040000 tree 45adcca287b0668ffa38dfa663ab42cd494b6431	sky130_fd_sc_hd
040000 tree e973be468428f0fdefd79f37d083639b950aa303	sky130_fd_sc_hdll
040000 tree 841f0d1bec2d2265032e950b4def1913533d148f	sky130_fd_sc_hs
040000 tree 508617aa459fc7fe9393bff926efe19432987561	sky130_fd_sc_ls
040000 tree 07fb8bdc6b6e9af680aef1c2974dc9d00dbf2d54	sky130_fd_sc_ms