blob: ae0482cb42aca1a3cee8316a45d4f05cfa5fd0bb [file] [log] [blame]
* File: sky130_fd_sc_hs__o21bai_4.pex.spice
* Created: Tue Sep 1 20:15:20 2020
* Program "Calibre xRC"
* Version "v2018.4_34.26"
* Nominal Temperature: 27C
* Circuit Temperature: 27C
*
.subckt PM_SKY130_FD_SC_HS__O21BAI_4%A1 3 5 7 8 10 13 17 19 21 22 23 26 29 30 32
+ 33 34 35 36 37
c85 37 0 6.06251e-20 $X=1.68 $Y=1.665
c86 23 0 1.91457e-19 $X=1.5 $Y=1.425
r87 52 53 0.647849 $w=3.72e-07 $l=5e-09 $layer=POLY_cond $X=1.405 $Y=1.557
+ $X2=1.41 $Y2=1.557
r88 50 52 18.1398 $w=3.72e-07 $l=1.4e-07 $layer=POLY_cond $X=1.265 $Y=1.557
+ $X2=1.405 $Y2=1.557
r89 50 51 96.8533 $w=1.7e-07 $l=2.55e-07 $layer=licon1_POLY $count=1 $X=1.265
+ $Y=1.515 $X2=1.265 $Y2=1.515
r90 48 50 37.5753 $w=3.72e-07 $l=2.9e-07 $layer=POLY_cond $X=0.975 $Y=1.557
+ $X2=1.265 $Y2=1.557
r91 47 48 1.94355 $w=3.72e-07 $l=1.5e-08 $layer=POLY_cond $X=0.96 $Y=1.557
+ $X2=0.975 $Y2=1.557
r92 45 47 48.5887 $w=3.72e-07 $l=3.75e-07 $layer=POLY_cond $X=0.585 $Y=1.557
+ $X2=0.96 $Y2=1.557
r93 45 46 96.8533 $w=1.7e-07 $l=2.55e-07 $layer=licon1_POLY $count=1 $X=0.585
+ $Y=1.515 $X2=0.585 $Y2=1.515
r94 43 45 9.71774 $w=3.72e-07 $l=7.5e-08 $layer=POLY_cond $X=0.51 $Y=1.557
+ $X2=0.585 $Y2=1.557
r95 42 43 1.94355 $w=3.72e-07 $l=1.5e-08 $layer=POLY_cond $X=0.495 $Y=1.557
+ $X2=0.51 $Y2=1.557
r96 37 51 11.1224 $w=4.28e-07 $l=4.15e-07 $layer=LI1_cond $X=1.68 $Y=1.565
+ $X2=1.265 $Y2=1.565
r97 36 51 1.74206 $w=4.28e-07 $l=6.5e-08 $layer=LI1_cond $X=1.2 $Y=1.565
+ $X2=1.265 $Y2=1.565
r98 35 36 12.8645 $w=4.28e-07 $l=4.8e-07 $layer=LI1_cond $X=0.72 $Y=1.565
+ $X2=1.2 $Y2=1.565
r99 35 46 3.61813 $w=4.28e-07 $l=1.35e-07 $layer=LI1_cond $X=0.72 $Y=1.565
+ $X2=0.585 $Y2=1.565
r100 34 46 9.24634 $w=4.28e-07 $l=3.45e-07 $layer=LI1_cond $X=0.24 $Y=1.565
+ $X2=0.585 $Y2=1.565
r101 30 32 204.047 $w=1.5e-07 $l=6.35e-07 $layer=POLY_cond $X=1.86 $Y=1.765
+ $X2=1.86 $Y2=2.4
r102 29 30 36.0588 $w=1.8e-07 $l=9e-08 $layer=POLY_cond $X=1.86 $Y=1.675
+ $X2=1.86 $Y2=1.765
r103 28 33 18.8402 $w=1.65e-07 $l=7.74597e-08 $layer=POLY_cond $X=1.86 $Y=1.5
+ $X2=1.855 $Y2=1.425
r104 28 29 68.0242 $w=1.8e-07 $l=1.75e-07 $layer=POLY_cond $X=1.86 $Y=1.5
+ $X2=1.86 $Y2=1.675
r105 24 33 18.8402 $w=1.65e-07 $l=8.44097e-08 $layer=POLY_cond $X=1.835 $Y=1.35
+ $X2=1.855 $Y2=1.425
r106 24 26 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=1.835 $Y=1.35
+ $X2=1.835 $Y2=0.74
r107 23 53 29.3692 $w=3.72e-07 $l=1.71184e-07 $layer=POLY_cond $X=1.5 $Y=1.425
+ $X2=1.41 $Y2=1.557
r108 22 33 6.66866 $w=1.5e-07 $l=9.5e-08 $layer=POLY_cond $X=1.76 $Y=1.425
+ $X2=1.855 $Y2=1.425
r109 22 23 133.319 $w=1.5e-07 $l=2.6e-07 $layer=POLY_cond $X=1.76 $Y=1.425
+ $X2=1.5 $Y2=1.425
r110 19 53 24.0971 $w=1.5e-07 $l=2.08e-07 $layer=POLY_cond $X=1.41 $Y=1.765
+ $X2=1.41 $Y2=1.557
r111 19 21 204.047 $w=1.5e-07 $l=6.35e-07 $layer=POLY_cond $X=1.41 $Y=1.765
+ $X2=1.41 $Y2=2.4
r112 15 52 24.0971 $w=1.5e-07 $l=2.07e-07 $layer=POLY_cond $X=1.405 $Y=1.35
+ $X2=1.405 $Y2=1.557
r113 15 17 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=1.405 $Y=1.35
+ $X2=1.405 $Y2=0.74
r114 11 48 24.0971 $w=1.5e-07 $l=2.07e-07 $layer=POLY_cond $X=0.975 $Y=1.35
+ $X2=0.975 $Y2=1.557
r115 11 13 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=0.975 $Y=1.35
+ $X2=0.975 $Y2=0.74
r116 8 47 24.0971 $w=1.5e-07 $l=2.08e-07 $layer=POLY_cond $X=0.96 $Y=1.765
+ $X2=0.96 $Y2=1.557
r117 8 10 204.047 $w=1.5e-07 $l=6.35e-07 $layer=POLY_cond $X=0.96 $Y=1.765
+ $X2=0.96 $Y2=2.4
r118 5 43 24.0971 $w=1.5e-07 $l=2.08e-07 $layer=POLY_cond $X=0.51 $Y=1.765
+ $X2=0.51 $Y2=1.557
r119 5 7 204.047 $w=1.5e-07 $l=6.35e-07 $layer=POLY_cond $X=0.51 $Y=1.765
+ $X2=0.51 $Y2=2.4
r120 1 42 24.0971 $w=1.5e-07 $l=2.07e-07 $layer=POLY_cond $X=0.495 $Y=1.35
+ $X2=0.495 $Y2=1.557
r121 1 3 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=0.495 $Y=1.35
+ $X2=0.495 $Y2=0.74
.ends
.subckt PM_SKY130_FD_SC_HS__O21BAI_4%A2 3 6 7 9 10 14 16 18 21 23 25 26 28 31 33
+ 34 35 36 50
c102 14 0 1.44963e-19 $X=2.695 $Y=0.74
c103 7 0 2.49193e-19 $X=2.31 $Y=1.765
r104 50 51 0.656676 $w=3.67e-07 $l=5e-09 $layer=POLY_cond $X=3.71 $Y=1.557
+ $X2=3.715 $Y2=1.557
r105 48 50 32.1771 $w=3.67e-07 $l=2.45e-07 $layer=POLY_cond $X=3.465 $Y=1.557
+ $X2=3.71 $Y2=1.557
r106 48 49 96.8533 $w=1.7e-07 $l=2.55e-07 $layer=licon1_POLY $count=1 $X=3.465
+ $Y=1.515 $X2=3.465 $Y2=1.515
r107 46 48 33.4905 $w=3.67e-07 $l=2.55e-07 $layer=POLY_cond $X=3.21 $Y=1.557
+ $X2=3.465 $Y2=1.557
r108 45 46 11.1635 $w=3.67e-07 $l=8.5e-08 $layer=POLY_cond $X=3.125 $Y=1.557
+ $X2=3.21 $Y2=1.557
r109 43 45 44.6539 $w=3.67e-07 $l=3.4e-07 $layer=POLY_cond $X=2.785 $Y=1.557
+ $X2=3.125 $Y2=1.557
r110 43 44 96.8533 $w=1.7e-07 $l=2.55e-07 $layer=licon1_POLY $count=1 $X=2.785
