=POLY_cond $X=0.565 $Y=1.3
+ $X2=0.535 $Y2=1.375
r156 11 13 287.149 $w=1.5e-07 $l=5.6e-07 $layer=POLY_cond $X=0.565 $Y=1.3
+ $X2=0.565 $Y2=0.74
r157 7 41 18.8402 $w=1.65e-07 $l=8.21584e-08 $layer=POLY_cond $X=0.52 $Y=1.45
+ $X2=0.535 $Y2=1.375
r158 7 9 369.274 $w=1.8e-07 $l=9.5e-07 $layer=POLY_cond $X=0.52 $Y=1.45 $X2=0.52
+ $Y2=2.4
r159 2 56 600 $w=1.7e-07 $l=3.35783e-07 $layer=licon1_PDIFF $count=1 $X=2.495
+ $Y=1.84 $X2=2.63 $Y2=2.115
r160 1 60 91 $w=1.7e-07 $l=2.03286e-07 $layer=licon1_NDIFF $count=2 $X=2.94
+ $Y=0.37 $X2=3.08 $Y2=0.515
.ends
.subckt PM_SKY130_FD_SC_MS__BUF_4%A 3 7 11 13 18 19
r39 19 20 1.8902 $w=2.55e-07 $l=1e-08 $layer=POLY_cond $X=2.855 $Y=1.515
+ $X2=2.865 $Y2=1.515
r40 17 19 21.7373 $w=2.55e-07 $l=1.15e-07 $layer=POLY_cond $X=2.74 $Y=1.515
+ $X2=2.855 $Y2=1.515
r41 17 18 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=2.74
+ $Y=1.515 $X2=2.74 $Y2=1.515
r42 13 18 4.54912 $w=3.78e-07 $l=1.5e-07 $layer=LI1_cond $X=2.715 $Y=1.665
+ $X2=2.715 $Y2=1.515
r43 9 20 15.178 $w=1.5e-07 $l=1.65e-07 $layer=POLY_cond $X=2.865 $Y=1.35
+ $X2=2.865 $Y2=1.515
r44 9 11 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=2.865 $Y=1.35
+ $X2=2.865 $Y2=0.74
r45 5 19 10.9734 $w=1.8e-07 $l=1.65e-07 $layer=POLY_cond $X=2.855 $Y=1.68
+ $X2=2.855 $Y2=1.515
r46 5 7 225.452 $w=1.8e-07 $l=5.8e-07 $layer=POLY_cond $X=2.855 $Y=1.68
+ $X2=2.855 $Y2=2.26
r47 1 17 63.3216 $w=2.55e-07 $l=4.09268e-07 $layer=POLY_cond $X=2.405 $Y=1.68
+ $X2=2.74 $Y2=1.515
r48 1 3 225.452 $w=1.8e-07 $l=5.8e-07 $layer=POLY_cond $X=2.405 $Y=1.68
+ $X2=2.405 $Y2=2.26
.ends
.subckt PM_SKY130_FD_SC_MS__BUF_4%VPWR 1 2 3 4 13 15 21 25 29 31 33 35 40 45 54
+ 57 61
r53 60 61 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=3.12 $Y=3.33
+ $X2=3.12 $Y2=3.33
r54 57 58 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.16 $Y=3.33
+ $X2=2.16 $Y2=3.33
r55 54 55 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.2 $Y=3.33 $X2=1.2
+ $Y2=3.33
r56 51 52 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.24 $Y=3.33
+ $X2=0.24 $Y2=3.33
r57 49 61 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=2.64 $Y=3.33
+ $X2=3.12 $Y2=3.33
r58 49 58 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=2.64 $Y=3.33
+ $X2=2.16 $Y2=3.33
r59 48 49 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.64 $Y=3.33
+ $X2=2.64 $Y2=3.33
r60 46 57 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.26 $Y=3.33
+ $X2=2.095 $Y2=3.33
r61 46 48 24.7914 $w=1.68e-07 $l=3.8e-07 $layer=LI1_cond $X=2.26 $Y=3.33
+ $X2=2.64 $Y2=3.33
r62 45 60 4.73651 $w=1.7e-07 $l=2.22e-07 $layer=LI1_cond $X=2.915 $Y=3.33
+ $X2=3.137 $Y2=3.33
r63 45 48 17.9412 $w=1.68e-07 $l=2.75e-07 $layer=LI1_cond $X=2.915 $Y=3.33
+ $X2=2.64 $Y2=3.33
