Symbol,Explanation,Unit
PI,Perimeter of Interconnect,um
FLT,Final Layer thickness,um
W,Width of  MOS Transistor,um
L,Length of  MOS Transistor,um
A,Area of  MOS Transistor gate (= W x L),um2
CA,Area of contact or via,um2
SW,Sidewall area (= PI x FLT),um2
EA,"Etched area (= CA for horizontal, = SW for vertical areas)",um2