| Layer,CD,licon,,li1,,mcon,,metal1,,via,,metal2,,via2,,metal3, |
| Parameter,width,spc,enc,spc,enc,spc,enc,spc,enc,spc,enc,spc,enc,spc,enc,spc,enc |
| li1,0.170,undefined,0.000,0.170,X,X,X,X,X,X,X,X,X,X,X,X,X |
| mcon,0.170,-,-,-,0.000,0.190,X,X,X,X,X,X,X,X,X,X,X |
| metal1,0.140,-,-,-,-,-,0.03/ 0.06,0.140,X,X,X,X,X,X,X,X,X |
| via,0.150,-,-,-,-,-,-,-,0.055 / 0.085,0.170,X,X,X,X,X,X,X |
| metal2,0.140,-,-,-,-,-,-,-,-,-,0.055 / 0.085,0.140,X,X,X,X,X |
| via2,0.280,-,-,-,-,-,-,-,-,-,-,-,0.040,0.280,X,X,X |
| metal3,0.360,-,-,-,-,-,-,-,-,-,-,-,-,-,0.045 / 0.07,0.360,X |
| ,All enclosures in tables are nominal and do not apply to butting edges or corners.,,,,,,,,,,,,,,,, |
