* File: sky130_fd_sc_lp__clkdlybuf4s15_1.pex.spice
* Created: Wed Sep  2 09:39:20 2020
* Program "Calibre xRC"
* Version "v2018.4_34.26"
* Nominal Temperature: 27C
* Circuit Temperature: 27C
* 
.subckt PM_SKY130_FD_SC_LP__CLKDLYBUF4S15_1%A 3 7 9 10 14
r35 14 17 46.2115 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=0.385 $Y=1.5
+ $X2=0.385 $Y2=1.665
r36 14 16 46.2115 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=0.385 $Y=1.5
+ $X2=0.385 $Y2=1.335
r37 14 15 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=0.385
+ $Y=1.5 $X2=0.385 $Y2=1.5
r38 10 15 4.38562 $w=4.48e-07 $l=1.65e-07 $layer=LI1_cond $X=0.325 $Y=1.665
+ $X2=0.325 $Y2=1.5
r39 9 15 5.4488 $w=4.48e-07 $l=2.05e-07 $layer=LI1_cond $X=0.325 $Y=1.295
+ $X2=0.325 $Y2=1.5
r40 7 17 410.213 $w=1.5e-07 $l=8e-07 $layer=POLY_cond $X=0.475 $Y=2.465
+ $X2=0.475 $Y2=1.665
r41 3 16 443.543 $w=1.5e-07 $l=8.65e-07 $layer=POLY_cond $X=0.475 $Y=0.47
+ $X2=0.475 $Y2=1.335
.ends

.subckt PM_SKY130_FD_SC_LP__CLKDLYBUF4S15_1%A_27_52# 1 2 7 9 10 12 16 18 20 22
+ 23 24 27 29
c67 27 0 5.13383e-20 $X=1.087 $Y=1.6
c68 10 0 6.03536e-20 $X=1.335 $Y=1.93
r69 29 30 72.64 $w=1.7e-07 $l=3.4e-07 $layer=licon1_POLY $count=2 $X=1.085
+ $Y=1.535 $X2=1.085 $Y2=1.535
r70 27 33 13.9394 $w=4.83e-07 $l=5.7297e-07 $layer=LI1_cond $X=1.087 $Y=1.6
+ $X2=1.205 $Y2=2.117
r71 27 29 2.11011 $w=3.53e-07 $l=6.5e-08 $layer=LI1_cond $X=1.087 $Y=1.6
+ $X2=1.087 $Y2=1.535
r72 26 29 16.7185 $w=3.53e-07 $l=5.15e-07 $layer=LI1_cond $X=1.087 $Y=1.02
+ $X2=1.087 $Y2=1.535
r73 25 32 5.01319 $w=1.75e-07 $l=1.65e-07 $layer=LI1_cond $X=0.425 $Y=2.117
+ $X2=0.26 $Y2=2.117
r74 24 33 6.77202 $w=1.75e-07 $l=2.95e-07 $layer=LI1_cond $X=0.91 $Y=2.117
+ $X2=1.205 $Y2=2.117
r75 24 25 30.7377 $w=1.73e-07 $l=4.85e-07 $layer=LI1_cond $X=0.91 $Y=2.117
+ $X2=0.425 $Y2=2.117
r76 22 26 7.53182 $w=2e-07 $l=2.21425e-07 $layer=LI1_cond $X=0.91 $Y=0.92
+ $X2=1.087 $Y2=1.02
r77 22 23 27.7273 $w=1.98e-07 $l=5e-07 $layer=LI1_cond $X=0.91 $Y=0.92 $X2=0.41
+ $Y2=0.92
r78 18 32 2.6737 $w=3.3e-07 $l=8.8e-08 $layer=LI1_cond $X=0.26 $Y=2.205 $X2=0.26
+ $Y2=2.117
r79 18 20 24.795 $w=3.28e-07 $l=7.1e-07 $layer=LI1_cond $X=0.26 $Y=2.205
+ $X2=0.26 $Y2=2.915
r80 14 23 7.26812 $w=2e-07 $l=2.01901e-07 $layer=LI1_cond $X=0.252 $Y=0.82
+ $X2=0.41 $Y2=0.92
r81 14 16 12.8049 $w=3.13e-07 $l=3.5e-07 $layer=LI1_cond $X=0.252 $Y=0.82