+ $Y=1.515 $X2=2.785 $Y2=1.515
r111 41 43 3.28338 $w=3.67e-07 $l=2.5e-08 $layer=POLY_cond $X=2.76 $Y=1.557
+ $X2=2.785 $Y2=1.557
r112 40 41 8.53679 $w=3.67e-07 $l=6.5e-08 $layer=POLY_cond $X=2.695 $Y=1.557
+ $X2=2.76 $Y2=1.557
r113 36 49 3.61813 $w=4.28e-07 $l=1.35e-07 $layer=LI1_cond $X=3.6 $Y=1.565
+ $X2=3.465 $Y2=1.565
r114 35 49 9.24634 $w=4.28e-07 $l=3.45e-07 $layer=LI1_cond $X=3.12 $Y=1.565
+ $X2=3.465 $Y2=1.565
r115 35 44 8.97834 $w=4.28e-07 $l=3.35e-07 $layer=LI1_cond $X=3.12 $Y=1.565
+ $X2=2.785 $Y2=1.565
r116 34 44 3.88615 $w=4.28e-07 $l=1.45e-07 $layer=LI1_cond $X=2.64 $Y=1.565
+ $X2=2.785 $Y2=1.565
r117 29 51 23.77 $w=1.5e-07 $l=2.07e-07 $layer=POLY_cond $X=3.715 $Y=1.35
+ $X2=3.715 $Y2=1.557
r118 29 31 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=3.715 $Y=1.35
+ $X2=3.715 $Y2=0.74
r119 26 50 23.77 $w=1.5e-07 $l=2.08e-07 $layer=POLY_cond $X=3.71 $Y=1.765
+ $X2=3.71 $Y2=1.557
r120 26 28 204.047 $w=1.5e-07 $l=6.35e-07 $layer=POLY_cond $X=3.71 $Y=1.765
+ $X2=3.71 $Y2=2.4
r121 23 46 23.77 $w=1.5e-07 $l=2.08e-07 $layer=POLY_cond $X=3.21 $Y=1.765
+ $X2=3.21 $Y2=1.557
r122 23 25 204.047 $w=1.5e-07 $l=6.35e-07 $layer=POLY_cond $X=3.21 $Y=1.765
+ $X2=3.21 $Y2=2.4
r123 19 45 23.77 $w=1.5e-07 $l=2.07e-07 $layer=POLY_cond $X=3.125 $Y=1.35
+ $X2=3.125 $Y2=1.557
r124 19 21 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=3.125 $Y=1.35
+ $X2=3.125 $Y2=0.74
r125 16 41 23.77 $w=1.5e-07 $l=2.08e-07 $layer=POLY_cond $X=2.76 $Y=1.765
+ $X2=2.76 $Y2=1.557
r126 16 18 204.047 $w=1.5e-07 $l=6.35e-07 $layer=POLY_cond $X=2.76 $Y=1.765
+ $X2=2.76 $Y2=2.4
r127 12 40 23.77 $w=1.5e-07 $l=2.07e-07 $layer=POLY_cond $X=2.695 $Y=1.35
+ $X2=2.695 $Y2=1.557
r128 12 14 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=2.695 $Y=1.35
+ $X2=2.695 $Y2=0.74
r129 11 33 6.66866 $w=1.5e-07 $l=1.05e-07 $layer=POLY_cond $X=2.4 $Y=1.425
+ $X2=2.295 $Y2=1.425
r130 10 40 27.1901 $w=3.67e-07 $l=1.653e-07 $layer=POLY_cond $X=2.62 $Y=1.425
+ $X2=2.695 $Y2=1.557
r131 10 11 112.809 $w=1.5e-07 $l=2.2e-07 $layer=POLY_cond $X=2.62 $Y=1.425
+ $X2=2.4 $Y2=1.425
r132 7 9 204.047 $w=1.5e-07 $l=6.35e-07 $layer=POLY_cond $X=2.31 $Y=1.765
+ $X2=2.31 $Y2=2.4
r133 6 7 36.0588 $w=1.8e-07 $l=9e-08 $layer=POLY_cond $X=2.31 $Y=1.675 $X2=2.31
+ $Y2=1.765
r134 5 33 18.8402 $w=1.65e-07 $l=8.21584e-08 $layer=POLY_cond $X=2.31 $Y=1.5
+ $X2=2.295 $Y2=1.425
r135 5 6 68.0242 $w=1.8e-07 $l=1.75e-07 $layer=POLY_cond $X=2.31 $Y=1.5 $X2=2.31
+ $Y2=1.675
r136 1 33 18.8402 $w=1.65e-07 $l=8.87412e-08 $layer=POLY_cond $X=2.265 $Y=1.35
+ $X2=2.295 $Y2=1.425
r137 1 3 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=2.265 $Y=1.35
+ $X2=2.265 $Y2=0.74
.ends
.subckt PM_SKY130_FD_SC_HS__O21BAI_4%A_828_48# 1 2 9 13 15 17 20 22 24 27 29 36
+ 38 39 41 42 45 49 51
c117 36 0 2.90942e-20 $X=5.555 $Y=1.515
r118 58 59 12.4298 $w=3.49e-07 $l=9e-08 $layer=POLY_cond $X=5.145 $Y=1.557
+ $X2=5.235 $Y2=1.557
r119 57 58 51.7908 $w=3.49e-07 $l=3.75e-07 $layer=POLY_cond $X=4.77 $Y=1.557
+ $X2=5.145 $Y2=1.557
r120 56 57 17.2636 $w=3.49e-07 $l=1.25e-07 $layer=POLY_cond $X=4.645 $Y=1.557
+ $X2=4.77 $Y2=1.557
r121 47 49 20.5135 $w=2.48e-07 $l=4.45e-07 $layer=LI1_cond $X=6.45 $Y=1.11
+ $X2=6.45 $Y2=0.665
r122 43 45 6.68417 $w=2.48e-07 $l=1.45e-07 $layer=LI1_cond $X=6.43 $Y=2.12
+ $X2=6.43 $Y2=2.265
r123 41 43 7.14316 $w=1.7e-07 $l=1.62019e-07 $layer=LI1_cond $X=6.305 $Y=2.035
+ $X2=6.43 $Y2=2.12
r124 41 42 22.1818 $w=1.68e-07 $l=3.4e-07 $layer=LI1_cond $X=6.305 $Y=2.035
+ $X2=5.965 $Y2=2.035
r125 40 51 0.716491 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=5.965 $Y=1.195
+ $X2=5.88 $Y2=1.195
r126 39 47 7.14316 $w=1.7e-07 $l=1.62019e-07 $layer=LI1_cond $X=6.325 $Y=1.195
+ $X2=6.45 $Y2=1.11
r127 39 40 23.4866 $w=1.68e-07 $l=3.6e-07 $layer=LI1_cond $X=6.325 $Y=1.195
+ $X2=5.965 $Y2=1.195
r128 38 42 6.81649 $w=1.7e-07 $l=1.20208e-07 $layer=LI1_cond $X=5.88 $Y=1.95
+ $X2=5.965 $Y2=2.035
r129 37 38 17.615 $w=1.68e-07 $l=2.7e-07 $layer=LI1_cond $X=5.88 $Y=1.68
+ $X2=5.88 $Y2=1.95
r130 36 61 12.4298 $w=3.49e-07 $l=9e-08 $layer=POLY_cond $X=5.555 $Y=1.557
+ $X2=5.645 $Y2=1.557
r131 36 59 44.1948 $w=3.49e-07 $l=3.2e-07 $layer=POLY_cond $X=5.555 $Y=1.557
+ $X2=5.235 $Y2=1.557
r132 35 36 72.64 $w=1.7e-07 $l=3.4e-07 $layer=licon1_POLY $count=2 $X=5.555
+ $Y=1.515 $X2=5.555 $Y2=1.515
r133 32 56 15.192 $w=3.49e-07 $l=1.1e-07 $layer=POLY_cond $X=4.535 $Y=1.557
+ $X2=4.645 $Y2=1.557
r134 32 54 44.1948 $w=3.49e-07 $l=3.2e-07 $layer=POLY_cond $X=4.535 $Y=1.557
+ $X2=4.215 $Y2=1.557
r135 31 35 35.621 $w=3.28e-07 $l=1.02e-06 $layer=LI1_cond $X=4.535 $Y=1.515
+ $X2=5.555 $Y2=1.515
r136 31 32 72.64 $w=1.7e-07 $l=3.4e-07 $layer=licon1_POLY $count=2 $X=4.535
+ $Y=1.515 $X2=4.535 $Y2=1.515
r137 29 37 10.7647 $w=1.68e-07 $l=1.65e-07 $layer=LI1_cond $X=5.88 $Y=1.515
