* File: sky130_fd_sc_lp__clkdlybuf4s50_1.pex.spice
* Created: Fri Aug 28 10:17:05 2020
* Program "Calibre xRC"
* Version "v2018.4_34.26"
* Nominal Temperature: 27C
* Circuit Temperature: 27C
* 
.subckt PM_SKY130_FD_SC_LP__CLKDLYBUF4S50_1%A 3 7 9 10 14
r34 14 17 46.2115 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=0.385 $Y=1.5
+ $X2=0.385 $Y2=1.665
r35 14 16 46.2115 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=0.385 $Y=1.5
+ $X2=0.385 $Y2=1.335
r36 14 15 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=0.385
+ $Y=1.5 $X2=0.385 $Y2=1.5
r37 10 15 4.38562 $w=4.48e-07 $l=1.65e-07 $layer=LI1_cond $X=0.325 $Y=1.665
+ $X2=0.325 $Y2=1.5
r38 9 15 5.4488 $w=4.48e-07 $l=2.05e-07 $layer=LI1_cond $X=0.325 $Y=1.295
+ $X2=0.325 $Y2=1.5
r39 7 17 410.213 $w=1.5e-07 $l=8e-07 $layer=POLY_cond $X=0.475 $Y=2.465
+ $X2=0.475 $Y2=1.665
r40 3 16 443.543 $w=1.5e-07 $l=8.65e-07 $layer=POLY_cond $X=0.475 $Y=0.47
+ $X2=0.475 $Y2=1.335
.ends

.subckt PM_SKY130_FD_SC_LP__CLKDLYBUF4S50_1%A_27_52# 1 2 9 13 15 17 19 20 21 26
+ 31 32 36
c64 31 0 5.13383e-20 $X=1.415 $Y=1.765
r65 32 41 16.7369 $w=6.7e-07 $l=1.65e-07 $layer=POLY_cond $X=1.245 $Y=1.765
+ $X2=1.245 $Y2=1.93
r66 32 40 16.7369 $w=6.7e-07 $l=1.65e-07 $layer=POLY_cond $X=1.245 $Y=1.765
+ $X2=1.245 $Y2=1.6
r67 31 33 8.8911 $w=4.83e-07 $l=3.52e-07 $layer=LI1_cond $X=1.205 $Y=1.765
+ $X2=1.205 $Y2=2.117
r68 31 32 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=1.415
+ $Y=1.765 $X2=1.415 $Y2=1.765
r69 27 40 6.95538 $w=5e-07 $l=6.5e-08 $layer=POLY_cond $X=1.16 $Y=1.535 $X2=1.16
+ $Y2=1.6
r70 27 36 82.9296 $w=5e-07 $l=7.75e-07 $layer=POLY_cond $X=1.16 $Y=1.535
+ $X2=1.16 $Y2=0.76
r71 26 27 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=1.085
+ $Y=1.535 $X2=1.085 $Y2=1.535
r72 24 31 5.04829 $w=4.83e-07 $l=2.1609e-07 $layer=LI1_cond $X=1.087 $Y=1.6
+ $X2=1.205 $Y2=1.765
r73 24 26 2.11011 $w=3.53e-07 $l=6.5e-08 $layer=LI1_cond $X=1.087 $Y=1.6
+ $X2=1.087 $Y2=1.535
r74 23 26 16.7185 $w=3.53e-07 $l=5.15e-07 $layer=LI1_cond $X=1.087 $Y=1.02
+ $X2=1.087 $Y2=1.535
r75 22 29 5.01319 $w=1.75e-07 $l=1.65e-07 $layer=LI1_cond $X=0.425 $Y=2.117
+ $X2=0.26 $Y2=2.117
r76 21 33 6.77202 $w=1.75e-07 $l=2.95e-07 $layer=LI1_cond $X=0.91 $Y=2.117
+ $X2=1.205 $Y2=2.117
r77 21 22 30.7377 $w=1.73e-07 $l=4.85e-07 $layer=LI1_cond $X=0.91 $Y=2.117