+ $X2=0.252 $Y2=0.47
r82 10 30 63.0601 $w=6e-07 $l=4.37693e-07 $layer=POLY_cond $X=1.335 $Y=1.93
+ $X2=1.245 $Y2=1.535
r83 10 12 340.989 $w=1.5e-07 $l=6.65e-07 $layer=POLY_cond $X=1.335 $Y=1.93
+ $X2=1.335 $Y2=2.595
r84 7 30 44.5834 $w=6e-07 $l=2.05122e-07 $layer=POLY_cond $X=1.335 $Y=1.37
+ $X2=1.245 $Y2=1.535
r85 7 9 196.013 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=1.335 $Y=1.37
+ $X2=1.335 $Y2=0.76
r86 2 32 400 $w=1.7e-07 $l=4.17852e-07 $layer=licon1_PDIFF $count=1 $X=0.135
+ $Y=1.835 $X2=0.26 $Y2=2.195
r87 2 20 400 $w=1.7e-07 $l=1.14079e-06 $layer=licon1_PDIFF $count=1 $X=0.135
+ $Y=1.835 $X2=0.26 $Y2=2.915
r88 1 16 182 $w=1.7e-07 $l=2.65236e-07 $layer=licon1_NDIFF $count=1 $X=0.135
+ $Y=0.26 $X2=0.26 $Y2=0.47
.ends

.subckt PM_SKY130_FD_SC_LP__CLKDLYBUF4S15_1%A_282_52# 1 2 7 9 12 15 18 20 21 24
+ 25 28
c64 24 0 1.96922e-19 $X=2.52 $Y=1.535
c65 15 0 5.13383e-20 $X=2.2 $Y=1.535
r66 32 33 19.6071 $w=2.52e-07 $l=4.05e-07 $layer=LI1_cond $X=1.67 $Y=1.115
+ $X2=1.67 $Y2=1.52
r67 28 30 9.51376 $w=4.36e-07 $l=3.4e-07 $layer=LI1_cond $X=1.612 $Y=2.265
+ $X2=1.612 $Y2=2.605
r68 24 25 72.64 $w=1.7e-07 $l=3.4e-07 $layer=licon1_POLY $count=2 $X=2.52
+ $Y=1.535 $X2=2.52 $Y2=1.535
r69 22 33 0.291325 $w=2.7e-07 $l=1.7e-07 $layer=LI1_cond $X=1.84 $Y=1.52
+ $X2=1.67 $Y2=1.52
r70 22 24 29.0245 $w=2.68e-07 $l=6.8e-07 $layer=LI1_cond $X=1.84 $Y=1.52
+ $X2=2.52 $Y2=1.52
r71 21 28 9.33164 $w=4.36e-07 $l=2.25433e-07 $layer=LI1_cond $X=1.755 $Y=2.1
+ $X2=1.612 $Y2=2.265
r72 20 33 7.83322 $w=2.52e-07 $l=1.72337e-07 $layer=LI1_cond $X=1.755 $Y=1.655
+ $X2=1.67 $Y2=1.52
r73 20 21 29.0321 $w=1.68e-07 $l=4.45e-07 $layer=LI1_cond $X=1.755 $Y=1.655
+ $X2=1.755 $Y2=2.1
r74 16 32 2.84561 $w=4.05e-07 $l=5.0892e-08 $layer=LI1_cond $X=1.637 $Y=1.078
+ $X2=1.67 $Y2=1.115
r75 16 18 18.2968 $w=4.03e-07 $l=6.43e-07 $layer=LI1_cond $X=1.637 $Y=1.078
+ $X2=1.637 $Y2=0.435
r76 14 25 23.6063 $w=3.3e-07 $l=1.35e-07 $layer=POLY_cond $X=2.385 $Y=1.535
+ $X2=2.52 $Y2=1.535
r77 14 15 5.03009 $w=3.3e-07 $l=1.85e-07 $layer=POLY_cond $X=2.385 $Y=1.535
+ $X2=2.2 $Y2=1.535
r78 10 15 37.0704 $w=1.5e-07 $l=2.13014e-07 $layer=POLY_cond $X=2.31 $Y=1.7
+ $X2=2.2 $Y2=1.535
r79 10 12 458.926 $w=1.5e-07 $l=8.95e-07 $layer=POLY_cond $X=2.31 $Y=1.7
+ $X2=2.31 $Y2=2.595