+ $X2=5.88 $Y2=1.68
r138 29 51 20.877 $w=1.68e-07 $l=3.2e-07 $layer=LI1_cond $X=5.88 $Y=1.515
+ $X2=5.88 $Y2=1.195
r139 29 35 8.3814 $w=3.28e-07 $l=2.4e-07 $layer=LI1_cond $X=5.795 $Y=1.515
+ $X2=5.555 $Y2=1.515
r140 25 61 22.56 $w=1.5e-07 $l=2.07e-07 $layer=POLY_cond $X=5.645 $Y=1.35
+ $X2=5.645 $Y2=1.557
r141 25 27 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=5.645 $Y=1.35
+ $X2=5.645 $Y2=0.74
r142 22 59 22.56 $w=1.5e-07 $l=2.08e-07 $layer=POLY_cond $X=5.235 $Y=1.765
+ $X2=5.235 $Y2=1.557
r143 22 24 204.047 $w=1.5e-07 $l=6.35e-07 $layer=POLY_cond $X=5.235 $Y=1.765
+ $X2=5.235 $Y2=2.4
r144 18 58 22.56 $w=1.5e-07 $l=2.07e-07 $layer=POLY_cond $X=5.145 $Y=1.35
+ $X2=5.145 $Y2=1.557
r145 18 20 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=5.145 $Y=1.35
+ $X2=5.145 $Y2=0.74
r146 15 57 22.56 $w=1.5e-07 $l=2.08e-07 $layer=POLY_cond $X=4.77 $Y=1.765
+ $X2=4.77 $Y2=1.557
r147 15 17 204.047 $w=1.5e-07 $l=6.35e-07 $layer=POLY_cond $X=4.77 $Y=1.765
+ $X2=4.77 $Y2=2.4
r148 11 56 22.56 $w=1.5e-07 $l=2.07e-07 $layer=POLY_cond $X=4.645 $Y=1.35
+ $X2=4.645 $Y2=1.557
r149 11 13 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=4.645 $Y=1.35
+ $X2=4.645 $Y2=0.74
r150 7 54 22.56 $w=1.5e-07 $l=2.07e-07 $layer=POLY_cond $X=4.215 $Y=1.35
+ $X2=4.215 $Y2=1.557
r151 7 9 312.787 $w=1.5e-07 $l=6.1e-07 $layer=POLY_cond $X=4.215 $Y=1.35
+ $X2=4.215 $Y2=0.74
r152 2 45 300 $w=1.7e-07 $l=2.10357e-07 $layer=licon1_PDIFF $count=2 $X=6.32
+ $Y=2.12 $X2=6.47 $Y2=2.265
r153 1 49 91 $w=1.7e-07 $l=2.05061e-07 $layer=licon1_NDIFF $count=2 $X=6.345
+ $Y=0.52 $X2=6.49 $Y2=0.665
.ends
.subckt PM_SKY130_FD_SC_HS__O21BAI_4%B1_N 1 3 4 5 6 8 11 13 14
c40 4 0 2.17486e-19 $X=6.695 $Y=1.78
r41 17 19 35.2231 $w=3.9e-07 $l=2.85e-07 $layer=POLY_cond $X=6.245 $Y=1.747
+ $X2=6.53 $Y2=1.747
r42 13 14 16.7628 $w=3.28e-07 $l=4.8e-07 $layer=LI1_cond $X=6.48 $Y=1.615
+ $X2=6.96 $Y2=1.615
r43 13 19 145.28 $w=1.7e-07 $l=1.7e-07 $layer=licon1_POLY $count=1 $X=6.53
+ $Y=1.615 $X2=6.53 $Y2=1.615
r44 9 22 25.2441 $w=1.5e-07 $l=2.97e-07 $layer=POLY_cond $X=6.705 $Y=1.45
+ $X2=6.705 $Y2=1.747
r45 9 11 287.149 $w=1.5e-07 $l=5.6e-07 $layer=POLY_cond $X=6.705 $Y=1.45
+ $X2=6.705 $Y2=0.89
r46 6 8 159.06 $w=1.5e-07 $l=4.95e-07 $layer=POLY_cond $X=6.695 $Y=2.045
+ $X2=6.695 $Y2=2.54
r47 5 6 36.0588 $w=1.8e-07 $l=9e-08 $layer=POLY_cond $X=6.695 $Y=1.955 $X2=6.695
+ $Y2=2.045
r48 4 22 1.2359 $w=3.9e-07 $l=1e-08 $layer=POLY_cond $X=6.695 $Y=1.747 $X2=6.705
+ $Y2=1.747
r49 4 19 20.3923 $w=3.9e-07 $l=1.65e-07 $layer=POLY_cond $X=6.695 $Y=1.747
+ $X2=6.53 $Y2=1.747
r50 4 5 68.0242 $w=1.8e-07 $l=1.75e-07 $layer=POLY_cond $X=6.695 $Y=1.78
+ $X2=6.695 $Y2=1.955
r51 1 17 25.2441 $w=1.5e-07 $l=2.98e-07 $layer=POLY_cond $X=6.245 $Y=2.045
+ $X2=6.245 $Y2=1.747
r52 1 3 159.06 $w=1.5e-07 $l=4.95e-07 $layer=POLY_cond $X=6.245 $Y=2.045
+ $X2=6.245 $Y2=2.54
.ends
.subckt PM_SKY130_FD_SC_HS__O21BAI_4%A_28_368# 1 2 3 4 5 16 18 20 24 26 28 31 32
+ 33 36 38 42 47 50
c81 42 0 2.90942e-20 $X=3.985 $Y=2.375
c82 26 0 1.91457e-19 $X=2 $Y=2.035
r83 40 42 18.5089 $w=3.28e-07 $l=5.3e-07 $layer=LI1_cond $X=3.985 $Y=2.905
+ $X2=3.985 $Y2=2.375
r84 39 50 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=3.15 $Y=2.99
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r85 38 40 7.76618 $w=1.7e-07 $l=2.03101e-07 $layer=LI1_cond $X=3.82 $Y=2.99
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r86 38 39 43.7112 $w=1.68e-07 $l=6.7e-07 $layer=LI1_cond $X=3.82 $Y=2.99
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r87 34 50 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=2.985 $Y=2.905
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r88 34 36 15.7151 $w=3.28e-07 $l=4.5e-07 $layer=LI1_cond $X=2.985 $Y=2.905
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r89 32 50 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.82 $Y=2.99
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r90 32 33 42.4064 $w=1.68e-07 $l=6.5e-07 $layer=LI1_cond $X=2.82 $Y=2.99
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r91 29 33 6.81649 $w=1.7e-07 $l=1.20208e-07 $layer=LI1_cond $X=2.085 $Y=2.905
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r92 29 31 32.9465 $w=1.68e-07 $l=5.05e-07 $layer=LI1_cond $X=2.085 $Y=2.905
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r93 28 49 3.40825 $w=1.7e-07 $l=1.5e-07 $layer=LI1_cond $X=2.085 $Y=2.12
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r94 28 31 18.2674 $w=1.68e-07 $l=2.8e-07 $layer=LI1_cond $X=2.085 $Y=2.12
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r95 27 47 7.02821 $w=1.7e-07 $l=1.25e-07 $layer=LI1_cond $X=1.27 $Y=2.035
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r96 26 49 3.40825 $w=1.7e-07 $l=1.12916e-07 $layer=LI1_cond $X=2 $Y=2.035