+ $X2=0.425 $Y2=2.117
r78 19 23 7.53182 $w=2e-07 $l=2.21425e-07 $layer=LI1_cond $X=0.91 $Y=0.92
+ $X2=1.087 $Y2=1.02
r79 19 20 27.7273 $w=1.98e-07 $l=5e-07 $layer=LI1_cond $X=0.91 $Y=0.92 $X2=0.41
+ $Y2=0.92
r80 15 29 2.6737 $w=3.3e-07 $l=8.8e-08 $layer=LI1_cond $X=0.26 $Y=2.205 $X2=0.26
+ $Y2=2.117
r81 15 17 24.795 $w=3.28e-07 $l=7.1e-07 $layer=LI1_cond $X=0.26 $Y=2.205
+ $X2=0.26 $Y2=2.915
r82 11 20 7.26812 $w=2e-07 $l=2.01901e-07 $layer=LI1_cond $X=0.252 $Y=0.82
+ $X2=0.41 $Y2=0.92
r83 11 13 12.8049 $w=3.13e-07 $l=3.5e-07 $layer=LI1_cond $X=0.252 $Y=0.82
+ $X2=0.252 $Y2=0.47
r84 9 41 71.1589 $w=5e-07 $l=6.65e-07 $layer=POLY_cond $X=1.16 $Y=2.595 $X2=1.16
+ $Y2=1.93
r85 2 29 400 $w=1.7e-07 $l=4.17852e-07 $layer=licon1_PDIFF $count=1 $X=0.135
+ $Y=1.835 $X2=0.26 $Y2=2.195
r86 2 17 400 $w=1.7e-07 $l=1.14079e-06 $layer=licon1_PDIFF $count=1 $X=0.135
+ $Y=1.835 $X2=0.26 $Y2=2.915
r87 1 13 182 $w=1.7e-07 $l=2.65236e-07 $layer=licon1_NDIFF $count=1 $X=0.135
+ $Y=0.26 $X2=0.26 $Y2=0.47
.ends

.subckt PM_SKY130_FD_SC_LP__CLKDLYBUF4S50_1%A_282_52# 1 2 9 12 16 18 19 22 23 26
+ 33
c60 23 0 5.13383e-20 $X=2.52 $Y=1.535
c61 22 0 1.96922e-19 $X=2.52 $Y=1.535
r62 30 31 19.6071 $w=2.52e-07 $l=4.05e-07 $layer=LI1_cond $X=1.67 $Y=1.115
+ $X2=1.67 $Y2=1.52
r63 26 28 9.51376 $w=4.36e-07 $l=3.4e-07 $layer=LI1_cond $X=1.612 $Y=2.265
+ $X2=1.612 $Y2=2.605
r64 23 34 16.6344 $w=7.2e-07 $l=1.65e-07 $layer=POLY_cond $X=2.375 $Y=1.535
+ $X2=2.375 $Y2=1.7
r65 23 33 16.6344 $w=7.2e-07 $l=1.65e-07 $layer=POLY_cond $X=2.375 $Y=1.535
+ $X2=2.375 $Y2=1.37
r66 22 23 72.64 $w=1.7e-07 $l=3.4e-07 $layer=licon1_POLY $count=2 $X=2.52
+ $Y=1.535 $X2=2.52 $Y2=1.535
r67 20 31 0.291325 $w=2.7e-07 $l=1.7e-07 $layer=LI1_cond $X=1.84 $Y=1.52
+ $X2=1.67 $Y2=1.52
r68 20 22 29.0245 $w=2.68e-07 $l=6.8e-07 $layer=LI1_cond $X=1.84 $Y=1.52
+ $X2=2.52 $Y2=1.52
r69 19 26 9.33164 $w=4.36e-07 $l=2.25433e-07 $layer=LI1_cond $X=1.755 $Y=2.1
+ $X2=1.612 $Y2=2.265
r70 18 31 7.83322 $w=2.52e-07 $l=1.72337e-07 $layer=LI1_cond $X=1.755 $Y=1.655
+ $X2=1.67 $Y2=1.52
r71 18 19 29.0321 $w=1.68e-07 $l=4.45e-07 $layer=LI1_cond $X=1.755 $Y=1.655
+ $X2=1.755 $Y2=2.1
r72 14 30 2.84561 $w=4.05e-07 $l=5.0892e-08 $layer=LI1_cond $X=1.637 $Y=1.078
+ $X2=1.67 $Y2=1.115
r73 14 16 18.2968 $w=4.03e-07 $l=6.43e-07 $layer=LI1_cond $X=1.637 $Y=1.078