r80 7 15 37.0704 $w=1.5e-07 $l=2.13014e-07 $layer=POLY_cond $X=2.31 $Y=1.37
+ $X2=2.2 $Y2=1.535
r81 7 9 196.013 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=2.31 $Y=1.37 $X2=2.31
+ $Y2=0.76
r82 2 30 300 $w=1.7e-07 $l=5.7576e-07 $layer=licon1_PDIFF $count=2 $X=1.41
+ $Y=2.095 $X2=1.55 $Y2=2.605
r83 2 28 600 $w=1.7e-07 $l=2.29565e-07 $layer=licon1_PDIFF $count=1 $X=1.41
+ $Y=2.095 $X2=1.55 $Y2=2.265
r84 1 32 121.333 $w=1.7e-07 $l=9.22348e-07 $layer=licon1_NDIFF $count=1 $X=1.41
+ $Y=0.26 $X2=1.55 $Y2=1.115
r85 1 18 121.333 $w=1.7e-07 $l=2.34787e-07 $layer=licon1_NDIFF $count=1 $X=1.41
+ $Y=0.26 $X2=1.55 $Y2=0.435
.ends

.subckt PM_SKY130_FD_SC_LP__CLKDLYBUF4S15_1%A_394_52# 1 2 9 13 17 21 22 23 24 25
+ 26 28 32
c74 32 0 1.96922e-19 $X=3.26 $Y=1.46
r75 32 35 46.2115 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=3.26 $Y=1.46
+ $X2=3.26 $Y2=1.625
r76 32 34 46.2115 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=3.26 $Y=1.46
+ $X2=3.26 $Y2=1.295
r77 31 32 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=3.26
+ $Y=1.46 $X2=3.26 $Y2=1.46
r78 25 31 8.96051 $w=3.33e-07 $l=2.31571e-07 $layer=LI1_cond $X=2.94 $Y=1.625
+ $X2=3.1 $Y2=1.46
r79 25 26 13.0481 $w=1.68e-07 $l=2e-07 $layer=LI1_cond $X=2.94 $Y=1.625 $X2=2.94
+ $Y2=1.825
r80 24 28 22.9066 $w=2.51e-07 $l=5.2314e-07 $layer=LI1_cond $X=2.54 $Y=1.91
+ $X2=2.095 $Y2=2.08
r81 23 26 6.81649 $w=1.7e-07 $l=1.20208e-07 $layer=LI1_cond $X=2.855 $Y=1.91
+ $X2=2.94 $Y2=1.825
r82 23 24 20.5508 $w=1.68e-07 $l=3.15e-07 $layer=LI1_cond $X=2.855 $Y=1.91
+ $X2=2.54 $Y2=1.91
r83 21 31 13.2991 $w=3.33e-07 $l=4.69791e-07 $layer=LI1_cond $X=2.855 $Y=1.097
+ $X2=3.1 $Y2=1.46
r84 21 22 29.1789 $w=2.33e-07 $l=5.95e-07 $layer=LI1_cond $X=2.855 $Y=1.097
+ $X2=2.26 $Y2=1.097
r85 15 22 6.82498 $w=2.35e-07 $l=1.73925e-07 $layer=LI1_cond $X=2.135 $Y=0.98
+ $X2=2.26 $Y2=1.097
r86 15 17 25.1233 $w=2.48e-07 $l=5.45e-07 $layer=LI1_cond $X=2.135 $Y=0.98
+ $X2=2.135 $Y2=0.435
r87 13 35 430.723 $w=1.5e-07 $l=8.4e-07 $layer=POLY_cond $X=3.17 $Y=2.465
+ $X2=3.17 $Y2=1.625
r88 9 34 423.032 $w=1.5e-07 $l=8.25e-07 $layer=POLY_cond $X=3.17 $Y=0.47
+ $X2=3.17 $Y2=1.295
r89 2 28 300 $w=1.7e-07 $l=2.03101e-07 $layer=licon1_PDIFF $count=2 $X=1.97
+ $Y=2.095 $X2=2.095 $Y2=2.245
r90 1 17 91 $w=1.7e-07 $l=2.29129e-07 $layer=licon1_NDIFF $count=2 $X=1.97
+ $Y=0.26 $X2=2.095 $Y2=0.435