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r97 26 27 47.6257 $w=1.68e-07 $l=7.3e-07 $layer=LI1_cond $X=2 $Y=2.035 $X2=1.27
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r98 22 47 0.00168595 $w=2.5e-07 $l=8.5e-08 $layer=LI1_cond $X=1.145 $Y=2.12
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r99 22 24 14.7513 $w=2.48e-07 $l=3.2e-07 $layer=LI1_cond $X=1.145 $Y=2.12
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r100 21 45 4.25188 $w=1.7e-07 $l=1.25e-07 $layer=LI1_cond $X=0.37 $Y=2.035
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r101 20 47 7.02821 $w=1.7e-07 $l=1.25e-07 $layer=LI1_cond $X=1.02 $Y=2.035
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r102 20 21 42.4064 $w=1.68e-07 $l=6.5e-07 $layer=LI1_cond $X=1.02 $Y=2.035
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r103 16 45 2.89128 $w=2.5e-07 $l=8.5e-08 $layer=LI1_cond $X=0.245 $Y=2.12
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r104 16 18 14.7513 $w=2.48e-07 $l=3.2e-07 $layer=LI1_cond $X=0.245 $Y=2.12
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r105 5 42 300 $w=1.7e-07 $l=6.27077e-07 $layer=licon1_PDIFF $count=2 $X=3.785
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r106 4 36 300 $w=1.7e-07 $l=6.85912e-07 $layer=licon1_PDIFF $count=2 $X=2.835
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r107 3 49 600 $w=1.7e-07 $l=2.10357e-07 $layer=licon1_PDIFF $count=1 $X=1.935
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r108 3 31 300 $w=1.7e-07 $l=6.30555e-07 $layer=licon1_PDIFF $count=2 $X=1.935
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r109 2 47 600 $w=1.7e-07 $l=2.59374e-07 $layer=licon1_PDIFF $count=1 $X=1.035
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r110 2 24 300 $w=1.7e-07 $l=6.7082e-07 $layer=licon1_PDIFF $count=2 $X=1.035
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r111 1 45 600 $w=1.7e-07 $l=2.57488e-07 $layer=licon1_PDIFF $count=1 $X=0.14
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r112 1 18 300 $w=1.7e-07 $l=6.68581e-07 $layer=licon1_PDIFF $count=2 $X=0.14
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.ends
.subckt PM_SKY130_FD_SC_HS__O21BAI_4%VPWR 1 2 3 4 5 18 22 26 30 32 34 37 38 39
+ 41 46 58 62 68 71 74 78
c91 22 0 1.88567e-19 $X=1.635 $Y=2.455
r92 77 78 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=6.96 $Y=3.33
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r93 74 75 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=6 $Y=3.33 $X2=6
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r94 71 72 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.68 $Y=3.33
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r95 68 69 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.72 $Y=3.33
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r96 66 78 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=6.48 $Y=3.33
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r97 66 75 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=6.48 $Y=3.33 $X2=6
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r98 65 66 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=6.48 $Y=3.33
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r99 63 74 7.02821 $w=1.7e-07 $l=1.25e-07 $layer=LI1_cond $X=6.105 $Y=3.33
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r100 63 65 24.4652 $w=1.68e-07 $l=3.75e-07 $layer=LI1_cond $X=6.105 $Y=3.33
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r101 62 77 4.73651 $w=1.7e-07 $l=2.22e-07 $layer=LI1_cond $X=6.755 $Y=3.33
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r102 62 65 17.9412 $w=1.68e-07 $l=2.75e-07 $layer=LI1_cond $X=6.755 $Y=3.33
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r103 61 75 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=5.52 $Y=3.33 $X2=6
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r104 60 61 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=5.52 $Y=3.33
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r105 58 74 7.02821 $w=1.7e-07 $l=1.25e-07 $layer=LI1_cond $X=5.855 $Y=3.33
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r106 58 60 21.8556 $w=1.68e-07 $l=3.35e-07 $layer=LI1_cond $X=5.855 $Y=3.33
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r107 57 61 0.267585 $w=4.9e-07 $l=9.6e-07 $layer=MET1_cond $X=4.56 $Y=3.33
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r108 56 57 3.1 $w=1.7e-07 $l=5.1e-07 $layer=mcon $count=3 $X=4.56 $Y=3.33
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r109 54 72 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=2.16 $Y=3.33
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r110 53 56 156.578 $w=1.68e-07 $l=2.4e-06 $layer=LI1_cond $X=2.16 $Y=3.33