+ $X2=1.637 $Y2=0.435
r74 12 34 95.7703 $w=5e-07 $l=8.95e-07 $layer=POLY_cond $X=2.485 $Y=2.595
+ $X2=2.485 $Y2=1.7
r75 9 33 58.804 $w=5e-07 $l=6.1e-07 $layer=POLY_cond $X=2.485 $Y=0.76 $X2=2.485
+ $Y2=1.37
r76 2 28 300 $w=1.7e-07 $l=5.7576e-07 $layer=licon1_PDIFF $count=2 $X=1.41
+ $Y=2.095 $X2=1.55 $Y2=2.605
r77 2 26 600 $w=1.7e-07 $l=2.29565e-07 $layer=licon1_PDIFF $count=1 $X=1.41
+ $Y=2.095 $X2=1.55 $Y2=2.265
r78 1 30 121.333 $w=1.7e-07 $l=9.22348e-07 $layer=licon1_NDIFF $count=1 $X=1.41
+ $Y=0.26 $X2=1.55 $Y2=1.115
r79 1 16 121.333 $w=1.7e-07 $l=2.34787e-07 $layer=licon1_NDIFF $count=1 $X=1.41
+ $Y=0.26 $X2=1.55 $Y2=0.435
.ends

.subckt PM_SKY130_FD_SC_LP__CLKDLYBUF4S50_1%A_394_52# 1 2 9 13 17 21 22 23 24 25
+ 26 28 32
c69 32 0 1.96922e-19 $X=3.26 $Y=1.46
r70 32 35 46.2115 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=3.26 $Y=1.46
+ $X2=3.26 $Y2=1.625
r71 32 34 46.2115 $w=3.3e-07 $l=1.65e-07 $layer=POLY_cond $X=3.26 $Y=1.46
+ $X2=3.26 $Y2=1.295
r72 31 32 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=3.26
+ $Y=1.46 $X2=3.26 $Y2=1.46
r73 25 31 8.96051 $w=3.33e-07 $l=2.31571e-07 $layer=LI1_cond $X=2.94 $Y=1.625
+ $X2=3.1 $Y2=1.46
r74 25 26 13.0481 $w=1.68e-07 $l=2e-07 $layer=LI1_cond $X=2.94 $Y=1.625 $X2=2.94
+ $Y2=1.825
r75 24 28 22.9066 $w=2.51e-07 $l=5.2314e-07 $layer=LI1_cond $X=2.54 $Y=1.91
+ $X2=2.095 $Y2=2.08
r76 23 26 6.81649 $w=1.7e-07 $l=1.20208e-07 $layer=LI1_cond $X=2.855 $Y=1.91
+ $X2=2.94 $Y2=1.825
r77 23 24 20.5508 $w=1.68e-07 $l=3.15e-07 $layer=LI1_cond $X=2.855 $Y=1.91
+ $X2=2.54 $Y2=1.91
r78 21 31 13.2991 $w=3.33e-07 $l=4.69791e-07 $layer=LI1_cond $X=2.855 $Y=1.097
+ $X2=3.1 $Y2=1.46
r79 21 22 29.1789 $w=2.33e-07 $l=5.95e-07 $layer=LI1_cond $X=2.855 $Y=1.097
+ $X2=2.26 $Y2=1.097
r80 15 22 6.82498 $w=2.35e-07 $l=1.73925e-07 $layer=LI1_cond $X=2.135 $Y=0.98
+ $X2=2.26 $Y2=1.097
r81 15 17 25.1233 $w=2.48e-07 $l=5.45e-07 $layer=LI1_cond $X=2.135 $Y=0.98
+ $X2=2.135 $Y2=0.435
r82 13 35 430.723 $w=1.5e-07 $l=8.4e-07 $layer=POLY_cond $X=3.17 $Y=2.465
+ $X2=3.17 $Y2=1.625
r83 9 34 423.032 $w=1.5e-07 $l=8.25e-07 $layer=POLY_cond $X=3.17 $Y=0.47
+ $X2=3.17 $Y2=1.295
r84 2 28 300 $w=1.7e-07 $l=2.03101e-07 $layer=licon1_PDIFF $count=2 $X=1.97
+ $Y=2.095 $X2=2.095 $Y2=2.245
r85 1 17 91 $w=1.7e-07 $l=2.29129e-07 $layer=licon1_NDIFF $count=2 $X=1.97