r64 41 54 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=1.36 $Y=3.33
+ $X2=1.195 $Y2=3.33
r65 41 43 20.877 $w=1.68e-07 $l=3.2e-07 $layer=LI1_cond $X=1.36 $Y=3.33 $X2=1.68
+ $Y2=3.33
r66 40 57 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=1.93 $Y=3.33
+ $X2=2.095 $Y2=3.33
r67 40 43 16.3102 $w=1.68e-07 $l=2.5e-07 $layer=LI1_cond $X=1.93 $Y=3.33
+ $X2=1.68 $Y2=3.33
r68 39 55 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.72 $Y=3.33
+ $X2=1.2 $Y2=3.33
r69 39 52 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.72 $Y=3.33
+ $X2=0.24 $Y2=3.33
r70 38 39 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.72 $Y=3.33
+ $X2=0.72 $Y2=3.33
r71 36 51 4.70058 $w=1.7e-07 $l=2.3e-07 $layer=LI1_cond $X=0.46 $Y=3.33 $X2=0.23
+ $Y2=3.33
r72 36 38 16.9626 $w=1.68e-07 $l=2.6e-07 $layer=LI1_cond $X=0.46 $Y=3.33
+ $X2=0.72 $Y2=3.33
r73 35 54 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=1.03 $Y=3.33
+ $X2=1.195 $Y2=3.33
r74 35 38 20.2246 $w=1.68e-07 $l=3.1e-07 $layer=LI1_cond $X=1.03 $Y=3.33
+ $X2=0.72 $Y2=3.33
r75 33 58 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=1.68 $Y=3.33
+ $X2=2.16 $Y2=3.33
r76 33 55 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=1.68 $Y=3.33
+ $X2=1.2 $Y2=3.33
r77 33 43 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.68 $Y=3.33
+ $X2=1.68 $Y2=3.33
r78 29 60 3.02966 $w=3.3e-07 $l=1.09864e-07 $layer=LI1_cond $X=3.08 $Y=3.245
+ $X2=3.137 $Y2=3.33
r79 29 31 24.795 $w=3.28e-07 $l=7.1e-07 $layer=LI1_cond $X=3.08 $Y=3.245
+ $X2=3.08 $Y2=2.535
r80 25 28 28.9857 $w=3.28e-07 $l=8.3e-07 $layer=LI1_cond $X=2.095 $Y=1.985
+ $X2=2.095 $Y2=2.815
r81 23 57 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=2.095 $Y=3.245
+ $X2=2.095 $Y2=3.33
r82 23 28 15.0167 $w=3.28e-07 $l=4.3e-07 $layer=LI1_cond $X=2.095 $Y=3.245
+ $X2=2.095 $Y2=2.815
r83 19 54 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=1.195 $Y=3.245
+ $X2=1.195 $Y2=3.33
r84 19 21 35.621 $w=3.28e-07 $l=1.02e-06 $layer=LI1_cond $X=1.195 $Y=3.245
+ $X2=1.195 $Y2=2.225
r85 15 18 28.9857 $w=3.28e-07 $l=8.3e-07 $layer=LI1_cond $X=0.295 $Y=1.985
+ $X2=0.295 $Y2=2.815
r86 13 51 3.0656 $w=3.3e-07 $l=1.12916e-07 $layer=LI1_cond $X=0.295 $Y=3.245
+ $X2=0.23 $Y2=3.33
r87 13 18 15.0167 $w=3.28e-07 $l=4.3e-07 $layer=LI1_cond $X=0.295 $Y=3.245
+ $X2=0.295 $Y2=2.815
r88 4 31 600 $w=1.7e-07 $l=7.59506e-07 $layer=licon1_PDIFF $count=1 $X=2.945
+ $Y=1.84 $X2=3.08 $Y2=2.535
r89 3 28 600 $w=1.7e-07 $l=1.04031e-06 $layer=licon1_PDIFF $count=1 $X=1.96
+ $Y=1.84 $X2=2.095 $Y2=2.815
r90 3 25 300 $w=1.7e-07 $l=2.01494e-07 $layer=licon1_PDIFF $count=2 $X=1.96
+ $Y=1.84 $X2=2.095 $Y2=1.985
r91 2 21 300 $w=1.7e-07 $l=4.47437e-07 $layer=licon1_PDIFF $count=2 $X=1.06
+ $Y=1.84 $X2=1.195 $Y2=2.225
