040000 tree 65efeb3fb6f6b7e31c5f73df84c2457986ebf796	sky130_fd_sc_hd
040000 tree 033a353c20d6d80c66bad440665a173625d49b2e	sky130_fd_sc_hdll
040000 tree 82349e522e7ee671c73b1f821d2cce8af02caa14	sky130_fd_sc_hs
040000 tree 06de07e6b246802d72de64d2a050b7aa69e4685b	sky130_fd_sc_ls
040000 tree 69cd82d0ed017d68fb43428511b22258b7ad7295	sky130_fd_sc_ms