+ $Y=0.26 $X2=2.095 $Y2=0.435
.ends

.subckt PM_SKY130_FD_SC_LP__CLKDLYBUF4S50_1%VPWR 1 2 9 13 18 19 20 22 35 36 39
r42 39 40 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.72 $Y=3.33
+ $X2=0.72 $Y2=3.33
r43 35 36 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=3.6 $Y=3.33 $X2=3.6
+ $Y2=3.33
r44 33 36 0.267585 $w=4.9e-07 $l=9.6e-07 $layer=MET1_cond $X=2.64 $Y=3.33
+ $X2=3.6 $Y2=3.33
r45 32 33 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=2.64 $Y=3.33
+ $X2=2.64 $Y2=3.33
r46 30 40 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=1.2 $Y=3.33
+ $X2=0.72 $Y2=3.33
r47 29 32 93.9465 $w=1.68e-07 $l=1.44e-06 $layer=LI1_cond $X=1.2 $Y=3.33
+ $X2=2.64 $Y2=3.33
r48 29 30 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=1.2 $Y=3.33 $X2=1.2
+ $Y2=3.33
r49 27 39 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=0.925 $Y=3.33
+ $X2=0.76 $Y2=3.33
r50 27 29 17.9412 $w=1.68e-07 $l=2.75e-07 $layer=LI1_cond $X=0.925 $Y=3.33
+ $X2=1.2 $Y2=3.33
r51 25 40 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.24 $Y=3.33
+ $X2=0.72 $Y2=3.33
r52 24 25 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.24 $Y=3.33
+ $X2=0.24 $Y2=3.33
r53 22 39 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=0.595 $Y=3.33
+ $X2=0.76 $Y2=3.33
r54 22 24 23.1604 $w=1.68e-07 $l=3.55e-07 $layer=LI1_cond $X=0.595 $Y=3.33
+ $X2=0.24 $Y2=3.33
r55 20 33 0.200689 $w=4.9e-07 $l=7.2e-07 $layer=MET1_cond $X=1.92 $Y=3.33
+ $X2=2.64 $Y2=3.33
r56 20 30 0.200689 $w=4.9e-07 $l=7.2e-07 $layer=MET1_cond $X=1.92 $Y=3.33
+ $X2=1.2 $Y2=3.33
r57 18 32 4.56684 $w=1.68e-07 $l=7e-08 $layer=LI1_cond $X=2.71 $Y=3.33 $X2=2.64
+ $Y2=3.33
r58 18 19 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.71 $Y=3.33
+ $X2=2.875 $Y2=3.33
r59 17 35 36.5348 $w=1.68e-07 $l=5.6e-07 $layer=LI1_cond $X=3.04 $Y=3.33 $X2=3.6
+ $Y2=3.33
r60 17 19 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=3.04 $Y=3.33
+ $X2=2.875 $Y2=3.33
r61 13 16 23.7473 $w=3.28e-07 $l=6.8e-07 $layer=LI1_cond $X=2.875 $Y=2.27
+ $X2=2.875 $Y2=2.95
r62 11 19 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=2.875 $Y=3.245
+ $X2=2.875 $Y2=3.33
r63 11 16 10.3021 $w=3.28e-07 $l=2.95e-07 $layer=LI1_cond $X=2.875 $Y=3.245
+ $X2=2.875 $Y2=2.95
r64 7 39 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=0.76 $Y=3.245 $X2=0.76
+ $Y2=3.33