r92 1 18 400 $w=1.7e-07 $l=1.04499e-06 $layer=licon1_PDIFF $count=1 $X=0.15
+ $Y=1.84 $X2=0.295 $Y2=2.815
r93 1 15 400 $w=1.7e-07 $l=2.05061e-07 $layer=licon1_PDIFF $count=1 $X=0.15
+ $Y=1.84 $X2=0.295 $Y2=1.985
.ends
.subckt PM_SKY130_FD_SC_MS__BUF_4%X 1 2 3 4 15 17 18 21 25 27 31 37 39 40
r63 40 42 11.4662 $w=2.66e-07 $l=2.5e-07 $layer=LI1_cond $X=0.775 $Y=1.295
+ $X2=0.775 $Y2=1.045
r64 35 37 15.5405 $w=3.28e-07 $l=4.45e-07 $layer=LI1_cond $X=1.78 $Y=0.96
+ $X2=1.78 $Y2=0.515
r65 31 33 54.1497 $w=1.68e-07 $l=8.3e-07 $layer=LI1_cond $X=1.645 $Y=1.985
+ $X2=1.645 $Y2=2.815
r66 29 31 0.97861 $w=1.68e-07 $l=1.5e-08 $layer=LI1_cond $X=1.645 $Y=1.97
+ $X2=1.645 $Y2=1.985
r67 28 42 3.35683 $w=1.7e-07 $l=1.7e-07 $layer=LI1_cond $X=0.945 $Y=1.045
+ $X2=0.775 $Y2=1.045
r68 27 35 7.76618 $w=1.7e-07 $l=2.03101e-07 $layer=LI1_cond $X=1.615 $Y=1.045
+ $X2=1.78 $Y2=0.96
r69 27 28 43.7112 $w=1.68e-07 $l=6.7e-07 $layer=LI1_cond $X=1.615 $Y=1.045
+ $X2=0.945 $Y2=1.045
r70 26 39 1.44715 $w=1.7e-07 $l=8.8e-08 $layer=LI1_cond $X=0.835 $Y=1.885
+ $X2=0.747 $Y2=1.885
r71 25 29 6.81649 $w=1.7e-07 $l=1.20208e-07 $layer=LI1_cond $X=1.56 $Y=1.885
+ $X2=1.645 $Y2=1.97
r72 25 26 47.2995 $w=1.68e-07 $l=7.25e-07 $layer=LI1_cond $X=1.56 $Y=1.885
+ $X2=0.835 $Y2=1.885
r73 21 23 52.6026 $w=1.73e-07 $l=8.3e-07 $layer=LI1_cond $X=0.747 $Y=1.985
+ $X2=0.747 $Y2=2.815
r74 19 39 5.04255 $w=1.75e-07 $l=8.5e-08 $layer=LI1_cond $X=0.747 $Y=1.97
+ $X2=0.747 $Y2=1.885
r75 19 21 0.950649 $w=1.73e-07 $l=1.5e-08 $layer=LI1_cond $X=0.747 $Y=1.97
+ $X2=0.747 $Y2=1.985
r76 18 39 5.04255 $w=1.75e-07 $l=8.5e-08 $layer=LI1_cond $X=0.747 $Y=1.8
+ $X2=0.747 $Y2=1.885
r77 17 40 6.70265 $w=2.66e-07 $l=1.28238e-07 $layer=LI1_cond $X=0.747 $Y=1.41
+ $X2=0.775 $Y2=1.295
r78 17 18 24.7169 $w=1.73e-07 $l=3.9e-07 $layer=LI1_cond $X=0.747 $Y=1.41
+ $X2=0.747 $Y2=1.8
r79 13 42 3.63684 $w=3.3e-07 $l=8.74643e-08 $layer=LI1_cond $X=0.78 $Y=0.96
+ $X2=0.775 $Y2=1.045
r80 13 15 15.5405 $w=3.28e-07 $l=4.45e-07 $layer=LI1_cond $X=0.78 $Y=0.96
+ $X2=0.78 $Y2=0.515
r81 4 33 400 $w=1.7e-07 $l=1.04031e-06 $layer=licon1_PDIFF $count=1 $X=1.51
+ $Y=1.84 $X2=1.645 $Y2=2.815
r82 4 31 400 $w=1.7e-07 $l=2.01494e-07 $layer=licon1_PDIFF $count=1 $X=1.51
+ $Y=1.84 $X2=1.645 $Y2=1.985
r83 3 23 400 $w=1.7e-07 $l=1.04031e-06 $layer=licon1_PDIFF $count=1 $X=0.61
+ $Y=1.84 $X2=0.745 $Y2=2.815
r84 3 21 400 $w=1.7e-07 $l=2.01494e-07 $layer=licon1_PDIFF $count=1 $X=0.61
+ $Y=1.84 $X2=0.745 $Y2=1.985
r85 2 37 91 $w=1.7e-07 $l=2.03286e-07 $layer=licon1_NDIFF $count=2 $X=1.64
+ $Y=0.37 $X2=1.78 $Y2=0.515
r86 1 15 91 $w=1.7e-07 $l=2.03286e-07 $layer=licon1_NDIFF $count=2 $X=0.64
+ $Y=0.37 $X2=0.78 $Y2=0.515
.ends