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r111 53 54 3.1 $w=1.7e-07 $l=5.1e-07 $layer=mcon $count=3 $X=2.16 $Y=3.33
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r112 51 71 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=1.8 $Y=3.33
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r113 51 53 23.4866 $w=1.68e-07 $l=3.6e-07 $layer=LI1_cond $X=1.8 $Y=3.33
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r114 50 72 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=1.2 $Y=3.33
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r115 50 69 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=1.2 $Y=3.33
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r116 49 50 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.2 $Y=3.33 $X2=1.2
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r117 47 68 7.02821 $w=1.7e-07 $l=1.25e-07 $layer=LI1_cond $X=0.82 $Y=3.33
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r118 47 49 24.7914 $w=1.68e-07 $l=3.8e-07 $layer=LI1_cond $X=0.82 $Y=3.33
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r119 46 71 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=1.47 $Y=3.33
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r120 46 49 17.615 $w=1.68e-07 $l=2.7e-07 $layer=LI1_cond $X=1.47 $Y=3.33 $X2=1.2
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r121 44 69 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.24 $Y=3.33
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r122 43 44 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.24 $Y=3.33
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r123 41 68 7.02821 $w=1.7e-07 $l=1.25e-07 $layer=LI1_cond $X=0.57 $Y=3.33
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r124 41 43 21.5294 $w=1.68e-07 $l=3.3e-07 $layer=LI1_cond $X=0.57 $Y=3.33
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r125 39 57 0.267585 $w=4.9e-07 $l=9.6e-07 $layer=MET1_cond $X=3.6 $Y=3.33
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r126 39 54 0.401378 $w=4.9e-07 $l=1.44e-06 $layer=MET1_cond $X=3.6 $Y=3.33
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r127 37 56 22.8342 $w=1.68e-07 $l=3.5e-07 $layer=LI1_cond $X=4.91 $Y=3.33
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r128 37 38 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=4.91 $Y=3.33
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r129 36 60 28.7059 $w=1.68e-07 $l=4.4e-07 $layer=LI1_cond $X=5.08 $Y=3.33
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r130 36 38 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=5.08 $Y=3.33
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r131 32 77 3.02966 $w=3.3e-07 $l=1.09864e-07 $layer=LI1_cond $X=6.92 $Y=3.245
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r132 32 34 34.2241 $w=3.28e-07 $l=9.8e-07 $layer=LI1_cond $X=6.92 $Y=3.245
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r133 28 74 0.00168595 $w=2.5e-07 $l=8.5e-08 $layer=LI1_cond $X=5.98 $Y=3.245
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r134 28 30 36.4172 $w=2.48e-07 $l=7.9e-07 $layer=LI1_cond $X=5.98 $Y=3.245
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r135 24 38 1.34256 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=4.995 $Y=3.245
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r136 24 26 58.0642 $w=1.68e-07 $l=8.9e-07 $layer=LI1_cond $X=4.995 $Y=3.245
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r137 20 71 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=1.635 $Y=3.245
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r138 20 22 27.5888 $w=3.28e-07 $l=7.9e-07 $layer=LI1_cond $X=1.635 $Y=3.245
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r139 16 68 0.00168595 $w=2.5e-07 $l=8.5e-08 $layer=LI1_cond $X=0.695 $Y=3.245
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r140 16 18 36.4172 $w=2.48e-07 $l=7.9e-07 $layer=LI1_cond $X=0.695 $Y=3.245
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r141 5 34 300 $w=1.7e-07 $l=2.10357e-07 $layer=licon1_PDIFF $count=2 $X=6.77
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r142 4 30 300 $w=1.7e-07 $l=4.00999e-07 $layer=licon1_PDIFF $count=2 $X=5.875
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r143 3 26 300 $w=1.7e-07 $l=5.85214e-07 $layer=licon1_PDIFF $count=2 $X=4.845
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r144 2 22 300 $w=1.7e-07 $l=6.85912e-07 $layer=licon1_PDIFF $count=2 $X=1.485
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r145 1 18 300 $w=1.7e-07 $l=6.85912e-07 $layer=licon1_PDIFF $count=2 $X=0.585
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.ends
.subckt PM_SKY130_FD_SC_HS__O21BAI_4%Y 1 2 3 4 5 6 19 21 23 27 29 31 35 39 41 42
