| * Copyright 2020 The SkyWater PDK Authors |
| * |
| * Licensed under the Apache License, Version 2.0 (the "License"); |
| * you may not use this file except in compliance with the License. |
| * You may obtain a copy of the License at |
| * |
| * https://www.apache.org/licenses/LICENSE-2.0 |
| * |
| * Unless required by applicable law or agreed to in writing, software |
| * distributed under the License is distributed on an "AS IS" BASIS, |
| * WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied. |
| * See the License for the specific language governing permissions and |
| * limitations under the License. |
| |
| * SKY130 Spice File. |
| * statistics { |
| * mismatch { |
| * } |
| * } |
| * 4-terminal Vertical Parallel Plate Capacitor /w LI-M4 fingers and M5 Shield |
| * 4-terminal Vertical Parallel Plate Capacitor /w M1-M4 fingers and M5 Shield |
| * Layout: sky130_fd_pr__cap_vpp_11p5x11p7_m1m2m3m4_shieldm5 |
| .subckt sky130_fd_pr__cap_vpp_11p5x11p7_m1m2m3m4_shieldm5 c0 c1 b m5 |
| + |
| .param mult = 1 presim_flag = 0.0 |
| + |
| + ctot_a = {108.40e-15*sky130_fd_pr__cap_vpp_11p5x11p7_m1m2m3m4_shieldl1m5__cor+0.0283/sqrt(11.5*11.7*2*mult)*108.40e-15*sky130_fd_pr__cap_vpp_11p5x11p7_m1m2m3m4_shieldl1m5__cor*sky130_fd_pr__model__cap_vpp_only_p__slope} |
| + cm5_c0 = {(5.04+presim_flag*1.26)*1e-15*c0m5m4_vpp} |
| + cm5_c1 = {3.88e-15*c1m5m4_vpp} |
| + c02s = {(3.69+presim_flag*0.54)*1e-15*cli2s_vpp} |
| + c12s = {1.66e-15*cli2s_vpp} |
| + rat_m4 = 0.1426 |
| + rat_m3 = 0.1426 |
| + rat_m2 = 0.3585 |
| + rat_m1 = 0.3563 |
| + cap_m4 = {rat_m4*ctot_a} |
| + cap_m3 = {rat_m3*ctot_a} |
| + cap_m2 = {rat_m2*ctot_a} |
| + cap_m1 = {rat_m1*ctot_a} |
| + lm1 = 5.215 |
| + lm2 = 5.095 |
| + lm3 = 5.050 |
| + lm4 = 4.910 |
| + wm1 = 0.140 |
| + wm2 = 0.140 |
| + wm3 = 0.300 |
| + wm4 = 0.300 |
| + nfm1 = 72.0 |
| + nfm2 = 72.0 |
| + nfm3 = 34.0 |
| + nfm4 = 34.0 |
| + nvia3_c0 = 103.0 |
| + nvia3_c1 = 49.0 |
| + nvia2_c0 = 104.0 |
| + nvia2_c1 = 49.0 |
| + nvia_c0 = 124.0 |
| + nvia_c1 = 62.0 |
| cm5_0 m5 a0 c = {cm5_c0} |
| cm5_1 m5 a1 c = {cm5_c1} |
| rsm4 a0 a2 r = {rm4*lm4/wm4*(1/3)*(1/nfm4)} |
| cm4 a2 a1 c = {cap_m4} |
| rvia3_0 a0 b0 r = {rcvia3/nvia3_c0} |
| rvia3_1 a1 b1 r = {rcvia3/nvia3_c1} |
| rsm3 b0 b2 r = {rm3*lm3/wm3*(1/3)*(1/nfm3)} |
| cm3 b2 b1 c = {cap_m3} |
| rvia2_0 b0 c0 r = {rcvia2/nvia2_c0} |
| rvia2_1 b1 c1 r = {rcvia2/nvia2_c1} |
| rsm2 c0 c2 r = {rm2*lm2/wm2*(1/3)*(1/nfm2)} |
| ccmvpp11p5x11p7_m1m4m5shield c2 c1 c = {cap_m2} |
| rvia_0 c0 d0 r = {rcvia/nvia_c0} |
| rvia_1 c1 d1 r = {rcvia/nvia_c1} |
| rsm1 d0 d2 r = {rm1*lm1/wm1*(1/3)*(1/nfm1)} |
| cm1 d2 d1 c = {cap_m1} |
| c0_sub d0 b c = {c02s} |
| c1_sub d1 b c = {c12s} |
| .ends sky130_fd_pr__cap_vpp_11p5x11p7_m1m2m3m4_shieldm5 |