r65 7 9 26.3665 $w=3.28e-07 $l=7.55e-07 $layer=LI1_cond $X=0.76 $Y=3.245
+ $X2=0.76 $Y2=2.49
r66 2 16 400 $w=1.7e-07 $l=9.22348e-07 $layer=licon1_PDIFF $count=1 $X=2.735
+ $Y=2.095 $X2=2.875 $Y2=2.95
r67 2 13 400 $w=1.7e-07 $l=2.34787e-07 $layer=licon1_PDIFF $count=1 $X=2.735
+ $Y=2.095 $X2=2.875 $Y2=2.27
r68 1 9 300 $w=1.7e-07 $l=7.52712e-07 $layer=licon1_PDIFF $count=2 $X=0.55
+ $Y=1.835 $X2=0.76 $Y2=2.49
.ends

.subckt PM_SKY130_FD_SC_LP__CLKDLYBUF4S50_1%X 1 2 7 8 9 10 11 12 13 46 49 53
r25 49 50 7.43121 $w=5.18e-07 $l=1.65e-07 $layer=LI1_cond $X=3.49 $Y=1.98
+ $X2=3.49 $Y2=1.815
r26 32 53 0.92006 $w=5.18e-07 $l=4e-08 $layer=LI1_cond $X=3.49 $Y=2.075 $X2=3.49
+ $Y2=2.035
r27 13 39 3.1052 $w=5.18e-07 $l=1.35e-07 $layer=LI1_cond $X=3.49 $Y=2.775
+ $X2=3.49 $Y2=2.91
r28 12 13 8.51056 $w=5.18e-07 $l=3.7e-07 $layer=LI1_cond $X=3.49 $Y=2.405
+ $X2=3.49 $Y2=2.775
r29 11 53 0.529035 $w=5.18e-07 $l=2.3e-08 $layer=LI1_cond $X=3.49 $Y=2.012
+ $X2=3.49 $Y2=2.035
r30 11 49 0.736048 $w=5.18e-07 $l=3.2e-08 $layer=LI1_cond $X=3.49 $Y=2.012
+ $X2=3.49 $Y2=1.98
r31 11 12 7.08446 $w=5.18e-07 $l=3.08e-07 $layer=LI1_cond $X=3.49 $Y=2.097
+ $X2=3.49 $Y2=2.405
r32 11 32 0.506033 $w=5.18e-07 $l=2.2e-08 $layer=LI1_cond $X=3.49 $Y=2.097
+ $X2=3.49 $Y2=2.075
r33 10 50 7.35602 $w=2.33e-07 $l=1.5e-07 $layer=LI1_cond $X=3.632 $Y=1.665
+ $X2=3.632 $Y2=1.815
r34 9 10 18.1448 $w=2.33e-07 $l=3.7e-07 $layer=LI1_cond $X=3.632 $Y=1.295
+ $X2=3.632 $Y2=1.665
r35 8 9 18.1448 $w=2.33e-07 $l=3.7e-07 $layer=LI1_cond $X=3.632 $Y=0.925
+ $X2=3.632 $Y2=1.295
r36 7 46 1.11752 $w=3.28e-07 $l=3.2e-08 $layer=LI1_cond $X=3.6 $Y=0.475
+ $X2=3.632 $Y2=0.475
r37 7 46 2.74472 $w=2.35e-07 $l=1.65e-07 $layer=LI1_cond $X=3.632 $Y=0.64
+ $X2=3.632 $Y2=0.475
r38 7 42 7.50834 $w=3.28e-07 $l=2.15e-07 $layer=LI1_cond $X=3.6 $Y=0.475
+ $X2=3.385 $Y2=0.475
r39 7 8 10.1233 $w=4.03e-07 $l=2.85e-07 $layer=LI1_cond $X=3.632 $Y=0.64
+ $X2=3.632 $Y2=0.925
r40 2 49 400 $w=1.7e-07 $l=2.03286e-07 $layer=licon1_PDIFF $count=1 $X=3.245
+ $Y=1.835 $X2=3.385 $Y2=1.98
r41 2 39 400 $w=1.7e-07 $l=1.14286e-06 $layer=licon1_PDIFF $count=1 $X=3.245
+ $Y=1.835 $X2=3.385 $Y2=2.91
r42 1 42 182 $w=1.7e-07 $l=2.7627e-07 $layer=licon1_NDIFF $count=1 $X=3.245
+ $Y=0.26 $X2=3.385 $Y2=0.475
.ends

.subckt PM_SKY130_FD_SC_LP__CLKDLYBUF4S50_1%VGND 1 2 9 13 16 17 18 20 33 34 37