+ 43 47 49 51 56 62 64 67 68
c108 51 0 8.6436e-20 $X=5.46 $Y=2.815
r109 67 68 18.5393 $w=2.28e-07 $l=3.7e-07 $layer=LI1_cond $X=4.08 $Y=1.295
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r110 61 68 14.2803 $w=2.28e-07 $l=2.85e-07 $layer=LI1_cond $X=4.08 $Y=1.95
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r111 61 62 0.280307 $w=2.3e-07 $l=8.5e-08 $layer=LI1_cond $X=4.08 $Y=1.95
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r112 58 67 5.76222 $w=2.28e-07 $l=1.15e-07 $layer=LI1_cond $X=4.08 $Y=1.18
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r113 49 66 2.6405 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=5.46 $Y=2.02 $X2=5.46
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r114 49 51 27.7634 $w=3.28e-07 $l=7.95e-07 $layer=LI1_cond $X=5.46 $Y=2.02
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r115 45 47 5.23838 $w=3.28e-07 $l=1.5e-07 $layer=LI1_cond $X=5.43 $Y=1.01
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r116 44 64 8.61065 $w=1.7e-07 $l=1.88348e-07 $layer=LI1_cond $X=4.71 $Y=1.935
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r117 43 66 5.12568 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=5.295 $Y=1.935
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r118 43 44 38.1658 $w=1.68e-07 $l=5.85e-07 $layer=LI1_cond $X=5.295 $Y=1.935
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r119 41 45 7.76618 $w=1.7e-07 $l=2.03101e-07 $layer=LI1_cond $X=5.265 $Y=1.095
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r120 41 42 43.7112 $w=1.68e-07 $l=6.7e-07 $layer=LI1_cond $X=5.265 $Y=1.095
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r121 37 64 0.89609 $w=3.3e-07 $l=1.35e-07 $layer=LI1_cond $X=4.545 $Y=2.12
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r122 37 39 24.2711 $w=3.28e-07 $l=6.95e-07 $layer=LI1_cond $X=4.545 $Y=2.12
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r123 33 42 10.7647 $w=1.68e-07 $l=1.65e-07 $layer=LI1_cond $X=4.43 $Y=1.095
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r124 33 58 22.8342 $w=1.68e-07 $l=3.5e-07 $layer=LI1_cond $X=4.43 $Y=1.095
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r125 33 35 6.63528 $w=3.28e-07 $l=1.9e-07 $layer=LI1_cond $X=4.43 $Y=1.01
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r126 32 62 6.59134 $w=1.7e-07 $l=1.15e-07 $layer=LI1_cond $X=4.195 $Y=2.035
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r127 31 64 8.61065 $w=1.7e-07 $l=1.88348e-07 $layer=LI1_cond $X=4.38 $Y=2.035
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r128 31 32 12.0695 $w=1.68e-07 $l=1.85e-07 $layer=LI1_cond $X=4.38 $Y=2.035
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r129 30 56 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=3.65 $Y=2.035
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r130 29 62 6.59134 $w=1.7e-07 $l=1.15e-07 $layer=LI1_cond $X=3.965 $Y=2.035
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r131 29 30 20.5508 $w=1.68e-07 $l=3.15e-07 $layer=LI1_cond $X=3.965 $Y=2.035
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r132 25 56 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=3.485 $Y=2.12
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r133 25 27 15.7151 $w=3.28e-07 $l=4.5e-07 $layer=LI1_cond $X=3.485 $Y=2.12
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r134 24 54 4.25188 $w=1.7e-07 $l=1.25e-07 $layer=LI1_cond $X=2.62 $Y=2.035
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r135 23 56 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=3.32 $Y=2.035
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r136 23 24 45.6684 $w=1.68e-07 $l=7e-07 $layer=LI1_cond $X=3.32 $Y=2.035
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r137 19 54 2.89128 $w=2.5e-07 $l=8.5e-08 $layer=LI1_cond $X=2.495 $Y=2.12
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r138 19 21 20.744 $w=2.48e-07 $l=4.5e-07 $layer=LI1_cond $X=2.495 $Y=2.12
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r139 6 66 400 $w=1.7e-07 $l=2.38485e-07 $layer=licon1_PDIFF $count=1 $X=5.31
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r140 6 51 400 $w=1.7e-07 $l=1.04732e-06 $layer=licon1_PDIFF $count=1 $X=5.31
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r141 5 64 400 $w=1.7e-07 $l=2.36643e-07 $layer=licon1_PDIFF $count=1 $X=4.4
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r142 5 39 400 $w=1.7e-07 $l=1.04499e-06 $layer=licon1_PDIFF $count=1 $X=4.4
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r143 4 56 600 $w=1.7e-07 $l=2.81069e-07 $layer=licon1_PDIFF $count=1 $X=3.285
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r144 4 27 600 $w=1.7e-07 $l=8.23954e-07 $layer=licon1_PDIFF $count=1 $X=3.285