.ends

.subckt PM_SKY130_FD_SC_LP__CLKDLYBUF4S15_1%VPWR 1 2 9 13 18 19 20 22 35 36 39
c44 9 0 6.03536e-20 $X=0.76 $Y=2.49
r45 39 40 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.72 $Y=3.33
+ $X2=0.72 $Y2=3.33
r46 35 36 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=3.6 $Y=3.33 $X2=3.6
+ $Y2=3.33
r47 33 36 0.267585 $w=4.9e-07 $l=9.6e-07 $layer=MET1_cond $X=2.64 $Y=3.33
+ $X2=3.6 $Y2=3.33
r48 32 33 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=2.64 $Y=3.33
+ $X2=2.64 $Y2=3.33
r49 30 40 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=1.2 $Y=3.33
+ $X2=0.72 $Y2=3.33
r50 29 32 93.9465 $w=1.68e-07 $l=1.44e-06 $layer=LI1_cond $X=1.2 $Y=3.33
+ $X2=2.64 $Y2=3.33
r51 29 30 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=1.2 $Y=3.33 $X2=1.2
+ $Y2=3.33
r52 27 39 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=0.925 $Y=3.33
+ $X2=0.76 $Y2=3.33
r53 27 29 17.9412 $w=1.68e-07 $l=2.75e-07 $layer=LI1_cond $X=0.925 $Y=3.33
+ $X2=1.2 $Y2=3.33
r54 25 40 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.24 $Y=3.33
+ $X2=0.72 $Y2=3.33
r55 24 25 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.24 $Y=3.33
+ $X2=0.24 $Y2=3.33
r56 22 39 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=0.595 $Y=3.33
+ $X2=0.76 $Y2=3.33
r57 22 24 23.1604 $w=1.68e-07 $l=3.55e-07 $layer=LI1_cond $X=0.595 $Y=3.33
+ $X2=0.24 $Y2=3.33
r58 20 33 0.200689 $w=4.9e-07 $l=7.2e-07 $layer=MET1_cond $X=1.92 $Y=3.33
+ $X2=2.64 $Y2=3.33
r59 20 30 0.200689 $w=4.9e-07 $l=7.2e-07 $layer=MET1_cond $X=1.92 $Y=3.33
+ $X2=1.2 $Y2=3.33
r60 18 32 4.56684 $w=1.68e-07 $l=7e-08 $layer=LI1_cond $X=2.71 $Y=3.33 $X2=2.64
+ $Y2=3.33
r61 18 19 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.71 $Y=3.33
+ $X2=2.875 $Y2=3.33
r62 17 35 36.5348 $w=1.68e-07 $l=5.6e-07 $layer=LI1_cond $X=3.04 $Y=3.33 $X2=3.6
+ $Y2=3.33
r63 17 19 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=3.04 $Y=3.33
+ $X2=2.875 $Y2=3.33
r64 13 16 23.7473 $w=3.28e-07 $l=6.8e-07 $layer=LI1_cond $X=2.875 $Y=2.27
+ $X2=2.875 $Y2=2.95
r65 11 19 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=2.875 $Y=3.245
+ $X2=2.875 $Y2=3.33
r66 11 16 10.3021 $w=3.28e-07 $l=2.95e-07 $layer=LI1_cond $X=2.875 $Y=3.245
+ $X2=2.875 $Y2=2.95
r67 7 39 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=0.76 $Y=3.245 $X2=0.76