r36 37 38 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.72 $Y=0 $X2=0.72
+ $Y2=0
r37 33 34 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=3.6 $Y=0 $X2=3.6
+ $Y2=0
r38 31 34 0.267585 $w=4.9e-07 $l=9.6e-07 $layer=MET1_cond $X=2.64 $Y=0 $X2=3.6
+ $Y2=0
r39 30 31 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=2.64 $Y=0 $X2=2.64
+ $Y2=0
r40 28 38 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=1.2 $Y=0 $X2=0.72
+ $Y2=0
r41 27 30 93.9465 $w=1.68e-07 $l=1.44e-06 $layer=LI1_cond $X=1.2 $Y=0 $X2=2.64
+ $Y2=0
r42 27 28 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=1.2 $Y=0 $X2=1.2
+ $Y2=0
r43 25 37 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=0.91 $Y=0 $X2=0.745
+ $Y2=0
r44 25 27 18.9198 $w=1.68e-07 $l=2.9e-07 $layer=LI1_cond $X=0.91 $Y=0 $X2=1.2
+ $Y2=0
r45 23 38 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.24 $Y=0 $X2=0.72
+ $Y2=0
r46 22 23 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.24 $Y=0 $X2=0.24
+ $Y2=0
r47 20 37 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=0.58 $Y=0 $X2=0.745
+ $Y2=0
r48 20 22 22.1818 $w=1.68e-07 $l=3.4e-07 $layer=LI1_cond $X=0.58 $Y=0 $X2=0.24
+ $Y2=0
r49 18 31 0.200689 $w=4.9e-07 $l=7.2e-07 $layer=MET1_cond $X=1.92 $Y=0 $X2=2.64
+ $Y2=0
r50 18 28 0.200689 $w=4.9e-07 $l=7.2e-07 $layer=MET1_cond $X=1.92 $Y=0 $X2=1.2
+ $Y2=0
r51 16 30 4.56684 $w=1.68e-07 $l=7e-08 $layer=LI1_cond $X=2.71 $Y=0 $X2=2.64
+ $Y2=0
r52 16 17 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.71 $Y=0 $X2=2.875
+ $Y2=0
r53 15 33 36.5348 $w=1.68e-07 $l=5.6e-07 $layer=LI1_cond $X=3.04 $Y=0 $X2=3.6
+ $Y2=0
r54 15 17 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=3.04 $Y=0 $X2=2.875
+ $Y2=0
r55 11 17 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=2.875 $Y=0.085
+ $X2=2.875 $Y2=0
r56 11 13 14.6675 $w=3.28e-07 $l=4.2e-07 $layer=LI1_cond $X=2.875 $Y=0.085
+ $X2=2.875 $Y2=0.505
r57 7 37 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=0.745 $Y=0.085
+ $X2=0.745 $Y2=0
r58 7 9 13.4452 $w=3.28e-07 $l=3.85e-07 $layer=LI1_cond $X=0.745 $Y=0.085
+ $X2=0.745 $Y2=0.47
r59 2 13 182 $w=1.7e-07 $l=3.07124e-07 $layer=licon1_NDIFF $count=1 $X=2.735
+ $Y=0.26 $X2=2.875 $Y2=0.505
r60 1 9 182 $w=1.7e-07 $l=2.91633e-07 $layer=licon1_NDIFF $count=1 $X=0.55
+ $Y=0.26 $X2=0.745 $Y2=0.47
.ends