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r145 3 54 600 $w=1.7e-07 $l=2.59374e-07 $layer=licon1_PDIFF $count=1 $X=2.385
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r146 3 21 600 $w=1.7e-07 $l=8.01499e-07 $layer=licon1_PDIFF $count=1 $X=2.385
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r147 2 47 182 $w=1.7e-07 $l=5.85662e-07 $layer=licon1_NDIFF $count=1 $X=5.22
+ $Y=0.37 $X2=5.43 $Y2=0.86
r148 1 35 182 $w=1.7e-07 $l=5.15267e-07 $layer=licon1_NDIFF $count=1 $X=4.29
+ $Y=0.37 $X2=4.43 $Y2=0.82
.ends
.subckt PM_SKY130_FD_SC_HS__O21BAI_4%A_27_74# 1 2 3 4 5 6 7 24 26 27 30 32 36 38
+ 42 45 46 51 52 53 56 58 62 64 65 66 67
c114 42 0 1.44963e-19 $X=2.91 $Y=0.515
r115 60 62 3.14303 $w=3.28e-07 $l=9e-08 $layer=LI1_cond $X=5.93 $Y=0.425
+ $X2=5.93 $Y2=0.515
r116 59 67 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=5.095 $Y=0.34
+ $X2=4.93 $Y2=0.34
r117 58 60 7.76618 $w=1.7e-07 $l=2.03101e-07 $layer=LI1_cond $X=5.765 $Y=0.34
+ $X2=5.93 $Y2=0.425
r118 58 59 43.7112 $w=1.68e-07 $l=6.7e-07 $layer=LI1_cond $X=5.765 $Y=0.34
+ $X2=5.095 $Y2=0.34
r119 54 67 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=4.93 $Y=0.425
+ $X2=4.93 $Y2=0.34
r120 54 56 7.33373 $w=3.28e-07 $l=2.1e-07 $layer=LI1_cond $X=4.93 $Y=0.425
+ $X2=4.93 $Y2=0.635
r121 52 67 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=4.765 $Y=0.34
+ $X2=4.93 $Y2=0.34
r122 52 53 43.7112 $w=1.68e-07 $l=6.7e-07 $layer=LI1_cond $X=4.765 $Y=0.34
+ $X2=4.095 $Y2=0.34
r123 49 51 2.61919 $w=3.28e-07 $l=7.5e-08 $layer=LI1_cond $X=3.93 $Y=0.67
+ $X2=3.93 $Y2=0.595
r124 48 53 7.76618 $w=1.7e-07 $l=2.03101e-07 $layer=LI1_cond $X=3.93 $Y=0.425
+ $X2=4.095 $Y2=0.34
r125 48 51 5.93683 $w=3.28e-07 $l=1.7e-07 $layer=LI1_cond $X=3.93 $Y=0.425
+ $X2=3.93 $Y2=0.595
r126 47 66 2.76166 $w=1.7e-07 $l=1.25e-07 $layer=LI1_cond $X=3.075 $Y=0.755
+ $X2=2.95 $Y2=0.755
r127 46 49 7.76618 $w=1.7e-07 $l=2.03101e-07 $layer=LI1_cond $X=3.765 $Y=0.755
+ $X2=3.93 $Y2=0.67
r128 46 47 45.016 $w=1.68e-07 $l=6.9e-07 $layer=LI1_cond $X=3.765 $Y=0.755
+ $X2=3.075 $Y2=0.755
r129 44 66 3.70735 $w=2.5e-07 $l=8.5e-08 $layer=LI1_cond $X=2.95 $Y=0.84
+ $X2=2.95 $Y2=0.755
r130 44 45 7.83661 $w=2.48e-07 $l=1.7e-07 $layer=LI1_cond $X=2.95 $Y=0.84
+ $X2=2.95 $Y2=1.01
r131 40 66 3.70735 $w=2.5e-07 $l=8.5e-08 $layer=LI1_cond $X=2.95 $Y=0.67
+ $X2=2.95 $Y2=0.755
r132 40 42 7.14515 $w=2.48e-07 $l=1.55e-07 $layer=LI1_cond $X=2.95 $Y=0.67
+ $X2=2.95 $Y2=0.515
r133 39 65 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=2.135 $Y=1.095
+ $X2=2.05 $Y2=1.095
r134 38 45 7.14316 $w=1.7e-07 $l=1.62019e-07 $layer=LI1_cond $X=2.825 $Y=1.095
+ $X2=2.95 $Y2=1.01
r135 38 39 45.016 $w=1.68e-07 $l=6.9e-07 $layer=LI1_cond $X=2.825 $Y=1.095
+ $X2=2.135 $Y2=1.095
r136 34 65 1.34256 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=2.05 $Y=1.01
+ $X2=2.05 $Y2=1.095
r137 34 36 32.2941 $w=1.68e-07 $l=4.95e-07 $layer=LI1_cond $X=2.05 $Y=1.01
+ $X2=2.05 $Y2=0.515
r138 33 64 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=1.275 $Y=1.095
+ $X2=1.19 $Y2=1.095
r139 32 65 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=1.965 $Y=1.095
+ $X2=2.05 $Y2=1.095
r140 32 33 45.016 $w=1.68e-07 $l=6.9e-07 $layer=LI1_cond $X=1.965 $Y=1.095
+ $X2=1.275 $Y2=1.095
r141 28 64 1.34256 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=1.19 $Y=1.01
+ $X2=1.19 $Y2=1.095
r142 28 30 32.2941 $w=1.68e-07 $l=4.95e-07 $layer=LI1_cond $X=1.19 $Y=1.01
+ $X2=1.19 $Y2=0.515
r143 26 64 5.16603 $w=1.7e-07 $l=8.5e-08 $layer=LI1_cond $X=1.105 $Y=1.095
+ $X2=1.19 $Y2=1.095
r144 26 27 48.2781 $w=1.68e-07 $l=7.4e-07 $layer=LI1_cond $X=1.105 $Y=1.095
+ $X2=0.365 $Y2=1.095
r145 22 27 7.14316 $w=1.7e-07 $l=1.62019e-07 $layer=LI1_cond $X=0.24 $Y=1.01
+ $X2=0.365 $Y2=1.095
r146 22 24 22.8184 $w=2.48e-07 $l=4.95e-07 $layer=LI1_cond $X=0.24 $Y=1.01
+ $X2=0.24 $Y2=0.515
r147 7 62 91 $w=1.7e-07 $l=2.73038e-07 $layer=licon1_NDIFF $count=2 $X=5.72
+ $Y=0.37 $X2=5.93 $Y2=0.515
r148 6 56 182 $w=1.7e-07 $l=3.54789e-07 $layer=licon1_NDIFF $count=1 $X=4.72
+ $Y=0.37 $X2=4.93 $Y2=0.635
r149 5 51 182 $w=1.7e-07 $l=2.86575e-07 $layer=licon1_NDIFF $count=1 $X=3.79
+ $Y=0.37 $X2=3.93 $Y2=0.595
r150 4 42 91 $w=1.7e-07 $l=2.03286e-07 $layer=licon1_NDIFF $count=2 $X=2.77
+ $Y=0.37 $X2=2.91 $Y2=0.515
r151 3 36 91 $w=1.7e-07 $l=2.03286e-07 $layer=licon1_NDIFF $count=2 $X=1.91
+ $Y=0.37 $X2=2.05 $Y2=0.515
r152 2 30 91 $w=1.7e-07 $l=2.03286e-07 $layer=licon1_NDIFF $count=2 $X=1.05
+ $Y=0.37 $X2=1.19 $Y2=0.515
r153 1 24 91 $w=1.7e-07 $l=2.05061e-07 $layer=licon1_NDIFF $count=2 $X=0.135
+ $Y=0.37 $X2=0.28 $Y2=0.515
.ends
.subckt PM_SKY130_FD_SC_HS__O21BAI_4%VGND 1 2 3 4 5 18 22 26 30 32 34 37 38 40
+ 41 42 44 49 61 69 72 76
c97 34 0 1.3105e-19 $X=6.92 $Y=0.665