+ $Y2=3.33
r68 7 9 26.3665 $w=3.28e-07 $l=7.55e-07 $layer=LI1_cond $X=0.76 $Y=3.245
+ $X2=0.76 $Y2=2.49
r69 2 16 400 $w=1.7e-07 $l=1.07237e-06 $layer=licon1_PDIFF $count=1 $X=2.385
+ $Y=2.095 $X2=2.875 $Y2=2.95
r70 2 13 400 $w=1.7e-07 $l=5.70833e-07 $layer=licon1_PDIFF $count=1 $X=2.385
+ $Y=2.095 $X2=2.875 $Y2=2.27
r71 1 9 300 $w=1.7e-07 $l=7.52712e-07 $layer=licon1_PDIFF $count=2 $X=0.55
+ $Y=1.835 $X2=0.76 $Y2=2.49
.ends

.subckt PM_SKY130_FD_SC_LP__CLKDLYBUF4S15_1%X 1 2 7 8 9 10 11 12 13 46 49 53
r24 49 50 7.43121 $w=5.18e-07 $l=1.65e-07 $layer=LI1_cond $X=3.49 $Y=1.98
+ $X2=3.49 $Y2=1.815
r25 32 53 0.92006 $w=5.18e-07 $l=4e-08 $layer=LI1_cond $X=3.49 $Y=2.075 $X2=3.49
+ $Y2=2.035
r26 13 39 3.1052 $w=5.18e-07 $l=1.35e-07 $layer=LI1_cond $X=3.49 $Y=2.775
+ $X2=3.49 $Y2=2.91
r27 12 13 8.51056 $w=5.18e-07 $l=3.7e-07 $layer=LI1_cond $X=3.49 $Y=2.405
+ $X2=3.49 $Y2=2.775
r28 11 53 0.529035 $w=5.18e-07 $l=2.3e-08 $layer=LI1_cond $X=3.49 $Y=2.012
+ $X2=3.49 $Y2=2.035
r29 11 49 0.736048 $w=5.18e-07 $l=3.2e-08 $layer=LI1_cond $X=3.49 $Y=2.012
+ $X2=3.49 $Y2=1.98
r30 11 12 7.08446 $w=5.18e-07 $l=3.08e-07 $layer=LI1_cond $X=3.49 $Y=2.097
+ $X2=3.49 $Y2=2.405
r31 11 32 0.506033 $w=5.18e-07 $l=2.2e-08 $layer=LI1_cond $X=3.49 $Y=2.097
+ $X2=3.49 $Y2=2.075
r32 10 50 7.35602 $w=2.33e-07 $l=1.5e-07 $layer=LI1_cond $X=3.632 $Y=1.665
+ $X2=3.632 $Y2=1.815
r33 9 10 18.1448 $w=2.33e-07 $l=3.7e-07 $layer=LI1_cond $X=3.632 $Y=1.295
+ $X2=3.632 $Y2=1.665
r34 8 9 18.1448 $w=2.33e-07 $l=3.7e-07 $layer=LI1_cond $X=3.632 $Y=0.925
+ $X2=3.632 $Y2=1.295
r35 7 46 1.11752 $w=3.28e-07 $l=3.2e-08 $layer=LI1_cond $X=3.6 $Y=0.475
+ $X2=3.632 $Y2=0.475
r36 7 46 2.74472 $w=2.35e-07 $l=1.65e-07 $layer=LI1_cond $X=3.632 $Y=0.64
+ $X2=3.632 $Y2=0.475
r37 7 42 7.50834 $w=3.28e-07 $l=2.15e-07 $layer=LI1_cond $X=3.6 $Y=0.475
+ $X2=3.385 $Y2=0.475
r38 7 8 10.1233 $w=4.03e-07 $l=2.85e-07 $layer=LI1_cond $X=3.632 $Y=0.64
+ $X2=3.632 $Y2=0.925
r39 2 49 400 $w=1.7e-07 $l=2.03286e-07 $layer=licon1_PDIFF $count=1 $X=3.245
+ $Y=1.835 $X2=3.385 $Y2=1.98
r40 2 39 400 $w=1.7e-07 $l=1.14286e-06 $layer=licon1_PDIFF $count=1 $X=3.245
+ $Y=1.835 $X2=3.385 $Y2=2.91
r41 1 42 182 $w=1.7e-07 $l=2.7627e-07 $layer=licon1_NDIFF $count=1 $X=3.245
+ $Y=0.26 $X2=3.385 $Y2=0.475
.ends

.subckt PM_SKY130_FD_SC_LP__CLKDLYBUF4S15_1%VGND 1 2 9 13 16 17 18 20 33 34 37