.subckt PM_SKY130_FD_SC_MS__BUF_4%VGND 1 2 3 10 12 16 18 20 22 29 30 36 40
r42 41 43 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=2.16 $Y=0 $X2=2.64
+ $Y2=0
r43 40 45 9.77747 $w=6.28e-07 $l=5.15e-07 $layer=LI1_cond $X=2.43 $Y=0 $X2=2.43
+ $Y2=0.515
r44 40 43 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.64 $Y=0 $X2=2.64
+ $Y2=0
r45 40 41 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=2.16 $Y=0 $X2=2.16
+ $Y2=0
r46 36 37 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.2 $Y=0 $X2=1.2
+ $Y2=0
r47 33 34 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.24 $Y=0 $X2=0.24
+ $Y2=0
r48 30 43 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=3.12 $Y=0 $X2=2.64
+ $Y2=0
r49 29 30 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=3.12 $Y=0 $X2=3.12
+ $Y2=0
r50 27 40 8.63246 $w=1.7e-07 $l=3.15e-07 $layer=LI1_cond $X=2.745 $Y=0 $X2=2.43
+ $Y2=0
r51 27 29 24.4652 $w=1.68e-07 $l=3.75e-07 $layer=LI1_cond $X=2.745 $Y=0 $X2=3.12
+ $Y2=0
r52 26 37 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.72 $Y=0 $X2=1.2
+ $Y2=0
r53 26 34 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.72 $Y=0 $X2=0.24
+ $Y2=0
r54 25 26 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.72 $Y=0 $X2=0.72
+ $Y2=0
r55 23 33 4.73185 $w=1.7e-07 $l=2.23e-07 $layer=LI1_cond $X=0.445 $Y=0 $X2=0.222
+ $Y2=0
r56 23 25 17.9412 $w=1.68e-07 $l=2.75e-07 $layer=LI1_cond $X=0.445 $Y=0 $X2=0.72
+ $Y2=0
r57 22 36 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=1.115 $Y=0 $X2=1.28
+ $Y2=0
r58 22 25 25.7701 $w=1.68e-07 $l=3.95e-07 $layer=LI1_cond $X=1.115 $Y=0 $X2=0.72
+ $Y2=0
r59 20 41 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=1.68 $Y=0 $X2=2.16
+ $Y2=0
r60 20 37 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=1.68 $Y=0 $X2=1.2
+ $Y2=0
r61 19 36 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=1.445 $Y=0 $X2=1.28
+ $Y2=0
r62 18 40 8.63246 $w=1.7e-07 $l=3.15e-07 $layer=LI1_cond $X=2.115 $Y=0 $X2=2.43
+ $Y2=0
r63 18 19 43.7112 $w=1.68e-07 $l=6.7e-07 $layer=LI1_cond $X=2.115 $Y=0 $X2=1.445
+ $Y2=0
r64 14 36 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=1.28 $Y=0.085
+ $X2=1.28 $Y2=0
r65 14 16 16.9374 $w=3.28e-07 $l=4.85e-07 $layer=LI1_cond $X=1.28 $Y=0.085
+ $X2=1.28 $Y2=0.57
r66 10 33 3.03433 $w=3.3e-07 $l=1.1025e-07 $layer=LI1_cond $X=0.28 $Y=0.085
+ $X2=0.222 $Y2=0
r67 10 12 20.7789 $w=3.28e-07 $l=5.95e-07 $layer=LI1_cond $X=0.28 $Y=0.085
+ $X2=0.28 $Y2=0.68
r68 3 45 182 $w=1.7e-07 $l=4.2638e-07 $layer=licon1_NDIFF $count=1 $X=2.07
+ $Y=0.37 $X2=2.43 $Y2=0.515
r69 2 16 182 $w=1.7e-07 $l=2.93428e-07 $layer=licon1_NDIFF $count=1 $X=1.07
+ $Y=0.37 $X2=1.28 $Y2=0.57
r70 1 12 182 $w=1.7e-07 $l=3.75566e-07 $layer=licon1_NDIFF $count=1 $X=0.135
+ $Y=0.37 $X2=0.28 $Y2=0.68
.ends