r98 75 76 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=6.96 $Y=0 $X2=6.96
+ $Y2=0
r99 72 73 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.68 $Y=0 $X2=1.68
+ $Y2=0
r100 69 70 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.72 $Y=0 $X2=0.72
+ $Y2=0
r101 67 76 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=6.48 $Y=0 $X2=6.96
+ $Y2=0
r102 66 67 2.65714 $w=1.7e-07 $l=5.95e-07 $layer=mcon $count=3 $X=6.48 $Y=0
+ $X2=6.48 $Y2=0
r103 63 66 187.893 $w=1.68e-07 $l=2.88e-06 $layer=LI1_cond $X=3.6 $Y=0 $X2=6.48
+ $Y2=0
r104 61 75 4.73651 $w=1.7e-07 $l=2.22e-07 $layer=LI1_cond $X=6.755 $Y=0
+ $X2=6.977 $Y2=0
r105 61 66 17.9412 $w=1.68e-07 $l=2.75e-07 $layer=LI1_cond $X=6.755 $Y=0
+ $X2=6.48 $Y2=0
r106 59 60 4.65 $w=1.7e-07 $l=3.4e-07 $layer=mcon $count=2 $X=3.12 $Y=0 $X2=3.12
+ $Y2=0
r107 57 60 0.267585 $w=4.9e-07 $l=9.6e-07 $layer=MET1_cond $X=2.16 $Y=0 $X2=3.12
+ $Y2=0
r108 57 73 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=2.16 $Y=0 $X2=1.68
+ $Y2=0
r109 56 57 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=2.16 $Y=0 $X2=2.16
+ $Y2=0
r110 54 72 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=1.785 $Y=0 $X2=1.62
+ $Y2=0
r111 54 56 24.4652 $w=1.68e-07 $l=3.75e-07 $layer=LI1_cond $X=1.785 $Y=0
+ $X2=2.16 $Y2=0
r112 53 73 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=1.2 $Y=0 $X2=1.68
+ $Y2=0
r113 53 70 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=1.2 $Y=0 $X2=0.72
+ $Y2=0
r114 52 53 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=1.2 $Y=0 $X2=1.2
+ $Y2=0
r115 50 69 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=0.875 $Y=0 $X2=0.71
+ $Y2=0
r116 50 52 21.2032 $w=1.68e-07 $l=3.25e-07 $layer=LI1_cond $X=0.875 $Y=0 $X2=1.2
+ $Y2=0
r117 49 72 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=1.455 $Y=0 $X2=1.62
+ $Y2=0
r118 49 52 16.6364 $w=1.68e-07 $l=2.55e-07 $layer=LI1_cond $X=1.455 $Y=0 $X2=1.2
+ $Y2=0
r119 47 70 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=0.24 $Y=0 $X2=0.72
+ $Y2=0
r120 46 47 9.3 $w=1.7e-07 $l=1.7e-07 $layer=mcon $count=1 $X=0.24 $Y=0 $X2=0.24
+ $Y2=0
r121 44 69 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=0.545 $Y=0 $X2=0.71
+ $Y2=0
r122 44 46 19.8984 $w=1.68e-07 $l=3.05e-07 $layer=LI1_cond $X=0.545 $Y=0
+ $X2=0.24 $Y2=0
r123 42 67 0.802756 $w=4.9e-07 $l=2.88e-06 $layer=MET1_cond $X=3.6 $Y=0 $X2=6.48
+ $Y2=0
r124 42 60 0.133793 $w=4.9e-07 $l=4.8e-07 $layer=MET1_cond $X=3.6 $Y=0 $X2=3.12
+ $Y2=0
r125 42 63 2.65714 $w=1.7e-07 $l=5.95e-07 $layer=mcon $count=3 $X=3.6 $Y=0
+ $X2=3.6 $Y2=0
r126 40 59 8.80749 $w=1.68e-07 $l=1.35e-07 $layer=LI1_cond $X=3.255 $Y=0
+ $X2=3.12 $Y2=0
r127 40 41 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=3.255 $Y=0 $X2=3.42
+ $Y2=0
r128 39 63 0.97861 $w=1.68e-07 $l=1.5e-08 $layer=LI1_cond $X=3.585 $Y=0 $X2=3.6
+ $Y2=0
r129 39 41 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=3.585 $Y=0 $X2=3.42
+ $Y2=0
r130 37 56 10.1123 $w=1.68e-07 $l=1.55e-07 $layer=LI1_cond $X=2.315 $Y=0
+ $X2=2.16 $Y2=0
r131 37 38 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.315 $Y=0 $X2=2.48
+ $Y2=0
r132 36 59 30.9893 $w=1.68e-07 $l=4.75e-07 $layer=LI1_cond $X=2.645 $Y=0
+ $X2=3.12 $Y2=0
r133 36 38 8.61065 $w=1.7e-07 $l=1.65e-07 $layer=LI1_cond $X=2.645 $Y=0 $X2=2.48
+ $Y2=0
r134 32 75 3.02966 $w=3.3e-07 $l=1.09864e-07 $layer=LI1_cond $X=6.92 $Y=0.085
+ $X2=6.977 $Y2=0
r135 32 34 20.2551 $w=3.28e-07 $l=5.8e-07 $layer=LI1_cond $X=6.92 $Y=0.085
+ $X2=6.92 $Y2=0.665
r136 28 41 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=3.42 $Y=0.085
+ $X2=3.42 $Y2=0
r137 28 30 8.73063 $w=3.28e-07 $l=2.5e-07 $layer=LI1_cond $X=3.42 $Y=0.085
+ $X2=3.42 $Y2=0.335
r138 24 38 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=2.48 $Y=0.085
+ $X2=2.48 $Y2=0
r139 24 26 20.6043 $w=3.28e-07 $l=5.9e-07 $layer=LI1_cond $X=2.48 $Y=0.085
+ $X2=2.48 $Y2=0.675
r140 20 72 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=1.62 $Y=0.085
+ $X2=1.62 $Y2=0
r141 20 22 20.6043 $w=3.28e-07 $l=5.9e-07 $layer=LI1_cond $X=1.62 $Y=0.085
+ $X2=1.62 $Y2=0.675
r142 16 69 0.89609 $w=3.3e-07 $l=8.5e-08 $layer=LI1_cond $X=0.71 $Y=0.085
+ $X2=0.71 $Y2=0
r143 16 18 20.6043 $w=3.28e-07 $l=5.9e-07 $layer=LI1_cond $X=0.71 $Y=0.085
+ $X2=0.71 $Y2=0.675
r144 5 34 91 $w=1.7e-07 $l=2.03286e-07 $layer=licon1_NDIFF $count=2 $X=6.78
+ $Y=0.52 $X2=6.92 $Y2=0.665
r145 4 30 182 $w=1.7e-07 $l=2.36854e-07 $layer=licon1_NDIFF $count=1 $X=3.2
+ $Y=0.37 $X2=3.42 $Y2=0.335
r146 3 26 182 $w=1.7e-07 $l=3.68409e-07 $layer=licon1_NDIFF $count=1 $X=2.34
+ $Y=0.37 $X2=2.48 $Y2=0.675
r147 2 22 182 $w=1.7e-07 $l=3.68409e-07 $layer=licon1_NDIFF $count=1 $X=1.48
+ $Y=0.37 $X2=1.62 $Y2=0.675
r148 1 18 182 $w=1.7e-07 $l=3.68409e-07 $layer=licon1_NDIFF $count=1 $X=0.57
+ $Y=0.37 $X2=0.71 $Y2=0.675
.ends