r37 37 38 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.72 $Y=0 $X2=0.72
+ $Y2=0
r38 33 34 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=3.6 $Y=0 $X2=3.6
+ $Y2=0
r39 31 34 0.267585 $w=4.9e-07 $l=9.6e-07 $layer=MET1_cond $X=2.64 $Y=0 $X2=3.6
+ $Y2=0
r40 30 31 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=2.64 $Y=0 $X2=2.64
+ $Y2=0
r41 28 38 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=1.2 $Y=0 $X2=0.72
+ $Y2=0
r42 27 30 93.9465 $w=1.68e-07 $l=1.44e-06 $layer=LI1_cond $X=1.2 $Y=0 $X2=2.64
+ $Y2=0
r43 27 28 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=1.2 $Y=0 $X2=1.2
+ $Y2=0
r44 25 37 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=0.91 $Y=0 $X2=0.745
+ $Y2=0
r45 25 27 18.9198 $w=1.68e-07 $l=2.9e-07 $layer=LI1_cond $X=0.91 $Y=0 $X2=1.2
+ $Y2=0
r46 23 38 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.24 $Y=0 $X2=0.72
+ $Y2=0
r47 22 23 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.24 $Y=0 $X2=0.24
+ $Y2=0
r48 20 37 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=0.58 $Y=0 $X2=0.745
+ $Y2=0
r49 20 22 22.1818 $w=1.68e-07 $l=3.4e-07 $layer=LI1_cond $X=0.58 $Y=0 $X2=0.24
+ $Y2=0
r50 18 31 0.200689 $w=4.9e-07 $l=7.2e-07 $layer=MET1_cond $X=1.92 $Y=0 $X2=2.64
+ $Y2=0
r51 18 28 0.200689 $w=4.9e-07 $l=7.2e-07 $layer=MET1_cond $X=1.92 $Y=0 $X2=1.2
+ $Y2=0
r52 16 30 4.56684 $w=1.68e-07 $l=7e-08 $layer=LI1_cond $X=2.71 $Y=0 $X2=2.64
+ $Y2=0
r53 16 17 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.71 $Y=0 $X2=2.875
+ $Y2=0
r54 15 33 36.5348 $w=1.68e-07 $l=5.6e-07 $layer=LI1_cond $X=3.04 $Y=0 $X2=3.6
+ $Y2=0
r55 15 17 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=3.04 $Y=0 $X2=2.875
+ $Y2=0
r56 11 17 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=2.875 $Y=0.085
+ $X2=2.875 $Y2=0
r57 11 13 14.6675 $w=3.28e-07 $l=4.2e-07 $layer=LI1_cond $X=2.875 $Y=0.085
+ $X2=2.875 $Y2=0.505
r58 7 37 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=0.745 $Y=0.085
+ $X2=0.745 $Y2=0
r59 7 9 13.4452 $w=3.28e-07 $l=3.85e-07 $layer=LI1_cond $X=0.745 $Y=0.085
+ $X2=0.745 $Y2=0.47
r60 2 13 182 $w=1.7e-07 $l=6.00125e-07 $layer=licon1_NDIFF $count=1 $X=2.385
+ $Y=0.26 $X2=2.875 $Y2=0.505
r61 1 9 182 $w=1.7e-07 $l=2.91633e-07 $layer=licon1_NDIFF $count=1 $X=0.55
+ $Y=0.26 $X2=0.745 $Y2=0.47
.ends